WO2009008194A1 - Système pour éliminer les substances nuisibles d'un gaz d'échappement - Google Patents

Système pour éliminer les substances nuisibles d'un gaz d'échappement Download PDF

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Publication number
WO2009008194A1
WO2009008194A1 PCT/JP2008/055382 JP2008055382W WO2009008194A1 WO 2009008194 A1 WO2009008194 A1 WO 2009008194A1 JP 2008055382 W JP2008055382 W JP 2008055382W WO 2009008194 A1 WO2009008194 A1 WO 2009008194A1
Authority
WO
WIPO (PCT)
Prior art keywords
exhaust gas
piping
removing harm
individual
exhaust
Prior art date
Application number
PCT/JP2008/055382
Other languages
English (en)
Japanese (ja)
Inventor
Yoshihiko Inoue
Yoshinari Matsushita
Hiroshi Imamura
Original Assignee
Kanken Techno Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanken Techno Co., Ltd. filed Critical Kanken Techno Co., Ltd.
Priority to JP2008526706A priority Critical patent/JP5356813B2/ja
Publication of WO2009008194A1 publication Critical patent/WO2009008194A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/346—Controlling the process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)

Abstract

L'invention porte sur un système pour éliminer les substances nuisibles d'une haute capacité de gaz d'échappement de façon sûre sans danger tout en simplifiant la gestion de l'opération et en présentant une excellente maintenabilité. Le système (10) pour éliminer les substances nuisibles de gaz d'échappement comprend une conduite principale (12) pour recueillir un gaz d'échappement (E) déchargé à partir d'un appareil de production de semi-conducteurs, une pluralité d'unités (16) reliées à la conduite principale (12) par une conduite d'entrée individuelle (14) à l'intérieur et éliminant les substances nuisibles du gaz d'échappement (E) introduit par la conduite d'entrée individuelle (14), et un conduit d'échappement (20) relié à chaque unité (16) par une conduite de sortie individuelle (18) à laquelle un ventilateur d'échappement (40) est fixé et déchargeant dans l'atmosphère le gaz d'échappement (E) traité à travers chaque unité (16) tout en se collectant, un détecteur de pression d'entrée (24) pour la mesure de la pression dans chaque conduite d'entrée individuelle (14) étant fixé et un contrôleur (22) commandant le nombre de révolutions de chaque ventilateur de sortie (40) de telle sorte que la pression mesurée par chaque détecteur de pression d'entrée (24) devienne constante.
PCT/JP2008/055382 2007-07-06 2008-03-24 Système pour éliminer les substances nuisibles d'un gaz d'échappement WO2009008194A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008526706A JP5356813B2 (ja) 2007-07-06 2008-03-24 排ガス除害システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007178224 2007-07-06
JP2007-178224 2007-07-06

Publications (1)

Publication Number Publication Date
WO2009008194A1 true WO2009008194A1 (fr) 2009-01-15

Family

ID=40228383

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055382 WO2009008194A1 (fr) 2007-07-06 2008-03-24 Système pour éliminer les substances nuisibles d'un gaz d'échappement

Country Status (2)

Country Link
JP (1) JP5356813B2 (fr)
WO (1) WO2009008194A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010207771A (ja) * 2009-03-12 2010-09-24 Jx Nippon Oil & Energy Corp 排ガス処理装置および排ガス処理方法
TWI741880B (zh) * 2019-11-21 2021-10-01 益科斯有限公司 處理氣體汙染物的裝置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102467035B1 (ko) * 2017-11-13 2022-11-14 에스케이하이닉스 주식회사 반도체 소자 제조 설비 제어 방법
KR102434335B1 (ko) * 2020-11-27 2022-08-18 대구대학교 산학협력단 사이클론과 촉매를 활용하여 전자부품 후 공정에서 배출된 유해가스의 오염물질을 포집하기 위한 포집 시스템

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004290901A (ja) * 2003-03-28 2004-10-21 Nishimatsu Constr Co Ltd 窒素酸化物の除去装置および窒素酸化物の除去方法
JP2005279320A (ja) * 2004-03-26 2005-10-13 Toshiba Corp 排ガス処理システム、排ガス処理方法及び排ガス処理制御システム
JP2007029790A (ja) * 2005-07-22 2007-02-08 Hitachi Ltd 過弗化物含有排ガスの処理方法及び処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004290901A (ja) * 2003-03-28 2004-10-21 Nishimatsu Constr Co Ltd 窒素酸化物の除去装置および窒素酸化物の除去方法
JP2005279320A (ja) * 2004-03-26 2005-10-13 Toshiba Corp 排ガス処理システム、排ガス処理方法及び排ガス処理制御システム
JP2007029790A (ja) * 2005-07-22 2007-02-08 Hitachi Ltd 過弗化物含有排ガスの処理方法及び処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010207771A (ja) * 2009-03-12 2010-09-24 Jx Nippon Oil & Energy Corp 排ガス処理装置および排ガス処理方法
TWI741880B (zh) * 2019-11-21 2021-10-01 益科斯有限公司 處理氣體汙染物的裝置

Also Published As

Publication number Publication date
JP5356813B2 (ja) 2013-12-04
JPWO2009008194A1 (ja) 2010-09-02

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