WO2008153155A1 - パターン形成用表面処理剤、及び該処理剤を用いたパターン形成方法 - Google Patents

パターン形成用表面処理剤、及び該処理剤を用いたパターン形成方法 Download PDF

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Publication number
WO2008153155A1
WO2008153155A1 PCT/JP2008/060908 JP2008060908W WO2008153155A1 WO 2008153155 A1 WO2008153155 A1 WO 2008153155A1 JP 2008060908 W JP2008060908 W JP 2008060908W WO 2008153155 A1 WO2008153155 A1 WO 2008153155A1
Authority
WO
WIPO (PCT)
Prior art keywords
resist pattern
treatment agent
pattern
surface treatment
resist
Prior art date
Application number
PCT/JP2008/060908
Other languages
English (en)
French (fr)
Inventor
Masahiro Yoshidome
Original Assignee
Fujifilm Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujifilm Corporation filed Critical Fujifilm Corporation
Priority to US12/664,570 priority Critical patent/US20100183978A1/en
Priority to EP08777219A priority patent/EP2159641A1/en
Publication of WO2008153155A1 publication Critical patent/WO2008153155A1/ja

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G03F7/405—Treatment with inorganic or organometallic reagents after imagewise removal
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

　第一のレジスト膜上に第一のレジストパターンを形成した後、第一のレジストパターンの上に第二のレジスト膜を形成し第二のレジストパターンを形成するために、第一のレジストパターンに対して化学的な処理を行って第二のレジスト液に溶解しないように性状を変化させるフリージングプロセスにおいて、第一のレジストパターンが第二のレジスト液に溶解せず、第一のレジストパターンの寸法が変化しない、更には、第一のレジストパターンと第二のレジストパターンのドライエッチング耐性が同じであるという要件を満たすように、本発明は、第一のレジストパターンに対して化学的な処理を行う為のフリージングプロセス用の表面処理剤として、アミノ基および芳香族環を有する特定の化合物を含有する表面処理剤、そして該表面処理剤を用いたパターン形成方法を提供する。
PCT/JP2008/060908 2007-06-15 2008-06-13 パターン形成用表面処理剤、及び該処理剤を用いたパターン形成方法 WO2008153155A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/664,570 US20100183978A1 (en) 2007-06-15 2008-06-13 Surface-treating agent for pattern formation and pattern forming method using the treating agent
EP08777219A EP2159641A1 (en) 2007-06-15 2008-06-13 Surface treatment agent for forming pattern and pattern forming method using the treatment agent

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-158839 2007-06-15
JP2007158839 2007-06-15

Publications (1)

Publication Number Publication Date
WO2008153155A1 true WO2008153155A1 (ja) 2008-12-18

Family

ID=40129758

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060908 WO2008153155A1 (ja) 2007-06-15 2008-06-13 パターン形成用表面処理剤、及び該処理剤を用いたパターン形成方法

Country Status (5)

Country Link
US (1) US20100183978A1 (ja)
EP (1) EP2159641A1 (ja)
JP (1) JP2009020510A (ja)
KR (1) KR20100030616A (ja)
WO (1) WO2008153155A1 (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5222111B2 (ja) * 2008-11-26 2013-06-26 東京応化工業株式会社 レジスト表面改質液及びこれを利用したレジストパターン形成方法
TWI403520B (zh) * 2009-05-25 2013-08-01 Shinetsu Chemical Co 光阻改質用組成物及圖案形成方法
JP5516200B2 (ja) * 2009-08-05 2014-06-11 信越化学工業株式会社 パターン形成方法、化学増幅ポジ型レジスト材料、及び、レジスト変性用組成物
JP2011107690A (ja) * 2009-10-21 2011-06-02 Sumitomo Chemical Co Ltd レジストパターンの製造方法
KR101941908B1 (ko) * 2011-12-16 2019-01-24 후지필름 가부시키가이샤 레지스트 박리액 및 레지스트 박리 방법
JP6448903B2 (ja) * 2012-12-31 2019-01-09 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ イオン注入法
JP6122754B2 (ja) * 2013-09-30 2017-04-26 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、感活性光線性又は感放射線性膜、感活性光線性又は感放射線性膜を備えたマスクブランクス、パターン形成方法、及び電子デバイスの製造方法
JP6349408B2 (ja) * 2014-09-30 2018-06-27 富士フイルム株式会社 パターン形成方法、レジストパターン、及び、電子デバイスの製造方法
CN106716257B (zh) * 2014-09-30 2019-12-24 富士胶片株式会社 图案形成方法、抗蚀剂图案及电子元件的制造方法
KR101888886B1 (ko) * 2014-09-30 2018-08-16 후지필름 가부시키가이샤 패턴 형성 방법, 상층막 형성용 조성물, 레지스트 패턴, 및 전자 디바이스의 제조 방법
WO2016136354A1 (ja) * 2015-02-26 2016-09-01 富士フイルム株式会社 パターン形成方法、レジストパターン、電子デバイスの製造方法、及び、電子デバイス
JP6415374B2 (ja) * 2015-03-31 2018-10-31 東京応化工業株式会社 フォトリソグラフィ用現像液及びレジストパターン形成方法
KR101982559B1 (ko) * 2015-05-29 2019-05-27 후지필름 가부시키가이샤 패턴 형성 방법, 레지스트 패턴, 전자 디바이스의 제조 방법, 및 상층막 형성용 조성물
TW202305924A (zh) * 2021-06-24 2023-02-01 日商東京威力科創股份有限公司 基板處理方法及基板處理系統

Citations (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3779778A (en) 1972-02-09 1973-12-18 Minnesota Mining & Mfg Photosolubilizable compositions and elements
US3849137A (en) 1971-10-12 1974-11-19 Basf Ag Lithographic printing plates and photoresists comprising a photosensitive polymer
JPS55164824A (en) 1979-06-05 1980-12-22 Basf Ag Positiveeprocessing layerrtype transfer print material
EP0126712A1 (de) 1983-05-18 1984-11-28 Ciba-Geigy Ag Härtbare Zusammensetzung und deren Verwendung
JPS61226746A (ja) 1985-03-30 1986-10-08 Japan Synthetic Rubber Co Ltd 半導体集積回路製造用のスピンコート用レジスト組成物
JPS61226745A (ja) 1985-03-30 1986-10-08 Japan Synthetic Rubber Co Ltd 半導体集積回路製造用のスピンコート用レジスト組成物
JPS6236663A (ja) 1985-08-12 1987-02-17 Mitsubishi Chem Ind Ltd ナフトキノンジアジド系化合物及び該化合物を含有するポジ型フオトレジスト組成物
JPS6269263A (ja) 1985-09-24 1987-03-30 Toshiba Corp 感光性組成物
JPS62153853A (ja) 1985-12-27 1987-07-08 Toshiba Corp 感光性組成物
JPS62170950A (ja) 1986-01-23 1987-07-28 Fuji Photo Film Co Ltd 感光性組成物
JPS6326653A (ja) 1986-07-21 1988-02-04 Tosoh Corp フオトレジスト材
JPS6334540A (ja) 1986-07-30 1988-02-15 Mitsubishi Chem Ind Ltd ポジ型フオトレジスト組成物
JPS63146029A (ja) 1986-12-10 1988-06-18 Toshiba Corp 感光性組成物
JPS63146038A (ja) 1986-12-10 1988-06-18 Toshiba Corp 感光性組成物
JPS63163452A (ja) 1986-12-17 1988-07-06 チバ−ガイギー　アクチェンゲゼルシャフト 画像形成方法
DE3914407A1 (de) 1989-04-29 1990-10-31 Basf Ag Strahlungsempfindliche polymere und positiv arbeitendes aufzeichnungsmaterial
US5294511A (en) 1990-01-16 1994-03-15 Fuji Photo Film Co., Ltd. Photosensitive composition
US5296330A (en) 1991-08-30 1994-03-22 Ciba-Geigy Corp. Positive photoresists containing quinone diazide photosensitizer, alkali-soluble resin and tetra(hydroxyphenyl) alkane additive
US5360692A (en) 1992-06-04 1994-11-01 Fuji Photo Film Co., Ltd. Positive type 1,2-naphthoquinonediazide photoresist composition containing benzotriazole light absorbing agent
US5405720A (en) 1985-08-07 1995-04-11 Japan Synthetic Rubber Co., Ltd. Radiation-sensitive composition containing 1,2 quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent
JPH07230165A (ja) 1993-06-30 1995-08-29 Tokyo Ohka Kogyo Co Ltd ポジ型ホトレジスト組成物
JPH0862834A (ja) 1994-08-22 1996-03-08 Mitsubishi Chem Corp フォトレジスト組成物
US5529881A (en) 1994-03-17 1996-06-25 Fuji Photo Film Co., Ltd. Postive photoresist composition
US5576143A (en) 1991-12-03 1996-11-19 Fuji Photo Film Co., Ltd. Light-sensitive composition
JPH095988A (ja) 1995-06-21 1997-01-10 Mitsubishi Chem Corp 感放射線性塗布組成物
JPH0954432A (ja) 1995-08-18 1997-02-25 Dainippon Ink & Chem Inc フォトレジスト組成物
US5824451A (en) 1994-07-04 1998-10-20 Fuji Photo Film Co., Ltd. Positive photosensitive composition
JP2000089477A (ja) * 1998-09-11 2000-03-31 Nec Corp レジストパターンの形成方法
JP2002090991A (ja) 2000-09-13 2002-03-27 Fuji Photo Film Co Ltd ポジ型レジスト組成物
JP2002277862A (ja) 2001-03-21 2002-09-25 Nippon Hoso Kyokai <Nhk> 液晶光変調器及びそれを用いた表示装置
JP2005181379A (ja) * 2003-12-16 2005-07-07 Matsushita Electric Ind Co Ltd パターン形成方法
JP2005197349A (ja) 2004-01-05 2005-07-21 Semiconductor Leading Edge Technologies Inc 微細パターン形成方法及び半導体装置の製造方法
WO2005116776A1 (ja) * 2004-05-26 2005-12-08 Jsr Corporation 微細パターン形成用樹脂組成物および微細パターン形成方法
WO2006022246A1 (ja) * 2004-08-25 2006-03-02 Renesas Technology Corp. 微細パターン形成材料、微細レジストパターン形成方法及び電子デバイス装置
JP2006208721A (ja) * 2005-01-27 2006-08-10 Nippon Telegr & Teleph Corp <Ntt> レジストパターン形成方法
JP2006307179A (ja) * 2005-03-29 2006-11-09 Jsr Corp 重合体
WO2008038526A1 (fr) * 2006-09-28 2008-04-03 Tokyo Ohka Kogyo Co., Ltd. Procédé de formation d'un motif, et matériau pour formation de film d'enrobage

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090253080A1 (en) * 2008-04-02 2009-10-08 Dammel Ralph R Photoresist Image-Forming Process Using Double Patterning
US20090253081A1 (en) * 2008-04-02 2009-10-08 David Abdallah Process for Shrinking Dimensions Between Photoresist Pattern Comprising a Pattern Hardening Step
US20090253078A1 (en) * 2008-04-07 2009-10-08 Sokudo Co., Ltd. Double exposure lithography using low temperature oxide and uv cure process
US7981592B2 (en) * 2008-04-11 2011-07-19 Sandisk 3D Llc Double patterning method
US20100040838A1 (en) * 2008-08-15 2010-02-18 Abdallah David J Hardmask Process for Forming a Reverse Tone Image
US20100183851A1 (en) * 2009-01-21 2010-07-22 Yi Cao Photoresist Image-forming Process Using Double Patterning

Patent Citations (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3849137A (en) 1971-10-12 1974-11-19 Basf Ag Lithographic printing plates and photoresists comprising a photosensitive polymer
US3779778A (en) 1972-02-09 1973-12-18 Minnesota Mining & Mfg Photosolubilizable compositions and elements
JPS55164824A (en) 1979-06-05 1980-12-22 Basf Ag Positiveeprocessing layerrtype transfer print material
EP0126712A1 (de) 1983-05-18 1984-11-28 Ciba-Geigy Ag Härtbare Zusammensetzung und deren Verwendung
JPS61226746A (ja) 1985-03-30 1986-10-08 Japan Synthetic Rubber Co Ltd 半導体集積回路製造用のスピンコート用レジスト組成物
JPS61226745A (ja) 1985-03-30 1986-10-08 Japan Synthetic Rubber Co Ltd 半導体集積回路製造用のスピンコート用レジスト組成物
US5405720A (en) 1985-08-07 1995-04-11 Japan Synthetic Rubber Co., Ltd. Radiation-sensitive composition containing 1,2 quinonediazide compound, alkali-soluble resin and monooxymonocarboxylic acid ester solvent
JPS6236663A (ja) 1985-08-12 1987-02-17 Mitsubishi Chem Ind Ltd ナフトキノンジアジド系化合物及び該化合物を含有するポジ型フオトレジスト組成物
JPS6269263A (ja) 1985-09-24 1987-03-30 Toshiba Corp 感光性組成物
JPS62153853A (ja) 1985-12-27 1987-07-08 Toshiba Corp 感光性組成物
JPS62170950A (ja) 1986-01-23 1987-07-28 Fuji Photo Film Co Ltd 感光性組成物
JPS6326653A (ja) 1986-07-21 1988-02-04 Tosoh Corp フオトレジスト材
JPS6334540A (ja) 1986-07-30 1988-02-15 Mitsubishi Chem Ind Ltd ポジ型フオトレジスト組成物
JPS63146029A (ja) 1986-12-10 1988-06-18 Toshiba Corp 感光性組成物
JPS63146038A (ja) 1986-12-10 1988-06-18 Toshiba Corp 感光性組成物
JPS63163452A (ja) 1986-12-17 1988-07-06 チバ−ガイギー　アクチェンゲゼルシャフト 画像形成方法
DE3914407A1 (de) 1989-04-29 1990-10-31 Basf Ag Strahlungsempfindliche polymere und positiv arbeitendes aufzeichnungsmaterial
US5294511A (en) 1990-01-16 1994-03-15 Fuji Photo Film Co., Ltd. Photosensitive composition
US5296330A (en) 1991-08-30 1994-03-22 Ciba-Geigy Corp. Positive photoresists containing quinone diazide photosensitizer, alkali-soluble resin and tetra(hydroxyphenyl) alkane additive
US5436098A (en) 1991-08-30 1995-07-25 Ciba-Geigy Corporation Positive photoresists with enhanced resolution and reduced crystallization containing novel tetra(hydroxyphenyl)alkanes
US5576143A (en) 1991-12-03 1996-11-19 Fuji Photo Film Co., Ltd. Light-sensitive composition
US5360692A (en) 1992-06-04 1994-11-01 Fuji Photo Film Co., Ltd. Positive type 1,2-naphthoquinonediazide photoresist composition containing benzotriazole light absorbing agent
JPH07230165A (ja) 1993-06-30 1995-08-29 Tokyo Ohka Kogyo Co Ltd ポジ型ホトレジスト組成物
US5529881A (en) 1994-03-17 1996-06-25 Fuji Photo Film Co., Ltd. Postive photoresist composition
US5824451A (en) 1994-07-04 1998-10-20 Fuji Photo Film Co., Ltd. Positive photosensitive composition
JPH0862834A (ja) 1994-08-22 1996-03-08 Mitsubishi Chem Corp フォトレジスト組成物
JPH095988A (ja) 1995-06-21 1997-01-10 Mitsubishi Chem Corp 感放射線性塗布組成物
JPH0954432A (ja) 1995-08-18 1997-02-25 Dainippon Ink & Chem Inc フォトレジスト組成物
JP2000089477A (ja) * 1998-09-11 2000-03-31 Nec Corp レジストパターンの形成方法
JP2002090991A (ja) 2000-09-13 2002-03-27 Fuji Photo Film Co Ltd ポジ型レジスト組成物
JP2002277862A (ja) 2001-03-21 2002-09-25 Nippon Hoso Kyokai <Nhk> 液晶光変調器及びそれを用いた表示装置
JP2005181379A (ja) * 2003-12-16 2005-07-07 Matsushita Electric Ind Co Ltd パターン形成方法
JP2005197349A (ja) 2004-01-05 2005-07-21 Semiconductor Leading Edge Technologies Inc 微細パターン形成方法及び半導体装置の製造方法
WO2005116776A1 (ja) * 2004-05-26 2005-12-08 Jsr Corporation 微細パターン形成用樹脂組成物および微細パターン形成方法
WO2006022246A1 (ja) * 2004-08-25 2006-03-02 Renesas Technology Corp. 微細パターン形成材料、微細レジストパターン形成方法及び電子デバイス装置
JP2006208721A (ja) * 2005-01-27 2006-08-10 Nippon Telegr & Teleph Corp <Ntt> レジストパターン形成方法
JP2006307179A (ja) * 2005-03-29 2006-11-09 Jsr Corp 重合体
WO2008038526A1 (fr) * 2006-09-28 2008-04-03 Tokyo Ohka Kogyo Co., Ltd. Procédé de formation d'un motif, et matériau pour formation de film d'enrobage

Non-Patent Citations (10)

* Cited by examiner, † Cited by third party
Title
BULL. CL. SCI. ACAD. R. BELG., 1902, pages 721
CHEM. ABSTR., 1948, pages 6335
CHEM. BER., vol. 112, 1979, pages 3950 - 3954
J. AM. CHEM. SOC., vol. 69, 1947, pages 599,600
J. HETEROCYCL. CHEM., vol. 8, 1971, pages 327 - 328
J. MED. CHEM., EN, vol. 36, no. 26, 1933, pages 4195 - 4200
J. MED. CHEM., EN, vol. 6, no. 26, 1933, pages 4195 - 4200
J. VAC. SCI. TECHNOL., vol. B 4, 1986, pages 426
JUSTUS LIEBIGS ANN. CHEM., vol. 361, 1908, pages 149
MONATSH. CHEM., vol. 57, 1955, pages 66

Also Published As

Publication number Publication date
EP2159641A1 (en) 2010-03-03
JP2009020510A (ja) 2009-01-29
US20100183978A1 (en) 2010-07-22
KR20100030616A (ko) 2010-03-18

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