WO2008149752A1 - 水素センサ - Google Patents

水素センサ Download PDF

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Publication number
WO2008149752A1
WO2008149752A1 PCT/JP2008/059833 JP2008059833W WO2008149752A1 WO 2008149752 A1 WO2008149752 A1 WO 2008149752A1 JP 2008059833 W JP2008059833 W JP 2008059833W WO 2008149752 A1 WO2008149752 A1 WO 2008149752A1
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WO
WIPO (PCT)
Prior art keywords
layer
thin film
catalyst layer
film layer
catalyst
Prior art date
Application number
PCT/JP2008/059833
Other languages
English (en)
French (fr)
Inventor
Naoki Uchiyama
Kazuki Yoshimura
Original Assignee
Kabushiki Kaisha Atsumitec
National Institute Of Advanced Industrial Science And Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kabushiki Kaisha Atsumitec, National Institute Of Advanced Industrial Science And Technology filed Critical Kabushiki Kaisha Atsumitec
Priority to CA2688568A priority Critical patent/CA2688568C/en
Priority to US12/602,984 priority patent/US20100178209A1/en
Priority to EP08776948.5A priority patent/EP2154528B1/en
Priority to CN2008800189054A priority patent/CN101680863B/zh
Publication of WO2008149752A1 publication Critical patent/WO2008149752A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N21/78—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour
    • G01N21/783—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator producing a change of colour for analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
    • G01N2021/7769—Measurement method of reaction-produced change in sensor
    • G01N2021/7773—Reflection

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Medicinal Chemistry (AREA)
  • Biophysics (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Molecular Biology (AREA)
  • Nanotechnology (AREA)
  • Composite Materials (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

　水素センサ(10a,10b,10c,10d)では、基板(11)上に薄膜層(12)が形成され、薄膜層(12)上にバッファー層(13)が積層される。更に、水素ガスに触れると薄膜層(12)を水素化して薄膜層(12)の光学的反射率を変化させる触媒層(14)がバッファー層(13)上に積層される。薄膜層(12)から触媒層(14)へ拡散した成分は、バッファー層(13)から触媒層(14)に拡散した成分と結合し、触媒層(14)の酸化が防止される。その結果、薄膜層(12)の水素化の繰り返しに伴って生じる触媒層(14)等の酸化が防止され、水素センサ(10a,10b,10c,10d)の水素検出感度の低下が抑制される。  
PCT/JP2008/059833 2007-06-04 2008-05-28 水素センサ WO2008149752A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA2688568A CA2688568C (en) 2007-06-04 2008-05-28 Hydrogen sensor
US12/602,984 US20100178209A1 (en) 2007-06-04 2008-05-28 Hydrogen Sensor
EP08776948.5A EP2154528B1 (en) 2007-06-04 2008-05-28 Hydrogen sensor
CN2008800189054A CN101680863B (zh) 2007-06-04 2008-05-28 氢传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-148001 2007-06-04
JP2007148001A JP5164435B2 (ja) 2007-06-04 2007-06-04 水素センサ

Publications (1)

Publication Number Publication Date
WO2008149752A1 true WO2008149752A1 (ja) 2008-12-11

Family

ID=40093571

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059833 WO2008149752A1 (ja) 2007-06-04 2008-05-28 水素センサ

Country Status (7)

Country Link
US (1) US20100178209A1 (ja)
EP (1) EP2154528B1 (ja)
JP (1) JP5164435B2 (ja)
KR (1) KR101470669B1 (ja)
CN (1) CN101680863B (ja)
CA (1) CA2688568C (ja)
WO (1) WO2008149752A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5150533B2 (ja) * 2009-03-06 2013-02-20 株式会社アツミテック 水素センサ
JP5789357B2 (ja) * 2010-04-14 2015-10-07 株式会社アツミテック 水素センサ
US8048384B1 (en) * 2010-08-31 2011-11-01 University Of Central Florida Research Foundation, Inc. Chemochromic hydrogen sensors
CN104730114A (zh) * 2013-12-19 2015-06-24 中国科学院上海硅酸盐研究所 一种用于氢气传感器的镁合金薄膜及其制备方法
CN105289588A (zh) * 2014-07-28 2016-02-03 中国科学院上海硅酸盐研究所 一种钯合金催化薄膜材料及其制备方法
WO2018055925A1 (ja) * 2016-09-23 2018-03-29 国立研究開発法人産業技術総合研究所 水素感知素子及び水素センサー
CN109715552B (zh) 2016-09-23 2022-05-13 国立研究开发法人产业技术综合研究所 吸氢体、气致变色式调光元件、氢敏元件及氢传感器
KR102143526B1 (ko) * 2017-07-31 2020-08-11 아주대학교산학협력단 가역적인 수소 가스 검출이 가능한 수소 센서
CN107643358B (zh) * 2017-08-22 2021-07-06 中国船舶重工集团公司第七一八研究所 一种基于催化复合放热原理的氢气传感器
US10617104B2 (en) 2017-11-17 2020-04-14 Mark S. Semons Fly reel with tool free channel locking drag system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02165034A (ja) * 1988-12-19 1990-06-26 Sanyo Electric Co Ltd 水素ガスセンサー
JP2003147463A (ja) * 2001-11-02 2003-05-21 Toyota Central Res & Dev Lab Inc 対水素反応素子およびそれを用いた水素検出装置
JP2005083832A (ja) 2003-09-05 2005-03-31 National Institute Of Advanced Industrial & Technology 光学反射率変化を用いる水素センサ、水素検出方法及び検出装置
WO2007108276A1 (ja) * 2006-03-20 2007-09-27 Kabushiki Kaisha Atsumitec 水素センサ
WO2007108261A1 (ja) * 2006-03-17 2007-09-27 Kabushiki Kaisha Atsumitec 水素ガス検知装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6647166B2 (en) * 2000-08-17 2003-11-11 The Regents Of The University Of California Electrochromic materials, devices and process of making
US6762871B2 (en) * 2002-03-11 2004-07-13 National Institute Of Advanced Industrial Science And Technology Switchable mirror glass using magnesium-containing thin film
WO2005096403A2 (en) * 2004-03-31 2005-10-13 Matsushita Electric Industrial Co., Ltd. Organic photoelectric conversion element utilizing an inorganic buffer layer placed between an electrode and the active material
JP5105140B2 (ja) * 2005-09-12 2012-12-19 独立行政法人産業技術総合研究所 全固体型反射調光エレクトロクロミック素子及びそれを用いた調光部材
JP4158862B2 (ja) * 2005-10-17 2008-10-01 株式会社アツミテック 水素ガス可視化装置
NL1030299C2 (nl) * 2005-10-28 2007-05-03 Advanced Chem Tech Optische schakelinrichting.

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02165034A (ja) * 1988-12-19 1990-06-26 Sanyo Electric Co Ltd 水素ガスセンサー
JP2003147463A (ja) * 2001-11-02 2003-05-21 Toyota Central Res & Dev Lab Inc 対水素反応素子およびそれを用いた水素検出装置
JP2005083832A (ja) 2003-09-05 2005-03-31 National Institute Of Advanced Industrial & Technology 光学反射率変化を用いる水素センサ、水素検出方法及び検出装置
WO2007108261A1 (ja) * 2006-03-17 2007-09-27 Kabushiki Kaisha Atsumitec 水素ガス検知装置
WO2007108276A1 (ja) * 2006-03-20 2007-09-27 Kabushiki Kaisha Atsumitec 水素センサ

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
BAO S. ET AL.: "Titanium-buffer-layer-inserted switchable mirror based on MgNi alloy thin film", JPN. J. APPL. PHYS., vol. 45, no. 23, 2006, pages L588 - L590, XP008122483 *
PASTUREL M. ET AL.: "Stabilized switchable "black state" in Mg2NiH4/Ti/Pd thin films for optical hydrogen sensing", APPL. PHYS. LETT., vol. 89, no. 2, 2006, pages 021913-1 - 021913-3, XP012086944 *
See also references of EP2154528A4
YOSHIMURA K.: "Gas Chromism (Gas Chromic Glass)", OPTICAL AND ELECTRO-OPTICAL ENGINEERING CONTACT, vol. 45, no. 10, 2007, pages 516 - 520, XP008122488 *

Also Published As

Publication number Publication date
EP2154528B1 (en) 2018-01-24
JP5164435B2 (ja) 2013-03-21
US20100178209A1 (en) 2010-07-15
JP2008298724A (ja) 2008-12-11
CN101680863A (zh) 2010-03-24
CN101680863B (zh) 2012-07-04
EP2154528A4 (en) 2016-08-24
KR101470669B1 (ko) 2014-12-08
KR20100025513A (ko) 2010-03-09
EP2154528A1 (en) 2010-02-17
CA2688568A1 (en) 2008-12-11
CA2688568C (en) 2016-03-15

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