WO2008147247A2 - Spectromètre magnétique électronique - Google Patents

Spectromètre magnétique électronique Download PDF

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Publication number
WO2008147247A2
WO2008147247A2 PCT/RU2008/000168 RU2008000168W WO2008147247A2 WO 2008147247 A2 WO2008147247 A2 WO 2008147247A2 RU 2008000168 W RU2008000168 W RU 2008000168W WO 2008147247 A2 WO2008147247 A2 WO 2008147247A2
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic field
vacuum chamber
energy analyzer
radius
energy
Prior art date
Application number
PCT/RU2008/000168
Other languages
English (en)
Russian (ru)
Other versions
WO2008147247A3 (fr
Inventor
Irina Nikolaevna Shabanova
Viktor Aleksandrovich Trapeznikov
Yuri Georgievich Manakov
Rosa Anvarovnavna Nurullina
Original Assignee
Irina Nikolaevna Shabanova
Trapeznikov Viktor Aleksandrov
Rosa Anvarovnavna Nurullina
Yuri Georgievich Manakov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irina Nikolaevna Shabanova, Trapeznikov Viktor Aleksandrov, Rosa Anvarovnavna Nurullina, Yuri Georgievich Manakov filed Critical Irina Nikolaevna Shabanova
Publication of WO2008147247A2 publication Critical patent/WO2008147247A2/fr
Publication of WO2008147247A3 publication Critical patent/WO2008147247A3/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/463—Static spectrometers using static magnetic fields

Definitions

  • the invention relates to the field of research and analysis of materials by radiation methods and can be used to diagnose the structure and composition of the surface and surface layers of solid and liquid bodies.
  • the magnetic energy analyzer is made in the form of two pairs of circular electrical circuits (coils), coaxial with the annular chamber, located symmetrically with respect to the neutral plane of the chamber and connected to the power supply.
  • One pair of coils is located on the inside of the annular chamber, and the other pair is on the outside.
  • the Earth’s magnetic field compensation system consists of several pairs of electrical circuits connected to a power source.
  • the disadvantages of the known device are complexity, large dimensions, weight and cost of the device, as well as limited functionality. This is due to the large size of the energy analyzer, as well as the presence of large-sized electrical circuits of the Earth's magnetic field compensation system.
  • the energy analyzer is configured to obtain a magnetic field in an annular chamber that varies in radius in accordance with the formula ⁇ P "where H is the magnetic field strength and p is the radius of the electron orbit.
  • the present invention is aimed at simplifying the device, reducing its dimensions, weight and cost of the device, expanding its functionality.
  • the electrical circuits of the energy analyzer are configured to create a magnetic field in the vacuum chamber, depending on the radius p of the electron orbit in accordance with the expression:
  • H ⁇ p " ⁇ , where H is the magnetic field strength, ⁇ 0.62-0.76.
  • the slit diaphragm and the electron detector are made with the possibility of movement in the plane of the cross section of the energy analyzer and fixation in a given position.
  • SUBSTITUTE SHEET (RULE 26) device capabilities (the ability to install in a production line, manufacturing portable devices, etc.).
  • the parameter ⁇ is selected less than 0.62 and more than 0.76, the resolution of the device deteriorates by an order of magnitude. Due to a significant (more than two orders of magnitude) increase in the magnetic field strength with a decrease in the radius of the electron orbit in the working space of the energy analyzer (vacuum chamber), the dependence of the spectrometer parameters on the external magnetic field of the Earth sharply decreases. This allows you to get rid of special systems for compensating the magnetic field or significantly simplify them, reduce the size and weight of its electrical circuits.
  • Fig. L shows a General view of the device in plan, in Fig. 2 - in section (along A-A).
  • An electronic magnetic spectrometer contains (Fig. 1, 2) a vacuum chamber (for example, an annular) 1, an excitation source 2 (an X-ray tube, an electron or ion gun, etc.) for acting on the test sample 3, a slit diaphragm 4, mounted in front of a 5 electron detector, and an energy analyzer made in the form of two pairs of 6 and 7 electric circular circuits (coils) installed outside the vacuum chamber 1. Amperevitas of the coils and their placement (diameters and distances from the neutral plane) are selected so that
  • the energy analyzer coils are connected to the power supply (not shown in the figures).
  • the slotted diaphragm 4 and the detector 5 are made with the possibility of movement (shown by arrows in Fig. 1, 2) in the plane of the cross-section of the energy analyzer and fixation in a predetermined position.
  • the device operates as follows. Under the action of the excitation source 2 (Fig. L, 2), photo- or Auger-electrons are emitted from the test object 3, which in the vacuum chamber 1 undergo the double focusing (along the radius R and axis under the influence of the inhomogeneous magnetic field of the energy analyzer (coils 6, 7) Z of the energy analyzer), separated by energies, and pass through the slit diaphragm 4 to the electron detector 5 and the spectrum recording system (not shown in the figures).
  • the influence of the horizontal components of the Earth’s magnetic field is eliminated by choosing the position of the slit diaphragm 4 and the detector 5 in the plane of the cross section of the energy analyzer, at which the maximum intensity of the spectrum is observed, and fixing in this position.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

La présente invention relève du domaine de l'examen et l'analyse de matériaux par rayonnements et peut être utilisée pour le diagnostic de la structure et de la composition de la surface et de couches proches de la surface de corps solides et liquides. Cette invention vise à simplifier la structure d'un dispositif, à réduire ses dimensions, son poids, ainsi que son coût et d'élargir ses fonctionnalités. Pour ce faire, le spectromètre magnétique électronique de cette invention comprend une chambre à vide, un analyseur d'énergie se présentant sous la forme de circuits électriques circulaires, un diaphragme à fente, ainsi qu'un détecteur d'électrons, lesdits circuits électriques de l'analyseur d'énergie étant conçus de façon qu'ils puissent créer, dans la chambre à vide, un champ magnétique dépendant du rayon ρ de l'orbite des électrons conformément à la formule H∼ρ-α dans laquelle H désigne l'intensité du champ magnétique et α=0,62-0,76. En outre, le diaphragme à fente et le détecteur d'électrons sont conçus de façon qu'ils puissent être déplacés dans le plan de la section transversale de l'analyseur d'énergie et fixés dans une position donnée.
PCT/RU2008/000168 2007-01-30 2008-03-21 Spectromètre magnétique électronique WO2008147247A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2007103658 2007-01-30
RU2007103658/28A RU2338295C1 (ru) 2007-01-30 2007-01-30 Электронный магнитный спектрометр

Publications (2)

Publication Number Publication Date
WO2008147247A2 true WO2008147247A2 (fr) 2008-12-04
WO2008147247A3 WO2008147247A3 (fr) 2009-02-12

Family

ID=40075689

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU2008/000168 WO2008147247A2 (fr) 2007-01-30 2008-03-21 Spectromètre magnétique électronique

Country Status (2)

Country Link
RU (1) RU2338295C1 (fr)
WO (1) WO2008147247A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113075721A (zh) * 2021-03-26 2021-07-06 中国工程物理研究院上海激光等离子体研究所 一种大量程便携式多功能电子磁谱仪

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2531808C1 (ru) * 2013-04-05 2014-10-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования Ижевский государственный технический университет имени М.Т. Калашникова Ускоритель заряженных частиц
RU2551651C2 (ru) * 2013-04-05 2015-05-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования Ижевский государственный технический университет имени М.Т. Калашникова Высокочастотный электронно-ионный микроскоп
RU2559288C1 (ru) * 2014-05-05 2015-08-10 Общество с ограниченной ответственностью "ИНФОРМАЦИОННЫЕ ТЕХНОЛОГИИ" Способ аккумуляции энергии потока заряженных частиц
RU2624735C2 (ru) * 2015-11-09 2017-07-06 федеральное государственное бюджетное образовательное учреждение высшего образования "Ижевский государственный технический университет имени М.Т. Калашникова" Индукционный ускоритель

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993016486A1 (fr) * 1992-02-17 1993-08-19 Dca Instruments Oy Procede de spectrosopie electronique et spectrometre electronique
EP0617452A1 (fr) * 1993-03-26 1994-09-28 FISONS plc Analyseur de particules chargées
SU1814427A1 (ru) * 1988-11-23 1995-04-20 Физико-технический институт им.А.Ф.Иоффе Электростатический спектрометр для энергетического и углового анализа заряженных частиц
RU2086037C1 (ru) * 1991-06-17 1997-07-27 Научно-исследовательский технологический институт Электростатический анализатор энергии заряженных частиц
RU2005119721A (ru) * 2005-06-17 2006-12-27 Николай Алексеевич Холин (RU) Анализатор энергий заряженных частиц

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1814427A1 (ru) * 1988-11-23 1995-04-20 Физико-технический институт им.А.Ф.Иоффе Электростатический спектрометр для энергетического и углового анализа заряженных частиц
RU2086037C1 (ru) * 1991-06-17 1997-07-27 Научно-исследовательский технологический институт Электростатический анализатор энергии заряженных частиц
WO1993016486A1 (fr) * 1992-02-17 1993-08-19 Dca Instruments Oy Procede de spectrosopie electronique et spectrometre electronique
EP0617452A1 (fr) * 1993-03-26 1994-09-28 FISONS plc Analyseur de particules chargées
RU2005119721A (ru) * 2005-06-17 2006-12-27 Николай Алексеевич Холин (RU) Анализатор энергий заряженных частиц

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113075721A (zh) * 2021-03-26 2021-07-06 中国工程物理研究院上海激光等离子体研究所 一种大量程便携式多功能电子磁谱仪
CN113075721B (zh) * 2021-03-26 2022-09-30 中国工程物理研究院上海激光等离子体研究所 一种大量程便携式多功能电子磁谱仪

Also Published As

Publication number Publication date
WO2008147247A3 (fr) 2009-02-12
RU2338295C1 (ru) 2008-11-10

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