WO2008143222A1 - 白金測温抵抗素子の製造方法 - Google Patents
白金測温抵抗素子の製造方法 Download PDFInfo
- Publication number
- WO2008143222A1 WO2008143222A1 PCT/JP2008/059157 JP2008059157W WO2008143222A1 WO 2008143222 A1 WO2008143222 A1 WO 2008143222A1 JP 2008059157 W JP2008059157 W JP 2008059157W WO 2008143222 A1 WO2008143222 A1 WO 2008143222A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- chamber
- platinum
- oxygen
- purge gas
- temperature
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
- G01K1/10—Protective devices, e.g. casings for preventing chemical attack
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/065—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thick film techniques, e.g. serigraphy
- H01C17/06506—Precursor compositions therefor, e.g. pastes, inks, glass frits
- H01C17/06513—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component
- H01C17/06533—Precursor compositions therefor, e.g. pastes, inks, glass frits characterised by the resistive component composed of oxides
- H01C17/0654—Oxides of the platinum group
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Thermistors And Varistors (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/600,756 US8247040B2 (en) | 2007-05-18 | 2008-05-19 | Process for manufacturing platinum temperature-measuring resistance element |
CN200880016142XA CN101680808B (zh) | 2007-05-18 | 2008-05-19 | 铂测温电阻元件的制造方法 |
EP08752953A EP2151675A4 (en) | 2007-05-18 | 2008-05-19 | METHOD FOR PRODUCING A TEMPERATURE-MEASURING PLATINUM RESISTANCE ELEMENT |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007133394 | 2007-05-18 | ||
JP2007-133394 | 2007-05-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008143222A1 true WO2008143222A1 (ja) | 2008-11-27 |
Family
ID=40031919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/059157 WO2008143222A1 (ja) | 2007-05-18 | 2008-05-19 | 白金測温抵抗素子の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8247040B2 (ja) |
EP (1) | EP2151675A4 (ja) |
JP (1) | JP5163277B2 (ja) |
CN (1) | CN101680808B (ja) |
WO (1) | WO2008143222A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5163276B2 (ja) * | 2007-05-18 | 2013-03-13 | アズビル株式会社 | 白金抵抗温度計の製造方法 |
CN109029755B (zh) * | 2018-06-01 | 2020-12-25 | 湖南江麓仪器仪表有限公司 | 用于提高铠装铂电阻温度计响应时间的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02121302A (ja) * | 1988-10-31 | 1990-05-09 | Mazda Motor Corp | 貴金属薄膜抵抗体とその製造方法 |
JPH07201521A (ja) * | 1993-12-28 | 1995-08-04 | Ricoh Co Ltd | Pt薄膜およびその製膜方法 |
JP2001291607A (ja) * | 2000-04-04 | 2001-10-19 | Mitsui Mining & Smelting Co Ltd | 白金薄膜抵抗体の製造方法 |
JP2001296186A (ja) * | 2000-04-14 | 2001-10-26 | Tokyo Electron Ltd | 温度測定装置及び方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2527739C3 (de) * | 1975-06-21 | 1978-08-31 | W.C. Heraeus Gmbh, 6450 Hanau | Verfahren zur Herstellung eines elektrischen Meßwiderstandes für ein Widerstandsthermometer |
CN85204630U (zh) * | 1985-11-05 | 1986-08-27 | 庞凤荣 | 抗氧化组装钨铼系热电偶 |
US4719443A (en) * | 1986-04-03 | 1988-01-12 | General Electric Company | Low capacitance power resistor using beryllia dielectric heat sink layer and low toxicity method for its manufacture |
JP2517587B2 (ja) | 1987-04-03 | 1996-07-24 | 株式会社 ネツシン | 白金測温素子の製造方法 |
JPH06507521A (ja) * | 1991-02-15 | 1994-08-25 | シーメンス アクチエンゲゼルシヤフト | 高温センサ技術のための高速白金族金属温度センサ用装置 |
DE10020932C5 (de) * | 2000-04-28 | 2004-12-30 | Zitzmann, Heinrich, Dr. | Temperaturmessfühler und Verfahren zur Herstellung desselben |
CN1407320A (zh) * | 2001-09-13 | 2003-04-02 | 上海浦东新区台华仪电科技研究所 | 铂热电阻温度传感器 |
JP3924460B2 (ja) | 2001-12-12 | 2007-06-06 | 多摩電気工業株式会社 | 白金薄膜素子 |
JP5163276B2 (ja) * | 2007-05-18 | 2013-03-13 | アズビル株式会社 | 白金抵抗温度計の製造方法 |
-
2008
- 2008-05-16 JP JP2008129960A patent/JP5163277B2/ja active Active
- 2008-05-19 CN CN200880016142XA patent/CN101680808B/zh not_active Expired - Fee Related
- 2008-05-19 WO PCT/JP2008/059157 patent/WO2008143222A1/ja active Application Filing
- 2008-05-19 EP EP08752953A patent/EP2151675A4/en not_active Withdrawn
- 2008-05-19 US US12/600,756 patent/US8247040B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02121302A (ja) * | 1988-10-31 | 1990-05-09 | Mazda Motor Corp | 貴金属薄膜抵抗体とその製造方法 |
JPH07201521A (ja) * | 1993-12-28 | 1995-08-04 | Ricoh Co Ltd | Pt薄膜およびその製膜方法 |
JP2001291607A (ja) * | 2000-04-04 | 2001-10-19 | Mitsui Mining & Smelting Co Ltd | 白金薄膜抵抗体の製造方法 |
JP2001296186A (ja) * | 2000-04-14 | 2001-10-26 | Tokyo Electron Ltd | 温度測定装置及び方法 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2151675A4 * |
Also Published As
Publication number | Publication date |
---|---|
CN101680808A (zh) | 2010-03-24 |
US20100151148A1 (en) | 2010-06-17 |
JP2009004764A (ja) | 2009-01-08 |
EP2151675A1 (en) | 2010-02-10 |
EP2151675A4 (en) | 2013-03-13 |
CN101680808B (zh) | 2011-11-02 |
JP5163277B2 (ja) | 2013-03-13 |
US8247040B2 (en) | 2012-08-21 |
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