WO2008139514A1 - 薄膜磁気ヘッドの製造方法 - Google Patents

薄膜磁気ヘッドの製造方法 Download PDF

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Publication number
WO2008139514A1
WO2008139514A1 PCT/JP2007/059149 JP2007059149W WO2008139514A1 WO 2008139514 A1 WO2008139514 A1 WO 2008139514A1 JP 2007059149 W JP2007059149 W JP 2007059149W WO 2008139514 A1 WO2008139514 A1 WO 2008139514A1
Authority
WO
WIPO (PCT)
Prior art keywords
pole
trimming
magnetic head
nonmagnetic film
forming
Prior art date
Application number
PCT/JP2007/059149
Other languages
English (en)
French (fr)
Inventor
Takashi Ito
Kaoru Yamakawa
Masaya Kato
Masanori Tachibana
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2007/059149 priority Critical patent/WO2008139514A1/ja
Publication of WO2008139514A1 publication Critical patent/WO2008139514A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109—Details
    • G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G11B5/3169—Working or finishing the interfacing surface of heads, e.g. lapping of heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

　薄膜の積層方向の断面の形状が逆台形状に形成された磁極の、積層方向上端位置におけるコア幅を、より設計値に近く高精度に形成することのできる薄膜磁気ヘッドの製造方法を提供する。 　薄膜の積層方向の断面の形状が逆台形状に形成された磁極８０ａを形成する磁極形成工程と、磁極８０ａを非磁性膜８１で覆う非磁性膜形成工程と、磁極８０ａおよび非磁性膜８１を、前記積層方向に垂直な面で削る第１削除工程と、磁極８０ａの形状を測定する磁極測定工程と、磁極８０ａおよび非磁性膜８１をイオンミルで削る第２削除工程とを含み、第２削除工程後の磁極８０ａの上端位置におけるコア幅が設計値となるよう、第２削除工程における削り量を、前記磁極測定工程で測定した磁極８０ａの形状に基づいて調節する。
PCT/JP2007/059149 2007-04-27 2007-04-27 薄膜磁気ヘッドの製造方法 WO2008139514A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059149 WO2008139514A1 (ja) 2007-04-27 2007-04-27 薄膜磁気ヘッドの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059149 WO2008139514A1 (ja) 2007-04-27 2007-04-27 薄膜磁気ヘッドの製造方法

Publications (1)

Publication Number Publication Date
WO2008139514A1 true WO2008139514A1 (ja) 2008-11-20

Family

ID=40001751

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/059149 WO2008139514A1 (ja) 2007-04-27 2007-04-27 薄膜磁気ヘッドの製造方法

Country Status (1)

Country Link
WO (1) WO2008139514A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005018918A (ja) * 2003-06-26 2005-01-20 Tdk Corp 薄膜磁気ヘッドおよびその製造方法、ならびに磁気記録装置
JP2005149682A (ja) * 2003-11-20 2005-06-09 Alps Electric Co Ltd 磁気ヘッドの製造方法
JP2005235316A (ja) * 2004-02-20 2005-09-02 Alps Electric Co Ltd 磁気ヘッド、およびその製造方法
JP2006107697A (ja) * 2004-10-07 2006-04-20 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005018918A (ja) * 2003-06-26 2005-01-20 Tdk Corp 薄膜磁気ヘッドおよびその製造方法、ならびに磁気記録装置
JP2005149682A (ja) * 2003-11-20 2005-06-09 Alps Electric Co Ltd 磁気ヘッドの製造方法
JP2005235316A (ja) * 2004-02-20 2005-09-02 Alps Electric Co Ltd 磁気ヘッド、およびその製造方法
JP2006107697A (ja) * 2004-10-07 2006-04-20 Headway Technologies Inc 垂直磁気記録用磁気ヘッドおよびその製造方法

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