WO2008136404A1 - 光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法 - Google Patents

光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法 Download PDF

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Publication number
WO2008136404A1
WO2008136404A1 PCT/JP2008/058058 JP2008058058W WO2008136404A1 WO 2008136404 A1 WO2008136404 A1 WO 2008136404A1 JP 2008058058 W JP2008058058 W JP 2008058058W WO 2008136404 A1 WO2008136404 A1 WO 2008136404A1
Authority
WO
WIPO (PCT)
Prior art keywords
reflection surface
optical member
device manufacturing
interferometer system
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/058058
Other languages
English (en)
French (fr)
Inventor
Yosuke Kuriyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2009512976A priority Critical patent/JPWO2008136404A1/ja
Publication of WO2008136404A1 publication Critical patent/WO2008136404A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02021—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different faces of object, e.g. opposite faces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/12—Reflex reflectors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/15—Cat eye, i.e. reflection always parallel to incoming beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

　光学部材は、第１方向に関する位置情報を計測するために光が照射される。光学部材は、第１方向と交差する第２方向に進行する光が入射する第１反射面と、第２方向に進行する光が入射する第２反射面とを備える。第１反射面と第２反射面とは光学的に接続され、第１反射面及び第２反射面の一方で反射した光は他方に入射する。
PCT/JP2008/058058 2007-04-27 2008-04-25 光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法 Ceased WO2008136404A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009512976A JPWO2008136404A1 (ja) 2007-04-27 2008-04-25 光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-120335 2007-04-27
JP2007120335 2007-04-27

Publications (1)

Publication Number Publication Date
WO2008136404A1 true WO2008136404A1 (ja) 2008-11-13

Family

ID=39943511

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058058 Ceased WO2008136404A1 (ja) 2007-04-27 2008-04-25 光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法

Country Status (4)

Country Link
US (1) US20090310105A1 (ja)
JP (1) JPWO2008136404A1 (ja)
TW (1) TW200900878A (ja)
WO (1) WO2008136404A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011119303A (ja) * 2009-11-30 2011-06-16 Nikon Corp 干渉計システム、ステージ装置及び露光装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5905729B2 (ja) * 2011-10-26 2016-04-20 Dmg森精機株式会社 変位検出装置
US9568652B1 (en) * 2015-07-21 2017-02-14 Lockheed Martin Corporation Reflecting prism, and related components, systems, and methods
NL2030825B1 (en) * 2022-02-04 2023-08-15 Vdl Enabling Tech Group B V Position detection system using laser light interferometry.

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10170217A (ja) * 1996-12-12 1998-06-26 Mitsubishi Electric Corp 測長装置
WO2007001017A1 (ja) * 2005-06-28 2007-01-04 Nikon Corporation 反射部材、光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7193726B2 (en) * 2001-08-23 2007-03-20 Zygo Corporation Optical interferometry
US7130056B2 (en) * 2004-02-20 2006-10-31 Agilent Technologies, Inc. System and method of using a side-mounted interferometer to acquire position information

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10170217A (ja) * 1996-12-12 1998-06-26 Mitsubishi Electric Corp 測長装置
WO2007001017A1 (ja) * 2005-06-28 2007-01-04 Nikon Corporation 反射部材、光学部材、干渉計システム、ステージ装置、露光装置、及びデバイス製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011119303A (ja) * 2009-11-30 2011-06-16 Nikon Corp 干渉計システム、ステージ装置及び露光装置

Also Published As

Publication number Publication date
US20090310105A1 (en) 2009-12-17
JPWO2008136404A1 (ja) 2010-07-29
TW200900878A (en) 2009-01-01

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