ATE457062T1 - System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteiler - Google Patents
System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteilerInfo
- Publication number
- ATE457062T1 ATE457062T1 AT07301406T AT07301406T ATE457062T1 AT E457062 T1 ATE457062 T1 AT E457062T1 AT 07301406 T AT07301406 T AT 07301406T AT 07301406 T AT07301406 T AT 07301406T AT E457062 T1 ATE457062 T1 AT E457062T1
- Authority
- AT
- Austria
- Prior art keywords
- beam splitter
- micro
- medium
- optical beam
- half plane
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title 1
- 230000002452 interceptive effect Effects 0.000 abstract 4
- 238000001514 detection method Methods 0.000 abstract 1
- 230000001902 propagating effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
- G01B9/02051—Integrated design, e.g. on-chip or monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US84801806P | 2006-09-28 | 2006-09-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE457062T1 true ATE457062T1 (de) | 2010-02-15 |
Family
ID=38920731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07301406T ATE457062T1 (de) | 2006-09-28 | 2007-09-28 | System, verfahren und vorrichtung für ein mikrogefertigtes interferometer mit optischem strahlteiler |
Country Status (5)
Country | Link |
---|---|
US (1) | US7796267B2 (de) |
EP (1) | EP1906159B1 (de) |
JP (1) | JP5204450B2 (de) |
AT (1) | ATE457062T1 (de) |
DE (1) | DE602007004659D1 (de) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5302020B2 (ja) * | 2009-01-26 | 2013-10-02 | 浜松ホトニクス株式会社 | 光モジュール |
EP2475970B1 (de) * | 2009-09-08 | 2021-11-03 | SI-Ware Systems | Kompensierte mems-ftir-spektrometerarchitektur |
WO2011091012A2 (en) * | 2010-01-19 | 2011-07-28 | Si-Ware Systems | Interferometer with variable optical path length reference mirror and applications thereof |
WO2011112676A1 (en) * | 2010-03-09 | 2011-09-15 | Si-Ware Systems | A technique to determine mirror position in optical interferometers |
JP5715481B2 (ja) * | 2011-05-16 | 2015-05-07 | 浜松ホトニクス株式会社 | 光モジュール及びその製造方法 |
JP5739224B2 (ja) | 2011-05-16 | 2015-06-24 | 浜松ホトニクス株式会社 | 光学部品の製造方法及び光学部品 |
JP6040253B2 (ja) * | 2011-10-20 | 2016-12-07 | シーウェア システムズSi−Ware Systems | 3d湾曲光素子を含む集積化されたモノリシック光ベンチ、及びその作製方法 |
US8922787B2 (en) | 2013-01-07 | 2014-12-30 | Si-Ware Systems | Spatial splitting-based optical MEMS interferometers |
US9557556B2 (en) | 2013-03-18 | 2017-01-31 | Si-Ware Systems | Integrated apertured micromirror and applications thereof |
KR102153771B1 (ko) | 2013-08-19 | 2020-09-08 | 하마마츠 포토닉스 가부시키가이샤 | 광 간섭계를 제조하는 방법 |
US9395465B2 (en) | 2014-07-31 | 2016-07-19 | Baker Hughes Incorporated | Gravity and/or acceleration measurements using dual interferometer configurations |
US10562055B2 (en) | 2015-02-20 | 2020-02-18 | Si-Ware Systems | Selective step coverage for micro-fabricated structures |
JP6943452B2 (ja) * | 2016-06-15 | 2021-09-29 | シーウェア システムズSi−Ware Systems | 一体型スペクトルユニット |
JP6704833B2 (ja) * | 2016-10-27 | 2020-06-03 | 浜松ホトニクス株式会社 | 位置検出方法及び光モジュール |
FR3076357B1 (fr) * | 2017-12-29 | 2021-10-22 | Cailabs | Cavite multi passage d’un dispositif optique de manipulation spatiale d’un rayonnement lumineux. |
US11085825B2 (en) | 2018-03-30 | 2021-08-10 | Si-Ware Systems | Self-referenced spectrometer |
US11895779B2 (en) * | 2018-09-20 | 2024-02-06 | Sumitomo Precision Products Co., Ltd. | Substrate processing method |
US11287322B2 (en) * | 2019-02-06 | 2022-03-29 | California Institute Of Technology | Compact hyperspectral mid-infrared spectrometer |
WO2021092579A1 (en) | 2019-11-08 | 2021-05-14 | California Institute Of Technology | Infrared spectrometer having dielectric-polymer-based spectral filter |
US11774289B2 (en) | 2021-11-02 | 2023-10-03 | Saudi Arabian Oil Company | Micro-electromechanical system (MEMS) interferometer for FT-MIR spectroscopy |
US11635369B1 (en) | 2021-11-02 | 2023-04-25 | Saudi Arabian Oil Company | Miniature FT-MIR using a MEMS interferometer with a metasurface emitter and detector |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4632553A (en) | 1985-02-25 | 1986-12-30 | Nicolet Instrument Corporation | Silicon beamsplitter |
US5087124A (en) * | 1989-05-09 | 1992-02-11 | Smith Rosemary L | Interferometric pressure sensor capable of high temperature operation and method of fabrication |
US5159408A (en) * | 1991-03-27 | 1992-10-27 | Hughes Danbury Optical Systems, Inc. | Optical thickness profiler using synthetic wavelengths |
DE4241045C1 (de) | 1992-12-05 | 1994-05-26 | Bosch Gmbh Robert | Verfahren zum anisotropen Ätzen von Silicium |
US5628917A (en) * | 1995-02-03 | 1997-05-13 | Cornell Research Foundation, Inc. | Masking process for fabricating ultra-high aspect ratio, wafer-free micro-opto-electromechanical structures |
IL149016A0 (en) * | 2002-04-07 | 2004-03-28 | Green Vision Systems Ltd Green | Method and device for real time high speed high resolution spectral imaging |
US7180603B2 (en) * | 2003-06-26 | 2007-02-20 | Zygo Corporation | Reduction of thermal non-cyclic error effects in interferometers |
US7349072B2 (en) * | 2003-10-09 | 2008-03-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US20080204879A1 (en) * | 2004-06-25 | 2008-08-28 | Omar Manzardo | Miniature Lamellar Grating Interferometer Based on Silicon Technology |
CA2588095A1 (en) * | 2004-11-18 | 2006-08-17 | Morgan Research Corporation | Miniature fourier transform spectrophotometer |
US7705994B2 (en) * | 2005-11-23 | 2010-04-27 | Agilent Technologies, Inc. | Monolithic displacement measuring interferometer with spatially separated but substantially equivalent optical pathways and optional dual beam outputs |
KR100737177B1 (ko) * | 2006-05-15 | 2007-07-10 | 경북대학교 산학협력단 | 수직 공진 표면광 레이저를 이용한 간섭계 |
US7719693B2 (en) * | 2007-04-23 | 2010-05-18 | The Aerospace Corporation | Interferometry system chamber viewing window |
-
2007
- 2007-09-13 US US11/900,885 patent/US7796267B2/en active Active
- 2007-09-26 JP JP2007248525A patent/JP5204450B2/ja active Active
- 2007-09-28 AT AT07301406T patent/ATE457062T1/de not_active IP Right Cessation
- 2007-09-28 DE DE602007004659T patent/DE602007004659D1/de active Active
- 2007-09-28 EP EP07301406A patent/EP1906159B1/de active Active
Also Published As
Publication number | Publication date |
---|---|
EP1906159B1 (de) | 2010-02-03 |
US7796267B2 (en) | 2010-09-14 |
JP2008102132A (ja) | 2008-05-01 |
DE602007004659D1 (de) | 2010-03-25 |
EP1906159A1 (de) | 2008-04-02 |
US20080080034A1 (en) | 2008-04-03 |
JP5204450B2 (ja) | 2013-06-05 |
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