WO2008129960A1 - 膨張黒鉛シート及びこの膨張黒鉛シートを用いた炭素質ルツボの保護方法並びに単結晶引き上げ装置 - Google Patents

膨張黒鉛シート及びこの膨張黒鉛シートを用いた炭素質ルツボの保護方法並びに単結晶引き上げ装置 Download PDF

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Publication number
WO2008129960A1
WO2008129960A1 PCT/JP2008/057160 JP2008057160W WO2008129960A1 WO 2008129960 A1 WO2008129960 A1 WO 2008129960A1 JP 2008057160 W JP2008057160 W JP 2008057160W WO 2008129960 A1 WO2008129960 A1 WO 2008129960A1
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WIPO (PCT)
Prior art keywords
expandable graphite
graphite sheet
crucible
single crystal
crystal pulling
Prior art date
Application number
PCT/JP2008/057160
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English (en)
French (fr)
Inventor
Yoshiaki Hirose
Tetsuya Yuki
Original Assignee
Toyo Tanso Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co., Ltd. filed Critical Toyo Tanso Co., Ltd.
Priority to EP08740257A priority Critical patent/EP2147991A4/en
Publication of WO2008129960A1 publication Critical patent/WO2008129960A1/ja
Priority to US12/596,476 priority patent/US20100048073A1/en

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/21—After-treatment
    • C01B32/22—Intercalation
    • C01B32/225—Expansion; Exfoliation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/522—Graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C04B35/536—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite based on expanded graphite or complexed graphite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6582—Hydrogen containing atmosphere
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/363—Carbon
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/38—Fiber or whisker reinforced
    • C04B2237/385—Carbon or carbon composite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/10—Scrim [e.g., open net or mesh, gauze, loose or open weave or knit, etc.]
    • Y10T442/102—Woven scrim
    • Y10T442/133—Inorganic fiber-containing scrim
    • Y10T442/134—Including a carbon or carbonized fiber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/60—Nonwoven fabric [i.e., nonwoven strand or fiber material]

Abstract

　引張強度の向上した膨張黒鉛シートを提供する。また、引張強度の向上した膨張黒鉛シートを炭素質ルツボの中敷として使用することにより、作業時間が格段に低減し、しかも、シートを破損することなくルツボの内面に隙間なく覆うことが可能であると共に、ルツボの大型化にも適した炭素質ルツボの保護方法並びに単結晶引き上げ装置を提供する。 　膨張黒鉛シート１０は、膨張黒鉛材料からなる基材１１の少なくとも片面に、炭素繊維からなる補強材１２が積層状に形成されていることを特徴とする。上記膨張黒鉛シート１０を、石英ルツボと該石英ルツボが載置される炭素質ルツボとの間に介在させて炭素質ルツボの内面を覆う中敷に使用することを特徴とする。
PCT/JP2008/057160 2007-04-18 2008-04-11 膨張黒鉛シート及びこの膨張黒鉛シートを用いた炭素質ルツボの保護方法並びに単結晶引き上げ装置 WO2008129960A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08740257A EP2147991A4 (en) 2007-04-18 2008-04-11 EXPOSED GRAPHITE SURFACE IMPACT, METHOD OF PROTECTION OF CARBIDE LUBRICANTS USING THE EXPOSED GRAPHITE SURFACE PATTERN AND CRYSTAL TIGHTENING DEVICE
US12/596,476 US20100048073A1 (en) 2007-04-18 2009-04-11 Expanded graphite sheet, method of protecting carbonaceous crucible using the expanded graphite sheet, and single-crystal pulling apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-109448 2007-04-18
JP2007109448A JP2008266061A (ja) 2007-04-18 2007-04-18 膨張黒鉛シート及びこの膨張黒鉛シートを用いた炭素質ルツボの保護方法並びに単結晶引き上げ装置

Publications (1)

Publication Number Publication Date
WO2008129960A1 true WO2008129960A1 (ja) 2008-10-30

Family

ID=39875488

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057160 WO2008129960A1 (ja) 2007-04-18 2008-04-11 膨張黒鉛シート及びこの膨張黒鉛シートを用いた炭素質ルツボの保護方法並びに単結晶引き上げ装置

Country Status (7)

Country Link
US (1) US20100048073A1 (ja)
EP (1) EP2147991A4 (ja)
JP (1) JP2008266061A (ja)
KR (1) KR20100014303A (ja)
CN (1) CN101657570A (ja)
TW (1) TW200905021A (ja)
WO (1) WO2008129960A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2463234A4 (en) * 2009-08-07 2015-02-18 Toyo Tanso Co PLATE OF IMPROVED GRAPHITE

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD781942S1 (en) * 2011-11-18 2017-03-21 Toyo Tanso Co., Ltd. Graphite sheet for protecting crucible
CN111002435A (zh) * 2019-12-19 2020-04-14 保定顺天新材料股份有限公司 一种单晶硅炉用碳碳坩埚预制体编织工艺

Citations (6)

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JPS6311571A (ja) * 1986-06-30 1988-01-19 日立化成工業株式会社 カ−ボン繊維強化膨張黒鉛物品の製造法
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JPH06279752A (ja) * 1993-03-26 1994-10-04 Nippon Pillar Packing Co Ltd パッキン材料
JPH06293588A (ja) * 1993-04-07 1994-10-21 Komatsu Electron Metals Co Ltd 半導体単結晶の製造方法
JP2001089238A (ja) * 1999-07-19 2001-04-03 Toyo Tanso Kk 成形断熱材及びヒートシールド
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JP2528285B2 (ja) 1986-05-27 1996-08-28 東洋炭素株式会社 黒鉛ルツボの保護方法
JPS6311571A (ja) * 1986-06-30 1988-01-19 日立化成工業株式会社 カ−ボン繊維強化膨張黒鉛物品の製造法
JPH06279752A (ja) * 1993-03-26 1994-10-04 Nippon Pillar Packing Co Ltd パッキン材料
JPH06293588A (ja) * 1993-04-07 1994-10-21 Komatsu Electron Metals Co Ltd 半導体単結晶の製造方法
JP2001089238A (ja) * 1999-07-19 2001-04-03 Toyo Tanso Kk 成形断熱材及びヒートシールド
JP2002274826A (ja) * 2001-03-21 2002-09-25 Toyo Tanso Kk 膨張黒鉛シート

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2463234A4 (en) * 2009-08-07 2015-02-18 Toyo Tanso Co PLATE OF IMPROVED GRAPHITE

Also Published As

Publication number Publication date
EP2147991A4 (en) 2011-09-21
US20100048073A1 (en) 2010-02-25
TW200905021A (en) 2009-02-01
JP2008266061A (ja) 2008-11-06
CN101657570A (zh) 2010-02-24
EP2147991A1 (en) 2010-01-27
KR20100014303A (ko) 2010-02-10

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