WO2008126247A1 - 駆動装置 - Google Patents

駆動装置 Download PDF

Info

Publication number
WO2008126247A1
WO2008126247A1 PCT/JP2007/057076 JP2007057076W WO2008126247A1 WO 2008126247 A1 WO2008126247 A1 WO 2008126247A1 JP 2007057076 W JP2007057076 W JP 2007057076W WO 2008126247 A1 WO2008126247 A1 WO 2008126247A1
Authority
WO
WIPO (PCT)
Prior art keywords
stage
elastic body
driver unit
moving
resonating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/057076
Other languages
English (en)
French (fr)
Inventor
Jun Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pioneer Corp
Original Assignee
Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp filed Critical Pioneer Corp
Priority to US12/532,938 priority Critical patent/US7825565B2/en
Priority to JP2009508797A priority patent/JP4542619B2/ja
Priority to PCT/JP2007/057076 priority patent/WO2008126247A1/ja
Publication of WO2008126247A1 publication Critical patent/WO2008126247A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/02—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using ferroelectric record carriers; Record carriers therefor
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • G11B9/1427—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement
    • G11B9/1436—Disposition or mounting of heads or record carriers with provision for moving the heads or record carriers relatively to each other or for access to indexed parts without effectively imparting a relative movement with provision for moving the heads or record carriers relatively to each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

Landscapes

  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

駆動装置（１００ｕ）は、第１ベース部（１１０－１）と、第１ステージ部（１３０－１）と、第１ステージ部を一の方向（Ｘ軸）に沿って移動させるような弾性を有する第１弾性部（１２０－１）と、第１ステージ部上に設けられ、且つ被駆動物（１２）が搭載される第２ステージ部（１３０－２）と、第２ステージ部を他の方向（Ｙ軸）に沿って移動させるような弾性を有する第２弾性部（１２０－２）と、第１ステージ部及び第１弾性部により定まる共振周波数で第１ステージ部が一の方向に沿って共振するように第１ステージ部を移動させるための第１加振力を加える第１印加部（１４１、１４２、１４３、２２）と、第２ステージ部及び第２弾性部により定まる共振周波数で第２ステージ部が他の方向に沿って共振するように且つ第１ステージ部の移動の位相と比較して略９０°ずれた位相で第２ステージ部を移動させるための第２加振力を加える第２印加部（１６１、１６２、２２）とを備える。
PCT/JP2007/057076 2007-03-30 2007-03-30 駆動装置 Ceased WO2008126247A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/532,938 US7825565B2 (en) 2007-03-30 2007-03-30 Driving apparatus
JP2009508797A JP4542619B2 (ja) 2007-03-30 2007-03-30 駆動装置
PCT/JP2007/057076 WO2008126247A1 (ja) 2007-03-30 2007-03-30 駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/057076 WO2008126247A1 (ja) 2007-03-30 2007-03-30 駆動装置

Publications (1)

Publication Number Publication Date
WO2008126247A1 true WO2008126247A1 (ja) 2008-10-23

Family

ID=39863428

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/057076 Ceased WO2008126247A1 (ja) 2007-03-30 2007-03-30 駆動装置

Country Status (3)

Country Link
US (1) US7825565B2 (ja)
JP (1) JP4542619B2 (ja)
WO (1) WO2008126247A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7843108B2 (en) * 2007-03-30 2010-11-30 Pioneer Corporation Driving apparatus
WO2008126243A1 (ja) * 2007-03-30 2008-10-23 Pioneer Corporation 駆動装置
JP4542618B2 (ja) * 2007-03-30 2010-09-15 パイオニア株式会社 駆動装置
JP5573624B2 (ja) * 2010-11-19 2014-08-20 セイコーエプソン株式会社 発電装置及び電子機器
US9527733B2 (en) * 2014-11-07 2016-12-27 The Chinese University Of Hong Kong Method and apparatus for dynamic-tuning

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH08235651A (ja) * 1995-02-23 1996-09-13 Canon Inc 情報処理装置
JPH10105243A (ja) * 1996-09-10 1998-04-24 Hewlett Packard Co <Hp> 位置決め機構、位置決め装置及び情報記録装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4686440A (en) * 1985-03-11 1987-08-11 Yotaro Hatamura Fine positioning device
JPS62105440A (ja) * 1985-11-01 1987-05-15 Olympus Optical Co Ltd 振動型ステ−ジ装置
US4798989A (en) * 1986-09-26 1989-01-17 Research Development Corporation Scanning tunneling microscope installed in electron microscope
US5260622A (en) * 1989-03-24 1993-11-09 Topometrix Corporation High resolution electromechanical translation device
JP3289929B2 (ja) * 1991-11-05 2002-06-10 キヤノン株式会社 走査機構及びこれを用いた走査型顕微鏡及び記録再生装置
JP3029499B2 (ja) * 1992-05-07 2000-04-04 キヤノン株式会社 記録再生装置
US6459088B1 (en) * 1998-01-16 2002-10-01 Canon Kabushiki Kaisha Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same
JP3817120B2 (ja) * 2000-07-07 2006-08-30 住友重機械工業株式会社 移動テーブルの変位制御方法、部材加工方法、ｘ−ｙステージ装置、該ｘ−ｙステージ装置の製造方法
KR100486716B1 (ko) * 2002-10-18 2005-05-03 삼성전자주식회사 2-ｄ 액튜에이터 및 그 제조방법
KR100624436B1 (ko) * 2004-10-19 2006-09-15 삼성전자주식회사 2축 액츄에이터 및 그 제조방법
US7586236B2 (en) * 2005-10-07 2009-09-08 The United States Of America As Represented By The Secretary Of The Navy Tri-axial hybrid vibration isolator
US7471030B2 (en) * 2006-03-08 2008-12-30 Dynamic Structures And Materials, Llc Spring biasing locking mechanism for step and repeat motors

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06231493A (ja) * 1993-02-03 1994-08-19 Canon Inc 基板位置決め機構および記録再生装置
JPH08235651A (ja) * 1995-02-23 1996-09-13 Canon Inc 情報処理装置
JPH10105243A (ja) * 1996-09-10 1998-04-24 Hewlett Packard Co <Hp> 位置決め機構、位置決め装置及び情報記録装置

Also Published As

Publication number Publication date
US7825565B2 (en) 2010-11-02
JP4542619B2 (ja) 2010-09-15
US20100117487A1 (en) 2010-05-13
JPWO2008126247A1 (ja) 2010-07-22

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