WO2008123351A1 - 超純水製造システムの洗浄殺菌方法 - Google Patents

超純水製造システムの洗浄殺菌方法 Download PDF

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Publication number
WO2008123351A1
WO2008123351A1 PCT/JP2008/055859 JP2008055859W WO2008123351A1 WO 2008123351 A1 WO2008123351 A1 WO 2008123351A1 JP 2008055859 W JP2008055859 W JP 2008055859W WO 2008123351 A1 WO2008123351 A1 WO 2008123351A1
Authority
WO
WIPO (PCT)
Prior art keywords
washing
ultrapure water
sterilizing
water production
production system
Prior art date
Application number
PCT/JP2008/055859
Other languages
English (en)
French (fr)
Inventor
Ikunori Yokoi
Original Assignee
Kurita Water Industries Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurita Water Industries Ltd. filed Critical Kurita Water Industries Ltd.
Priority to US12/450,502 priority Critical patent/US9370802B2/en
Priority to KR1020097019134A priority patent/KR101407831B1/ko
Priority to CN200880011182A priority patent/CN101687052A/zh
Priority to JP2009509159A priority patent/JP5287713B2/ja
Publication of WO2008123351A1 publication Critical patent/WO2008123351A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/50—Treatment of water, waste water, or sewage by addition or application of a germicide or by oligodynamic treatment
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/04—Heat
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/18—Liquid substances or solutions comprising solids or dissolved gases
    • A61L2/183—Ozone dissolved in a liquid
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/16—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using chemical substances
    • A61L2/18—Liquid substances or solutions comprising solids or dissolved gases
    • A61L2/186—Peroxide solutions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2202/00—Aspects relating to methods or apparatus for disinfecting or sterilising materials or objects
    • A61L2202/10—Apparatus features
    • A61L2202/17—Combination with washing or cleaning means
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/02—Non-contaminated water, e.g. for industrial water supply
    • C02F2103/04—Non-contaminated water, e.g. for industrial water supply for obtaining ultra-pure water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2303/00—Specific treatment goals
    • C02F2303/04—Disinfection
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2303/00—Specific treatment goals
    • C02F2303/16—Regeneration of sorbents, filters

Landscapes

  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Epidemiology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Water Supply & Treatment (AREA)
  • Environmental & Geological Engineering (AREA)
  • Hydrology & Water Resources (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Cleaning In General (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Physical Water Treatments (AREA)

Abstract

　超純水製造装置、超純水のユースポイント、並びに前記超純水製造装置と前記ユースポイントとを接続する超純水の流路からなる超純水製造システムを洗浄及び殺菌する方法において、系内の少なくとも一部をアルカリ性溶液で洗浄するアルカリ洗浄工程と該アルカリ洗浄後に殺菌水で殺菌する殺菌工程とを行う洗浄殺菌工程を２回以上行うことを特徴とする超純水製造システムの洗浄殺菌方法。洗浄殺菌工程を２回以上行うことにより、超純水製造システム系内の金属、有機物、微粒子、生菌を高効率で除去することができ、洗浄殺菌後、短期間で要求水質を満足する超純水を製造することができる。
PCT/JP2008/055859 2007-03-30 2008-03-27 超純水製造システムの洗浄殺菌方法 WO2008123351A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/450,502 US9370802B2 (en) 2007-03-30 2008-03-27 Cleaning and sterilizing method for ultrapure water manufacturing system
KR1020097019134A KR101407831B1 (ko) 2007-03-30 2008-03-27 초순수 제조 시스템의 세정 살균 방법
CN200880011182A CN101687052A (zh) 2007-03-30 2008-03-27 超纯水制备系统的清洗灭菌方法
JP2009509159A JP5287713B2 (ja) 2007-03-30 2008-03-27 超純水製造システムの洗浄殺菌方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-091667 2007-03-30
JP2007091667 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008123351A1 true WO2008123351A1 (ja) 2008-10-16

Family

ID=39830839

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055859 WO2008123351A1 (ja) 2007-03-30 2008-03-27 超純水製造システムの洗浄殺菌方法

Country Status (6)

Country Link
US (1) US9370802B2 (ja)
JP (1) JP5287713B2 (ja)
KR (1) KR101407831B1 (ja)
CN (2) CN101687052A (ja)
TW (1) TWI491566B (ja)
WO (1) WO2008123351A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011214856A (ja) * 2010-03-31 2011-10-27 Kurita Water Ind Ltd 被洗浄基板の洗浄水の影響評価方法、この評価方法に基づく水質設定方法、及びこの設定された水質の水を得るための超純水製造システム
JP2012096187A (ja) * 2010-11-04 2012-05-24 Sumitomo Metal Mining Co Ltd 超純水製造システムおよびその洗浄方法、ならびにそれを用いた超純水の製造方法
JP2013108916A (ja) * 2011-11-24 2013-06-06 Nomura Micro Sci Co Ltd 超純水中の微量過酸化水素の濃度測定方法
JP2014175574A (ja) * 2013-03-12 2014-09-22 Shin Etsu Handotai Co Ltd 洗浄槽の処理方法
JP2016101565A (ja) * 2014-11-28 2016-06-02 株式会社 アイロム 水素水の製造方法および水素水製造装置
WO2017145419A1 (ja) * 2016-02-22 2017-08-31 栗田工業株式会社 超純水製造システムの洗浄方法
WO2020031616A1 (ja) * 2018-08-10 2020-02-13 栗田工業株式会社 水中微粒子の除去方法
JP2021020172A (ja) * 2019-07-29 2021-02-18 オルガノ株式会社 超純水又はガス溶解水供給システムの製造方法並びに洗浄方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5453878B2 (ja) * 2009-03-31 2014-03-26 栗田工業株式会社 超純水製造設備及び超純水のモニタリング方法
TWI634912B (zh) * 2013-02-21 2018-09-11 日商克利普頓股份有限公司 Washing and sterilizing method
JP5733482B1 (ja) * 2013-07-24 2015-06-10 栗田工業株式会社 超純水製造供給システム及びその洗浄方法
SG11201700158TA (en) * 2014-07-28 2017-02-27 Gen Electric Rapid cleaning method for ultrapure water piping system
JP2017200683A (ja) * 2016-05-06 2017-11-09 野村マイクロ・サイエンス株式会社 超純水製造装置の立ち上げ方法
JP6745162B2 (ja) * 2016-08-02 2020-08-26 野村マイクロ・サイエンス株式会社 電子デバイス洗浄用のアルカリ水の製造装置及び製造方法
CN108144906A (zh) * 2017-12-24 2018-06-12 苏州佳亿达电器有限公司 一种led注塑件的表面除杂工艺
WO2020052361A1 (zh) * 2018-09-11 2020-03-19 苏州科技大学 一种水深度处理装置和方法
TWI724923B (zh) * 2020-06-16 2021-04-11 國立虎尾科技大學 震波清洗管路系統
TWI850013B (zh) * 2023-07-06 2024-07-21 正修學校財團法人正修科技大學 具有模組式組合多功能管道作業機器人

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07299126A (ja) * 1994-03-09 1995-11-14 Hoshizaki Electric Co Ltd 洗浄殺菌方法
JP2000317413A (ja) * 1999-05-14 2000-11-21 Kurita Water Ind Ltd 超純水製造システムの洗浄方法
JP2002166283A (ja) * 2001-08-10 2002-06-11 Kurita Water Ind Ltd 殺菌方法
JP2002192162A (ja) * 2000-12-26 2002-07-10 Kurita Water Ind Ltd 超純水製造システムの洗浄殺菌方法
JP2004267864A (ja) * 2003-03-06 2004-09-30 Japan Organo Co Ltd 超純水製造供給装置の洗浄方法
JP2004275881A (ja) * 2003-03-14 2004-10-07 Kurita Water Ind Ltd 超純水製造システム

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SG64480A1 (en) 1997-03-27 1999-04-27 Mitsubishi Gas Chemical Co Method for preparing high-purity aqueous hydrogen peroxide
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JP4109455B2 (ja) * 2002-01-15 2008-07-02 オルガノ株式会社 水素溶解水製造装置
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JP4449080B2 (ja) * 2005-04-15 2010-04-14 オルガノ株式会社 超純水製造供給装置の洗浄方法
JP4747659B2 (ja) * 2005-04-25 2011-08-17 オルガノ株式会社 超純水製造供給装置の洗浄方法
KR20100113633A (ko) * 2008-03-31 2010-10-21 쿠리타 고교 가부시키가이샤 순수 제조 방법 및 순수 제조 장치
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07299126A (ja) * 1994-03-09 1995-11-14 Hoshizaki Electric Co Ltd 洗浄殺菌方法
JP2000317413A (ja) * 1999-05-14 2000-11-21 Kurita Water Ind Ltd 超純水製造システムの洗浄方法
JP2002192162A (ja) * 2000-12-26 2002-07-10 Kurita Water Ind Ltd 超純水製造システムの洗浄殺菌方法
JP2002166283A (ja) * 2001-08-10 2002-06-11 Kurita Water Ind Ltd 殺菌方法
JP2004267864A (ja) * 2003-03-06 2004-09-30 Japan Organo Co Ltd 超純水製造供給装置の洗浄方法
JP2004275881A (ja) * 2003-03-14 2004-10-07 Kurita Water Ind Ltd 超純水製造システム

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011214856A (ja) * 2010-03-31 2011-10-27 Kurita Water Ind Ltd 被洗浄基板の洗浄水の影響評価方法、この評価方法に基づく水質設定方法、及びこの設定された水質の水を得るための超純水製造システム
JP2012096187A (ja) * 2010-11-04 2012-05-24 Sumitomo Metal Mining Co Ltd 超純水製造システムおよびその洗浄方法、ならびにそれを用いた超純水の製造方法
JP2013108916A (ja) * 2011-11-24 2013-06-06 Nomura Micro Sci Co Ltd 超純水中の微量過酸化水素の濃度測定方法
JP2014175574A (ja) * 2013-03-12 2014-09-22 Shin Etsu Handotai Co Ltd 洗浄槽の処理方法
JP2016101565A (ja) * 2014-11-28 2016-06-02 株式会社 アイロム 水素水の製造方法および水素水製造装置
KR20180115692A (ko) * 2016-02-22 2018-10-23 쿠리타 고교 가부시키가이샤 초순수 제조 시스템의 세정 방법
WO2017145419A1 (ja) * 2016-02-22 2017-08-31 栗田工業株式会社 超純水製造システムの洗浄方法
KR102689736B1 (ko) * 2016-02-22 2024-07-30 쿠리타 고교 가부시키가이샤 초순수 제조 시스템의 세정 방법
WO2020031616A1 (ja) * 2018-08-10 2020-02-13 栗田工業株式会社 水中微粒子の除去方法
JP2020025922A (ja) * 2018-08-10 2020-02-20 栗田工業株式会社 水中微粒子の除去方法
JP7210931B2 (ja) 2018-08-10 2023-01-24 栗田工業株式会社 水中微粒子の除去方法
JP2021020172A (ja) * 2019-07-29 2021-02-18 オルガノ株式会社 超純水又はガス溶解水供給システムの製造方法並びに洗浄方法
JP7387320B2 (ja) 2019-07-29 2023-11-28 オルガノ株式会社 超純水又はガス溶解水供給システムの製造方法並びに洗浄方法

Also Published As

Publication number Publication date
CN105381482B (zh) 2021-02-02
US20100032387A1 (en) 2010-02-11
US9370802B2 (en) 2016-06-21
JPWO2008123351A1 (ja) 2010-07-15
CN105381482A (zh) 2016-03-09
TWI491566B (zh) 2015-07-11
KR20100014390A (ko) 2010-02-10
JP5287713B2 (ja) 2013-09-11
KR101407831B1 (ko) 2014-06-17
TW200906735A (en) 2009-02-16
CN101687052A (zh) 2010-03-31

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