WO2008120519A1 - Appareil de manipulateur de point d'outil - Google Patents
Appareil de manipulateur de point d'outil Download PDFInfo
- Publication number
- WO2008120519A1 WO2008120519A1 PCT/JP2008/053517 JP2008053517W WO2008120519A1 WO 2008120519 A1 WO2008120519 A1 WO 2008120519A1 JP 2008053517 W JP2008053517 W JP 2008053517W WO 2008120519 A1 WO2008120519 A1 WO 2008120519A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- probe
- tcp
- tcp handler
- probe card
- carrier tape
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2896—Testing of IC packages; Test features related to IC packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009507437A JPWO2008120519A1 (ja) | 2007-03-29 | 2008-02-28 | Tcpハンドリング装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007089810 | 2007-03-29 | ||
JP2007-089810 | 2007-03-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008120519A1 true WO2008120519A1 (fr) | 2008-10-09 |
Family
ID=39808103
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/053517 WO2008120519A1 (fr) | 2007-03-29 | 2008-02-28 | Appareil de manipulateur de point d'outil |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPWO2008120519A1 (fr) |
KR (1) | KR20090132617A (fr) |
TW (1) | TW200902997A (fr) |
WO (1) | WO2008120519A1 (fr) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011059010A (ja) * | 2009-09-11 | 2011-03-24 | Ueno Seiki Kk | テストコンタクト、そのクリーニング方法及び半導体製造装置 |
JP2011149917A (ja) * | 2009-12-22 | 2011-08-04 | Micronics Japan Co Ltd | プローブ清掃ユニット及びそれを備えたパネル検査装置並びにプローブ清掃方法 |
EP2426794A1 (fr) * | 2010-09-06 | 2012-03-07 | Rasco GmbH | Nettoyage d'un contacteur dans un manipulateur de test-in-strip pour circuits imprimés |
JP2022003330A (ja) * | 2020-06-12 | 2022-01-11 | 致茂電子股▲分▼有限公司Chroma Ate Inc. | 洗浄治具 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012068032A (ja) * | 2010-09-21 | 2012-04-05 | Tesetsuku:Kk | Tcp試験装置 |
KR102440287B1 (ko) * | 2020-08-24 | 2022-09-06 | (주)퓨쳐하이테크 | 전자부품 착탈장치와 그를 이용한 시험장치 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0679149U (ja) * | 1993-04-23 | 1994-11-04 | 安藤電気株式会社 | 研磨シートつきテープキャリア |
JPH11145212A (ja) * | 1997-11-07 | 1999-05-28 | Matsushita Electric Ind Co Ltd | プローブカードの洗浄装置 |
JPH11295392A (ja) * | 1998-04-15 | 1999-10-29 | Micronics Japan Co Ltd | プローブに付着している異物の除去装置 |
JP2000223539A (ja) * | 1999-01-29 | 2000-08-11 | Tokyo Electron Ltd | クリーナ及びクリーニング方法 |
JP2002307316A (ja) * | 2001-04-09 | 2002-10-23 | Nihon Micro Coating Co Ltd | 接触子先端及び側面クリーニング用具 |
WO2004068154A1 (fr) * | 2003-01-31 | 2004-08-12 | Japan Engineering Co.,Ltd. | Dispositif de manipulation de tcp et procede de correction de deviation approprie |
JP2006208009A (ja) * | 2005-01-25 | 2006-08-10 | Ricoh Co Ltd | 回路基板検査装置、記憶媒体、回路基板検査方法、回路基板製造方法及び回路基板 |
-
2008
- 2008-02-28 WO PCT/JP2008/053517 patent/WO2008120519A1/fr active Application Filing
- 2008-02-28 KR KR1020097022067A patent/KR20090132617A/ko not_active Application Discontinuation
- 2008-02-28 JP JP2009507437A patent/JPWO2008120519A1/ja active Pending
- 2008-03-04 TW TW97107455A patent/TW200902997A/zh unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0679149U (ja) * | 1993-04-23 | 1994-11-04 | 安藤電気株式会社 | 研磨シートつきテープキャリア |
JPH11145212A (ja) * | 1997-11-07 | 1999-05-28 | Matsushita Electric Ind Co Ltd | プローブカードの洗浄装置 |
JPH11295392A (ja) * | 1998-04-15 | 1999-10-29 | Micronics Japan Co Ltd | プローブに付着している異物の除去装置 |
JP2000223539A (ja) * | 1999-01-29 | 2000-08-11 | Tokyo Electron Ltd | クリーナ及びクリーニング方法 |
JP2002307316A (ja) * | 2001-04-09 | 2002-10-23 | Nihon Micro Coating Co Ltd | 接触子先端及び側面クリーニング用具 |
WO2004068154A1 (fr) * | 2003-01-31 | 2004-08-12 | Japan Engineering Co.,Ltd. | Dispositif de manipulation de tcp et procede de correction de deviation approprie |
JP2006208009A (ja) * | 2005-01-25 | 2006-08-10 | Ricoh Co Ltd | 回路基板検査装置、記憶媒体、回路基板検査方法、回路基板製造方法及び回路基板 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011059010A (ja) * | 2009-09-11 | 2011-03-24 | Ueno Seiki Kk | テストコンタクト、そのクリーニング方法及び半導体製造装置 |
JP2011149917A (ja) * | 2009-12-22 | 2011-08-04 | Micronics Japan Co Ltd | プローブ清掃ユニット及びそれを備えたパネル検査装置並びにプローブ清掃方法 |
EP2426794A1 (fr) * | 2010-09-06 | 2012-03-07 | Rasco GmbH | Nettoyage d'un contacteur dans un manipulateur de test-in-strip pour circuits imprimés |
JP2022003330A (ja) * | 2020-06-12 | 2022-01-11 | 致茂電子股▲分▼有限公司Chroma Ate Inc. | 洗浄治具 |
JP7274525B2 (ja) | 2020-06-12 | 2023-05-16 | 致茂電子股▲分▼有限公司 | 洗浄治具 |
Also Published As
Publication number | Publication date |
---|---|
TW200902997A (en) | 2009-01-16 |
JPWO2008120519A1 (ja) | 2010-07-15 |
KR20090132617A (ko) | 2009-12-30 |
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