WO2008107105A8 - Abbildungsvorrichtung mit einem adaptiven optischen element und holographische projektionseinrichtung - Google Patents
Abbildungsvorrichtung mit einem adaptiven optischen element und holographische projektionseinrichtungInfo
- Publication number
- WO2008107105A8 WO2008107105A8 PCT/EP2008/001563 EP2008001563W WO2008107105A8 WO 2008107105 A8 WO2008107105 A8 WO 2008107105A8 EP 2008001563 W EP2008001563 W EP 2008001563W WO 2008107105 A8 WO2008107105 A8 WO 2008107105A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical element
- imaging device
- projection apparatus
- holographic projection
- adaptive optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract 7
- 238000003384 imaging method Methods 0.000 title abstract 2
- 230000003044 adaptive effect Effects 0.000 title 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/22—Processes or apparatus for obtaining an optical image from holograms
- G03H1/2294—Addressing the hologram to an active spatial light modulator
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
- G03H2001/0208—Individual components other than the hologram
- G03H2001/0224—Active addressable light modulator, i.e. Spatial Light Modulator [SLM]
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/22—Processes or apparatus for obtaining an optical image from holograms
- G03H1/2202—Reconstruction geometries or arrangements
- G03H1/2205—Reconstruction geometries or arrangements using downstream optical component
- G03H2001/221—Element having optical power, e.g. field lens
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H2225/00—Active addressable light modulator
- G03H2225/20—Nature, e.g. e-beam addressed
- G03H2225/24—Having movable pixels, e.g. microelectromechanical systems [MEMS]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Instruments For Viewing The Inside Of Hollow Bodies (AREA)
Abstract
Eine Abbildungsvorrichtung (1,100) zum Beeinflussen von auftreffendem Licht weist ein optisches Element (2) in Form eines Spiegels und eine Stelleinrichtung (3,103) zum Verformen des optischen Elements (2) auf. Das optische Element (2) besitzt eine dem auftreffenden Licht zugewandte Oberfläche. Die Stelleinrichtung (3,103) greift zur Verformung des optischen Elements (2) seitlich an der optischen Oberfläche des optischen Elements (2) an.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/529,946 US20100060973A1 (en) | 2007-03-05 | 2008-02-28 | Imaging Device for Influencing Incident Light |
JP2009552102A JP2010521003A (ja) | 2007-03-05 | 2008-02-28 | 入射光を誘導する表示装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007010906.9 | 2007-03-05 | ||
DE102007010906A DE102007010906A1 (de) | 2007-03-05 | 2007-03-05 | Abbildungsvorrichtung zum Beeinflussen von auftreffendem Licht |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2008107105A2 WO2008107105A2 (de) | 2008-09-12 |
WO2008107105A3 WO2008107105A3 (de) | 2008-11-13 |
WO2008107105A8 true WO2008107105A8 (de) | 2008-12-24 |
Family
ID=39471862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/001563 WO2008107105A2 (de) | 2007-03-05 | 2008-02-28 | Abbildungsvorrichtung mit einem adaptiven optischen element und holographische projektionseinrichtung |
Country Status (5)
Country | Link |
---|---|
US (1) | US20100060973A1 (de) |
JP (1) | JP2010521003A (de) |
DE (1) | DE102007010906A1 (de) |
TW (1) | TW200844537A (de) |
WO (1) | WO2008107105A2 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL198719A0 (en) * | 2009-05-12 | 2010-02-17 | Orbotech Ltd | Optical imaging system |
US8633969B2 (en) * | 2011-02-09 | 2014-01-21 | Omnivision Technologies, Inc. | Apparatus and method for three-dimensional image capture with extended depth of field |
DE102012224022A1 (de) * | 2012-12-20 | 2013-10-31 | Carl Zeiss Smt Gmbh | Anordnung zur Aktuierung wenigstens eines optischen Elementes in einem optischen System |
WO2014140047A2 (en) | 2013-03-12 | 2014-09-18 | Micronic Mydata AB | Method and device for writing photomasks with reduced mura errors |
JP6453780B2 (ja) | 2013-03-12 | 2019-01-16 | マイクロニック アーベーMycronic Ab | 機械的に形成されるアライメント基準体の方法及び装置 |
JP6432744B2 (ja) * | 2013-12-27 | 2018-12-05 | パナソニックIpマネジメント株式会社 | 光学部材駆動装置及び投写型映像表示装置 |
DE102014103157B3 (de) | 2014-03-10 | 2015-06-18 | Jenoptik Optical Systems Gmbh | Justierbarer deformierbarer Spiegel zum Ausgleich von Aberrationen eines Strahlenbündels |
DE102014212710A1 (de) * | 2014-07-01 | 2016-01-07 | Carl Zeiss Smt Gmbh | Optischer Manipulator, Projektionsobjektiv und Projektionsbelichtungsanlage |
WO2017216644A2 (en) * | 2016-04-21 | 2017-12-21 | Mauro Pedretti | Rotating clamping device |
DE102017117468B3 (de) | 2017-08-02 | 2018-09-20 | Jenoptik Optical Systems Gmbh | Vorrichtung zur variierbaren Beeinflussung der Wellenfront eines Strahlenbündels mit einer über ihre Umfangsfläche deformierbaren Planoptik |
CN112327503B (zh) * | 2020-11-11 | 2022-07-08 | 中国科学院上海光学精密机械研究所 | 一种光路指向精密调节装置 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2505112A1 (de) * | 1975-02-07 | 1976-08-19 | Kleinwaechter Hans | Biegenplattenzylinderparabbol-speigel mit veraenderlicher geometrie |
FR2343262A1 (fr) * | 1976-03-05 | 1977-09-30 | Anvar | Miroirs a focale variable par elasticite et procedes d'obtention |
US5365379A (en) * | 1993-03-30 | 1994-11-15 | The United States Of America As Represented By The United States Department Of Energy | Laser correcting mirror |
DE19725353B4 (de) | 1997-06-16 | 2004-07-01 | Trumpf Gmbh & Co. | Einrichtung zur Strahlbeeinflussung eines Laserstrahls |
DE19827603A1 (de) * | 1998-06-20 | 1999-12-23 | Zeiss Carl Fa | Optisches System, insbesondere Projektions-Belichtungsanlage der Mikrolithographie |
US7336412B2 (en) | 2001-06-12 | 2008-02-26 | California Institute Of Technology | PZT unimorph based, high stroke mems deformable mirror with continuous membrane and method of making the same |
DE10151919B4 (de) * | 2001-10-20 | 2007-02-01 | Carl Zeiss Smt Ag | Belichtungsobjektiv in der Halbleiterlithographie |
AU2003294125A1 (en) | 2002-12-23 | 2004-07-14 | Bae Systems Plc | Deformable mirror |
FR2850175B1 (fr) * | 2003-01-17 | 2007-08-17 | Europ De Systemes Optiques Soc | Systeme deformable comportant une piece de forme parallelepipedique et un actionneur |
JP2004247947A (ja) * | 2003-02-13 | 2004-09-02 | Olympus Corp | 光学装置 |
US7224504B2 (en) | 2003-07-30 | 2007-05-29 | Asml Holding N. V. | Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use |
WO2006014376A1 (en) * | 2004-07-02 | 2006-02-09 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy Naval Research Laboratory | Deformable mirror apparatus |
JP2006310577A (ja) | 2005-04-28 | 2006-11-09 | Canon Inc | 反射ミラー装置およびそれを用いた露光装置 |
DE102005023743B4 (de) | 2005-05-13 | 2016-09-29 | Seereal Technologies Gmbh | Projektionsvorrichtung und Verfahren zur holographischen Rekonstruktion von Szenen |
-
2007
- 2007-03-05 DE DE102007010906A patent/DE102007010906A1/de not_active Withdrawn
-
2008
- 2008-02-19 TW TW097105733A patent/TW200844537A/zh unknown
- 2008-02-28 US US12/529,946 patent/US20100060973A1/en not_active Abandoned
- 2008-02-28 WO PCT/EP2008/001563 patent/WO2008107105A2/de active Application Filing
- 2008-02-28 JP JP2009552102A patent/JP2010521003A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
US20100060973A1 (en) | 2010-03-11 |
WO2008107105A2 (de) | 2008-09-12 |
DE102007010906A1 (de) | 2008-09-11 |
TW200844537A (en) | 2008-11-16 |
JP2010521003A (ja) | 2010-06-17 |
WO2008107105A3 (de) | 2008-11-13 |
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