WO2008105321A1 - アモルファスカーボン膜の形成方法、アモルファスカーボン膜、多層レジスト膜、半導体装置の製造方法およびコンピュータ可読記憶媒体 - Google Patents

アモルファスカーボン膜の形成方法、アモルファスカーボン膜、多層レジスト膜、半導体装置の製造方法およびコンピュータ可読記憶媒体 Download PDF

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Publication number
WO2008105321A1
WO2008105321A1 PCT/JP2008/052990 JP2008052990W WO2008105321A1 WO 2008105321 A1 WO2008105321 A1 WO 2008105321A1 JP 2008052990 W JP2008052990 W JP 2008052990W WO 2008105321 A1 WO2008105321 A1 WO 2008105321A1
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WO
WIPO (PCT)
Prior art keywords
amorphous carbon
carbon film
film
forming
computer
Prior art date
Application number
PCT/JP2008/052990
Other languages
English (en)
French (fr)
Inventor
Hiraku Ishikawa
Tadakazu Murai
Eisuke Morisaki
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Priority to CN200880006410XA priority Critical patent/CN101622693B/zh
Priority to US12/528,847 priority patent/US8409460B2/en
Priority to KR1020097019776A priority patent/KR101102422B1/ko
Priority to JP2009501210A priority patent/JP5113830B2/ja
Publication of WO2008105321A1 publication Critical patent/WO2008105321A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5096—Flat-bed apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02527—Carbon, e.g. diamond-like carbon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02587—Structure
    • H01L21/0259—Microstructure
    • H01L21/02592—Microstructure amorphous
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

　上部電極および下部電極が処理容器内に配設された平行平板型のプラズマＣＶＤ装置を用い、下部電極上に基板を配置する工程と、処理容器内に一酸化炭素および不活性ガスを供給するとともに、少なくとも上部電極に高周波電力を印加してプラズマを発生させることにより一酸化炭素を分解し、基板上にアモルファスカーボンを堆積して成膜する工程とを有する。上部電極が炭素電極であることが好ましい。
PCT/JP2008/052990 2007-02-28 2008-02-21 アモルファスカーボン膜の形成方法、アモルファスカーボン膜、多層レジスト膜、半導体装置の製造方法およびコンピュータ可読記憶媒体 WO2008105321A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN200880006410XA CN101622693B (zh) 2007-02-28 2008-02-21 无定形碳膜的形成方法和半导体装置的制造方法
US12/528,847 US8409460B2 (en) 2007-02-28 2008-02-21 Forming method of amorphous carbon film, amorphous carbon film, multilayer resist film, manufacturing method of semiconductor device, and computer-readable storage medium
KR1020097019776A KR101102422B1 (ko) 2007-02-28 2008-02-21 비결정 탄소막의 형성 방법, 비결정 탄소막, 다층 레지스트막, 반도체 장치의 제조 방법 및 컴퓨터 가독 기억 매체
JP2009501210A JP5113830B2 (ja) 2007-02-28 2008-02-21 アモルファスカーボン膜の形成方法、半導体装置の製造方法およびコンピュータ可読記憶媒体

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007049185 2007-02-28
JP2007-049185 2007-02-28

Publications (1)

Publication Number Publication Date
WO2008105321A1 true WO2008105321A1 (ja) 2008-09-04

Family

ID=39721156

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Application Number Title Priority Date Filing Date
PCT/JP2008/052990 WO2008105321A1 (ja) 2007-02-28 2008-02-21 アモルファスカーボン膜の形成方法、アモルファスカーボン膜、多層レジスト膜、半導体装置の製造方法およびコンピュータ可読記憶媒体

Country Status (6)

Country Link
US (1) US8409460B2 (ja)
JP (2) JP5113830B2 (ja)
KR (1) KR101102422B1 (ja)
CN (1) CN101622693B (ja)
TW (1) TWI413187B (ja)
WO (1) WO2008105321A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7604834B2 (en) * 2004-04-28 2009-10-20 Intel Corporation Formation of dielectric film by alternating between deposition and modification
US20110201206A1 (en) * 2008-08-28 2011-08-18 Tokyo Electron Limited Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film, method for manufacturing semiconductor device, and storage medium in which control program is stored
JP2012212706A (ja) * 2011-03-30 2012-11-01 Tohoku Univ 半導体装置及びその製法において用いられるアモルファスカーボン膜の製造法
US9378944B2 (en) 2012-07-09 2016-06-28 Tokyo Electron Limited Method and apparatus of forming carbon film
KR20160104553A (ko) 2015-02-26 2016-09-05 도쿄엘렉트론가부시키가이샤 카본 막의 성막 방법 및 성막 장치

Families Citing this family (9)

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JP2010177262A (ja) * 2009-01-27 2010-08-12 Panasonic Corp 半導体装置の製造方法
US20100258526A1 (en) * 2009-04-08 2010-10-14 Jaihyung Won Methods of forming an amorphous carbon layer and methods of forming a pattern using the same
US8877641B2 (en) * 2009-12-28 2014-11-04 Spansion Llc Line-edge roughness improvement for small pitches
US8399366B1 (en) * 2011-08-25 2013-03-19 Tokyo Electron Limited Method of depositing highly conformal amorphous carbon films over raised features
US9318412B2 (en) * 2013-07-26 2016-04-19 Nanya Technology Corporation Method for semiconductor self-aligned patterning
US9455337B2 (en) * 2014-06-18 2016-09-27 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2017168411A (ja) * 2016-03-18 2017-09-21 株式会社ジャパンディスプレイ 表示装置の製造方法
WO2020031224A1 (ja) * 2018-08-06 2020-02-13 株式会社日立ハイテクノロジーズ プラズマ処理方法およびプラズマアッシング装置
WO2020262039A1 (ja) * 2019-06-26 2020-12-30 東京エレクトロン株式会社 基板処理方法及び基板処理システム

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JPS6110241A (ja) * 1984-06-26 1986-01-17 Toshiba Corp 半導体装置の製造方法
JPH06267897A (ja) * 1993-03-10 1994-09-22 Toshiba Corp 半導体製造装置及び方法
WO2005074449A2 (en) * 2004-01-30 2005-08-18 Tokyo Electron Limited Structure comprising amorphous carbon film and method of forming thereof

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JPH1167727A (ja) * 1997-08-19 1999-03-09 Hitachi Ltd プラズマ処理装置及びその方法
JP5121090B2 (ja) 2000-02-17 2013-01-16 アプライド マテリアルズ インコーポレイテッド アモルファスカーボン層の堆積方法
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JP3921528B2 (ja) * 2002-09-06 2007-05-30 独立行政法人物質・材料研究機構 リソグラフィ用基板被覆構造体
JP3931229B2 (ja) * 2002-09-13 2007-06-13 独立行政法人物質・材料研究機構 酸化炭素薄膜および酸化窒化炭素薄膜とこれら酸化炭素系薄膜の製造方法
JP2004266008A (ja) 2003-02-28 2004-09-24 Toshiba Corp 半導体装置の製造方法
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JPS6110241A (ja) * 1984-06-26 1986-01-17 Toshiba Corp 半導体装置の製造方法
JPH06267897A (ja) * 1993-03-10 1994-09-22 Toshiba Corp 半導体製造装置及び方法
WO2005074449A2 (en) * 2004-01-30 2005-08-18 Tokyo Electron Limited Structure comprising amorphous carbon film and method of forming thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7604834B2 (en) * 2004-04-28 2009-10-20 Intel Corporation Formation of dielectric film by alternating between deposition and modification
US20110201206A1 (en) * 2008-08-28 2011-08-18 Tokyo Electron Limited Method for forming amorphous carbon nitride film, amorphous carbon nitride film, multilayer resist film, method for manufacturing semiconductor device, and storage medium in which control program is stored
JP2012212706A (ja) * 2011-03-30 2012-11-01 Tohoku Univ 半導体装置及びその製法において用いられるアモルファスカーボン膜の製造法
US9378944B2 (en) 2012-07-09 2016-06-28 Tokyo Electron Limited Method and apparatus of forming carbon film
KR20160104553A (ko) 2015-02-26 2016-09-05 도쿄엘렉트론가부시키가이샤 카본 막의 성막 방법 및 성막 장치

Also Published As

Publication number Publication date
KR20090122259A (ko) 2009-11-26
JP5113830B2 (ja) 2013-01-09
US8409460B2 (en) 2013-04-02
TWI413187B (zh) 2013-10-21
TW200847283A (en) 2008-12-01
CN101622693B (zh) 2012-07-04
JPWO2008105321A1 (ja) 2010-06-03
CN101622693A (zh) 2010-01-06
US20100105213A1 (en) 2010-04-29
KR101102422B1 (ko) 2012-01-05
JP2013030801A (ja) 2013-02-07

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