WO2008096528A1 - 角速度センサ - Google Patents

角速度センサ Download PDF

Info

Publication number
WO2008096528A1
WO2008096528A1 PCT/JP2008/000133 JP2008000133W WO2008096528A1 WO 2008096528 A1 WO2008096528 A1 WO 2008096528A1 JP 2008000133 W JP2008000133 W JP 2008000133W WO 2008096528 A1 WO2008096528 A1 WO 2008096528A1
Authority
WO
WIPO (PCT)
Prior art keywords
component signal
angular velocity
axis
signal
velocity sensor
Prior art date
Application number
PCT/JP2008/000133
Other languages
English (en)
French (fr)
Inventor
Takeshi Uemura
Original Assignee
Panasonic Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corporation filed Critical Panasonic Corporation
Priority to EP08702865A priority Critical patent/EP2108922A1/en
Priority to US12/524,877 priority patent/US20100116051A1/en
Publication of WO2008096528A1 publication Critical patent/WO2008096528A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

２つの第２アームに配置された第１感知部と第２感知部と第３感知部が検出回路部に接続され、この検出回路部において、第１から第３感知電極部から出力される角速度信号に基づき角速度を検出する角速度センサの信号分離回路を提供する。角速度信号には、互いに直交するＸ軸、Ｙ軸、Ｚ軸における、Ｘ軸周りのＸ成分信号およびＹ軸周りのＹ成分信号およびＺ軸周りのＺ成分信号および可撓体の振動成分信号が含まれ、上記の検出回路部には、これらのＸ成分信号とＹ成分信号とＺ成分信号と振動成分信号を分離する分離回路を設けた構成である。
PCT/JP2008/000133 2007-02-05 2008-02-04 角速度センサ WO2008096528A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP08702865A EP2108922A1 (en) 2007-02-05 2008-02-04 Angular velocity sensor
US12/524,877 US20100116051A1 (en) 2007-02-05 2008-02-04 Angular velocity sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007025013A JP2008190972A (ja) 2007-02-05 2007-02-05 角速度センサ
JP2007-025013 2007-09-14

Publications (1)

Publication Number Publication Date
WO2008096528A1 true WO2008096528A1 (ja) 2008-08-14

Family

ID=39681442

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000133 WO2008096528A1 (ja) 2007-02-05 2008-02-04 角速度センサ

Country Status (4)

Country Link
US (1) US20100116051A1 (ja)
EP (1) EP2108922A1 (ja)
JP (1) JP2008190972A (ja)
WO (1) WO2008096528A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015148619A (ja) * 2010-06-25 2015-08-20 パナソニックＩｐマネジメント株式会社 慣性力検出素子とそれを用いた慣性力センサ

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013061558A1 (ja) * 2011-10-24 2013-05-02 パナソニック株式会社 角速度センサとそれに用いられる検出素子
WO2015075908A1 (ja) * 2013-11-19 2015-05-28 パナソニックＩｐマネジメント株式会社 角速度センサ素子およびそれを用いた角速度センサ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11230759A (ja) * 1998-02-09 1999-08-27 Miyota Kk 運動センサ
JP2001012953A (ja) * 1999-07-01 2001-01-19 Ngk Insulators Ltd 振動型ジャイロスコープ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
JP2001208546A (ja) 1999-11-16 2001-08-03 Matsushita Electric Ind Co Ltd 角速度センサ
JP2006017538A (ja) * 2004-06-30 2006-01-19 Kyocera Kinseki Corp 振動子及び角速度センサ
JP2006105756A (ja) * 2004-10-05 2006-04-20 Matsushita Electric Ind Co Ltd 角速度センサ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3492010B2 (ja) * 1995-03-29 2004-02-03 キヤノン株式会社 振動ジャイロおよび防振装置
US6209393B1 (en) * 1996-10-29 2001-04-03 Mitsui Chemicals Inc. Vibration gyroscope
JP3399336B2 (ja) * 1997-12-22 2003-04-21 株式会社豊田中央研究所 検出器
JP2000199714A (ja) * 1999-01-06 2000-07-18 Murata Mfg Co Ltd 角速度センサ
US6418789B1 (en) * 1999-02-26 2002-07-16 Murata Manufacturing Co., Ltd. Vibrating gyroscope
US7401517B2 (en) * 2006-08-18 2008-07-22 Robert Bosch Gmbh Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement
JP4893335B2 (ja) * 2007-01-26 2012-03-07 セイコーエプソン株式会社 ジャイロモジュール

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11230759A (ja) * 1998-02-09 1999-08-27 Miyota Kk 運動センサ
JP2001012953A (ja) * 1999-07-01 2001-01-19 Ngk Insulators Ltd 振動型ジャイロスコープ
JP2001082963A (ja) * 1999-09-13 2001-03-30 Yoshiaki Kato 運動センサ振動体および振動ジャイロスコープ
JP2001208546A (ja) 1999-11-16 2001-08-03 Matsushita Electric Ind Co Ltd 角速度センサ
JP2006017538A (ja) * 2004-06-30 2006-01-19 Kyocera Kinseki Corp 振動子及び角速度センサ
JP2006105756A (ja) * 2004-10-05 2006-04-20 Matsushita Electric Ind Co Ltd 角速度センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015148619A (ja) * 2010-06-25 2015-08-20 パナソニックＩｐマネジメント株式会社 慣性力検出素子とそれを用いた慣性力センサ
US9835641B2 (en) 2010-06-25 2017-12-05 Panasonic Intellectual Property Management Co., Ltd. Angular velocity detection device and angular velocity sensor including the same

Also Published As

Publication number Publication date
EP2108922A1 (en) 2009-10-14
US20100116051A1 (en) 2010-05-13
JP2008190972A (ja) 2008-08-21

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