WO2008012150A1 - Verfahren zur ermittlung einer aussage über einen zustand einer turbomolekularpumpe sowie eine turbomolekularpumpe - Google Patents
Verfahren zur ermittlung einer aussage über einen zustand einer turbomolekularpumpe sowie eine turbomolekularpumpe Download PDFInfo
- Publication number
- WO2008012150A1 WO2008012150A1 PCT/EP2007/056248 EP2007056248W WO2008012150A1 WO 2008012150 A1 WO2008012150 A1 WO 2008012150A1 EP 2007056248 W EP2007056248 W EP 2007056248W WO 2008012150 A1 WO2008012150 A1 WO 2008012150A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- turbomolecular pump
- evaluation device
- vibration
- limit value
- frequency
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
- F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
- F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
Definitions
- the invention relates to a method for determining a statement about a state of a turbomolecular pump and a turbomolecular pump.
- Turbomolecular pumps for generating high vacuum have snow! rotating pump shafts, which are usually stored in ball or plain bearings. Due to the high mechanical load of the bearings and other mechanical components of turbomolecular pumps, a sudden failure of the turbomolecular pump due to mechanical damage may occur. The failure of turbomolecular pumps sometimes occurs spontaneously and unpredictably. Due to the high requirements, the operating time of such turbomolecular pumps is very different, so that a failure of the turbomolecular pump through regular service intervals can be difficult to avoid, or the service intervals must be carried out in extremely short time intervals. The failure of a turbomolecular pump, which is operated for example in a clean room, often results in a production interruption. Furthermore, a bearing damage often leads to blocking of the shaft.
- the analysis device has a vibration pickup and an evaluation device.
- the vibration sensor is connected to the turbo-oscular pump.
- the recorded vibration spectrum is displayed by means of the evaluation device, for example in a diagram.
- the person skilled in the art recognizes whether damage to mechanical components, in particular of the bearings, is present, and thus shortly a failure of the pump is to be expected.
- turbomolecular pumps in which, for example, a bearing has a high degree of wear, not only individual spectral lines are pronounced, but a broadband increase in the vibration values can be recognized.
- the verification of turbomolecular pumps thus requires a complex on-site measurement by a specialist. In order to avoid a Totaiausfall this must be done in short, regular intervals. Despite such a test service, there are now and then total failures of turbomolecular pumps, which can lead to considerable consequential damage.
- the object of the invention is to report an occurrence of total failures of a turbomolecular pump and in particular to reduce the personnel expenditure for checking.
- the object is achieved by a method according to claim 1 or a turbomotive pump according to claim 13.
- a vibration sensor which is connected to the Turbomoiekularpumpe, at least at one frequency Schwingungsver- iauf determined.
- the vibration sensor is in particular constantly connected to the turbomolecular pump, in which case in particular a mechanical Connection to the turbomolecular pump components to be monitored, in particular the bearings, takes place.
- the at least one vibration profile determined by the vibration pick-up is transmitted to an evaluation device, which is also preferably stationary and is connected directly to the turbomolecular pump.
- the evaluation device is integrated in the turbomolecular pump, for example arranged in the existing control of the turbomolecular pump.
- the evaluation device has a filter, which is in particular a tunable filter on. At the filter, a frequency is set, or is at a frequency. In this way, an associated oscillation amplitude can be determined.
- the tuning of the filter is done by setting different frequencies.
- the at least one specific oscillation amplitude is compared in the evaluation device with one or more limit values.
- the limit values are, for example, values determined by means of a standard vibration course of a pump with undamaged components.
- the limit values are determined empirically or are based on empirically determined values and stored in a memory element of the evaluation device. As soon as a limit value is exceeded, the evaluation device outputs a warning signal. Possibly. the output of a warning signal takes place only after multiple exceeding of the limit value, or after exceeding the limit value for a given longer period of time.
- a variable frequency filter is used as filter in the method according to the invention.
- this is an integrated frequency filter circuit.
- an integrated frequency filter circuit is a cost-effective component.
- switching capacitor filter preferably so-called “switched capacitor filter” are used, which are industrially produced as highly integrated semiconductor integrated circuit (IC) available and in the literature, for example "Semiconductor Circuit Technology; LJ Tietze, Ch. Schenk” are described.
- the frequency-determining filter time constant "T" is not defined by R * C, but by C / (Cs * fs). It is particularly advantageous that the capacitor switching frequency fs at Cs is simple, precise and variable to produce by ichebiiche micro-controller circuits. Furthermore, in integrated semiconductor circuits, capacitances are very easy to manufacture. In the described principle, the absolute size of the capacitor does not go into the determination of T, but only the ratio, which comes very close to the realization as an integrated circuit.
- Suitable Switched Capacitor Filter ICs are available from several manufacturers, including:
- the filter characteristics can be additionally influenced, if necessary, to produce e.g. to achieve steeper flanks or higher attenuations.
- the use of the existing microprocessor of the turbomolecular pump in addition to the use of the integrated frequency filter circuit, the use of the existing microprocessor of the turbomolecular pump.
- each turbomolecular pump is in particular for drive control and monitoring a microprocessor available.
- the computing capacity of the existing microprocessor is almost exhausted. Due to the use according to the invention of the integrated frequency filter circuit, the load of the internal microprocessor of the turbomolecular pump for carrying out the analysis, which is in particular an FFT analysis, is reduced.
- the method of discrete frequency analysis described here loads a typical microprocessor typically used for turbomolecular pumps with about 1% of the resources and requires almost no real-time capability. This has the advantage that the microprocessor bzgi, the vibration detection can be interrupted arbitrarily in favor of high-priority tasks, without affecting the measurement appreciable.
- a significant advantage of the method according to the invention using an integrated frequency filter circuit in conjunction with the already existing in the turbomolecule pump microprocessor is that by exploiting the remaining residual power of the microprocessor, in conjunction with the low-cost integrated frequency filter - Circuit with low additional costs and a very compact design an on ⁇ line-failure prediction is possible.
- the or, the limit values can be determined not only on the basis of a standard waveform of an undamaged pump, but also individually for each pump or at least each type of pump immediately after production or commissioning.
- a determination of the vibration rates at predetermined frequencies takes place at predetermined time intervals.
- vibration frequencies are determined in each case at the same frequencies, so that a comparison of the vibration amplitudes or of the total value determined from the vibration amplitudes can take place. It is thus possible to detect an amplitude change of individual amplitudes or a change of the total value. It can then be considered as a limit instead of or in addition to an absolute value and the temporal change, For example, it is possible to generate a warning signal even if the predetermined limit is not exceeded, but a rapid increase of individual amplitudes or the total value is detected.
- the addition of several amplitude values ensures that a single increase in a value, which may occur randomly or on the basis of singular condition changes, does not lead to the triggering of a warning signal. Since a large number of individual signal values increases before the failure of a mechanical component, for example as a result of the increase in the bearing clearance, the difference between the integrated / accumulated value of several oscillation amplitudes of an undamaged pump is large compared with the value of a damaged pump. By adding the oscillation amplitudes, it can be ensured with high probability that a warning signal is actually output only when service is required. Likewise, it can be ensured that an exceeding of a limit value is determined early, so that sufficient time remains to perform the service or possibly to replace the pump.
- the vibration sensor and the evaluation device are permanently connected to the turbomolecular pump, so that all the turbomolecular pumps that are to be monitored have a corresponding vibration sensor and an evaluation device.
- the determination of the amplitudes can thus be continuous or at least at short time intervals. No service staff is required for this, as this can be done automatically.
- the output of the warning signal preferably takes place via remote data transmission to a service device.
- the use of the processor present in the turbomolecular pump can preferably take place. This is possible because no large computing power is required to carry out the method according to the invention. Since the effort for carrying out the method according to the invention is low, the required calculations can be taken over by the existing microcontroller.
- the method according to the invention can thus be inexpensively implemented in existing turbomolecular pumps in a simple manner. Also, a fast processing of the monitoring data is not required because immediate reaction is not necessary. This is due to the fact that in the inventive method, a failure occurring in the future is detected early and thus an immediate reaction is not required.
- the required computing power and the required storage capacity is considerably lower than in known FFT methods used for checking ,
- the analysis principle preferably used according to the invention does not apply an FFT analysis (fast Fourier transformation), but rather determines the amplitude for each measured frequency range, ie each frequency to be analyzed individually (discretely).
- FFT fast Fourier transformation
- the corresponding data acquisition indeed requires much! Time, which, as stated above, is not detrimental to the practice of the invention.
- the FFT the signal to be examined is recorded in the time domain and converted into a frequency spectrum by the rule of the FFT. With appropriate computing power, this is very fast, but is not in demand here.
- the turbomolecular pump can thus be monitored oniine according to the invention.
- This has the advantage that regular, short-term analysis work by a specialist does not have to take place. The need for personnel to carry out the analysis work is thus significantly reduced. Rather, it is possible on the basis of GnSineuberwachung invention that as soon as a warning signal is received by the monitoring device, a specialist performs the maintenance of the pump. This can be done an exchange of individual pump components, as well as individual bearings. Possibly. It is also possible to replace the entire turbomolecule trap, so that the damaged turbomolecular pump can be repaired if necessary subsequently.
- turbomolecular pump it may be necessary to switch off the turbomolecular pump. This may be necessary depending on the application, for example in critical production situations. Also, a shutdown may be required depending on a second, possibly higher limit. If a second limit value is exceeded, it is to be feared that the turbomolecular pump will soon fail and that the required replacement can not be carried out in good time. This can be done automatically if necessary. As a result, the occurrence of Totaiausfalls, as well as the resulting consequential damage avoided.
- the critical frequency range can be determined empirically depending on the pump.
- the critical frequency range is in the range of 0.3 to 50 times the rotational frequency, in particular 8 to 16 times.
- turbomolecular pump parameters and / or consideration of the ambient conditions preferably additionally take place.
- the operating temperature, the operating time, the number of start cycles, the stand-by cycles and the load cycles, as well as the load condition can be taken into account.
- the transmission of a control signal to the service device preferably takes place at regular time intervals.
- the transmission of the KotroSIsignaSs also preferably takes place via remote data transmission, so that the Kontroüsignale be transmitted online.
- it can be checked by the monitoring device whether the evaluation device operates reliably. Failure of the evaluation could be determined unmitteibar.
- the value determined by integration can be transmitted by the control signal. This allows the monitoring device to check whether the transmitted value is plausible. Usually, the total value would need to increase over time due to wear and tear.
- the monitoring device can check the plausibility of the transmitted values. Such a plausibility check can also be carried out directly in the evaluation device.
- the invention relates to a turbomolecular pump, which is modified according to the invention so that it is suitable for carrying out the method described above.
- the turbomolecular pump has in a housing on a pumping device, which in particular has fast rotating shafts and corresponding bearings.
- a vibration sensor is mechanically connected.
- the vibration sensor can also be mechanically connected to a plurality of components to be monitored.
- the vibration sensor is a part of the turbomolecular pump and, in particular, disposed within the housing of the turbomolecular pump. This has the advantage that a good mechanical connection with the components to be monitored is possible.
- the turbomolecular pump has an evaluation device that is electrically connected to the vibration sensor.
- the evaluation device is preferably integrated into an existing control device of the turbomolecular pump.
- the evaluation device uses existing components of the controller, such as the microprocessor and / or the memory,
- the evaluation device has a filter to which a frequency is applied. This makes it possible to filter out an associated oscillation amplitude in order to compare it with a limit value as described above with reference to the method.
- the filter is tunable by concerns of different frequencies.
- the evaluation device is connected to an output device for outputting a warning signal.
- a warning sign! is generated when a limit value is exceeded, wherein the limit value is effected by a comparison of the signals emitted by the vibration sensor with comparison values stored in particular in the evaluation device.
- the output device is preferably an interface for transmitting the warning signal, in particular by means of data transmission, to a monitoring device.
- To monitor the turbomolecular pump it is thus not necessary for an external monitoring device to be connected to the turbomolecular pump and for a person skilled in the art to carry out a monitoring. Rather, online monitoring can be carried out easily. In this way, the occurring defects ⁇ th of total losses, and the thus caused damages, ver ⁇ avoided.
- the evaluation device preferably has a microprocessor and / or a memory element.
- the components present in the control of the turbomolecular pump are used. As a result, the cost can be significantly reduced.
- an integrated frequency filter circuit is used as filter, which, as described above with reference to the method, is preferably configured, further preferably a benefit of in the Turbomoieku- larpumpe especially for drive control and monitoring existing microprocessor, as described above with reference to the method.
- a determination device can additionally be provided. With the help of the determination device, which is in particular part of the evaluation device, the turbomolecular pump parameters or the environmental conditions in the output of the warning signal can be taken into account.
- an adaptation of the limit values can take place by means of a limit value adaptation device integrated in the evaluation device.
- FIG. 2 is a schematic representation of a recorded by a Vibrationsauf ⁇ participants vibration spectrum of a pump with an undamaged bearing and
- FIG. 3 shows a basic illustration of a vibration spectrum of a pump with a damaged bearing taken up by a vibration pickup.
- the schematic representation of the individual components shows a vibration sensor 10, which is mechanically connected to the monitored Turbomoiekular- pump components, in particular the bearings.
- the vibration sensor absorbs mechanical vibrations and converts them into an electrical signal.
- the electrical signal is supplied to the evaluation device 12.
- the evaluation device 12 has an amplifier 14, by means of which the voltage amplitude is increased.
- An amplifier 14 is connected to a frequency filter 16, which is in particular an integrated frequency filter circuit.
- the frequency filter 16 can be tuned by applying different frequencies. With the aid of a signal rectifier 18 adjoining the frequency filter 16, the filtered vibration signal is converted into a DC voltage signal.
- the DC signal is converted into a digital value by the analog-to-digital converter 20 connected to the signal rectifier 18. This digital value is then processed by the microprocessor 22.
- the microprocessor 22 is in particular the microprocessor already present for the main tasks, such as drive control and monitoring in the turbomolecular pump.
- a memory 24 is connected to the microprocessor 22.
- the comparison values are stored in order to compare the current vibration amplitude detected by the vibration pickup 10 and processed as described above with comparison values. If, in the comparison carried out by the microprocessor 22, it is determined that a limit value has been exceeded, the issuing of a warning signal to an output device 26 takes place.
- the output device 26 is connected to a monitoring device 30 via remote data transmission 28.
- the monitoring device 30 is preferably a service provider, such as a service center, and does not have to be arranged within the company in this respect.
- the microprocessor 22 may be connected to a determination device, not shown, for determining further turbomolecular pump parameters and / or for determining environmental conditions. The corresponding parameters can be taken into account when determining the warning signal or when determining the limit value.
- a numerical value is transmitted to the digital value-frequency converter 32 by the microprocessor 22.
- the digital value-frequency converter 32 determines therefrom an equivalent frequency by which the filter characteristic of the filter 16 is set. It is thus possible to adapt the filter characteristic depending on the requirement profile.
- the individual oscillation amplitudes measured at predetermined frequencies are preferably summed up by the microprocessor 22.
- the total value obtained by the summation is then compared to one or more limit values. Then, for example, when a first limit value is exceeded, a signal! generated, on the basis of which then a service or maintenance of the turbomolecular pump is performed. For example, when a second, higher limit value is exceeded, the turbomolecular pump is preferably switched off automatically.
- FIG. 2 shows a diagram of a vibration spectrum. This is a vibration spectrum of a satisfactorily operating turbomolecular pump, in which no bearings are damaged and also have no other mechanically relevant components damage.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2007800282256A CN101495760B (zh) | 2006-07-26 | 2007-06-22 | 用于确定涡轮分子泵的状态信息的方法和涡轮分子泵 |
US12/374,917 US20100054957A1 (en) | 2006-07-26 | 2007-06-22 | Method for determining a statement of a state of a turbomolecular pump and a turbomolecular pump |
JP2009521180A JP2009544888A (ja) | 2006-07-26 | 2007-06-22 | ターボ分子ポンプの状態を測定する方法及びターボ分子ポンプ |
EP07765561A EP2044331B1 (de) | 2006-07-26 | 2007-06-22 | Verfahren zur ermittlung einer aussage über einen zustand einer turbomolekularpumpe sowie eine turbomolekularpumpe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102006034478A DE102006034478A1 (de) | 2006-07-26 | 2006-07-26 | Verfahren zur Ermittlung einer Aussage über einen Zustand einer Turbomolekularpumpe sowie eine Turbomolekularpumpe |
DE102006034478.2 | 2006-07-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008012150A1 true WO2008012150A1 (de) | 2008-01-31 |
Family
ID=38476981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2007/056248 WO2008012150A1 (de) | 2006-07-26 | 2007-06-22 | Verfahren zur ermittlung einer aussage über einen zustand einer turbomolekularpumpe sowie eine turbomolekularpumpe |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100054957A1 (de) |
EP (1) | EP2044331B1 (de) |
JP (1) | JP2009544888A (de) |
CN (1) | CN101495760B (de) |
DE (1) | DE102006034478A1 (de) |
RU (1) | RU2009106215A (de) |
WO (1) | WO2008012150A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110028259A (ko) * | 2008-07-14 | 2011-03-17 | 에드워즈 가부시키가이샤 | 진공 펌프 |
US8676387B2 (en) | 2008-10-13 | 2014-03-18 | General Electric Company | Methods and systems for determining operating states of pumps |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102009005154A1 (de) * | 2009-01-15 | 2010-07-22 | Wilo Se | Vorrichtung zur Verbindung einer elektromotorischen Antriebseinheit mit einer Pumpeneinheit |
US8074499B2 (en) * | 2009-12-22 | 2011-12-13 | General Electric Company | Method and system for detecting a crack on a turbomachine blade |
CN102155425A (zh) * | 2011-04-14 | 2011-08-17 | 中山共享光电科技有限公司 | 检测高速高真空涡轮分子泵状态的方法 |
CN102425561B (zh) * | 2011-12-05 | 2014-04-30 | 北京中科科仪股份有限公司 | 一种磁悬浮分子泵动平衡方法 |
CN102425563B (zh) * | 2011-12-08 | 2014-03-12 | 北京中科科仪股份有限公司 | 同步抑制磁悬浮分子泵转子次临界振动的方法和系统 |
MX361171B (es) | 2013-04-26 | 2018-11-29 | Sulzer Management Ag | Método para evaluar un estado de desgaste de un módulo de una turbomáquina, módulo, y turbomáquina. |
GB2551337A (en) * | 2016-06-13 | 2017-12-20 | Edwards Ltd | Pump assembly, method and computer program |
EP3242036B1 (de) * | 2016-12-30 | 2020-10-28 | Grundfos Holding A/S | Verfahren zum erfassen eines zustandes eines pumpenaggregats |
DE102017203959A1 (de) * | 2017-03-10 | 2018-09-13 | KSB SE & Co. KGaA | Verfahren zum Betrieb einer drehzahlvariablen Umwälzpumpe sowie Umwälzpumpe zur Verfahrensausführung |
EP3557072B1 (de) * | 2019-02-27 | 2021-02-24 | Pfeiffer Vacuum Gmbh | Überwachung der lagereinrichtung einer vakuumpumpe |
DE102019111076A1 (de) * | 2019-04-29 | 2020-10-29 | Ebm-Papst Landshut Gmbh | Vorrichtung zur Betriebsüberwachung eines Ventilators |
GB2591100A (en) * | 2020-01-14 | 2021-07-21 | Edwards Ltd | Vacuum pump monitoring method and apparatus |
EP3808988B1 (de) * | 2020-03-27 | 2024-01-10 | Pfeiffer Vacuum Technology AG | Vakuumpumpe und verfahren zum überwachen einer vakuumpumpe |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4626754A (en) * | 1984-03-26 | 1986-12-02 | Societe Europeenne De Propulsion | Method and device for reducing the vibrations of rotating machines equipped with an active magnetic suspension |
EP0851127A2 (de) | 1996-12-27 | 1998-07-01 | VARIAN S.p.A. | Diagnoseverfahren und -Gerät für Vakuumpumpen |
EP1396649A2 (de) | 2002-09-03 | 2004-03-10 | BOC Edwards Technologies, Limited | Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen |
EP1574719A2 (de) * | 2004-02-19 | 2005-09-14 | The Boc Group, Inc. | Verfahren und Vorrichtung zur Reduzierung von Schwingungen in einer Pumpenanordnung |
DE102004048866A1 (de) * | 2004-10-07 | 2006-04-13 | Leybold Vacuum Gmbh | Schnelldrehende Vakuumpumpe |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4764760A (en) * | 1986-12-19 | 1988-08-16 | General Electric Company | Automatic gain control for machine tool monitor |
JPH01152335A (ja) * | 1987-12-09 | 1989-06-14 | Fuji Electric Co Ltd | ころがり軸受異常診断装置 |
JPH0740038B2 (ja) * | 1988-11-08 | 1995-05-01 | 日産自動車株式会社 | 加速度検出装置 |
JPH02222818A (ja) * | 1989-02-23 | 1990-09-05 | Fuji Electric Co Ltd | 歯車異常診断装置 |
JP3311484B2 (ja) * | 1994-04-25 | 2002-08-05 | 三菱電機株式会社 | 信号伝送装置及び信号伝送方法 |
JPH05118289A (ja) * | 1991-09-05 | 1993-05-14 | Ebara Corp | 真空ポンプの保護装置 |
JP3457353B2 (ja) * | 1993-05-25 | 2003-10-14 | ビーオーシーエドワーズテクノロジーズ株式会社 | 磁気軸受装置 |
DE19511430A1 (de) * | 1995-03-29 | 1996-10-02 | Leybold Ag | Umwälzgebläse, Vakuumpumpe oder dergleichen |
JP3211615B2 (ja) * | 1995-04-06 | 2001-09-25 | 日産自動車株式会社 | 機械作動音の異常判定方法 |
US6222336B1 (en) * | 1998-06-05 | 2001-04-24 | Seagate Technology Llc | Rotational vibration detection using spindle motor velocity sense coils |
JP2000283056A (ja) * | 1999-03-26 | 2000-10-10 | Hitachi Ltd | 真空ポンプ異常監視システム |
US6688561B2 (en) * | 2001-12-27 | 2004-02-10 | General Electric Company | Remote monitoring of grade crossing warning equipment |
DE20206267U1 (de) * | 2002-04-20 | 2003-08-28 | Leybold Vakuum Gmbh | Vakuumpumpe |
CA2493197C (en) * | 2002-08-23 | 2008-06-03 | York International Corporation | System and method for detecting rotating stall in a centrifugal compressor |
EP1533530B1 (de) * | 2003-11-18 | 2006-04-26 | VARIAN S.p.A. | Vakuumpumpe mit Schwingungsdämpfer |
DE102004054004A1 (de) * | 2004-11-09 | 2006-05-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem und Signalerzeugungsverfahren |
-
2006
- 2006-07-26 DE DE102006034478A patent/DE102006034478A1/de not_active Withdrawn
-
2007
- 2007-06-22 WO PCT/EP2007/056248 patent/WO2008012150A1/de active Application Filing
- 2007-06-22 US US12/374,917 patent/US20100054957A1/en not_active Abandoned
- 2007-06-22 RU RU2009106215/06A patent/RU2009106215A/ru not_active Application Discontinuation
- 2007-06-22 CN CN2007800282256A patent/CN101495760B/zh active Active
- 2007-06-22 JP JP2009521180A patent/JP2009544888A/ja active Pending
- 2007-06-22 EP EP07765561A patent/EP2044331B1/de active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4626754A (en) * | 1984-03-26 | 1986-12-02 | Societe Europeenne De Propulsion | Method and device for reducing the vibrations of rotating machines equipped with an active magnetic suspension |
EP0851127A2 (de) | 1996-12-27 | 1998-07-01 | VARIAN S.p.A. | Diagnoseverfahren und -Gerät für Vakuumpumpen |
EP1396649A2 (de) | 2002-09-03 | 2004-03-10 | BOC Edwards Technologies, Limited | Magnetische Lagervorrichtung mit Schwingungsbegrenzung, magnetische Lagervorrichtung mit Schätzungsfunktion für die Schwingung, und Pumpvorrichtung mit eingebauten magnetischen Lagervorrichtungen |
EP1574719A2 (de) * | 2004-02-19 | 2005-09-14 | The Boc Group, Inc. | Verfahren und Vorrichtung zur Reduzierung von Schwingungen in einer Pumpenanordnung |
DE102004048866A1 (de) * | 2004-10-07 | 2006-04-13 | Leybold Vacuum Gmbh | Schnelldrehende Vakuumpumpe |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20110028259A (ko) * | 2008-07-14 | 2011-03-17 | 에드워즈 가부시키가이샤 | 진공 펌프 |
EP2314877A1 (de) * | 2008-07-14 | 2011-04-27 | Edwards Japan Limited | Vakuumpumpe |
JPWO2010007975A1 (ja) * | 2008-07-14 | 2012-01-05 | エドワーズ株式会社 | 真空ポンプ |
EP2314877A4 (de) * | 2008-07-14 | 2015-03-11 | Edwards Japan Ltd | Vakuumpumpe |
JP5719592B2 (ja) * | 2008-07-14 | 2015-05-20 | エドワーズ株式会社 | 真空ポンプ |
KR101629979B1 (ko) * | 2008-07-14 | 2016-06-13 | 에드워즈 가부시키가이샤 | 진공 펌프 |
US8676387B2 (en) | 2008-10-13 | 2014-03-18 | General Electric Company | Methods and systems for determining operating states of pumps |
Also Published As
Publication number | Publication date |
---|---|
CN101495760B (zh) | 2011-08-10 |
EP2044331B1 (de) | 2011-06-15 |
RU2009106215A (ru) | 2010-09-10 |
DE102006034478A1 (de) | 2008-01-31 |
JP2009544888A (ja) | 2009-12-17 |
EP2044331A1 (de) | 2009-04-08 |
US20100054957A1 (en) | 2010-03-04 |
CN101495760A (zh) | 2009-07-29 |
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