WO2007115658A1 - Objectif pour un stéréomicroscope de type télescope - Google Patents

Objectif pour un stéréomicroscope de type télescope Download PDF

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Publication number
WO2007115658A1
WO2007115658A1 PCT/EP2007/002528 EP2007002528W WO2007115658A1 WO 2007115658 A1 WO2007115658 A1 WO 2007115658A1 EP 2007002528 W EP2007002528 W EP 2007002528W WO 2007115658 A1 WO2007115658 A1 WO 2007115658A1
Authority
WO
WIPO (PCT)
Prior art keywords
focal length
lens
total focal
refractive power
lenses
Prior art date
Application number
PCT/EP2007/002528
Other languages
German (de)
English (en)
Inventor
Rolf Wartmann
Jan Thirase
Original Assignee
Carl Zeiss Mikroimaging Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Mikroimaging Gmbh filed Critical Carl Zeiss Mikroimaging Gmbh
Priority to EP07723485A priority Critical patent/EP2002205A1/fr
Publication of WO2007115658A1 publication Critical patent/WO2007115658A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G02B21/20—Binocular arrangements
    • G02B21/22—Stereoscopic arrangements

Definitions

  • the invention relates to a high-resolution objective for stereomicroscopes of the telescope type.
  • Stereomicroscopes of this type are preferred for inspection of small objects, e.g. Semiconductor devices or micromechanical parts used for cell manipulation in the life sciences or in materials science. On the one hand, it is always a question of satisfying the need for an improved overview of the entire object during the inspection, and on the other hand being able to look at the smallest details on the object.
  • magnification changer is provided in each of the two stereoscopic viewing beam paths that pass from the object through the common objective.
  • These magnification changers are usually designed as afocal zoom systems, so that a continuous change in the size of the observed object field without changing the object and image position is possible.
  • the object is located in the focal point of the lens, is imaged via the lens and the magnification changer downstream of the lens to infinity and shines in this figure, the entrance pupil of the magnification changer completely from each.
  • the magnification changers are followed by tube lenses in the observation beam paths, which produce two different intermediate images, which the observer can view through eyepieces. Since the two intermediate images are different and separate from each other, the observer gains a spatial impression.
  • the diameters of the entrance pupils of the magnification changers are dependent on the respectively set magnification. They reach their maximum at the highest possible magnification.
  • the largest possible diameter of the object field Y is achieved at the smallest possible magnification.
  • EP 1 369 729 A2 describes an objective in which values A of 0.44 to 0.6 are achieved for the ratio A, combined with a value of 0.16 for the tangent of the field angle ⁇ .
  • the object of the invention is to provide a lens for use in telescope-type stereomicroscopes in which the resolution is at least 1000 lp / mm and an object field can be observed which is characterized by a value greater than 0, 16 is characterized for the tangent of the field angle ⁇ .
  • Ratio Y / f tan ⁇ > 0, 16 with ⁇ the field angle, Y the maximum diameter of the object field at the minimum set magnification and f the total focal length,
  • the refractive power D 1 of the first lens group G 1 and the refractive power D 2 of the second lens group G 2 together are preferably between two thirds and three quarters of the refractive power D of the total objective.
  • the common focal length Dg e m of the two lens groups Gl and G2 should be in the range of 0.7 to 1.3 times the total focal length f.
  • a telescope-type stereomicroscope lens is available which, both in terms of resolving power and in terms of the size of the field-winding. kels exceeds the known from the prior art lenses.
  • the relatively small working distance of 20% to 45% of the lens focal length is not critical for use in microscopes with objective changer, because it can be assumed that this lens is only used when the manipulations are completed on the object and the object only observed becomes.
  • Fig.l a first embodiment of the lens according to the invention
  • Figure 3 shows a third embodiment.
  • the lens consists of the three lens groups GIl to G13 with the lenses LIl to L16 and the following tabular design data with radii r, thicknesses d and distances a in mm, refractive indices n e at the wavelength of 546, 07 nm and pay off v e .
  • FIG. 2 shows an embodiment of the objective according to the invention, which in turn consists of three lens groups G21 to G23, here with lenses L21 to L29 and the design data according to the following table, in which the radii r, thicknesses d and distances a in mm, refractive indices n e at the wavelength of 546.07 nm and payoff v e are given.
  • the lens comprises the three lens groups G31 to G33, but with the lenses L31 to L37.
  • the con- The design data for this objective are given in the following table with radii r, thicknesses d and distances a in mm, refractive indices n e at the wavelength of 546.07 nm and payoff v e .

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)

Abstract

L'invention concerne un objectif à haute résolution pour stéréomicroscopes de type télescope. Le but avec les stéréomicroscopes de ce type est souvent d'une part de satisfaire à la nécessité d'une meilleure vue d'ensemble de l'objet pendant l'inspection et d'autre part de pouvoir aussi observer les petits détails sur l'objet. Des objectifs de configuration particulière sont ainsi nécessaires. L'objectif conforme à l'invention comprend deux groupes de lentilles G1 et G2 ayant respectivement une réfringence positive ainsi qu'un troisième groupe de lentilles G3 à réfringence négative. Il est caractérisé par les caractéristiques suivantes : - distance focale totale f dans la plage de 35 mm à 22 mm, - distance de travail dans la plage de 0,2 à 0,45 fois la distance focale totale f, - rapport EP/f=0,6...0,95 où EP désigne le diamètre de la pupille d'entrée avec le grossissement réglé au maximum et f la distance focale totale, - rapport Y/f = tanω > 0,16 où ω désigne l'angle de champ, Y le diamètre maximum du champ d'objet avec le grossissement réglé au minimum et f la distance focale totale, - pouvoir de résolution dans la plage de 1000 Lp/mm à 1700 Lp /mm (Lp = paire de lignes).
PCT/EP2007/002528 2006-04-04 2007-03-22 Objectif pour un stéréomicroscope de type télescope WO2007115658A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP07723485A EP2002205A1 (fr) 2006-04-04 2007-03-22 Objectif pour un stereomicroscope de type telescope

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006015579.3 2006-04-04
DE102006015579.3A DE102006015579B4 (de) 2006-04-04 2006-04-04 Objektiv für Stereomikroskope vom Teleskoptyp

Publications (1)

Publication Number Publication Date
WO2007115658A1 true WO2007115658A1 (fr) 2007-10-18

Family

ID=38110338

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/002528 WO2007115658A1 (fr) 2006-04-04 2007-03-22 Objectif pour un stéréomicroscope de type télescope

Country Status (3)

Country Link
EP (1) EP2002205A1 (fr)
DE (1) DE102006015579B4 (fr)
WO (1) WO2007115658A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6226119B1 (en) * 1997-09-19 2001-05-01 Olympus Optical Co., Ltd. High-magnification objective optical system for binocular stereomicroscopes
EP1369729A2 (fr) * 2002-06-06 2003-12-10 Leica Microsystems (Schweiz) AG Objectif du type télescope pour des stéreomicroscopes

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0760218B2 (ja) 1984-07-31 1995-06-28 オリンパス光学工業株式会社 単対物型双眼実体顕微鏡
JP3892923B2 (ja) 1996-12-13 2007-03-14 オリンパス株式会社 実体顕微鏡およびそれに用いる実体顕微鏡用コンバージョンレンズ
JP2001147378A (ja) 1999-11-19 2001-05-29 Nikon Corp 平行系実体顕微鏡用対物レンズ系

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6226119B1 (en) * 1997-09-19 2001-05-01 Olympus Optical Co., Ltd. High-magnification objective optical system for binocular stereomicroscopes
EP1369729A2 (fr) * 2002-06-06 2003-12-10 Leica Microsystems (Schweiz) AG Objectif du type télescope pour des stéreomicroscopes

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MURTY A S ET AL: "DESIGN OF A HIGH-RESOLUTION STEREO ZOOM MICROSCOPE", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 36, no. 1, January 1997 (1997-01-01), pages 201 - 209, XP000683132, ISSN: 0091-3286 *
ZIMMER K-P: "OPTICAL DESIGNS FOR STEREOMICROSCOPES", PROCEEDINGS OF THE SPIE, SPIE, BELLINGHAM, VA, US, vol. 3482, 1998, pages 690 - 697, XP009013507, ISSN: 0277-786X *

Also Published As

Publication number Publication date
EP2002205A1 (fr) 2008-12-17
DE102006015579A1 (de) 2007-10-18
DE102006015579B4 (de) 2022-08-25

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