WO2007105381A1 - Photosensitive resin composition for photospacer, method for producing photospacer, substrate for liquid crystal display, liquid crystal display element, and liquid crystal display - Google Patents

Photosensitive resin composition for photospacer, method for producing photospacer, substrate for liquid crystal display, liquid crystal display element, and liquid crystal display Download PDF

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Publication number
WO2007105381A1
WO2007105381A1 PCT/JP2007/051459 JP2007051459W WO2007105381A1 WO 2007105381 A1 WO2007105381 A1 WO 2007105381A1 JP 2007051459 W JP2007051459 W JP 2007051459W WO 2007105381 A1 WO2007105381 A1 WO 2007105381A1
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Prior art keywords
liquid crystal
photosensitive resin
resin composition
meth
photospacer
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PCT/JP2007/051459
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French (fr)
Japanese (ja)
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Katsuya Takemasa
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Fujifilm Corporation
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Publication of WO2007105381A1 publication Critical patent/WO2007105381A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F265/00Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F265/00Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
    • C08F265/04Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00 on to polymers of esters
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L75/00Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
    • C08L75/04Polyurethanes
    • C08L75/14Polyurethanes having carbon-to-carbon unsaturated bonds
    • C08L75/16Polyurethanes having carbon-to-carbon unsaturated bonds having terminal carbon-to-carbon unsaturated bonds
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13394Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Definitions

  • Photospacer photosensitive resin composition photospacer manufacturing method, liquid crystal display substrate, liquid crystal display element, and liquid crystal display device
  • the present invention relates to a photosensitive resin composition for a photospacer suitable for the production of a spacer constituting a display device, and the production of the photospacer, in which variation in the cell thickness of the liquid crystal cell tends to cause display unevenness.
  • the present invention relates to a method, and a substrate for a liquid crystal display device provided with a photospacer produced by this method, a liquid crystal display element, and a liquid crystal display device.
  • a liquid crystal display device has a liquid crystal layer that can display an image with a predetermined orientation between a pair of substrates, and maintaining the distance between the substrates, that is, the thickness of the liquid crystal layer, determines the image quality.
  • a spacer for keeping the thickness of the liquid crystal layer constant is provided.
  • the thickness between the substrates is generally referred to as the “cell thickness”, and the cell thickness usually indicates the thickness of the liquid crystal layer, in other words, the distance between two electrodes applying an electric field to the liquid crystal in the display area. Is.
  • Spacers have been conventionally formed by bead dispersion, but in recent years, spacers with high positional accuracy have been formed by photolithography using a photosensitive resin composition. Come on! A spacer formed using such a photosensitive resin composition is called a photospacer.
  • Non-patent document 1 a TN mode has been adopted as a display mode of a liquid crystal display device (for example, Non-patent document 1)
  • the problem of narrow viewing angle VA mode with a wide viewing angle has been proposed (for example, see non-patent document 2).
  • a low dielectric constant protrusion called a rib is formed on one or both of a pair of upper and lower transparent electrodes, or both the pair of upper and lower transparent electrodes are patterned (for example, Non-Patent Document 3).
  • a partial tilt to the electric field generated between the electrodes the orientation of the liquid crystal is multi-domained to realize a display device that can observe any angular force with the same brightness. is doing.
  • Those using ribs are called MVA, ASV, CPA, etc., and those using both upper and lower transparent electrodes are called PVA.
  • This VA mode is one of the display modes in which fluctuations in the cell thickness of the liquid crystal cells tend to cause display unevenness, and other display modes such as the IPS mode and OCB mode also show the same tendency.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2003-207787
  • Non-Patent Document 1 “Forefront of Liquid Crystal Business” by Yoshihiro Iwai, p. 41, published by Kogyo Kenkyukai (1993)
  • Non-patent document 2 “Nikkei Microdevices separate volume Flat Panel Display 2003”, practical edition, pages 82-85, Nikkei BP
  • Non-Patent Document 3 “Nikkei Microdevices separate volume Flat Panel Display 2003”, practical edition, page 103, Nikkei BP
  • the VA mode described above employs a birefringence mode of liquid crystal, and thus the transmittance depends on the cell thickness (d), and the cell thickness unevenness is easily detected as the brightness unevenness. In other words, display unevenness is likely to occur due to variations in cell thickness. In addition, it is effective to further reduce the cell thickness from the conventional (TN mode) of 4.5 ⁇ m for faster response of the display.
  • the present invention has been made in view of the above, and has a high degree of deformation recovery, and in particular for a photospacer that can eliminate display unevenness in a liquid crystal display device having a cell thickness of 2 to 4 ⁇ m.
  • Photosensitive resin composition, method for producing photospacer using the same, liquid crystal display substrate, liquid crystal display element, and liquid crystal display capable of preventing display unevenness and displaying high-quality image An object is to provide an apparatus and to achieve the object. Means for solving the problem
  • the deformation recovery property is remarkably improved, and in particular, a thin structure having a cell thickness of 2 to 4 m. Obtained knowledge that it is particularly effective in improving display unevenness that tends to occur when
  • a photosensitive resin composition for a photospacer comprising ⁇ 1> an alkali-soluble polymer substance, a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups, and a photopolymerization initiator. It is a thing.
  • the polymerizable monomer power is a compound represented by the following general formula (A) or (B)
  • a photosensitive resin composition for a photospacer according to ⁇ 1> is a photosensitive resin composition for a photospacer according to ⁇ 1>.
  • R represents the following formula (a), (b) or (c).
  • N represents an integer of 2 to 8.
  • ⁇ 3> At least two substrates, a liquid crystal provided between the substrates, two electrodes for applying an electric field to the liquid crystal, and a photospacer for regulating a cell thickness between the substrates.
  • a method for producing the photospacer in a liquid crystal display device comprising: a photosensitive spacer for a photospacer according to ⁇ 1> or ⁇ 2> on one of the two substrates.
  • a layer forming step of forming a photosensitive resin layer containing a fat composition, and the formed photosensitive resin And a patterning step of patterning the layer by exposing and alkali developing the layer.
  • a photosensitive resin layer having a photosensitive resin layer composed of the photosensitive resin composition for a photospacer according to ⁇ 1> or ⁇ 2> on a temporary support In the layer forming step, a photosensitive resin layer having a photosensitive resin layer composed of the photosensitive resin composition for a photospacer according to ⁇ 1> or ⁇ 2> on a temporary support.
  • a solution containing the photosensitive resin composition for a photospacer according to ⁇ 1> or ⁇ 2> is applied onto one of the two substrates and dried. Yes This is a method for manufacturing a photospacer as described in ⁇ 3>.
  • a substrate for a liquid crystal display device comprising a photospacer produced by the method for producing a photospacer according to any one of ⁇ 3> to ⁇ 5>.
  • a liquid crystal display device comprising the liquid crystal display device substrate according to ⁇ 6>.
  • a liquid crystal display device comprising the liquid crystal display element according to ⁇ 7>.
  • the photosensitive resin composition for a photospacer has a high degree of deformation recovery and can eliminate display unevenness particularly in a liquid crystal display device having a cell thickness of 2 to 4 ⁇ m.
  • a method of manufacturing a photospacer using the same, and a liquid crystal display device substrate, a liquid crystal display element, and a liquid crystal display device capable of preventing display unevenness and displaying a high-quality image can be provided. .
  • the present invention is particularly effective in improving display unevenness in a liquid crystal display device that easily causes display unevenness due to fluctuations in cell thickness even when the cell thickness is 2 to 4111.
  • FIG. 1 is a schematic cross-sectional view showing a configuration example of an MVA mode liquid crystal display element of the present invention.
  • FIG. 2 is a schematic cross-sectional view showing a configuration example of a PVA mode liquid crystal display element of the present invention.
  • the photosensitive resin composition for photospacer of the present invention comprises an alkali-soluble polymer substance and
  • the photospacer produced from the photosensitive resin composition for a photospacer of the present invention has a high degree of deformation recovery, display unevenness in the display element can be eliminated.
  • the method for producing a photospacer of the present invention includes at least two substrates, a liquid crystal provided between the substrates, two electrodes for applying an electric field to the liquid crystal, and the space between the substrates.
  • a photospacer for regulating the cell thickness of the liquid crystal display device, and the photospacer of the present invention is formed on one of the two substrates.
  • the photospacer according to the present invention is formed from the photosensitive resin composition for photospacers of the present invention, and 5 to 15 urethane groups as polymerizable monomers in the composition.
  • a compound containing an acrylic group is used.
  • a photospacer having a high degree of deformation recovery can be easily produced.
  • a photosensitive resin layer containing the photosensitive resin composition for a photospacer of the present invention on a substrate hereinafter, also simply referred to as “photosensitive resin composition layer”. This is a process of forming.
  • This photosensitive resin composition layer constitutes a photospacer that has good deformation recovery properties and can maintain a uniform cell thickness through the manufacturing process described later.
  • display unevenness in an image in a display device which tends to cause display unevenness due to a change in cell thickness, is effectively eliminated.
  • a method of forming a photosensitive resin composition layer on a substrate (a) a method of applying a solution containing the photosensitive resin composition for a photospacer of the present invention by a known application method, and (b) A method of laminating by a transfer method using a photosensitive transfer material is preferable. Each is described below.
  • the photosensitive resin composition can be applied by a known application method such as spin coating, curtain coating, slit coating, dip coating, air knife coating, roller coating, wire bar coating, gravure coating. Or an etha trusion coating method using a popper described in US Pat. No. 2,681,294. Among them, the method using a slit nozzle or a slit coater is preferable.
  • a mode in which a photosensitive resin composition is applied onto a substrate with a slit nozzle and dried to form a photosensitive resin composition layer on the substrate is preferable. is there.
  • the layer thickness is preferably 0.5 to 10.0 ⁇ m, more preferably 1 to 6 / ⁇ ⁇ .
  • the layer thickness is within the above range, the generation of pinholes during the formation of coating during production can be prevented, and development and removal of unexposed areas can be performed without requiring a long time.
  • the slit-shaped nozzle is a slit-shaped nozzle having a slit-shaped hole at a portion from which the liquid is discharged.
  • a slit coater having the slit nozzle JP-A-2004-89851, JP-A-2004-17043, JP-A-2003-170098, JP-A-2003-164787, JP-A-2003-10767, JP-A-2002-79163, JP-A-2001-310147, etc.
  • the slit-shaped nozzles and slit coaters described are preferably used.
  • the photosensitive resin composition layer formed in a film shape on the temporary support is pressure-bonded or thermocompression-bonded with a roller or flat plate heated and Z or pressurized to the substrate surface. Then, the photosensitive resin composition layer is transferred onto the substrate by peeling off the temporary support.
  • the methods described in JP-A-7-110575, JP-A-11-77942, column 2000-334836, column 2002-148794 are disclosed. Examples include a minator and a laminating method. From the viewpoint of low foreign matter, it is preferable to use the method described in JP-A-7-110575.
  • a photosensitive transfer material for forming a spacer having a photosensitive resin composition layer on a temporary support is used, and a photosensitive resin is formed on a substrate.
  • An embodiment in which the composition layer is transferred and formed is preferable.
  • the layer thickness when the photosensitive resin composition layer is transferred and formed is also the same as when the coating is formed.
  • the surface of the exposed photosensitive resin composition layer is superposed on the substrate surface as the transfer material, Apply pressure (heat) and bond (laminate). Bonding can be suitably performed using a known laminator (vacuum laminator or the like), and an auto cut laminator is preferable from the viewpoint of increasing productivity.
  • Examples of the substrate on which the photosensitive resin composition layer is formed include, for example, a transparent substrate (for example, a glass substrate or a plastic substrate), a substrate with a transparent conductive film (for example, an ITO film), and a substrate with a color filter (color). And a driving substrate with a driving element (for example, a thin film transistor [TFT]).
  • the thickness of the substrate is generally preferably 700 to 1200 / ⁇ ⁇ .
  • the substrate can be subjected to a coupling treatment in advance to improve the adhesion between the photosensitive resin composition or the photosensitive resin composition layer of the photosensitive transfer material.
  • a coupling treatment a method described in JP-A-2000-39033 is preferably used.
  • an oxygen-blocking film can be further provided on the photosensitive resin composition layer.
  • the exposure sensitivity can be increased, and the oxygen blocking film can have the same structure as that described in the later section of the intermediate layer.
  • the thickness of the oxygen blocking film is preferably 0.5 to 3.0 m.
  • thermoplastic resin layer having cushioning properties may be provided.
  • the photosensitive resin composition (photosensitive resin composition for photospacers of the present invention) is an alkali. It contains a soluble polymer substance, a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups, and a photopolymerization initiator. Moreover, it can comprise using other components, such as a coloring agent and surfactant, as needed.
  • the alkali-soluble polymer substance has a function as a binder component in forming a photospacer, and preferably has a crosslinking group itself.
  • the alcoholic soluble polymer substance may be a monomer homopolymer or a copolymer composed of a plurality of monomers, which are appropriately selected according to the purpose, etc.
  • This copolymer includes, for example, a polymerizable monomer having a carboxyl group, a monomer represented by the following formula (2), an aromatic ring and (meth) acrylate having one or more Z or aliphatic rings, and If necessary, other monomers copolymerizable with these can be obtained by copolymerizing by a known method.
  • R 1 represents a hydrogen atom or a methyl group
  • R 2 to R 6 each independently have a hydrogen atom or a substituent.
  • Examples of the polymerizable monomer having a carboxyl group include (meth) acrylic acid, belbenzoic acid, maleic acid, itaconic acid, crotonic acid, cinnamic acid, and acrylic acid dimer.
  • an addition reaction product of a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate and a cyclic anhydride such as maleic anhydride or phthalic anhydride can also be used.
  • An anhydride monomer such as maleic anhydride and itaconic anhydride can also be used as a precursor of carboxylic acid.
  • (meth) acrylic acid is particularly preferable from the viewpoint of polymerizability and raw material price.
  • Examples of the monomer represented by the formula (2) include, for example, aryl (meth) acrylate, 3 chloro 2 probe (meth) acrylate, 3 phenol 2 probe (meta) ) Atrelate, 3— (Hydroxyphenol) 2 — Probe (Meth) acrylate, 3 — (2 — Hydroxyphenol) — 2 — Probe (Meth) acrylate, 3 — (3,4 dihydroxyphenyl) —2—probe (meth) acrylate, 3- (2,4-dihydroxyphenol) 2—probe (meth) acrylate, 3— ( 3, 4, 5 Trihydroxyphenyl) 1-2-probe (meth) acrylate, 3- (3-methoxy-4-hydroxyphenol) 2-probe (meth) acrylate, 3— (3,4 dihydroxy mono-5-methoxyphenol) 2—probe (meth) acrylate, 3— (3,5 dimethoxy monohydroxyl ester) 2 Probe (meth) atarylate, 3— (2 Hydr Hydroxyphenol
  • aryl (meth) acrylate is particularly preferred in terms of curability and raw material price.
  • Examples of the "(meth) acrylate having at least one aromatic ring and Z or aliphatic ring” include, for example, (meth) acrylic acid cycloalkyl ester [for example, (meth) acrylic acid cyclohexyl, (Meth) acrylic acid norbornyl, (meth) acrylic acid adamantyl, etc.], (meth) acrylic acid aryl ester [e.g., (meth) acrylic acid fur, (meth) acrylic acid black mouth foul, (Meth) acrylic acid methoxy file, (meth) acrylic acid naphthyl, etc.], aralkyl esters [eg, (meth) acrylic acid benzyl, (meth) acrylic acid phenethyl etc.], and the like.
  • (meth) acrylic acid cycloalkyl ester for example, (meth) acrylic acid cyclohexyl, (Meth) acrylic acid norbornyl, (meth) acrylic acid adamantyl, etc.
  • benzyl (meth) acrylate and cyclohexyl (meth) acrylate are preferred in terms of raw material price, solubility, pigment dispersibility, and the like.
  • (meth) acrylic acid alkyl ester for example, methyl (meth) acrylate, ethyl (meth) acrylate, Propyl (meth) acrylate, isopropyl (meth) acrylate, (meth) acrylic acid n— Butyl, isobutyl (meth) acrylate, t-butyl (meth) acrylate, hexyl (meth) acrylate, octyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, lauryl (meth) acrylate , (Meth) acrylic acid such as stearyl (meth) acrylate ( 1 to 18 ) alkyl ester, etc.];
  • (Meth) acrylic acid aralkyl esters for example, (meth) acrylic acid benzyl, etc.], substituted (meth) acrylic acid alkyl esters [for example, dimethylaminoethyl (meth) acrylate, diethylaminoethyl ( (Meth) acrylate, dimethylaminopropyl (meth) acrylate, etc.], (meth) acrylamides [eg (meth) acrylamide, dimethyl (meth) acrylamide, isopropyl (Meth) acrylamide, t-butyl (meth) acrylamide, etc.], substituted (meth) acrylamides [for example, (meth) atalyloylmorpholine, dimethylaminopropyl (meth) acrylamide, etc.], aromatic bullets [for example, scan styrene, Bulle toluene, alpha - methyl styrene, etc.], heterocycl
  • Formamide, ⁇ -buluacetoamide, etc.] aryl esters [eg, allylic acetate, etc.], halogen-containing monomers [eg, salt vinylidene, vinyl chloride, etc.], cyanobyl [eg, (meth) acrylonitrile, etc. ], Olefins [for example, ethylene, propylene, etc.], and the like.
  • (meth) acrylic acid alkyl ester for example, (meth) methacrylic acid methyl ester, from the viewpoint of the copolymerizability, the solvent solubility of the polymer to be formed, the film forming property of the resulting film, and the like.
  • copolymerizable components may be used alone or in combination of two or more.
  • the copolymerization ratio of each component is "structural unit having a carboxyl group" 1 0-40 Monore 0/0 force S
  • the structural unit having a carboxyl group is within the above range, good developability is obtained.
  • the developer resistance of the image area is also good.
  • it or 20-80 Monore 0/0 force S preferably "Concrete unit structure represented by the general formula (I)", 20-75 Monore 0/0 force S, and particularly preferably 25 to 75 Monore%.
  • the weight average molecular weight of the copolymer suitable as the alkali-soluble polymer substance is preferably 5,000 to 200,000 S, more preferably 10,000 to 100,000, more preferably 20,000 to 80,000. Particularly preferred. If the weight average molecular weight is within the above range, it is desirable from the viewpoint of the suitability for production of the copolymer and developability.
  • copolymer suitable as an alkali-soluble polymer substance include alkali-soluble binders described in paragraph numbers [0031] to [0054] of JP 2003-131379 A, JP 2005 — Alkali-soluble binder described in paragraph Nos. [0035] to [0036] of No. 3861, and a resin having an aryl group and a hydroxyl group described in paragraph Nos. [0035] to [0037] of No. 2003-207787 , Can be referred to.
  • the copolymer suitable as the alkali-soluble polymer substance can be obtained by copolymerizing a corresponding monomer according to a conventional method by a known method. For example, it can be obtained by dissolving these monomers in a suitable solvent and adding a radical polymerization initiator to polymerize them in a solution.
  • suitable solvents for copolymerization include forces that can be arbitrarily selected according to the solubility of the monomer and the copolymer to be produced.
  • a polymerization initiator can be used, and examples of the polymerization initiator include 2, 2′-azobis (isobuty-mouth-tolyl) ( ⁇ ), 2, 2′-azobis mono (2 , 4'-dimethylvale-tolyl), peroxides such as benzoyl peroxide, and persulfates.
  • a known chain transfer agent may be appropriately used for the purpose of adjusting the molecular weight.
  • the polymerization concentration is preferably 5 to 50% by mass, more preferably 10 to 40% by mass.
  • the content of the alkali-soluble polymer substance in the photosensitive resin composition is 30 to 70 masses relative to the solid content of the composition or the layer. 40% to 50% by mass is preferred.
  • the polymerizable monomer according to the present invention contains a urethane group and 5 to 15 acrylic groups. If the number of acryl groups is less than 4, the deformation recovery rate of the photospacer may be insufficient, and if it exceeds 15, the development time increases, which is not preferable in production.
  • the number of acrylic groups is more preferably 5-9, and most preferably 5-6.
  • Examples of the monomer having 5 to 6 acrylic groups include compounds represented by the following general formula ( ⁇ ) or ( ⁇ ).
  • R represents the following formula (a) (b) or (c).
  • n represents an integer of 28.
  • monomers having 6 talyl groups UA-306H, UA-306T, and UA-306I manufactured by Kyoeisha Chemical Co., Ltd. are used.
  • the As a monomer having 9 acrylic groups there is UA-32P manufactured by Shin-Nakamura Igaku.
  • the polymerizable monomers may be used in combination of two or more, in addition to being used alone.
  • Examples of monomers that may be used in combination include ester compounds, amide compounds, and other compounds.
  • ester compound examples include monofunctional (meth) acrylic acid ester, polyfunctional (meth) acrylic acid ester, itaconic acid ester, crotonic acid ester, isocrotonic acid ester, maleic acid ester, and other ester compounds. , Etc. These may be used alone or in combination of two or more. Of these, monofunctional (meth) acrylic acid esters and polyfunctional (meth) acrylic acid esters are preferred.
  • Examples of the monofunctional (meth) acrylic acid ester include polyethylene glycol mono
  • Examples of the polyfunctional (meth) acrylic acid ester include polyethylene glycol di (meth) acrylate, ethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, 1, 3-Butanediol di (meth) acrylate, tetramethylene glycol di (meth) acrylate, hexanediol di (meth) acrylate, pentaerythritol tri (meth) acrylate, penta erythritol tetra (meth) acrylate, di Pentaerythritol di (meth) acrylate, dipentaerythritol tri (meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol hex (meth) acrylate, dipenta erythritol poly (meth) acrylate Sorbito Tri (meth)
  • polyfunctional (meth) acrylic acid ester examples include those obtained by adding ethylene oxide or propylene oxide to a polyfunctional alcohol such as glycerin or trimethylolethane, JP-B 48-41708, JP-B 50-6034 Polyurethane acrylates described in JP-A-51-37193, JP-A-48-64183, JP-B-49-43191, and JP-B-52-30490 Epoxy acrylate which is a reaction product of epoxy resin and (meth) acrylic acid, and (meth) acrylate ester urethane urethane (meth) acrylate and the like described in JP-A-60-258539 And bull esters.
  • a polyfunctional alcohol such as glycerin or trimethylolethane
  • JP-B 48-41708, JP-B 50-6034 Polyurethane acrylates described in JP-A-51-37193, JP-A-48-64183, JP-B-49-43191, and JP
  • Examples of the "other ester compound” include trimethylolpropane tri (atallyloyloxypropyl) ether, tri (atariloy mouth kichetil) isocyanurate, Japan Adhesion Association Vol. 20, No. 7, No. 300. Photocurable monomers and oligomers described on page 308.
  • examples of the amide compound include amides (monomers) of unsaturated carboxylic acids and aliphatic polyvalent amine compounds, and specific examples include methylene bis (meth) acrylamide, 1, 6-hexamethylene bis- (meth) acrylamide, diethylenetriamine tris (meth) acrylamide, xylylene bis (meth) acrylamide, and the like described in JP-A-60-258539. And (meth) acrylic acid amide.
  • Examples of the “other compounds” include aryl compounds described in JP-A-60-258539.
  • the content of the polymerizable monomer in the photosensitive resin composition (or photosensitive resin composition layer) is 10 to 60% by mass with respect to the total solid content of the composition or the layer. 20 to 50% by mass is more preferable.
  • the ratio (MZB) of the content B (mass%) of the alkali-soluble polymer substance to the content M (mass%) of the polymerizable monomer in the photosensitive resin composition Is preferably 0.6 to 1.5.
  • a more preferable range of the ratio M / B is 0.7 to 1.0.
  • the photopolymerization initiator preferably contains at least one component having a molecular extinction coefficient of about 50 or more in a wavelength region of about 300 to 500 nm.
  • aromatic ketones as disclosed in JP-A-2-48664, JP-A-1-152449, and JP-A-2-153353, aromatic ketones, oral fin dimers, benzoin, benzoin ethers, polyhalo And halogens, hydrocarbon derivatives, ketone compounds, ketoxime compounds, organic peroxides, thio compounds, hexaarylbiimidazoles, aromatic onium salts, ketoxime ethers, and the like.
  • Two or more photopolymerization initiators may be used in combination in addition to the single photoinitiator.
  • the content of the photopolymerization initiator in the photosensitive resin composition is from 0.6 to 0.6 with respect to the amount of the thread and the cross-linking group in the composition. 2.82 mol ⁇ mol is preferred 1.0 to 2.0 mol ⁇ mol is more preferred. When the content is within the above range, the crosslinked structure is stabilized, and the height of the produced photospacer can be kept uniform.
  • the photosensitive resin composition may further comprise a colorant, a surface active agent, if necessary, in addition to the alkali-soluble polymer substance, the polymerizable monomer, and the photopolymerization initiator.
  • Additives such as an agent, a solvent, a thermal polymerization inhibitor, and an ultraviolet absorber can be used.
  • Examples of the colorant include dyes and pigments. As for the preferred pigment type, size, etc., for example, the description in JP-A-11-149008 can be selected as appropriate. When a colorant such as a pigment is contained, a colored pixel can be formed.
  • Examples of usable pigments include extender pigments and colored pigments.
  • the extender pigment is not particularly limited and may be appropriately selected depending on the intended purpose. For example, extender pigments described in paragraphs [0035] to [0041] of JP-A No. 2003-302639 are preferable.
  • Preferable examples of the color pigment include the pigments described in paragraph No. [0043] of JP-A-2003-302639.
  • JP 2003-177520 JP 2003-177520
  • JP 2003-177520 The surfactants described in paragraph numbers [0012] to [0015] of JP-A-11-133, paragraph numbers [0034] to [0035] of JP-A-11 133600, and JP-A-6-16684 are preferably exemplified.
  • fluorosurfactants and Z or silicon surfactants fluorine surfactants or silicon surfactants, surfactants containing both fluorine and silicon atoms
  • fluorosurfactants and Z or silicon surfactants fluorine surfactants or silicon surfactants, surfactants containing both fluorine and silicon atoms
  • the most preferable is a fluorosurfactant in which it is preferable to select one or more of the above.
  • the fluorine atom number of the fluorine-containing substituent in the surfactant molecule is preferably 1 to 38, more preferably 5 to 25, and most preferably 7 to 20. .
  • the number of fluorine atoms is within the above range, it is desirable from the viewpoint of good solubility and an effect of improving unevenness.
  • the surfactant contains a monomer A represented by the following general formula (a) and a monomer B represented by the following general formula (b) as a copolymerization component, Examples thereof include copolymers having a copolymerization ratio (AZB [mass ratio]) with the monomer B of 20Z80 to 60Z40 (hereinafter also referred to as “surfactant suitable for the present invention”).
  • R 3 are each independently a hydrogen atom or a methyl group. Represents, preferably R 2 is a hydrogen atom, and R 3 is a methyl group.
  • R 4 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms.
  • Examples of the alkyl group represented by R 4 include a methyl group, an ethyl group, a propyl group, and a butyl group, and among them, an alkyl group having 1 to 2 carbon atoms is preferable.
  • R 4 is particularly preferably a hydrogen atom.
  • n represents an integer of 1 to 18, preferably an integer of 2 to 10.
  • m represents an integer of 2 to 14, and preferably an integer of 4 to 12.
  • C F in the general formula (a) is m 2m + l
  • the ratio of C F to monomer A, which may be linear or branched, is preferably 20 to 70% by mass.
  • M 2m + l
  • Particularly preferred is 40 to 60% by mass.
  • p and q each independently represent an integer of 0 to 18, preferably 2
  • p and q may not represent 0 at the same time.
  • the plurality of monomers A contained in one molecule may have the same structure or different structures, and the same applies to the monomer B.
  • Suitable surfactants in the present invention (copolymer), based on the total weight of the copolymer, wherein 20 to 60 mass Monomer A 0/0, the monomer B and 80 to 40 mass 0 / 0, and the monomers a and another is preferred instrument further being copolymerized in copolymerization ratio as its remaining mass% of any monomer other than B is a monomer a 25 to 60 weight 0/0 the monomer B 60 to 40 mass 0/0, and the monomer a and other optional monomers and the remaining mass percent was copolymerization ratio in copolymerized preferably that are members monomers a and non-B 25-60 mass 0/0, the monomer B 75 to 40 weight 0/0, and any other monomer other than said monomers a and B are copolymerized in copolymerization ratio as its remaining mass%, Rukoto Is more preferred.
  • R 1 in the general formula (a) is a hydrogen atom.
  • R 2 in the general formula (b) is a hydrogen atom, R 3 force S methyl group,
  • copolymerization ratio of 25-60 to 40-40.
  • specific examples of the copolymer containing the monomer A represented by the general formula (a) and the monomer B represented by the general formula (b) as a copolymerization component are described in paragraph No. 2003-337424. As described in Table 1 of No. [0068].
  • an organic solvent can be used for preparing the photosensitive resin composition.
  • organic solvents include methyl ethyl ketone, propylene glycol monomethyl ether, propylene glycol methanol monomethyl ether ether acetate, cyclohexanone, cyclohexanol, methyl isobutyl ketone, ethyl lactyl lactate, methyl lactate, strength prolatatum, etc. I can list them.
  • the photosensitive resin composition can further contain a thermal polymerization inhibitor.
  • thermal polymerization inhibitors include hydroquinone, hydroquinone monomethyl ether, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, tert-butinole strength, tectonole, benzoquinone, 4,4'-thiobis (3-methyl-6-tert-butylphenol) ), 2, 2'-methylenebis (4-methyl 6t-butylphenol), 2 mercaptobenzimidazole, phenothiazine and the like.
  • the photosensitive resin composition can contain an ultraviolet absorber as necessary.
  • the ultraviolet absorber include compounds described in JP-A-5-72724, salicylate series, benzophenone series, benzotriazole series, cyanoacrylate series, nickel chelate series, hindered amine series, and the like.
  • the photosensitive resin composition can also contain “adhesion aid” described in JP-A-11-133600, other additives, and the like.
  • the photosensitive resin composition layer according to the present invention can be formed by a transfer method using a photosensitive transfer material as well as by a coating method in which the photosensitive resin composition is applied.
  • the photosensitive transfer material can be suitably formed using an integral transfer film such as a resin transfer material described in JP-A-5-72724, and is an integral transfer film.
  • a structure having a laminated structure of the temporary support Z, the thermoplastic resin layer Z, the intermediate layer Z, the photosensitive resin composition layer Z, and the protective film is suitable.
  • the photosensitive transfer material according to the present invention has a photospace comprising a temporary support and a thermoplastic resin layer and a photosensitive resin composition layer that are at least alkali-soluble in order from the temporary support side.
  • a photosensitive transfer material for forming a substrate may be used.
  • it may have other layers such as an intermediate layer and a protective film.
  • the photosensitive resin composition layer is a layer constituting the photospacer when the photospacer is formed.
  • the photosensitive resin composition layer can be suitably formed by applying and drying the photosensitive resin composition for a photospacer of the present invention by a known application method.
  • the photosensitive resin composition is preferably applied with a slit-like nozzle having a slit-like hole in the portion from which the liquid is discharged.
  • the specific details of the slit nozzle and slit coater are as described above.
  • the layer thickness of the photosensitive resin composition layer is 0.5-10. 1 to 6 / ⁇ ⁇ is more preferable. When the layer thickness is within the above range, the generation of pinholes during coating formation during production can be prevented, and development and removal of unexposed portions can be performed without requiring a long time.
  • thermoplastic resin layer In the photosensitive transfer material, at least one thermoplastic resin layer can be provided between the photosensitive resin composition layer and the temporary support.
  • the thermoplastic resin layer is preferably alkali-soluble from the viewpoint that alkali development is possible, and that the thermoplastic resin layer protruding during transfer can prevent contamination of the transferred material.
  • thermoplastic resin layer effectively prevents transfer defects caused by unevenness on the transfer material when the photosensitive resin composition layer is transferred to the transfer material.
  • the photosensitive resin composition layer and the transferred material can be deformed corresponding to the irregularities on the transferred material when the photosensitive transfer material is heat-pressed to the transferred material. Adhesion with the material can be improved.
  • the thickness of the thermoplastic resin layer is preferably 0.1 to 20 m.
  • the peelability of the temporary support force at the time of transfer is excellent, and it is effective for absorbing irregularities on the transfer material, and the photosensitive resin composition layer is reticulated. Chillons are generated and transfer defects do not occur. Further, it is preferably 1.5 to 16 / ⁇ ⁇ , more preferably 5 to 15.0 ⁇ m.
  • Reticulation means that when the intermediate layer is stretched due to moisture absorption or the like, the flexible thermoplastic resin layer buckles and fine wrinkles are formed on the surface of the photosensitive resin composition layer. This is a cause of transfer failure.
  • the thermoplastic resin layer can be composed of at least a thermoplastic resin, and other components can be appropriately used as necessary.
  • the thermoplastic resin is not particularly limited and can be appropriately selected, but those having a substantial softening point of 80 ° C. or less are preferable.
  • thermoplastic resin having a substantial softening point of 80 ° C or lower examples include, for example, a kenne of ethylene and acrylate copolymer, styrene and (meth) acrylate. Saponified product with copolymer, saponified product with butyltoluene and (meth) acrylic acid ester copolymer, poly (meth) acrylic acid ester, (meth) atariate with (meth) acrylic acid butyl and vinyl acetate, etc.
  • Suitable materials such as sulfonic acid ester copolymers are “Plastic Performance Handbook” (edited by the Japan Plastics Industry Federation, All-Japan Plastics Molding Industry Association, published by the Industrial Research Council, 1968 10).
  • those organic polymers whose soft spot is about 80 ° C or less as described in the 25th of May those that are alkali-soluble are also included. These may be used alone or in combination of two or more.
  • the substantial soft softening point is 80 ° C or lower, and even if it is an organic polymeric material itself having a softening point of 80 ° C or higher, Examples thereof include those having a substantial softening point of 80 ° C or less by adding various compatible plasticizers.
  • the plasticizer can be appropriately selected according to the purpose without any particular limitation. For example, polypropylene glycol, polyethylene glycol, dioctyl phthalate, diheptino phthalate, dibutino phthalate, tricresyl. Phosphate, Cresino resifeninore phosphate, biphenyl diphosphate phosphate, and the like.
  • thermoplastic resin layer has a soft softness point substantially not exceeding 80 ° C for the purpose of adjusting the adhesion force with the temporary support as another component.
  • various polymers, supercooling substances, adhesion improvers, surfactants, mold release agents and the like can be added.
  • the photosensitive transfer material is preferably provided with an intermediate layer for the purpose of preventing mixing of components during the application of a plurality of layers and during storage after application.
  • it is preferably provided on the thermoplastic resin layer provided on the temporary support and between the thermoplastic resin layer and the photosensitive resin composition layer.
  • An organic solvent is used to form the thermoplastic resin layer and the photosensitive resin composition layer, but by providing an intermediate layer, it is possible to prevent the two layers from being mixed with each other.
  • the intermediate layer is preferably dispersed or dissolved in water or an aqueous alkali solution.
  • Known materials can be used for the intermediate layer.
  • polyvinyl ether Z maleic anhydride polymer and carboxyalkyl cellulose described in JP-A No. 46-2121 and JP-B No. 56-40824 can be used.
  • Water-soluble salts water-soluble cellulose ethers, water-soluble salts of carboxyalkyl starch, polybulualcohol, polybulupyrrolidone, polyacrylamides, water-soluble polyamides, water-soluble salts of polyacrylic acid, gelatin, ethylene oxide And water-soluble salts of the group consisting of various types of starch, various starches, and the like, copolymers of styrene and maleic acid, maleate resin, and the like.
  • a water-soluble resin that is, a water-soluble polymer material.
  • a water-soluble polymer material it is preferable to use at least polyvinyl alcohol, and the combination of polyvinyl alcohol and polyvinylpyrrolidone is preferable. Especially preferred.
  • the polyvinyl alcohol can be appropriately selected according to the purpose without any restriction, and preferably has an acidity of 80 mol% or more.
  • the content thereof is preferably 1 to 75% by volume, more preferably 1 to 60% by volume, particularly 10 to 50% by volume, based on the solid content of the intermediate layer. I like it.
  • the content is within the above range, sufficient adhesion to the thermoplastic resin layer can be obtained, and the oxygen blocking ability is also good.
  • the intermediate layer preferably has a low oxygen permeability.
  • the thickness of the intermediate layer is preferably about 0.1 to 5 / ⁇ ⁇ , more preferably 0.5 to 2 m.
  • the oxygen barrier property is not lowered, and an increase in the intermediate layer removal time during development can be prevented.
  • the temporary support is preferably a chemically / thermally stable and flexible material that does not interfere with the transfer and preferably has a peelability to the thermoplastic resin layer.
  • the material of the temporary support can be appropriately selected according to the purpose without any particular restriction. Examples thereof include polytetrafluoroethylene, polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyethylene, and polypropylene. It is done.
  • the structure of the temporary support can be appropriately selected depending on the purpose without particular limitation, and may be either a single layer structure or a laminated structure.
  • the temporary support is subjected to surface treatment such as glow discharge from the viewpoint of ensuring good releasability with the thermoplastic resin layer. Don't have an undercoating layer like gelatin that you like! /.
  • the thickness of the temporary support is about 5 to 300 m, preferably 20 to 150 m.
  • the temporary support preferably has a conductive layer on at least one surface thereof, or the temporary support itself has conductivity.
  • the temporary support is removed when the temporary support is peeled off after the photosensitive transfer material provided with the temporary support is brought into close contact with the transfer target.
  • the transferred object and the like are not charged and attract the surrounding dust and the like.
  • no dust or the like adheres to the thermoplastic resin layer, and the subsequent exposure process.
  • pinhole formation due to the formation of an extra unexposed portion can be effectively prevented.
  • the surface electrical resistance on the surface of the conductive layer on the temporary support or the temporary support having conductivity is preferably 10 13 ⁇ or less.
  • the temporary support having conductivity can be obtained by containing a conductive substance in the temporary support.
  • the conductive substance is not particularly limited and can be appropriately selected according to the purpose. Examples thereof include metal oxides and antistatic agents.
  • metal oxide examples include zinc oxide, titanium oxide, tin oxide, aluminum oxide, indium oxide, silicon oxide, magnesium oxide, barium oxide, and molybdenum oxide. These may be used alone or in combination of two or more.
  • form of the metal oxide examples include crystal fine particles and composite fine particles.
  • Examples of the antistatic agent include alkyl phosphate-based surfactants such as Electro Stripper Sakai (manufactured by Kao Corporation), Elenon No. 19 (manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), Betaine amphoteric surfactants such as Amo Igen K (Daiichi Kogyo Seiyaku Co., Ltd.), polyoxyethylene fatty acid ester nonionic surfactants such as Nissan Noon L (Nippon Yushi Co., Ltd.) Emulgen 106, 120, 147, 420, 220, 905, 910 (manufactured by Kao Corporation) and Nissan-Non E (manufactured by NOF Corporation)
  • Non-ionic Other nonionic surfactants such as surfactants, polyoxyethylene alkylphenol ethers, polyhydric alcohol fatty acid esters, polyoxyethylene sorbitan fatty acid esters, polyoxyethylene alkylamines, etc.
  • the conductive layer can be formed by appropriately selecting a configuration using a known conductive material, and the conductive material has a stable conductive effect without being affected by the humidity environment.
  • a known conductive material for example, ZnO, TiO, SnO, AlO, InO, SiO, MgO, BaO, MoO
  • the volume resistivity of the metal oxide or the conductive substance is preferably 10 7 ⁇ ⁇ cm or less, more preferably 10 5 ⁇ ′cm or less.
  • the particle diameter of the metal oxide or the conductive material is preferably 0.01 to 0.7 111 m, more preferably 0.02 to 0.5 m force! /,
  • the conductive layer as a binder, for example, gelatin, cellulose nitrate, cenololose triacetate, cenololose diacetate, cenololose acetate butyrate, cellulose esters such as cellulose acetate propionate, vinylidene chloride
  • homopolymers or copolymers including butyl chloride, styrene, acrylonitrile, butyl acetate, alkyl acrylates having 1 to 4 carbon atoms, butyl pyrrolidone, etc., soluble polyesters, polycarbonates, soluble polyamides, and the like can be used.
  • the photosensitive transfer material can be further provided with a protective film as another layer.
  • the protective film has a function of protecting the photosensitive resin composition layer from dirt and damage during storage and the like, and can be composed of the same or similar material as the temporary support.
  • any material that can be easily peeled off from the photosensitive resin composition layer may be used.
  • a silicon paper, a polyolefin sheet, a polytetrafluoroethylene sheet, and the like are preferably used.
  • a polyethylene sheet or film, or a polypropylene sheet or film is preferable.
  • the thickness of the protective film is preferably 5 to about L 00 m, force S, and more preferably 10 to 30 m.
  • thermoplastic resin coating solution in which an additive is dissolved together with a thermoplastic organic polymer (thermoplastic resin) is applied onto a temporary support.
  • a prepared solution intermediate solution
  • the intermediate coating layer is applied and dried, and an intermediate layer is laminated.On the intermediate layer, a solvent that does not dissolve the intermediate layer is used.
  • the photosensitive resin composition prepared as described above is applied, dried, and laminated with a photosensitive resin composition layer, which can be suitably produced.
  • a first sheet in which a thermoplastic resin layer and an intermediate layer were provided in order from the temporary support side on the temporary support, and a photosensitive resin composition layer on the protective film were provided.
  • the second sheet may be prepared and bonded so that the surface of the intermediate layer of the first sheet is in contact with the surface of the photosensitive resin composition layer.
  • a first sheet provided with a thermoplastic resin layer on a temporary support, and a second sheet provided with a photosensitive resin composition layer and an intermediate layer in that order on the protective film side cover This is prepared by adhering so that the surface of the intermediate layer of the first sheet is in contact with the surface of the thermoplastic resin layer of the second sheet.
  • the photosensitive resin composition layer formed on the substrate is subjected to patterning by exposure and alkali development.
  • a predetermined mask is disposed above the photosensitive resin composition layer formed on the substrate, and further above the mask (mask) via the mask and, optionally, the thermoplastic resin layer and the intermediate layer.
  • the photosensitive resin composition layer is exposed from the side not facing the photosensitive resin composition layer, and after the exposure is completed, development processing using a developer is performed.
  • the light source used for the exposure may be appropriately selected and used as long as it can irradiate light in a wavelength region capable of curing the photosensitive resin composition layer (for example, 365 nm, 405 nm, etc.). wear.
  • a wavelength region capable of curing the photosensitive resin composition layer for example, 365 nm, 405 nm, etc.
  • wear Specifically, an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp and the like can be mentioned.
  • the exposure amount is usually about 5 to 200 miZcm 2 , preferably about 10 to 100 miZcm 2 .
  • the development can be performed according to a known alkali development method.
  • the photosensitive transfer after exposure using a solvent or an aqueous developer, particularly an alkaline aqueous solution (alkaline developer) or the like.
  • the material is immersed in a developer bath containing a developer or sprayed onto the layer on the photosensitive transfer material by spraying, etc., and further rubbed with a rotating brush, wet sponge, etc., or irradiated with ultrasonic waves. It is possible to carry out the process while processing.
  • the developer temperature is preferably 20 ° C to 40 ° C. After development, it is preferable to wash with water.
  • As a development method a known method such as paddle development, shower development, shower & spin development, dip development or the like can be used.
  • the uncured portion can be removed by spraying a developer on the photosensitive resin composition layer after exposure.
  • a low-solubility alkaline solution having a low solubility in the photosensitive resin composition layer by shower or the like to remove the thermoplastic resin layer, intermediate layer, and the like.
  • the alkaline aqueous solution used for dissolving the photosensitive resin composition layer, the thermoplastic resin layer, and the intermediate layer in the process of development after exposure and removal of unnecessary parts includes, for example, alkaline substances.
  • a dilute aqueous solution is preferred, and a water-miscible organic solvent added in a small amount is also preferred.
  • the alkaline substance is not particularly limited and may be appropriately selected according to the purpose.
  • alkali metal hydroxides such as sodium hydroxide and potassium hydroxide
  • alkali metal carbonates such as sodium carbonate and potassium carbonate
  • Alkali metal bicarbonates such as sodium hydrogen carbonate and potassium hydrogen carbonate
  • alkali metal silicates such as sodium silicate and potassium silicate
  • alkali metal metasilicates such as sodium metasilicate and potassium metasilicate
  • triethanol And tetraalkylammonum hydroxides such as amine, diethanolamine, monoethanolamine, morpholine, tetramethylammonium hydroxide, and trisodium phosphate. These may be used alone or in combination of two or more.
  • the alkaline aqueous solution preferably has an alkaline substance concentration of 0.01 to 30% by mass, and preferably has a pH of 8 to 14.
  • the water-miscible organic solvent can be appropriately selected according to the purpose.
  • Ethyleneglycolenoethylenole etherol Ethyleneglycolenoethylenole etherol, ethyleneglycololemono n-butinoleethenole, benzenoreanolenoconole, acetone, methylethylketone, cyclohexanone, ⁇ -force prolataton, ⁇ -butyrolataton, dimethylformamide, Dimethylacetamide, hexamethylphosphoramide, ethyl lactate , Methyl lactate, ⁇ -force prolatatam, ⁇ -methylpyrrolidone and the like.
  • the amount of the water-miscible organic solvent added is preferably 0.1 to 30% by mass.
  • Various known surfactants can be added to the alkaline aqueous solution, and the addition amount in the case of adding the surfactant is preferably 0.01 to L0 mass%.
  • the developer temperature is preferably 20 ° C to 40 ° C, and the developer pH is preferably 8 to 13.
  • a roller conveyor or the like is installed in the developing tank, and the substrate moves horizontally.
  • the photosensitive resin is preferably formed on the upper surface of the substrate in order to prevent damage to the single conveyor.
  • the inclination angle is preferably 5 ° force 30 °.
  • Post exposure is preferably performed between the development and the heat treatment described below from the viewpoints of controlling the cross-sectional shape of the image, controlling the hardness of the image, controlling the surface roughness of the image, and controlling the film thickness reduction of the image.
  • the light source used for the post-exposure include an ultrahigh pressure mercury lamp, a high pressure mercury lamp, and a metal halide lamp described in paragraph No. 0074 of JP-A-2005-3861.
  • the exposure amount is also 2000 mjZ square centimeters for the top surface: 100 forces, bottom surface: 100 to 2000 mjZ square centimeters Within the range of the above, adjust appropriately according to the above control purpose.
  • the hardness of the image can be ensured by reacting the monomer and the crosslinking agent contained in the photosensitive resin composition layer of the present invention by heat treatment.
  • the heat treatment temperature is preferably in the range of 150 ° C to 250 ° C. Hardness is insufficient at temperatures below 150 ° C, and adhesion to the substrate tends to deteriorate at temperatures above 250 ° C.
  • the heat treatment time is preferably 10 minutes to 150 minutes. If it is less than 10 minutes, the hardness is insufficient, and if it is 150 minutes or more, the adhesion tends to be poor.
  • the photospacer produced by the method for producing a photospacer of the present invention is formed using the photosensitive resin composition layer of the present invention, the photospacer is high when plastically deformed. It exhibits a deformation recovery rate (preferably 70% or more) and has sufficient mechanical properties, so it is effective to keep the cell thickness of the liquid crystal cell uniform. Therefore, the photo spacer can be suitably used for a display device that easily causes display unevenness due to a variation in the cell thickness of the liquid crystal cell.
  • the deformation recovery rate of the photospacer produced by the method for producing a photospacer of the present invention is as follows.
  • the photospacer of m ⁇ is a frustum indenter of 50 ⁇ and the load speed is 0.
  • the maximum load is 50 mN, 75% or more is preferable, 85% or more is more preferable, and 90% or more is more preferable.
  • the liquid crystal layer having a desired thickness can be obtained by withstanding the compressive strength of external force and preventing plastic deformation during panel formation. As a result, display unevenness that may occur due to thickness changes is eliminated, and high-quality images can be displayed.
  • the maximum load is 130 mN, 70% or more is preferable, 80% or more is more preferable, and 85% or more is more preferable.
  • the deformation recovery rate When the deformation recovery rate is within the above range, it can withstand the compressive strength of the external force after forming the panel. As a result, display unevenness (unevenness such as ripples) that can occur due to the compressive strength of the external force is eliminated, and high-quality images can be displayed.
  • the substrate for a liquid crystal display device of the present invention is obtained by the method for producing a photospacer of the present invention. It is equipped with a photospacer obtained.
  • the photo spacer is preferably formed on a display light-shielding portion such as a black matrix formed on a substrate or on a driving element such as a TFT, or the like.
  • a transparent conductive layer transparent electrode
  • a liquid crystal alignment film such as polyimide
  • the display spacer is covered with the display light-shielding portion (black matrix or the like) or the drive element previously disposed on the substrate.
  • a photosensitive resin composition layer of a photosensitive transfer material is laminated on a substrate surface, peeled and transferred to form a photosensitive resin composition layer, and then subjected to exposure, development, heat treatment, and the like.
  • the liquid crystal display substrate of the present invention may further be provided with colored pixels of three colors such as red (R), blue (B), and green (G) as necessary.
  • the liquid crystal display element of the present invention is configured by providing the liquid crystal display device substrate of the present invention.
  • the liquid crystal display elements at least one of the pair of optically transparent substrates (including the substrate for a liquid crystal display device of the present invention) and a liquid crystal layer and liquid crystal driving means (simple matrix driving method and active matrix driving method) Including at least).
  • the substrate for a liquid crystal display device of the present invention can be configured as a color filter substrate having a plurality of RGB pixel groups and each pixel constituting the pixel group being separated from each other by a black matrix. . Since this color filter substrate is provided with a photospacer having a uniform height and excellent deformation recovery property, a liquid crystal display device equipped with the color filter substrate has a cell gap between the color filter substrate and the counter substrate. Occurrence of unevenness (cell thickness fluctuation) is suppressed, and display unevenness such as color unevenness can be effectively prevented. Thereby, the produced liquid crystal display element can display a clear image.
  • the liquid crystal display element at least one of the liquid crystal layer and the liquid crystal driving means is provided between a pair of light transmissive substrates (including the liquid crystal display device substrate of the present invention).
  • the liquid crystal driving means has an active element (e.g., TFT) and is configured to be regulated to a predetermined width by a photo spacer having a uniform height between a pair of substrates and excellent deformation recovery. is there.
  • the substrate for a liquid crystal display device of the present invention is configured as a color filter substrate having a plurality of RGB pixel groups, and each pixel constituting the pixel group is separated from each other by a black matrix.
  • liquid crystal examples include nematic liquid crystal, cholesteric liquid crystal, smectic liquid crystal, and ferroelectric liquid crystal.
  • the pixel group of the color filter substrate may be composed of two-color pixels exhibiting different colors, or may be composed of three-color pixels and four or more pixel forces.
  • three colors it consists of three hues of red (R), green (G), and blue (B).
  • R red
  • G green
  • B blue
  • any arrangement may be used when arranging pixel groups of four or more colors that are preferred to be mosaic type or triangle type.
  • a black matrix may be formed as described above after forming a pixel group of two or more colors, or conversely, a pixel group may be formed after forming a black matrix. Good.
  • JP 2004-347831 A can be referred to.
  • the liquid crystal display device of the present invention is configured by providing the liquid crystal display element of the present invention.
  • a space between a pair of substrates disposed so as to face each other is regulated to a predetermined width by a photospacer produced by the method for producing a photospacer of the present invention, and a regulated gap is formed.
  • the liquid crystal material is encapsulated (the encapsulated portion is referred to as a liquid crystal layer), and the thickness (cell thickness) of the liquid crystal layer is maintained at a desired uniform thickness.
  • liquid crystal display mode in the liquid crystal display device STN type, TN type, GH type, ECB type, ferroelectric liquid crystal, antiferroelectric liquid crystal, VA type, IPS type, OCB type, ASM type, and other various types are preferably mentioned.
  • a display mode in which a display mode that easily causes display unevenness due to the variation of the cell thickness of the liquid crystal cell is desired is 2 to 4.
  • the basic configuration of the liquid crystal display device of the present invention includes: (a) a driving side substrate in which driving elements such as thin film transistors (TFTs) and pixel electrodes (conductive layers) are arranged; and a counter electrode ( (B) A drive substrate and a counter electrode (conducting layer).
  • driving elements such as thin film transistors (TFTs) and pixel electrodes (conductive layers) are arranged
  • counter electrode (B) A drive substrate and a counter electrode (conducting layer).
  • the liquid crystal display device of the present invention can be applied to various liquid crystal display devices, such as a device in which a counter substrate provided is opposed to each other with a photospacer interposed, and a liquid crystal material is sealed in the gap portion. It can be suitably applied.
  • the liquid crystal display device is described, for example, in “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, side industry research committee, 1994)".
  • the liquid crystal display device of the present invention is not particularly limited except that it includes the liquid crystal display element of the present invention.
  • the liquid crystal display device of the various types described in the “next-generation liquid crystal display technology” can be configured. .
  • it is effective for constructing a color TFT liquid crystal display device.
  • the color TFT liquid crystal display device is described, for example, in “Color TFT liquid crystal display (Kyoritsu Publishing Co., Ltd., issued in 1996)”.
  • the liquid crystal display device of the present invention includes an electrode substrate, a polarizing film, a retardation film, a knocklight, a spacer, a viewing angle compensation film, and an antireflection film, except that the liquid crystal display device of the present invention described above is provided. It can be generally constructed using various members such as a film, a light diffusion film, and an antiglare film.
  • the combination of the transfer method and the LED backlight will be described in detail.
  • it may be performed by a coating method using a slit coater or the like. It can be configured with a tube.
  • an MVA mode liquid crystal display device configured as shown in FIG. 1 was produced.
  • thermoplastic resin coating solution consisting of the following formulation HI, and dry it to make the thermoplastic A resin layer was formed.
  • intermediate layer oxygen barrier film
  • a colored photosensitive resin composition K1 having the composition described in the following Table 1 (transfer method) was applied and dried to laminate a photosensitive resin composition layer.
  • a fat composition layer was provided, and a protective film (12 ⁇ m thick polypropylene film) was pressure-bonded onto the photosensitive resin composition layer.
  • photosensitive resin transfer material K1 A photosensitive transfer material was prepared (hereinafter referred to as photosensitive resin transfer material K1).
  • the colored photosensitive resin composition K1 used for the production of the obtained photosensitive resin transfer material K1 was colored photosensitive resin comprising the composition described in Table 1 (transfer method).
  • Photosensitive resin transfer materials Rl, G1, and B1 were prepared in the same manner as described above except that the photosensitive resin compositions R1, G1, and B1 were replaced.
  • a non-alkali glass substrate of 680 X 880 mm size was washed with a rotating brush with nylon bristles while spraying a glass detergent solution adjusted to 25 ° C by shower for 20 seconds, washed with pure water, and then washed with a silane cup.
  • Ring solution N— ⁇ -(aminoethyl) - ⁇ -Aminopropyltrimethoxysilane 0.3 mass% aqueous solution; trade name: ⁇ 603, manufactured by Shin-Etsu Chemical Co., Ltd.
  • the exposed photosensitive resin composition layer is overlaid so as to contact the surface of the glass substrate heated at 100 ° C for 2 minutes.
  • Laminator Lamic II manufactured by Hitachi Industries, Ltd.
  • the PET temporary support was peeled off and transferred onto a glass substrate.
  • triethanol amine developing solution triethanolamine ⁇ Min 30 mass 0/0 containing, trade name: T - PD2, manufactured by Fuji Photo Film Co., 12 times with pure water (T-PD2 1
  • T-PD2 1 The solution obtained by diluting 11 parts by mass of pure water with 11 parts by mass) was developed with shower at 30 ° C. for 50 seconds and a flat nozzle pressure of 0.04 MPa to remove the thermoplastic resin layer and the intermediate layer.
  • air was blown onto the upper surface of the substrate to drain the liquid, and then pure water was sprayed for 10 seconds in a shower to clean the pure water, and air was blown to reduce the liquid pool on the substrate.
  • the substrate was post-exposed with an exposure amount of 500 miZcm 2 with an ultra-high pressure mercury lamp and then heat-treated at 220 ° C. for 15 minutes.
  • the glass substrate 11 on which the K image 16 was formed was again cleaned with a brush as described above, washed with pure water, and then washed with a substrate preheating device without using a silane coupling solution. Heated at ° C for 2 minutes.
  • the same process as the formation of the K image 16 is performed, and the K image 16 on the glass substrate 11 is formed.
  • a red pixel (R pixel) was formed on the side where it was formed.
  • the exposure amount in the exposure process was 4 OmjZcm 2
  • shower development with a sodium carbonate-based developer was performed at 35 ° C. for 35 seconds.
  • the thickness of the R pixel is 2. O / zm, and the amount of CI pigment 'Red (CIPR) 254 and CIPR 177 applied respectively. . 0. 22gZm was 2.
  • the glass substrate 11 on which the R pixel is formed is brush-washed again using the cleaning agent as described above, shower-washed with pure water, and then pre-heated without using a silane coupling solution.
  • the apparatus was heated at 100 ° C for 2 minutes.
  • the same process as the formation of the K image 16 is performed, and the K image 16 and the R pixel of the glass substrate 11 are formed.
  • a dark pixel (G pixel) was formed on the substrate.
  • the exposure amount in the exposure process was 40 mjZcm 2
  • shower development with a sodium carbonate-based developer was 34 ° C. for 45 seconds.
  • the thickness of the G pixel is 2. O / zm.
  • the application amount of CI pigment 'Green (CIPG) 36 and CI pigment' Yellow (CIPY) 150 is 1. It was 0.48 gZm 2 .
  • the thickness of the B pixel is 2. O / zm.
  • the application amount of CI pigment 'Blue (CIPB) 15: 6 and CI pigment' Violet (CIPV) 23 is 0.63 g / m 2 and 0.07 g / respectively. It was m 2.
  • the glass substrate 11 on which the R, G, and B pixels were formed was beta-treated at 240 ° C for 50 minutes to obtain a color filter 12.
  • an ITO (Indium Tin Oxide) film 13 was formed thereon as a transparent electrode by sputtering, and a color filter substrate 10 was obtained.
  • Colored photosensitive resin composition K1 is prepared by removing K pigment dispersion 1 and propylene glycol monomethyl ether acetate in the amounts shown in Table 1 above and mixing at a temperature of 24 ° C ( ⁇ 2 ° C). Stir at .pm for 10 minutes, then the amount of methyl ethyl ketone, binder 1, hydroquinone monomethyl ether, DPHA solution, 2, 4 bis (trichloromethyl) — 6— [4'— (N, N bisethoxycarboromethyl) amino-3'-bromophenol] —s Triazine, Surfactant 1 is removed and added in this order at a temperature of 25 ° C ( ⁇ 2 ° C). It was obtained by stirring at 40 ° C. ( ⁇ 2 ° C.) and 150 rpm for 30 minutes.
  • the colored photosensitive resin composition R1 is made up of R pigment dispersion 1, R pigment dispersion 2, and propylene glycol monomethyl ether acetate in the amounts described in Table 1 (transfer method), at a temperature of 24 ° C. ( ⁇ 2 ° C) and stirred at 150 rpm for 10 minutes, then the amount of methyl ethyl ketone, binder 2, DPHA solution, 2 trichloromethyl-5- (p-styryl) listed in Table 1 above.
  • compositions in the composition R1 described in Table 1 are as follows.
  • the compositions of the DPHA solution and the surfactant 1 are the same as those of the colored photosensitive resin composition K1.
  • Colored photosensitive resin composition G1 is obtained by weighing G pigment dispersion 1, cocoon pigment dispersion 1, and propylene glycol monomethyl ether acetate in the amounts described in Table 1 (Transfer method), at a temperature of 24 ° C ( ⁇ 2 ° C) and stirred at 150 rpm for 10 minutes, and then the amounts of methyl ethyl ketone, cyclohexanone, binder 1, DPHA solution, 2-trichloromethyl-5- ( p-styrylstyryl) -1, 3, 4 oxadiazole, 2, 4 bis (trichloromethyl) 6— [4 '— (N, N-bisethoxycarboromethyl) amino 1 3′-bromophenol] —s -Triazine and phenothiazine were removed by force, added in this order at a temperature of 24 ° C ( ⁇ 2 ° C), stirred at 150 rpm for 30 minutes, and then the surface activity in the amount shown in Table 1 above. Remove
  • composition G1 The details of each composition in the composition G1 described in Table 1 are as follows. Also, The composition of the binder 1, the DPHA liquid, and the surfactant 1 is the same as that of the colored photosensitive resin composition K1.
  • Colored photosensitive resin composition B1 is obtained by removing the amount of Pigment Dispersion 1, Pigment Dispersion 2, and Propylene Glycol Monomethyl Ether Acetate in the amounts described in Table 1 (Transfer Method) at a temperature of 24 ° C. ( ⁇ 2 ° C) and stirred at 150 rpm for 10 minutes, then the amount of methyl ethyl ketone, binder 3, DPHA solution, 2 trichloromethyl-5- (p-styryl) listed in Table 1 above. Stylyl) 1, 3, 4 Oxadiazole and phenothiazine are removed, and the temperature is 25. C ( ⁇ 2. C) is added in this order, and the temperature is 40.
  • the mixture was stirred at 150 rpm for 30 minutes at C ( ⁇ 2. C), and then the surfactant 1 in the amount shown in Table 1 above was scraped off and added at a temperature of 24 ° C ( ⁇ 2 ° C). Then, it was stirred for 5 minutes at 30 rpm and obtained by filtering through nylon mesh # 200.
  • composition B1 The details of each composition in the composition B1 described in Table 1 are as follows.
  • the composition of DPHA solution and surfactant 1 is the same as that of the colored photosensitive resin composition K1.
  • thermoplastic resin layer consisting of the following formulation A, dry it, and dry layer thickness 6. O ⁇ m A thermoplastic resin layer (an alkali-soluble thermoplastic resin layer) was formed.
  • the cover film of the resulting photosensitive transfer sheet for spacer (1) was peeled off, and the exposed surface of the photosensitive resin composition layer was formed on the color filter substrate 10 on which the ITO film prepared above was sputtered.
  • the film was laminated on the ITO film 13 and bonded using a laminator Lamic II type (manufactured by Hitachi Industries, Ltd.) under a heating condition of a linear pressure of 100 NZcm and 130 ° C. at a conveyance speed of 2 mZ. Thereafter, the PET temporary support was peeled off at the interface with the thermoplastic resin layer, and the photosensitive resin composition layer was transferred together with the thermoplastic resin layer and the intermediate layer (layer forming step).
  • KOH developer CDK-1 (Fuji Film Select Kokusu Materials Co., Ltd., 100-fold diluted solution) was sprayed from a flat nozzle at 23 ° C and a nozzle pressure of 0.04 MPa for 80 seconds.
  • the pattern was developed by shower development and unexposed areas were removed to obtain a pattern (spacer pattern) (patterning process).
  • the resulting spacer pattern is a transparent column with a diameter of 20 m and an average height of 3.7 m.
  • a polyethylene terephthalate film temporary support (PET temporary support) with a thickness of 75 ⁇ m was coated with a coating solution for a thermoplastic resin layer having the same formulation as Formula A, dried, and the dry film thickness was 15 / A zm thermoplastic resin layer was provided.
  • an intermediate layer coating solution having the same prescription power as the formulation B was applied on the formed thermoplastic resin layer and dried to provide an intermediate layer having a dry film thickness of 1.6 m.
  • a projection forming coating solution having the following prescription C force is prepared, and this projection forming coating solution is applied onto the intermediate layer and dried to control the liquid crystal alignment with a dry film thickness of 2.O ⁇ m.
  • a photosensitive resin composition layer for protrusions was applied.
  • the protrusion photosensitive film is formed by laminating the thermoplastic resin layer, the intermediate layer, the protrusion photosensitive resin composition layer, and the protective film in this order from the PET temporary support side.
  • a transferable material was prepared.
  • the photosensitive transfer material force for protrusions obtained from the above is peeled off the protective film, the exposed surface of the exposed photosensitive resin composition layer for protrusions and the side of the color filter substrate 10 on which the ITO film 13 is provided (on the color filter)
  • the surfaces were superposed and laminated using a laminator type Lamic II (manufactured by Hitachi Industries Ltd.) under conditions of a linear pressure of 100 NZcm, a temperature of 130 ° C, and a conveying speed of 2.2 mZ (laminate). Thereafter, only the PET temporary support of the photosensitive transfer material for protrusions was peeled off at the interface with the thermoplastic resin layer. At this time, the photosensitive resin composition layer, the intermediate layer, and the thermoplastic resin layer are laminated on the color filter substrate in this order from the substrate side.
  • a distance between the mask surface of the photomask and the surface on the side in contact with the intermediate layer of the light-sensitive resin composition layer for protrusions is 100 above the outermost thermoplastic resin layer. ⁇ m A proximity exposure machine was installed, and a proximity exposure was performed with an irradiation energy of 70 miZcm 2 using an ultrahigh pressure mercury lamp through a photomask.
  • triethanolamine developer containing 30% by mass of triethanolamine, trade name: T-PD2, manufactured by Fuji Photo Film Co., Ltd.
  • T-PD2 1 part by weight and 11 parts by weight of pure water (diluted in a ratio of 11 parts by weight) are sprayed at 30 ° C for 30 seconds, and the thermoplastic resin layer and intermediate layer are dissolved and removed. did.
  • the photosensitive resin composition layer for protrusions was substantially undeveloped.
  • an aqueous solution containing 0.085 mol ZL of sodium carbonate, 0.085 mol ZL of sodium hydrogen carbonate and 1% sodium dibutyl naphthalenesulfonate was further sprayed at 33 ° C.
  • protrusions 15 made of a photosensitive resin composition layer for protrusions that were patterned in a desired shape were formed on the color filter (RGB pixels).
  • the color filter substrate on which the protrusions 15 are formed is beta-treated at 240 ° C for 50 minutes, so that the vertical cross-sectional shape is 1.5 m high on the color filter (RGB pixels). Protrusions for controlling the liquid crystal orientation were formed.
  • a TFT substrate 21 was prepared as a counter substrate.
  • An ITO (Indium Tin Oxide) film 22 is formed on one surface of the TFT substrate by sputtering.
  • an alignment film 24 made of polyimide was provided on the ITO film 22 of the TFT substrate and the ITO film 13 of the color filter substrate 10 on the side where the photospacer 14 was provided.
  • an epoxy resin sealant is printed at a position corresponding to the outer frame of the black matrix 16 provided around the pixel group of the color filter, and the color filter substrate 10 is attached to the TFT. Bonded to substrate 21. Next, the two bonded substrates were heat-treated to cure the sealing agent, and a laminate of two substrates was obtained. The laminate was degassed under vacuum, then returned to atmospheric pressure, and liquid crystal was injected into the gap between the two glass substrates. After the completion of the injection, a liquid crystal cell was obtained by applying an adhesive to the injection port portion and sealing it with ultraviolet irradiation.
  • Polarizing plates (HLC2-2518, manufactured by Sanritz Co., Ltd.) 25 and 23 were attached to both surfaces of the liquid crystal cell thus obtained.
  • the red (R) LED is FR1112H
  • green A sidelight type backlight is constructed using (G) LED DGl 112H and blue (B) LED DBl 112H (a chip type LED manufactured by Stanley Ichi Electric Co., Ltd.).
  • the MVA mode liquid crystal display device of the present invention was fabricated by arranging it on the back side of the liquid crystal cell.
  • Example 1 the photosensitive resin for spacers was prepared in the same manner as in Example 1, except that the formulation 1 of the coating solution for the photosensitive resin composition layer was changed to the formulations 2 to 14 in Table 2 below.
  • the transfer sheets (2) to (14) were produced, and the MVA mode liquid crystal display device of the present invention was produced.
  • the units in Table 2 are parts by mass.
  • Example 1 except that the formulation 1 of the coating solution for the photosensitive resin composition layer was replaced with the formulation 15 to 17 in Table 2 below, the same as in Example 1, for the spacer Photosensitive transfer sheets (15) to (17) were produced, and a comparative MVA mode liquid crystal display device was produced.
  • Structural Formulas 1 to 17 in Table 2 are as shown in Table 3.
  • R 1 and n in Table 3 corresponds to R 1 and n each in the general formula (A) or (B).
  • the general formula (C) is as follows.
  • Structural formula 1F 16 General formula (C) I--Urethane alkylate monomer by Shin-Nakamura Chemical Co., Ltd.
  • Example 1 the glass substrate is replaced with a glass substrate of 2400 mm X 2400 mm size, and a photosensitive transfer sheet for spacer (1) of size 9 cm X 9 cm is 1400 mm wide, 16 Om long and 900 mm wide, 160 m long.
  • a photosensitive transfer sheet for spacers (1) configured in two sizes of rolls (1)
  • two roll-type photosensitive transfer sheets for spacers are placed side by side and laminated at the same time.
  • a 2300 mm ⁇ 2300 mm size color filter substrate was obtained in the same manner as in Example 1 except that the laminate was laminated in the same manner as in Example 1, and the MVA mode liquid crystal display device of the present invention (see FIG. 1) was produced.
  • a two-clad laminator described in Japanese Patent Application No. 2004-199886 was used for the laminating apparatus.
  • the obtained MVA mode liquid crystal display device was large-sized, the image had no unevenness and was of high quality to the same extent as in Example 1.
  • Each of the photo spacers was measured by a micro hardness tester (DUH-W201, manufactured by Shimadzu Corporation) as follows and evaluated. The measurement was performed by a load-unloading test method using a frustum frustum indenter with a maximum load of 50 mN and a holding time of 5 seconds. This measured force is also calculated as the deformation recovery rate [%] by the following formula and evaluated according to the following criteria: did.
  • Deformation recovery rate (%) (Deformation amount by weight m] Recovery amount after Z load release m]) X IOO
  • Deformation recovery rate was 85% or more and less than 90%.
  • Deformation recovery rate was 75% or more and less than 85%.
  • Each of the photo spacers was measured by a micro hardness tester (DUH-W201, manufactured by Shimadzu Corporation) as follows and evaluated. The measurement was carried out by the load-unloading test method using a frustum frustum indenter with a maximum load of 130 mN and a holding time of 60 seconds. For this measured force, the deformation recovery rate [%] was calculated according to the following formula, and evaluated according to the following criteria.
  • Deformation recovery rate (%) (Deformation amount by weight m] Recovery amount after Z load release m]) X IOO
  • Deformation recovery rate was 70% or more and less than 80%.
  • the gray display when a gray test signal was input was observed visually and with a loupe, and the presence or absence of display unevenness was evaluated according to the following evaluation criteria.
  • Example 1 92 ( ⁇ ) 85 ( ⁇ ) ⁇ The spreading ripples were small and recovered instantly.
  • Example 2 93 ( ⁇ ) 88 ( ⁇ ) ⁇ The spreading ripples were small and recovered instantly.
  • Example 3 9U®) 86 ( ⁇ ) ⁇ The spreading ripples were small and recovered instantly.
  • Example 4 91 (@) 85 ( ⁇ ) ⁇ The spreading ripples were small and recovered instantly.
  • Example 5 90 ( ⁇ ) 86 ( ⁇ ) ⁇ The spreading ripples were small and recovered instantly.
  • Example 9 95 ( ⁇ ) 86 ( ⁇ ) ⁇ The spreading ripples were small and recovered instantly.
  • Example 11 93 ( ⁇ ) 86 ( ⁇ ) O
  • the ripples of the wide force were small and recovered instantly.
  • Example 12 93 ( ⁇ ) 84 (0) O
  • the spreading ripple was slightly large but recovered instantly.
  • Example 13 90 ( ⁇ ) 84 (0) O Recovered.
  • Example 14 90 ( ⁇ ) 83 (0) O
  • the spreading ripple was slightly large, but recovered instantly.
  • Example 9 shows a column shape with no problem at development time of 45 seconds
  • Example 1 0 No residue. The column shape without any problem was shown.
  • Example 1 4 Shows a column shape with a development time of 65 seconds.
  • a PVA mode liquid crystal display device configured as shown in FIG. 2 was fabricated as follows. The same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
  • a color filter substrate was produced in the same manner as in Example 1, and a photospacer was produced using the same photosensitive transfer sheet for spacers as in Example 1. Photos No protrusion was formed after the production of the spacer.
  • a TFT substrate 21 was separately prepared as a counter substrate.
  • An ITO (Indium Tin Oxide) film 22 is formed on one surface of the TFT substrate by sputtering. Subsequently, the ITO film (transparent electrode) 13 of the force filter substrate 10 and the ITO film 22 of the TFT substrate 21 were patterned for the PVA mode, respectively, and an alignment film 24 made of polyimide was further provided thereon.
  • a sealant of UV-curing resin is applied to the seal portion having a width of 0.5 mm and a height of 40 m corresponding to the outer frame of the black matrix 16 provided around the pixel group of the color filter.
  • the liquid crystal for PVA mode was dropped, and the color filter substrate and the TFT substrate were bonded together.
  • the pressure was returned to normal pressure, and a load was applied to control the cell thickness to m.
  • a metal halide lamp is used to filter out UV light of less than 340 nm, and the sealant is exposed in a nitrogen atmosphere so that the integrated light intensity from 340 to 390 nm is equivalent to 3,000 nj / cm 2.
  • the sealing agent was cured by heat treatment to obtain a liquid crystal cell.
  • Polarizing plates (HLC2-2518, manufactured by Sanritz Co., Ltd.) 25 and 23 were attached to both surfaces of the liquid crystal cell thus obtained.
  • a CCF L knocklight was constructed and installed on the back side of the liquid crystal cell to which the polarizing plate was attached, and the PVA mode liquid crystal display device of the present invention was fabricated.
  • a non-alkali glass substrate of size 680 X 880 mm (hereinafter simply referred to as a glass substrate) was cleaned with an 11 V cleaning apparatus, then brush-cleaned with a cleaning agent, and further ultrasonically cleaned with ultrapure water.
  • This glass substrate was heat-treated at 120 ° C for 3 minutes to stabilize the surface state. Then, after cooling the glass substrate and adjusting the temperature to 23 ° C, the coater for glass substrate having a slit nozzle
  • the colored photosensitive resin composition K1 having the composition shown in Table 1 was applied with MH-1600 (manufactured by F'AS Asia).
  • a 4 m photosensitive resin composition layer K1 was formed.
  • KOH developer CDK-1 manufactured by Fuji Film Elect Kokusu Materials Co., Ltd .
  • a 100-fold diluted alkaline developer containing KOH and a nonionic surfactant was sprayed from a flat nozzle at 23 ° C and a nozzle pressure of 0.04 MPa for 80 seconds to perform shower development, and a black pattern was obtained.
  • ultrapure water is sprayed at a pressure of 9.8 MPa with an ultrahigh pressure cleaning nozzle onto the side of the glass substrate where the black pattern is formed to remove the residue, and a black (K) image is formed on the alkali-free glass substrate. did. Thereafter, heat treatment (beta) was performed at 220 ° C for 30 minutes.
  • the colored photosensitive resin composition R2 having the composition shown in Table 1 above on the glass substrate on which the K image was formed, coating, exposure, development, and beta were performed in the same manner as the formation of the K image.
  • a K image of the glass substrate was formed, and red pixels (R pixels) were formed on the other side.
  • the exposure amount in the exposure process was 150 mjZcm 2 and the shower development in the development process was 60 ° C. at 23 ° C.
  • the thickness of the R pixel is 1.
  • CI pigment 'Red (CIPR) 254 and CIPR 177 are applied respectively. . 0. 22gZm was 2.
  • a colored photosensitive resin composition G2 having the composition shown in Table 1 above is applied to the glass substrate on which the K image and R pixel are formed, and is applied and exposed in the same manner as in the formation of the K image. Then, development and beta were performed, and a green pixel (G pixel) was formed on the side of the glass substrate on which the K image and R pixel were formed.
  • the exposure amount in the exposure process was 150 mjZcm 2 and the shower development in the development process was 60 ° C. at 23 ° C.
  • the thickness of the G pixel is 1.6 m.
  • the application amount of CI pigment 'Green (CIPG) 36 and CI pigment' Yellow (CIPY) 150 is 1. It was 0.48 gZm 2 .
  • a colored photosensitive resin composition B2 having the composition shown in Table 1 above is used on the glass substrate on which the K image, R pixel, and G pixel are formed, in the same manner as in the formation of the K image. Coating, exposure, development, and beta were performed, and blue pixels (B pixels) were formed on the side of the glass substrate where the K image, R pixels, and G pixels were formed.
  • the exposure dose in the exposure process was 150 miZcm 2 and the shower development in the development process was 60 ° C. at 23 ° C.
  • the thickness of the B pixel is 1.6 m, and the application amounts of CI pigment 'Blue (CIPB) 15: 6 and CI pigment' Violet (CIPV) 23 are 0.63 g / m 2 and 0.07 g / m, respectively. 2 .
  • the colored photosensitive resin composition G2, B2 is prepared according to the preparation of the colored photosensitive resin composition G1, B1, and the preparation of the colored photosensitive resin composition R2. This is explained below.
  • Colored photosensitive resin composition R2 is obtained by weighing R pigment dispersion 1, R pigment dispersion 2, and propylene glycol monomethyl ether acetate in the amounts shown in Table 1 above, at a temperature of 24 ° C (2 ° C). Mix and stir at 150 rpm for 10 minutes, then methyl ketyl ketone, binder 2, DPHA solution, 2 trichloromethyl mono-5- ( ⁇ -styrylstyryl) — 1, 3, 4— Oxadiazole, 2, 4 Bis (trichloromethyl) -6- [4— (N, N-bisethoxycarboromethyl) amino-3-bromophenol] s Triazine and phenothiazine are used at a temperature of 24 ° C ( ⁇ 2 ° C) and added in this order and stirred at 150 rpm for 30 minutes, and then the additive 1 in the amount shown in Table 1 above is stripped off to a temperature of 24 ° C ( ⁇ 2 ° C ) And stirred at 150 rpm for
  • composition R2 Details of each composition in the composition R2 described in Table 1 are as follows. Further, R pigment dispersion 1, R pigment dispersion 2, binder 2, DPHA solution, and surfactant 1 in the colored photosensitive resin composition R2 are as described above.
  • an ITO film was formed as a transparent electrode by sputtering to obtain a color filter substrate.
  • a glass substrate coater MH-1600 (manufactured by F.S. Japan Co., Ltd.) having a slit-like nozzle is formed on the ITO film of the color filter substrate on which the ITO film produced above is formed by sputtering.
  • a coating solution for a photosensitive resin composition layer having the formulation 1 shown in Table 2 was applied.
  • VCD vacuum dryer
  • part of the solvent was dried for 30 seconds to eliminate the fluidity of the coating film.
  • the coating solution was removed and pre-betaged at 120 ° C. for 3 minutes to form a photosensitive resin composition layer having a film thickness of 2.4 / zm (layer forming step).
  • a photospacer was produced on the color filter substrate by the same patterning process and heat treatment process as in Example 1. However, the exposure was 300miZcm 2 and development with Na carbonate-based image solution was 23 ° C for 60 seconds.
  • the MVA mode liquid crystal display device of the present invention was fabricated in the same manner as in Example 1 using this color filter substrate.
  • display unevenness was evaluated in the same manner as in Example 1.
  • a photomask with good deformation recovery properties was obtained as in Example 1.
  • a spacer was obtained, and no display unevenness was observed in the image displayed by the liquid crystal display device (evaluation ⁇ ), and a high-quality image was obtained.

Abstract

Disclosed is a photosensitive resin composition for photospacers having high deformation recovery properties, which enables to eliminate display unevenness in a liquid crystal display having a cell thickness of 2-4 μm. Also disclosed are a method for producing a photospacer, a substrate for liquid crystal displays which enables a high image quality display by preventing display unevenness, a liquid crystal display element and a liquid crystal display. Specifically disclosed is a photosensitive resin composition for photospacers containing an alkali-soluble polymer material, a polymerizable monomer containing a urethane group and 5-15 acrylic groups, and a photopolymerization initiator. Also disclosed are a method for producing a photospacer by using such a photosensitive resin composition, a substrate for liquid crystal displays comprising such a photospacer, a liquid crystal display element and a liquid crystal display.

Description

明 細 書  Specification
フォトスぺーサー用感光性樹脂組成物及びフォトスぺーサ一の製造方法 並びに液晶表示装置用基板、液晶表示素子及び液晶表示装置  Photospacer photosensitive resin composition, photospacer manufacturing method, liquid crystal display substrate, liquid crystal display element, and liquid crystal display device
技術分野  Technical field
[0001] 本発明は、液晶セルのセル厚の変動が表示ムラとなりやす 、表示装置を構成する スぺーサ一の作製に好適なフォトスぺーサー用感光性樹脂組成物及びフォトスぺー サ一の製造方法、並びにこの方法により作製されたフォトスぺーサーを備えた液晶表 示装置用基板、液晶表示素子、及び液晶表示装置に関する。  The present invention relates to a photosensitive resin composition for a photospacer suitable for the production of a spacer constituting a display device, and the production of the photospacer, in which variation in the cell thickness of the liquid crystal cell tends to cause display unevenness. The present invention relates to a method, and a substrate for a liquid crystal display device provided with a photospacer produced by this method, a liquid crystal display element, and a liquid crystal display device.
背景技術  Background art
[0002] 従来より、液晶表示装置は、高画質画像を表示する表示装置に広く利用されてい る。液晶表示装置は一般に、一対の基板間に所定の配向により画像表示を可能とす る液晶層が配置されており、この基板間隔、すなわち液晶層の厚みを均一に維持す ることが画質を決定する要素の一つであり、そのために液晶層の厚みを一定に保持 するためのスぺーサ一が配設されている。この基板の間の厚みは一般に「セル厚」と 称され、セル厚は通常、前記液晶層の厚み、換言すれば、表示領域の液晶に電界を かけている 2枚の電極間の距離を示すものである。  Conventionally, liquid crystal display devices have been widely used for display devices that display high-quality images. In general, a liquid crystal display device has a liquid crystal layer that can display an image with a predetermined orientation between a pair of substrates, and maintaining the distance between the substrates, that is, the thickness of the liquid crystal layer, determines the image quality. For this purpose, a spacer for keeping the thickness of the liquid crystal layer constant is provided. The thickness between the substrates is generally referred to as the “cell thickness”, and the cell thickness usually indicates the thickness of the liquid crystal layer, in other words, the distance between two electrodes applying an electric field to the liquid crystal in the display area. Is.
[0003] スぺーサ一は、従来ビーズ散布により形成されて ヽたが、近年では、感光性榭脂組 成物を用いてフォトリソグラフィ一により位置精度の高いスぺーサ一が形成されるよう になってきて!/ヽる。このような感光性榭脂組成物を用いて形成されたスぺーサ一は、 フォトスぺーサ一と呼ばれて 、る。  [0003] Spacers have been conventionally formed by bead dispersion, but in recent years, spacers with high positional accuracy have been formed by photolithography using a photosensitive resin composition. Come on! A spacer formed using such a photosensitive resin composition is called a photospacer.
[0004] 感光性榭脂組成物を用いてパターユング、アルカリ現像、及びベータを経て作製さ れたフォトスぺーサ一については、そのスぺーサドットの圧縮強度が弱ぐパネル形 成時に塑性変形が大きくなる傾向を有している。高画質の画像表示には、これに起 因して液晶層の厚みが設計値より小さくなる等して均一性が保持できな力つたり、画 像ムラを生ずるといった問題がないことが要求される。また、液晶表示装置の高精度 化の点では、感光性榭脂組成物のアルカリ現像残渣が生じな ヽことも重要である。  [0004] For a photo spacer produced by patterning, alkali development, and beta using a photosensitive resin composition, plastic deformation does not occur when forming a panel in which the compressive strength of the spacer dot is weak. Has a tendency to grow. For high-quality image display, it is required that there is no problem that the uniformity of the liquid crystal layer cannot be maintained due to the thickness of the liquid crystal layer becoming smaller than the design value, or that there is no image unevenness. The In addition, it is important that the alkali development residue of the photosensitive resin composition is not generated in terms of improving the accuracy of the liquid crystal display device.
[0005] 液晶表示装置の表示モードには、従来、 TNモードが採用されていたが(例えば、 非特許文献 1参照)、視野角が狭いという問題力 広視野角の VAモードが提案され ている (例えば、非特許文献 2参照)。 [0005] Conventionally, a TN mode has been adopted as a display mode of a liquid crystal display device (for example, Non-patent document 1), the problem of narrow viewing angle VA mode with a wide viewing angle has been proposed (for example, see non-patent document 2).
[0006] VAモードは、リブと呼ばれる低誘電率の突起を上下一対の透明電極の一方又は 両方に形成する、あるいは上下一対の透明電極の双方をパターユングして用いる( 例えば、非特許文献 3参照)等により、電極間に生じる電界に部分的な傾斜を付与し 、これにより液晶の配向をマルチドメインィ匕して、いずれの角度力もも同じような明るさ で観察可能な表示装置を実現している。リブを用いるものは MVA、 ASV、 CPAなど と呼ばれ、上下の透明電極の双方をパターユングして用いるものは PVAと呼ばれて いる。 [0006] In the VA mode, a low dielectric constant protrusion called a rib is formed on one or both of a pair of upper and lower transparent electrodes, or both the pair of upper and lower transparent electrodes are patterned (for example, Non-Patent Document 3). By applying a partial tilt to the electric field generated between the electrodes, the orientation of the liquid crystal is multi-domained to realize a display device that can observe any angular force with the same brightness. is doing. Those using ribs are called MVA, ASV, CPA, etc., and those using both upper and lower transparent electrodes are called PVA.
この VAモードは、液晶セルのセル厚の変動が表示ムラとなりやす 、表示モードの 一つであり、 IPSモードや OCBモード等の他の表示モードについても同様の傾向を 示すものがある。  This VA mode is one of the display modes in which fluctuations in the cell thickness of the liquid crystal cells tend to cause display unevenness, and other display modes such as the IPS mode and OCB mode also show the same tendency.
[0007] 上記に関連して、液晶層の厚さ(セル厚)を一定に保っためのスぺーサ一形成技術 として、スぺーサ一形成用にァリル基を有する榭脂を用いることが開示されている(例 えば、特許文献 1参照)。  [0007] In relation to the above, as a spacer forming technique for keeping the thickness (cell thickness) of the liquid crystal layer constant, the use of a resin having an aryl group for forming the spacer is disclosed. (For example, see Patent Document 1).
特許文献 1:特開 2003 - 207787号公報  Patent Document 1: Japanese Patent Application Laid-Open No. 2003-207787
非特許文献 1 :「液晶ビジネス最前線」岩井善弘著、 41頁、(株)工業調査会発行 (19 93年)  Non-Patent Document 1: “Forefront of Liquid Crystal Business” by Yoshihiro Iwai, p. 41, published by Kogyo Kenkyukai (1993)
非特許文献 2:「日経マイクロデバイス別冊 フラットパネル ·ディスプレイ 2003」実務 編、 82〜85頁、日経 BP社  Non-patent document 2: “Nikkei Microdevices separate volume Flat Panel Display 2003”, practical edition, pages 82-85, Nikkei BP
非特許文献 3:「日経マイクロデバイス別冊 フラットパネル ·ディスプレイ 2003」実務 編、 103頁、日経 BP社  Non-Patent Document 3: “Nikkei Microdevices separate volume Flat Panel Display 2003”, practical edition, page 103, Nikkei BP
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0008] 元々、液晶セルに用いられるフォトスぺーサ一には、高い変形回復性が要求されて いる。これを実現するために、モノマーなどの架橋反応率を高くすることが行なわれ、 変形回復率をある程度高めることができるものの、その向上効果は頭打ちになる傾向 にあり、更なる改善が求められていた。 [0009] 特に上記の VAモードなどは、液晶の複屈折モードを採用するため、透過率がセル 厚 (d)に依存し、セル厚のムラが明るさのムラとして検出されやすい。つまり、セル厚 の変動により表示ムラを生じやすい。また、表示の高速応答化のためには、セル厚を 従来 (TNモード)の 4. 5 μ mから更に薄くすることが有効である力 セル厚を薄くした 場合には、セル厚の変動の、セル厚全体に占める割合が大きくなり、よりセル厚のム ラ (厚み不均一)の影響を受けやすくなる。さらに、高速応答が実現されるとテレビな どに広く使用されるようになり、表示ムラ、すなわちセル厚のムラに対する要求も厳し くなつているのが実状である。 [0008] Originally, a photo spacer used in a liquid crystal cell is required to have high deformation recovery properties. In order to achieve this, the crosslinking reaction rate of monomers and the like is increased, and the deformation recovery rate can be increased to some extent, but the improvement effect tends to reach its peak, and further improvement is required. It was. In particular, the VA mode described above employs a birefringence mode of liquid crystal, and thus the transmittance depends on the cell thickness (d), and the cell thickness unevenness is easily detected as the brightness unevenness. In other words, display unevenness is likely to occur due to variations in cell thickness. In addition, it is effective to further reduce the cell thickness from the conventional (TN mode) of 4.5 μm for faster response of the display. As a result, the proportion of the total cell thickness increases, and it becomes more susceptible to cell thickness irregularity (thickness nonuniformity). Furthermore, when a high-speed response is realized, it will be widely used for televisions, and the actual situation is that the demand for display unevenness, that is, cell thickness unevenness, is becoming stricter.
[0010] 本発明は、上記に鑑みなされたものであり、高度の変形回復性を有し、特にセル厚 が 2〜4 μ mである液晶表示装置における表示ムラを解消し得るフォトスぺーサー用 感光性榭脂組成物、これを用いたフォトスぺーサ一の製造方法、並びに、表示ムラを 防止して高画質画像の表示を可能とする液晶表示装置用基板、液晶表示素子、及 び液晶表示装置を提供することを目的とし、該目的を達成することを課題とする。 課題を解決するための手段  The present invention has been made in view of the above, and has a high degree of deformation recovery, and in particular for a photospacer that can eliminate display unevenness in a liquid crystal display device having a cell thickness of 2 to 4 μm. Photosensitive resin composition, method for producing photospacer using the same, liquid crystal display substrate, liquid crystal display element, and liquid crystal display capable of preventing display unevenness and displaying high-quality image An object is to provide an apparatus and to achieve the object. Means for solving the problem
[0011] 本発明は、ウレタン基と 5〜15個のアクリル基とを含む重合性モノマーを用いた場 合に変形回復性が飛躍的に向上し、特にセル厚が 2〜4 mの薄厚構成を有する場 合に生じやすい表示ムラの改善に特に有効であるとの知見を得、かかる知見に基づ[0011] In the present invention, when a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups is used, the deformation recovery property is remarkably improved, and in particular, a thin structure having a cell thickness of 2 to 4 m. Obtained knowledge that it is particularly effective in improving display unevenness that tends to occur when
Vヽて達成されたものである。 V has been achieved.
前記課題を達成するための具体的手段は以下の通りである。  Specific means for achieving the above object are as follows.
[0012] < 1 > アルカリ可溶性高分子物質と、ウレタン基と 5〜15個のアクリル基とを含む 重合性モノマーと、光重合開始剤と、を含有するフォトスぺーサー用感光性榭脂組 成物である。 [0012] A photosensitive resin composition for a photospacer, comprising <1> an alkali-soluble polymer substance, a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups, and a photopolymerization initiator. It is a thing.
[0013] < 2> 前記重合性モノマー力 下記一般式 (A)又は(B)で表される化合物である <2> The polymerizable monomer power is a compound represented by the following general formula (A) or (B)
< 1 >に記載のフォトスぺーサー用感光性榭脂組成物である。 <1> A photosensitive resin composition for a photospacer according to <1>.
[0014] [化 1] O O [0014] [Chemical 1] OO
RL十 NHCOCH2C(CH2OCCH=CH2)3J
Figure imgf000006_0001
Figure imgf000006_0002
R L 10 NHCOCH 2 C (CH 2 OCCH = CH 2 ) 3 J
Figure imgf000006_0001
Figure imgf000006_0002
[0015] (一般式 (A)又は (B)にお 、て、 Rは下記式 (a)、 (b)又は (c)を表す。 ) (In the general formula (A) or (B), R represents the following formula (a), (b) or (c).)
1  1
[0016] [化 2]  [0016] [Chemical 2]
Figure imgf000006_0003
Figure imgf000006_0003
[0017] (式(a)にお!/、て、 nは 2〜8の整数を表す。) [0017] (In formula (a),! /, N represents an integer of 2 to 8.)
[0018] < 3 > 少なくとも 2枚の基板と、前記基板間に設けられた液晶と、前記液晶に電界 を印加する 2枚の電極と、前記基板間のセル厚を規制するためのフォトスぺーサ一と 、を備えた液晶表示装置における前記フォトスぺーサ一の製造方法であって、前記 2 枚の基板の一方の上に、 < 1 >又は < 2>に記載のフォトスぺーサー用感光性榭脂 組成物を含む感光性榭脂層を形成する層形成工程と、形成された前記感光性榭脂 層を露光及びアルカリ現像してパターユングするパター-ング工程と、を有するフォト スぺーサ一の製造方法である。 <3> At least two substrates, a liquid crystal provided between the substrates, two electrodes for applying an electric field to the liquid crystal, and a photospacer for regulating a cell thickness between the substrates. A method for producing the photospacer in a liquid crystal display device comprising: a photosensitive spacer for a photospacer according to <1> or <2> on one of the two substrates. A layer forming step of forming a photosensitive resin layer containing a fat composition, and the formed photosensitive resin And a patterning step of patterning the layer by exposing and alkali developing the layer.
[0019] <4> 前記層形成工程は、仮支持体上に < 1 >又は < 2 >に記載のフォトスぺー サー用感光性榭脂組成物で構成された感光性榭脂層を有する感光性転写材料を 用い、前記感光性榭脂層を前記 2枚の基板の一方に接するように転写する < 3 >に 記載のフォトスぺーサ一の製造方法である。  [0019] <4> In the layer forming step, a photosensitive resin layer having a photosensitive resin layer composed of the photosensitive resin composition for a photospacer according to <1> or <2> on a temporary support. The method for producing a photospacer according to <3>, wherein the photosensitive resin layer is transferred so as to be in contact with one of the two substrates using a transfer material.
[0020] < 5 > 前記層形成工程は、 < 1 >又は < 2>に記載のフォトスぺーサー用感光性 榭脂組成物を含む溶液を前記 2枚の基板の一方の上に塗布し、乾燥する < 3 >に記 載のフォトスぺーサ一の製造方法である。  [0020] <5> In the layer forming step, a solution containing the photosensitive resin composition for a photospacer according to <1> or <2> is applied onto one of the two substrates and dried. Yes This is a method for manufacturing a photospacer as described in <3>.
[0021] < 6 > < 3 >乃至 < 5 >のいずれ力 1つに記載のフォトスぺーサ一の製造方法に より製造されたフォトスぺーサーを備えた液晶表示装置用基板である。  <6> A substrate for a liquid crystal display device comprising a photospacer produced by the method for producing a photospacer according to any one of <3> to <5>.
[0022] < 7> < 6 >に記載の液晶表示装置用基板を備えた液晶表示素子である。  [0022] <7> A liquid crystal display device comprising the liquid crystal display device substrate according to <6>.
[0023] < 8 > < 7>に記載の液晶表示素子を備えた液晶表示装置である。  <8> A liquid crystal display device comprising the liquid crystal display element according to <7>.
発明の効果  The invention's effect
[0024] 本発明によれば、高度の変形回復性を有し、特にセル厚が 2〜4 μ mである液晶表 示装置における表示ムラを解消し得るフォトスぺーサー用感光性榭脂組成物、これ を用いたフォトスぺーサ一の製造方法、並びに、表示ムラを防止して高画質画像の 表示を可能とする液晶表示装置用基板、液晶表示素子、及び液晶表示装置を提供 することができる。  [0024] According to the present invention, the photosensitive resin composition for a photospacer has a high degree of deformation recovery and can eliminate display unevenness particularly in a liquid crystal display device having a cell thickness of 2 to 4 µm. , A method of manufacturing a photospacer using the same, and a liquid crystal display device substrate, a liquid crystal display element, and a liquid crystal display device capable of preventing display unevenness and displaying a high-quality image can be provided. .
本発明は、セル厚が 2〜4 111であっても、セル厚の変動で表示ムラを起こし易い 液晶表示装置における表示ムラの改善に特に効果的である。  The present invention is particularly effective in improving display unevenness in a liquid crystal display device that easily causes display unevenness due to fluctuations in cell thickness even when the cell thickness is 2 to 4111.
図面の簡単な説明  Brief Description of Drawings
[0025] [図 1]本発明の MVAモード液晶表示素子の構成例を示す概略断面図である。 FIG. 1 is a schematic cross-sectional view showing a configuration example of an MVA mode liquid crystal display element of the present invention.
[図 2]本発明の PVAモード液晶表示素子の構成例を示す概略断面図である。  FIG. 2 is a schematic cross-sectional view showing a configuration example of a PVA mode liquid crystal display element of the present invention.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0026] 以下、本発明のフォトスぺーサー用感光性榭脂組成物及びフォトスぺーサ一の製 造方法並びに液晶表示装置用基板、液晶表示素子及び液晶表示装置について詳 細に説明する。 [0027] <フォトスぺーサー用感光性榭脂組成物及びフォトスぺーサ一の製造方法 > 本発明のフォトスぺーサー用感光性榭脂組成物は、アルカリ可溶性高分子物質とHereinafter, the photosensitive resin composition for a photospacer of the present invention, the method for producing the photospacer, the substrate for a liquid crystal display device, the liquid crystal display element, and the liquid crystal display device will be described in detail. <Photosensitive spacer composition for photospacer and method for producing photospacer> The photosensitive resin composition for photospacer of the present invention comprises an alkali-soluble polymer substance and
、ウレタン基と 5〜 15個のアクリル基とを含む重合性モノマーと、光重合開始剤と、を 含有する。本発明のフォトスぺーサー用感光性榭脂組成物により製造されるフォトス ぺーサ一は高度の変形回復性を有するため、表示素子における表示ムラを解消す ることがでさる。 And a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups, and a photopolymerization initiator. Since the photospacer produced from the photosensitive resin composition for a photospacer of the present invention has a high degree of deformation recovery, display unevenness in the display element can be eliminated.
[0028] また、本発明のフォトスぺーサ一の製造方法は、少なくとも 2枚の基板と、前記基板 間に設けられた液晶と、前記液晶に電界を印加する 2枚の電極と、前記基板間のセ ル厚を規制するためのフォトスぺーサ一と、を備えた液晶表示装置における前記フォ トスぺーサ一を製造するものであり、前記 2枚の基板の一方の上に、本発明のフォトス ぺーサ一用感光性樹脂組成物を含む感光性樹脂層を形成する層形成工程と、形成 された前記感光性榭脂層を露光及びアルカリ現像してパターニングするパターニン グ工程と、を有する。  [0028] Further, the method for producing a photospacer of the present invention includes at least two substrates, a liquid crystal provided between the substrates, two electrodes for applying an electric field to the liquid crystal, and the space between the substrates. A photospacer for regulating the cell thickness of the liquid crystal display device, and the photospacer of the present invention is formed on one of the two substrates. A layer forming step of forming a photosensitive resin layer containing the photosensitive resin composition for spacers, and a patterning step of patterning the formed photosensitive resin layer by exposure and alkali development.
[0029] 具体的には、本発明に係るフォトスぺーサ一は本発明のフォトスぺーサー用感光性 榭脂組成物から形成され、該組成物中の重合性モノマーとしてウレタン基と 5〜 15個 のアクリル基とを含む化合物を用いるものである。  [0029] Specifically, the photospacer according to the present invention is formed from the photosensitive resin composition for photospacers of the present invention, and 5 to 15 urethane groups as polymerizable monomers in the composition. A compound containing an acrylic group is used.
本発明のフォトスぺーサ一の製造方法によれば、高度の変形回復性を有するフォト スぺーサーを容易に製造できる。  According to the method for producing a photospacer of the present invention, a photospacer having a high degree of deformation recovery can be easily produced.
[0030] 以下、本発明のフォトスぺーサ一の製造方法について説明し、該説明を通じて本 発明のフォトスぺーサー用感光性榭脂組成物の詳細についても述べる。  [0030] Hereinafter, a method for producing the photospacer of the present invention will be described, and details of the photosensitive resin composition for a photospacer of the present invention will be described through the description.
[層形成工程]  [Layer formation process]
本発明に係る層形成工程は、基板上に本発明のフォトスぺーサー用感光性榭脂組 成物を含む感光性榭脂層(以下、単に「感光性榭脂組成物層」とも言う。)を形成する 工程である。  In the layer forming step according to the present invention, a photosensitive resin layer containing the photosensitive resin composition for a photospacer of the present invention on a substrate (hereinafter, also simply referred to as “photosensitive resin composition layer”). This is a process of forming.
この感光性榭脂組成物層は、後述する製造工程を経て、変形回復性が良好でセ ル厚を均一に保持し得るフォトスぺーサーを構成する。該フォトスぺーサーを用いる ことにより特にセル厚の変動で表示ムラが生じやすい表示装置における画像中の表 示ムラが効果的に解消される。 [0031] 基板上に感光性榭脂組成物層を形成する方法としては、(a)本発明のフォトスぺー サー用感光性榭脂組成物を含む溶液を公知の塗布法により塗布する方法、及び (b )感光性転写材料を用いた転写法によりラミネートする方法が好適に挙げられる。以 下、各々について述べる。 This photosensitive resin composition layer constitutes a photospacer that has good deformation recovery properties and can maintain a uniform cell thickness through the manufacturing process described later. By using the photospacer, display unevenness in an image in a display device, which tends to cause display unevenness due to a change in cell thickness, is effectively eliminated. [0031] As a method of forming a photosensitive resin composition layer on a substrate, (a) a method of applying a solution containing the photosensitive resin composition for a photospacer of the present invention by a known application method, and (b) A method of laminating by a transfer method using a photosensitive transfer material is preferable. Each is described below.
[0032] (a)塗布法  [0032] (a) Application method
感光性榭脂組成物の塗布は、公知の塗布法、例えば、スピンコート法、カーテンコ ート法、スリットコート法、ディップコート法、エアーナイフコート法、ローラーコート法、 ワイヤーバーコート法、グラビアコート法、あるいは米国特許第 2681294号明細書に 記載のポッパーを使用するエタストルージョンコート法等により行なうことができる。中 でも、スリットノズルあるいはスリットコーターによる方法が好適である。  The photosensitive resin composition can be applied by a known application method such as spin coating, curtain coating, slit coating, dip coating, air knife coating, roller coating, wire bar coating, gravure coating. Or an etha trusion coating method using a popper described in US Pat. No. 2,681,294. Among them, the method using a slit nozzle or a slit coater is preferable.
[0033] 本発明にお ヽては特に、感光性榭脂組成物をスリット状ノズルにより基板上に塗布 し、乾燥させて、基板上に感光性榭脂組成物層を形成する態様が好適である。  [0033] In the present invention, in particular, a mode in which a photosensitive resin composition is applied onto a substrate with a slit nozzle and dried to form a photosensitive resin composition layer on the substrate is preferable. is there.
[0034] 感光性榭脂組成物層を塗布形成する場合、その層厚は 0. 5〜10. 0 μ mが好まし く、 1〜6 /ζ πιがより好ましい。層厚が前記範囲であると、製造時における塗布形成の 際のピンホールの発生が防止され、未露光部の現像除去を長時間を要することなく 行なうことができる。  [0034] When the photosensitive resin composition layer is formed by coating, the layer thickness is preferably 0.5 to 10.0 μm, more preferably 1 to 6 / ζ πι. When the layer thickness is within the above range, the generation of pinholes during the formation of coating during production can be prevented, and development and removal of unexposed areas can be performed without requiring a long time.
[0035] 前記スリット状ノズルは、液が吐出する部分にスリット状の穴を有するスリット状ノズ ルであり、このスリットノズル、あるいはスリットノズルを有するスリットコーターとしては、 特開 2004— 89851号公報、特開 2004— 17043号公報、特開 2003— 170098号 公報、特開 2003— 164787号公報、特開 2003— 10767号公報、特開 2002— 79 163号公報、特開 2001— 310147号公報等に記載のスリット状ノズル、及びスリット コーターが好適に用いられる。  The slit-shaped nozzle is a slit-shaped nozzle having a slit-shaped hole at a portion from which the liquid is discharged. As the slit nozzle or a slit coater having the slit nozzle, JP-A-2004-89851, JP-A-2004-17043, JP-A-2003-170098, JP-A-2003-164787, JP-A-2003-10767, JP-A-2002-79163, JP-A-2001-310147, etc. The slit-shaped nozzles and slit coaters described are preferably used.
[0036] (b)転写法  [0036] (b) Transcription method
転写による場合、感光性転写材料を用いて、仮支持体上に膜状に形成された感光 性榭脂組成物層を基板面に加熱及び Z又は加圧したローラー又は平板で圧着又は 加熱圧着することによって貼り合せた後、仮支持体の剥離により感光性榭脂組成物 層を基板上に転写する。具体的には、特開平 7— 110575号公報、特開平 11— 779 42号公報、欄 2000— 334836号公報、欄 2002— 148794号公報に記載のラ ミネーター及びラミネート方法が挙げられ、低異物の観点で、特開平 7— 110575号 公報に記載の方法を用 、るのが好ま U、。 In the case of transfer, using a photosensitive transfer material, the photosensitive resin composition layer formed in a film shape on the temporary support is pressure-bonded or thermocompression-bonded with a roller or flat plate heated and Z or pressurized to the substrate surface. Then, the photosensitive resin composition layer is transferred onto the substrate by peeling off the temporary support. Specifically, the methods described in JP-A-7-110575, JP-A-11-77942, column 2000-334836, column 2002-148794 are disclosed. Examples include a minator and a laminating method. From the viewpoint of low foreign matter, it is preferable to use the method described in JP-A-7-110575.
[0037] 本発明にお ヽては特に、仮支持体上に、感光性榭脂組成物層を有するフォトスぺ ーサ一形成用の感光性転写材料を用いて、基板上に感光性榭脂組成物層を転写 形成する態様が好ましい。感光性榭脂組成物層を転写形成する場合の層厚も、塗 布形成する場合と同様である。  [0037] In the present invention, in particular, a photosensitive transfer material for forming a spacer having a photosensitive resin composition layer on a temporary support is used, and a photosensitive resin is formed on a substrate. An embodiment in which the composition layer is transferred and formed is preferable. The layer thickness when the photosensitive resin composition layer is transferred and formed is also the same as when the coating is formed.
[0038] 具体的には、感光性転写材料から保護フィルム (カバーフィルム)を取除 、た後、露 出した感光性榭脂組成物層の表面を被転写材である基板面と重ね合わせ、加圧 '加 熱を行なって貼り合わせる(ラミネート)。貼り合わせは、公知のラミネーター (真空ラミ ネーターなど)を用いて好適に行なうことができ、より生産性を高める観点からは、ォ ートカツトラミネ一ターが好適である。  [0038] Specifically, after removing the protective film (cover film) from the photosensitive transfer material, the surface of the exposed photosensitive resin composition layer is superposed on the substrate surface as the transfer material, Apply pressure (heat) and bond (laminate). Bonding can be suitably performed using a known laminator (vacuum laminator or the like), and an auto cut laminator is preferable from the viewpoint of increasing productivity.
[0039] 感光性榭脂組成物層を形成する基板としては、例えば、透明基板 (例えばガラス基 板やプラスチックス基板)、透明導電膜 (例えば ITO膜)付基板、カラーフィルタ付き の基板 (カラーフィルタ基板ともいう。)、駆動素子 (例えば薄膜トランジスタ [TFT]) 付駆動基板、などが挙げられる。基板の厚みとしては、 700〜1200 /ζ πιが一般に好 ましい。  [0039] Examples of the substrate on which the photosensitive resin composition layer is formed include, for example, a transparent substrate (for example, a glass substrate or a plastic substrate), a substrate with a transparent conductive film (for example, an ITO film), and a substrate with a color filter (color). And a driving substrate with a driving element (for example, a thin film transistor [TFT]). The thickness of the substrate is generally preferably 700 to 1200 / ζ πι.
また、基板は、予めカップリング処理を施しておくことにより、感光性榭脂組成物、又 は感光性転写材料の感光性榭脂組成物層との間の密着を良好にすることができる。 カップリング処理としては、特開 2000— 39033記載の方法が好適に用いられる。  In addition, the substrate can be subjected to a coupling treatment in advance to improve the adhesion between the photosensitive resin composition or the photosensitive resin composition layer of the photosensitive transfer material. As the coupling treatment, a method described in JP-A-2000-39033 is preferably used.
[0040] 感光性榭脂組成物層を形成する場合、感光性榭脂組成物層上には更に酸素遮断 膜を設けることができる。これにより露光感度をアップすることができ、該酸素遮断膜 としては、後述の中間層の項において説明した構成と同様にすることができる。酸素 遮断膜の膜厚としては、 0. 5〜3. 0 mが好ましい。 [0040] When forming the photosensitive resin composition layer, an oxygen-blocking film can be further provided on the photosensitive resin composition layer. As a result, the exposure sensitivity can be increased, and the oxygen blocking film can have the same structure as that described in the later section of the intermediate layer. The thickness of the oxygen blocking film is preferably 0.5 to 3.0 m.
また、転写性を向上させるためにクッション性を有する熱可塑性榭脂層を設けてもよ い。  Further, in order to improve transferability, a thermoplastic resin layer having cushioning properties may be provided.
[0041] 〜感光性榭脂組成物〜  [0041] -Photosensitive resin composition-
次に、感光性榭脂組成物について説明する。  Next, the photosensitive resin composition will be described.
感光性榭脂組成物 (本発明のフォトスぺーサー用感光性榭脂組成物)は、アルカリ 可溶性高分子物質と、ウレタン基と 5〜 15個のアクリル基とを含む重合性モノマーと、 光重合開始剤と、を含有する。また、必要に応じて、着色剤や界面活性剤などのその 他の成分を用いて構成することができる。 The photosensitive resin composition (photosensitive resin composition for photospacers of the present invention) is an alkali. It contains a soluble polymer substance, a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups, and a photopolymerization initiator. Moreover, it can comprise using other components, such as a coloring agent and surfactant, as needed.
[0042] (A)アルカリ可溶性高分子物質 [0042] (A) Alkali-soluble polymer substance
アルカリ可溶性高分子物質は、フォトスぺーサーを形成する場合のバインダー成分 としての機能を有するものであり、それ自体が架橋基を有することが好ましい。アル力 リ可溶性高分子物質は、目的等に応じ適宜選択した、単量体の単独重合体、及び複 数の単量体からなる共重合体の 、ずれであってもよ 、が、カルボキシル基を有する 構造単位と、下記一般式 (1)で表される構造単位と、芳香族環及び Z又は脂肪族環 を 1以上有する (メタ)アタリレートからなる構造単位とを少なくとも有する共重合体が 好ましいものとして挙げられる。  The alkali-soluble polymer substance has a function as a binder component in forming a photospacer, and preferably has a crosslinking group itself. The alcoholic soluble polymer substance may be a monomer homopolymer or a copolymer composed of a plurality of monomers, which are appropriately selected according to the purpose, etc. A copolymer having at least a structural unit represented by the following general formula (1), and a structural unit composed of (meth) acrylate having at least one aromatic ring and at least one Z or aliphatic ring. It is mentioned as preferable.
[0043] [化 3] [0043] [Chemical 3]
Figure imgf000011_0001
一 »式
Figure imgf000011_0001
One »Formula
[0044] この共重合体は、例えば、カルボキシル基を有する重合性モノマー、下記式(2)で 表されるモノマー、芳香族環及び Z又は脂肪族環を 1以上有する (メタ)アタリレート、 及び必要に応じてこれらと共重合可能なその他のモノマーを公知の方法で共重合さ せること〖こよって得ることができる。 [0044] This copolymer includes, for example, a polymerizable monomer having a carboxyl group, a monomer represented by the following formula (2), an aromatic ring and (meth) acrylate having one or more Z or aliphatic rings, and If necessary, other monomers copolymerizable with these can be obtained by copolymerizing by a known method.
[0045] [化 4]
Figure imgf000012_0001
式 ( 2 )
[0045] [Chemical 4]
Figure imgf000012_0001
Formula (2)
[0046] 前記一般式(1)及び式(2)中、 R1は水素原子又はメチル基を表し、 R2〜R6はそれ ぞれ独立に、水素原子又は、置換基を有していてもよいアルキル基、ァリール基、ハ ロゲン原子、シァノ基を表す。 In the general formulas (1) and (2), R 1 represents a hydrogen atom or a methyl group, and R 2 to R 6 each independently have a hydrogen atom or a substituent. Represents an alkyl group, an aryl group, a halogen atom, or a cyan group.
[0047] 前記カルボキシル基を有する重合性モノマーとしては、例えば (メタ)アクリル酸、ビ -ル安息香酸、マレイン酸、ィタコン酸、クロトン酸、桂皮酸、アクリル酸ダイマーなど が挙げられる。また、 2—ヒドロキシェチル (メタ)アタリレート等の、水酸基を有する単 量体と無水マレイン酸や無水フタル酸のような環状無水物との付加反応物も使用で きる。また、無水マレイン酸、無水ィタコン酸のような無水物モノマーをカルボン酸の 前駆体として用いることもできる。これらの中でも重合性や原料価格の点から、(メタ) アクリル酸が特に好ましい。  [0047] Examples of the polymerizable monomer having a carboxyl group include (meth) acrylic acid, belbenzoic acid, maleic acid, itaconic acid, crotonic acid, cinnamic acid, and acrylic acid dimer. In addition, an addition reaction product of a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate and a cyclic anhydride such as maleic anhydride or phthalic anhydride can also be used. An anhydride monomer such as maleic anhydride and itaconic anhydride can also be used as a precursor of carboxylic acid. Among these, (meth) acrylic acid is particularly preferable from the viewpoint of polymerizability and raw material price.
[0048] 前記式(2)で表されるモノマーとしては、例えば、ァリル (メタ)アタリレート、 3 クロ ルー 2 プロべ-ル(メタ)アタリレート、 3 フエ-ル 2 プロべ-ル(メタ)アタリレー ト、 3— (ヒドロキシフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3— (2—ヒドロキシフ ェ -ル)—2—プロべ-ル (メタ)アタリレート、 3— (3, 4 ジヒドロキシフエ-ル)—2— プロべ-ル (メタ)アタリレート、 3- (2, 4ージヒドロキシフエ-ル) 2—プロべ-ル (メ タ)アタリレート、 3— (3, 4, 5 トリヒドロキシフエ-ル)一 2—プロべ-ル (メタ)アタリレ ート、 3— (3—メトキシ一 4 ヒドロキシフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3— (3, 4 ジヒドロキシ一 5—メトキシフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3— (3, 5 ジメトキシ一 4 ヒドロキシフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3— (2 ヒドロキシ一 4—メチルフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3— (4 —メトキシフエ-ル)—2—プロべ-ル (メタ)アタリレート、 3— (4—エトキシフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3—(2—メトキシフエ-ル)ー2—プロべ-ル (メ タ)アタリレート、 3— (3, 4 ジメトキシフエ-ル)一 2—プロべ-ル (メタ)アタリレート、 3— (3—メトキシ一 4 プロポキシフエ-ル) 2—プロべ-ル (メタ)アタリレート、 3— (2, 4, 6 トリメトキシフエ-ル)一 2—プロべ-ル (メタ)アタリレート、 3— (3—メトキシ —4 ベンジルォキシフエ-ル)—2—プロべ-ル (メタ)アタリレート、 3— (3— (3'— メトキシフエ-ル) 4 ベンジルォキシフエ-ル) 2—プロべ-ル(メタ)アタリレート 、 3— (3, 4, 5 トリメトキシフエ-ル)一 2—プロべ-ル (メタ)アタリレート、 3— (4—メ チルフエ-ル) 2—プロべ-ル(メタ)アタリレート; [0048] Examples of the monomer represented by the formula (2) include, for example, aryl (meth) acrylate, 3 chloro 2 probe (meth) acrylate, 3 phenol 2 probe (meta) ) Atrelate, 3— (Hydroxyphenol) 2 — Probe (Meth) acrylate, 3 — (2 — Hydroxyphenol) — 2 — Probe (Meth) acrylate, 3 — (3,4 dihydroxyphenyl) —2—probe (meth) acrylate, 3- (2,4-dihydroxyphenol) 2—probe (meth) acrylate, 3— ( 3, 4, 5 Trihydroxyphenyl) 1-2-probe (meth) acrylate, 3- (3-methoxy-4-hydroxyphenol) 2-probe (meth) acrylate, 3— (3,4 dihydroxy mono-5-methoxyphenol) 2—probe (meth) acrylate, 3— (3,5 dimethoxy monohydroxyl ester) 2 Probe (meth) atarylate, 3— (2 Hydroxy 4-methylphenol) 2—Probe (meth) acrylate, 3— (4 —Methoxyphenol) —2—Probe (Meth) atallylate, 3— (4-Ethoxyphenol) 2-Probe (meth) acrylate, 3- (2-Methoxyphenol)-2-Probe (meth) acrylate, 3- (3,4 Dimethoxyphenol) 2-Pro Base (meth) acrylate, 3— (3-methoxy 4-propyloxy) 2-Probe (meth) acrylate, 3- (2, 4, 6 trimethoxy) 1 —Probe (meth) acrylate, 3— (3-methoxy —4 benzyloxyphenyl) —2—Probe (meth) acrylate, 3— (3— (3′— Methoxyphenol— 4) Benzyloxyphenyl) 2-Probe (meth) acrylate, 3— (3, 4, 5 Trimethoxyphenol) 1 2-Probe (meth) acrylate, 3 — (4-Methylphenol) 2-Probe (meth) acrylate;
[0049] 3 フエ-ル— 3— (2, 4, 6 トリメチルフエ-ル)—2—プロべ-ル (メタ)アタリレート 、 3, 3—〔ジ—(2, 4, 6 トリメチルフエ-ル)〕—2—プロべ-ル (メタ)アタリレート、 3 フエ-ルー 3—(4 メチルフエ-ル)ー2—プロべ-ル(メタ)アタリレート、 3, 3 ジ フエ-ルー 2—プロべ-ル(メタ)アタリレート、 3— (2 クロルフエ-ル)—2—プロべ -ル (メタ)アタリレート、 3— (3 クロルフエ-ル)—2—プロべ-ル (メタ)アタリレート 、 3— (4 クロルフエ-ル) 2—プロべ-ル(メタ)アタリレート、 3— (2, 4 ジクロル フエ-ル) 2—プロべ-ル(メタ)アタリレート、 3—(2 ブロムフエ-ル)ー2—プロべ -ル (メタ)アタリレート、 3 ブロム— 3 フエ-ルー 2—プロべ-ル (メタ)アタリレート 、 3 クロル一 3—フエ-ルー 2—プロべ-ル(メタ)アタリレート、 3— (4 -トロフエ- ル)ー2—プロべ-ル(メタ)アタリレート、 3—(2 -トロフエ-ル)ー2—プロべ-ル( メタ)アタリレート、 3— (3 -トロフエ-ル) 2—プロべ-ル(メタ)アタリレート、 2—メ チル一 3—フエ-ルー 2—プロべ-ル(メタ)アタリレート、 2—メチル 3— (4 クロル フエ-ル) 2—プロべ-ル(メタ)アタリレート、  [0049] 3 Phenol— 3— (2, 4, 6 Trimethyl Phenol) —2-Probe (Meth) Atylate, 3, 3— [Di- (2, 4, 6 Trimethyl Phenol— )] — 2—Probe (Meth) Atalylate, 3 ferrules 3— (4 Methylphenol) —2—Probe (Meth) acrylate, 3, 3 diferrules 2— Probe (meth) acrylate, 3— (2 chlorophenol) — 2 — Probe (meth) acrylate, 3 — (3 chlorophenol) — 2 — Probe (meth) acrylate 3-(4 chlorophenol) 2-probe (meth) acrylate, 3-(2, 4 dichlorophenol) 2-probe (meth) acrylate, 3-(2 bromophenol -Le) -2—Probe (meth) attalylate, 3 Bromo—3 Felulu 2—Probe (meth) atalylate, 3 Chlorone 3—Fuel-Lou 2—Probe ( (Meta) attalylate, 3— (4-Trophele) -2—Probe (Meta) Atarylate, 3 -— (2-Trophele) —2-Probe (Meta) Atarylate, 3-— (3-Tropheel ) 2-Probe (meth) acrylate, 2-Methyl 1 3-Ferule 2—Probe (meth) acrylate, 2-Methyl 3— (4-Chlor) 2—Pro Bale (meta) atelate,
[0050] 2—メチル 3— (4— -トロフエ-ル) 2—プロべ-ル (メタ)アタリレート、 2 メチル —3— (4 ァミノフエ-ル)一 2—プロべ-ル (メタ)アタリレート、 2—メチル 3, 3— ジフエ-ルー 2—プロべ-ル(メタ)アタリレート、 2 ェチル 1, 3 ジフエ-ルー 2— プロべ-ル(メタ)アタリレート、 2—エトキシメチレン一 3 -フエ-ル - 2-プロべ-ル( メタ)アタリレート、 2—メチル 3— (4—メトキシフエ-ル) 2—プロべ-ル (メタ)ァク リレー卜、 2, 3 ジフエ-ル— 2—プロべ-ル (メタ)アタリレー卜、 1, 2, 3 卜リフエ- ルー 2—プロべ-ル(メタ)アタリレート、 2, 3, 3 トリフエ-ルー 2—プロべ-ル(メタ) アタリレート、 1, 3 ジフエ-ルー 2—プロべ-ル (メタ)アタリレート、 1— (4—メチルフ ェ -ル) 3—フエ-ルー 2—プロべ-ル(メタ)アタリレート、 1—フエ-ルー 3— (4—メ チルフエ-ル) 2—プロべ-ル(メタ)アタリレート、 1—フエ二ルー 3— (4—メトキシフ ェ -ル) 2—プロべ-ル(メタ)アタリレート、 1— (4—メトキシフエ-ル) 3 フエ- ルー 2—プロべ-ル(メタ)アタリレート、 1, 3 ジ(4 クロルフエ-ル)— 2—プロべ- ル(メタ)アタリレート、 1 (4 ブロムフエ-ル) 3 フエ-ルー 2—プロべ-ル(メタ )アタリレート; [0050] 2—Methyl 3— (4—-Trophenyl) 2—Probe (Meth) Atalylate, 2 Methyl —3— (4 Aminophenol) One 2-Probe (Meth) Atari 2-methyl-3, 3-diphenyl 2-propyl (meth) ate, 2-ethyl 1,3-diphenyl 2-propyl (meth) ate, 2-ethoxymethylene -Phenol-2-Probe (Meth) Atalylate, 2-Methyl 3- (4-Methoxy Phenol) 2-Probe (Meth) Alkyl Relay, 2, 3 Diphenyl- 2—Probe (Meta) Atrelay®, 1, 2, 3 卜 Referrer 2—Probe (Meta) Attalylate, 2, 3, 3 Triferre 2—Probe (Meta) Atalylate, 1, 3 Diphenol- 2 -Probe (meth) acrylate, 1— (4-Methylphenol) 3-Fueru 2—Probe (meth) acrylate, 1— Ferrule 3— (4-Methylphenol) 2-Probe (meth) acrylate, 1—Fuel leu 3-— (4-methoxyphenol) 2-Probe (meth) attaly 1- (4-methoxyphenol) 3 phenol 2-probe (meth) acrylate, 1, 3 di (4 chlorophenol) — 2-probe (meth) acrylate, 1 (4 brom fuel) 3 Ferro 2-Probe (meta) attalylate;
1 フエ-ルー 3— (4 -トロフエ-ル)一 2—プロべ-ル(メタ)アタリレート、 1, 3— ジ(2— -トロフエ-ル)—2—プロべ-ル (メタ)アタリレート、 1— (4—ジメチルアミノフ ェ -ル) 3 フエ-ルー 2—プロべ-ル(メタ)アタリレート、 1—フエ-ルー 3— (4— ジメチルァミノフエ-ル)一 2—プロべ-ル (メタ)アタリレート、 1, 1—ジ(4 ジメチル ァミノフエ-ル)一 3—フエ-ルー 2—プロべ-ル (メタ)アタリレート、 1, 1, 3 トリフエ -ル一 2—プロべ-ル(メタ)アタリレート、 1, 1, 3, 3—テトラフエ-ルー 2—プロべ- ル(メタ)アタリレート、 1一(4 メチルフエ-ル) 3 フエ-ルー 2—プロべ-ル(メタ )アタリレート、 1—フエ-ルー 2—プロべ-ル (メタ)アタリレート、 1, 2—ジフエ-ルー 2 -プロべ-ル(メタ)アタリレート、 1—フエ-ル 2—メチル 2—プロべ-ル(メタ) アタリレート、 1—シクロへキシル 2—プロべ-ル (メタ)アタリレート、 2—ベンジル一 1 Ferrule 3— (4-Trophele) 1—Probe (Meth) Attalate, 1, 3—Di (2—Trophe) —2—Probe (Meth) Atari 1- (4-Dimethylaminophenol) 3 Ferrule 2—Probe (meth) acrylate, 1—Fuel 3— (4-Dimethylaminophenol) 1— Probe (meth) acrylate, 1, 1-di (4 dimethylaminophenol) 1 3-Fuel loop 2—Probe (meth) acrylate, 1, 1, 3 Triphenyl 1 —Probe (meth) acrylate, 1, 1, 3, 3—Tetraferrule 2—Probe (meth) acrylate, 1 (4 methylphenol) 3 Ferrule 2—Probe -Metal Atalylate, 1—Fuel 2—Probe (Meta) Atalylate, 1, 2—Di-Fuel 2—Probe (Meta) Atalylate, 1—Fuel 2 —Methyl 2-probe Meth) Atari rate, hexyl 1-cyclopropyl 2-Purobe - Le (meth) Atari rate, 2-benzyl-one
2 プロべ-ル(メタ)アタリレート、 1, 1ージ(4 クロルフエ-ル) 2—プロべ-ル(メ タ)アタリレート、 1—シァノ 2—プロべ-ル (メタ)アタリレート、 3 ァ-リノ一 2 プロ ぺ-ル (メタ)アタリレート、 3— (2—メチルフエ-ル)—2—プロべ-ル (メタ)アタリレー ト、 3— (2, 4 ジメチルフエ-ル)—2—プロべ-ル (メタ)アタリレート、 1— (2—カル ベトキシイソプロピル)—3—メチル—2—プロべ-ル (メタ)アタリレート、 1— (1—カル ベトキシイソプロピル)—2—プロべ-ル (メタ)アタリレート、 1— (1—カルべトキシェチ ル) 3—メチルー 2 プロべ-ル(メタ)アタリレート、 1 カルべトキシー 3 クロル2 Probe (meta) acrylate, 1, 1-ge (4 chlorophenol) 2—Probe (meta) acrylate, 1—Cyano 2—Probe (meth) acrylate, 3 Carlino 2 Propell (meth) acrylate, 3— (2—Methylphenol) —2—Probe (meth) acrylate, 3— (2, 4 Dimethylphenol) —2 —Probe (meth) atalylate, 1— (2—carbethoxyisopropyl) —3—Methyl—2—Probe (meth) atalylate, 1— (1—carbethoxyisopropyl) —2 —Probe (meth) atallylate, 1— (1—carbethoxychyl) 3—Methyl-2 probe (meth) acrylate, 1 carboxylate 3 chlor
3 メチルー 2—プロべ-ル(メタ)アタリレート、 1 カルべトキシメチレン 3 メチル — 2 プロべ-ル (メタ)アタリレート、 1 -シァノ 3 メチル - 2-プロべ-ル (メタ) アタリレート、 1—シクロへキシル 3— (2—ヒドロキシシクロへキシル) 2—プロべ- ル (メタ)アタリレート、 3 シクロペンチルー 2—プロべ-ル (メタ)アタリレート; [0052] 3 フリル— 2—プロべ-ル (メタ)アタリレート、 3 クロル— 2—プロべ-ル (メタ)ァク リレート、 3 ブロム一 2—プロべ-ル(メタ)アタリレート、 2—メチル 3 クロル一 2— プロべ-ル (メタ)アタリレート、 2—メチル—3 ブロム— 2—プロべ-ル (メタ)アタリレ ート、 2 クロル一 3—フエ-ルー 2—プロべ-ル(メタ)アタリレート、 2 ブロム一 3— フエ-ルー 2—プロべ-ル(メタ)アタリレート、 2 ブロム一 3— (4 -トロフエ-ル) 2 -プロべ-ル(メタ)アタリレート、 2 -フルォロ 3 フエ-ル - 2-プロべ-ル(メタ )アタリレート、 2 フルオロー 3— (4—メトキシフエ-ル) 2—プロべ-ル (メタ)アタリ レート、 2 シァノ 3—フエ-ルー 2—プロべ-ル(メタ)アタリレート、 2 クロル一 2 —プロべ-ル (メタ)アタリレート、 2—ブロム— 2—プロべ-ル (メタ)アタリレート、 2- クロル一 3, 3 ジフルオロー 2—プロべ-ル(メタ)アタリレート、 2 フルオロー 3 ク 口ルー 2—プロべ-ル (メタ)アタリレート、 2, 3 ジブロム— 2—プロべ-ル (メタ)ァク リレート、 2 クロルー3—メチルー 2—プロべ-ル(メタ)アタリレート、 1, 1ージメチル —2—プロべ-ル (メタ)アタリレート、 2—ペンテ-ル (メタ)アタリレート、 2—へキセ- ル (メタ)アタリレート、 2—ヘプテュル (メタ)アタリレート、等が挙げられる。 3 Methyl-2-probe (meth) acrylate, 1 carbethoxymethylene 3 Methyl — 2 probe (meth) acrylate, 1-cyan 3-methyl-2- probe (meth) acrylate 1-cyclohexyl 3- (2-hydroxycyclohexyl) 2-probe (meth) acrylate, 3 cyclopentyl 2-probe (meth) acrylate; [0052] 3 furyl—2—probe (meth) acrylate, 3 chloro—2—probe (meth) acrylate, 3 bromo 1—probe (meth) acrylate, 2 —Methyl 3-chloro 1—Probe (meth) acrylate, 2-Methyl—3 Bromine— 2-Probe (meth) acrylate, 2 Chlor 3—Ferule 2—Pro- (Meth) attalylate, 2 bromide 3—Ferrolu 2—probe (meth) attalylate, 2 bromide 3— (4-trofehl) 2 -probe (meth) attalylate , 2 -Fluoro 3 phenol-2 -Probes (meth) acrylate, 2 Fluoro 3— (4-Methoxyphenol) 2 -Probes (meth) acrylate, 2 Siano 3 -Fe 2—Probe (meth) acrylate, 2 chloro 1—Probe (meth) acrylate, 2—Brom— 2—Probe (me ) Atarylate, 2-chloro-1,3,3 difluoro-2—probe (meth) atalylate, 2 fluoro-3 cucumber route 2—probe (meth) atalylate, 2,3 dibromo—2—pro Base (meth) acrylate, 2 Chloro 3-methyl 2-probe (meth) acrylate, 1,1-dimethyl 2-probe (meth) acrylate, 2-pentale ( (Meth) acrylate, 2-hexyl (meth) acrylate, 2-heptyl (meth) acrylate, and the like.
これらの中でも、硬化性や原料価格の点で、ァリル (メタ)アタリレートが特に好まし い。  Among these, aryl (meth) acrylate is particularly preferred in terms of curability and raw material price.
[0053] 前記「芳香環及び Z又は脂肪族環を 1以上有する (メタ)アタリレート」としては、例え ば、(メタ)アクリル酸シクロアルキルエステル [例えば、(メタ)アクリル酸シクロへキシ ル、(メタ)アクリル酸ノルボル-ル、(メタ)アクリル酸ァダマンチルなど]、(メタ)アタリ ル酸ァリールエステル [例えば、(メタ)アクリル酸フ -ル、(メタ)アクリル酸クロ口フエ -ル、(メタ)アクリル酸メトキシフヱ-ル、(メタ)アクリル酸ナフチルなど]、ァラルキル エステル [例えば、(メタ)アクリル酸ベンジル、(メタ)アクリル酸フ ネチルなど]、等が 挙げられる。  [0053] Examples of the "(meth) acrylate having at least one aromatic ring and Z or aliphatic ring" include, for example, (meth) acrylic acid cycloalkyl ester [for example, (meth) acrylic acid cyclohexyl, (Meth) acrylic acid norbornyl, (meth) acrylic acid adamantyl, etc.], (meth) acrylic acid aryl ester [e.g., (meth) acrylic acid fur, (meth) acrylic acid black mouth foul, (Meth) acrylic acid methoxy file, (meth) acrylic acid naphthyl, etc.], aralkyl esters [eg, (meth) acrylic acid benzyl, (meth) acrylic acid phenethyl etc.], and the like.
これらの中でも、原料価格、溶解性、顔料分散性等の点で、(メタ)アクリル酸ベンジ ル、(メタ)アクリル酸シクロへキシルが好まし 、。  Of these, benzyl (meth) acrylate and cyclohexyl (meth) acrylate are preferred in terms of raw material price, solubility, pigment dispersibility, and the like.
[0054] また、これらの構造単位と共重合可能な「その他のモノマー」としては、例えば、(メ タ)アクリル酸アルキルエステル [例えば、(メタ)アクリル酸メチル、(メタ)アクリル酸ェ チル、(メタ)アクリル酸プロピル、(メタ)アクリル酸イソプロピル、(メタ)アクリル酸 n— ブチル、(メタ)アクリル酸イソブチル、(メタ)アクリル酸 tーブチル、(メタ)アクリル酸へ キシル、(メタ)アクリル酸ォクチル、(メタ)アクリル酸 2—ェチルへキシル、(メタ)アタリ ル酸ラウリル、(メタ)アクリル酸ステアリルなどの(メタ)アクリル酸 (じ1〜。18)アルキル エステノレなど]; [0054] Further, as "other monomers" copolymerizable with these structural units, for example, (meth) acrylic acid alkyl ester [for example, methyl (meth) acrylate, ethyl (meth) acrylate, Propyl (meth) acrylate, isopropyl (meth) acrylate, (meth) acrylic acid n— Butyl, isobutyl (meth) acrylate, t-butyl (meth) acrylate, hexyl (meth) acrylate, octyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, lauryl (meth) acrylate , (Meth) acrylic acid such as stearyl (meth) acrylate ( 1 to 18 ) alkyl ester, etc.];
[0055] (メタ)アクリル酸ァラルキルエステル [例えば (メタ)アクリル酸ベンジルなど]、置換 (メ タ)アクリル酸アルキルエステル [例えば、ジメチルアミノエチル (メタ)アタリレート、ジ ェチルアミノエチル (メタ)アタリレート、ジメチルァミノプロピル (メタ)アタリレート、ジェ チルァミノプロピル (メタ)アタリレートなど]、(メタ)アクリルアミド類 [例えば、(メタ)ァク リルアミド、ジメチル (メタ)アクリルアミド、イソプロピル (メタ)アクリルアミド、 t—ブチル (メタ)アクリルアミドなど]、置換 (メタ)アクリルアミド類 [例えば、(メタ)アタリロイルモル ホリン、ジメチルァミノプロピル (メタ)アクリルアミドなど]、芳香族ビュル類 [例えば、ス チレン、ビュルトルエン、 α—メチルスチレンなど]、ヘテロ環ビュル類 [例えば、ビ- ルイミダゾール、ビニルピリジンなど]、ビュルエステル類 [例えば、酢酸ビニル、プロ ピオン酸ビュル、バーサチック酸ビュルなど]、 Ν—ビュルアミド類 [例えば、 Ν—ビ- ルピロリドン、 Ν—ビュルホルムアミド、 Ν—ビュルァセトアミドなど]、ァリルエステル類 [例えば酢酸ァリルなど]、ハロゲン含有単量体 [例えば、塩ィ匕ビユリデン、塩化ビ- ルなど]、シアンィ匕ビュル [例えば (メタ)アクリロニトリルなど]、ォレフィン類 [例えば、 エチレン、プロピレンなど]、等が挙げられる。 [0055] (Meth) acrylic acid aralkyl esters [for example, (meth) acrylic acid benzyl, etc.], substituted (meth) acrylic acid alkyl esters [for example, dimethylaminoethyl (meth) acrylate, diethylaminoethyl ( (Meth) acrylate, dimethylaminopropyl (meth) acrylate, etc.], (meth) acrylamides [eg (meth) acrylamide, dimethyl (meth) acrylamide, isopropyl (Meth) acrylamide, t-butyl (meth) acrylamide, etc.], substituted (meth) acrylamides [for example, (meth) atalyloylmorpholine, dimethylaminopropyl (meth) acrylamide, etc.], aromatic bullets [for example, scan styrene, Bulle toluene, alpha - methyl styrene, etc.], heterocyclic Bulle [E.g., berylimidazole, vinyl pyridine, etc.], butyl esters [e.g., vinyl acetate, propionate butyl, versatic acid butyl, etc.], Ν-buramides [e.g. Formamide, Ν-buluacetoamide, etc.], aryl esters [eg, allylic acetate, etc.], halogen-containing monomers [eg, salt vinylidene, vinyl chloride, etc.], cyanobyl [eg, (meth) acrylonitrile, etc. ], Olefins [for example, ethylene, propylene, etc.], and the like.
[0056] これらの中でも、その共重合性や生成する重合体の溶媒溶解性、得られる膜の製 膜性などの観点から、(メタ)アクリル酸アルキルエステル [例えば、(メタ)アクリル酸メ チル、(メタ)アクリル酸ェチル、(メタ)アクリル酸プロピル、(メタ)アクリル酸イソプロピ ル、(メタ)アクリル酸 η—ブチル、(メタ)アクリル酸イソブチル、(メタ)アクリル酸 tーブ チル、(メタ)アクリル酸へキシル、(メタ)アクリル酸ォクチル、(メタ)アクリル酸 2—ェチ ルへキシルなど]、等が特に好ましい。  [0056] Among these, (meth) acrylic acid alkyl ester [for example, (meth) methacrylic acid methyl ester, from the viewpoint of the copolymerizability, the solvent solubility of the polymer to be formed, the film forming property of the resulting film, and the like. , (Meth) acrylate ethyl, propyl (meth) acrylate, isopropyl (meth) acrylate, η-butyl (meth) acrylate, isobutyl (meth) acrylate, tert-butyl (meth) acrylate, ( Hexyl (meth) acrylate, octyl (meth) acrylate, (meth) acrylic acid 2-ethylhexyl, etc.] are particularly preferred.
これらの共重合可能な他成分は、 1種単独でも 2種以上の組合せでもよ ヽ。  These other copolymerizable components may be used alone or in combination of two or more.
[0057] 前記各成分の共重合組成比については、「カルボキシル基を有する構造単位」は 1 0〜40モノレ0 /0力 S好ましく、 15〜35モノレ0 /0力 S更に好ましく、 20〜35モノレ0 /0力 S特に好 ましい。カルボキシル基を有する構造単位が前記範囲内であると、良好な現像性が 得られると共に、画像部の現像液耐性も良好である。また、「一般式 (I)で表される構 造単位」 ίま 20〜80モノレ0 /0力 S好ましく、 20〜75モノレ0 /0力 S更に好ましく、 25〜75モノレ %が特に好ましい。一般式 (I)で表される構造単位が前記範囲内であると、良好な硬 化性、現像性が得られる。また、「芳香族環及び Ζ又は脂肪族環を 1以上有する (メタ )アタリレートからなる構造単位」は 10〜70モル0 /0が好ましぐ 10〜60モル0 /0が更に 好ましぐ 10〜50モル%が特に好ましい。芳香族環及び Ζ又は脂肪族環を 1以上有 する (メタ)アタリレートからなる構造単位が前記範囲内であると、顔料分散性に優れ ると共に、現像性及び硬化性も良好である。 [0057] wherein the copolymerization ratio of each component is "structural unit having a carboxyl group" 1 0-40 Monore 0/0 force S Preferably, 15-35 Monore 0/0 force S More preferably, 20 to 35 Monore 0/0 force S especially good Masui. When the structural unit having a carboxyl group is within the above range, good developability is obtained. As well as being obtained, the developer resistance of the image area is also good. Also, it or 20-80 Monore 0/0 force S preferably "Concrete unit structure represented by the general formula (I)", 20-75 Monore 0/0 force S, and particularly preferably 25 to 75 Monore%. When the structural unit represented by the general formula (I) is within the above range, good curability and developability can be obtained. Also, "having one or more aromatic rings and Ζ or aliphatic ring (meth) structural unit comprising Atari rate" 10 to 70 mole 0/0 preferably fixture 10 to 60 mole 0/0 further preferred instrument 10 to 50 mol% is particularly preferred. When the structural unit composed of (meth) acrylate having at least one aromatic ring and one or more aliphatic rings is within the above range, the pigment dispersibility is excellent and the developability and curability are also good.
[0058] アルカリ可溶性高分子物質として好適な前記共重合体の質量平均分子量は、 5, 0 00〜20万力 S好ましく、 1万〜 10万が更に好ましぐ 1. 2万〜 8万が特に好ましい。質 量平均分子量が前記範囲内であると、共重合体の製造適性、現像性の点で望まし い。 [0058] The weight average molecular weight of the copolymer suitable as the alkali-soluble polymer substance is preferably 5,000 to 200,000 S, more preferably 10,000 to 100,000, more preferably 20,000 to 80,000. Particularly preferred. If the weight average molecular weight is within the above range, it is desirable from the viewpoint of the suitability for production of the copolymer and developability.
[0059] 以下、アルカリ可溶性高分子物質として好適な前記共重合体の具体例としては、特 開 2003— 131379号公報の段落番号 [0031]〜[0054]に記載のアルカリ可溶性 バインダー、特開 2005— 3861号公報の段落番号[0035]〜[0036]に記載のアル カリ可溶性バインダー、同 2003— 207787号公報の段落番号 [0035]〜[0037]に 記載のァリル基と水酸基とを有する榭脂、を参照することができる。  [0059] Hereinafter, specific examples of the copolymer suitable as an alkali-soluble polymer substance include alkali-soluble binders described in paragraph numbers [0031] to [0054] of JP 2003-131379 A, JP 2005 — Alkali-soluble binder described in paragraph Nos. [0035] to [0036] of No. 3861, and a resin having an aryl group and a hydroxyl group described in paragraph Nos. [0035] to [0037] of No. 2003-207787 , Can be referred to.
[0060] アルカリ可溶性高分子物質として好適な前記共重合体は、それぞれ相当する単量 体を公知の方法で常法にしたがって共重合させることで得ることができる。例えば、こ れらの単量体を適当な溶媒中に溶解し、ここにラジカル重合開始剤を添加して溶液 中で重合させることで得られる。  [0060] The copolymer suitable as the alkali-soluble polymer substance can be obtained by copolymerizing a corresponding monomer according to a conventional method by a known method. For example, it can be obtained by dissolving these monomers in a suitable solvent and adding a radical polymerization initiator to polymerize them in a solution.
[0061] 共重合させる際の適当な溶媒の例としては、モノマー及び生成する共重合体の溶 解性に応じて任意に選択できる力 例えば、メタノール、エタノール、プロパノール、 イソプロパノール、 1ーメトキシー 2—プロパノール、アセトン、メチルェチルケトン、メ チルイソブチルケトン、メトキシプロピルアセテート、乳酸ェチル、酢酸ェチル、ァセト 二トリル、テトラヒドロフラン、ジメチルホルムアミド、クロ口ホルム、トルエン、及びこれら の混合物などが挙げられる。また、重合開始剤を用いることができ、該重合開始剤と しては、例えば、 2, 2'—ァゾビス(イソブチ口-トリル)(ΑΙΒΝ)、 2, 2'—ァゾビス一 (2 , 4'ージメチルバレ口-トリル)等のァゾ系、ベンゾィルパーォキシド等の過酸化物系 、過硫酸塩等が利用できる。 [0061] Examples of suitable solvents for copolymerization include forces that can be arbitrarily selected according to the solubility of the monomer and the copolymer to be produced. For example, methanol, ethanol, propanol, isopropanol, 1-methoxy-2-propanol , Acetone, methyl ethyl ketone, methyl isobutyl ketone, methoxypropyl acetate, ethyl lactate, ethyl acetate, acetonitrile, tetrahydrofuran, dimethylformamide, formaldehyde, toluene, and mixtures thereof. In addition, a polymerization initiator can be used, and examples of the polymerization initiator include 2, 2′-azobis (isobuty-mouth-tolyl) (ΑΙΒΝ), 2, 2′-azobis mono (2 , 4'-dimethylvale-tolyl), peroxides such as benzoyl peroxide, and persulfates.
[0062] また、分子量を調整する目的で公知の連鎖移動剤を適宜使用することもできる。さ らに、重合濃度、開始剤量、連鎖移動剤、重合温度などを適切に調整することが必 要なこともある。例えば、重合濃度としては、 5〜50質量%が好ましぐ 10〜40質量 %が更に好ましい。 [0062] In addition, a known chain transfer agent may be appropriately used for the purpose of adjusting the molecular weight. In addition, it may be necessary to appropriately adjust the polymerization concentration, initiator amount, chain transfer agent, polymerization temperature, and the like. For example, the polymerization concentration is preferably 5 to 50% by mass, more preferably 10 to 40% by mass.
[0063] アルカリ可溶性高分子物質の感光性榭脂組成物 (又は感光性榭脂組成物層)中に おける含有量としては、該組成物又は該層の固形分に対して、 30〜70質量%が好 ましぐ 40〜50質量%が好ましぃ。  [0063] The content of the alkali-soluble polymer substance in the photosensitive resin composition (or photosensitive resin composition layer) is 30 to 70 masses relative to the solid content of the composition or the layer. 40% to 50% by mass is preferred.
[0064] (Β)重合性モノマー [0064] (i) Polymerizable monomer
本発明に係る重合性モノマーは、ウレタン基と 5〜15個のアクリル基とを含む。ァク リル基数が 4個未満であると、フォトスぺーサ一の変形回復率が不十分でありことがあ り、また 15個を超えると、現像時間が増え製造上好ましくない。  The polymerizable monomer according to the present invention contains a urethane group and 5 to 15 acrylic groups. If the number of acryl groups is less than 4, the deformation recovery rate of the photospacer may be insufficient, and if it exceeds 15, the development time increases, which is not preferable in production.
アクリル基数は 5〜9個がより好ましぐ 5〜6個が最も好ましい。  The number of acrylic groups is more preferably 5-9, and most preferably 5-6.
5〜6個のアクリル基を有するモノマーとして、下記一般式 (Α)又は (Β)で表される 化合物が挙げられる。  Examples of the monomer having 5 to 6 acrylic groups include compounds represented by the following general formula (Α) or (Β).
[0065] [化 5] [0065] [Chemical 5]
Figure imgf000019_0001
Figure imgf000019_0001
Figure imgf000019_0002
Figure imgf000019_0002
[0066] 一般式 (A)又は (B)にお 、て、 Rは下記式 (a) (b)又は(c)を表す。 [0066] In the general formula (A) or (B), R represents the following formula (a) (b) or (c).
1  1
[0067] [化 6]  [0067] [Chemical 6]
Figure imgf000019_0003
Figure imgf000019_0003
[0068] 式(a)にお 、て、 nは 2 8の整数を表す。 [0068] In the formula (a), n represents an integer of 28.
[0069] 本発明に係る重合性モノマーとしては巿販のモノマーを用いてもよぐ 6個のアタリ ル基を有するモノマーとして、共栄社化学社製 UA-306H, UA-306T, UA-306Iが める。 9個のアクリル基を有するモノマーとして、新中村ィ匕学社製 UA-32Pがある。 [0069] Commercially available monomers may be used as the polymerizable monomer according to the present invention. As monomers having 6 talyl groups, UA-306H, UA-306T, and UA-306I manufactured by Kyoeisha Chemical Co., Ltd. are used. The As a monomer having 9 acrylic groups, there is UA-32P manufactured by Shin-Nakamura Igaku.
10個のアクリル基を有するモノマーとして、共栄社ィ匕学社製 UA-510Hがある。 15個のアクリル基を有するモノマーとして、新中村ィ匕学社製 UA-32Pがある。  As a monomer having 10 acrylic groups, UA-510H manufactured by Kyoeisha Co., Ltd. is available. As a monomer having 15 acrylic groups, there is UA-32P manufactured by Shin-Nakamura Igaku.
[0070] また、前記重合性モノマーは、 1種単独で用いる以外に、 2種以上を併用するように してもよい。併用してもよいモノマーとして、例えば、エステル化合物、アミド化合物、 並びにその他の化合物が挙げられる。  [0070] Further, the polymerizable monomers may be used in combination of two or more, in addition to being used alone. Examples of monomers that may be used in combination include ester compounds, amide compounds, and other compounds.
[0071] 前記エステル化合物としては、例えば、単官能 (メタ)アクリル酸エステル、多官能( メタ)アクリル酸エステル、ィタコン酸エステル、クロトン酸エステル、イソクロトン酸エス テル、マレイン酸エステル、その他のエステル化合物、などが挙げられる。これらは、 1種単独で用いてもよいし、 2種以上を併用してもよい。中でも、単官能 (メタ)アクリル 酸エステル、多官能 (メタ)アクリル酸エステルが好まし 、。  [0071] Examples of the ester compound include monofunctional (meth) acrylic acid ester, polyfunctional (meth) acrylic acid ester, itaconic acid ester, crotonic acid ester, isocrotonic acid ester, maleic acid ester, and other ester compounds. , Etc. These may be used alone or in combination of two or more. Of these, monofunctional (meth) acrylic acid esters and polyfunctional (meth) acrylic acid esters are preferred.
[0072] 前記単官能 (メタ)アクリル酸エステルとしては、例えば、ポリエチレングリコールモノ  [0072] Examples of the monofunctional (meth) acrylic acid ester include polyethylene glycol mono
(メタ)アタリレート、ポリプロピレングリコールモノ(メタ)アタリレート、フエノキシェチル モノ (メタ)アタリレートなどが挙げられる。  (Meth) acrylate, polypropylene glycol mono (meth) acrylate, phenoxychetyl mono (meth) acrylate, and the like.
[0073] 前記多官能 (メタ)アクリル酸エステルしては、例えば、ポリエチレングリコールジ (メ タ)アタリレート、エチレングリコールジ (メタ)アタリレート、トリエチレングリコールジ (メ タ)アタリレート、 1, 3—ブタンジオールジ (メタ)アタリレート、テトラメチレングリコール ジ (メタ)アタリレート、へキサンジオールジ (メタ)アタリレート、ペンタエリスリトールトリ( メタ)アタリレート、ペンタエリスリトールテトラ (メタ)アタリレート、ジペンタエリスリトール ジ (メタ)アタリレート、ジペンタエリスリトールトリ(メタ)アタリレート、ジペンタエリスリトー ルテトラ (メタ)アタリレート、ジペンタエリスリトールへキサ(メタ)アタリレート、ジペンタ エリスリトールポリ(メタ)アタリレート、ソルビトールトリ(メタ)アタリレート、ソルビトール テトラ (メタ)アタリレート、トリメチロールェタントリ(メタ)アタリレート、ネオペンチルグリ コールジ (メタ)アタリレート、へキサンジオールジ (メタ)アタリレートなどが挙げられる。 中でも特に、ジペンタエリスリトールポリ(メタ)アタリレートが好ましい。  [0073] Examples of the polyfunctional (meth) acrylic acid ester include polyethylene glycol di (meth) acrylate, ethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, 1, 3-Butanediol di (meth) acrylate, tetramethylene glycol di (meth) acrylate, hexanediol di (meth) acrylate, pentaerythritol tri (meth) acrylate, penta erythritol tetra (meth) acrylate, di Pentaerythritol di (meth) acrylate, dipentaerythritol tri (meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol hex (meth) acrylate, dipenta erythritol poly (meth) acrylate Sorbito Tri (meth) Atari rate, sorbitol tetra (meth) Atari rate, trimethylol E Tan tri (meth) Atari rate, neopentyl Legris Koruji (meth) Atari rate, such as hexanediol di (meth) Atari rate and the like to. Of these, dipentaerythritol poly (meth) acrylate is particularly preferable.
[0074] 前記多官能 (メタ)アクリル酸エステルの他の例として、グリセリンやトリメチロールェ タン等の多官能アルコールにエチレンオキサイドやプロピレンオキサイドを付加させ た後 (メタ)アタリレートイ匕したもの、特公昭 48— 41708号公報、特公昭 50— 6034号 公報、特開昭 51— 37193号公報に記載のウレタンアタリレート類、特開昭 48— 641 83号公報、特公昭 49— 43191号公報、及び特公昭 52— 30490号公報に記載の ポリエステルアタリレート類、エポキシ榭脂と (メタ)アクリル酸との反応生成物であるェ ポキシアタリレート類、特開昭 60— 258539号公報に記載の (メタ)アクリル酸エステ ルゃウレタン (メタ)アタリレートやビュルエステル、などが挙げられる。 [0074] Other examples of the polyfunctional (meth) acrylic acid ester include those obtained by adding ethylene oxide or propylene oxide to a polyfunctional alcohol such as glycerin or trimethylolethane, JP-B 48-41708, JP-B 50-6034 Polyurethane acrylates described in JP-A-51-37193, JP-A-48-64183, JP-B-49-43191, and JP-B-52-30490 Epoxy acrylate which is a reaction product of epoxy resin and (meth) acrylic acid, and (meth) acrylate ester urethane urethane (meth) acrylate and the like described in JP-A-60-258539 And bull esters.
[0075] 前記「その他のエステル化合物」としては、例えば、トリメチロールプロパントリ(アタリ ロイルォキシプロピル)エーテル、トリ(アタリロイ口キシェチル)イソシァヌレート、 日本 接着協会誌 Vol. 20, No. 7,第 300〜308頁に記載の光硬化性モノマー及びオリ ゴマー、などが挙げられる。  [0075] Examples of the "other ester compound" include trimethylolpropane tri (atallyloyloxypropyl) ether, tri (atariloy mouth kichetil) isocyanurate, Japan Adhesion Association Vol. 20, No. 7, No. 300. Photocurable monomers and oligomers described on page 308.
[0076] また、前記アミド化合物としては、例えば、不飽和カルボン酸と脂肪族多価アミンィ匕 合物とのアミド (モノマー)などが挙げられ、具体的には、メチレンビス一(メタ)アクリル アミド、 1, 6—へキサメチレンビス—(メタ)アクリルアミド、ジエチレントリァミントリス (メ タ)アクリルアミド、キシリレンビス (メタ)アクリルアミド、などが挙げられ、また、特開昭 6 0— 258539号公報に記載の (メタ)アクリル酸アミド、などが挙げられる。  [0076] Further, examples of the amide compound include amides (monomers) of unsaturated carboxylic acids and aliphatic polyvalent amine compounds, and specific examples include methylene bis (meth) acrylamide, 1, 6-hexamethylene bis- (meth) acrylamide, diethylenetriamine tris (meth) acrylamide, xylylene bis (meth) acrylamide, and the like described in JP-A-60-258539. And (meth) acrylic acid amide.
また、前記「その他の化合物」として、例えば、特開昭 60— 258539号公報に記載 のァリルイ匕合物などが挙げられる。  Examples of the “other compounds” include aryl compounds described in JP-A-60-258539.
[0077] 重合性モノマーの感光性榭脂組成物(又は感光性榭脂組成物層)中における含有 量としては、該組成物又は該層の全固形分に対して、 10〜60質量%が好ましぐ 20 〜50質量%がより好ましい。  [0077] The content of the polymerizable monomer in the photosensitive resin composition (or photosensitive resin composition layer) is 10 to 60% by mass with respect to the total solid content of the composition or the layer. 20 to 50% by mass is more preferable.
[0078] 本発明においては、感光性榭脂組成物中における、前記アルカリ可溶性高分子物 質の含有量 B (質量%)と前記重合性モノマーの含有量 M (質量%)との比(MZB)と しては 0. 6〜1. 5が好ましい。また、より好ましい比 M/Bの範囲は 0. 7〜1. 0であ る。  In the present invention, the ratio (MZB) of the content B (mass%) of the alkali-soluble polymer substance to the content M (mass%) of the polymerizable monomer in the photosensitive resin composition. ) Is preferably 0.6 to 1.5. A more preferable range of the ratio M / B is 0.7 to 1.0.
[0079] (C)光重合開始剤  [0079] (C) Photopolymerization initiator
光重合開始剤としては、およそ 300〜500nmの波長領域に約 50以上の分子吸光 係数を有する成分を少なくとも 1種含有しているものが好ましい。例えば、特開平 2— 48664号公報、特開平 1— 152449号公報、及び特開平 2— 153353号公報に記 載の、芳香族ケトン類、口フィン 2量体、ベンゾイン、ベンゾインエーテル類、ポリハロ ゲン類、ハロゲンィ匕炭化水素誘導体、ケトンィ匕合物、ケトォキシム化合物、有機過酸 化物、チォ化合物、へキサァリールビイミダゾール、芳香族ォ -ゥム塩、ケトォキシム エーテル、などが挙げられる。 The photopolymerization initiator preferably contains at least one component having a molecular extinction coefficient of about 50 or more in a wavelength region of about 300 to 500 nm. For example, as disclosed in JP-A-2-48664, JP-A-1-152449, and JP-A-2-153353, aromatic ketones, oral fin dimers, benzoin, benzoin ethers, polyhalo And halogens, hydrocarbon derivatives, ketone compounds, ketoxime compounds, organic peroxides, thio compounds, hexaarylbiimidazoles, aromatic onium salts, ketoxime ethers, and the like.
[0080] 上記の中でも、 4, 4'—ビス(ジェチルァミノ)ベンゾフエノンと 2— (o クロ口フエ- ル) 4, 5 ジフエ-ルイミダゾール 2量体との組合せ、 4—〔ρ—Ν, Ν'—ジ(エトキシ カルボ-ルメチル) 2, 6 ジ(トリクロロメチル) s トリァジン〕、 2, 4 ビス一(トリ クロロメチル)— 6— [4— (Ν, Ν'—ビスエトキシカルボ-ルメチルァミノ)—3—ブロモ フエ-ル] s トリァジンなどが好ましい。  [0080] Among the above, a combination of 4,4'-bis (jetylamino) benzophenone and 2- (o black-mouthed) 4,5 diphenylimidazole dimer, 4- [ρ-Ν, Ν '—Di (ethoxycarboromethyl) 2,6 di (trichloromethyl) s triazine], 2, 4 Bis (trichloromethyl) — 6— [4— (Ν, Ν'-bisethoxycarboromethylmethylamino) — 3-Bromophenol] s triazine and the like are preferable.
[0081] 光重合開始剤は、 1種単独で用いる以外に、 2種以上を併用するようにしてもよい。  [0081] Two or more photopolymerization initiators may be used in combination in addition to the single photoinitiator.
光重合開始剤の感光性榭脂組成物 (又は感光性榭脂組成物層)中における含有 量としては、該糸且成物又は該層中の架橋基の量に対して、 0. 6〜2. 82モル Ζモル が好ましぐ 1. 0〜2. 0モル Ζモルがより好ましい。該含有量が前記範囲内であると 、架橋構造が安定化し、作製されたフォトスぺーサの高さを均一に保つことができる。  The content of the photopolymerization initiator in the photosensitive resin composition (or photosensitive resin composition layer) is from 0.6 to 0.6 with respect to the amount of the thread and the cross-linking group in the composition. 2.82 mol Ζmol is preferred 1.0 to 2.0 mol Ζmol is more preferred. When the content is within the above range, the crosslinked structure is stabilized, and the height of the produced photospacer can be kept uniform.
[0082] (D)その他の成分  [0082] (D) Other ingredients
感光性榭脂組成物 (又は感光性榭脂組成物層)は、上記のアルカリ可溶性高分子 物質、重合性モノマー、及び光重合開始剤以外に、必要に応じて更に、着色剤、界 面活性剤、溶媒、熱重合防止剤、紫外線吸収剤等の添加剤を用いることができる。  The photosensitive resin composition (or photosensitive resin composition layer) may further comprise a colorant, a surface active agent, if necessary, in addition to the alkali-soluble polymer substance, the polymerizable monomer, and the photopolymerization initiator. Additives such as an agent, a solvent, a thermal polymerization inhibitor, and an ultraviolet absorber can be used.
[0083] 一着色剤  [0083] One colorant
着色剤としては、染料、顔料等が挙げられる。好ましい顔料の種類、サイズ等につ いては、例えば特開平 11— 149008号公報の記載力も適宜選択することができる。 顔料等の着色剤を含有させた場合は、着色画素を形成することができる。使用可能 な顔料には、体質顔料又は着色顔料が挙げられる。体質顔料としては、特に制限は なく目的に応じて適宜選択することができ、例えば、特開 2003— 302639号公報の 段落番号 [0035]〜[0041]に記載の体質顔料が好適に挙げられる。着色顔料とし ては、特開 2003— 302639号公報の段落番号 [0043]に記載の顔料が好適に挙げ られる。  Examples of the colorant include dyes and pigments. As for the preferred pigment type, size, etc., for example, the description in JP-A-11-149008 can be selected as appropriate. When a colorant such as a pigment is contained, a colored pixel can be formed. Examples of usable pigments include extender pigments and colored pigments. The extender pigment is not particularly limited and may be appropriately selected depending on the intended purpose. For example, extender pigments described in paragraphs [0035] to [0041] of JP-A No. 2003-302639 are preferable. Preferable examples of the color pigment include the pigments described in paragraph No. [0043] of JP-A-2003-302639.
[0084] 界面活性剤 [0084] Surfactant
界面活性剤としては、感光性榭脂組成物 (又は感光性榭脂組成物層)の構成成分 と混ざり合うものであれば使用可能である。好ましい界面活性剤として、特開 2003— 337424号公報の段落番号 [0015ト [0024]、特開 2003— 177522号公報の段 落番号 [0012ト [0017]、特開 2003— 177523号公報の段落番号 [0012ト [0 015]、特開 2003— 177521号公報の段落番号 [0010ト [0013]、特開 2003— 1 77519号公報の段落番号 [0010ト [0013]、特開 2003— 177520号公報の段落 番号 [0012]〜[0015]、特開平 11 133600号公報の段落番号 [0034]〜 [003 5]、特開平 6— 16684号公報に記載の界面活性剤が好適に挙げられる。 As surfactant, constituent of photosensitive resin composition (or photosensitive resin composition layer) Anything that mixes with can be used. As preferable surfactants, paragraph numbers [0015 to [0024] of JP-A-2003-337424, paragraph numbers [0012 to [0017] of JP-A-2003-177522, and paragraphs of JP-A-2003-177523 are disclosed. No. [0012 To [0 015], Paragraph No. [0010 To [0013] of JP 2003-177521, Paragraph No. [0010 TO [0013], JP 2003-177520, JP 2003-177520] The surfactants described in paragraph numbers [0012] to [0015] of JP-A-11-133, paragraph numbers [0034] to [0035] of JP-A-11 133600, and JP-A-6-16684 are preferably exemplified.
より高い効果を得る観点力 は、フッ素系界面活性剤及び Z又はシリコン系界面活 性剤 (フッ素系界面活性剤、又は、シリコン系界面活性剤、フッ素原子と珪素原子の 両方を含有する界面活性剤を含む。)のいずれか 1種、あるいは 2種以上を選択する のが好ましぐフッ素系界面活性剤が最も好ましい。  From the viewpoint of obtaining higher effects, fluorosurfactants and Z or silicon surfactants (fluorine surfactants or silicon surfactants, surfactants containing both fluorine and silicon atoms) The most preferable is a fluorosurfactant in which it is preferable to select one or more of the above.
[0085] フッ素系界面活性剤を用いる場合、該界面活性剤分子中のフッ素含有置換基のフ ッ素原子数は 1〜38が好ましぐ 5〜25力 り好ましく、 7〜20が最も好ましい。フッ素 原子数が前記範囲内であると、溶解性が良好であると共にムラの改善効果が得られ る点で望ましい。 [0085] When a fluorosurfactant is used, the fluorine atom number of the fluorine-containing substituent in the surfactant molecule is preferably 1 to 38, more preferably 5 to 25, and most preferably 7 to 20. . When the number of fluorine atoms is within the above range, it is desirable from the viewpoint of good solubility and an effect of improving unevenness.
[0086] 特に好ま 、界面活性剤としては、下記一般式 (a)で表されるモノマー Aと下記一 般式 (b)で表されるモノマー Bとを共重合成分として含み、前記モノマー Aと前記モノ マー Bとの共重合比 (AZB [質量比])が 20Z80〜60Z40である共重合体(以下、「 本発明に好適な界面活性剤」とも ヽぅ。 )が挙げられる。  [0086] Particularly preferably, the surfactant contains a monomer A represented by the following general formula (a) and a monomer B represented by the following general formula (b) as a copolymerization component, Examples thereof include copolymers having a copolymerization ratio (AZB [mass ratio]) with the monomer B of 20Z80 to 60Z40 (hereinafter also referred to as “surfactant suitable for the present invention”).
[0087] [化 7]  [0087] [Chemical 7]
Figure imgf000023_0001
Figure imgf000023_0001
前記一般式において、
Figure imgf000023_0002
及び R3は、それぞれ独立に水素原子又はメチル基 を表し、好ましく
Figure imgf000024_0001
R2は水素原子であり、 R3はメチル基である。
In the general formula:
Figure imgf000023_0002
And R 3 are each independently a hydrogen atom or a methyl group. Represents, preferably
Figure imgf000024_0001
R 2 is a hydrogen atom, and R 3 is a methyl group.
また、 R4は、水素原子又は炭素数 1〜5のアルキル基を表す。 R4で表されるアルキ ル基としては、例えば、メチル基、ェチル基、プロピル基、ブチル基等が挙げられ、中 でも炭素数 1〜2のアルキル基が好ましい。 R4は、特に好ましくは水素原子である。 R 4 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. Examples of the alkyl group represented by R 4 include a methyl group, an ethyl group, a propyl group, and a butyl group, and among them, an alkyl group having 1 to 2 carbon atoms is preferable. R 4 is particularly preferably a hydrogen atom.
[0089] 前記一般式(a)中、 nは 1〜18の整数を表し、好ましくは 2〜 10の整数である。 mは 、 2〜14の整数を表し、好ましくは 4〜 12の整数である。一般式(a)中の C F は、 m 2m+l 直鎖でも分岐鎖でもよぐ C F のモノマー Aに対する比率は、 20〜70質量%が好 m 2m+l In the general formula (a), n represents an integer of 1 to 18, preferably an integer of 2 to 10. m represents an integer of 2 to 14, and preferably an integer of 4 to 12. C F in the general formula (a) is m 2m + l The ratio of C F to monomer A, which may be linear or branched, is preferably 20 to 70% by mass. M 2m + l
ましぐ特に好ましくは 40〜60質量%である。  Particularly preferred is 40 to 60% by mass.
[0090] 前記一般式 (b)中、 p及び qは、それぞれ独立に 0〜18の整数を表し、好ましくは 2In the general formula (b), p and q each independently represent an integer of 0 to 18, preferably 2
〜8である。 p及び qは、同時に 0を表す場合はない。 ~ 8. p and q may not represent 0 at the same time.
[0091] 本発明に好適な界面活性剤においては、 1分子中に含まれる複数のモノマー Aは 互いに同じ構造のものでも異なる構造のものであってもよぐまたモノマー Bについて も同様である。 In the surfactant suitable for the present invention, the plurality of monomers A contained in one molecule may have the same structure or different structures, and the same applies to the monomer B.
[0092] 本発明に好適な界面活性剤 (共重合体)は、該共重合体の全質量に対して、前記 モノマー Aを 20〜60質量0 /0、前記モノマー Bを 80〜40質量0 /0、及び前記モノマー A及び B以外の他の任意モノマーをその残りの質量%とした共重合比で共重合され ていることが好ましぐ更には、モノマー Aを 25〜60質量0 /0、モノマー Bを 60〜40質 量0 /0、及び前記モノマー A及び B以外の他の任意モノマーをその残りの質量%とした 共重合比で共重合されていることが好ましぐモノマー Aを 25〜60質量0 /0、モノマー Bを 75〜40質量0 /0、及び前記モノマー A及び B以外の他の任意モノマーをその残り の質量%とした共重合比で共重合されて 、ることがより好ま 、。 [0092] Suitable surfactants in the present invention (copolymer), based on the total weight of the copolymer, wherein 20 to 60 mass Monomer A 0/0, the monomer B and 80 to 40 mass 0 / 0, and the monomers a and another is preferred instrument further being copolymerized in copolymerization ratio as its remaining mass% of any monomer other than B is a monomer a 25 to 60 weight 0/0 the monomer B 60 to 40 mass 0/0, and the monomer a and other optional monomers and the remaining mass percent was copolymerization ratio in copolymerized preferably that are members monomers a and non-B 25-60 mass 0/0, the monomer B 75 to 40 weight 0/0, and any other monomer other than said monomers a and B are copolymerized in copolymerization ratio as its remaining mass%, Rukoto Is more preferred.
[0093] 本発明に好適な界面活性剤(モノマー A及びモノマー Bが少なくとも共重合されて なる共重合体)のうち、好ましい形態は、前記一般式 (a)中の R1が水素原子であって 、 n= 2、 m= 6であるモノマー Aと、前記一般式 (b)中の R2が水素原子であって、 R3 力 Sメチル基であって、 R4が水素原子であって、 p = 7、 q = 0であるモノマー B、又は前 記一般式 (b)中の R2
Figure imgf000024_0002
及び R4が水素原子であって、 p = 0、 q = 7であるモノマー Bと、を 20Z80〜60Z40の共重合比 (Α/Β)で共重合させてなる共重合体である。 特に好ましくは、 25Ζ60〜60Ζ40の共重合比とした場合である。 前記一般式 (a)で表されるモノマー Aと前記一般式 (b)で表されるモノマー Bとを共 重合成分として含む共重合体の具体例は、特開 2003— 337424号公報の段落番 号 [0068]の表 1に記載されて 、る。
[0093] Among the surfactants suitable for the present invention (a copolymer obtained by copolymerizing at least monomer A and monomer B), a preferred form is that R 1 in the general formula (a) is a hydrogen atom. N = 2, m = 6, R 2 in the general formula (b) is a hydrogen atom, R 3 force S methyl group, R 4 is a hydrogen atom, P = 7, q = 0, monomer B, or R 2 in the general formula (b),
Figure imgf000024_0002
And R 4 is a hydrogen atom, and a monomer B in which p = 0 and q = 7 is copolymerized at a copolymerization ratio (Α / Β) of 20Z80 to 60Z40. Particularly preferred is a copolymerization ratio of 25-60 to 40-40. Specific examples of the copolymer containing the monomer A represented by the general formula (a) and the monomer B represented by the general formula (b) as a copolymerization component are described in paragraph No. 2003-337424. As described in Table 1 of No. [0068].
[0094] 溶媒 [0094] Solvent
感光性榭脂組成物の調製には、前記成分以外に有機溶媒を用いることができる。 有機溶媒の例としては、メチルェチルケトン、プロピレングリコールモノメチルエーテ ル、プロピレングリコーノレモノメチノレエーテノレアセテート、シクロへキサノン、シクロへ キサノール、メチルイソブチルケトン、乳酸ェチル、乳酸メチル、力プロラタタム等を挙 げることができる。  In addition to the above components, an organic solvent can be used for preparing the photosensitive resin composition. Examples of organic solvents include methyl ethyl ketone, propylene glycol monomethyl ether, propylene glycol methanol monomethyl ether ether acetate, cyclohexanone, cyclohexanol, methyl isobutyl ketone, ethyl lactyl lactate, methyl lactate, strength prolatatum, etc. I can list them.
[0095] 熱重合防止剤 [0095] Thermal polymerization inhibitor
感光性榭脂組成物には、更に熱重合防止剤を含有できる。熱重合防止剤の例とし ては、ハイドロキノン、ハイドロキノンモノメチルエーテル、 p—メトキシフエノール、ジー tーブチルー p クレゾール、ピロガロール、 tーブチノレ力テコーノレ、ベンゾキノン、 4, 4'ーチォビス(3—メチルー 6 t—ブチルフエノール)、 2, 2'—メチレンビス(4ーメチ ルー 6 t—ブチルフエノール)、 2 メルカプトべンズイミダゾール、フエノチアジン等 が挙げられる。  The photosensitive resin composition can further contain a thermal polymerization inhibitor. Examples of thermal polymerization inhibitors include hydroquinone, hydroquinone monomethyl ether, p-methoxyphenol, di-t-butyl-p-cresol, pyrogallol, tert-butinole strength, tectonole, benzoquinone, 4,4'-thiobis (3-methyl-6-tert-butylphenol) ), 2, 2'-methylenebis (4-methyl 6t-butylphenol), 2 mercaptobenzimidazole, phenothiazine and the like.
[0096] 紫外線吸収剤  [0096] UV absorber
感光性榭脂組成物には、必要に応じて紫外線吸収剤を含有できる。紫外線吸収剤 としては、特開平 5— 72724号公報に記載の化合物、並びにサリシレート系、ベンゾ フエノン系、ベンゾトリアゾール系、シァノアクリレート系、ニッケルキレート系、ヒンダ一 ドアミン系などが挙げられる。  The photosensitive resin composition can contain an ultraviolet absorber as necessary. Examples of the ultraviolet absorber include compounds described in JP-A-5-72724, salicylate series, benzophenone series, benzotriazole series, cyanoacrylate series, nickel chelate series, hindered amine series, and the like.
[0097] 具体的には、フエ-ルサリシレート、 4 t—ブチルフエ-ルサリシレート、 2, 4ージ t ブチルフエ二ルー 3', 5'—ジ—t— 4'ーヒドロキシベンゾエート、 4 t—ブチル フエ-ルサリシレート、 2, 4ージヒドロキシベンゾフエノン、 2 ヒドロキシー4ーメトキシ ベンゾフエノン、 2 ヒドロキシ一 4— n—オタトキシベンゾフエノン、 2— (2'—ヒドロキ シ 5' メチルフエニル)ベンゾトリァゾール、 2—(2' ヒドロキシ 3'— t—ブチル — 5'—メチルフエ-ル)一 5 クロ口べンゾトリァゾール、ェチル 2 シァノ 3, 3— ジフエ-ルアタリレート、 2, 2' ヒドロキシー4ーメトキシベンゾフエノン、ニッケルジブ チルジチォカーバメート、ビス(2, 2, 6, 6—テトラメチルー 4 ピリジン)ーセバケート 、 4 t—ブチルフエ-ルサリシレート、サルチル酸フエ-ル、 4ーヒドロキシ 2, 2, 6 , 6—テトラメチルピペリジン縮合物、コハク酸一ビス(2, 2, 6, 6—テトラメチルー 4 ピペリデュル)—エステル、 2— [2 ヒドロキシ— 3, 5 ビス( α , a—ジメチルベンジ ル)フエ-ル]— 2H ベンゾトリァゾール、 7— { [4 クロ口 6— (ジェチルァミノ) - 5 -トリァジン— 2 ィル]アミノ} 3 フエ-ルクマリン等が挙げられる。 [0097] Specifically, phenyl salicylate, 4 t-butyl phenol salicylate, 2,4-di-t-butyl phenol 3 ', 5'-di-t- 4'-hydroxybenzoate, 4 t-butyl Phenylsalicylate, 2,4-Dihydroxybenzophenone, 2 Hydroxy-4-methoxy benzophenone, 2 Hydroxy 4-n-Otoxybenzophenone, 2— (2′-Hydroxy-5 ′ methylphenyl) benzotriazole, 2 — (2 ′ Hydroxy 3′— t-Butyl — 5′—Methylphenol) 1-5 Chlorobenzozoazole, Ethyl 2 Cyan 3, 3—Diphenyl Atarylate, 2, 2 ′ Hydroxy-4-methoxybenzophenone , Nickel jib Tildithiocarbamate, bis (2, 2, 6, 6-tetramethyl-4-pyridine) -sebacate, 4 t-butylphenol salicylate, phenyl salicylate, 4-hydroxy 2, 2, 6, 6-tetramethylpiperidine condensate Bis (2,2,6,6-tetramethyl-4-piperiduryl) -ester, 2- [2hydroxy-3,5bis (α, a-dimethylbenzyl) phenol] — 2H benzotriazole, 7- {[4 Black mouth 6- (Jetylamino) -5-triazine-2 yl] amino} 3 phenol coumarin and the like.
[0098] また、感光性榭脂組成物は、前記添加剤のほか、特開平 11— 133600号公報に 記載の「接着助剤」やその他の添加剤等を含有することもできる。  In addition to the additives, the photosensitive resin composition can also contain “adhesion aid” described in JP-A-11-133600, other additives, and the like.
[0099] 本発明に係る感光性榭脂組成物層は、既述したように、感光性榭脂組成物を塗布 する塗布法によるほか、感光性転写材料を用いた転写法により形成できる。この感光 性転写材料としては、特開平 5— 72724号公報に記載の榭脂転写材料など、一体 型に構成された転写用フィルムを用いて好適に形成することができ、一体型の転写 用フィルムの構成例としては、仮支持体 Z熱可塑性榭脂層 Z中間層 Z感光性榭脂 組成物層 Z保護フィルムの積層構造を有する構成が好適である。  [0099] As described above, the photosensitive resin composition layer according to the present invention can be formed by a transfer method using a photosensitive transfer material as well as by a coating method in which the photosensitive resin composition is applied. The photosensitive transfer material can be suitably formed using an integral transfer film such as a resin transfer material described in JP-A-5-72724, and is an integral transfer film. As an example of the structure, a structure having a laminated structure of the temporary support Z, the thermoplastic resin layer Z, the intermediate layer Z, the photosensitive resin composition layer Z, and the protective film is suitable.
[0100] 〜感光性転写材料〜  [0100] -Photosensitive transfer material-
次に、感光性転写材料について説明する。  Next, the photosensitive transfer material will be described.
本発明に係る感光性転写材料は、仮支持体上に、該仮支持体側から順に少なくと もアルカリ可溶な熱可塑性榭脂層と感光性榭脂組成物層とを有してなるフォトスぺー サー形成用の感光性転写材料であってもよい。また、必要に応じて、中間層や保護 フィルム等のその他の層を有して 、てもよ 、。  The photosensitive transfer material according to the present invention has a photospace comprising a temporary support and a thermoplastic resin layer and a photosensitive resin composition layer that are at least alkali-soluble in order from the temporary support side. A photosensitive transfer material for forming a substrate may be used. In addition, if necessary, it may have other layers such as an intermediate layer and a protective film.
[0101] 感光性榭脂組成物層  [0101] Photosensitive resin composition layer
感光性榭脂組成物層は、フォトスぺーサーを形成する場合に該フォトスぺーサーを 構成する層である。感光性榭脂組成物層は、本発明のフォトスぺーサー用感光性榭 脂組成物を、公知の塗布方法により塗布、乾燥させることにより好適に形成すること ができる。  The photosensitive resin composition layer is a layer constituting the photospacer when the photospacer is formed. The photosensitive resin composition layer can be suitably formed by applying and drying the photosensitive resin composition for a photospacer of the present invention by a known application method.
[0102] 感光性榭脂組成物の塗布は、液が吐出する部分にスリット状の穴を有するスリット 状ノズルによる塗布が好まし ヽ。スリット状ノズル及びスリットコーターにっ ヽての具体 的な詳細については既述の通りである。感光性榭脂組成物層の層厚は、 0. 5〜10 /z mが好ましぐ 1〜6 /ζ πιがより好ましい。層厚が前記範囲であると、製造時におけ る塗布形成の際のピンホールの発生が防止され、未露光部の現像除去を長時間を 要せずに行なえる。 [0102] The photosensitive resin composition is preferably applied with a slit-like nozzle having a slit-like hole in the portion from which the liquid is discharged. The specific details of the slit nozzle and slit coater are as described above. The layer thickness of the photosensitive resin composition layer is 0.5-10. 1 to 6 / ζ πι is more preferable. When the layer thickness is within the above range, the generation of pinholes during coating formation during production can be prevented, and development and removal of unexposed portions can be performed without requiring a long time.
[0103] 熱可塑性榭脂層  [0103] Thermoplastic resin layer
感光性転写材料には、前記感光性榭脂組成物層と仮支持体との間に、少なくとも 一層の熱可塑性榭脂層を設けることができる。熱可塑性榭脂層は、アルカリ現像を可 能とし、転写時にはみ出した熱可塑性榭脂層自身による被転写体の汚染防止を可 能とする点からアルカリ可溶性であることが好ましい。  In the photosensitive transfer material, at least one thermoplastic resin layer can be provided between the photosensitive resin composition layer and the temporary support. The thermoplastic resin layer is preferably alkali-soluble from the viewpoint that alkali development is possible, and that the thermoplastic resin layer protruding during transfer can prevent contamination of the transferred material.
[0104] この熱可塑性榭脂層は、前記感光性榭脂組成物層を被転写材に転写する際に、 被転写材上に存在する凹凸に起因して発生する転写不良を効果的に防止するタツ シヨン材としての機能を有し、感光性転写材料を被転写材に加熱圧着した際の被転 写材上の凹凸に対応して変形し得、感光性榭脂組成物層と被転写材との密着性を 高めることができる。  [0104] This thermoplastic resin layer effectively prevents transfer defects caused by unevenness on the transfer material when the photosensitive resin composition layer is transferred to the transfer material. The photosensitive resin composition layer and the transferred material can be deformed corresponding to the irregularities on the transferred material when the photosensitive transfer material is heat-pressed to the transferred material. Adhesion with the material can be improved.
[0105] 熱可塑性榭脂層の層厚としては、 0. 1〜20 mが好ましい。層厚が前記範囲内で あると、転写時の仮支持体力 の剥離性に優れると共に、被転写材上の凹凸を吸収 するのに効果的であり、感光性榭脂組成物層にレチキユレーシヨンが発生し、転写不 良を招来することもない。また、好ましくは 1. 5〜16 /ζ πιであり、より好ましくは 5〜15 . 0 μ mで toる。  [0105] The thickness of the thermoplastic resin layer is preferably 0.1 to 20 m. When the layer thickness is within the above range, the peelability of the temporary support force at the time of transfer is excellent, and it is effective for absorbing irregularities on the transfer material, and the photosensitive resin composition layer is reticulated. Chillons are generated and transfer defects do not occur. Further, it is preferably 1.5 to 16 / ζ πι, more preferably 5 to 15.0 μm.
なお、レチキユレーシヨンとは、吸湿等の原因で中間層が伸びた等の際に、柔軟な 熱可塑性榭脂層が坐屈して感光性榭脂組成物層の表面に細かい「しわ」が発生する ことをいい、転写不良の原因となる。  Reticulation means that when the intermediate layer is stretched due to moisture absorption or the like, the flexible thermoplastic resin layer buckles and fine wrinkles are formed on the surface of the photosensitive resin composition layer. This is a cause of transfer failure.
[0106] 熱可塑性榭脂層は、少なくとも熱可塑性榭脂を用いて構成することができ、必要に 応じて適宜他の成分を用いることができる。熱可塑性榭脂は、特に制限はなく適宜選 択することができるが、実質的な軟ィ匕点が 80°C以下であるものが好ましい。  [0106] The thermoplastic resin layer can be composed of at least a thermoplastic resin, and other components can be appropriately used as necessary. The thermoplastic resin is not particularly limited and can be appropriately selected, but those having a substantial softening point of 80 ° C. or less are preferable.
[0107] 実質的な軟ィ匕点が 80°C以下である熱可塑性榭脂としては、例えば、エチレンとァク リル酸エステル共重合体とのケンィ匕物、スチレンと (メタ)アクリル酸エステル共重合体 とのケン化物、ビュルトルエンと(メタ)アクリル酸エステル共重合体とのケン化物、ポリ (メタ)アクリル酸エステルや、(メタ)アクリル酸ブチルと酢酸ビニル等との (メタ)アタリ ル酸エステル共重合体等のケンィ匕物、などが好適に挙げられ、また、「プラスチック性 能便覧」(日本プラスチック工業連盟、全日本プラスチック成形工業連合会編著、ェ 業調査会発行、 1968年 10月 25日発行)に記載の軟ィ匕点が約 80°C以下である有機 高分子の内、アルカリ可溶性のものも挙げられる。これらは 1種単独で使用してもよい し、 2種以上を併用してもよい。 [0107] Examples of the thermoplastic resin having a substantial softening point of 80 ° C or lower include, for example, a kenne of ethylene and acrylate copolymer, styrene and (meth) acrylate. Saponified product with copolymer, saponified product with butyltoluene and (meth) acrylic acid ester copolymer, poly (meth) acrylic acid ester, (meth) atariate with (meth) acrylic acid butyl and vinyl acetate, etc. Examples of suitable materials such as sulfonic acid ester copolymers are “Plastic Performance Handbook” (edited by the Japan Plastics Industry Federation, All-Japan Plastics Molding Industry Association, published by the Industrial Research Council, 1968 10). Among those organic polymers whose soft spot is about 80 ° C or less as described in the 25th of May), those that are alkali-soluble are also included. These may be used alone or in combination of two or more.
[0108] また、実質的な軟ィ匕点が 80°C以下であるものとして更に、それ自体が軟化点 80°C 以上の有機高分子物質であっても、該有機高分子物質にこれと相溶性のある各種 可塑剤を添加して実質的な軟ィ匕点が 80°C以下とされたものも挙げることができる。前 記可塑剤としては、特に制限はなぐ目的に応じて適宜選択することができるが、例 えば、ポリプロピレングリコール、ポリエチレングリコール、ジォクチルフタレート、ジへ プチノレフタレート、ジブチノレフタレート、トリクレジルホスフェート、クレジノレジフエ二ノレ ホスフェート、ビフエ-ルジフエ-ルホスフェート、などが挙げられる。  [0108] Further, even if the substantial soft softening point is 80 ° C or lower, and even if it is an organic polymeric material itself having a softening point of 80 ° C or higher, Examples thereof include those having a substantial softening point of 80 ° C or less by adding various compatible plasticizers. The plasticizer can be appropriately selected according to the purpose without any particular limitation. For example, polypropylene glycol, polyethylene glycol, dioctyl phthalate, diheptino phthalate, dibutino phthalate, tricresyl. Phosphate, Cresino resifeninore phosphate, biphenyl diphosphate phosphate, and the like.
[0109] 熱可塑性榭脂層には、前記熱可塑性榭脂以外に他の成分として、仮支持体との接 着力を調節する目的で、実質的に軟ィ匕点が 80°Cを超えない範囲内で各種ポリマー 、過冷却物質、密着改良剤、界面活性剤、離型剤等を添加することができる。  [0109] In addition to the thermoplastic resin, the thermoplastic resin layer has a soft softness point substantially not exceeding 80 ° C for the purpose of adjusting the adhesion force with the temporary support as another component. Within the range, various polymers, supercooling substances, adhesion improvers, surfactants, mold release agents and the like can be added.
[0110] 中間層  [0110] Middle layer
感光性転写材料には、複数層を塗布する際及び塗布後の保存の際における成分 の混合を防止する目的で、中間層を設けることが好ましい。特に、仮支持体上に設け られた前記熱可塑性榭脂層の上であって、該熱可塑性榭脂層と前記感光性榭脂組 成物層との間に設けることが好ましい。熱可塑性榭脂層と感光性榭脂組成物層との 形成には有機溶剤が用いられるが、中間層を設けることで両層が互いに混ざり合うの を防止できる。  The photosensitive transfer material is preferably provided with an intermediate layer for the purpose of preventing mixing of components during the application of a plurality of layers and during storage after application. In particular, it is preferably provided on the thermoplastic resin layer provided on the temporary support and between the thermoplastic resin layer and the photosensitive resin composition layer. An organic solvent is used to form the thermoplastic resin layer and the photosensitive resin composition layer, but by providing an intermediate layer, it is possible to prevent the two layers from being mixed with each other.
[0111] 中間層としては、水又はアルカリ水溶液に分散ないし溶解するものが好ましい。中 間層の構成材料には公知のものを使用でき、例えば、特開昭 46— 2121号公報及 び特公昭 56— 40824号公報に記載のポリビニルエーテル Z無水マレイン酸重合体 、カルボキシアルキルセルロースの水溶性塩、水溶性セルロースエーテル類、カルボ キシアルキル澱粉の水溶性塩、ポリビュルアルコール、ポリビュルピロリドン、ポリアク リルアミド類、水溶性ポリアミド、ポリアクリル酸の水溶性塩、ゼラチン、エチレンォキサ イド重合体、各種澱粉及びその類似物からなる群の水溶性塩、スチレン zマレイン酸 の共重合体、マレイネート榭脂、などが挙げられる。 [0111] The intermediate layer is preferably dispersed or dissolved in water or an aqueous alkali solution. Known materials can be used for the intermediate layer. For example, polyvinyl ether Z maleic anhydride polymer and carboxyalkyl cellulose described in JP-A No. 46-2121 and JP-B No. 56-40824 can be used. Water-soluble salts, water-soluble cellulose ethers, water-soluble salts of carboxyalkyl starch, polybulualcohol, polybulupyrrolidone, polyacrylamides, water-soluble polyamides, water-soluble salts of polyacrylic acid, gelatin, ethylene oxide And water-soluble salts of the group consisting of various types of starch, various starches, and the like, copolymers of styrene and maleic acid, maleate resin, and the like.
これらは、 1種単独で用いる以外に 2種以上を併用してもよ 、。  These may be used alone or in combination of two or more.
[0112] 上記の中でも、水溶性榭脂、すなわち水溶性の高分子材料を使用するのが好まし ぐこの中でも少なくともポリビニルアルコールを使用するのがより好ましぐポリビニル アルコールとポリビニルピロリドンとの併用が特に好まし 、。 [0112] Among the above, it is preferable to use a water-soluble resin, that is, a water-soluble polymer material. Among these, it is preferable to use at least polyvinyl alcohol, and the combination of polyvinyl alcohol and polyvinylpyrrolidone is preferable. Especially preferred.
前記ポリビニルアルコールとしては、特に制限はなぐ目的に応じて適宜選択するこ とができ、その酸ィ匕度が 80mol%以上のものが好まし 、。  The polyvinyl alcohol can be appropriately selected according to the purpose without any restriction, and preferably has an acidity of 80 mol% or more.
[0113] ポリビニルピロリドンを使用する場合、その含有量は、中間層の固形分に対して、 1 〜75体積%が好ましぐ 1〜60体積%がより好ましぐ 10〜50体積%が特に好まし い。該含有量が前記範囲内であると、熱可塑性榭脂層との間で充分な密着性が得ら れ、酸素遮断能も良好である。  [0113] When polyvinylpyrrolidone is used, the content thereof is preferably 1 to 75% by volume, more preferably 1 to 60% by volume, particularly 10 to 50% by volume, based on the solid content of the intermediate layer. I like it. When the content is within the above range, sufficient adhesion to the thermoplastic resin layer can be obtained, and the oxygen blocking ability is also good.
[0114] 中間層は、酸素透過率が小さいことが好ましい。すなわち、酸素遮断機能のある酸 素遮断膜で構成されるのが好ましぐ露光時の感度がアップし、露光機の時間負荷 を低減し得、生産性を向上させ得ると共に、解像度も向上する。  [0114] The intermediate layer preferably has a low oxygen permeability. In other words, it is preferable to be composed of an oxygen-blocking film having an oxygen-blocking function. The sensitivity during exposure is improved, the time load of the exposure machine can be reduced, the productivity can be improved, and the resolution can also be improved. .
[0115] 中間層の層厚としては、 0. 1〜5 /ζ πι程度が好ましぐ 0. 5〜2 mがより好ましい。  [0115] The thickness of the intermediate layer is preferably about 0.1 to 5 / ζ πι, more preferably 0.5 to 2 m.
中間層の厚みが上記の範囲内であると、酸素遮断性を低下させることがなぐまた、 現像時の中間層除去時間が増大するのを防止することができる。  When the thickness of the intermediate layer is within the above range, the oxygen barrier property is not lowered, and an increase in the intermediate layer removal time during development can be prevented.
[0116] 仮支持体  [0116] Temporary support
仮支持体としては、転写の支障とならな 、程度に前記熱可塑性榭脂層に対する剥 離性を有するものが好ましぐ化学的 ·熱的に安定で可撓性を有するものが好ましい  The temporary support is preferably a chemically / thermally stable and flexible material that does not interfere with the transfer and preferably has a peelability to the thermoplastic resin layer.
[0117] 仮支持体の材料としては、特に制限はなぐ目的に応じて適宜選択することができ 、例えば、ポリ四フッ化工チレン、ポリエチレンテレフタレート、ポリエチレンナフタレー ト、ポリカーボネート、ポリエチレン、ポリプロピレンなどが挙げられる。 [0117] The material of the temporary support can be appropriately selected according to the purpose without any particular restriction. Examples thereof include polytetrafluoroethylene, polyethylene terephthalate, polyethylene naphthalate, polycarbonate, polyethylene, and polypropylene. It is done.
[0118] 仮支持体の構造としては、特に制限はなぐ目的に応じて適宜選択することができ 、単層構造、積層構造のいずれであってもよい。また、仮支持体には、前記熱可塑性 榭脂層との間に良好な剥離性を確保する観点から、グロ一放電等の表面処理を行な わな 、ことが好ましぐゼラチン等の下塗り層も設けな!/、ことが好まし 、。 仮支持体の厚みとしては、 5〜300 m程度力 子ましく、 20〜150 mが好ましい [0118] The structure of the temporary support can be appropriately selected depending on the purpose without particular limitation, and may be either a single layer structure or a laminated structure. In addition, the temporary support is subjected to surface treatment such as glow discharge from the viewpoint of ensuring good releasability with the thermoplastic resin layer. Don't have an undercoating layer like gelatin that you like! /. The thickness of the temporary support is about 5 to 300 m, preferably 20 to 150 m.
[0119] 仮支持体としては、その少なくとも一方の表面に導電性層を有する、あるいは仮支 持体自体が導電性を有することが好まし 、。仮支持体がこのように導電性を有する構 成であると、仮支持体を備えた感光性転写材料を被転写体上に密着させた後に仮 支持体を剥離する場合に、該仮支持体ゃ該被転写体等が帯電して周囲のゴミ等を 引き寄せることがなぐその結果、該仮支持体を剥離した後も熱可塑性榭脂層上にゴ ミ等が付着せず、その後の露光過程で余分な未露光部ができることに伴なうピンホー ルの形成を効果的に防止することができる。仮支持体上の導電性層又は導電性を有 する仮支持体の表面における表面電気抵抗としては、 1013 Ω以下が好ましい。 [0119] The temporary support preferably has a conductive layer on at least one surface thereof, or the temporary support itself has conductivity. When the temporary support has such a conductive structure, the temporary support is removed when the temporary support is peeled off after the photosensitive transfer material provided with the temporary support is brought into close contact with the transfer target. As a result, the transferred object and the like are not charged and attract the surrounding dust and the like. As a result, after the temporary support is peeled off, no dust or the like adheres to the thermoplastic resin layer, and the subsequent exposure process. Thus, pinhole formation due to the formation of an extra unexposed portion can be effectively prevented. The surface electrical resistance on the surface of the conductive layer on the temporary support or the temporary support having conductivity is preferably 10 13 Ω or less.
[0120] 導電性を有する仮支持体は、該仮支持体中に導電性物質を含有することで得られ る。導電性物質としては、特に制限はなぐ 目的に応じて適宜選択することができるが 、例えば、金属酸化物、帯電防止剤などが挙げられる。  [0120] The temporary support having conductivity can be obtained by containing a conductive substance in the temporary support. The conductive substance is not particularly limited and can be appropriately selected according to the purpose. Examples thereof include metal oxides and antistatic agents.
前記金属酸化物としては、例えば、酸化亜鉛、酸化チタン、酸化錫、酸化アルミ二 ゥム、酸化インジウム、酸化珪素、酸化マグネシウム、酸化バリウム、酸化モリブデン などが挙げられる。これらは 1種単独で用いる以外に 2種以上を併用してもよい。また 、金属酸ィ匕物の形態としては、結晶微粒子、複合微粒子などが挙げられる。  Examples of the metal oxide include zinc oxide, titanium oxide, tin oxide, aluminum oxide, indium oxide, silicon oxide, magnesium oxide, barium oxide, and molybdenum oxide. These may be used alone or in combination of two or more. Examples of the form of the metal oxide include crystal fine particles and composite fine particles.
[0121] 前記帯電防止剤としては、例えば、エレクトロストリッパー Α (花王 (株)製)、エレノン No. 19 (第一工業製薬 (株)製)等のアルキル燐酸塩系ァ-オン界面活性剤、ァモ 一ゲン K (第一工業製薬 (株)製)等のベタイン系両性界面活性剤、ニッサンノ-オン L (日本油脂 (株)製)等のポリオキシエチレン脂肪酸エステル系非イオン界面活性剤 、エマルゲン 106、同 120、同 147、同 420、同 220、同 905、同 910 (花王(株)製) やニッサンノ-オン E (日本油脂 (株)製)等のポリオキシエチレンアルキルエーテル系 非イオン界面活性剤、ポリオキシエチレンアルキルフエノールエーテル系、多価アル コール脂肪酸エステル系、ポリオキシエチレンソルビタン脂肪酸エステル系、ポリオキ シエチレンアルキルアミン系等のその他の非イオン系界面活性剤が挙げられる。これ らは 1種単独で使用してもよいし、 2種以上を併用してもよい。 [0122] 前記導電性層は、公知の導電性物質を用いた構成の中から適宜選択して形成す ることができ、該導電性物質としては、湿度環境に影響されず安定した導電効果が得 られる点で、例えば、 ZnO、 TiO、 SnO、 Al O、 In O、 SiO、 MgO、 BaO、 MoO [0121] Examples of the antistatic agent include alkyl phosphate-based surfactants such as Electro Stripper Sakai (manufactured by Kao Corporation), Elenon No. 19 (manufactured by Daiichi Kogyo Seiyaku Co., Ltd.), Betaine amphoteric surfactants such as Amo Igen K (Daiichi Kogyo Seiyaku Co., Ltd.), polyoxyethylene fatty acid ester nonionic surfactants such as Nissan Noon L (Nippon Yushi Co., Ltd.) Emulgen 106, 120, 147, 420, 220, 905, 910 (manufactured by Kao Corporation) and Nissan-Non E (manufactured by NOF Corporation) Non-ionic Other nonionic surfactants such as surfactants, polyoxyethylene alkylphenol ethers, polyhydric alcohol fatty acid esters, polyoxyethylene sorbitan fatty acid esters, polyoxyethylene alkylamines, etc. The These may be used alone or in combination of two or more. [0122] The conductive layer can be formed by appropriately selecting a configuration using a known conductive material, and the conductive material has a stable conductive effect without being affected by the humidity environment. For example, ZnO, TiO, SnO, AlO, InO, SiO, MgO, BaO, MoO
2 2 2 3 2 3 2 3 などが好ましい。これらは、 1種単独で用いる以外に 2種以上を併用してもよい。  2 2 2 3 2 3 2 3 and the like are preferable. These may be used in combination of two or more, in addition to being used alone.
[0123] 前記金属酸ィ匕物又は前記導電性物質の体積抵抗値としては、 107 Ω · cm以下が 好ましぐ 105 Ω 'cm以下がより好ましい。また、前記金属酸化物又は前記導電性物 質の粒子径としては、 0. 01〜0. 7 111カ 子ましく、 0. 02〜0. 5 m力より好まし!/、 [0123] The volume resistivity of the metal oxide or the conductive substance is preferably 10 7 Ω · cm or less, more preferably 10 5 Ω′cm or less. The particle diameter of the metal oxide or the conductive material is preferably 0.01 to 0.7 111 m, more preferably 0.02 to 0.5 m force! /,
[0124] 前記導電性層には、バインダーとして、例えば、ゼラチン、セルロースナイトレート、 セノレローストリアセテート、セノレロースジアセテート、セノレロースアセテートブチレート、 セルロースアセテートプロピオネート等のセルロースエステル、塩化ビ-リデン、塩化 ビュル、スチレン、アクリロニトリル、酢酸ビュル、炭素数 1〜4のアルキルアタリレート 、ビュルピロリドン等を含むホモポリマー又はコポリマー、可溶性ポリエステル、ポリ力 ーボネート、可溶性ポリアミド、などを使用することができる。 [0124] In the conductive layer, as a binder, for example, gelatin, cellulose nitrate, cenololose triacetate, cenololose diacetate, cenololose acetate butyrate, cellulose esters such as cellulose acetate propionate, vinylidene chloride Further, homopolymers or copolymers including butyl chloride, styrene, acrylonitrile, butyl acetate, alkyl acrylates having 1 to 4 carbon atoms, butyl pyrrolidone, etc., soluble polyesters, polycarbonates, soluble polyamides, and the like can be used.
[0125] 上記以外に、感光性転写材料には、その他の層として保護フィルムなどを更に設け ることがでさる。  In addition to the above, the photosensitive transfer material can be further provided with a protective film as another layer.
保護フィルムは、保管等の際に汚れや損傷等から感光性榭脂組成物層を保護する 機能を有し、仮支持体と同一又は類似の材料で構成することができる。保護フィルム としては、感光性榭脂組成物層から容易に剥離可能なものであればよぐ例えば、シ リコン紙、ポリオレフインシート、ポリテトラフルォロエチレンシート等が好適に挙げられ る。これらの中でも、ポリエチレンシートないしフィルム、ポリプロピレンシートないしフ イルムが好ましい。保護フィルムの厚みとしては、 5〜: L 00 m程度力 S好ましく、 10〜 30 mがより好ましい。  The protective film has a function of protecting the photosensitive resin composition layer from dirt and damage during storage and the like, and can be composed of the same or similar material as the temporary support. As the protective film, any material that can be easily peeled off from the photosensitive resin composition layer may be used. For example, a silicon paper, a polyolefin sheet, a polytetrafluoroethylene sheet, and the like are preferably used. Among these, a polyethylene sheet or film, or a polypropylene sheet or film is preferable. The thickness of the protective film is preferably 5 to about L 00 m, force S, and more preferably 10 to 30 m.
[0126] 感光性転写材料は、仮支持体上に、熱可塑性の有機高分子 (熱可塑性榭脂)と共 に添加剤を溶解した溶解液 (熱可塑性榭脂層用塗布液)を塗布し、乾燥させて熱可 塑性榭脂層を設けた後、この熱可塑性榭脂層上に熱可塑性榭脂層を溶解しな ヽ溶 剤に榭脂ゃ添加剤を加えて調製した調製液(中間層用塗布液)を塗布し、乾燥させ て中間層を積層し、この中間層上に更に、中間層を溶解しない溶剤を用いて既述の ように調製した感光性榭脂組成物を塗布し、乾燥させて感光性榭脂組成物層を積層 すること〖こよって、好適に作製することができる。 [0126] For the photosensitive transfer material, a solution (thermoplastic resin coating solution) in which an additive is dissolved together with a thermoplastic organic polymer (thermoplastic resin) is applied onto a temporary support. After preparing a thermoplastic resin layer by drying, a prepared solution (intermediate solution) was prepared by adding a resin additive to the solvent without dissolving the thermoplastic resin layer on this thermoplastic resin layer. The intermediate coating layer is applied and dried, and an intermediate layer is laminated.On the intermediate layer, a solvent that does not dissolve the intermediate layer is used. The photosensitive resin composition prepared as described above is applied, dried, and laminated with a photosensitive resin composition layer, which can be suitably produced.
[0127] 上記による以外に、仮支持体上に該仮支持体側から順に熱可塑性榭脂層及び中 間層を設けた第 1シートと、保護フィルム上に感光性榭脂組成物層を設けた第 2シー トとを用意し、第 1シートの中間層表面と感光性榭脂組成物層の表面とが接するよう に貼り合せることによって作製することもできる。また更に、仮支持体上に熱可塑性榭 脂層を設けた第 1シートと、保護フィルム上に該保護フィルム側カゝら順に感光性榭脂 組成物層及び中間層を設けた第 2シートとを用意し、第 1シートの中間層表面と第 2 シートの熱可塑性榭脂層の表面とが接するように貼り合せることによって作製すること ちでさる。  [0127] In addition to the above, a first sheet in which a thermoplastic resin layer and an intermediate layer were provided in order from the temporary support side on the temporary support, and a photosensitive resin composition layer on the protective film were provided. The second sheet may be prepared and bonded so that the surface of the intermediate layer of the first sheet is in contact with the surface of the photosensitive resin composition layer. Furthermore, a first sheet provided with a thermoplastic resin layer on a temporary support, and a second sheet provided with a photosensitive resin composition layer and an intermediate layer in that order on the protective film side cover, This is prepared by adhering so that the surface of the intermediate layer of the first sheet is in contact with the surface of the thermoplastic resin layer of the second sheet.
[0128] [パターニング工程]  [0128] [Patterning process]
本発明に係るパター-ング工程は、基板上に形成された感光性榭脂組成物層を露 光及びアルカリ現像してパターユングする。具体的には、基板上に形成された感光 性榭脂組成物層の上方に所定のマスクを配置し、該マスク及び場合により熱可塑性 榭脂層及び中間層を介してマスクの更に上方 (マスクの感光性榭脂組成物層と対向 しない側)から露光し、露光完了後、現像液を用いた現像処理を行なう。  In the patterning step according to the present invention, the photosensitive resin composition layer formed on the substrate is subjected to patterning by exposure and alkali development. Specifically, a predetermined mask is disposed above the photosensitive resin composition layer formed on the substrate, and further above the mask (mask) via the mask and, optionally, the thermoplastic resin layer and the intermediate layer. The photosensitive resin composition layer is exposed from the side not facing the photosensitive resin composition layer, and after the exposure is completed, development processing using a developer is performed.
[0129] 前記露光に用いる光源としては、感光性榭脂組成物層を硬化しうる波長域の光 (例 えば、 365nm、 405nmなど)を照射できるものであれば適宜選定して用いることがで きる。具体的には、超高圧水銀灯、高圧水銀灯、メタルハライドランプ等が挙げられる 。露光量としては、通常 5〜200miZcm2程度であり、好ましくは 10〜100miZcm2 程度である。 [0129] The light source used for the exposure may be appropriately selected and used as long as it can irradiate light in a wavelength region capable of curing the photosensitive resin composition layer (for example, 365 nm, 405 nm, etc.). wear. Specifically, an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp and the like can be mentioned. The exposure amount is usually about 5 to 200 miZcm 2 , preferably about 10 to 100 miZcm 2 .
[0130] 現像は、公知のアルカリ現像方法にしたがって行なうことができ、例えば、溶剤若し くは水性の現像液、特にアルカリ水溶液 (アルカリ現像液)等を用いて、露光後の感 光性転写材料を、現像液を収容した現像浴中に浸漬させるか、感光性転写材料上 の層に対してスプレー等で噴霧する等すると共に、更に回転ブラシ、湿潤スポンジ等 で擦ったり、超音波を照射させながら処理する等により行なうことができる。現像液の 液温度は 20°C〜40°Cが好ましぐまた、現像後には、水洗処理を行なうのが好まし い。 [0131] 現像の方式としては、パドル現像、シャワー現像、シャワー &スピン現像、ディップ 現像等、公知の方法を用いることができる。 [0130] The development can be performed according to a known alkali development method. For example, the photosensitive transfer after exposure using a solvent or an aqueous developer, particularly an alkaline aqueous solution (alkaline developer) or the like. The material is immersed in a developer bath containing a developer or sprayed onto the layer on the photosensitive transfer material by spraying, etc., and further rubbed with a rotating brush, wet sponge, etc., or irradiated with ultrasonic waves. It is possible to carry out the process while processing. The developer temperature is preferably 20 ° C to 40 ° C. After development, it is preferable to wash with water. [0131] As a development method, a known method such as paddle development, shower development, shower & spin development, dip development or the like can be used.
ここで、上記シャワー現像について説明すると、露光後の感光性榭脂組成物層に 現像液をシャワーにより吹き付けることにより、未硬化部分を除去することができる。尚 、現像の前に感光性榭脂組成物層の溶解性が低 ヽアルカリ性の液をシャワーなどに より吹き付け、熱可塑性榭脂層、中間層などを除去しておくことが好ましい。また、現 像の後に、洗浄剤などをシャワーにより吹き付け、ブラシなどで擦りながら、現像残渣 を除去することが好ましい。  Here, the shower development will be described. The uncured portion can be removed by spraying a developer on the photosensitive resin composition layer after exposure. Prior to development, it is preferable to spray a low-solubility alkaline solution having a low solubility in the photosensitive resin composition layer by shower or the like to remove the thermoplastic resin layer, intermediate layer, and the like. Further, it is preferable to remove the development residue while spraying a cleaning agent or the like after showering with a shower and rubbing with a brush or the like.
[0132] なお、露光後の現像や不要部分の除去の過程において、感光性榭脂組成物層及 び熱可塑性榭脂層や中間層の溶解に用いるアルカリ性水溶液としては、例えば、ァ ルカリ性物質の希薄水溶液が好ましぐ更に水混和性のある有機溶剤を少量添加し たものも好ましい。アルカリ性物質には、特に制限はなく目的に応じて適宜選択する ことができ、例えば、水酸化ナトリウム、水酸化カリウム等のアルカリ金属水酸化物類 、炭酸ナトリウム、炭酸カリウム等のアルカリ金属炭酸塩類、炭酸水素ナトリウム、炭酸 水素カリウム等のアルカリ金属重炭酸塩類、ケィ酸ナトリウム、ケィ酸カリウム等のアル カリ金属ケィ酸塩類、メタケイ酸ナトリウム、メタケイ酸カリウム等のアルカリ金属メタケ ィ酸塩類、トリエタノールァミン、ジエタノールァミン、モノエタノールァミン、モルホリン 、テトラメチルアンモ-ゥムヒドロキシド等のテトラアルキルアンモン-ゥムヒドロキシド 類又は燐酸三ナトリウムなどが挙げられる。これらは、 1種単独で用いる以外に 2種以 上を併用してもよい。  [0132] The alkaline aqueous solution used for dissolving the photosensitive resin composition layer, the thermoplastic resin layer, and the intermediate layer in the process of development after exposure and removal of unnecessary parts includes, for example, alkaline substances. A dilute aqueous solution is preferred, and a water-miscible organic solvent added in a small amount is also preferred. The alkaline substance is not particularly limited and may be appropriately selected according to the purpose. Examples thereof include alkali metal hydroxides such as sodium hydroxide and potassium hydroxide, alkali metal carbonates such as sodium carbonate and potassium carbonate, Alkali metal bicarbonates such as sodium hydrogen carbonate and potassium hydrogen carbonate, alkali metal silicates such as sodium silicate and potassium silicate, alkali metal metasilicates such as sodium metasilicate and potassium metasilicate, triethanol And tetraalkylammonum hydroxides such as amine, diethanolamine, monoethanolamine, morpholine, tetramethylammonium hydroxide, and trisodium phosphate. These may be used alone or in combination of two or more.
[0133] アルカリ性水溶液としては、アルカリ性物質の濃度が 0. 01〜30質量%であるのが 好ましぐ pHが 8〜14であるのが好ましい。  [0133] The alkaline aqueous solution preferably has an alkaline substance concentration of 0.01 to 30% by mass, and preferably has a pH of 8 to 14.
[0134] 前記水混和性のある有機溶剤は、 目的に応じて適宜選択することができ、例えば、 メタノール、エタノール、 2—プロパノール、 1 プロパノール、ブタノール、ジアセトン ァノレコーノレ、エチレングリコーノレモノメチノレエーテノレ、エチレングリコーノレモノェチノレ エーテノレ、エチレングリコーノレモノ n—ブチノレエーテノレ、ベンジノレアノレコーノレ、ァセト ン、メチルェチルケトン、シクロへキサノン、 ε—力プロラタトン、 γ ブチロラタトン、 ジメチルホルムアミド、ジメチルァセトアミド、へキサメチルホスホルアミド、乳酸ェチル 、乳酸メチル、 ε—力プロラタタム、 Ν—メチルピロリドンなどが挙げられる。水混和性 を有する有機溶剤の添加量は、 0. 1〜30質量%が好ましい。 [0134] The water-miscible organic solvent can be appropriately selected according to the purpose. For example, methanol, ethanol, 2-propanol, 1 propanol, butanol, diacetone anolenoure, ethyleneglycolole monomethinoatenore. , Ethyleneglycolenoethylenole etherol, ethyleneglycololemono n-butinoleethenole, benzenoreanolenoconole, acetone, methylethylketone, cyclohexanone, ε -force prolataton, γ-butyrolataton, dimethylformamide, Dimethylacetamide, hexamethylphosphoramide, ethyl lactate , Methyl lactate, ε-force prolatatam, Ν-methylpyrrolidone and the like. The amount of the water-miscible organic solvent added is preferably 0.1 to 30% by mass.
[0135] なお、アルカリ性水溶液には、公知の種々の界面活性剤を添加することができ、該 界面活性剤を添加する場合の添加量は、 0. 01〜: L0質量%であるのが好ましい。 現像液の液温度は 20°C〜40°Cが好ましぐまた、現像液の pHは 8〜13が好まし い。現像槽中にはローラーコンベアなどが設置され、基板は水平に移動する。前記口 一ラーコンベアの傷を防止する意味で、感光性榭脂は基板の上面に形成されるのが 好ましい。基板サイズが 1メートルを超える場合は、基板を水平に搬送すると、基板中 央付近に現像液が滞留し、基板中央と周辺部分での現像の差が問題となる。これを 回避するため、基板は斜めに傾斜させるのが望ましい。傾斜角度は、 5° 力 30° が好ましい。 [0135] Various known surfactants can be added to the alkaline aqueous solution, and the addition amount in the case of adding the surfactant is preferably 0.01 to L0 mass%. . The developer temperature is preferably 20 ° C to 40 ° C, and the developer pH is preferably 8 to 13. A roller conveyor or the like is installed in the developing tank, and the substrate moves horizontally. The photosensitive resin is preferably formed on the upper surface of the substrate in order to prevent damage to the single conveyor. When the substrate size exceeds 1 meter, when the substrate is transported horizontally, the developer stays near the center of the substrate, and the difference in development between the center of the substrate and the peripheral part becomes a problem. To avoid this, it is desirable to tilt the substrate diagonally. The inclination angle is preferably 5 ° force 30 °.
また、現像前に純水を噴霧し、感光性榭脂組成物層を湿らせておくと均一な現像 結果となり好ましい。  In addition, it is preferable to spray pure water before development to moisten the photosensitive resin composition layer so that a uniform development result is obtained.
[0136] また、現像後は、基板にエアを軽く吹きつけ、余分な液を略除去した上で、シャワー 水洗を実施すると、より均一な現像結果となる。また水洗の前に、超純水を、超高圧 洗净ノズルにて 3から lOMPaの圧力で噴射して残渣除去を行うと、残渣の無い高品 質の像が得られる。基板に水滴が付着したまま後工程へ搬送すると、工程を汚したり 、基板にシミが残ったりするので、エアーナイフにて水切りを行い余分な水や水滴を 除去するのが好ましい。  [0136] Further, after development, if air is blown lightly on the substrate to remove excess liquid substantially and then shower water washing is performed, a more uniform development result is obtained. Moreover, if the residue is removed by spraying ultrapure water at a pressure of 3 to lOMPa with an ultra-high pressure washing nozzle before washing with water, a high-quality image without residue can be obtained. If the substrate is transported to a subsequent process with water droplets attached to the substrate, the process may be soiled or stains may remain on the substrate. Therefore, it is preferable to remove excess water or water droplets by draining with an air knife.
[0137] (ポスト露光)  [0137] (Post exposure)
現像と後述する熱処理の間に、ポスト露光を実施すると、画像の断面形状のコント ロール、画像の硬度のコントロール、画像の表面凹凸のコントロール、画像の膜減り のコントロールなどの観点で好ましい。ポスト露光に用いる光源としては、特開 2005 — 3861号公報の段落番号 0074に記載の超高圧水銀ランプ、高圧水銀ランプ、メタ ルハライドランプ等が挙げられる。ポスト露光は、超高圧水銀灯やメタルハライド等の 光源力もの光を露光マスクなどを介さず直接基板に照射する事が、設備の簡素化と 省電力の観点で好ましい。必要に応じて、両面から実施する。また、露光量も、上面: 100力ら 2000mjZ平方センチメートノレ、下面: 100から 2000mjZ平方センチメート ルの範囲で、上記コントロール目的に応じ、適宜調整する。 Post exposure is preferably performed between the development and the heat treatment described below from the viewpoints of controlling the cross-sectional shape of the image, controlling the hardness of the image, controlling the surface roughness of the image, and controlling the film thickness reduction of the image. Examples of the light source used for the post-exposure include an ultrahigh pressure mercury lamp, a high pressure mercury lamp, and a metal halide lamp described in paragraph No. 0074 of JP-A-2005-3861. In the post-exposure, it is preferable to directly irradiate the substrate with light of a light source such as an ultra-high pressure mercury lamp or a metal halide without using an exposure mask or the like from the viewpoint of simplification of equipment and power saving. Implement from both sides as needed. In addition, the exposure amount is also 2000 mjZ square centimeters for the top surface: 100 forces, bottom surface: 100 to 2000 mjZ square centimeters Within the range of the above, adjust appropriately according to the above control purpose.
[0138] (熱処理)  [0138] (Heat treatment)
熱処理により本発明の感光性榭脂組成物層に含まれるモノマーや架橋剤を反応さ せて、画像の硬度を確保することができる。熱処理の温度は、 150°Cから 250°Cの範 囲が好ましい。 150°C以下では硬度が不十分となり、 250°C以上では基板との密着 性が悪くなりやすい。熱処理の時間は、 10分から 150分が好ましい。 10分未満では 、硬度が不足し、 150分以上では、密着性が悪くなりやすい。  The hardness of the image can be ensured by reacting the monomer and the crosslinking agent contained in the photosensitive resin composition layer of the present invention by heat treatment. The heat treatment temperature is preferably in the range of 150 ° C to 250 ° C. Hardness is insufficient at temperatures below 150 ° C, and adhesion to the substrate tends to deteriorate at temperatures above 250 ° C. The heat treatment time is preferably 10 minutes to 150 minutes. If it is less than 10 minutes, the hardness is insufficient, and if it is 150 minutes or more, the adhesion tends to be poor.
[0139] 本発明のフォトスぺーサ一の製造方法により作製されたフォトスぺーサ一は、本発 明の感光性榭脂組成物層を用いて形成されるため、塑性変形させた際に高 、 (好ま しくは 70%以上の)変形回復率を示し、充分な力学特性を具えるので、液晶セルの セル厚を均一に保つのに有効である。そのため、このフォトスぺーサ一は、液晶セル のセル厚の変動で表示ムラを起こし易い表示装置に好適に用いることができる。 [0139] Since the photospacer produced by the method for producing a photospacer of the present invention is formed using the photosensitive resin composition layer of the present invention, the photospacer is high when plastically deformed. It exhibits a deformation recovery rate (preferably 70% or more) and has sufficient mechanical properties, so it is effective to keep the cell thickness of the liquid crystal cell uniform. Therefore, the photo spacer can be suitably used for a display device that easily causes display unevenness due to a variation in the cell thickness of the liquid crystal cell.
[0140] 本発明のフォトスぺーサ一の製造方法により作製されたフォトスぺーサ一の変形回 復率としては、 m φのフォトスぺーサーを 50 μ ΐη φの円錘台圧子で、負荷速度 0. 145gfZ秒、最大荷重 50mN又は 130mN、保持時間 5秒、測定温度 23°Cの条 件にて負荷—除荷テストを行なった際の変形回復率である。 [0140] The deformation recovery rate of the photospacer produced by the method for producing a photospacer of the present invention is as follows. The photospacer of mφ is a frustum indenter of 50 μΐηφ and the load speed is 0. Deformation recovery rate when performing a load-unloading test under the conditions of 145 gfZ seconds, maximum load 50 mN or 130 mN, holding time 5 seconds, and measurement temperature 23 ° C.
最大荷重 50mNの場合は、 75%以上が好ましぐ 85%以上がより好ましぐ 90% 以上が更に好ましい。  When the maximum load is 50 mN, 75% or more is preferable, 85% or more is more preferable, and 90% or more is more preferable.
変形回復率が前記範囲内にあると、外部力 の圧縮強度に耐え、パネル形成時に おける塑性変形を防止して所望厚の液晶層を得ることができる。その結果、厚変化に より生じ得る表示ムラが解消され、高画質画像の表示が可能となる。  When the deformation recovery rate is within the above range, the liquid crystal layer having a desired thickness can be obtained by withstanding the compressive strength of external force and preventing plastic deformation during panel formation. As a result, display unevenness that may occur due to thickness changes is eliminated, and high-quality images can be displayed.
[0141] 最大荷重 130mNの場合は、 70%以上が好ましぐ 80%以上がより好ましぐ 85% 以上が更に好ましい。 [0141] When the maximum load is 130 mN, 70% or more is preferable, 80% or more is more preferable, and 85% or more is more preferable.
変形回復率が前記範囲内にあると、パネルにした後の外部力 の圧縮強度に耐え ることができる。その結果、外部力 の圧縮強度により生じ得る表示ムラ (波紋のような ムラ)が解消され、高画質画像の表示が可能となる。  When the deformation recovery rate is within the above range, it can withstand the compressive strength of the external force after forming the panel. As a result, display unevenness (unevenness such as ripples) that can occur due to the compressive strength of the external force is eliminated, and high-quality images can be displayed.
[0142] <液晶表示装置用基板 > [0142] <Liquid crystal display substrate>
本発明の液晶表示装置用基板は、前記本発明のフォトスぺーサ一の製造方法によ り得られたフォトスぺーサーを備えたものである。フォトスぺーサ一は、基板上に形成 されたブラックマトリクス等の表示用遮光部の上や TFT等の駆動素子上に形成され ることが好ましぐ必要に応じてブラックマトリクス等の表示用遮光部や TFT等の駆動 素子とフォトスぺーサ一との間に ITO等の透明導電層(透明電極)やポリイミド等の液 晶配向膜が存在して 、てもよ 、。 The substrate for a liquid crystal display device of the present invention is obtained by the method for producing a photospacer of the present invention. It is equipped with a photospacer obtained. The photo spacer is preferably formed on a display light-shielding portion such as a black matrix formed on a substrate or on a driving element such as a TFT, or the like. There may be a transparent conductive layer (transparent electrode) such as ITO or a liquid crystal alignment film such as polyimide between the driving element such as TFT and the photo spacer.
[0143] 例えば、フォトスぺーサ一が表示用遮光部や駆動素子の上に設けられる場合、該 基板に予め配設された表示用遮光部 (ブラックマトリクスなど)や駆動素子を覆うよう にして、例えば感光性転写材料の感光性榭脂組成物層を基板面にラミネートし、剥 離転写して感光性榭脂組成物層を形成した後、これに露光、現像、加熱処理等を施 してフォトスぺーサーを形成することによって、本発明の液晶表示装置用基板を作製 することができる。 [0143] For example, when the photospacer is provided on the display light-shielding portion or the drive element, the display spacer is covered with the display light-shielding portion (black matrix or the like) or the drive element previously disposed on the substrate. For example, a photosensitive resin composition layer of a photosensitive transfer material is laminated on a substrate surface, peeled and transferred to form a photosensitive resin composition layer, and then subjected to exposure, development, heat treatment, and the like. By forming a photospacer, the substrate for a liquid crystal display device of the present invention can be produced.
本発明の液晶表示装置用基板には更に、必要に応じて赤色 (R)、青色 (B)、緑色 (G) 3色等の着色画素が設けられて 、てもよ 、。  The liquid crystal display substrate of the present invention may further be provided with colored pixels of three colors such as red (R), blue (B), and green (G) as necessary.
[0144] <液晶表示素子 > [0144] <LCD device>
本発明の液晶表示素子は、前記本発明の液晶表示装置用基板を設けて構成され たものである。液晶表示素子の 1つとして、少なくとも一方が光透過性の一対の基板 ( 本発明の液晶表示装置用基板を含む。 )間に液晶層と液晶駆動手段 (単純マトリック ス駆動方式及びアクティブマトリックス駆動方式を含む。)とを少なくとも備えたものが 挙げられる。  The liquid crystal display element of the present invention is configured by providing the liquid crystal display device substrate of the present invention. As one of the liquid crystal display elements, at least one of the pair of optically transparent substrates (including the substrate for a liquid crystal display device of the present invention) and a liquid crystal layer and liquid crystal driving means (simple matrix driving method and active matrix driving method) Including at least).
[0145] この場合、本発明の液晶表示装置用基板は、複数の RGB画素群を有し、該画素 群を構成する各画素が互いにブラックマトリックスで離画されているカラーフィルタ基 板として構成できる。このカラーフィルタ基板には、高さ均一で変形回復性に優れた フォトスぺーサ一が設けられるため、該カラーフィルタ基板を備えた液晶表示素子は 、カラーフィルタ基板と対向基板との間にセルギャップムラ (セル厚変動)の発生が抑 えられ、色ムラ等の表示ムラの発生を効果的に防止することができる。これにより、作 製された液晶表示素子は鮮ゃ力な画像を表示できる。  [0145] In this case, the substrate for a liquid crystal display device of the present invention can be configured as a color filter substrate having a plurality of RGB pixel groups and each pixel constituting the pixel group being separated from each other by a black matrix. . Since this color filter substrate is provided with a photospacer having a uniform height and excellent deformation recovery property, a liquid crystal display device equipped with the color filter substrate has a cell gap between the color filter substrate and the counter substrate. Occurrence of unevenness (cell thickness fluctuation) is suppressed, and display unevenness such as color unevenness can be effectively prevented. Thereby, the produced liquid crystal display element can display a clear image.
[0146] また、液晶表示素子の別の態様として、少なくとも一方が光透過性の一対の基板( 本発明の液晶表示装置用基板を含む。 )間に液晶層と液晶駆動手段とを少なくとも 備え、前記液晶駆動手段がアクティブ素子 (例えば TFT)を有し、かつ一対の基板間 が高さ均一で変形回復性に優れたフォトスぺーサ一により所定幅に規制して構成さ れたものである。この場合も、本発明の液晶表示装置用基板は、複数の RGB画素群 を有し、該画素群を構成する各画素が互いにブラックマトリックスで離画されたカラー フィルタ基板として構成されて 、る。 [0146] Further, as another aspect of the liquid crystal display element, at least one of the liquid crystal layer and the liquid crystal driving means is provided between a pair of light transmissive substrates (including the liquid crystal display device substrate of the present invention). The liquid crystal driving means has an active element (e.g., TFT) and is configured to be regulated to a predetermined width by a photo spacer having a uniform height between a pair of substrates and excellent deformation recovery. is there. Also in this case, the substrate for a liquid crystal display device of the present invention is configured as a color filter substrate having a plurality of RGB pixel groups, and each pixel constituting the pixel group is separated from each other by a black matrix.
[0147] 本発明にお 、て使用可能な液晶としては、ネマチック液晶、コレステリック液晶、スメ クチック液晶、強誘電液晶が挙げられる。  [0147] Examples of the liquid crystal that can be used in the present invention include nematic liquid crystal, cholesteric liquid crystal, smectic liquid crystal, and ferroelectric liquid crystal.
また、前記カラーフィルタ基板の前記画素群は、互いに異なる色を呈する 2色の画 素からなるものでも、 3色の画素、 4色以上の画素力 なるものであってもよい。例え ば 3色の場合、赤 (R)、緑 (G)及び青 (B)の 3つの色相で構成される。 RGB3色の画 素群を配置する場合には、モザイク型、トライアングル型等の配置が好ましぐ 4色以 上の画素群を配置する場合にはどのような配置であってもよい。カラーフィルタの作 製は、例えば 2色以上の画素群を形成した後既述のようにブラックマトリックスを形成 してもよいし、逆にブラックマトリックスを形成した後に画素群を形成するようにしてもよ い。 RGB画素の形成については、特開 2004— 347831号公報等を参考にすること ができる。  In addition, the pixel group of the color filter substrate may be composed of two-color pixels exhibiting different colors, or may be composed of three-color pixels and four or more pixel forces. For example, in the case of three colors, it consists of three hues of red (R), green (G), and blue (B). When arranging pixel groups of three RGB colors, any arrangement may be used when arranging pixel groups of four or more colors that are preferred to be mosaic type or triangle type. For the production of the color filter, for example, a black matrix may be formed as described above after forming a pixel group of two or more colors, or conversely, a pixel group may be formed after forming a black matrix. Good. Regarding the formation of RGB pixels, JP 2004-347831 A can be referred to.
[0148] <液晶表示装置 >  [0148] <Liquid crystal display device>
本発明の液晶表示装置は、前記本発明の液晶表示素子を設けて構成されたもの である。すなわち、互いに向き合うように対向配置された一対の基板間を既述のよう に、本発明のフォトスぺーサ一の製造方法により作製されたフォトスぺーサ一で所定 幅に規制し、規制された間隙に液晶材料を封入 (封入部位を液晶層と称する。)して 構成されており、液晶層の厚さ(セル厚)が所望の均一厚に保持されるようになってい る。  The liquid crystal display device of the present invention is configured by providing the liquid crystal display element of the present invention. In other words, as described above, a space between a pair of substrates disposed so as to face each other is regulated to a predetermined width by a photospacer produced by the method for producing a photospacer of the present invention, and a regulated gap is formed. The liquid crystal material is encapsulated (the encapsulated portion is referred to as a liquid crystal layer), and the thickness (cell thickness) of the liquid crystal layer is maintained at a desired uniform thickness.
[0149] 液晶表示装置における液晶表示モードとしては、 STN型、 TN型、 GH型、 ECB型 、強誘電性液晶、反強誘電性液晶、 VA型、 IPS型、 OCB型、 ASM型、その他種々 のものが好適に挙げられる。中でも、本発明の液晶表示装置においては、最も効果 的に本発明の効果を奏する観点から、液晶セルのセル厚の変動により表示ムラを起 こし易い表示モードが望ましぐセル厚が 2〜4 μ mである VA型表示モード、 IPS型 表示モード、 OCB型表示モードに構成されるのが好ま 、。 [0149] As the liquid crystal display mode in the liquid crystal display device, STN type, TN type, GH type, ECB type, ferroelectric liquid crystal, antiferroelectric liquid crystal, VA type, IPS type, OCB type, ASM type, and other various types Are preferably mentioned. In particular, in the liquid crystal display device of the present invention, from the viewpoint of exhibiting the effect of the present invention most effectively, a display mode in which a display mode that easily causes display unevenness due to the variation of the cell thickness of the liquid crystal cell is desired is 2 to 4. VA type display mode that is μm, IPS type It is preferable to be configured to display mode, OCB type display mode.
[0150] 本発明の液晶表示装置の基本的な構成態様としては、 (a)薄膜トランジスタ (TFT) 等の駆動素子と画素電極 (導電層)とが配列形成された駆動側基板と、対向電極 (導 電層)を備えた対向基板とをフォトスぺーサーを介在させて対向配置し、その間隙部 に液晶材料を封入して構成したもの、 (b)駆動基板と、対向電極 (導電層)を備えた 対向基板とをフォトスぺーサーを介在させて対向配置し、その間隙部に液晶材料を 封入して構成したもの、等が挙げられ、本発明の液晶表示装置は、各種液晶表示機 器に好適に適用することができる。  [0150] The basic configuration of the liquid crystal display device of the present invention includes: (a) a driving side substrate in which driving elements such as thin film transistors (TFTs) and pixel electrodes (conductive layers) are arranged; and a counter electrode ( (B) A drive substrate and a counter electrode (conducting layer). The liquid crystal display device of the present invention can be applied to various liquid crystal display devices, such as a device in which a counter substrate provided is opposed to each other with a photospacer interposed, and a liquid crystal material is sealed in the gap portion. It can be suitably applied.
[0151] 液晶表示装置については、例えば「次世代液晶ディスプレイ技術(内田龍男編集、 側工業調査会、 1994年発行)」に記載がある。本発明の液晶表示装置には、本発明 の液晶表示素子を備える以外に特に制限はなぐ例えば前記「次世代液晶ディスプ レイ技術」に記載された種々の方式の液晶表示装置に構成することができる。中でも 特に、カラー TFT方式の液晶表示装置を構成するのに有効である。カラー TFT方式 の液晶表示装置については、例えば「カラー TFT液晶ディスプレイ(共立出版 (株)、 1996年発行)」に記載がある。  [0151] The liquid crystal display device is described, for example, in "Next-generation liquid crystal display technology (edited by Tatsuo Uchida, side industry research committee, 1994)". The liquid crystal display device of the present invention is not particularly limited except that it includes the liquid crystal display element of the present invention. For example, the liquid crystal display device of the various types described in the “next-generation liquid crystal display technology” can be configured. . In particular, it is effective for constructing a color TFT liquid crystal display device. The color TFT liquid crystal display device is described, for example, in “Color TFT liquid crystal display (Kyoritsu Publishing Co., Ltd., issued in 1996)”.
[0152] 本発明の液晶表示装置は、既述の本発明の液晶表示素子を備える以外は、電極 基板、偏光フィルム、位相差フィルム、ノ ックライト、スぺーサ一.視野角補償フィルム 、反射防止フィルム、光拡散フィルム、防眩フィルムなどの様々な部材を用いて一般 的に構成できる。これら部材については、例えば「'94液晶ディスプレイ周辺材料 'ケ ミカルズの巿場(島健太郎、(株)シーエムシー、 1994年発行)」、「2003液晶関連巿 場の現状と将来展望 (下巻)(表良吉、(株)富士キメラ総研、 2003等発行)」に記載 されている。  [0152] The liquid crystal display device of the present invention includes an electrode substrate, a polarizing film, a retardation film, a knocklight, a spacer, a viewing angle compensation film, and an antireflection film, except that the liquid crystal display device of the present invention described above is provided. It can be generally constructed using various members such as a film, a light diffusion film, and an antiglare film. As for these materials, for example, “'94 Liquid Crystal Display Peripheral Materials” Chemicals' Kayaba (Kentaro Shima, CMC Co., Ltd., published in 1994), “2003 Current Status and Future Prospects for Liquid Crystal-related Yakuhin (Volume 2) ( Ryoyoshi Omotesaki, Fuji Chimera Research Institute, Inc., 2003, etc.) ”.
[0153] なお、日本出願 2006— 068237の開示は、その全体力 参照により本明細書に取 り込まれる。また、本明細書に記載された全ての文献、特許出願、及び技術規格は、 個々の文献、特許出願、及び技術規格が参照により取り込まれることが具体的かつ 個々に記された場合と同程度に、本明細書中に参照により取り込まれる。  [0153] The disclosure of Japanese application 2006—068237 is incorporated herein by reference to its overall strength. In addition, all documents, patent applications, and technical standards described in this specification are the same as when individual documents, patent applications, and technical standards are specifically and individually described to be incorporated by reference. Which is incorporated herein by reference.
[0154] 以下、本発明を実施例により更に具体的に説明するが、本発明はその主旨を越え ない限り、以下の実施例に限定されるものではない。なお、特に断りのない限り、「部 」は質量基準である。 [0154] Hereinafter, the present invention will be described more specifically with reference to examples. However, the present invention is not limited to the following examples unless it exceeds the gist of the present invention. Unless otherwise noted, “Part "Is based on mass.
[0155] 本実施例では、転写法及び LEDバックライトの組合せを中心に詳細に述べるが、 本発明においてはスリットコーターなどを用いた塗布法により実施してもよぐまた、バ ックライトは冷陰極管を用いて構成してもよ 、。  [0155] In this example, the combination of the transfer method and the LED backlight will be described in detail. However, in the present invention, it may be performed by a coating method using a slit coater or the like. It can be configured with a tube.
[0156] (実施例 1) :転写法  [Example 1]: Transfer method
以下に示すようにして、図 1に示すように構成された MVAモードの液晶表示装置を 作製した。  As shown below, an MVA mode liquid crystal display device configured as shown in FIG. 1 was produced.
一力ラーフィルタ基板の作製  Making a first-rate filter substrate
〈感光性樹脂転写材料の作製〉  <Production of photosensitive resin transfer material>
厚さ 75 μ mのポリエチレンテレフタレートフィルム仮支持体(PET仮支持体)の上に 、スリット状ノズルを用いて、下記処方 HIからなる熱可塑性榭脂層用塗布液を塗布、 乾燥させて熱可塑性榭脂層を形成した。次に、この熱可塑性榭脂層上に下記処方 P 1からなる中間層用塗布液を塗布、乾燥させて中間層(酸素遮断膜)を積層した。こ の中間層上に更に、下記表 1 (転写法)に記載の組成よりなる着色感光性榭脂組成 物 K1を塗布、乾燥させて感光性榭脂組成物層を積層した。このようにして、 PET仮 支持体の上に、乾燥膜厚が 15 mの熱可塑性榭脂層と乾燥膜厚が 1. 6 mの中間 層と乾燥膜厚が 2. 4 mの感光性榭脂組成物層を設け、感光性榭脂組成物層上に は保護フィルム(厚さ 12 μ mポリプロピレンフィルム)を圧着した。  Using a slit-like nozzle on a 75 μm thick polyethylene terephthalate film temporary support (PET temporary support), apply a thermoplastic resin coating solution consisting of the following formulation HI, and dry it to make the thermoplastic A resin layer was formed. Next, the intermediate layer (oxygen barrier film) was laminated on the thermoplastic resin layer by applying and drying an intermediate layer coating solution having the following formulation P1. On this intermediate layer, a colored photosensitive resin composition K1 having the composition described in the following Table 1 (transfer method) was applied and dried to laminate a photosensitive resin composition layer. In this way, a thermoplastic resin layer with a dry film thickness of 15 m, an intermediate layer with a dry film thickness of 1.6 m, and a photosensitive film with a dry film thickness of 2.4 m on the PET temporary support. A fat composition layer was provided, and a protective film (12 μm thick polypropylene film) was pressure-bonded onto the photosensitive resin composition layer.
[0157] [表 1] [0157] [Table 1]
Figure imgf000040_0001
Figure imgf000040_0001
[0158] 上記のようにして、仮支持体と熱可塑性樹脂層と中間層(酸素遮断膜)とブラック (K )の感光性榭脂組成物層とが積層されて積層体に構成された感光性転写材料を作 製した (以下、感光性榭脂転写材料 K1と称する)。 As described above, the temporary support, the thermoplastic resin layer, the intermediate layer (oxygen barrier film), and the photosensitive resin composition layer of black (K) are laminated to form a photosensitive body. A photosensitive transfer material was prepared (hereinafter referred to as photosensitive resin transfer material K1).
[0159] 〔熱可塑性榭脂層用塗布液の処方 Hl〕  [0159] [Prescription Hl of coating solution for thermoplastic resin layer]
•メタノーノレ 1M  • Metanore 1M
'プロピレングリコールモノメチルエーテルアセテート … 6. 4部  'Propylene glycol monomethyl ether acetate… 6. 4 parts
•メチルェチルケトン ...52. 4部  • Methyl ethyl ketone ... 52. 4 parts
'メチルメタタリレート /2—ェチルへキシルアタリレート/ベンジルメタタリレート/メタ クリル酸共重合体 … 5. 83部  'Methyl methacrylate // 2-ethylhexyl acrylate / benzyl methacrylate / methacrylic acid copolymer… 5. 83 parts
〔共重合比(モル比) =55Zll. 7/4. 5/28. 8、質量平均分子量 = 10万、 Tg [Copolymerization ratio (molar ratio) = 55Zll. 7/4. 5/28. 8, Mass average molecular weight = 100,000, Tg
70°C] 'スチレン Zアクリル酸共重合体 •••13. 670 ° C] 'Styrene Z acrylic acid copolymer ••• 13.6
〔共重合比(モル比) =63/37,質量平均分子量 = 1万、 Tg= 100°C] [Copolymerization ratio (molar ratio) = 63/37, mass average molecular weight = 10,000, Tg = 100 ° C]
•2, 2 ビス [4 (メタクリロキシポリエトキシ)フエ-ル]プロパン (新中村ィ匕学工業 ( 株)製) … 9. 1部  • 2, 2 Bis [4 (Methacryloxypolyethoxy) phenol] propane (manufactured by Shin-Nakamura Engineering Co., Ltd.)… 9. 1 part
•界面活性剤 1 … 0. 54部  • Surfactant 1… 0.54 parts
[0160] *界面活性剤 1 :  [0160] * Surfactant 1:
メガファック F 780 F (大日本インキ化学工業 (株)製)  Mega Fuck F 780 F (Dainippon Ink Chemical Co., Ltd.)
し鶴  Shizuru
•C F CH CH OCOCH=CH (40部)と H (OCH (CH ) CH ) OCOCH = C • C F CH CH OCOCH = CH (40 parts) and H (OCH (CH) CH) OCOCH = C
6 13 2 2 2 3 2 76 13 2 2 2 3 2 7
H (55部)と H (OCH CH ) OCOCH = CH (5部)との共重合体(質量平均分子量Copolymer of H (55 parts) and H (OCH CH) OCOCH = CH (5 parts) (mass average molecular weight
2 2 2 7 2 2 2 2 7 2
3万) … 30部  30,000) ... 30 copies
•メチルェチルケトン … 70部  • Methyl ethyl ketone… 70 parts
[0161] 〔中間層用塗布液の処方 Pl〕  [0161] [Prescription Pl of intermediate layer coating solution]
'ポリビュルアルコール … 2. 1部  'Polybulol alcohol… 2. 1 part
(PVA— 205 (鹼ィ匕率 =88%)、(株)クラレ製)  (PVA-205 (Niety rate = 88%), manufactured by Kuraray Co., Ltd.)
•ポリビュルピロリドン … 0. 95部  • Polybulol pyrrolidone… 0.95 parts
(PVP、 K- 30 ;アイエスピー ·ジャパン株式会社製)  (PVP, K-30; made by IPS Japan Ltd.)
•メタノーノレ - --44¾  Methanore---44¾
•蒸留水 一53部  • 53 parts distilled water
[0162] 次に、得られた感光性榭脂転写材料 K1の作製にぉ ヽて用いた前記着色感光性 榭脂組成物 K1を、前記表 1 (転写法)に記載の組成よりなる着色感光性榭脂組成物 Rl、 G1及び B1に代えたこと以外は、上記と同様の方法により、感光性榭脂転写材 料 Rl、 G1及び B1を作製した。  [0162] Next, the colored photosensitive resin composition K1 used for the production of the obtained photosensitive resin transfer material K1 was colored photosensitive resin comprising the composition described in Table 1 (transfer method). Photosensitive resin transfer materials Rl, G1, and B1 were prepared in the same manner as described above except that the photosensitive resin compositions R1, G1, and B1 were replaced.
[0163] 〈カラーフィルタ基板の作製〉 [0163] <Production of color filter substrate>
-ブラック (K)画像の形成 - -Black (K) image formation-
680 X 880mmサイズの無アルカリガラス基板を、シャワーにより 25°Cに調整したガ ラス洗浄剤液を 20秒間吹き付けながらナイロン毛を有する回転ブラシで洗浄し、純 水シャワー洗浄した後、シャワーによりシランカップリング液 (N— β - (アミノエチル) - γ—ァミノプロピルトリメトキシシラン 0. 3質量%水溶液;商品名: ΚΒΜ603、信越 化学工業 (株)製)を 20秒間吹き付け、純水シャワー洗浄した。洗浄後、このガラス基 板を基板予備加熱装置で 100°Cで 2分間加熱した。 A non-alkali glass substrate of 680 X 880 mm size was washed with a rotating brush with nylon bristles while spraying a glass detergent solution adjusted to 25 ° C by shower for 20 seconds, washed with pure water, and then washed with a silane cup. Ring solution (N— β-(aminoethyl) -γ-Aminopropyltrimethoxysilane 0.3 mass% aqueous solution; trade name: ΚΒΜ603, manufactured by Shin-Etsu Chemical Co., Ltd.) was sprayed for 20 seconds and washed with pure water. After cleaning, the glass substrate was heated at 100 ° C. for 2 minutes with a substrate preheating device.
[0164] 次に、感光性榭脂転写材料 K1の保護フィルムを剥離後、露出した感光性榭脂組 成物層が上記の 100°Cで 2分間加熱したガラス基板の表面と接するように重ね合わ せ、ラミネーター LamicII型〔(株)日立インダストリィズ製〕を用いて、ゴムローラ温度 1 30°C、線圧 100NZcm、搬送速度 2. 2mZ分の条件にてラミネートした。次いで、 P ET仮支持体を剥離してガラス基板上に転写した。  [0164] Next, after peeling off the protective film of the photosensitive resin transfer material K1, the exposed photosensitive resin composition layer is overlaid so as to contact the surface of the glass substrate heated at 100 ° C for 2 minutes. Laminator Lamic II (manufactured by Hitachi Industries, Ltd.) was used for lamination under conditions of a rubber roller temperature of 130 ° C., a linear pressure of 100 NZcm, and a conveying speed of 2.2 mZ. Next, the PET temporary support was peeled off and transferred onto a glass substrate.
[0165] 次に、超高圧水銀灯を有するプロキシミティー型露光機 (日立ハイテク電子ェンジ ニアリング (株)製)を用い、マスク(画像パターンを有する石英露光マスク)と、該マス クと熱可塑性榭脂層とが向き合うように配置したガラス基板とを略平行に垂直に立て た状態で、マスク面と感光性榭脂組成物層の中間層に接する側の表面との間の距離 を 200 mに設定し、マスクを介して熱可塑性榭脂層側力も露光量 70mjZcm2でパ ターン露光した。 [0165] Next, using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp, a mask (quartz exposure mask having an image pattern), the mask and thermoplastic resin The distance between the mask surface and the surface on the side of the photosensitive resin composition layer that is in contact with the intermediate layer of the photosensitive resin composition layer is set to 200 m, with the glass substrate placed so that the layers face each other in a vertical state. Then, pattern exposure was performed with the exposure of the thermoplastic resin layer side force of 70 mjZcm 2 through the mask.
[0166] 次に、トリエタノールアミン系現像液(トリエタノールァミン 30質量0 /0含有、商品名: T — PD2、富士写真フィルム株式会社製を、純水で 12倍 (T—PD2を 1質量部と純水 を 11質量部の割合で混合)に希釈した液)を 30°C50秒、フラットノズル圧力 0. 04M Paでシャワー現像し熱可塑性榭脂層と中間層を除去した。引き続き、この基板上面 にエアを吹きかけて液切りした後、純水をシャワーにより 10秒間吹き付け、純水シャ ヮー洗浄し、エアを吹きかけて基板上の液だまりを減らした。 [0166] Next, triethanol amine developing solution (triethanolamine § Min 30 mass 0/0 containing, trade name: T - PD2, manufactured by Fuji Photo Film Co., 12 times with pure water (T-PD2 1 The solution obtained by diluting 11 parts by mass of pure water with 11 parts by mass) was developed with shower at 30 ° C. for 50 seconds and a flat nozzle pressure of 0.04 MPa to remove the thermoplastic resin layer and the intermediate layer. Subsequently, air was blown onto the upper surface of the substrate to drain the liquid, and then pure water was sprayed for 10 seconds in a shower to clean the pure water, and air was blown to reduce the liquid pool on the substrate.
引き続き炭酸 Na系現像液 (0. 38モル Zリットルの炭酸水素ナトリウム、 0. 47モル Zリットルの炭酸ナトリウム、 5質量0 /0のジブチルナフタレンスルホン酸ナトリウム、 Ύ二 オン界面活性剤、消泡剤、安定剤含有、商品名: T CD1、富士写真フィルム株式 会社製を純水で 5倍に希釈した液)を用い、 29°C30秒、コーン型ノズル圧力 0. 15M Paでシャワー現像し感光性榭脂組成物層を現像しパターユング画像を得た。 Continuing carbonate Na based developer (0.38 mol Z l sodium bicarbonate, sodium carbonate 0.47 mol Z l, dibutyl sodium naphthalene sulfonate 5 wt 0/0, Ύ two on surfactants, defoamers , Containing stabilizer, trade name: T CD1, manufactured by Fuji Photo Film Co., Ltd. diluted 5 times with pure water), shower developed at 29 ° C for 30 seconds, cone type nozzle pressure 0.15 MPa The resin composition layer was developed to obtain a patterning image.
弓 Iき続き洗浄剤 (燐酸塩 ·珪酸塩 ·ノ-オン界面活性剤 ·消泡剤 ·安定剤含有、商品 名: T— SD1 富士写真フィルム株式会社製)を純水で 10倍に希釈して用い、 33°C 20秒、コーン型ノズル圧力 0. 02MPaでシャワーで吹きかけ、更にナイロン毛を有す 回転ブラシにより形成された画像を擦って残渣除去を行 ヽ、ブラック (K)の画像 16 ( K画像をブラックマトリックスと称することがある。 )を得た。 Bow I Continued Detergent (Phosphate · Silicate · Nonionic Surfactant · Antifoam · Stabilizer Contains, Product Name: T—SD1 manufactured by Fuji Photo Film Co., Ltd.) diluted 10 times with pure water Used at 33 ° C for 20 seconds, sprayed with a cone-type nozzle pressure of 0.02 MPa, showered with nylon hair The residue formed by rubbing the image formed by the rotating brush was removed to obtain a black (K) image 16 (K image may be referred to as a black matrix).
その後、該基板に対して両面力も超高圧水銀灯で 500miZcm2の露光量でポスト 露光後、 220°C、 15分間熱処理した。 Thereafter, the substrate was post-exposed with an exposure amount of 500 miZcm 2 with an ultra-high pressure mercury lamp and then heat-treated at 220 ° C. for 15 minutes.
[0167] その後、 K画像 16が形成されたガラス基板 11を再び、上記のようにブラシ洗浄し、 純水シャワー洗浄した後、シランカップリング液は使用せずに、基板予備加熱装置に より 100°Cで 2分間加熱した。 [0167] After that, the glass substrate 11 on which the K image 16 was formed was again cleaned with a brush as described above, washed with pure water, and then washed with a substrate preheating device without using a silane coupling solution. Heated at ° C for 2 minutes.
[0168] レッド (R)画素の形成 [0168] Formation of red (R) pixels
前記 K画像 16が形成されたガラス基板 11に、上記より得た感光性榭脂転写材料 R 1を用い、前記 K画像 16の形成と同様の工程を行ない、ガラス基板 11の K画像 16が 形成されている側にレッド画素 (R画素)を形成した。但し、露光工程での露光量は 4 OmjZcm2とし、炭酸 Na系現像液によるシャワー現像は 35°Cで 35秒間とした。 なお、 R画素の厚みは 2. O /z mであり、 C. I.ビグメント 'レッド(C. I. P. R. ) 254、 C. I. P. R. 177の塗布量はそれぞれ。.
Figure imgf000043_0001
0. 22gZm2であった。
Using the photosensitive resin transfer material R 1 obtained above on the glass substrate 11 on which the K image 16 is formed, the same process as the formation of the K image 16 is performed, and the K image 16 on the glass substrate 11 is formed. A red pixel (R pixel) was formed on the side where it was formed. However, the exposure amount in the exposure process was 4 OmjZcm 2, and shower development with a sodium carbonate-based developer was performed at 35 ° C. for 35 seconds. The thickness of the R pixel is 2. O / zm, and the amount of CI pigment 'Red (CIPR) 254 and CIPR 177 applied respectively. .
Figure imgf000043_0001
0. 22gZm was 2.
その後、 R画素が形成されたガラス基板 11を再び、上記のように洗浄剤を用いてブ ラシ洗浄し、純水でシャワー洗浄した後、シランカップリング液は使用せずに、基板予 備加熱装置により 100°Cで 2分間加熱した。  After that, the glass substrate 11 on which the R pixel is formed is brush-washed again using the cleaning agent as described above, shower-washed with pure water, and then pre-heated without using a silane coupling solution. The apparatus was heated at 100 ° C for 2 minutes.
[0169] —グリーン (G)画素の形成— [0169] —Formation of Green (G) Pixel—
次に、上記より得た感光性榭脂転写材料 G1を用い、前記 K画像 16の形成と同様 の工程を行な 、、ガラス基板 11の K画像 16及び R画素等が形成されて 、る側にダリ ーン画素(G画素)を形成した。但し、露光工程での露光量は 40mjZcm2、炭酸 Na 系現像液によるシャワー現像は 34°Cで 45秒間とした。 Next, using the photosensitive resin transfer material G1 obtained above, the same process as the formation of the K image 16 is performed, and the K image 16 and the R pixel of the glass substrate 11 are formed. A dark pixel (G pixel) was formed on the substrate. However, the exposure amount in the exposure process was 40 mjZcm 2 , and shower development with a sodium carbonate-based developer was 34 ° C. for 45 seconds.
なお、 G画素の厚みは 2. O /z mであり、 C. I.ビグメント 'グリーン(C. I. P. G. ) 36 、 C. I.ビグメント 'イェロー(C. I. P. Y. ) 150の塗布量はそれぞれ 1.
Figure imgf000043_0002
0 . 48gZm2であった。
The thickness of the G pixel is 2. O / zm. The application amount of CI pigment 'Green (CIPG) 36 and CI pigment' Yellow (CIPY) 150 is 1.
Figure imgf000043_0002
It was 0.48 gZm 2 .
その後、 R画素及び G画素が形成されたガラス基板 11を再び、上記のように洗浄剤 を用いてブラシ洗浄し、純水でシャワー洗浄した後、シランカップリング液は使用せず に、基板予備加熱装置により 100°Cで 2分間加熱した。 [0170] ブルー(B)画素の形成 After that, the glass substrate 11 on which the R pixel and the G pixel are formed is again brush-cleaned with the cleaning agent as described above, shower-washed with pure water, and without using a silane coupling liquid, Heated at 100 ° C for 2 minutes with a heating device. [0170] Formation of blue (B) pixel
次に、上記より得た感光性榭脂転写材料 B1を用い、前記 K画像 16の形成と同様 の工程を行な!ヽ、ガラス基板 11の K画像 16並びに R画素及び G画素が形成されて いる側にブルー画素(B画素)を形成した。但し、露光工程での露光量は 30miZcm 炭酸 Na系現像液によるシャワー現像は 36°Cで 40秒間とした。  Next, using the photosensitive resin transfer material B1 obtained above, the same process as the formation of K image 16 is performed! On the other hand, blue pixels (B pixels) were formed on the side of the glass substrate 11 where the K image 16 and R and G pixels were formed. However, the amount of exposure in the exposure process was set at 40 ° C for 36 seconds at 36 ° C for shower development with 30miZcm Na carbonate developer.
なお、 B画素の厚みは 2. O /z mであり、 C. I.ビグメント 'ブルー(C. I. P. B. ) 15 : 6、 C. I.ビグメント 'バイオレット(C. I. P. V. ) 23の塗布量はそれぞれ 0. 63g/m2 、 0. 07g/m2であった。 The thickness of the B pixel is 2. O / zm. The application amount of CI pigment 'Blue (CIPB) 15: 6 and CI pigment' Violet (CIPV) 23 is 0.63 g / m 2 and 0.07 g / respectively. It was m 2.
[0171] その後、 R、 G, Bの各画素が形成されたガラス基板 11を、 240°Cで 50分間ベータ して、カラーフィルタ 12を得た。 [0171] Thereafter, the glass substrate 11 on which the R, G, and B pixels were formed was beta-treated at 240 ° C for 50 minutes to obtain a color filter 12.
更にその上に透明電極として、 ITO (Indium Tin Oxide)膜 13をスパッタリングにより 形成し、カラーフィルタ基板 10を得た。  Further, an ITO (Indium Tin Oxide) film 13 was formed thereon as a transparent electrode by sputtering, and a color filter substrate 10 was obtained.
[0172] ここで、前記表 1に記載の着色感光性榭脂組成物 Kl、 Rl、 Gl、 B1の調製につい て説明する。 [0172] Here, the preparation of the colored photosensitive resin compositions Kl, Rl, Gl, and B1 shown in Table 1 will be described.
〈着色感光性榭脂組成物 K1の調製〉  <Preparation of colored photosensitive resin composition K1>
着色感光性榭脂組成物 K1は、前記表 1に記載の量の K顔料分散物 1、プロピレン グリコールモノメチルエーテルアセテートをは力り取り、温度 24°C (± 2°C)で混合して 150r.p.m.で 10分間攪拌し、次いで、前記表 1に記載の量のメチルェチルケトン、バ インダー 1、ハイドロキノンモノメチルエーテル、 DPHA液、 2, 4 ビス(トリクロロメチ ル)— 6— [4'— (N, N ビスエトキシカルボ-ルメチル)アミノー 3'—ブロモフエ-ル ]— s トリァジン、界面活性剤 1をは力り取り、温度 25°C (± 2°C)でこの順に添加して 、温度 40°C (± 2°C)、 150r.p.m.で 30分間攪拌することによって得た。  Colored photosensitive resin composition K1 is prepared by removing K pigment dispersion 1 and propylene glycol monomethyl ether acetate in the amounts shown in Table 1 above and mixing at a temperature of 24 ° C (± 2 ° C). Stir at .pm for 10 minutes, then the amount of methyl ethyl ketone, binder 1, hydroquinone monomethyl ether, DPHA solution, 2, 4 bis (trichloromethyl) — 6— [4'— (N, N bisethoxycarboromethyl) amino-3'-bromophenol] —s Triazine, Surfactant 1 is removed and added in this order at a temperature of 25 ° C (± 2 ° C). It was obtained by stirring at 40 ° C. (± 2 ° C.) and 150 rpm for 30 minutes.
[0173] 前記表 1に記載の組成物中の各組成の詳細は以下の通りである。なお、界面活性 剤 1につ!/、ては既述の通りである。 [0173] Details of each composition in the composition described in Table 1 are as follows. Surfactant 1! / Is as described above.
*K顔料分散物 1の組成  * Composition of K pigment dispersion 1
'カーボンブラック… 13. 1部  'Carbon black… 13. 1 copy
(Special Black 250、デグッサ社製)  (Special Black 250, manufactured by Degussa)
•5— [3—ォキソ 2— [4— [3, 5 ビス(3 ジェチルァミノプロピルアミノカルボ- ル)フエ-ル]ァミノカルボ-ル]フエ-ルァゾ] -ブチロイルァミノべンズイミダゾロン- · -• 5— [3-Oxo 2— [4— [3, 5 Bis (3 Jetylaminopropylaminocarbo- Le) Huel] Amino Carbo] Fueru Lazo] -Butylo Lamino Bennes Imidazolone--
0. 65咅 0. 65 咅
•ポリマー〔ベンジルメタタリレート Zメタクリル酸( = 72Z28 [モル比])のランダム共 重合物(質量平均分子量 37, 000)〕· -6. 72部  • Polymer [Random copolymer of benzyl metatalylate Z methacrylic acid (= 72Z28 [molar ratio]) (mass average molecular weight 37,000)]-6.72 parts
'プロピレングリコールモノメチルエーテルアセテート · · · 79. 53部  'Propylene glycol monomethyl ether acetate 79.53 parts
[0174] *バインダー 1の組成 [0174] * Binder 1 composition
•ポリマー〔ベンジルメタタリレート Zメタクリル酸( = 78Z22 [モル比])のランダム共 重合物(質量平均分子量 40, 000) " 27部  • Random copolymer (mass average molecular weight 40,000) of polymer (benzyl metatalylate Z methacrylic acid (= 78Z22 [molar ratio])) 27 parts
'プロピレングリコールモノメチルエーテルアセテート · · · 73部  'Propylene glycol monomethyl ether acetate ··· 73 parts
* DPHA液の組成  * Composition of DPHA solution
'ジペンタエリスリトールへキサアタリレート(重合禁止剤 MEHQを 500ppm含有、 商品名: KAYARAD DPHA,日本化薬 (株)製)… 76部  'Dipentaerythritol hexaatalylate (containing 500ppm polymerization inhibitor MEHQ, trade name: KAYARAD DPHA, Nippon Kayaku Co., Ltd.) ... 76 parts
•プロピレングリコールモノメチルエーテルアセテート · · · 24部  Propylene glycol monomethyl ether acetate · · · 24 parts
[0175] 〈着色感光性榭脂組成物 R1の調製〉  <Preparation of colored photosensitive resin composition R1>
着色感光性榭脂組成物 R1は、前記表 1 (転写法)に記載の量の R顔料分散物 1、 R 顔料分散物 2、及びプロピレングリコールモノメチルエーテルアセテートをは力り取り、 温度 24°C (± 2°C)で混合して 150r.p.m.で 10分間攪拌し、次いで、前記表 1に記載 の量のメチルェチルケトン、バインダー 2、 DPHA液、 2 トリクロロメチルー 5—(p— スチリルスチリル)ー1, 3, 4 ォキサジァゾール、 2, 4 ビス(トリクロロメチル)ー6— [4'— (N, N ビスエトキシカルボ-ルメチル)アミノー 3'—ブロモフエ-ル]— s トリ ァジン、及びフエノチアジンをは力り取り、温度 24°C (± 2°C)でこの順に添カ卩して 15 Or.p.m.で 10分間攪拌し、更に、前記表 1に記載の量の界面活性剤 1をは力り取り、 温度 24°C (士 2°C)で添カ卩して 30r.p.m.で 30分間攪拌し、ナイロンメッシュ # 200で 濾過することによって得た。  The colored photosensitive resin composition R1 is made up of R pigment dispersion 1, R pigment dispersion 2, and propylene glycol monomethyl ether acetate in the amounts described in Table 1 (transfer method), at a temperature of 24 ° C. (± 2 ° C) and stirred at 150 rpm for 10 minutes, then the amount of methyl ethyl ketone, binder 2, DPHA solution, 2 trichloromethyl-5- (p-styryl) listed in Table 1 above. Styryl) -1,3,4 oxadiazole, 2,4 bis (trichloromethyl) -6— [4 '— (N, N bisethoxycarboromethyl) amino-3′-bromophenol] —s triazine, and phenothiazine Then, the mixture is added in this order at a temperature of 24 ° C (± 2 ° C), stirred at 15 Or.pm for 10 minutes, and the surfactant 1 in the amount shown in Table 1 is further removed. Depressurize and add at a temperature of 24 ° C (2 ° C) and stir at 30 rpm for 30 minutes. It was obtained by the over to.
[0176] なお、前記表 1に記載の組成物 R1中の各組成の詳細は以下の通りである。また、 DPHA液及び界面活性剤 1の組成は各々、前記着色感光性榭脂組成物 K1の場合 と同様である。  [0176] The details of each composition in the composition R1 described in Table 1 are as follows. The compositions of the DPHA solution and the surfactant 1 are the same as those of the colored photosensitive resin composition K1.
*R顔料分散物 1の組成 •C. I.ビグメント ·レッド 254· "8. 0部 * R Composition of Pigment Dispersion 1 • CI Pigment Red 254 · “8.0
•5— [3—ォキソ 2— [4- [3, 5-ビス(3 ジェチルァミノプロピルアミノカルボ- ル)フエ-ル]ァミノカルボ-ル]フエ-ルァゾ] -ブチロイルァミノべンズイミダゾロン- · - 0. 8咅  • 5— [3-Oxo 2— [4- [3,5-Bis (3 Jetylaminopropylaminocarbole) phenol] Aminocarbol] Fuelazo] -Butyloylaminobenzimidazolone -0. 8 咅
•ポリマー〔ベンジルメタタリレート Zメタクリル酸( = 72Z28 [モル比])のランダム共 重合物(質量平均分子量 37, 000)〕· -6. 4部  • Polymer [Random copolymer of benzyl metatalate Z methacrylic acid (= 72Z28 [molar ratio]) (mass average molecular weight 37, 000)]-6.4 parts
•プロピレングリコールモノメチルエーテルアセテート · · · 84. 8部  • Propylene glycol monomethyl ether acetate · · · 84. 8 parts
[0177] *R顔料分散物 2の組成 [0177] * R Composition of Pigment Dispersion 2
•C. I.ビグメント ·レッド 177· ·· 18部  • C. I. Pigment · Red 177 · · · 18 copies
•ポリマー〔ベンジルメタタリレート Ζメタクリル酸( = 72Ζ28 [モル比])のランダム共 重合物(質量平均分子量 37, 000)〕一12部  • 1 part of polymer (benzyl metatalylate Ζ methacrylic acid (= 72Ζ28 [molar ratio]) random copolymer (mass average molecular weight 37, 000))
•プロピレングリコールモノメチルエーテルアセテート' · · 70部  • Propylene glycol monomethyl ether acetate '· · 70 parts
*バインダー 2の組成  * Binder 2 composition
'ベンジルメタタリレート Ζメタクリル酸 Ζメチルメタタリレート( = 38Ζ25Ζ37 [モル 比])のランダム共重合物(質量平均分子量 30, 000) · · · 27部  'Random copolymer of benzyl metatalylate Ζ methacrylic acid Ζ methyl metatalylate (= 38 Ζ 25 Ζ 37 [molar ratio]) (mass average molecular weight 30, 000) · · · 27 parts
'プロピレングリコールモノメチルエーテルアセテート · · · 73部  'Propylene glycol monomethyl ether acetate ··· 73 parts
[0178] 〈着色感光性榭脂組成物 G1の調製〉 <Preparation of colored photosensitive resin composition G1>
着色感光性榭脂組成物 G1は、前記表 1 (転写法)に記載の量の G顔料分散物 1、 Υ顔料分散物 1、及びプロピレングリコールモノメチルエーテルアセテートをはかり取 り、温度 24°C (± 2°C)で混合して 150r.p.m.で 10分間攪拌し、次いで、前記表 1に 記載の量のメチルェチルケトン、シクロへキサノン、バインダー 1、 DPHA液、 2—トリ クロロメチルー 5—(p—スチリルスチリル)ー1, 3, 4 ォキサジァゾール、 2, 4 ビス (トリクロロメチル) 6— [4'— (N, N—ビスエトキシカルボ-ルメチル)ァミノ一 3'—ブ ロモフエ-ル]—s—トリァジン、及びフエノチアジンをは力り取り、温度 24°C (± 2°C) でこの順に添カ卩して 150r.p.m.で 30分間攪拌し、更に、前記表 1に記載の量の界面 活性剤 1をは力り取り、温度 24°C (± 2°C)で添加して 30r.p.m.で 5分間攪拌し、ナイ ロンメッシュ # 200で濾過することによって得た。  Colored photosensitive resin composition G1 is obtained by weighing G pigment dispersion 1, cocoon pigment dispersion 1, and propylene glycol monomethyl ether acetate in the amounts described in Table 1 (Transfer method), at a temperature of 24 ° C ( ± 2 ° C) and stirred at 150 rpm for 10 minutes, and then the amounts of methyl ethyl ketone, cyclohexanone, binder 1, DPHA solution, 2-trichloromethyl-5- ( p-styrylstyryl) -1, 3, 4 oxadiazole, 2, 4 bis (trichloromethyl) 6— [4 '— (N, N-bisethoxycarboromethyl) amino 1 3′-bromophenol] —s -Triazine and phenothiazine were removed by force, added in this order at a temperature of 24 ° C (± 2 ° C), stirred at 150 rpm for 30 minutes, and then the surface activity in the amount shown in Table 1 above. Remove agent 1 and add it at a temperature of 24 ° C (± 2 ° C) and stir at 30 rpm for 5 minutes. It was obtained by filtration Mesh # 200.
[0179] なお、前記表 1に記載の組成物 G1中の各組成の詳細は以下の通りである。また、 バインダー 1、 DPHA液、及び界面活性剤 1の組成は、前記着色感光性榭脂組成物 K1の場合と同様である。 [0179] The details of each composition in the composition G1 described in Table 1 are as follows. Also, The composition of the binder 1, the DPHA liquid, and the surfactant 1 is the same as that of the colored photosensitive resin composition K1.
* G顔料分散物 1の組成  * Composition of G pigment dispersion 1
•C. I.ビグメント ·グリーン 36· " 18部  • C. I. Pigment Green 36
•ポリマー〔ベンジルメタタリレート Zメタクリル酸( = 72Z28 [モル比])のランダム共 重合物(質量平均分子量 37, 000)〕一12部  • Random copolymer (mass average molecular weight 37,000) of polymer [benzyl metatalylate Z methacrylic acid (= 72Z28 [molar ratio])] 1 part
'シクロへキサノン… 35部  'Cyclohexanone ... 35 parts
•プロピレングリコールモノメチルエーテルアセテート · · · 35部  Propylene glycol monomethyl ether acetate 35 parts
*Y顔料分散物 1  * Y pigment dispersion 1
商品名: CFエロー ΕΧ3393 (御国色素社製)  Product Name: CF Yellow ΕΧ3393 (Mikuni Color Co., Ltd.)
[0180] 〈着色感光性榭脂組成物 B1の調製〉 <Preparation of colored photosensitive resin composition B1>
着色感光性榭脂組成物 B1は、前記表 1 (転写法)に記載の量の Β顔料分散物 1、 Β 顔料分散物 2、及びプロピレングリコールモノメチルエーテルアセテートをは力り取り、 温度 24°C (± 2°C)で混合して 150r.p.m.で 10分間攪拌し、次いで、前記表 1に記載 の量のメチルェチルケトン、バインダー 3、 DPHA液、 2 トリクロロメチルー 5—(p— スチリルスチリル) 1, 3, 4 ォキサジァゾール、及びフヱノチアジンをは力り取り、 温度 25。C (± 2。C)でこの順に添カ卩して、温度 40。C (± 2。C)で 150r.p.m.で 30分間 攪拌し、更に、前記表 1に記載の量の界面活性剤 1をは力り取り、温度 24°C (± 2°C) で添カ卩して 30r.p.m.で 5分間攪拌し、ナイロンメッシュ # 200で濾過することによって 得た。  Colored photosensitive resin composition B1 is obtained by removing the amount of Pigment Dispersion 1, Pigment Dispersion 2, and Propylene Glycol Monomethyl Ether Acetate in the amounts described in Table 1 (Transfer Method) at a temperature of 24 ° C. (± 2 ° C) and stirred at 150 rpm for 10 minutes, then the amount of methyl ethyl ketone, binder 3, DPHA solution, 2 trichloromethyl-5- (p-styryl) listed in Table 1 above. Stylyl) 1, 3, 4 Oxadiazole and phenothiazine are removed, and the temperature is 25. C (± 2. C) is added in this order, and the temperature is 40. The mixture was stirred at 150 rpm for 30 minutes at C (± 2. C), and then the surfactant 1 in the amount shown in Table 1 above was scraped off and added at a temperature of 24 ° C (± 2 ° C). Then, it was stirred for 5 minutes at 30 rpm and obtained by filtering through nylon mesh # 200.
[0181] なお、前記表 1に記載の組成物 B1中の各組成の詳細は以下の通りである。また、 DPHA液及び界面活性剤 1の組成は、前記着色感光性榭脂組成物 K1の場合と同 様である。  [0181] The details of each composition in the composition B1 described in Table 1 are as follows. The composition of DPHA solution and surfactant 1 is the same as that of the colored photosensitive resin composition K1.
* B顔料分散物 1  * B pigment dispersion 1
商品名: CFブルー EX3357 (御国色素社製)  Product Name: CF Blue EX3357 (Mikuni Color Co., Ltd.)
* B顔料分散物 2  * B Pigment dispersion 2
商品名: CFブルー EX3383 (御国色素社製)  Product Name: CF Blue EX3383 (Mikuni Color Co., Ltd.)
*バインダー 3の組成 'ベンジルメタタリレート Zメタクリル酸 Zメチルメタタリレート( = 36Z22Z42 [モル 比])のランダム共重合物(質量平均分子量 30, 000) · · · 27部 * Binder 3 composition 'Random copolymer of benzyl metatalylate Z methacrylic acid Z methyl metatalylate (= 36Z22Z42 [molar ratio]) (mass average molecular weight 30, 000) · · · 27 parts
'プロピレングリコールモノメチルエーテルアセテート · · · 73部  'Propylene glycol monomethyl ether acetate ··· 73 parts
[0182] スぺーサー用感光性転写シートの作製 [0182] Fabrication of photosensitive transfer sheet for spacers
厚さ 75 μ mのポリエチレンテレフタレートフィルム仮支持体(PET仮支持体)上に、 下記処方 Aカゝらなる熱可塑性榭脂層用塗布液を塗布、乾燥させ、乾燥層厚 6. O ^ m の熱可塑性榭脂層(アルカリ可溶な熱可塑性榭脂層)を形成した。  On a polyethylene terephthalate film temporary support (PET temporary support) with a thickness of 75 μm, apply a coating solution for a thermoplastic resin layer consisting of the following formulation A, dry it, and dry layer thickness 6. O ^ m A thermoplastic resin layer (an alkali-soluble thermoplastic resin layer) was formed.
[0183] 〔熱可塑性榭脂層用塗布液の処方 A〕 [0183] [Formulation A of coating liquid for thermoplastic resin layer]
•メチルメタタリレート /2—ェチルへキシルアタリレート/ベンジルメタタリレート/メタ クリル酸共重合体 … 25. 0部  • Methyl methacrylate / 2-ethyl hexyl acrylate / benzyl methacrylate / methacrylic acid copolymer… 25.0 parts
( = 55/11. 7/4. 5/28. 8 [モル比]、質量平均分子量 90, 000) •スチレン Zアクリル酸共重合体 … 58. 4部  (= 55/11. 7/4. 5/28. 8 [molar ratio], weight average molecular weight 90, 000) • Styrene Z acrylic acid copolymer… 58. 4 parts
( = 63Z37 [モル比]、質量平均分子量 8, 000)  (= 63Z37 [molar ratio], weight average molecular weight 8,000)
•2, 2 ビス〔4— (メタクリロキシポリエトキシ)フエ-ル〕プロパン  • 2, 2 Bis [4- (methacryloxypolyethoxy) phenol] propane
… 39. 0部  … 39. 0 copies
•前記界面活性剤 1 … 10. 0部  • Surfactant 1… 10.0 parts
•メタノーノレ … 90. 0  • Methanore… 90. 0
•1—メトキシ一 2 プロパノール … 51. 0部  • 1—Methoxy-2-propanol… 51.0 parts
•メチルェチルケトン … 700部  • Methyl ethyl ketone: 700 parts
[0184] 次に、形成した熱可塑性榭脂層上に、下記処方 Bカゝらなる中間層用塗布液を塗布 [0184] Next, an intermediate layer coating solution consisting of the following formulation B was applied onto the formed thermoplastic resin layer.
、乾燥させて、乾燥層厚 1. 5 /z mの中間層を積層した。 Then, an intermediate layer having a dry layer thickness of 1.5 / z m was laminated.
[0185] 〔中間層用塗布液の処方 B〕 [Formulation B of coating solution for intermediate layer]
'ポリビュルアルコール … 3. 22部  'Polybulol alcohol… 3. 22 parts
(PVA- 205,鹼化率 80%、(株)クラレ製)  (PVA-205, hatching rate 80%, manufactured by Kuraray Co., Ltd.)
•ポリビュルピロリドン … 1. 49部  • Polybylpyrrolidone… 1. 49 parts
(PVP K 30、アイエスピー 'ジャパン株式会社製)  (PVP K 30, manufactured by ISP Japan Co., Ltd.)
•メタノーノレ … 42. 3咅  • Methanore… 42. 3 咅
'蒸留水 … 524部 [0186] 次に、形成した中間層上に更に、下記表 2に示す処方 1からなる感光性榭脂組成 物層用塗布液を塗布、乾燥させて、乾燥層厚 4. : L mの感光性榭脂組成物層を積 層した。 'Distilled water… 524 parts [0186] Next, a photosensitive resin composition layer coating solution having the formulation 1 shown in Table 2 below was further applied onto the formed intermediate layer and dried to obtain a dry layer thickness of 4 .: L m. A layer of the active resin composition layer was laminated.
[0187] 以上のようにして、 PET仮支持体 Z熱可塑性榭脂層 Z中間層 Z感光性榭脂組成 物層の積層構造 (3層の合計層厚は 11. 6 m)に構成した後、感光性榭脂組成物 層の表面に更に、カバーフィルムとして厚み 12 μ mのポリプロピレン製フィルムをカロ 熱'加圧して貼り付け、スぺーサー用感光性転写シート(1)を得た。  [0187] After forming the laminated structure of the PET temporary support Z thermoplastic resin layer Z intermediate layer Z photosensitive resin composition layer (total thickness of the three layers is 11.6 m) as described above Further, a 12 μm-thick polypropylene film as a cover film was applied to the surface of the photosensitive resin composition layer by applying heat and pressure to obtain a photosensitive transfer sheet (1) for spacers.
[0188] フォトスぺーサ一の作製  [0188] Fabrication of a photospacer
得られたスぺーサー用感光性転写シート(1)のカバーフィルムを剥離し、露出した 感光性榭脂組成物層の表面を、上記で作製した ITO膜がスパッタ形成されたカラー フィルタ基板 10の ITO膜 13上に重ね合わせ、ラミネーター LamicII型〔(株)日立イン ダストリイズ製〕を用いて、線圧 100NZcm、 130°Cの加圧'加熱条件下で搬送速度 2mZ分にて貼り合わせた。その後、 PET仮支持体を熱可塑性榭脂層との界面で剥 離除去し、感光性榭脂組成物層を熱可塑性榭脂層及び中間層と共に転写した (層 形成工程)。  The cover film of the resulting photosensitive transfer sheet for spacer (1) was peeled off, and the exposed surface of the photosensitive resin composition layer was formed on the color filter substrate 10 on which the ITO film prepared above was sputtered. The film was laminated on the ITO film 13 and bonded using a laminator Lamic II type (manufactured by Hitachi Industries, Ltd.) under a heating condition of a linear pressure of 100 NZcm and 130 ° C. at a conveyance speed of 2 mZ. Thereafter, the PET temporary support was peeled off at the interface with the thermoplastic resin layer, and the photosensitive resin composition layer was transferred together with the thermoplastic resin layer and the intermediate layer (layer forming step).
[0189] 次に、超高圧水銀灯を有するプロキシミティー型露光機 (日立ハイテク電子ェンジ ニアリング (株)製)を用いて、マスク (画像パターンを有する石英露光マスク)と、該マ スクと熱可塑性榭脂層とが向き合うように配置したカラーフィルタ基板 10とを略平行 に垂直に立てた状態で、マスク面と感光性榭脂組成物層の中間層に接する側の表 面との間の距離を 40 mとし、マスクを介して熱可塑性榭脂層側力も露光量 60miZ cm2にてプロキシミティー露光した。次いで、 KOH現像液 CDK—1 (富士フィルムェ レクト口-クスマテリアルズ (株)製を 100倍希釈した液)を、フラットノズルから 23°C、ノ ズル圧力 0. 04MPaにて 80秒間噴射してシャワー現像し、未露光部を現像除去して パターン (スぺーサーパターン)を得た(パターユング工程)。 [0189] Next, using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp, a mask (quartz exposure mask having an image pattern), the mask and a thermoplastic film. The distance between the mask surface and the surface of the photosensitive resin composition layer that is in contact with the intermediate layer of the photosensitive resin composition layer in a state where the color filter substrate 10 disposed so as to face the oil layer is substantially parallel and vertical. Proximity exposure was performed at 40 m and a thermoplastic resin layer side force through the mask with an exposure amount of 60 miZ cm 2 . Next, KOH developer CDK-1 (Fuji Film Select Kokusu Materials Co., Ltd., 100-fold diluted solution) was sprayed from a flat nozzle at 23 ° C and a nozzle pressure of 0.04 MPa for 80 seconds. The pattern was developed by shower development and unexposed areas were removed to obtain a pattern (spacer pattern) (patterning process).
得られたスぺーサーパターンは、直径 20 m、平均高さ 3. 7 mの透明な柱状で めつに。  The resulting spacer pattern is a transparent column with a diameter of 20 m and an average height of 3.7 m.
[0190] 次に、スぺーサーパターンが設けられたカラーフィルタ基板 10を、 230°C下で 30分 間加熱処理を行ない (熱処理工程)、フォトスぺーサー 14を作製した。 [0191] 突起用感光性転写材料の作製 [0190] Next, the color filter substrate 10 provided with the spacer pattern was subjected to a heat treatment at 230 ° C for 30 minutes (heat treatment step) to produce a photospacer 14. [0191] Production of photosensitive transfer material for protrusions
厚さ 75 μ mのポリエチレンテレフタレートフィルム仮支持体(PET仮支持体)上に、 前記処方 Aと同様の処方からなる熱可塑性榭脂層用塗布液を塗布、乾燥させ、乾燥 膜厚が 15 /z mの熱可塑性榭脂層を設けた。次いで、形成した熱可塑性榭脂層上に 、前記処方 Bと同様の処方力 なる中間層用塗布液を塗布、乾燥させて、乾燥膜厚 が 1. 6 mの中間層を設けた。次に、下記処方 C力もなる突起形成用塗布液を調製 し、この突起形成用塗布液を中間層上に塗布し、乾燥させて、乾燥膜厚が 2. O ^ m である液晶配向制御用の突起用感光性榭脂組成物層を塗設した。この感光性榭脂 組成物層の表面に更に、厚さ 12 μ mのポリプロピレン製のフィルムを保護フィルムと して貼り付けた。このようにして、 PET仮支持体上に、該 PET仮支持体側から順に熱 可塑性榭脂層、中間層、突起用感光性榭脂組成物層、及び保護フィルムが積層さ れてなる突起用感光性転写材料を作製した。  A polyethylene terephthalate film temporary support (PET temporary support) with a thickness of 75 μm was coated with a coating solution for a thermoplastic resin layer having the same formulation as Formula A, dried, and the dry film thickness was 15 / A zm thermoplastic resin layer was provided. Next, an intermediate layer coating solution having the same prescription power as the formulation B was applied on the formed thermoplastic resin layer and dried to provide an intermediate layer having a dry film thickness of 1.6 m. Next, a projection forming coating solution having the following prescription C force is prepared, and this projection forming coating solution is applied onto the intermediate layer and dried to control the liquid crystal alignment with a dry film thickness of 2.O ^ m. A photosensitive resin composition layer for protrusions was applied. Further, a 12 μm-thick polypropylene film was attached to the surface of the photosensitive resin composition layer as a protective film. In this way, the protrusion photosensitive film is formed by laminating the thermoplastic resin layer, the intermediate layer, the protrusion photosensitive resin composition layer, and the protective film in this order from the PET temporary support side. A transferable material was prepared.
[0192] 〔突起形成用塗布液の処方 C〕  [0192] [Prescription C of coating liquid for protrusion formation]
'ポジ型レジスト液 FH— 2413F - --53. 3部  'Positive resist solution FH— 2413F---53. 3 parts
(富士フィルムエレクト口-クスマテリアルズ (株)製)  (Fuji Film Elect Mouth-Cux Materials Co., Ltd.)
•メチルェチルケトン ".46. 7部  • Methyl ethyl ketone ".46. 7 parts
•前記界面活性剤 1 … 0. 04部  • Surfactant 1… 0.04 parts
[0193] 突起の形成  [0193] Protrusion formation
上記より得た突起用感光性転写材料力 保護フィルムを剥がし、露出した突起用 感光性榭脂組成物層の露出面とカラーフィルタ基板 10の ITO膜 13が設けられた側( カラーフィルタ上)の表面とを重ね合わせ、ラミネーター LamicII型〔 (株)日立インダ ストリイズ製〕を用い、線圧 100NZcm、温度 130°C、搬送速度 2. 2mZ分の条件に て貼り合わせた (ラミネート)。その後、突起用感光性転写材料の PET仮支持体のみ を熱可塑性榭脂層との界面で剥離除去した。このとき、カラーフィルタ基板の上に、 該基板側から順に感光性榭脂組成物層、中間層、熱可塑性榭脂層が積層された状 態にある。  The photosensitive transfer material force for protrusions obtained from the above is peeled off the protective film, the exposed surface of the exposed photosensitive resin composition layer for protrusions and the side of the color filter substrate 10 on which the ITO film 13 is provided (on the color filter) The surfaces were superposed and laminated using a laminator type Lamic II (manufactured by Hitachi Industries Ltd.) under conditions of a linear pressure of 100 NZcm, a temperature of 130 ° C, and a conveying speed of 2.2 mZ (laminate). Thereafter, only the PET temporary support of the photosensitive transfer material for protrusions was peeled off at the interface with the thermoplastic resin layer. At this time, the photosensitive resin composition layer, the intermediate layer, and the thermoplastic resin layer are laminated on the color filter substrate in this order from the substrate side.
[0194] 次に、最表層である熱可塑性榭脂層の上方に、フォトマスクのマスク面と突起用感 光性榭脂組成物層の中間層と接する側の表面との間の距離が 100 μ mとなるように プロキシミティー露光機を配置し、フォトマスクを介して超高圧水銀灯により照射エネ ルギー 70miZcm2でプロキシミティー露光した。 [0194] Next, a distance between the mask surface of the photomask and the surface on the side in contact with the intermediate layer of the light-sensitive resin composition layer for protrusions is 100 above the outermost thermoplastic resin layer. μm A proximity exposure machine was installed, and a proximity exposure was performed with an irradiation energy of 70 miZcm 2 using an ultrahigh pressure mercury lamp through a photomask.
その後、シャワー式現像装置にてトリエタノールアミン系現像液(トリエタノールァミン 3 0質量%含有、商品名: T— PD2、富士写真フィルム株式会社製を、純水で 12倍 (T — PD2を 1質量部と純水を 11質量部の割合で混合)に希釈した液)を 30°Cで 30秒 間熱可塑性榭脂上力ゝら噴霧し、熱可塑性榭脂層及び中間層を溶解除去した。この 段階では、突起用感光性榭脂組成物層は実質的に現像されていな力つた。続いて、 0. 085molZLの炭酸ナトリウムと 0. 085molZLの炭酸水素ナトリウムと 1%のジブ チルナフタレンスルホン酸ナトリウムとを含む水溶液を、シャワー式現像装置にて 33 °Cで 30秒間更に噴霧しながら現像し、突起用感光性榭脂組成物層の不要部 (未硬 化部)を現像除去した。これにより、カラーフィルタ (RGB画素)上に、所望形状にバタ 一ユングされた突起用感光性榭脂組成物層からなる突起 15を形成した。次いで、突 起 15が形成されたカラーフィルタ基板を 240°C下で 50分間ベータ処理することによ り、カラーフィルタ (RGB画素)上には高さ 1. 5 mで縦断面形状が蒲鋅様の液晶配 向制御用の突起が形成された。  After that, triethanolamine developer (containing 30% by mass of triethanolamine, trade name: T-PD2, manufactured by Fuji Photo Film Co., Ltd.) 12 times with pure water (T-PD2 1 part by weight and 11 parts by weight of pure water (diluted in a ratio of 11 parts by weight) are sprayed at 30 ° C for 30 seconds, and the thermoplastic resin layer and intermediate layer are dissolved and removed. did. At this stage, the photosensitive resin composition layer for protrusions was substantially undeveloped. Subsequently, an aqueous solution containing 0.085 mol ZL of sodium carbonate, 0.085 mol ZL of sodium hydrogen carbonate and 1% sodium dibutyl naphthalenesulfonate was further sprayed at 33 ° C. for 30 seconds in a shower type developing device. Then, unnecessary portions (uncured portions) of the photosensitive resin composition layer for protrusions were developed and removed. As a result, protrusions 15 made of a photosensitive resin composition layer for protrusions that were patterned in a desired shape were formed on the color filter (RGB pixels). Next, the color filter substrate on which the protrusions 15 are formed is beta-treated at 240 ° C for 50 minutes, so that the vertical cross-sectional shape is 1.5 m high on the color filter (RGB pixels). Protrusions for controlling the liquid crystal orientation were formed.
[0195] 上記とは別に、対向基板として TFT基板 21を用意した。この TFT基板の一方の表 面は、スパッタリングにより ITO (Indium Tin Oxide)膜 22が形成されている。続いて、 TFT基板の ITO膜 22上及びカラーフィルタ基板 10のフォトスぺーサー 14が設けら れた側の ITO膜 13上に、ポリイミドよりなる配向膜 24を設けた。  [0195] Apart from the above, a TFT substrate 21 was prepared as a counter substrate. An ITO (Indium Tin Oxide) film 22 is formed on one surface of the TFT substrate by sputtering. Subsequently, an alignment film 24 made of polyimide was provided on the ITO film 22 of the TFT substrate and the ITO film 13 of the color filter substrate 10 on the side where the photospacer 14 was provided.
[0196] その後、カラーフィルタの画素群を取り囲むように周囲に設けられているブラックマト リクス 16の外枠に相当する位置にエポキシ榭脂のシール剤を印刷すると共に、カラ 一フィルタ基板 10を TFT基板 21と貼り合わせた。次いで、貼り合わされた 2枚の基 板を熱処理し、シール剤を硬化させ、 2枚の基板の積層体を得た。この積層体を真空 下で脱気した後、大気圧に戻して 2枚のガラス基板の間隙に液晶を注入した。注入 終了後、注入口部分を接着剤を付与し、紫外線照射して封止することにより液晶セ ルを得た。  [0196] Thereafter, an epoxy resin sealant is printed at a position corresponding to the outer frame of the black matrix 16 provided around the pixel group of the color filter, and the color filter substrate 10 is attached to the TFT. Bonded to substrate 21. Next, the two bonded substrates were heat-treated to cure the sealing agent, and a laminate of two substrates was obtained. The laminate was degassed under vacuum, then returned to atmospheric pressure, and liquid crystal was injected into the gap between the two glass substrates. After the completion of the injection, a liquid crystal cell was obtained by applying an adhesive to the injection port portion and sealing it with ultraviolet irradiation.
[0197] このようにして得た液晶セルの両面に、偏光板 (HLC2— 2518、(株)サンリッツ製) 25, 23を貼り付けた。次いで、図示しないが、赤色 (R) LEDとして FR1112H、緑色 (G) LEDとして DGl 112H、及び青色(B) LEDとして DBl 112H ( 、ずれもスタンレ 一電気 (株)製のチップ型 LED)を用いてサイドライト方式のバックライトを構成し、前 記偏光板が設けられた液晶セルの背面となる側に配置して、本発明の MVAモード 液晶表示装置を作製した。 [0197] Polarizing plates (HLC2-2518, manufactured by Sanritz Co., Ltd.) 25 and 23 were attached to both surfaces of the liquid crystal cell thus obtained. Next, although not shown, the red (R) LED is FR1112H, green A sidelight type backlight is constructed using (G) LED DGl 112H and blue (B) LED DBl 112H (a chip type LED manufactured by Stanley Ichi Electric Co., Ltd.). The MVA mode liquid crystal display device of the present invention was fabricated by arranging it on the back side of the liquid crystal cell.
[0198] (実施例 2〜14)  [0198] (Examples 2 to 14)
実施例 1において、感光性榭脂組成物層用塗布液の処方 1を下記表 2中の処方 2 〜処方 14に各々代えたこと以外、実施例 1と同様にして、スぺーサー用感光性転写 シート(2)〜(14)を作製すると共に、本発明の MVAモード液晶表示装置を作製し た。なお、表 2中の単位は質量部である。  In Example 1, the photosensitive resin for spacers was prepared in the same manner as in Example 1, except that the formulation 1 of the coating solution for the photosensitive resin composition layer was changed to the formulations 2 to 14 in Table 2 below. The transfer sheets (2) to (14) were produced, and the MVA mode liquid crystal display device of the present invention was produced. The units in Table 2 are parts by mass.
[0199] (比較例 1〜3)  [0199] (Comparative Examples 1 to 3)
実施例 1にお 、て、感光性榭脂組成物層用塗布液の処方 1を下記表 2中の処方 1 5〜17に代えたこと以外、実施例 1と同様にして、スぺーサー用感光性転写シート(1 5)〜(17)を作製すると共に、比較の MVAモード液晶表示装置を作製した。  In Example 1, except that the formulation 1 of the coating solution for the photosensitive resin composition layer was replaced with the formulation 15 to 17 in Table 2 below, the same as in Example 1, for the spacer Photosensitive transfer sheets (15) to (17) were produced, and a comparative MVA mode liquid crystal display device was produced.
[0200] [表 2] [0200] [Table 2]
Figure imgf000053_0001
Figure imgf000053_0001
[0201] ここで、表 2の構造式 1乃至 17は表 3の通りである。表 3の R1及び nは各々一般式 ( A)又は (B)中の R1及び nに相当する。また、表 3中一般式 (C)は以下の通りである。 Here, Structural Formulas 1 to 17 in Table 2 are as shown in Table 3. R 1 and n in Table 3 corresponds to R 1 and n each in the general formula (A) or (B). In Table 3, the general formula (C) is as follows.
[0202] [表 3] アクリル基数 R1 n [0202] [Table 3] Acrylic base R 1 n
構造式 1 6 一般式 (A) (a) 4  Structural formula 1 6 General formula (A) (a) 4
構造式 2 6 一般式 (A) (a) 6  Structural formula 2 6 General formula (A) (a) 6
構造式 3 6 一般式 (A) (a) 8  Structural formula 3 6 General formula (A) (a) 8
構造式 4 6 一般式 (A) (b) - 構造式 5 6 一般式 (A) (c) - 構造式 6 5 一般式(B) (a) 4  Structural formula 4 6 General formula (A) (b)-Structural formula 5 6 General formula (A) (c)-Structural formula 6 5 General formula (B) (a) 4
構造式 7 5 一般式 (B) (a) 6  Structural formula 7 5 General formula (B) (a) 6
構造式 8 5 一般式(B) (b) ―  Structural formula 8 5 General formula (B) (b) ―
構造式 9 6 一般式 (A) (a) 6  Structural formula 9 6 General formula (A) (a) 6
構造式 1 C 5 一般式 (B) (a) 6  Structural formula 1 C 5 General formula (B) (a) 6
構造式 1 1 15 U-15HA ¾' Structural formula 1 1 15 U-15HA ¾ '
構造式 1 2 15 U-15HA ※,  Structural formula 1 2 15 U-15HA *,
構進式 1 2 9 UA32P " '1 Construction type 1 2 9 UA32P "' 1
構造式 1 4 9 UA32P  Structural formula 1 4 9 UA32P
構造式 1 5 0 DPHA ·2 Formula 1 5 0 DPHA · 2
構造式 1 6 4 U-4HA ·'  Structural formula 1 6 4 U-4HA
構造式 1フ 16 一般式 (C) I - - 新中村化字㈱製ウレタンァクリレー卜モノマー  Structural formula 1F 16 General formula (C) I--Urethane alkylate monomer by Shin-Nakamura Chemical Co., Ltd.
ジペンタエリスリトールへキサァクリレート(重合禁止剤  Dipentaerythritol hexaacrylate (polymerization inhibitor)
MEHQ500pprri含有;商品名: KAYARAD DPHA、 日本化薬 (株)製)  MEHQ500pprri contained; trade name: KAYARAD DPHA, Nippon Kayaku Co., Ltd.)
なお、前記表 2に記載の処方中の各組成の詳細は以下の通りである。 The details of each composition in the formulation described in Table 2 are as follows.
水ノインダー 1 Water noider 1
'メタクリル酸 Zァリルメタタリレート共重合体  'Zaryl methacrylate methacrylate copolymer
( = 20/80 [モル比]、質量平均分子量 36000;高分子物質)  (= 20/80 [molar ratio], mass average molecular weight 36000; polymer substance)
水バインダー 2 Water binder 2
•ポリマー〔ベンジルメタタリレート/メタクリル酸( = 72Z28 [モル比])のランダム共 重合物(質量平均分子量 37, 000)〕· ·· 27部  • Polymer [Random copolymer of benzylmetatalate / methacrylic acid (= 72Z28 [molar ratio]) (mass average molecular weight 37,000)] 27 parts
•プロピレングリコールモノメチルエーテルアセテート. · .73部  • Propylene glycol monomethyl ether acetate .73 parts
*消色染料 * Decolorizing dye
•ビクトリアピュアブルー BOH— M (保土谷化学工業 (株)製) [0204] [化 8] • Victoria Pure Blue BOH— M (Hodogaya Chemical Co., Ltd.) [0204] [Chemical 8]
( C )
Figure imgf000055_0001
(C)
Figure imgf000055_0001
[0205] (実施例 15) [Example 15]
実施例 1において、ガラス基板を 2400mm X 2400mmサイズのガラス基板に代え 、サイズ 9cm X 9cmのスぺーサー用感光性転写シート(1)を、幅 1400mm、長さ 16 Om及び幅 900mm、長さ 160mの 2サイズのロール状に構成されたスぺーサー用感 光性転写シート(1)に代え、更にこのロール状のスぺーサー用感光性転写シートを 二つ並べて同時にラミネートする 2丁貼りラミネート方式でラミネートするようにしたこと 以外、実施例 1と同様にして、 2300mm X 2300mmサイズのカラーフィルタ基板を 得ると共に、本発明の MVAモード液晶表示装置(図 1参照)を作製した。本実施例 では、ラミネート装置に特願 2004— 199886号に記載の 2丁貼りラミネーターを用い た。  In Example 1, the glass substrate is replaced with a glass substrate of 2400 mm X 2400 mm size, and a photosensitive transfer sheet for spacer (1) of size 9 cm X 9 cm is 1400 mm wide, 16 Om long and 900 mm wide, 160 m long. Instead of the photosensitive transfer sheet for spacers (1) configured in two sizes of rolls (1), two roll-type photosensitive transfer sheets for spacers are placed side by side and laminated at the same time. A 2300 mm × 2300 mm size color filter substrate was obtained in the same manner as in Example 1 except that the laminate was laminated in the same manner as in Example 1, and the MVA mode liquid crystal display device of the present invention (see FIG. 1) was produced. In this example, a two-clad laminator described in Japanese Patent Application No. 2004-199886 was used for the laminating apparatus.
得られた MVAモード液晶表示装置は、大サイズィ匕されているにも関わらず、実施 例 1と同等程度に、画像にムラがなく高品質なものであった。  Although the obtained MVA mode liquid crystal display device was large-sized, the image had no unevenness and was of high quality to the same extent as in Example 1.
[0206] (評価) [0206] (Evaluation)
各実施例及び比較例において作製したフォトスぺーサー及び液晶表示装置を用 V、て下記の評価を行なった。結果は下記表 4及び 5に示す。  The following evaluations were carried out using the photospacers and liquid crystal display devices prepared in the examples and comparative examples. The results are shown in Tables 4 and 5 below.
[0207] : L変形回復率 (条件 1) [0207]: L deformation recovery rate (Condition 1)
フォトスぺーサ一の各々について、微小硬度計 (DUH— W201、(株)島津製作所 製)により次のようにして測定を行ない、評価した。測定は、 m φの円錘台圧子 を採用し、最大荷重 50mN、保持時間 5秒として、負荷-除荷試験法により行なった 。この測定値力も下記式により変形回復率〔%〕を求め、下記基準にしたがって評価 した。 Each of the photo spacers was measured by a micro hardness tester (DUH-W201, manufactured by Shimadzu Corporation) as follows and evaluated. The measurement was performed by a load-unloading test method using a frustum frustum indenter with a maximum load of 50 mN and a holding time of 5 seconds. This measured force is also calculated as the deformation recovery rate [%] by the following formula and evaluated according to the following criteria: did.
変形回復率 (%) = (加重による変形量 m]Z加重開放後の回復量 m]) X IOO  Deformation recovery rate (%) = (Deformation amount by weight m] Recovery amount after Z load release m]) X IOO
[0208] 〈評価基準〉 [0208] <Evaluation criteria>
◎:変形回復率が 90%以上であった。  A: Deformation recovery rate was 90% or more.
〇:変形回復率が 85%以上 90%未満であった。  ◯: Deformation recovery rate was 85% or more and less than 90%.
△:変形回復率が 75%以上 85%未満であった。  Δ: Deformation recovery rate was 75% or more and less than 85%.
X:変形回復率が 75%未満であった。  X: Deformation recovery rate was less than 75%.
[0209] 2ノ変形回復率 (条件 2)— [0209] 2-node deformation recovery rate (Condition 2) —
フォトスぺーサ一の各々について、微小硬度計 (DUH— W201、(株)島津製作所 製)により次のようにして測定を行ない、評価した。測定は、 m φの円錘台圧子 を採用し、最大荷重 130mN、保持時間 60秒として、負荷—除荷試験法により行なつ た。この測定値力も下記式により変形回復率〔%〕を求め、下記基準にしたがって評 価し 7こ。  Each of the photo spacers was measured by a micro hardness tester (DUH-W201, manufactured by Shimadzu Corporation) as follows and evaluated. The measurement was carried out by the load-unloading test method using a frustum frustum indenter with a maximum load of 130 mN and a holding time of 60 seconds. For this measured force, the deformation recovery rate [%] was calculated according to the following formula, and evaluated according to the following criteria.
変形回復率 (%) = (加重による変形量 m]Z加重開放後の回復量 m]) X IOO  Deformation recovery rate (%) = (Deformation amount by weight m] Recovery amount after Z load release m]) X IOO
[0210] 〈評価基準〉 [0210] <Evaluation criteria>
◎:変形回復率が 85%以上であった。  A: Deformation recovery rate was 85% or more.
〇:変形回復率が 80%以上 85%未満であった。  A: Deformation recovery rate was 80% or more and less than 85%.
△:変形回復率が 70%以上 80%未満であった。  Δ: Deformation recovery rate was 70% or more and less than 80%.
X:変形回復率が 70%未満であった。  X: Deformation recovery rate was less than 70%.
[0211] 3.表示ムラ [0211] 3. Display unevenness
液晶表示装置の各々について、グレイのテスト信号を入力させたときのグレイ表示 を目視及びルーペにて観察し、表示ムラの発生の有無を下記評価基準にしたがって 評価した。  For each liquid crystal display device, the gray display when a gray test signal was input was observed visually and with a loupe, and the presence or absence of display unevenness was evaluated according to the following evaluation criteria.
〈評価基準〉  <Evaluation criteria>
〇:表示ムラは全く認められな力つた。  ◯: Display unevenness was not recognized at all.
△:表示ムラが僅かに認められた。 X:表示ムラが顕著に認められた。 Δ: Display unevenness was slightly recognized. X: Display unevenness was noticeable.
[0212] 4.指押しテスト [0212] 4. Finger press test
液晶表示装置の各々について、表示パネル装置表面を一指し指にて軽く押し瞬時 に指を離した。パネルは離すと同時に波紋が観察された。その様子を表 4に示した。  For each of the liquid crystal display devices, the surface of the display panel device was lightly pressed with one finger, and the finger was released instantly. Ripples were observed as soon as the panel was released. This is shown in Table 4.
[0213] 5.現像性 [0213] 5.Developability
上記「-突起の形成-」において、プロキシミティー露光後、シャワー式現像装置に て 1%トリエタノールァミン水溶液を 30°Cで 30秒間熱可塑性榭脂上から噴霧し、熱可 塑性榭脂層及び中間層を溶解除去し、続いて 0. 085molZLの炭酸ナトリウムと 0. 085molZLの炭酸水素ナトリウムと 1%のジブチルナフタレンスルホン酸ナトリウムと を含む水溶液を、シャワー式現像装置にて 33°Cで 30秒間更に噴霧しながら現像し た。出来た突起周辺部分の SEM観察を行い周辺に残渣が残っているか確認した。 30 秒間の現像で残渣が確認された場合、現像時間を長く伸ばし残渣がなくなる時間を 確認した。結果を下記表 5に示した。  In the above-mentioned “-protrusion formation”, after the proximity exposure, a 1% triethanolamine aqueous solution is sprayed from above the thermoplastic resin at 30 ° C. for 30 seconds in a shower type developing device, and the thermoplastic resin layer. Then, the intermediate layer is dissolved and removed, and subsequently, an aqueous solution containing 0.085 mol ZL sodium carbonate, 0.085 mol ZL sodium hydrogen carbonate and 1% sodium dibutylnaphthalene sulfonate at 33 ° C in a shower type developing device. Development was carried out while spraying for a second. SEM observation was performed on the periphery of the protrusions that were formed, and it was confirmed whether residues were left around. When a residue was found after 30 seconds of development, the development time was lengthened and the time for no residue was confirmed. The results are shown in Table 5 below.
[0214] [表 4] [0214] [Table 4]
変形回復率 Deformation recovery rate
実施例 表示ムラ 指押しテスト  Example Display unevenness Finger press test
条件 1/%条件 2/%  Condition 1 /% Condition 2 /%
実施例 1 92(©) 85(©) 〇 広がる波紋も小さく瞬時に回復した。 実施例 2 93(©) 88(©) 〇 広がる波紋も小さく瞬時に回復した。 実施例 3 9U®) 86(©) 〇 広がる波紋も小さく瞬時に回復した。 実施例 4 91(@) 85(©) 〇 広がる波紋も小さく瞬時に回復した。 実施例 5 90(©) 86(©) 〇 広がる波紋も小さく瞬時に回復した。 Example 1 92 (©) 85 (©) 〇 The spreading ripples were small and recovered instantly. Example 2 93 (©) 88 (©) 〇 The spreading ripples were small and recovered instantly. Example 3 9U®) 86 (©) 〇 The spreading ripples were small and recovered instantly. Example 4 91 (@) 85 (©) 〇 The spreading ripples were small and recovered instantly. Example 5 90 (©) 86 (©) 〇 The spreading ripples were small and recovered instantly.
広がる波紋がやや大きいが瞬時に 実施例 6 90(©) 84(0) 〇  Spreading ripples are slightly larger, but instantly Example 6 90 (©) 84 (0) 〇
回復した。  Recovered.
紋がやや大きいが瞬時に 実施例 7 91(©) 83(0) O 広がる波  The crest is slightly larger, but instantly. Example 7 91 (©) 83 (0) O Spreading waves
回 した。  Turned.
実施例 8 90(©) 83(0) 広力 波紋がやや大きいが瞬時にExample 8 90 (©) 83 (0) Wide force Ripples are slightly larger, but instantly
Yes
回復した。  Recovered.
実施例 9 95(©) 86(©) 〇 広がる波紋も小さく瞬時に回復した。 Example 9 95 (©) 86 (©) 〇 The spreading ripples were small and recovered instantly.
瞬時に 実施例 10 93(©) 83(0) O 広がる波紋がやや大きいが Instantly Example 10 93 (©) 83 (0) O Spreading ripples are slightly larger
«した。  "did.
実施例 11 93(©) 86(©) O 広力《る波紋も小さく瞬時に回復した。 実施例 12 93(©) 84(0) O 広がる波紋がやや大きいが瞬時に 回復した。 Example 11 93 (©) 86 (©) O The ripples of the wide force were small and recovered instantly. Example 12 93 (©) 84 (0) O The spreading ripple was slightly large but recovered instantly.
広がる波紋がやや大きいが瞬時に 実施例 13 90(©) 84(0) O 回復した。  The spreading ripples are slightly larger, but instantly. Example 13 90 (©) 84 (0) O Recovered.
実施例 14 90(©) 83(0) O 広がる波紋がやや大きいが瞬時に 回復した。 Example 14 90 (©) 83 (0) O The spreading ripple was slightly large, but recovered instantly.
比較例 1 82(厶) 65(x) X 広がる波紋が大きぐ回復までに、 1 Comparative Example 1 82 (厶) 65 (x) X 1
秒ほど要した。  It took about a second.
が大き 回復までに、 1 比較例 2 74(x) 66(x) X 広がる波紋  1 comparative example 2 74 (x) 66 (x) X ripples spreading
秒ほど要した。  It took about a second.
比較例 3 現像時に、フォトスぺーサを形成できず。評価できず。 ] 宴脑 現像性 (SEM写真観察結果を含む) Comparative Example 3 A photo spacer could not be formed during development. Cannot be evaluated. ] Banquet developability (including SEM photo observation results)
実施例 1 残-;査なし。 問題ない柱形状を示した。  Example 1 Remaining--No review. The column shape without any problem was shown.
実施例 2 同上  Example 2 Same as above
実施例 3 同上  Example 3 Same as above
実施例 4 同上  Example 4 Same as above
実施例 5 同上  Example 5 Same as above
実施例 6 同上  Example 6 Same as above
実施例 7 同上  Example 7 Same as above
実施例 8 同上  Example 8 Same as above
30秒では、 柱周辺に僅かに残渣あり。 現像時間 45秒で問題ない柱形状を示し 実施例 9  In 30 seconds, there is a slight residue around the pillar. Example 9 shows a column shape with no problem at development time of 45 seconds
た。 45秒は、 生産性においては問 11ない時間である。  It was. 45 seconds is a time that does not matter in terms of productivity.
実施例 1 0 残渣なし。 問題ない柱形状を示した。  Example 1 0 No residue. The column shape without any problem was shown.
30秒では、 柱周辺に僅かに残 ¾あり。 現像時間 80秒で問題ない柱形状を示し 寘施例 1 1  At 30 seconds, there is a slight residue around the pillar. Demonstrates a column shape with a development time of 80 seconds. Example 1 1
た。 80秒は、 生産性においては問題ない時間である。  It was. 80 seconds is a good time for productivity.
30秒では、 柱周辺に僅かに残; ίあり。 現像時間 90秒で問題ない ίま形状を示し 実施例 1 2  At 30 seconds, a little left around the pillar; Development time 90 seconds shows no problem ί shape showing Example 1 2
た。 90秒は、 生産性においては問題ない時間である。  It was. 90 seconds is a good time for productivity.
30秒では、 柱阇辺に僅かに残 ¾あり。 現像時間 60秒で問題ない ½形状を示し 実施例 1 3  At 30 seconds, there is a slight remaining on the pillar side. Development time 60 seconds shows no problem ½ shape Example 1 3
た。 60秒は、 生産性においては問題ない時間である。  It was. 60 seconds is a good time for productivity.
30秒では、 柱周辺に僅かに残-; ίあり。 現像時間 65秒で問題ない柱形状を示し 実施例 1 4  In 30 seconds, there is a slight residue around the pillar; Example 1 4 Shows a column shape with a development time of 65 seconds.
た。 65秒は、 生産性においては問親ない時間である。  It was. 65 seconds is a good time for productivity.
比較例 1 残-;查なし。 問題ない柱形状を示した。  Comparative Example 1 Remaining-; no wrinkle. The column shape without any problem was shown.
比較例 2 同上  Comparative Example 2 Same as above
30秒では、 柱周辺に僅かに残 ¾あり。 現像時問 200秒でも残 '渣発生を確認した 比較例 3  At 30 seconds, there is a slight residue around the pillar. Comparative Example 3 in which residual residue was confirmed even after 200 seconds of development
。 200秒を超える現像時問では、 生産性に問 Sある。  . There is a problem with productivity when developing over 200 seconds.
[0216] 表 4に示すように、実施例では、変形回復性の良好なフォトスぺーサ一が得られ、 液晶表示装置が表示する画像は表示ムラが抑えられ、高画質であった。これに対し 、比較例では、フォトスぺーサ一の変形回復性に劣っており、これを用いて作製した 液晶表示装置は、セル厚の変動に伴なう表示ムラが顕著に生じてしまった。 [0216] As shown in Table 4, in the examples, a photospacer with good deformation recovery was obtained, and the image displayed by the liquid crystal display device was suppressed in display unevenness and had high image quality. On the other hand, in the comparative example, the deformation recovery property of the photospacer is inferior, and the liquid crystal display device manufactured using the photospacer has noticeably uneven display due to the variation in cell thickness.
[0217] (実施例 16)  [Example 16]
以下に示すようにして、図 2に示すように構成された PVAモードの液晶表示装置を 作製した。なお、実施例 1と同様の構成要素には同一の参照符号を付してその詳細 な説明を省略する。  A PVA mode liquid crystal display device configured as shown in FIG. 2 was fabricated as follows. The same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
[0218] まず、実施例 1と同様にして、カラーフィルタ基板を作製すると共に、実施例 1と同じ スぺーサー用感光性転写シートを用いてフォトスぺーサーを作製した。なお、フォトス ぺーサ一の作製後、突起の形成は行なわなかった。 First, a color filter substrate was produced in the same manner as in Example 1, and a photospacer was produced using the same photosensitive transfer sheet for spacers as in Example 1. Photos No protrusion was formed after the production of the spacer.
[0219] 次に、別途、対向基板として TFT基板 21を用意した。この TFT基板の一方の表面 は、スパッタリングにより ITO (Indium Tin Oxide)膜 22が形成されている。続いて、力 ラーフィルタ基板 10の ITO膜 (透明電極) 13及び TFT基板 21の ITO膜 22にそれぞ れ PVAモード用にパターニングを施し、その上に更にポリイミドよりなる配向膜 24を 設けた。  [0219] Next, a TFT substrate 21 was separately prepared as a counter substrate. An ITO (Indium Tin Oxide) film 22 is formed on one surface of the TFT substrate by sputtering. Subsequently, the ITO film (transparent electrode) 13 of the force filter substrate 10 and the ITO film 22 of the TFT substrate 21 were patterned for the PVA mode, respectively, and an alignment film 24 made of polyimide was further provided thereon.
[0220] その後、カラーフィルタの画素群を取り囲むように周囲に設けられているブラックマト リックス 16の外枠に相当する幅 0. 5mm、高さ 40 mのシール部に紫外線硬化榭脂 のシール剤をデイスペンサ方式により塗布し、 PVAモード用液晶を滴下し、カラーフ ィルタ基板と TFT基板とを貼り合わせた。その後、常圧に戻し、荷重をかけてセル厚 力 mになるように制御した。この状態で、メタルハライドランプを使用して、 340nm 未満の紫外線をフィルターカットし、 340〜390nmの積算光量として 3, 000nj/c m2相当の光量になるように、窒素雰囲気下で露光してシール剤を光硬化させた後、 熱処理してシール剤を硬化させ、液晶セルを得た。このようにして得た液晶セルの両 面に、偏光板 (HLC2— 2518、(株)サンリッツ製) 25, 23を貼り付けた。次に、 CCF Lのノ ックライトを構成し、偏光板が取り付けられた液晶セルの背面側に設置し、本発 明の PVAモード液晶表示装置を作製した。 [0220] After that, a sealant of UV-curing resin is applied to the seal portion having a width of 0.5 mm and a height of 40 m corresponding to the outer frame of the black matrix 16 provided around the pixel group of the color filter. Was applied by the dispenser method, the liquid crystal for PVA mode was dropped, and the color filter substrate and the TFT substrate were bonded together. Thereafter, the pressure was returned to normal pressure, and a load was applied to control the cell thickness to m. In this state, a metal halide lamp is used to filter out UV light of less than 340 nm, and the sealant is exposed in a nitrogen atmosphere so that the integrated light intensity from 340 to 390 nm is equivalent to 3,000 nj / cm 2. After photocuring, the sealing agent was cured by heat treatment to obtain a liquid crystal cell. Polarizing plates (HLC2-2518, manufactured by Sanritz Co., Ltd.) 25 and 23 were attached to both surfaces of the liquid crystal cell thus obtained. Next, a CCF L knocklight was constructed and installed on the back side of the liquid crystal cell to which the polarizing plate was attached, and the PVA mode liquid crystal display device of the present invention was fabricated.
[0221] 本実施例で得られた PVAモード液晶表示装置について、実施例 1と同様にして、 表示ムラの評価を行なった。本実施例においても、実施例 1と同様に変形回復性の 良好なフォトスぺーサ一が得られ、液晶表示装置が表示する画像に表示ムラは全く 認められず (評価〇)、高画質の画像が得られた。  [0221] For the PVA mode liquid crystal display device obtained in this example, display unevenness was evaluated in the same manner as in Example 1. Also in this example, a photospacer with good deformation recovery properties was obtained in the same manner as in Example 1, and no display unevenness was observed in the image displayed by the liquid crystal display device (evaluation ◯). was gotten.
[0222] (実施例 17):塗布 (液レジ)法  [0222] (Example 17): Coating (liquid registration) method
—カラーフィルタの作製 (スリットノズルによる塗布) - -ブラック (K)画像の形成 - —Preparation of color filter (application by slit nozzle)--Black (K) image formation-
680 X 880mmサイズの無アルカリガラス基板(以下、単にガラス基板という。)を11 V洗浄装置で洗浄した後、洗浄剤を用いてブラシ洗浄し、更に超純水で超音波洗浄 した。このガラス基板を 120°Cで 3分間熱処理して表面状態を安定ィ匕した。その後、 ガラス基板を冷却して 23°Cに調温後、スリット状ノズルを有するガラス基板用コータ 一 MH— 1600 (エフ 'エー'エス'アジア社製)にて、前記表 1に記載の組成よりなる 着色感光性榭脂組成物 K1を塗布した。引き続き、真空乾燥機 VCD (東京応化工業 (株)製)を用いて 30秒間溶媒の一部を乾燥させて塗布膜の流動性をなくした後、 12 0°Cで 3分間プリベータして膜厚 2. 4 mの感光性榭脂組成物層 K1を形成した。 A non-alkali glass substrate of size 680 X 880 mm (hereinafter simply referred to as a glass substrate) was cleaned with an 11 V cleaning apparatus, then brush-cleaned with a cleaning agent, and further ultrasonically cleaned with ultrapure water. This glass substrate was heat-treated at 120 ° C for 3 minutes to stabilize the surface state. Then, after cooling the glass substrate and adjusting the temperature to 23 ° C, the coater for glass substrate having a slit nozzle The colored photosensitive resin composition K1 having the composition shown in Table 1 was applied with MH-1600 (manufactured by F'AS Asia). Subsequently, using a vacuum dryer VCD (manufactured by Tokyo Ohka Kogyo Co., Ltd.), part of the solvent was dried for 30 seconds to eliminate the fluidity of the coating film, and then pre-betated at 120 ° C for 3 minutes. 2. A 4 m photosensitive resin composition layer K1 was formed.
[0223] 次に、超高圧水銀灯を備えたプロキシミティー型露光機 (日立ハイテク電子ェンジ ニアリング社製)を用い、マスク(画像パターンを有する石英露光マスク)と感光性榭 脂組成物層 K1が設けられた無アルカリガラス基板とを垂直に立てた状態で、マスク 面と感光性榭脂組成物層 K1の表面との間の距離を 200 mとし、露光量 300miZ cm で全面露光した。  [0223] Next, using a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) equipped with an ultra-high pressure mercury lamp, a mask (quartz exposure mask having an image pattern) and a photosensitive resin composition layer K1 are provided. With the obtained alkali-free glass substrate standing upright, the distance between the mask surface and the surface of the photosensitive resin composition layer K1 was set to 200 m, and the entire surface was exposed at an exposure dose of 300 miZ cm.
次に、純粋をシャワーノズルから噴霧し、感光性榭脂組成物層 K1の表面を均一に 湿らせた後、 KOH系現像液 CDK— 1 (富士フィルムエレクト口-クスマテリアルズ (株 )製; KOH及びノ-オン界面活性剤含有アルカリ現像液を 100倍に希釈した液)を、 フラットノズルから 23°C、ノズル圧力 0. 04MPaにて 80秒間噴射してシャワー現像し 、黒色パターンを得た (現像工程)。続いて、ガラス基板の黒色パターンが形成された 側に超純水を超高圧洗浄ノズルにより 9. 8MPaの圧力で噴射して残渣を除去し、無 アルカリガラス基板上にブラック (K)画像を形成した。その後、 220°Cで 30分間熱処 理 (ベータ)した。  Next, after spraying pure from a shower nozzle and uniformly moistening the surface of the photosensitive resin composition layer K1, KOH developer CDK-1 (manufactured by Fuji Film Elect Kokusu Materials Co., Ltd .; A 100-fold diluted alkaline developer containing KOH and a nonionic surfactant was sprayed from a flat nozzle at 23 ° C and a nozzle pressure of 0.04 MPa for 80 seconds to perform shower development, and a black pattern was obtained. (Development process). Subsequently, ultrapure water is sprayed at a pressure of 9.8 MPa with an ultrahigh pressure cleaning nozzle onto the side of the glass substrate where the black pattern is formed to remove the residue, and a black (K) image is formed on the alkali-free glass substrate. did. Thereafter, heat treatment (beta) was performed at 220 ° C for 30 minutes.
[0224] レッド (R)画素の形成  [0224] Formation of red (R) pixels
前記 K画像が形成されたガラス基板に、前記表 1に示す組成よりなる着色感光性榭 脂組成物 R2を用い、前記 K画像の形成と同様にして塗布、露光、現像、及びベータ を行な 、、ガラス基板の K画像が形成されて 、る側にレッド画素 (R画素)を形成した 。但し、露光工程での露光量は 150mjZcm2とし、現像工程でのシャワー現像は 23 °Cで 60秒間とした。 Using the colored photosensitive resin composition R2 having the composition shown in Table 1 above on the glass substrate on which the K image was formed, coating, exposure, development, and beta were performed in the same manner as the formation of the K image. A K image of the glass substrate was formed, and red pixels (R pixels) were formed on the other side. However, the exposure amount in the exposure process was 150 mjZcm 2 and the shower development in the development process was 60 ° C. at 23 ° C.
なお、 R画素の厚みは 1. であり、 C. I.ビグメント 'レッド(C. I. P. R. ) 254、 C. I. P. R. 177の塗布量はそれぞれ。.
Figure imgf000061_0001
0. 22gZm2であった。
The thickness of the R pixel is 1. CI pigment 'Red (CIPR) 254 and CIPR 177 are applied respectively. .
Figure imgf000061_0001
0. 22gZm was 2.
[0225] グリーン (G)画像の形成 [0225] Green (G) image formation
次に、前記 K画像及び R画素が形成されたガラス基板に、前記表 1に示す組成より なる着色感光性榭脂組成物 G2を用い、前記 K画像の形成と同様にして塗布、露光 、現像、及びベータを行ない、ガラス基板の K画像及び R画素等が形成されている側 にグリーン画素(G画素)を形成した。但し、露光工程での露光量は 150mjZcm 2と し、現像工程でのシャワー現像は 23°Cで 60秒間とした。 Next, a colored photosensitive resin composition G2 having the composition shown in Table 1 above is applied to the glass substrate on which the K image and R pixel are formed, and is applied and exposed in the same manner as in the formation of the K image. Then, development and beta were performed, and a green pixel (G pixel) was formed on the side of the glass substrate on which the K image and R pixel were formed. However, the exposure amount in the exposure process was 150 mjZcm 2 and the shower development in the development process was 60 ° C. at 23 ° C.
なお、 G画素の厚みは 1. 6 mであり、 C. I.ビグメント 'グリーン(C. I. P. G. ) 36 、 C. I.ビグメント 'イェロー(C. I. P. Y. ) 150の塗布量はそれぞれ 1.
Figure imgf000062_0001
0 . 48gZm2であった。
The thickness of the G pixel is 1.6 m. The application amount of CI pigment 'Green (CIPG) 36 and CI pigment' Yellow (CIPY) 150 is 1.
Figure imgf000062_0001
It was 0.48 gZm 2 .
[0226] ブルー (B)画像の形成 [0226] Blue (B) Image formation
次に、前記 K画像並びに R画素等及び G画素等が形成されたガラス基板に、前記 表 1に示す組成よりなる着色感光性榭脂組成物 B2を用い、前記 K画像の形成と同様 にして塗布、露光、現像、及びベータを行ない、ガラス基板の K画像並びに R画素等 及び G画素等が形成されている側にブルー画素(B画素)を形成した。但し、露光ェ 程での露光量は 150miZcm 2とし、現像工程でのシャワー現像は 23°Cで 60秒間と した。 Next, a colored photosensitive resin composition B2 having the composition shown in Table 1 above is used on the glass substrate on which the K image, R pixel, and G pixel are formed, in the same manner as in the formation of the K image. Coating, exposure, development, and beta were performed, and blue pixels (B pixels) were formed on the side of the glass substrate where the K image, R pixels, and G pixels were formed. However, the exposure dose in the exposure process was 150 miZcm 2 and the shower development in the development process was 60 ° C. at 23 ° C.
なお、 B画素の厚みは 1. 6 mであり、 C. I.ビグメント 'ブルー(C. I. P. B. ) 15 : 6及び C. I.ビグメント 'バイオレット(C. I. P. V. ) 23の塗布量はそれぞれ 0. 63g/ m2、 0. 07g/m2であった。 The thickness of the B pixel is 1.6 m, and the application amounts of CI pigment 'Blue (CIPB) 15: 6 and CI pigment' Violet (CIPV) 23 are 0.63 g / m 2 and 0.07 g / m, respectively. 2 .
[0227] なお、着色感光性榭脂組成物 G2、 B2の調製は、前記着色感光性榭脂組成物 G1 、 B1の調製に準じて行なうものとし、着色感光性榭脂組成物 R2の調製について以 下に説明する。 [0227] The colored photosensitive resin composition G2, B2 is prepared according to the preparation of the colored photosensitive resin composition G1, B1, and the preparation of the colored photosensitive resin composition R2. This is explained below.
着色感光性榭脂組成物 R2は、前記表 1に記載の量の R顔料分散物 1、 R顔料分散 物 2、プロピレングリコールモノメチルエーテルアセテートをはかり取り、温度 24°C (士 2°C)で混合して 150r.p.m.で 10分間攪拌し、次いで、前記表 1に記載の量のメチル ェチルケトン、バインダー 2、 DPHA液、 2 トリクロロメチル一 5— (ρ—スチリルスチリ ル)— 1 , 3, 4—ォキサジァゾール、 2, 4 ビス(トリクロロメチル)—6— [4— (N, N -ビスエトキシカルボ-ルメチル)ァミノ— 3—ブロモフエ-ル] s トリァジン、及び フエノチアジンをは力り取り、温度 24°C ( ± 2°C)でこの順に添カ卩して 150r.p.m.で 30 分間攪拌し、次いで前記表 1に記載の量の添加剤 1をは力り取り、温度 24°C ( ± 2°C )で混合して 150r.p.m.で 20分間攪拌し、更に前記表 1に記載の量の界面活性剤 1 をは力り取り、温度 24°C (± 2°C)で添カ卩して 30r.p.m.で 30分間攪拌し、ナイロンメッ シュ # 200で濾過することによって得た。 Colored photosensitive resin composition R2 is obtained by weighing R pigment dispersion 1, R pigment dispersion 2, and propylene glycol monomethyl ether acetate in the amounts shown in Table 1 above, at a temperature of 24 ° C (2 ° C). Mix and stir at 150 rpm for 10 minutes, then methyl ketyl ketone, binder 2, DPHA solution, 2 trichloromethyl mono-5- (ρ-styrylstyryl) — 1, 3, 4— Oxadiazole, 2, 4 Bis (trichloromethyl) -6- [4— (N, N-bisethoxycarboromethyl) amino-3-bromophenol] s Triazine and phenothiazine are used at a temperature of 24 ° C (± 2 ° C) and added in this order and stirred at 150 rpm for 30 minutes, and then the additive 1 in the amount shown in Table 1 above is stripped off to a temperature of 24 ° C (± 2 ° C ) And stirred at 150 rpm for 20 minutes, and the surfactant 1 in the amount shown in Table 1 above. Was removed by force, added at a temperature of 24 ° C. (± 2 ° C.), stirred at 30 rpm for 30 minutes, and filtered through nylon mesh # 200.
[0228] なお、前記表 1に記載の組成物 R2中の各組成の詳細は以下の通りである。また、 着色感光性榭脂組成物 R2中の R顔料分散物 1、 R顔料分散物 2、バインダー 2、 DP HA液、及び界面活性剤 1につ 、ては既述の通りである。 [0228] Details of each composition in the composition R2 described in Table 1 are as follows. Further, R pigment dispersion 1, R pigment dispersion 2, binder 2, DPHA solution, and surfactant 1 in the colored photosensitive resin composition R2 are as described above.
*添加剤 1:燐酸エステル系特殊活性剤 (HIPLAAD ED152、楠本化成 (株)製) * Additive 1: Phosphate ester special activator (HIPLAAD ED152, manufactured by Enomoto Kasei Co., Ltd.)
[0229] 上記のように作製したカラーフィルタ上に、透明電極として、 ITO膜をスパッタリング により形成し、カラーフィルタ基板を得た。 [0229] On the color filter produced as described above, an ITO film was formed as a transparent electrode by sputtering to obtain a color filter substrate.
[0230] フォトスぺーサ一の作製 (液レジ法)  [0230] Fabrication of a photospacer (liquid cash register method)
上記で作製した ITO膜がスパッタ形成されたカラーフィルタ基板の ITO膜上に、スリ ット状ノズルを有するガラス基板用コーター MH— 1600 (エフ ·エ^ ~ ·エス ·ジャパン 社製)にて前記表 2に示す処方 1からなる感光性榭脂組成物層用塗布液を塗布した 。引き続き、真空乾燥機 VCD (東京応化社製)を用いて 30秒間溶媒の一部を乾燥さ せて塗布膜の流動性をなくした後、 EBR (エッジ'ビード 'リムーバー)にて基板周囲 の不要な塗布液を除去し、 120°Cで 3分間プリベータして膜厚 2. 4 /z mの感光性榭 脂組成物層を形成した (層形成工程)。  A glass substrate coater MH-1600 (manufactured by F.S. Japan Co., Ltd.) having a slit-like nozzle is formed on the ITO film of the color filter substrate on which the ITO film produced above is formed by sputtering. A coating solution for a photosensitive resin composition layer having the formulation 1 shown in Table 2 was applied. Then, using a vacuum dryer VCD (manufactured by Tokyo Ohka Kogyo Co., Ltd.), part of the solvent was dried for 30 seconds to eliminate the fluidity of the coating film. The coating solution was removed and pre-betaged at 120 ° C. for 3 minutes to form a photosensitive resin composition layer having a film thickness of 2.4 / zm (layer forming step).
続いて、実施例 1と同様のパター-ング工程及び熱処理工程により、カラーフィルタ 基板上にフォトスぺーサーを作製した。但し、露光量は 300miZcm2、炭酸 Na系現 像液による現像は 23°C、 60秒間とした。 Subsequently, a photospacer was produced on the color filter substrate by the same patterning process and heat treatment process as in Example 1. However, the exposure was 300miZcm 2 and development with Na carbonate-based image solution was 23 ° C for 60 seconds.
[0231] フォトスぺーサ一の作製後、このカラーフィルタ基板を用い、実施例 1と同様にして 、本発明の MVAモード液晶表示装置(図 1参照)を作製した。本実施例で得られた MVAモード液晶表示装置について、実施例 1と同様にして表示ムラの評価を行なつ たところ、本実施例においても、実施例 1と同様に変形回復性の良好なフォトスぺー サ一が得られ、液晶表示装置が表示する画像に表示ムラは全く認められず (評価〇) 、高画質の画像が得られた。  [0231] After the fabrication of the photospacer, the MVA mode liquid crystal display device of the present invention (see Fig. 1) was fabricated in the same manner as in Example 1 using this color filter substrate. With respect to the MVA mode liquid crystal display device obtained in this example, display unevenness was evaluated in the same manner as in Example 1. In this example, too, a photomask with good deformation recovery properties was obtained as in Example 1. A spacer was obtained, and no display unevenness was observed in the image displayed by the liquid crystal display device (evaluation ◯), and a high-quality image was obtained.
符号の説明  Explanation of symbols
[0232] 10…カラーフィルタ基板  [0232] 10 ... Color filter substrate
12· ··着色画素 ···ブラックマトリクス …フォトスぺーサー12 ··· Colored pixels .... Black matrix ... Photo spacer
TFT基板 (対向基板)  TFT substrate (counter substrate)

Claims

請求の範囲 [1] アルカリ可溶性高分子物質と、ウレタン基と 5〜 15個のアクリル基とを含む重合性モ ノマーと、光重合開始剤と、を含有するフォトスぺーサー用感光性榭脂組成物。 [2] 前記重合性モノマーが、下記一般式 (A)又は (B)で表される化合物である請求項 1に記載のフォトスぺーサー用感光性榭脂組成物。 Claims [1] A photosensitive resin composition for a photospacer, comprising an alkali-soluble polymer substance, a polymerizable monomer containing a urethane group and 5 to 15 acrylic groups, and a photopolymerization initiator. object. [2] The photosensitive resin composition for a photospacer according to claim 1, wherein the polymerizable monomer is a compound represented by the following general formula (A) or (B).
[化 1]  [Chemical 1]
Figure imgf000065_0001
Figure imgf000065_0002
Figure imgf000065_0001
Figure imgf000065_0002
(一般式 (A)又は (B)にお 、て、 Rは下記式 (a)、 (b)又は (c)を表す。 ) (In the general formula (A) or (B), R represents the following formula (a), (b) or (c).)
1  1
[化 2] [Chemical 2]
Figure imgf000066_0001
Figure imgf000066_0001
(式(a)において、 nは 2〜8の整数を表す。) (In formula (a), n represents an integer of 2 to 8.)
[3] 少なくとも 2枚の基板と、前記基板間に設けられた液晶と、前記液晶に電界を印加 する 2枚の電極と、前記基板間のセル厚を規制するためのフォトスぺーサ一と、を備 えた液晶表示装置における前記フォトスぺーサ一の製造方法であって、 [3] at least two substrates, a liquid crystal provided between the substrates, two electrodes for applying an electric field to the liquid crystal, and a photo spacer for regulating a cell thickness between the substrates, A method of manufacturing the photospacer in a liquid crystal display device comprising:
前記 2枚の基板の一方の上に、請求項 1又は 2に記載のフォトスぺーサー用感光性 榭脂組成物を含む感光性榭脂層を形成する層形成工程と、  A layer forming step for forming a photosensitive resin layer containing the photosensitive resin composition for a photospacer according to claim 1 or 2 on one of the two substrates,
形成された前記感光性榭脂層を露光及びアルカリ現像してパターユングするバタ 一二ング工程と、  A patterning step of exposing and alkali-developing and patterning the formed photosensitive resin layer;
を有するフォトスぺーサ一の製造方法。  A method for manufacturing a photospacer.
[4] 前記層形成工程は、仮支持体上に請求項 1又は 2に記載のフォトスぺーサー用感 光性榭脂組成物で構成された感光性榭脂層を有する感光性転写材料を用い、前記 感光性榭脂層を前記 2枚の基板の一方に接するように転写する請求項 3に記載のフ オトスぺーサ一の製造方法。 [4] The layer forming step uses a photosensitive transfer material having a photosensitive resin layer composed of the photosensitive resin composition for photospacers according to claim 1 or 2 on a temporary support. The method for producing a photospacer according to claim 3, wherein the photosensitive resin layer is transferred so as to be in contact with one of the two substrates.
[5] 前記層形成工程は、請求項 1又は 2に記載のフォトスぺーサー用感光性榭脂組成 物を含む溶液を前記 2枚の基板の一方の上に塗布し、乾燥する請求項 3に記載のフ オトスぺーサ一の製造方法。 [5] In the layer forming step, the solution containing the photosensitive resin composition for photospacers according to claim 1 or 2 is applied onto one of the two substrates and dried. A manufacturing method of the described photospacer.
[6] 請求項 3乃至 5の 、ずれか 1項に記載のフォトスぺーサ一の製造方法により製造さ れたフォトスぺーサーを備えた液晶表示装置用基板。 [6] A substrate for a liquid crystal display device comprising a photospacer produced by the method for producing a photospacer according to any one of claims 3 to 5.
[7] 請求項 6に記載の液晶表示装置用基板を備えた液晶表示素子。 [7] A liquid crystal display device comprising the liquid crystal display device substrate according to claim 6.
[8] 請求項 7に記載の液晶表示素子を備えた液晶表示装置。 8. A liquid crystal display device comprising the liquid crystal display element according to claim 7.
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