WO2007100007A1 - パターン形成装置、パターン形成方法 - Google Patents
パターン形成装置、パターン形成方法 Download PDFInfo
- Publication number
- WO2007100007A1 WO2007100007A1 PCT/JP2007/053790 JP2007053790W WO2007100007A1 WO 2007100007 A1 WO2007100007 A1 WO 2007100007A1 JP 2007053790 W JP2007053790 W JP 2007053790W WO 2007100007 A1 WO2007100007 A1 WO 2007100007A1
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- WO
- WIPO (PCT)
- Prior art keywords
- pattern
- developing
- developer
- electrode
- pattern electrode
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/385—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective supply of electric current or selective application of magnetism to a printing or impression-transfer material
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/22—Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20
- G03G15/34—Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20 in which the powder image is formed directly on the recording material, e.g. by using a liquid toner
- G03G15/344—Apparatus for electrographic processes using a charge pattern involving the combination of more than one step according to groups G03G13/02 - G03G13/20 in which the powder image is formed directly on the recording material, e.g. by using a liquid toner by selectively transferring the powder to the recording medium, e.g. by using a LED array
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G2215/00—Apparatus for electrophotographic processes
- G03G2215/06—Developing structures, details
- G03G2215/0634—Developing device
- G03G2215/0658—Liquid developer devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/05—Patterning and lithography; Masks; Details of resist
- H05K2203/0502—Patterning and lithography
- H05K2203/0517—Electrographic patterning
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1266—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by electrographic or magnetographic printing
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
- H05K3/207—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using a prefabricated paste pattern, ink pattern or powder pattern
Definitions
- the present invention relates to a pattern forming apparatus and a pattern forming method used for manufacturing, for example, a flat image display device, a wiring board, and an IC tag.
- a photolithography technique has played a central role as a technique for forming a fine pattern on the surface of a substrate.
- this photolithography technology is increasing its resolution and performance, it requires huge and expensive manufacturing facilities, and the manufacturing cost is also increasing according to the resolution.
- inkjet technology has begun to be put to practical use as a patterning technology that makes the most of the features of simple equipment and non-contact patterning, but there are limits to high resolution and high productivity. I have to say that there is. That is, in this respect, electrophotographic technology, in particular, electrophotographic technology using liquid toner has excellent potential.
- an electrostatic printing plate in which a pattern having different electrical resistances is formed on the surface in advance is used to develop the pattern by applying liquid toner to the plate, and this pattern image is formed on the glass.
- a method of forming a pattern of a phosphor or the like on a display windshield by transferring it to a plate see, for example, JP 2002-527783.
- a developed image with liquid toner generally has a layer thickness of l [xm] or less in many cases.
- An object of the present invention is to provide a pattern forming apparatus and a pattern forming method capable of forming a thick film pattern with high resolution and high accuracy.
- Another object of the present invention is to provide a pattern forming apparatus and a pattern forming method capable of reducing the processing time required for the development process and improving the operating rate of the apparatus.
- a pattern forming apparatus includes a plate having first and second pattern electrodes that are electrically independent from each other, and a first current charged in an insulating liquid.
- a first liquid developer in which image agent particles are dispersed is supplied to the plate through a first supply member, and a first potential difference is provided between the first supply member and the first pattern electrode.
- a first developing device that collects the first developer particles in the first liquid developer on the first pattern electrode and develops the second developer charged in the insulating liquid.
- a second liquid developer in which developer particles are dispersed is supplied to the plate via a second supply member, and a second potential difference is provided between the second supply member and the second pattern electrode.
- a second developing device for collecting and developing the second developer particles in the second liquid developer on the second pattern electrode, and the first pattern electrode on the first pattern electrode.
- a third potential difference is formed between the first pattern electrode and the second pattern electrode and the transfer medium with the transfer medium facing each other, and the first and second pattern electrodes are formed.
- a transfer device that transfers the first and second developer particles collected in step 1 to the transfer medium.
- the pattern forming apparatus of the present invention includes a plate in which a plurality of pattern electrodes are arranged in an electrically isolated state, a power supply device that applies a voltage independently to each of the plurality of pattern electrodes, and an insulating property.
- the first liquid developer in which the first developer particles charged in the liquid are dispersed, is supplied to the plate via the first supply member, and the first voltage is applied by the power supply device.
- the first developer particles in the first liquid developer are removed from the first pattern by a first electric field formed between the formed first pattern electrode and the first supply member.
- a first developing device that collects and develops on the electrode and a second liquid developer in which charged second developer particles are dispersed in an insulating liquid are supplied to the plate via a second supply member.
- the second developer particles in the second liquid developer are collected on the second pattern electrode and developed by a second electric field formed between the electrode and the second supply member.
- a second developing device a plate on which the first developer particles are collected and displayed on the first pattern electrode, and the second developer particles are collected and developed on the second pattern electrode;
- a third electric field is formed between the first pattern electrode and the second pattern electrode and the transfer medium with the transfer medium facing each other, and the first and second patterns are formed.
- a transfer device that transfers the first and second developer particles collected on the transfer electrode to the transfer medium.
- the pattern forming method of the present invention includes a step of preparing a plate in which the first and second pattern electrodes are alternately arranged in an electrically independent state, and charged in an insulating liquid.
- a first liquid developer in which first developer particles are dispersed is supplied to the plate via a first supply member, and a first voltage is applied to the first pattern electrode to apply the first voltage.
- a first electric field is formed between the first developer particles and the first developer particles in the first liquid developer supplied by the first electric field to the first pattern electrode.
- a first developing step for forming an image, and a second liquid developer in which second developer particles charged in an insulating liquid are dispersed is supplied to the plate via a second supply member, and A second voltage is applied to the second pattern electrode to form a second electric field with the second supply member.
- the second developer step in which the second developer particles in the second liquid developer supplied by the second electric field are collected on the second pattern electrode and developed; and Forming a third electric field between the first and second pattern electrodes and the transfer medium in a state where the plate developed by the second developer particles and the transfer medium are opposed to each other.
- FIG. 1 is a schematic diagram showing a configuration of a main part of a pattern forming apparatus according to a first embodiment of the present invention.
- FIG. 2 is a partially enlarged sectional view showing an intaglio used in the pattern forming apparatus of FIG.
- FIG. 3 is a partially enlarged perspective view for explaining the structure of one concave portion of the intaglio in FIG. 2.
- FIG. 4 is a schematic view partially showing a plurality of pattern electrodes provided on the intaglio in FIG. 2.
- FIG. 5 is a diagram for explaining the structure of a power supply device that switches and controls the voltage applied to the pattern electrode of FIG. 6 is an operation explanatory diagram for explaining a charging process for the intaglio in FIG. 2.
- FIG. 5 is a diagram for explaining the structure of a power supply device that switches and controls the voltage applied to the pattern electrode of FIG. 6 is an operation explanatory diagram for explaining a charging process for the intaglio in FIG. 2.
- FIG. 7 is an operation explanatory diagram for explaining a development process for the first color for the intaglio shown in FIG. 2.
- FIG. 8 is an operation explanatory diagram for explaining a development process of the second color for the intaglio shown in FIG. 2.
- FIG. 9 is an operation explanatory diagram for explaining a transfer process for transferring a pattern from an intaglio to a transfer medium after the development process is completed.
- FIG. 10 is a diagram showing a state in which a pattern is transferred to a transfer medium by the transfer process of FIG.
- FIG. 11 is a schematic view showing a modification of the pattern forming apparatus in FIG. 1.
- FIG. 12 is a schematic diagram for explaining an example of a configuration in which an intermediate transfer medium is used.
- FIG. 13 is an operation explanatory diagram for explaining an operation for performing parallel processing on the charging process and each color developing process for the intaglio.
- FIG. 14 is a block diagram for explaining a circuit configuration of a power supply device for realizing the operation explained in FIG.
- FIG. 15 is a schematic view of the essential portions of a pattern forming apparatus according to a second embodiment of the present invention.
- FIG. 16 is an operation explanatory diagram for explaining the operation of the pattern forming apparatus of FIG.
- FIG. 17 is a block diagram for explaining a circuit configuration of a power supply device for realizing the operation explained in FIG.
- FIG. 18 is a schematic diagram showing a pattern forming apparatus according to a third embodiment of the present invention.
- FIG. 19 is a schematic diagram for explaining an example of a configuration in which an intermediate transfer drum is used.
- FIG. 20 is a partially enlarged perspective view showing an example in which a functional layer is provided at the bottom of the recess in FIG. 3.
- FIG. 1 shows the configuration of the main part of the pattern forming apparatus 10 according to the first embodiment of the invention. Is shown schematically.
- the pattern forming apparatus 10 described here is, for example, an apparatus for forming a phosphor layer and a color filter on the inner surface of a display panel of a flat image display apparatus.
- the pattern forming apparatus 10 is a plate-shaped intaglio plate 1 as a plate of the present invention, and is disposed in close proximity to the lower side in the figure of the intaglio plate 1, and each color (r: red, g: green, b) : Blue)
- a plurality of developing devices that develop by supplying a liquid developer 2 2g, 2b (hereinafter sometimes collectively referred to as developing device 2), the surface of the high resistance layer 14 described later of the intaglio 1
- a charging device 3 for charging 14a to a predetermined potential, and a stage 4 holding the developing devices 2 and the charging devices 3 are provided.
- the pattern forming apparatus 10 moves the stage 4 relative to the intaglio 1 in the direction of arrow T in the figure while maintaining the gap between each developing device 2 and the intaglio 1. And a power supply device 6 for applying a voltage to a pattern electrode 13 (to be described later) of the intaglio 1 based on a control signal output from the control device 5.
- the pattern forming apparatus 10 has a transfer apparatus 30 (not shown in FIG. 1).
- FIG. 2 shows a partial cross-sectional view of the intaglio 1 described above.
- the intaglio 1 includes an insulative substrate 11, a common electrode 12 provided on the back side of the substrate 11 away from the developing device 2, a plurality of pattern electrodes 13 provided on the front side of the substrate 11, and the plurality of patterns.
- the electrode 13 is partially covered and partitioned, and has a high resistance layer 14 for forming a pixel unit recess 14b described later.
- the substrate 11 is formed of a resin material such as polyimide, PET (polyethylene terephthalate), PEN (polyethylene naphthalate), or a glass material, and has a thickness of about 20 111] to 50 [/ 1 m].
- the common electrode 12 is formed of a conductive material such as aluminum or stainless steel, and has a thickness of about 100 [zm] to 3000 [xm].
- the high resistance layer 14 is formed of a material (including an insulator) having a volume resistivity of 10 1Q [ ⁇ cm] or higher, such as polyimide, acrylic, polyester, urethane, epoxy, Teflon (registered trademark), nylon, etc.
- the film thickness is 10 [111] to 30 [111], preferably 20 [111] ⁇ 5 [111].
- the pattern electrode 13 is patterned on the surface of the substrate 11 as shown in FIG. Book
- the pattern electrode 13 of the embodiment has a plurality of the same patterns aligned in the relative movement direction T of the intaglio 1 and the stage 4, and each pattern electrode 13 is patterned in parallel with each other electrically independently. ing.
- Each pattern electrode 13 has a shape in which a plurality of rectangular portions 13 a corresponding to one pixel of the display panel are connected by elongated portions and wiring portions 131.
- the plurality of pattern electrodes 13 include the pattern electrode 13r for red and the pattern electrode 13g for green. And blue pattern electrodes 13b, which are alternately arranged in this order.
- the high resistance layer 14 has a plurality of recesses 14b that expose all the rectangular portions 13a of the pattern electrodes 13.
- the high resistance layer 14 has a shape that partially covers the wiring portions 131 of the plurality of pattern electrodes 13 patterned on the surface of the substrate 11 and exposes only the rectangular portions 13a on the surface side.
- the recess 14b of the high resistance layer 14 exposing the rectangular portion 13a of the pattern electrode 13 is shown in a partially enlarged sectional view.
- the depth of the recess 14b substantially corresponds to the layer thickness of the high resistance layer 14.
- a functional layer 91 as shown in FIG. 20 may be disposed at the bottom of the recess 14b.
- This functional layer 91 can be a release layer that promotes toner separation during transfer or an insulating layer to prevent discharge.
- a fluorine-based or silicon-based resin is used.
- the functional layer 91 having a film thickness of about 0.:! To 2 [/ m] was formed.
- Each pattern electrode 13 is connected to the power supply device 6 as shown in FIG. 5, so that different voltages can be independently applied to each pattern electrode 13.
- a switch 15 is wired to each pattern electrode 13, and each pattern electrode 13 is shifted between the power supply voltage (+200 [V] in this embodiment) and the ground voltage (0 [V]). It is possible to switch to either of them independently.
- the common electrode 12 is connected to the ground potential (0 [V]).
- a volume control function may be added so that an arbitrary voltage is applied to each pattern electrode 13 independently. .
- a scorotron charger having a charging case 3a, a charging wire 3b, and a grid electrode 3c is used.
- a corotron charger without a grid electrode a wire that does not use a wire, an ion generator, or the like may be used.
- the charging device 3 is disposed so as to face the surface 14a of the high resistance layer 14 of the intaglio 1 with a gap of about 1 [mm] to 2 [mm]. It is moved in the direction crossing the pattern electrode 13 (arrow T direction).
- FIG. 7 and 8 show an enlarged schematic structure of the developing device 2. Since the developing devices 2r, 2g, and 2b for the respective colors described above have the same structure except that the liquid developer to be used is different, the developing device 2 will be described here.
- the developing device 2 has two casings 21 and 22 arranged along the moving direction T with respect to the intaglio 1.
- a developing port roller 23 that functions as a supply member of the present invention is provided in the casing 21 on the downstream side in the movement direction.
- the developing roller 23 is disposed at a position where the circumferential surface thereof faces the surface 14a of the high resistance layer 14 of the intaglio 1 through a gap of about 100 [ ⁇ m] to 200 [ ⁇ m].
- a squeeze roller 24 is provided in the casing 22 on the upstream side in the movement direction.
- the squeeze roller 24 is disposed at a position where the circumferential surface thereof faces the intaglio 1 closer to the intaglio 1 than the developing roller 23, that is, a position separated from the surface 14a of the high resistance layer 14 by about 30 m to 60 [/ m]. , Rotate clockwise in the figure.
- the squeeze roller 24 partially removes the liquid developer supplied to the intaglio 1 by the developing roller 23 and controls the film thickness of the liquid developer remaining on the intaglio 1.
- a cleaning blade 25 formed of a rubber piece is disposed in contact.
- the liquid developer D is accommodated in a developer tank (not shown), and is supplied into the casing 21 by a pump or the like (not shown) via a resonating nozzle (not shown).
- the liquid developer D in the housing 21 is supplied to the intaglio 1 via the developing roller 23.
- excess liquid developer is collected in the housing 22 via the squeeze roller 24 and the cleaning blade 25, and is illustrated via a nose not shown by a pump not shown. It is discharged to a collection tank that does not have any.
- the liquid developer D is constituted by dispersing phosphor particles of various colors and pigment particles (developer particles) such as pigments and dyes in an insulating liquid. Each color developer particle is added with a metal sarcophagus or the like so as to be positively charged.
- the developing devices 2r, 2g, 2b and the charging device 3 held by the stage 4 include a control device By moving the stage 4 in the direction of arrow T with respect to the intaglio 1 based on the control of the device 5, it is moved along the surface of the intaglio 1 in the direction of arrow ⁇ . At this time, the stage 4 is moved substantially parallel to the surface of the intaglio 1 so as to maintain the gap between the intaglio 1 and the developing device 2 and the gap between the intaglio 1 and the charging device 3.
- the control device 5 moves the stage 4 (not shown here) at a constant speed, and moves the charging device 3 relative to the intaglio 1 at a relatively constant speed in the arrow ⁇ ⁇ direction.
- the surface 14a of the high resistance layer 14 of the intaglio 1 is charged.
- the switch 15 of the power supply device 6 is switched so that the common electrode 12 and all the pattern electrodes 13 of the intaglio 1 are at the ground potential (0 [V]).
- the charge applied to the pattern electrode 13 by charging flows to the ground potential, and as a result, only the surface 14a of the high resistance layer 14 is charged as shown in the figure.
- a DC voltage of about +6 [KV] is applied to the charging wire 3b, and a DC voltage of about +300 [V] is applied to the charging case 3a and the grid electrode 3c, for example.
- the surface 14b of the high resistance layer 14 of the intaglio 1 was charged to +400 [V], for example.
- the developing devices 2r, 2g, 2b held by the stage 4 also move in the direction of the arrow T, and supply the liquid developer of each color in parallel with the charging operation of the intaglio plate 1.
- Develop the pattern electrode 13 of the corresponding color In other words, the development of each color is sequentially performed on the portion of the intaglio 1 charged by the charging device 3.
- FIG. 7 is an operation explanatory diagram for explaining the first color (red) developing operation performed in parallel with the above-described charging operation.
- the red liquid developer is supplied to the red pattern electrode 13r for development, the pattern electrode 13r corresponding to the red pixel among the multiple pattern electrodes 13 (see Fig. 4) of the intaglio 1 is connected to the ground potential (0 [V]) (L level) and the pattern electrodes 13g and 13b of the remaining colors are switched to the power supply potential (+200 [V]) (H level in this embodiment).
- the three-color phosphor layer of the display panel is formed, red, green, and blue pixels are alternately arranged to form every other pattern electrode 13 as shown in FIG. L level voltage is given.
- the developing roller 23 of the developing device 2r is rotated counterclockwise in the figure, and the housing The red liquid developer D contained in 21 adheres to the roller peripheral surface and is rolled up.
- the developing roller 23 is rotated at a speed at which the peripheral surface speed is about 2 to 5 times the moving speed of the developing device 2r by the stage 4.
- the liquid developer D wound up by the roller peripheral surface wets and spreads between the opposing intaglio plate 1 through a certain gap, and a nip 26 filled with the liquid developer D is formed between the two. .
- the positively charged developer particles that migrate in the liquid developer in the nip 26 are moved from the surface 14a of the high resistance layer 14 to the developing roller 23 by the action of a directional electric field.
- the repulsive force is received from the surface 14a of the green electrode, and the green pattern electrode 13g and the blue pattern electrode 13b receive the repulsive force from the pattern electrodes 13g and 13b by the action of the electric field.
- the pattern electrode 13r is attracted only to the red pattern electrode 13r by the action of a directional electric field.
- red developer particles are collected at a relatively high concentration only in the recess 14b having the red pattern electrode 13r at the bottom, and a red pattern 27 is developed.
- the shape of the pattern 27 developed at this time depends on the shape of the recess 14b of the high-resistance layer 14, and thus becomes a plurality of rectangular patterns having substantially the same thickness as the high-resistance layer 14. That is, rectangular patterns having substantially the same size as the rectangular portions 13a of the corresponding color pattern electrodes 13r are arranged in a matrix.
- the liquid developer D interposed in the gap between the intaglio 1 and the squeeze roller 24 has passed through the immediately preceding image roller 23, so that the concentration of the developer particles is reduced.
- the thin excess liquid developer includes a counter electric field from the squeeze roller 24 to the red pattern electrode 13r, a counter force from the surface 14a of the high resistance layer 14 to the squeeze roller 24, a negative electric field, and a green color developer.
- a directional electric field acts on the squeeze roller 24 from the blue pattern electrodes 13g and 13b. Therefore, a small amount of developer particles floating in the excess liquid developer is attracted only to the red pattern electrode 13r.
- the red developer particles already attracted to the pattern electrode 13r are subjected to an electric field in the direction of pressing against the pattern electrode 13r, so there is no fear of peeling.
- the excess liquid developer adhered and collected on the peripheral surface of the squeeze roller 24 is a force S that tries to move again toward the intaglio plate 1, and the tar is pressed against the peripheral surface of the squeeze roller 24. It is scraped off by the cleaning blade 25 and collected in the housing 22.
- the surplus liquid developer collected in the housing 22 in this manner is collected in a collection tank (not shown) by a pump (not shown).
- the second color (green) developing operation for the intaglio 1 is performed by the green developing device 2g.
- the developing operation for the second color is executed in parallel with the charging operation and the developing operation for the first color, as in the case of developing the first color. Since the basic operation is substantially the same as that for red development described above, only the different parts will be briefly described here.
- a nip 26 is formed at a portion where the developing roller 23 faces the intaglio 1. Then, in this nip 26, a directional electric field is formed from the developing roller 23 to the green pattern electrode 13g, and the developer particles that migrate in the green liquid developer are aggregated in the recess 14b having the pattern electrode 13g. A green pattern 28 is formed. At this time, a directional electric field is formed on the developing roller 23 from the surface 14a of the high-resistance layer 14, and a directional electric field is formed on the developing roller 23 from the pattern electrodes 13r and 13b of other colors not related to the development. Of developer particles are prevented from adhering to other parts of the intaglio 1.
- the voltage applied to the developing roller 23 can be set to a value close to the voltage applied to the developing roller 23.
- a blue liquid developer is supplied to the intaglio plate 1 via the blue developing device 2b, and similarly, the blue resist electrode 14b is formed in the concave portion 14b of the high resistance layer 14 having the blue pattern electrode 13b.
- the color developer particles are aggregated to develop the blue pattern 29.
- the developing operation by the blue developing device 2b is also performed in parallel with other processes including the charging operation, similarly to the developing operation for each color described above.
- the intaglio 1 holding the patterns 27, 28, 29 of each color and the insulating transfer medium 31 are close to each other and face each other. All the patterns 27, 28, and 29 are collectively transferred to the transfer medium 31. At this time, it is desirable that the intaglio 1 and the transfer medium 31 are opposed to each other through a minute gap, and the insulating liquid of the liquid developer is wet between them.
- the transfer medium 31 is a front substrate of a display panel, and is a rectangular glass plate.
- each color pattern 27, 28, 29 has a shape that substantially depends on the shape of the recess 14 b of the high resistance layer 14 of the intaglio 1, and therefore there is no need for alignment between the colors in this embodiment.
- the transfer device 30 for transferring the patterns 27, 28, 29 of the intaglio 1 to the transfer medium 31 includes a counter electrode 32 disposed on the back surface of the transfer medium 31 that is separated from the intaglio 1 and the counter electrode.
- a power supply device 33 for applying a constant voltage to 32 is provided.
- the counter electrode 32 can be peeled off from the back surface of the transfer medium 31 after the transfer operation is completed.
- an L level voltage (0 [V]) is applied to all the pattern electrodes 13 of the intaglio 1 with the intaglio 1 and the transfer medium 31 facing each other in the transfer device 30 as shown in FIG.
- a bias voltage of about ⁇ 10 [KV] is applied to the counter electrode 32 via the power supply device 33.
- a relatively strong transfer electric field is formed from all the pattern electrodes 13 to the counter electrode 32, and as shown in FIG. 10, all the patterns 27, 28, 29 held on the intaglio 1 are transferred to the transfer medium 31. Is transferred onto the surface.
- the counter electrode 32 is separated from the back surface of the transfer medium 31, and the transfer medium 31 to which the color patterns 27, 28, 29 are transferred can be obtained.
- developer particles of each color are collected and developed in a large number of recesses 14b on the surface of the intaglio plate 1, and then patterns 27, 28, 29 of each color are transferred to the transfer medium. Can transfer to 31 at once.
- the development and transfer process can be performed by controlling the voltage applied to the plurality of pattern electrodes 13 provided on the intaglio 1, so that the transfer is performed a plurality of times using, for example, a corona charger. Stable transfer is possible without the need for operation.
- the present invention is not limited to this.
- the intaglio 1 is fixed to the developing device 2 and charging device 3 It's okay to move in the arrow T direction in the figure and execute the development process.
- the patterns 27, 28, 29 can be transferred to the transfer medium 31 using the transfer roller 35 waiting in the moving direction of the intaglio 1 and the intaglio 1 is automatically transferred to the transfer device. Can move to.
- an intermediate transfer medium formed of an elastic body may be used.
- a drum-shaped intermediate transfer medium 41 is arranged on the downstream side in the moving direction of the intaglio plate 1 that has passed through the charging device 3 and the three-color developing device 2, and the transfer roller 36 is placed on the peripheral surface of the intermediate transfer medium 41
- the patterns 27, 28, and 29 of each color may be collectively transferred, and each color pattern may be transferred to the transfer medium 31 by the transfer roller 37.
- the peripheral surface of the intermediate transfer medium 41 is cleaned by the cleaning device 42 every time the transfer of the pattern to the transfer medium 31 is completed.
- the charging device 3 near the left end of the intaglio plate 1 is shown. Is placed. From this state, the stage 4 is moved, and the charging device 3 and the three developing devices 2r, 2g, 2b are moved in the direction of the arrow T, the developing device 2r for red, the developing device 2g for green, and the developing device for blue 2b follows the charging device 3 in this order and passes through the left end of the intaglio 1.
- the charging device 3 and the developing device 2 pass through the respective portions along the arrow T direction of the intaglio 1 in the same order and at the same timing. .
- the voltage applied to a large number of pattern electrodes 13 arranged at equal intervals along the relative movement direction of the intaglio 1 is a rule in each process. It is necessary to control switching according to That is, At each moving position of page 4, all pattern electrodes 13 in the area facing the charging device 3 of the intaglio 1 need to be switched to the L level voltage (Fig. 13a), facing the red developing device 2r. The pattern electrode 13r for red in the area that has been switched to the L level voltage and the pattern electrodes 13g and 13b for the other colors must be switched to the H level voltage (Fig. 13b).
- the pattern electrode 13g for green in the area facing 2g must be switched to the L level voltage, and the pattern electrodes 13r and 13b for the other colors must be switched to the H level voltage (Fig. 13c).
- the blue pattern electrode 13b in the region facing the developing device 2b of the other color must be switched to the L level voltage, and the pattern electrodes 13g and 13r of the other colors must be switched to the H level voltage (FIG. 13d). ).
- a larger number of pattern electrodes 13 are actually arranged than shown in FIG.
- a large number of pattern electrodes 13 are also arranged in regions where the developing devices 2 of the respective colors face each other.
- the diameter of the developing roller 23 is about 20 [mm] to 30 [mm]
- the pitch of the pattern electrode 13 is about 0 ⁇ l [mm].
- the number of pattern electrodes 13 in Ep 26 between 1 is about 30.
- the voltage applied to the pattern electrode 13 that has passed through the area where each process is executed is shifted one by one, and switching control is performed according to the rules of each process.
- all the color patterns 27, 28, 29 can be developed by moving the stage 4 once with respect to the intaglio 1 and the process speed can be greatly improved.
- FIG. 14 is a block diagram showing the configuration of the control circuit of the power supply device 6 that switches and controls the voltage applied to the multiple pattern electrodes 13 of the intaglio 1.
- the state conversion unit 52 converts each pattern electrode 13 into a status signal indicating which process is being executed. Then, it is output as a 2-bit signal to the level selection unit 53 prepared for each pattern electrode 13.
- the position information output from the control device 5 is, for example, the elapsed time from the start of the movement of the stage 4 or the illustration provided in the stage 4. Not given as an output signal from the encoder.
- the status signal output from the status converter 52 includes four types: (1) standby state, (2) red development process, (3) green development process, and (4) blue development process. is there.
- the standby state (1) includes a charging process and includes a standby state between processes.
- Each level selection unit 53 outputs a 1-bit signal for selecting a voltage of a level suitable for each process to the voltage output unit 54 based on the state signal input from the state conversion unit 52. Then, a voltage of a level suitable for each process is applied from each voltage output unit 54 to each pattern electrode 13.
- the voltage output unit 54 corresponds to the switch 15 in the above-described embodiment, and switches the voltage between two levels of L level and H level.
- the voltage output unit 54 can also set the voltage value to be applied to each pattern electrode 13 to an arbitrary value.
- the optimum transfer electric field strength at the time of transfer is determined by the color of the developer particles in the liquid developer, so the H-level voltage value is set between the pattern electrodes 13r, 13g, and 13b assigned to each color. You may change according to an optimal value. In this case, since a specific color is assigned to each pattern electrode 13, the voltage change rate may be given in advance as a specified value in the voltage output unit 54.
- the voltage applied to the multiple pattern electrodes 13 of the intaglio 1 is sequentially switched and controlled in accordance with each process, so that the charging process and the development of each color are performed. Processes can be executed in parallel, the process speed can be greatly improved, and the operating rate of the equipment can be improved.
- the apparatus of the present embodiment is the same as the first embodiment described above except that the switching control unit of the voltage applied to the pattern electrode 13 is different. The detailed description is omitted.
- the structure of the intaglio 1 is exactly the same as that of the first embodiment described above.
- FIG. 15 shows an image diagram in which all the pattern electrodes 13 of the intaglio 1 are divided into a plurality of blocks 62.
- This block 62 represents a control unit, and there is no such block 62 in the actual intaglio 1. That is, in the first embodiment described above, the voltages applied to the many pattern electrodes 13 are individually switched and controlled. Several pattern electrodes 13 are controlled to be switched in block units.
- a rule of a specific process is always applied to the plurality of pattern electrodes 13 divided by one block 62, and a voltage based on the same rule is applied.
- all pattern electrodes 13 in one block are assigned to one specific process, and a plurality of processes are not assigned at the same time.
- the charging device 3 or the developing devices 2r, 2g, and 2b always act on the pattern electrode 13 in one block 62, or no device acts.
- the number of pattern electrodes 13 constituting one block 62 is determined by the distance between the adjacent developing devices 2 and the pitch of the pattern electrodes 13 along the moving direction of the stage 4. If the distance between the developing devices 2 in contact with P is L and the pitch of the pattern electrodes 13 is P, the number N of pattern electrodes 13 included in one block 62 requires the force S to satisfy the following equation.
- FIG. 16 is an operation explanatory diagram for explaining a specific example of the operation of the present embodiment in which the pattern electrode 13 is controlled to be switched in block units.
- the pattern electrode 13 of the intaglio 1 is divided into 14 blocks 62a to 62n as shown.
- a voltage corresponding to the charging process is applied to the pattern electrodes 13 belonging to the tenth block 62j to the fourteenth block 62 ⁇ from the left in the figure.
- an L level voltage is applied to all the pattern electrodes 13.
- a voltage corresponding to the red development process is applied to the pattern electrodes 13 belonging to the seventh block 62g to the ninth block 62i, and the red pattern electrode 13r is at the L level, and the other patterns
- An H level voltage is applied to the electrodes 13g and 13b. 4
- the voltage corresponding to the green development process is applied to the pattern electrodes 13 belonging to the sixth block 62d to the sixth block 62f, the L level is applied to the green pattern electrode 13g, and the other pattern electrodes 13r.
- 13b is given H level voltage.
- a voltage corresponding to the blue development process is applied to the pattern electrode 13 belonging to the first block 62a to the third block 62c, the blue pattern electrode 13b is at the L level, and the others.
- An H level voltage is applied to the pattern electrodes 13r and 13g.
- the charging process is executed on the block facing the charging device 3, and the red color on the 7th block 62g to the 9th block 62i.
- the red development process is executed in the block where the developing device 2r is facing
- the green developing process is executed in the block where the green developing device 2g is facing among the fourth blocks 62d to 62f.
- the block facing the blue developing device 2b executes the blue image process, and all the processes for the intaglio 1 are executed simultaneously in parallel. It will be.
- the voltage corresponding to the red development process is applied to the pattern electrode 13 belonging to the fifth block 62e to the seventh block 62g, and the voltage corresponding to the green development process is applied to the second block 62b to A voltage corresponding to the blue development process is applied to the pattern electrode 13 belonging to the fourth block 62d.
- an L level voltage is applied to the pattern electrode 13 belonging to the first block 62a that has passed through the region assigned to the development process.
- FIG. 17 shows a block diagram of a control circuit provided in the power supply device 6 for realizing the switching control of the present embodiment.
- this position information 51 is assigned to each process by the state conversion unit 52 to each block 62. Is converted into a 2-bit status signal indicating whether or not This status signal is the same as described in FIG.
- the 2-bit output signal converted by the state conversion unit 52 is input to the next block level selection unit 55, and is converted into a 1-bit signal that selects the L level or the H level according to each process state.
- the A voltage corresponding to each level is actually applied to the pattern electrodes 13 belonging to each block 62 via the voltage output unit 54.
- the control load can be greatly reduced by switching and controlling the voltage applied to all the pattern electrodes 13 of the intaglio 1 in units of blocks.
- the signal capacity output from the state conversion unit 52 to the level selection unit 55 can be reduced.
- 13-bit (11 bits + 2 bits) signal processing is required to drive all of them individually.
- 6-bit (4 bits + 2 bits) signal processing is sufficient.
- the intaglio 1 is formed in a drum shape, and the charging device 3, the developing devices 2r, 2g, 2b for each color, and the cleaner 71 are fixedly arranged around the intaglio 1.
- the intaglio 1 is made of a conductive material such as aluminum or stainless steel, and the structure described in FIG. 2 is laminated on its surface.
- the conductive drum may be the common electrode 12, and other structures may be separately formed into an insulating sheet and wound around the conductive drum.
- the power supply device 6 incorporates the control circuit according to the first embodiment or the second embodiment described above, and receives a signal from the encoder 72 provided on the rotating shaft of the intaglio 1. The signal is taken into the control circuit as the position information signal 51.
- the operation by the pattern forming apparatus 70 is the same as in the first embodiment or the second embodiment described above.
- the surface 14a of the high resistance layer 14 of the intaglio 1 is charged by the charging device 3, and then the red development process, the green development process, and the blue development process are sequentially executed to develop the recess 14b of the intaglio 1
- the patterns 27, 28, and 29 of the respective colors are collectively transferred onto the transfer medium 31. Thereafter, the developer particles remaining on the surface of the intaglio 1 without being transferred are removed by the cleaner 71.
- each component of the pattern forming apparatus 70 can be operated without being moved on the spot, thereby reducing the burden of controlling the operation of the apparatus.
- an increase in size of the apparatus can be suppressed.
- the charging process, each color development process, the transfer process, and the cleaning process can be performed simultaneously in parallel, the process time can be greatly reduced.
- the apparatus 70 of the present embodiment differs from the first and second embodiments described above in that the positions of the charging device 3 and the color developing devices 2r, 2g, and 2b are fixed. If the relative positional relationship with these devices can be grasped, the control device according to the present invention can be used. Therefore, the present embodiment is exactly the same as the first embodiment or the second embodiment described above.
- the voltage applied to each pattern electrode 13 of the intaglio 1 can be switched and controlled by the method.
- An intermediate transfer drum 81 may be used as in the pattern forming apparatus 80 shown in 19.
- the surface of the high resistance layer of the intaglio 1 is charged by the charging device 3, and the patterns 27, 28, 29 of each color are developed through the color developing devices 2r, 2rg, 2b, and the drum-shaped intaglio 1
- the patterns 27, 28, and 29 of each color are temporarily transferred to the intermediate transfer drum 81 that is arranged close to the peripheral surface of the sheet.
- the patterns 27, 28, 29 transferred onto the intermediate transfer drum 81 are transferred by the transfer roller 82.
- the image is transferred onto the transfer medium 31.
- the peripheral surface of the intermediate transfer drum 81 is formed of an elastic body, and after transferring the pattern to the transfer medium 31, the developer remaining on the peripheral surface is cleaned by the taring device 83.
- the present invention is not limited to the above-described embodiments as they are, but can be embodied by modifying the constituent elements without departing from the spirit of the invention in the implementation stage.
- various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the above-described embodiment. For example, some components may be deleted from all the components shown in the above-described embodiment.
- the constituent elements in different embodiments may be appropriately combined.
- the case has been described in which only one of the intaglio, the intermediate transfer body, and the transfer medium is moved with respect to the other.
- the two members may move relatively.
- the present invention is not limited to this, and all the components are operated with the opposite polarity charged. May be.
- the present invention can be applied to an apparatus for forming a conductive pattern in a circuit board, an IC tag, or the like.
- the liquid imaging agent is, for example, resin particles having an average particle size of 0.3 [/ m] and metal fine particles having an average particle size of 0.02 [zm] adhering to the surface (for example, copper , Palladium, silver, etc.) and a charge control agent such as a metal sarcophagus can be used to form a wiring pattern with a developer on a silicon wafer, for example, by the same method as in the above-described embodiment. .
- a charge control agent such as a metal sarcophagus
- the pattern forming apparatus of the present invention has the configuration and operation as described above, a thick film pattern can be formed with high resolution and high accuracy, and the processing time required for the development process can be shortened. Can be improved.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Color Electrophotography (AREA)
- Optical Filters (AREA)
- Printing Methods (AREA)
- Wet Developing In Electrophotography (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Combination Of More Than One Step In Electrophotography (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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EP07715066.2A EP1990792A4 (en) | 2006-03-02 | 2007-02-28 | STRUCTURE GENERATION DEVICE AND STRUCTURE MANUFACTURING METHOD |
JP2008502823A JP4881372B2 (ja) | 2006-03-02 | 2007-02-28 | パターン形成装置、パターン形成方法 |
CN200780007581XA CN101395652B (zh) | 2006-03-02 | 2007-02-28 | 图案形成装置、图案形成方法 |
US12/230,576 US8190063B2 (en) | 2006-03-02 | 2008-09-02 | Pattern forming apparatus and pattern forming method |
Applications Claiming Priority (2)
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JP2006056502 | 2006-03-02 | ||
JP2006-056502 | 2006-03-02 |
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US12/230,576 Continuation US8190063B2 (en) | 2006-03-02 | 2008-09-02 | Pattern forming apparatus and pattern forming method |
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WO2007100007A1 true WO2007100007A1 (ja) | 2007-09-07 |
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PCT/JP2007/053790 WO2007100007A1 (ja) | 2006-03-02 | 2007-02-28 | パターン形成装置、パターン形成方法 |
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Country | Link |
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US (1) | US8190063B2 (ja) |
EP (1) | EP1990792A4 (ja) |
JP (1) | JP4881372B2 (ja) |
KR (1) | KR101023555B1 (ja) |
CN (1) | CN101395652B (ja) |
TW (1) | TW200741380A (ja) |
WO (1) | WO2007100007A1 (ja) |
Cited By (1)
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WO2011033941A1 (ja) * | 2009-09-17 | 2011-03-24 | 独立行政法人産業技術総合研究所 | 微細パターン形成方法 |
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WO2011034594A1 (en) * | 2009-09-17 | 2011-03-24 | Materials And Electrochemical Research (Mer) Corporation | Flow-synchronous field motion refrigeration |
US20180074240A1 (en) * | 2015-04-16 | 2018-03-15 | Oculus Vr, Llc | Colour converting structure for led arrays |
US9872399B1 (en) * | 2016-07-22 | 2018-01-16 | International Business Machines Corporation | Implementing backdrilling elimination utilizing anti-electroplate coating |
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- 2007-02-28 KR KR1020087021386A patent/KR101023555B1/ko not_active IP Right Cessation
- 2007-02-28 CN CN200780007581XA patent/CN101395652B/zh not_active Expired - Fee Related
- 2007-02-28 WO PCT/JP2007/053790 patent/WO2007100007A1/ja active Application Filing
- 2007-02-28 JP JP2008502823A patent/JP4881372B2/ja not_active Expired - Fee Related
- 2007-03-02 TW TW096107267A patent/TW200741380A/zh unknown
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Also Published As
Publication number | Publication date |
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TW200741380A (en) | 2007-11-01 |
EP1990792A4 (en) | 2014-05-07 |
JP4881372B2 (ja) | 2012-02-22 |
CN101395652B (zh) | 2010-12-01 |
CN101395652A (zh) | 2009-03-25 |
EP1990792A1 (en) | 2008-11-12 |
KR20080092468A (ko) | 2008-10-15 |
US20090053632A1 (en) | 2009-02-26 |
KR101023555B1 (ko) | 2011-03-21 |
JPWO2007100007A1 (ja) | 2009-07-23 |
US8190063B2 (en) | 2012-05-29 |
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