WO2007094119A1 - Method for fabricating color filter, color filter, and display device having such color filter - Google Patents

Method for fabricating color filter, color filter, and display device having such color filter Download PDF

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Publication number
WO2007094119A1
WO2007094119A1 PCT/JP2006/325158 JP2006325158W WO2007094119A1 WO 2007094119 A1 WO2007094119 A1 WO 2007094119A1 JP 2006325158 W JP2006325158 W JP 2006325158W WO 2007094119 A1 WO2007094119 A1 WO 2007094119A1
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WIPO (PCT)
Prior art keywords
dark color
color filter
separation wall
color separation
substrate
Prior art date
Application number
PCT/JP2006/325158
Other languages
French (fr)
Japanese (ja)
Inventor
Haruhiko Yoshino
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Fujifilm Corporation
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Publication date
Application filed by Fujifilm Corporation filed Critical Fujifilm Corporation
Priority to JP2008500409A priority Critical patent/JPWO2007094119A1/en
Priority to CN2006800527827A priority patent/CN101371171B/en
Publication of WO2007094119A1 publication Critical patent/WO2007094119A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29DPRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00Producing optical elements, e.g. lenses or prisms
    • B29D11/00634Production of filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01Embodiments of or processes related to ink-jet heads
    • B41J2202/09Ink jet technology used for manufacturing optical filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters

Definitions

  • the present invention relates to a method for manufacturing a color filter for a display device, a power color filter obtained by the manufacturing method, and a display device having the same.
  • a color filter for a display device has a structure in which red, green, and blue dot-like images are arranged in a matrix on a substrate such as glass, and the boundary is divided by a dark color separation wall such as a black matrix. is there.
  • a method for producing such a color filter conventionally, a substrate such as glass is used as a support. 1) Dyeing method, 2) Printing method, 3) Application of colored photosensitive resin solution, exposure and Colored photosensitive resin solution method (colored resist method) by repeated development (see, for example, JP-A-63-298304, JP-A-63-309916, and JP-A-1-152449).
  • a method of sequentially transferring images formed on a temporary support onto a final or temporary support for example, JP-A-61-99103, JP-A-61-233704, and JP-A-61). — See publication No. 279802.
  • transfer method for forming a multicolor image by repeating exposure and development for the number of colors.
  • Also known is a method using an ink jet method (for example, see JP-A-8-227012).
  • the colored resist method can produce a color filter with high positional accuracy, but it is not advantageous in terms of cost due to a large loss in application of the photosensitive layer resin solution.
  • the ink jet method has a problem that the position accuracy of the pixel is poor, although the loss of the resin liquid is small and advantageous in terms of cost.
  • a color filter manufacturing method has been proposed in which a black matrix (dark color separation wall) that overcomes these problems is formed by the colored resist method, and RGB pixels are manufactured by the inkjet method. When the cross-sectional shape is observed, Since the edges and edges are rounded and each of the inks that are subsequently ejected easily gets over the black matrix, bleeding, protrusion, color mixture with adjacent pixels, and white spots may occur.
  • a method for producing a color filter which includes a step of irradiating and light-curing a dark color separation wall pattern after development, and a step of heat-treating the photocured dark color separation wall pattern.
  • Force In this method if the shape of the edge part of the partition wall is rounded or the edge part is rounded immediately (angularly V, etc.), the ink is darkly separated There is still a problem that makes it easier to get over the wall!
  • Patent Document 1 JP-A 63-298304
  • Patent Document 2 Japanese Patent Laid-Open No. 63-309916
  • Patent Document 3 JP-A-1 152449
  • Patent Document 4 JP-A 61-99103
  • Patent Document 5 Japanese Patent Laid-Open No. 61-233704
  • Patent Document 6 JP-A 61-279802
  • Patent Document 7 JP-A-61-99102
  • Patent Document 8 JP-A-8-227012
  • Patent Document 9 Japanese Patent Application Laid-Open No. 2002-156520
  • Patent Document 10 JP 2001-343518 A
  • the present invention provides a color filter manufacturing method capable of forming a color filter with low positional accuracy and high efficiency by forming pixels with low positional accuracy and color mixing, and a color filter obtained by this method, and
  • An object of the present invention is to provide a display device provided with this color filter.
  • the present invention provides the following manufacturing method and the like.
  • a method for producing a color filter characterized in that the step of forming the dark color separation wall includes the following steps (1) to (3).
  • ⁇ 2> The method according to ⁇ 1>, wherein the poor oxygen atmosphere is at least one selected from an inert gas atmosphere, a reduced pressure, and a protective layer lowering force capable of blocking oxygen. This is a method for producing a color filter.
  • the development condition in the development step is that the concentration of an alkaline substance as a developer is
  • the method of forming each pixel between the dark color separation walls is a method in which a colored liquid composition forming each pixel enters between the dark color separation walls by an inkjet method.
  • ⁇ 8> A color filter produced by the method for producing a color filter according to any one of ⁇ 1> to ⁇ 7>.
  • the cross-sectional shape of the dark color separation wall formed on the substrate is such that the height from the substrate at the highest height of the dark color separation wall from the substrate is h, and the height from the substrate is 0.8 h.
  • the line parallel to the base plate at the position is L, and the tangent line at the point where L and the dark separation wall touch is L and h.
  • a display device comprising the color filter according to ⁇ 9>.
  • a method for producing a color filter that can produce a color filter with low positional cost and high efficiency while forming a pixel with low positional accuracy and color mixing, etc., and a color filter obtained by this method And a display device including the color filter.
  • FIG. 1 is a conceptual diagram showing a cross-sectional shape of a dark color separation wall in the present invention.
  • FIG. 2A is a conceptual diagram showing a color filter pattern.
  • FIG. 2B is a conceptual diagram showing a color filter pattern.
  • FIG. 3A is a conceptual diagram showing a cross-sectional shape of a color filter.
  • FIG. 3B is a conceptual diagram showing a cross-sectional shape of the color filter.
  • the method for producing a color filter of the present invention has two or more pixel groups exhibiting different colors on a substrate, and the pixels constituting the pixel group are separated from each other by a dark color separation wall.
  • the method for producing a color filter is characterized in that the step of forming the dark color separation wall includes the following steps (1) to (3).
  • the dark color separation wall produced by the conventional method may cause defects such as color mixing when the pixel is formed by the ink jet method with a rough cross-sectional shape and the ink gets over the edge immediately. was there.
  • the post-exposure amount is increased to 2500 mjZcm 2 or more to maintain the shape after development, that is, the edge shape of the dark color separation wall is maintained in an angular state, so that Overcoming ink can be suppressed and color mixing can be prevented.
  • the development is made as strong as possible and the cross-sectional shape of the dark color separation wall after development is changed from a vertical to an inversely tapered shape.
  • the dark color separation wall in the method for producing a color filter of the present invention will be described in detail.
  • the dark color separation wall according to the present invention is formed from a dark color composition containing a dark color body.
  • the dark color composition is a composition having a high optical density, and its value when applied to the same thickness as the dark color separation wall to be formed is 2.0 to 10.0. .
  • the optical density of the dark color composition is preferably 2.5 to 6.0, particularly preferably 3.0 to 5.0.
  • the dark color composition is preferably cured by a photoinitiating system as described later, the optical density with respect to the exposure wavelength (generally, the ultraviolet region) is also important. That is, the value when applied to the same thickness as the dark color separation wall to be formed is 2.0 to: LO. 0, preferably 2.5 to 6.0, and most preferably 3 0 to 5.0. 2.
  • the dark color separation wall shape may not be what is desired. If it exceeds 10.0, the polymerization cannot be started and the dark color separation wall itself is created. It becomes difficult. As long as it has strong properties, even if the dark color in the composition is an organic substance (various dyes such as dyes and pigments) or carbon in various forms, the combined power of these substances can also be obtained. It may be a thing.
  • the dark color is not particularly limited, but a black color is most often used.
  • the dark color body used for the dark color separation wall include the pigments and dyes described in JP-A-2005-17716, [0038] to [0054], and JP-A 2004-361447.
  • the pigments described in JP-A Nos. [0068] to [0072] and the colorants described in JP-A-2005-17521, [0080] to [0088] can be preferably used.
  • Organic pigments, inorganic pigments, dyes, and the like can be suitably used for the dark color composition, and when light-shielding properties are required for the photosensitive resin layer, carbon black, titanium oxide,
  • light-shielding agents such as metal oxide powder such as iron tetroxide, metal sulfide powder, and metal powder
  • a mixture of pigments such as red, blue, and green can be used.
  • Known colorants dyes and pigments
  • the pigment is uniformly dispersed in the dark color composition!
  • the ratio of the dark color body in the solid content of the dark color composition is preferably 30 to 70% by mass, and preferably 40 to 60% by mass. More preferably, it is more preferably 50 to 55% by mass.
  • dark black color body examples include carbon black, titanium carbon, iron oxide, titanium oxide, graphite, and the like. Among these, carbon black is preferable.
  • the dark colored body is preferably used as a dispersion.
  • This dispersion can be prepared by adding and dispersing a composition obtained by previously mixing the dark body and a dispersant in an organic solvent (or vehicle) described later.
  • the vehicle is a portion of a medium that disperses a dark colored body when the paint is in a liquid state, a portion that is liquid and binds to the dark colored body, and hardens the coating film (binder). And a component for dissolving and diluting (organic solvent).
  • organic solvent organic solvent
  • the dark color material (pigment) used in the present invention is preferably one having a number average particle diameter of 0.001 to 0.00 from the viewpoint of dispersion stability, and more preferably 0.01 to 0.08 m. preferable.
  • particle diameter means the diameter when the electron micrograph image of the particle is a circle of the same area
  • number average particle diameter is the above-mentioned particle diameter for a large number of particles, This means the average value of 100 pieces.
  • the dark color composition preferably contains at least a polymerization initiator and a polyfunctional monomer in addition to a strong dark body.
  • a known additive such as a binder, a plasticizer, a filler, a stabilizer, a polymerization inhibitor, a surfactant, a solvent, an adhesion promoter and the like can be further contained as necessary.
  • the dark color composition is thermoplastic, which preferably becomes soft or tacky at a temperature of at least 150 ° C. Such viewpoint power can be modified by adding a compatible plasticizer.
  • a heat initiation system using a thermal initiator and a photoinitiation system using a photoinitiator are generally used.
  • a dark color separation wall after curing is used. Since it is important to have a shape as described later, it is preferable to use a photoinitiating system.
  • the photopolymerization initiator used here generates an active species that initiates polymerization of the polyfunctional monomer described below by irradiation with radiation such as visible light, ultraviolet light, far ultraviolet light, electron beam, and X-ray (also referred to as exposure). It can be selected as appropriate from known photopolymerization initiators or photopolymerization initiator systems.
  • trino, romethyl group-containing compounds for example, trino, romethyl group-containing compounds, atalidine compounds, acetophenone compounds, biimidazole compounds, triazine compounds, benzoin compounds, benzophenone compounds, ⁇ -diketone compounds, polynuclear quinone compounds, xanthone compounds Compounds, diazo compounds, and the like.
  • At least one selected from trino, romethyl group-containing compounds, atalidine compounds, acetophenone compounds, biimidazole compounds, and triazine compounds is preferred. It is preferable to contain at least one selected from a containing compound and an atalidine compound. Torino, romethyl group-containing compounds, and atalidine compounds are useful because they are versatile and inexpensive.
  • a compound containing a trihalomethyl group is 2-trichloromethyl-1- (P-styrylstyryl) 1,3,4-oxadiazole, and as an atalidine compound, 9 —Phenolacridine, 6- [p— (N, N-bis (ethoxycarbomethyl) amino) phenol] — 2, 4 bis (trichloromethyl) —s triazine, 2— (p— Butoxystyryl) 1 5 Trichloromethyl 1 3, 3, 4-oxadiazole-containing compounds such as trihalomethyl groups, and Michler's ketone, 2, 2'-bis (2, 4 diclonal mouth) -4, 4 ', 5, 5'-tetraphenyl 1,2'-biimidazole.
  • the photopolymerization initiator may be used alone or in combination of two or more.
  • the total amount of the photopolymerization initiator in the dark composition is preferably from 0.1 to 20% by weight, particularly preferably from 0.5 to 10% by weight, based on the total solid content (mass) of the dark color composition.
  • the total amount is 0.1 quality If the amount is less than%, the photocuring efficiency of the composition may be low and exposure may take a long time.
  • the developed image pattern may be lost during development, or the pattern surface may be easily roughened.
  • the photopolymerization initiator may be configured using a hydrogen donor in combination.
  • the hydrogen donor is preferably a mercabtan compound or an amine compound as defined below from the viewpoint that sensitivity can be further improved.
  • the term “hydrogen donor” as used herein refers to a compound that can donate a hydrogen atom to a radical generated from the photopolymerization initiator by exposure.
  • the mercabtan compound has a benzene ring or a heterocyclic ring as a mother nucleus, and has one or more, preferably 1 to 3, more preferably 1 to 2, mercapto groups directly bonded to the mother nucleus.
  • merkabutane-based hydrogen donor The amine compound is a compound having a benzene ring or a heterocyclic ring as a mother nucleus and having 1 or more, preferably 1 to 3, more preferably 1 to 2, amino groups directly bonded to the mother nucleus ( Hereinafter referred to as “amine-based hydrogen donor”). These hydrogen donors may have a mercapto group and an amino group at the same time.
  • mercaptan-based hydrogen donor examples include 2 mercaptobenzozoazole, 2 mercaptobenzoxazole, 2 mercaptobenzozoimidazole, 2,5 dimercapto 1,3,4-thiadiazole, 2 mercapto 2 , 5 dimethylaminopyridine, and the like.
  • 2-mercaptobenzothiazole and 2-mercaptobenzoxazole are preferable, and 2-mercaptobenzothiazole is particularly preferable! /.
  • amine-based hydrogen donor examples include 4, 4 'bis (dimethylamino) benzophenone, 4, 4'-bis (jetylamino) benzophenone, 4-jetylaminoacetophenone, 4- Examples include dimethylaminopropiophenone, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid, 4-dimethylaminobenzozotolyl and the like. Of these, 4,4′-bis (dimethylamino) benzophenone and 4,4′-bis (jetylamino) benzophenone are preferable, and 4,4′-bis (jetylamino) benzophenone is particularly preferable.
  • the hydrogen donor can be used alone or in admixture of two or more, and the formed image is difficult to drop off from the permanent support during development, and the strength and sensitivity are improved. It is preferable to use a combination of one or more mercaptan hydrogen donors and one or more amine hydrogen donors.
  • Specific examples of the combination of the mercabbutane-based hydrogen donor and the amine-based hydrogen donor include 2 mercaptobenzothiazole Z4,4'-bis (dimethylamino) benzophenone, 2-mercaptobenzothiazole Z4,4'-bis (Jetylamino) benzophenone, 2 mercaptobenzoxazole Z4,4'-bis (dimethylamino) benzophenone, 2mercaptobenzoxazole Z4,4'-bis (jetylamino) benzophenone, and the like.
  • a more preferred combination is 2 mercaptobenzothiazole / 4,4'-bis (jetylamino) benzophenone, 2mercaptobenzoxazole Z4,4'-bis (jetylamino) benzophenone, and a particularly preferred combination is 2-mercaptobenzozothiazole / 4, 4 'Bis (jetylamino) benzophenone.
  • the mass ratio (M: A) of the mercabtan hydrogen donor (M) to the amine hydrogen donor (A) is Usually, 1: 1 to 1: 4 is preferred, and 1: 1 to 1: 3 is more preferred.
  • the total amount of the hydrogen donor in the dark color composition is preferably from 0.1 to 20% by weight, particularly preferably from 0.5 to 10% by weight, based on the total solid content (mass) of the dark color composition.
  • the following compounds may be used singly or in combination of two or more with other monomers as required. Specifically, tert-butyl (meth) acrylate, ethylene glycol di (meth) acrylate, 2-hydroxypropyl (meth) acrylate, triethylene glycol di (meth) acrylate, trimethylol property ( (Meth) Atarylate, 2-Ethyl-2-butyl-propanediol Di (meth) acrylate, Pentaerythritol tri (meth) acrylate, Pentaerythritol tetra (meth) acrylate, Dipentaerythritol Hexa (meth) attaly , Dipentaerythritol penta (meth) acrylate, polyoxyethylated trimethylolpropane tri (meth) acrylate, tris (2- (meth) attayllooxychet
  • a compound having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, polyethylene glycol mono (meth) acrylate and hexamethylene diisocyanate, Reactants with diisocyanates such as toluene diisocyanate and xylene diisocyanate can also be used.
  • pentaerythritol tetraatalylate dipentaerythritol hexaatalylate, dipentaerythritol pentaatalylate, and tris (2-acryloyloxychetyl) isocyanurate.
  • the content of the polyfunctional monomer in the dark color composition is the total solid content of the dark color composition.
  • the dark color composition may contain a binder as necessary.
  • a polymer having a polar group such as a carboxylic acid group or a carboxylic acid group in the side chain is preferable. Examples thereof include JP-A-59-44615, JP-B-54-34327, JP-B-58-12577, JP-B-54-25957, JP-A-59-53836, and As described in JP-A-59-71048, methacrylic acid copolymer, acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partial ester oxalic maleic acid copolymer And the like.
  • cellulose derivatives having a carboxylic acid group in the side chain may also be mentioned.
  • cyclic acid anhydride to the polymer which has a hydroxyl group can also be used preferably.
  • Particularly preferred examples include copolymers of benzyl (meth) atalylate and (meth) acrylic acid described in US Pat. No. 4,139,391, benzyl (meth) acrylate, (meth) acrylate, and other Mention may be made of multicomponent copolymers with monomers.
  • These binders having a polar group may be used singly or may be used in the state of a composition used in combination with an ordinary film-forming polymer!
  • the content of the non-colored dark color composition is preferably 20 to 50% by mass and more preferably 24 to 45% by mass with respect to the total solid content (mass) of the layer or composition.
  • the dark color composition may contain a solvent as necessary.
  • organic solvents include methyl ethyl ketone, propylene glycol monomethyl ether, propylene glycol monomethino ethenore acetate, cyclohexanone, cyclohexanol, methylol isobutyl ketone, ethyl lactate, methyl lactate, strength prolatatum. Etc.
  • the dark color composition may contain a surfactant as necessary.
  • a uniform film thickness can be controlled by including a surfactant in the dark color composition. Uneven coating can be effectively prevented.
  • Preferred examples of the surfactant include those described in JP-A-2003-337424 and JP-A-11-133600.
  • As the content in the dark composition surface active agent, and with respect to the total solid content (mass) of the composition is from 0.001 to 1 mass 0/0 power S- general, 0 . 01 to 0.5 mass 0/0 force S preferably, from 0.03 to 0.3% by weight is particularly preferred.
  • the dark color composition may contain an ultraviolet absorber as necessary.
  • the ultraviolet absorber include compounds described in JP-A-5-72724, and compounds such as salicylate, benzophenone, benzotriazole, cyanoacrylate, nickel chelate, and hindered amine.
  • the content of the ultraviolet absorber with respect to the total solid content of the dark color composition is generally 0.5 to 15% by mass, and preferably 1 to 12% by mass. ⁇ 10 mass% is particularly preferred.
  • the dark composition preferably contains a thermal polymerization inhibitor.
  • thermal polymerization inhibitors include hydroquinone, hydroquinone monomethyl ether, p-methoxyphenol, di-tert-butyl- ⁇ -cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4'-thiobis (3-methyl-6-tert-butyl Phenol), 2,2′-methylenebis (4-methyl 6t-butylphenol), 2 mercaptobenzimidazole, phenothiazine and the like.
  • the content relative to the total solids in the dark composition 0.
  • the dark color composition may contain "adhesion aid" described in JP-A-11 133600, other additives, and the like.
  • the dark color separation wall according to the present invention is formed from the dark color composition.
  • a dark color separation wall separates two or more pixel groups and is generally black, but is not limited to black.
  • the step of forming the dark color separation wall includes at least the following steps (1) to (3).
  • Pattern exposure process (2) Process of pattern exposure of dark color composition layer in an oxygen-poor atmosphere (pattern exposure process) (2) Process of developing after pattern exposure to form dark color separation wall pattern (Development process)
  • Pattern exposure refers to irradiating the dark color composition layer with patterned light through a mask on which an image pattern is formed. In some cases, light irradiation may be performed without using a mask.
  • Examples of the light source used for the light irradiation include known light sources such as medium to ultra high pressure mercury lamps, xenon lamps, and metal halide lamps.
  • the mask can be appropriately selected from known masks.
  • An oxygen-poor atmosphere in photocuring a strong dark composition means an inert gas, a reduced pressure, and a protective layer capable of blocking oxygen, and these are described in detail below. It is as follows.
  • An inert gas is a general gas such as N, H, or CO, or a rare gas such as He, Ne, or Ar.
  • N is preferably used because of safety, availability, and cost.
  • Under reduced pressure refers to a state of 500 hPa or less, preferably lOOhPa or less.
  • the term “under the protective layer capable of blocking oxygen” refers to a state in which the protective layer is formed on the layer made of the dark color composition.
  • the protective layer capable of blocking oxygen include, for example, polybute ether Z maleic anhydride polymer, ruboxyalkyl cellulose described in JP-A-46-2121 and JP-B-56-40824.
  • Water-soluble salts water-soluble cellulose ethers, water-soluble salts of carboxyalkyl starch, polybulal alcohol, polybulurpyrrolidone, various Reacrylamides, various water-soluble polyamides, water-soluble salts of polyacrylic acid, gelatin, ethylene oxide polymers, various starches and their similar water-soluble salts, styrene-maleic acid copolymers, Maleate rosin, and combinations of two or more of these. Of these, a combination of polybutyl alcohol and polyvinyl pyrrolidone is particularly preferred. Polyuryl alcohol having a hatching rate of 80% or more is preferred. The content of polyvinylpyrrolidone is preferably 1 to 75% by weight, more preferably 1 to 50% by weight, of the alkali-soluble rosin layer solids. It is 10 mass%, More preferably, it is 10-40 mass%.
  • the protective layer capable of blocking oxygen various films can be used.
  • polyesters such as PET, polyamides such as nylon, ethylene acetate butyl copolymer (EVAs) )
  • EVAs ethylene acetate butyl copolymer
  • These films may be stretched as necessary, and the thickness is suitably 5 to 300 m, preferably 20 to 150 ⁇ m.
  • an intermediate layer or a temporary support described later can be suitably used as a protective layer capable of blocking oxygen.
  • the oxygen permeability coefficient of the protective layer capable of blocking oxygen produced in this way is preferably 2000 cm 3 Z (m 2 ⁇ dayatm) or less! /, But is lOOcmV (m 2 ⁇ dayatm) or less. More preferably, it is most preferably 50 cm 3 Z (m 2 ⁇ day ⁇ atm) or less.
  • the dark composition layer that has been subjected to pattern exposure in the (1) pattern exposure step is developed using a predetermined developer.
  • a dilute aqueous solution of an alkaline substance is used, but a solution obtained by adding a small amount of water and a miscible organic solvent may be used.
  • Suitable alkaline substances include alkali metal hydroxides (eg, sodium hydroxide, potassium hydroxide), alkali metal carbonates (eg, sodium carbonate, potassium carbonate), alkali metal heavy metals.
  • Carbonates for example, sodium hydrogen carbonate, potassium hydrogen carbonate
  • alkali metal silicates for example, sodium silicate, potassium silicate
  • alkali metal metasilicates for example, sodium metasilicate, potassium metasilicate
  • Examples include triethanolamine, dietanolamine, monoethanolamine, morpholine, tetraalkylammonum hydroxides (for example, tetramethylammonium hydroxide), trisodium phosphate, and the like.
  • the concentration of the alkaline substance is preferably 0.01 to 30% by mass.
  • Examples of the "water-miscible organic solvent” include, for example, methanol, ethanol, 2-prononole, 1-propanol, butanol, diacetoneanolone, ethyleneglycolone monomethinoatenore, Ethylene glycol-monoethylenoatenole, ethylene glycol-monolemonyl butyl ether, benzyl alcohol, acetone, methyl ethyl ketone, cyclohexanone, ⁇ — force prolataton, ⁇ -butyrolataton, dimethylformamide, dimethylacetamide, hexamethylphospho
  • Preferable examples include luamide, ethyl acetate, methyl lactate, ⁇ -strength prolatatam, and ⁇ ⁇ ⁇ -methylpyrrolidone.
  • the concentration of the organic solvent miscible with water is preferably 0.1 to 30% by mass.
  • a known surfactant can
  • the developer may be used as a bath solution or a spray solution.
  • a method such as rubbing with a rotating brush or a wet sponge in the developer can be combined.
  • the temperature of the developer is usually preferably around room temperature (22 ° C) to 40 ° C.
  • the development time depends on the composition of the photosensitive resin layer, the alkalinity and temperature of the developer, and the type and concentration when an organic solvent is added, but is usually about 10 to 120 seconds. If the development time is too short, the development of the non-exposed area may be insufficient, and the UV absorbance may be insufficient. If the development time is too long, the exposed area may be etched. In either case, it is difficult to make the dark color separation wall shape suitable. It is also possible to add a washing step after the development process. In this development process, the shape of the dark color separation wall is formed as described above.
  • Development methods include paddle development, shower development, shower & spin development, dip A method such as development can be used.
  • the pH of the developer is preferably 8 to 13.
  • a roller conveyor or the like is installed in the developing tank, and the substrate moves horizontally.
  • the photosensitive resin is preferably formed on the upper surface of the substrate.
  • the inclination angle is preferably 5 to 30 °.
  • the development conditions for the “strong development” include a dilute aqueous solution having a concentration of alkaline substance of 0.01 to 30% by mass as the developer, a development temperature of 22 to 40 ° C., and a development time. It is preferred that the condition is 10 to 120 seconds.
  • the concentration of the alkaline substance more preferably, 0.5 a 02-25 wt%, more preferably from 0.05 to 20 weight 0/0.
  • the development temperature is more preferably 24 to 38 ° C, and further preferably 26 to 35 ° C.
  • the development time is more preferably 15 to L 10 seconds, and still more preferably 20 to L 00 seconds.
  • the development intensity varies by changing any one of these types of alkaline substances, their concentration, development temperature, and development time. It is preferable to appropriately set each condition within the above range.
  • the dark color separation image wall according to the present invention is formed by performing post exposure after development.
  • Post exposure controls the cross-sectional shape of the image, controls the hardness of the image, It is possible to adjust the surface roughness of the image and control the film thickness reduction of the image.
  • the light source used for the post-exposure may be any light source that includes at least one of wavelengths at which the dark color composition has sensitivity.
  • the ultra-high pressure mercury lamp described in paragraph No. 0074 of JP-A-2005-3861 High pressure mercury lamp, metalno, ride lamp and the like.
  • Post exposure is preferably performed by directly irradiating the substrate with light from a light source such as an ultra-high pressure mercury lamp or a metal halide without using an exposure mask or the like from the viewpoint of simplification of equipment and power saving.
  • a light source such as an ultra-high pressure mercury lamp or a metal halide
  • Post-exposure is performed on both sides as necessary.
  • the preferred higher exposure dose, or summer long exposure time too high since the substrate the substrate temperature becomes too high it may be deformed or post exposure light per one surface, the LOOOOmjZcm 2 degree
  • the upper limit is preferable.
  • the post exposure amount per side is less than 2500 mjZcm 2 , the edge of the dark color separation wall is deformed and the ink easily gets over the edge force, and the object of the present invention of preventing color mixing cannot be achieved.
  • fixture 280 More preferably be exposed on both sides or upper surface with an exposure amount of it is preferably fixture 280 0 ⁇ 5000miZcm 2 for exposing a double-sided or top with an exposure amount of 2500 ⁇ 10000mjZcm 2, exposed on both sides with an exposure amount of 2800 ⁇ 5000miZcm 2 Most preferably.
  • a photosensitive transfer material having at least a layer having a dark color composition strength on a temporary support.
  • an intermediate layer capable of blocking oxygen hereinafter, also simply referred to as “oxygen blocking layer”
  • oxygen blocking layer may be provided between the temporary support and the layer having the dark color composition force.
  • a photosensitive transfer material having a layer having at least a dark color composition strength on a temporary support may be used, and the temporary support may be used as “a protective layer capable of blocking oxygen”. In this case, It is possible to reduce the number of processes that do not require the provision of an oxygen blocking layer.
  • the photosensitive transfer material described above may have a thermoplastic resin layer as necessary.
  • the strong thermoplastic resin layer is alkali-soluble and contains at least a resin component, and the resin component has a substantial soft point of 80 ° C or less. It is preferable. By providing such a thermoplastic resin layer, good adhesion to a permanent support can be exhibited in the method for forming a dark color separation image wall described later.
  • Thermoplastic resins having a soft melting point of 80 ° C or lower include saponified products of ethylene and acrylate copolymer, saponified products of styrene and (meth) acrylate copolymer, and vinyl toluene.
  • thermoplastic resin layer at least one of the above-mentioned thermoplastic resins can be appropriately selected and used.
  • thermoplastic resins can be appropriately selected and used.
  • “Plastic Performance Handbook” Japan Plastic Industry Federation, All Japan Plastic Molding Industry Association) Edited by the Industrial Research Council, published on October 25, 1968
  • organic polymers that have a soft spot of about 80 ° C or less and are soluble in an alkaline aqueous solution. it can.
  • an organic polymer substance having a soft spot of 80 ° C or higher various plasticizers compatible with the polymer substance can be substantially added to the organic polymer substance.
  • the softening point can be lowered to 80 ° C or lower.
  • these organic polymer substances have various polymers, supercooled substances, and adhesion improvements as long as the actual soft spot does not exceed 80 ° C in order to adjust the adhesive strength with the temporary support. Agents, surfactants, release agents, etc. can also be added.
  • preferable plasticizers include polypropylene glycol, polyethylene glycol, dioctyl phthalate, diheptyl phthalate, dibutyl phthalate, tricresyl phosphate, cresyl diphenyl phosphate, biphenyl diphenyl phosphate. it can.
  • a force that is chemically and thermally stable and is composed of a flexible substance can be appropriately selected.
  • a thin sheet of Freon (registered trademark), polyethylene terephthalate, polycarbonate, polyethylene, polypropylene, polyester, or a laminate thereof is preferable.
  • the thickness of the temporary support is suitably 5 to 300 ⁇ m, preferably 20 to 150 ⁇ m. If the thickness is less than 5 m, the temporary support tends to be broken when it is peeled off. Also, when exposure is performed through the temporary support, the resolution tends to decrease if the exposure exceeds 300 m.
  • a biaxially stretched polyethylene terephthalate film is particularly preferable.
  • the oxygen blocking layer it is preferable to use an oxygen blocking film having an oxygen blocking function, which is described as “separation layer” in JP-A-5-72724.
  • the sensitivity during exposure is increased.
  • the time load on the exposure machine is reduced and the productivity is improved.
  • the oxygen barrier layer As the oxygen barrier layer, a known medium force that exhibits low oxygen permeability and is preferably dispersed or dissolved in water or an aqueous alkali solution can be appropriately selected. Of these, a combination of polybulal alcohol and polybulurpyrrolidone is particularly preferred.
  • a thin protective film is preferably provided on the resin layer to protect it from contamination and damage during storage.
  • the protective film may have the same or similar material strength as the temporary support, but it must be easily separated from the resin layer.
  • the protective film material for example, a sheet of silicone paper, polyolefin or polytetrafluoroethylene is suitable.
  • the substrate (permanent support) constituting the color filter a metallic support, a metal-bonded support, glass, ceramic, a synthetic resin film, or the like can be used. Particularly preferred is a glass or a synthetic resin film having transparency and good dimensional stability.
  • an example of forming a dark color separation image wall using a photosensitive transfer material will be described.
  • an intermediate layer oxygen barrier layer
  • a dark color composition layer On the temporary support, an intermediate layer (oxygen barrier layer), a dark color composition layer, and a cover sheet on the dark color composition layer.
  • a photosensitive transfer material provided with a sheet is prepared.
  • the surface of the exposed dark color composition layer is bonded onto a permanent support (substrate) and laminated by heating and pressing through a laminator or the like (laminate).
  • a laminator those appropriately selected from conventionally known laminators, vacuum laminators and the like can be used, and an auto cut laminator can also be used in order to increase productivity.
  • peeling is performed between the temporary support and the oxygen barrier layer, and the temporary support is removed.
  • a desired photomask for example, a quartz exposure mask
  • the distance between the exposure mask surface and the oxygen blocking layer is appropriately set (for example, , 200 ⁇ m) for exposure.
  • development processing is performed using a predetermined processing solution to obtain a not-tung image. Then, if necessary, wash with water to obtain a dark color separation wall.
  • a desired photomask for example, a quartz exposure mask
  • the distance between the exposure mask surface and the temporary support is appropriately set (for example, 200 ⁇ m) and exposed.
  • the temporary support is removed, and development processing is performed using a predetermined processing solution to obtain a patterning image. Then, if necessary, wash with water to obtain a dark color separation wall.
  • the exposure can be performed, for example, with a proximity type exposure machine (for example, manufactured by Hitachi, Ltd., Techtech Engineering Co., Ltd.) having an ultra-high pressure mercury lamp, and the exposure amount is appropriately set (for example, 300 mjZcm 2 ) Can be selected.
  • a proximity type exposure machine for example, manufactured by Hitachi, Ltd., Techtech Engineering Co., Ltd.
  • the exposure amount is appropriately set (for example, 300 mjZcm 2 ) Can be selected.
  • development processing is performed using a predetermined processing solution.
  • the details of the development process are the same as described above.
  • Post exposure is performed after development.
  • the contents of the post-exposure are the same as described above.
  • heat treatment may be performed after post exposure.
  • the heat treatment temperature is preferably in the range of 150 to 250 ° C. If it exceeds 150 ° C, the hardness will be insufficient, and if it is less than 250 ° C, the resin will be colored and the color purity will deteriorate.
  • the heat treatment time is preferably 10 to 150 minutes. If it is less than 10 minutes, the hardness is insufficient, and if it exceeds 150 minutes, the shape of the dark color separation wall becomes worse.
  • a final heat treatment may be performed to stabilize the hardness. In that case, it is preferable in terms of hardness to carry out at a higher temperature (for example, 240 ° C).
  • a water-repellent treatment is performed on the dark color separation wall so that at least a part of the dark color separation wall is water-repellent. This is because, when a droplet of a colored liquid composition is subsequently applied between the dark color separation walls by a method such as inkjet, the ink crosses the dark color separation wall and mixes with the adjacent color. This is to eliminate the inconvenience.
  • Examples of the water repellent treatment include a method of applying a water repellent material on the upper surface of the dark color separation wall, a method of newly providing a water repellent layer, a method of imparting water repellency by plasma treatment, For example, a method of kneading into a painting wall.
  • a dark color separation wall is formed using a photoresist obtained from the dark color composition of the present invention containing the fluorine-containing resin (A) described in JP-A-2005-36160. There is a way to make it.
  • the fluorine-containing resin (A) is a monomer unit based on a monomer having an ethylenic double bond and an Rf group (a), and a monomer unit having an ethylenic double bond and an acidic group (b). It is preferable that the acid value is 1 to 300 mgKOHZg.
  • the Rf group (a) and acidic group (b) have the same definitions as those described in JP-A-2005-36160.
  • Examples of the ethylenic double bond include a (meth) ataryloyl group, a vinyl group, and a allyl group.
  • CH CR 1 OCOQ 1 Rf
  • CH CR 1 OQ 1 Rf
  • Q 1 represents a single bond or a divalent organic group having 1 to 6 carbon atoms
  • Q 2 represents a divalent organic group having 1 to 6 carbon atoms.
  • QQ 2 may have a cyclic structure.
  • QQ 2 examples include CH—, 1 CH CH—, 1 CH (CH 2) —, 1 CH CH
  • the Q 1 may be a single bond. Above all, from the viewpoint of ease of synthesis, -CH-,-C
  • Specific examples of the monomer having an ethylenic double bond and an Rf group (a) include the following.
  • the content of the monomer unit based on the monomer having an ethylenic double bond and the Rf group (a) in the fluorinated resin (A) is preferably 1 to 95%. 5 to 80% is more preferable. 20 to 60% is more preferable. When the content of the monomer unit is within this range, the fluorine-containing resin (A) Good ink repellency is exhibited, and the developability of the photosensitive composition of the present invention is improved.
  • Examples of the monomer having an acidic group (b) include a monomer having a carboxyl group, a monomer having a phenolic hydroxyl group, a sulfonic acid group, and a monomer having a hydroxyl group. .
  • Examples of the monomer having a carboxyl group include acrylic acid, methacrylic acid, bulacetic acid, crotonic acid, itaconic acid, maleic acid, fumaric acid, cinnamic acid, and salts thereof. These may be used alone or in combination of two or more.
  • Examples of the monomer having a phenolic hydroxyl group include o-hydroxystyrene, m-hydroxystyrene, and p-hydroxystyrene.
  • one or more hydrogen atoms of these benzene rings are alkyl groups such as methyl group, ethyl group and n-butyl group, alkoxy groups such as methoxy group, ethoxy group and n-butoxy group, halogen atoms and alkyl groups. Examples thereof include haloalkyl groups in which one or more hydrogen atoms of the group are substituted with halogen atoms, nitro groups, cyano groups, and compounds in which amide groups are substituted. These may be used alone or in combination of two or more.
  • Examples of the monomer having a sulfonic acid group include vinyl sulfonic acid, styrene sulfonic acid, (meth) allyl sulfonic acid, 2-hydroxy-3- (meth) allyloxypropane sulfonic acid, and (meth).
  • Monomers having a hydroxyl group include bulufenol, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxy Butyl (meth) acrylate, 5-hydroxypentyl (meth) acrylate, 6-hydroxy hexyl (meth) acrylate, 4-hydroxy cyclohexyl (meth) acrylate, neopentyl glycol mono (meth) acrylate , 3-chloro-2-hydroxypropyl (meth) acrylate, glycerin mono (meth) acrylate, 2-hydroxyethyl vinylateolene, 4-hydroxybutyl vinyl ether, cyclohexanediol monovinyl ether, 2-hydroxyethyl Aryl ether, N-hydroxymethyl (Meth) acrylic Amides, N, N-bis (hydroxymethyl) and the like can be mentioned.
  • the monomer having a hydroxyl group may be a monomer having a polyoxyalkylene chain whose terminal is a hydroxyl group.
  • CH CHOCH C H CH O (C H O) H (
  • the content of the monomer unit based on the monomer having an acidic group (b) in the fluorinated resin (A) is preferably 0.1 to 40%, and more preferably 0.5 to 30%. 1-20% more preferred V, more preferred. Within such a range, the fluorine-containing resin (A) exhibits good ink repellency and the developability of the photosensitive composition is good.
  • the fluorine-containing resin (A) has a monomer unit based on a monomer having an ethylenic double bond and an Rf group (a), an ethylenic double bond, and an acidic group (b). And a monomer having no Rf group (a) and no acidic group (b) (hereinafter referred to as “other monomers”). May have a monomer unit based on.
  • Other monomers include hydrocarbon-based olefins, butyl ethers, isopropyl ethers, allylic ethers, butyl esters, allylic esters, (meth) acrylic acid esters, (meth) acrylamides, aromatic Group bur compounds, chlororefhins, fluorefhins, conjugates and the like. These compounds may contain functional groups such as a hydroxyl group, a carbonyl group, an alkoxy group, and an amide group. Moreover, you may have group which has a polysiloxane structure. However, monomer units based on these other monomers should not have Rf group (a) and acidic group (b). These may be used alone or in combination of two or more. In particular, (meth) acrylic acid esters and (meth) acrylamides are preferred because the heat resistance of the coating film formed from the photosensitive resin composition of the present invention is excellent.
  • the proportion of monomer units based on other monomers is 80%. 70% or less is more preferable. Within such a range, the developing property of the photosensitive composition of the present invention will be good.
  • the fluorine-containing resin (A) in the present invention comprises a monomer unit based on the monomer having the ethylenic double bond and the Rf group (a), an ethylenic double bond and an acidic group (b And a monomer having an Rf group (a) in a polymer having a reactive site and a Z or acidic group ( It can also be obtained by various modification methods in which a compound having b) is reacted.
  • the monomer having an epoxy group examples include glycidyl (meth) acrylate and 3, 4 epoxy cyclohexyl methyl acrylate.
  • Examples of the compound having an Rf group (a) and a carboxyl group include compounds represented by the following formula 3.
  • p is an integer of 2 or 3
  • q is an integer of 1 to 20
  • n is an integer of 2 to 50.
  • Examples of the compound having an Rf group (a) and a hydroxyl group include compounds represented by the following formula 4.
  • p is an integer of 2 or 3
  • q is an integer of 1 to 20
  • n is an integer of 2 to 50.
  • the monomer having a hydroxyl group include bulufenol, 2 hydroxyethyl (meth) acrylate, 2 hydroxypropyl (meth) acrylate, 3 hydroxypropyl (meth) ) Atarylate, 4-hydroxybutyl (meth) acrylate, 5-hydroxypentyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 4-hydroxycyclohexyl (meth) acrylate, neopentyl Glycol mono (meth) acrylate, 3-chloro 2-hydroxy vinyl ether, 4-hydroxybutyl vinyl ether, cyclohexanediol monovinyl ether, 2-hydroxyethylaryl ether, N-hydroxymethyl (meth) acrylamide, N , N-bis (hydroxymethyl) and the like.
  • the monomer having a hydroxyl group may be a monomer having a polyoxyalkylene chain whose terminal is a hydroxyl group.
  • CH CHOCH C H CH O (C H O) H (
  • acid anhydride examples include phthalic anhydride, 3-methylphthalic anhydride, trimellitic anhydride, and the like.
  • acid anhydrides having an ethylenic double bond examples include maleic anhydride, itaconic anhydride, citraconic anhydride, methyl-5-norbornene-2,3-dicarboxylic acid anhydride, 3,4,5,6-tetrahydrophthalic acid anhydride, cis —L, 2, 3, 6-tetrahydrophthalic acid, 2-butene-1-yl succinic anhydride, and the like.
  • the compound having a hydroxyl group may be any compound having one or more hydroxyl groups.
  • Specific examples of the above-mentioned monomer having a hydroxyl group ethanol, 1-propanol, 2-propanol , Alcohols such as 1-butanol and ethylene glycol, cellsolves such as 2-methoxyethanol, 2-ethoxyethanol, 2-butoxyethanol, 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol And carbitols such as 2- (2-butoxyethoxy) ethanol.
  • a compound having one hydroxyl group in the molecule is preferred. These may be used alone or in combination of two or more. Use it.
  • the fluorine-containing resin (A) is a polymer having the reaction site that is a precursor of the fluorine-containing resin (A). It can be synthesized by a method in which it is dissolved in and heated, and a polymerization initiator is added to react.
  • the acid value of the fluorinated resin (A) is preferably 1 to 300 mgKOHZg, more preferably 5 to 200 mgKOHZg, and particularly preferably 10 to 150 mgKOHZg. Within this range, the developability of the photosensitive composition of the present invention will be good.
  • the acid value is the mass (unit: mg) of potassium hydroxide required to neutralize sorghum lg. In this specification, the unit is described as mgKOH Zg.
  • the number average molecular weight of the fluorinated resin (A) is preferably 500 or more and less than 20000, more preferably 2000 or more and less than 15000. Within this range, the developability of the photosensitive composition of the present invention is good.
  • the number average molecular weight is measured by a gel permeation chromatography method using polystyrene as a standard substance.
  • the blending amount of the fluorinated resin (A) is preferably 0.01 to 50%, more preferably 0.1 to 30%, and more preferably 0.2 to 10% based on the solid content in the photosensitive composition. Particularly preferred. Within this range, the photosensitive composition exhibits good ink repellency and ink tumbling properties and good developability.
  • a silicone rubber layer is preferably used as the partition wall having ink repellency.
  • the silicone rubber layer coated on the surface layer must have a repulsive effect on the solution and ink used for coloring, and is not limited to this, but the number of molecular weights having the following repeating units: It is mainly composed of thousands to hundreds of thousands of linear organic polysiloxanes.
  • n is an integer of 2 or more
  • R is an independent alkyl group having 1 to 10 carbon atoms, an alkenyl group, or a phenyl group.
  • Silicone rubber can be obtained by sparsely bridging such a linear organic polysiloxane.
  • the cross-linking agent is acetoxy silane, ketoxime silane, alkoxy silane, amino silane, amido silane, alkoxy silane, or the like used for so-called room temperature (low temperature) curable silicone rubber.
  • a deacetic acid type, a deoxime type, a dealcohol type, a deamine type, a deamid type, and a deketone type silicone rubber In combination with each other, a deacetic acid type, a deoxime type, a dealcohol type, a deamine type, a deamid type, and a deketone type silicone rubber.
  • a small amount of organic tin compound is added to the silicone rubber as a catalyst.
  • various adhesive layers may be used between the layers, and aminosilane compounds and organic titanate compounds are particularly preferably used.
  • an adhesive component can be added to the silicone rubber layer. As this additional adhesive component, aminosilane compounds and organic titanate compounds can be used.
  • the exposure for producing the partition wall is performed from the back side of the substrate using the dark color separation wall as a mask.
  • the partition wall having a silicone rubber surface layer can be produced by developing with an n_heptane / Z ethanol mixture.
  • Gases containing at least fluorine atoms introduced in this process include CF, C
  • C F octafluorocyclopentene
  • a gas such as oxygen, argon, helium or the like may be used in combination as necessary.
  • a gas such as oxygen, argon, helium or the like may be used in combination as necessary.
  • the above CF, CHF, C F, SF, C F, and C F forces are selected.
  • methods such as low frequency discharge, high frequency discharge, and microwave discharge can be used, and conditions such as pressure, gas flow rate, discharge frequency, and processing time during plasma processing should be set arbitrarily. Can do.
  • fluorine resin such as polytetrafluoroethylene, silicone rubber, perfluoroalkyl acrylate, hydrated carbon acrylate, methylsiloxane, etc.
  • contact angle to the agent is 60 ° or more.
  • the water-repellent material is applied by a method that does not affect the substrate, dark color separation wall, etc. If so, it is possible to select the most suitable method for each material, such as slit coating, spin coating, dip coating, and roll coating.
  • the water-repellent film on the outer part is selectively removed or hydrophilized (the contact angle with the colorant after the treatment is made 30 ° or more smaller than before the treatment).
  • the patterning method depends on the material, such as laser ablation, plasma ashing, dry treatment such as corona discharge treatment, and wet treatment using alkali. It is possible to select the optimum method. If it is possible to pattern the water repellent material on the dark color separation wall, the lift-off method or the like is also effective.
  • the water repellent treatment method using a plasma is particularly preferred because of its “simpleness of process” and viewpoint power.
  • a colored liquid composition (hereinafter also simply referred to as “ink”) for forming each pixel of RGB is caused to enter the voids of the dark color separation wall formed in the developing step.
  • a known method such as an ink jet method or a stripe finger coating method can be used, which is preferable from the viewpoint of ink jet method power and cost.
  • the stripe Giesa coating method is a method in which droplets are applied onto a substrate using a gear having a fine droplet discharge hole and a stripe pixel is formed. Details of the inkjet method will be described later.
  • a heating step (so-called beta treatment) after forming each pixel. That is, a substrate having a photopolymerized layer by light irradiation is heated in an electric furnace, a dryer or the like, or an infrared lamp is irradiated.
  • the temperature and time of heating depend on the composition of the photosensitive dark color composition and the thickness of the layer formed, but generally from about 120 to about 120 from the viewpoint of obtaining sufficient solvent resistance, alkali resistance, and ultraviolet absorbance. About 10 ⁇ at 250 ° C It is preferable to heat for about 120 minutes.
  • the pattern shape of the color filter formed in this way is not particularly limited, but it is a stripe shape or a lattice shape, which is a general black matrix shape (see Fig. 2B). May be present (see Figure 2A).
  • an ink jet system used in the present invention there are a method in which charged ink is continuously ejected and controlled by an electric field, a method in which ink is ejected intermittently using a piezoelectric element, and an ink is intermittently heated by using its foaming.
  • Various methods such as a method of injecting the ink can be employed.
  • the ink used can be either oily or water-based.
  • the coloring material contained in the ink can be either a dye or a pigment, and the use of a pigment is more preferable from the viewpoint of durability.
  • a coating-type colored ink (colored resin composition, for example, described in JP-A-2005-3861 [0034] to [0063]) or JP-A-10-195358 is used for producing a known color filter.
  • the inkjet composition described in [0009] to [0026] can also be used.
  • a component that is cured by heating or a line of energy such as ultraviolet rays may be added in consideration of a step after coloring.
  • Various thermosetting resin is widely used as the component that is cured by heating, and examples of the component that is cured by energy rays include those obtained by adding a photoinitiator to an attalylate derivative or a metatalylate derivative. .
  • attalylate derivatives or metatalylate derivatives are preferably water-soluble. Even those that are sparingly soluble in water can be used after emulsification.
  • an ink containing a colorant such as a dark color body (pigment) listed in the item of the dark color composition> can be used as a preferable one.
  • thermosetting ink for a color filter containing at least a binder and a bifunctional or trifunctional epoxy group-containing monomer can also be used as a suitable ink.
  • the color filter of the present invention is a color filter in which pixels are formed by an inkjet method. It is preferable to spray three colors of RGB to form a three-color filter.
  • This color filter is used as a display element in combination with a liquid crystal display element, an electrophoretic display element, an electochromic display element, PLZT, or the like. It can also be used for applications using color cameras and other color filters.
  • an overcoat layer may be provided on the entire surface to improve resistance.
  • the overcoat layer protects the solidified layer of inks G and B, and can flatten the surface. However, it is preferable not to provide from the viewpoint of increasing the number of steps.
  • Examples of the resin (OC agent) forming the overcoat layer include an acrylic resin composition, an epoxy resin composition, and a polyimide resin composition. Above all, from the point of excellent transparency in the visible light region, from the point that the resin of the photocurable composition for color filters usually has acrylic resin as the main component, and excellent adhesion. An acrylic resin composition is desirable.
  • Examples of the overcoat layer include those described in paragraph Nos. 0018 to 0028 of JP-A-2003-287618. Commercially available overcoat agents include “Optoma 1 SS6699GJ” manufactured by JSR. It is done.
  • the color filter of the present invention is a color filter manufactured by the above-described method for manufacturing a color filter of the present invention, and the cross-sectional shape of the dark color separation wall formed on the substrate is the dark color separation image.
  • the height of the substrate strength at the point where the height of the substrate strength of the wall is the highest is h
  • the line parallel to the substrate at a position of 0.8 h from the substrate is L
  • the dark separation wall touches Tangent line at point parallel to substrate at L, h
  • the value divided by is less than 0.04.
  • the cross-sectional shape of the dark color separation wall formed on the substrate is the height from the substrate at the point where the height of the substrate strength of the dark color separation wall is the highest as shown in FIG.
  • the line parallel to the substrate at the position 0.8h from the substrate is L, and the tangent line at the point where L and the dark separation wall touch is L, h
  • Value d divided by h is 0.04 or less. These values are measured by actually observing the dark-colored separation wall formed on the substrate by cutting the substrate vertically and exposing the cross section directly with a microscope. By passing through the process of fixing the shape of the dark color separation wall obtained in this way, the ink once deposited in the gap gets over the dark color separation wall. As a result, bleeding, protrusion, color mixing with adjacent pixels, white spots, and the like are prevented, and a good color filter can be obtained.
  • the value of dZh is preferably 0.04 or less, more preferably 0.038 or less, and particularly preferably 0.035 or less.
  • FIG. 2 shows an embodiment of a color filter suitable for forming a dark color separation wall having the above-described shape. In these color filters, pixels having no color mixture can be obtained by forming the dark color separation wall in the above-described shape.
  • FIG. 3A An example of the cross-sectional shape of the dark color separation wall of the color filter of the present invention is shown in FIG. 3A.
  • Figure 3A is exaggerated, but it is clear that the ink is less likely to get over the shape with rounded edges as shown in Figure 3B.
  • 11 indicates a pixel region
  • 12 indicates a dark color separation wall
  • 13 indicates a substrate.
  • the display device of the present invention includes the color filter of the present invention described above, and examples of such display devices include display devices such as liquid crystal display devices, plasma display display devices, EL display devices, and CRT display devices. .
  • display devices such as liquid crystal display devices, plasma display display devices, EL display devices, and CRT display devices.
  • display devices such as liquid crystal display devices, plasma display display devices, EL display devices, and CRT display devices.
  • Examples of display devices and explanation of each display device refer to, for example, “Electronic Display Device (Akio Sasaki, Industrial Research Co., Ltd. 1990) Line) ”,“ Display devices (written by Junaki Ibuki, published by Sangyo Tosho Co., Ltd. in 1989) ”and the like.
  • a liquid crystal display device is particularly preferable.
  • the liquid crystal display device is described in, for example, “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, published by Kogyo Kenkyukai 199)”.
  • the liquid crystal display device to which the present invention can be applied is not particularly limited, and can be applied to various types of liquid crystal display devices described in, for example, the “next generation liquid crystal display technology”.
  • the present invention is particularly effective for a color TFT liquid crystal display device.
  • a color TFT liquid crystal display device is described in, for example, “Color TFT liquid crystal display (issued in 1996 by Kyoritsu Publishing Co., Ltd.)”.
  • the present invention can be applied to a liquid crystal display device with a wide viewing angle such as a lateral electric field drive method such as IPS and a pixel division method such as MVA.
  • a lateral electric field drive method such as IPS
  • a pixel division method such as MVA.
  • the liquid crystal display device includes various members such as an electrode substrate, a polarizing film, a retardation film, a knock light, a spacer, and a viewing angle guarantee film.
  • the black matrix of the present invention can be applied to a liquid crystal display device composed of these known members.
  • “'94 Liquid Crystal Display Peripheral Materials' Chemicals” Kelvano Shima, CMC Co., Ltd., 1994)
  • “2003 Current Status and Future Prospects of Liquid Crystal Related Markets (Part 2) ”(Yoshiyoshi Table) “Fuji Chimera Research Institute Co., Ltd., published in 2003)”.
  • the color filter of the present invention can be applied to applications such as televisions, personal computers, liquid crystal projectors, game machines, mobile terminals such as mobile phones, digital cameras, car navigation systems, and the like without any particular limitation.
  • the dark color composition K1 is prepared by the following procedure. That is, first, K pigment dispersion 1 and propylene glycol monomethyl ether acetate (MMPG AC, manufactured by Daicel Chemical Industries, Ltd. (hereinafter also using the same manufacturer's materials)) in the amounts shown in Table 1 are weighed and the temperature Mix at 24 ° C ( ⁇ 2 ° C) and stir at 150 RPM for 10 minutes.
  • K pigment dispersion 1 and propylene glycol monomethyl ether acetate MMPG AC, manufactured by Daicel Chemical Industries, Ltd. (hereinafter also using the same manufacturer's materials)
  • Carbon black (Negex35, Degussa) 13. 1%
  • the alkali-free glass substrate was cleaned with a UV cleaning device, brushed with a cleaning agent, and then ultrasonically cleaned with ultrapure water.
  • the substrate was heat treated at 120 ° C for 3 minutes to stabilize the surface state.
  • the distance between the photosensitive layers K1 was set to 200 m, and pattern exposure was performed at an exposure amount of 300 mjZcm 2 in a nitrogen atmosphere.
  • the exposure amount was adjusted as follows. That is, a light meter (UV-350) manufactured by Oak Manufacturing Co., Ltd. is placed on the substrate, sent to the exposure apparatus, and the exposure dose when the distance between the exposure mask and the measurement apparatus is 10 cm The exposure was adjusted to
  • Plasma water repellency treatment was performed on the substrate on which the dark color separation wall was formed using a force sword coupling type parallel plate type plasma treatment apparatus under the following conditions.
  • a pigment a polymer dispersant, and a solvent were mixed, and a pigment dispersion was obtained using a three roll and bead mill. While sufficiently stirring this pigment dispersion with a dissolver or the like, other materials were added little by little to prepare a colored ink composition for red (R) pixels.
  • Second epoxy resin neopentyldaricol diglycidyl ether
  • Curing agent trimellitic acid
  • a transparent electrode of ITO Indium Tin Oxide
  • ITO Indium Tin Oxide
  • a photospacer was provided in a portion corresponding to the upper part of the dark color separation wall on the ITO transparent electrode, and an alignment film made of polyimide was further provided thereon.
  • an epoxy resin sealant is printed at a position corresponding to the outer periphery of the black matrix provided around the pixel group of the color filter, and at the same time, a liquid crystal for PVA mode is dropped.
  • the bonded substrate was heat-treated to cure the sealant.
  • a polarizing plate HLC2-2518 made by Sanritz Co., Ltd. was attached to both surfaces of the liquid crystal cell thus obtained.
  • a backlight of a cold cathode tube was constructed and placed on the side of the back surface of the liquid crystal cell provided with the polarizing plate to obtain a liquid crystal display device.
  • Example 2 In the formation of the dark separation wall in Example 1, the post-exposure conditions were changed as shown in Table 2. A color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that.
  • thermoplastic resin layer having the following formulation HI On a 75 ⁇ m-thick polyethylene terephthalate film temporary support, using a slit nozzle, a coating solution for a thermoplastic resin layer having the following formulation HI was applied and dried. Next, an intermediate layer coating solution having the following formulation P1 was applied and dried. Further, the dark color composition K1 was applied and dried. In this way, a thermoplastic resin layer having a dry film thickness of 14., an intermediate layer having a dry film thickness of 1. and a dark colored composition layer having a dry film thickness of 2 m are formed on the temporary support. Finally, a protective film (12 m thick polypropylene film) was pressure-bonded. Thus, a dark photosensitive transfer material was produced in which the temporary support, the thermoplastic resin layer, the intermediate layer (oxygen barrier film), and the dark composition layer were integrated. The sample name of this dark color photosensitive transfer material is K1.
  • thermoplastic resin layer Formula HI>
  • the alkali-free glass substrate was washed with a rotating brush having nylon bristles while spraying a glass detergent solution adjusted to 25 ° C for 20 seconds with a shower, and washed with pure water. Then, a silane coupling solution (N- ⁇ (aminoethinole) ⁇ -aminopropyltrimethoxysilane 0.3% by mass aqueous solution, trade name: ⁇ 603, manufactured by Shin-Etsu Chemical Co., Ltd.) was showered 2 Sprayed for 0 seconds and washed with pure water shower. This substrate was heated at 100 ° C. for 2 minutes by a substrate preheating apparatus.
  • a silane coupling solution N- ⁇ (aminoethinole) ⁇ -aminopropyltrimethoxysilane 0.3% by mass aqueous solution, trade name: ⁇ 603, manufactured by Shin-Etsu Chemical Co., Ltd.
  • the cover film is removed from the dark color light-sensitive transfer material K1 produced by the above production method on the obtained silane coupling treated glass substrate, and the surface of the dark color composition layer exposed after the removal and the silane coupling Laminate (Hitachi Industries Co., Ltd. (Lamic II type)) using a laminator (Hitachi Industries (LamicII type)) and heated at 100 ° C for 2 minutes, rubber roller temperature 130 ° C, Lamination was performed at a linear pressure of 100 NZcm and a conveyance speed of 2.2 mZ. Subsequently, the polyethylene terephthalate temporary support was peeled off at the interface with the thermoplastic resin layer to remove the temporary support.
  • the exposure mask with the substrate and mask (quartz exposure mask with image pattern) standing vertically with a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp.
  • the distance between the surface and the dark color photosensitive resin composition layer was set to 200 m, and pattern exposure was performed at an exposure amount of 70 mj / cm 2 .
  • triethanol amine developing solution triethanolamine ⁇ Min 30 mass 0/0 containing, trade name: T - PD2, manufactured by Fuji Photo Film Co., 12 times with pure water (T-PD2 1
  • T-PD2 1 The solution obtained by diluting 11 parts by mass of pure water with 11 parts by mass) was developed with shower at 30 ° C. for 50 seconds and a flat nozzle pressure of 0.04 MPa to remove the thermoplastic resin layer and the intermediate layer.
  • air was blown onto the upper surface of the substrate to drain the liquid, and then pure water was sprayed for 10 seconds in a shower to clean the pure water, and air was blown to reduce the liquid pool on the substrate.
  • carbonate Na based developer sodium bicarbonate 0.38 mol Z l, sodium carbonate 0.47 molar Z l, dibutyl sodium naphthalene sulfonate 5 wt 0/0, ⁇ Containing a Yuon surfactant, antifoaming agent, stabilizer, product name: TCD1, Fuji Photo Film Co., Ltd. diluted 5 times with pure water
  • cone type nozzle shower development was performed at a pressure of 0.15 MPa, and the dark color composition layer was developed to obtain a patterning image.
  • a detergent (trade name: T SD3 manufactured by Fuji Photo Film Co., Ltd.) diluted 10-fold with pure water was sprayed in a shower at 33 ° C for 20 seconds with a cone-type nozzle pressure of 0.02 MPa. Further, the image formed by the rotating brush having nylon bristles was rubbed to remove the residue to obtain a dark color separation wall.
  • the substrate was also subjected to post-exposure with an exposure force of 3000 mjZcm 2 using an exposure machine having an ultrahigh pressure mercury lamp manufactured by Usio Electric Co., Ltd., model number: UVL-8000-N. Thereafter, heat treatment was performed at 220 ° C. for 15 minutes.
  • an exposure amount of 110nj / cm 2 (38mW / cm 2 X 2. 9 seconds), exposed through a dark Hanarega wall from the back surface of the substrate formed with the dark Hanarega wall, inorganic alkaline developing solution (Hexist Japan Co., Ltd., AZ400K Developer, 1: 4) Immerse and shake for 80 seconds, then rinse in pure water for 30 to 60 seconds, and water-repellent grease layer on dark color separation wall By forming the surface energy difference between the inside and outside of the pixel.
  • inorganic alkaline developing solution Hexist Japan Co., Ltd., AZ400K Developer, 1: 4
  • the surface energy inside and outside the pixel after the formation of the water-repellent resin layer was 10 to 15 dyneZcm outside the pixel (on the resin layer) and around 55 dyne / cm inside the pixel (on the glass substrate).
  • the ink constituting each pixel of the color filter obtained in this way is inserted into the dark color separation wall gap. Defects such as hang-ups, blurs, protrusions, color mixing with adjacent pixels, and white spots were also powerful.
  • a transparent electrode of ITO Indium Tin Oxide was further formed by sputtering on the R pixel, G pixel, B pixel and black matrix of the color filter substrate obtained by the above method.
  • a color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that the post-exposure conditions were changed as shown in Table 2 in the formation of the dark color separation wall in Example 3.
  • Example 3 In the formation of the dark color separation wall in Example 3, the dark color photosensitive transfer material K1 was changed to the following dark color photosensitive transfer material K2, and the conditions for the post exposure are shown in Table 2.
  • a dark color separation wall was prepared in the same manner as in Example 3 except that the conditions were changed (upper surface 3 OOOnj / cm 2 + lower surface 3000 mj / cm 2 ).
  • the dark color composition K1 was applied onto a temporary support of 16 ⁇ m thick polyethylene terephthalate film (Tetron G2 manufactured by Teijin DuPont Films Ltd.) using a slit nozzle and dried. In this way, a dark photosensitive resin layer having a dry film thickness of 2. O / z m is provided on the temporary support, and finally a protective film (thickness: 12111 polypropylene film) is pressed.
  • Tetron G2 manufactured by Teijin DuPont Films Ltd.
  • a color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that in the pattern exposure step of Example 1, instead of performing exposure in a nitrogen atmosphere, pattern exposure was performed in the atmosphere.
  • a color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that the post-exposure conditions were changed as shown in Table 2 in the formation of the dark color separation wall in Example 1.
  • L is the tangent at the contact point between 1 and the dark separation wall, and L is the line parallel to the substrate at h.
  • the intersection force with L is also defined as the distance to the dark separation wall d.
  • Table 2 shows the measurement results.
  • the ITO resistance of the color filter with ITO obtained in the examples and comparative examples was measured by “Mouth Resta” manufactured by Mitsubishi Chemical Corporation; sheet resistance by a four-probe method. Table 2 shows the measurement results.
  • the color mixture was evaluated by observing with an optical microscope from the substrate and the pixel forming side in the thickness direction. Any 100 pixels in the optical element were observed to confirm the presence or absence of color mixing, and evaluated according to the following evaluation criteria. Table 2 shows the evaluation results.
  • the color mixture is 5 or more and less than 10.

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Abstract

A color filter has at least two pixel groups having different colors from each other on a board, and pixels constituting the pixel group are isolated from each other by a deep color isolation wall. In a method for fabricating the color filter, the process of forming the deep color isolation wall includes the following steps (1) to (3). (1) The step of exposing a layer consisting of a deep color composition so as to make a pattern under a poor oxygen atmosphere (pattern exposure step). (2) The step of forming a deep color isolation wall pattern by developing after the pattern exposure (development step). (3) The step of irradiating and curing the deep color isolation wall pattern with light having an exposure of at least 2500 mJ/cm2 (post-exposure step). This fabrication method enables pixels with a little color mixing and the like to be formed with a high position accuracy and the color filter to be fabricated at a low cost and with a high efficiency. A color filter fabricated by this method and a display device having the color filter are also provided.

Description

明 細 書  Specification
カラーフィルタの製造方法、カラーフィルタ、及び該カラーフィルタを有す る表示装置  COLOR FILTER MANUFACTURING METHOD, COLOR FILTER, AND DISPLAY DEVICE HAVING THE COLOR FILTER
技術分野  Technical field
[0001] 本発明は、表示装置用カラーフィルタの製造方法、この製造方法により得られる力 ラーフィルタ及びこれを有する表示装置に関する。  The present invention relates to a method for manufacturing a color filter for a display device, a power color filter obtained by the manufacturing method, and a display device having the same.
背景技術  Background art
[0002] 表示装置用カラーフィルタは、ガラス等の基板上に赤色、緑色、青色のドット状画像 をそれぞれマトリックス状に配置し、その境界をブラックマトリックス等の濃色離画壁で 区分した構造である。このようなカラーフィルタの製造方法としては、従来、支持体と してガラス等の基板を用い、 1)染色法、 2)印刷法、 3)着色した感光性榭脂液の塗布 と、露光及び現像との繰り返しによる着色感光性榭脂液法 (着色レジスト法)(例えば 、特開昭 63— 298304号公報、特開昭 63— 309916号公報及び特開平 1— 152 449号公報参照。 )、 4)仮支持体上に形成した画像を順次、最終又は仮の支持体 上に転写する方法 (例えば、特開昭 61— 99103号公報、特開昭 61— 233704号公 報及び特開昭 61— 279802号公報参照。 )、 5)予め着色した感光性榭脂液を仮 支持体上に塗布することにより着色層を形成し、順次直接、基板上にこの感光性着 色層を転写し、露光して現像することを色の数だけ繰り返す方法等により多色画像を 形成する方法 (転写方式)が知られている (例えば、特開昭 61— 99102号公報参照 。;)。またインクジェット法を用いる方法 (例えば、特開平 8— 227012号公報参照。)も 知られている。  [0002] A color filter for a display device has a structure in which red, green, and blue dot-like images are arranged in a matrix on a substrate such as glass, and the boundary is divided by a dark color separation wall such as a black matrix. is there. As a method for producing such a color filter, conventionally, a substrate such as glass is used as a support. 1) Dyeing method, 2) Printing method, 3) Application of colored photosensitive resin solution, exposure and Colored photosensitive resin solution method (colored resist method) by repeated development (see, for example, JP-A-63-298304, JP-A-63-309916, and JP-A-1-152449). 4) A method of sequentially transferring images formed on a temporary support onto a final or temporary support (for example, JP-A-61-99103, JP-A-61-233704, and JP-A-61). — See publication No. 279802.), 5) A colored layer is formed by applying a pre-colored photosensitive resin solution on a temporary support, and this photosensitive colored layer is transferred directly onto the substrate in sequence, There is a known method (transfer method) for forming a multicolor image by repeating exposure and development for the number of colors. Eg to JP 61- ninety-nine thousand one hundred and two see JP;.). Also known is a method using an ink jet method (for example, see JP-A-8-227012).
[0003] これらの方法のうち、着色レジスト法は位置精度高くカラーフィルタを作製できるも のの、感光層榭脂液の塗布にロスが多くコスト的には有利とは言えない。一方、インク ジェット法は榭脂液のロスが少なくコスト的に有利ではあるものの、画素の位置精度 が悪いという問題がある。これらを克服すベぐブラックマトリックス (濃色離画壁)を着 色レジスト法で形成し、 RGB画素をインクジェット法で作製するカラーフィルタ製造方 法も提案されているが、作製されたブラックマトリックスの断面形状を観察すると、上 端やそのエッジが丸くなっており、後に打滴された各色インクがブラックマトリックスを 乗り越えやすいために、にじみ、はみ出し、隣接画素との混色および白抜けなどが起 こる恐れがある。 [0003] Among these methods, the colored resist method can produce a color filter with high positional accuracy, but it is not advantageous in terms of cost due to a large loss in application of the photosensitive layer resin solution. On the other hand, the ink jet method has a problem that the position accuracy of the pixel is poor, although the loss of the resin liquid is small and advantageous in terms of cost. A color filter manufacturing method has been proposed in which a black matrix (dark color separation wall) that overcomes these problems is formed by the colored resist method, and RGB pixels are manufactured by the inkjet method. When the cross-sectional shape is observed, Since the edges and edges are rounded and each of the inks that are subsequently ejected easily gets over the black matrix, bleeding, protrusion, color mixture with adjacent pixels, and white spots may occur.
これらを防ぐ為、現像後に濃色離画壁のパターンに光を照射して光硬化させるェ 程と、光硬化した濃色離画壁パターンに加熱処理する工程を含むカラーフィルタの 製造方法が開示されている(例えば、特開 2002— 156520号公報参照。)力 この 方法では、隔壁のエッジ部分の形状が丸くなりやすぐエッジ部分が丸い (角張って V、な 、)とインクが濃色離画壁を乗り越えやすくなる問題がなお残されて!、る。  In order to prevent these problems, a method for producing a color filter is disclosed which includes a step of irradiating and light-curing a dark color separation wall pattern after development, and a step of heat-treating the photocured dark color separation wall pattern. (For example, see Japanese Patent Application Laid-Open No. 2002-156520.) Force In this method, if the shape of the edge part of the partition wall is rounded or the edge part is rounded immediately (angularly V, etc.), the ink is darkly separated There is still a problem that makes it easier to get over the wall!
[0004] また、プラズマ処理により濃色離画壁を撥水処理する方法が知られて!/、る(例えば 、特開 2001— 343518号公報参照。;)。しかしながら、濃色離画壁に撥水処理のみ を施しても、隣接画素との混色および白抜けなどを十分に解消することが困難であつ た。 [0004] Further, a method for water-repellent treatment of a dark color separation wall by plasma treatment is known! (See, for example, JP-A-2001-343518;). However, even if only the water repellent treatment is applied to the dark-colored separation wall, it is difficult to sufficiently eliminate color mixing with adjacent pixels and white spots.
特許文献 1:特開昭 63— 298304号公報  Patent Document 1: JP-A 63-298304
特許文献 2:特開昭 63 - 309916号公報  Patent Document 2: Japanese Patent Laid-Open No. 63-309916
特許文献 3 :特開平 1 152449号公報  Patent Document 3: JP-A-1 152449
特許文献 4:特開昭 61 - 99103号公報  Patent Document 4: JP-A 61-99103
特許文献 5:特開昭 61— 233704号公報  Patent Document 5: Japanese Patent Laid-Open No. 61-233704
特許文献 6:特開昭 61 - 279802号公報  Patent Document 6: JP-A 61-279802
特許文献 7 :特開昭 61— 99102号公報  Patent Document 7: JP-A-61-99102
特許文献 8:特開平 8 - 227012号公報  Patent Document 8: JP-A-8-227012
特許文献 9 :特開 2002— 156520号公報  Patent Document 9: Japanese Patent Application Laid-Open No. 2002-156520
特許文献 10:特開 2001— 343518号公報  Patent Document 10: JP 2001-343518 A
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0005] 従って、本発明は、位置精度よく混色等の少ない画素を形成し、かつ低コスト及び 高効率にカラーフィルタを製造可能なカラーフィルタの製造方法、この方法で得られ るカラーフィルタ、及びこのカラーフィルタを備えた表示装置を提供することを目的と する。 課題を解決するための手段 [0005] Accordingly, the present invention provides a color filter manufacturing method capable of forming a color filter with low positional accuracy and high efficiency by forming pixels with low positional accuracy and color mixing, and a color filter obtained by this method, and An object of the present invention is to provide a display device provided with this color filter. Means for solving the problem
[0006] 斯カゝる実情に鑑み、本発明者は、上記課題を解決するために鋭意研究を行った。  [0006] In view of such circumstances, the present inventor has conducted intensive research in order to solve the above problems.
その結果、濃色離画壁を下記手法により形成すれば、その後、インクジェット法等に より各画素を形成するとき、各色インクのにじみ、はみ出し、隣接画素との混色および 白抜けなどの欠陥となる不良を防止でき、良好なカラーフィルタを得ることが可能とな ることを見出し、本発明を完成した。  As a result, if a dark color separation wall is formed by the following method, then when forming each pixel by the ink jet method or the like, defects such as bleeding and protrusion of each color ink, color mixture with adjacent pixels, and white spots are caused. It was found that defects can be prevented and a good color filter can be obtained, and the present invention has been completed.
すなわち、本発明は次の製造方法等を提供するものである。  That is, the present invention provides the following manufacturing method and the like.
[0007] < 1 > 基板上に、互いに異なる色を呈する 2以上の画素群を有し、前記画素群を構 成する各画素は互いに濃色離画壁により離画されているカラーフィルタの製造方法 であって、前記濃色離画壁を形成する工程が、下記(1)〜(3)の工程を含むことを特 徴とするカラーフィルタの製造方法である。  <1> Production of a color filter having two or more pixel groups exhibiting different colors on a substrate and each pixel constituting the pixel group being separated from each other by a dark color separation wall A method for producing a color filter, characterized in that the step of forming the dark color separation wall includes the following steps (1) to (3).
(1)濃色組成物からなる層を貧酸素雰囲気下にてパターン露光する工程 (パターン 露光工程)  (1) Process of pattern exposure of dark color composition layer in an oxygen-poor atmosphere (pattern exposure process)
(2)パターン露光後、現像して濃色離画壁パターンを形成する工程 (現像工程) (2) Process of developing after pattern exposure to form dark color separation wall pattern (Development process)
(3)該濃色離画壁パターンに 2500mjZcm2以上の露光量の光を照射して光硬化さ せる工程 (ポスト露光工程) (3) A process of irradiating the dark color separation wall pattern with light with an exposure amount of 2500 mjZcm 2 or more (post-exposure process)
[0008] < 2 > 前記貧酸素雰囲気下が、不活性ガス雰囲気下、減圧下、及び酸素を遮断し うる保護層下力 選択される少なくとも 1であることを特徴とする前記く 1 >に記載の カラーフィルタの製造方法である。  [0008] <2> The method according to <1>, wherein the poor oxygen atmosphere is at least one selected from an inert gas atmosphere, a reduced pressure, and a protective layer lowering force capable of blocking oxygen. This is a method for producing a color filter.
[0009] < 3 > 前記現像工程における現像条件が、現像液として、アルカリ性物質の濃度が<3> The development condition in the development step is that the concentration of an alkaline substance as a developer is
0. 01〜30質量%の希薄水溶液を用い、且つ、現像温度が 22°C〜40°Cであり、且 つ、現像時間が 10〜120秒の条件であることを特徴とする前記く 1 >またはく 2> に記載のカラーフィルタの製造方法である。 0.1 The use of a dilute aqueous solution of 30% to 30% by mass, development temperature of 22 ° C to 40 ° C, and development time of 10 to 120 seconds. Or a method for producing a color filter according to 2).
[0010] < 4 > 前記濃色離画壁上面の少なくとも一部が撥水性を帯びた状態で、該濃色離 画壁間に各画素を形成することを特徴とする前記 < 1 >から < 3 >のいずれか 1項に 記載のカラーフィルタの製造方法である。 <4> The above <1> to <1>, wherein each pixel is formed between the dark color separation walls in a state where at least a part of the upper surface of the dark color separation wall is water-repellent. 3. The method for producing a color filter according to any one of 3>.
[0011] < 5 > 前記濃色離画壁の少なくとも一部が撥水性を帯びた状態にする手段が、プ ラズマ処理であることを特徴とする前記 < 4 >に記載のカラーフィルタの製造方法で ある。 <0011><5> The method for producing a color filter as described in <4> above, wherein the means for bringing at least a part of the dark-color separation wall into a water-repellent state is a plasma treatment. so is there.
[0012] < 6 > 濃色離画壁間に各画素を形成する方法が、各画素を形成する着色液体組 成物をインクジェット法により濃色離画壁間に侵入させる方法であることを特徴とする 前記く 1 >から < 5 >のいずれかに記載のカラーフィルタの製造方法である。  [0012] <6> The method of forming each pixel between the dark color separation walls is a method in which a colored liquid composition forming each pixel enters between the dark color separation walls by an inkjet method. The method for producing a color filter according to any one of <1> to <5>.
[0013] < 7> 仮支持体上に、少なくとも、濃色組成物力 なる層を有してなる感光性転写 材料を基板上に転写し濃色離画壁の形成を行うことを特徴とする前記 < 1 >から < 6 >の 、ずれかに記載のカラーフィルタの製造方法である。  <7> The above-mentioned method, wherein a photosensitive transfer material having at least a layer having a dark color composition force is transferred onto a temporary support, and a dark color separation wall is formed. <1> to <6> The method for producing a color filter according to any one of the above.
[0014] < 8 > 前記 < 1 >から < 7>のいずれかに記載のカラーフィルタの製造方法により 製造されるカラーフィルタである。  <8> A color filter produced by the method for producing a color filter according to any one of <1> to <7>.
< 9 > 基板上に形成された濃色離画壁の断面形状が、該濃色離画壁の基板から の高さが最も高い点における基板からの高さを h、基板から 0. 8hの位置における基 板と平行な線を L、 Lと濃色離画壁が接する点における接線を L、 hの位置における  <9> The cross-sectional shape of the dark color separation wall formed on the substrate is such that the height from the substrate at the highest height of the dark color separation wall from the substrate is h, and the height from the substrate is 0.8 h. The line parallel to the base plate at the position is L, and the tangent line at the point where L and the dark separation wall touch is L and h.
1 1 2  1 1 2
基板と平行な線を Lとしたとき、 Lとしの交点からの濃色離画壁までの距離で規定さ  When the line parallel to the substrate is L, the distance from the intersection with L to the dark separation wall is specified.
3 2 3  3 2 3
れる値 dを hで除した値が 0. 04以下であることを特徴とする < 8 >に記載のカラーフ ィルタである。  The color filter according to <8>, wherein a value obtained by dividing the value d by h is 0.04 or less.
[0015] < 10 > 前記 < 9 >に記載のカラーフィルタを有することを特徴とする表示装置であ る。  [0015] <10> A display device comprising the color filter according to <9>.
発明の効果  The invention's effect
[0016] 本発明によれば、位置精度よく混色等の少な!/、画素を形成し、かつ低コスト及び高 効率にカラーフィルタを製造可能なカラーフィルタの製造方法、この方法で得られる カラーフィルタ、及びこのカラーフィルタを備えた表示装置を提供することができる。 図面の簡単な説明  [0016] According to the present invention, a method for producing a color filter that can produce a color filter with low positional cost and high efficiency while forming a pixel with low positional accuracy and color mixing, etc., and a color filter obtained by this method And a display device including the color filter. Brief Description of Drawings
[0017] [図 1]本発明における濃色離画壁の断面形状を示す概念図である。 FIG. 1 is a conceptual diagram showing a cross-sectional shape of a dark color separation wall in the present invention.
[図 2A]カラーフィルタのパターンを示す概念図である。  FIG. 2A is a conceptual diagram showing a color filter pattern.
[図 2B]カラーフィルタのパターンを示す概念図である。  FIG. 2B is a conceptual diagram showing a color filter pattern.
[図 3A]カラーフィルタの断面形状を示す概念図である。  FIG. 3A is a conceptual diagram showing a cross-sectional shape of a color filter.
[図 3B]カラーフィルタの断面形状を示す概念図である。  FIG. 3B is a conceptual diagram showing a cross-sectional shape of the color filter.
発明を実施するための最良の形態 [0018] 本発明のカラーフィルタの製造方法は、基板上に、互いに異なる色を呈する 2以上 の画素群を有し、前記画素群を構成する各画素は互いに濃色離画壁により離画され ているカラーフィルタの製造方法であって、前記濃色離画壁を形成する工程が、下 記(1)〜(3)の工程を含むことを特徴とするカラーフィルタの製造方法である。 BEST MODE FOR CARRYING OUT THE INVENTION [0018] The method for producing a color filter of the present invention has two or more pixel groups exhibiting different colors on a substrate, and the pixels constituting the pixel group are separated from each other by a dark color separation wall. The method for producing a color filter is characterized in that the step of forming the dark color separation wall includes the following steps (1) to (3).
(1)濃色組成物からなる層を貧酸素雰囲気下にてパターン露光する工程 (パターン 露光工程)  (1) Process of pattern exposure of dark color composition layer in an oxygen-poor atmosphere (pattern exposure process)
(2)パターン露光後、現像して濃色離画壁パターンを形成する工程 (現像工程) (2) Process of developing after pattern exposure to form dark color separation wall pattern (Development process)
(3)該濃色離画壁パターンに 2500mjZcm2以上の露光量の光を照射して光硬化さ せる工程 (ポスト露光工程) (3) A process of irradiating the dark color separation wall pattern with light with an exposure amount of 2500 mjZcm 2 or more (post-exposure process)
[0019] 既述の通り、従来の方法で作製した濃色離画壁は、断面形状が粗ぐインクジェット 法により画素形成したときにエッジからインクが乗り越えやすぐそのため混色などの 不良が発生することがあった。本発明においては、ポスト露光量を 2500mjZcm2以 上に増やして、現像後の形を維持すること、すなわち濃色離画壁のエッジ形状が角 張った状態を維持することで、エッジ部でのインクの乗り越えを抑えることができ、混 色を防止することができる。なお、この場合、後述するように現像をできるだけ強くして 、現像後の濃色離画壁の断面形状を垂直から逆テーパー状とすることが好ましい。 以下、まず、本発明のカラーフィルタの製造方法における濃色離画壁について詳 細に説明する。 [0019] As described above, the dark color separation wall produced by the conventional method may cause defects such as color mixing when the pixel is formed by the ink jet method with a rough cross-sectional shape and the ink gets over the edge immediately. was there. In the present invention, the post-exposure amount is increased to 2500 mjZcm 2 or more to maintain the shape after development, that is, the edge shape of the dark color separation wall is maintained in an angular state, so that Overcoming ink can be suppressed and color mixing can be prevented. In this case, as described later, it is preferable that the development is made as strong as possible and the cross-sectional shape of the dark color separation wall after development is changed from a vertical to an inversely tapered shape. Hereinafter, first, the dark color separation wall in the method for producing a color filter of the present invention will be described in detail.
[0020] (濃色組成物)  [0020] (Dark color composition)
本発明に係る濃色離画壁は、濃色体を含む濃色組成物カゝら形成される。ここで、濃 色組成物とは、高い光学濃度を有する組成物のことであり、形成する濃色離画壁と 同様の厚みに塗布した際のその値は 2. 0〜10. 0である。濃色組成物の光学濃度 は好ましくは 2. 5〜6. 0であり、特に好ましくは 3. 0〜5. 0である。また、この濃色組 成物は、後述するように好ましくは光開始系で硬化させる為、露光波長(一般には紫 外域)に対する光学濃度も重要である。すなわち、形成する濃色離画壁と同様の厚 みに塗布した際のその値は 2. 0〜: LO. 0であり、好ましくは 2. 5〜6. 0、最も好まし いのは 3. 0〜5. 0である。 2. 0未満では濃色離画壁形状が望みのものとならない恐 れがあり、 10. 0を超えると、重合を開始することができず濃色離画壁そのものを作る ことが困難となる。力かる性質を有しさえすれば、組成物中の濃色体は有機物 (染料 、顔料などの各種色素)であっても、または各形態の炭素であっても、これらの組み合 わせ力もなるものであってもよい。かかる濃色体は、特に限定されないが、黒色体が もっとも多く使用される。 The dark color separation wall according to the present invention is formed from a dark color composition containing a dark color body. Here, the dark color composition is a composition having a high optical density, and its value when applied to the same thickness as the dark color separation wall to be formed is 2.0 to 10.0. . The optical density of the dark color composition is preferably 2.5 to 6.0, particularly preferably 3.0 to 5.0. In addition, since the dark color composition is preferably cured by a photoinitiating system as described later, the optical density with respect to the exposure wavelength (generally, the ultraviolet region) is also important. That is, the value when applied to the same thickness as the dark color separation wall to be formed is 2.0 to: LO. 0, preferably 2.5 to 6.0, and most preferably 3 0 to 5.0. 2. If it is less than 0, the dark color separation wall shape may not be what is desired. If it exceeds 10.0, the polymerization cannot be started and the dark color separation wall itself is created. It becomes difficult. As long as it has strong properties, even if the dark color in the composition is an organic substance (various dyes such as dyes and pigments) or carbon in various forms, the combined power of these substances can also be obtained. It may be a thing. The dark color is not particularly limited, but a black color is most often used.
[0021] 前記濃色離画壁に用いる濃色体としては、具体的には、特開 2005— 17716号公 報 [0038]〜[0054]に記載の顔料及び染料や、特開 2004 - 361447号公報 [0068 ]〜[0072]に記載の顔料や、特開 2005— 17521号公報 [0080]〜[0088]に記載の 着色剤を好適に用いることができる。  Specific examples of the dark color body used for the dark color separation wall include the pigments and dyes described in JP-A-2005-17716, [0038] to [0054], and JP-A 2004-361447. The pigments described in JP-A Nos. [0068] to [0072] and the colorants described in JP-A-2005-17521, [0080] to [0088] can be preferably used.
[0022] 前記濃色組成物には、有機顔料、無機顔料、染料等を好適に用いることができ、感 光性榭脂層に遮光性が要求される際には、カーボンブラック、酸化チタン、 4酸化鉄 等の金属酸化物粉、金属硫化物粉、金属粉といった遮光剤の他に、赤、青、緑色等 の顔料の混合物等を用いることができる。公知の着色剤 (染料、顔料)を使用すること ができる。該公知の着色剤のうち顔料を用いる場合には、濃色組成物中に均一に分 散されて!、ることが好まし!/、。  [0022] Organic pigments, inorganic pigments, dyes, and the like can be suitably used for the dark color composition, and when light-shielding properties are required for the photosensitive resin layer, carbon black, titanium oxide, In addition to light-shielding agents such as metal oxide powder such as iron tetroxide, metal sulfide powder, and metal powder, a mixture of pigments such as red, blue, and green can be used. Known colorants (dyes and pigments) can be used. Among the known colorants, when a pigment is used, it is preferable that the pigment is uniformly dispersed in the dark color composition!
[0023] 前記濃色組成物の固形分中の濃色体の比率は、十分に現像時間を短縮する観点 から、 30〜70質量%であることが好ましぐ 40〜60質量%であることがより好ましぐ 50〜55質量%であることが更に好ましい。  [0023] From the viewpoint of sufficiently shortening the development time, the ratio of the dark color body in the solid content of the dark color composition is preferably 30 to 70% by mass, and preferably 40 to 60% by mass. More preferably, it is more preferably 50 to 55% by mass.
黒色濃色体として、更に例示すると、カーボンブラック、チタンカーボン、酸化鉄、酸 化チタン、黒鉛などが挙げられ、中でも、カーボンブラックが好ましい。  Further examples of the dark black color body include carbon black, titanium carbon, iron oxide, titanium oxide, graphite, and the like. Among these, carbon black is preferable.
[0024] 上記濃色体 (顔料)は分散液として使用することが望ま 、。この分散液は、前記濃 色体と分散剤とを予め混合して得られる組成物を、後述する有機溶媒 (又はビヒクル) に添加して分散させることによって調製することができる。前記ビヒクルとは、塗料が 液体状態にある時に濃色体を分散させて 、る媒質の部分を 、、液状であって前記 濃色体と結合して塗膜を固める部分 (バインダー)と、これを溶解希釈する成分 (有機 溶媒)とを含む。前記濃色体を分散させる際に使用する分散機としては、特に制限は なぐ例えば、朝倉邦造著、「顔料の事典」、第一版、朝倉書店、 2000年、 438頁に 記載されている-一ダー、ロールミル、アトライダー、スーパーミル、ディゾルノ、ホモ ミキサー、サンドミル等の公知の分散機が挙げられる。更に、該文献 310頁記載の機 械的摩砕により、摩擦力を利用し微粉砕してもよい。 [0024] The dark colored body (pigment) is preferably used as a dispersion. This dispersion can be prepared by adding and dispersing a composition obtained by previously mixing the dark body and a dispersant in an organic solvent (or vehicle) described later. The vehicle is a portion of a medium that disperses a dark colored body when the paint is in a liquid state, a portion that is liquid and binds to the dark colored body, and hardens the coating film (binder). And a component for dissolving and diluting (organic solvent). There are no particular restrictions on the disperser used to disperse the dark-colored body. For example, it is described in Asakura Kunizo, “Encyclopedia of Pigments”, first edition, Asakura Shoten, 2000, page 438. Well-known dispersers such as a hinder, a roll mill, an atrider, a super mill, a disorno, a homomixer, and a sand mill. Further, the machine described on page 310 of the document. Fine grinding may be performed using frictional force by mechanical grinding.
[0025] 本発明で用いる濃色体 (顔料)は、分散安定性の観点から、数平均粒径 0. 001〜 0. のものが好ましぐ更に 0. 01〜0. 08 mのものが好ましい。尚、ここで「粒 径」とは、粒子の電子顕微鏡写真画像を同面積の円とした時の直径を言い、また「数 平均粒径」とは多数の粒子について上記の粒径を求め、この 100個平均値をいう。  [0025] The dark color material (pigment) used in the present invention is preferably one having a number average particle diameter of 0.001 to 0.00 from the viewpoint of dispersion stability, and more preferably 0.01 to 0.08 m. preferable. Here, “particle diameter” means the diameter when the electron micrograph image of the particle is a circle of the same area, and “number average particle diameter” is the above-mentioned particle diameter for a large number of particles, This means the average value of 100 pieces.
[0026] 濃色組成物は力かる濃色体以外に、重合開始剤、及び多官能性モノマーを少なく とも含んでなることが好ましい。また、必要に応じて更に公知の添加剤、例えば、バイ ンダ一、可塑剤、充填剤、安定化剤、重合禁止剤、界面活性剤、溶剤、密着促進剤 等を含有させることができる。さらに、濃色組成物は少なくとも 150°C以下の温度で軟 ィ匕もしくは粘着性になることが好ましぐ熱可塑性であることが好ましい。かかる観点 力もは、相溶性の可塑剤を添加することで改質することができる。  [0026] The dark color composition preferably contains at least a polymerization initiator and a polyfunctional monomer in addition to a strong dark body. Further, a known additive such as a binder, a plasticizer, a filler, a stabilizer, a polymerization inhibitor, a surfactant, a solvent, an adhesion promoter and the like can be further contained as necessary. Furthermore, it is preferred that the dark color composition is thermoplastic, which preferably becomes soft or tacky at a temperature of at least 150 ° C. Such viewpoint power can be modified by adding a compatible plasticizer.
[0027] 濃色組成物を硬化させる方法としては、熱開始剤を用いる熱開始系や光開始剤を 用いる光開始系が一般的であるが、本発明では硬化後の濃色離画壁を後述するよう な形状とすることが重要であることから、光開始系を用いることが好ましい。ここで用い る光重合開始剤は、可視光線、紫外線、遠紫外線、電子線、 X線等の放射線の照射 (露光ともいう)により、後述の多官能性モノマーの重合を開始する活性種を発生し得 る化合物であり、公知の光重合開始剤若しくは光重合開始剤系の中から適宜選択す ることがでさる。  [0027] As a method for curing the dark color composition, a heat initiation system using a thermal initiator and a photoinitiation system using a photoinitiator are generally used. In the present invention, a dark color separation wall after curing is used. Since it is important to have a shape as described later, it is preferable to use a photoinitiating system. The photopolymerization initiator used here generates an active species that initiates polymerization of the polyfunctional monomer described below by irradiation with radiation such as visible light, ultraviolet light, far ultraviolet light, electron beam, and X-ray (also referred to as exposure). It can be selected as appropriate from known photopolymerization initiators or photopolymerization initiator systems.
例えば、トリノ、ロメチル基含有ィ匕合物、アタリジン系化合物、ァセトフエノン系化合物 、ビイミダゾール系化合物、トリアジン系化合物、ベンゾイン系化合物、ベンゾフエノン 系化合物、 α—ジケトン系化合物、多核キノン系化合物、キサントン系化合物、ジァ ゾ系化合物、等を挙げることができる。  For example, trino, romethyl group-containing compounds, atalidine compounds, acetophenone compounds, biimidazole compounds, triazine compounds, benzoin compounds, benzophenone compounds, α-diketone compounds, polynuclear quinone compounds, xanthone compounds Compounds, diazo compounds, and the like.
[0028] 具体的には、特開 2001— 117230号公報に記載の、トリノ、ロメチル基が置換したト リハロメチルォキサゾール誘導体又は s—トリァジン誘導体、米国特許第 4239850号 明細書に記載のトリハロメチル— s—トリアジンィ匕合物、米国特許第 4212976号明細 書に記載のトリハロメチルォキサジァゾールイ匕合物などのトリハロメチル基含有ィ匕合 物; [0028] Specifically, as described in JP-A-2001-117230, trino, trihalomethyloxazole derivatives substituted with romethyl group or s -triazine derivatives, described in US Pat. No. 4,239,850 A trihalomethyl group-containing compound such as a trihalomethyl-s-triazine compound, a trihalomethyloxadiazole compound described in US Pat. No. 4,212,976;
[0029] 9—フエ-ルァクリジン、 9—ピリジルアタリジン、 9—ピラジュルァクリジン、 1, 2—ビ ス(9—アタリジ-ル)ェタン、 1, 3 ビス(9—アタリジ-ル)プロパン、 1, 4 ビス(9— アタリジ -ル)ブタン、 1, 5 ビス(9—アタリジ-ル)ペンタン、 1, 6 ビス(9—アタリ ジ -ル)へキサン、 1, 7 ビス(9—アタリジ-ル)ヘプタン、 1, 8 ビス(9—アタリジ- ル)オクタン、 1, 9 ビス(9—アタリジ-ル)ノナン、 1, 10 ビス(9—アタリジ-ル)デ カン、 1, 11—ビス(9—アタリジ-ル)ゥンデカン、 1, 12 ビス(9—アタリジ-ル)ドデ カン等のビス(9—アタリジ-ル)アルカン、などのアタリジン系化合物; [0029] 9-Fe-Lucridine, 9-Pyridylatridine, 9-Pyrazuracridine, 1,2-Bi (9-Ataridyl) ethane, 1,3 Bis (9-Ataridyl) propane, 1,4 Bis (9-Ataridyl) butane, 1,5 Bis (9-Ataridyl) pentane, 1 , 6 bis (9-Atarizyl) hexane, 1,7 bis (9-Atarizyl) heptane, 1,8 bis (9-Atarizyl) octane, 1,9 bis (9-Atarizyl) ) Nonane, 1, 10 Bis (9-Ataridyl) decane, 1, 11-Bis (9-Ataridyl) undecane, 1,12 Bis (9-Ataridyl) dodecane, etc. —Ataridyl) alkanes, such as alkanes;
[0030] 6- (p—メトキシフエ-ル) 2, 4 ビス(トリクロロメチル) s トリァジン、 6—〔p—  [0030] 6- (p-methoxyphenyl) 2, 4 bis (trichloromethyl) s triazine, 6- [p-
(N, N ビス(エトキシカルボ-ルメチル)ァミノ)フエ-ル〕一 2, 4 ビス(トリクロロメ チル)—s トリァジンなどのトリアジン系化合物;その他、 9, 10 ジメチルベンズフエ ナジン、ミヒラーズケトン、ベンゾフエノン Zミヒラーズケトン、へキサァリーノレビイミダゾ ール/メルカプトべンズイミダゾール、ベンジルジメチルケタール、チォキサントン/ ァミン、 2, 2'—ビス(2, 4 ジクロロフエ-ル)一 4, 4', 5, 5'—テトラフエ-ル一 1, 2' ビイミダゾールなどが挙げられる。  (N, N bis (ethoxycarbomethyl) amino) phenol] 1,4 bis (trichloromethyl) -s triazine compounds such as triazine; other, 9, 10 dimethylbenzphenazine, Michler's ketone, benzophenone Z Michler's ketone, hexanolino imidazole / mercaptobenzimidazole, benzyldimethyl ketal, thixanthone / amine, 2, 2'-bis (2,4 dichlorophenol) 1, 4, 4 ', 5, 5'-tetraphenol -Lu 1, 2 'biimidazole.
[0031] 上記のうち、トリノ、ロメチル基含有ィ匕合物、アタリジン系化合物、ァセトフエノン系化 合物、ビイミダゾール系化合物、トリアジン系化合物力 選択される少なくとも一種が 好ましぐ特に、トリハロメチル基含有化合物及びアタリジン系化合物から選択される 少なくとも一種を含有することが好ましい。トリノ、ロメチル基含有ィ匕合物、アタリジン系 化合物は、汎用性でかつ安価である点でも有用である。  [0031] Among the above, at least one selected from trino, romethyl group-containing compounds, atalidine compounds, acetophenone compounds, biimidazole compounds, and triazine compounds is preferred. It is preferable to contain at least one selected from a containing compound and an atalidine compound. Torino, romethyl group-containing compounds, and atalidine compounds are useful because they are versatile and inexpensive.
特に好ましいのは、トリハロメチル基含有ィ匕合物としては、 2 トリクロロメチル一 5— (P—スチリルスチリル) 1, 3, 4ーォキサジァゾールであり、アタリジン系化合物とし ては、 9—フエ-ルァクリジンであり、更に、 6—〔p— (N, N—ビス(エトキシカルボ- ルメチル)ァミノ)フエ-ル〕— 2, 4 ビス(トリクロロメチル)—s トリァジン、 2— (p— ブトキシスチリル)一 5 トリクロロメチル一 1, 3, 4—ォキサジァゾールなどのトリハロメ チル基含有化合物、及びミヒラーズケトン、 2, 2 '—ビス(2, 4 ジクロ口フエ-ル)ー4 , 4', 5, 5'—テトラフエ-ル一 1, 2'—ビイミダゾールである。  Particularly preferred as a compound containing a trihalomethyl group is 2-trichloromethyl-1- (P-styrylstyryl) 1,3,4-oxadiazole, and as an atalidine compound, 9 —Phenolacridine, 6- [p— (N, N-bis (ethoxycarbomethyl) amino) phenol] — 2, 4 bis (trichloromethyl) —s triazine, 2— (p— Butoxystyryl) 1 5 Trichloromethyl 1 3, 3, 4-oxadiazole-containing compounds such as trihalomethyl groups, and Michler's ketone, 2, 2'-bis (2, 4 diclonal mouth) -4, 4 ', 5, 5'-tetraphenyl 1,2'-biimidazole.
[0032] 前記光重合開始剤は、単独で用いてもよ!、し、 2種以上を併用してもよ 、。前記光 重合開始剤の濃色組成物における総量としては、濃色組成物の全固形分 (質量)の 0. 1〜20質量%が好ましぐ 0. 5〜10質量%が特に好ましい。前記総量が、 0. 1質 量%未満であると、組成物の光硬化の効率が低く露光に長時間を要することがあり、[0032] The photopolymerization initiator may be used alone or in combination of two or more. The total amount of the photopolymerization initiator in the dark composition is preferably from 0.1 to 20% by weight, particularly preferably from 0.5 to 10% by weight, based on the total solid content (mass) of the dark color composition. The total amount is 0.1 quality If the amount is less than%, the photocuring efficiency of the composition may be low and exposure may take a long time.
20質量%を超えると、現像する際に、形成された画像パターンが欠落したり、パター ン表面に荒れが生じやすくなつたりすることがある。 If the amount exceeds 20% by mass, the developed image pattern may be lost during development, or the pattern surface may be easily roughened.
[0033] 前記光重合開始剤は、水素供与体を併用して構成されてもよい。該水素供与体と しては、感度をより良化することができる点で、以下で定義するメルカブタン系化合物 、アミン系化合物等が好ましい。ここでの「水素供与体」とは、露光により前記光重合 開始剤から発生したラジカルに対して、水素原子を供与することができる化合物を 、 [0033] The photopolymerization initiator may be configured using a hydrogen donor in combination. The hydrogen donor is preferably a mercabtan compound or an amine compound as defined below from the viewpoint that sensitivity can be further improved. The term “hydrogen donor” as used herein refers to a compound that can donate a hydrogen atom to a radical generated from the photopolymerization initiator by exposure.
[0034] 前記メルカブタン系化合物は、ベンゼン環あるいは複素環を母核とし、該母核に直 接結合したメルカプト基を 1個以上、好ましくは 1〜3個、更に好ましくは 1〜2個有す る化合物(以下、「メルカブタン系水素供与体」という)である。また、前記アミン系化合 物は、ベンゼン環あるいは複素環を母核とし、該母核に直接結合したアミノ基を 1個 以上、好ましくは 1〜3個、更に好ましくは 1〜2個有する化合物(以下、「アミン系水 素供与体」という)である。尚、これらの水素供与体は、メルカプト基とアミノ基とを同時 に有していてもよい。 [0034] The mercabtan compound has a benzene ring or a heterocyclic ring as a mother nucleus, and has one or more, preferably 1 to 3, more preferably 1 to 2, mercapto groups directly bonded to the mother nucleus. (Hereinafter, referred to as “merkabutane-based hydrogen donor”). The amine compound is a compound having a benzene ring or a heterocyclic ring as a mother nucleus and having 1 or more, preferably 1 to 3, more preferably 1 to 2, amino groups directly bonded to the mother nucleus ( Hereinafter referred to as “amine-based hydrogen donor”). These hydrogen donors may have a mercapto group and an amino group at the same time.
[0035] 上記のメルカプタン系水素供与体の具体例としては、 2 メルカプトべンゾチアゾー ル、 2 メルカプトべンゾォキサゾール、 2 メルカプトべンゾイミダゾール、 2, 5 ジ メルカプト 1, 3, 4ーチアジアゾール、 2 メルカプト 2, 5 ジメチルァミノピリジン 、等が挙げられる。これらのうち、 2—メルカプトべンゾチアゾール、 2—メルカプトベン ゾォキサゾールが好ましく、特に 2—メルカプトべンゾチアゾールが好まし!/、。  [0035] Specific examples of the mercaptan-based hydrogen donor include 2 mercaptobenzozoazole, 2 mercaptobenzoxazole, 2 mercaptobenzozoimidazole, 2,5 dimercapto 1,3,4-thiadiazole, 2 mercapto 2 , 5 dimethylaminopyridine, and the like. Of these, 2-mercaptobenzothiazole and 2-mercaptobenzoxazole are preferable, and 2-mercaptobenzothiazole is particularly preferable! /.
[0036] 上記のアミン系水素供与体の具体例としては、 4、 4' ビス(ジメチルァミノ)ベンゾ フエノン、 4、 4 '—ビス(ジェチルァミノ)ベンゾフエノン、 4ージェチルアミノアセトフエノ ン、 4ージメチルァミノプロピオフエノン、ェチルー 4ージメチルァミノべンゾエート、 4 —ジメチルァミノ安息香酸、 4—ジメチルァミノべンゾ-トリル等が挙げられる。これら のうち、 4, 4 '—ビス(ジメチルァミノ)ベンゾフエノン、 4, 4 '—ビス(ジェチルァミノ)ベ ンゾフエノンが好ましく、特に 4, 4'—ビス(ジェチルァミノ)ベンゾフエノンが好ましい。  [0036] Specific examples of the amine-based hydrogen donor include 4, 4 'bis (dimethylamino) benzophenone, 4, 4'-bis (jetylamino) benzophenone, 4-jetylaminoacetophenone, 4- Examples include dimethylaminopropiophenone, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzoic acid, 4-dimethylaminobenzozotolyl and the like. Of these, 4,4′-bis (dimethylamino) benzophenone and 4,4′-bis (jetylamino) benzophenone are preferable, and 4,4′-bis (jetylamino) benzophenone is particularly preferable.
[0037] 前記水素供与体は、単独でまたは 2種以上を混合して使用することができ、形成さ れた画像が現像時に永久支持体上から脱落し難ぐかつ強度及び感度も向上させ 得る点で、 1種以上のメルカプタン系水素供与体と 1種以上のアミン系水素供与体と を組合せて使用することが好ま U、。 [0037] The hydrogen donor can be used alone or in admixture of two or more, and the formed image is difficult to drop off from the permanent support during development, and the strength and sensitivity are improved. It is preferable to use a combination of one or more mercaptan hydrogen donors and one or more amine hydrogen donors.
[0038] 前記メルカブタン系水素供与体とアミン系水素供与体との組合せの具体例としては 、 2 メルカプトべンゾチアゾール Z4, 4 '—ビス(ジメチルァミノ)ベンゾフエノン、 2— メルカプトべンゾチアゾール Z4, 4 '—ビス(ジェチルァミノ)ベンゾフエノン、 2 メル カプトべンゾォキサゾール Z4, 4 '—ビス(ジメチルァミノ)ベンゾフエノン、 2 メルカ ブトべンゾォキサゾール Z4, 4'—ビス(ジェチルァミノ)ベンゾフエノン等が挙げられ る。より好ましい組合せは、 2 メルカプトべンゾチアゾール /4, 4 '—ビス(ジェチル ァミノ)ベンゾフエノン、 2 メルカプトべンゾォキサゾール Z4, 4 '—ビス(ジェチルァ ミノ)ベンゾフエノンであり、特に好ましい組合せは、 2—メルカプトべンゾチアゾール /4, 4' ビス(ジェチルァミノ)ベンゾフエノンである。  [0038] Specific examples of the combination of the mercabbutane-based hydrogen donor and the amine-based hydrogen donor include 2 mercaptobenzothiazole Z4,4'-bis (dimethylamino) benzophenone, 2-mercaptobenzothiazole Z4,4'-bis (Jetylamino) benzophenone, 2 mercaptobenzoxazole Z4,4'-bis (dimethylamino) benzophenone, 2mercaptobenzoxazole Z4,4'-bis (jetylamino) benzophenone, and the like. A more preferred combination is 2 mercaptobenzothiazole / 4,4'-bis (jetylamino) benzophenone, 2mercaptobenzoxazole Z4,4'-bis (jetylamino) benzophenone, and a particularly preferred combination is 2-mercaptobenzozothiazole / 4, 4 'Bis (jetylamino) benzophenone.
[0039] 前記メルカブタン系水素供与体とアミン系水素供与体とを組合せた場合の、メルカ ブタン系水素供与体 (M)とァミン系水素供与体 (A)との質量比 (M : A)は、通常 1: 1 〜1 :4が好ましぐ 1 : 1〜1 : 3がより好ましい。前記水素供与体の濃色組成物におけ る総量としては、濃色組成物の全固形分 (質量)の 0. 1〜20質量%が好ましぐ 0. 5 〜 10質量%が特に好ましい。  [0039] When the mercabtan hydrogen donor and the amine hydrogen donor are combined, the mass ratio (M: A) of the mercabtan hydrogen donor (M) to the amine hydrogen donor (A) is Usually, 1: 1 to 1: 4 is preferred, and 1: 1 to 1: 3 is more preferred. The total amount of the hydrogen donor in the dark color composition is preferably from 0.1 to 20% by weight, particularly preferably from 0.5 to 10% by weight, based on the total solid content (mass) of the dark color composition.
[0040] 濃色組成物の多官能性モノマーとしては、下記化合物を単独で又は 2種以上を必 要に応じて他のモノマーと組み合わせて使用することができる。具体的には、 tーブ チル (メタ)アタリレート、エチレングリコールジ (メタ)アタリレート、 2—ヒドロキシプロピ ル (メタ)アタリレート、トリエチレングリコールジ(メタ)アタリレート、トリメチロールプロパ ントリ(メタ)アタリレート、 2 -ェチル— 2—ブチル―プロパンジオールジ (メタ)アタリレ ート、ペンタエリスリトールトリ(メタ)アタリレート、ペンタエリスリトールテトラ (メタ)アタリ レート、ジペンタエリスリトールへキサ(メタ)アタリレート、ジペンタエリスリトールペンタ (メタ)アタリレート、ポリオキシェチル化トリメチロールプロパントリ(メタ)アタリレート、ト リス(2— (メタ)アタリロイルォキシェチル)イソシァヌレート、 1, 4 ジイソプロべ-ル ベンゼン、 1, 4ージヒドロキシベンゼンジ(メタ)アタリレート、デカメチレングリコールジ (メタ)アタリレート、スチレン、ジァリルフマレート、トリメリット酸トリアリル、ラウリル (メタ) アタリレート、(メタ)アクリルアミド、キシリレンビス (メタ)アクリルアミド、等が挙げられる [0041] また、 2—ヒドロキシェチル (メタ)アタリレート、 2—ヒドロキシプロピル (メタ)アタリレー ト、ポリエチレングリコールモノ (メタ)アタリレート等のヒドロキシル基を有する化合物と へキサメチレンジイソシァネート、トルエンジイソシァネート、キシレンジイソシァネート 等のジイソシァネートとの反応物も使用できる。 [0040] As the polyfunctional monomer of the dark color composition, the following compounds may be used singly or in combination of two or more with other monomers as required. Specifically, tert-butyl (meth) acrylate, ethylene glycol di (meth) acrylate, 2-hydroxypropyl (meth) acrylate, triethylene glycol di (meth) acrylate, trimethylol property ( (Meth) Atarylate, 2-Ethyl-2-butyl-propanediol Di (meth) acrylate, Pentaerythritol tri (meth) acrylate, Pentaerythritol tetra (meth) acrylate, Dipentaerythritol Hexa (meth) attaly , Dipentaerythritol penta (meth) acrylate, polyoxyethylated trimethylolpropane tri (meth) acrylate, tris (2- (meth) attayllooxychetyl) isocyanurate, 1, 4 diisopropyl benzene, 1,4-dihydroxybenzene di (me ) Atari rate, decamethylene glycol di (meth) Atari rate, styrene, di § Lil fumarate, triallyl trimellitate, lauryl (meth) Atari rate, and (meth) acrylamide, xylylenebis (meth) acrylamide, etc. [0041] Further, a compound having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, polyethylene glycol mono (meth) acrylate and hexamethylene diisocyanate, Reactants with diisocyanates such as toluene diisocyanate and xylene diisocyanate can also be used.
これらのうち、特に好ましいのは、ペンタエリスリトールテトラアタリレート、ジペンタエリ スリトールへキサアタリレート、ジペンタエリスリトールペンタアタリレート、トリス(2—ァ クリロイルォキシェチル)イソシァヌレートである。  Of these, particularly preferred are pentaerythritol tetraatalylate, dipentaerythritol hexaatalylate, dipentaerythritol pentaatalylate, and tris (2-acryloyloxychetyl) isocyanurate.
[0042] 多官能性モノマーの濃色組成物における含有量としては、濃色組成物の全固形分  [0042] The content of the polyfunctional monomer in the dark color composition is the total solid content of the dark color composition.
(質量)に対して、 5〜80質量%が好ましぐ 10〜70質量%が特に好ましい。前記含 有量が、 5質量%未満であると、組成物の露光部でのアルカリ現像液への耐性が劣 ることがあり、 80質量%を越えると、濃色組成物としたときのタツキネスが増加してしま い、取扱い性に劣ることがある。  5 to 80% by mass is preferable with respect to (mass), and 10 to 70% by mass is particularly preferable. When the content is less than 5% by mass, the resistance to the alkaline developer in the exposed portion of the composition may be inferior, and when it exceeds 80% by mass, the tackiness of a dark color composition is obtained. May increase and handleability may be poor.
[0043] (バインダー)  [0043] (Binder)
前記濃色組成物には、必要に応じてバインダーを含有することができる。 ノインダ一としては、側鎖にカルボン酸基やカルボン酸塩基などの極性基を有する ポリマーが好ましい。その例としては、特開昭 59— 44615号公報、特公昭 54— 343 27号公報、特公昭 58— 12577号公報、特公昭 54— 25957号公報、特開昭 59— 5 3836号公報、及び特開昭 59— 71048号公報に記載の、メタクリル酸共重合体、ァ クリル酸共重合体、ィタコン酸共重合体、クロトン酸共重合体、マレイン酸共重合体、 部分エステルイ匕マレイン酸共重合体、等を挙げることができる。  The dark color composition may contain a binder as necessary. As the noinder, a polymer having a polar group such as a carboxylic acid group or a carboxylic acid group in the side chain is preferable. Examples thereof include JP-A-59-44615, JP-B-54-34327, JP-B-58-12577, JP-B-54-25957, JP-A-59-53836, and As described in JP-A-59-71048, methacrylic acid copolymer, acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partial ester oxalic maleic acid copolymer And the like.
[0044] また、側鎖にカルボン酸基を有するセルロース誘導体も挙げられる。さらに、水酸基 を有するポリマーに環状酸無水物を付加したものも好ましく使用できる。  [0044] In addition, cellulose derivatives having a carboxylic acid group in the side chain may also be mentioned. Furthermore, what added the cyclic acid anhydride to the polymer which has a hydroxyl group can also be used preferably.
特に好ましい例として、米国特許第 4139391号明細書に記載のベンジル (メタ)ァ タリレートと (メタ)アクリル酸との共重合体や、ベンジル (メタ)アタリレートと (メタ)アタリ ル酸と他のモノマーとの多元共重合体を挙げることができる。これらの極性基を有す るバインダーは、一種単独で用いてもよいし、通常の膜形成性のポリマーと併用する 組成物の状態で使用するようにしてもよ!、。 ノ ンダ一の濃色組成物中における含有量としては、層又は組成物の全固形分( 質量)に対して、 20〜50質量%が好ましぐ 24〜45質量%がより好ましい。 Particularly preferred examples include copolymers of benzyl (meth) atalylate and (meth) acrylic acid described in US Pat. No. 4,139,391, benzyl (meth) acrylate, (meth) acrylate, and other Mention may be made of multicomponent copolymers with monomers. These binders having a polar group may be used singly or may be used in the state of a composition used in combination with an ordinary film-forming polymer! The content of the non-colored dark color composition is preferably 20 to 50% by mass and more preferably 24 to 45% by mass with respect to the total solid content (mass) of the layer or composition.
[0045] (溶剤) [0045] (Solvent)
前記濃色組成物には、必要に応じて溶剤を含有することができる。有機溶剤の例と しては、メチルェチルケトン、プロピレングリコールモノメチルエーテル、プロピレングリ コーノレモノメチノレエーテノレアセテート、シクロへキサノン、シクロへキサノーノレ、メチノレ イソブチルケトン、乳酸ェチル、乳酸メチル、力プロラタタム等が挙げられる。  The dark color composition may contain a solvent as necessary. Examples of organic solvents include methyl ethyl ketone, propylene glycol monomethyl ether, propylene glycol monomethino ethenore acetate, cyclohexanone, cyclohexanol, methylol isobutyl ketone, ethyl lactate, methyl lactate, strength prolatatum. Etc.
[0046] (界面活性剤) [0046] (Surfactant)
濃色組成物には、必要に応じて界面活性剤を含有することができる。濃色組成物 を基板上又は後述の感光性転写材料の仮支持体上に塗布する場合には、濃色組 成物中に界面活性剤を含有させることで、均一な膜厚に制御でき、塗布ムラを効果 的に防止することができる。界面活性剤としては、特開 2003— 337424号公報、特 開平 11— 133600号公報に記載の界面活性剤が好適に挙げられる。なお、界面活 性剤の濃色組成物中における含有量としては、該組成物の全固形分 (質量)に対し て、 0. 001〜1質量0 /0力 S—般的であり、 0. 01〜0. 5質量0 /0力 S好ましく、 0. 03〜0. 3質量%が特に好ましい。 The dark color composition may contain a surfactant as necessary. When the dark color composition is applied onto a substrate or a temporary support of a photosensitive transfer material described later, a uniform film thickness can be controlled by including a surfactant in the dark color composition. Uneven coating can be effectively prevented. Preferred examples of the surfactant include those described in JP-A-2003-337424 and JP-A-11-133600. As the content in the dark composition surface active agent, and with respect to the total solid content (mass) of the composition is from 0.001 to 1 mass 0/0 power S- general, 0 . 01 to 0.5 mass 0/0 force S preferably, from 0.03 to 0.3% by weight is particularly preferred.
[0047] (紫外線吸収剤) [0047] (UV absorber)
濃色組成物には、必要に応じて紫外線吸収剤を含有することができる。 紫外線吸収剤としては、特開平 5— 72724号公報に記載の化合物、並びにサリシ レート系、ベンゾフエノン系、ベンゾトリアゾール系、シァノアクリレート系、ニッケルキ レート系、ヒンダードアミン系等の化合物が挙げられる。  The dark color composition may contain an ultraviolet absorber as necessary. Examples of the ultraviolet absorber include compounds described in JP-A-5-72724, and compounds such as salicylate, benzophenone, benzotriazole, cyanoacrylate, nickel chelate, and hindered amine.
例えば、フエ-ルサリシレート、 4 t—ブチルフエ-ルサリシレート、 2, 4ージー t— ブチルフエ-ルー 3', 5'—ジ一 t— 4'—ヒドロキシベンゾエート、 4— t—ブチルフエ- ルサリシレート、 2, 4ージヒドロキシベンゾフエノン、 2 ヒドロキシー4ーメトキシベンゾ フエノン、 2 ヒドロキシ一 4— n—オタトキシベンゾフエノン、 2— (2'—ヒドロキシ一 5' メチルフエニル)ベンゾトリァゾール、 2—(2' ヒドロキシ 3'—t—ブチルー 5'—メ チルフエ-ル) 5 クロ口べンゾトリァゾール、ェチル 2 シァノ 3, 3 ジ一フエ -ルアタリレート、 2, 2' ヒドロキシー4ーメトキシベンゾフエノン、ニッケルジブチルジ チォカーバメート、ビス(2, 2, 6, 6—テトラメチルー 4 ピリジン) セバケート、 4—t ブチルフエ-ルサリシレート、サルチル酸フエ-ル、 4ーヒドロキシ 2, 2, 6, 6— テトラメチルピペリジン縮合物、コハク酸一ビス(2, 2, 6, 6—テトラメチルー 4ーピペリ デュル) -エステル、 2— [ 2 ヒドロキシ— 3 , 5 ビス( α , a -ジメチルベンジル)フ ェ -ル] - 2H-ベンゾトリァゾール、 7— { [4 クロ口 6 (ジェチルァミノ) 5 ト リアジン一 2—ィル]アミノ} 3 フエ-ルクマリン等が挙げられる。 For example, phenyl salicylate, 4 t-butyl phenol salicylate, 2, 4 zeyl t— butyl felt 3 ′, 5′—di-t— 4′-hydroxybenzoate, 4—t-butyl phenol salicylate, 2 , 4-Dihydroxybenzophenone, 2 Hydroxy-4-methoxybenzophenone, 2 Hydroxy 4-n-Otoxybenzophenone, 2- (2'-Hydroxy 1-5 'methylphenyl) benzotriazole, 2- (2' Hydroxy 3 '—T-Butyl-5'-methylphenol) 5 Chronobenzobenzolazole, Ethyl 2 Cyan 3, 3 Di-di-aryl ester, 2, 2' Hydroxy-4-methoxybenzophenone, Nickel dibutyl di Thiocarbamate, bis (2, 2, 6, 6-tetramethyl-4-pyridine) sebacate, 4-t butylphenol salicylate, phenyl salicylate, 4-hydroxy 2, 2, 6, 6-tetramethylpiperidine condensate Acid bis (2, 2, 6, 6-tetramethyl-4-piperidyl) -ester, 2- [2hydroxy-3,5bis (α, a-dimethylbenzyl) phenol] -2H-benzotriazole, 7- {[4 Black mouth 6 (Jetylamino) 5 Triazine 2-yl] amino} 3 phenol coumarin and the like.
紫外線吸収剤を用いる場合の、濃色組成物の全固形分に対する紫外線吸収剤の 含有量としては 0. 5〜15質量%が一般的であり、 1〜12質量%が好ましぐ 1. 2〜1 0質量%が特に好ましい。  In the case of using an ultraviolet absorber, the content of the ultraviolet absorber with respect to the total solid content of the dark color composition is generally 0.5 to 15% by mass, and preferably 1 to 12% by mass. ˜10 mass% is particularly preferred.
[0048] (熱重合防止剤) [0048] (Thermal polymerization inhibitor)
濃色組成物には、熱重合防止剤を含むことが好ましい。熱重合防止剤の例として は、ハイドロキノン、ハイドロキノンモノメチルエーテル、 p—メトキシフエノール、ジ一 t ーブチルー ρ クレゾール、ピロガロール、 tーブチルカテコール、ベンゾキノン、 4, 4 '一チォビス(3—メチルー 6 t—ブチルフエノール)、 2, 2'—メチレンビス(4ーメチ ルー 6 t—ブチルフエノール)、 2 メルカプトべンズイミダゾール、フエノチアジン等 が挙げられる。  The dark composition preferably contains a thermal polymerization inhibitor. Examples of thermal polymerization inhibitors include hydroquinone, hydroquinone monomethyl ether, p-methoxyphenol, di-tert-butyl-ρ-cresol, pyrogallol, tert-butylcatechol, benzoquinone, 4,4'-thiobis (3-methyl-6-tert-butyl Phenol), 2,2′-methylenebis (4-methyl 6t-butylphenol), 2 mercaptobenzimidazole, phenothiazine and the like.
熱重合防止剤を用いる場合の、濃色組成物の全固形分に対する含有量としては 0 . 01〜1質量0 /0力 S—般的であり、 0. 02〜0. 7質量0 /0力 S好ましく、 0. 05〜0. 5質量 %が特に好ましい。 In the case of using a thermal polymerization inhibitor, the content relative to the total solids in the dark composition 0. A 01-1 mass 0/0 power S- general, from 0.02 to 0.7 mass 0/0 Force S is preferable, and 0.05 to 0.5% by mass is particularly preferable.
[0049] また、濃色組成物には、前記成分以外に、特開平 11 133600号公報に記載の「 接着助剤」やその他の添加剤等を含有させることもできる。  [0049] Further, in addition to the above components, the dark color composition may contain "adhesion aid" described in JP-A-11 133600, other additives, and the like.
[0050] (濃色離画壁) [0050] (Dark color separation wall)
本発明に係る濃色離画壁は、上記濃色組成物から形成される。濃色離画壁は、 2 以上の画素群を離画するものであり、一般には黒であることが多いが、黒に限定され るものではない。濃色離画壁を形成する工程は、少なくとも、下記(1)〜(3)の工程を 含む。  The dark color separation wall according to the present invention is formed from the dark color composition. A dark color separation wall separates two or more pixel groups and is generally black, but is not limited to black. The step of forming the dark color separation wall includes at least the following steps (1) to (3).
(1)濃色組成物からなる層を貧酸素雰囲気下にてパターン露光する工程 (パターン 露光工程) (2)パターン露光後、現像して濃色離画壁パターンを形成する工程 (現像工程)(1) Process of pattern exposure of dark color composition layer in an oxygen-poor atmosphere (pattern exposure process) (2) Process of developing after pattern exposure to form dark color separation wall pattern (Development process)
(3)該濃色離画壁パターンに 2500mjZcm2以上の露光量の光を照射して光硬化さ せる工程 (ポスト露光工程) (3) A process of irradiating the dark color separation wall pattern with light with an exposure amount of 2500 mjZcm 2 or more (post-exposure process)
以下、各工程について説明する。  Hereinafter, each step will be described.
[0051] (1)パターン露光工程 [0051] (1) Pattern exposure process
本パターン露光工程では、既述の濃色組成物力もなる層に対し、貧酸素雰囲気下 でパターン露光し、前記濃色組成物を光硬化させる。パターン露光とは、画像パター ンが形成されたマスクを介して、濃色組成物層にパターン化された光を照射すること をいう。場合によっては、マスクを介さずに光照射してもよい。  In this pattern exposure step, the above-described layer having the dark color composition power is subjected to pattern exposure in an oxygen-poor atmosphere to photocur the dark color composition. Pattern exposure refers to irradiating the dark color composition layer with patterned light through a mask on which an image pattern is formed. In some cases, light irradiation may be performed without using a mask.
光照射に用いる光源としては、中圧〜超高圧水銀灯、キセノン灯、メタルハライドラ ンプ等の公知の光源が挙げられる。前記マスクは、公知のものの中から適宜選択で きる。  Examples of the light source used for the light irradiation include known light sources such as medium to ultra high pressure mercury lamps, xenon lamps, and metal halide lamps. The mask can be appropriately selected from known masks.
次に、露光時における貧酸素雰囲気下について以下に説明する。  Next, the poor oxygen atmosphere at the time of exposure will be described below.
[0052] 力かる濃色組成物を光硬化させる際の貧酸素雰囲気下とは、不活性ガス下、減圧 下、酸素を遮断しうる保護層下のことを指しており、これらは詳しくは以下の通りであ る。 [0052] An oxygen-poor atmosphere in photocuring a strong dark composition means an inert gas, a reduced pressure, and a protective layer capable of blocking oxygen, and these are described in detail below. It is as follows.
[0053] 〜不活性ガス下〜  [0053] ~ Under inert gas ~
不活性ガスとは、 N、 H、 CO、などの一般的な気体や、 He、 Ne、 Arなどの希ガス  An inert gas is a general gas such as N, H, or CO, or a rare gas such as He, Ne, or Ar.
2 2 2  2 2 2
類をいう。この中でも、安全性や入手の容易さ、コストの問題から、 Nが好適に利用さ  Say kind. Among these, N is preferably used because of safety, availability, and cost.
2  2
れる。  It is.
[0054] 〜減圧下〜  [0054] ~ Under reduced pressure ~
減圧下とは 500hPa以下、好ましくは lOOhPa以下の状態を指す。  Under reduced pressure refers to a state of 500 hPa or less, preferably lOOhPa or less.
[0055] 〜酸素を遮断しうる保護層下〜 [0055] ~ Under a protective layer capable of blocking oxygen ~
酸素を遮断しうる保護層下とは、保護層が濃色組成物カゝらなる層の上に形成された 状態を指す。酸素を遮断しうる保護層とは、例えば、特開昭 46— 2121号ゃ特公昭 5 6— 40824号の各公報〖こ記載の、ポリビュルエーテル Z無水マレイン酸重合体、力 ルボキシアルキルセルロースの水溶性塩、水溶性セルロースエーテル類、カルボキ シアルキル澱粉の水溶性塩、ポリビュルアルコール、ポリビュルピロリドン、各種のポ リアクリルアミド類、各種の水溶性ポリアミド、ポリアクリル酸の水溶性塩、ゼラチン、ェ チレンオキサイド重合体、各種の澱粉およびその類似物力 なる群の水溶性塩、ス チレン zマレイン酸の共重合体、マレイネート榭脂、及びこれらの二種以上の組合せ 等が挙げられる。これらの中でも特に好ましいのは、ポリビュルアルコールとポリビ- ルピロリドンの組合せである。ポリビュルアルコールは鹼化率が 80%以上であるもの が好ましぐポリビニルピロリドンの含有量はアルカリ可溶な榭脂層固形分の 1〜75質 量%が好ましぐより好ましくは 1〜50質量%、更に好ましくは 10〜40質量%である。 The term “under the protective layer capable of blocking oxygen” refers to a state in which the protective layer is formed on the layer made of the dark color composition. Examples of the protective layer capable of blocking oxygen include, for example, polybute ether Z maleic anhydride polymer, ruboxyalkyl cellulose described in JP-A-46-2121 and JP-B-56-40824. Water-soluble salts, water-soluble cellulose ethers, water-soluble salts of carboxyalkyl starch, polybulal alcohol, polybulurpyrrolidone, various Reacrylamides, various water-soluble polyamides, water-soluble salts of polyacrylic acid, gelatin, ethylene oxide polymers, various starches and their similar water-soluble salts, styrene-maleic acid copolymers, Maleate rosin, and combinations of two or more of these. Of these, a combination of polybutyl alcohol and polyvinyl pyrrolidone is particularly preferred. Polyuryl alcohol having a hatching rate of 80% or more is preferred. The content of polyvinylpyrrolidone is preferably 1 to 75% by weight, more preferably 1 to 50% by weight, of the alkali-soluble rosin layer solids. It is 10 mass%, More preferably, it is 10-40 mass%.
[0056] また、酸素を遮断しうる保護層としては各種フィルムを用いることもでき、たとえば PE Tをはじめとするポリエステル類、ナイロンをはじめとするポリアミド類、エチレン 酢 酸ビュル共重合体 (EVA類)も好適に用いることができる。これらフィルムは必要に応 じて延伸されたものでもよぐ厚みは 5〜300 mが適当であり、好ましくは 20〜150 μ mである。また、濃色離画壁を感光性転写材料を用いて作製する場合、後述する 中間層又は仮支持体を酸素を遮断しうる保護層として好適に用いることが可能である [0056] As the protective layer capable of blocking oxygen, various films can be used. For example, polyesters such as PET, polyamides such as nylon, ethylene acetate butyl copolymer (EVAs) ) Can also be suitably used. These films may be stretched as necessary, and the thickness is suitably 5 to 300 m, preferably 20 to 150 μm. In the case of producing a dark color separation wall using a photosensitive transfer material, an intermediate layer or a temporary support described later can be suitably used as a protective layer capable of blocking oxygen.
[0057] このようにして作製された酸素を遮断しうる保護層の酸素透過係数は 2000cm3Z ( m2 · dayatm)以下が好まし!/、が、 lOOcmV (m2 · dayatm)以下であることがより好 ましく、もっとも好ましくは 50cm3Z (m2 · day · atm)以下である。 [0057] The oxygen permeability coefficient of the protective layer capable of blocking oxygen produced in this way is preferably 2000 cm 3 Z (m 2 · dayatm) or less! /, But is lOOcmV (m 2 · dayatm) or less. More preferably, it is most preferably 50 cm 3 Z (m 2 · day · atm) or less.
酸素透過率が 2000Cm3/ (m2'day'atm)より多い場合は効率的に酸素を遮断す ることができないため、濃色離画壁を後述の形状にすることが困難となることがある。 Since the oxygen permeability 2000 C m 3 / (m 2 'day' a tm) if more than can not you to block the efficient oxygen, is difficult to hyperchromic Hanarega wall shape below May be.
[0058] (2)現像工程 [0058] (2) Development process
本現像工程においては、前記(1)パターン露光工程において、パターン露光され た濃色組成物層に対し、所定の現像液を用いて現像処理する。  In the main development step, the dark composition layer that has been subjected to pattern exposure in the (1) pattern exposure step is developed using a predetermined developer.
現像処理に用いる現像液としては、アルカリ性物質の希薄水溶液が用いられるが、 更に水と混和性の有機溶剤とを少量添加したものでもよい。  As the developer used in the development process, a dilute aqueous solution of an alkaline substance is used, but a solution obtained by adding a small amount of water and a miscible organic solvent may be used.
前記現像の前には、純水をシャワーノズル等にて噴霧して、該濃色組成物層の表 面を均一に湿らせることが好ましい。前記現像処理に用いる現像液としては、アル力 リ性物質の希薄水溶液が用いられるが、更に水と混和性の有機溶剤を少量添加した ものでもよい。 [0059] 適当なアルカリ性物質としては、アルカリ金属水酸ィ匕物類 (例えば、水酸化ナトリウ ム、水酸ィ匕カリウム)、アルカリ金属炭酸塩類 (例えば、炭酸ナトリウム、炭酸カリウム) 、アルカリ金属重炭酸塩類 (例えば、炭酸水素ナトリウム、炭酸水素カリウム)、アル力 リ金属ケィ酸塩類 (例えば、ケィ酸ナトリウム、ケィ酸カリウム)、アルカリ金属メタケイ酸 塩類 (例えば、メタケイ酸ナトリウム、メタケイ酸カリウム)、トリエタノールァミン、ジエタ ノールァミン、モノエタノールァミン、モルホリン、テトラアルキルアンモン-ゥムヒドロキ シド類 (例えば、テトラメチルアンモ-ゥムヒドロキシド)、燐酸三ナトリウム、等が挙げら れる。アルカリ性物質の濃度は、 0. 01〜30質量%が好ましい。 Prior to the development, it is preferable to spray the pure water with a shower nozzle or the like to uniformly wet the surface of the dark color composition layer. As the developer used in the development process, a dilute aqueous solution of an alkaline substance is used, but it may be further added with a small amount of an organic solvent miscible with water. [0059] Suitable alkaline substances include alkali metal hydroxides (eg, sodium hydroxide, potassium hydroxide), alkali metal carbonates (eg, sodium carbonate, potassium carbonate), alkali metal heavy metals. Carbonates (for example, sodium hydrogen carbonate, potassium hydrogen carbonate), alkali metal silicates (for example, sodium silicate, potassium silicate), alkali metal metasilicates (for example, sodium metasilicate, potassium metasilicate), Examples include triethanolamine, dietanolamine, monoethanolamine, morpholine, tetraalkylammonum hydroxides (for example, tetramethylammonium hydroxide), trisodium phosphate, and the like. The concentration of the alkaline substance is preferably 0.01 to 30% by mass.
[0060] 前記「水と混和性の有機溶剤」としては、例えば、メタノール、エタノール、 2 プロ ノ ノ一ノレ、 1 プロパノーノレ、ブタノーノレ、ジアセトンァノレコーノレ、エチレングリコーノレ モノメチノレエーテノレ、エチレングリコーノレモノェチノレエーテノレ、エチレングリコーノレモ ノ n ブチルエーテル、ベンジルアルコール、アセトン、メチルェチルケトン、シクロへ キサノン、 ε —力プロラタトン、 γ ブチロラタトン、ジメチルホルムアミド、ジメチルァ セトアミド、へキサメチルホスホルアミド、乳酸ェチル、乳酸メチル、 ε 一力プロラタタム 、 Ν—メチルピロリドン等が好適に挙げられる。水と混和性の有機溶剤の濃度は 0. 1 〜30質量%が好ましい。更に、公知の界面活性剤を添加することもでき、該界面活 性剤の濃度としては 0. 01〜 10質量%が好ま U、。  [0060] Examples of the "water-miscible organic solvent" include, for example, methanol, ethanol, 2-prononole, 1-propanol, butanol, diacetoneanolone, ethyleneglycolone monomethinoatenore, Ethylene glycol-monoethylenoatenole, ethylene glycol-monolemonyl butyl ether, benzyl alcohol, acetone, methyl ethyl ketone, cyclohexanone, ε — force prolataton, γ-butyrolataton, dimethylformamide, dimethylacetamide, hexamethylphospho Preferable examples include luamide, ethyl acetate, methyl lactate, ε-strength prolatatam, and メ チ ル -methylpyrrolidone. The concentration of the organic solvent miscible with water is preferably 0.1 to 30% by mass. Furthermore, a known surfactant can be added, and the concentration of the surfactant is preferably 0.01 to 10% by mass.
[0061] 前記現像液は、浴液としても、あるいは噴霧液としても用いることができる。濃色組 成物層の未硬化部分を除去する場合、現像液中で回転ブラシや湿潤スポンジで擦 るなどの方法を組み合わせることができる。現像液の液温は、通常、室温付近(22°C )から 40°Cが好ましい。現像時間は、感光性榭脂層の組成、現像液のアルカリ性や 温度、有機溶剤を添加する場合にはその種類と濃度、等に依るが、通常 10〜120秒 程度である。現像時間が短すぎると非露光部の現像が不充分となると同時に紫外線 の吸光度も不充分となることがあり、長すぎると露光部もエッチングされることがある。 いずれの場合にも、濃色離画壁形状を好適なものとすることが困難となる。現像処理 の後に水洗工程を入れることも可能である。この現像工程にて、濃色離画壁の形状 は、前述のごとく形成される。  [0061] The developer may be used as a bath solution or a spray solution. When removing the uncured portion of the dark color composition layer, a method such as rubbing with a rotating brush or a wet sponge in the developer can be combined. The temperature of the developer is usually preferably around room temperature (22 ° C) to 40 ° C. The development time depends on the composition of the photosensitive resin layer, the alkalinity and temperature of the developer, and the type and concentration when an organic solvent is added, but is usually about 10 to 120 seconds. If the development time is too short, the development of the non-exposed area may be insufficient, and the UV absorbance may be insufficient. If the development time is too long, the exposed area may be etched. In either case, it is difficult to make the dark color separation wall shape suitable. It is also possible to add a washing step after the development process. In this development process, the shape of the dark color separation wall is formed as described above.
現像の方式としては、パドル現像、シャワー現像、シャワー &スピン現像、ディップ 現像等の方法を用いることができる。 Development methods include paddle development, shower development, shower & spin development, dip A method such as development can be used.
[0062] 現像液の pHは 8〜 13が好ましい。現像槽中にはローラーコンベアなどが設置され 、基板は水平に移動する。前記ローラーコンベアの傷を防止する意味で、感光性榭 脂は基板の上面に形成されるのが好ましい。基板サイズが 1メートルを超える場合は 、基板を水平に搬送すると、基板中央付近に現像液が滞留し、基板中央と周辺部分 での現像の差が問題となる。これを回避するため、基板は斜めに傾斜させるのが望ま しい。傾斜角度は、 5〜30° が好ましい。  [0062] The pH of the developer is preferably 8 to 13. A roller conveyor or the like is installed in the developing tank, and the substrate moves horizontally. In order to prevent scratches on the roller conveyor, the photosensitive resin is preferably formed on the upper surface of the substrate. When the substrate size exceeds 1 meter, when the substrate is transported horizontally, the developer stays near the center of the substrate, and the difference in development between the center of the substrate and the peripheral portion becomes a problem. In order to avoid this, it is desirable to incline the substrate diagonally. The inclination angle is preferably 5 to 30 °.
[0063] 現像後は、基板にエアを軽く吹きつけ、余分な液を略除去した上で、シャワー水洗 を実施することにより、より均一な現像結果が得られる。また、水洗の前に、超純水を 、超高圧洗浄ノズルにて 3〜: LOMPaの圧力で噴射して残渣除去を行うことにより、残 渣の無い高品質の像が得られる。基板に水滴が付着したまま後工程へ搬送すると、 工程を汚したり、基板にシミが残ったりするので、エアーナイフにて水切りを行い余分 な水や水滴を除去することが好まし 、。  [0063] After development, a more uniform development result can be obtained by lightly blowing air on the substrate to remove excess liquid substantially and then performing shower water washing. Also, before washing with water, ultrapure water is ejected with an ultra-high pressure washing nozzle at a pressure of 3 to: LOMPa to remove the residue, thereby obtaining a high-quality image without residue. If the substrate is transported to a subsequent process with water droplets on the substrate, the process will be soiled or stains may remain on the substrate. Therefore, it is preferable to drain the water with an air knife to remove excess water and water droplets.
[0064] 本発明においては、既述の通り、現像後の濃色離画壁の断面形状を垂直から逆テ 一パー状とするために、現像をできるだけ強くすることが好ましい。当該「強い現像」 たる現像条件としては、現像液として、アルカリ性物質の濃度が 0. 01〜30質量%の 希薄水溶液を用い、且つ、現像温度が 22〜40°Cであり、且つ、現像時間が 10〜12 0秒の条件であることが好ま 、。  [0064] In the present invention, as described above, it is preferable to make development as strong as possible in order to change the cross-sectional shape of the dark color separation wall after development from vertical to inverted taper. The development conditions for the “strong development” include a dilute aqueous solution having a concentration of alkaline substance of 0.01 to 30% by mass as the developer, a development temperature of 22 to 40 ° C., and a development time. It is preferred that the condition is 10 to 120 seconds.
アルカリ性物質の濃度は、より好ましくは、 0. 02〜25質量%であり、さらに好ましく は 0. 05〜20質量0 /0である。現像温度は、より好ましくは、 24〜38°Cであり、さらに 好ましくは 26〜35°Cである。現像時間は、より好ましくは、 15〜: L 10秒であり、さらに 好ましくは、 20〜: L 00秒である。 The concentration of the alkaline substance, more preferably, 0.5 a 02-25 wt%, more preferably from 0.05 to 20 weight 0/0. The development temperature is more preferably 24 to 38 ° C, and further preferably 26 to 35 ° C. The development time is more preferably 15 to L 10 seconds, and still more preferably 20 to L 00 seconds.
なお、これら、アルカリ性物質の種類とその濃度、現像温度、現像時間のうち、いず れカ 1つでも変えることにより、現像の強さが変動するため、所望の「強い現像」とする には上記範囲内でそれぞれの条件を適宜設定することが好ましい。  In order to achieve the desired `` strong development '', the development intensity varies by changing any one of these types of alkaline substances, their concentration, development temperature, and development time. It is preferable to appropriately set each condition within the above range.
[0065] (3)ポスト露光工程  [0065] (3) Post-exposure process
本発明に係る濃色離画壁は、現像後にポスト露光を実施することにより形成される 。ポスト露光により、画像の断面形状のコントロール、画像の硬度のコントロール、画 像の表面凹凸のコントロール、画像の膜減りのコントロールなどの調整が可能である The dark color separation image wall according to the present invention is formed by performing post exposure after development. Post exposure controls the cross-sectional shape of the image, controls the hardness of the image, It is possible to adjust the surface roughness of the image and control the film thickness reduction of the image.
[0066] ポスト露光に用いる光源としては、濃色組成物が感度を有する波長の少なくとも 1つ を含む光源であればよぐ特開 2005— 3861号公報の段落番号 0074に記載の超 高圧水銀ランプ、高圧水銀ランプ、メタルノ、ライドランプ等が挙げられる。 [0066] The light source used for the post-exposure may be any light source that includes at least one of wavelengths at which the dark color composition has sensitivity. The ultra-high pressure mercury lamp described in paragraph No. 0074 of JP-A-2005-3861 , High pressure mercury lamp, metalno, ride lamp and the like.
ポスト露光は、前記超高圧水銀灯やメタルハライド等の光源からの光を、露光マスク などを介さず直接基板に照射することによって行うことが、設備の簡素化と省電力の 観点で好ましい。  Post exposure is preferably performed by directly irradiating the substrate with light from a light source such as an ultra-high pressure mercury lamp or a metal halide without using an exposure mask or the like from the viewpoint of simplification of equipment and power saving.
[0067] ポスト露光は、必要に応じて、両面に実施する。露光量は、上面: 2500miZcm2以 上、下面: 2500mj/cm2以上の範囲で、上記コントロール目的に応じ、適宜調整す る。露光量は高ければ高いほど好ましいが、あまり高すぎると露光時間が長くなつたり 、基板温度が高くなりすぎ基板が変形したりすることがあるため、片面当りのポスト露 光は、 lOOOOmjZcm2程度を上限とすることが好ましい。また、片面当りのポスト露光 量が 2500mjZcm2未満では、濃色離画壁のエッジが変形し、インクがエッジ力も乗 り越えやすくなり、混色防止という本発明の目的を達成することができなくなる。 [0067] Post-exposure is performed on both sides as necessary. The exposure amount, the upper surface: 2500MiZcm 2 than on the lower surface: at 2,500 mJ / cm 2 or more ranges, depending on the control object, appropriately adjusted. The preferred higher exposure dose, or summer long exposure time too high, since the substrate the substrate temperature becomes too high it may be deformed or post exposure light per one surface, the LOOOOmjZcm 2 degree The upper limit is preferable. On the other hand, if the post exposure amount per side is less than 2500 mjZcm 2 , the edge of the dark color separation wall is deformed and the ink easily gets over the edge force, and the object of the present invention of preventing color mixing cannot be achieved.
2500〜10000mjZcm2の露光量で両面又は上面を露光することが好ましぐ 280 0〜5000miZcm2の露光量で両面又は上面を露光することがより好ましく、 2800〜 5000miZcm2の露光量で両面を露光することが最も好ましい。 More preferably be exposed on both sides or upper surface with an exposure amount of it is preferably fixture 280 0~5000miZcm 2 for exposing a double-sided or top with an exposure amount of 2500~10000mjZcm 2, exposed on both sides with an exposure amount of 2800~ 5000miZcm 2 Most preferably.
[0068] (感光性転写材料) [0068] (Photosensitive transfer material)
上記の濃色離画壁形状を容易且つ低コストで実現するものとして、仮支持体上に、 少なくとも、濃色組成物力 なる層を有する感光性転写材料を使用するという手法が ある。さらに、仮支持体と濃色組成物力もなる層との間に、酸素を遮断しうる中間層( 以下、単に「酸素遮断層」とも言う)が設けられてもよい。このような材料を用いた場合 、濃色組成物力もなる層は酸素遮断層に保護されるため、自動的に貧酸素雰囲気 下となる。そのため、露光工程を不活性ガス下や減圧下で行う必要がないため、現状 の工程をそのまま利用できる禾 IJ点がある。  As a method for realizing the above-mentioned dark color separation wall shape easily and at low cost, there is a method of using a photosensitive transfer material having at least a layer having a dark color composition strength on a temporary support. Further, an intermediate layer capable of blocking oxygen (hereinafter, also simply referred to as “oxygen blocking layer”) may be provided between the temporary support and the layer having the dark color composition force. When such a material is used, since the layer having the dark color composition power is protected by the oxygen blocking layer, it automatically becomes an oxygen-poor atmosphere. For this reason, there is no need to perform the exposure process under inert gas or under reduced pressure, so there is an IJ point where the current process can be used as it is.
また、仮支持体上に少なくとも濃色組成物力 なる層を有する感光性転写材料を用 い、該仮支持体を「酸素を遮断しうる保護層」として用いてもよい。この場合は、上記 酸素遮断層を設ける必要がなぐ工程数を削減することが可能である。 Further, a photosensitive transfer material having a layer having at least a dark color composition strength on a temporary support may be used, and the temporary support may be used as “a protective layer capable of blocking oxygen”. In this case, It is possible to reduce the number of processes that do not require the provision of an oxygen blocking layer.
[0069] 上記の感光性転写材料は、必要に応じて熱可塑性榭脂層を有して 、てもよ 、。力 カゝる熱可塑性榭脂層とは、アルカリ可溶性であって、少なくとも榭脂成分を含んで構 成され、該榭脂成分としては、実質的な軟ィ匕点が 80°C以下であることが好ましい。こ のような熱可塑性榭脂層が設けられることにより、後述する濃色離画壁形成方法にお いて、永久支持体との良好な密着性を発揮することができる。  [0069] The photosensitive transfer material described above may have a thermoplastic resin layer as necessary. The strong thermoplastic resin layer is alkali-soluble and contains at least a resin component, and the resin component has a substantial soft point of 80 ° C or less. It is preferable. By providing such a thermoplastic resin layer, good adhesion to a permanent support can be exhibited in the method for forming a dark color separation image wall described later.
[0070] 軟ィ匕点が 80°C以下の熱可塑性榭脂としては、エチレンとアクリル酸エステル共重 合体のケン化物、スチレンと(メタ)アクリル酸エステル共重合体のケン化物、ビニルト ルェンと (メタ)アクリル酸エステル共重合体のケンィ匕物、ポリ (メタ)アクリル酸エステ ル、(メタ)アクリル酸ブチルと酢酸ビュル等の (メタ)アクリル酸エステル共重合体など のケンィ匕物、等が挙げられる。  [0070] Thermoplastic resins having a soft melting point of 80 ° C or lower include saponified products of ethylene and acrylate copolymer, saponified products of styrene and (meth) acrylate copolymer, and vinyl toluene. (Meth) acrylic acid ester copolymer canes, poly (meth) acrylic acid esters, (meth) acrylic acid ester copolymers such as butyl (meth) acrylate and butyl acetate, etc. Is mentioned.
[0071] 熱可塑性榭脂層には、上記の熱可塑性榭脂の少なくとも一種を適宜選択して用い ることができ、更に「プラスチック性能便覧」(日本プラスチック工業連盟、全日本ブラ スチック成形工業連合会編著、工業調査会発行、 1968年 10月 25日発行)に記載さ れている、軟ィ匕点が約 80°C以下の有機高分子のうちアルカリ水溶液に可溶なものを 使用することができる。  [0071] In the thermoplastic resin layer, at least one of the above-mentioned thermoplastic resins can be appropriately selected and used. Further, "Plastic Performance Handbook" (Japan Plastic Industry Federation, All Japan Plastic Molding Industry Association) Edited by the Industrial Research Council, published on October 25, 1968), it is possible to use organic polymers that have a soft spot of about 80 ° C or less and are soluble in an alkaline aqueous solution. it can.
[0072] また、軟ィ匕点が 80°C以上の有機高分子物質についても、その有機高分子物質中 に該高分子物質と相溶性のある各種可塑剤を添加することで、実質的な軟化点を 8 0°C以下に下げて用いることもできる。また、これらの有機高分子物質には、仮支持 体との接着力を調節する目的で、実質的な軟ィ匕点が 80°Cを越えない範囲で、各種 ポリマーや過冷却物質、密着改良剤あるいは界面活性剤、離型剤、等を加えることも できる。  [0072] In addition, for an organic polymer substance having a soft spot of 80 ° C or higher, various plasticizers compatible with the polymer substance can be substantially added to the organic polymer substance. The softening point can be lowered to 80 ° C or lower. In addition, these organic polymer substances have various polymers, supercooled substances, and adhesion improvements as long as the actual soft spot does not exceed 80 ° C in order to adjust the adhesive strength with the temporary support. Agents, surfactants, release agents, etc. can also be added.
[0073] 好ましい可塑剤の具体例としては、ポリプロピレングリコール、ポリエチレングリコー ル、ジォクチルフタレート、ジヘプチルフタレート、ジブチルフタレート、トリクレジルフ ォスフェート、クレジルジフエ-ルフォスフェート、ビフエニルジフエニルフォスフェート を挙げることができる。  [0073] Specific examples of preferable plasticizers include polypropylene glycol, polyethylene glycol, dioctyl phthalate, diheptyl phthalate, dibutyl phthalate, tricresyl phosphate, cresyl diphenyl phosphate, biphenyl diphenyl phosphate. it can.
[0074] 上記の感光性転写材料における仮支持体としては、化学的及び熱的に安定であつ て、可撓性の物質で構成されるもの力も適宜選択することができる。具体的には、テ フロン (登録商標)、ポリエチレンテレフタレート、ポリカーボネート、ポリエチレン、ポリ プロピレン、ポリエステル等の薄いシート若しくはこれらの積層体が好ましい。前記仮 支持体の厚みとしては、 5〜300 μ mが適当であり、好ましくは 20〜150 μ mである。 この厚みが 5 m未満では、仮支持体を剥離する際に破れやすくなる傾向があり、ま た、仮支持体を介して露光する場合は、 300 mを超えると解像度が低下する傾向 がある。 [0074] As the temporary support in the photosensitive transfer material described above, a force that is chemically and thermally stable and is composed of a flexible substance can be appropriately selected. Specifically, A thin sheet of Freon (registered trademark), polyethylene terephthalate, polycarbonate, polyethylene, polypropylene, polyester, or a laminate thereof is preferable. The thickness of the temporary support is suitably 5 to 300 μm, preferably 20 to 150 μm. If the thickness is less than 5 m, the temporary support tends to be broken when it is peeled off. Also, when exposure is performed through the temporary support, the resolution tends to decrease if the exposure exceeds 300 m.
上記具体例の中でも 2軸延伸ポリエチレンテレフタレートフィルムが特に好ましい。  Among the above specific examples, a biaxially stretched polyethylene terephthalate film is particularly preferable.
[0075] (中間層 (酸素遮断層)) [0075] (Intermediate layer (oxygen barrier layer))
酸素遮断層としては、特開平 5 - 72724号公報に「分離層」として記載されて ヽる、 酸素遮断機能のある酸素遮断膜を用いることが好ましぐこの場合、露光時感度がァ ップし、露光機の時間負荷が減り、生産性が向上する。  As the oxygen blocking layer, it is preferable to use an oxygen blocking film having an oxygen blocking function, which is described as “separation layer” in JP-A-5-72724. In this case, the sensitivity during exposure is increased. In addition, the time load on the exposure machine is reduced and the productivity is improved.
該酸素遮断層としては、低い酸素透過性を示し、水又はアルカリ水溶液に分散又 は溶解するものが好ましぐ公知のものの中力も適宜選択することができる。これらの 内、特に好ましいのは、ポリビュルアルコールとポリビュルピロリドンとの組み合わせ である。  As the oxygen barrier layer, a known medium force that exhibits low oxygen permeability and is preferably dispersed or dissolved in water or an aqueous alkali solution can be appropriately selected. Of these, a combination of polybulal alcohol and polybulurpyrrolidone is particularly preferred.
[0076] (保護フィルム) [0076] (Protective film)
榭脂層の上には、貯蔵の際の汚染や損傷から保護するために、薄い保護フィルム を設けることが好ましい。保護フィルムは、仮支持体と同じか又は類似の材料力もな つてもよいが、榭脂層から容易に分離されねばならない。保護フィルム材料としては、 例えばシリコーン紙、ポリオレフイン又はポリテトラフルォロエチレンのシートが適当で ある。  A thin protective film is preferably provided on the resin layer to protect it from contamination and damage during storage. The protective film may have the same or similar material strength as the temporary support, but it must be easily separated from the resin layer. As the protective film material, for example, a sheet of silicone paper, polyolefin or polytetrafluoroethylene is suitable.
[0077] (基板) [0077] (Substrate)
カラーフィルタを構成する基板 (永久支持体)としては、金属性支持体、金属張り合 わせ支持体、ガラス、セラミック、合成樹脂フィルム等を使用することができる。特に好 ましくは、透明性で寸度安定性の良好なガラスや合成樹脂フィルムが挙げられる。  As the substrate (permanent support) constituting the color filter, a metallic support, a metal-bonded support, glass, ceramic, a synthetic resin film, or the like can be used. Particularly preferred is a glass or a synthetic resin film having transparency and good dimensional stability.
[0078] (濃色離画壁の形成) [0078] (Formation of dark separation wall)
以下、感光性転写材料を用いて、濃色離画壁を形成する一例を説明する。仮支持 体上に、中間層(酸素遮断層)、濃色組成物層、更に該濃色組成物層上にカバーシ ートが設けられた感光性転写材料を用意する。まず、カバーシートを剥離除去した後 、露出した濃色組成物層の表面を永久支持体 (基板)上に貼り合わせ、ラミネータ等 を通して加熱、加圧して積層する(積層体)。ラミネータには、従来公知のラミネータ、 真空ラミネータ等の中から適宜選択したものが使用でき、より生産性を高めるには、 オートカツトラミネータも使用可能である。 Hereinafter, an example of forming a dark color separation image wall using a photosensitive transfer material will be described. On the temporary support, an intermediate layer (oxygen barrier layer), a dark color composition layer, and a cover sheet on the dark color composition layer. A photosensitive transfer material provided with a sheet is prepared. First, after peeling off and removing the cover sheet, the surface of the exposed dark color composition layer is bonded onto a permanent support (substrate) and laminated by heating and pressing through a laminator or the like (laminate). As the laminator, those appropriately selected from conventionally known laminators, vacuum laminators and the like can be used, and an auto cut laminator can also be used in order to increase productivity.
[0079] 次いで、仮支持体と酸素遮断層との間で剥離し、仮支持体を除去する。続いて、仮 支持体除去後の除去面の上方に所望のフォトマスク (例えば、石英露光マスク)を垂 直に立てた状態で、露光マスク面と該酸素遮断層の間の距離を適宜 (例えば、 200 μ m)に設定し、露光する。次いで、照射後、所定の処理液を用いて現像処理を行い 、 ノターユング画像を得る。引き続き、必要に応じて、水洗処理を行い、濃色離画壁 を得る。  [0079] Next, peeling is performed between the temporary support and the oxygen barrier layer, and the temporary support is removed. Subsequently, in a state where a desired photomask (for example, a quartz exposure mask) is vertically set above the removal surface after the temporary support is removed, the distance between the exposure mask surface and the oxygen blocking layer is appropriately set (for example, , 200 μm) for exposure. Next, after irradiation, development processing is performed using a predetermined processing solution to obtain a not-tung image. Then, if necessary, wash with water to obtain a dark color separation wall.
[0080] 仮支持体を酸素を遮断しうる中間層として用いる場合は、仮支持体を残したまま (剥 離せずに)、該仮支持体の上方に所望のフォトマスク(例えば、石英露光マスク)を垂 直に立てた状態で、露光マスク面と該仮支持体との間の距離を適宜 (例えば、 200 μ m)に設定し、露光する。次いで、仮支持体を除去し、所定の処理液を用いて現像処 理を行い、パターユング画像を得る。引き続き、必要に応じて、水洗処理を行い、濃 色離画壁を得る。  [0080] When the temporary support is used as an intermediate layer capable of blocking oxygen, a desired photomask (for example, a quartz exposure mask) is provided above the temporary support while leaving the temporary support (without peeling). ) In an upright position, the distance between the exposure mask surface and the temporary support is appropriately set (for example, 200 μm) and exposed. Next, the temporary support is removed, and development processing is performed using a predetermined processing solution to obtain a patterning image. Then, if necessary, wash with water to obtain a dark color separation wall.
[0081] 該露光は、例えば、超高圧水銀灯を有すプロキシミティー型露光機 (例えば、日立 ノ、ィテク電子エンジニアリング株式会社製)等で行うことができ、露光量は適宜 (例え ば、 300mjZcm2)選択することができる。 [0081] The exposure can be performed, for example, with a proximity type exposure machine (for example, manufactured by Hitachi, Ltd., Techtech Engineering Co., Ltd.) having an ultra-high pressure mercury lamp, and the exposure amount is appropriately set (for example, 300 mjZcm 2 ) Can be selected.
[0082] (現像処理)  [0082] (Development processing)
光照射後、所定の処理液を用いて現像処理する。当該現像処理の内容は、既述 の内容と同様である。  After the light irradiation, development processing is performed using a predetermined processing solution. The details of the development process are the same as described above.
[0083] (ポスト露光) [0083] (Post exposure)
現像後にポスト露光を実施する。当該ポスト露光の内容は、既述の内容と同様であ る。  Post exposure is performed after development. The contents of the post-exposure are the same as described above.
[0084] (熱処理)  [0084] (Heat treatment)
更に、ポスト露光後に熱処理を行ってもよい。 熱処理を行うことにより、本発明の濃色組成物層に含まれるモノマーや架橋剤を反 応させて、画像の硬度を確保することができる。熱処理の温度は、 150〜250°Cの範 囲が好ましい。 150°Cを超える場合は硬度が不十分となり、 250°C未満では榭脂が 着色し、色純度が悪くなる。熱処理の時間は、 10〜150分が好ましい。 10分未満で は、硬度が不足し、 150分を超える場合は、濃色離画壁の形状が悪くなる。また、後 述の方法により着色画素全部の色を形成後、更に最終的な熱処理を行って硬度を 安定ィ匕させても良い。その場合、高めの温度 (例えば 240°C)で実施することが、硬 度の点で好ましい。 Furthermore, heat treatment may be performed after post exposure. By performing the heat treatment, the monomer and the cross-linking agent contained in the dark color composition layer of the present invention can be reacted to ensure the hardness of the image. The heat treatment temperature is preferably in the range of 150 to 250 ° C. If it exceeds 150 ° C, the hardness will be insufficient, and if it is less than 250 ° C, the resin will be colored and the color purity will deteriorate. The heat treatment time is preferably 10 to 150 minutes. If it is less than 10 minutes, the hardness is insufficient, and if it exceeds 150 minutes, the shape of the dark color separation wall becomes worse. Further, after forming the colors of all the colored pixels by the method described later, a final heat treatment may be performed to stabilize the hardness. In that case, it is preferable in terms of hardness to carry out at a higher temperature (for example, 240 ° C).
[0085] (撥水処理) [0085] (Water repellent treatment)
本発明では、濃色離画壁に撥水処理を施す事で、該濃色離画壁の少なくとも一部 が撥水性を帯びた状態とすることが好ましい。これは、その後にインクジェットなどの 方法で、着色液体組成物の液滴を該濃色離画壁間に付与した時に、インクが該濃 色離画壁を乗り越えて、隣の色と混色するなどの不都合を無くす為である。  In the present invention, it is preferable that a water-repellent treatment is performed on the dark color separation wall so that at least a part of the dark color separation wall is water-repellent. This is because, when a droplet of a colored liquid composition is subsequently applied between the dark color separation walls by a method such as inkjet, the ink crosses the dark color separation wall and mixes with the adjacent color. This is to eliminate the inconvenience.
該撥水処理としては、濃色離画壁上面に撥水材料を塗布する方法や、撥水層を新 たに設ける方法、プラズマ処理により撥水性を付与する方法、撥水性物質を濃色離 画壁に練りこむ方法などが挙げられる。  Examples of the water repellent treatment include a method of applying a water repellent material on the upper surface of the dark color separation wall, a method of newly providing a water repellent layer, a method of imparting water repellency by plasma treatment, For example, a method of kneading into a painting wall.
[0086] 以下に、撥水処理の詳細な説明を述べる。 [0086] A detailed description of the water repellent treatment will be described below.
(1) <撥水性物質を濃色離画壁に練りこむ方法 >  (1) <Method of kneading a water-repellent substance into a dark color separation wall>
「混色」を防ぐ手段として、特開 2005— 36160号公報に記載の含フッ素榭脂 (A) を含有する本発明の濃色組成物より得られるフォトレジストを用いて濃色離画壁を作 製する方法がある。  As a means for preventing “color mixing”, a dark color separation wall is formed using a photoresist obtained from the dark color composition of the present invention containing the fluorine-containing resin (A) described in JP-A-2005-36160. There is a way to make it.
含フッ素榭脂 (A)は、エチレン性二重結合と Rf基 (a)とを有する単量体に基づく単 量体単位と、エチレン性二重結合と酸性基 (b)とを有する単量体に基づく単量体単 位とを含む共重合体であって、酸価が l〜300mgKOHZgであるのが好ましい。該 Rf基 (a)と酸性基 (b)につ 、ては、特開 2005 - 36160号公報に記載のものと同様 な定義である。  The fluorine-containing resin (A) is a monomer unit based on a monomer having an ethylenic double bond and an Rf group (a), and a monomer unit having an ethylenic double bond and an acidic group (b). It is preferable that the acid value is 1 to 300 mgKOHZg. The Rf group (a) and acidic group (b) have the same definitions as those described in JP-A-2005-36160.
エチレン性二重結合としては、(メタ)アタリロイル基、ビニル基、ァリル基が挙げられ る。 エチレン性二重結合と Rf基(a)とを有する単量体としては、 CH =CR1COOQ2Rf Examples of the ethylenic double bond include a (meth) ataryloyl group, a vinyl group, and a allyl group. Monomers having an ethylenic double bond and an Rf group (a) include CH = CR 1 COOQ 2 Rf
2  2
、 CH =CR1OCOQ1Rf, CH =CR1OQ1Rf, CH =CR1CH OG^Rfゝ CH =0^0, CH = CR 1 OCOQ 1 Rf, CH = CR 1 OQ 1 Rf, CH = CR 1 CH OG ^ Rf ゝ CH = 0 ^ 0
2 2 2 2 22 2 2 2 2
OOQ'NR'SO Rf、 CH = CR'COOQ'NR'CORf , CH = CR'COOQ'NR'COO OOQ'NR'SO Rf, CH = CR'COOQ'NR'CORf, CH = CR'COOQ'NR'COO
2 2 2  2 2 2
Q2Rf、 CHニじ!^じ。。。2。。1!^等が挙げられる。ただし、 R1は水素原子又はメチ Q 2 Rf, CH Niji! ^ Ji. . . 2 . . 1 ! ^ Etc. Where R 1 is a hydrogen atom or
2  2
ル基を、 Q1は単結合又は炭素数 1〜6の 2価の有機基を、 Q2は炭素数 1〜6の 2価の 有機基を、それぞれ示す。 Q Q2は、環状構造を有していてもよい。 Q 1 represents a single bond or a divalent organic group having 1 to 6 carbon atoms, and Q 2 represents a divalent organic group having 1 to 6 carbon atoms. QQ 2 may have a cyclic structure.
[0087] Q Q2の具体例としては、 CH—、 一 CH CH—、 一 CH(CH )—、 一 CH CH [0087] Specific examples of QQ 2 include CH—, 1 CH CH—, 1 CH (CH 2) —, 1 CH CH
2 2 2 3 2 2 2 2 2 3 2 2
CH―、 一 C(CH ) ―、 一 CH(CH CH )―、 一 CH CH CH CH―、 一 CH(CHCH-, One C (CH)-, One CH (CH CH)-, One CH CH CH CH-, One CH (CH
2 3 2 2 3 2 2 2 2 22 3 2 2 3 2 2 2 2 2
CH CH )一、 CH (CH ) CH一、 CH(CH CH(CH ) )一、 CH CH(OH)CH CH) 1, CH (CH) CH 1, CH (CH CH (CH)) 1, CH CH (OH)
2 3 2 2 3 2 2 3 2 22 3 2 2 3 2 2 3 2 2
CH -, -CH CH NHCOOCH―、— CH CH(OH)CH OCH—等が挙げられCH-, -CH CH NHCOOCH-,-CH CH (OH) CH OCH-, etc.
2 2 2 2 2 2 2 2 2 2 2 2 2 2
る。 Q1は単結合であってもよい。なかでも、合成の容易さの観点から、 -CH―、― C The Q 1 may be a single bond. Above all, from the viewpoint of ease of synthesis, -CH-,-C
2 2
H CH—、 一 CH CH(OH)CH一が好ましい。 H 2 CH—, 1 CH 2 CH (OH) CH 1 is preferred.
2 2 2 2  2 2 2 2
[0088] エチレン性二重結合と Rf基 (a)とを有する単量体としては、具体的には以下のもの が挙げられる。  [0088] Specific examples of the monomer having an ethylenic double bond and an Rf group (a) include the following.
CH =CHCOOCH CF O (CF CF O) CF (nは 3〜9)、 CH =CHCOOCH CH = CHCOOCH CF O (CF CF O) CF (n is 3 to 9), CH = CHCOOCH
2 2 2 2 2 η- 1 3 2 22 2 2 2 2 η- 1 3 2 2
CF (CF ) O (CF CF (CF ) O) CF (nは 2〜6)、 CH =CHCOOCH CF (CF )CF (CF) O (CF CF (CF) O) CF (n is 2 to 6), CH = CHCOOCH CF (CF)
3 2 3 n-1 6 13 2 2 33 2 3 n-1 6 13 2 2 3
0(CF CF(CF)O) CF (nは 2〜6)。 0 (CF CF (CF) O) CF (n is 2 to 6).
2 3 n-1 3 7  2 3 n-1 3 7
CH =C (CH ) COOCH CH NHCOOCH CF O (CF CF O) CF (nは 3〜9 CH = C (CH) COOCH CH NHCOOCH CF O (CF CF O) CF (n is 3 to 9
2 3 2 2 2 2 2 2 n-1 32 3 2 2 2 2 2 2 n-1 3
)、 CH = C (CH ) COOCH CH NHCOOCH CF (CF ) O (CF CF (CF ) O) C), CH = C (CH) COOCH CH NHCOOCH CF (CF) O (CF CF (CF) O) C
2 3 2 2 2 3 2 3 n-1 32 3 2 2 2 3 2 3 n-1 3
F (nは 2〜6)、 CH =C (CH ) COOCH CH NHCOOCH CF (CF ) O (CF CF (F (n is 2 to 6), CH = C (CH) COOCH CH NHCOOCH CF (CF) O (CF CF (
7 2 3 2 2 2 3 27 2 3 2 2 2 3 2
CF)0) CF (nは 2〜6)。 CF) 0) CF (n is 2-6).
3 n-1 6 13  3 n-1 6 13
CH = C (CH ) COOCH CH (OH) CH OCH CF O (CF CF O) CF (nは 3 CH = C (CH) COOCH CH (OH) CH OCH CF O (CF CF O) CF (n is 3
2 3 2 2 2 2 2 2 n-1 32 3 2 2 2 2 2 2 n-1 3
〜9)、 CH = C (CH ) COOCH CH (OH) CH OCH CF (CF ) O (CF CF (CF ) O ~ 9), CH = C (CH) COOCH CH (OH) CH OCH CF (CF) O (CF CF (CF) O
2 3 2 2 2 3 2 3 2 3 2 2 2 3 2 3
) CF (nは 2〜6)、 CH =C(CH )COOCH CH(OH)CH OCH CF(CF )0( n-1 6 13 2 3 2 2 2 3) CF (n is 2-6), CH = C (CH) COOCH CH (OH) CH OCH CF (CF) 0 (n-1 6 13 2 3 2 2 2 3
CF CF(CF)O) CF (nは 2〜6)。 CF CF (CF) O) CF (n is 2 to 6).
2 3 n-1 3 7  2 3 n-1 3 7
[0089] 含フッ素榭脂 (A)におけるエチレン性二重結合と Rf基 (a)とを有する単量体に基づ く単量体単位の含有量は、 1〜95%等が好ましぐ 5〜80%がより好ましぐ 20〜60 %がさらに好ましい。単量体単位の含有量が当該範囲であると含フッ素榭脂 (A)は 良好な撥インク性を奏し、本発明の感光性組成物の現像性が良好となる。 [0089] The content of the monomer unit based on the monomer having an ethylenic double bond and the Rf group (a) in the fluorinated resin (A) is preferably 1 to 95%. 5 to 80% is more preferable. 20 to 60% is more preferable. When the content of the monomer unit is within this range, the fluorine-containing resin (A) Good ink repellency is exhibited, and the developability of the photosensitive composition of the present invention is improved.
[0090] 酸性基 (b)を有する単量体としては、例えば、カルボキシル基を有する単量体、フ ノール性水酸基を有する単量体、スルホン酸基、水酸基を有する単量体が挙げら れる。  [0090] Examples of the monomer having an acidic group (b) include a monomer having a carboxyl group, a monomer having a phenolic hydroxyl group, a sulfonic acid group, and a monomer having a hydroxyl group. .
カルボキシル基を有する単量体としては、アクリル酸、メタクリル酸、ビュル酢酸、クロ トン酸、ィタコン酸、マレイン酸、フマル酸、ケィ皮酸、もしくはそれらの塩が挙げられ る。これらは単独で用いてもよいし、 2種以上を併用してもよい。  Examples of the monomer having a carboxyl group include acrylic acid, methacrylic acid, bulacetic acid, crotonic acid, itaconic acid, maleic acid, fumaric acid, cinnamic acid, and salts thereof. These may be used alone or in combination of two or more.
[0091] フエノール性水酸基を有する単量体としては、 o—ヒドロキシスチレン、 m—ヒドロキ シスチレン、 p—ヒドロキシスチレン等が挙げられる。またこれらのベンゼン環の 1個以 上の水素原子が、メチル基、ェチル基、 n—ブチル基等のアルキル基、メトキシ基、ェ トキシ基、 n—ブトキシ基等のアルコキシ基、ハロゲン原子、アルキル基の 1個以上の 水素原子がハロゲン原子に置換されたハロアルキル基、ニトロ基、シァノ基、アミド基 に置換されたィ匕合物等が挙げられる。これらは単独で用いてもよいし、 2種以上を併 用してちょい。 [0091] Examples of the monomer having a phenolic hydroxyl group include o-hydroxystyrene, m-hydroxystyrene, and p-hydroxystyrene. In addition, one or more hydrogen atoms of these benzene rings are alkyl groups such as methyl group, ethyl group and n-butyl group, alkoxy groups such as methoxy group, ethoxy group and n-butoxy group, halogen atoms and alkyl groups. Examples thereof include haloalkyl groups in which one or more hydrogen atoms of the group are substituted with halogen atoms, nitro groups, cyano groups, and compounds in which amide groups are substituted. These may be used alone or in combination of two or more.
[0092] スルホン酸基を有する単量体としては、ビニルスルホン酸、スチレンスルホン酸、(メ タ)ァリルスルホン酸、 2—ヒドロキシ— 3— (メタ)ァリルォキシプロパンスルホン酸、(メ タ)アクリル酸— 2—スルホェチル、 (メタ)アクリル酸— 2—スルホプロピル、 2—ヒドロ キシ— 3— (メタ)アタリロキシプロパンスルホン酸、 2— (メタ)アクリルアミド— 2—メチ ルプロパンスルホン酸、もしくはそれらの塩等が挙げられる。これらは単独で用いても よいし、 2種以上を併用してもよい。  [0092] Examples of the monomer having a sulfonic acid group include vinyl sulfonic acid, styrene sulfonic acid, (meth) allyl sulfonic acid, 2-hydroxy-3- (meth) allyloxypropane sulfonic acid, and (meth). Acrylic acid—2-Sulfoethyl, (Meth) acrylic acid—2-Sulfopropyl, 2-Hydroxy—3-— (Meth) Atalyloxypropane sulfonic acid, 2 -— (Meth) acrylamide—2-methylpropane sulfonic acid, or Those salts are mentioned. These may be used alone or in combination of two or more.
[0093] 水酸基を有する単量体としては、ビュルフエノール、 2—ヒドロキシェチル (メタ)ァク リレート、 2—ヒドロキシプロピル (メタ)アタリレート、 3—ヒドロキシプロピル (メタ)アタリ レート、 4—ヒドロキシブチル (メタ)アタリレート、 5—ヒドロキシペンチル (メタ)アタリレ ート、 6—ヒドロキシへキシル (メタ)アタリレート、 4—ヒドロキシシクロへキシル (メタ)ァ タリレート、ネオペンチルグリコールモノ(メタ)アタリレート、 3—クロロー 2—ヒドロキシ プロピル(メタ)アタリレート、グリセリンモノ(メタ)アタリレート、 2—ヒドロキシェチルビ- ノレエーテノレ、 4ーヒドロキシブチルビニルエーテル、シクロへキサンジオールモノビニ ルエーテル、 2—ヒドロキシェチルァリルエーテル、 N—ヒドロキシメチル (メタ)アクリル アミド、 N, N—ビス(ヒドロキシメチル)等が挙げられる。 [0093] Monomers having a hydroxyl group include bulufenol, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 3-hydroxypropyl (meth) acrylate, 4-hydroxy Butyl (meth) acrylate, 5-hydroxypentyl (meth) acrylate, 6-hydroxy hexyl (meth) acrylate, 4-hydroxy cyclohexyl (meth) acrylate, neopentyl glycol mono (meth) acrylate , 3-chloro-2-hydroxypropyl (meth) acrylate, glycerin mono (meth) acrylate, 2-hydroxyethyl vinylateolene, 4-hydroxybutyl vinyl ether, cyclohexanediol monovinyl ether, 2-hydroxyethyl Aryl ether, N-hydroxymethyl (Meth) acrylic Amides, N, N-bis (hydroxymethyl) and the like can be mentioned.
[0094] さらに、水酸基を有する単量体は、末端が水酸基であるポリオキシアルキレン鎖を 有する単量体であってもよい。例えば、 CH =CHOCH C H CH O (C H O) H ( [0094] Furthermore, the monomer having a hydroxyl group may be a monomer having a polyoxyalkylene chain whose terminal is a hydroxyl group. For example, CH = CHOCH C H CH O (C H O) H (
2 2 6 10 2 2 4 g ここで、 gは 1〜: LOOの整数、以下同じ。)、 CH =CHOC H 0 (C H O) H、 CH =  2 2 6 10 2 2 4 g where g is 1 to: an integer of LOO, and so on. ), CH = CHOC H 0 (C H O) H, CH =
2 4 8 2 4 g 2 2 4 8 2 4 g 2
CHCOOC H 0 (C H O) H, CH =C (CH ) COOC H 0 (C H O) H, CH =C CHCOOC H 0 (C H O) H, CH = C (CH) COOC H 0 (C H O) H, CH = C
2 4 2 4 g 2 3 2 4 2 4 g 2 2 4 2 4 g 2 3 2 4 2 4 g 2
HCOOC H 0 (C H O) (C H O) H (ここで、 hは 0又は 1〜: LOOの整数であり、 kは HCOOC H 0 (C H O) (C H O) H (where h is 0 or 1 to: an integer of LOO, k is
2 4 2 4 h 3 6 k  2 4 2 4 h 3 6 k
1〜: LOOの整数であり、 h+kは 1〜: L00である。以下同じ。)、 CH =C (CH ) COOC  1 ~: LOO integer, h + k is 1 ~: L00. same as below. ), CH = C (CH) COOC
2 3  twenty three
H O (C H O) (C H O) H等が挙げられる。これらは単独で用いてもよいし、 2種以 H O (C H O) (C H O) H and the like can be mentioned. These may be used alone or in combination of two or more.
2 4 2 4 h 3 6 k 2 4 2 4 h 3 6 k
上を併用してもよい。  The above may be used together.
[0095] 含フッ素榭脂 (A)における酸性基 (b)を有する単量体に基づく単量体単位の含有 量は、 0. 1〜40%等が好ましぐ 0. 5〜30%がより好ましぐ 1〜20%がさらに好まし V、。当該範囲であると含フッ素榭脂 (A)は良好な撥インク性を奏し、感光性組成物の 現像性が良好となる。  [0095] The content of the monomer unit based on the monomer having an acidic group (b) in the fluorinated resin (A) is preferably 0.1 to 40%, and more preferably 0.5 to 30%. 1-20% more preferred V, more preferred. Within such a range, the fluorine-containing resin (A) exhibits good ink repellency and the developability of the photosensitive composition is good.
[0096] 含フッ素榭脂 (A)がエチレン性二重結合と Rf基 (a)とを有する単量体に基づく単量 体単位と、エチレン性二重結合と酸性基 (b)とを有する単量体に基づく単量体単位と 、を有する共重合体である場合、さらに、 Rf基 (a)及び酸性基 (b)を有さない単量体( 以下、「その他の単量体」という。)に基づく単量体単位を有していてもよい。  [0096] The fluorine-containing resin (A) has a monomer unit based on a monomer having an ethylenic double bond and an Rf group (a), an ethylenic double bond, and an acidic group (b). And a monomer having no Rf group (a) and no acidic group (b) (hereinafter referred to as “other monomers”). May have a monomer unit based on.
その他の単量体としては、炭化水素系ォレフイン類、ビュルエーテル類、イソプロべ -ルエーテル類、ァリルエーテル類、ビュルエステル類、ァリルエステル類、(メタ)ァ クリル酸エステル類、(メタ)アクリルアミド類、芳香族ビュル化合物、クロロォレフイン 類、フルォロォレフイン類、共役ジェン類等が挙げられる。これらの化合物には、例え ば水酸基、カルボニル基、アルコキシ基、アミド基等の官能基が含まれていてもよい。 また、ポリシロキサン構造を有する基を有していてもよい。ただし、これらのその他の 単量体に基づく単量体単位は、 Rf基 (a)及び酸性基 (b)を有さな ヽ。これらは単独 で用いてもよいし、 2種以上を併用してもよい。特に (メタ)アクリル酸エステル類、(メタ )アクリルアミド類が、本発明の感光性榭脂組成物から形成される塗膜の耐熱性を優 れたものとするため好ま 、。  Other monomers include hydrocarbon-based olefins, butyl ethers, isopropyl ethers, allylic ethers, butyl esters, allylic esters, (meth) acrylic acid esters, (meth) acrylamides, aromatic Group bur compounds, chlororefhins, fluorefhins, conjugates and the like. These compounds may contain functional groups such as a hydroxyl group, a carbonyl group, an alkoxy group, and an amide group. Moreover, you may have group which has a polysiloxane structure. However, monomer units based on these other monomers should not have Rf group (a) and acidic group (b). These may be used alone or in combination of two or more. In particular, (meth) acrylic acid esters and (meth) acrylamides are preferred because the heat resistance of the coating film formed from the photosensitive resin composition of the present invention is excellent.
[0097] 含フッ素榭脂 (A)にお 、て、その他の単量体に基づく単量体単位の割合は 80% 以下が好ましぐ 70%以下がより好ましい。当該範囲であると本発明の感光性組成物 の現像'性が良好となる。 [0097] In the fluorinated resin (A), the proportion of monomer units based on other monomers is 80%. 70% or less is more preferable. Within such a range, the developing property of the photosensitive composition of the present invention will be good.
本発明における含フッ素榭脂 (A)は、上記のエチレン性二重結合と Rf基 (a)とを有 する単量体に基づく単量体単位と、エチレン性二重結合と酸性基 (b)とを有する単 量体に基づく単量体単位と、を含む共重合体を合成することによって得られるほか、 反応部位を有する重合体に Rf基 (a)を有する化合物及び Z又は酸性基 (b)を有す る化合物を反応させる各種変性方法によっても得られる。  The fluorine-containing resin (A) in the present invention comprises a monomer unit based on the monomer having the ethylenic double bond and the Rf group (a), an ethylenic double bond and an acidic group (b And a monomer having an Rf group (a) in a polymer having a reactive site and a Z or acidic group ( It can also be obtained by various modification methods in which a compound having b) is reacted.
[0098] 反応部位を有する重合体に Rf基 (a)を有する化合物を反応させる各種変性方法と しては、例えば、エポキシ基を有する単量体をあら力じめ共重合させ、後に Rf基 (a) とカルボキシル基とを有する化合物を反応させる方法、エポキシ基を有する単量体を あら力じめ共重合させ、後に Rf基 (a)とヒドロキシル基とを有する化合物を反応させる 方法等が挙げられる。  [0098] As various modification methods for reacting a polymer having a reactive site with a compound having an Rf group (a), for example, a monomer having an epoxy group is preferentially copolymerized, and an Rf group is later formed. (a) a method of reacting a compound having a carboxyl group, a method of co-polymerizing monomers having an epoxy group and then reacting a compound having an Rf group (a) and a hydroxyl group, etc. Can be mentioned.
エポキシ基を有する単量体の具体例としては、グリシジル (メタ)アタリレート、 3, 4 エポキシシクロへキシルメチルアタリレートが挙げられる。  Specific examples of the monomer having an epoxy group include glycidyl (meth) acrylate and 3, 4 epoxy cyclohexyl methyl acrylate.
[0099] Rf基 (a)とカルボキシル基とを有する化合物としては、下記式 3で表される化合物 が挙げられる。  [0099] Examples of the compound having an Rf group (a) and a carboxyl group include compounds represented by the following formula 3.
HOOC-C F O—(C F -0) C F …式 3  HOOC-C F O— (C F −0) C F… Formula 3
p-1 2(p-l) p 2p n-1 q 2q+l  p-1 2 (p-l) p 2p n-1 q 2q + l
式 3中、 pは 2又は 3の整数、 qは 1〜20の整数、 nは 2〜50の整数を示す。  In Formula 3, p is an integer of 2 or 3, q is an integer of 1 to 20, and n is an integer of 2 to 50.
[0100] Rf基 (a)とヒドロキシル基とを有する化合物としては、下記式 4で表される化合物が 挙げられる。 [0100] Examples of the compound having an Rf group (a) and a hydroxyl group include compounds represented by the following formula 4.
HOCH -C F O—(C F -0) C F …式 4  HOCH -C F O— (C F -0) C F… Formula 4
2 p-1 2(p-l) p 2p n-1 q 2q+l  2 p-1 2 (p-l) p 2p n-1 q 2q + l
式 4中、 pは 2又は 3の整数、 qは 1〜20の整数、 nは 2〜50の整数を示す。  In Formula 4, p is an integer of 2 or 3, q is an integer of 1 to 20, and n is an integer of 2 to 50.
[0101] 反応部位を有する重合体に酸性基 (b)を有する化合物を反応させる各種変性方法 としては、例えば、水酸基を有する単量体をあら力じめ共重合させ、後に酸無水物を 反応させる方法が挙げられる。また、エチレン性二重結合を有する酸無水物をあらか じめ共重合させ、後に水酸基を有する化合物を反応させる方法が挙げられる。 [0101] As various modification methods for reacting a polymer having a reactive site with a compound having an acidic group (b), for example, a monomer having a hydroxyl group is preliminarily copolymerized and then an acid anhydride is reacted. The method of letting it be mentioned. In addition, there may be mentioned a method in which an acid anhydride having an ethylenic double bond is copolymerized in advance and a compound having a hydroxyl group is reacted later.
[0102] 水酸基を有する単量体の具体例としては、ビュルフエノール、 2 ヒドロキシェチル( メタ)アタリレート、 2 ヒドロキシプロピル (メタ)アタリレート、 3 ヒドロキシプロピル (メ タ)アタリレート、 4—ヒドロキシブチル (メタ)アタリレート、 5—ヒドロキシペンチル (メタ) アタリレート、 6—ヒドロキシへキシル (メタ)アタリレート、 4—ヒドロキシシクロへキシル( メタ)アタリレート、ネオペンチルグリコールモノ(メタ)アタリレート、 3 クロ口一 2 ヒド ルビニルエーテル、 4ーヒドロキシブチルビニルエーテル、シクロへキサンジオールモ ノビニルエーテル、 2—ヒドロキシェチルァリルエーテル、 N—ヒドロキシメチル (メタ) アクリルアミド、 N, N—ビス(ヒドロキシメチル)等が挙げられる。 [0102] Specific examples of the monomer having a hydroxyl group include bulufenol, 2 hydroxyethyl (meth) acrylate, 2 hydroxypropyl (meth) acrylate, 3 hydroxypropyl (meth) ) Atarylate, 4-hydroxybutyl (meth) acrylate, 5-hydroxypentyl (meth) acrylate, 6-hydroxyhexyl (meth) acrylate, 4-hydroxycyclohexyl (meth) acrylate, neopentyl Glycol mono (meth) acrylate, 3-chloro 2-hydroxy vinyl ether, 4-hydroxybutyl vinyl ether, cyclohexanediol monovinyl ether, 2-hydroxyethylaryl ether, N-hydroxymethyl (meth) acrylamide, N , N-bis (hydroxymethyl) and the like.
[0103] さらに、水酸基を有する単量体は、末端が水酸基であるポリオキシアルキレン鎖を 有する単量体であってもよい。例えば、 CH =CHOCH C H CH O (C H O) H ( [0103] Furthermore, the monomer having a hydroxyl group may be a monomer having a polyoxyalkylene chain whose terminal is a hydroxyl group. For example, CH = CHOCH C H CH O (C H O) H (
2 2 6 10 2 2 4 g ここで、 gは 1〜: LOOの整数、以下同じ。)、 CH =CHOC H 0 (C H O) H、 CH =  2 2 6 10 2 2 4 g where g is 1 to: an integer of LOO, and so on. ), CH = CHOC H 0 (C H O) H, CH =
2 4 8 2 4 g 2 2 4 8 2 4 g 2
CHCOOC H 0 (C H O) H, CH =C (CH ) COOC H 0 (C H O) H, CH =C CHCOOC H 0 (C H O) H, CH = C (CH) COOC H 0 (C H O) H, CH = C
2 4 2 4 g 2 3 2 4 2 4 g 2 2 4 2 4 g 2 3 2 4 2 4 g 2
HCOOC H 0 (C H O) (C H O) H (ここで、 hは 0又は 1〜: LOOの整数であり、 kは HCOOC H 0 (C H O) (C H O) H (where h is 0 or 1 to: an integer of LOO, k is
2 4 2 4 h 3 6 k  2 4 2 4 h 3 6 k
1〜: LOOの整数であり、 h+kは 1〜: L00である。以下同じ。)、 CH =C (CH ) COOC  1 ~: LOO integer, h + k is 1 ~: L00. same as below. ), CH = C (CH) COOC
2 3 twenty three
H O (C H O) (C H O) H等が挙げられる。これらは単独で用いてもよいし、 2種以H O (C H O) (C H O) H and the like can be mentioned. These may be used alone or in combination of two or more.
2 4 2 4 h 3 6 k 2 4 2 4 h 3 6 k
上を併用してもよい。  The above may be used together.
[0104] 酸無水物の具体例としては、無水フタル酸、無水 3—メチルフタル酸、無水トリメリツ ト酸等が挙げられる。  [0104] Specific examples of the acid anhydride include phthalic anhydride, 3-methylphthalic anhydride, trimellitic anhydride, and the like.
エチレン性二重結合を有する酸無水物としては、無水マレイン酸、無水ィタコン酸、 無水シトラコン酸、無水メチルー 5 ノルボルネンー 2, 3 ジカルボン酸、無水 3, 4, 5, 6—テトラヒドロフタル酸、無水 cis—l, 2, 3, 6—テトラヒドロフタル酸、 2 ブテン - 1—ィルスシニックアンノヽイドライド等が挙げられる。  Examples of acid anhydrides having an ethylenic double bond include maleic anhydride, itaconic anhydride, citraconic anhydride, methyl-5-norbornene-2,3-dicarboxylic acid anhydride, 3,4,5,6-tetrahydrophthalic acid anhydride, cis —L, 2, 3, 6-tetrahydrophthalic acid, 2-butene-1-yl succinic anhydride, and the like.
[0105] 水酸基を有する化合物としては、 1つ以上の水酸基を有している化合物であれば 良ぐ前記に示した水酸基を有する単量体の具体例や、エタノール、 1 プロパノー ル、 2—プロパノール、 1ーブタノール、エチレングリコール等のアルコール類、 2—メ トキシエタノール、 2—エトキシエタノール、 2—ブトキシエタノール等のセルソルブ類 、 2- (2—メトキシエトキシ)エタノール、 2—(2—エトキシエトキシ)エタノール、 2— ( 2—ブトキシエトキシ)エタノール等のカルビトール類等が挙げられる。分子内に 1個 の水酸基を有する化合物が好ましい。これらは単独で用いてもよいし、 2種以上を併 用してちょい。 [0105] The compound having a hydroxyl group may be any compound having one or more hydroxyl groups. Specific examples of the above-mentioned monomer having a hydroxyl group, ethanol, 1-propanol, 2-propanol , Alcohols such as 1-butanol and ethylene glycol, cellsolves such as 2-methoxyethanol, 2-ethoxyethanol, 2-butoxyethanol, 2- (2-methoxyethoxy) ethanol, 2- (2-ethoxyethoxy) ethanol And carbitols such as 2- (2-butoxyethoxy) ethanol. A compound having one hydroxyl group in the molecule is preferred. These may be used alone or in combination of two or more. Use it.
[0106] 含フッ素榭脂 (A)ある 、は含フッ素榭脂 (A)の前駆体となる前記反応部位を有す る重合体は、単量体を必要に応じて連鎖移動剤と共に、溶媒に溶解して加熱し、重 合開始剤を加えて反応させる方法によって合成できる。  [0106] The fluorine-containing resin (A) is a polymer having the reaction site that is a precursor of the fluorine-containing resin (A). It can be synthesized by a method in which it is dissolved in and heated, and a polymerization initiator is added to react.
含フッ素榭脂(A)の酸価は、 l〜300mgKOHZgが好ましぐ 5〜200mgKOHZ gがより好ましぐ 10〜150mgKOHZgが特に好ましい。この範囲内であると、本発 明の感光性組成物の現像性が良好となる。なお、酸価は榭脂 lgを中和するのに必 要な水酸ィ匕カリウムの質量 (単位 mg)であり、本明細書においては単位を mgKOH Zgと記載する。  The acid value of the fluorinated resin (A) is preferably 1 to 300 mgKOHZg, more preferably 5 to 200 mgKOHZg, and particularly preferably 10 to 150 mgKOHZg. Within this range, the developability of the photosensitive composition of the present invention will be good. The acid value is the mass (unit: mg) of potassium hydroxide required to neutralize sorghum lg. In this specification, the unit is described as mgKOH Zg.
[0107] 含フッ素榭脂 (A)の数平均分子量は、 500以上 20000未満が好ましぐ 2000以上 15000未満がより好ましい。当該範囲内であると、本発明の感光性組成物の現像性 が良好である。数平均分子量は、ゲルパーミエーシヨンクロマトグラフィー法により、ポ リスチレンを標準物質として測定される。  [0107] The number average molecular weight of the fluorinated resin (A) is preferably 500 or more and less than 20000, more preferably 2000 or more and less than 15000. Within this range, the developability of the photosensitive composition of the present invention is good. The number average molecular weight is measured by a gel permeation chromatography method using polystyrene as a standard substance.
含フッ素榭脂 (A)の配合量は、感光性組成物中の固形分に対し、 0. 01〜50%が 好ましく、 0. 1〜30%がより好ましぐ 0. 2〜10%が特に好ましい。当該範囲内であ ると、感光性組成物は良好な撥インク性、インク転落性を奏し、現像性が良好となる。  The blending amount of the fluorinated resin (A) is preferably 0.01 to 50%, more preferably 0.1 to 30%, and more preferably 0.2 to 10% based on the solid content in the photosensitive composition. Particularly preferred. Within this range, the photosensitive composition exhibits good ink repellency and ink tumbling properties and good developability.
[0108] (2) <撥水層を設ける方法 >  [0108] (2) <Method of providing a water repellent layer>
「混色」を防ぐ手段として、濃色離画壁を形成した基板上の濃色離画壁に合致した 位置にインク反発性を有する仕切り壁を作製する方法がある。  As a means for preventing “color mixing”, there is a method of producing a partition wall having ink repelling properties at a position matching the dark color separation wall on the substrate on which the dark color separation wall is formed.
インク反発性を有する仕切り壁としては、シリコーンゴム層を用いることが好ましい。 表層に塗設されるシリコーンゴム層は、着色に用いる溶液およびインクに対して反発 効果を有することが必須であり、これに限定されるものではないが、次の様な繰り返し 単位を有する分子量数千〜数十万の線状有機ポリシロキサンを主成分とするもので ある。  A silicone rubber layer is preferably used as the partition wall having ink repellency. The silicone rubber layer coated on the surface layer must have a repulsive effect on the solution and ink used for coloring, and is not limited to this, but the number of molecular weights having the following repeating units: It is mainly composed of thousands to hundreds of thousands of linear organic polysiloxanes.
[0109] [化 1] [0109] [Chemical 1]
一 o'
Figure imgf000031_0001
One o '
Figure imgf000031_0001
[0110] ここで、 nは 2以上の整数、 Rはそれぞれ独立した炭素数 1〜10のアルキル基、アル ケニル基あるいはフエ-ル基である。この様な線状有機ポリシロキサンをまばらに架 橋することにより、シリコーンゴムが得られる。架橋剤は、いわゆる室温 (低温)硬化型 のシリコーンゴムに使われるァセトキシシラン、ケトォキシムシラン、アルコキシシラン、 アミノシラン、アミドシラン、ァルケ-ォキシシランなどであり、通常、末端が水酸基で ある線状の有機ポリシロキサンと組み合わせて、それぞれ脱酢酸型、脱ォキシム型、 脱アルコール型、脱ァミン型、脱アミド型、脱ケトン型のシリコーンゴムとなる。また、シ リコーンゴムには、触媒として少量の有機スズィ匕合物などが添加される。感光性榭脂 層とシリコーンゴム層の接着のために、層間に接着層として種々のものを用いることが あり、特にアミノシランィ匕合物や有機チタネートイ匕合物が好ましく用いられる。感光性 榭脂層とシリコーンゴム層間に接着層を設ける代わりに、シリコーンゴム層に接着成 分を添加することもできる。この添加接着成分としても、アミノシランィ匕合物や有機チ タネート化合物が使用できる。 [0110] Here, n is an integer of 2 or more, and R is an independent alkyl group having 1 to 10 carbon atoms, an alkenyl group, or a phenyl group. Silicone rubber can be obtained by sparsely bridging such a linear organic polysiloxane. The cross-linking agent is acetoxy silane, ketoxime silane, alkoxy silane, amino silane, amido silane, alkoxy silane, or the like used for so-called room temperature (low temperature) curable silicone rubber. In combination with each other, a deacetic acid type, a deoxime type, a dealcohol type, a deamine type, a deamid type, and a deketone type silicone rubber. A small amount of organic tin compound is added to the silicone rubber as a catalyst. In order to bond the photosensitive resin layer and the silicone rubber layer, various adhesive layers may be used between the layers, and aminosilane compounds and organic titanate compounds are particularly preferably used. Instead of providing an adhesive layer between the photosensitive resin layer and the silicone rubber layer, an adhesive component can be added to the silicone rubber layer. As this additional adhesive component, aminosilane compounds and organic titanate compounds can be used.
[0111] 仕切り壁を作製するための露光は、濃色離画壁をマスクとし、基板の裏側から行う。  [0111] The exposure for producing the partition wall is performed from the back side of the substrate using the dark color separation wall as a mask.
この様に露光した後、 n_ヘプタン Zエタノール混合液で現像して、シリコーンゴム表 層を有する仕切り壁を作製できる。  After exposure in this manner, the partition wall having a silicone rubber surface layer can be produced by developing with an n_heptane / Z ethanol mixture.
[0112] (3) <プラズマ処理により撥水性を付与する方法 > 「混色」を防ぐ手段として、濃色離画壁を形成した基板に、プラズマによる撥水化処 理をする方法がある。 [0112] (3) <Method of imparting water repellency by plasma treatment> As a means for preventing “color mixing”, there is a method of performing water repellency treatment by plasma on a substrate on which a dark color separation wall is formed.
本工程において導入する、少なくともフッ素原子を含有するガスとしては、 CF、 C  Gases containing at least fluorine atoms introduced in this process include CF, C
4 Four
HF 、 C F 、 SF 、 C F 、 C F力 選択されるハロゲンガスを 1種以上用いることがHF, C F, SF, C F, C F force Use at least one selected halogen gas
3 2 6 6 3 8 5 8 3 2 6 6 3 8 5 8
好ましい。特に、 C F (ォクタフルォロシクロペンテン)は、オゾン破壊能が 0であると  preferable. In particular, C F (octafluorocyclopentene) has zero ozone depletion potential.
5 8  5 8
同時に、大気寿命が従来のガスに比べて(CF : 5万年、。 :3200年) 0. 98年と  At the same time, the atmospheric life is longer than conventional gas (CF: 50,000 years, 3200 years).
4 4 8  4 4 8
非常に短い。従って、地球温暖化係数が 90 (CO = 2とした 100年積算値)と、従来  Very short. Therefore, the global warming potential is 90 (100-year integrated value with CO = 2).
2  2
のガス(CF : 6500、 C F : 8700)に比べて非常に小さぐオゾン層や地球環境保  Compared to other gases (CF: 6500, C F: 8700), the ozone layer and global environmental protection are very small.
4 4 8  4 4 8
護に極めて有効であり、本発明で使用する上で望ましい。  It is extremely effective for protection and is desirable for use in the present invention.
[0113] さらに、導入ガスとしては、必要に応じて酸素、アルゴン、ヘリウム等のガスを併用し ても良い。本工程においては、上記 CF 、 CHF 、 C F 、 SF 、 C F 、 C F力ら選 [0113] Further, as the introduced gas, a gas such as oxygen, argon, helium or the like may be used in combination as necessary. In this process, the above CF, CHF, C F, SF, C F, and C F forces are selected.
4 3 2 6 6 3 8 5 8 択されるハロゲンガスを 1種以上と、 o  4 3 2 6 6 3 8 5 8 One or more selected halogen gases, o
2とを混合したガスを用いることにより、本工程 において処理される濃色離画壁表面の撥インク性の程度を制御することが可能にな る。但し、当該混合ガスにおいて、 O の混合比率が 30%を超えると O による酸化反  By using a gas mixed with 2, it is possible to control the degree of ink repellency on the surface of the dark color separation wall processed in this step. However, if the mixing ratio of O exceeds 30% in the mixed gas, the oxidation reaction by O
2 2  twenty two
応が支配的になり、撥インク性向上効果が妨げられる。また、 O混合比率が 30%を  The response becomes dominant and the effect of improving ink repellency is hindered. Also, O mixing ratio is 30%
2  2
超えると榭脂に対するダメージが顕著になる。このため、当該混合ガスを用いる場合 には、 O の混合比率が 30%以下となる範囲で使用する必要がある。  If it exceeds, the damage to rosin becomes remarkable. For this reason, when using the mixed gas, it is necessary to use it within the range where the mixing ratio of O is 30% or less.
2  2
プラズマの発生方法としては、低周波放電、高周波放電、マイクロ波放電等の方式 を用いることができ、プラズマ処理の際の圧力、ガス流量、放電周波数、処理時間等 の条件は任意に設定することができる。  As a method for generating plasma, methods such as low frequency discharge, high frequency discharge, and microwave discharge can be used, and conditions such as pressure, gas flow rate, discharge frequency, and processing time during plasma processing should be set arbitrarily. Can do.
[0114] (4) <濃色離画壁上面に撥水材料を塗布する方法 > [0114] (4) <Method of applying water repellent material to the upper surface of dark color separation wall>
「混色」を防ぐ手段として、濃色離画壁を形成した基板に、撥水性を有する材料を 全面に塗布する方法がある。  As a means for preventing “color mixing”, there is a method in which a water repellent material is applied to the entire surface of a substrate on which a dark color separation wall is formed.
撥水性を有する材料としては、ポリテトラフルォロエチレン等のフッ素榭脂、シリコー ンゴム、パーフルォロアルキルアタリレート、ハイド口カーボンアタリレート、メチルシロ キサン等、一般に撥水材料と考えられ、着色剤に対する接触角が 60° 以上のもので あれば特に限定されない。  As a material having water repellency, fluorine resin such as polytetrafluoroethylene, silicone rubber, perfluoroalkyl acrylate, hydrated carbon acrylate, methylsiloxane, etc. There is no particular limitation as long as the contact angle to the agent is 60 ° or more.
撥水材料の塗布方法としては、基板、濃色離画壁などに影響を及ぼさない方法で あれば、スリットコート、スピンコート、ディップコート、ロールコート等、各材料に最適 の方法を選択することが可能である。 The water-repellent material is applied by a method that does not affect the substrate, dark color separation wall, etc. If so, it is possible to select the most suitable method for each material, such as slit coating, spin coating, dip coating, and roll coating.
[0115] 塗布後、基板裏面側から濃色離画壁を介して UVO 処理を行い、濃色離画壁以 [0115] After coating, UVO treatment is performed from the back side of the substrate through the dark color separation wall.
3  Three
外の部分の撥水膜を選択的に除去または親水化処理 (処理後の着色剤に対する接 触角が処理前より 30° 以上小さくなるようにする)する。  The water-repellent film on the outer part is selectively removed or hydrophilized (the contact angle with the colorant after the treatment is made 30 ° or more smaller than before the treatment).
撥水材料を除去または親水化処理することが可能ならば、パターニングの方法は、 レーザーアブレーシヨン、プラズマアツシング、コロナ放電処理等のドライ処理および アルカリを用いたゥヱット処理等、材料に応じて最適の方法を選択することが可能で ある。また、濃色離画壁上に撥水材料をパターン形成することが可能であれば、リフト オフ法等も有効である。  If the water-repellent material can be removed or hydrophilized, the patterning method depends on the material, such as laser ablation, plasma ashing, dry treatment such as corona discharge treatment, and wet treatment using alkali. It is possible to select the optimum method. If it is possible to pattern the water repellent material on the dark color separation wall, the lift-off method or the like is also effective.
[0116] 上記( 1)〜 (4)の撥水処理方法の中でも、「工程の簡便さ」 、う観点力も (3)ブラ ズマによる撥水処理方法が特に好ましい。  [0116] Among the water repellent treatment methods (1) to (4) described above, (3) the water repellent treatment method using a plasma is particularly preferred because of its “simpleness of process” and viewpoint power.
[0117] (各画素の形成)  [0117] (Formation of each pixel)
ついで、上記現像工程にて形成された濃色離画壁の空隙に、 RGBの各画素を形 成する為の着色液体組成物(以下、単に「インク」とも言う。)を侵入させる。着色液体 組成物を濃色離画壁空隙に侵入させる方法としては、インクジェット法やストライプギ ーサー塗布法など公知のものを使用することができ、インクジェット法力 Sコスト面の観 点から好ましい。ストライプギーサ一塗布法とは、細かな液滴吐出用の穴が開いたギ 一サーを用いて液滴が基板上に付与され、ストライプ状の画素が形成される方法で ある。インクジェット法の詳細については、後述する。  Next, a colored liquid composition (hereinafter also simply referred to as “ink”) for forming each pixel of RGB is caused to enter the voids of the dark color separation wall formed in the developing step. As a method for allowing the colored liquid composition to enter the deep color separation wall voids, a known method such as an ink jet method or a stripe finger coating method can be used, which is preferable from the viewpoint of ink jet method power and cost. The stripe Giesa coating method is a method in which droplets are applied onto a substrate using a gear having a fine droplet discharge hole and a stripe pixel is formed. Details of the inkjet method will be described later.
[0118] 各画素形成のために用いるインクジェット法に関しては、インクを熱硬化させる方法 、光硬化させる方法、あらかじめ基板上に透明な受像層を形成しておいて力ゝら打滴 する方法など、公知の方法を用いることができる。  [0118] Regarding the ink jet method used for forming each pixel, a method of thermally curing ink, a method of photocuring, a method of forming a transparent image-receiving layer on a substrate in advance, and ejecting forcefully, etc. A known method can be used.
[0119] 各画素を形成した後、加熱処理 (いわゆるベータ処理)する加熱工程を設けること が好ましい。即ち、光照射により光重合した層を有する基板を電気炉、乾燥器等の中 で加熱するか、あるいは赤外線ランプを照射する。加熱の温度及び時間は、感光性 濃色組成物の組成や形成された層の厚みに依存するが、一般に充分な耐溶剤性、 耐アルカリ性、及び紫外線吸光度を獲得する観点から、約 120〜約 250°Cで約 10〜 約 120分間加熱することが好ま 、。 [0119] It is preferable to provide a heating step (so-called beta treatment) after forming each pixel. That is, a substrate having a photopolymerized layer by light irradiation is heated in an electric furnace, a dryer or the like, or an infrared lamp is irradiated. The temperature and time of heating depend on the composition of the photosensitive dark color composition and the thickness of the layer formed, but generally from about 120 to about 120 from the viewpoint of obtaining sufficient solvent resistance, alkali resistance, and ultraviolet absorbance. About 10 ~ at 250 ° C It is preferable to heat for about 120 minutes.
[0120] このようにして形成されたカラーフィルタのパターン形状は特に限定されるものでは なぐ一般的なブラックマトリックス形状であるストライプ状もしくは格子状であっても ( 図 2B参照)、デルタ配列状であってもよ ヽ(図 2A参照)。  [0120] The pattern shape of the color filter formed in this way is not particularly limited, but it is a stripe shape or a lattice shape, which is a general black matrix shape (see Fig. 2B). May be present (see Figure 2A).
[0121] (インクジェット方式)  [0121] (Inkjet method)
本発明に用いるインクジェット方式としては、帯電したインクを連続的に噴射し電場 によって制御する方法、圧電素子を用いて間欠的にインクを噴射する方法、インクを 加熱しその発泡を利用して間欠的に噴射する方法等、各種の方法を採用できる。 用いるインクは油性、水性のいずれも使用できる。また、そのインクに含まれる着色 材は染料、顔料のいずれも使用でき、耐久性の面からは顔料の使用がより好ましい。 また、公知のカラーフィルタ作製に用いる、塗布方式の着色インク (着色榭脂組成物 、例えば、特開 2005— 3861号公報 [0034]〜[0063]記載)や、特開平 10— 195 358号公報 [0009]〜 [0026]に記載のインクジェット用組成物を使用することもでき る。  As an ink jet system used in the present invention, there are a method in which charged ink is continuously ejected and controlled by an electric field, a method in which ink is ejected intermittently using a piezoelectric element, and an ink is intermittently heated by using its foaming. Various methods such as a method of injecting the ink can be employed. The ink used can be either oily or water-based. The coloring material contained in the ink can be either a dye or a pigment, and the use of a pigment is more preferable from the viewpoint of durability. In addition, a coating-type colored ink (colored resin composition, for example, described in JP-A-2005-3861 [0034] to [0063]) or JP-A-10-195358 is used for producing a known color filter. The inkjet composition described in [0009] to [0026] can also be used.
[0122] 本発明におけるインクには、着色後の工程を考慮し、加熱又は紫外線などのエネ ルギ一線によって硬化する成分を添加することもできる。加熱によって硬化する成分 としては、各種の熱硬化性榭脂が広く用いられ、エネルギー線によって硬化する成分 としては、例えばアタリレート誘導体又はメタタリレート誘導体に光反応開始剤を添カロ したもの等が挙げられる。特に、耐熱性を考慮すると、アタリロイル基又はメタタリロイ ル基を分子内に複数有するものが好ましい。これらのアタリレート誘導体又はメタタリ レート誘導体は水溶性のものが好ましく使用できる。水に難溶性のものでも、ェマル シヨン化するなどして使用できる。  [0122] In the ink of the present invention, a component that is cured by heating or a line of energy such as ultraviolet rays may be added in consideration of a step after coloring. Various thermosetting resin is widely used as the component that is cured by heating, and examples of the component that is cured by energy rays include those obtained by adding a photoinitiator to an attalylate derivative or a metatalylate derivative. . In particular, when heat resistance is taken into consideration, those having a plurality of attalyloyl groups or metatalylyl groups in the molecule are preferred. These attalylate derivatives or metatalylate derivatives are preferably water-soluble. Even those that are sparingly soluble in water can be used after emulsification.
この場合、上記く濃色組成物 >の項で挙げた、濃色体 (顔料)などの着色剤を含 有させたインクを、好適なものとして用いることができる。  In this case, an ink containing a colorant such as a dark color body (pigment) listed in the item of the dark color composition> can be used as a preferable one.
また、本発明において用いることができるインクとしては、少なくともバインダー、及 び、 2〜3官能のエポキシ基含有モノマーを含有するカラーフィルタ用熱硬化性イン クも、好適なものとして用いることができる。  As the ink that can be used in the present invention, a thermosetting ink for a color filter containing at least a binder and a bifunctional or trifunctional epoxy group-containing monomer can also be used as a suitable ink.
[0123] 本発明におけるカラーフィルタは、インクジェット方式で画素形成されたカラーフィ ルタであることが好ましぐ RGBの 3色のインクを吹き付けて 3色のカラーフィルタを形 成することが好ましい。 [0123] The color filter of the present invention is a color filter in which pixels are formed by an inkjet method. It is preferable to spray three colors of RGB to form a three-color filter.
このカラーフィルタは、液晶表示素子、電気泳動表示素子、エレクト口クロミック表示 素子、 PLZT等と組合せて表示素子として用いられる。カラーカメラやその他のカラー フィルタを用いる用途にも使用できる。  This color filter is used as a display element in combination with a liquid crystal display element, an electrophoretic display element, an electochromic display element, PLZT, or the like. It can also be used for applications using color cameras and other color filters.
[0124] (オーバーコート層) [0124] (Overcoat layer)
カラーフィルタの作製後、耐性向上のためにオーバーコート層を全面に設ける場合 がある。オーバーコート層は、インク G、 Bの固化層を保護するとともに、表面を平 坦にすることができる。しかしながら、工程数が増えるという観点からは、設けないこと が好ましい。  After the color filter is manufactured, an overcoat layer may be provided on the entire surface to improve resistance. The overcoat layer protects the solidified layer of inks G and B, and can flatten the surface. However, it is preferable not to provide from the viewpoint of increasing the number of steps.
[0125] オーバーコート層を形成する榭脂(OC剤)としては、アクリル系榭脂組成物、ェポキ シ榭脂組成物、ポリイミド榭脂組成物などが挙げられる。中でも、可視光領域での透 明性で優れている点、また、カラーフィルタ用光硬化性組成物の樹脂が通常アクリル 系榭脂を主成分としている点、密着性に優れている点などから、アクリル系榭脂組成 物が望ましい。オーバーコート層の例としては、特開 2003— 287618号公報の段落 番号 0018〜0028に記載のもの等が挙げられる、オーバーコート剤の市販品として は、 JSR社製「ォプトマ一 SS6699GJ )等が挙げられる。  [0125] Examples of the resin (OC agent) forming the overcoat layer include an acrylic resin composition, an epoxy resin composition, and a polyimide resin composition. Above all, from the point of excellent transparency in the visible light region, from the point that the resin of the photocurable composition for color filters usually has acrylic resin as the main component, and excellent adhesion. An acrylic resin composition is desirable. Examples of the overcoat layer include those described in paragraph Nos. 0018 to 0028 of JP-A-2003-287618. Commercially available overcoat agents include “Optoma 1 SS6699GJ” manufactured by JSR. It is done.
[0126] 次いで、本発明のカラーフィルタについて説明する。本発明のカラーフィルタは、既 述の本発明のカラーフィルタの製造方法により製造されるカラーフィルタであって、基 板上に形成された濃色離画壁の断面形状が、該濃色離画壁の基板力ゝらの高さが最 も高い点における基板力ゝらの高さを h、基板から 0. 8hの位置における基板と平行な 線を L、 Lと濃色離画壁が接する点における接線を L、 hの位置における基板と平行 [0126] Next, the color filter of the present invention will be described. The color filter of the present invention is a color filter manufactured by the above-described method for manufacturing a color filter of the present invention, and the cross-sectional shape of the dark color separation wall formed on the substrate is the dark color separation image. The height of the substrate strength at the point where the height of the substrate strength of the wall is the highest is h, the line parallel to the substrate at a position of 0.8 h from the substrate is L, L and the dark separation wall touches Tangent line at point parallel to substrate at L, h
1 1 2 1 1 2
な線を Lとしたとき、 Lとしの交点力もの濃色離画壁までの距離で規定される値 dを h When the straight line is L, the value d defined by the distance to the dark color separation wall with the intersection force as L is h.
3 2 3 3 2 3
で除した値が 0. 04以下であることを特徴として 、る。  The value divided by is less than 0.04.
つまり、基板上に形成された濃色離画壁の断面形状は、図 1に示す如ぐ該濃色離 画壁の基板力ゝらの高さが最も高い点における基板からの高さを h、基板から 0. 8hの 位置における基板と平行な線を L、 Lと濃色離画壁が接する点における接線を L、 h  In other words, the cross-sectional shape of the dark color separation wall formed on the substrate is the height from the substrate at the point where the height of the substrate strength of the dark color separation wall is the highest as shown in FIG. The line parallel to the substrate at the position 0.8h from the substrate is L, and the tangent line at the point where L and the dark separation wall touch is L, h
1 1 2 の位置における基板と平行な線を Lとしたとき、 Lとしの交点からの濃色離画壁まで の距離で規定される値 dを hで除した値が 0. 04以下である。 1 1 2 When the line parallel to the substrate at L is L, from the intersection of L to the dark color separation wall The value defined by the distance of d divided by h is 0.04 or less.
[0127] 基板上において、上記で説明した濃色組成物を、同じく上記で説明した貧酸素雰 囲気下で光重合した場合、組成物自身の吸収により組成物力 なる層の表面力 基 板方向への露光量は減衰するため、結果として表面の硬化がより進む。さらに、貧酸 素雰囲気下であるために組成物力もなる層の表面における、酸素による重合阻害が 抑制され、これによつても結果として表面の硬化がより進む。これら二つの寄与により 、基板上に形成された濃色離画壁の断面形状において、該濃色離画壁の基板から の高さが最も高い点における基板からの高さを h、基板から 0. 8hの位置における基 板と平行な線を L における [0127] When the dark color composition described above is photopolymerized in a poor oxygen atmosphere as described above on the substrate, the surface force of the layer having the composition force is absorbed by the composition itself toward the substrate. Since the exposure amount of the light is attenuated, the surface is hardened as a result. In addition, since it is in an oxygen-poor atmosphere, inhibition of polymerization by oxygen on the surface of the layer having compositional power is suppressed, and as a result, the surface is further cured. Due to these two contributions, in the cross-sectional shape of the dark color separation wall formed on the substrate, the height from the substrate at the point where the height of the dark color separation wall from the substrate is the highest is 0 from the substrate. A line parallel to the base plate at 8h
1、 Lと濃色離画壁が接する点における接線を L  1, L is the tangent at the point where L and the dark separation wall meet
1 2、 hの位置 基板と平行な線を Lとしたとき、 Lとしの交点からの濃色離画壁までの距離で規定さ  1 2, h position When the line parallel to the board is L, it is defined by the distance from the intersection of L to the dark color separation wall.
3 2 3  3 2 3
れる値 dを hで除した値が 0. 04以下となる。これらの値は、実際には基板上に形成さ れた濃色離画壁を、基板ごと垂直にカットして断面を露出させ、顕微鏡等で直接観 察することで測定する。こうして得られた濃色離画壁の形状を固定化する工程を経る ことで、一旦その空隙に打滴されたインクは濃色離画壁を乗り越えに《なる。その結 果、にじみ、はみ出し、隣接画素との混色および白抜けなどが防止され、良好なカラ 一フィルタを得ることができる。 dZhの値は 0. 04以下が好ましぐ 0. 038以下がより 好ましぐ 0. 035以下が特に好ましい。図 2は、上記した形状の濃色離画壁を形成す るのに好適なカラーフィルタの実施の形態を示す。これらのカラーフィルタにおいて、 濃色離画壁を上記の形状とすることによって、混色のない画素が得られる。  Value d divided by h is 0.04 or less. These values are measured by actually observing the dark-colored separation wall formed on the substrate by cutting the substrate vertically and exposing the cross section directly with a microscope. By passing through the process of fixing the shape of the dark color separation wall obtained in this way, the ink once deposited in the gap gets over the dark color separation wall. As a result, bleeding, protrusion, color mixing with adjacent pixels, white spots, and the like are prevented, and a good color filter can be obtained. The value of dZh is preferably 0.04 or less, more preferably 0.038 or less, and particularly preferably 0.035 or less. FIG. 2 shows an embodiment of a color filter suitable for forming a dark color separation wall having the above-described shape. In these color filters, pixels having no color mixture can be obtained by forming the dark color separation wall in the above-described shape.
以上の本発明のカラーフィルタの濃色離画壁の断面形状の一例を図 3Aに示す。 図 3 Aは誇張して描 、ているが、図 3Bに示すようにエッジが丸みを帯びた形状よりも インクが乗り越えにくいのは明らかである。なお、図 3A及び図 3Bにおいて、 11は画 素領域、 12は濃色離画壁、 13は基板を示す。  An example of the cross-sectional shape of the dark color separation wall of the color filter of the present invention is shown in FIG. 3A. Figure 3A is exaggerated, but it is clear that the ink is less likely to get over the shape with rounded edges as shown in Figure 3B. In FIGS. 3A and 3B, 11 indicates a pixel region, 12 indicates a dark color separation wall, and 13 indicates a substrate.
[0128] [表示装置] [0128] [Display device]
本発明の表示装置は既述の本発明のカラーフィルタを有するものであり、そのよう な表示装置としては液晶表示装置、プラズマディスプレイ表示装置、 EL表示装置、 CRT表示装置などの表示装置などがある。表示装置の定義や各表示装置の説明は 、例えば「電子ディスプレイデバイス (佐々木 昭夫著、(株)工業調査会 1990年発 行)」、「ディスプレイデバイス (伊吹 順章著、産業図書 (株)平成元年発行)」などに記 載されている。 The display device of the present invention includes the color filter of the present invention described above, and examples of such display devices include display devices such as liquid crystal display devices, plasma display display devices, EL display devices, and CRT display devices. . For the definition of display devices and explanation of each display device, refer to, for example, “Electronic Display Device (Akio Sasaki, Industrial Research Co., Ltd. 1990) Line) ”,“ Display devices (written by Junaki Ibuki, published by Sangyo Tosho Co., Ltd. in 1989) ”and the like.
本発明の表示装置のうち、液晶表示装置が特に好ましい。液晶表示装置について は、例えば「次世代液晶ディスプレイ技術(内田 龍男編集、(株)工業調査会 199 4年発行)」に記載されている。本発明が適用できる液晶表示装置に特に制限はなく 、例えば上記の「次世代液晶ディスプレイ技術」に記載されて 、る種々の方式の液晶 表示装置に適用できる。本発明は、これらのなかで、特にカラー TFT方式の液晶表 示装置に対して有効である。カラー TFT方式の液晶表示装置については、例えば「 カラー TFT液晶ディスプレイ (共立出版 (株) 1996年発行)」に記載されている。さらに 、本発明はもちろん IPSなどの横電界駆動方式、 MVAなどの画素分割方式などの 視野角が拡大された液晶表示装置にも適用できる。これらの方式については、例え ば「EL、 PDP、 LCDディスプレイ 技術と巿場の最新動向 (東レリサーチセンター 調査研究部門 2001年発行)」の 43ページに記載されている。  Among the display devices of the present invention, a liquid crystal display device is particularly preferable. The liquid crystal display device is described in, for example, “Next-generation liquid crystal display technology (edited by Tatsuo Uchida, published by Kogyo Kenkyukai 199)”. The liquid crystal display device to which the present invention can be applied is not particularly limited, and can be applied to various types of liquid crystal display devices described in, for example, the “next generation liquid crystal display technology”. Among these, the present invention is particularly effective for a color TFT liquid crystal display device. A color TFT liquid crystal display device is described in, for example, “Color TFT liquid crystal display (issued in 1996 by Kyoritsu Publishing Co., Ltd.)”. Furthermore, the present invention can be applied to a liquid crystal display device with a wide viewing angle such as a lateral electric field drive method such as IPS and a pixel division method such as MVA. These methods are described, for example, on page 43 of “EL, PDP, LCD display technology and the latest trends in the market (issued by Toray Research Center, Research and Research Division 2001)”.
[0129] 液晶表示装置は、カラーフィルタ以外に、電極基板、偏光フィルム、位相差フィルム 、ノ ックライト、スぺーサ、視野角保障フィルムなど様々な部材カも構成される。本発 明のブラックマトリックスは、これらの公知の部材で構成される液晶表示装置に適用 することができる。これらの部材については、例えば「'94液晶ディスプレイ周辺材料' ケミカルズの巿場(島 健太郎 (株)シーエムシー 1994年発行)」、「2003液晶関 連市場の現状と将来展望 (下巻)(表 良吉 (株)富士キメラ総研 2003年発行)」に 記載されている。  In addition to the color filter, the liquid crystal display device includes various members such as an electrode substrate, a polarizing film, a retardation film, a knock light, a spacer, and a viewing angle guarantee film. The black matrix of the present invention can be applied to a liquid crystal display device composed of these known members. For example, “'94 Liquid Crystal Display Peripheral Materials' Chemicals” (Kentaro Shima, CMC Co., Ltd., 1994) ”and“ 2003 Current Status and Future Prospects of Liquid Crystal Related Markets (Part 2) ”(Yoshiyoshi Table) "Fuji Chimera Research Institute Co., Ltd., published in 2003)".
[0130] [対象用途]  [0130] [Target use]
本発明のカラーフィルタは、テレビ、パーソナルコンピュータ、液晶プロジェクター、 ゲーム機、携帯電話などの携帯端末、デジタルカメラ、カーナビなどの用途に、特に 制限なく適用できる。  The color filter of the present invention can be applied to applications such as televisions, personal computers, liquid crystal projectors, game machines, mobile terminals such as mobile phones, digital cameras, car navigation systems, and the like without any particular limitation.
(実施例)  (Example)
[0131] 以下に実施例を挙げて本発明を更に具体的に説明する。以下の実施例に示す材 料、試薬、割合、機器、操作等は、本発明の範囲カゝら逸脱しない限り適宜変更するこ とができる。従って、本発明の範囲は以下に示す具体例に限定されるものではない。 なお、以下の実施例において、特に断りのない限り、「%」および「部」は「質量%」お よび「質量部」を表し、分子量とは重量平均分子量のことを示す。 [0131] The present invention will be described more specifically with reference to the following examples. The materials, reagents, ratios, equipment, operations, and the like shown in the following examples can be appropriately changed without departing from the scope of the present invention. Therefore, the scope of the present invention is not limited to the specific examples shown below. In the following examples, unless otherwise specified, “%” and “part” represent “% by mass” and “part by mass”, and the molecular weight represents the weight average molecular weight.
[0132] [濃色組成物の調製]  [0132] [Preparation of dark color composition]
濃色組成物 K1は以下の手順によって調製される。すなわちまず、表 1に記載の量 の K顔料分散物 1及びプロピレングリコールモノメチルエーテルアセテート(MMPG AC、ダイセル化学工業 (株)製 (以下も同じメーカーの素材を使用する) )をはかり取 り、温度 24°C (± 2°C)で混合して 150RPM10分間攪拌する。次いで、表 1に記載の 量のメチルェチルケトン、バインダー 2、ハイドロキノンモノメチルエーテル、 DPHA液 、 2, 4 ビス(トリクロロメチル) 6— [4'— (N, N ジェトキシカルボ-ルメチル)アミ ノ 3'—ブロモフエニル]—s トリァジン、及び界面活性剤 1をは力り取り、温度 25°C (± 2°C)でこの順に添カ卩して、温度 40°C (± 2°C)、 150RPMで 30分間攪拌する。 表 1に記載の量は質量部であり、詳しくは以下の組成となって!/、る。  The dark color composition K1 is prepared by the following procedure. That is, first, K pigment dispersion 1 and propylene glycol monomethyl ether acetate (MMPG AC, manufactured by Daicel Chemical Industries, Ltd. (hereinafter also using the same manufacturer's materials)) in the amounts shown in Table 1 are weighed and the temperature Mix at 24 ° C (± 2 ° C) and stir at 150 RPM for 10 minutes. Next, the amounts of methyl ethyl ketone, binder 2, hydroquinone monomethyl ether, DPHA solution, 2,4 bis (trichloromethyl) 6- [4 '-(N, N ethoxycarboromethyl) amino in the amounts shown in Table 1 3′—Bromophenyl] —s Triazine and Surfactant 1 are removed, and added in this order at a temperature of 25 ° C. (± 2 ° C.) to obtain a temperature of 40 ° C. (± 2 ° C.). Stir at 150 RPM for 30 minutes. The amounts shown in Table 1 are parts by mass, and more specifically, the composition is as follows!
[0133] <K顔料分散物 1 >、  [0133] <K pigment dispersion 1>,
•カーボンブラック(デグッサ社製 Nipex35) 13. 1%  • Carbon black (Negex35, Degussa) 13. 1%
,分散剤(下記化合物 1) 0. 65%  , Dispersant (Compound 1 below) 0.65%
[0134] [化 2]  [0134] [Chemical 2]
Figure imgf000038_0001
化合物 1
Figure imgf000038_0001
Compound 1
[0135] 'ポリマー(ベンジルメタタリレート Zメタクリル酸 =72Z28モル比 のランダム共重合物、分子量 3. 7万) 6. 72% [0135] 'Polymer (benzyl metatalylate Z methacrylic acid = 72Z28 molar ratio Random copolymer, molecular weight 37,000) 6. 72%
'プロピレングリコールモノメチルエーテルアセテート 79. 53%  'Propylene glycol monomethyl ether acetate 79. 53%
[0136] <バインダー 2 >  [0136] <Binder 2>
'ポリマー(ベンジルメタタリレート/メタクリル酸 =78/22モル比  'Polymer (benzyl methacrylate / methacrylic acid = 78/22 molar ratio
のランダム共重合物、分子量 3. 8万) 27%  Random copolymer, molecular weight 38,000) 27%
'プロピレングリコールモノメチルエーテルアセテート 73%  'Propylene glycol monomethyl ether acetate 73%
[0137] <DPHA液 >  [0137] <DPHA solution>
.ジペンタエリスリトールへキサアタリレート  Dipentaerythritol hexaatalylate
(重合禁止剤 MEHQ 500ppm含有、 日本化薬 (株)製、商品名: KAYARAD DP HA) 76%  (Polymerization inhibitor MEHQ 500ppm, Nippon Kayaku Co., Ltd., trade name: KAYARAD DP HA) 76%
•プロピレングリコールモノメチルエーテルアセテート 24%  Propylene glycol monomethyl ether acetate 24%
[0138] <界面活性剤 1> [Surfactant 1]
,下記構造物 1 30%  , The following structure 1 30%
•メチルェチルケトン 70%  • Methyl ethyl ketone 70%
[0139] [化 3] 構造物 1  [0139] [Chemical 3] Structure 1
Figure imgf000039_0001
Figure imgf000039_0001
(n = 6、 x = 55 y = 5、  (n = 6, x = 55 y = 5,
Mw=33940, Mw/M n = 2. 55  Mw = 33940, Mw / M n = 2.55
PO:プロピレンオキサイド、 EO:エチレンオキサイド)  (PO: propylene oxide, EO: ethylene oxide)
[0140] [表 1] 漠色組成物 K1 [0140] [Table 1] Vague color composition K1
K顔料分散物 1  K pigment dispersion 1
25  twenty five
(カーポンプラック)  (Car pump rack)
プロピレングリコールモノメチルエーテルアセテート 8.0 メチルェチルケトン 53 バインダー 2 9.1 ハイドロキノンモノメチルエーテル 0.002  Propylene glycol monomethyl ether acetate 8.0 Methyl ethyl ketone 53 Binder 2 9.1 Hydroquinone monomethyl ether 0.002
DPHA液 4.2  DPHA solution 4.2
2, 4一ビス(トリクロロメチル)一 6— [4'一(N, N—ジエトキシカ  2, 4 One bis (trichloromethyl) one 6- [4 'one (N, N-diethoxyca
ルポニルメチル)アミノー 3'—ブロモフエニル]一 s— 0.16  Luponylmethyl) amino-3'-bromophenyl] s-0.16
トリアジン  Triazine
界面活性割 1 0.044  Surface activity percent 1 0.044
(質量部)  (Mass)
[0141] [実施例 1] [0141] [Example 1]
(濃色離画壁の形成)  (Formation of dark color separation wall)
無アルカリガラス基板を、 UV洗浄装置で洗浄後、洗浄剤を用いてブラシ洗浄し、 更に超純水で超音波洗浄した。基板を 120°Cで 3分間熱処理を行い、表面状態を安 定化させた。  The alkali-free glass substrate was cleaned with a UV cleaning device, brushed with a cleaning agent, and then ultrasonically cleaned with ultrapure water. The substrate was heat treated at 120 ° C for 3 minutes to stabilize the surface state.
基板を冷却し、 23°Cに温調後、スリット状ノズルを有するガラス基板用コーター (ェ フ.エー.エス.アジア社製、商品名: MH— 1600)を用いて、上述のように調製した 濃色組成物 K1を塗布した。引き続き VCD (真空乾燥装置、東京応化工業社製)で 3 0秒間、溶媒の一部を乾燥して塗布層の流動性を無くし、その後、 120°Cで 3分間プ リベータして膜厚 2 μ mの濃色組成物層 K1を得た。  After cooling the substrate and adjusting the temperature to 23 ° C, it was prepared as described above using a glass substrate coater (manufactured by FAS Asia Co., Ltd., trade name: MH-1600) with a slit nozzle. The dark color composition K1 was applied. Subsequently, VCD (vacuum drying equipment, manufactured by Tokyo Ohka Kogyo Co., Ltd.) was used to dry part of the solvent for 30 seconds to eliminate the fluidity of the coating layer. m dark color composition layer K1 was obtained.
超高圧水銀灯を有するプロキシミティー型露光機(日立ハイテク電子エンジニアリン グ株式会社製)で、基板とマスク (画像パターンを有す石英露光マスク)を垂直に立て た状態で、露光マスク面と濃色感光層 K1の間の距離を 200 mに設定し、窒素雰 囲気下、露光量 300mjZcm2でパターン露光した。 With a proximity-type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) with an ultra-high pressure mercury lamp, with the substrate and mask (quartz exposure mask with image pattern) standing vertically, the exposure mask surface and dark color The distance between the photosensitive layers K1 was set to 200 m, and pattern exposure was performed at an exposure amount of 300 mjZcm 2 in a nitrogen atmosphere.
[0142] 次に、シャワーノズルを用いて純水を噴霧し、濃色組成物層 K1の表面を均一に湿 らせた。その後、 KOH系現像液 (0. 04質量%KOH水溶液)にて 23°Cで 80秒、フラ ットノズル圧力 0. 04MPaでシャワー現像し、パターユング画像を得た。引き続き、超 純水を、超高圧洗浄ノズルにて 9. 8MPaの圧力で噴射して残渣除去を行った。その 後、大気下にてゥシォ電機 (株)製、型番: UVL— 8000— Nの超高圧水銀灯を有す る露光機で、露光量 2500miZcm2にて上面からポスト露光を行い、光学濃度 3. 9 の濃色離画壁を得た。露光量は次のようにして調整した。すなわち、基板上に (株) オーク製作所製の光量計 (UV— 350)を載せ、露光装置に送り、露光マスクと測定 装置との距離が 10cmのときの露光量を、表 2に記載の所定の露光量になるよう調整 した。 [0142] Next, pure water was sprayed using a shower nozzle to uniformly wet the surface of the dark color composition layer K1. After that, shower development was performed with a KOH developer (0.04 mass% KOH aqueous solution) at 23 ° C. for 80 seconds and a flat nozzle pressure of 0.04 MPa to obtain a patterning image. Continue to super Residue was removed by spraying pure water with an ultra-high pressure washing nozzle at a pressure of 9.8 MPa. After that, post exposure was performed from the top with an exposure dose of 2500 miZcm 2 using an exposure machine with an ultra-high pressure mercury lamp manufactured by Usio Electric Co., Ltd., model number: UVL-8000-N, and an optical density of 3. 9 dark color separation walls were obtained. The exposure amount was adjusted as follows. That is, a light meter (UV-350) manufactured by Oak Manufacturing Co., Ltd. is placed on the substrate, sent to the exposure apparatus, and the exposure dose when the distance between the exposure mask and the measurement apparatus is 10 cm The exposure was adjusted to
[0143] 〔プラズマ撥水化処理〕  [Plasma water repellency treatment]
濃色離画壁を形成した基板に、力ソードカップリング方式平行平板型プラズマ処理 装置を用いて、以下の条件にてプラズマ撥水化処理を行った。  Plasma water repellency treatment was performed on the substrate on which the dark color separation wall was formed using a force sword coupling type parallel plate type plasma treatment apparatus under the following conditions.
使用ガス: CF  Gas used: CF
4  Four
ガス流量: 80sccm  Gas flow rate: 80sccm
圧力: 40Pa  Pressure: 40Pa
RFパワー: 50W  RF power: 50W
処理時間: 30sec  Processing time: 30sec
[0144] 一画素用着色インクの調製 [0144] Preparation of colored ink for one pixel
下記の成分のうち、先ず、顔料、高分子分散剤及び溶剤を混合し、 3本ロールとビ ーズミルを用いて顔料分散液を得た。この顔料分散液をディソルバー等で十分攪拌 しながら、その他の材料を少量ずつ添加し、赤色 (R)画素用着色インク組成物を調 製した。  Of the following components, first, a pigment, a polymer dispersant, and a solvent were mixed, and a pigment dispersion was obtained using a three roll and bead mill. While sufficiently stirring this pigment dispersion with a dissolver or the like, other materials were added little by little to prepare a colored ink composition for red (R) pixels.
〈赤色画素用着色インクの組成〉  <Composition of colored ink for red pixel>
•顔料 (C. I.ビグメントレッド 254) 5部  • Pigment (C.I. Pigment Red 254) 5 parts
•高分子分散剤 (AVECIA社製ソルスパース 24000) 1部  • Polymer dispersant (AVECIA Solsperse 24000) 1 part
'バインダー(ベンジルメタタリレート/メタクリル酸 = 72/28モル比  'Binder (benzyl methacrylate / methacrylic acid = 72/28 molar ratio
のランダム共重合物、分子量 3. 7万) 3部  Random copolymer, molecular weight 37,000) 3 parts
•第一エポキシ榭脂 (ノボラック型エポキシ榭脂、  • 1st epoxy resin (Novolac type epoxy resin,
油化シェル社製ェピコート 154) 2部  Yuka Shell Epicoat 154) 2 parts
•第二エポキシ榭脂 (ネオペンチルダリコールジグリシジルエーテル) 5部 ,硬化剤(トリメリット酸) 4部 • Second epoxy resin (neopentyldaricol diglycidyl ether) 5 parts , Curing agent (trimellitic acid) 4 parts
.溶剤: 3 エトキシプロピオン酸ェチル 80部  . Solvent: 3 parts of ethyl ethoxypropionate 80 parts
[0145] 上記糸且成中の C. I.ビグメントレッド 254に代えて C. I.ビグメントグリーン 36を同量 用いたほかは赤色画素部着色インク組成物の場合と同様にして、緑色 (G)画素用着 色インク組成物を調製した。  [0145] In the same manner as in the case of the colored ink composition of the red pixel portion, the same amount of CI pigment green 36 was used instead of CI pigment red 254 in the above thread formation, and the green (G) pixel wear A color ink composition was prepared.
上記組成中の C. I.ビグメントレッド 254に代えて C. I.ビグメントブルー 15 : 6を同 量用いたほかは赤色画素用着色インク組成物の場合と同様にして、青色 (B)画素用 着色インク組成物を調製した。  In the same manner as the colored ink composition for red pixels, except that the same amount of CI pigment blue 15: 6 was used instead of CI pigment red 254 in the above composition, a colored ink composition for blue (B) pixels Was prepared.
[0146] 次に、上記の G、 Bの画素用着色インクを用いて、上記で得られたカラーフィル タ基板の濃色離画壁で区分された領域内(凸部が囲まれた凹部)に、インクジェット 方式の記録装置を用いて、所望の濃度になるまでインク組成物の吐出を行い、 R、 G 、 Bのパターン力もなるカラーフィルタを作製した。画像着色後のカラーフィルタを 23 0°Cオーブン中で 30分ベータし、ブラックマトリックス、各画素ともに完全に硬化させ た。  [0146] Next, using the above-described colored inks for G and B pixels, within the area separated by the dark color separation wall of the color filter substrate obtained above (concave part surrounded by the convex part) In addition, an ink composition was ejected to a desired density using an ink jet recording apparatus, and a color filter having R, G, and B pattern powers was produced. The image-colored color filter was beta-treated in a 230 ° C oven for 30 minutes to completely cure the black matrix and each pixel.
[0147] 上記方法により得たカラーフィルタ基板の R画素、 G画素、及び B画素並びにブラッ クマトリクスの上に更に、 ITO (Indium Tin Oxide)の透明電極をスパッタリングに より形成した。別途、対向基板としてガラス基板を用意し、カラーフィルタ基板の透明 電極上、及び対向基板上に、それぞれ PVAモード用にパターユングを施した。  A transparent electrode of ITO (Indium Tin Oxide) was further formed by sputtering on the R pixel, G pixel, B pixel and black matrix of the color filter substrate obtained by the above method. Separately, a glass substrate was prepared as a counter substrate, and patterning was performed for the PVA mode on the transparent electrode of the color filter substrate and on the counter substrate, respectively.
[0148] 前記 ITOの透明電極上の濃色離画壁の上部に相当する部分にフォトスぺーサを 設け、その上に更に、ポリイミドよりなる配向膜を設けた。  [0148] A photospacer was provided in a portion corresponding to the upper part of the dark color separation wall on the ITO transparent electrode, and an alignment film made of polyimide was further provided thereon.
その後、カラーフィルタの画素群を取り囲むように周囲に設けられたブラックマトリツ タス外枠に相当する位置にエポキシ榭脂のシール剤を印刷し、それと共に、 PVAモ ード用液晶を滴下し、対向基板と貼り合わせた後、貼り合わされた基板を熱処理して シール剤を硬化させた。このようにして得た液晶セルの両面に、(株)サンリッツ製の 偏光板 HLC2— 2518を貼り付けた。次いで、冷陰極管のバックライトを構成し、前記 偏光板が設けられた液晶セルの背面となる側に配置し、液晶表示装置とした。  After that, an epoxy resin sealant is printed at a position corresponding to the outer periphery of the black matrix provided around the pixel group of the color filter, and at the same time, a liquid crystal for PVA mode is dropped. After bonding with the counter substrate, the bonded substrate was heat-treated to cure the sealant. A polarizing plate HLC2-2518 made by Sanritz Co., Ltd. was attached to both surfaces of the liquid crystal cell thus obtained. Next, a backlight of a cold cathode tube was constructed and placed on the side of the back surface of the liquid crystal cell provided with the polarizing plate to obtain a liquid crystal display device.
[0149] [実施例 2] [Example 2]
実施例 1の濃色離画壁の形成において、ポスト露光の条件を表 2に記載の通り変更 したこと以外は実施例 1と同様にして、カラーフィルタ及び液晶表示装置を作製した。 In the formation of the dark separation wall in Example 1, the post-exposure conditions were changed as shown in Table 2. A color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that.
[0150] [実施例 3]  [0150] [Example 3]
<濃色離画壁の形成 >  <Formation of dark color separation wall>
(濃色感光性転写材料 K1の作製)  (Production of dark photosensitive transfer material K1)
厚さ 75 μ mのポリエチレンテレフタレートフィルム仮支持体の上に、スリット状ノズル を用いて、下記処方 HIからなる熱可塑性榭脂層用塗布液を塗布、乾燥させた。次 に、下記処方 P1からなる中間層用塗布液を塗布、乾燥させた。更に、前記濃色組成 物 K1を塗布、乾燥させた。このようにして、仮支持体の上に乾燥膜厚が 14. の 熱可塑性榭脂層と、乾燥膜厚が 1. の中間層と、乾燥膜厚が 2 mの濃色組成 物層とを設け、最後に保護フィルム (厚さ 12 mポリプロピレンフィルム)を圧着した。 こうして、仮支持体と熱可塑性榭脂層と中間層 (酸素遮断膜)と濃色組成物層とが 一体となった濃色感光性転写材料を作製した。この濃色感光性転写材料のサンプル 名を K1とした。  On a 75 μm-thick polyethylene terephthalate film temporary support, using a slit nozzle, a coating solution for a thermoplastic resin layer having the following formulation HI was applied and dried. Next, an intermediate layer coating solution having the following formulation P1 was applied and dried. Further, the dark color composition K1 was applied and dried. In this way, a thermoplastic resin layer having a dry film thickness of 14., an intermediate layer having a dry film thickness of 1. and a dark colored composition layer having a dry film thickness of 2 m are formed on the temporary support. Finally, a protective film (12 m thick polypropylene film) was pressure-bonded. Thus, a dark photosensitive transfer material was produced in which the temporary support, the thermoplastic resin layer, the intermediate layer (oxygen barrier film), and the dark composition layer were integrated. The sample name of this dark color photosensitive transfer material is K1.
[0151] <熱可塑性榭脂層用塗布液:処方 HI >  [0151] <Coating solution for thermoplastic resin layer: Formula HI>
•メタノーノレ 11. 1部  • methanol
•プロピレングリコールモノメチルエーテルアセテート 6. 36部 • Propylene glycol monomethyl ether acetate 6.36 parts
•メチルェチルケトン 52. 4部 • Methyl ethyl ketone 52. 4 parts
•メチルメタタリレート /2—ェチルへキシルアタリレート/ベンジルメタタリレート/メタ クリル酸共重合体 (共重合組成比(モル比) =55Zll. 7/4. 5/28. 8、分子量 = 10万、 Tg 70。 5. 83部  • Methyl methacrylate / 2--ethylhexyl acrylate / benzyl methacrylate / methacrylic acid copolymer (copolymerization composition ratio (molar ratio) = 55Zll. 7/4. 5/28. 8, molecular weight = 10 Ten thousand, Tg 70. 5. 83 parts
•スチレン Zアクリル酸共重合体 (共重合組成比(モル比) =63Z37、平均分子量 = 1万、 Tg 100。 13. 6部  • Styrene Z acrylic acid copolymer (copolymerization composition ratio (molar ratio) = 63Z37, average molecular weight = 10,000, Tg 100. 13. 6 parts
•2, 2—ビス [4— (メタクリロキシポリエトキシ)フエ-ル]プロパン (新中村ィ匕学工業( 株)製) 9. 1部  • 2, 2-bis [4- (methacryloxypolyethoxy) phenol] propane (manufactured by Shin-Nakamura Engineering Co., Ltd.) 9. 1 part
•界面活性剤 1 0. 54部  • Surfactant 1 0.54 parts
[0152] く中間層用塗布液:処方 Pl >  [0152] Coating solution for intermediate layer: Formulation Pl>
• PVA205 (ポリビュルアルコール、 (株)クラレ製、  • PVA205 (Polybulol alcohol, manufactured by Kuraray Co., Ltd.,
酸化度 = 88%、重合度 550) 32. 2部 •ポリビ-ノレピロリドン(アイエスピ一'ジャパン社製、 K- 30) 14. 9部 (Oxidation degree = 88%, polymerization degree 550) 32.2 parts • Polyvinylolpyrrolidone (Apis' Japan, K-30) 14. 9 parts
'蒸留水 524部  'Distilled water 524 parts
•メタノーノレ 429咅  • Methanore 429 咅
[0153] 無アルカリガラス基板を、 25°Cに調整したガラス洗浄剤液をシャワーにより 20秒間 吹き付けながらナイロン毛を有する回転ブラシで洗浄し、純水シャワー洗浄した。そ の後、シランカップリング液 (N— β (アミノエチノレ) γ—ァミノプロピルトリメトキシシラ ン 0. 3質量%水溶液、商品名: ΚΒΜ603、信越ィ匕学工業 (株)製)をシャワーにより 2 0秒間吹き付け、純水シャワー洗浄した。この基板を基板予備加熱装置で 100°C2分 加熱した。  [0153] The alkali-free glass substrate was washed with a rotating brush having nylon bristles while spraying a glass detergent solution adjusted to 25 ° C for 20 seconds with a shower, and washed with pure water. Then, a silane coupling solution (N-β (aminoethinole) γ-aminopropyltrimethoxysilane 0.3% by mass aqueous solution, trade name: ΚΒΜ603, manufactured by Shin-Etsu Chemical Co., Ltd.) was showered 2 Sprayed for 0 seconds and washed with pure water shower. This substrate was heated at 100 ° C. for 2 minutes by a substrate preheating apparatus.
得られたシランカップリング処理ガラス基板に、上記の製法にて作製された濃色感 光性転写材料 K1からカバーフィルムを除去し、除去後に露出した濃色組成物層の 表面と前記シランカップリング処理ガラス基板の表面とが接するように重ね合わせ、ラ ミネータ (株式会社日立インダストリィズ製 (LamicII型))を用いて、前記 100°Cで 2 分間加熱した基板に、ゴムローラー温度 130°C、線圧 100NZcm、搬送速度 2. 2m Z分でラミネートした。続いてポリエチレンテレフタレートの仮支持体を、熱可塑性榭 脂層との界面で剥離し、仮支持体を除去した。仮支持体を剥離後、超高圧水銀灯を 有するプロキシミティー型露光機 (日立ハイテク電子エンジニアリング株式会社製)で 、基板とマスク(画像パターンを有する石英露光マスク)を垂直に立てた状態で、露光 マスク面と該濃色感光性榭脂組成物層の間の距離を 200 mに設定し、露光量 70 mj/cm2でパターン露光した。 The cover film is removed from the dark color light-sensitive transfer material K1 produced by the above production method on the obtained silane coupling treated glass substrate, and the surface of the dark color composition layer exposed after the removal and the silane coupling Laminate (Hitachi Industries Co., Ltd. (Lamic II type)) using a laminator (Hitachi Industries (LamicII type)) and heated at 100 ° C for 2 minutes, rubber roller temperature 130 ° C, Lamination was performed at a linear pressure of 100 NZcm and a conveyance speed of 2.2 mZ. Subsequently, the polyethylene terephthalate temporary support was peeled off at the interface with the thermoplastic resin layer to remove the temporary support. After peeling off the temporary support, the exposure mask with the substrate and mask (quartz exposure mask with image pattern) standing vertically with a proximity type exposure machine (manufactured by Hitachi High-Tech Electronics Engineering Co., Ltd.) having an ultra-high pressure mercury lamp. The distance between the surface and the dark color photosensitive resin composition layer was set to 200 m, and pattern exposure was performed at an exposure amount of 70 mj / cm 2 .
[0154] 次に、トリエタノールアミン系現像液(トリエタノールァミン 30質量0 /0含有、商品名: T — PD2、富士写真フィルム株式会社製を、純水で 12倍 (T—PD2を 1質量部と純水 を 11質量部の割合で混合)に希釈した液)を 30°C50秒、フラットノズル圧力 0. 04M Paでシャワー現像し熱可塑性榭脂層と中間層を除去した。引き続き、この基板上面 にエアを吹きかけて液切りした後、純水をシャワーにより 10秒間吹き付け、純水シャ ヮー洗浄し、エアを吹きかけて基板上の液だまりを減らした。 [0154] Next, triethanol amine developing solution (triethanolamine § Min 30 mass 0/0 containing, trade name: T - PD2, manufactured by Fuji Photo Film Co., 12 times with pure water (T-PD2 1 The solution obtained by diluting 11 parts by mass of pure water with 11 parts by mass) was developed with shower at 30 ° C. for 50 seconds and a flat nozzle pressure of 0.04 MPa to remove the thermoplastic resin layer and the intermediate layer. Subsequently, air was blown onto the upper surface of the substrate to drain the liquid, and then pure water was sprayed for 10 seconds in a shower to clean the pure water, and air was blown to reduce the liquid pool on the substrate.
[0155] 引き続き、炭酸 Na系現像液 (0. 38モル Zリットルの炭酸水素ナトリウム、 0. 47モ ル Zリットルの炭酸ナトリウム、 5質量0 /0のジブチルナフタレンスルホン酸ナトリウム、ァ ユオン界面活性剤、消泡剤、安定剤含有、商品名: T CD1、富士写真フィルム株 式会社製を純水で 5倍に希釈した液)を用い、 29°Cで 30秒、コーン型ノズル圧力 0. 15MPaでシャワー現像し、濃色組成物層を現像してパターユング画像を得た。 [0155] Continuing, carbonate Na based developer (sodium bicarbonate 0.38 mol Z l, sodium carbonate 0.47 molar Z l, dibutyl sodium naphthalene sulfonate 5 wt 0/0, § Containing a Yuon surfactant, antifoaming agent, stabilizer, product name: TCD1, Fuji Photo Film Co., Ltd. diluted 5 times with pure water) at 29 ° C for 30 seconds, cone type nozzle Shower development was performed at a pressure of 0.15 MPa, and the dark color composition layer was developed to obtain a patterning image.
[0156] 引き続き洗浄剤(商品名: T SD3 富士写真フィルム株式会社製)を純水で 10倍 に希釈した液を、 33°Cで 20秒、コーン型ノズル圧力 0. 02MPaでシャワーにより吹き かけ、更にナイロン毛を有する回転ブラシにより形成された画像を擦って残渣除去を 行い、濃色離画壁を得た。  [0156] Subsequently, a detergent (trade name: T SD3 manufactured by Fuji Photo Film Co., Ltd.) diluted 10-fold with pure water was sprayed in a shower at 33 ° C for 20 seconds with a cone-type nozzle pressure of 0.02 MPa. Further, the image formed by the rotating brush having nylon bristles was rubbed to remove the residue to obtain a dark color separation wall.
その後、該基板に対して両面力もゥシォ電機 (株)製、型番: UVL— 8000— Nの超 高圧水銀灯を有する露光機で 3000mjZcm2の露光量で上面力もポスト露光を行つ た。その後、 220°C、 15分間で熱処理を行った。 Thereafter, the substrate was also subjected to post-exposure with an exposure force of 3000 mjZcm 2 using an exposure machine having an ultrahigh pressure mercury lamp manufactured by Usio Electric Co., Ltd., model number: UVL-8000-N. Thereafter, heat treatment was performed at 220 ° C. for 15 minutes.
[0157] 次いで、下記の方法により撥水処理を行った。  [0157] Next, water repellent treatment was performed by the following method.
[塗布法による撥水化処理]  [Water repellent treatment by coating method]
濃色離画壁の形成された基板上に、予めフッ素系界面活性剤 (住友 3M社製、フロ ラード FC— 430)が 0. 5質量% (感光性榭脂の固形分に対して)内添してあるアル力 リ可溶の感光性榭脂(へキストシヤパン社製、ポジ型フォトレジスト AZP4210)を膜厚 2 /z mとなるようにスリット状ノズルを用いて塗布し、温風循環乾燥機中で 90°C、 30分 間の熱処理を行った。  0.5% by mass (based on the solid content of the photosensitive resin) containing a fluorosurfactant (Sumitomo 3M, Florad FC-430) in advance on the substrate with the dark color separation wall Attached to the Al force resoluble soluble photosensitive resin (Hexist Shapan Co., Ltd., positive photoresist AZP4210) is applied using a slit nozzle to a film thickness of 2 / zm, and a hot air circulating dryer Heat treatment was performed at 90 ° C for 30 minutes.
次いで、 110nj/cm2 (38mW/cm2 X 2. 9秒)の露光量で、濃色離画壁の形成 された基板の裏面から濃色離画壁を介して露光し、無機アルカリ現像液 (へキストジ ャパン社製、 AZ400Kデベロッパー、 1 :4)中に 80秒間浸漬摇動した後、純水中で 3 0〜60秒間リンス処理を行い、濃色離画壁上に撥水性榭脂層を形成することにより、 画素内外に表面エネルギー差を設けた。撥水性榭脂層形成後の画素内外の表面ェ ネルギ一は、画素外 (榭脂層上)が 10〜15dyneZcm、画素内(ガラス基板上)は 55 dyne/ cm前後であった。 Then, an exposure amount of 110nj / cm 2 (38mW / cm 2 X 2. 9 seconds), exposed through a dark Hanarega wall from the back surface of the substrate formed with the dark Hanarega wall, inorganic alkaline developing solution (Hexist Japan Co., Ltd., AZ400K Developer, 1: 4) Immerse and shake for 80 seconds, then rinse in pure water for 30 to 60 seconds, and water-repellent grease layer on dark color separation wall By forming the surface energy difference between the inside and outside of the pixel. The surface energy inside and outside the pixel after the formation of the water-repellent resin layer was 10 to 15 dyneZcm outside the pixel (on the resin layer) and around 55 dyne / cm inside the pixel (on the glass substrate).
[0158] 次いで、実施例 1と同様に R、 G、 B画素を着色したのち、そのカラーフィルタを 230 °Cオーブン中で 30分ベータすることで、ブラックマトリックス、各画素共に完全に硬化 させた。  [0158] Next, after coloring the R, G, and B pixels in the same manner as in Example 1, the color filter was beta-cured in an oven at 230 ° C for 30 minutes to completely cure both the black matrix and each pixel. .
[0159] こうして得られたカラーフィルタの各画素を構成するインクは、濃色離画壁間隙にぴ つたり収まり、にじみ、はみ出し、隣接画素との混色および白抜けなどの欠陥となる不 具合は見つ力もな力つた。上記方法より得たカラーフィルタ基板の R画素、 G画素、 及び B画素並びにブラックマトリクスの上に、更に、 ITO (Indium Tin Oxide)の透 明電極をスパッタリングにより形成した。 [0159] The ink constituting each pixel of the color filter obtained in this way is inserted into the dark color separation wall gap. Defects such as hang-ups, blurs, protrusions, color mixing with adjacent pixels, and white spots were also powerful. A transparent electrode of ITO (Indium Tin Oxide) was further formed by sputtering on the R pixel, G pixel, B pixel and black matrix of the color filter substrate obtained by the above method.
[0160] [実施例 4] [0160] [Example 4]
実施例 3の濃色離画壁の形成において、ポスト露光の条件を表 2に記載の通り変更 したこと以外は実施例 1と同様にして、カラーフィルタ及び液晶表示装置を作製した。  A color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that the post-exposure conditions were changed as shown in Table 2 in the formation of the dark color separation wall in Example 3.
[0161] [実施例 5] [0161] [Example 5]
実施例 3の濃色離画壁の形成にお ヽて、濃色感光性転写材料 K1を下記の濃色感 光性転写材料 K2に変更したこと、及びポスト露光の条件を表 2に記載の条件(上面 3 OOOnj/cm2 + 下面 3000mj/cm2)に変更したこと以外は実施例 3と同様にして 、濃色離画壁を作製した。 In the formation of the dark color separation wall in Example 3, the dark color photosensitive transfer material K1 was changed to the following dark color photosensitive transfer material K2, and the conditions for the post exposure are shown in Table 2. A dark color separation wall was prepared in the same manner as in Example 3 except that the conditions were changed (upper surface 3 OOOnj / cm 2 + lower surface 3000 mj / cm 2 ).
[0162] [濃色感光性転写材料 K2の作製] [0162] [Production of dark photosensitive transfer material K2]
厚さ 16 μ mのポリエチレンテレフタレートフィルム(ティジンデュポンフィルム株式会 社製 テトロン G2)仮支持体の上に、スリット状ノズルを用いて、上記濃色組成物 K 1を塗布、乾燥させた。このようにして、仮支持体の上に乾燥膜厚が 2. O /z mの濃色 感光性榭脂層を設け、最後に保護フィルム (厚さ 12 111ポリプロピレンフィルム)を圧 しプ  The dark color composition K1 was applied onto a temporary support of 16 μm thick polyethylene terephthalate film (Tetron G2 manufactured by Teijin DuPont Films Ltd.) using a slit nozzle and dried. In this way, a dark photosensitive resin layer having a dry film thickness of 2. O / z m is provided on the temporary support, and finally a protective film (thickness: 12111 polypropylene film) is pressed.
こうして仮支持体と濃色感光性榭脂層とがー体となった濃色感光性転写材料を作 製した。この濃色感光性転写材料のサンプル名を K2とした。  In this way, a dark photosensitive transfer material in which the temporary support and the dark photosensitive resin layer became a solid body was produced. The sample name of this dark color photosensitive transfer material was K2.
[0163] [比較例 1] [0163] [Comparative Example 1]
実施例 1のパターン露光工程において、窒素雰囲気下での露光を行う代わりに、大 気下でパターン露光を行ったこと以外は実施例 1と同様にして、カラーフィルタ及び 液晶表示装置を作製した。  A color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that in the pattern exposure step of Example 1, instead of performing exposure in a nitrogen atmosphere, pattern exposure was performed in the atmosphere.
[0164] [比較例 2] [0164] [Comparative Example 2]
実施例 1の濃色離画壁の形成において、ポスト露光の条件を表 2に記載の通り変更 したこと以外は実施例 1と同様にして、カラーフィルタ及び液晶表示装置を作製した。  A color filter and a liquid crystal display device were produced in the same manner as in Example 1 except that the post-exposure conditions were changed as shown in Table 2 in the formation of the dark color separation wall in Example 1.
[0165] [形状の確認] 実施例、比較例で得られた濃色離画壁付き基板を、基板ごと垂直にカットして断面 を露出させ、顕微鏡等で直接観察した。濃色離画壁の基板からの高さが最も高い点 での濃色離画壁の高さを hとしたときの 0. 8hの位置における基板と平行な線を L、 L [0165] [Confirm shape] The substrates with dark color separation walls obtained in the examples and comparative examples were cut vertically with the substrates to expose the cross section, and directly observed with a microscope or the like. Lines parallel to the substrate at the position of 0.8 h, where h is the height of the dark color separation wall at the highest height of the dark color separation wall from the substrate, L, L
1 と濃色離画壁の接点における接線を L、 hの位置における基板と平行な線を Lとし L is the tangent at the contact point between 1 and the dark separation wall, and L is the line parallel to the substrate at h.
1 2 3 たとき、 Lとしの交点力も濃色離画壁までの距離を dと定義した。測定結果を表 2に 1 2 3, the intersection force with L is also defined as the distance to the dark separation wall d. Table 2 shows the measurement results.
2 3  twenty three
示す。  Show.
[0166] [ITO抵抗の測定]  [0166] [Measurement of ITO resistance]
実施例、比較例で得られた ITO付カラーフィルタの ITO抵抗を、三菱化学 (株)製「 口レスタ」;四探針法でシート抵抗を測定した。測定結果を表 2に示す。  The ITO resistance of the color filter with ITO obtained in the examples and comparative examples was measured by “Mouth Resta” manufactured by Mitsubishi Chemical Corporation; sheet resistance by a four-probe method. Table 2 shows the measurement results.
[0167] [混色の評価] [0167] [Evaluation of color mixture]
基板と厚さ方向画素形成側から光学顕微鏡で観察し、混色について評価した。光 学素子内の任意の 100画素について観察し、混色の有無を確認し、以下の評価基 準に従って評価した。評価結果を表 2に示す。  The color mixture was evaluated by observing with an optical microscope from the substrate and the pixel forming side in the thickness direction. Any 100 pixels in the optical element were observed to confirm the presence or absence of color mixing, and evaluated according to the following evaluation criteria. Table 2 shows the evaluation results.
[評価基準]  [Evaluation criteria]
A:混色がまったくない。  A: There is no color mixing at all.
B :混色が 5個未満あり。  B: There are less than 5 color combinations.
C:混色が 5個以上 10個未満。  C: The color mixture is 5 or more and less than 10.
D :混色が 10個以上。  D: 10 or more colors are mixed.
[0168] [表 2] ポスト露光 評価 濃色離隔壁 h d [0168] [Table 2] Post-exposure evaluation Dark color separation wall h d
貧酸素雰囲^ 撥水処理  Anoxic atmosphere ^ Water repellent treatment
法 露光 d/h  Act Exposure d / h
形成方 量  Forming amount
露光面  Exposure surface
(mJ/cm2) 混色 実施例 1 塗布法 N2雰囲気 プラズマ 2500 上面 1.6 0,059 0.037 12 B 実施例 2 塗布法 N2雰囲気 プラズマ 2900 上面 1.7 0.062 0.036 13 B 実施例 3 酸素遮断躧に (mJ / cm 2 ) Color mixing Example 1 Application method N 2 atmosphere Plasma 2500 Top 1.6 0,059 0.037 12 B Example 2 Application method N 2 atmosphere Plasma 2900 Top 1.7 0.062 0.036 13 B Example 3 Oxygen barrier
転写法 塗布 2600 上面 1.5 0,05 0.033 11 B よる酸素遮断  Transfer method Application 2600 Upper surface 1.5 0,05 0.033 11 B Oxygen blockage
実施例 4 酸素遮断層に  Example 4 For oxygen barrier layer
転写法 塗布 3000  Transfer method Application 3000
よる酸素遮断 上面 1.5 0.049 0.033 10 A 実施例 5 仮支持体に  Oxygen block by upper surface 1.5 0.049 0.033 10 A Example 5 Temporary support
転写法 塗布 3000 闹-面 1.5 0.043 0.029 11 A よる酸素遮断  Transfer method Application 3000 surface-side 1.5 0.043 0.029 11 A Oxygen block
比較例 1 塗布法 駿素遮断なし 塗布 2500 上面 1 ,7 0.14 0.082 24 D 比較例 2 酸索遮断層に  Comparative example 1 Application method No silicon blocking Application 2500 Top surface 1,7 0.14 0.082 24 D Comparative example 2
転写法 塗布 2400 上面 1.7 0.059 0.035 13 C よる酸素遮断 [0169] 表 2より、実施例 1〜5においては、濃色離画壁の形状に関するパラメータ dZhを 0 . 04以下とすることができた。実施例 1〜5においては、打滴されたインクは濃色離画 壁を乗り越えにくくなり、画素の混色がまったくないか、あっても少なく、良好な結果が 得られた。これに対し、パターン露光を貧酸素雰囲気下で行っていない比較例 1で は、前記 dZhが 0. 04を超えており、混色が見られた。ポスト露光の露光量を 2400 mjZcm2とした比較例 2では、若干ではあったが混色が確認された。 Transfer method Application 2400 Upper surface 1.7 0.059 0.035 13 C Oxygen shut off by 13 C [0169] From Table 2, in Examples 1 to 5, the parameter dZh related to the shape of the dark color separation wall could be set to 0.04 or less. In Examples 1 to 5, the ejected ink was difficult to get over the dark color separation wall, and there was little or no color mixing of the pixels, and good results were obtained. On the other hand, in Comparative Example 1 where pattern exposure was not performed in an oxygen-poor atmosphere, the dZh exceeded 0.04, and color mixing was observed. In Comparative Example 2 in which the amount of post-exposure was 2400 mjZcm 2 , a slight color mixture was confirmed.
符号の説明  Explanation of symbols
[0170] 1 濃色離画壁 [0170] 1 Dark color separation wall
2 基板  2 Board
11 画素領域  11 pixel area
12 濃色離画壁  12 Dark color separation wall
13 基板  13 Board

Claims

請求の範囲 [1] 基板上に、互いに異なる色を呈する 2以上の画素群を有し、前記画素群を構成す る各画素は互いに濃色離画壁により離画されて 、るカラーフィルタの製造方法であ つて、 前記濃色離画壁を形成する工程が、下記(1)〜(3)の工程を含むことを特徴とする カラーフィルタの製造方法。 Claims [1] A color filter having two or more pixel groups exhibiting different colors on a substrate and each pixel constituting the pixel group being separated from each other by a dark color separation wall. It is a manufacturing method, Comprising: The process of forming the said deep color separation wall includes the process of following (1)-(3), The manufacturing method of the color filter characterized by the above-mentioned.
(1)濃色組成物からなる層を貧酸素雰囲気下にてパターン露光する工程 (パターン 露光工程)  (1) Process of pattern exposure of dark color composition layer in an oxygen-poor atmosphere (pattern exposure process)
(2)パターン露光後、現像して濃色離画壁パターンを形成する工程 (現像工程) (2) Process of developing after pattern exposure to form dark color separation wall pattern (Development process)
(3)該濃色離画壁パターンに 2500mjZcm2以上の露光量の光を照射して光硬化さ せる工程 (ポスト露光工程) (3) A process of irradiating the dark color separation wall pattern with light with an exposure amount of 2500 mjZcm 2 or more (post-exposure process)
[2] 前記貧酸素雰囲気下が、不活性ガス雰囲気下、減圧下、及び酸素を遮断しうる保 護層下力 選択される少なくとも 1であることを特徴とする請求項 1項に記載のカラー フィルタの製造方法。  [2] The collar according to claim 1, wherein the poor oxygen atmosphere is at least one selected from an inert gas atmosphere, a reduced pressure, and a protective layer lowering force capable of blocking oxygen. A method for manufacturing a filter.
[3] 前記現像工程における現像条件が、現像液として、アルカリ性物質の濃度が 0. 05 〜20質量%の希薄水溶液を用い、且つ、現像温度が 26°C〜35°Cであり、且つ、現 像時間が 20〜: LOO秒の条件であることを特徴とする請求項 1に記載のカラーフィルタ の製造方法。  [3] The development conditions in the development step are as follows: a dilute aqueous solution having an alkaline substance concentration of 0.05 to 20% by mass as a developer, a development temperature of 26 ° C. to 35 ° C., and 2. The method for producing a color filter according to claim 1, wherein the image time is from 20 to LOO seconds.
[4] 前記濃色離画壁上面の少なくとも一部が撥水性を帯びた状態で、該濃色離画壁間 に各画素を形成することを特徴とする請求項 1に記載のカラーフィルタの製造方法。  [4] The color filter according to claim 1, wherein each pixel is formed between the dark color separation walls in a state in which at least a part of the upper surface of the dark color separation wall has water repellency. Production method.
[5] 前記濃色離画壁の少なくとも一部が撥水性を帯びた状態にする手段が、プラズマ 処理であることを特徴とする請求項 4に記載のカラーフィルタの製造方法。  [5] The method for producing a color filter according to [4], wherein the means for bringing at least a part of the dark color separation wall into a water-repellent state is a plasma treatment.
[6] 濃色離画壁間に各画素を形成する方法が、各画素を形成する着色液体組成物を インクジェット法により濃色離画壁間に侵入させる方法であることを特徴とする請求項 [6] The method of forming each pixel between the dark color separation walls is a method of causing the colored liquid composition forming each pixel to enter between the dark color separation walls by an inkjet method.
1に記載のカラーフィルタの製造方法。 1. A method for producing a color filter according to 1.
[7] 仮支持体上に、少なくとも、濃色組成物力 なる層を有してなる感光性転写材料を 基板上に転写し濃色離画壁の形成を行うことを特徴とする請求項 1に記載のカラーフ ィルタの製造方法。 [7] The method according to claim 1, wherein a photosensitive color transfer material having at least a layer having a dark color composition strength is transferred onto a temporary support to form a dark color separation wall. The manufacturing method of the color filter as described.
[8] 請求項 1に記載のカラーフィルタの製造方法により製造されるカラーフィルタ。 [8] A color filter manufactured by the method for manufacturing a color filter according to [1].
[9] 基板上に形成された濃色離画壁の断面形状が、該濃色離画壁の基板からの高さ が最も高い点における基板からの高さを h、基板から 0. 8hの位置における基板と平 行な線を L、 Lと濃色離画壁が接する点における接線を L、 hの位置における基板と [9] The cross-sectional shape of the dark color separation wall formed on the substrate is such that the height from the substrate at the point where the height of the dark color separation wall from the substrate is the highest is 0.8 h from the substrate. The line parallel to the substrate at the position is L, and the tangent line at the point where L and the dark color separation wall are in contact with the substrate at the position of L and h.
1 1 2  1 1 2
平行な線を Lとしたとき、 Lとしの交点からの濃色離画壁までの距離で規定される値  When the parallel line is L, the value specified by the distance from the intersection with L to the dark color separation wall
3 2 3  3 2 3
dを hで除した値が 0. 04以下であることを特徴とする請求項 8に記載のカラーフィル タ。  9. The color filter according to claim 8, wherein a value obtained by dividing d by h is 0.04 or less.
[10] 請求項 8に記載のカラーフィルタを有することを特徴とする表示装置。  10. A display device comprising the color filter according to claim 8.
PCT/JP2006/325158 2006-02-13 2006-12-18 Method for fabricating color filter, color filter, and display device having such color filter WO2007094119A1 (en)

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