WO2007058565A1 - Gyroscope vibrant micromecanique - Google Patents

Gyroscope vibrant micromecanique Download PDF

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Publication number
WO2007058565A1
WO2007058565A1 PCT/RU2006/000558 RU2006000558W WO2007058565A1 WO 2007058565 A1 WO2007058565 A1 WO 2007058565A1 RU 2006000558 W RU2006000558 W RU 2006000558W WO 2007058565 A1 WO2007058565 A1 WO 2007058565A1
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WO
WIPO (PCT)
Prior art keywords
base
disk
elastic elements
segments
inertial
Prior art date
Application number
PCT/RU2006/000558
Other languages
English (en)
Russian (ru)
Inventor
Leonid Petrovich Nesenyuk
Mikhail Illarionovich Evstifeev
Vladimir Grigorevich Peshekhonov
Aleksandr Alekseevich Untilov
Original Assignee
Federalnoe Gosudarstvennoe Unitarnoe Predpriyatie 'tsentralny Nauchno-Issledovatelsky Institut'elektropribor'
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Federalnoe Gosudarstvennoe Unitarnoe Predpriyatie 'tsentralny Nauchno-Issledovatelsky Institut'elektropribor' filed Critical Federalnoe Gosudarstvennoe Unitarnoe Predpriyatie 'tsentralny Nauchno-Issledovatelsky Institut'elektropribor'
Publication of WO2007058565A1 publication Critical patent/WO2007058565A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Definitions

  • the invention relates to the field of precision instrumentation and can be used to create means for measuring the angular velocity of the base, for example, vibration gyroscopes.
  • MHG micromechanical vibrational gyroscopes
  • the principle of action of the MHG is as follows.
  • the inertial disk which has an elastic connection with the base, performs primary angular oscillations (angular vibrations) created by the excitation system around an axis perpendicular to the plane of the disk.
  • the greatest sensitivity of the device is achieved by ensuring the maximum amplitude of the primary oscillations and by combining the natural frequencies of the primary and secondary disk vibrations in the suspension.
  • the main problems in the excitation of primary oscillations are to ensure the stability of these oscillations under various operating conditions, stabilize their amplitude and reduce the non-linear dependence of the amplitude of the oscillations on the excitation frequency.
  • the MVG design is known (Lestev AM, Popova I.V., Pyatyshev EH, etc. Features of combining volumetric micromechanics and LSI in measuring systems, Materials of the X St. Russia International Conference on Integrated Systems, St. Russia, 2003, p.217-225 ), the sensitive element of which contains a base and an inertial disk fixed to the base using an internal elastic suspension.
  • the inertial disk is made of a silicon wafer of the same thickness.
  • An elastic suspension consists of four straight elastic elements having equal length and width, the height of the elements is equal to the thickness of the disk.
  • the elastic elements are located radially in the plane of the disk at equal angles to sensitivity axis.
  • the inner part of the elastic elements is fixed to the base, and the outer part is connected to the inertial disk.
  • the inertial disk makes primary oscillations about an axis perpendicular to the plane of the disk.
  • the oscillations are excited by an electrostatic oscillation excitation system consisting of excitation motors and angular position sensors.
  • the measurement of the output oscillations of the inertial disk is carried out by a capacitive pick-up system consisting of electrodes located on the base under the inertial disk.
  • the disadvantages of the design include the fact that the elastic elements of the suspension are fixedly mounted both to the base and to the inertial disk.
  • the elastic suspension elements when performing primary vibrations, the elastic suspension elements, in addition to bending deformations, are subjected to tensile deformations arising from the impossibility of displacing the supports in the radial direction.
  • the presence of tensile forces leads to the fact that the characteristic of the restoring elastic force along the axis of primary vibrations becomes nonlinear and is described by a cubic parabola.
  • a feature of systems with nonlinear restoring force is the emergence of several stable periodic modes in which different oscillation amplitudes correspond to one frequency value and the possibility of the transition of an oscillatory system from one mode to another. These properties of a nonlinear system cause such phenomena as instability of primary oscillations and instability of the oscillation amplitude due to mismatch of the amplitude-frequency characteristics with increasing and decreasing frequency of the excitation moment.
  • the next problem when developing an elastic suspension is the increased sensitivity to vibrations due to the uneven rigidity of the structure.
  • the unequal rigidity of the design is expressed in the fact that the direction of the forced linear oscillations of the inertial disk does not coincide with the direction of vibration of the base. This leads to the appearance of secondary angular oscillations of the inertial disk at the vibration frequency and at the natural frequency of the secondary oscillations, which causes a significant error of the device.
  • the vibration frequency of the base coincides with half the frequency of the secondary vibrations, the resonant amplification of the secondary vibrations and a malfunction of the device occur.
  • An elastic suspension consists of two groups of elements, four elastic elements in each group.
  • the elastic elements of each group have an equal length and width, the height of the elastic elements is equal to the thickness of the disk.
  • the elastic elements in each group are a broken line consisting of three segments with rounding at the points of their connection to each other, the inner and outer segments are located radially to the disk at equal angles to the axis of sensitivity.
  • the outer segments of one group of elastic elements are connected directly to the inertial disk.
  • the outer segments of the second group of elastic elements are connected to the movable electrode of the primary vibration excitation engine, which is attached to the inertial disk by an elastic element.
  • the disadvantages of the prototype design are the low sensitivity to the measured angular velocity and the limited area of use, due to the following circumstances:
  • the design of the inertial disk due to the presence of a large cutout for the excitation motor is essentially divided into two parts having an elastic connection through the elastic elements of the suspension.
  • the inertial disk becomes non-rigid and its parts, playing the role of the moving electrodes of the capacitive pick-up system, can oscillate with different frequencies, which leads to a significant error in the MHG;
  • the radial arrangement of the internal and external segments of the elastic elements does not allow designing to change the natural frequencies of linear vibrations and to achieve equal rigidity of the structure, while maintaining a strong sensitivity of the MHG to linear vibrations of the base;
  • the technical result of the invention is the creation of a new MVG, in which increased sensitivity and enhanced gyro performance.
  • a micromechanical vibration gyroscope contains a base, an inertial disk having the same thickness and fixed to the base using an internal elastic suspension consisting of four elastic elements of equal length and rectangular cross section, having the shape of a broken line constructed of three segments with rounding at the points where the segments join each other friend, base and inertial disk, and located in the plane of the disk in its Central hole so that the inner and outer segments of the elastic elements are under GOVERNMENTAL angles to the axis of sensitivity of the device, electrostatic excitation oscillation drive system consisting of motors and angular position of the excitation probes; a system of capacitive removal of output oscillations, consisting of electrodes located on the base under an inertial disk.
  • the elastic suspension is two pairs of elastic elements that are located in the central hole of the disk so that the inner and outer segments of the elastic elements are pairwise at equal angles to the sensitivity axis of the device.
  • the internal or external segments of the elastic elements are directed not radially to the disk.
  • the fracture of the broken lines of the elastic elements in each pair is directed in different directions, creating, thus, the mirror symmetry of the elastic suspension.
  • the stretching of the elastic elements is compensated by their bending at the junction of the segments, which significantly reduces the non-linearity of the suspension.
  • Equality of frequencies of primary and secondary vibrations to ensure maximum sensitivity is achieved by changing the angular location of the elastic elements relative to the axis of sensitivity.
  • the location of the segments of the elastic elements not radially to the disk affects the linear frequencies of the structure, allowing you to create an equally rigid elastic suspension.
  • the proposed design of MVG reduces the dimensions of the device, increases the rigidity of the suspension of the inertial disk, reduces the possibility of its deformation during manufacture and operation, can effectively reduce the nonlinearity of primary angular oscillations to achieve maximum sensitivity of the MVG and achieve equal rigidity of the suspension to reduce the effect of vibration of the base on the error of the MVG.
  • FIG. 1 shows a top view of an inertial disk with outer segments of elastic elements not radial to the disk
  • FIG. 2 shows a side view of an inertial disk
  • FIG. 3 shows a top view of an inertial disk with internal segments of elastic elements not radial to the disk
  • in FIG. 4 shows a top view of an inertial disk with internal and external segments of elastic elements not radial to the disk
  • in FIG. 5 shows a top view of an inertial disk with segments of elastic elements of equal length.
  • Figure 1-5 shows the projection connection MVG, which have the following notation: the axis of the primary oscillations 1, the axis of sensitivity 2, the axis of the secondary oscillations 3.
  • a micromechanical vibration gyroscope consists of: - a base 4, which is used as a supporting surface for attaching an inertial disk 5 and on which electrodes of a capacitive output oscillation removal system 9 are located;
  • - inertial disk 5 which is attached to the base 4 using an elastic suspension 6
  • - internal elastic suspension b which consists of four elastic elements of equal length and rectangular cross section, having the shape of a broken line constructed of three segments with a rounding at the points of connection of the segments to each other, base 4 and inertial disk 5, located at equal angles to the axis of sensitivity of the device 2 and attached by internal segments to the base 4, and external segments to the disk 5;
  • Micromechanical vibration gyroscope works as follows.
  • the inertial disk 5 with an internal elastic suspension 6 is mounted on the base 4.
  • An alternating voltage is applied to the excitation motors 7, mounted on the base 4, with a frequency equal to the natural frequency of the primary oscillations, which ensures the inertia of the disk 5 around the axis 1.
  • the angle sensors 8 also fixed on the base 4, are used to determine the amplitude of the oscillations and together with the excitation motors 7 are a system of electrostatic excitation of the primary oscillations of the inertial ska 5.
  • Coriolis forces arise, causing the inertial disk 5 to oscillate relative to the axis of the output vibrations 3.
  • the amplitude of the output vibrations is determined by the system of capacitive removal of output vibrations 9 s electrodes based on 4.
  • the presented design of the elastic suspension 6 consists of four elastic elements in the form of a broken line constructed of three segments with a rounding at the points of connection of the segments to each other, the base 4 and the inertial disk 5.
  • the elastic elements have an equal length and width, their height is equal to the thickness of the disk 5.
  • Elastic elements make up two groups that mirror each other. Inside each group, the kink of the broken line of the elastic elements is directed in different directions. Internal (Fig. 3), external (Fig. 1) or internal and external (Fig. 4) segments of elastic elements can be located not radially to the disk, which allows you to adjust the natural frequencies of linear oscillations of the elastic suspension and create an equally rigid structure, which solves the problem of increasing the sensitivity of the device.
  • the present invention will find application in the creation of means for measuring the angular velocity of the base - vibration gyroscopes with enhanced performance and sensitivity compared to the existing level of technology.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

La présente invention relève du domaine de la fabrication d'instruments de précision, et peut servir à créer des moyens permettant de mesurer la vitesse angulaire du mouvement d'une base, tels que des gyroscopes vibratoires. Un gyroscope selon l'invention comprend une base, et un disque d'inertie, qui possède une épaisseur uniforme et est relié à la base à l'aide d'une suspension élastique interne, laquelle est constituée de quatre éléments élastiques de longueur égale et de section rectangulaire, qui ont la forme d'une ligne brisée constituée de trois segments présentant un arrondi aux endroits où ils sont reliés les uns aux autres, à la base et au disque d'inertie, et sont disposés dans le plan du disque, dans le trou central de ce dernier, de manière que les segments internes et externes des éléments élastiques forment des angles égaux avec l'axe de sensibilité de l'appareil, ce qui permet d'obtenir une structure présentant une rigidité uniforme. Le gyroscope selon l'invention comprend également un système destiné à exciter par voie électrostatique les vibrations du disque, ledit système étant constitué de moteurs d'excitation et de capteurs de position angulaire, et un système de détection capacitive des vibrations de sortie, qui est constitué d'électrodes disposées sur la base en dessous du disque à inertie.
PCT/RU2006/000558 2005-11-15 2006-10-23 Gyroscope vibrant micromecanique WO2007058565A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU2005135894/28A RU2296302C1 (ru) 2005-11-15 2005-11-15 Микромеханический вибрационный гироскоп
RU2005135894 2005-11-15

Publications (1)

Publication Number Publication Date
WO2007058565A1 true WO2007058565A1 (fr) 2007-05-24

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RU (1) RU2296302C1 (fr)
WO (1) WO2007058565A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4235098A1 (fr) * 2022-02-24 2023-08-30 Kabushiki Kaisha Toshiba Capteur

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2535248C1 (ru) * 2013-08-21 2014-12-10 Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Микромеханический гироскоп

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0771965A (ja) * 1993-07-06 1995-03-17 Tokimec Inc ジャイロ装置
RU18768U1 (ru) * 2001-03-12 2001-07-10 Центральный научно-исследовательский институт "Электроприбор" Микромеханический вибрационный гироскоп
US6626039B1 (en) * 1999-09-17 2003-09-30 Millisensor Systems And Actuators, Inc. Electrically decoupled silicon gyroscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0771965A (ja) * 1993-07-06 1995-03-17 Tokimec Inc ジャイロ装置
US6626039B1 (en) * 1999-09-17 2003-09-30 Millisensor Systems And Actuators, Inc. Electrically decoupled silicon gyroscope
RU18768U1 (ru) * 2001-03-12 2001-07-10 Центральный научно-исследовательский институт "Электроприбор" Микромеханический вибрационный гироскоп

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BURTSEV V.A. ET AL.: "Osobennosti kompleksirovaniya obemnov mikromekhaniki i BIS v ismeritelnykh sistemakh. X", ST.PETERSBURGAYA MEZDUNARODNAYA KONFERENTSIYA PO INTEGRIROVANNYM NAVIGATSIONNYM SISTEMAM. ST.PETERSBURG, 26 May 2003 (2003-05-26) - 28 May 2003 (2003-05-28), pages 219, XP008081618 *
POPOVA I.V. ET AL.: "Mikromekhanicheskie datchiki i sistemy, prakticheskie rezultaty i perspektivy razvitiya. XII", ST. PETERSBURSKAYA MEZHDUNARODNAYA KONFERENTSIYA PO INTEGRIROVANNYM NAVIGATSIONNYM SISTEMAM. ST. PETERSBURG, 23 May 2005 (2005-05-23) - 25 May 2005 (2005-05-25), pages 263, XP008081617 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4235098A1 (fr) * 2022-02-24 2023-08-30 Kabushiki Kaisha Toshiba Capteur

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