WO2007037392A1 - 燃料電池単位セル、燃料電池単位セルアレイ、燃料電池モジュール及び燃料電池システム - Google Patents
燃料電池単位セル、燃料電池単位セルアレイ、燃料電池モジュール及び燃料電池システム Download PDFInfo
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- WO2007037392A1 WO2007037392A1 PCT/JP2006/319502 JP2006319502W WO2007037392A1 WO 2007037392 A1 WO2007037392 A1 WO 2007037392A1 JP 2006319502 W JP2006319502 W JP 2006319502W WO 2007037392 A1 WO2007037392 A1 WO 2007037392A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/8605—Porous electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/8647—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites
- H01M4/8657—Inert electrodes with catalytic activity, e.g. for fuel cells consisting of more than one material, e.g. consisting of composites layered
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/90—Selection of catalytic material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0271—Sealing or supporting means around electrodes, matrices or membranes
- H01M8/0276—Sealing means characterised by their form
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/02—Details
- H01M8/0289—Means for holding the electrolyte
- H01M8/0293—Matrices for immobilising electrolyte solutions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/08—Fuel cells with aqueous electrolytes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/24—Grouping of fuel cells, e.g. stacking of fuel cells
- H01M8/241—Grouping of fuel cells, e.g. stacking of fuel cells with solid or matrix-supported electrolytes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/1009—Fuel cells with solid electrolytes with one of the reactants being liquid, solid or liquid-charged
- H01M8/1011—Direct alcohol fuel cells [DAFC], e.g. direct methanol fuel cells [DMFC]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
Definitions
- Fuel cell unit cell fuel cell unit cell array, fuel cell module and fuel cell system
- the present invention relates to a fuel cell unit cell, a fuel cell module, and a fuel cell system having a pin structure or a pn structure. More specifically, the catalytic action of a metal-based catalyst or an oxide-based catalyst containing platinum and ruthenium.
- the present invention relates to a fuel cell unit cell suitable for a small fuel cell, a fuel cell unit cell array, a fuel cell module, and a fuel cell system.
- fuel gas is mainly used as a fuel, and gas containing hydrogen such as hydrogen gas and methane gas or liquid such as methanol is used, and fuel gas or liquid fuel and oxygen gas in the air are used.
- the electric energy is generated by reacting with.
- the emissions at that time are mainly water, and since harmful emissions such as carbon dioxide and carbon monoxide are extremely small, they have attracted particular attention in recent years as an environmentally friendly energy generation means.
- fuel cells unlike engines and turbines, have the advantages of low noise generation and high efficiency, so they can be put to practical use as one of the promising energy generation means in the future. Active research and development is underway.
- liquid fuel such as methanol is used instead of fuel gas, and liquid oxidant containing hydrogen peroxide or the like is used instead of acidic gas such as air.
- Fuel cell applications are already widespread, and fuel cell vehicles and the like have already reached the point of practical use. Also, it can be applied to energy systems in facilities that require many heat sources and electric power such as air conditioning and hot water supply, applied to energy systems for general households, and used as a power source for mobile terminals such as mobile phones and laptop computers. Is considered.
- FIG. 14 is a diagram for explaining the principle of power generation by a fuel cell, and schematically showing the basic configuration and electrochemical reaction of a unit cell.
- FIG. 14 shows an example in which methanol is used as the fuel.
- the fuel cell includes an anode 101 and an acid.
- An element electrode (force sword) 103 is arranged to face each other, and an electrolyte layer 102 is interposed between the fuel electrode 101 and the oxygen electrode 103.
- H 2 O reacts and dissociates into hydrogen ions (H +) and electrons (e_), and carbon dioxide (CO 2)
- hydrogen ions can move and force electrons cannot move. Therefore, hydrogen ions diffuse through the electrolyte layer 102 and move to the oxygen electrode 103, and electrons move to the oxygen electrode 103 through the circuit 104 that connects the fuel electrode 101 and the oxygen electrode 103 to the outside.
- molten carbonate type there are several types of fuel cells, and there are a molten carbonate type, a solid polymer type, a phosphoric acid type, a solid oxide type, an alkaline aqueous solution type, etc., depending on the type of electrolyte.
- the molten carbonate type and the solid oxide type have high operating temperatures of 600 to 700 ° C and 800 to 1000 ° C, respectively.
- Other types generally have an operating temperature of about 200 ° C or less.
- the catalyst in addition to platinum, iridium, noradium, rhodium, ruthenium and alloys containing at least two of these, platinum and alloys thereof, titanic acid oxide, and the like may be used. It can. However, as a catalyst for fuel cells, platinum power S is the most excellent, so the fact is that platinum is mainly used.
- a fuel fluid or an oxygen fluid is passed through the fuel electrode 101 and the oxygen electrode 103, and the reaction of the formula (1) or (2) at these electrodes is promoted. Therefore, a porous carbon electrode is usually used. Furthermore, in the case of a fuel cell that operates at a low temperature, the catalyst has a structure in which fine particles of catalyst such as platinum are supported on the inner surface of the pores of the porous electrode. Thus, in promoting the reactions of the above formulas (1) and (2), a catalyst, in particular platinum that is excellent in its action, is an essential material.
- platinum is a noble metal and extremely expensive, and is therefore a major factor in increasing the price of fuel cells. Platinum is also poisoned by CO gas in the fuel fluid, which has a strong property of binding to CO gas, and CO gas generated by the acid-acid reaction at the fuel electrode. For this reason, platinum has the disadvantage that its function as a catalyst is significantly reduced when CO poisoning occurs.
- methanol, hydrogen gas, methane gas, etc. used in fuel cells are usually produced from natural gas hydrocarbons, so hydrogen gas and methane gas in particular contain a small amount of CO gas. .
- CO is formed between the methanol acid process. This intermediate CO is adsorbed on the surface of platinum and is extremely stable. Therefore, if platinum is used as a catalyst and methanol, hydrogen gas, etc. are used as fuel, the problem of platinum poisoning with CO cannot be avoided.
- a catalyst other than platinum the catalytic effect is inferior to that of platinum, so that the reaction rate at the fuel electrode and oxygen electrode is inferior to that of platinum.
- Patent Document 1 a fuel cell that does not use platinum as a catalyst has been proposed (for example, Patent Document 1).
- the fuel cell disclosed in Patent Document 1 includes a fuel electrode, an oxygen electrode, and an electrolyte layer between the fuel electrode and the oxygen electrode, and the fuel electrode is doped with a p-type impurity. It consists of
- hydrogen gas is decomposed into hydrogen radicals at the fuel electrode, and a reaction is caused to dissociate the hydrogen radicals into hydrogen ions and electrons. Since this reaction proceeds promptly, platinum is not required. That is, the compound semiconductor doped with p-type impurities plays a role of a catalyst for dissociating hydrogen gas into hydrogen ions and electrons.
- Patent Document 2 As a fuel cell using a semiconductor for an electrode, a fuel cell applying a configuration of a pn junction type semiconductor has been proposed (for example, Patent Document 2).
- the fuel cell disclosed in Patent Document 2 is a single chamber type in which the entire fuel cell is installed in a mixed gas atmosphere of fuel gas and oxygen-containing gas. Unlike the conventional double-chamber fuel cell as disclosed.
- the fuel cell disclosed in Patent Document 2 is composed of a p-type semiconductor layer in which carriers are holes, an n-type semiconductor layer in which carriers are electrons, and a pn mixed layer between them. It is porous enough to allow mixed gas to pass through.
- the mechanism of power generation can be considered as follows! Oxygen gas is adsorbed and polarized on the surface of the p-type semiconductor near the depletion layer (pn junction layer) sandwiched between the p-type semiconductor and n-type semiconductor, and at the same time, hydrogen gas is adsorbed on the surface of the n-type semiconductor. Polarization causes a positive charge on the surface of the p-type semiconductor and a negative charge on the surface of the n-type semiconductor.
- adsorbed hydrogen ions (H +) react with oxygen ions (0 2_ ) to produce water (HO),
- Methanol crossover is a phenomenon in which methanol supplied to the fuel electrode passes through an intermediate layer such as an electrolyte layer and moves to the oxygen electrode, which causes a reaction at the oxygen electrode that counteracts the power generation effect. To do.
- methanol crosses over from the fuel electrode (anode) to the oxygen electrode (force sword) via the electrolyte, and does not generate electricity by reaction with oxygen at the oxygen electrode. Generate heat. As a result, methanol loss occurs and the generated voltage of the fuel cell decreases. For example, in a force sword, a voltage drop of 100 mV to 140 mV occurs at a predetermined current density.
- Patent Documents 3 and 4 describe a method for suppressing methanol crossover force. It cannot be said that a practically sufficient effect has been obtained, and the methanol crossover problem is still solved. It can not be said.
- Another problem of the methanol fuel cell is that the anode needs to be activated in order to make the anode potential higher than that of the hydrogen fuel cell.
- more catalyst must be used on the electrode surface in order to improve the reaction rate.
- the cost of the fuel cell becomes high, which causes a problem that the cost must be reduced.
- the catalyst is formed on both surfaces of a solid electrolyte supported by, for example, a carbon powder. In this case, the effect of the catalyst cannot be exhibited efficiently.
- the surface area (two-dimensional surface area) is limited, it is difficult to reduce the size of a direct methanol fuel cell for low power. Thus, it is necessary to establish an effective utilization method of the catalyst so that the reaction rate can be improved and the power generation efficiency can be increased.
- One countermeasure is to increase the electrode surface area and reduce the amount of catalyst used in the electrode.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2004-319250
- Patent Document 2 JP 2004-199877
- Patent Document 3 U.S. Pat.No. 5,599,638
- Patent Document 4 U.S. Pat.No. 5,919,583
- the present invention is intended to solve the above-described problems, and can effectively exhibit the catalytic action of a metal-based catalyst or an oxide-based catalyst containing platinum, and the CO of platinum. It is an object of the present invention to provide a fuel cell unit cell, a fuel cell unit cell array, a fuel cell module, and a fuel cell system that can suppress poisoning and can be reduced in size and cost.
- a fuel cell unit cell (1) for solving the above problems includes a fuel electrode composed of a p-type semiconductor, an oxygen electrode composed of an n-type semiconductor, the fuel electrode, and the fuel electrode. It has a pin structure with an intermediate layer made of an intrinsic semiconductor interposed between the oxygen electrode and the fuel electrode.
- the fuel electrode is porous and fuel fluid permeable.
- Metal catalyst layer is shaped
- the oxygen electrode is porous and oxidative fluid permeable, a metal-based catalyst layer is formed on the pore inner surface of the porous portion, and the intermediate layer is porous and can hold the electrolyte solution,
- the fuel fluid has a property of allowing hydrogen ions generated at the fuel electrode to pass therethrough and preventing electrons from passing therethrough.
- a fuel fluid containing hydrogen is supplied to the surface of the fuel electrode, and an oxygen-containing fluid containing oxygen to the surface of the oxygen electrode. And a connecting terminal that is electrically connected to each of the fuel electrode and the oxygen electrode.
- the fuel cell unit cell (2) includes a fuel electrode composed of a p-type semiconductor, an oxygen electrode composed of an n-type semiconductor, and a gap between the fuel electrode and the oxygen electrode.
- the fuel electrode is porous and permeable to fuel fluid, and a metal-based catalyst layer is formed on the inner surface of the pores of the porous portion, and the oxygen electrode Is porous and oxidative fluid permeable, a metal-based catalyst layer is formed on the pore inner surface of the porous part, and the intermediate layer is formed on at least one side of the fuel electrode and the oxygen electrode, It is porous and can hold an electrolyte solution, has a property of allowing hydrogen ions generated at the fuel electrode to pass therethrough and preventing electrons from passing, and the fuel electrode and the oxygen electrode are formed on the surface on which the intermediate layer is formed.
- a fuel fluid containing hydrogen is supplied to the surface of the fuel electrode, and the surface of the oxygen electrode is Oxidizing fluid containing oxygen is arranged to be supplied, is characterized in that it comprises a electrically connected to connection terminals, respectively to the fuel electrode of the oxygen electrode to.
- the fuel cell unit cell (3) includes a fuel electrode having a pn junction region in which the fuel fluid supply surface side is composed of a p-type semiconductor layer and the other surface is composed of an n-type semiconductor layer, and an oxidation electrode.
- An oxygen electrode having a pn junction region composed of an n-type semiconductor layer on the supply surface side and a p-type semiconductor layer on the other surface; the n-type semiconductor layer of the fuel electrode; and the p-type semiconductor layer of the oxygen electrode And an electrolyte layer as an intermediate layer interposed therebetween, the fuel electrode is porous, and the P-type semiconductor layer in the fuel electrode is compared to the n-type semiconductor layer
- the metal catalyst layer is formed on the pore inner surface of the porous portion, the n-type semiconductor layer is impermeable to the fuel fluid, and the oxygen electrode is porous.
- the n-type semiconductor layer in the oxygen electrode is thicker than the p-type semiconductor layer and is an acidic fluid.
- An excessive resistance, the porous portion vacancies inner surface metal catalyst layer is formed of the intermediate layer comprises an electrolyte solution, have the property of transmitting the generated hydrogen ions in said anode
- a fuel fluid containing hydrogen is supplied to the surface of the fuel electrode, and an oxidizing fluid containing oxygen is supplied to the surface of the oxygen electrode, each of the fuel electrode and the oxygen electrode. It is characterized by having a connection terminal electrically connected to the.
- the fuel cell unit cell (4) includes at least one of the fuel electrode and the oxygen electrode in any one of the fuel cell unit cells (1) to (3). Is light transmissive! /
- the electrolyte of the intermediate layer is irradiated with light. It is characterized by being configured as follows.
- the fuel cell unit cell (6) is the catalyst in at least one of the fuel electrode and the oxygen electrode in any one of the fuel cell unit cells (1) to (3).
- a metal-based conductive layer is provided between the layer and the inner surface of the hole.
- the fuel cell unit cell (7) according to the present invention is characterized in that, in any one of the fuel cell unit cells (1) to (3), the fuel fluid is methanol or hydrogen gas. is doing.
- the fuel cell unit cell (8) includes the fuel cell unit cell (1) or (2
- the pore diameter of the porous portion having fuel fluid permeability in the fuel electrode and the radial force of the pore of the porous portion having oxidative fluid permeability in the oxygen electrode are on the order of S microns. It is characterized in that the pore diameter of the porous portion of the intermediate layer is nano-order.
- the fuel cell unit cell (9) is the above-mentioned fuel cell unit cell (3), wherein the pore diameter of the P-type semiconductor layer portion in the fuel electrode and the oxygen electrode
- the hole diameter of the n-type semiconductor layer portion is in the order of microns, and the hole diameter of the n-type semiconductor layer portion in the fuel electrode and the hole diameter of the p-type semiconductor layer portion in the oxygen electrode are nano-order. It is characterized by that.
- the fuel cell unit cell (10) includes a semiconductor that constitutes the fuel electrode, the oxygen electrode, and the intermediate layer in any one of the fuel cell unit cells (1) to (3).
- the material is any one of oxide semiconductors including silicon, germanium, and titanium oxide.
- the metal catalyst constituting the metal catalyst layer is platinum, It is characterized by being one of iridium, palladium, rhodium ruthenium and an alloy containing at least two of these, or titanate.
- the fuel cell unit cell (12) according to the present invention is characterized in that the electrolyte solution is acidic in any of the above fuel cell unit cells (1) to (3). As! /
- the fuel cell unit cell array (1) includes a plurality of the fuel cell unit cells (1) to (3) arranged in a plane and electrically Are connected in parallel and Z or in series, and the power generated by the plurality of fuel cell unit cells is collected and output. /
- the plurality of fuel cell unit cells of the fuel cell unit cells (1) to (3) include the fuel fluid supply means, the oxidizing agent. Layered via fluid supply means and light introduction means, electrically connected in series, and configured to output the added voltages of the plurality of fuel cell unit cells. As! /
- a fuel cell module includes the fuel cell unit cell array (1), a fuel fluid supply unit, and an oxidizing fluid supply unit, the fuel fluid supply unit and the oxidizing fluid supply unit.
- the fuel cell unit cell array is arranged between the fuel fluid supply unit and the oxidizing fluid supply unit so that fluid does not permeate.
- the fuel electrode of the fuel cell unit cell array includes the fuel electrode Facing the fuel fluid supply section, the oxygen electrode of the fuel cell unit cell array faces the acidic fluid supply section, the fuel fluid supply section comprising a fuel introduction section and a fluid discharge section, and
- the fluid supply section includes an oxidizing fluid introduction section and a fluid'water discharge section, and a wall section facing the fuel electrode and a wall surrounding Z or the oxidizing fluid supply section among the wall sections surrounding the fuel fluid supply section.
- the wall facing the oxygen electrode is And an output means configured to output power collected from the fuel cell unit cell array and made of a light transmissive material.
- a plurality of the fuel cell modules are integrally combined and connected so that the output of the output means force of each of the fuel cell modules is collected.
- a fuel cell output unit that outputs the generated electric power, and a DC-DC converter that is electrically connected to the fuel cell output unit.
- the micron order used in the present specification mainly means 1 ⁇ m or more and less than 1 mm.
- the nano-order mainly means lnm or more and less than 1 ⁇ m.
- the fuel fluid means a fluid fuel such as methanol or hydrogen gas
- the oxidizing fluid means a fluid acid substance such as oxygen gas, air or hydrogen peroxide solution. To do.
- the fuel cell unit cell basically has a pin or pn junction structure, and is between the p-type semiconductor layer and the n-type semiconductor layer.
- the electrolyte solution is located in These fuel cell unit cells do not necessarily need to be irradiated with light, but when irradiated with light, the catalytic action at the fuel electrode is caused by the holes generated by the photoelectric effect. As a result, the catalytic action at the oxygen electrode is remarkably activated by the electrons generated by. In other words, the oxidation reaction rate at the fuel electrode and the reduction reaction rate at the oxygen electrode are significantly increased.
- both the electrode and the electrolyte region can be formed on one silicon substrate, a compact, low-cost, high-engineered energy density fuel cell can be obtained. it can.
- the fuel electrode and the oxygen electrode includes a metal-based conductive layer between the inner surface of the pore and the catalyst layer, even if methanol is used as the fuel fluid, methanol Crossover can be almost prevented. Therefore, loss of methanol can be prevented and power generation efficiency can be improved.
- the fuel cell unit cell has the above-described features, the fuel cell unit cell according to the present invention makes use of these features to increase the output, cost, size, and length of the fuel cell. Excellent effects such as life extension can be obtained.
- the unit cell array is constituted by any one of the fuel cell unit cells (1) to (3).
- a fuel cell unit cell array having the features of the battery unit cells (1) to (3) can be obtained.
- the fuel cell module since the fuel cell module is constituted by the fuel cell unit cell array (1), any one of the fuel cell unit cells (1) to (3) and the fuel A fuel cell module having the features of the cell unit cell array (1) can be obtained.
- the fuel cell system since the fuel cell system is formed by the fuel cell module, any one of the fuel cell unit cells (1) to (3), the fuel cell unit A fuel cell system having the characteristics of the cell array (1) and the fuel cell module can be obtained. Furthermore, since the fuel cell system is equipped with a DC-DC converter, the output voltage required for the fuel cell system can be easily generated. Can be alive. In particular, since a small fuel cell system can be obtained, it is extremely suitable as a power source for portable telephones and personal computers.
- FIG. 1A is a perspective view schematically showing a basic configuration of a fuel cell unit cell according to a first embodiment of the present invention.
- FIG. 1B is a partially enlarged cross-sectional view schematically showing a configuration of a cut surface along the line IB—IB ′ shown in FIG. 1A.
- FIG. 2A is a perspective view schematically showing a basic configuration of a fuel cell unit cell according to a second embodiment of the present invention.
- FIG. 2B is a partially enlarged cross-sectional view schematically showing a configuration of a cut surface along the line ⁇ - ′ shown in FIG. 2A.
- FIG. 3B is a perspective view schematically showing a basic configuration of a fuel cell unit cell according to a third embodiment of the present invention.
- FIG. 3B A partially enlarged cross-sectional view schematically showing the configuration of the cut surface along the line ⁇ - ⁇ ′ shown in FIG. 3B.
- FIG. 4B is a schematic plan view showing an example of the distribution and shape of the vacancies in the fuel electrode.
- FIG. 4 (b) is a schematic plan view showing another example of the distribution and shape of the vacancies in the fuel electrode.
- FIG. 5 is a partially enlarged cross-sectional view schematically showing a region composed of micron-order holes and nano-order holes.
- FIG. 6 is a diagram for explaining a method for forming a porous portion having a predetermined pattern, and is a diagram showing a cross-sectional structure of the substrate in the process of pre-etching the substrate on which the porous portion is formed.
- FIG. 7 is a diagram for explaining a method for forming a porous portion having a predetermined pattern, and is a schematic cross-sectional view showing a method for further etching a substrate after pre-etching by an anodic etching method.
- FIG. 8 is a schematic perspective view showing an example of means for supplying fuel fluid and oxidizing fluid.
- FIG. 9 is a schematic perspective view showing another example of the supply means for the fuel fluid and the oxidizing fluid.
- FIG. 10A is a diagram schematically showing a unit cell array according to an embodiment of the present invention, and is a cross-sectional view showing a unit cell array in which unit cells are connected in parallel.
- FIG. 10B is a diagram schematically showing a unit cell array according to an embodiment of the present invention, and is a cross-sectional view showing a unit cell array in which unit cells are connected in series.
- FIG. 10C is a diagram schematically showing a unit cell array according to an embodiment of the present invention, and is a perspective view showing a unit cell array in which unit cells are connected vertically and horizontally.
- FIG. 11 is a cross-sectional view schematically showing a configuration of a unit cell array according to another embodiment of the present invention.
- FIG. 12A is a cross-sectional view schematically showing a fuel cell module according to an embodiment of the present invention.
- FIG. 12B is a cross-sectional view schematically showing a fuel cell module according to another embodiment of the present invention.
- FIG. 13 is a block diagram showing a configuration of a fuel cell system according to an embodiment of the present invention.
- FIG. 14 is a diagram for explaining the principle of power generation by a fuel cell, and schematically showing the basic configuration and electrochemical reaction of a unit cell.
- FIG. 1A is a perspective view schematically showing a basic configuration of a fuel cell unit cell (hereinafter, abbreviated as a unit cell) according to the first embodiment of the present invention.
- FIG. 1B is a partially enlarged cross-sectional view schematically showing the configuration of the cut surface along the line IB-IB shown in FIG. 1A.
- the unit cell 1 has a pin-type junction structure composed of three layers: a p-type semiconductor layer, an n-type semiconductor layer, and an i-type semiconductor layer (intrinsic semiconductor layer) positioned therebetween.
- the first layer is a fuel electrode 11 constituting an anode, and is composed of a p-type semiconductor layer doped with a p-type impurity element such as boron or aluminum.
- the second layer is an intermediate layer 12 that constitutes the electrolysis region, and is made of an intrinsic semiconductor layer that is doped with an impurity element!
- the third layer is an oxygen electrode 13 constituting a force sword, and is composed of an n-type semiconductor layer doped with an n-type impurity element such as phosphorus or arsenic.
- the fuel electrode 11, the intermediate layer 12, and the oxygen electrode 13 are preferably made of, for example, porous silicon.
- the fuel electrode 11 which is a p-type semiconductor layer and the oxygen electrode 13 which is an n-type semiconductor layer are provided with holes 15a and 15b, and the holes 15a and 15b are They are separated by walls 16a and 16b, respectively.
- Each of the fuel electrode 11 and the oxygen electrode 13 is permeable to a fuel fluid such as methanol and hydrogen gas, and an oxidizing fluid such as oxygen gas, air, and hydrogen peroxide solution. Fuel fluid and acidic fluid can enter 15a and 15b. Also, holes 19 are formed in the intermediate layer.
- the diameters of the holes 15 a and 15 b of the fuel electrode 11 and the oxygen electrode 13 are preferably larger than the diameter of the holes 19 of the intermediate layer 12.
- the former is in the micron order, for example, 20 / z m or less, preferably 4 to 8 / z m, and the latter is preferably in the nano order.
- the diameters of the holes 15a and 15b of the fuel electrode 11 and the oxygen electrode 13 and the diameter of the holes 19 of the intermediate layer 12 are almost equal. It may be an order.
- the “diameter” means the inner diameter of the hole.
- it means the inner average diameter.
- holes having different diameters exist it means the average diameter of those holes.
- the inner surfaces of the holes 15a and 15b of the fuel electrode 11 and the oxygen electrode 13 are coated with a catalyst such as platinum, ruthenium, or an alloy thereof. It is preferable that a conductive metal layer such as noradium, nickel, tantalum, or niobium is provided between the inner surfaces of the holes 15a and 15b and the catalyst layer.
- the fuel electrode 11 and the Z electrode or the oxygen electrode 13 are light transmissive. The light may reach the intermediate layer 12 through the fuel electrode 11 or the oxygen electrode 13. It is preferable. When the fuel electrode 11 and the oxygen electrode 13 are not light-transmitting, it is preferable to provide means such as an optical fiber for introducing light into the intermediate layer 12.
- the fuel electrode 11 and the oxygen electrode 13 are provided with connecting terminals (not shown) corresponding to connecting portions with the external circuit 14.
- the pores 19 of the intermediate layer 12 are impregnated with an electrolyte solution, and the electrolyte solution is held in the pores by a static force due to capillary action.
- the electrolyte solution include acids such as sulfuric acid solution (H 2 SO 4), phosphoric acid solution (H 3 PO 4), and triflic acid (trifluoromethanesulfonic acid).
- the electrolyte solution is not necessarily required to be an acidic solution such as an alkaline solution or water. This is because hydrogen ions can move from the fuel electrode 11 toward the oxygen electrode 13 even if the solution held in the intermediate layer 12 is an alkaline solution or water. Therefore, in this specification, the electrolyte solution includes an alkaline solution and water.
- Semiconductor materials for the fuel electrode 11, the intermediate layer 12, or the oxygen electrode 13 include single crystal silicon, polycrystalline silicon, silicon containing amorphous silicon, and group IV semiconductors such as single crystal germanium, gallium-arsenide, and indium.
- group IV semiconductors such as phosphorus, aluminum—gallium—arsenic, II-VI compound semiconductors such as cadmium sulfate, copper sulfide, titanium oxide, zinc oxide, nickel oxide, tin oxide, iron trioxide
- oxide-based semiconductors such as cobalt oxide, iron tetroxide, and copper oxide, and materials that can form a ⁇ -type semiconductor, ⁇ -type semiconductor, or intrinsic semiconductor, respectively, can be used.
- the materials used for the fuel electrode 11 and the oxygen electrode 13 are both porous and have properties (fluid permeability) through which fluids such as gas and liquid can pass.
- a porous material capable of forming an intrinsic semiconductor layer among the above semiconductor materials can be used.
- a material that is not doped with impurities such as silicon and germanium.
- the material used for the intermediate layer 12 has a property capable of holding the electrolyte solution or water by the capillary force of the pores.
- the thickness of the ⁇ -type semiconductor layer of the fuel electrode 11 and the ⁇ -type semiconductor layer of the oxygen electrode 13 is thicker than the intermediate layer 12 in the order of microns, particularly 200 to 500 ⁇ m, and the latter is 200 It is preferably not more than ⁇ m, particularly preferably not more than 80 ⁇ m.
- the catalyst used for the catalyst layer covering the inner surface of the pores of the fuel electrode 11 and the oxygen electrode 13 in addition to white gold, noble metals such as iridium, palladium, rhodium, ruthenium, or at least two of them are used. Alloys containing are suitable. In addition, titanium oxide can be used. Among them, platinum has an excellent catalytic action.
- the metal inner catalyst coating on the inner surface of the pores of the fuel electrode 11 and the oxygen electrode 13 can be performed by atomic layer growth, surface or ganometallic chemistry, electroplating, sputtering using plasma, CVD It can carry out by methods, such as vapor deposition by a method.
- the atomic layer growth method and the surface organometallic chemical method are suitable for the coating of the metal catalyst.
- the above catalyst containing titanium oxide titanium is referred to as a “metal catalyst”.
- the conductive metal layer is covered on the inner surfaces of the cavities 15a and 15b of the fuel electrode 11 and the oxygen electrode 13 by a method such as an atomic layer growth method, an electroplating method, or an electrodeposition method. be able to.
- FIG. 2A is a perspective view schematically showing a basic configuration of a unit cell according to the second embodiment of the present invention.
- FIG. 2B is a partially enlarged cross-sectional view schematically showing the configuration of the cut surface along the line ⁇ - ′ shown in FIG. 2A.
- the unit cell 2 shown in FIGS. 2 and 2 has a ⁇ -type junction structure, and is composed of three layers: a ⁇ -type semiconductor layer 21, a ⁇ -type semiconductor layer 23, and an intermediate layer 22 positioned therebetween.
- the vertical semiconductor layer which is the first layer, is the fuel electrode 21 constituting the anode, and is doped with a ⁇ -type impurity such as boron or aluminum.
- the second layer is an intermediate layer 22 constituting the electrolysis region.
- the third layer, the ⁇ -type semiconductor layer is an oxygen electrode 23 constituting a force sword and is doped with ⁇ -type impurity elements such as phosphorus and arsenic!
- the intermediate layer 22 includes an intermediate layer 22a formed on one surface side of the silicon substrate constituting the fuel electrode 21, and an intermediate layer 22b formed on one surface side of the silicon substrate constituting the oxygen electrode 23. ing.
- Such an intermediate layer 22 has an advantage that the unit cell 2 can be easily manufactured.
- the intermediate layer 22 may be formed on only one of the fuel electrode 21 and the oxygen electrode 23 instead of being formed on both surfaces. That is, you may comprise by either one of the intermediate
- the unit cell 2 is preferably formed by joining the intermediate layers 22a and 22b to face each other! /.
- the fuel electrode 21, the intermediate layer 22, and the oxygen electrode 23 are all made of porous silicon. Preferably it is. As shown in FIG. 2B, the fuel electrode 21 which is a p-type semiconductor layer and the oxygen electrode 23 which is an n-type semiconductor layer are formed with holes 25a and 25b, and the holes 25a and 25b are respectively formed. The walls are separated by walls 26a and 26b. Each of the fuel electrode 21 and the oxygen electrode 23 is permeable to a fuel fluid such as methanol and an acidic fluid such as oxygen gas. That is, the pores 25a and 25b of each layer have a fuel fluid and an oxidation fluid. Sex fluid can enter. Further, holes 29 are also formed in the intermediate layer 22.
- the diameters of the holes 25 a and 25 b of the fuel electrode 21 and the oxygen electrode 23 are preferably larger than the diameter of the holes 29 of the intermediate layer 22.
- the former is in the micron order, for example, 20 / z m or less, preferably 4 to 8 / z m, and the latter is preferably in the nano order.
- the diameters of the holes 25a and 25b of the fuel electrode 21 and the oxygen electrode 23 and the diameter of the holes 29 of the intermediate layer 22 may be substantially equal.
- all orders may be nanoordered.
- the inner surfaces of the pores 25a and 25b of the fuel electrode 21 and the oxygen electrode 23 are coated with a catalyst such as a noble metal such as platinum, iridium, palladium, rhodium, ruthenium, or an alloy containing at least two of them. Has been. Further, it is preferable that a conductive metal layer such as noradium, nickel, tantalum, or niobium is provided between the inner surfaces of the holes 25a and 25b and the catalyst layer.
- a catalyst such as a noble metal such as platinum, iridium, palladium, rhodium, ruthenium, or an alloy containing at least two of them.
- a conductive metal layer such as noradium, nickel, tantalum, or niobium is provided between the inner surfaces of the holes 25a and 25b and the catalyst layer.
- the pores 29 of the intermediate layer 22 are impregnated with an electrolyte solution, and the electrolyte solution is held in the pores by a static force by a capillary.
- an electrolyte solution a solution similar to that in the first embodiment can be used.
- At least one of the fuel electrode 21 and the oxygen electrode 23 is preferably light-transmissive, and is configured such that light reaches the intermediate layer 22 via the fuel electrode 21 or the oxygen electrode 23. It is preferable. When the fuel electrode 21 and the oxygen electrode 23 are not light-transmitting, it is preferable to provide means such as an optical fiber for introducing light into the intermediate layer 22.
- the fuel electrode 21 and the oxygen electrode 23 are provided with connecting terminals (not shown) corresponding to connecting portions with the external circuit 14.
- FIG. 3A is a perspective view schematically showing a basic configuration of a unit cell according to the third embodiment of the present invention.
- Fig. 3B shows the configuration of the cut surface along the line ⁇ - ⁇ 'shown in Fig. 3A. It is a partial expanded sectional view which shows typically.
- the unit cell 3 shown in FIGS. 3A and 3B is composed of three layers of two pn-type semiconductor layers having first and second pn-type junction structures and an intermediate layer positioned therebetween.
- the arrangement is pn-intermediate layer-pn from the fuel electrode side.
- the first layer is a fuel electrode 31 constituting the anode, p-type semiconductor layer 3 la doped with p-type impurity elements such as boron and aluminum, and n-type impurity elements such as phosphorus and arsenic.
- the n-type semiconductor layer consists of 3 lb.
- the second layer is an intermediate layer 32 constituting the electrolyte region.
- the third layer is an oxygen electrode 33 that constitutes a force sword, an n-type semiconductor layer 33a doped with an n-type impurity element such as phosphorus or arsenic, and a p-type impurity element doped with boron or aluminum.
- Type semiconductor layer 33b is an oxygen electrode 33 that constitutes a force sword, an n-type semiconductor layer 33a doped with an n-type impurity element such as phosphorus or arsenic, and a p-type impurity element doped with boron or aluminum.
- the fuel electrode 31 and the oxygen electrode 33 are both preferably made of porous silicon, for example. As shown in FIG. 3B, holes 35a and 35b are formed in the fuel electrode 31 and the oxygen electrode 33, which are semiconductor layers having a pn junction structure, and the holes 35a and 35b are formed on the walls 36a and 36b, respectively. It is partitioned by.
- the p-type semiconductor layer 31a of the fuel electrode 31 and the n-type semiconductor layer 33a of the oxygen electrode 33 are permeable to a fuel fluid such as methanol and an oxidizing fluid such as oxygen gas, respectively. Fuel fluid and oxidative fluid can enter the chamber.
- the diameters of the holes 35a and 35b formed in the p-type semiconductor layer 31a of the fuel electrode 31 and the n-type semiconductor layer 33a of the oxygen electrode 33 are the same as the n-type semiconductor layer 31b of the fuel electrode 31 and
- the former which is preferably larger than the diameter of the vacancies 39 formed in the p-type semiconductor layer 33b of the oxygen electrode 33, is in the order of microns, for example, 20 ⁇ m or less, preferably 4-8 ⁇ m, and the latter is nano. An order is preferred.
- the diameters of the holes 35a and 35b formed in the p-type semiconductor layer 31a of the fuel electrode 31 and the n-type semiconductor layer 33a of the oxygen electrode 33 may be substantially equal. Good.
- the thickness of the p-type semiconductor layer 31a of the fuel electrode 31 and the thickness of the n-type semiconductor layer 33a of the oxygen electrode 33 is larger than that of the n-type semiconductor layer 3 lb of the fuel electrode 31 and the p-type semiconductor layer 33b of the oxygen electrode 33.
- the former is Mi In the chron order, particularly 300 to 500 ⁇ m, the latter is preferably 50 ⁇ m or less, and particularly preferably 10 ⁇ m or less.
- the inner surfaces of the holes 35a of the p-type semiconductor layer 31a of the fuel electrode 31 and the holes 35b of the n-type semiconductor layer 33a of the oxygen electrode 33 are precious metals such as platinum, iridium, palladium, rhodium, and ruthenium. Or coated with a catalyst such as an alloy containing at least two of them. It is preferable that a conductive metal layer such as palladium, nickel, tantalum, or niobium is provided between the inner surfaces of the holes 35a and 35b and the catalyst layer.
- the intermediate layer 32 is sealed up and down by sealing plates 34a and 34b, and in the space between the fuel electrode 31 and the oxygen electrode 33 in the case of the first and second embodiments.
- An electrolyte solution similar to the solution used is filled.
- At least one of the fuel electrode 31 and the oxygen electrode 33 is preferably light transmissive, and is configured so that light reaches the intermediate layer 32 via the fuel electrode 31 or the oxygen electrode 33. It is preferable.
- the fuel electrode 31 and the oxygen electrode 33 are not light transmissive, at least one of the sealing plates 34a and 34b is light transmissive, and the intermediate layer 32 is interposed via the sealing plates 34a or 34b. It is preferable to be configured to allow light to reach.
- means such as an optical fiber for introducing light into the intermediate layer 32.
- connection terminals (not shown) corresponding to the connection parts with the external circuit 14.
- FIGS. 1B, 2B, and 3B show examples of patterns in which the cross-sectional shape of the pores of the fuel fluid permeation portion of the fuel electrode and the oxidizing fluid permeation portion of the oxygen electrode is the same square and regular shape.
- the size and shape of the holes need not be constant, but the sizes may be different or the shapes may be different. Further, it may be bent in a straight line in the depth direction.
- the pattern of pore shape and distribution when the fuel electrode and oxygen electrode are viewed in plan is not limited to a specific pattern.
- 4A and 4B are schematic plan views showing examples of the distribution and shape of the vacancies in the fuel electrode.
- 4A and 4B show an example of the fuel electrode 11 of the unit cell 1 according to the first embodiment.
- the hole 15a shown in FIG. 4A is an example in which holes having a constant planar shape are regularly arranged.
- the holes 15a are holes of different shapes that do not need to have a constant planar shape. It may be configured, and may not be regularly distributed.
- the holes 15a ′ of the fuel electrode 11A shown in FIG. 4B are examples in which the planar shape is irregular and is irregularly distributed by being partitioned by the wall 16a ′. In this way, the holes 15a ′ may have an irregular planar shape or may be irregularly distributed.
- the generated currents of the unit cells 1 to 3 are determined mainly depending on the area of the unit cells 1 to 3 and the impurity concentrations of the fuel electrode and the oxygen electrode. From the viewpoint of demonstrating proper performance and production on a commercial scale, it is preferable that the size of unit cells 1 to 3 is, for example, 5 to 30 mm in length and width, and the thickness is on the order of microns to several mm! / ,.
- the reaction in the fuel electrode and the oxygen electrode is activated to effectively generate electric power. be able to.
- the reason will be described below mainly for the case of the unit cell 1 according to the first embodiment.
- the unit cells 2 and 3 according to the second or third embodiment will be referred to as necessary.
- methanol and water (H 2 O) as fuel fluid are supplied to the surface of the fuel electrode 11.
- I can't move. Note that there are pn junctions in the unit cell 2 between the fuel electrode 21 and the oxygen electrode 23, and in the unit cell 3 in the fuel electrode 31 and the oxygen electrode 33. Electrons are prevented from moving to the oxygen electrode as much as possible. Further, in the case of the unit cell 3, since the intermediate layer 32 is made of an electrolyte solution, movement of electrons in the intermediate layer 32 is prevented.
- the hydrogen ions are formed from the electrolyte solution held in the vacancies 19 in the intermediate layer 12 (in the case of the unit cell 2, the vacancies 29 in the intermediate layer 22 and in the case of the unit cell 3 the intermediate layer 32).
- the oxygen electrode 13 In the oxygen electrode 13, electrons moved to the oxygen electrode 13 through the external circuit 14, hydrogen ions moved through the electrolyte solution in the intermediate layer 12, and oxygen supplied to the surface of the oxygen electrode 13. Reaction with the gas (2) occurs with the gas, producing water (HO)
- unit cell 1 In the case of unit cell 1 according to the first embodiment, the mechanism described below is used to create a fuel cell. Since the reaction activity at the electrode 11 and the oxygen electrode 13 is remarkably activated, the above-described series of reaction rates are remarkably increased. That is, unit cell 1 has a pin structure, and is an intrinsic semiconductor layer (i-layer) intermediate layer 12 (in the case of unit cell 2, intermediate layer 22 and in unit cell 3, fuel electrode 31 and oxygen electrode 33). (Combination of the pn junction and the intermediate layer 32) Power Plays an important role not found in conventional fuel cells.
- i-layer intrinsic semiconductor layer
- Excited electrons and holes in the above state are generated.
- light is irradiated near the depletion layer existing in the intermediate layer 12, so that excited electrons and holes are generated more efficiently.
- electrons and holes are generated, they are accelerated by the electric field based on the depletion layer, and the electrons move to the oxygen electrode 13 of the n-type semiconductor layer, and the holes move to the fuel electrode 11 of the p-type semiconductor layer.
- This movement of electrons and holes brings the potential difference between the fuel electrode 11 and the oxygen electrode 13, that is, between the anode and the force sword, and the potential of the intermediate layer 12 into equilibrium.
- the electrolyte solution is contained in the pores 19 and 29 of the porous intermediate layers 12 and 22 by capillary action, that is, the following ( It is maintained by setting the condition to be equal to or higher than the capillary pressure P expressed according to the static law of equation (3).
- the vacancy radius of the intermediate layer 12 is set according to the surface tension ⁇ of the electrolyte solution held in the vacancy and the wetting angle ⁇ of the electrolyte solution with respect to the semiconductor material.
- the micron-order air on the fuel fluid supply surface side in the fuel electrode is used. It was explained that it is preferable that nano-order holes exist between the holes and micron-order holes on the oxygen-containing fluid supply surface side of the oxygen electrode.
- the micron-order pores have a specific surface area of the electrode portion and a diameter that allows fuel fluid or acidic fluid to enter the inside.
- Nano-order vacancies in the case of the first and second embodiments are the function of holding the electrolyte solution and the function of suppressing methanol crossover, and in the case of the third embodiment. It is mainly set to have a function of suppressing methanol crossover. The reason why the methanol crossover without impairing the function as a fuel cell can be suppressed is as follows.
- FIG. 5 is a partially enlarged cross-sectional view schematically showing a region composed of micron-order holes and nano-order holes.
- FIG. 5 shows the unit cell according to the first embodiment. An example of the fuel electrode 11 in Le 1 is shown.
- the p-type semiconductor layer portion of the fuel electrode 11 has a hole 15a formed by partitioning with a wall 16a, and the inner surface of the hole 15a.
- a conductive metal layer 18 is formed of a metal such as palladium (Pa), nickel (Ni), tantalum (Ta), or niobium (Nb).
- the metal catalyst layer formed on this metal layer is not shown.
- This conductive metal layer has the effect of improving the conductivity of the fuel electrode 11 such as silicon and the effect of preventing methanol crossover.
- Hydrogen ions must move from the fuel electrode 11 to the oxygen electrode 13 (see Fig. 1B).
- the hydrogen ions diffuse through the metal layer, movement of hydrogen ions is not hindered even when the conductive metal layer 18 is covered on the inner wall surface of the hole 15a. That is, the hydrogen ions that have reached the surface of the conductive metal layer 18 are adsorbed on the metal surface, receive electrons from the metal layer, and diffuse in the conductive metal layer 18 in the form of hydrogen atoms. Due to the diffusion, the hydrogen atoms reach the other surface of the conductive metal layer 18, that is, the wall 16 a side or the intermediate layer 12.
- the conductive metal layer 18 is adjacent to the bottom of the hole 15a among the nano-order holes 19 in the intermediate layer 12 that open to the bottom of the hole 15a of the fuel electrode 11.
- the area A is filled with holes. Therefore, methanol crossover can be prevented more effectively.
- a preferred method of manufacturing the unit cells 1 to 3 according to the first to third embodiments is as follows. There are roughly two methods for forming the porous fuel electrode, the oxygen electrode, and the intermediate layer constituting the main part of the unit cells 1 to 3.
- the first method is a method of forming holes having a predetermined shape shown in FIG. 4A in a predetermined pattern.
- the second method is a method of forming the irregular cavities shown in FIG. 4B in a randomly distributed pattern.
- the second of the latter As a method, it can be manufactured by a method such as formation of a plate-like body by a CVD method, chemical etching using a plate-like semiconductor material such as sodium fluoride, or anodic etching using a hydrogen fluoride (HF) solution or the like.
- a method for forming the porous portion As a method, it can be manufactured by a method such as formation of a plate-like body by a CVD method, chemical etching using a plate-like semiconductor material such as sodium fluoride, or anodic etching using a hydrogen fluoride (HF) solution or the like.
- HF hydrogen fluoride
- FIGS. 6 and 7 are diagrams illustrating a method of forming a porous portion having a predetermined pattern by the first method.
- Fig. 6 shows the cross-sectional structure of the substrate in the process of pre-etching the substrate on which the porous portion is to be formed
- Fig. 7 shows the method of further etching the substrate after pre-etching by the positive electrode etching method. It is typical sectional drawing.
- a p-type semiconductor or n-type semiconductor silicon substrate 41 is formed by a method such as ion implantation.
- a patterned mask 42 is formed on one surface side of the silicon substrate 41 by a photolithography method usually employed in the manufacture of semiconductor devices and the like.
- the silicon substrate 41 is pre-patterned by anisotropic etching using a potassium hydroxide (KOH) solution.
- KOH potassium hydroxide
- the pre-patterned portion is further etched by the anodic etching method shown in FIG. 7, thereby forming a deep hole.
- an electrolyte solution such as hydrogen fluoride (HF) is contained in a container 45, and a platinum electrode 46 is immersed in the container 45.
- the silicon substrate 41 is set watertight in the opening. Further, the platinum electrode 46 is connected to the negative side of the power source E, and the silicon substrate 41 is connected to the positive side of the power source E.
- the silicon substrate 41 is an n-type semiconductor, photochemical HF anodic etching using light is performed, and when the silicon substrate 41 is a p-type semiconductor, HF anodic etching without light irradiation is performed.
- patterned holes 15a and 15b shown in FIG. 1B are formed in the silicon substrate 41. Since the diameter of the holes depends on the etching conditions such as the electrical resistance of the wafer, the photocurrent, and the concentration of the HF solution, it is preferable to select the etching conditions according to the target diameter. The depth of the holes depends on the etching time To do.
- the intermediate layer 12 After etching to a predetermined depth, for example, at the bottom of the hole 15a shown in FIG. 1B (for example, the diameter is in the order of micron), the intermediate layer 12 has a small diameter 19 (for example, a nanoorder).
- a predetermined depth for example, at the bottom of the hole 15a shown in FIG. 1B (for example, the diameter is in the order of micron)
- the intermediate layer 12 has a small diameter 19 (for example, a nanoorder).
- HF electrolyte solution
- the oxygen electrode and the intermediate layer are subjected to constant conditions such as the concentration and current of the electrolyte solution.
- Anodic etching may be performed.
- the above method is a method of forming one surface force hole of the silicon substrate.
- a hole having a large micron order diameter may be formed on one side, and a hole having a small nano order diameter may be formed from the other side.
- This method is particularly useful when forming the fuel electrode 21 and oxygen electrode 23 of the unit cell 2 according to Embodiment 2 and the holes 31 of the fuel electrode 31 and oxygen electrode 33 of the unit cell 3 according to Embodiment 3. Is preferred.
- the silicon substrate is ion-implanted in advance and becomes an n-type or p-type semiconductor.
- the silicon substrate is subjected to re-doping after etching. It is preferable.
- phosphorus (P) is re-doped into an oxygen electrode composed of an n-type semiconductor
- boron (B) is re-doped into a fuel electrode composed of a p-type semiconductor.
- methods such as ion implantation, CVD, and thermal diffusion can be used.
- the fuel electrode 11, the intermediate layer 12, and the oxygen electrode 13 are separately manufactured, and as shown in FIG. It can be manufactured by sandwiching the intermediate layer 12 between the oxygen electrode 13 and the oxygen electrode 13.
- holes 15a are formed on the surface on the fuel electrode 11 side
- holes 15b are formed on the surface on the oxygen electrode 13 side
- holes 19 are formed in the middle. Therefore, it may be formed integrally.
- the fuel electrode 21 and the oxygen electrode 23 can be separately manufactured and bonded as shown in FIG. 2A.
- the holes 29 may be formed in either the fuel electrode 21 or the oxygen electrode 23.
- a single silicon substrate may be used to integrally form holes 25a and 29 on the fuel electrode 21 side and holes 25b and 29 on the oxygen electrode 23 side.
- the vacancies 29 should be formed in one of the fuel electrode 21 and the oxygen electrode 23, or on one of them!
- the fuel electrode 31 and the oxygen electrode 33 are separately manufactured, and the sealing plates 34a and 34b are used as shown in FIG. 3A. Assemble the unit cell 3 so that a gap is formed between the fuel electrode 31 and the oxygen electrode 33! /.
- the method of holding the electrolyte solution in the unit cells 1 to 3 produced by the above method is as follows. In the case of unit cells 1 and 2, it is necessary to hold the electrolyte solution in the nano-order porous part. Electrolyte solutions such as H 2 SO, H 3 PO, and triflic acid
- the assembled unit cells 1 and 2 may be immersed in the electrolyte solution in the tank for about 12 hours.
- a solid electrolyte polymer can be used as the electrolyte.
- the assembled unit cells 1 and 2 may be immersed in a naphthion solution.
- the fuel fluid supply part 51 and the oxidizing fluid supply part 52 shown in Fig. 8 both have a channel structure, and the channel part is hermetically or liquid-tightly sealed by plates 53a and 53b.
- This channel portion is formed, for example, by performing anisotropic etching on the fuel fluid supply surface side of the fuel electrode 11 and the oxidizing fluid supply surface side of the oxygen electrode 13 using patterning and KOH solution by photolithography. can do.
- the fuel fluid supply unit 54 and the oxidizing fluid supply unit 55 shown in Fig. 9 are formed of a porous body, and the fuel fluid or the oxidizing fluid is held in the pores of the porous body.
- the fuel fluid is hydrogen gas, a hydrogen storage alloy or the like can be used for the fuel fluid supply unit 54.
- Figs. 8 and 9 show the case where the fuel fluid supply unit and the oxidizing fluid supply unit have the same configuration.
- the fuel fluid supply unit may be a channel structure, and the oxidizing fluid supply unit may be a porous body, or vice versa. It is preferable that the fuel fluid supply unit and the oxidizing fluid supply unit are appropriately selected according to the use and function of the unit cell 1.
- FIG. 10A ⁇ LOC is a diagram schematically showing a unit cell array according to the embodiment
- Fig. 10A is a sectional view showing a unit cell array 4A in which unit cells are connected in parallel
- Fig. 10B is a unit
- FIG. 10C is a perspective view showing the unit cell array 4C in which unit cells are connected vertically and horizontally, with the unit cell array 4B having cells connected in series.
- the unit cell arrays 4A to 4C are collectively referred to as a unit cell array 4.
- 10A to IOC show an example in which unit cell 1 is used.
- FIG. 10A is a cross-sectional view showing unit cell arrays 4A in which a plurality of unit cells 1 are arranged in a plane and are electrically connected in parallel.
- the current is larger as the area of the unit cell 1 is larger. If it is necessary to increase the generated current, one method is to increase the area of the unit cell 1.
- FIG. 10B is a cross-sectional view showing unit cell arrays 4B in which a plurality of unit cells 1 are arranged in a plane and are electrically connected in series.
- the electromotive force of unit cell 1 depends on the fuel and oxygen. For example, in the case of a hydrogen fuel cell using hydrogen, the ideal output voltage is about 1.229V. However, due to the irreversible overpotential at the electrode, the actual output voltage of the hydrogen fuel cell is about 0.6 to 0.85V. By using the pin or pn semiconductor structure according to this embodiment, the overpotential can be greatly reduced.
- FIG. 10C is a perspective view showing a unit cell array 4C in which a plurality of unit cells 1 are arranged in a plane and electrically connected vertically and horizontally. It is necessary to increase the voltage and increase the current. If necessary, unit cells 1 are arranged vertically and horizontally as shown in Fig. 10C.For example, the row side is arranged in parallel as shown in Fig. 10A, and the column side is arranged in series as shown in Fig. 10B. It is preferable to connect to. When the unit cell 1 having a large area can be used, a unit cell having a large area can be used instead of the unit cells connected in parallel on the row side.
- FIG. 11 is a cross-sectional view schematically showing a configuration of a unit cell array according to another embodiment.
- FIG. 11 shows an example in which unit cell 1 is used.
- the unit cell array 5 according to another embodiment is a stack type array in which a plurality of unit cells 1 are stacked so as to be connected in series. Further, as shown in FIG. 11, flow field plates 71 and 72 and an optical fiber 73 are inserted between the unit cell arrays 1.
- the flow field plates 71 and 72 are thin sheets, and are formed with grooves or narrow tubes (not shown) for allowing fluid such as gas to pass through.
- the flow field plate 71 supplies an oxygen-containing gas such as air to the oxygen electrode 13, and the flow field plate 72 supplies a fuel fluid such as methanol to the fuel electrode 11 and a surplus fuel.
- the generated water is discharged.
- a plurality of optical fibers 73 are inserted between the flow field plates 71 and 72 so that light can be guided to the intermediate layer 12 via the fuel electrode 11 surface or the oxygen electrode 13 surface. It has become. In the optical fiber, the coating of the portion located between the flow field plates 71 and 72 is removed, so that the light reaches the intermediate layer 12.
- the fuel electrode 11 and the oxygen electrode 13 are electrically connected between the stacked unit cells 1. This electrical connection is made when the flow field plates 71 and 72 are made of a conductive material, and the flow field plates 71 and 73 are in direct contact with each other in the region excluding the portion where the optical fiber 73 is located. Can be ensured. When the flow field plates 71 and 73 are made of a non-conductive material, the fuel electrode 11 and the oxygen electrode 13 are electrically connected by a conductor.
- the unit cell array 5 configured as described above can realize a stack type array in which the unit cells 1 are stacked.
- the unit cell 1 is stacked.
- a voltage corresponding to the number can be generated.
- FIG. 12A is a cross-sectional view schematically showing the fuel cell module according to the embodiment.
- FIG. 12A shows an example using the unit cell array 4A.
- the fuel cell module 6A shown in FIG. 12A includes a unit cell array 4A, a fuel fluid supply unit 82, and an oxidizing fluid supply unit 83.
- the fuel fluid supply unit 82 and the oxidizing fluid supply unit 83 are partitioned by a unit cellular array 4A.
- the partition member 84 shown in FIG. 12A is provided as necessary.
- unit cell array 4A is configured such that a predetermined voltage and current can be taken out, and the fuel electrode side faces fuel fluid supply unit 82.
- the unit cell array 4A is supported between the fuel fluid supply unit 82 and the acidic fluid supply unit 83 by the support member 85, and the fuel fluid and the acidic fluid pass through the unit cell array 4A. There is no such thing.
- Fuel fluid is introduced into the fuel fluid supply section 82 from the fuel fluid inlet 82a, and excess fluid is discharged from the fluid outlet 82b.
- the wall section facing the unit cell array 4A is a light transmitting window 82c, and is made of a light transmitting material such as glass.
- An oxidizing fluid is introduced into the oxidizing fluid supply section 83 from the oxidizing fluid inlet 83a, and excess oxygenated fluid and water are discharged from the fluid / water outlet 83b. Yes.
- a fuel fluid such as methanol is introduced into the fuel cell module 6A configured as described above from the fuel fluid inlet 82a of the fuel fluid supply unit 82, and the oxidizing fluid of the oxidizing fluid supply unit 83 is introduced.
- an oxygen-containing gas such as oxygen gas
- the fuel electrode 11 is irradiated by light irradiated on the intermediate layer 12 of the unit cell array 4A (see FIG. 10A) through the light transmission window 82c.
- the reaction at the oxygen electrode 13 is activated, and the reaction of the above-described equation (1) at the fuel electrode 11 and the above-mentioned equation (2) at the oxygen electrode 13 are actively advanced. Accordingly, electric power is generated from the unit cell array 4A, and is taken out as electric power to the outside of the fuel cell module 6A through a collector (not shown) provided as a current collecting layer in the fuel electrode 11 and the oxygen electrode 13.
- FIG. 12B is a cross-sectional view schematically showing a fuel cell module 6B according to another embodiment.
- the fuel cell module 6B shown in FIG. 12B is a fuel cell module particularly suitable as a power source for portable equipment, and includes a unit cell array 4A, a fuel fluid supply unit 85, and an acid.
- the chemical fluid supply unit 86 is provided.
- the fuel fluid supply unit 85 and the oxidizing fluid supply unit 86 are partitioned by the unit cell array 4A. Note that the fluid-permeable partition member 89 shown in FIG. 12B is provided as necessary.
- the fluid supply source in the fuel fluid supply unit 85 is configured by a hydrogen storage alloy 85a, and for example, hydrogen gas from the hydrogen storage alloy 85a is supplied to the unit cell array 4A as the fuel fluid. Supplied.
- the absorption and release of hydrogen by the hydrogen storage alloy 85a can be controlled by, for example, combining a Peltier element and heating / cooling (see, for example, JP-A-6-265238).
- the unit cell array 4A is supported by a flat block-shaped hydrogen storage alloy 85a disposed below the unit cell array 4A in the drawing.
- the oxidizing fluid supply section 86 is located above the unit cell array 4A in the drawing, and air is introduced into the acidic fluid supply section 86 from the acidic fluid inlet 86a, for example. Thus, nitrogen gas, excess oxygen gas, water or water vapor is discharged from the outlet 86b. Further, in the case of the fuel cell module 6B, the upper wall of the oxidizing fluid supply section 86, that is, the wall section facing the oxygen electrode side of the unit cell array 4A is a light transmission window 86c, and glassy or the like It is composed of a light transmissive material, and the oxygen electrode (force sword) of the unit cell is light transmissive.
- Hydrogen gas as a fuel gas is supplied from the hydrogen storage alloy 85a of the fuel fluid supply unit 85 to the fuel cell module 6B configured as described above, and the oxidizing fluid of the oxidizing fluid supply unit 86
- the reaction at the fuel electrode and the oxygen electrode is activated by the light irradiated to the intermediate layer of the unit cell array 4A through the light transmission window 86c.
- the reaction of the formula (2) described above proceeds actively. Thereby, electric power is generated from the unit cell array 4A, and is taken out as electric power to the outside of the fuel cell module 6B through a collector (not shown) provided in the fuel electrode and the oxygen electrode.
- FIG. 13 is a block diagram showing a configuration of the fuel cell system 7 according to the embodiment.
- the fuel cell system 7 is a systematic combination of a plurality of fuel cell modules 6A (the fuel cell module 6B shown in FIG. 13 may be a fuel cell module 6B).
- Each fuel cell module 6 A is electrically connected to a fuel cell 91, the fuel cell 91 is electrically connected to a DC—DC converter 92, and a DC—DC converter 92 is connected to the output side—
- An AC converter 93 and an output unit 94 are provided. Note that the DC-AC converter 93 is incorporated as necessary. When no AC is required as a power source, the DC-DC converter 92 and the output unit 94 are directly connected.
- the fuel cell 91 includes a plurality of fuel cell modules 6A, and power of a predetermined voltage and current is output to the DC-DC converter 92.
- the electric power sent from the fuel cell 91 is boosted to a voltage required by an external load device (not shown).
- an external load device not shown
- the output of the fuel cell 91 that is, the configuration of the fuel cell module 6A is set so that the current required by the external load device can be secured. There is a need to.
- the electric power boosted by the DC-DC converter 92 is converted into alternating current by the DC-AC converter 93, and is output from the fuel cell system 7 via the output unit 94. Output as AC power.
- direct current power is output from the DC-DC converter 92 as the output of the fuel cell system 7 via the output unit 94.
- the output voltage of the unit cell 1 can be increased by stacking the unit cells 1.
- the output voltage can be easily increased by using a DC-DC converter 92 as in the fuel cell system 7 according to the embodiment. it can.
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- Electrochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
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- Inert Electrodes (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200680035986XA CN101278428B (zh) | 2005-09-29 | 2006-09-29 | 燃料电池单元电池、燃料电池单元电池阵列、燃料电池模件和燃料电池系统 |
JP2007537715A JP4200339B2 (ja) | 2005-09-29 | 2006-09-29 | 燃料電池単位セル、燃料電池単位セルアレイ、燃料電池モジュール及び燃料電池システム |
EP06810882.8A EP1947721A4 (en) | 2005-09-29 | 2006-09-29 | FUEL BATTERY CELL, FUEL BATTERY BATTERY NETWORK, FUEL BATTERY MODULE, AND FUEL BATTERY SYSTEM |
US11/992,585 US8486551B2 (en) | 2005-09-29 | 2006-09-29 | Fuel cell unit, fuel cell unit array, fuel cell module and fuel cell system |
HK09103078.0A HK1122905A1 (en) | 2005-09-29 | 2009-04-01 | Fuel battery unit cell, fuel battery unit cell array, fuel battery module, and fuel battery system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005283761 | 2005-09-29 | ||
JP2005-283761 | 2005-09-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2007037392A1 true WO2007037392A1 (ja) | 2007-04-05 |
Family
ID=37899812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2006/319502 WO2007037392A1 (ja) | 2005-09-29 | 2006-09-29 | 燃料電池単位セル、燃料電池単位セルアレイ、燃料電池モジュール及び燃料電池システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US8486551B2 (ja) |
EP (1) | EP1947721A4 (ja) |
JP (1) | JP4200339B2 (ja) |
KR (1) | KR100982721B1 (ja) |
CN (1) | CN101278428B (ja) |
HK (1) | HK1122905A1 (ja) |
WO (1) | WO2007037392A1 (ja) |
ZA (1) | ZA200803374B (ja) |
Cited By (1)
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---|---|---|---|---|
JP2009501415A (ja) * | 2005-07-15 | 2009-01-15 | ジェン−エックス パワー コーポレイション | メタノール型燃料電池 |
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WO2009047453A1 (fr) * | 2007-09-20 | 2009-04-16 | Stmicroelectronics Sa | Support de cellules de pile a combustible |
US8697979B1 (en) * | 2009-05-15 | 2014-04-15 | The United States Of America As Represented By The Secretary Of The Navy | Solar-powered system for generation and storage of hydrogen gas in substrate microstructures |
JP6098430B2 (ja) * | 2013-04-15 | 2017-03-22 | 旭硝子株式会社 | 固体高分子形燃料電池 |
BR112016009762B1 (pt) * | 2013-10-29 | 2022-01-11 | Quswami, Inc | Dispositivo de conversão de energia para conversão de energia química em eletricidade |
CN105514458A (zh) * | 2016-01-27 | 2016-04-20 | 广州道动新能源有限公司 | 一种燃料生伏特电池 |
CN105576252B (zh) * | 2016-03-21 | 2018-02-27 | 吉林大学 | 基于半导体结效应的固体氧化物燃料电池及其制备方法 |
US10562018B2 (en) * | 2016-04-19 | 2020-02-18 | Nissan Motor Co., Ltd. | Electrode catalyst, and membrane electrode assembly and fuel cell using electrode catalyst |
CN109449472B (zh) * | 2018-10-16 | 2021-08-31 | 深圳职业技术学院 | 一种甲醇燃料电池外壳及其制备方法 |
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- 2006-09-29 KR KR1020087009866A patent/KR100982721B1/ko not_active IP Right Cessation
- 2006-09-29 CN CN200680035986XA patent/CN101278428B/zh not_active Expired - Fee Related
- 2006-09-29 EP EP06810882.8A patent/EP1947721A4/en not_active Withdrawn
- 2006-09-29 JP JP2007537715A patent/JP4200339B2/ja not_active Expired - Fee Related
- 2006-09-29 WO PCT/JP2006/319502 patent/WO2007037392A1/ja active Application Filing
- 2006-09-29 US US11/992,585 patent/US8486551B2/en not_active Expired - Fee Related
- 2006-09-29 ZA ZA200803374A patent/ZA200803374B/xx unknown
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Also Published As
Publication number | Publication date |
---|---|
JP4200339B2 (ja) | 2008-12-24 |
CN101278428A (zh) | 2008-10-01 |
KR20080061376A (ko) | 2008-07-02 |
EP1947721A1 (en) | 2008-07-23 |
CN101278428B (zh) | 2010-06-09 |
ZA200803374B (en) | 2009-09-30 |
US20090258276A1 (en) | 2009-10-15 |
EP1947721A4 (en) | 2013-08-07 |
US8486551B2 (en) | 2013-07-16 |
KR100982721B1 (ko) | 2010-09-17 |
HK1122905A1 (en) | 2009-05-29 |
JPWO2007037392A1 (ja) | 2009-04-16 |
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