WO2007032326A1 - Photosensitive resin composition and cured object obtained therefrom - Google Patents

Photosensitive resin composition and cured object obtained therefrom Download PDF

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Publication number
WO2007032326A1
WO2007032326A1 PCT/JP2006/318017 JP2006318017W WO2007032326A1 WO 2007032326 A1 WO2007032326 A1 WO 2007032326A1 JP 2006318017 W JP2006318017 W JP 2006318017W WO 2007032326 A1 WO2007032326 A1 WO 2007032326A1
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WIPO (PCT)
Prior art keywords
compound
reaction
resin composition
epoxy
photosensitive
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PCT/JP2006/318017
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French (fr)
Japanese (ja)
Inventor
Ryutaro Tanaka
Toru Kurihashi
Yasumasa Akatsuka
Original Assignee
Nippon Kayaku Kabushiki Kaisha
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Priority to JP2007535470A priority Critical patent/JPWO2007032326A1/en
Publication of WO2007032326A1 publication Critical patent/WO2007032326A1/en

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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/24Di-epoxy compounds carbocyclic
    • C08G59/245Di-epoxy compounds carbocyclic aromatic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/32Epoxy compounds containing three or more epoxy groups
    • C08G59/38Epoxy compounds containing three or more epoxy groups together with di-epoxy compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • C08L63/10Epoxy resins modified by unsaturated compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Definitions

  • the present invention uses a 4,4'-integrated bisphenol F-type epoxy resin having good molecular symmetry as a curing agent, a photosensitive alkaline aqueous solution-soluble resin, a reactive crosslinking agent, and a photopolymerization initiator.
  • This invention relates to a photosensitive resin composition containing selenium and its cured product. More specifically, it is useful as a solder resist for printed wiring boards, an interlayer insulation material for multilayer printed wiring boards, a solder resist for flexible printed wiring boards, a dry film resist, a Maki resist, a photosensitive optical waveguide, and the like.
  • the present invention relates to a liquid or dry film type resin composition that gives a cured product having excellent properties, heat stability, electrical insulation, adhesion, chemical resistance, and resistance to scratching, and the cured product.
  • a photosensitive resin composition using a photosensitive epoxy carboxylate compound is excellent in balance of various characteristics such as environmentally friendly thermal and mechanical properties and adhesion to a substrate. ing. For this reason, it is used in the fields of coatings and coatings, and recently, it has been used in a wide range of industrial fields such as electrical and electronic parts manufacturing and printed wiring board manufacturing. The range is expanding. On the other hand, with the expansion of this field of use, photosensitive resin compositions using photosensitive epoxy carboxylate compounds are required to have higher performance in terms of characteristics such as heat resistance and adhesion. Speak.
  • Patent Document 1 describes a solder mask composition containing a photosensitive resin in which an acid anhydrous is added to a reaction product of a novolac-type epoxy resin and an unsaturated monobasic acid. The cured product of the composition was not sufficient in heat resistance, adhesion, and scratch resistance.
  • Patent Document 2 describes a photopolymerizable resin composition containing urethane-modified bull ester resin, and the cured product of this composition has flexibility, heat resistance, adhesion, Not enough performance.
  • Patent Document 3 describes a resin composition in which a hardly soluble fine particulate epoxy resin is used as a curing agent and a part thereof can be replaced with a soluble resin such as a bisphenol F type epoxy resin. ing. Patent Document 4 exemplifies bisphenol F type epoxy resin as a soluble epoxy resin.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 61-243869
  • Patent Document 2 JP-A-9-52925
  • Patent Document 3 Japanese Patent Publication No. 7-17737
  • Patent Document 4 Japanese Unexamined Patent Publication No. 2000-109541
  • Patent Document 5 JP-A-8-73563
  • Patent Document 6 WO2006Z00 4
  • An object of the present invention is to provide an active energy line for printing fine images in response to high performance requirements for solder masks that can be used for the above-described high-performance printed wiring boards and the like. It has excellent photosensitivity to patterns, and pattern formation by development with alkaline aqueous solution is easy.
  • a resin composition that is easy and excellent in flexibility, adhesion, solder heat resistance, electroless gold plating resistance, etc. of cured products obtained by heat curing in a post-curing (post-cure) process. It is to provide a cured product.
  • the curing agent (D) is represented by the formula (1) [0014]
  • n the number of repetitions.
  • a photosensitive resin composition that is a bisphenol F-type epoxy resin that is integrated with 4, 4 ′ represented by: [0015] 2) n of the curing agent (D) is a positive number from 1 to 7, and its melting point Above is a crystal of 80-150 ° C 1
  • a photosensitive alkaline aqueous solution-soluble resin (A) comprising an epoxy compound ( a ) having two or more epoxy groups in the molecule and a monocarboxylic acid having an ethylenically unsaturated group in the molecule
  • Composition
  • Photosensitive alkaline aqueous solution soluble resin (A) is an epoxy compound (d) having two epoxy groups in the molecule and a monocarboxylic acid compound having an ethylenically unsaturated group in the molecule.
  • Epoxy carboxylate compound obtained by reaction of compound (b), diisocyanate compound (e), carboxylic acid compound (f) having two hydroxyl groups in the molecule, and optional components 1) or 2 above, which is a reaction product of a dioli compound (g) having no carboxyl group or a reaction product of the reaction product with an optional polybasic acid anhydride (c).
  • the photosensitive resin composition of the present invention containing F type epoxy resin as a curing agent (D) is excellent in tackiness and photosensitivity, can be patterned by development with an alkaline aqueous solution, and is cured by active energy rays.
  • the cured product obtained by thermal curing as a post-curing process is flexible, solvent-resistant, acid-resistant, thermal stability, flexibility, adhesion, solder heat resistance, electroless gold plating resistance, etc.
  • it is suitable for a photosensitive resin composition for printed wiring boards and a photosensitive resin composition for dry films.
  • the photosensitive resin composition of the present invention comprises a photosensitive alkaline aqueous solution-soluble resin (A), a reactive crosslinking agent (B), a photopolymerization initiator (C), and the above formula (1) [wherein n represents the number of repetitions.
  • the hardener (D) which is a 4,4′-form bisphenol F type epoxy resin represented by the formula:
  • the photosensitive aqueous alkali-soluble soluble resin has an active group that is cured by active energy rays or the like and is developable with an aqueous alkaline solution.
  • the photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition includes, for example, an epoxy compound (a) having two or more epoxy groups in the molecule and the molecule Examples thereof include a reaction product of an epoxy strength lpoxylate compound obtained by the reaction of a monocarboxylic acid compound (b) having an ethylenically unsaturated group and a polybasic acid anhydride (c).
  • the epoxy compound (a) shown in the present invention is not particularly limited as long as it has two or more epoxy groups in one molecule.
  • a plurality of ethylenically unsaturated groups can be introduced into one molecule when reacted with the monocarboxylic acid compound (b).
  • the epoxy equivalent is 900
  • the number of epoxy groups in one molecule is preferably 2 or more and 50 or less.
  • the number is 3 to 20. If it is this range, the curability fall by the reduction
  • Examples of the epoxy compound (a) include phenol novolac type epoxy resin, taresole novolac type epoxy resin, trishydroxyphenylmethane type epoxy resin, dicyclopentadiene phenol type epoxy resin.
  • Bisphenol type epoxy resin bisphenol-A type epoxy resin, bisphenol-F type epoxy resin, etc.
  • biphenol type epoxy resin bisphenol-A novolac type epoxy resin, naphthalene skeleton-containing epoxy resin, alicyclic And epoxy epoxy resin and heterocyclic epoxy resin.
  • phenol novolac type epoxy resins examples include Epiclon N-770 (Dainippon Ink Chemical Co., Ltd.), DE N438 (Dow Chemical Co., Ltd.), Epicoat 154 (Oilized Shell Epoxy), EPPN-201 , RE-306 (all manufactured by Nihon Shakuyaku) and the like.
  • cresol novolac type epoxy resin examples include Epiclone N-695 (Dainippon Ink Chemical Co., Ltd.), EOCN-102S, EOCN-103S, EOCN-104S (all manufactured by Nippon Kayaku), UVR- 6650 (made by Union Carbide), ESCN-195 (made by Sumitomo Chemical), etc. are mentioned.
  • Trishydroxyphenol methane type epoxy resin includes, for example, EPPN-503, EP PN-502H, EPPN-501H (all manufactured by Nippon Kayaku), TACTIX-742 (manufactured by Dow Chemical Company), Epicoat E1032H60 (Oilized Shell Epoxy) and the like.
  • Examples of the dicyclopentadiene phenol type epoxy resin include epiclone EXA.
  • Examples of the bisphenol type epoxy resin include Epicoat 828, Epicoat 1001 (Oilized Shell Epoxy), UVR-6410 (Union Carbide), DE R-331 (Dow Chemical), RE — 31 OS (manufactured by Nippon Kayaku Co., Ltd.), YD— 8125 (manufactured by Toto Kasei), etc.
  • polyfunctional bisphenol A type epoxy resin such as NER—1202, NER—1322, NER—1504 (manufactured by Nippon Kayaku Co., Ltd.), NE R— 7403
  • polyfunctional bisphenol F type epoxy resin such as NER-7604 (manufactured by Nippon Kayaku).
  • biphenol type epoxy resin examples include biphenol type epoxy resin such as NC-3000 and NC-3000H (both manufactured by Nippon Kayaku Co., Ltd.), YX-4000 (manufactured by Yuka Shell Epoxy), etc. And bixylenol type epoxy resin, YL-6121 (made by oil-based shell epoxy), and the like.
  • Examples of the bisphenol A A novolak type epoxy resin include Epiclon N-880 (Dainippon Ink Chemical Co., Ltd.), Epicoat E157S75 (Oilized Shell Epoxy), and the like.
  • Examples of the naphthalene skeleton-containing epoxy resin include NC-7000 (manufactured by Nippon Kayaku), E
  • Examples of the alicyclic epoxy resin include EHPE-3150 (manufactured by Daicel Chemical Industries).
  • heterocyclic epoxy resin examples include TEPIC (manufactured by Nissan Chemical Industries).
  • epoxy compound (a) phenol novolac type epoxy resin, talesol novolac type epoxy resin, polyfunctional bisphenol type epoxy resin, and biphenol type epoxy resin are preferably used. These can provide a photosensitive resin composition having excellent properties such as heat resistance, mechanical strength, and chemical resistance, especially when a permanent resist material such as a solder resist is taken into consideration.
  • Examples of the monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule include acrylic acids, crotonic acid, OC cyanocinnamic acid, cinnamic acid, and saturated or unsaturated dibasic acid. Examples include a reaction product of an acid and an unsaturated group-containing monoglycidyl compound.
  • Acrylic acids include, for example, (meth) acrylic acid, j8-styrylacrylic acid, j8-furfurylacrylic acid, (meth) acrylic acid and ratatones (eg, ⁇ -force prolatatone) , Half-esters, saturated or unsaturated dibasic acid and monoglycidyl, which are equimolar reactants of a saturated or unsaturated dibasic acid anhydride and a (meth) atalylate derivative having one hydroxyl group per molecule (Meth) acrylic acid in terms of sensitivity when it is used as a photosensitive resin composition.
  • ratatones eg, ⁇ -force prolatatone
  • a reaction product of (meth) acrylic acid and ⁇ -force prolatatone or cinnamic acid is particularly preferred.
  • the polybasic acid anhydride (c) is a compound having one or more acid anhydride structures in the molecule, such as succinic anhydride, phthalic anhydride, pyromellitic anhydride, maleic anhydride.
  • the photosensitive aqueous alkali-soluble resin (A) contained in the photosensitive resin composition of the present invention is an epoxy compound (a) having two or more epoxy groups in the molecule as described above. ) And a monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule (hereinafter referred to as the first reaction), an epoxycarboxylate compound having an alcoholic hydroxyl group. And a polybasic acid anhydride (c) (hereinafter referred to as a second reaction).
  • the first reaction is solvent-free! / Is a solvent having no alcoholic hydroxyl group, for example, ketones such as acetone, ethylmethyl ketone, cyclohexanone, benzene, toluene, xylene , Aromatic hydrocarbons such as tetramethylbenzene, ethylene glycol dimethyl ether, ethylene glycol jetyl ether, dipropylene glycolinoresimethinoate , Glycol ethers such as dipropylene glycol jetyl ether, triethylene glycol glycol diethyl ether, triethylene glycol jetyl ether, ethyl acetate, butyl acetate, methyl solvate sorb acetate, cetyl solvate acetate, butyl celsonol levacetate , Carbitol acetate, propylene glycol monomono methinoate acetate, dialkyl glutarate (eg, dimethyl glutarate), dialky
  • the charge ratio of the raw material in the first reaction is as follows: the monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule with respect to 1 equivalent of the epoxy group of the epoxy compound (a).
  • a range in which the carboxyl group is from 0.8 to 1.2 equivalents is preferred. Within this range, the epoxy group remaining as unreacted or the monocarboxylic acid (b) remaining as an excess is also small, so that the storage stability of the resin (A) over time, thermal stability, Improves stability during manufacturing.
  • the first reaction it is preferable to use a catalyst to promote the reaction.
  • the amount used is about 0.1 to 10% by weight with respect to the reaction product. .
  • Examples of the catalyst include triethylamine, benzyldimethylamine, sodium salt triethylamine, benzyltrimethylammonium bromide, benzyltrimethylammonium iodide, and triphenyl.
  • Examples include ruphosphine, triphenylstibine, chromium octoate, and zirconium octoate.
  • the reaction temperature is 60 to 150 ° C, and the reaction time is preferably 5 to 60 hours.
  • a thermal polymerization inhibitor that may be used in the first reaction is preferably hydroquinone monomethyl ether, 2-methylhydroquinone, hydroquinone, diphenylpicrylhydrazine. , Diphenylamine, 2, 6 di-tert-butyl p-talesol and the like.
  • the first reaction has an end point when the acid value of the sample is 1 mg'KOHZg or less, preferably 0.5 mg'KOHZg or less, with appropriate sampling.
  • the solid content acid value is the amount (mg) of potassium hydroxide and potassium salt necessary to neutralize the acidity of the carboxylic acid in the resin lg. This is the amount (mg) of potassium hydroxide required to neutralize the solution lg containing fat, and is measured by the usual neutralization titration method according to JIS K0070. If the concentration of the resin in the solution is known, the solid content acid value can be calculated from the acid value of the solution.
  • the second reaction is an esterification reaction in which the polybasic acid anhydride (c) is added to the reaction solution and reacted after completion of the first reaction. Even if the second reaction is performed after the product of the first reaction is separated, the second reaction may be continued without separating the product of the first reaction.
  • a solvent used for the second reaction, a solvent similar to the solvent that can be used for the first reaction can be used.
  • the second reaction can be carried out without a catalyst
  • a basic catalyst is used to accelerate the reaction.
  • pyridine triethylamine, benzyldimethylamine, triethylamine hydroxide, dimethylaminopyridine, etc.
  • the amount used is relative to the reactants. Up to 10% by weight.
  • the reaction temperature is 40 to 120 ° C, and the reaction time is preferably 5 to 60 hours.
  • the acid value of the reaction product is within the range of plus or minus 10% of the acid value set according to the intended use while appropriately sampling.
  • the point is the end point.
  • the photosensitive aqueous alkali-soluble resin (A) contained in the photosensitive resin composition of the present invention includes an epoxy compound (d) having two epoxy groups in the molecule and a molecule.
  • a reaction product of a carboxylic acid compound (f) having one hydroxyl group, a diol compound (g) having no carboxyl group as an optional component, and a polybasic acid anhydride (c) as an optional component can also be used.
  • the epoxy compound (d) shown in the present invention is a compound having two epoxy groups in one molecule. If it has more than two epoxy groups, react with the monocarboxylic acid compound (b) and then react with the diisocyanate compound (e). Cause gelling to act as a polyol with more than hydroxyl groups.
  • the epoxy compound (d) a compound having an epoxy equivalent of 100 to 900 gZ equivalent is desirable. When the epoxy equivalent is greater than or equal to the loogZ equivalent, it is possible to prevent a decrease in film formability due to a decrease in the molecular weight of the resulting photosensitive alkaline aqueous solution soluble resin (A). In addition, the toughness of the coating is improved.
  • the epoxy equivalent is 900 gZ equivalent or less
  • the introduction ratio of the monocarboxylic acid compound (b) having an ethylenically unsaturated group into the photosensitive alkaline aqueous solution-soluble resin (A) is increased and the photosensitivity is increased. Can be increased.
  • epoxy compound (d) examples include phenolic glycidyl ether compounds such as hydride quinone diglycidyl ether, catechol diglycidyl ether, resorcinol diglycidyl ether, bisphenol-A type epoxy resin, bisphenol-F.
  • phenolic glycidyl ether compounds such as hydride quinone diglycidyl ether, catechol diglycidyl ether, resorcinol diglycidyl ether, bisphenol-A type epoxy resin, bisphenol-F.
  • Type epoxy resin bisphenol I S type epoxy resin, 2, 2 bis (4 hydroxyphenol)-1, 1, 1, 3, 3, 3 bisphenol such as epoxidized hexafluoropropane
  • Type epoxy resin hydrogenated bisphenol A type epoxy resin, hydrogenated bisphenol one loop F type epoxy resin, hydrogenated bisphenol- S type epoxy resin, hydrogenated 2, 2-bis (4 hydroxyphenol) 1, 1, 1, 3, 3, 3 Hydrogenated bisphenol type epoxy compounds such as epoxides of hexaphanoleopropane and brominated bisphenol Enol-A type epoxy resin, brominated bisphenol- Halogenated bisphenol type epoxy compound such as F type epoxy resin, cycloaliphatic diglycidyl ether compound such as cyclohexanedimethanol diglycidyl ether compound, 1, 6 hexane Aliphatic diglycidyl ether compounds such as diol diglycidyl ether, 1,4 butanediol diglycidyl ether, diethylene glycol diglycidyl ether
  • epoxy compounds are also commercially available, for example, Epicoat 828, Epicote 1001, Epicote 1002, Epicote 1003, Epicote 1004 (all made by Japan Epoxy Resin), Epomic R-140, Epomic R-301, Epomic R-304 (all manufactured by Mitsui Chemicals), DER-331, DER-332, DER-324 (all manufactured by Dow Chemical Co.), Epiclon 840, Epiclon 850 (all manufactured by Dainippon Ink), UVR — 6410 (manufactured by Union Power-Bidede), RE—310S (manufactured by Nippon Kayaku), YD—8125 (manufactured by Tohto Kasei), etc.
  • Epicoat 828 Epicote 1001, Epicote 1002, Epicote 1003, Epicote 1004 (all made by Japan Epoxy Resin), Epomic R-140, Epomic R-301, Epomic R-304 (all manufactured by Mitsui Chemicals), DER-331,
  • Nord—A type epoxy resin UVR—6490 (Union Carbide), YDF—2001, YDF—2004, YDF—8170 (all manufactured by Tohto Kasei), Epiclon 830, Epiclon 835 (all manufactured by Dainippon Ink) ) Bisphenols such as F-type epoxy resin, HBPA-D GE (manufactured by Maruzen Petrochemicals), Rikaresin HBE-100 (manufactured by Shin Nippon Chemical Co., Ltd.), etc.
  • Brominated bisphenols such as DER—514 and DER—542 (both manufactured by Dow Chemical Co.) — A-type epoxy resin, Celoxide 2021 (manufactured by Daicel), Guatemala Resin DME—100 (manufactured by Nippon Shinritsu), EX-216 (manufactured by Nagase Kasei) and other alicyclic epoxy resins, ED-503 (manufactured by Asahi Denki Co., Ltd.), Guatemala Resin W-100 (manufactured by Nippon Steel
  • Aliphatic diglycidyl ether compounds such as EX-212, EX—214, EX—850 (all manufactured by Nagase Kasei), and polysulfide type diglycidyl ether compounds such as FLEP—50, FLEP—60 (all manufactured by Toray Rethiocol),
  • Examples include biphenol type epoxy compounds such as YX-4000 (Japan Epoxy Resin).
  • the mononuclear content is preferably bisphenol A type epoxy resin.
  • the diisocyanate compound (e) used in the production of the photosensitive aqueous alkali-soluble resin (A) contained in the photosensitive resin composition of the present invention includes two compounds in the molecule.
  • the compound is not particularly limited as long as it is a compound having an isocyanate group, and a plurality of diisocyanate compounds may be mixed and used.
  • diisocyanate compound (e) examples include phenol-diisocyanate, tolylene diisocyanate, xylylene diisocyanate, tetramethylxylylene diisocyanate, diphenyl.
  • the carboxylic acid compound (f) having two hydroxyl groups in the molecule used in the production of the photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition of the present invention is not particularly limited as long as it is a compound having a total of two alcoholic hydroxyl groups or phenolic hydroxyl groups in the molecule and a carboxyl group at the same time, and is a carboxylic acid salt having two alcoholic hydroxyl groups excellent in alkaline aqueous solution developability.
  • the compound is particularly preferred, for example, compounds such as dimethyl oral propionic acid and dimethylol butanoic acid.
  • a diol compound (g) having no carboxyl group may be used for the production of the photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition of the present invention! / ⁇ .
  • the diol compound (g) is an aliphatic or alicyclic compound in which two hydroxyl groups are bonded to two different carbon atoms, and has no carboxyl group. If it is, it will not be specifically limited. These are used as optional components according to the purpose, and are used according to the required properties of the materials used.
  • aliphatic hydrocarbons such as ethylene glycol, propylene glycol, butanediol, pentanediol, hexanediol, heptanediol, octanediol, nonanediol, decanediol, cyclopentanediol, cyclohexanediol, Cyclohexane dimethanol, tricyclodecane dimethanol, adamantane dimethanol and other alicyclic hydrocarbon-based diols, polyethylene glycol, polypropylene glycol, polybutylene glycol and other polyalkylene glycols, poly force prolataton diol, etc.
  • aliphatic hydrocarbons such as ethylene glycol, propylene glycol, butanediol, pentanediol, hexanediol, heptanediol, octane
  • Polyester-based diols such as polyhexanediol carbonate, polycyclohexane dimethanol power-polycarbonate diols such as bonates, spiroglycol, dioxane Heterocyclic diols such as alcohol, hydroxyl groups-modified polybutadiene polymers at both ends, hydroxyl groups-modified polybutadiene monoacrylonitrile copolymers at both ends, hydroxyl groups-modified styrene-taratonitrile copolymers, hydroxyl groups-modified polyethylene at both ends, Examples thereof include terminal hydroxyl group-modified copolymers such as terminal hydroxyl group-modified polypropylene.
  • alicyclic hydrocarbon diols polyalkylene glycols, polyester diols and heterocyclic diols are preferred. These are generally industrially available, are relatively inexpensive, and are excellent.
  • a photosensitive resin composition having improved developability and flexibility can be provided.
  • the photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition of the present invention is, as described above, an epoxy compound (d) having two epoxy groups in the molecule. And an epoxy carboxylate compound having an alcoholic hydroxyl group obtained by the reaction of a monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule (hereinafter referred to as the third reaction). And a diisocyanate compound (e) and a carboxylic acid compound (f) having two hydroxyl groups in the molecule, separately prepared by urethane reaction (hereinafter referred to as fourth reaction).
  • the fourth reaction may be carried out by adding a diol compound (g) having no carboxyl group as an optional component.
  • an optional component, polybasic acid anhydride (c), may be added and reacted.
  • the third reaction is a solvent-free or alcoholic hydroxyl group-free solvent such as ketones such as acetone, ethylmethylketone, cyclohexanone, benzene, toluene, xylene, tetramethylbenzene, etc.
  • ketones such as acetone, ethylmethylketone, cyclohexanone, benzene, toluene, xylene, tetramethylbenzene, etc.
  • Aromatic hydrocarbons ethylene glycol dimethyl ether, ethylene glycol jetyl ether, dipropylene glycol dimethyl ether, dipropylene glycol dimethyl ether, triethylene glycol dimethyl ether, triethylene glycol dimethyl ether, and other glycol ethers, ethyl acetate, acetic acid Butyl, methyl solvate acetate, cetyl sorb acetate, butyl cellosolve acetate, carbitol acetate, propylene glycol monomethyl ether acetate, dialkyl glutarate (E.g., dimethyl glutarate), dialkyl succinate (e.g., dimethyl succinate), esters such as dialkyl adipate (e.g., dimethyl adipate), cyclic esters such as ⁇ -butyrolatatone, petroleum ether, Petroleum solvents such as petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha, and the reactive cross-linking agent ( ⁇
  • the charge ratio of the raw material in the third reaction is as follows.
  • a range in which the carboxyl group is from 0.8 to 1.2 equivalents is preferred. Within this range, the epoxy group remaining as unreacted or the monocarboxylic acid (b) remaining as an excess is also small, so that the storage stability of the resin (A) over time, thermal stability, Stability during production Etc. are improved.
  • the third reaction it is preferable to use a catalyst to promote the reaction.
  • the amount used is about 0.1 to 10% by weight with respect to the reaction product. .
  • Examples of the catalyst include triethylamine, benzyldimethylamine, sodium salt triethylamine, benzyltrimethylammonium bromide, benzyltrimethylammonium iodide, and triphenyl.
  • Examples include ruphosphine, triphenylstibine, chromium octoate, and zirconium octoate.
  • the reaction temperature is 60 to 150 ° C, and the reaction time is preferably 5 to 60 hours.
  • thermal polymerization inhibitor that may be used in the third reaction is preferably used as the thermal polymerization inhibitor, for example, hydroquinone monomethyl ether, 2-methylhydroquinone, hydrated quinone, diphenol Examples include rupicrylhydrazine, diphenylamine, and 2,6-di-tert-butyl-p-talesole.
  • the third reaction samples the sample with an acid value (based on JIS K5601-2-1: 1999) of lmg ⁇ KOH / g or less, preferably 0.
  • the end point will be the time when it falls below 5mg'KOHZg.
  • the fourth reaction After completion of the third reaction, the fourth reaction has a carboxylic acid compound (f) having two hydroxyl groups in the molecule and a carboxyl group as an optional component in the reaction solution. It is a urethanization reaction in which the diol compound (g) is added to form a dispersion or solution, and the diisocyanate compound (e) is gradually added and reacted.
  • the fourth reaction may be performed after the product of the third reaction is separated, or the fourth reaction may be performed subsequently without separating the product of the third reaction.
  • the fourth reaction can be carried out without a catalyst, but a basic catalyst can be used to promote the reaction, and the catalyst is the same as the catalyst used in the second reaction described above.
  • the amount used may be 10% by weight or less based on the reaction product.
  • the reaction temperature is 40 to 120 ° C, and the reaction time is preferably 5 to 60 hours.
  • the above-mentioned solvent or thermal polymerization inhibitor may be used.
  • the urethane reaction process which is the fourth reaction, performs an infrared absorption scan while appropriately sampling.
  • Moshiku ⁇ Contact IS K1556 those measured by a titration method indicated in 1968 or the like can be applied.
  • the latter method is more preferable.
  • the end point is preferably a point that falls within the range of the content power of the isocyanate group calculated from the actual charging ratio plus or minus 2%.
  • polybasic acid anhydride (c) When the polybasic acid anhydride (c) is reacted as an optional component, it may be reacted in the same manner as the second reaction after the fourth reaction.
  • the amount of the carboxylic acid compound (f) having two hydroxyl groups in the molecule and the polybasic acid anhydride (c) as an optional component is the amount of the photosensitive alkaline aqueous solution soluble resin (A). It is preferable to add a calculated amount that gives a solid acid value of 0 to 150 mg'KOHZg. If the solid content acid value is 50 mg'KOH / g or more, good solubility in an alkaline aqueous solution is exhibited, and if the solid content acid value is 150 mg'KOH / g or less, during patterning during development, It is possible to prevent the patterning badness caused by overdissolution.
  • the amount of the diisocyanate compound (e) charged is (the number of moles of the epoxycarboxylate compound formed in the third reaction + the carboxyl oxidation having two hydroxyl groups in the molecule).
  • the ratio of the number of moles of compound (f) + the number of moles of diol compound (g) as an optional component) / (number of moles of diisocyanate compound (e)) is preferably in the range of 1-5. ,. If this ratio is 1 or more, the isocyanate group remaining after the completion of the reaction does not remain, so that it is possible to prevent poor storage stability due to crosslinking of the isocyanate group. On the other hand, when this ratio is 5 or less, the molecular weight increases, so that the poor tackiness prevents the sensitivity from being lowered.
  • the content ratio of the photosensitive alkaline aqueous solution-soluble resin (A) in the photosensitive resin composition of the present invention is usually when the solid content of the photosensitive resin composition is 100% by weight. It is 15 to 70% by weight, preferably 20 to 60% by weight.
  • the photosensitive aqueous alkali-soluble soluble resin (A) of the present invention thus obtained can be made solid by removing it with an appropriate method when a solvent is used.
  • the reactive crosslinking agent (B) contained in the active energy ray-curable resin composition of the present invention is the same as the alkali aqueous solution-soluble resin (A) of the present invention, which cures the photosensitive resin composition.
  • A alkali aqueous solution-soluble resin
  • it is a generic term for those that show reactivity and form a crosslinked structure. These are used to give physical properties before and after curing according to the purpose of use.
  • reactive crosslinking agent (B) examples include radical reaction type attalylates, cation reaction type other epoxy compounds, vinyl compounds that are sensitive to both, and the like. Examples include so-called reactive oligomers. Among these, it is preferable to select a radical reaction type crosslinking agent because the alkaline water solution soluble resin (A) of the present invention has an acidic group. This is because the crosslinking reaction proceeds with the cation derived from (A).
  • radical reaction type acrylates examples include monofunctional (meth) acrylates, polyfunctional (meth) acrylates, other epoxy acrylates, polyester acrylates, uretan acrylates, and the like. .
  • Monofunctional (meth) acrylates include alkyl (meth) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate and lauryl (meth) acrylate.
  • alkyl (meth) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate and lauryl (meth) acrylate.
  • Cycloaliphatic (meth) acrylates such as aromatic (meth) acrylates, isobornyl (meth) acrylates, cyclohexyl (meth) acrylates, and heterocycles such as tetrahydrofurfuryl (meth) acrylates Contains (meth) attalylates.
  • polyfunctional (meth) acrylates examples include butanediol di (meth) acrylate, hexane diol di (meth) acrylate, neopentyl glycol di (meth) acrylate, nonanediol all (meth) acrylate Alkylene diols (meth) acrylates, glycol di (meth) acrylate, diethylene di (meth) acrylate, polyethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, etc.
  • Cycloaliphatics such as aromatic (meth) acrylate, hydrogenated bisphenol ethylene oxide (meth) acrylate, etc., bisphenol ethylene oxide di (meth) acrylate, bisphenol di (meth) acrylate, etc. (Meta) atarylates, Squirrel (meth) ⁇ methacryloyl Ruo key heterocycle containing such Chez chill iso Xia isocyanurate (meth) Atari rates acids, adipic Other epoxy acrylates such as epoxy di (meth) acrylate, dipentaerythritol poly (meth) acrylate, trimethylolpropane tri (meth) acrylate, triethylol propane tri (meth) acrylate, etc.
  • Ethylene oxide adducts such as dipentaerythritol poly (meth) acrylate, trimethylol propane tri (meth) acrylate, triethylene propane tri (meth) acrylate, or propylene oxide adduct (meth) ate Poly (meth) atalylate, a reaction product of dipentaerythritol and ⁇ -force prolataton Lumpur force Purorataton modified (meth) Atari rate such like.
  • Examples of the bull compounds that can be used include bull ethers, styrenes, and other bull compounds.
  • the bull ethers include ethyl vinyl ether, propyl vinylenoatenole, hydroxyethinorevininoatenole, and ethylene glyconoresininoatele.
  • Examples of styrenes include styrene, methyl styrene, ethyl styrene and the like.
  • Other bully compounds include triallyl isocyanurate, trimethallyl isocyanurate, and the like.
  • the addition ratio of these reactive crosslinking agents ( ⁇ ) is usually 2 to 40 wt%, preferably 5 to 30 wt%, when the solid content of the photosensitive resin composition is 100 wt%. .
  • the photopolymerization initiator (C) used in the present invention is preferably a radical photoinitiator.
  • benzoins such as benzoin, benzoin methyl ether, benzoin ethyl ethere, benzoin propyl ether, benzoin isobutyl ether; Cetophenone, 1,1-dichloroacetophenone, 2-hydroxy-2-methyl-phenylpropane 1-one, methoxyacetophenone, 1-hydroxyl hexylphenol ketone, 2-methyl-1-phenyl [4- (methylthio) phenol ]
  • Acetophenones such as 2 morpholinopropane 1-one; anthraquinones such as 2-ethylanthraquinone, 2-t-butinoleanthraquinone, 2-cloanthraquinone, 2-aminoleanthraquinone; 2, 4 Jetylthioxanthone, 2-Isopropylthio Thi
  • the addition ratio of the photopolymerization initiator (C) is usually 1 to 30% by weight, preferably 2 to 25% by weight, when the solid content of the photosensitive resin composition is 100% by weight.
  • photopolymerization started Agent (C) can be used alone or as a mixture of two or more thereof, and further, tertiary amines such as triethanolamine and methyldiethanolamine, ethyl ester of N, N-dimethylaminobenzoate, isoamyl N, N-dimethylaminobenzoate. May be used in combination with reaction accelerators such as benzoic acid derivatives such as esters! The addition amount of these reaction accelerators is preferably 100% by weight or less based on the photopolymerization initiator (C).
  • the curing agent (D) contained in the photosensitive resin composition of the present invention is the above formula (1) [wherein n represents the number of repetitions. ] This is a 4,4'-integrated bisphenol F-type epoxy resin with good molecular symmetry.
  • the curing agent (D) forms a cured coating film having stronger chemical resistance and the like by post-curing which reacts by heating with the carboxyl group remaining in the resin film after photocuring.
  • the 4,4'-integrated bisphenol F-type epoxy resin having good molecular symmetry represented by the formula (1) has liquid crystallinity.
  • the melting point of the curing agent (D) is usually 70 to 150 ° C, preferably 80 to 150 ° C.
  • the epoxy equivalent is usually 250 to 2000 gZ equivalent, preferably 300 to lOOOOgZ equivalent.
  • the epoxy resin used as the curing agent (D) represented by the above formula (1) contained in the photosensitive resin composition of the present invention includes, for example, the following formula (2):
  • the phenolic compound represented by The compound is a crystal having a melting point of around 163 ° C., and is commercially available, for example, under the trade name p, p′-BPF (Honshu Chemical; purity> 99%).
  • the phenolic compound is reacted with epino and rhohydrin in the presence of an alkali metal hydroxide to obtain a low molecular weight epoxy resin. Further, this compound and the phenolic compound represented by the formula (2) are used. And by precipitating crystals from the resulting reaction mixture, an epoxy resin as a curing agent (D) contained in the photosensitive resin composition can be obtained.
  • epichlorohydrin or epipibromhydrin can be used, and the amount used is 1 mol of phenolic hydroxyl group of the phenolic compound represented by the formula (2).
  • the amount is usually 2 to 15 mol, preferably 3 to 12 mol.
  • Examples of the alkali metal hydroxide include sodium hydroxide, potassium hydroxide, and the like, which can be used in a solid form or an aqueous solution thereof. When using an aqueous solution, it is added to the reaction system continuously.
  • a method in which water, epino and lohydrin are distilled off under reduced pressure or normal pressure, followed by liquid separation to remove water and epino and lohydrin being continuously returned to the reaction system can be preferably used.
  • the amount of alkali metal hydroxide used in the above reaction is usually 0.9 to 1.2 monolayers with respect to 1 monoreoxy group of hydroxyl groups of the phenolic compound represented by formula (2). , Preferably 0.95: L 15 mol.
  • reaction temperature is usually 20 to 110 ° C, preferably 25 to 100 ° C.
  • Reaction time is usually 0.5
  • an aprotic polar solvent such as dimethyl sulfoxide or dimethyl sulfone
  • an alcohol such as methanol, ethanol, propanol or butanol, or to promote the reaction smoothly.
  • the amount used is usually 3 to 3 with respect to the amount of epino and rhohydrin.
  • the amount used is usually 10 to 150% by weight, preferably 15 to 120% by weight, based on the amount of epihalohydrin.
  • salts such as tetramethylammonium chloride, tetramethylammonium bromide, trimethylbenzylammonium chloride, etc.
  • a quaternary ammonium salt as a catalyst and react for 30 to 110 hours) for 0.5 to 8 hours to a halohydrin ether compound obtained by adding a solid or aqueous solution of an alkali metal hydroxide.
  • the reaction may be carried out at 20-100 ° C for 1-10 hours, followed by denomination and Logeny hydrogen (ring closure).
  • the obtained epoxy resin is dissolved in toluene, methylisobutyl ketone, etc.
  • An epoxy resin having less hydrolyzable halogen can be obtained by providing an aqueous solution of an alkali metal hydroxide such as sodium hydroxide or potassium hydroxide to ensure ring closure.
  • the amount of alkali metal hydroxide used is usually 0.01 to 0.3 monolayer, preferably 0.05 to 0.2 monolayer, with respect to 1 mol of hydroxyl group of the phenolic compound. .
  • reaction time is usually 0.5 to 2 hours.
  • the produced salt is removed by filtration or washing with water, and the solvent is removed under reduced pressure by heating to obtain a low molecular weight epoxy resin.
  • the epoxy equivalent of the epoxy resin is usually about 160 to 200 gZ equivalent.
  • the epoxy equivalent has the same meaning as commonly used, and means the mass of an epoxy compound containing 1 lg equivalent of an epoxy group, and is expressed in units of gZ equivalent, usually
  • the content ratio of the above polymers can be increased.
  • the charge ratio of the epoxy resin to the compound represented by the formula (2) is generally 0.05 to 0.95 for the phenolic hydroxyl group of the compound of the formula (2) to 1 mol of the epoxy group of the epoxy resin.
  • a ratio of mol, preferably 0.1 to 0.9 mol is preferred.
  • a catalyst is preferred to promote the reaction.
  • the catalyst include quaternary phosphonium salts such as benzyl chloride phosphor bromide, butyl triphenyl phosphor bromide, bromide tilt triphosphor phosphate, and iodinated tilt triphosphor phosphorous. And triphenylphosphine, sodium tetramethyl ammonium, sodium hydroxide, potassium hydroxide and the like.
  • the amount of the catalyst used is usually 0.01 to 10 parts by weight, preferably 0.05 to 5 parts by weight, based on 1 mol of epoxy groups of the epoxy resin.
  • the quaternary phosphonium salt is preferable because it gives a linear epoxy resin, and the salt is water-soluble and can be easily removed by washing with water after the reaction. .
  • solvent examples include clopentanone, cyclohexanone, methyl isobutyl ketone, methyl ethyl ketone, acetonitrile, toluene, N-methylpyrrolidone, dimethyl sulfoxide, and N, N-dimethylformamide.
  • the amount used is usually about 5 to 150% by weight, preferably about 10 to about LOO% by weight, based on the total weight of the epoxy resin and the phenolic compound represented by the formula (2).
  • the reaction temperature is usually 60 to 180 ° C, preferably 70 to 160 ° C.
  • the progress of the reaction can be monitored by GPC (gel permeation chromatography) or the like, and is continued until the phenolic compound represented by the formula (2) is not detected.
  • the reaction time is usually 0.5 to 15 hours, preferably 1 to 10 hours.
  • reaction solution is cooled as it is to crystallize the desired epoxy resin, and filtered, but the desired solvent for the epoxy resin (the solubility of the epoxy resin is less
  • the method of cooling by adding a low solvent is preferred.
  • this reaction is carried out in a poor solvent for the desired epoxy resin, and after cooling, a good solvent such as N, N-dimethylformamide, dimethyl sulfoxide (a solvent having a high solubility for the desired epoxy resin) is used.
  • a good solvent such as N, N-dimethylformamide, dimethyl sulfoxide (a solvent having a high solubility for the desired epoxy resin) is used.
  • the epoxy resin represented by the above formula (1) which is obtained by dissolving the crystals obtained by addition and then adding a poor solvent thereto, is preferred because the temperature range showing its liquid crystallinity is wider. That's right.
  • Examples of the poor solvent include methyl isobutyl ketone, methyl ethyl ketone, acetone, toluene, methanol, ethanol, water and the like.
  • the amount of the poor solvent used is usually about 50 to 400% by weight, preferably about 100 to 300% by weight, based on the total weight of the epoxy resin and the compound represented by the formula (2).
  • the epoxy resin is represented by the above formula (1), n represents the number of repetitions, and the average value is usually a positive number of 0 to 7, preferably 1 to 7, and a positive number of 3 to 5 Particularly preferred.
  • the content ratio of compounds with different n can be determined by HPLC using a GPC column, and the average value of n can also be determined.
  • the epoxy resin represented by the above formula (1) is measured by DSC (differential thermal analyzer), many endothermic peaks are observed at two or more locations. Force that peaks may overlap This indicates that the epoxy resin has liquid crystallinity.
  • DSC differential thermal analyzer
  • the existence state in the system is considered to be able to achieve both excellent thermal stability and developability.
  • the epoxy resin is usually liquid at normal temperature or has a melting point of 40 ° C or lower. The temperature range that is crystalline and exhibits liquid crystallinity is very narrow.
  • various additives such as talc, barium sulfate, calcium carbonate, magnesium carbonate, barium titanate, aluminum hydroxide, aluminum oxide are optionally added to the photosensitive resin composition of the present invention.
  • Fillers such as silica and clay, thixotropic agents such as aerosil, colorants such as phthalocyanine blue, phthalocyanine green and titanium oxide, silicone and fluorine leveling agents and antifoaming agents, hydroquinone and hydroquinone monomethyl ether
  • a polymerization inhibitor such as can be added for the purpose of enhancing various performances of the composition.
  • the photosensitive resin composition of the present invention contains the photosensitive aqueous alkali-soluble resin (A), a reactive crosslinking agent (B), a photopolymerization initiator (C), and a curing agent (D). To do.
  • the photosensitive alkaline aqueous solution-soluble resin (A) of the present invention is usually soluble in an alkaline aqueous solution, but is also soluble in the solvent used in the production described above, and is used for solder resists, plating resists, and the like. In this case, development with these solvents is also possible.
  • the curing agent (D) may be mixed in advance in the resin composition, but it may be a printed wiring board. It can also be mixed before use. That is, the above-mentioned photosensitive alkaline aqueous solution-soluble resin (A) is mixed into a two-pack type of a main agent solution mainly composed of component (A) and a curing agent solution mainly composed of curing agent (D), and these are mixed in use. Method and such use is preferred.
  • the photosensitive resin composition of the present invention can also be used as a dry film resist having a structural strength in which the resin composition is sandwiched between a support film and a protective film.
  • the above-mentioned photosensitive aqueous alkali-soluble soluble resin (A), reactive crosslinking agent (B), photopolymerization initiator (C), curing agent (D) A photosensitive resin composition containing a filler, an additive, and the like is used as a photosensitive layer, and the photosensitive layer is sandwiched between a support layer and a protective layer to form a dry film.
  • the protective layer is peeled off, the substrate is laminated, exposed to light, the support layer is peeled off and developed.
  • the dry film is specifically prepared as follows, but is not limited thereto.
  • the alkaline water-soluble resin solution (A), the reactive crosslinking agent (B), the photopolymerization initiator (C), A curing agent (D), a thermosetting catalyst, and a concentration adjusting solvent are added, and the mixture is kneaded with a bead mill and uniformly dispersed to obtain a resist resin composition.
  • a hot air drying furnace having a temperature sufficient to volatilize the solvent used, for example, a temperature of 70 ° C, is uniformly applied to a support film such as a polyethylene terephthalate film by a roll coating method. Pass through to form a 30 m thick resin layer, and apply a protective film such as polyethylene film on this resin layer to obtain a dry film.
  • a heated roll on a printed circuit board such as a polyimide blind substrate (copper circuit thickness: 12 m, polyimide film thickness: 25 m) to remove the protective film. Affix to the entire surface of the substrate.
  • the pasting process is preferably performed in a vacuum.
  • Ultraviolet light is irradiated through a mask on which a circuit pattern is drawn using an ultraviolet exposure device.
  • Spray development is performed with an alkaline aqueous solution such as a 1% aqueous sodium carbonate solution to remove the non-ultraviolet-irradiated portion of the resin, washed with water and dried, and the printed circuit board is heated and cured with a hot air dryer to obtain a cured film.
  • the photosensitive resin composition (liquid or film-like) of the present invention includes an insulating material between electronic component layers, an optical waveguide connecting optical components, a solder resist for printed circuit boards, and a resist material such as a coverlay. In addition, it can be used as a color filter, printing ink, sealant, paint, coating agent, adhesive and the like.
  • a cured product obtained by curing the photosensitive resin composition of the present invention by irradiation with active energy rays such as ultraviolet rays is also included in the present invention.
  • Curing by irradiation with active energy rays such as ultraviolet rays can be performed by a conventional method.
  • an ultraviolet generator such as a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, or an ultraviolet light emitting laser (such as an excimer laser).
  • the cured product of the photosensitive resin composition of the present invention is, for example, a resist film, an interlayer insulating material for a buildup method, an optical waveguide such as a printed board, an optoelectronic board, or an optical board as an optical waveguide. Used for optical substrates.
  • Specific examples of articles having these base materials include computers, home appliances, and portable devices. These base materials and articles are also included in the present invention.
  • the thickness of the cured product layer is about 0.5 to 160 m, preferably 1 to about LOO / zm.
  • a liquid resin composition is used to print a printed wiring board on a screen printing method, spray method, roll coating method, electrostatic coating method.
  • the photosensitive resin composition of the present invention is applied at a film thickness of 5 to 160 ⁇ m by a method such as curtain coating, and is usually dried at a temperature of 50 to 110 ° C., preferably 60 to 100 ° C.
  • a coating film is formed by baking.
  • the coating film is directly or indirectly irradiated with active energy rays such as ultraviolet rays with an intensity of about 10 to 2000 mjZcm 2 through a photomask having an exposure pattern such as a negative film.
  • active energy rays such as ultraviolet rays with an intensity of about 10 to 2000 mjZcm 2
  • development is performed by spraying, rocking immersion, brushing, scraping, or the like.
  • it is further irradiated with ultraviolet rays and then heat-treated at a temperature of usually 100 to 200 ° C, preferably 140 to 180 ° C, so that it has excellent gold plating resistance, heat resistance and solvent resistance. It is possible to obtain a printed wiring board having a permanent protective film excellent in various properties such as property, acid resistance, adhesion, and flexibility.
  • alkaline aqueous solution used for development examples include inorganic alkaline aqueous solutions such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium bicarbonate, potassium bicarbonate, sodium phosphate, and potassium phosphate.
  • Organic alkali aqueous solutions such as tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrabutylammonium hydroxide, monoethanolamine, diethanolamine and triethanolamine Can be used.
  • an organic solvent can also be used.
  • GPC was measured according to the following conditions.
  • the coating film after (photosensitivity) drying, exposure by irradiation with ultraviolet light at an accumulated light intensity 500MiZcm 2 is brought into close contact 21 step tablet (manufactured by Kodak). Next, develop with a 1% sodium carbonate solution for 60 seconds at a spray pressure of 2. OkgZcm 2 , and check the number of coating layers remaining without development.
  • Test substrate is acidic degreasing solution at 30 ° C (Nippon McDermitt, Metex L
  • test substrate was immersed in an acid ammonium aqueous solution at room temperature for 3 minutes and then washed with water. Further, the test substrate was immersed in a 10 vol% sulfuric acid aqueous solution at room temperature for 1 minute and then washed with water.
  • This substrate is immersed in a 30 ° C catalyst solution (Meltex, 10vol% aqueous solution of Metal Plate Actuator 350) for 7 minutes, washed with water, and 85 ° C nickel plating solution (Meltex, Melplate) After being immersed in Ni-865M 20vol% aqueous solution, pH 4.6) for 20 minutes and nickel plating, it was immersed in 10vol% sulfuric acid aqueous solution for 1 minute at room temperature and washed with water. Next, immerse the test substrate in a gold plating solution at 95 ° C (Meltex, UP15vol% of the inlet port and 3vol% potassium cyanide, pH 6) for 10 minutes, perform electroless gold plating, and then wash with water. Further, it was immersed in warm water at 60 ° C for 3 minutes, washed with water and dried. Cellotape (registered trademark) was adhered to the obtained electroless gold plating evaluation substrate, and the state when peeled was observed.
  • the photosensitive resin composition of the present invention using the photosensitive alkaline aqueous solution-soluble resin and the curing agent represented by the formula (1) has no tackiness and high sensitivity.
  • the cured film is excellent in solder heat resistance, chemical resistance, gold plating resistance, etc.
  • the resin composition according to the present invention has an excellent developability with no residue, 4-4, low bisphenol F content, and a comparative example using bisphenol F type resin as a curing agent. It is clear that the resin composition is inferior in developability due to the formation of residues.

Abstract

[PROBLEMS] To provide a photosensitive resin composition having excellent photosensitivity and excellent in flexing characteristics, adhesion, pencil hardness, solvent resistance, acid resistance, heat resistance, resistance to gold plating, etc. [MEANS FOR SOLVING PROBLEMS] The photosensitive resin composition comprises a photosensitive resin (A) soluble in an aqueous alkali solution, a reactive crosslinking agent (B), a photopolymerization initiator (C), and a hardener (D), wherein the hardener (D) is a 4,4'-bonding bisphenol F epoxy resin represented by the formula (1): [wherein n indicates the number of repetitions].

Description

明 細 書  Specification
感光性樹脂組成物並びにその硬化物  Photosensitive resin composition and cured product thereof
技術分野  Technical field
[0001] 本発明は、分子の対称性が良好な 4, 4'一体のビスフエノール F型エポキシ榭脂を 硬化剤として用い、感光性アルカリ水溶液可溶性榭脂、反応性架橋剤、光重合開始 剤を含有する感光性榭脂組成物並びにその硬化物に関するものである。更に詳細 には、プリント配線基板用ソルダーレジスト、多層プリント配線板用層間絶縁材料、フ レキシブルプリント配線基板用ソルダーレジスト、ドライフィルムレジスト、メツキレジスト 、感光性光導波路等として有用な、現像性、耐熱性、熱安定性、電気絶縁性、密着 性、耐薬品性、耐メツキ性等に優れた硬化物を与える液状又はドライフィルム型榭脂 組成物、並びにその硬化物に関する。  [0001] The present invention uses a 4,4'-integrated bisphenol F-type epoxy resin having good molecular symmetry as a curing agent, a photosensitive alkaline aqueous solution-soluble resin, a reactive crosslinking agent, and a photopolymerization initiator. This invention relates to a photosensitive resin composition containing selenium and its cured product. More specifically, it is useful as a solder resist for printed wiring boards, an interlayer insulation material for multilayer printed wiring boards, a solder resist for flexible printed wiring boards, a dry film resist, a Maki resist, a photosensitive optical waveguide, and the like. The present invention relates to a liquid or dry film type resin composition that gives a cured product having excellent properties, heat stability, electrical insulation, adhesion, chemical resistance, and resistance to scratching, and the cured product.
背景技術  Background art
[0002] 感光性エポキシカルボキシレートイ匕合物を用いた感光性榭脂組成物は、環境にや さしぐ熱的'力学的性質、基材に対する接着性等の種々の特性のバランスに優れて いる。このため、塗料'コーティングや接着剤等の分野で用いられており、最近では、 電気'電子部品製造用途やプリント配線基板製造用途等の広い工業分野で使用さ れるようになり、更に、その応用範囲が広がりつつある。一方、この使用分野の拡大に 伴い、感光性エポキシカルボキシレートイ匕合物を用いた感光性榭脂組成物には、耐 熱性や密着性等の特性にっ ヽてより高 、性能が要求されて ヽる。  [0002] A photosensitive resin composition using a photosensitive epoxy carboxylate compound is excellent in balance of various characteristics such as environmentally friendly thermal and mechanical properties and adhesion to a substrate. ing. For this reason, it is used in the fields of coatings and coatings, and recently, it has been used in a wide range of industrial fields such as electrical and electronic parts manufacturing and printed wiring board manufacturing. The range is expanding. On the other hand, with the expansion of this field of use, photosensitive resin compositions using photosensitive epoxy carboxylate compounds are required to have higher performance in terms of characteristics such as heat resistance and adhesion. Speak.
[0003] プリント配線基板については、携帯通信機器等の小型軽量ィ匕ゃ通信速度の向上を 目指して高精度、高密度化が求められ、それに用いられるソルダーレジストへの要求 も、更なる耐熱性、熱安定性を保ちつつ、基板密着性、高絶縁性、無電解金メッキ耐 性にも優れるという増々高度なものになっている。しかしながら、現有のソルダーレジ ストにはこれらに十分対応して 、るものとは 、えな!/、。  [0003] With regard to printed wiring boards, small and lightweight devices such as portable communication devices are required to have high precision and high density in order to improve communication speed, and the demand for solder resists used for them is further increased in heat resistance. In addition, while maintaining thermal stability, it has become increasingly sophisticated with excellent substrate adhesion, high insulation, and electroless gold plating resistance. However, the current solder registries are enough to cope with these.
[0004] 特許文献 1にはノボラック型エポキシ榭脂と不飽和一塩基酸の反応生成物に酸無 水物を付加した感光性榭脂を含有するソルダーマスク組成物が記載されているが、 この組成物の硬化物は耐熱性、密着性、耐メツキ性が十分ではなかった。 [0005] 特許文献 2にはウレタン変性ビュルエステル榭脂を含有する光重合性榭脂組成物 が記載されており、この組成物の硬化物にはフレキシブル性はある力 耐熱性、密着 、ては十分な性能ではなかった。 [0004] Patent Document 1 describes a solder mask composition containing a photosensitive resin in which an acid anhydrous is added to a reaction product of a novolac-type epoxy resin and an unsaturated monobasic acid. The cured product of the composition was not sufficient in heat resistance, adhesion, and scratch resistance. [0005] Patent Document 2 describes a photopolymerizable resin composition containing urethane-modified bull ester resin, and the cured product of this composition has flexibility, heat resistance, adhesion, Not enough performance.
[0006] 特許文献 3には硬化剤として難溶性微粒状エポキシ榭脂を用い、その一部をビスフ ェノール F型のエポキシ樹脂等の可溶性樹脂に置き換えることも可能である樹脂組 成物が記載されている。又、特許文献 4には可溶性エポキシ榭脂としてビスフエノー ル F型エポキシ榭脂が例示されて 、る。 [0006] Patent Document 3 describes a resin composition in which a hardly soluble fine particulate epoxy resin is used as a curing agent and a part thereof can be replaced with a soluble resin such as a bisphenol F type epoxy resin. ing. Patent Document 4 exemplifies bisphenol F type epoxy resin as a soluble epoxy resin.
[0007] しカゝしながら、ビスフエノール F型エポキシ榭脂は溶剤への溶解性が高ぐ溶解した エポキシ榭脂は酸変性した感光性榭脂と容易に反応するため現像時に残渣が残る という欠点があった。 [0007] However, bisphenol F-type epoxy resin is highly soluble in solvents. Epoxy resin reacts easily with acid-modified photosensitive resin, so that residues remain during development. There were drawbacks.
[0008] 特許文献 5には、分子の対称性が良好な 4, 4'一体のビスフエノール F型エポキシ 榭脂、即ち、後記の式(1)において n=0である化合物の含有割合が高い結晶性榭 脂が記載されている。しかしながら、その融点が 50〜70°Cと低いため、通常硬化の 際に行われるプリべイク (硬化前の乾燥工程)時に酸変性した感光性榭脂と反応して しまい、現像時に残渣が残るという欠点があった。特許文献 6には、 4, 4'—体のビス フエノール F型エポキシ榭脂が記載されて ヽるが、感光性アルカリ水溶液可溶性榭 脂の硬化剤として使用することは開示されていない。  [0008] In Patent Document 5, a 4,4′-integrated bisphenol F-type epoxy resin having good molecular symmetry, that is, a high content ratio of a compound in which n = 0 in the following formula (1) Crystalline resins are described. However, since its melting point is as low as 50 to 70 ° C, it reacts with acid-modified photosensitive resin during pre-baking (drying process before curing) that is usually performed during curing, and a residue remains during development. There was a drawback. Patent Document 6 describes a 4,4′-form bisphenol F-type epoxy resin, but does not disclose its use as a curing agent for a photosensitive alkaline aqueous solution-soluble resin.
[0009] 特許文献 1:特開昭 61— 243869号公報  Patent Document 1: Japanese Patent Application Laid-Open No. 61-243869
特許文献 2:特開平 9— 52925号公報  Patent Document 2: JP-A-9-52925
特許文献 3 :特公平 7— 17737号公報  Patent Document 3: Japanese Patent Publication No. 7-17737
特許文献 4:特開 2000— 109541号公報  Patent Document 4: Japanese Unexamined Patent Publication No. 2000-109541
特許文献 5:特開平 8 - 73563号公報  Patent Document 5: JP-A-8-73563
特許文献 6 :WO2006Z00 4  Patent Document 6: WO2006Z00 4
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0010] 本発明の目的は、上記のような高機能なプリント配線基板等にも用いることが可能 なソルダーマスクへの高 、性能要求に対し、微細な画像の印刷のための活性ェネル ギ一線に対する感光性に優れ、アルカリ水溶液による現像によるパターン形成が容 易で、後硬化 (ポストキュア)工程の熱硬化で得られる硬化物のフレキシブル性、密着 性、ハンダ耐熱性、無電解金メッキ耐性等に優れ、現像時に残渣が残らない榭脂組 成物並びにその硬化物を提供することにある。 [0010] An object of the present invention is to provide an active energy line for printing fine images in response to high performance requirements for solder masks that can be used for the above-described high-performance printed wiring boards and the like. It has excellent photosensitivity to patterns, and pattern formation by development with alkaline aqueous solution is easy. A resin composition that is easy and excellent in flexibility, adhesion, solder heat resistance, electroless gold plating resistance, etc. of cured products obtained by heat curing in a post-curing (post-cure) process. It is to provide a cured product.
課題を解決するための手段  Means for solving the problem
[0011] 本発明者らは上記の課題を解決するため鋭意研究の結果、本発明を完成する〖こ 至った。  As a result of intensive studies to solve the above problems, the present inventors have completed the present invention.
[0012] 即ち、本発明は、  [0012] That is, the present invention provides
[0013] 1)感光性アルカリ水溶液可溶性榭脂 (A)、反応性架橋剤 (B)、光重合開始剤 (C) 及び硬化剤 (D)を含有する感光性榭脂組成物にお!ヽて、該硬化剤 (D)が式(1) [0014] [化 1]
Figure imgf000004_0001
[0013] 1) A photosensitive resin composition containing a photosensitive aqueous alkali-soluble resin (A), a reactive crosslinking agent (B), a photopolymerization initiator (C), and a curing agent (D)! The curing agent (D) is represented by the formula (1) [0014]
Figure imgf000004_0001
[式中、 nは繰り返し数を表す。 ] [Wherein n represents the number of repetitions. ]
で表される 4, 4'一体のビスフエノール F型エポキシ榭脂である感光性榭脂組成物; [0015] 2)硬化剤(D)の nが 1〜7の正数であり、その融点が 80〜150°Cの結晶である上記 1 A photosensitive resin composition that is a bisphenol F-type epoxy resin that is integrated with 4, 4 ′ represented by: [0015] 2) n of the curing agent (D) is a positive number from 1 to 7, and its melting point Above is a crystal of 80-150 ° C 1
)記載の感光性榭脂組成物; ) Photosensitive resin composition according to the description;
[0016] 3)感光性アルカリ水溶液可溶性榭脂 (A)が、分子中に 2個以上のエポキシ基を有す るエポキシィ匕合物(a)と分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合 物 (b)の反応で得られるエポキシカルボキシレートイ匕合物と、多塩基酸無水物(c)と の反応生成物である上記 1)又は 2)に記載の感光性榭脂組成物; [0016] 3) A photosensitive alkaline aqueous solution-soluble resin (A) comprising an epoxy compound ( a ) having two or more epoxy groups in the molecule and a monocarboxylic acid having an ethylenically unsaturated group in the molecule The photosensitive resin according to 1) or 2) above, which is a reaction product of an epoxy carboxylate compound obtained by the reaction of the acid compound (b) and the polybasic acid anhydride (c). Composition;
[0017] 4)感光性アルカリ水溶液可溶性榭脂 (A)が、分子中に 2個のエポキシ基を有するェ ポキシ化合物(d)と分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b )の反応で得られるエポキシカルボキシレートイ匕合物と、ジイソシァネートイ匕合物(e)、 分子中に 2個の水酸基を有するカルボン酸化合物 (f)、及び任意成分としてのカル ボキシル基を有しないジオールィ匕合物 (g)との反応生成物、又は前記反応生成物と 任意成分としての多塩基酸無水物(c)との反応生成物である上記 1)又は 2)に記載 の感光性榭脂組成物; [0018] 5)上記 1)〜4)の 、ずれか一項に記載の感光性榭脂組成物の硬化物; [0017] 4) Photosensitive alkaline aqueous solution soluble resin (A) is an epoxy compound (d) having two epoxy groups in the molecule and a monocarboxylic acid compound having an ethylenically unsaturated group in the molecule. Epoxy carboxylate compound obtained by reaction of compound (b), diisocyanate compound (e), carboxylic acid compound (f) having two hydroxyl groups in the molecule, and optional components 1) or 2 above, which is a reaction product of a dioli compound (g) having no carboxyl group or a reaction product of the reaction product with an optional polybasic acid anhydride (c). ) Photosensitive resin composition according to [0018] 5) A cured product of the photosensitive resin composition according to any one of 1) to 4) above;
6)上記 5)記載の硬化物の層を有する基材;  6) A substrate having a cured product layer as described in 5) above;
7)上記 6)記載の基材を有する物品;  7) Articles having the substrate described in 6) above;
に関する。  About.
発明の効果  The invention's effect
[0019] 感光性アルカリ水溶液可溶性榭脂 (A)、反応性架橋剤 (B)、光重合開始剤 (C)及 び融点が 80〜150°Cの結晶である 4, 4'一体のビスフエノール F型エポキシ榭脂を 硬化剤 (D)として含有する本発明の感光性榭脂組成物は、タック性、感光性に優れ 、アルカリ水溶液による現像によりパターン形成できると共に、活性エネルギー線によ る硬化と後硬化 (ポストキュア)工程としての熱硬化で得られるその硬化物は、屈曲性 、耐溶剤性、耐酸性、熱安定性、柔軟性、密着性、ハンダ耐熱性、無電解金メッキ耐 性等に優れた性能を有しており、特に、プリント配線板用感光性榭脂組成物及びドラ ィフィルム用感光性榭脂組成物に適して ヽる。 発明を実施するための最良の形態  [0019] Photosensitive alkaline aqueous soluble resin (A), reactive cross-linking agent (B), photopolymerization initiator (C), and 4, 4 'integral bisphenol which is a crystal having a melting point of 80 to 150 ° C The photosensitive resin composition of the present invention containing F type epoxy resin as a curing agent (D) is excellent in tackiness and photosensitivity, can be patterned by development with an alkaline aqueous solution, and is cured by active energy rays. The cured product obtained by thermal curing as a post-curing process is flexible, solvent-resistant, acid-resistant, thermal stability, flexibility, adhesion, solder heat resistance, electroless gold plating resistance, etc. In particular, it is suitable for a photosensitive resin composition for printed wiring boards and a photosensitive resin composition for dry films. BEST MODE FOR CARRYING OUT THE INVENTION
[0020] 本発明の感光性榭脂組成物は、感光性アルカリ水溶液可溶性榭脂 (A)、反応性 架橋剤 (B)、光重合開始剤 (C)及び前記式 (1) [式中、 nは繰り返し数を表す。 ]で表 される 4, 4'—体のビスフエノール F型エポキシ榭脂である硬ィ匕剤(D)を含有する。  [0020] The photosensitive resin composition of the present invention comprises a photosensitive alkaline aqueous solution-soluble resin (A), a reactive crosslinking agent (B), a photopolymerization initiator (C), and the above formula (1) [wherein n represents the number of repetitions. The hardener (D) which is a 4,4′-form bisphenol F type epoxy resin represented by the formula:
[0021] 感光性アルカリ水溶液可溶性榭脂とは活性エネルギー線等により硬化する活性基 を有し、アルカリ水溶液で現像可能な榭脂である。  [0021] The photosensitive aqueous alkali-soluble soluble resin has an active group that is cured by active energy rays or the like and is developable with an aqueous alkaline solution.
[0022] 該感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂 (A)としては 、例えば、分子中に 2個以上のエポキシ基を有するエポキシィ匕合物(a)と分子中にェ チレン性不飽和基を有するモノカルボン酸化合物 (b)の反応で得られるエポキシ力 ルポキシレートイ匕合物と、多塩基酸無水物(c)との反応生成物が挙げられる。  [0022] The photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition includes, for example, an epoxy compound (a) having two or more epoxy groups in the molecule and the molecule Examples thereof include a reaction product of an epoxy strength lpoxylate compound obtained by the reaction of a monocarboxylic acid compound (b) having an ethylenically unsaturated group and a polybasic acid anhydride (c).
[0023] 本発明において示されるエポキシィ匕合物(a)とは、一分子中に 2個以上のエポキシ 基を有するものであれば特に限定されな 、。 2個以上のエポキシ基を有することで、 モノカルボン酸ィ匕合物 (b)と反応させた際、一分子中に複数のエチレン性不飽和基 を導入することができる。エポキシ当量を lOOg/当量以上とすることで、分子量が大 きくなり、成膜性が向上し、またフレキシブル性が向上する。またエポキシ当量を 900 g/当量以下とすることで、エチレン性不飽和基の導入量が増加するために、硬化に 対する感度が向上する。一分子中に有するエポキシ基の数としては、 2個以上 50個 以下が好ましい。さらに好ましくは 3個から 20個である。この範囲であれば、エポキシ 基が少ない際に懸念される硬化部位の低減による硬化性の低下や、多い際に懸念 される高分子量ィ匕に伴う粘度上昇等を防ぐことができる。 [0023] The epoxy compound (a) shown in the present invention is not particularly limited as long as it has two or more epoxy groups in one molecule. By having two or more epoxy groups, a plurality of ethylenically unsaturated groups can be introduced into one molecule when reacted with the monocarboxylic acid compound (b). By setting the epoxy equivalent to lOOg / equivalent or more, the molecular weight increases, the film formability improves, and the flexibility improves. The epoxy equivalent is 900 When the amount is not more than g / equivalent, the amount of ethylenically unsaturated groups introduced increases, so the sensitivity to curing is improved. The number of epoxy groups in one molecule is preferably 2 or more and 50 or less. More preferably, the number is 3 to 20. If it is this range, the curability fall by the reduction | decrease of the cure site concerned when there are few epoxy groups, the viscosity raise accompanying the high molecular weight 懸念 which is concerned when there are many can be prevented.
[0024] 該エポキシィ匕合物(a)としては、例えば、フエノールノボラック型エポキシ榭脂、タレ ゾールノボラック型エポキシ榭脂、トリスヒドロキシフエニルメタン型エポキシ榭脂、ジシ クロペンタジェンフエノール型エポキシ榭脂、ビスフエノール型エポキシ榭脂(ビスフ エノールー A型エポキシ榭脂、ビスフエノール一 F型エポキシ榭脂等)、ビフエノール 型エポキシ榭脂、ビスフエノールー Aノボラック型エポキシ榭脂、ナフタレン骨格含有 エポキシ榭脂、脂環式エポキシ榭脂、複素環式エポキシ榭脂等が挙げられる。  [0024] Examples of the epoxy compound (a) include phenol novolac type epoxy resin, taresole novolac type epoxy resin, trishydroxyphenylmethane type epoxy resin, dicyclopentadiene phenol type epoxy resin. Bisphenol type epoxy resin (bisphenol-A type epoxy resin, bisphenol-F type epoxy resin, etc.), biphenol type epoxy resin, bisphenol-A novolac type epoxy resin, naphthalene skeleton-containing epoxy resin, alicyclic And epoxy epoxy resin and heterocyclic epoxy resin.
[0025] フエノールノボラック型エポキシ榭脂としては、例えば、ェピクロン N— 770 (大日本 インキ化学工業製)、 D. E. N438 (ダウ'ケミカル社製)、ェピコート 154 (油化シェル エポキシ製)、 EPPN— 201、 RE— 306 (いずれも日本ィ匕薬製)等が挙げられる。  [0025] Examples of phenol novolac type epoxy resins include Epiclon N-770 (Dainippon Ink Chemical Co., Ltd.), DE N438 (Dow Chemical Co., Ltd.), Epicoat 154 (Oilized Shell Epoxy), EPPN-201 , RE-306 (all manufactured by Nihon Shakuyaku) and the like.
[0026] クレゾ一ルノボラック型エポキシ榭脂としては、例えば、ェピクロン N— 695 (大日本 インキ化学工業製)、 EOCN— 102S、 EOCN— 103S、 EOCN— 104S (いずれも 日本化薬製)、 UVR— 6650 (ユニオンカーバイド社製)、 ESCN— 195 (住友化学 工業製)等が挙げられる。  [0026] Examples of the cresol novolac type epoxy resin include Epiclone N-695 (Dainippon Ink Chemical Co., Ltd.), EOCN-102S, EOCN-103S, EOCN-104S (all manufactured by Nippon Kayaku), UVR- 6650 (made by Union Carbide), ESCN-195 (made by Sumitomo Chemical), etc. are mentioned.
[0027] トリスヒドロキシフエ-ルメタン型エポキシ榭脂としては、例えば、 EPPN— 503、 EP PN— 502H、 EPPN— 501H (いずれも日本化薬製)、 TACTIX— 742 (ダウ 'ケミカ ル社製)、ェピコート E1032H60 (油化シェルエポキシ製)等が挙げられる。  [0027] Trishydroxyphenol methane type epoxy resin includes, for example, EPPN-503, EP PN-502H, EPPN-501H (all manufactured by Nippon Kayaku), TACTIX-742 (manufactured by Dow Chemical Company), Epicoat E1032H60 (Oilized Shell Epoxy) and the like.
[0028] ジシクロペンタジェンフエノール型エポキシ榭脂としては、例えば、ェピクロン EXA  [0028] Examples of the dicyclopentadiene phenol type epoxy resin include epiclone EXA.
- 7200 (大日本インキ化学工業製)、 TACTIX- 556 (ダウ ·ケミカル社製)等が挙 げられる。  -7200 (Dainippon Ink Chemical Co., Ltd.), TACTIX-556 (Dow Chemical Co., Ltd.)
[0029] ビスフエノール型エポキシ榭脂としては、例えば、ェピコート 828、ェピコート 1001 ( 油化シェルエポキシ製)、 UVR— 6410 (ユニオンカーバイド社製)、 D. E. R— 331 ( ダウ'ケミカル社製)、 RE— 31 OS (日本ィ匕薬製)、 YD— 8125 (東都化成製)等のビ スフエノール一 A型エポキシ榭脂、 UVR— 6490 (ユニオンカーバイド社製)、 YDF -8170 (東都化成社製)等のビスフエノール— F型エポキシ榭脂等が挙げられる。 [0029] Examples of the bisphenol type epoxy resin include Epicoat 828, Epicoat 1001 (Oilized Shell Epoxy), UVR-6410 (Union Carbide), DE R-331 (Dow Chemical), RE — 31 OS (manufactured by Nippon Kayaku Co., Ltd.), YD— 8125 (manufactured by Toto Kasei), etc. Bisphenol A type epoxy resin, UVR— 6490 (manufactured by Union Carbide), YDF Bisphenol-F type epoxy resin such as -8170 (manufactured by Toto Kasei Co., Ltd.).
[0030] このほかにも、多官能ビスフエノールエポキシ榭脂として NER— 1202、 NER— 13 02、 NER— 1504 (日本化薬製)等の多官能ビスフ ノール A型エポキシ榭脂、 NE R— 7403、 NER- 7604 (日本化薬製)等の多官能ビスフエノール F型エポキシ榭脂 等が挙げられる。 [0030] In addition, polyfunctional bisphenol A type epoxy resin such as NER—1202, NER—1322, NER—1504 (manufactured by Nippon Kayaku Co., Ltd.), NE R— 7403 And polyfunctional bisphenol F type epoxy resin such as NER-7604 (manufactured by Nippon Kayaku).
[0031] ビフエノール型エポキシ榭脂としては、例えば、 NC— 3000、 NC— 3000H (いず れも日本ィ匕薬製)等のビフエノール型エポキシ榭脂、 YX— 4000 (油化シェルェポキ シ製)等のビキシレノール型エポキシ榭脂、 YL— 6121 (油化シェルエポキシ製)等 が挙げられる。  [0031] Examples of the biphenol type epoxy resin include biphenol type epoxy resin such as NC-3000 and NC-3000H (both manufactured by Nippon Kayaku Co., Ltd.), YX-4000 (manufactured by Yuka Shell Epoxy), etc. And bixylenol type epoxy resin, YL-6121 (made by oil-based shell epoxy), and the like.
[0032] ビスフエノール一 Aノボラック型エポキシ榭脂としては、例えば、ェピクロン N— 880 ( 大日本インキ化学工業製)、ェピコート E157S75 (油化シェルエポキシ製)等が挙げ られる。  [0032] Examples of the bisphenol A A novolak type epoxy resin include Epiclon N-880 (Dainippon Ink Chemical Co., Ltd.), Epicoat E157S75 (Oilized Shell Epoxy), and the like.
[0033] ナフタレン骨格含有エポキシ榭脂としては、例えば、 NC- 7000 (日本化薬製)、 E [0033] Examples of the naphthalene skeleton-containing epoxy resin include NC-7000 (manufactured by Nippon Kayaku), E
XA-4750 (大日本インキ化学工業製)等が挙げられる。 And XA-4750 (Dainippon Ink Chemical Co., Ltd.).
[0034] 脂環式エポキシ榭脂としては、例えば、 EHPE- 3150 (ダイセルィ匕学工業製)等が 挙げられる。 [0034] Examples of the alicyclic epoxy resin include EHPE-3150 (manufactured by Daicel Chemical Industries).
[0035] 複素環式エポキシ榭脂としては、例えば、 TEPIC (日産化学工業製)等が挙げられ る。  [0035] Examples of the heterocyclic epoxy resin include TEPIC (manufactured by Nissan Chemical Industries).
[0036] エポキシ化合物 (a)としては中でもフエノールノボラック型エポキシ榭脂、タレゾール ノボラック型エポキシ榭脂、多官能ビスフエノール型エポキシ榭脂、ビフエノール型ェ ポキシ榭脂が好適に用いられる。これらは、耐熱性や機械的強度、耐薬品性といつ た、特にソルダーレジスト等の永久レジスト材料を念頭にした場合の諸特性に優れた 感光性榭脂組成物を与えることができる。  As the epoxy compound (a), phenol novolac type epoxy resin, talesol novolac type epoxy resin, polyfunctional bisphenol type epoxy resin, and biphenol type epoxy resin are preferably used. These can provide a photosensitive resin composition having excellent properties such as heat resistance, mechanical strength, and chemical resistance, especially when a permanent resist material such as a solder resist is taken into consideration.
[0037] 分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b)としては、例えば 、アクリル酸類やクロトン酸、 OC シァノ桂皮酸、桂皮酸、あるいは飽和若しくは不飽 和二塩基酸と不飽和基含有モノグリシジル化合物との反応物が挙げられる。アクリル 酸類としては、例えば、(メタ)アクリル酸、 j8—スチリルアクリル酸、 j8—フルフリルァ クリル酸、(メタ)アクリル酸とラタトン類 (例えば、 ε—力プロラタトン等)との反応生成 物、飽和若しくは不飽和二塩基酸無水物と 1分子中に 1個の水酸基を有する (メタ)ァ タリレート誘導体との当モル反応物であるハーフエステル類、飽和若しくは不飽和二 塩基酸とモノグリシジル (メタ)アタリレート誘導体類との当モル反応物であるハーフエ ステル類等が挙げられ、感光性榭脂組成物としたときの感度の点で (メタ)アクリル酸[0037] Examples of the monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule include acrylic acids, crotonic acid, OC cyanocinnamic acid, cinnamic acid, and saturated or unsaturated dibasic acid. Examples include a reaction product of an acid and an unsaturated group-containing monoglycidyl compound. Acrylic acids include, for example, (meth) acrylic acid, j8-styrylacrylic acid, j8-furfurylacrylic acid, (meth) acrylic acid and ratatones (eg, ε-force prolatatone) , Half-esters, saturated or unsaturated dibasic acid and monoglycidyl, which are equimolar reactants of a saturated or unsaturated dibasic acid anhydride and a (meth) atalylate derivative having one hydroxyl group per molecule (Meth) acrylic acid in terms of sensitivity when it is used as a photosensitive resin composition.
、(メタ)アクリル酸と ε—力プロラタトンとの反応生成物又は桂皮酸が特に好ましい。 A reaction product of (meth) acrylic acid and ε-force prolatatone or cinnamic acid is particularly preferred.
[0038] 多塩基酸無水物 (c)とは、分子中に 1個以上の酸無水物構造を有する化合物であ り、例えば、無水コハク酸、無水フタル酸、無水ピロメリット酸、無水マレイン酸、テトラ ヒドロ無水フタル酸、へキサヒドロ無水フタル酸、エチレングリコール ビス(アンヒドロト リメリテート)、グリセリン ビス(アンヒドロトリメリテート) モノアセテート、 1, 2, 3, 4 ブタンテトラカルボン酸 2無水物、 3, 3 ' , 4, 4'ージフエ-ルスルホンテトラカルボン 酸 2無水物、 3, 3 ' , 4, 4,一べンゾフエノンテトラカルボン酸 2無水物、 3, 3 ' , 4, 4, ービフエ-ルテトラカルボン酸 2無水物、 3, 3 ' , 4, 4,ージフエ-ルエーテルテトラ力 ルボン酸 2無水物、 2, 2 ビス(3, 4 アンヒドロジカルボキシフエ-ル)プロパン、 2, 2 ビス(3, 4 アンヒドロジカルボキシフエ-ル)へキサフルォロプロパン、 5— (2, 5 ージォキソテトラヒドロー 3 フラニル)ー3—メチルシクロへキセン一 1, 2 ジカルボ ン酸無水物、 3a, 4, 5, 9b—テトラヒドロ一 5— (テトラヒドロ一 2, 5 ジォキソ一 3 フ ラニル) ナフト [1, 2— c]フラン 1, 3 ジオン等が挙げられる。中でもコハク酸、 テトラヒドロ無水フタル酸が好ましい。これらは一般工業的に入手可能であり、比較 的安価に、かつ優れた現像性をもった感光性榭脂組成物を与えることができる。 [0038] The polybasic acid anhydride (c) is a compound having one or more acid anhydride structures in the molecule, such as succinic anhydride, phthalic anhydride, pyromellitic anhydride, maleic anhydride. , Tetrahydrophthalic anhydride, hexahydrophthalic anhydride, ethylene glycol bis (anhydrotrimellitate), glycerin bis (anhydrotrimellitate) monoacetate, 1, 2, 3, 4 butanetetracarboxylic dianhydride, 3, 3 ', 4, 4'-diphenylsulfone tetracarboxylic dianhydride, 3, 3', 4, 4, monobenzophenone tetracarboxylic dianhydride, 3, 3 ', 4, 4, bibi- Rutetracarboxylic acid dianhydride, 3, 3 ', 4, 4, -diphenyl ether tetra force Rubonic acid dianhydride, 2, 2 bis (3,4 anhydrodicarboxyphenol) propane, 2, 2 bis (3, 4 anhydrodicarboxy file) Xafluoropropane, 5- (2,5-dioxotetrahydro-3-furanyl) -3-methylcyclohexene-1,2,2-dicarboxylic anhydride, 3a, 4, 5, 9b-tetrahydro-5- ( Tetrahydro-1,2,5-dioxo-1,3-furanyl) naphtho [1,2-c] furan 1,3 dione. Of these, succinic acid and tetrahydrophthalic anhydride are preferred. These are generally industrially available, and can provide a photosensitive resin composition having comparatively low cost and excellent developability.
[0039] 本発明の感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂 (A) は、前記のように、分子中に 2個以上のエポキシ基を有するエポキシィ匕合物(a)と分 子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b)の反応(以下、第一 の反応と 、う)で得られるアルコール性水酸基を有するエポキシカルボキシレートイ匕 合物と、多塩基酸無水物 (c)との反応 (以下、第二の反応という)により製造される。 [0039] The photosensitive aqueous alkali-soluble resin (A) contained in the photosensitive resin composition of the present invention is an epoxy compound (a) having two or more epoxy groups in the molecule as described above. ) And a monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule (hereinafter referred to as the first reaction), an epoxycarboxylate compound having an alcoholic hydroxyl group. And a polybasic acid anhydride (c) (hereinafter referred to as a second reaction).
[0040] 第一の反応は、無溶剤ある!/、はアルコール性水酸基を有しな ヽ溶剤、例えば、ァ セトン、ェチルメチルケトン、シクロへキサノン等のケトン類、ベンゼン、トルエン、キシ レン、テトラメチルベンゼン等の芳香族炭化水素類、エチレングリコールジメチルエー テル、エチレングリコールジェチルエーテル、ジプロピレングリコーノレジメチノレエーテ ル、ジプロピレングリコールジェチルエーテル、トリエチレングリコーノレジメチノレエーテ ル、トリエチレングリコールジェチルエーテル等のグリコールエーテル類、酢酸ェチル 、酢酸ブチル、メチルセ口ソルブアセテート、ェチルセ口ソルブアセテート、ブチルセ ロソノレブアセテート、カルビトールアセテート、プロピレングリコーノレモノメチノレエーテ ルアセテート、グルタル酸ジアルキル(例えば、グルタル酸ジメチル等)、コハク酸ジァ ルキル(例えば、コハク酸ジメチル等)、アジピン酸ジアルキル(例えば、アジピン酸ジ メチル等)等のエステル類、 y—プチ口ラタトン等の環状エステル類、石油エーテル、 石油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤、更には後記の反 応性架橋剤 (B)等の単独又は混合溶剤で行う。 [0040] The first reaction is solvent-free! / Is a solvent having no alcoholic hydroxyl group, for example, ketones such as acetone, ethylmethyl ketone, cyclohexanone, benzene, toluene, xylene , Aromatic hydrocarbons such as tetramethylbenzene, ethylene glycol dimethyl ether, ethylene glycol jetyl ether, dipropylene glycolinoresimethinoate , Glycol ethers such as dipropylene glycol jetyl ether, triethylene glycol glycol diethyl ether, triethylene glycol jetyl ether, ethyl acetate, butyl acetate, methyl solvate sorb acetate, cetyl solvate acetate, butyl celsonol levacetate , Carbitol acetate, propylene glycol monomono methinoate acetate, dialkyl glutarate (eg, dimethyl glutarate, etc.), dialkyl succinate (eg, dimethyl succinate, etc.), dialkyl adipate (eg, dialkyl adipate, eg Esters such as methyl), cyclic esters such as y-petit-mouth rataton, petroleum solvents such as petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha, and the reactive crosslinking agent (B) described later. Alone or Carried out in a total solvent.
[0041] この第一の反応における原料の仕込み割合としては、エポキシ化合物 (a)のェポキ シ基 1当量に対し、分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b )のカルボキシル基が 0. 8〜1. 2当量である範囲が好ましい。この範囲内であれば、 未反応として残留するエポキシ基、もしくは過剰物として残留するモノカルボン酸 (b) も少ないために、榭脂 (A)の経時的な保存安定性や、熱安定性、製造時の安定性 等が向上する。  [0041] The charge ratio of the raw material in the first reaction is as follows: the monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule with respect to 1 equivalent of the epoxy group of the epoxy compound (a). A range in which the carboxyl group is from 0.8 to 1.2 equivalents is preferred. Within this range, the epoxy group remaining as unreacted or the monocarboxylic acid (b) remaining as an excess is also small, so that the storage stability of the resin (A) over time, thermal stability, Improves stability during manufacturing.
[0042] 第一の反応には反応を促進させるために触媒を使用することが好ましぐ該触媒を 使用する場合、その使用量は反応物に対して 0. 1〜10重量%程度である。  [0042] In the first reaction, it is preferable to use a catalyst to promote the reaction. When the catalyst is used, the amount used is about 0.1 to 10% by weight with respect to the reaction product. .
[0043] 該触媒としては、例えば、トリェチルァミン、ベンジルジメチルァミン、塩ィ匕トリェチル アンモ-ゥム、臭化べンジルトリメチルアンモ-ゥム、沃化べンジルトリメチルアンモ- ゥム、トリフエ-ルホスフィン、トリフエ-ルスチビン、オクタン酸クロム、オクタン酸ジル コニゥム等が挙げられる。  [0043] Examples of the catalyst include triethylamine, benzyldimethylamine, sodium salt triethylamine, benzyltrimethylammonium bromide, benzyltrimethylammonium iodide, and triphenyl. Examples include ruphosphine, triphenylstibine, chromium octoate, and zirconium octoate.
[0044] 反応温度は 60〜150°Cであり、又、反応時間は 5〜60時間が好ましい。  [0044] The reaction temperature is 60 to 150 ° C, and the reaction time is preferably 5 to 60 hours.
[0045] 又、第一の反応には熱重合禁止剤を使用してもよぐ該熱重合禁止剤として好まし くは、ハイドロキノンモノメチルエーテル、 2—メチルハイドロキノン、ハイドロキノン、ジ フエ二ルピクリルヒドラジン、ジフエニルァミン、 2, 6 ジ一 t—ブチル p—タレゾール 等が挙げられる。 [0045] In addition, a thermal polymerization inhibitor that may be used in the first reaction is preferably hydroquinone monomethyl ether, 2-methylhydroquinone, hydroquinone, diphenylpicrylhydrazine. , Diphenylamine, 2, 6 di-tert-butyl p-talesol and the like.
[0046] 第一の反応は、適宜サンプリングしながら、サンプルの酸価が lmg'KOHZg以下 、好ましくは 0. 5mg'KOHZg以下となった時点を終点とする。 [0047] なお,本発明において固形分酸価とは、榭脂 lg中のカルボン酸の酸性を中和する のに必要な水酸ィ匕カリウムの量 (mg)であり、酸価とは榭脂を含む溶液 lgを中和する のに必要な水酸化カリウムの量 (mg)であり、 JIS K0070に準じて、通常の中和滴 定法により測定される。又、溶液中の樹脂の濃度がわかれば、溶液の酸価から固形 分酸価を計算して求めることもできる。 [0046] The first reaction has an end point when the acid value of the sample is 1 mg'KOHZg or less, preferably 0.5 mg'KOHZg or less, with appropriate sampling. [0047] In the present invention, the solid content acid value is the amount (mg) of potassium hydroxide and potassium salt necessary to neutralize the acidity of the carboxylic acid in the resin lg. This is the amount (mg) of potassium hydroxide required to neutralize the solution lg containing fat, and is measured by the usual neutralization titration method according to JIS K0070. If the concentration of the resin in the solution is known, the solid content acid value can be calculated from the acid value of the solution.
[0048] 第二の反応は、第一の反応終了後、反応液に前記の多塩基酸無水物(c)を添加し 反応させるエステル化反応である。第一の反応の生成物を分離した後に第二の反応 を行なっても、第一の反応の生成物を分離することなく引き続いて第二の反応を行な つてもよい。第二の反応に溶媒を使用する場合には、上記の第一の反応に使用する ことができる溶媒と同様な溶媒を使用することができる。  [0048] The second reaction is an esterification reaction in which the polybasic acid anhydride (c) is added to the reaction solution and reacted after completion of the first reaction. Even if the second reaction is performed after the product of the first reaction is separated, the second reaction may be continued without separating the product of the first reaction. When a solvent is used for the second reaction, a solvent similar to the solvent that can be used for the first reaction can be used.
[0049] 第二の反応は無触媒でも行うことができるが、反応を促進させるために塩基性触媒  [0049] Although the second reaction can be carried out without a catalyst, a basic catalyst is used to accelerate the reaction.
(例えば、ピリジン、トリエチルァミン、ベンジルジメチルァミン、水酸化トリェチルアン モ-ゥム、ジメチルァミノピリジン等)を使用することもでき、該触媒を使用する場合、 その使用量は反応物に対して 10重量%以下でよい。  (For example, pyridine, triethylamine, benzyldimethylamine, triethylamine hydroxide, dimethylaminopyridine, etc.) can be used, and when the catalyst is used, the amount used is relative to the reactants. Up to 10% by weight.
[0050] 反応温度は 40〜120°Cで、反応時間は好ましくは 5〜60時間である。  [0050] The reaction temperature is 40 to 120 ° C, and the reaction time is preferably 5 to 60 hours.
[0051] また、第二の反応である酸無水物付加工程は、適宜サンプリングしながら、反応物 の酸価が、 目的とする用途に応じて設定した酸価のプラスマイナス 10%の範囲にな つた点をもって終点とする。  [0051] In addition, in the acid anhydride addition step, which is the second reaction, the acid value of the reaction product is within the range of plus or minus 10% of the acid value set according to the intended use while appropriately sampling. The point is the end point.
[0052] 又、本発明の感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂( A)としては、分子中に 2個のエポキシ基を有するエポキシィ匕合物(d)と分子中にェチ レン性不飽和基を有するモノカルボン酸ィ匕合物 (b)の反応で得られるエポキシカル ボキシレートイ匕合物と、ジイソシァネートイ匕合物(e)、分子中に 2個の水酸基を有する カルボン酸化合物(f)、任意成分としてのカルボキシル基を有しないジオール化合物 (g)及び任意成分としての多塩基酸無水物(c)との反応生成物も使用し得る。  [0052] The photosensitive aqueous alkali-soluble resin (A) contained in the photosensitive resin composition of the present invention includes an epoxy compound (d) having two epoxy groups in the molecule and a molecule. An epoxycarboxylate compound obtained by the reaction of a monocarboxylic acid compound (b) having an ethylenically unsaturated group in it, a diisocyanate compound (e), and 2 A reaction product of a carboxylic acid compound (f) having one hydroxyl group, a diol compound (g) having no carboxyl group as an optional component, and a polybasic acid anhydride (c) as an optional component can also be used.
[0053] 本発明において示されるエポキシィ匕合物(d)とは、一分子中に 2個のエポキシ基を 有する化合物である。 2個を超えるエポキシ基を有する場合には、モノカルボン酸ィ匕 合物 (b)を反応せしめ、さらにジイソシァネートイ匕合物 (e)と反応させる際に、一分子 中に 2個を超える水酸基を有するポリオールとして作用するためにゲルィ匕を引き起こ す。エポキシィ匕合物(d)としては、エポキシ当量が 100〜900gZ当量の化合物が望 ましい。エポキシ当量が loogZ当量以上の場合、得られる感光性アルカリ水溶液可 溶性榭脂 (A)の分子量低下による成膜性の低下を防ぐことができる。また、塗膜の強 靭性が向上する。一方、エポキシ当量が 900gZ当量以下の場合、エチレン性不飽 和基を有するモノカルボン酸ィ匕合物 (b)の感光性アルカリ水溶液可溶性榭脂 (A)へ の導入率が高くなり感光性を高めることができる。 The epoxy compound (d) shown in the present invention is a compound having two epoxy groups in one molecule. If it has more than two epoxy groups, react with the monocarboxylic acid compound (b) and then react with the diisocyanate compound (e). Cause gelling to act as a polyol with more than hydroxyl groups The As the epoxy compound (d), a compound having an epoxy equivalent of 100 to 900 gZ equivalent is desirable. When the epoxy equivalent is greater than or equal to the loogZ equivalent, it is possible to prevent a decrease in film formability due to a decrease in the molecular weight of the resulting photosensitive alkaline aqueous solution soluble resin (A). In addition, the toughness of the coating is improved. On the other hand, when the epoxy equivalent is 900 gZ equivalent or less, the introduction ratio of the monocarboxylic acid compound (b) having an ethylenically unsaturated group into the photosensitive alkaline aqueous solution-soluble resin (A) is increased and the photosensitivity is increased. Can be increased.
[0054] 該エポキシ化合物(d)としては、例えば、ハイド口キノンジグリシジルエーテル、カテ コールジグリシジルエーテル、レゾルシノールジグリシジルエーテル等のフエ-ルジグ リシジルエーテル化合物、ビスフエノールー A型エポキシ榭脂、ビスフエノールー F型 エポキシ榭脂、ビスフエノール一 S型エポキシ榭脂、 2, 2 ビス(4 ヒドロキシフエ- ル)ー1, 1, 1, 3, 3, 3 へキサフルォロプロパンのエポキシ化体等のビスフエノー ル型エポキシィ匕合物、水素化ビスフエノールー A型エポキシ榭脂、水素化ビスフエノ 一ルー F型エポキシ榭脂、水素化ビスフエノールー S型エポキシ榭脂、水素化 2, 2- ビス(4 ヒドロキシフエ二ル)一 1, 1, 1, 3, 3, 3 へキサフノレオ口プロパンのェポキ シ化体等の水素化ビスフエノール型エポキシ化合物、臭素化ビスフエノールー A型ェ ポキシ榭脂、臭素化ビスフエノールー F型エポキシ榭脂等のハロゲノ化ビスフエノー ル型エポキシ化合物、シクロへキサンジメタノールジグリシジルエーテル化合物等の 脂環式ジグリシジルエーテル化合物、 1, 6 へキサンジオールジグリシジルエーテ ル、 1, 4 ブタンジオールジグリシジルエーテル、ジエチレングリコールジグリシジル エーテル等の脂肪族ジグリシジルエーテルィ匕合物、ポリサルファイドジグリシジルェ 一テル等のポリサルファイド型ジグリシジルエーテル化合物、ビフエノール型エポキシ 榭脂等が挙げられる。  Examples of the epoxy compound (d) include phenolic glycidyl ether compounds such as hydride quinone diglycidyl ether, catechol diglycidyl ether, resorcinol diglycidyl ether, bisphenol-A type epoxy resin, bisphenol-F. Type epoxy resin, bisphenol I S type epoxy resin, 2, 2 bis (4 hydroxyphenol)-1, 1, 1, 3, 3, 3 bisphenol such as epoxidized hexafluoropropane Type epoxy resin, hydrogenated bisphenol A type epoxy resin, hydrogenated bisphenol one loop F type epoxy resin, hydrogenated bisphenol- S type epoxy resin, hydrogenated 2, 2-bis (4 hydroxyphenol) 1, 1, 1, 3, 3, 3 Hydrogenated bisphenol type epoxy compounds such as epoxides of hexaphanoleopropane and brominated bisphenol Enol-A type epoxy resin, brominated bisphenol- Halogenated bisphenol type epoxy compound such as F type epoxy resin, cycloaliphatic diglycidyl ether compound such as cyclohexanedimethanol diglycidyl ether compound, 1, 6 hexane Aliphatic diglycidyl ether compounds such as diol diglycidyl ether, 1,4 butanediol diglycidyl ether, diethylene glycol diglycidyl ether, polysulfide diglycidyl ether compounds such as polysulfide diglycidyl ether, biphenol type epoxy Examples include fats.
[0055] これらエポキシ化合物には市販品もあり、例えば、ェピコート 828、ェピコート 1001 、ェピコート 1002、ェピコート 1003、ェピコート 1004 (いずれもジャパンエポキシレ ジン製)、ェポミック R— 140、ェポミック R— 301、ェポミック R— 304 (いずれも三井 ィ匕学製)、 DER— 331、 DER— 332、 DER— 324 (いずれもダウ'ケミカル社製)、ェ ピクロン 840、ェピクロン 850 (いずれも大日本インキ製)、 UVR— 6410 (ユニオン力 ーバイド社製)、 RE— 310S (日本化薬製)、 YD— 8125 (東都化成製)等のビスフエ ノール— A型エポキシ榭脂、 UVR— 6490 (ユニオンカーバイド社製)、 YDF— 200 1、 YDF— 2004、 YDF— 8170 (いずれも東都化成製)、ェピクロン 830、ェピクロン 835 (いずれも大日本インキ製)等のビスフエノール— F型エポキシ榭脂、 HBPA-D GE (丸善石油化学製)、リカレジン HBE— 100 (新日本理化製)等の水素化ビスフエ ノール— A型エポキシ榭脂、 DER— 513、 DER— 514、 DER— 542 (いずれもダウ' ケミカル社製)等の臭素化ビスフエノール— A型エポキシ榭脂、セロキサイド 2021 (ダ ィセル製)、リカレジン DME— 100 (新日本理ィ匕製)、 EX— 216 (ナガセ化成製)等 の脂環式エポキシ榭脂、 ED— 503 (旭電ィ匕製)、リカレジン W— 100 (新日本理ィ匕製[0055] These epoxy compounds are also commercially available, for example, Epicoat 828, Epicote 1001, Epicote 1002, Epicote 1003, Epicote 1004 (all made by Japan Epoxy Resin), Epomic R-140, Epomic R-301, Epomic R-304 (all manufactured by Mitsui Chemicals), DER-331, DER-332, DER-324 (all manufactured by Dow Chemical Co.), Epiclon 840, Epiclon 850 (all manufactured by Dainippon Ink), UVR — 6410 (manufactured by Union Power-Bidede), RE—310S (manufactured by Nippon Kayaku), YD—8125 (manufactured by Tohto Kasei), etc. Nord—A type epoxy resin, UVR—6490 (Union Carbide), YDF—2001, YDF—2004, YDF—8170 (all manufactured by Tohto Kasei), Epiclon 830, Epiclon 835 (all manufactured by Dainippon Ink) ) Bisphenols such as F-type epoxy resin, HBPA-D GE (manufactured by Maruzen Petrochemicals), Rikaresin HBE-100 (manufactured by Shin Nippon Chemical Co., Ltd.), etc. Brominated bisphenols such as DER—514 and DER—542 (both manufactured by Dow Chemical Co.) — A-type epoxy resin, Celoxide 2021 (manufactured by Daicel), Rica Resin DME—100 (manufactured by Nippon Shinritsu), EX-216 (manufactured by Nagase Kasei) and other alicyclic epoxy resins, ED-503 (manufactured by Asahi Denki Co., Ltd.), Rica Resin W-100 (manufactured by Nippon Steel
EX- 212, EX— 214、 EX— 850 (いずれもナガセ化成製)等の脂肪族ジグリシ ジルエーテル化合物、 FLEP— 50、 FLEP— 60 (いずれも東レチォコール製)等の ポリサルファイド型ジグリシジルエーテル化合物、 YX— 4000 (ジャパンエポキシレジ ン製)等のビフエノール型エポキシィ匕合物等が挙げられる。中でも単核体含有量がビ スフエノールー A型エポキシ榭脂が好ましい。これらは、耐熱性や機械的強度、耐薬 品性と!/ヽつた、特にソルダーレジスト等の永久レジスト材料を念頭にした場合の諸特 性に優れた感光性榭脂組成物を与えることができる。 Aliphatic diglycidyl ether compounds such as EX-212, EX—214, EX—850 (all manufactured by Nagase Kasei), and polysulfide type diglycidyl ether compounds such as FLEP—50, FLEP—60 (all manufactured by Toray Rethiocol), Examples include biphenol type epoxy compounds such as YX-4000 (Japan Epoxy Resin). Among them, the mononuclear content is preferably bisphenol A type epoxy resin. These can provide a photosensitive resin composition with excellent characteristics when considering a permanent resist material such as a solder resist, especially with respect to heat resistance, mechanical strength and chemical resistance. .
[0056] 本発明の感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂 (A) の製造に用いられるジイソシァネートイ匕合物(e)としては、分子中に 2個のイソシァネ 一ト基を有する化合物であれば特に限定されず、複数のジイソシァネート化合物を混 合して用いてもよい。 [0056] The diisocyanate compound (e) used in the production of the photosensitive aqueous alkali-soluble resin (A) contained in the photosensitive resin composition of the present invention includes two compounds in the molecule. The compound is not particularly limited as long as it is a compound having an isocyanate group, and a plurality of diisocyanate compounds may be mixed and used.
[0057] 該ジイソシァネートイ匕合物(e)としては、例えば、フエ-レンジイソシァネート、トリレ ンジイソシァネート、キシリレンジイソシァネート、テトラメチルキシリレンジイソシァネー ト、ジフエニルメタンジイソシァネート、ナフタレンジイソシァネート、トリデンジイソシァ ネート、へキサメチレンジイソシァネート、ジシクロへキシノレメタンジイソシァネート、ィ ソホロンジイソシァネート、ァリレンスルホンエーテルジイソシァネート、ァリルシアンジ イソシァネート、 N—ァシルジイソシァネート、トリメチルへキサメチレンジイソシァネー ト、 1, 3—ビス(イソシアナ一トメチル)シクロへキサン又はノルボルナンジイソシァネ 一トメチルが挙げられる。これらのうち、イソホロンジイソシァネート、へキサメチレンジ イソシァネート、トリメチルへキサメチレンジイソシァネート、ノルボルナンジイソシァネ ート等の脂肪族系ジイソシァネートを用いる場合に、良好な柔軟性を有する可溶性 榭脂 (A)を得ることができる。 [0057] Examples of the diisocyanate compound (e) include phenol-diisocyanate, tolylene diisocyanate, xylylene diisocyanate, tetramethylxylylene diisocyanate, diphenyl. Methane diisocyanate, naphthalene diisocyanate, tridendiisocyanate, hexamethylene diisocyanate, dicyclohexylenomethane diisocyanate, isophorone diisocyanate, arylene sulfone ether diisocyanate Nalates, allylicyandiisocyanates, N-acyldiisocyanates, trimethylhexamethylene diisocyanates, 1,3-bis (isocyanatomethyl) cyclohexanes or norbornane diisocyanates. Of these, isophorone diisocyanate, hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, norbornane diisocyanate When an aliphatic diisocyanate such as a salt is used, a soluble resin (A) having good flexibility can be obtained.
[0058] 本発明の感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂 (A) の製造に用いられる分子中に 2個の水酸基を有するカルボン酸ィ匕合物 (f)としては、 分子中にアルコール性水酸基又はフ ノール性水酸基を計 2個と、カルボキシル基 を同時に有する化合物であれば特に限定されず、アルカリ水溶液現像性に優れるァ ルコール性水酸基を 2個有するカルボン酸ィ匕合物が特に好ましぐ例えば、ジメチ口 ールプロピオン酸、ジメチロールブタン酸等の化合物が挙げられる。  [0058] As the carboxylic acid compound (f) having two hydroxyl groups in the molecule used in the production of the photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition of the present invention The compound is not particularly limited as long as it is a compound having a total of two alcoholic hydroxyl groups or phenolic hydroxyl groups in the molecule and a carboxyl group at the same time, and is a carboxylic acid salt having two alcoholic hydroxyl groups excellent in alkaline aqueous solution developability. The compound is particularly preferred, for example, compounds such as dimethyl oral propionic acid and dimethylol butanoic acid.
[0059] 本発明の感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂 (A) の製造にはカルボキシル基を有しな ヽジオール化合物 (g)を使用してもよ!/ヽ。該ジォ ール化合物 (g)は、 2個の水酸基が 2個の相異なる炭素原子に結合している脂肪族 あるいは脂環式ィ匕合物でカルボキシル基を有しな 、ィ匕合物であれば特に限定され ない。これらは任意成分として目的に応じて用いられるものであり、使用される材料の 求められる特性に応じて用いられるものである。例えばエチレングリコール、プロピレ ングリコール、ブタンジオール、ペンタンジオール、へキサンジオール、ヘプタンジォ ール、オクタンジオール、ノナンジオール、デカンジオール等の脂肪族炭化水素系ジ オール類、シクロペンタンジオール、シクロへキサンジオール、シクロへキサンジメタノ ール、トリシクロデカンジメタノール、ァダマンタンジメタノール等の脂環式炭化水素系 ジオール類、ポリエチレングリコール、ポリプロピレングリコール、ポリブチレングリコー ル等のポリアルキレングリコール類、ポリ力プロラタトンジオール等のポリエステル系ジ オール類、ポリへキサンジーオールカーボネート、ポリシクロへキサンジメタノール力 ーボネート等のポリカーボネート系ジオール類、スピログリコール、ジォキサングリコー ル等の複素環系ジオール類、両末端水酸基変性ポリブタジエン重合体、両末端水 酸基変性ポリブタジエン一アクリロニトリル共重合体、両末端水酸基変性スチレン-ァ タリロニトリル共重合体、両末端水酸基変性ポリエチレン、両末端水酸基変性ポリプロ ピレン等の末端水酸基変性共重合体類等が挙げられる。中でも脂環式炭化水素系 ジオール類、ポリアルキレングリコール類、ポリエステル系ジオール類、複素環系ジォ ール類が好ましい。これらは一般工業的に入手可能であり、比較的安価に、かつ優 れた現像性と柔軟性をもった感光性榭脂組成物を与えることができる。 [0059] A diol compound (g) having no carboxyl group may be used for the production of the photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition of the present invention! /ヽ. The diol compound (g) is an aliphatic or alicyclic compound in which two hydroxyl groups are bonded to two different carbon atoms, and has no carboxyl group. If it is, it will not be specifically limited. These are used as optional components according to the purpose, and are used according to the required properties of the materials used. For example, aliphatic hydrocarbons such as ethylene glycol, propylene glycol, butanediol, pentanediol, hexanediol, heptanediol, octanediol, nonanediol, decanediol, cyclopentanediol, cyclohexanediol, Cyclohexane dimethanol, tricyclodecane dimethanol, adamantane dimethanol and other alicyclic hydrocarbon-based diols, polyethylene glycol, polypropylene glycol, polybutylene glycol and other polyalkylene glycols, poly force prolataton diol, etc. Polyester-based diols, polyhexanediol carbonate, polycyclohexane dimethanol power-polycarbonate diols such as bonates, spiroglycol, dioxane Heterocyclic diols such as alcohol, hydroxyl groups-modified polybutadiene polymers at both ends, hydroxyl groups-modified polybutadiene monoacrylonitrile copolymers at both ends, hydroxyl groups-modified styrene-taratonitrile copolymers, hydroxyl groups-modified polyethylene at both ends, Examples thereof include terminal hydroxyl group-modified copolymers such as terminal hydroxyl group-modified polypropylene. Of these, alicyclic hydrocarbon diols, polyalkylene glycols, polyester diols and heterocyclic diols are preferred. These are generally industrially available, are relatively inexpensive, and are excellent. A photosensitive resin composition having improved developability and flexibility can be provided.
[0060] 本発明の感光性榭脂組成物に含有される感光性アルカリ水溶液可溶性榭脂 (A) は、前記のように、分子中に 2個のエポキシ基を有するエポキシィ匕合物(d)と分子中 にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b)の反応(以下、第三の反 応と 、う)で得られるアルコール性水酸基を有するエポキシカルボキシレートイ匕合物と 、ジイソシァネートイ匕合物(e)、分子中に 2個の水酸基を有するカルボン酸ィ匕合物 (f) とのウレタンィ匕反応 (以下、第四の反応という)により別途製造される。第四の反応に は任意成分としてカルボキシル基を有しな ヽジオール化合物 (g)を添加して行っても よい。  [0060] The photosensitive alkaline aqueous solution-soluble resin (A) contained in the photosensitive resin composition of the present invention is, as described above, an epoxy compound (d) having two epoxy groups in the molecule. And an epoxy carboxylate compound having an alcoholic hydroxyl group obtained by the reaction of a monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule (hereinafter referred to as the third reaction). And a diisocyanate compound (e) and a carboxylic acid compound (f) having two hydroxyl groups in the molecule, separately prepared by urethane reaction (hereinafter referred to as fourth reaction). The The fourth reaction may be carried out by adding a diol compound (g) having no carboxyl group as an optional component.
[0061] 第四の反応後に、任意成分である多塩基酸無水物 (c)を加えて反応させてもよい。  [0061] After the fourth reaction, an optional component, polybasic acid anhydride (c), may be added and reacted.
[0062] 第三の反応は、無溶剤又はアルコール性水酸基を有しな 、溶剤、例えば、アセトン 、ェチルメチルケトン、シクロへキサノン等のケトン類、ベンゼン、トルエン、キシレン、 テトラメチルベンゼン等の芳香族炭化水素類、エチレングリコールジメチルエーテル 、エチレングリコールジェチルエーテル、ジプロピレングリコールジメチルエーテル、 ジプロピレングリコールジェチルエーテル、トリエチレングリコールジメチルエーテル、 トリエチレングリコールジェチルエーテル等のグリコールエーテル類、酢酸ェチル、酢 酸ブチル、メチルセ口ソルブアセテート、ェチルセ口ソルブアセテート、ブチルセロソ ルブアセテート、カルビトールアセテート、プロピレングリコールモノメチルエーテルァ セテート、グルタル酸ジアルキル(例えば、グルタル酸ジメチル等)、コハク酸ジアルキ ル (例えば、コハク酸ジメチル等)、アジピン酸ジアルキル (例えば、アジピン酸ジメチ ル等)等のエステル類、 γ ブチロラタトン等の環状エステル類、石油エーテル、石 油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤、更には後記の反応 性架橋剤 (Β)等の単独又は混合溶剤で行う。 [0062] The third reaction is a solvent-free or alcoholic hydroxyl group-free solvent such as ketones such as acetone, ethylmethylketone, cyclohexanone, benzene, toluene, xylene, tetramethylbenzene, etc. Aromatic hydrocarbons, ethylene glycol dimethyl ether, ethylene glycol jetyl ether, dipropylene glycol dimethyl ether, dipropylene glycol dimethyl ether, triethylene glycol dimethyl ether, triethylene glycol dimethyl ether, and other glycol ethers, ethyl acetate, acetic acid Butyl, methyl solvate acetate, cetyl sorb acetate, butyl cellosolve acetate, carbitol acetate, propylene glycol monomethyl ether acetate, dialkyl glutarate (E.g., dimethyl glutarate), dialkyl succinate (e.g., dimethyl succinate), esters such as dialkyl adipate (e.g., dimethyl adipate), cyclic esters such as γ-butyrolatatone, petroleum ether, Petroleum solvents such as petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha, and the reactive cross-linking agent (Β) described below alone or in combination.
[0063] この第三の反応における原料の仕込み割合としては、エポキシ化合物 (d)のェポキ シ基 1当量に対し、分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b )のカルボキシル基が 0. 8〜1. 2当量である範囲が好ましい。この範囲内であれば、 未反応として残留するエポキシ基、もしくは過剰物として残留するモノカルボン酸 (b) も少ないために、榭脂 (A)の経時的な保存安定性や、熱安定性、製造時の安定性 等が向上する。 [0063] The charge ratio of the raw material in the third reaction is as follows. The monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule with respect to 1 equivalent of epoxy group of the epoxy compound (d). A range in which the carboxyl group is from 0.8 to 1.2 equivalents is preferred. Within this range, the epoxy group remaining as unreacted or the monocarboxylic acid (b) remaining as an excess is also small, so that the storage stability of the resin (A) over time, thermal stability, Stability during production Etc. are improved.
[0064] 第三の反応には反応を促進させるために触媒を使用することが好ましぐ該触媒を 使用する場合、その使用量は反応物に対して 0. 1〜10重量%程度である。  [0064] In the third reaction, it is preferable to use a catalyst to promote the reaction. When the catalyst is used, the amount used is about 0.1 to 10% by weight with respect to the reaction product. .
[0065] 該触媒としては、例えば、トリェチルァミン、ベンジルジメチルァミン、塩ィ匕トリェチル アンモ-ゥム、臭化べンジルトリメチルアンモ-ゥム、沃化べンジルトリメチルアンモ- ゥム、トリフエ-ルホスフィン、トリフエ-ルスチビン、オクタン酸クロム、オクタン酸ジル コニゥム等が挙げられる。  [0065] Examples of the catalyst include triethylamine, benzyldimethylamine, sodium salt triethylamine, benzyltrimethylammonium bromide, benzyltrimethylammonium iodide, and triphenyl. Examples include ruphosphine, triphenylstibine, chromium octoate, and zirconium octoate.
[0066] 反応温度は 60〜150°Cであり、又、反応時間は 5〜60時間が好ましい。  [0066] The reaction temperature is 60 to 150 ° C, and the reaction time is preferably 5 to 60 hours.
[0067] 又、第三の反応には熱重合禁止剤を使用してもよぐ該熱重合禁止剤として好まし くは、例えば、ハイドロキノンモノメチルエーテル、 2—メチルハイドロキノン、ハイド口 キノン、ジフエ二ルピクリルヒドラジン、ジフエニルァミン、 2, 6 ジ tーブチルー p— タレゾール等が挙げられる。 [0067] In addition, a thermal polymerization inhibitor that may be used in the third reaction is preferably used as the thermal polymerization inhibitor, for example, hydroquinone monomethyl ether, 2-methylhydroquinone, hydrated quinone, diphenol Examples include rupicrylhydrazine, diphenylamine, and 2,6-di-tert-butyl-p-talesole.
[0068] 第三の反応であるエポキシカルボキシレートイ匕工程は、適宜サンプリングしながら、 サンプルの酸価 (JIS K5601— 2— 1: 1999に準拠)が lmg · KOH/g以下、好ま しくは 0. 5mg'KOHZg以下となった時点を終点とする。  [0068] The third reaction, the epoxycarboxylate reaction process, samples the sample with an acid value (based on JIS K5601-2-1: 1999) of lmg · KOH / g or less, preferably 0. The end point will be the time when it falls below 5mg'KOHZg.
[0069] 第四の反応は、第三の反応終了後、反応液に前記の分子中に 2個の水酸基を有 するカルボン酸ィ匕合物(f )及び任意成分としてのカルボキシル基を有しな 、ジォ一 ルイ匕合物 (g)をカ卩え、分散液又は溶液とし、更に前記のジイソシァネートイ匕合物(e) を徐々に加え反応させるウレタン化反応である。第三の反応の生成物を分離した後 に第四の反応を行なっても、第三の反応の生成物を分離することなく引き続いて第 四の反応を行なってもよい。  [0069] After completion of the third reaction, the fourth reaction has a carboxylic acid compound (f) having two hydroxyl groups in the molecule and a carboxyl group as an optional component in the reaction solution. It is a urethanization reaction in which the diol compound (g) is added to form a dispersion or solution, and the diisocyanate compound (e) is gradually added and reacted. The fourth reaction may be performed after the product of the third reaction is separated, or the fourth reaction may be performed subsequently without separating the product of the third reaction.
[0070] 第四の反応は無触媒でも行うことができるが、反応を促進させるために塩基性触媒 を使用することもでき、該触媒としては上記の第二の反応に使用した触媒と同様なも のが挙げられ、該触媒を使用する場合、その使用量は反応物に対して 10重量%以 下でよい。  [0070] The fourth reaction can be carried out without a catalyst, but a basic catalyst can be used to promote the reaction, and the catalyst is the same as the catalyst used in the second reaction described above. When the catalyst is used, the amount used may be 10% by weight or less based on the reaction product.
[0071] 反応温度は 40〜120°Cで、反応時間は好ましくは 5〜60時間である。  [0071] The reaction temperature is 40 to 120 ° C, and the reaction time is preferably 5 to 60 hours.
[0072] この際上記の溶媒や熱重合禁止剤を使用してもよい。 [0072] At this time, the above-mentioned solvent or thermal polymerization inhibitor may be used.
[0073] また、第四の反応であるウレタンィ匕工程は、適宜サンプリングしながら、赤外吸収ス ベクトル測定法によりイソシァネート基由来の 2250cm_ 1近辺のピーク面積の減少が 規定量に達したとき、もしく ίお IS K1556 : 1968等に示される滴定法によるものが適 用できる。この中では後者の方法がより好ましい。具体的には、実際の仕込み比から 算出されるイソシァネート基の含有量力 プラスマイナス 2%の範囲に入る点をもって 終点とすることが好ましい。 [0073] In addition, the urethane reaction process, which is the fourth reaction, performs an infrared absorption scan while appropriately sampling. When reduction of the peak area of 2250 cm _ 1 near from Isoshianeto group by vector measurement has reached a predetermined amount, Moshiku ί Contact IS K1556: those measured by a titration method indicated in 1968 or the like can be applied. Among these, the latter method is more preferable. Specifically, the end point is preferably a point that falls within the range of the content power of the isocyanate group calculated from the actual charging ratio plus or minus 2%.
[0074] 又、任意成分として多塩基酸無水物 (c)を反応させる場合は、第四の反応終了後 に第二の反応と同様にして反応させればよい。  [0074] When the polybasic acid anhydride (c) is reacted as an optional component, it may be reacted in the same manner as the second reaction after the fourth reaction.
[0075] 分子中に 2個の水酸基を有するカルボン酸ィ匕合物 (f)や任意成分としての多塩基 酸無水物(c)の仕込み量は、感光性アルカリ水溶液可溶性榭脂 (A)の固形分酸価 力 0〜150mg'KOHZgとなるような計算量を添加するのが好ましい。固形分酸価 が 50mg'KOH/g以上であれば、良好なアルカリ水溶液に対する溶解性を示し、ま た固形分酸価が 150mg'KOH/g以下であれば、現像時のパターユングの際、過溶 解によるパターユング性悪ィ匕を防ぐことができる。  [0075] The amount of the carboxylic acid compound (f) having two hydroxyl groups in the molecule and the polybasic acid anhydride (c) as an optional component is the amount of the photosensitive alkaline aqueous solution soluble resin (A). It is preferable to add a calculated amount that gives a solid acid value of 0 to 150 mg'KOHZg. If the solid content acid value is 50 mg'KOH / g or more, good solubility in an alkaline aqueous solution is exhibited, and if the solid content acid value is 150 mg'KOH / g or less, during patterning during development, It is possible to prevent the patterning badness caused by overdissolution.
[0076] ジイソシァネートイ匕合物(e)の仕込み量は、(第三の反応にぉ 、て生成したェポキ シカルボキシレート化合物のモル数 +分子中に 2個の水酸基を有するカルボン酸化 合物(f)のモル数 +任意成分としてのジオールィ匕合物(g)のモル数) / (ジイソシァ ネート化合物(e)のモル数)の比が 1〜5の範囲にするのが好まし 、。この比が 1以上 であれば、反応終了後に残留するイソシァネート基が残留することがないために、ィ ソシァネート基の架橋による保存安定性悪ィ匕を防ぐことができる。またこの比が 5以下 である場合には、分子量が大きくなるために、タック性の悪ィ匕ゃ感度の低下を防ぐこ とがでさる。  [0076] The amount of the diisocyanate compound (e) charged is (the number of moles of the epoxycarboxylate compound formed in the third reaction + the carboxyl oxidation having two hydroxyl groups in the molecule). The ratio of the number of moles of compound (f) + the number of moles of diol compound (g) as an optional component) / (number of moles of diisocyanate compound (e)) is preferably in the range of 1-5. ,. If this ratio is 1 or more, the isocyanate group remaining after the completion of the reaction does not remain, so that it is possible to prevent poor storage stability due to crosslinking of the isocyanate group. On the other hand, when this ratio is 5 or less, the molecular weight increases, so that the poor tackiness prevents the sensitivity from being lowered.
[0077] 本発明の感光性榭脂組成物中の感光性アルカリ水溶液可溶性榭脂 (A)の含有割 合としては、該感光性榭脂組成物の固形分を 100重量%としたとき、通常 15〜70重 量%、好ましくは 20〜60重量%である。  [0077] The content ratio of the photosensitive alkaline aqueous solution-soluble resin (A) in the photosensitive resin composition of the present invention is usually when the solid content of the photosensitive resin composition is 100% by weight. It is 15 to 70% by weight, preferably 20 to 60% by weight.
[0078] こうして得られた本発明の感光性アルカリ水溶液可溶性榭脂 (A)は、溶剤を使用し た場合にはこれを適当な方法で除去することにより固体状にすることができる。 [0078] The photosensitive aqueous alkali-soluble soluble resin (A) of the present invention thus obtained can be made solid by removing it with an appropriate method when a solvent is used.
[0079] 本発明の活性エネルギー線硬化型榭脂組成物に含まれる反応性架橋剤 (B)とは、 本発明のアルカリ水溶液可溶性榭脂 (A)と同様、感光性榭脂組成物を硬化させる際 に、反応性を示し架橋構造を形成するものの総称である。これらは使用目的に応じた 硬化前、硬化後の物性を付与させるために使用する。 [0079] The reactive crosslinking agent (B) contained in the active energy ray-curable resin composition of the present invention is the same as the alkali aqueous solution-soluble resin (A) of the present invention, which cures the photosensitive resin composition. When letting In addition, it is a generic term for those that show reactivity and form a crosslinked structure. These are used to give physical properties before and after curing according to the purpose of use.
[0080] 使用しうる反応性架橋剤 (B)の具体例としては、ラジカル反応型のアタリレート類、 カチオン反応型のその他エポキシィ匕合物類、その双方に感応するビニルイ匕合物類 等のいわゆる反応性オリゴマー類が挙げられる。これらのうち、本発明のアルカリ水 溶液可溶性榭脂 (A)が酸性基をもって ヽることからラジカル反応型の架橋剤を選択 することが好ましい。これは (A)に由来するカチオンで架橋反応が進行してしまうため である。  [0080] Specific examples of the reactive crosslinking agent (B) that can be used include radical reaction type attalylates, cation reaction type other epoxy compounds, vinyl compounds that are sensitive to both, and the like. Examples include so-called reactive oligomers. Among these, it is preferable to select a radical reaction type crosslinking agent because the alkaline water solution soluble resin (A) of the present invention has an acidic group. This is because the crosslinking reaction proceeds with the cation derived from (A).
[0081] 使用しうるラジカル反応型のアタリレート類としては、単官能 (メタ)アタリレート類、多 官能 (メタ)アタリレート、その他エポキシアタリレート、ポリエステルアタリレート、ウレタ ンアタリレート等が挙げられる。  [0081] Examples of the radical reaction type acrylates that can be used include monofunctional (meth) acrylates, polyfunctional (meth) acrylates, other epoxy acrylates, polyester acrylates, uretan acrylates, and the like. .
[0082] 単官能 (メタ)アタリレート類としては、メチル (メタ)アタリレート、ェチル (メタ)アタリレ ート、ブチル (メタ)アタリレート、ラウリル (メタ)アタリレート等のアルキル (メタ)アタリレ ート類、ポリエチレングリコール (メタ)アタリレート、ポリエチレングリコール (メタ)アタリ レートモノメチルエーテル等のアルキレングリコールモノ(メタ)アタリレート類、ベンジ ル (メタ)アタリレート、フエ-ルェチル (メタ)アタリレート等の芳香族 (メタ)アタリレート 類、イソボル-ル (メタ)アタリレート、シクロへキシル (メタ)アタリレート等の環状脂肪 族 (メタ)アタリレート類、テトラヒドロフルフリル (メタ)アタリレート等の複素環含有 (メタ) アタリレート類が挙げられる。  [0082] Monofunctional (meth) acrylates include alkyl (meth) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate and lauryl (meth) acrylate. Polyethylene glycol (meth) acrylate, polyethylene glycol (meth) acrylate monomethyl ether and other alkylene glycol mono (meth) acrylates, benzyl (meth) acrylate, ferroethyl (meth) acrylate, etc. Cycloaliphatic (meth) acrylates such as aromatic (meth) acrylates, isobornyl (meth) acrylates, cyclohexyl (meth) acrylates, and heterocycles such as tetrahydrofurfuryl (meth) acrylates Contains (meth) attalylates.
[0083] 多官能 (メタ)アタリレート類としては、ブタンジオールジ (メタ)アタリレート、へキサン ジオールジ (メタ)アタリレート、ネオペンチルグリコールジ (メタ)アタリレート、ノナンジ オールジ (メタ)アタリレート等のアルキレンジオール (メタ)アタリレート類、グリコール ジ (メタ)アタリレート、ジエチレンジ (メタ)アタリレート、ポリエチレングリコールジ (メタ) アタリレート、ポリプロピレングリコールジ (メタ)アタリレート等のアルキレングリコール ジ (メタ)アタリレート等、ビスフエノールエチレンオキサイドジ (メタ)アタリレート、ビスフ エノールジ (メタ)アタリレート等の芳香族 (メタ)アタリレート、水素化ビスフエノールェ チレンオキサイド (メタ)アタリレート等の環状脂肪族 (メタ)アタリレート類、トリス (メタ)ァ クリロイルォキシェチルイソシァヌレート等の複素環含有 (メタ)アタリレート類、アジピ ン酸エポキシジ (メタ)アタリレート等のその他エポキシアタリレート類、ジペンタエリスリ トールポリ(メタ)アタリレート、トリメチロールプロパントリ(メタ)アタリレート、トリェチロー ルプロパントリ(メタ)アタリレート等のアルキルポリオール (メタ)アタリレート類、ジペン タエリスリトールポリ(メタ)アタリレート、トリメチロールプロパントリ(メタ)アタリレート、ト リエチロールプロパントリ(メタ)アタリレート等のエチレンオキサイド付加物、またはプ ロピレンオキサイド付加物の (メタ)アタリレート等、ヒドロキシビバリン酸ネオペングリコ ールの ε一力プロラタトン付カ卩物のジ(メタ)アタリレート、ジペンタエリスリトールと ε — 力プロラタトンの反応物のポリ(メタ)アタリレート等のポリオール力プロラタトン変性 (メ タ)アタリレート類が挙げられる。 [0083] Examples of polyfunctional (meth) acrylates include butanediol di (meth) acrylate, hexane diol di (meth) acrylate, neopentyl glycol di (meth) acrylate, nonanediol all (meth) acrylate Alkylene diols (meth) acrylates, glycol di (meth) acrylate, diethylene di (meth) acrylate, polyethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, etc. Cycloaliphatics such as aromatic (meth) acrylate, hydrogenated bisphenol ethylene oxide (meth) acrylate, etc., bisphenol ethylene oxide di (meth) acrylate, bisphenol di (meth) acrylate, etc. (Meta) atarylates, Squirrel (meth) § methacryloyl Ruo key heterocycle containing such Chez chill iso Xia isocyanurate (meth) Atari rates acids, adipic Other epoxy acrylates such as epoxy di (meth) acrylate, dipentaerythritol poly (meth) acrylate, trimethylolpropane tri (meth) acrylate, triethylol propane tri (meth) acrylate, etc. , Ethylene oxide adducts such as dipentaerythritol poly (meth) acrylate, trimethylol propane tri (meth) acrylate, triethylene propane tri (meth) acrylate, or propylene oxide adduct (meth) ate Poly (meth) atalylate, a reaction product of dipentaerythritol and ε-force prolataton Lumpur force Purorataton modified (meth) Atari rate such like.
[0084] 使用しうるビュル化合物類としてはビュルエーテル類、スチレン類、その他ビュル化 合物が挙げられる。ビュルエーテル類としては、ェチルビ-ルエーテル、プロピルビ ニノレエーテノレ、ヒドロキシェチノレビニノレエーテノレ、エチレングリコーノレジビニノレエーテ ル等が挙げられる。スチレン類としては、スチレン、メチルスチレン、ェチルスチレン等 が挙げられる。その他ビュルィ匕合物としてはトリアリルイソシァヌレート、トリメタァリルイ ソシァヌレート等が挙げられる。  [0084] Examples of the bull compounds that can be used include bull ethers, styrenes, and other bull compounds. Examples of the bull ethers include ethyl vinyl ether, propyl vinylenoatenole, hydroxyethinorevininoatenole, and ethylene glyconoresininoatele. Examples of styrenes include styrene, methyl styrene, ethyl styrene and the like. Other bully compounds include triallyl isocyanurate, trimethallyl isocyanurate, and the like.
[0085] 上記の他にも反応性架橋剤(Β)として、 2 ヒドロキシェチル (メタ)アタリレート、 2- ヒドロキシプロピル (メタ)アタリレート、 1, 4 ブタンジオールモノ(メタ)アタリレート、力 ルビトール (メタ)アタリレート、アタリロイルモルホリン、水酸基含有 (メタ)アタリレート( 例えば、 2—ヒドロキシェチル (メタ)アタリレート、 2—ヒドロキシプロピル (メタ)アタリレ ート、 1, 4 ブタンジオールモノ (メタ)アタリレート等)と多カルボン酸化合物の酸無 水物(例えば、無水コハク酸、無水マレイン酸、無水フタル酸、テトラヒドロ無水フタル 酸、へキサヒドロ無水フタル酸等)の反応物であるハーフエステル類,ポリエチレング リコールジ (メタ)アタリレート、トリプロピレングリコールジ (メタ)アタリレート、トリメチロ ールプロパントリ(メタ)アタリレート、トリメチロールプロパンポリエトキシトリ(メタ)アタリ レート(エチレンオキサイド変性トリメチロールプロパンのトリアタリレート)、グリセリンポ リプロポキシトリ(メタ)アタリレート、ヒドロキシビバリン酸ネオペングリコールの ε一力 プロラタトン付加物のジ (メタ)アタリレート(例えば、 日本化薬製、 KAYARAD ΗΧ 220、 ΗΧ— 620等)、ペンタエリスリトールテトラ(メタ)アタリレート、ジペンタエリスリ トールと ε—力プロラタトンの反応物のポリ(メタ)アタリレート、ジペンタエリスリトール ポリ(メタ)アタリレート、モノ又はポリグリシジル化合物(例えば、ブチルダリシジルエー テル、フエニルダリシジルエーテル、ポリエチレングリコールジグリシジルエーテル、ポ リプロピレングリコールジグリシジルエーテル、 1, 6 へキサンジオールジグリシジル エーテル、へキサヒドロフタル酸ジグリシジルエステル、グリセリンポリグリシジルエー テル、グリセリンポリエトキシグリシジルエーテル、トリメチロールプロパンポリグリシジ ルエーテル、トリメチロールプロパンポリエトキシポリグリシジルエーテル等と (メタ)ァク リル酸の反応物であるエポキシ (メタ)アタリレート等を挙げることができる。 [0085] In addition to the above, as the reactive crosslinking agent (Β), 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 1, 4 butanediol mono (meth) acrylate, strength Rubitol (meth) acrylate, Ataliloyl morpholine, Hydroxyl-containing (meth) acrylate (eg 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 1, 4 butanediol mono ( A half ester that is a reaction product of an acid anhydride (eg, succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, etc.) Polyethylene glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, trimethylo Of propanediol tri (meth) acrylate, trimethylolpropane polyethoxytri (meth) acrylate (triatalylate of ethylene oxide-modified trimethylolpropane), glycerin polypropoxytri (meth) acrylate, and hydroxypenic acid neopenglycol di ε Ichiriki Purorataton adduct (meth) Atari rate (e.g., manufactured by Nippon Kayaku Co., KAYARAD ΗΧ 220, ΗΧ- 620, etc.), pentaerythritol tetra (meth) Atari rate, Jipentaerisuri Poly (meth) acrylate, dipentaerythritol poly (meth) acrylate, mono- or polyglycidyl compounds (eg butyl daricidyl ether, phenyl daricidyl ether, polyethylene glycol Glycidyl ether, polypropylene glycol diglycidyl ether, 1,6 hexanediol diglycidyl ether, hexahydrophthalic acid diglycidyl ester, glycerin polyglycidyl ether, glycerin polyethoxyglycidyl ether, trimethylolpropane polyglycidyl ether, An epoxy (meth) acrylate which is a reaction product of trimethylolpropane polyethoxypolyglycidyl ether and (meth) acrylic acid can be used.
[0086] これら反応性架橋剤 (Β)の添加割合としては、感光性榭脂組成物の固形分を 100 重量%としたとき、通常 2〜40重量%、好ましくは 5〜30重量%である。 [0086] The addition ratio of these reactive crosslinking agents (剤) is usually 2 to 40 wt%, preferably 5 to 30 wt%, when the solid content of the photosensitive resin composition is 100 wt%. .
[0087] 本発明にお 、て用いられる光重合開始剤 (C)としては、ラジカル系の光開始剤で あることがこのましい。例えばべンゾイン、ベンゾインメチルエーテル、ベンゾインェチ ノレエーテノレ、ベンゾインプロピルエーテル、ベンゾインイソブチルエーテル等のベン ゾイン類;ァセトフエノン、 2, 2—ジエトキシー2—フエニルァセトフエノン、 2, 2—ジェ トキシー 2—フエニルァセトフエノン、 1, 1ージクロロアセトフエノン、 2—ヒドロキシ 2 ーメチルーフェニルプロパン 1 オン、ジェトキシァセトフェノン、 1ーヒドロキシンク 口へキシルフエ-ルケトン、 2—メチルー 1 [4 (メチルチオ)フエ-ル ] 2 モル ホリノ一プロパン一 1—オン等のァセトフエノン類; 2—ェチルアントラキノン、 2-t—ブ チノレアントラキノン、 2—クロ口アントラキノン、 2—アミノレアントラキノン等のアントラキノ ン類; 2, 4 ジェチルチオキサントン、 2 イソプロピルチォキサントン、 2 クロロチ ォキサントン等のチォキサントン類;ァセトフエノンジメチルケタール、ベンジルジメチ ルケタール等のケタール類;ベンゾフエノン、 4一べンゾィルー 4,ーメチルジフエ-ル サルファイド、 4, 4,一ビスメチルァミノべンゾフエノン等のベンゾフエノン類; 2, 4, 6 トリメチルベンゾィルジフエ-ルホスフィンオキサイド、ビス(2, 4, 6 トリメチルベン ゾィル) -フエ-ルホスフィンオキサイド等のホスフィンオキサイド類等の公知一般のラ ジカル型光反応開始剤が挙げられる。 [0087] The photopolymerization initiator (C) used in the present invention is preferably a radical photoinitiator. For example, benzoins such as benzoin, benzoin methyl ether, benzoin ethyl ethere, benzoin propyl ether, benzoin isobutyl ether; Cetophenone, 1,1-dichloroacetophenone, 2-hydroxy-2-methyl-phenylpropane 1-one, methoxyacetophenone, 1-hydroxyl hexylphenol ketone, 2-methyl-1-phenyl [4- (methylthio) phenol ] Acetophenones such as 2 morpholinopropane 1-one; anthraquinones such as 2-ethylanthraquinone, 2-t-butinoleanthraquinone, 2-cloanthraquinone, 2-aminoleanthraquinone; 2, 4 Jetylthioxanthone, 2-Isopropylthio Thixanthones such as xanthone and 2-chlorothixanthone; ketals such as acetophenone dimethyl ketal and benzyldimethyl ketal; benzophenones such as benzophenone, 4-benzoyl 4, 4-methyldiphenyl sulfide, 4, 4, 1-bismethylaminobenzophenone; Known radical photoinitiators such as 2, 4, 6 trimethylbenzoyl diphosphine phosphine oxide and phosphine oxides such as bis (2, 4, 6 trimethylbenzol) -phenol phosphine oxide are known. Can be mentioned.
[0088] 光重合開始剤 (C)の添加割合としては、感光性榭脂組成物の固形分を 100重量 %としたとき通常 1〜30重量%、好ましくは 2〜25重量%である。また、光重合開始 剤(C)は単独又は 2種以上の混合物として使用でき、更にはトリエタノールァミン、メ チルジエタノールアミン等の 3級ァミン、 N, N—ジメチルァミノ安息香酸ェチルエステ ル、 N, N—ジメチルァミノ安息香酸イソアミルエステル等の安息香酸誘導体等の反 応促進剤等と組み合わせて使用してもよ!ヽ。これらの反応促進剤の添加量としては、 光重合開始剤 (C)に対して 100重量%以下の添加量が好ましい。 [0088] The addition ratio of the photopolymerization initiator (C) is usually 1 to 30% by weight, preferably 2 to 25% by weight, when the solid content of the photosensitive resin composition is 100% by weight. Also, photopolymerization started Agent (C) can be used alone or as a mixture of two or more thereof, and further, tertiary amines such as triethanolamine and methyldiethanolamine, ethyl ester of N, N-dimethylaminobenzoate, isoamyl N, N-dimethylaminobenzoate. May be used in combination with reaction accelerators such as benzoic acid derivatives such as esters! The addition amount of these reaction accelerators is preferably 100% by weight or less based on the photopolymerization initiator (C).
[0089] 本発明の感光性榭脂組成物に含有する硬化剤 (D)は、前記式(1) [式中、 nは繰り 返し数を表す。 ]で表される分子の対称性が良好な 4, 4'一体のビスフエノール F型 エポキシ榭脂である。該硬化剤(D)は、光硬化後の榭脂塗膜に残存するカルボキシ 基と加熱によって反応する後硬化により、更に強固な耐薬品性等を有する硬化塗膜 を形成する。 [0089] The curing agent (D) contained in the photosensitive resin composition of the present invention is the above formula (1) [wherein n represents the number of repetitions. ] This is a 4,4'-integrated bisphenol F-type epoxy resin with good molecular symmetry. The curing agent (D) forms a cured coating film having stronger chemical resistance and the like by post-curing which reacts by heating with the carboxyl group remaining in the resin film after photocuring.
[0090] 又、前記式(1)で表される分子の対称性が良好な 4, 4'一体のビスフ ノール F型 エポキシ榭脂は液晶性を有する。  [0090] The 4,4'-integrated bisphenol F-type epoxy resin having good molecular symmetry represented by the formula (1) has liquid crystallinity.
[0091] 該硬化剤 (D)の融点は通常 70〜150°C、好ましくは 80〜150°Cである。又、その エポキシ当量は通常 250〜2000gZ当量、好ましくは 300〜 lOOOgZ当量である。 [0091] The melting point of the curing agent (D) is usually 70 to 150 ° C, preferably 80 to 150 ° C. The epoxy equivalent is usually 250 to 2000 gZ equivalent, preferably 300 to lOOOOgZ equivalent.
[0092] 本発明の感光性榭脂組成物に含有する上記式(1)で表される硬化剤 (D)として使 用するエポキシ榭脂は、例えば、下記式(2) [0092] The epoxy resin used as the curing agent (D) represented by the above formula (1) contained in the photosensitive resin composition of the present invention includes, for example, the following formula (2):
[0093] [化 2]
Figure imgf000020_0001
で表されるフ ノール系化合物を原料とする。該化合物は融点力 163°C前後の結晶 であり、例えば、商品名 p, p'—BPF (本州化学製;純度〉 99%)として市販されてい る。該フエノール系化合物とェピノ、ロヒドリンとをアルカリ金属水酸ィ匕物の存在下で反 応させて低分子量のエポキシ榭脂を得、更にこの化合物と式(2)で表されるフエノー ル系化合物と反応させ、得られた反応混合物から結晶を析出させることにより感光性 榭脂組成物に含有する硬化剤 (D)としてのエポキシ榭脂を得ることができる。
[0093] [Chemical 2]
Figure imgf000020_0001
The phenolic compound represented by The compound is a crystal having a melting point of around 163 ° C., and is commercially available, for example, under the trade name p, p′-BPF (Honshu Chemical; purity> 99%). The phenolic compound is reacted with epino and rhohydrin in the presence of an alkali metal hydroxide to obtain a low molecular weight epoxy resin. Further, this compound and the phenolic compound represented by the formula (2) are used. And by precipitating crystals from the resulting reaction mixture, an epoxy resin as a curing agent (D) contained in the photosensitive resin composition can be obtained.
該ェピハロヒドリンとしてはェピクロルヒドリンゃェピブロムヒドリンを用いることができ 、その使用量は式(2)で表される該フエノール系化合物のフエノール性水酸基 1モル に対し通常 2〜 15モル、好ましくは 3〜 12モルである。 As the epihalohydrin, epichlorohydrin or epipibromhydrin can be used, and the amount used is 1 mol of phenolic hydroxyl group of the phenolic compound represented by the formula (2). The amount is usually 2 to 15 mol, preferably 3 to 12 mol.
[0095] 該アルカリ金属水酸化物としては水酸化ナトリウム、水酸ィ匕カリウム等が挙げられ、 固体でも、その水溶液でも使用でき、水溶液を使用する場合は連続的に反応系内に 添加すると同時に減圧下、又は常圧下、水及びェピノ、ロヒドリンを留出させ、更に、 分液して水は除去し、ェピノ、ロヒドリンは反応系内に連続的に戻す方法が好ましく用 い得る。 [0095] Examples of the alkali metal hydroxide include sodium hydroxide, potassium hydroxide, and the like, which can be used in a solid form or an aqueous solution thereof. When using an aqueous solution, it is added to the reaction system continuously. A method in which water, epino and lohydrin are distilled off under reduced pressure or normal pressure, followed by liquid separation to remove water and epino and lohydrin being continuously returned to the reaction system can be preferably used.
[0096] 上記反応におけるアルカリ金属水酸ィヒ物の使用量は、式(2)で表される該フエノー ノレ系ィ匕合物の水酸基 1モノレに対して通常 0. 9〜1. 2モノレ、好ましくは 0. 95〜: L 15 モルである。  [0096] The amount of alkali metal hydroxide used in the above reaction is usually 0.9 to 1.2 monolayers with respect to 1 monoreoxy group of hydroxyl groups of the phenolic compound represented by formula (2). , Preferably 0.95: L 15 mol.
[0097] 反応温度は通常 20〜110°C、好ましくは 25〜100°Cである。反応時間は通常 0. 5 [0097] The reaction temperature is usually 20 to 110 ° C, preferably 25 to 100 ° C. Reaction time is usually 0.5
〜15時間、好ましくは 1〜10時間である。 -15 hours, preferably 1-10 hours.
[0098] 上記反応にメタノール、エタノール、プロパノール、ブタノール等のアルコール類、 あるいはジメチルスルホキシド、ジメチルスルホン等の非プロトン性極性溶媒を添カロ することは反応を円滑に進行させる上で好ましい。 [0098] It is preferable to add an aprotic polar solvent such as dimethyl sulfoxide or dimethyl sulfone to the reaction described above with an alcohol such as methanol, ethanol, propanol or butanol, or to promote the reaction smoothly.
[0099] アルコール類を使用する場合、その使用量はェピノ、ロヒドリンの量に対し通常 3〜3[0099] When alcohol is used, the amount used is usually 3 to 3 with respect to the amount of epino and rhohydrin.
0重量%、好ましくは 5〜20重量%である。 0% by weight, preferably 5 to 20% by weight.
[0100] 非プロトン性極性溶媒を使用する場合、その使用量はェピハロヒドリンの量に対して 通常 10〜 150重量%、好ましくは 15〜 120重量%である。 [0100] When an aprotic polar solvent is used, the amount used is usually 10 to 150% by weight, preferably 15 to 120% by weight, based on the amount of epihalohydrin.
[0101] 又、ェピノ、ロヒドリンと式(2)のフエノール系化合物を溶解した溶液に、塩ィ匕テトラメ チルアンモ-ゥム、臭化テトラメチルアンモ-ゥム、塩化トリメチルベンジルアンモ-ゥ ム等の 4級アンモ-ゥム塩を触媒として添カ卩し、 30〜110て)で0. 5〜8時間反応させ て得られるハロヒドリンエーテルィ匕物に、アルカリ金属水酸化物の固体又は水溶液を 加え、 20〜100°Cで 1〜10時間反応させ、脱ノ、ロゲンィ匕水素(閉環)させる方法でも よい。 [0101] Further, in a solution in which epino, rhohydrin and a phenolic compound of the formula (2) are dissolved, salts such as tetramethylammonium chloride, tetramethylammonium bromide, trimethylbenzylammonium chloride, etc. Add a quaternary ammonium salt as a catalyst and react for 30 to 110 hours) for 0.5 to 8 hours to a halohydrin ether compound obtained by adding a solid or aqueous solution of an alkali metal hydroxide. The reaction may be carried out at 20-100 ° C for 1-10 hours, followed by denomination and Logeny hydrogen (ring closure).
[0102] 次いで、得られたエポキシ化反応の反応液を水洗後、あるいは水洗することなしに 、加熱減圧下で過剰のェピハロヒドリン及び溶剤等を除去して低分子量のエポキシ 榭脂を得る。  [0102] Next, after the epoxidation reaction liquid obtained is washed with water or without washing, excess epihalohydrin and solvent are removed under reduced pressure by heating to obtain a low molecular weight epoxy resin.
[0103] 更に、得られたエポキシ榭脂をトルエン、メチルイソプチルケトン等に溶解し、水酸 化ナトリウム、水酸ィ匕カリウム等のアルカリ金属水酸ィ匕物の水溶液をカ卩えて閉環を確 実にすることにより、加水分解性ハロゲンの少ないエポキシ榭脂とすることもできる。こ の場合、アルカリ金属水酸ィ匕物の使用量はフ ノール系化合物の水酸基 1モルに対 して通常 0. 01〜0. 3モノレ、好ましく ίま 0. 05〜0. 2モノレである。反応温度 ίま通常 50[0103] Further, the obtained epoxy resin is dissolved in toluene, methylisobutyl ketone, etc. An epoxy resin having less hydrolyzable halogen can be obtained by providing an aqueous solution of an alkali metal hydroxide such as sodium hydroxide or potassium hydroxide to ensure ring closure. In this case, the amount of alkali metal hydroxide used is usually 0.01 to 0.3 monolayer, preferably 0.05 to 0.2 monolayer, with respect to 1 mol of hydroxyl group of the phenolic compound. . Reaction temperature ί until normal 50
〜120°C、反応時間は通常 0. 5〜2時間である。 ~ 120 ° C, reaction time is usually 0.5 to 2 hours.
[0104] 閉環反応終了後、生成した塩を濾過又は水洗等により除去し、加熱減圧下で溶剤 を除去することにより低分子量のエポキシ榭脂が得られる。該エポキシ榭脂のェポキ シ当量は通常 160〜 200gZ当量程度である。 [0104] After completion of the ring-closure reaction, the produced salt is removed by filtration or washing with water, and the solvent is removed under reduced pressure by heating to obtain a low molecular weight epoxy resin. The epoxy equivalent of the epoxy resin is usually about 160 to 200 gZ equivalent.
[0105] 本発明においてエポキシ当量とは、通常用いられている意味と同じであり、 lg当量 のエポキシ基を含むエポキシィ匕合物の質量のことで、 gZ当量の単位で表し、通常は[0105] In the present invention, the epoxy equivalent has the same meaning as commonly used, and means the mass of an epoxy compound containing 1 lg equivalent of an epoxy group, and is expressed in units of gZ equivalent, usually
JIS K 7236記載の方法により測定される。 It is measured by the method described in JIS K 7236.
[0106] こうして得られた低分子量のエポキシ榭脂と前記式(2)で表されるフ ノール系化 合物とを縮合反応させ、結晶性を失うことなぐ前記式(1)における n= l以上の多量 体の含有割合を高くすることができる。エポキシ榭脂と式 (2)で表される化合物との仕 込み比率は、エポキシ榭脂のエポキシ基 1モルに対し、式(2)の化合物のフエノール 性水酸基が通常 0. 05-0. 95モル、好ましくは 0. 1〜0. 9モルとなる割合が好まし い。 [0106] The low molecular weight epoxy resin thus obtained and the phenol compound represented by the formula (2) are subjected to a condensation reaction, and n = l in the formula (1) without losing crystallinity. The content ratio of the above polymers can be increased. The charge ratio of the epoxy resin to the compound represented by the formula (2) is generally 0.05 to 0.95 for the phenolic hydroxyl group of the compound of the formula (2) to 1 mol of the epoxy group of the epoxy resin. A ratio of mol, preferably 0.1 to 0.9 mol is preferred.
[0107] 反応を促進させるため触媒の使用が好ましい。該触媒としては塩化べンジルトリフ ェ-ルホスホ-ゥム、臭化ブチルトリフエ-ルホスホ-ゥム、臭化工チルトリフエ-ルホ スホ-ゥム、沃化工チルトリフエ-ルホスホ -ゥム等の 4級ホスホ-ゥム塩、トリフエ-ル ホスフィン、塩ィ匕テトラメチルアンモ-ゥム、水酸化ナトリウム、水酸ィ匕カリウム等が挙 げられる。  [0107] The use of a catalyst is preferred to promote the reaction. Examples of the catalyst include quaternary phosphonium salts such as benzyl chloride phosphor bromide, butyl triphenyl phosphor bromide, bromide tilt triphosphor phosphate, and iodinated tilt triphosphor phosphorous. And triphenylphosphine, sodium tetramethyl ammonium, sodium hydroxide, potassium hydroxide and the like.
[0108] 該触媒の使用量は、エポキシ榭脂のエポキシ基 1モルに対して通常 0. 01〜10重 量部、好ましくは 0. 05〜5重量部である。  [0108] The amount of the catalyst used is usually 0.01 to 10 parts by weight, preferably 0.05 to 5 parts by weight, based on 1 mol of epoxy groups of the epoxy resin.
[0109] なお、前記触媒のうち 4級ホスホニゥム塩は直鎖状のエポキシ榭脂を与えやすぐし 力もこの塩は水溶性であるため、反応後に水洗によって容易に除去することが可能 であり好ましい。 [0109] Of the above catalysts, the quaternary phosphonium salt is preferable because it gives a linear epoxy resin, and the salt is water-soluble and can be easily removed by washing with water after the reaction. .
[0110] この反応では反応温度を制御するためにも溶剤の使用が好ましい。溶剤としてはシ クロペンタノン、シクロへキサノン、メチルイソブチルケトン、メチルェチルケトン、ァセト ン、トルエン、 N—メチルピロリドン、ジメチルスルホキシド、 N, N—ジメチルホルムアミ ド等が挙げられる。その使用量は、エポキシ榭脂と式(2)で表されるフエノール系化 合物を合計した重量に対して通常 5〜150重量%程度、好ましくは 10〜: LOO重量% 程度である。 [0110] In this reaction, it is preferable to use a solvent in order to control the reaction temperature. As solvent Examples include clopentanone, cyclohexanone, methyl isobutyl ketone, methyl ethyl ketone, acetonitrile, toluene, N-methylpyrrolidone, dimethyl sulfoxide, and N, N-dimethylformamide. The amount used is usually about 5 to 150% by weight, preferably about 10 to about LOO% by weight, based on the total weight of the epoxy resin and the phenolic compound represented by the formula (2).
[0111] 反応温度は通常 60〜180°C、好ましくは 70〜160°Cである。反応の進行は GPC ( ゲルパーミエイシヨンクロマトグラフィー)等で追跡することができ、式(2)で表されるフ ェノール系化合物が検出されなくなるまで行う。反応時間は通常 0. 5〜15時間、好 ましくは 1〜10時間である。  [0111] The reaction temperature is usually 60 to 180 ° C, preferably 70 to 160 ° C. The progress of the reaction can be monitored by GPC (gel permeation chromatography) or the like, and is continued until the phenolic compound represented by the formula (2) is not detected. The reaction time is usually 0.5 to 15 hours, preferably 1 to 10 hours.
[0112] 反応終了後、反応溶液をそのまま冷却して目的のエポキシ榭脂を結晶化させて、 濾取してもょ 、が、 目的とするエポキシ榭脂の貧溶媒 (エポキシ榭脂の溶解度が低 、 溶媒)を加えて冷却する方法が好ま Uヽ。  [0112] After completion of the reaction, the reaction solution is cooled as it is to crystallize the desired epoxy resin, and filtered, but the desired solvent for the epoxy resin (the solubility of the epoxy resin is less The method of cooling by adding a low solvent is preferred.
[0113] 又、この反応を目的のエポキシ榭脂の貧溶媒中で行い、冷却後、 N, N—ジメチル ホルムアミド、ジメチルスルホキシド等の良溶媒(目的のエポキシ榭脂の溶解度が高 い溶媒)を添加して得られた結晶をー且溶解し、ここに貧溶媒を添加して得られる上 記式(1)で表されるエポキシ榭脂は、その液晶性を示す温度領域がより広くなり好ま しい。  [0113] Also, this reaction is carried out in a poor solvent for the desired epoxy resin, and after cooling, a good solvent such as N, N-dimethylformamide, dimethyl sulfoxide (a solvent having a high solubility for the desired epoxy resin) is used. The epoxy resin represented by the above formula (1), which is obtained by dissolving the crystals obtained by addition and then adding a poor solvent thereto, is preferred because the temperature range showing its liquid crystallinity is wider. That's right.
[0114] 該貧溶媒としてはメチルイソブチルケトン、メチルェチルケトン、アセトン、トルエン、 メタノール、エタノール、水等が挙げられる。該貧溶媒の使用量は、エポキシ榭脂と式 (2)で表される化合物を合計した重量に対して通常 50〜400重量%程度、好ましく は 100〜300重量%程度である。  [0114] Examples of the poor solvent include methyl isobutyl ketone, methyl ethyl ketone, acetone, toluene, methanol, ethanol, water and the like. The amount of the poor solvent used is usually about 50 to 400% by weight, preferably about 100 to 300% by weight, based on the total weight of the epoxy resin and the compound represented by the formula (2).
[0115] 析出した結晶を濾別し乾燥させることにより、本発明の感光性榭脂組成物に含有さ れ硬化剤 (D)として使用されるエポキシ榭脂を得ることができる。  [0115] By separating the precipitated crystals by filtration and drying, an epoxy resin that is contained in the photosensitive resin composition of the present invention and is used as a curing agent (D) can be obtained.
[0116] 該ェポキシ榭脂は前記式(1)で表され、 nは繰り返し数を表し、平均値として通常 0 〜7、好ましくは 1〜7の正数であり、 3〜5の正数が特に好ましい。 GPC用カラムを用 いた HPLCにより nが異なる化合物の含有割合を求めることができ、 nの平均値もそこ 力 求めることができる。  [0116] The epoxy resin is represented by the above formula (1), n represents the number of repetitions, and the average value is usually a positive number of 0 to 7, preferably 1 to 7, and a positive number of 3 to 5 Particularly preferred. The content ratio of compounds with different n can be determined by HPLC using a GPC column, and the average value of n can also be determined.
[0117] 測定条件としては、エポキシ榭脂が完全に溶解する溶離液を用い、またその溶離 液に適したカラムであり、また n=0と n= 1が分離可能な条件であることが望ましい。 [0117] As the measurement conditions, an eluent in which the epoxy resin is completely dissolved is used. It is desirable that the column is suitable for the liquid, and that n = 0 and n = 1 are conditions capable of separation.
[0118] 又、上記の反応で得られる該エポキシ榭脂は、好ましくは n=0の化合物の含有割 合が 25% (GPCによる面積%、以下同じ)以下であり、特に好ましくは 20%以下であ り、殊更好ましくは 5%以下である。 n=0の化合物の含有割合が 25%を越えると、融 解の開始温度がブロードで且つ低くなり現像性の点では劣る。 [0118] Further, the epoxy resin obtained by the above reaction preferably has a content ratio of n = 0 compound of 25% or less (area% by GPC, the same shall apply hereinafter), particularly preferably 20% or less. More preferably, it is 5% or less. When the content ratio of the compound with n = 0 exceeds 25%, the melting start temperature is broad and low, and the developability is poor.
[0119] 一方、液晶性を示す温度領域は、低分子量化合物が、例えば、 8〜15%程度存在 するほうが広くなる場合があるので、 n=0の化合物の含有割合はエポキシ榭脂組成 物の用途によって適宜決定すればょ 、。 [0119] On the other hand, the temperature range exhibiting liquid crystallinity may become wider when low molecular weight compounds are present, for example, in an amount of about 8 to 15%. Therefore, the content ratio of the compound with n = 0 is that of the epoxy resin composition. If it is decided appropriately according to the use.
[0120] 前記式(1)で表されるエポキシ榭脂を DSC (示差熱分析装置)で測定すると、多く は二箇所以上に吸熱ピークが見られる。ピークが重なる場合もある力 これは該ェポ キシ榭脂が液晶性を有することを示す。液晶性を示すことと、本発明における感光性 榭脂組成物の熱安定性、優れた現像性との相関は現時点では定かではないが、液 晶状態を示す物質であるために、エポキシ榭脂の系中における存在状態が通常の 液状エポキシ榭脂とは異なり、優れた熱安定性と現像性を両立できるものと考えられ る。更に、偏光顕微鏡を用いて昇温しながら観察することにより該エポキシ榭脂が光 学的に異方性を示す温度領域を特定することが可能であり、その温度領域は 80〜1 60°C付近である。該エポキシ榭脂はこのように広 、温度範囲に亘つて液晶性を示す [0120] When the epoxy resin represented by the above formula (1) is measured by DSC (differential thermal analyzer), many endothermic peaks are observed at two or more locations. Force that peaks may overlap This indicates that the epoxy resin has liquid crystallinity. Although the correlation between the liquid crystallinity and the thermal stability and excellent developability of the photosensitive resin composition in the present invention is not clear at present, it is a substance showing a liquid crystal state. Unlike the usual liquid epoxy resin, the existence state in the system is considered to be able to achieve both excellent thermal stability and developability. Furthermore, it is possible to identify a temperature region in which the epoxy resin exhibits optical anisotropy by observing it with a polarizing microscope while raising the temperature, and the temperature region is 80 to 160 ° C. It is near. The epoxy resin is thus wide and exhibits liquid crystallinity over a temperature range.
[0121] 前記式(1)で表されるエポキシ榭脂のうち、 n=0であるエポキシ榭脂も液晶性を示 す力 該エポキシ榭脂は通常常温において液状もしくは融点が 40°C以下の結晶状 であり液晶性を示す温度領域は非常に狭 、。 [0121] Among the epoxy resins represented by the formula (1), epoxy resin having n = 0 also exhibits liquid crystallinity. The epoxy resin is usually liquid at normal temperature or has a melting point of 40 ° C or lower. The temperature range that is crystalline and exhibits liquid crystallinity is very narrow.
[0122] 本発明の感光性榭脂組成物中の硬化剤 (D)の添加割合は、感光性アルカリ水溶 液可溶性榭脂 (A)の固形分酸価と使用量力も計算された当量の 200%以下の量が 好ましい。なお、 n=0の化合物が 25重量%以内であれば、融解開始温度を高くする ことができるため、現像性、また榭脂組成物としての保存安定性を向上させることがで きる。即ち、アルカリ水溶液可溶性感光性榭脂組成物に含有される硬化剤(D)の添 加割合は、組成物の構成組成と感光性アルカリ水溶液可溶性榭脂 (A)の酸価に関 連して変わり得るが、アルカリ水溶液可溶性感光性榭脂組成物の固形分を 100重量 %とすると凡そ 3〜30重量%程度である。 [0122] The addition ratio of the curing agent (D) in the photosensitive resin composition of the present invention is 200 equivalent to the calculated solid content acid value and usage capacity of the photosensitive alkaline aqueous solution-soluble resin (A). % Or less is preferred. If the compound with n = 0 is within 25% by weight, the melting start temperature can be increased, so that developability and storage stability as a resin composition can be improved. That is, the addition ratio of the curing agent (D) contained in the alkaline aqueous solution-soluble photosensitive resin composition is related to the composition of the composition and the acid value of the photosensitive alkaline aqueous solution-soluble resin (A). 100% by weight solid content of aqueous alkaline resin soluble photosensitive resin composition % Is about 3 to 30% by weight.
[0123] 更に、本発明の感光性榭脂組成物には必要に応じて各種の添加剤、例えば、タル ク、硫酸バリウム、炭酸カルシウム、炭酸マグネシウム、チタン酸バリウム、水酸化アル ミニゥム、酸化アルミニウム、シリカ、クレー等の充填剤、ァエロジル等のチキソトロピ 一付与剤、フタロシアニンブルー、フタロシアニングリーン、酸化チタン等の着色剤、 シリコーンやフッ素系のレべリング剤や消泡剤、ハイドロキノンやハイドロキノンモノメ チルエーテル等の重合禁止剤等を該組成物の諸性能を高める目的で添加すること ができる。 [0123] Furthermore, various additives such as talc, barium sulfate, calcium carbonate, magnesium carbonate, barium titanate, aluminum hydroxide, aluminum oxide are optionally added to the photosensitive resin composition of the present invention. Fillers such as silica and clay, thixotropic agents such as aerosil, colorants such as phthalocyanine blue, phthalocyanine green and titanium oxide, silicone and fluorine leveling agents and antifoaming agents, hydroquinone and hydroquinone monomethyl ether A polymerization inhibitor such as can be added for the purpose of enhancing various performances of the composition.
[0124] 本発明の感光性榭脂組成物は、前記の感光性アルカリ水溶液可溶性榭脂 (A)、 反応性架橋剤 (B)、光重合開始剤 (C)及び硬化剤 (D)を含有する。  [0124] The photosensitive resin composition of the present invention contains the photosensitive aqueous alkali-soluble resin (A), a reactive crosslinking agent (B), a photopolymerization initiator (C), and a curing agent (D). To do.
[0125] 本発明の感光性アルカリ水溶液可溶性榭脂 (A)は、通常アルカリ水溶液に可溶で あるが、前記の製造に用いた溶媒にも可溶であり、ソルダーレジスト、メツキレジスト等 に使用した場合、それらの溶剤で現像することも可能である。  [0125] The photosensitive alkaline aqueous solution-soluble resin (A) of the present invention is usually soluble in an alkaline aqueous solution, but is also soluble in the solvent used in the production described above, and is used for solder resists, plating resists, and the like. In this case, development with these solvents is also possible.
[0126] 本発明の感光性榭脂組成物を液状型レジストとして使用する際には、硬化剤 (D) を予め榭脂組成物中に混合してぉ 、てもよ 、が、プリント配線板への塗布前に混合 して用いることもできる。即ち、前記の感光性アルカリ水溶液可溶性榭脂 (A)成分を 主体とした主剤溶液と、硬化剤(D)を主体とした硬化剤溶液の二液型に配合し、使 用に際してこれらを混合する方法であり、このような使用が好ましい。  [0126] When the photosensitive resin composition of the present invention is used as a liquid resist, the curing agent (D) may be mixed in advance in the resin composition, but it may be a printed wiring board. It can also be mixed before use. That is, the above-mentioned photosensitive alkaline aqueous solution-soluble resin (A) is mixed into a two-pack type of a main agent solution mainly composed of component (A) and a curing agent solution mainly composed of curing agent (D), and these are mixed in use. Method and such use is preferred.
[0127] 本発明の感光性榭脂組成物は、榭脂組成物が支持フィルムと保護フィルムでサン ドイッチされた構造力 なるドライフィルムレジストとして用いることもできる。  [0127] The photosensitive resin composition of the present invention can also be used as a dry film resist having a structural strength in which the resin composition is sandwiched between a support film and a protective film.
[0128] ドライフィルム型レジストとして使用する際には、前記の感光性アルカリ水溶液可溶 性榭脂 (A)、反応性架橋剤 (B)、光重合開始剤 (C)、硬化剤 (D)及びフィラー、添 加剤等を配合した感光性榭脂組成物を感光層とし、この感光層を支持層、保護層で サンドイッチすることでドライフィルムとする。使用する際は保護層を剥離し、基板にラ ミネート後、露光を行い支持層を剥離して現像を行う。  [0128] When used as a dry film type resist, the above-mentioned photosensitive aqueous alkali-soluble soluble resin (A), reactive crosslinking agent (B), photopolymerization initiator (C), curing agent (D) A photosensitive resin composition containing a filler, an additive, and the like is used as a photosensitive layer, and the photosensitive layer is sandwiched between a support layer and a protective layer to form a dry film. When used, the protective layer is peeled off, the substrate is laminated, exposed to light, the support layer is peeled off and developed.
[0129] ドライフィルムの調製は具体的には以下のようにして行うが、これに限定されるもの ではない。  [0129] The dry film is specifically prepared as follows, but is not limited thereto.
[0130] 前記のアルカリ水可溶性榭脂溶液 (A)、反応性架橋剤 (B)、光重合開始剤 (C)、 硬化剤 (D)、熱硬化触媒及び濃度調整溶媒を加え、ビーズミルにて混練し均一に分 散させレジスト榭脂組成物を得る。 [0130] The alkaline water-soluble resin solution (A), the reactive crosslinking agent (B), the photopolymerization initiator (C), A curing agent (D), a thermosetting catalyst, and a concentration adjusting solvent are added, and the mixture is kneaded with a bead mill and uniformly dispersed to obtain a resist resin composition.
[0131] 次いでロールコート法により、ポリエチレンテレフタレートフィルム等の支持フィルム に均一に塗布し、使用している溶剤を揮発させるのに十分な温度、例えば温度 70°C と風量を有した熱風乾燥炉を通過させ、厚さ 30 mの榭脂層を形成し、この榭脂層 上にポリエチレンフィルム等の保護フィルムを貼り付け、ドライフィルムを得る。得られ たドライフィルムを例えば、ポリイミドブリント基板 (銅回路厚:12 m、ポリイミドフィル ム厚: 25 m)などのプリント基板に、加熱ロールを用いて、保護フィルムを剥離しな 力 榭脂層を基板全面に貼り付ける。貼り付けの工程は、真空中で行うことが好まし い。紫外線露光装置を用い回路パターンの描画されたマスクを通して紫外線を照射 する。 1%炭酸ナトリウム水溶液等のアルカリ水溶液でスプレー現像を行い、紫外線 未照射部の榭脂を除去し水洗乾燥して、プリント基板を熱風乾燥器で加熱硬化反応 させ硬化膜を得る。 [0131] Next, a hot air drying furnace having a temperature sufficient to volatilize the solvent used, for example, a temperature of 70 ° C, is uniformly applied to a support film such as a polyethylene terephthalate film by a roll coating method. Pass through to form a 30 m thick resin layer, and apply a protective film such as polyethylene film on this resin layer to obtain a dry film. For example, use a heated roll on a printed circuit board such as a polyimide blind substrate (copper circuit thickness: 12 m, polyimide film thickness: 25 m) to remove the protective film. Affix to the entire surface of the substrate. The pasting process is preferably performed in a vacuum. Ultraviolet light is irradiated through a mask on which a circuit pattern is drawn using an ultraviolet exposure device. Spray development is performed with an alkaline aqueous solution such as a 1% aqueous sodium carbonate solution to remove the non-ultraviolet-irradiated portion of the resin, washed with water and dried, and the printed circuit board is heated and cured with a hot air dryer to obtain a cured film.
[0132] 本発明の感光性榭脂組成物 (液状又はフィルム状)は、電子部品の層間の絶縁材 、光部品間を接続する光導波路やプリント基板用のソルダーレジスト、カバーレイ等 のレジスト材料として有用である他、カラーフィルター、印刷インキ、封止剤、塗料、コ 一ティング剤、接着剤等としても使用できる。  [0132] The photosensitive resin composition (liquid or film-like) of the present invention includes an insulating material between electronic component layers, an optical waveguide connecting optical components, a solder resist for printed circuit boards, and a resist material such as a coverlay. In addition, it can be used as a color filter, printing ink, sealant, paint, coating agent, adhesive and the like.
[0133] 本発明の感光性榭脂組成物を紫外線等の活性エネルギー線照射により硬化させ た硬化物も本発明に含まれる。紫外線等の活性エネルギー線照射による硬化は常 法により行うことができる。例えば、紫外線を照射する場合には、低圧水銀灯、高圧 水銀灯、超高圧水銀灯、キセノン灯、紫外線発光レーザー (エキシマーレーザー等) 等の紫外線発生装置を用いればょ 、。  [0133] A cured product obtained by curing the photosensitive resin composition of the present invention by irradiation with active energy rays such as ultraviolet rays is also included in the present invention. Curing by irradiation with active energy rays such as ultraviolet rays can be performed by a conventional method. For example, when irradiating ultraviolet rays, use an ultraviolet generator such as a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, or an ultraviolet light emitting laser (such as an excimer laser).
[0134] 本発明の感光性榭脂組成物の硬化物は、例えば、レジスト膜、ビルドアップ工法用 の層間絶縁材ゃ光導波路としてプリント基板、光電子基板や光基板のような電気 ·電 子'光基材に利用される。これらの基材を有する物品の具体例としては、例えば、コン ピューター、家電製品、携帯機器等が挙げられる。これらの基材、物品も本発明に含 まれる。  [0134] The cured product of the photosensitive resin composition of the present invention is, for example, a resist film, an interlayer insulating material for a buildup method, an optical waveguide such as a printed board, an optoelectronic board, or an optical board as an optical waveguide. Used for optical substrates. Specific examples of articles having these base materials include computers, home appliances, and portable devices. These base materials and articles are also included in the present invention.
[0135] 上記硬化物層の膜厚は 0. 5〜160 m程度、好ましくは 1〜: LOO /z m程度である。 [0136] プリント配線板への使用につ ヽて示すと、例えば、液状の榭脂組成物を使用してプ リント配線用基板に、スクリーン印刷法、スプレー法、ロールコート法、静電塗装法、 カーテンコート法等の方法により 5160 μ mの膜厚で本発明の感光性榭脂組成物 を塗布し、通常 50〜110°C、好ましくは 60〜100°Cの温度で乾燥 (プリべイク)させる ことにより塗膜を形成する。その後、ネガフィルム等の露光パターンを形成したフォト マスクを通して塗膜に直接又は間接に紫外線等の活性エネルギー線を 10〜2000 mjZcm2程度の強さで照射し、未露光部分を後記する現像液を用いて、例えば、ス プレー、揺動浸漬、ブラッシング、スクラッピング等により現像する。その後、必要に応 じて、更に紫外線を照射し、次いで、通常 100〜200°C、好ましくは 140〜180°Cの 温度で加熱処理することにより、耐金メッキ性に優れ、耐熱性、耐溶剤性、耐酸性、 密着性、屈曲性等の諸特性に優れた永久保護膜を有するプリント配線板を得ること ができる。 [0135] The thickness of the cured product layer is about 0.5 to 160 m, preferably 1 to about LOO / zm. [0136] For use in a printed wiring board, for example, a liquid resin composition is used to print a printed wiring board on a screen printing method, spray method, roll coating method, electrostatic coating method. The photosensitive resin composition of the present invention is applied at a film thickness of 5 to 160 μm by a method such as curtain coating, and is usually dried at a temperature of 50 to 110 ° C., preferably 60 to 100 ° C. A coating film is formed by baking. After that, the coating film is directly or indirectly irradiated with active energy rays such as ultraviolet rays with an intensity of about 10 to 2000 mjZcm 2 through a photomask having an exposure pattern such as a negative film. For example, development is performed by spraying, rocking immersion, brushing, scraping, or the like. After that, if necessary, it is further irradiated with ultraviolet rays and then heat-treated at a temperature of usually 100 to 200 ° C, preferably 140 to 180 ° C, so that it has excellent gold plating resistance, heat resistance and solvent resistance. It is possible to obtain a printed wiring board having a permanent protective film excellent in various properties such as property, acid resistance, adhesion, and flexibility.
[0137] 上記、現像に使用されるアルカリ水溶液としては水酸ィ匕カリウム、水酸化ナトリウム、 炭酸ナトリウム、炭酸カリウム、炭酸水素ナトリウム、炭酸水素カリウム、リン酸ナトリウム 、リン酸カリウム等の無機アルカリ水溶液や水酸ィ匕テトラメチルアンモ-ゥム、水酸ィ匕 テトラエチルアンモ-ゥム、水酸化テトラプチルアンモ-ゥム、モノエタノールァミン、 ジエタノールァミン、トリエタノールァミン等の有機アルカリ水溶液が使用できる。  [0137] Examples of the alkaline aqueous solution used for development include inorganic alkaline aqueous solutions such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium bicarbonate, potassium bicarbonate, sodium phosphate, and potassium phosphate. Organic alkali aqueous solutions such as tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrabutylammonium hydroxide, monoethanolamine, diethanolamine and triethanolamine Can be used.
[0138] 前記のように有機溶剤の使用も可能である。  [0138] As described above, an organic solvent can also be used.
実施例  Example
[0139] 以下、本発明を実施例によって更に具体的に説明するが、本発明が下記実施例に 限定されるものでない。  [0139] Hereinafter, the present invention will be described more specifically with reference to Examples. However, the present invention is not limited to the following Examples.
[0140] 合成例 1 [0140] Synthesis Example 1
攪拌装置、還流管をつけた 3Lフラスコ中に、分子中に 2個以上のエポキシ基を有 するエポキシィ匕合物(a)として、 日本化薬製 EOCN— 103S (多官能クレゾ一ルノボ ラック型エポキシ榭脂、エポキシ当量:215. OgZ当量)を 860. Og、分子中にェチレ ン性不飽和基を有するモノカルボン酸ィ匕合物 (b)としてアクリル酸 (分子量: 72. 06) を 288. 3g、反応用溶媒としてカルビトールアセテートを 492. lg、熱重合禁止剤とし て 2, 6—ジ— t—ブチル—p—タレゾールを 4. 921g及び反応触媒としてトリフエ-ル ホスフィンを 4. 921g仕込み、 98°Cの温度で反応液の酸価が 0. 5mg'KOHZg以 下になるまで反応させ、エポキシカルボキシレートイ匕合物を得た。 Nippon Kayaku's EOCN-103S (Polyfunctional Cresolol Novolac-type Epoxy) as an epoxy compound ( a ) having two or more epoxy groups in the molecule in a 3L flask equipped with a stirrer and reflux tube Resin, epoxy equivalent: 215. OgZ equivalent) is 860. Og, acrylic acid (molecular weight: 72.06) is 288. Og as monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule. 3 g, 492. lg of carbitol acetate as a reaction solvent, 4.921 g of 2,6-di-t-butyl-p-talezole as a thermal polymerization inhibitor and triphenyl as a reaction catalyst 4.921 g of phosphine was charged and reacted at a temperature of 98 ° C. until the acid value of the reaction solution became 0.5 mg′KOHZg or less to obtain an epoxy carboxylate compound.
[0141] 次いでこの反応液に反応用溶媒としてカルビトールアセテートを 169. 8g、多塩基 酸無水物(c)としてテトラヒドロ無水フタル酸 201. 6gを仕込み、 95°Cで 4時間反応さ せ、感光性アルカリ水溶液可溶性榭脂 (A) 67重量%を含む榭脂溶液を得た (この溶 液を A— 1とする)。酸価を測定したところ、 69. 4mg'KOH/g (固形分酸価: 103. 6mg-KOH/g)であつた。  [0141] Next, 169.8 g of carbitol acetate as a reaction solvent and 201.6 g of tetrahydrophthalic anhydride as a polybasic acid anhydride (c) were added to this reaction solution, and reacted at 95 ° C for 4 hours to be photosensitive. An aqueous solution containing 67% by weight of a soluble alkaline aqueous solution soluble resin (A) was obtained (this solution is designated as A-1). The acid value was measured and found to be 69.4 mg 'KOH / g (solid content acid value: 103.6 mg-KOH / g).
[0142] 合成例 2  [0142] Synthesis Example 2
攪拌装置、還流管をつけた 3Lフラスコ中に、分子中に 2個のエポキシ基を有するェ ポキシィ匕合物(d)として、 日本化薬製 RE— 310S (2官能ビスフエノール— A型ェポ キシ榭脂、エポキシ当量:184. OgZ当量)を 368. 0g、分子中にエチレン性不飽和 基を有するモノカルボン酸ィ匕合物(b)としてアクリル酸 (分子量: 72. 06)を 141. 2g 、熱重合禁止剤としてハイドロキノンモノメチルエーテルを 1. 02g及び反応触媒とし てトリフエ-ルホスフィンを 1. 53g仕込み、 98°Cの温度で反応液の酸価が 0. 5mg- As an epoxy compound (d) having two epoxy groups in the molecule in a 3L flask equipped with a stirrer and a reflux tube, Nippon Kayaku RE-310S (bifunctional bisphenol-A type epoxy) 36.80 g of xylose resin, epoxy equivalent: 184. OgZ equivalent), 141. Acrylic acid (molecular weight: 72. 06) as a monocarboxylic acid compound (b) having an ethylenically unsaturated group in the molecule. 2 g, 1.02 g of hydroquinone monomethyl ether as a thermal polymerization inhibitor and 1.53 g of triphenylphosphine as a reaction catalyst were added, and the acid value of the reaction solution at a temperature of 98 ° C. was 0.5 mg-
KOHZg以下になるまで反応させ、エポキシカルボキシレート化合物(理論分子量: 509. 2)を得た。 It was made to react until it became below KOHZg, and the epoxy carboxylate compound (theoretical molecular weight: 509.2) was obtained.
[0143] 次いでこの反応液に反応用溶媒としてカルビトールアセテートを 755. 5g、分子中 に 2個の水酸基を有するカルボン酸化合物(f)としてジメチロールプロピオン酸 (分子 量: 134. 16)を 268. 3g、熱重合禁止剤として 2—メチルハイド口キノンを 1. 08g、任 意のジオール化合物(g)としてスピログリコール(分子量: 304. 38)を 140. 3gカロえ、 45°Cに昇温させた。この溶液にジイソシァネートイ匕合物(e)としてトリメチルへキサメ チレンジイソシァネート(分子量: 210. 27)485. 2gを反応温度が 65°Cを超えないよ うに徐々に滴下した。滴下終了後、温度を 80°Cに上昇させ、赤外吸収スペクトル測 定法により 2250cm_1付近の吸収がなくなるまで 6時間反応させ、本発明の感光性 アルカリ水溶液可溶性榭脂 (A) 65重量%を含む榭脂溶液を得た (この溶液を A— 2 とする)。酸価を測定したところ、 52. Omg' KOHZg (固形分酸価: 80. Omg-KOH Zg)であった。 [0143] Next, 75.5 g of carbitol acetate was used as a reaction solvent in the reaction solution, and dimethylolpropionic acid (molecular weight: 134.16) was used as a carboxylic acid compound (f) having two hydroxyl groups in the molecule. 3g, 1.08g of 2-methylhydride quinone as a thermal polymerization inhibitor, 140.3g of spiroglycol (molecular weight: 304.38) as an optional diol compound (g), heated to 45 ° C I let you. To this solution, 485.2 g of trimethylhexamethylenediocyanate (molecular weight: 210.27) as diisocyanate compound (e) was gradually added dropwise so that the reaction temperature did not exceed 65 ° C. After completion of the dropping, the temperature was raised to 80 ° C., and the reaction was carried out for 6 hours until absorption near 2250 cm _1 disappeared by the infrared absorption spectrum measurement method, and 65% by weight of the photosensitive alkaline aqueous solution-soluble resin (A) of the present invention was added. A rosin solution containing was obtained (this solution is referred to as A-2). When the acid value was measured, it was 52. Omg 'KOHZg (solid content acid value: 80. Omg-KOH Zg).
[0144] 合成例 3 温度計、冷却管、分留管、撹拌機を取り付けたフラスコに窒素パージを施しながら、 前記式(2)で表されるフエノール系化合物(商品名 p, p'—BPF;本州化学製) 100 部に対しェピクロルヒドリン 370部、メタノール 26部を仕込み撹拌下で 65〜70°Cまで 昇温し完全に溶解せしめた後、還流条件化でフレーク状水酸化ナトリウム 40. 4部を 100分かけて分割添加した。その後、更に 70°Cで 1時間加熱を行った。次いで、水を 150部加えて水洗を 2回行い、加熱減圧下で油層力 過剰のェピクロルヒドリン等を 除去した。残留分にメチルイソプチルケトン 312部をカ卩えて溶解し、 70°Cで 30%水 酸化ナトリウム水溶液 10部を加えて 1時間反応を行った。反応後、水洗を 3回行い、 加熱減圧下でメチルイソプチルケトンを留去し、前記式(1)で表されるエポキシ榭脂 150部を得た。得られたエポキシ榭脂のエポキシ当量は 170gZ当量、 25°Cにおけ る粘度は 850mP · s (E型粘度計;以下同様)、全塩素量は 1 lOOppmであった。 [0144] Synthesis Example 3 While purging nitrogen in a flask equipped with a thermometer, condenser, fractionator, and stirrer, the phenolic compound represented by the above formula (2) (trade name p, p'—BPF; manufactured by Honshu Chemical) 100 370 parts of epichlorohydrin and 26 parts of methanol were added to the part, heated to 65-70 ° C with stirring and completely dissolved, and then 40.4 parts of flaky sodium hydroxide were added under reflux conditions. Added in portions over a minute. Thereafter, heating was further performed at 70 ° C for 1 hour. Next, 150 parts of water was added, followed by washing with water twice to remove excess epichlorohydrin and the like under oil heating under reduced pressure. To the residue, 312 parts of methyl isobutyl ketone was added and dissolved, and 10 parts of 30% aqueous sodium hydroxide solution was added at 70 ° C for 1 hour. After the reaction, washing with water was carried out three times, and methyl isobutyl ketone was distilled off under reduced pressure by heating to obtain 150 parts of epoxy resin represented by the above formula (1). The epoxy equivalent of the obtained epoxy resin was 170 gZ equivalent, the viscosity at 25 ° C was 850 mP · s (E-type viscometer; the same shall apply hereinafter), and the total chlorine content was 1 lOOppm.
[0145] 得られたエポキシ榭脂 85部及び前記式(2)で表される化合物 25部、シクロペンタ ノン 55部を加えて撹拌下で溶解させ、トリフエ-ルホスフィン 0. 09部を添カ卩した。還 流下で 4時間反応させ GPCにより式(2)で表される化合物が完全に消滅したのを確 認した後、更に撹拌を続け合計 6時間反応させた後で 80°Cまで冷却しメチルイソブ チルケトン 220部を加えて結晶を析出させた。この結晶を濾過後乾燥させ白色粉末 状の結晶性エポキシ榭脂 (D- 1) 85部を得た。得られたエポキシ榭脂 (D- 1)の融 点を DSC (示差熱分析計)で測定したところ、 127°Cであった。又、 GPCによって前 記式(1)における n=0の成分量を測定したところ 2. 6面積%であり、エポキシ当量 は 697g/当量であった。又、繰り返し数 nは平均値として 2. 3であった。  [0145] 85 parts of the obtained epoxy resin, 25 parts of the compound represented by the formula (2) and 55 parts of cyclopentanone were added and dissolved under stirring, and 0.09 part of triphenylphosphine was added. did. After reacting under reflux for 4 hours and confirming that the compound represented by formula (2) had completely disappeared by GPC, stirring was continued and the reaction was continued for a total of 6 hours, followed by cooling to 80 ° C and methyl isobutyl ketone. 220 parts were added to precipitate crystals. The crystals were filtered and dried to obtain 85 parts of white powdery crystalline epoxy resin (D-1). The melting point of the obtained epoxy resin (D-1) was measured by DSC (differential thermal analyzer) and found to be 127 ° C. Further, when the amount of n = 0 in the above formula (1) was measured by GPC, it was 2.6 area% and the epoxy equivalent was 697 g / equivalent. The number of repetitions n was 2.3 as an average value.
[0146] なお、 GPCの測定は、下記条件に従って測定を実施した。  [0146] GPC was measured according to the following conditions.
機器: TOSOH HLC-8220 GPC  Equipment: TOSOH HLC-8220 GPC
溶離液:テトラヒドロフラン  Eluent: Tetrahydrofuran
カラム: TOSOH TSKgel SuperHZM— N X 1、 TSKgel SuperHZlOOO X 2、 直列装着  Column: TOSOH TSKgel SuperHZM—N X 1, TSKgel SuperHZlOOO X 2, in-line
流量: 0. 3ml/分  Flow rate: 0.3 ml / min
温度: 40°C  Temperature: 40 ° C
検出器:示差屈折計 [0147] 実施例 1、 2、比較例 1 Detector: Differential refractometer [0147] Examples 1 and 2 and Comparative Example 1
合成例 1、合成例 2及び合成例 3で得られた (A— 1)、 (A- 2)及び (D— 1)、並び にジャパンエポキシレジン製ェピコート 4003Pを表 1に示す配合割合で混合し、必要 に応じて 3本ロールミルで混練し、感光性榭脂組成物を得た。  (A-1), (A-2) and (D-1) obtained in Synthesis Example 1, Synthesis Example 2 and Synthesis Example 3, and Epicoat 4003P made by Japan Epoxy Resin, were mixed in the mixing ratio shown in Table 1. Then, if necessary, the mixture was kneaded with a three-roll mill to obtain a photosensitive resin composition.
[0148] これをスクリーン印刷法により、乾燥膜厚が 15〜25 /ζ πιの厚さになるようにプリント 基板に塗布し、 80°Cの熱風乾燥器で 30分乾燥した。次いで、紫外線露光装置 (ォ ーク製作所、型式 HMW— 680GW)を用い回路パターンの描画されたマスクを通し て紫外線(500miZcm2)を照射し、その後、 1%炭酸ナトリウム水溶液でスプレー現 像を行い、紫外線未照射部分の榭脂を除去した。水洗乾燥後、プリント基板を 150 °Cの熱風乾燥器で 60分加熱硬化反応させ硬化膜を得た。 [0148] This was applied to a printed circuit board by a screen printing method so that the dry film thickness was 15 to 25 / ζ πι, and dried in a hot air dryer at 80 ° C for 30 minutes. Next, ultraviolet rays (500 miZcm 2 ) are irradiated through a mask on which a circuit pattern is drawn using an ultraviolet exposure apparatus (Oak Seisakusho, model HMW-680GW), and then sprayed with a 1% sodium carbonate aqueous solution. Then, the non-ultraviolet-irradiated portion of the resin was removed. After washing with water and drying, the printed circuit board was subjected to a heat curing reaction in a hot air drier at 150 ° C. for 60 minutes to obtain a cured film.
実施例 赚例 注 1 Example 赚 Example Note 1
感¾*アルカリ水涵夜 溶性 脂 (A) mm  Sensitive * Alkaline water Solubility Soluble fat (A) mm
A- 1 51. 80 51. 80 A- 1 51. 80 51. 80
Λ-2 51. 80 Λ-2 51.80
^mm (B)  ^ mm (B)
DPHA * 1 3. 38 3. 38 DPHA * 1 3. 38 3. 38
HX-220 * 2 3. 38 HX-220 * 2 3.38
光重合開始剤 (C)  Photopolymerization initiator (C)
ィルガキュア一 907 * 3 4. 50 4. 50 4. 50 Irgacure 907 * 3 4. 50 4. 50 4. 50
DETX-S 氺 4 0. 45 0. 45 0. 45 硬化剤 (D) DETX-S 氺 4 0. 45 0. 45 0. 45 Curing agent (D)
D— 1 33. 46 33. 46  D— 1 33. 46 33. 46
ェピコート 4003 P * 5 33. 46 麵議某  Epicourt 4003 P * 5 33. 46
メラミン 1. 00 1. 00 1. 00 添細  Melamine 1. 00 1. 00 1. 00
赚バリウム 15. 15 15. 15 15. 15 フタロシアニンダリーン 0. 45 0. 45 0. 45 赚 Barium 15. 15 15. 15 15. 15 Phthalocyanine Nalene 0. 45 0. 45 0. 45
BYK-354 * 6 0. 39 0. 39 0. 39BYK-354 * 6 0. 39 0. 39 0. 39
KS-66 * 7 0. 39 0. 39 0. 39 溶剤 KS-66 * 7 0. 39 0. 39 0. 39 Solvent
カレビトーノレァセテ一ト 4. 87 4. 87 4. 87 注  Calebitonoracetate 4. 87 4. 87 4. 87 Note
* 1 日本化 :ジぺンタエリスリトールポリアクリレート  * 1 Nippon Chemical: Dipentaerythritol polyacrylate
* 2 Π本化 : ί—力プロラクトン¾ヒドロキシビバリン酸ネオペンチノレグ リコールジアタリレート  * 2 化 本 化 : ί—Power Prolactone ¾ Hydrobivalic acid neopentinoreg Recall Diatalylate
* 3 Va n t i c o製 : 2—メチノレ一 (4— (メチノけォ) フエ二ノレ) 一 2—モ ノレホリノ一 1—プロパン  * 3 Made by Van ticco: 2-Metinore (4- (Metino-keo) Fueninore) 1 2-Monoleholino 1-Propane
*4 R本化 ¾® : 2, 4—ジェチけォキサントン  * 4 R book ¾®: 2, 4—Jetxanthone
* 5 ジャパンエポキシレジン製 :ビスフエノール F型ェポキ、 ^脂 (4— 4, 体 のビスフエノ一/レ F 有量は H P L Cによる測 は 22 %)  * 5 Made by Japan Epoxy Resin: Bisphenol F-type Epoxy, ^ Fat (4-4, body bisphenol / resin F content is 22% measured by HPLC)
*6 ビックケミー製: レベリング剤  * 6 Big Chemie: Leveling agent
*7 信腹匕学製 :消翻 ェピコート 4003Pの HPLCによる測定は、下記条件に従って測定を実施した 機器: TOSOH 8020 シリーズ  * 7 Made by Shin-Shin Gakaku: Sophisticated Epicoat 4003P was measured by HPLC according to the following conditions Instrument: TOSOH 8020 Series
溶離液:ァセトニトリル:水 =7: 3 → 10:0グラジェント Eluent: Acetonitrile: Water = 7: 3 → 10: 0 Gradient
カラム: TOSOH TSKgel ODS— 80TM Column: TOSOH TSKgel ODS— 80TM
流量: 0.8ml/分 Flow rate: 0.8ml / min
温度: 40°C Temperature: 40 ° C
検出器: UV検出器(254nm) [0151] 組成物又は硬化物にっ ヽて、タック性、現像性、解像性、光感度、表面光沢、基板 そり、屈曲性、密着性、鉛筆硬度、耐溶剤性、耐酸性、耐熱性、耐金メッキ性、耐 PC T性、耐熱衝撃性の試験を行なった。それらの結果を表 2に示す。なお、試験方法及 び評価方法は次のとおりである。 Detector: UV detector (254nm) [0151] For compositions or cured products, tackiness, developability, resolution, photosensitivity, surface gloss, substrate warpage, flexibility, adhesion, pencil hardness, solvent resistance, acid resistance, heat resistance Tests of gold plating resistance, PCT resistance, and thermal shock resistance were conducted. Table 2 shows the results. The test method and evaluation method are as follows.
[0152] (タック性)基板に塗布した乾燥後の膜に脱脂綿をこすりつけ、膜のタック性を評価 した。  [0152] (Tackiness) Absorbent cotton was rubbed onto the dried film applied to the substrate, and the tackiness of the film was evaluated.
〇· · · ·脱脂綿は張り付力ない  〇 ...
X… ·脱脂綿の糸くずが膜に張り付く  X… · Fabric lint sticks to the membrane
[0153] (現像性)下記の評価基準を使用した。 [0153] (Developability) The following evaluation criteria were used.
〇… '現像時、完全にインキが除去され残渣が無く現像できた  ○… 'When developing, the ink was completely removed and there was no residue.
X… '現像時、現像されない部分があり、残渣が見られる  X… 'When developing, there are parts that are not developed, and residues are seen
[0154] (解像性)乾燥後の塗膜に、 50 μ mのネガパターンを密着させ積算光量 200mjZ cm2の紫外線を照射露光する。次に 1%の炭酸ナトリウム水溶液で 60秒間、 2. Okg[0154] (Resolution) A 50 μm negative pattern is brought into close contact with the dried coating film, and exposure is performed by irradiating with an ultraviolet ray having an integrated light quantity of 200 mjZ cm 2 . Then with 1% aqueous sodium carbonate solution for 60 seconds, 2. Okg
Zcm2のスプレー圧で現像し、転写パターンを顕微鏡にて観察する。下記の基準を 使用した。 Develop with a spray pressure of Zcm 2 and observe the transfer pattern with a microscope. The following criteria were used.
〇 · · · ·パターンエッジが直線で、解像されている  ○ The pattern edge is a straight line and is resolved
X · · · '剥離もしくはパターンエッジがぎざぎざである  X · · · 'Peeling or jagged pattern edges
[0155] (光感度)乾燥後の塗膜に、ステップタブレット 21段 (コダック社製)を密着させ積算 光量 500miZcm2の紫外線を照射露光する。次に 1%の炭酸ナトリウム水溶液で 60 秒間、 2. OkgZcm2のスプレー圧で現像し、現像されずに残った塗膜の段数を確認 する。 [0155] the coating film after (photosensitivity) drying, exposure by irradiation with ultraviolet light at an accumulated light intensity 500MiZcm 2 is brought into close contact 21 step tablet (manufactured by Kodak). Next, develop with a 1% sodium carbonate solution for 60 seconds at a spray pressure of 2. OkgZcm 2 , and check the number of coating layers remaining without development.
[0156] (表面光沢)乾燥後の塗膜に 500miZcm2の紫外線を照射露光する。次に、 1%の 炭酸ナトリウム水溶液で 60秒間、 2. OkgZcm2のスプレー圧で現像し、乾燥後の硬 化膜を観察する。下記の基準を使用した。 [0156] (Surface gloss) The dried coating film is exposed to 500 miZcm 2 of ultraviolet rays. Next, develop with a 1% aqueous solution of sodium carbonate for 60 seconds at a spray pressure of 2. OkgZcm 2 and observe the cured film after drying. The following criteria were used:
〇· · · ·曇りが全く見られない  〇 ...
X · · · ·若干の曇りが見られる  X · · · · Some cloudiness
[0157] (基板そり)下記の基準を使用した。  [0157] (Substrate warpage) The following criteria were used.
〇· · · ·基板にそりは見られない △ ··· ·ごくわずか基板がそっている ○ No warpage on the board △ ...
X ····基板のそりが見られる  X ··· Warpage of the board is seen
[0158] (屈曲性)硬化膜を 180度に折り曲げ観察する。下記の基準を使用した。 [0158] (Flexibility) The cured film is bent and observed at 180 degrees. The following criteria were used:
〇· · · '膜面に割れは見られない  〇 ...
X ····膜面が割れる  X ... The film surface breaks
[0159] (密着性) JIS K5400に準じて、試験片に lmmのごばん目を 100個作りセロテ一 プ (登録商標)によりピーリング試験を行った。ごばん目の剥離状態を観察し、次の基 準で評価した。  [0159] (Adhesiveness) According to JIS K5400, 100 test pieces of lmm were made on a test piece, and a peeling test was performed using Cero Tape (registered trademark). The state of peeling was observed and evaluated according to the following criteria.
〇····剥れのないもの  〇 ... No peeling
X ····剥離するもの  X .....
[0160] (鉛筆硬度) JIS K5400に準じて評価を行った。 [Pencil Hardness] Evaluation was performed according to JIS K5400.
[0161] (耐溶剤性)試験片をイソプロピルアルコールに室温で 30分間浸漬する。外観に異 常がないか確認した後、セロテープ (登録商標)によるピーリング試験を行い、次の基 準で評価した。  [0161] (Solvent resistance) The test piece is immersed in isopropyl alcohol at room temperature for 30 minutes. After confirming that there were no abnormalities in the appearance, a peeling test was conducted with Cellotape (registered trademark), and the following criteria were evaluated.
〇··· '塗膜外観に異常がなくフクレゃ剥離のないもの  〇 ··· “There is no abnormality in the appearance of the coating film, and there is no peeling.
X · · · '塗膜にフクレゃ剥離のあるもの  X ···
[0162] (耐酸性)試験片を 10%塩酸水溶液に室温で 30分浸漬する。外観に異常がない か確認した後、セロテープ (登録商標)によるピーリング試験を行い、次の基準で評価 した。  [0162] (Acid resistance) The test piece is immersed in a 10% aqueous hydrochloric acid solution at room temperature for 30 minutes. After confirming that there was no abnormality in the appearance, a peeling test was performed with Cellotape (registered trademark), and evaluation was performed according to the following criteria.
〇··· '塗膜外観に異常がなくフクレゃ剥離のないもの  〇 ··· “There is no abnormality in the appearance of the coating film, and there is no peeling.
X · · · '塗膜にフクレゃ剥離があるもの  X ··· 'The paint film has fluffy peeling
[0163] (耐熱性)試験片にロジン系プラックスを塗布し 260°Cの半田槽に 5秒間浸漬した。  [0163] (Heat resistance) A rosin-based plax was applied to the test piece and immersed in a solder bath at 260 ° C for 5 seconds.
これを 1サイクルとし、 3サイクル繰り返した。室温まで放冷した後、セロテープ (登録 商標)によるピーリング試験を行い、次の基準で評価した。  This was one cycle and repeated three cycles. After being allowed to cool to room temperature, a peeling test was performed with Cellotape (registered trademark), and evaluation was performed according to the following criteria.
〇··· '塗膜外観に異常がなくフクレゃ剥離のないもの  〇 ··· “There is no abnormality in the appearance of the coating film, and there is no peeling.
X · · · '塗膜にフクレゃ剥離のあるもの  X ···
[0164] (耐金メッキ性)試験基板を 30°Cの酸性脱脂液(日本マクダーミット製、 Metex L [0164] (Gold-proof plating resistance) Test substrate is acidic degreasing solution at 30 ° C (Nippon McDermitt, Metex L
5Bの 20vol%水溶液)に 3分間浸漬した後に水洗し、次いで、 14.4重量%過硫 酸アンモン水溶液に室温で 3分間浸漬した後に水洗し、更に 10vol%硫酸水溶液に 室温で試験基板を 1分間浸漬した後水洗した。この基板を 30°Cの触媒液 (メルテック ス製、メタルプレートァクチべ一ター 350の 10vol%水溶液)に 7分間浸漬して水洗し 、 85°Cのニッケルメツキ液(メルテックス製、メルプレート Ni— 865Mの 20vol%水溶 液、 pH4. 6)に 20分間浸漬しニッケルメツキを行った後、 10vol%硫酸水溶液に室 温で 1分間浸漬して水洗した。次いで、試験基板を 95°Cの金メッキ液 (メルテックス製 、ォゥロレクト口レス UP15vol%とシアン化金カリウム 3vol%の水溶液、 pH6)に 10分 間浸漬し、無電解金メッキを行った後、水洗し、更に 60°Cの温水に 3分間浸漬して水 洗し、乾燥した。得られた無電解金メッキ評価基板にセロテープ (登録商標)を付着し 、剥離したときの状態を観察した。 5B in 20vol% aqueous solution) for 3 minutes, washed with water, and then 14.4% by weight persulfate The test substrate was immersed in an acid ammonium aqueous solution at room temperature for 3 minutes and then washed with water. Further, the test substrate was immersed in a 10 vol% sulfuric acid aqueous solution at room temperature for 1 minute and then washed with water. This substrate is immersed in a 30 ° C catalyst solution (Meltex, 10vol% aqueous solution of Metal Plate Actuator 350) for 7 minutes, washed with water, and 85 ° C nickel plating solution (Meltex, Melplate) After being immersed in Ni-865M 20vol% aqueous solution, pH 4.6) for 20 minutes and nickel plating, it was immersed in 10vol% sulfuric acid aqueous solution for 1 minute at room temperature and washed with water. Next, immerse the test substrate in a gold plating solution at 95 ° C (Meltex, UP15vol% of the inlet port and 3vol% potassium cyanide, pH 6) for 10 minutes, perform electroless gold plating, and then wash with water. Further, it was immersed in warm water at 60 ° C for 3 minutes, washed with water and dried. Cellotape (registered trademark) was adhered to the obtained electroless gold plating evaluation substrate, and the state when peeled was observed.
〇· · · ·全く異常が無いもの  〇 ...
X · · · '若干剥がれが観られたもの  X · · · 'Slight peeling
[0165] (耐 PCT性)試験基板を 121°C、 2気圧の水中で 96時間放置後、外観に異常がな いか確認し、セロテープ (登録商標)によるピーリング試験を行い、次の基準で評価し た。 [0165] (PCT resistance) After leaving the test substrate in water at 121 ° C and 2 atm for 96 hours, check for any abnormalities in the appearance, conduct a peel test with cello tape (registered trademark), and evaluate according to the following criteria: did.
〇· · · '塗膜外観に異常がなくフクレゃ剥離のないもの  〇 ...
X · · · '塗膜にフクレゃ剥離があるもの  X ··· 'The paint film has fluffy peeling
[0166] (耐熱衝撃性)試験片に、— 55°CZ30分、 125°CZ30分を 1サイクルとする熱履歴 を加え、 1000サイクル経過後、試験片を顕微鏡観察し、次の基準で評価した。 〇· · · '塗膜にクラックの発生のないもの [0166] (Heat shock resistance) A thermal history with one cycle of -55 ° CZ for 30 minutes and 125 ° CZ for 30 minutes was added to the test piece. After 1000 cycles, the test piece was observed under a microscope and evaluated according to the following criteria: . 〇 ...
X · · · '塗膜にクラックが発生したもの X ··· 'Crack in coating film
[0167] 表 2 [0167] Table 2
»例 赚例 讓項目  »Example 赚 Example 讓 Item
タック性  Tackiness
現像性  Developability
解像性 表面光沢  Resolution Surface gloss
繊そり  Sledge
屈曲性  Flexibility
密«  Densely
 Swelling
而翻性  Transfiguration
〇〇〇〇〇〇〇〇 H〇〇〇〇 X 12  000 000 000 H 000 000 X 12
,纖  , 纖
而羅生  Mysterious
耐金メツ^ t  Gold proof ^ t
耐 P C T性  PCT resistance
耐灘離:  Release resistance:
〇〇〇〇〇〇〇 H〇〇〇〇〇 o 28  0 0 0 0 0 0 0 0 0 0 0 0 o 28
[0168] 上記の結果から明らかなように、感光性アルカリ水溶液可溶性榭脂及び式(1)で示 される硬化剤を用いた本発明の感光性榭脂組成物はタック性も無ぐ高感度であり、 その硬化膜は半田耐熱性、耐薬品性、耐金メッキ性等に優れ、又、硬化物表面にク  As is apparent from the above results, the photosensitive resin composition of the present invention using the photosensitive alkaline aqueous solution-soluble resin and the curing agent represented by the formula (1) has no tackiness and high sensitivity. The cured film is excellent in solder heat resistance, chemical resistance, gold plating resistance, etc.
6  6
ラックが発生せず、屈曲性にも優れた特性を示す。本発明の榭脂組成 Ο0ΟΧΧΠΟΧΧΧΧ5ΧΧΧ物では、残渣 は生じず現像性に優れ、 4— 4,体のビスフエノール Fの含有量の低!、ビスフエノール F型榭脂を硬化剤として用いた比較例の榭脂組成物では残渣が生じるため現像性 に劣ることが明らかである。  It does not generate racks and exhibits excellent flexibility. The resin composition according to the present invention has an excellent developability with no residue, 4-4, low bisphenol F content, and a comparative example using bisphenol F type resin as a curing agent. It is clear that the resin composition is inferior in developability due to the formation of residues.

Claims

請求の範囲 The scope of the claims
感光性アルカリ水溶液可溶性榭脂 (A)、反応性架橋剤 (B)、光重合開始剤 (C)及 び硬化剤 (D)を含有する感光性榭脂組成物にお!ヽて、該硬化剤 (D)が式(1)  A photosensitive resin composition containing a photosensitive alkaline aqueous soluble resin (A), a reactive crosslinking agent (B), a photopolymerization initiator (C), and a curing agent (D) Agent (D) is formula (1)
[化 3]
Figure imgf000036_0001
[Chemical 3]
Figure imgf000036_0001
[式中、 nは繰り返し数を表す。 ] [Wherein n represents the number of repetitions. ]
で表される 4, 4'一体のビスフエノール F型エポキシ榭脂である感光性榭脂組成物。  A photosensitive resin composition that is a 4,4′-integrated bisphenol F-type epoxy resin represented by:
[2] 硬ィヒ剤 (D)の nが 1〜7の正数であり、その融点が 80〜150°Cの結晶である請求項[2] n of the hard-being agent (D) is a positive number of 1 to 7, and the melting point thereof is a crystal of 80 to 150 ° C.
1記載の感光性榭脂組成物。 1. The photosensitive resin composition according to 1.
[3] 感光性アルカリ水溶液可溶性榭脂 (A)が、分子中に 2個以上のエポキシ基を有す るエポキシィ匕合物(a)と分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合 物 (b)の反応で得られるエポキシカルボキシレートイ匕合物と、多塩基酸無水物(c)と の反応生成物である請求項 1又は 2に記載の感光性榭脂組成物。 [3] The photosensitive aqueous alkali-soluble resin (A) contains an epoxy compound ( a ) having two or more epoxy groups in the molecule and a monocarboxylic acid compound having an ethylenically unsaturated group in the molecule. The photosensitive resin composition according to claim 1 or 2, which is a reaction product of an epoxy carboxylate compound obtained by the reaction of the compound (b) and a polybasic acid anhydride (c).
[4] 感光性アルカリ水溶液可溶性榭脂 (A)が、分子中に 2個のエポキシ基を有するェ ポキシ化合物(d)と分子中にエチレン性不飽和基を有するモノカルボン酸ィ匕合物 (b[4] A photosensitive alkaline aqueous soluble resin (A) is an epoxy compound (d) having two epoxy groups in the molecule and a monocarboxylic acid compound having an ethylenically unsaturated group in the molecule ( b
)の反応で得られるエポキシカルボキシレートイ匕合物と、ジイソシァネートイ匕合物(e)、 分子中に 2個の水酸基を有するカルボン酸化合物 (f)、及び任意成分としてのカル ボキシル基を有しないジオールィ匕合物 (g)との反応生成物、又は前記反応生成物と 任意成分としての多塩基酸無水物 (c)との反応生成物である請求項 1又は 2に記載の 感光性榭脂組成物。 ) Epoxy carboxylate compound obtained by the reaction of (ii), diisocyanate compound (e), carboxylic acid compound (f) having two hydroxyl groups in the molecule, and carboxyl as an optional component The reaction product of a dioli compound (g) having no group, or a reaction product of the reaction product and a polybasic acid anhydride (c) as an optional component according to claim 1 or 2. Photosensitive resin composition.
[5] 請求項 1〜4の!、ずれか一項に記載の感光性榭脂組成物の硬化物。  [5] Claims 1 to 4! A cured product of the photosensitive resin composition according to claim 1.
[6] 請求項 5記載の硬化物の層を有する基材。  6. A substrate having a cured product layer according to claim 5.
[7] 請求項 6記載の基材を有する物品。  [7] An article having the substrate according to claim 6.
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