WO2007006834A8 - Sistema y método para la inspección de estructuras micro y nanomecánica - Google Patents

Sistema y método para la inspección de estructuras micro y nanomecánica

Info

Publication number
WO2007006834A8
WO2007006834A8 PCT/ES2006/000405 ES2006000405W WO2007006834A8 WO 2007006834 A8 WO2007006834 A8 WO 2007006834A8 ES 2006000405 W ES2006000405 W ES 2006000405W WO 2007006834 A8 WO2007006834 A8 WO 2007006834A8
Authority
WO
WIPO (PCT)
Prior art keywords
inspection
micro
mechanical structure
path
moved
Prior art date
Application number
PCT/ES2006/000405
Other languages
English (en)
French (fr)
Other versions
WO2007006834A3 (es
WO2007006834A2 (es
Inventor
De Miguel Francisco Jav Tamayo
Johan Mertens
Gomez Montserrat Calleja
Original Assignee
Consejo Superior Investigacion
De Miguel Francisco Jav Tamayo
Johan Mertens
Gomez Montserrat Calleja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior Investigacion, De Miguel Francisco Jav Tamayo, Johan Mertens, Gomez Montserrat Calleja filed Critical Consejo Superior Investigacion
Priority to JP2008520899A priority Critical patent/JP4841629B2/ja
Priority to CA002626230A priority patent/CA2626230A1/en
Priority to CN2006800330522A priority patent/CN101278357B/zh
Priority to US11/988,737 priority patent/US7978344B2/en
Publication of WO2007006834A2 publication Critical patent/WO2007006834A2/es
Publication of WO2007006834A3 publication Critical patent/WO2007006834A3/es
Publication of WO2007006834A8 publication Critical patent/WO2007006834A8/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/06—Probe tip arrays

Abstract

El sistema para la inspección de superficies está configurado para detectar características de desplazamiento relativo y/o de vibración de diversos puntos de varios elementos (51) que forman parte de una estructura mecánica (5), tal como una estructura micro o nanomecánica. Un haz de luz es desplazado por la estructura mecánica a lo largo de una primera trayectoria (A) para detectar varias posiciones de referencia subsiguientes (C) a lo largo de dicha trayectoria (A), y el haz de luz es desplazado, además, por la estructura mecánica a lo largo de varias segundas trayectorias (B), siendo asociada cada una de dichas segundas trayectorias (B) con una de dichas posiciones de referencia (C). Además, la invención se refiere a un correspondiente método y a un programa para la realización del método.
PCT/ES2006/000405 2005-07-14 2006-07-13 Sistema y método para la inspección de estructuras micro y nanomecánica WO2007006834A2 (es)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2008520899A JP4841629B2 (ja) 2005-07-14 2006-07-13 マイクロ機械的構造とナノ機械的構造の表面検査のためのシステムと方法
CA002626230A CA2626230A1 (en) 2005-07-14 2006-07-13 System and method for surface inspection of micro and nanomechanical structures
CN2006800330522A CN101278357B (zh) 2005-07-14 2006-07-13 用于对微机械及纳米机械结构进行检验的系统及方法
US11/988,737 US7978344B2 (en) 2005-07-14 2006-07-13 System and method for the inspection of micro and nanomechanical structures

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05380157.7A EP1744325B1 (en) 2005-07-14 2005-07-14 System and method for surface inspection of micro and nanomechanical structures
EPEP05380157.7 2005-07-14

Publications (3)

Publication Number Publication Date
WO2007006834A2 WO2007006834A2 (es) 2007-01-18
WO2007006834A3 WO2007006834A3 (es) 2007-05-03
WO2007006834A8 true WO2007006834A8 (es) 2008-07-24

Family

ID=35094350

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/ES2006/000405 WO2007006834A2 (es) 2005-07-14 2006-07-13 Sistema y método para la inspección de estructuras micro y nanomecánica

Country Status (7)

Country Link
US (1) US7978344B2 (es)
EP (1) EP1744325B1 (es)
JP (1) JP4841629B2 (es)
CN (1) CN101278357B (es)
CA (1) CA2626230A1 (es)
ES (1) ES2546789T3 (es)
WO (1) WO2007006834A2 (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007025240A1 (de) * 2007-05-31 2008-12-04 Nambition Gmbh Vorrichtung und Verfahren zur Untersuchung biologischer Systeme und Festkörpersystem
EP2053400A1 (en) 2007-10-22 2009-04-29 Consejo Superior De Investigaciones Cientificas Method and system for detection of a selected type of molecules in a sample
DE102010053750A1 (de) * 2009-12-30 2011-07-07 Prüftechnik Dieter Busch AG, 85737 Verstellverfahren und Verstelleinrichtung für die Lichtquelle eines Ausrichtgerätes
ES2442767T3 (es) 2010-01-21 2014-02-13 Consejo Superior De Investigaciones Científicas Procedimiento de bioanálisis de moléculas de ácido nucleico en una muestra y biosensor para su implementación
SG192678A1 (en) * 2011-02-10 2013-09-30 Hysitron Inc Nanomechanical testing system
KR101110243B1 (ko) 2011-08-16 2012-03-13 주식회사 수텍 멀티형 ｌｅｄ 스트로보스코프 장치
GB201705613D0 (en) * 2017-04-07 2017-05-24 Infinitesima Ltd Scanning probe system
US11754437B2 (en) * 2019-09-30 2023-09-12 United States Of America As Represented By The Secretary Of The Army Measuring deflection to determine a dynamic characteristic of a cantilever

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US75627A (en) * 1868-03-17 cochran
US1575058A (en) * 1924-07-17 1926-03-02 Theodore G Johnson Mop
US3840301A (en) * 1973-02-02 1974-10-08 T Pryor Apparatus and method for analyzing surface contour
US5274230A (en) * 1990-08-31 1993-12-28 Olympus Optical Co., Ltd. Scanning probe microscope having first and second optical waveguides
WO2000075627A1 (en) * 1999-06-05 2000-12-14 Daewoo Electronics Co., Ltd. Atomic force microscope and driving method therefor
KR100517243B1 (ko) 1999-11-03 2005-09-28 인터내셔널 비지네스 머신즈 코포레이션 센서 시스템, ｐＨ 미터 및 타겟 물질 검출 방법
GB0019825D0 (en) * 2000-08-12 2000-09-27 Secr Defence Signal processing
WO2003091458A1 (en) 2002-04-26 2003-11-06 The Penn State Research Foundation Integrated nanomechanical sensor array chips
US20040152211A1 (en) * 2002-11-15 2004-08-05 The Regents Of The University Of California System and method for multiplexed biomolecular analysis
EP1575058A1 (en) * 2004-03-08 2005-09-14 Consejo Superior De Investigaciones Cientificas System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
US20060075803A1 (en) * 2004-07-09 2006-04-13 Danmarks Tekniske Universitet Polymer-based cantilever array with optical readout

Also Published As

Publication number Publication date
JP2009501327A (ja) 2009-01-15
EP1744325B1 (en) 2015-06-10
WO2007006834A3 (es) 2007-05-03
US20090207404A1 (en) 2009-08-20
EP1744325A1 (en) 2007-01-17
JP4841629B2 (ja) 2011-12-21
CN101278357B (zh) 2012-02-22
WO2007006834A2 (es) 2007-01-18
ES2546789T3 (es) 2015-09-28
CA2626230A1 (en) 2007-01-18
CN101278357A (zh) 2008-10-01
US7978344B2 (en) 2011-07-12

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