WO2007006299A1 - Microactionneur - Google Patents

Microactionneur Download PDF

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Publication number
WO2007006299A1
WO2007006299A1 PCT/DE2006/001235 DE2006001235W WO2007006299A1 WO 2007006299 A1 WO2007006299 A1 WO 2007006299A1 DE 2006001235 W DE2006001235 W DE 2006001235W WO 2007006299 A1 WO2007006299 A1 WO 2007006299A1
Authority
WO
WIPO (PCT)
Prior art keywords
deflection
restoring
microactuator according
microactuator
force
Prior art date
Application number
PCT/DE2006/001235
Other languages
German (de)
English (en)
Inventor
Peter Dürr
Jan Schmidt
Andreas Gehner
Detlef Kunze
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Publication of WO2007006299A1 publication Critical patent/WO2007006299A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type

Definitions

  • microactuators which are versatile, e.g. as a surface light modulator, scanner mirrors, optical cross connectors, microvalves, microswitches, micropumps and the like. may be formed and then also a small space required making can be arranged in large numbers in array form.
  • a single microactuator has dimensions that can be smaller than 1 mm.
  • a deflectable element is present, which can be deflected electrostatically, magnetically, electromagnetically, utilizing piezoelectric effects but also defined by thermal expansion.
  • the element can be moved translationally and / or pivoted about one or more axis (s).
  • the deflectable elements of microactuators are usually held by means of elastic return elements, preferably springs. For the deflection, a gap is provided within which the deflection can take place.
  • gap size can only be utilized to a small extent, generally about 25%. This is always the case when a deflection is to take place at least approximately or completely parallel to a field.
  • microactuators are often operated electrostatically or electromagnetically.
  • the deflection takes place in one direction, against the force of elastic return elements, which act on deflectable elements. Often these are feathers.
  • the achievable deflection can be limited or adjusted by means of mechanical stops or by setting a meta-stable balance of forces in one position.
  • the deflectable element reaches its initial position. Limiting the return movement can be achieved with mechanical stops.
  • the electrostatic force is proportional to the square of the applied electrical voltage divided by the respective instantaneous plate distance to E- electrodes.
  • the force component in the direction of deflection of a "comb drive" actuator is generated by the stray fields which are unaffected by the respective deflection, thereby significantly increasing the force required for deflection just before the tips of the comb fingers meet the base of the opposing comb
  • the deflection range can be greater than half the distance between the tips of comb elements and the opposing comb base.
  • the electrostatic forces are proportional to the square of the applied voltage, but the deflection is not linear when using linear characteristic springs.
  • the microactuator according to the invention can be designed in many ways like conventional microactuators and can also be driven in this way.
  • the deflection of the respective element can take place translationally or rotationally or a combination of these movements. But it can also be a tilt, especially if only a restoring element engages a deflectable element. In this case, deflectable elements which have a high rigidity and strength, especially in comparison to the respective restoring element, are to be preferred.
  • the deflectable element is held by means of at least one elastic return element, preferably a spring.
  • Essential to the invention is at least partially the progressive, preferably disproportionately increasing with the deflection restoring force characteristic (spring characteristic) with increasing deflection, so that act at higher deflections also disproportionately higher restoring forces. For smaller deflections, a linear increase may be allowed.
  • two such return elements engage a member to be deflected, which preferably engage diametrically opposite to the respective element.
  • Restoring elements can be bendable, compressible, expandable and / or compressible, wherein a selection is possible taking into account the respectively desired deflection movement.
  • One or more return Control element (s) may be deformable in different forms, for example in two different modes.
  • a microactuator according to the invention can be designed, for example, as a plano-plate capacitor actuator, and the electric field can be aligned substantially parallel to the direction of the deflection movement.
  • bar or leaf springs can be used which, by virtue of their design, have the spring force course desired according to the invention as a function of the respective deflection.
  • Such a spring force curve can be achieved by more complex geometries, e.g. kinked or curved rods or with T-shaped springs the Errrellsrnissen be fitted.
  • microactuators according to the invention can be designed so that a deflection over at least 1/3, preferably 40% and particularly preferably over 50% of an available gap dimension is possible. If an enlarged deflection is not required, by reducing the gap dimension, the electrical voltage required for the deflection (possibly electric current) can be reduced or, at a constant electrical voltage, the achievable force for the
  • Last mentioned effect can reduce the risk of breakage on reset elements with higher spring constants.
  • the pull-in X ⁇ effect either does not occur or only at a larger deflection.
  • the restoring elements can be varied and adapted in their dimensioning and design as well as the attachment to the element to be deflected.
  • FIG. 1 shows an exploded perspective view of an example of a microactuator according to the invention
  • FIG. 2 shows, in a schematic form, a clamped bending beam which is bent by a force according to Hooke's Law
  • Figure 3 shows in schematic form a clamped string, which is deflected by a force and unlike Figure 2 has no bending stiffness;
  • Figure 4 is a graph of restoring force curves as a function of the deflection for different springs
  • Figure 5 is a diagram of achievable electrostatic forces at different electrical voltages as a function of the deflection
  • FIG. 6 shows a diagram with electrostatic and restoring forces at different electrical voltages. conditions with different springs depending on the deflection
  • FIG. 7 shows a diagram with electrostatic and restoring forces at different electrical voltages and different springs as a function of the deflection, with a small gap at the beginning of a deflection of a deflectable element
  • Figure 8 is another diagram for return elements with a smaller width
  • Figure 9 is another diagram for return elements with a smaller thickness
  • Figure 10 is a diagram of the achievable deflection as a function of the electrical voltage at different springs
  • Figure 11 is a perspective view of a deflectable element with two springs acting thereon;
  • FIG. 12 shows a diagram of the relative stiffness as a function of buckling angles on an example according to FIGS. 11 and
  • FIG. 13 shows an exploded perspective view of elements of an example of a microactuator according to the invention.
  • FIG 1 elements for an example of a microactuator according to the invention in a perspective exploded view are shown, which is designed as an electrostatic parallel plate actuator with clamped bending beam, as return elements 2.
  • the deflectable element 1 is here plate-shaped.
  • the two springs are not only bent during operation, but also subjected to tensile forces, so also pulled when they have been dimensioned with respect to the respective desired deflection movement.
  • the deflectable element 1 is here at least on its upwardly facing surface reflective of electromagnetic radiation and thus forms a mirror.
  • the two outwardly facing parts of a clamped bending beam, as restoring elements 2 are wider here in the horizontal direction, as the inwardly facing and acting on the deflectable element 1 parts.
  • the outwardly facing parts rest on spacers 3, so that between deflectable element 1 and an electrode plate 4, a defined gap of less than 1 micron to a few microns gap is formed.
  • a stable equilibrium of forces can be maintained by influencing the electrostatic forces as a function of the respective deflection, in which electrical voltage is controlled as a function of the desired deflection.
  • the respective deflection of the element 1 can be set exactly and, if desired, at least temporarily maintained become.
  • FIG. 2 shows a simplified side view of the spring elements 2 without deflectable element 1.
  • the bending stiffness of the restoring elements 2 is at least approximately proportional to the deflection.
  • the spring force can be calculated taking into account the dimensioning of the restoring elements 2 according to FIG. 2 with formula (1) as a function of the respective deflection d.
  • the width b of the return elements 2 is directed into the plane of the drawing and consequently not shown in FIG.
  • the thickness a of the return elements 2 can not be neglected, taking into account the deflection, so that both approaches overlap and lead to progressively increasing restoring forces.
  • the diagram shown in FIG. 5 gives an overview of electrostatic forces as a function of the deflection at different constant applied electrical voltages in the range from 3 V to 24 V.
  • the rising force curve reflects the preceding versions again.
  • the positions of the force equilibrium of the microactuator are where the electrostatic forces in their absolute value coincide with the respective restoring force. These positions can be seen from FIG.
  • the force equilibrium positions are the points at which the electrostatic drive force curve intersects the restoring force curve with their respective absolute values.
  • the increase in the force-deflection curve is the essential parameter determining the stability of the respective operating point of the microactuator, ie the desired deflection position.
  • the position of the meta-stable balance of forces is determined by the fact that the increase in the restoring force curve is greater than the increase in the driving force curve. Areas in which the increase in the restoring force curve is smaller than the increase in the driving force curve are unstable and the pull-in ⁇ effect can occur there.
  • the stable region can be used up to 1.5 ⁇ m for a microactuator according to the invention, which accounts for 50% of the available gap dimension.
  • the decisive improvement that can be achieved with the invention is achievable by the combination of linear and nonlinear restoring force profile, which is influenced by the balance between restoring elements 2 and deflection force. Dimensioning or design and deflection and the strength of the attachment of the return elements 2 have an influence on the non-linear course.
  • Reset elements 2 with a linear restoring force curve are available at a voltage of 18 V for a selection kung to 1 ⁇ m, with non-linear reset elements requiring 21 V.
  • a microactuator according to the invention can utilize a larger range of an available gap dimension.
  • the output gap is reduced from 3 ⁇ m to 2.6 ⁇ m, so that the required electrical voltage for stable operation is also 18 V, ie the same voltage for return elements 2 with a linear restoring force curve with a gap of 3 ⁇ m (see FIG.
  • the deflection at this electrical voltage or the stability limit is 1.3 ⁇ m in contrast to 1 ⁇ m. It is thus possible to realize a greater deflection even with limited electrical voltage.
  • a return element 2 still has almost the same cross section.
  • the point of intersection of the force curves is reached with 18 V and the balance of power is at a deflection of 1.5 microns.
  • the stability limit is approximately 1.7 ⁇ m, which corresponds to more than 50% of the available gap. It is also noteworthy, however, that with increased deflection of a deflected element 1, a reduction of the distance and consequently also of the still existing gap dimension occurs.
  • the deflecting force increases with increasing deflection. This effect increases with increasing deflection, so that the course of a deflection and electrical voltage characteristic of a microactuator also increases steeply. This can then lead to an unstable operating state (pull-in).
  • the deflection is then strongly dependent on the currently applied electrical voltage, so that a precise control of the electrical voltage is required, which is not necessarily required for small deflections.
  • the adjustment behavior of the deflection improves, since this is closer to a linear relationship, as with springs with linear characteristic line.
  • the available space may not be sufficient to allow a sufficient length L of return elements 2 with the greatest possible deflections and maximum allowable tensile stress (see formula (3)).
  • the rigidity of restoring elements 2 would increase too much, so that a deflection is not possible or counterproductive only with very high driving forces and correspondingly increased performance.
  • FIG. 11 shows an example with twofold kinking with blunt kink angles.
  • a sinusoidal shape or slight deviations from a straight shape can increase the usable length without additional space / space being required. With such a configuration, the tensile stiffness can be reduced, as this allows an additional bending mode.
  • FIG. 12 shows that the bending angle only very little influences the linear component of the spring force curve for bending angles of less than 15 °, while the proportion which increases with the third power of the deflection is adjustable over a wider range.
  • return elements 2 there are also other geometries of return elements 2 possible with which the non-linear component of the spring stiffness can be reduced.
  • return elements 2 in T-shape be used.
  • the spring constant (linear portion) is not so sensitive to the residual stress of the spring layer.
  • arrays with sinking mirrors for wave front correction of electromagnetic radiation with a stroke of 2 ⁇ m and a pixel size of 40 ⁇ m can be produced.
  • a larger deflection range can be achieved with greater deflection force and with the same electrical voltage (possibly electrical current) or the same deflection force with lower electrical voltage (possibly electrical current).
  • FIG. 13 An example is shown in FIG. 13. Again, the non-linearity of the restoring elements 2 used improves the properties.
  • the return elements 2 do not engage close to the axis of rotation, so that an elongation again leads to a progressively increasing restoring force course.
  • the invention improves the properties of microactuators with high positive force feedback that limits the range for stable use. With a positive force feedback increases for the deflecting force at constant voltage with increasing deflection.
  • the invention makes it possible to produce improved microactuators which are operated electrostatically or electromagnetically.
  • the deflection can take place essentially parallel to the respective electrical or electromagnetic field.
  • the electronic control for the drive can be simplified.
  • microactuators according to the invention can be produced by means of conventional technologies.
  • the improved properties can be optimized by the design and dimensioning of the individual elements, in particular the return elements 2.

Landscapes

  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne des microactionneurs pourvus d'un élément pouvant être dévié sous l'action d'une force, lesquels microactionneurs peuvent être utilisés dans beaucoup d'applications. L'objectif de cette invention est de parvenir à une déviation accrue dans un écartement fourni et/ou à réduire la puissance nécessaire pour cette déviation, tout en respectant bien les mouvements et les positions de déviation souhaités. A cet effet, le microactionneur selon l'invention présente un ou plusieurs éléments de rappel présentant une caractéristique de force de rappel à croissance au moins partiellement progressive, de préférence surproportionnelle.
PCT/DE2006/001235 2005-07-11 2006-07-11 Microactionneur WO2007006299A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200510032863 DE102005032863A1 (de) 2005-07-11 2005-07-11 Mikroaktuator
DE102005032863.6 2005-07-11

Publications (1)

Publication Number Publication Date
WO2007006299A1 true WO2007006299A1 (fr) 2007-01-18

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Application Number Title Priority Date Filing Date
PCT/DE2006/001235 WO2007006299A1 (fr) 2005-07-11 2006-07-11 Microactionneur

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DE (1) DE102005032863A1 (fr)
WO (1) WO2007006299A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT516663B1 (de) * 2014-12-12 2016-12-15 Next System Vertriebsges M B H Eingabeelement für elektronische Apparate
CN109911841A (zh) * 2019-03-19 2019-06-21 东南大学 一种挤压膜阻尼最大的平板电容微执行器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045119A2 (fr) * 1999-12-15 2001-06-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Condensateur a haute frequence variable
WO2002050990A1 (fr) * 2000-12-21 2002-06-27 Commissariat A L'energie Atomique Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique
US20040047051A1 (en) * 2001-09-17 2004-03-11 Olympus Optical Co., Ltd. Variable geometry mirror having high-precision, high geometry controllability

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4431232C2 (de) * 1994-09-02 1999-07-08 Hahn Schickard Ges Integrierbares Feder-Masse-System
DE19919030A1 (de) * 1999-04-27 2000-11-16 Bosch Gmbh Robert Verfahren und Vorrichtung zur Bestimmung von Materialdaten von Mikrostrukturen
DE19945859A1 (de) * 1999-09-24 2001-03-29 Bosch Gmbh Robert Mikromechanischer Drehratensensor
KR100439908B1 (ko) * 2002-02-28 2004-07-12 (주)엠투엔 정전형 미세 구동기
DE10227662B4 (de) * 2002-06-20 2006-09-21 Eads Deutschland Gmbh Mikromechanisches Bauelement für Beschleunigungs-oder Drehratensensoren und Sensor
EP1613969B1 (fr) * 2003-04-15 2009-07-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Composant micromecanique ayant une frequence de resonance reglable

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001045119A2 (fr) * 1999-12-15 2001-06-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Condensateur a haute frequence variable
WO2002050990A1 (fr) * 2000-12-21 2002-06-27 Commissariat A L'energie Atomique Dispositif comprenant une structure mobile a rigidite variable, de preference a commande electrostatique
US20040047051A1 (en) * 2001-09-17 2004-03-11 Olympus Optical Co., Ltd. Variable geometry mirror having high-precision, high geometry controllability

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
DAVID M. BURNS AND VICTOR M. BRIGHT: "Nonlinear flexures for stable deflection of an electrostatically actuated micromirror", SPIE, vol. 3226, 1997, pages 125 - 136, XP002404309 *
ELMER S HUNG ET AL: "Extending the Travel Range of Analog-Tuned Electrostatic Actuators", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 8, no. 4, December 1999 (1999-12-01), XP011034869, ISSN: 1057-7157 *
GILBERT C. WONG, GERARD K. TSE ET AL: "Accuracy and Composability in NODAS", PROCEEDINGS OF THE 2003 INTRENATIONAL WORKSHOP ON BEHAVIORAL MODELING AND SIMULATION, October 2003 (2003-10-01), pages 82 - 87, XP002404307 *
SAYANU PAMIDIGHANTAM, ROBERT PUERS ET AL: "Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 19 June 2002 (2002-06-19), pages 458 - 464, XP002404308 *
ZHIXIONG XIAO, WUONG PENG ET AL: "Analytical Behavior of Rectangular Electrostatic Torsion Actuators With Nonlinear Spring Bending", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 12, no. 6, December 2003 (2003-12-01), pages 929 - 936, XP002404310 *

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