WO2006134715A1

WO2006134715A1 - Conductive rubber integrated with metal foil

Info

Publication number: WO2006134715A1
Application number: PCT/JP2006/307601
Authority: WO
Inventors: Shingo Mizuguchi
Original assignee: Fuji Polymer Industries Co., Ltd.
Priority date: 2005-06-14
Filing date: 2006-04-11
Publication date: 2006-12-21
Also published as: JPWO2006134715A1; JP4530290B2

Abstract

A conductive rubber integrated with a metal foil where a metal foil (1) is integrated at least on one surface of a conductive rubber (3), the circumference is cut, and at least the partial or entire circumference of the metal foil on the side opposite to the conductive rubber side is formed to be gradually thinner from the central portion toward the conductive rubber side. The conductive rubber integrated with a metal foil is made by forming a groove (2) by etching at a position on one surface of the metal foil (1) including a cutting line, forming the conductive rubber (3) integrally on the other surface of the metal foil to obtain a conductive rubber sheet (4) integrated with a metal foil, and then cutting the sheet (4) along the groove (3) of the metal foil by means of a cutter (5). A conductive rubber component integrated with a metal foil enabling automatic packaging by reflow soldering and being cut such that burrs do not project outward beyond the thickness of the metal foil is thereby provided.

Description

Specification

Metal foil integrated conductive rubber

Technical field

[0001] The present invention relates to a metal foil-integrated conductive rubber obtained by integrally molding a metal foil on one surface of a conductive rubber. Applicable to conductive contact parts inside mobile phone, especially used for electrical connection between printed circuit board and shield case, and internal connection between mobile phone frame inner surface and substrate with conductive film. The present invention relates to a metal foil integrated conductive rubber.

Background art

[0002] Electromagnetic interference such as malfunction of electronic devices due to electromagnetic noise radiated from mobile phones and influence on human bodies has become a problem. As countermeasures, the use of a multilayer board with enhanced shielding performance and the connection between the inner surface of a mobile phone frame on which a conductive film is formed and the printed board are fixed with screws or the shield case is joined to the board. In addition, methods such as electrical connection through panel-like contacts are adopted. In addition, there is Italy 1 that uses a conductive adhesive filled with a conductive filler to join the shield case and the substrate.

[0003] A technique related to the present invention is a metal foil laminated sheet in which a metal foil is bonded to one side of a conductive rubber sheet, and an electric contact in an electronic device or a silicone rubber for a remote control of an electronic product. Used for conductive rubber contacts of switches. In general, these metal foil-body-type conductive rubbers are formed by bonding or integrally molding conductive rubber onto the surface of a metal foil sheet in small pieces, and then stamping or shearing to a predetermined size using metal processing technology. It is common to cut and process small parts. For example, as a method of making an electrical connection inside a mobile phone, many electrical contacts are made by screw panels.

FIG. 7 is a perspective view in which a shield-like contact 23 is pushed in the direction of an arrow 24 with a panel-like contact 22 interposed in a printed circuit board 21 of a conventional example to make electrical connection. On the printed circuit board 21, there are several electronic components that generate vibrations such as vibrator motors, speakers, and receivers. There is a problem that vibration adversely affects electronic circuits such as Locked Loop) and VCO (Voltage Control Oscillator) and electronic parts such as electret condenser microphones.

[0005] Conventionally, it is common to form a sheet by bonding or integrally molding conductive rubber to the surface of a metal foil, and then punching or shearing to a predetermined size by metal processing technology. However, the parts made by this method are made of metal foil 31 because the sheets of conductive rubber 32 filled with conductive filler and metal foil 31 are rigid and Young's modulus. Fine “kaeri burr” 33 and “jagged edges” are generated at the cut-out in the peripheral part of (Fig. 8A-B). FIG. 8A is a cross-sectional view of a conventional metal foil-integrated conductive rubber, and FIG. 8B is an enlarged view of a Y portion surrounded by a circle in FIG. 8A. When a component is mounted on a printed circuit board by reflow soldering, the metal foil surface can be placed at an accurate position on the printed circuit board by fine burr or jagged edges at the periphery of the metal foil. Difficult, parts are lifted and tilted during the reflow soldering process. In addition, there is a problem that sufficient solder joint strength for attaching the component to the substrate cannot be obtained.

[0006] A conductive layer is provided on the inside of the resin body of the mobile phone as a shield measure. There is a method of electrically connecting the layer and a printed circuit board with a panel or the like. Due to the movement, the tip of the panel may damage the conductive layer, causing problems in the shielding function. In addition, there is a method of soldering or using a conductive adhesive filled with a conductive filler for joining the shield case and the board. However, soldering and the use of an adhesive are problematic in terms of repairability in the event of equipment failure. In mobile phones and other devices that have a relatively high force or twisting force, cracks occur due to the stress applied to the solder joint between the shield case and the board firmly fixed by soldering. However, there was a problem that the joint part was peeled off and the conductivity could not be maintained, and the device itself was damaged.

[0007] However, although conductive rubber parts filled with conductive fillers have no problems with vibration and repairability, they cannot be automatically mounted by reflow soldering, and are manually mounted and assembled. There is a problem of quality and production economy cannot be maintained o

[0008] As another conventional example, gaskets using conductive polytetrafluoroethylene (PTFE) have been proposed (Patent Documents 1 to 3). However, gas using conductive PTFE There is a problem that the ket is inconvenient to assemble with rubber elasticity and weak against vibration.

Patent Document 1: Japanese Translation of Special Publication 2002-510873

Patent Document 2: U.S. Pat.No. 5,524,908

Patent Document 3: Japanese Patent Laid-Open No. 9-255837

Disclosure of the invention

[0009] In order to solve the above-described conventional problems, the present invention can be automatically mounted by reflow soldering by cutting so as not to generate burrs outside the thickness of the metal foil, and has rubber elasticity for assembly. A metal foil integrated conductive rubber that is convenient and can withstand vibrations, and a method for manufacturing the same.

[0010] The metal foil integrated conductive rubber of the present invention is a metal foil integrated conductive rubber in which the metal foil is integrated on at least one surface of the conductive rubber, and the periphery thereof is cut by cutting. The periphery of at least a part or all of the surface opposite to the conductive rubber side is characterized by being thinly formed from the central portion toward the conductive rubber side.

[0011] The method for producing a metal foil-integrated conductive rubber of the present invention is a method for producing the metal foil-integrated conductive rubber, wherein the groove is formed by etching at a position including a cutting line on one surface of the metal foil sheet. The conductive rubber sheet is integrally formed on the other side of the metal foil sheet to form a metal foil sheet integrated conductive rubber sheet, and the sheet is cut by a cutting blade along the groove of the metal foil sheet. It is characterized by cutting.

Brief Description of Drawings

FIG. 1A is a cross-sectional view of a metal foil having grooves on one side used in Example 1 of the present invention, and FIG. 1B is a plan view thereof.

FIG. 2 is a cross-sectional view of the metal foil integrated conductive sheet obtained in the same example.

FIG. 3A is a cross-sectional view of the cutting process of the embodiment, and FIG. 3B is a plan view of the same.

[FIG. 4] FIG. 4A is a sectional view of the metal foil integrated conductive rubber obtained in the same example, and FIG. 4B is a plan view thereof.

FIG. 4C is an enlarged view of a portion X surrounded by a circle in FIG. 4A.

FIG. 5 is a plan view of a metal foil of Example 2 of the present invention.

FIG. 6 is a perspective view of the metal foil integrated conductive rubber obtained in the same example.

[Fig. 7] Fig. 7 shows a conventional printed circuit board with a panel-shaped contact and a shield case pushed. FIG.

FIG. 8A is a cross-sectional view of a conventional metal foil-integrated conductive rubber, and FIG. 8B is an enlarged view of a Y portion surrounded by a circle in FIG. 8A.

BEST MODE FOR CARRYING OUT THE INVENTION

[0013] In the present invention, the metal foil-integrated conductive rubber in which the metal foil is integrated on at least one surface has fine “burr burr” or “jagged” at the cut end portion of the metal foil, or the metal foil surface. Since the metal foil surface is lower, the metal foil surface can be accurately placed on the printed circuit board, and the metal foil integrated conductive rubber has sufficient solder on the board. Bond strength is obtained. In addition, it has rubber elasticity, is convenient for assembly and can withstand vibration. The metal foil-integrated conductive rubber of the present invention is suitably used for connection between a printed circuit board in a mobile phone and a shield case, or connection between an inner surface of a mobile phone frame on which a conductive film is applied and a printed circuit board. Also, compared to the method using panel contacts etc. to electrically join the shield case and printed circuit board, the electrical connection with this metal foil integrated conductive rubber is said to have an adverse effect on vibrations on electronic circuits and electronic parts. The problem is solved, and the conductive layer inside the resin body of the mobile phone is damaged by the electrical connection using the metal foil integrated conductive rubber. There is no risk of occurrence. The metal foil integrated conductive rubber is bonded to the printed circuit board by reflow, but the opposite shield case and the conductive film on the inner surface of the mobile phone frame are contacted by pressure contact and have high repairability.

[0014] As a preferred example of the present invention, a conductive layer and a substrate are electrically connected to connect a printed circuit board and a shield case in a mobile phone or to protect the inner surface of a resin body. Is preferred. A conductive polymer elastic body and a metal foil having a thickness of, for example, 0.5 mm or less are integrated on at least one surface, and the outer peripheral surface of the metal foil is thin on the outside, and is cut at that portion. Yes.

[0015] The metal foil is made of copper, copper alloy, aluminum, aluminum alloy, iron, stainless steel, nickel, tin, titanium, gold, silver or an alloy containing these metals having a thickness of 0.5 mm or less. A metal thin film layer may be formed by plating, vapor deposition, or the like. Furthermore, the other side of the metal foil is molded integrally with the conductive polymer elastic body. In this case, it is preferable to use a concave groove having a depth of 0.02 mm or more and a groove having a width of 0.10 mm or more subjected to force by a half etching method with a predetermined shape and pattern.

[0016] The base material of the conductive rubber part is a butadiene polymer (BR: ASTM, classified according to D1419), butadiene.styrene copolymer (SBR), butadiene.acrylonitrile copolymer (NBR), isoprene polymer (IR). , Black-opened polyene polymer (CR), isobutylene-gen copolymer (IIR), ethylene 'propylene copolymer (EPM), ethylene' propylene terpolymer (EP DM), chlorosulfonated polyethylene (CSM) ), Alkylene 'sulfide polymer (T), alkyl' siloxane condensate (Si), vinylidene fluoride 'hexafluoropropylene copolymer (FPM), polyester' isocyanate condensate, polyether 'isocyanate condensate ( U), organic synthetic rubber such as acrylic acid ester polymer (ACMZANM), etc. © down Doya silicone rubber preferably in whatever good tool especially if made in a rubber elastic body by curing at such ease to impart electrical conductivity by mixing a large amount of conductive material! ヽ things like ヽ.

[0017] Conductive powder mixed and added to these base materials is processed into particles of carbon, copper, copper alloy, aluminum, aluminum alloy, iron, stainless steel, nickel, tin, titanium, gold, silver, etc. The conductive powder force in which the metal thin film layer is formed on the surface of the core material by plating or vapor deposition can be selected.

The average volume particle diameter of the conductive powder is preferably in the range of 0.5 to 70 μm. The average volume particle diameter can be measured with a commercially available particle size distribution meter. For example, it can be measured using a Horiba laser diffraction particle sizer (LA920), a Shimadzu laser diffraction particle sizer (SALD2100), or the like. It is preferable that the conductive rubber in which conductive powder is mixed and added to the base material has a volume resistivity (ASTM · D991) of 10 KΩ · cm or less.

[0019] As a method of applying the groove force of the pattern to one side of the metal foil, half etching is performed using any processing method such as cutting, electric discharge processing, laser processing, high-pressure water processing, and etching. Then, groove processing of a predetermined shape and pattern is performed.

[0020] Preferably, the height of burrs at the outer peripheral portion of the metal foil of the metal foil-integrated conductive rubber is less than 0.02 mm. The volume resistivity of the conductive rubber is preferably 10 Ω · cm or less. [0021] In the method of the present invention, the conductive rubber is vulcanized and molded from a compound comprising a conductive rubber composition in which conductive powder is mixed with unvulcanized silicone rubber and a vulcanizing agent is added and kneaded. It is preferable that the sheet is formed into a sheet shape.

[0022] The periphery of the metal foil sheet is preferably formed so as to be solderable by forming a groove by half-etching and then applying electrolytic gold plating to the surface.

[0023] Further, it is preferable that the surface of the metal foil sheet is subjected to a surface activation treatment with a coupling agent in order to integrally form the conductive rubber sheet. That is, a silane coupling agent is used as an auxiliary agent in order to integrally mold a metal foil and a conductive rubber and to firmly burn each other. The silane coupling agent applied to the surface of the metal foil is hydrolyzed and a dehydration condensation reaction takes place between the silanol group and M—OH (M is a key atom or metal atom) on the surface of the metal foil. Works to bind conductive rubber. As the silane force decoupling agent, the one represented by the general formula (A) can be used.

[0024] YSiX (A)

Three

X is a methoxy group or ethoxy group, and Y is an aliphatic long-chain alkyl group having 6 to 18 carbon atoms.

[0025] Typically, butyltriethoxysilane, butyltris (2-methoxyethoxy) silane, 3-methacryloxypropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, N-2- (aminoethyl) " 3-Aminopropyltrimethoxysilane, N-Ferrolu 3-aminopropyltrimethoxysilane, 3-mercaptopropyltrimethoxysilane, 3-chloropropyltrimethoxysilane, etc. You can select one type or a mixture of two or more types.

[0026] In addition, a method of integrating a conductive rubber sheet with the metal foil sheet,

A. After thinly rolling the conductive rubber into a sheet shape and stacking on the surface activation treatment surface of the metal foil sheet,

B. Rolling After rolling to a predetermined thickness with two rolls, removing the air between the layers, making them closely contact each other into a rolled sheet,

C. A sheet in which the rolled sheet is placed in a molding die, pressurized and heated to primarily calcine the conductive rubber sheet, and then secondary vulcanized to integrate the conductive rubber sheet and the metal foil sheet. Molding It is preferable to be a method!

[0027] That is, the metal foil coated with the silane coupling agent and the conductive rubber compound are overlapped with each other by two rolled rolls, rolled, closely contacted, put into a molding die, and heated to form a sheet. A metal foil integrated conductive rubber sheet is obtained. The sheet-shaped metal foil-body-type conductive rubber sheet is cut into a predetermined size using a cutting machine in accordance with the concave groove of the metal foil, thereby obtaining a part in which the metal foil and the conductive rubber are integrally molded.

[0028] In addition, the cutting with the cutting blade is performed by fixing the metal foil sheet-integrated conductive rubber sheet to the cutting panel, and cutting from the conductive rubber side using the cutting blade in accordance with the groove position of the metal foil sheet. By doing so, it is preferable that at least part or all of the periphery of the surface opposite to the conductive rubber side of the metal foil sheet is formed thinly from the central portion toward the conductive rubber side. Example

An embodiment of the present invention will be described more specifically based on the drawings.

[0030] (Example 1)

FIG. 1A is a cross-sectional view of a metal foil having grooves on one side used in this embodiment, and FIG. 1B is a plan view of the same. As shown in Fig. 1A-B, a groove 2 with a width of 0.5 mm and a depth of 0.05 mm is vertically formed on one side of a metal foil (for example, rolled copper foil) 1 with a thickness of 0.1 mm by a half-etching method. . 5mm pitch, length 2. 2mm pitch formed.

[0031] Next, after 0.5 mm thick electrolytic gold plating was applied to the entire surface of the metal foil subjected to the groove strength check, groove groove check was performed. In order to form an integral body, it was applied as a silane coupling solution and dried at room temperature (25 ° C) for 1 hour to pre-treat the metal foil.

[0032] Next, commercially available silicone compound KE530U (manufactured by Shin-Etsu Chemical Co., Ltd.) is mixed with silver coated glass powder having an average particle size of 20 m and 300 parts by mass (product name: S3000, manufactured by Valoti Co., Ltd.). Then, 5 parts by mass of a 2.5-dimethyl-2.5-bis (t-butylperoxy) hexane, 50% -containing calorific agent was kneaded to prepare a conductive rubber compound A.

[0033] Next, the conductive rubber compound A was applied to the metal foil that had been applied with silane coupling agent and dried for 1 hour, and the sheet was laminated with a thickness of 2.1 mm, followed by rolling. This roll was rolled to a total thickness of 2. lmm. [0034] Next, the rolled sheet was placed in a mold, after performing 170 ° C, 10 minutes of press vulcanization under pressure of 20KgZcm ^2, secondary vulcanization 160 ° C, 8 hours After that, a metal foil integrated conductive sheet having a total thickness of 2. Omm was obtained. FIG. 2 is a cross-sectional view of the metal foil integrated conductive sheet 4 obtained as described above.

FIG. 3A is a sectional view of the cutting process, and FIG. 3B is a plan view thereof. As shown in Fig. 3A, the metal foil integrated conductive sheet 4 is fixed to the panel for cutting (not shown) with the metal foil 1 facing down, and the width 1. Omm, length, 3. Omm was cut from the conductive rubber side with a cutting blade 5. 6 is a cutting position or cutting line. The reason for cutting from the conductive rubber side is that the deformed shape of the conductive rubber is not destroyed at the time of cutting. Where was boss measure the resistance value of the measured current 100mA by applying a tester to the upper and lower surfaces of the metal foil integral conductive rubber 4 thus obtained, it was 10- ² Ω 'cm. The adhesion strength between the conductive rubber compound A and the metal foil layer was 5N.

FIG. 4A is a sectional view of the metal foil-integrated conductive rubber 7 in this way, FIG. 4B is a plan view thereof, and FIG. 4C is an enlarged view of a portion X surrounded by a circle in FIG. 4A. When the height L of the return burr 8 generated at the cut portion of the metal foil-integrated conductive rubber 7 in FIG. 4C was measured, the maximum was 0.005 mm. Return burr 8 generated on the cut surface of the metal foil was subjected to reflow soldering on a printed circuit board that was lower than the surface of the metal foil. Since `` Zagged '' is minute, the metal foil surface can be accurately placed on the printed circuit board, and the metal foil integrated conductive rubber that does not cause tilting due to reflow soldering is sufficient on the board A good solder joint strength was obtained.

[0037] (Example 2)

FIG. 5 is a plan view of a metal foil (for example, rolled copper foil) 11 of this embodiment. As shown in Fig. 5, a groove 12 with a width of 0.5 mm and a depth of 0.05 mm is formed on one side of a rolled copper foil 11 with a thickness of 0.1 mm by a half-etching method, with a length of 1.5 mm and a length of 2. The metal foil was formed at a pitch of 2 mm.

[0038] Next, in order to integrally form a conductive rubber metal foil on the non-grooved surface after electroplating 0.5 μm thick on the entire surface of the grooved rolled copper foil, A silane coupling agent, 3-methacryloxypropyltrimethoxysilane, was applied as a 10 Wt% solution with isopropanol, left to stand at room temperature for 1 hour, and dried to pretreat the metal foil. [0039] Next, conductive rubber compound B was prepared by mixing 6 parts by mass of dicumyl peroxide as a vulcanizing agent with 100 parts by mass of conductive silicone compound, SE6770u (product name: Z Toray Co., Ltd.). It was created.

[0040] Next, after applying the silane coupling agent and applying it to the metal foil 11 which has been allowed to stand for 1 hour and dried, the conductive rubber compound B is sheeted to a thickness of 1.5 mm, and the metal foil is overlaid. Rolled to a total thickness of 1.65 mm with 2 rolls.

[0041] Next, a rolled sheet is placed in the molding die,

After press-curing at 170 ° C for 10 minutes, it was subjected to secondary vulcanization at 160 ° C for 8 hours to obtain a metal foil integrated conductive sheet with a total thickness of 1.5 mm.

[0042] Next, the metal foil integrated conductive sheet is fixed to the panel for cutting with the metal foil surface facing down, and the width, 1. Omm, length, 3. Omm, A thickness of 1.6 mm was cut with a cutting blade. A resistance was measured at a measurement current of 100 mA by applying testers to the upper and lower surfaces of the metal foil-integrated conductive rubber 10 thus obtained and found to be 3.1 Ω′cm. FIG. 6 is a perspective view of the metal foil integrated conductive rubber 10, 11 is a metal foil, 12 is a groove formed by etching, and 13 is a conductive rubber.

Next, as in FIG. 4C, the height of the return burr generated in the metal foil portion by cutting was measured, and the maximum was 0.005 mm. When the burr generated on the cut surface of the metal foil is reflow soldered to the printed circuit board, which is lower than the surface of the metal foil, the metal burr of the metal foil-integrated conductive rubber is very small. Therefore, the metal foil surface can be accurately placed on the printed circuit board, the parts are lifted by reflow soldering, and the metal foil integrated conductive rubber that does not generate tilt has sufficient solder joint strength on the circuit board. Obtained.

Industrial application fields

[0044] The metal foil-integrated conductive rubber of the present invention can be applied to conductive contact parts inside electrical equipment such as a mobile phone, a mobile terminal, and a personal computer, and in particular, electrical connection between a printed board and a shield case, It is useful for electrical connection between the inner surface of a cellular phone frame with a conductive coating and the substrate.

Claims

The scope of the claims

[1] A metal foil integrated conductive rubber in which a metal foil is integrated on at least one surface of the conductive rubber,

The surroundings are cut by cutting,

The metal foil-integrated conductive rubber, characterized in that at least part or all of the periphery of the surface opposite to the conductive rubber side of the metal foil is formed thinner from the center toward the conductive rubber side

2. The metal foil integrated conductive rubber according to claim 1, wherein the height of burrs at the outer peripheral portion of the metal foil of the metal foil integrated conductive rubber is less than 0.02 mm.

[3] The conductive rubber integrated with metal foil according to claim 1, wherein the conductive rubber has a volume resistivity of 10ΚΩ'cm or less.

[4] The metal foil-integrated conductive rubber according to [1], wherein the peripheral portion of the cut surface of the metal foil is thinly formed and the portion is formed by half etching.

5. The metal foil integrated conductive rubber according to claim 4, wherein the half etching has a depth of 0.02 mm or more and a width of 0.05 mm or more.

6. The metal foil integrated conductive rubber according to claim 1, wherein the metal foil has a thickness of 0.5 mm or less.

[7] The metal foil according to claim 1, wherein the metal foil is obtained by spreading copper, aluminum, iron, stainless steel, nickel, tin, titanium, gold, silver, and an alloy force including at least a part of these metals. Metal foil integrated conductive rubber.

[8] The metal foil is formed by depositing or evaporating a resin or metal with copper, aluminum, iron, stainless steel, nickel, tin, titanium, gold, silver and an alloy containing at least a part thereof to form a metal thin film layer. The metal foil-integrated conductive rubber according to claim 1, wherein the conductive rubber is formed.

[9] The conductive rubber is composed of a butadiene polymer (BR), a butadiene styrene copolymer (SBR), a butadiene-acrylonitrile copolymer (NBR), an isoprene polymer (IR), a black-prene polymer (CR). ), Isobutylene 'gen copolymer (IIR), ethylene' propylene copolymer (EP M), ethylene 'propylene terpolymer (EPDM), chlorosulfonated polyethylene (CSM), alkylene' sulfide polymer (T ), Alkyl 'siloxane condensate (Si), Biridene fluoride 'propylene hexafluoride copolymer (FPM), polyester' isocyanate condensate, polyether 'isocyanate condensate (U), and acrylate polymer (AC M / ANM) The metal foil-based conductive rubber according to claim 1, wherein at least one organic synthetic rubber.

[10] The conductive rubber includes carbon, copper, copper alloy, aluminum, aluminum alloy, iron, stainless steel, nickel, tin, titanium, gold, silver, and conductive powder having a metal thin film layer formed on the surface. 2. The metal foil integrated conductive rubber according to claim 1, wherein at least one organic synthetic rubber selected from the group consisting of:

[11] The method for producing a metal foil integrated conductive rubber according to any one of claims 1 to 10, wherein a groove is formed by etching at a position including a cutting line on one surface of the metal foil sheet, A conductive rubber sheet is integrally formed on the other surface of the metal foil sheet to form a metal foil sheet body conductive rubber sheet,

A method for producing a metal foil-integrated conductive rubber, wherein the sheet is cut by a cutting blade along a groove of the metal foil sheet.

[12] The conductive rubber is formed into a sheet shape by vulcanization molding from a compound comprising a conductive rubber compounded mixture obtained by mixing conductive powder with unvulcanized silicone rubber and further kneading and kneading the vulcanizing agent. The method for producing a metal foil-integrated conductive rubber according to claim 10.

13. The method for producing a metal foil-integrated conductive rubber according to claim 10, wherein the periphery of the metal foil sheet is formed so as to be solderable by forming a groove by half-etching and then performing electrolytic plating on the surface. .

[14] The metal foil integrated conductive film according to [10], wherein the surface of the metal foil sheet is subjected to a surface activation treatment with a coupling agent in order to integrally form a conductive rubber sheet. Rubber production method.

[15] A method of integrating a conductive rubber sheet with the metal foil sheet,

B. Rolling After rolling to a predetermined thickness with two rolls, removing the air between the layers, making the rolled sheets sufficiently close to each other, C. A sheet in which the rolled sheet is placed in a molding die, pressurized and heated to first vulcanize the conductive rubber sheet, and then secondarily vulcanized to integrate the conductive rubber sheet and the metal foil sheet. 11. The method for producing a metal foil-integrated conductive rubber according to claim 10, wherein the method is a method of forming a metal foil.

Cutting with the cutting blade is performed by fixing the metal foil sheet-integrated conductive rubber sheet to the panel for cutting, and cutting from the conductive rubber side using the cutting blade in accordance with the groove position of the metal foil sheet. 11. The method for producing a metal foil-integrated conductive rubber according to claim 10, wherein at least part or all of the periphery of the surface opposite to the conductive rubber side of the metal foil sheet is formed thin from the center toward the conductive rubber side. .