WO2006093133A1

WO2006093133A1 - Robot arm and robot

Info

Publication number: WO2006093133A1
Application number: PCT/JP2006/303726
Authority: WO
Inventors: Takayuki Yazawa; Yasunori Takeuchi; Hiroto Nakajima
Original assignee: Nidec Sankyo Corporation
Priority date: 2005-02-28
Filing date: 2006-02-28
Publication date: 2006-09-08
Also published as: TW201213071A; KR101265356B1; TW200635726A; TWI392568B; KR20070106623A; TWI447004B

Abstract

A robot arm (1) having a first arm (50) with a first transmission mechanism (2), a working means (500) with a second transmission mechanism (4), and a first connection means (10) for connecting the first and second transmission mechanisms (2, 4). The first connection means (10) has a first power transmission member (11) constructed from a rigid member, a second power transmission member (12), and connection sections (20, 25) for connecting the transmission members and constructed from rigid members. The diameter of the first transmission mechanism (2) is greater than that of the second transmission mechanism (4), and the length of the second power transmission member (12) is less than that of the first power transmission member (11).

Description

Specification

Robot arm and robot

Technical field

[0001] The present invention relates to a robot arm and a robot. More specifically, the present invention relates to an improvement in the structure of a robot arm in an articulated robot that moves a workpiece such as a semiconductor Ueno, a liquid crystal transfer robot, etc., between process devices such as a cassette or a film coating apparatus. For example, the present invention relates to a robot arm used in a reduced pressure atmosphere such as a semiconductor manufacturing apparatus and a robot equipped with the robot arm.

Background art

[0002] A robot arm is configured such that a first arm and a working means are connected to each other so as to be able to rotate. The robot arm is configured to transmit a rotational force of a rotational drive source to perform operations such as expansion and contraction. It is. This robot arm is mounted on an articulated robot that moves a workpiece such as a semiconductor wafer or a liquid crystal between process devices such as a force setting device and a film attaching device.

[0003] For example, a robot arm 2030 shown in FIG. 16 is a so-called belt direct drive type, and a first arm 2050 that can rotate around a first timing pulley 2070 fixed to a base 2040 of the robot body. A second arm 2060 rotatably connected to the tip of the first arm 2050 via a second timing pulley 2080, and a hand side pulley 2100 attached to the tip of the second arm 2060. And a timing belt 2110 hung over a first timing pulley 2070 and a second timing pulley 2080.

[0004] The first arm 2050 is provided with a drive shaft 2130 that is rotatable at a position that is concentric with the first timing pulley 2070. The first arm 2050 is provided with respect to the base 2040 and the first timing pulley 2070. One arm 2050 is rotatably supported. The drive shaft 2130 is rotated by a motor (not shown) built in the base 2040.

Second timing pulley 2080 and second arm 2060 are fixed by connecting cylinder 2140. Yes. A connecting shaft 2150 is housed in the connecting cylinder 2140 so as to be rotatable. The connecting shaft 2150 is fixed to the first arm 2050 and the third timing pulley 2090.

[0005] The first arm 2050 and the second arm 2060 have the same length, and the first arm 2050 accommodates two timing pulleys 2070 and 2080 and one length! The arm 2060 houses two timing pulleys 2090, 2100 and one long! /, Timing benore 2120.

[0006] The robot arm 2030 has a ratio of the diameter (number of teeth) of the first pulley 2070 and the second pulley 2080 to 2

: 1 and the ratio of the diameter (number of teeth) between the third pulley 2090 and the fourth pulley 2100 is 1: 2. For this reason, the rotation angle ratio of the first pulley 2070, the second pulley 2080, and the fourth pulley 2100 is 1: 2: 1.

The robot arm 2030 rotates the first arm 2050 with respect to the base 2040 by driving a motor. At this time, the first belt 2110 that rotates relative to the fixed first pulley 2070 rotates the second pulley 2080 relative to the first arm 2050. By the rotation of the second pulley 2080 relative to the first arm 2050, the second arm 2060 rotates relative to the first arm 2050, and the third pulley 2090 rotates relative to the second arm 2060.

Further, when the third pulley 2090 rotates with respect to the second arm 2060, the fourth pulley 2100 rotates with respect to the second arm 2060, and the hand 2020 rotates.

Here, the first arm 2050 and the second arm 2060 have the same length, and the base side pulley 2070 and the hand side pulley 2080 of the first arm 2050 (ie, the base side pulley 2090 of the second arm 2060). ) And the second arm 2060 on the hand side pulley 2100 has a rotation angle ratio of 1: 2: 1. Therefore, by rotating the first arm 2050, the first arm 2050 and the second arm 1060 As the angle changes, the hand 2020 moves while keeping the direction constant on a straight line connecting the center of the base pulley 2070 of the first arm 2050 and the center of the hand pulley 2100 of the second arm 2060.

[0009] By the way, in the robot arm 2030, when the size of semiconductor wafers and liquid crystal glass has increased in recent years and the arm dimensions and weight have increased, the force applied to the timing belt has increased, and the rigidity of the timing belt has become insufficient. There was a problem that the accuracy was lowered. [0010] Therefore, it is disclosed that a timing belt in which a connecting portion made of a metal plate is connected to an area that does not come into contact with the pulley in the case of rotation, rather than using a single long timing belt stretched between pulleys, is disclosed. It has been.

As a result, by interposing a connecting part using a metal plate, the length of the timing belt is shortened to increase its rigidity, thereby preventing a decrease in position accuracy when the robot arm is rotated (for example, patent document). (See 1).

[0011] As a semiconductor device manufacturing system, a system in which a workpiece transfer robot is incorporated in a system for manufacturing a semiconductor device is known. Such a manufacturing system has a plurality of chambers for processing in a reduced-pressure atmosphere, and the workpiece transfer robot operates so that the medium force of the plurality of chambers can carry semiconductor wafers in and out of the predetermined chambers. At this time, if the semiconductor wafer is loaded into each chamber and the chamber is returned to normal pressure every time it is unloaded, it takes a lot of time to reduce the inside of the chamber again and start processing, thereby reducing the throughput. Therefore, in recent years, a manufacturing system in which a space including a workpiece transfer robot for loading / unloading a semiconductor wafer into / from each chamber is used as a preliminary decompression chamber (load lock chamber). Yes. With this manufacturing system, semiconductor wafers can be loaded and unloaded without returning the chamber to normal pressure, so the snooping output is improved.

As a workpiece transfer robot used in such a manufacturing system, various transfer robots have been proposed for the purpose of improving transfer efficiency and shortening operation time. For example, in Patent Document 1, a first arm portion that is pivotably supported, a second arm portion that is flexibly supported at the tip, and a central portion that is rotatably supported at the tip. A workpiece mounting portion for mounting and holding the workpiece on both ends of the third arm portion, and handling two workpieces at a time. A transfer arm device has been proposed.

Patent Document 1: JP 2004-160568 A

Patent Document 2: JP-A-7-142551

Disclosure of the invention

Problems to be solved by the invention [0014] However, in the robot arm shown in Patent Document 1, the rigidity is increased by using a timing belt connected to a connecting portion made of a metal plate. The ratio of the timing belt is higher than that of the connecting part that also has the metal plate force as before.

[0015] Further, since the timing belt to be used is a composite material force mainly composed of rubber, it is a material having elasticity. For this reason, the robot arm remained largely affected by the elongation and hysteresis of the timing belt, affecting the rotation of the robot arm. Therefore, there is a problem that it is difficult to ensure the high accuracy and position accuracy of the robot arm.

[0016] When the strength of the timing belt, for example, the width is increased in order to increase the rigidity of the timing belt, the width of the timing pulley having a tooth portion that stagnates the tooth surface is also increased. It is necessary to provide it. For this reason, increasing the rigidity of the timing belt has the problem that the robot arm becomes larger and the installation space for the robot arm must be increased.

[0017] The transfer robot shown in Patent Document 2 is intended to improve the transfer efficiency and shorten the operation time, but even if the transfer efficiency is improved and the operation time is shortened, Unless dust or the like coming out of the transfer robot is reduced as much as possible in a reduced pressure atmosphere, the inside of the chamber cannot be reduced to a predetermined pressure, and overall throughput cannot be improved. In particular, a robot arm that performs an expansion / contraction operation has a plurality of power transmission means such as a belt and a pulley therein, so that dust and the like are easily generated.

[0018] On the other hand, a steel belt can be selected and used as power transmission means that does not generate dust. However, the steel belt has to be fixed to the pulley with a bolt or the like to prevent slippage or transmission loss, so there is a problem that the rotation range of the pulley is limited and the driving of the robot is limited. . In addition, to secure the pulley rotation area, a wide pulley is required (see Figs. 2 and 7 of JP-A-11-165290), and the robot arm becomes thicker and larger, and workpieces are taken in and out. The mouth is narrow in the height direction がある There are ヽ and ヽぅ problems that are not suitable for use in the chamber.

[0019] Therefore, the present invention has been made to solve the above-described problem, and a robot arm that can improve the accuracy of arm position control without enlarging the arm, and Another object of the present invention is to provide a robot having the robot arm.

It is another object of the present invention to provide a robot arm that reduces dust from the inside in a reduced pressure atmosphere and suppresses an increase in thickness in the height direction, and a robot equipped with the robot arm.

Means for solving the problem

[0020] The present invention provides a first arm that is rotatably attached to the robot body via a first transmission mechanism, and a tip part of the first arm that is rotatable via a second transmission mechanism. A robot arm comprising a first connection means for transmitting power by connecting the first transmission mechanism and the second transmission mechanism, and the first series connection means comprises: A first power transmission member that also serves as a first rigid member that transmits and receives the power of the first transmission mechanism force or the power to the first transmission mechanism, and the power of the second transmission mechanism force or the first A second power transmission member that transmits and receives power to the second transmission mechanism, and a first connection portion and a second connection made of a second rigid member that connect the first power transmission member and the second power transmission member. And the diameter of the first transmission mechanism is the second transmission mechanism. And the length of the second power transmission member is shorter than the length of the first power transmission member.

[0021] According to the present invention, the rigidity of the first connecting means can be increased while maintaining the size of the conventional robot arm, and the influence of the elongation, hysteresis, and the like can be suppressed. For this reason, position control of the robot arm can be ensured with high accuracy.

[0022] According to the present invention, the first power transmission member including the first rigid member having a width substantially the same as the width of the first transmission member is used for the large-diameter first transmission member having a small bending stress. As a result, the rigidity of the first connecting means can be increased. Further, since the first transmission member is not configured by meshing, friction can be suppressed and dust generation can be suppressed. In addition, since the length of the second power transmission member hung over the second transmission member having a small diameter can be made shorter than before, it is possible to suppress dust generation caused by mating with the second transmission member. I'll do it.

[0023] Further, according to the present invention, the working means is fixed to the second transmission mechanism and rotatable with respect to the first arm; and the second transmission mechanism is concentric with the second arm. On the first arm A third transmission mechanism that is fixed, and a node that is rotatably attached to the tip of the second arm via a fourth transmission mechanism; and the third transmission mechanism and the fourth transmission mechanism. A robot arm comprising a second connecting means for connecting the transmission mechanism and transmitting power, wherein the second connecting means transmits or receives power from the fourth transmission mechanism or power to the fourth transmission mechanism; A fourth power transmission member that is a third rigid member force; a third power transmission member that receives power from the third transmission mechanism or power to the third transmission mechanism; the third power transmission member; The fourth transmission mechanism includes a third connection portion and a fourth connection portion that are connected to the fourth power transmission member. The fourth transmission mechanism has a diameter larger than that of the third transmission mechanism. It is large and the length of the third power transmission member is the front It is preferable that the rotation angle ratio of the first transmission mechanism, the second transmission mechanism, and the fourth transmission mechanism is 1: 2: 1, which is shorter than the length of the fourth power transmission member.

[0024] According to the present invention, like the first arm, the rigidity of the second connecting means can be increased while maintaining the size of the conventional robot arm, and the influence of elongation, hysteresis, and the like can be achieved. Can be suppressed as much as possible. Therefore, when the robot arm is rotated, the node provided at the tip of the second arm can move on a straight line with high accuracy while keeping the direction constant.

[0025] Further, since the rotation angle ratio of the first transmission mechanism, the second transmission mechanism, and the fourth transmission mechanism is 1: 2: 1, the first arm is turned by rotating the first arm. The angle between the first arm and the second arm changes to move along the straight line connecting the center of the first transmission mechanism of the first arm and the center of the fourth transmission mechanism of the second arm while keeping the direction constant. can do . For this reason, position control of the robot arm can be ensured with high accuracy.

In the present invention, it is preferable that the tension of the power transmission member can be adjusted at least in the first connecting portion and the third connecting portion. Thereby, it can set to these 1st, 3rd connection parts, adjusting predetermined tension.

[0027] Further, according to the present invention, the first connecting portion and the second connecting portion may include a center line position in the thickness direction of the first power transmission member and a center line position in the thickness direction of the second power transmission member. Are preferably connected so as to be in substantially the same position. Similarly, in the third connecting portion and the fourth connecting portion, the center line position in the thickness direction of the third power transmission member is substantially the same as the center line position in the thickness direction of the fourth power transmission member. Concatenated as It is preferable to become.

According to the present invention, since the direction in which the tension applied to these power transmission members acts is substantially the same position, a smooth belt conveyance operation can be performed.

[0028] Further, the robot arm of the present invention includes a first arm that is rotatably attached to the robot body via the first transmission mechanism, and a distal end portion of the first arm that is rotated via the second transmission mechanism. A robot arm comprising a work arm attached movably and having a first connection means for connecting the first transmission mechanism and the second transmission mechanism to transmit power. It is characterized in that the connecting means is a fluoro rubber force.

[0029] This invention uses the first connecting means that also has a fluororubber strength. The first connecting means, which also has fluororubber power, is suitable for a reduced pressure atmosphere that generates less gas and dust in a reduced pressure atmosphere than conventional belts made of black plain, nitrile rubber, and urethane rubber. There are few adverse effects. As a result, the inside of the chamber can be quickly depressurized to a predetermined pressure, and the overall throughput can be improved. In addition, there is no increase in the thickness of the robot arm or the drive is limited as in the case of using a steel belt.

[0030] In the robot arm of the present invention, the working arm is fixed to the second transmission mechanism and is rotatable with respect to the first arm, and is concentric with the second transmission mechanism. A third transmission mechanism fixed to the first arm; a node arm rotatably attached to the tip of the second arm via a fourth transmission mechanism; the third transmission mechanism and the fourth transmission mechanism; A second coupling means for coupling the transmission mechanism to transmit power; and the second coupling means transmits or receives the power of the third transmission mechanism force or the power to the third transmission mechanism. A power transmission member made of a timing belt made of steel, a power transmission member made of a steel belt that transmits and receives power from the fourth transmission mechanism or power to the fourth transmission mechanism, and a connection that connects these power transmission members Composed of parts I like it.

[0031] According to the present invention, the third transmission mechanism side having a large drive amount (rotational frequency) is a timing belt that uses fluororubber force, and the drive amount (rotational frequency) is small (within approximately 180 degrees, (This is a drive amount that does not limit the drive of the bot.) The second connecting means which is a so-called hybrid belt in which they are connected by a connecting portion was used. Such a second connecting means, which is a hybrid belt, has sufficient rigidity and driving accuracy in a portion made of a steel belt, hardly generates gas or dust, and in a portion made of fluoro rubber. As described above, there are few adverse effects on the reduced-pressure atmosphere with less gas generation and dust generation in a reduced-pressure atmosphere as compared to various conventional belts. As a result, the inside of the chamber can be quickly depressurized to a predetermined pressure, and the throughput can be improved as a whole. In addition, it is possible to provide a robot arm that secures drive accuracy and rigidity, and at the same time suppresses the thickness in the vertical direction.

[0032] In the robot arm of the present invention, the first arm and the second arm so that the air in the first arm and the second arm is extracted to the outside of the proximal end force of the first arm. It is preferable that a punch hole leading to the base end portion of the first arm is provided inside.

[0033] According to the present invention, the first arm and the second arm are provided with a through hole that communicates with the base end of the first arm, so that when the robot arm is exposed to a reduced-pressure atmosphere, The air in one arm and the second arm is easily extracted to the outside of the proximal end force of the first arm through the hole. As a result, even the air inside the robot arm can be easily discharged, and the force of the air is low in dust and the like, so the time to reach a predetermined pressure in a reduced-pressure atmosphere can be shortened. Can do.

In the robot arm of the present invention, it is preferable that an opening for escaping air in the arm to the outside is provided at the base end of the first arm, and a filter is attached to the opening. .

[0035] According to the present invention, the base end portion of the first arm is provided with the opening for releasing the air in the arm to the outside, and the filter is attached to the opening, so that, for example, in each arm Even if dust or the like is generated by the rotation of the belt and pulley, the generated dust or the like is captured by a filter attached to the opening. As a result, a rapid decompression atmosphere can be achieved with a favorable environment in the preliminary decompression chamber (load lock chamber), which is the moving space of the robot arm.

[0036] Further, according to the present invention, by providing the robot arm of the present invention as a part thereof, the inside of the chamber can be quickly reduced to a predetermined pressure, and the overall throughput is improved. A robot that can be used is provided.

The invention's effect

[0037] The present invention provides a first arm that is rotatably attached to a robot body via a first transmission mechanism, and a tip part of the first arm that is rotatable via a second transmission mechanism. And a first connecting means for transmitting power by connecting the first transmission mechanism and the second transmission mechanism, and the first arm constituting the robot arm. A first rigid member coupling, wherein the first coupling means for coupling the transmission mechanism and the second transmission mechanism to transmit power transmits or receives the power of the first transmission mechanism force or the power to the first transmission mechanism. A first power transmission member, a second power transmission member for transmitting / receiving power of the second transmission mechanism or power to the second transmission mechanism, the first power transmission member and the second power transmission The first series of second rigid members connecting the members The first transmission mechanism is larger in diameter than the second transmission mechanism, and the length of the second power transmission member is the first power mechanism. Since it is shorter than the length of the transmission member, the rigidity of the first connecting means can be increased while maintaining the size of the conventional robot arm, and the effects of elongation, hysteresis, etc. can be suppressed. it can. For this reason, the position control of the robot arm can be ensured with high accuracy.

[0038] Further, according to the robot arm of the present invention and the robot equipped with the robot arm, the first connecting means having fluororubber power is used, so that gas generation, dust generation, etc. under reduced pressure atmosphere are reduced. It is possible to reduce the adverse effect on. As a result, the inside of the chamber can be quickly depressurized to a predetermined pressure, and the overall throughput can be improved.

Brief Description of Drawings

[0039] FIG. 1 is a longitudinal sectional side view showing a main part of a robot arm that works according to the present invention.

FIG. 2 is an overall view showing a main part of a robot arm that is useful for the present invention.

FIG. 3 is a plan view showing a first connecting means.

FIG. 4 is a plan view showing a second connecting means.

FIG. 5 is a side view showing a first connecting portion (third connecting portion). 圆 6] It is a side view showing a second connecting part (fourth connecting part).

FIG. 7 is a plan view showing a double arm articulated robot using a robot arm to which the present invention is applied.

FIG. 8 is a plan view (A) showing an example of the robot arm of the present invention and A-A sectional view (B). 圆 9] Plan view showing the internal structure of the first arm shown in FIG. B—B is a cross-sectional view (B).

10] FIG. 9A is a plan view showing the internal structure of the second arm shown in FIG. 8 and FIG.

[11] FIG. 11 is a schematic explanatory view showing an example of a mode in which the filter is attached to the first arm.

FIG. 12 is a schematic configuration diagram showing an example of a connecting portion.

FIG. 13 is a schematic configuration diagram showing another example of a connecting portion.

圆 14] It is explanatory drawing which shows the movement form of a hand arm.

FIG. 15 is a schematic plan view showing an example in which a robot including a robot arm of the present invention is used in a semiconductor manufacturing process.

FIG. 16 is a longitudinal sectional side view showing a conventional robot arm.

Explanation of symbols

1, 1010 Robot arm

2, 1021 First transmission mechanism

4, 1022 Second transmission mechanism

10, 1023 First connecting means

11 First power transmission member

12 Second power transmission member

20 First connecting part

25 Second connecting part

50, 1020 1st arm

60, 1033 Second connecting means

61, 1031 Third power transmission member 62, 1032 Fourth power transmission member

70 Third connection

75 Fourth connection

100, 1030 Second arm

200, 1200 Robot body base

50, 500 Working means (working arm)

1011 Robot body axis

1024 connecting shaft

1025 Ribs

1026 idler pulley

1028 opening

1029 Punching hole

1034 connecting shaft

1035 ribs

1036 Toothed belt

1037 flat beret

1039 Punching hole

1040 hand arm

1042 screw

1043, 1044, 1045, 1054, 1055 blades 1046, 1048, 1051, 1053, 1058, 1059 screws 1060

1061 Filter structure

1070, 1070a, 1070b Connecting part

1071 Assembly processing room

1072 robot

1073 Road, lock room

1079 Transfer robot BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the configuration of the present invention will be described in detail based on the best mode shown in the drawings.

[0042] (First embodiment)

(Robot arm configuration)

FIG. 1 is a longitudinal sectional side view showing the main part of the robot arm. FIG. 2 is a plan view showing the main part of the robot arm.

A robot arm 1 shown in FIGS. 1 and 2 includes a first arm 50 that is rotatably attached to a base 200 of a robot body via a first transmission mechanism 2, and a distal end portion of the first arm 50. And the working means 500 which is rotatably mounted via the second transmission mechanism 4. The working means 500 includes a second arm 100 fixed to the second transmission mechanism 4 and rotatable relative to the first arm 50, and a third transmission fixed to the first arm 50 concentrically with the second transmission mechanism 4. The mechanism 52 includes a node 252 (see FIG. 7) that is rotatably attached to the tip of the second arm 100 via a fourth transmission mechanism 54.

Furthermore, the first transmission mechanism 2 and the second transmission mechanism 4 are connected to the robot arm 1 to connect the first transmission means 10 for transmitting power, and similarly, the third transmission mechanism 52 and the fourth transmission mechanism 54 are connected. And a second connecting means 60 for transmitting power.

[0044] (First arm)

The first transmission mechanism 2 is fixed to the base 200 of the robot body on the base side in the first arm 50. In the present embodiment, the first transmission mechanism 2 has a flat outer peripheral surface. It is the first flat pulley.

Furthermore, the diameter R1 of the first flat pulley 2 is larger than the diameter R2 of the second transmission mechanism 4, and when the first connecting means 10 is installed, the relationship of R1: R2 = 2: 1 It is.

[0045] The second transmission mechanism 4 is fixed to the second arm 100 with a screw at the distal end in the first arm 50, that is, on the second arm 100 side.

In the present embodiment, the second transmission mechanism 4 is composed of a second timing pulley having a tooth portion on its outer peripheral surface.

The connecting cylinder 3 is housed inside the second timing pulley 4, and the connecting cylinder 3 is The wiring is housed. One end of the connecting cylinder 3 is fixed to the first arm 50, and the other end is housed in the second arm 100. As a result, the first arm 50 and the second arm 100 are interlocked!

Furthermore, in the present embodiment, in the vicinity of the second timing pulley 4, a motor 150 serving as a rotational drive source, a speed reducer 151 attached to the motor 150, and a speed reducer 151 are attached. A drive pulley 152 and a drive belt 154 stretched over the drive pulley 152 and the second timing pulley 4.

[0047] The first connecting means 10 connects the first power transmission member 11 that is the first rigid member force, the second power transmission member 12, and the first power transmission member 11 and the second power transmission member 12. The first connecting portion 20 and the second connecting portion 25 are the second rigid member force.

[0048] The first power transmission member 11 is formed of a first rigid member, and is formed of a steel belt in the present embodiment. The first rigid member may be a belt other than a steel belt as long as it is a member having excellent ductility and toughness. The first steel belt 11 is wound around the plane of the first flat pulley 2, and the intermediate position of the entire length is fixed to the first flat pulley 2 with a plurality of screws 16.

[0049] One end side of the first steel belt 11 is fixed to the first connecting portion 20, and the other end side is fixed to the second connecting portion 25. The second power transmission member 12 is composed of a timing belt having a tooth surface, and the second timing belt 12 is disposed so that the tooth surface meshes with the tooth portion of the second timing pulley 4. The total length is set to the minimum required length calculated from the transfer distance of the robot arm 1.

[0050] In the present embodiment, the first steel belt 11, the second timing belt 12, the first connecting portion 20, and the second connecting portion 25 have substantially the same width in the axial direction. The

FIG. 3 is a plan view showing first connection means for transmitting power by connecting the first transmission mechanism and the second transmission mechanism in the first arm. FIG. 5 is a side view showing the first connecting portion (third connecting portion). FIG. 6 is a side view showing the second connecting portion (fourth connecting portion).

[0052] The first connecting portion 20 is an adjustment-side connecting portion that can be adjusted by sandwiching one end portion of the first steel belt 11 and one end portion of the second timing belt 12. Yes. The second connecting portion 25 is a fixed-side connecting portion that sandwiches and fixes the other end portion of the first steel belt 11 and the other end portion of the second timing belt 12.

As shown in FIG. 5, the first connecting portion 20 includes plates 30, 31, 32 for fixing one end portions of the first steel belt 11 and the second timing belt 12, and the first steel belt 11. The adjustment screw 145 for adjusting the tension with the second timing belt 12 is a main component, and the plates 30, 31, and 32 are also provided with a second rigid member.

[0054] Specifically, the plate 32 is made of aluminum in the present embodiment, and is thicker than the first steel belt 11 and the second timing belt 12 in order to maintain its strength! Become! On the aluminum plate 32, a groove portion 32a is formed on one end side thereof, and the tooth surface of one end portion of the second timing belt 12 is disposed in the groove portion 32a.

Further, the second timing belt 12 is sandwiched between an aluminum plate 32 and a stainless steel plate 31 and fixed using a plurality of screws.

[0055] On the other end side of the aluminum plate 32, a stainless steel plate 30 is fixed using a plurality of screws. The stainless plate 30 is formed with a long hole 30b along the longitudinal direction through which a plurality of screws pass. As a result, the overlap allowance between the stainless steel plate 30 and the aluminum plate 32 can be adjusted.

Note that FIG. 5 is for clarifying the relationship between the force screw in which a plurality of screws are formed in one row in the width direction and the long holes 30b, and the plurality of screws are limited to one row in the width direction. It is not something.

[0056] Further, the other end of the stainless steel plate 30 is screwed to one end of the first steel belt 11 with a shim 40 interposed therebetween. This shim 40 adjusts the height in the thickness direction of the first steel belt 11 and the second timing belt 12, and the center line C between the first steel belt 11 and the second timing belt 12 The distance of force is almost the same. The number of shims 40 is not limited.

[0057] Further, the stainless steel plates 30, 31 are formed with rising portions 30a, 3 la on opposite sides, and an adjustment screw 145 is screwed into the rising portions 30a, 3 la. The adjustment screw 145 allows the distance between the stainless steel plate 30, 31 to be adjusted and the stainless steel plate The tension of the first steel belt 11 and the second timing belt 12 can be adjusted along the long hole 30b formed in the rate 30.

[0058] As shown in Fig. 6, the second connecting portion 25 is mainly composed of plates 33 and 34 that sandwich and fix the other ends of the first steel belt 11 and the second timing belt 12, and the plate 33 and 34 also have a second rigid member. The second rigid member should be a member with excellent ductility and toughness.

[0059] In the present embodiment, the plate 33 is made of stainless steel, and the first steel belt 11 and the second timing belt 12 are fixed to both ends of the stainless steel plate 33 using a plurality of screws, respectively. ing. The first steel belt 11 is fixed to the stainless steel plate 33 with a shim 40 interposed therebetween. The shim 40 is used to adjust the height in the thickness direction. Use one or more shims 40 and adjust so that the distance between the centerline C force and the second timing belt 12 is substantially the same. And

[0060] The second timing belt 12 is sandwiched between an aluminum plate 34 and a stainless steel plate 33, and is fixed using a plurality of screws. As shown in FIG. 6, the flat side of the second timing belt 12 is disposed on the stainless steel plate 33, and the aluminum plate 34 having grooves formed on the tooth surface side of the second timing belt 12 is provided. Is arranged. Then, the tooth surface of the second timing belt 12 is fixed to the groove of the aluminum plate 34 using a plurality of screws.

Returning to FIG. 3, the first arm 50 drives the motor 150 to rotate clockwise (CW direction) or counterclockwise (CCW direction) with respect to the fixed first flat pulley 2. The position where the first connecting means 10 rotates clockwise (CW direction) and when it rotates counterclockwise (C CW direction) is indicated by dotted lines. .

When the first connecting means 10 is rotated in the counterclockwise direction (CCW direction), the first steel belt 11 is rotated to 16A, the first connecting portion 20 is moved to 20A, and the second connecting portion 25 moves to 25A. Further, when the first connecting means 10 rotates clockwise (CW direction), the first steel belt 11 rotates to the reference numeral 16B, the first connecting portion 20 moves to the reference numeral 20B, and the second connection Part 25 moves to the sign 25B.

[0062] As described above, the first flat pulley 2 and the second timing pulley 4 have their diameters (the number of teeth). ) Ratio of 1/12 = 2: 1, the first flat pulley 2 rotates about 1Z4 before the fixing portion 16 formed on the first flat pulley 2 reaches the reference numeral 16A. During this time, the second timing pulley 4 rotates about 1Z2. Therefore, the length of the second timing belt 12 is the length that moves in the clockwise direction (CW direction) and counterclockwise direction (CCW direction) to the length that fits the second timing pulley 4 (about 1Z2 rotation). The total length is about 3Z2 rotations. In other words, the total length is set to the required minimum length calculated from the transfer distance of the robot arm 1.

[0063] As shown in FIG. 2, a plurality of ribs 219 are formed in the first arm 50 at predetermined intervals, so that cross-sectional deformation can be suppressed, and the first arm 50 has a vertical rigidity shown in the figure. Can now be improved! /.

Further, since the ribs 219 are formed, the thickness of the first arm 50 is reduced to achieve a light weight.

[0064] Each rib 219 is formed with three holes 220, 220, 221 in the longitudinal direction, and the middle hole 222 is a through-hole for wiring in the first arm 50 for arranging an electric wire or the like. Yes. Furthermore, the first steel belt 11, the second timing belt 12, and the through holes 220, 220 through which the first and second connecting portions 20, 25 pass are formed on both sides of the wiring through hole.

The first connecting means 10 is configured to pass through the through holes 220 and 220 in a state where one of the first and second connecting portions 20 and 25 is cut off, and to connect the connecting portions cut off after the penetration. ing.

Further, the first flat pulley 2 has a plurality of axially penetrating holes 2a formed uniformly in the circumferential direction so that the weight of the first arm 50 can be reduced by reducing the weight. Have

[0065] (Working means)

The working means 500 provided at the tip of the first arm 50 includes a second arm 100 fixed to the second timing pulley 4 and rotatable with respect to the first arm 50, and a second timing pulley. 4 and a third transmission mechanism 52 fixed to the first arm 50 concentrically with the hand 4, and a hand 252 rotatably attached to the end of the second arm 100 via a fourth transmission mechanism 54 (see FIG. 7) And a second connecting means 60 for connecting the third transmission mechanism 52 and the fourth transmission mechanism 54 to transmit power. And is composed.

[0066] On the base side (first arm 50 side) in the second arm 100, the connecting cylinder 3 extending from the first arm 50 and concentric with the second timing pulley 4 is housed. A third transmission mechanism 52 is fixed to the other end of the tube 3. In the present embodiment, the third transmission mechanism 52 is composed of a timing pulley having a tooth portion on its outer peripheral surface.

[0067] A fourth transmission mechanism 54 is provided at the distal end of the second arm 100 so as to be rotatable with respect to the second arm 100 via a bearing. A hand 525 (see FIG. 7) for conveying the cake is attached to the tip of the fourth transmission mechanism 54 so as to be rotatable integrally with the fourth transmission mechanism 54. In the present embodiment, the fourth transmission mechanism 54 is a flat pulley whose outer peripheral surface is a plane.

Furthermore, the diameter R4 of the fourth flat pulley 54 is larger than the diameter R3 of the third timing pulley 52. When the second connecting means 60 is installed, R3: R4 = 1: 2 It is related.

[0068] The second connecting means 60 connects the fourth power transmission member 62 having the third rigid member force, the third power transmission member 61, and the third power transmission member 61 and the fourth power transmission member 62. The third connecting portion 70 and the fourth connecting portion 75 also serve as a fourth rigid member.

[0069] The third power transmission member 61 is configured by a timing belt having a tooth surface, and the third timing belt 61 is configured so that the tooth surface meshes with a tooth portion of the third timing pulley 52. The total length is set to the required minimum length calculated from the transfer distance of the robot arm 1.

[0070] The fourth power transmission member 62 is formed of a rigid member having excellent ductility and toughness, and is formed of a steel belt in the present embodiment. The fourth steel belt 62 is wound around the plane of the fourth flat pulley 54, and an intermediate position of the entire length thereof is fixed on the outer peripheral surface of the fourth flat pulley 54 with a plurality of screws 66. One end side of the fourth steel belt 62 is fixed to the third connecting portion 70, and the other end side is fixed to the fourth connecting portion 75.

FIG. 4 is a plan view showing second connection means for transmitting power by connecting the third transmission mechanism and the fourth transmission mechanism in the second arm constituting the working means. Figure 5 shows the first consolidated It is a side view which shows a part (3rd connection part). FIG. 6 is a side view showing the second connecting portion (fourth connecting portion).

The third connecting portion 70 and the fourth connecting portion 75 have substantially the same configuration as the first connecting portion 20 and the second connecting portion 25 of the first arm 50 described above. It is filled in as the code inside. Therefore, detailed description here is omitted.

Further, as shown in FIG. 4, in the second arm 100, the length of the third connecting portion 70 and the fourth connecting portion 75, that is, the length of the connecting portion made of the plate is the connection of the first arm 50. It is longer than the length of the part. That is, when the second arm 100 is rotated, the length is such that it does not contact the third timing pulley 52 and the fourth flat pulley 54, the length of the third timing belt 61 is shortened, and the strength of the second connecting means 60 is increased. The high, the thing becomes.

Returning to FIG. 4, the second arm 100 receives the rotation of the first arm 50 and rotates clockwise (CW direction) or counterclockwise with respect to the connecting cylinder 3 and the fixed third timing pulley 52. (CCW direction), the dotted line shows the position when the second connecting means 60 is rotated clockwise (CW direction) and when it is rotated counterclockwise (CCW direction). It is shown. When the second connecting means 60 rotates in the clockwise direction (CW direction), the fourth steel belt 62 rotates to the reference numeral 66A, the third connecting portion 70 moves to the reference numeral 70A, and the fourth connecting portion. 75 moves to 75A. When the second connecting means 60 rotates counterclockwise (CCW direction), the fourth steel belt 62 rotates to the reference numeral 66B, and the third connecting portion 70 moves to the reference numeral 70B. The four connecting parts 75 move to the reference numeral 75B.

[0073] As described above, the third timing pulley 52 and the fourth flat pulley 54 have a specific force of these diameters (the number of teeth) ¾3: R4 = 1: 2, so the fourth flat pulley 54 When the fixed portion 66 formed in the step 1 rotates about 1Z4, the third timing pulley 52 rotates about 1Z2. Therefore, the length of the third timing belt 61 moves in the clockwise direction (CW direction) and counterclockwise direction (CCW direction) to the length that fits the third timing pulley 52 (about 1Z2 rotation). The total length is about 3 Z2 rotations. That is, the total length is set to the necessary minimum length calculated from the transfer distance of the robot arm 1.

[0074] As shown in FIG. 2, a plurality of ribs 210 are formed at predetermined intervals in the second arm 100, so that the cross-sectional deformation can be suppressed, and the second arm 100 in the vertical direction shown in the figure can be suppressed. High rigidity So that you can Further, by forming these ribs 210, the thickness of the second arm 100 is reduced and the weight is reduced.

Each rib 210 is formed with three holes 211, 211, and 212 in the longitudinal direction, and the middle hole 212 is a through hole for wiring in the arm. Further, on both sides of the wiring through hole, a third timing belt 61, a fourth steel belt 62, and through holes 211 and 211 through which the third and fourth connecting portions 70 and 75 pass are formed.

The second connecting means 60 is configured to pass through the through holes 211 and 211 in a state where one of the third and fourth connecting portions 70 and 75 is cut off, and to connect the connecting portions cut off after the penetration. It has become.

In addition, as shown in FIG. 2, the fourth flat pulley 54 has a plurality of holes 54a penetrating in the axial direction evenly formed in the circumferential direction, and the second arm can be reduced by reducing the weight. We are trying to reduce the weight by 100.

[0076] (Operation of robot arm)

The operation of the robot arm 1 described above will be described below. The robot arm 1 is driven by a motor 150 disposed in the vicinity of the second timing pulley 4 in the first arm 50. The rotation of the motor 150 is transmitted to the drive pulley 152 via the speed reducer 151. The rotation of the drive pulley 1 52 is transmitted to the second timing pulley 4 via the drive belt 154. The rotation of the second timing pulley 4 is transmitted to the first flat pulley 2 via the first connecting portion 20 and the second connecting portion 25.

Further, as the second timing pulley 4 is rotated, the second arm 100 is rotated with respect to the first arm 50 and the third timing pulley 52 is rotated with respect to the second arm 100. . When the third timing pulley 52 rotates with respect to the second arm 100, the fourth flat pulley 54 rotates with respect to the second arm 100, and the hand 252 rotates.

Here, the interval between the rotation centers of the first flat pulley 2 and the second timing pulley 4 and the interval between the rotation centers of the third timing pulley 52 and the fourth flat pulley 54 are the same length. .

[0079] Further, the first flat pulley 2 and the second timing pulley 4 have a ratio of diameter (number of teeth) in a state where the first steel belt 11 and the second timing belt 12 are strung. Is set to be 2: 1. Similarly, the third timing pulley 52 and the fourth flat pulley 54 have a ratio of diameter (number of teeth) when the third timing belt 61 and the fourth steel belt 62 are strung. 1: 2 is provided. For this reason, the rotation angle ratio of the first flat pulley 2, the second timing pulley 4, and the fourth flat pulley 54 is 1: 2: 1.

From the above, the first flat pulley 2 and the second timing pulley 4 of the first arm 50 (ie, the third timing pulley 52 of the second arm 100) and the fourth pulley of the second arm 100 Since the rotation angle ratio with the flat pulley 54 is 1: 2: 1, when the first arm 50 is rotated, the angle between the first arm 50 and the second arm 100 changes, and the first arm 50 The hand 252 moves on a straight line connecting the center of the first flat pulley 2 and the center of the fourth flat pulley 54 of the second arm 100 while keeping the direction constant.

In this double-arm multi-joint robot, the above-described robot arm 1 is arranged on the base 200 of the robot body side by side, for example, as shown in FIG. According to this double-arm type multi-joint robot, one robot arm is in a load state for picking up a workpiece, and the other robot arm is in an unload state for pulling out another workpiece. , These two actions can be performed at the same time

Further, as described above, the two robot arms have a rotation angle ratio of 1: 2: 1 between the first transmission mechanism of the first arm 50, the second transmission mechanism, and the fourth transmission mechanism of the second arm 100. Therefore, by rotating the first arm 50, the angle between the first arm 50 and the second arm 100 changes, and the center of the first transmission mechanism of the first arm 50 and the fourth of the second arm 100 are changed. On the straight line connecting the center of the transmission mechanism, the 252 moves while keeping the direction constant.

Further, in FIG. 7, the double arm type articulated robot is provided so that the robot arm can be moved up and down!

[0084] (Effects of First Embodiment)

According to the first embodiment, the first flat pulley 2 and the second pulley constituting the robot arm 1 The first connecting means 10 for transmitting the power by connecting the timing pulley 4 is also a first rigid member that transmits and receives power from the first flat pulley 2 or power to the first flat pulley 2. The first steel belt 11, the second timing belt 12 for transmitting / receiving the power from the second timing pulley 4 or the power to the second timing pulley 4, and the first steel belt 11 and the second timing It is composed of a first connecting portion 20 and a second connecting portion 25 that also serve as a second rigid member that connects the belt 12, and the diameter of the first flat pulley 2 is the diameter of the second timing pulley 4. Since the length of the second timing belt 12 is shorter than the length of the first steel belt 11, the first connecting means 10 is maintained while maintaining the size of the conventional robot arm 103. Can increase the rigidity of , It is possible to minimize the influence of the elongation and hysteresis. For this reason, the position control of the robot arm 1 can be ensured with high accuracy.

[0085] According to the first embodiment, the second connecting means 60 has a third rigid member force that transmits and receives the dynamic force from the fourth flat pulley 54 or the power to the fourth flat pulley 54. A fourth timing belt 62, a third timing belt 61 for transmitting / receiving power from the third timing pulley 52 or power to the third timing pulley 52, and the third timing belt 61 and the fourth timing belt 61. The fourth connecting member 75 and the fourth connecting member 75 are also connected to the steel belt 62, and the diameter of the fourth flat pulley 54 is the same as that of the third timing pulley 52. Since the length of the fourth timing belt 61 is shorter than the length of the third steel belt 62 and is larger than the diameter, the size of the conventional robot arm 103 is made to be the same as that of the first arm 50. While maintaining the rigidity of the first connecting means 60 The effects of elongation and hysteresis can be suppressed as much as possible. Therefore, when the robot arm 1 is rotated, the position of the node 252 provided at the tip of the second arm 100 can be controlled with high accuracy while keeping its direction constant on a straight line.

[0086] Since the rotation angle ratio of the first flat pulley 2, the second timing pulley 4, and the fourth flat pulley 54 is 1: 2: 1, the first arm 50 is rotated. As a result, the angle between the first arm 50 and the second arm 100 changes, and the center of the first flat pulley 2 of the first arm 50 and the center of the fourth flat pulley 54 of the second arm 100 are connected. The hand 252 can move on the straight line while keeping the direction constant. As a result, the workpiece placed on the hand 252 and transported The position accuracy can be increased and stable conveyance can be performed.

Furthermore, since the rigidity of the first connecting means 10 and the second connecting means 60 can be increased, the hand 252 can move on a straight line with high accuracy.

[0087] In the first embodiment, it is preferable that at least the first connecting portion 20 and the third connecting portion 75 are each provided with an adjusting portion for adjusting the tension of each dynamic force transmitting member. . Thus, the first and third connecting portions 20, 75 can be set while adjusting a predetermined tension.

[0088] According to the first embodiment, the first steel belt 11 having a width substantially the same as that of the first flat pulley 2 having a small bending stress and a large diameter can be stretched over the first arm. The rigidity of the 50 first connecting means 10 can be increased. In addition, the length of the third timing belt 12 stretched around the small-diameter second timing pulley 4 can be made shorter than that of the conventional belt. Dust generation caused by mating can be suppressed.

Further, in the first embodiment, the first connecting portion 20 and the second connecting portion 25 are arranged such that the center line C position in the thickness direction of the first steel belt 11 and the thickness direction of the second timing belt 12 are It is preferable that they are connected so as to be substantially the same position as the center line C position. Similarly, the third connecting portion 70 and the fourth connecting portion 75 are positioned substantially the same as the center line C position in the thickness direction of the third timing belt 61 and the center line C position in the thickness direction of the fourth steel belt 62. They are connected so that

With this configuration, when the first steel belt 11 and the second timing belt 12 of different materials and thicknesses are connected by the first connecting portion 20 and the second connecting portion 25, or when the third timing belt 61 and the fourth timing belt 12 are connected. When the steel belt 62 is connected at the third connecting portion 70 and the fourth connecting portion 75, the center line C position in the thickness direction is almost the same, so these power transmission members (steel belts 11, 62, timing Since the direction in which the tension applied to the belts 12, 61) is applied is almost the same position, the direction of the tension and the direction in which the power transmission member moves are almost the same, and smooth belt transport operation can be performed. .

[0090] According to the first embodiment, the first steel belt is provided on the large first flat pulley 2 side with a small bending stress so as to have substantially the same length as the rotation range of the first arm 50. Multiply by 11 By passing, the rigidity of the power transmission system is increased. Further, since the first steel belt 11 is fixed on the outer peripheral surface of the first flat pulley 2, a power transmission member (steel belt 11, 62, the timing belt 12, 61) is equally applied, so that power can be transmitted efficiently and durability can be improved.

In the first embodiment, the widths of the first steel belt 11 and the second timing belt 12 and the widths of the first flat pulley 2 and the second timing pulley 4 are substantially the same. Similarly, the width of the third timing belt 61 and the fourth steel belt 62 and the width of the third timing pulley 52 and the fourth flat pulley 54 can be made substantially the same. For this reason, it is possible to make constant the moment over which the member supporting each transmission mechanism is applied.

Further, according to the first embodiment, the lengths of the second timing belt 12 and the third timing belt 61 are set to the necessary minimum lengths calculated from the transport distance of the robot arm 1. Therefore, when the second timing belt 12 moves while meshing with the second timing pulley 4 when the robot arm 1 rotates, the third timing belt 61 moves against the third timing pulley 52. It is possible to suppress dust generation that occurs when moving while facing each other.

[0093] Since the second timing belt 12 and the third timing belt 61 to be used also have a composite material force mainly composed of rubber, there has been a problem that harmful gas is generated in a vacuum environment. In this embodiment, since the lengths of the second and third timing belts 12 and 61 are set to the minimum length, generation of harmful gas can be suppressed as compared with the conventional case.

[0094] In the first embodiment, at least the first connecting portion 20 and the third connecting portion 70 are provided so that the tension of each power transmission member (steel belts 11, 62, timing belts 12, 61) can be adjusted. Therefore, during use, each power transmission member (steel belts 11, 62, timing belts 12, 61) is easily disengaged from each transmission mechanism (flat pulleys 2, 54, timing pulleys 4, 52). Can be adjusted.

[0095] (Other Embodiments)

The above-described first embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto. Various modifications can be made without departing from the scope of the present invention.

For example, in the present embodiment, the force using a timing belt for the second power transmission member 12 and the third power transmission member 61 is not limited to this, and a chain or the like may be used.

[0096] In the first embodiment described above, the arms 50 and 100 are provided with the ribs 219 and 210. However, the ribs are not limited to the shape of the ribs, and the load is not so large. May not be provided.

In the first embodiment, the first to fourth connecting portions 20, 25, 70, 75 are provided to adjust the tension of the first connecting means 10 and the second connecting means 60. Instead of using each connecting portion, an idler pulley may be provided on the steel belts 11 and 62 side to adjust the tension. When an idler is provided, the angle of the steel belts 11 and 62 in contact with the first flat pulley 2 and the fourth flat pulley 54 is increased to increase the first flat pulley 2 and the fourth flat pulley. The rotation angle of the pulley 54 increases and the arm transfer distance increases.

Furthermore, in the first embodiment described above, the motor 150 is provided in the vicinity of the second timing pulley 4 of the first arm 50. However, the present invention is not limited to this, and the motor 150 is incorporated in the robot body. Also good. In this case, the first arm 50 is driven by the motor 150 to transmit power from the first flat pulley 2 to the second timing pulley 4, the third timing pulley 52, and the fourth flat pulley 54. Alternatively, the motor 150 may be provided on the second arm 100 and the fourth flat pulley 54 may be driven. In this case, power is transmitted from the fourth flat pulley 54 to the third timing pulley 52, the second timing pulley 4, and the first flat pulley 2.

[0099] In the first embodiment, the second connecting portion 25 and the fourth connecting portion 75 are fixed-side connecting portions that do not have an adjustment function, but the first connecting portion 20 and the third connecting portion 75 are not provided. Similar to the connecting part 70, it may be an adjusting side connecting part having a tension adjusting function.

[0100] (Second embodiment)

Hereinafter, the best second embodiment for carrying out the present invention will be described with reference to the drawings. The robot arm of the present invention is not limited to the following description and drawings as long as it has the technical features.

[0101] (Robot arm) FIG. 8 is a plan view (A) and an AA sectional view (B) showing an example of the robot arm of the present invention. 9 is a plan view (A) and BB cross-sectional view (B) showing the internal structure of the first arm shown in FIG. 8, and FIG. 10 is a plan view showing the internal structure of the second arm shown in FIG. Figure (A) and CC cross section (C).

[0102] The robot arm 1010 includes a first arm 1020 rotatably attached to the base 1200 of the robot body via the first transmission mechanism 1021, and a second transmission mechanism 1022 at the tip of the first arm 1020. A work arm (working means) 1050 that is rotatably attached via a first connection mechanism 1021 and a first connection means 1023 that connects the first transmission mechanism 1021 and the second transmission mechanism 1022 to transmit power. . The robot arm 1010 is characterized in that the first connecting means 1023 has a fluororubber force.

[0103] The working arm (working means) 1050 is fixed to the second transmission mechanism 1022 and is rotatable with respect to the first arm 1010. The second arm 1050 and the second transmission mechanism 1022 are concentric with the first arm. A third transmission mechanism 1031 fixed to the arm 1020 and a node arm 1040 rotatably attached to the tip of the second arm 1030 via a fourth transmission mechanism 1032 are configured. Further, the robot arm 1010 connects the first transmission mechanism 1021 and the second transmission mechanism 1022 to transmit power, and connects the third transmission mechanism 1031 and the fourth transmission mechanism 1032 to transmit power. Second connection means 1033 for transmission.

It should be noted that the first transmission mechanism 1 021 is “first pulley 1021” and the second transmission mechanism 1022 is “second pulley” so that the force of the second embodiment illustrated in FIGS. `` 1022 '', the third transmission mechanism 1031 is `` third pulley 1031 '', the fourth transmission mechanism 1032 is `` fourth pulley 1032 '', the first connecting means 1023 is `` first belt 1023 '', and the second connecting means 1033 is "Second belt 1033"

[0105] (First arm)

As shown in FIGS. 8 and 9, a first pulley 1021 force is provided on the robot body side of the first arm 1020, and the first pulley 1021 is fixed to a shaft extending from the base 1200 of the robot body. Yes. On the other hand, a second pulley 1022 is provided on the work arm side of the first arm 1020. The diameter R1 of the first pulley 1021 is larger than the diameter R2 of the second pulley 1022, and the relationship is R1: R2 = 2: 1. The second pulley 1022 of the first arm 1020 The tube) is connected concentrically with the third pulley 1031 of the second arm 1050 by 1024, and as a result, the two arms operate so as to be interlocked.

[0106] The first belt 1023 is made of fluororubber. A belt with fluororubber strength has less adverse effects on the reduced-pressure atmosphere with less gas generation and dust generation in a reduced-pressure atmosphere compared to the conventional black-prene belt, nitrile rubber belt, urethane rubber belt, and the like. As a result, when the robot arm 1010 is used in a reduced-pressure atmosphere as in a semiconductor device manufacturing process, the inside of the vacuum chamber can be quickly reduced to a predetermined pressure, thereby improving the overall throughput. Can do. The type of the first belt 1023 is not particularly limited, but in the present embodiment, it is constituted by a toothed belt (timing belt) as shown. Note that when a belt other than a toothed belt, for example, a flat belt is used, the types of the first pulley 1021 and the second pulley 1022 are appropriately selected according to the type of the first belt 1023. Therefore, a flat pulley is used.

[0107] To make the first belt 1023 hung between the first pulley 1021 and the second pulley 1022 have an appropriate tension, as shown in FIG. 1026 is preferably provided. The idler pulley 1026 is provided with a mechanism that can be finely adjusted. The idler pulley 1026 adjusts the tension of the first belt 1023 and adjusts the contact angle between the first pulley 1021 and the first belt 1023. Can be larger.

[0108] The inside of the first arm 1020 preferably has a rib 1025 as shown in FIG. The rib 1025 acts to increase the rigidity of the first arm 1020 and suppress deformation. By providing such a rib 1025, the thickness of the first arm 1020 can be reduced to reduce the weight.

[0109] The rib 1025 is formed with a through hole 1029 leading to the base end of the first arm 1020. The hole 1029 forms a passage through which the air in the first arm 1020 is extracted from the base end of the first arm 1020 to the outside. Since the robot arm 1010 has such a hole 1029, when the robot arm 1010 is exposed to a reduced pressure atmosphere, the air in the first arm 1020 passes through the hole 1029 and the proximal end force of the first arm 1020 is also transferred to the outside. It will be easily removed. Since the first arm 1020 uses a first belt that also has fluororubber power, The internal air is air with less dust and the like, but since such air can be easily extracted, the time to reach a predetermined pressure in a reduced pressure atmosphere can be shortened compared to the conventional one. The base end portion of the first arm 1020 is the base 1200 side of the robot body, and in this application, the base end portion is a portion on the shaft 1011 that rotates the first pulley 1021.

[0110] As shown in FIG. 8 (A), on the shaft 1011 that rotates the first pulley 1021 at the base end of the first arm 1020, there is an opening 1028 that allows the air in the arm to escape to the outside. A filter 1060 is attached to the opening 1028. FIG. 11 is a schematic explanatory view showing an example of a mode in which the filter is attached to the first arm. (A) is a plan view, (B) is a cross-sectional view, and (C) is a bottom view. The filter is not limited to the example of FIG.

[0111] Force that can use various types of filter 1060 Select the medium force of various filters depending on the usage environment of robot arm 1010, for example, the degree of required decompression and the degree of dust to be removed. Can do. As an example, a commercial filter having a nominal pore size of about 0.5 μm, such as PTFE (polytetrafluoroethylene), can be exemplified. Specific examples of the sales filter include, but are not limited to, a florina membrane filter (manufacturer: MILLIPORE, model number: FHLP 0470).

[0112] The filter shape is usually processed into a disk shape. As shown in Fig. 11, a filter 1060 having a disk shape is mounted from above and below with disk-shaped members 1062, 1063. For example, a method of attaching the sandwiched filter structure 1061 to the casing of the first arm 1020 can be given. In the example of FIG. 11, a small hole 1062a is formed in the upper member 1062, and a slightly larger hole 1063a is formed in the lower member 1063, and both the members are positioned so that the positions of the holes substantially coincide with each other. Thread together with screws 1064. Such a filter structure 1061 is attached by screwing the periphery of the upper member 1062 having a larger outer diameter and the housing of the first arm 1020. Reference numeral 1065 denotes a screw.

[0113] As another mounting method, for example, a disk-shaped filter is disposed between a ring groove provided around the opening 1028 having a circular force and the ring member having the same shape, and the ring member is moved upward. A method of attaching the filter to the opening by pressing and fitting in the ring groove can also be exemplified. Other mounting methods may be used. [0114] By adopting such a configuration, for example, even when dust or the like is generated by the rotation operation of the belt and the pulley in the arm, the generated dust or the like is filtered by the filter 1060 attached to the opening. Captured. As a result, the environment in the preliminary decompression chamber (load lock chamber), which is the movement space of the robot arm 1010, is made favorable, and a rapid decompression atmosphere can be achieved.

[0115] (Working arm)

As shown in FIG. 10, the working arm (working means) 1050 is fixed to the second pulley 1022 and rotatable with respect to the first arm 1020, and the second arm 1030 is concentric with the second pulley 1022. A third pulley 1031 fixed to one arm 1020; a hand (arm) 1040 rotatably attached to the tip of the second arm 1030 via a fourth pulley 1032; a third pulley 1031 and a fourth pulley A second belt 1033 for transmitting power by connecting 1032 is provided.

As shown in FIG. 10, the second belt 1033 includes a fluororubber timing belt 1036, which is a power transmission member that transmits and receives power from the third pulley or power to the third pulley 1031, and a fourth belt. The steel belt 1037 is a power transmission member that transmits and receives power from the pulley 1032 or power to the fourth pulley 1032 and a connecting portion 1070 that connects these belts 1036 and 1037.

As shown in FIGS. 8 and 10, a third pulley 1031 is provided on the base side (first arm 1020 side) of the second arm 1030, and the third pulley 1031 is It is connected concentrically with the second pulley 1022 of one arm 1 020, and as a result, both arms operate so as to interlock. On the other hand, a fourth pulley 1032 force S is provided on the distal end side (node (arm) 1040 side) of the second arm 1030, and the fourth pulley 1032 is connected to the hand (arm) 1040 by the connecting shaft 34. As a result, both arms operate so as to be interlocked. The diameter R 3 of the third pulley 1031 is smaller than the diameter R 4 of the fourth pulley 1032, and the relationship is R 3: R 4 = 1: 2.

As shown in FIG. 8, the hand (arm) 1040 is an arm for transporting a workpiece, and is attached to the fourth pulley 1032 so as to be rotatable together.

[0119] The second belt 1033 is a belt that transmits power by connecting the third pulley 1031 and the fourth pulley 1032. In the present embodiment, two types of belts are connected as shown in FIG. A high-burd belt is used. Hybrid belts depend on their intended use and conditions. For example, the belt may be a combination of two types of belts with one side being a toothed belt (timing belt) and the other side being a flat belt. It is possible to combine two types of belts with different strengths with the other side as a normal strength belt and the other side as a high strength belt, and both belt types and strengths are different. It may be configured as.

[0120] The second belt 1033 shown in FIG. 10 includes a fluororubber toothed belt 1036 (timing belt) for transferring power from the third pulley 1031 or power to the third pulley 1031, and a fourth pulley 1032. This is a hybrid belt that is combined with a flat steel belt 1037 that transmits and receives power from the pulley or power to the fourth pulley 1032. The fluororubber toothed belt 1036 and the steel flat belt 1037 are connected by a connecting portion 1070. Depending on the type of the second belt 1033, the types of the third pulley 1031 and the fourth pulley 1032 are appropriately selected. In the case of the hybrid belt as shown, the third pulley 1 031 is A timing pulley having a tooth portion corresponding to the toothed belt on the outer peripheral surface is used, and the fourth pulley 1032 is a flat pulley corresponding to the flat belt.

[0121] The steel flat belt 1037 is a belt excellent in strength and toughness, and is wound around the fourth pulley 1032. The intermediate position of the entire length is fixed on the outer peripheral surface of the fourth pulley 1032 with a plurality of screws 1042, as shown in FIG. Both ends of this steel flat belt 1037 are fixed to a connecting portion 1070, respectively, and are integrally formed with a fluororubber toothed benolet 1036.

[0122] The connecting portion 1070 has a mechanism for connecting a toothed belt 1036 made of fluoro rubber and a flat belt 1037 made of steel and adjusting the distance between them. In the example of FIG. 10, both of the pair of connecting portions have an adjustable mechanism. However, only one of the connecting portions can be adjusted, and the other connecting portion has no adjustment function. There may be.

FIG. 12 is a schematic configuration diagram showing an example of the connecting portion, and FIG. 13 is a schematic configuration diagram showing another example of the connecting portion. The connecting part 1070a shown in Fig. 12 is mainly composed of plates 1043, 1044, 1045, 1049 for fixing the toothed belt 1036 and the flat belt 10 037, and adjusting screws 1046 for adjusting the tension of the belt. As! / Speak. As the plate cages 1043, 1044, 1045, 1049, metal plates made of steel or aluminum are preferably used. [0124] The plate 1045 has a groove 1047 on the surface of the toothed belt 1036 side. The groove portion 10 047 is formed so as to mate with the tooth surface of the toothed belt 1036. The toothed belt 1 036 is sandwiched between the plate 1045 and the plate 1043 and fixed with a plurality of screws 1048.

On the other hand, on the flat belt 1037 side of the plate 1045, a long hole 1052 is formed along the longitudinal direction through which one or two or more screws 1051 pass, and the long hole 1052 and the screw 1051 form a plate. The tension of the second belt 1033 can be adjusted by adjusting the overlap of 1044 and the plate 1045. The steel flat belt 1037 is fixed to the plate 1044 with a shim 1049 with screws 1053. The shim 1049 adjusts the height in the thickness direction between the toothed belt 1036 and the flat belt 1037 so that the distance of the center line C force between them is almost the same. The number of Sim 1049 is not limited. By making the position of the center line C substantially the same, the direction in which the tension acting on the hybrid belt (toothed belt 1036 and flat belt 1037) acts is almost the same, so the direction of tension and the direction in which the belt moves The directions are almost the same, and smooth belt transport can be performed.

[0126] Play 卜 1043, 1044 is raised to 佃 J opposite to each other, and 佃 1043a, 1044a force ^ is formed, and adjustment screws 1046 are formed on this rise part 1043a, 1044a It is screwed. This adjustment screw 1046 makes it possible to adjust the distance between the plates 1043 and 1044 and finely adjust the tension between the toothed belt 1036 and the flat belt 1037 adjusted using the long hole 1052 formed in the plate 1044. be able to.

FIG. 13 is an example of a connecting portion that does not have a tension adjusting mechanism. 13 includes plates 1054 and 1055 and a shim 1056 for fixing the toothed belt 1036 and the flat belt 1037. The connecting portion 1070b shown in FIG. As the plates 1054 and 1055 and shim 1056, a metal plate made of steel or aluminum is preferably used as described above.

[0128] The plate 1055 has a groove 1057 on the surface of the toothed belt 1036 side. The groove portion 1057 is formed in a form that meshes with the tooth surface of the toothed belt 1036. The toothed belt 1 036 is sandwiched between a plate 1054 and a plate 1055 and fixed with a plurality of screws 1058.

On the other hand, the flat belt 1037 side of the plate 1054 is fixed to the plate 1054 by a screw 1059 with a shim 1056 interposed therebetween. This shim 1056 has a toothed belt 103 as described above. The height of the belt 637 and the flat belt 1037 are adjusted so that the distance from the center line of the belt belt 1037 is almost the same. The number of shims 1056 is not limited.

[0130] The second arm 1030 having the second belt 1033 made of such a hybrid belt receives the rotation of the first arm 1020 and rotates in the clockwise direction or the counterclockwise direction. The third pulley 1031 and the fourth pulley 1032 are only rotated to a position where they do not come into contact with each other.

[0131] As shown in FIG. 10, it is preferable that the second arm 1030 also has a rib 1035 that is inside the first arm 1020. The rib 1035 acts to increase the rigidity of the second arm 1030 and suppress deformation. By providing such a rib 1035, the thickness of the second arm 1030 can be reduced and the weight can be reduced.

[0132] The rib 1035 is formed with a hole 1039 that communicates with the base end (the third pulley 1031 side) of the second arm 1030. The punch hole 1039 forms a passage through which the air in the second arm 1030 is extracted to the outside through the first arm 1020 as well as the base end force of the second arm 1030. Since the robot arm 1010 has such a hole 1039, when the robot arm 1010 is exposed to a reduced pressure atmosphere, the air in the second arm 1030 passes through the hole 1039 from the base end of the second arm 1030. It enters into one arm 1020, and further passes through the first arm 1020 and is easily pulled out. The second arm 1030 also uses a toothed belt 1036 made of fluororubber for a part of it, so it is contained in comparison with the case of using a conventional black mouth plain belt, nitrile rubber belt, urethane rubber belt, etc. As a result of less generation of air, dust, etc., the air in the second arm 1030 can be easily extracted, so the time to reach a predetermined pressure in a reduced pressure atmosphere is shortened compared to the conventional one. be able to. The base end portion of the second arm 1030 is the first arm 1020 side, and in the present application, is a shaft portion that rotates the third pulley 1031.

[0133] As a path for guiding the air in the second arm 1030 into the first arm 1020, first, the air in the vicinity of the connecting shaft 1034 of the fourth pulley 1032 passes through the hole 1034a in the vicinity of the connecting shaft 1034. The rib 1035 reaches the rib 1035, the air inside the rib 1035 passes through the hole 1039 and reaches the vicinity of the third pulley 1031, and the air passes through the hole 1024a provided on the connecting shaft 1024 and is further formed on the first arm 1020. Guided into first arm 1020 through punched hole 1020a The By such a path, the air in the second arm 1030 easily enters the first arm 1020, and then passes through the hole 1029 in the first arm 1020 and is provided at the base end of the first arm 1020. For example, it goes out from the opening 1028 with the filter 1060. Since the robot arm 1010 also has such a configuration force, for example, even when dust or the like is generated due to the rotation of the belt and the pulley in the arm, the generated dust or the like is attached to the opening. Captured by filter 1060. As a result, the environment in the preliminary decompression chamber (load lock chamber), which is the movement space of the robot arm 1010, is made favorable, and a rapid decompression atmosphere can be achieved.

[0134] (Robot arm movement)

The operation of the robot arm 1010 will be described below. As shown in FIGS. 8 and 9, the robot arm 1010 is connected to the first pulley 1021 of the first arm 1020 with the shaft 1011 of the base 1200 of the robot body, and rotates to the first pulley 1021 by the rotation of the shaft 1011. Power is transmitted. The rotation control of the first pulley 1021 is performed by a control mechanism in the robot body that controls the rotation of the shaft 1011.

[0135] The rotation of the first pulley 1021 whose rotation is controlled is transmitted to the second pulley 1022 via the first belt 1023, and further, the third pulley 1031, the second benore 1033, the fourth pulley 1032, Transmitted in order of node (arm) 1040. As described above, the ratio of the diameters of the pulleys is such that the diameter R1 of the first pulley 1021 and the diameter R2 of the second pulley 1022 are in the relationship of R1: R2 = 2: 1, and the diameter of the third pulley 1031 R3 and the diameter of the fourth pulley 1032 R4 has the relationship R3: R4 = 1: 2, so the rotation angle ratio of the first pulley 1021, the second pulley 1022 (the third pulley 1031) and the fourth pulley 1032 is 1: 2: 1

Accordingly, the rotation angle ratio between the first pulley 1021 of the first arm 1020, the second pulley 1022 (the third pulley 1031 of the second arm 1030), and the fourth pulley 1032 of the second arm 1030 is 1: As shown in FIG. 14, the first arm 1021 is rotated by rotating the first pulley 1021, so that the state shown in FIG. 14 (A) is changed to FIG. 14 (B) or FIG. 14 (C). The force that changes the angle between the first arm 1020 and the second arm 1030 is connected to the center of the first pulley 1021 of the first arm 1020 and the center of the fourth pulley 1032 of the second arm 1030. The node (arm) 1040 moves on the straight line while keeping the direction constant. [0137] (Robot)

FIG. 15 is a schematic plan view showing an example in which a robot having a robot arm of the present invention is used in a semiconductor manufacturing process. The apparatus shown in FIG. 15 is a processing aggregation apparatus 1071 in a semiconductor manufacturing process. In the center of the apparatus, there is a load lock chamber 1073 that can be depressurized, and a robot 1072 equipped with the robot arm 1010 of the present invention is arranged.

[0138] Around the load lock chamber 1073, a processing chamber divided into eight in the circumferential direction is arranged. Among these, the four chambers 1074A, 1074B, 1074C, and 1074D are vacuum processing chambers, the two chambers 1075 and 1076 are processing chambers for heating and cooling, and the two chambers 1077A and 1077B. The chamber is a storage chamber for transferring wafers from outside the collective processing chamber. Reference numeral 1079 is a robot for delivering a wafer from outside the collective processing chamber, and reference numeral 1078 is a wafer. In these collective processing chambers, gate vents are provided at the entrances of the chambers, and the gates are opened and closed to enter and exit the processing chamber. The gate ben is formed in a wide rectangular shape with a low height so as to allow the wafer to be taken in and out.

[0139] The robot 1072 having the robot arm 1010 is arranged in such a collective processing chamber. However, the robot arm 1010 and the robot 1072 have less adverse effects on the reduced-pressure atmosphere with less gas generation or dust generation in the reduced-pressure atmosphere. Therefore, the environment in the load lock chamber 1073 (preliminary decompression chamber), which is the moving space of the robot arm 1010, can be made favorable, and a rapid decompression atmosphere can be achieved. Furthermore, even if the inside of the processing chambers 1074A to 1074D reaches the same pressure as that in the load lock chamber 1073 by opening the gate vent, each processing chamber can be quickly reduced to a predetermined pressure by the subsequent decompression. Overall throughput can be improved. Furthermore, since the robot arm 1010 has a reduced thickness in the height direction, it is possible to move forward and backward with respect to a rectangular gate ben with a low height.

[0140] Furthermore, the robot arm 1010 of the present invention moves on the straight line connecting the centers of the first pulley 1021 and the fourth pulley 1032 while the hand arm 1040 moves in a constant direction, so that the robot arm 1010 is placed on the hand arm 1040. The transferred wafer can be stably transferred with high positional accuracy.

[0141] The robot arm of the present invention and the robot equipped with the robot arm have been described above. As described above, the above-described embodiment is an example of a preferred embodiment of the present invention, and the present invention is not limited to this, and various modifications can be made without departing from the scope of the present invention.

Claims

The scope of the claims

[1] a first arm rotatably attached to the robot body via a first transmission mechanism, and a working means rotatably attached to the tip of the first arm via a second transmission mechanism; And a first arm for connecting the first transmission mechanism and the second transmission mechanism to transmit power to the first arm. A first power transmission member that is a first rigid member force that transmits and receives power of power or power to the first transmission mechanism, and power of the second transmission mechanism force or power to the second transmission mechanism The second power transmission member, and the first power transmission member and the second power transmission member are connected to each other. The diameter of the first transmission mechanism is the same as the diameter of the second transmission mechanism And also large equipment, robotic arm length of the second power transmission member, wherein the short, than the length of the first power transmission member

[2] The working means is a second arm fixed to the second transmission mechanism and rotatable with respect to the first arm, and a second arm fixed to the first arm concentrically with the second transmission mechanism. A third transmission mechanism and a hand pivotally attached to the tip of the second arm via a fourth transmission mechanism, and the third transmission mechanism and the fourth transmission mechanism are connected to each other. A third rigid member that includes second connecting means for transmitting power, wherein the second connecting means transmits or receives power from the fourth transmission mechanism or power to the fourth transmission mechanism. A fourth power transmission member, a third power transmission member for transmitting / receiving power from the third transmission mechanism or power to the third transmission mechanism, the third power transmission member and the fourth power transmission member A third connecting part that also serves as a fourth rigid member And the fourth connecting portion, the diameter of the fourth transmission mechanism is larger than the diameter of the third transmission mechanism, and the length of the third power transmission member is the fourth power transmission 2. The robot according to claim 1, wherein the rotation angle ratio of the first transmission mechanism, the second transmission mechanism, and the fourth transmission mechanism is 1: 2: 1, which is shorter than the length of the member. The

3. The robot arm according to claim 1 or 2, wherein the tension of the power transmission member is adjustable at least in the first connecting part and the third connecting part.

[4] In the first connecting portion and the second connecting portion, the center line position in the thickness direction of the first power transmission member and the center line position in the thickness direction of the second power transmission member are substantially the same position. The robot arm according to any one of claims 1 to 3, characterized in that the robot arms are connected as described above.

[5] In the third connecting portion and the fourth connecting portion, the center line position in the thickness direction of the third power transmission member and the center line position in the thickness direction of the fourth power transmission member are substantially the same position. The robot arm according to claim 2 or 3, wherein the robot arms are connected in the manner described above.

[6] A first arm rotatably attached to the robot body via the first transmission mechanism, and a work arm rotatably attached to the tip of the first arm via the second transmission mechanism And a first connecting means for connecting the first transmission mechanism and the second transmission mechanism to transmit the dynamic force, wherein the first connecting means also has a fluororubber force. Characteristic robot arm

[7] The working arm is fixed to the second transmission mechanism and is rotatable with respect to the first arm, and is fixed to the first arm concentrically with the second transmission mechanism. A third transmission mechanism, a hand arm pivotally attached to the tip of the second arm via a fourth transmission mechanism, and the third transmission mechanism and the fourth transmission mechanism to connect the power. A power transmission member comprising a fluororubber timing belt for transmitting power to the third transmission mechanism or to the third transmission mechanism. A power transmission member made of a steel belt that transmits and receives power from the fourth transmission mechanism or power to the fourth transmission mechanism, and a connecting portion that connects these power transmission members. The roboter according to claim 6, Beam

[8] The first arm inside the first arm and the second arm so that the air in the first arm and the second arm is extracted from the base end of the first arm to the outside. A mouth bot arm according to claim 6 or 7, characterized in that a punched hole leading to the base end of the mouth bot arm is provided.

[9] The base end of the first arm is provided with an opening for escaping air in the arm to the outside, and a filter is attached to the opening. Mentioned mouth bot arm [10] A robot comprising the robot arm according to any one of claims 1 to 9.