JPH1034585A - Robot arm drive mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce a gas release amount and to reduce dust in the case of driving an arm of a robot. SOLUTION: In this arm drive mechanism 32, a reinforcing plate 32 in one end of a second steel belt 30 is fixed to the periphery of a third pulley 28 by a set screw 36. A reinforcing plate 33 in a central part of the second steel belt 30 is fixed to the periphery of a fourth pulley 29 by a set screw 37. A reinforcing plate 34 in the other end of the second steel belt 30 is fixed to a periphery of the third pulley 28 by a set screw 38 in an opposite side to a mounting position of the reinforcing plate 32. The second steel belt 30 is helically mounted so as to tilt (angle α relating to a horizontal line, and is diagonally wound to a periphery of the third/fourth pulley 28, 29. The reinforcing plate 32, 34 in both ends of the second steel belt 30 is fixed to be displaced in a height direction (pulley width direction) so as to be prevented from overlapping.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot arm drive mechanism, and more particularly to a robot arm drive mechanism configured to reduce dust generated by arm drive.

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing process,
Robots that transport liquid crystal glass or semiconductor wafers in a vacuum are used. This type of robot is configured to prevent the generation of dust as much as possible.

As a robot used in a semiconductor manufacturing apparatus or the like, for example, a base that stands upright, a first arm that extends horizontally from the base and is rotatably supported, A SCARA robot having a horizontal articulated structure including a second arm supported at the tip of one arm so as to be rotatable in the horizontal direction and a wrist supported at the tip of the second arm and holding a work is used. I have.

In this type of robot, a robot arm drive mechanism is used in which the rotational driving force of a motor is transmitted to an arm via a timing belt wound around a pulley provided on an arm shaft. Robots used in vacuum such as semiconductor manufacturing equipment are required to be clean in order to maintain product quality.
Specifically, it is as follows. (1) The amount of gas released in a vacuum is small (2) No dust is generated in a vacuum (3) A wide operating range in a narrow transfer chamber (4) The second inserted into the process chamber Arm tip is thin

[0005]

However, a timing belt made of synthetic resin (rubber, plastic, glass fiber, etc.) is used for a robot working in a high vacuum, such as a robot used in the above-mentioned semiconductor manufacturing apparatus. In this case, it takes time to obtain a degree of vacuum because the timing belt emits gas.If the amount of gas emitted from the timing belt is higher than the evacuation speed of the vacuum pump, the vacuum belt is used. However, there is a problem that the target vacuum degree cannot be reached.

[0006] This problem can be solved by replacing the vacuum pump with one having a higher pumping speed, but in this case, the cost is increased. Further, in the configuration using the timing belt, there is a problem that an error occurs in the transmission angle because the timing belt is stretched by the tension of the belt and the load during operation.

Accordingly, an object of the present invention is to provide a robot arm drive mechanism which has solved the above-mentioned problems.

[0008]

In order to solve the above problems, the present invention has the following features. Claim 1
In a robot arm driving mechanism for driving a robot arm at a predetermined angle, a pulley is provided on each of the arm shafts arranged in parallel, a metal belt is wound between the pulleys, and a part of the metal belt is provided. Is fixed to the pulley.

Therefore, according to the first aspect, it is possible to reduce the outgassing by using the metal belt, and to obtain a high vacuum in a short time. In addition, since the metal belt drive causes less slippage with the pulley, dust generation can be reduced. The invention according to claim 2 is the robot arm driving mechanism according to claim 1, wherein the metal belt has a center portion fixed to one pulley and both end portions fixed to the other pulley. It is a feature.

Therefore, according to the second aspect, the same effect as in the first aspect can be obtained by fixing the central portion of the metal belt to one pulley and fixing both end portions to the other pulley. The invention according to claim 3 is the invention according to claim 1.
The robot arm driving mechanism according to claim 1, wherein a first metal belt is wound around one side between the pulleys, and a second metal belt is wound around the other side between the pulleys. One end of the metal belt is fixed to one pulley and the first
While fixing the other end of the metal belt to the other pulley,
Fix one end of the second metal belt to the other pulley,
The other end of the metal belt is fixed to one pulley.

Therefore, according to the third aspect, the same effect as in the first aspect can be obtained by connecting two short metal belts. The invention according to claim 4 is the invention according to claim 1.
The robot arm driving mechanism according to claim 1, wherein the diameter ratio of the pulley is 1: 2, and the metal belt wound around the small-diameter pulley having a small diameter is fixed with both end portions shifted in the pulley width direction. Things.

Therefore, according to claim 4, according to claim 1,
The same effect as described above can be obtained, and the metal belt can be attached to the small-diameter pulley having a small diameter so that both ends of the metal belt do not overlap. According to a fifth aspect of the present invention, there is provided the robot arm driving mechanism according to the fourth aspect, wherein the height of the large-diameter pulley having a large diameter is smaller than the height of the other end.

Therefore, according to claim 5, according to claim 4,
The same effect as described above can be obtained, and the arm can be made thinner. The invention according to claim 6 is the robot arm drive mechanism according to claim 1, wherein both ends of the metal belt are wound around the outer periphery of the pulley by 180 ° or more, and are fixed by being shifted in the pulley width direction. It is characterized by having been done.

Therefore, according to claim 6, according to claim 1,
The same effect as described above can be obtained, and the turning angle of the arm can be ensured.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a side view of a transfer robot to which an embodiment of a robot arm driving mechanism according to the present invention is applied.
FIG. 2 is a plan view of the transfer robot.

The transfer robot 1 is, for example, a robot having a horizontal articulated structure for transferring a semiconductor wafer in a vacuum. The transfer robot 1 includes a base 2 having a built-in drive motor and a speed reducer (both not shown);
A first arm 4 rotatably supported in a horizontal direction above the flange 3;
The second end of the arm 4 is rotatably supported in the horizontal direction.
An arm 5 and a wrist 6 supported at the tip of the second arm 5
It is composed of

The flange 3 of the transfer robot 1 is
It is installed on the floor of the vacuum chamber. An O-ring (not shown) for sealing is provided on the lower surface of the flange 3 to prevent leakage due to a pressure difference between the vacuum above the flange 3 and the atmospheric pressure below the flange 3.

In the case of this type of transfer robot 1, it is controlled in a cylindrical coordinate system (R-θ), and the θ drive shaft and the R drive shaft are two-axis magnetic fluid seals ( (Not shown) into the vacuum and the first vacuum
The arm 4, the second arm 5, and the wrist 6 are driven.

Here, the rotation of the output shaft of the θ-axis motor (not shown) is 1/100 by a θ-axis speed reducer (not shown).
Reduced to ~ 1/200, θ rotation axis (first arm axis) 7
Is combined with An R-axis motor and an R-axis speed reducer (both not shown) are provided on the θ rotation shaft 7, and the rotation of the output shaft of the R-axis motor (not shown) is controlled by an R-axis speed reducer (not shown). ), The speed is reduced to 1/100 to 1/200 and coupled to the R drive shaft. The rotation angle of the R drive shaft is θ
It is transmitted as the rotation angle + R rotation angle.

The first arm 4 has a θ rotating shaft 7 on the flange 3.
The second arm 5 is rotatably supported by a bearing (not shown) such that the second arm 5 rotates about a joint axis (second arm axis) 8 at the tip of the first arm 4. (Not shown) rotatably supported. The wrist 6 is rotatably supported by a bearing (not shown) so as to rotate around a wrist rotation shaft (third arm shaft) 9 at the tip of the second arm 5.

The work 10 is placed on the wrist 6 by its own weight, and is conveyed by a frictional force with the wrist 6. still,
The inter-axis distance between the θ rotation axis 7 and the joint axis 8, the inter-axis distance between the joint axis 8 and the wrist rotation axis 9, and the inter-axis distance between the wrist rotation axis 9 and the work center axis 11 are respectively the same distance L. Is set.

FIG. 3 is a plan view showing a configuration of a semiconductor manufacturing apparatus 12 having a cluster configuration in which the transfer robot 1 is installed. The semiconductor manufacturing apparatus 12 has a load lock chamber 14 for loading or unloading a wafer as a work 10 around a transfer chamber 13 and process processing chambers 15 to 17 for processing a wafer radially.

In this embodiment, the load lock chamber 14 and the process chambers 15 to 17 are arranged in four directions. However, the present invention is not limited to this. For example, the load lock chambers may be arranged in six directions. Further, the layout of the load lock chamber 14 and the process processing chambers 15 to 17 is not necessarily at equal intervals, and is arranged according to the convenience of each processing apparatus.

The transfer chamber 13, load lock chamber 14 and process the processing chamber 15 to 17, each separate vacuum pump optionally is evacuated by (not shown) ^10-2 to ^-8
The vacuum is set to about torr. Further, the diameter D _T of the transfer chamber 13 and the load lock chamber 14,
The diameter D _P of 5 to 17 can reduce the overall footprint of the device by small and shorten the evacuation time, miniaturization of the exhaust system, and it is possible to reduce the driving power.

The transfer robot 1 is installed at the center of the transfer chamber 13, and gate valves 18 to 22 are provided between the transfer chamber 13 and each of the chambers 14 to 17, respectively. Therefore, the transfer robot 1 has the openings 18 a to 2 of the gate valves 18 to 22.
2a, the work (wafer) 10 is transferred to each chamber 14-1.
7. Carry in and out.

As shown in FIG. 4, each of the gate valves 18 to 22 has a rectangular opening 18a having a wide width and a narrow length.
The plate-shaped valve elements 18b to 22b are moved up and down by a control signal from a control device (not shown) to open and close the openings 18a to 22a. The gate valves 18 and 19 of the load lock chamber 14 are opened and closed according to the loading and unloading of the work (wafer) 10 in order to prevent the surrounding atmosphere from flowing directly into the transfer chamber 13. The opening / closing operation timing is shifted so that the other is opened / closed after a predetermined time.

Here, the transfer robot 1 moves the work (wafer) 1 from the load lock chamber 14 to the process processing chamber 15.
The transfer operation of the transfer robot 1 will be described with reference to FIGS. The origin direction of the θ coordinate (θ = 0 °) is the direction of the center of the load lock chamber 14, and the position on the R coordinate is the center 11 of the work 10 imaginary, and the θ rotation axis 7 is R = 0. The coordinates of the center of 14 are (R, θ) = (3L, 0), and the coordinates of the center of the processing chamber 15 are (3L, 90).

The operation of the transfer robot 1 can be classified as follows. Move to R = 0 (only R-axis operates, θ is undefined). Move to (0,0) (only the θ axis is operated). Move to (3L, 0) (only the R axis operates).

A work (wafer) 10 is received. Move to (0,0) (only R-axis operates). Move to (0, 90) (only the θ axis operates). Move to (3L, 90) (R-axis only operation).

The work (wafer) 10 is delivered. Move to (0, 90) (only the R axis operates). As described above, the features of the operation of the transfer robot 1 include:
There is a point that the R axis and the θ axis do not operate at the same time, and a point that the R axis is located at the retreat end (R = 0) during the θ axis operation.

Further, the center 11 of the work 10 is
Is at the θ-axis rotation center, the inertial force of θ rotation of the work 10 is minimized. This is because the transfer robot 1 having no suction means for sucking the work 10 in a vacuum on the wrist 6 has a configuration in which the work 10 is prevented from falling off by the frictional force between the wrist 6 and the work 10. It is important that the inertial force of 10 θ rotations be minimal.

FIG. 5 is a diagram for explaining the operation of the coordinate system, and FIG. 6 is a diagram showing one operation state of the coordinate system. Cylindrical coordinate system (R-θ)
Is on the θ rotation axis 7. The position of the wrist rotation axis 9 is defined by R-θ coordinates. The θ angle is the direction of the wrist rotation axis 9, and the R coordinate is the moving distance of the wrist rotation axis 9 in the radial direction, and represents the rotation angle of the first arm 4.

The rotation angle of the wrist 6 is adjusted so as to always face the direction of θ = 0 °. The center 11 of the work 10 placed on the wrist 6 is at the position indicated by the tip of the arrow in FIG. Further, the radial position from the origin O at that time is indicated by a dashed line. Therefore, the work 10 placed on the wrist 6 is carried straight in or out of the openings 18a to 22a of the gate valves 18 to 22 as indicated by the arrow of the wrist 6 in FIG.

The retreat end on the R coordinate axis is limited to the diameter D _T of the transfer chamber 13, and the R rotation angle of the first arm 4 is −
At 30 °, the first arm 4, the second arm 5, and the neck 6 form an equilateral triangle. At that time, the center 11 of the work 10
Is on the origin O (θ rotation axis 7).

When the rotation angle of the first arm 4 is 90 °, the first arm 4, the second arm 5, and the neck 6 are θ = 0 °.
Work 1 that is straight in the direction and is the forward end of the R coordinate axis
The center 11 of 0 is located 3 L from the origin O (θ rotation axis 7). FIG. 7 is a plan view of an arm drive mechanism that drives each arm.

The first arm driving mechanism 23 provided inside the first arm 4 includes a first pulley 24 on the driving side, a second pulley 25 on the driven side, a first pulley 24 disposed in parallel with the first pulley 24, and a second pulley 24. And a second steel belt (metal belt) 26 wound around the second pulley 25.
The first steel belt 26 is made of stainless steel (SUS304) having high mechanical strength and corrosion resistance.

The first pulley 24 is connected to the θ rotation shaft 7 via a magnetic fluid seal (not shown) in the flange 3,
The center coincides with the θ rotation axis 7 and the diameter is D. The second pulley 25 has a diameter of D / 2 and a diameter of 1 / of the first pulley 24.
2 and is coupled to the second arm 5 about the joint shaft 8. The first steel belt 26 is connected to the first pulley 24 and the first steel belt 24.
Relative angle with arm 4 (R axis rotation angle = (R + θ)-
θ) is doubled and transmitted to the second pulley 25.

By configuring the first arm drive mechanism 23 in this manner, the relative angle between the first arm 4 and the second arm 5 becomes twice the R-axis rotation angle, and the wrist at the tip of the second arm 5 The unit 6 can move linearly on the R coordinate axis. The second arm driving mechanism 27 provided inside the second arm 5 includes a third pulley 28 on the driving side, a fourth pulley 29 on the driven side, and a third pulley 28 disposed in parallel with the fourth pulley 28. And a second steel belt (metal belt) 30 wound around the pulley 29. The second steel belt 30 is made of stainless steel (SUS304) having high mechanical strength and corrosion resistance.

The third pulley 28 has a diameter d and the first arm 4
And is provided on the joint shaft 8. 4th
The pulley 29 has a diameter of 2d and twice the diameter of the third pulley 28,
It rotates around the wrist axis 9. Therefore, the reduction ratio between the third pulley 28 and the fourth pulley 29 is set to 1: 2.
That is, the second steel belt 30 transmits the second pulley 29 to the fourth pulley 29 with the relative angle (twice the R-axis rotation angle) between the second arm 5 and the third pulley 28 set to １ ／.

By configuring the second arm drive mechanism 27 in this manner, the moving direction of the wrist 6 always coincides with the θ direction. That is, since the position in the rotation direction of the wrist 6 is always on the R coordinate axis at the distance L from the wrist axis 9, if the center 11 of the work 10 is on this point, the transfer robot 1 moves the work 10 within the operation range. At the position according to the R-θ coordinates.

Next, the structure of the second arm drive mechanism 27 will be described with reference to FIGS. 8 is a plan view of the second arm drive mechanism 27, FIG. 9 is a side view of the second arm drive mechanism 27, and FIG. 10 is a view showing the second steel belt 30 before attachment. Reinforcing plates 32 to 34 are fixed to both ends and the center of the second steel belt 30 for screwing by spot welding or laser welding 35 (indicated by X in FIG. 10).

As shown in FIGS. 8 and 9, the reinforcing plate 32 at one end of the second steel belt 30 is fixed to the outer periphery of the third pulley 28 by a set screw 36. Further, the reinforcing plate 33 attached to the central portion of the second steel belt 30 is fixed to the outer periphery of the fourth pulley 29 by a set screw 37.
Further, the reinforcing plate 34 at the other end of the second steel belt 30
Is fixed to the outer periphery of the third pulley 28 by a set screw 38 on the side opposite to the mounting position of the reinforcing plate 32.

The second steel belt 30 is spirally mounted so as to be inclined (angle α) with respect to a horizontal line.
It is obliquely wound around the outer periphery of the third pulley 28 and the fourth pulley 29. The reinforcing plates 32 and 34 at both ends of the second steel belt 30 are fixed to be shifted in the height direction (the pulley width direction) so as not to overlap.

Also, both ends of the second steel belt 30
Each is wound around the outer periphery of the third pulley 28 in a range of 180 °, and reinforcing plates 32 and 34 are fixed to the third pulley 28 on opposite sides. As described above, since the second steel belt 30 is obliquely wound around the pair of the third pulley 28 and the fourth pulley 29, the reinforcing plates 32 and 34 at both ends of the second steel belt 30 are arranged at 180 ° intervals. It can be fixed to the outer periphery of the third pulley 28, and when the third pulley 28 rotates clockwise, the set screw 36 is about to separate from the third pulley 28, or the set screw 38 is the second steel belt. It can rotate by more than 120 ° to a position where it contacts the 30. Also, when the third pulley 28 rotates counterclockwise, the third pulley 28 rotates
Can rotate more than °. Therefore, the third pulley 2
8 has a rotation angle range of 240 ° or more.
In addition, even if the winding angle is 180 ° or more, the rotation angle range of the third pulley 28 can be 240 ° or more.

As described above, in the second arm drive mechanism 27, the rotation angle of the third pulley 28 is set to be 240 ° or more in spite of the configuration in which the second steel belt 30 is wound around. be able to. In the fourth pulley 29, since the central portion of the second steel belt 30 is wound once, the height dimension can be made smaller than that of the third pulley 28 so that the upper end can be made lower. Therefore, the fourth pulley 29 can be driven without hindrance even on the arm tip side where the height is limited, and the tip end of the second arm 5 can be made thinner. As described above, when the work 10 is loaded and unloaded, the tip of the second arm 5 is thinner when passing through the openings 18a to 22a of the gate valves 18 to 22, so that the width in the height direction is narrow. The workpieces 10 placed on the wrist 6 can easily pass through the openings 18a to 22a.

Further, since the height of the third pulley 28 on the base end side is higher than that of the fourth pulley 29 on the front end side,
This is an advantageous configuration from the viewpoint of ensuring the strength of the arm 5.
Further, the second steel belt 30 wound around the fourth pulley 29 can increase the strength by increasing the width of the pulley.

In the second arm drive mechanism 27 having the above-described structure, the stainless steel second steel belt 30 is used instead of the synthetic resin timing belt that emits a large amount of gas. Emissions are reduced,
In addition, the amount of dust generated is also reduced. Therefore, the degree of vacuum in each of the processing chambers 15 to 17 can be increased without increasing the evacuation speed by a vacuum pump (not shown).

Further, since the timing belt does not stretch due to belt tension and load during operation as in the case of the timing belt, an angle error of the wrist 6 does not occur.
The loading and unloading operations of the work 10 can be performed accurately while the openings 18a to 22a of the openings 8 to 22 are open.

FIG. 11 is a plan view of a modification of the second arm drive mechanism, FIG. 12 is a side view of a modification of the second arm drive mechanism,
FIG. 13 is a diagram showing the steel belt before attachment. Second
In the arm driving mechanism 41, a stainless steel belt (first metal belt) 42 is wound around one side of the third pulley 28 and one side of the fourth pulley 29, A steel belt (second metal belt) 43 made of stainless steel is provided between the first side and the other side of the fourth pulley 29.
Is wrapped around. That is, steel belt 4
Reference numerals 2 and 43 have a length that is approximately half of the entire length of the second steel belt 30 described above, and the belt width is wide.

At both ends of the steel belts 42, 43, reinforcing plates 44, 45 for screwing are fixed by spot welding or laser welding 46 (indicated by X in FIG. 13). As shown in FIGS. 11 and 12, the reinforcing plate 44 at one end of the steel belt 42 is
It is fixed to the outer periphery of the pulley 28. Further, the reinforcing plate 45 attached to the other ends of the steel belts 42 and 43 is fixed to the outer periphery of the fourth pulley 29 by the same set screw 37. Further, the reinforcing plate 44 at one end of the steel belt 43
Is fixed to the outer periphery on the opposite side of the third pulley 28 by a set screw 38.

The steel belts 42 and 43 are spirally mounted so as to be inclined (angle α) with respect to a horizontal line, and are obliquely wound around the outer circumferences of the third pulley 28 and the fourth pulley 29. . And steel belts 42 and 43
Are fixed in such a manner that they are shifted in the height direction (the pulley width direction) so as not to overlap with each other.

One end of each of the steel belts 42 and 43 is wound around the outer periphery of the third pulley 28 at an angle of 180 °, and the reinforcing plate 44 is fixed to the third pulley 28 on opposite sides. ing. In addition, steel belt 4
The winding angle of 2, 43 may be 180 ° or more.

In this way, the two steel belts 42, 4
3 is obliquely wound around the outer periphery of the pair of third pulley 28 and fourth pulley 29, so that the second steel belt 30
Can be fixed to the outer periphery of the third pulley 28 at 180 ° intervals, and when the third pulley 28 rotates clockwise, the set screw 36
Can be rotated by 120 ° or more to a position where the set screw 38 is to be separated or a position where the set screw 38 contacts the second steel belt 30.

Also, when the third pulley 28 rotates counterclockwise, the third pulley 28 can rotate by 120 ° or more in the same manner as described above. Therefore, the third pulley 28 has a rotation angle range of 240 ° or more. Thus, in the second arm drive mechanism 27, the two steel belts 42, 43
Can be set so that the rotation angle of the third pulley 28 is equal to or greater than 240 °.

In the above embodiment, a stainless steel belt is used. However, the present invention is not limited to this. For example, another metal belt such as carbon tool steel (SK5), copper, aluminum, or nickel is wound around a pulley. And fix it. Further, in the above embodiment, the transfer robot used in the semiconductor manufacturing apparatus has been described as an example. However, the present invention is not limited to this, and it is needless to say that the present invention can be applied to a robot used in another apparatus.

[0056]

As described above, according to the first aspect, since the metal belt is wound between the pulleys and a part of the metal belt is fixed to the pulley, it is possible to reduce the emission gas using the metal belt. A high vacuum can be obtained in a short time. In addition, since the metal belt drive causes less slippage with the pulley, dust generation can be reduced. Moreover, in the case of a metal belt, the baking temperature (15
0 to 200 ° C.), and continuous operation for a long time becomes possible. Further, even if a high belt tension acts on the metal belt, the amount of elongation (change with time) is small, so that an angle transmission error of the arm can be prevented.

According to the second aspect, the central portion of the metal belt is fixed to one pulley, and both ends are fixed to the other pulley. According to claim 3, one end of the first metal belt is fixed to one pulley, the other end of the first metal belt is fixed to the other pulley, and one end of the second metal belt is fixed to the other pulley. Since the second metal belt is fixed to the pulley and the other end of the second metal belt is fixed to one pulley, by connecting two short metal belts, it is possible to use a wide metal belt to increase the strength and to increase the strength. The same effect as in the item 1 can be obtained.

According to the fourth aspect of the present invention, the diameter ratio of the pulley is set to 1: 2, and the metal belt wound around the small diameter pulley having a small diameter is fixed with both end portions shifted in the pulley width direction. The same effect as 1 can be obtained, and the metal belt can be attached to the pulley having a smaller diameter so that both ends of the metal belt do not overlap, and the rotation angle of the pulley can be prevented from being limited by the metal belt and being narrowed, A sufficient rotation angle of the pulley can be provided so that the arm tip can move linearly.

According to the fifth aspect, since the height of the large-diameter pulley having a large diameter is made lower than the height of the other end, the same effect as that of the third aspect is obtained, and the arm tip can be made thinner. For example, it is possible to easily pass through an opening of a gate valve having a small height.

According to the sixth aspect, the metal belt is
Both ends are wrapped around the outer circumference of the pulley by 180 ° or more,
The above-mentioned claim 1 wherein the fixing member is fixed while being shifted in the pulley width direction.
The same effect as described above can be obtained, and the turning angle of the arm can be ensured.

[Brief description of the drawings]

FIG. 1 is a side view of a robot to which an embodiment of a robot arm driving mechanism according to the present invention is applied.

FIG. 2 is a plan view of the transfer robot.

FIG. 3 is a plan view illustrating a configuration of a semiconductor manufacturing apparatus having a cluster configuration in which a transfer robot is installed.

FIG. 4 is a front view showing the shape of the opening of the gate valve.

FIG. 5 is a plan view for explaining the arm operation by arrows.

FIG. 6 is a diagram showing the configuration of a first arm, a second arm, and a wrist indicated by arrows.

FIG. 7 is a plan view showing a configuration of each arm drive mechanism built in the first arm and the second arm.

FIG. 8 is a plan view showing a configuration of an arm drive mechanism built in a second arm.

FIG. 9 is a side view showing a configuration of an arm drive mechanism built in the second arm.

FIG. 10 is a diagram showing a configuration of a steel belt.

FIG. 11 is a plan view showing a modification of the arm drive mechanism built in the second arm.

FIG. 12 is a side view showing a modified example of the arm drive mechanism built in the second arm.

FIG. 13 is a view showing a modification of the steel belt.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Transfer robot 4 1st arm 5 2nd arm 6 Wrist part 7 (theta) rotation axis 8 Joint axis 9 Wrist rotation axis 10 Work 11 Work center axis 12 Semiconductor manufacturing apparatus 13 Transfer room 14 Load lock room 15-17 Process processing room 18 -22 Gate valve 23 1st arm drive mechanism 27,41 2nd arm drive mechanism 28 3rd pulley 29 4th pulley 30 2nd steel belt 32-34,44,45 Reinforcement plate 42,43 Steel belt

Claims (6)

[Claims] 1. A robot arm driving mechanism for driving an arm of a robot at a predetermined angle, wherein a pulley is provided on each of parallel arm shafts, and a metal belt is wound between the pulleys. A robot arm drive mechanism, wherein a part is fixed to the pulley. 2. The robot arm driving mechanism according to claim 1, wherein a central portion of the metal belt is fixed to one pulley, and both end portions are fixed to the other pulley. Arm drive mechanism. 3. The robot arm driving mechanism according to claim 1, wherein a first metal belt is wound around one side between the pulleys,
A second metal belt is wound around the other side between the pulleys, one end of the first metal belt is fixed to one pulley, and the other end of the first metal belt is fixed to the other pulley. A robot arm driving mechanism, wherein one end of a second metal belt is fixed to the other pulley, and the other end of the second metal belt is fixed to one pulley. 4. The robot arm driving mechanism according to claim 1, wherein the pulley has a diameter ratio of 1: 2, and the metal belt wound around the small-diameter pulley having a small diameter has both ends in the width direction of the pulley. A robot arm drive mechanism characterized by being shifted and fixed. 5. The robot arm driving mechanism according to claim 4, wherein the large diameter pulley having a large diameter is lower in height than the other end. 6. The robot arm driving mechanism according to claim 1, wherein both ends of the metal belt are attached to the outer periphery of the pulley.
A robot arm driving mechanism, wherein the robot arm is wound around 0 ° or more and shifted and fixed in the width direction of the pulley.