TWI447004B - Machine and robot arm - Google Patents

Description

Robot arm and robot

The invention relates to a robot arm and a robot. More specifically, the present invention relates to an improvement in the structure of a robot arm in a multi-joint robot in which a workpiece is moved between a process device such as a cassette or a coating device, for example, in a semiconductor wafer or a liquid crystal transfer robot.

Furthermore, there is a robot arm used in a decompression environment such as a semiconductor manufacturing apparatus and a robot having the robot arm.

The robot arm connects the first arm and the working means so as to be rotatable with each other, and transmits the rotational force of the rotational driving source to the robot arm to expand and contract. The robot arm is mounted on a multi-joint robot that moves a workpiece such as a semiconductor wafer or a liquid crystal between a process device such as a cassette or a coating device.

For example, the robot arm 2030 shown in FIG. 16 is a so-called belt direct drive type, and includes a first arm 2050 that is rotated about a first timing pulley 2070 fixed to a base 2040 of the robot body, and is passed through a second The timing pulley 2080 is coupled to the front end of the first arm 2050 to be rotatable, the second arm 2060, the hand 2020 attached to the hand side pulley 2100 at the front end of the second arm 2060, and the cross A timing belt 2110 hung on the first timing pulley 2070 and the second timing pulley 2080.

A drive shaft 2130 is disposed at a position concentric with the first timing pulley 2070 on the first arm 2050, which supports the first arm 2050 to be rotatable relative to the base 2040 and the first timing pulley 2070. The drive shaft 2130 is rotated by a motor (not shown) built in the base 2040.

The second timing pulley 2080 and the second arm 2060 are fixed by the coupling barrel 2140. Inside the connecting cylinder 2140, a rotatable connecting shaft 2150 is housed. The connecting shaft 2150 is fixed to the first arm 2050 and the third timing pulley 2090.

The first arm 2050 and the second arm 2060 have the same length. The first arm 2050 houses two timing pulleys 2070 and 2080 and one long timing belt 2110, and the second arm 2060 accommodates two timings. Pulleys 2090, 2100 and a long timing belt 2120.

The ratio of the diameter (number of teeth) of the first pulley 2070 and the second pulley 2080 of the robot arm 2030 is set to 2:1, and the ratio of the diameter (number of teeth) of the third pulley 2090 to the fourth pulley 2100 is set to 1:2. Therefore, the rotation angle ratio of the first pulley 2070, the second pulley 2080, and the fourth pulley 2100 becomes 1:2:1.

The robot arm 2030 rotates the first arm 2050 relative to the base 2040 by driving the motor. At this time, the first belt 2110 that rotates relative to the fixed first pulley 2070 causes the second pulley 2080 to rotate relative to the first arm 2050. By rotating the second pulley 2080 relative to the first arm 2050, in addition to the second arm 2060 rotating relative to the first arm 2050, the third pulley 2090 is also rotated relative to the second arm 2060.

Moreover, by the third pulley 2090 rotating relative to the second arm 2060, the fourth pulley 2100 will rotate relative to the second arm 2060 to rotate the hand 2020.

Here, except for the first arm 2050 and the second arm 2060 having the same length, the base side pulley 2070 of the first arm 2050 and the hand side pulley 2080 (that is, the abutment side pulley 2090 of the second arm 2060) And the rotation angle ratio of the hand side pulley 2100 of the second arm 2060 is 1:2:1, so by rotating the first arm 2050, the angles of the first arm 2050 and the second arm 1060 change, and the hand is made The portion 2020 is maintained in a certain direction and moves on a straight line connecting the center of the base side pulley 2070 of the first arm 2050 and the center of the hand side pulley 2100 of the second arm 2060.

However, in the robot arm 2030, in recent years, the size and weight of the arm become larger as the size of the semiconductor wafer or the liquid crystal glass increases, and the force applied to the timing belt also becomes larger, and the position of the workpiece is caused by insufficient rigidity of the timing belt. The problem of reduced accuracy.

The technique disclosed herein does not utilize a long timing belt that is hung between the pulleys, but uses a joint portion made of a metal plate to be connected to the pulley without being brought into contact during rotation. Timing belt in the area.

By the use of the connecting portion using the metal flat plate, the length of the timing belt can be shortened to increase the rigidity, and the positional accuracy of the robot arm during rotation can be prevented from being lowered (see, for example, Patent Document 1).

Further, in a manufacturing system of a semiconductor device, a system in which a workpiece transfer robot is incorporated in a semiconductor device is known. Such a manufacturing system has a plurality of processing chambers that are processed under a reduced pressure environment, and the workpiece transfer robot performs loading and unloading of semiconductor wafers from a plurality of processing chambers with respect to a predetermined processing chamber. At this time, each time the semiconductor wafer is carried in and out of the processing chamber, if the processing chamber is returned to the normal pressure and the processing chamber is depressurized, it takes a lot of time before starting the processing, resulting in a decrease in production efficiency. Therefore, in the manufacturing system employed in recent years, generally, the workpiece transfer robot that carries in/out the semiconductor wafer to each processing chamber is included in the space of the preliminary decompression chamber (load lock chamber). In such a manufacturing system, since the semiconductor wafer can be carried in and out without returning to normal pressure in the processing chamber, the production efficiency can be improved.

In the case of the workpiece transfer robot used in the manufacturing system, various transfer robots have been proposed for the purpose of improving the transport effect and shortening the operation time. For example, Patent Document 1 proposes a transfer arm device which is supported by a first arm portion that is supported in a rotatable shape, a second arm portion that is supported at a front end thereof and is bendable, and a central portion thereof is supported at the front end thereof. The third arm portion that is rotatable is formed, and the object to be processed portion on which the object to be processed is placed is placed at both ends of the third arm portion, and the two objects to be processed can be processed at one time.

(Patent Document 1) Japanese Patent Laid-Open Publication No. 2004-160568

(Patent Document 2) Japanese Patent Laid-Open No. 7-142551

However, in the robot arm disclosed in Patent Document 1, although the timing belt connected to the joint portion formed of the metal flat plate is used to increase the rigidity, the area that is not in contact with the pulley during the rotation is 50% or less of the whole. Therefore, the proportion of the timing belt is still higher than that of the joint formed by the metal flat plate.

Moreover, since the timing belt used is composed of a composite material mainly composed of rubber, it is an elastic material. Therefore, the robot arm can greatly affect the rotation of the robot arm due to the influence of the tension and hysteresis of the timing belt. Therefore, there is a problem that it is difficult to ensure the high positional accuracy of the robot arm.

When the strength of the timing belt, for example, the width is widened in order to increase the rigidity of the timing belt, it is necessary to similarly widen the width of the timing pulley having the tooth portion engaged therewith on the tooth surface. Therefore, increasing the rigidity of the timing belt causes a problem that the robot arm is enlarged, and the installation space of the robot arm has to be increased.

In addition, the transfer robot shown in Patent Document 2 aims to improve the transport efficiency and shorten the operation time. However, even if the transport efficiency can be improved and the operation time can be shortened, it is not possible to minimize the occurrence of the transfer robot in the reduced pressure environment. Dust, etc., it is still impossible to depressurize the treatment chamber to the set pressure, and overall productivity cannot be improved. In particular, the robot arm that performs the telescopic operation has a large number of power transmission means such as a belt or a pulley, and thus dust is likely to be generated.

On the other hand, a steel belt can be used as a power transmission means that does not generate dust. However, since the steel belt has to be fixed to the pulley by bolts or the like in order to prevent slippage or transmission loss, the range of rotation of the pulley is limited, and there is a problem that the driving of the robot is restricted. Further, in order to secure the region in which the pulley is rotated, it is necessary to have a wide pulley (refer to Figs. 2 and 7 of Japanese Patent Laid-Open No. Hei 11-165290), and the arm of the robot is thickened and enlarged, and the entrance and exit of the workpiece are increased. It is not suitable for use in a treatment room with a narrow height.

Here, the present invention has been made to solve the above problems, and an object of the invention is to provide a robot arm capable of improving the position control accuracy of an arm without increasing the size of the arm, and a robot including the robot arm.

Further, another object of the invention is to provide a robot arm capable of suppressing an increase in thickness in a height direction in addition to dust generated inside a reduced pressure environment, and a robot including the robot arm.

The robot arm of the present invention is composed of a first arm that is rotatable by being attached to the robot body via a first transmission mechanism, and a working means that is rotatable by being attached to a front end of the first arm via a second transmission mechanism. And a robot arm having a first connection means for transmitting the first transmission mechanism and the second transmission mechanism to transmit power, wherein the first connection means includes: receiving power or transmission from the first transmission mechanism a first power transmitting member formed by the first rigid member, a second power transmitting member that receives power from the second transmitting mechanism or power transmitted to the second transmitting mechanism to the power of the first transmitting mechanism And a first connecting portion and a second connecting portion formed by the second rigid member, wherein the first power transmitting member and the second power transmitting member are connected to each other, wherein the diameter of the first transmitting mechanism is smaller than the second The diameter of the transmission mechanism is large, and the length of the second power transmission member is shorter than the length of the first power transmission member.

According to the present invention, it is possible to increase the rigidity of the first connecting means while ensuring the size of the conventional robot arm, and it is possible to suppress the influence of stretching or lag. Therefore, the position control of the robot arm can be ensured with high precision.

According to the present invention, since the large-diameter first transmission member having a small bending stress is substantially the same width as the first transmission member and the first power transmission member constituted by the first rigid member, the first coupling means can be improved. Rigidity. Moreover, since the first transmission member is not configured by the occlusion relationship, friction can be suppressed and dust generation can be suppressed. Further, since the second power transmission member that is hung across the small-diameter second transmission member can be made shorter in length, it is possible to suppress dust generated by the engagement with the second transmission member.

Further, in the invention, it is preferable that the working means is fixed to the second arm, and the second arm rotatable with respect to the first arm and the second arm are concentrically fixed to the first arm a third transmission mechanism and a hand that is rotatable by being attached to an end portion of the second arm via a fourth transmission mechanism, and includes a third transmission mechanism and the fourth transmission mechanism for transmitting power a robot arm of the second connecting means, wherein the second connecting means is a fourth power transmitting member constituted by a third rigid member by a power receiving the power from the fourth transmitting mechanism or transmitted to the fourth transmitting mechanism, a third power transmission member that receives power from the third transmission mechanism or power transmitted to the third transmission mechanism, and connects the third power transmission member and the fourth power transmission member, and is connected by the fourth rigid member The third connecting portion and the fourth connecting portion are configured to have a diameter larger than a diameter of the third transmitting mechanism, and the first Length of the power transmission member transmitting member is relatively short and the fourth power, and more, the rotation angle of the first transmission means and the second transmission means and said fourth transfer means is 1: 2: 1.

According to the present invention, similarly to the first arm, while maintaining the size of the conventional robot arm, the rigidity of the second connecting means can be increased, and the influence of stretching or lag can be minimized. Therefore, when the robot arm is rotated, the hand provided at the front end of the second arm can be maintained in a certain direction, and can be moved in a straight line with high precision.

Moreover, since the rotation angle ratio of the first transmission mechanism to the second transmission mechanism and the fourth transmission mechanism is 1:2:1, the angle of the first arm and the second arm is rotated by rotating the first arm As a result, the hand can be moved in a constant direction on a straight line connecting the center of the first transmission mechanism of the first arm and the center of the fourth transmission mechanism of the second arm. Therefore, the position control of the robot arm can be ensured with high precision.

In the invention, it is preferable that the tension of the power transmission member can be adjusted at least in the first connecting portion and the third connecting portion. Thereby, the first and third connecting portions can be set while adjusting the set tension.

Furthermore, in the invention, it is preferable that the first connecting portion and the second connecting portion are connected so that a center line position in a thickness direction of the first power transmitting member and a center line position in a thickness direction of the second power transmitting member In roughly the same position. Similarly, it is preferable that the third connecting portion and the fourth connecting portion are connected such that a center line position in a thickness direction of the third power transmitting member and a center line position in a thickness direction of the fourth power transmitting member are substantially The same location.

According to the present invention, since the direction in which the tension applied to the power transmission members acts is substantially the same position, a smooth belt conveyance operation can be performed.

Further, the robot arm of the present invention is a first arm rotatable by being attached to the robot body via a first transmission mechanism, and a working arm rotatable by being attached to a front end portion of the first arm via a second transmission mechanism. A robot arm having a first connection means for transmitting power by connecting the first transmission mechanism and the second transmission mechanism is characterized in that the first connection means is made of fluororubber.

The present invention uses a first joining means composed of fluororubber. The first connecting means made of fluororubber can reduce the generation of gas under a reduced pressure environment, compared to a belt made of a conventional chloroprene, a belt made of a nitrile rubber, a belt made of a urethane rubber, or the like. In the case of dust, the adverse effects on the decompression environment are reduced. As a result, the pressure in the processing chamber can be quickly reduced to a set pressure, and the overall production efficiency can be improved. Moreover, there is no case where the thickness of the robot arm is increased and the driving is restricted as in the case of using a steel belt.

Preferably, in the robot arm of the present invention, the working arm is fixed to the second transmission mechanism, and the second arm rotatable relative to the first arm is concentrically fixed to the first transmission mechanism a third transmission mechanism of the arm, a hand rotatably attached to the front end of the second arm via the fourth transmission mechanism, and a second connection means for transmitting the power by connecting the third transmission mechanism and the fourth transmission mechanism The second connecting means includes a power transmission member composed of a fluororubber timing belt, and a power transmission member that receives the power from the third transmission mechanism or the power transmitted to the third transmission mechanism. The power of the transmission mechanism or the power transmitted to the fourth transmission mechanism is constituted by a power transmission member composed of a steel belt and a joint portion connecting the power transmission members.

According to the present invention, the third transmission mechanism side having a large driving amount (the number of rotation angles) is a timing belt composed of fluororubber, and the driving amount (the number of rotation angles) is small (about 180 degrees or less, and the robot is not limited. The fourth transmission mechanism side of the driving amount of the drive is a steel belt, and is a second coupling means of a so-called hybrid belt that is coupled by a joint portion. The second connecting means of the hybrid belt has substantially sufficient rigidity and driving precision in a portion composed of a steel belt, and hardly generates gas or dust, and is composed of fluororubber. In the same manner as described above, it is possible to reduce the occurrence of gas or dust in a reduced pressure environment, and to reduce the adverse effects on the reduced pressure environment, compared to conventional belts and the like. As a result, the pressure in the processing chamber can be quickly reduced to a set pressure, and the overall production efficiency can be improved. Further, it is possible to provide a robot arm capable of suppressing the thickness in the longitudinal direction while ensuring the driving accuracy and rigidity.

In the robot arm of the present invention, preferably, the first arm and the second arm are provided with a vent hole communicating with the base end portion of the first arm to be in the first arm and the second arm. Air can be discharged to the outside from the base end portion of the first arm described above.

According to the present invention, since the vent hole communicating with the base end portion of the first arm is provided inside the first arm and the second arm, when the robot arm is exposed to a reduced pressure environment, in the first arm The air in the second arm is easily taken out from the base end portion of the first arm to the outside through the vent hole. As a result, since the air connected to the inside of the robot arm is easily discharged, and the air is less air such as dust, the time to reach the set pressure can be shortened in a reduced pressure environment.

In the robot arm of the present invention, it is preferable that an opening portion for allowing air in the arm to escape to the outside is provided at a proximal end portion of the first arm, and a filter is attached to the opening portion.

According to the invention, since the opening portion of the first arm is provided with an opening for allowing air in the arm to escape to the outside, and the filter is attached to the opening, even if, for example, the belt is in each arm When dust or the like is generated by the turning operation of the pulley or the like, the generated dust or the like is caught by the filter attached to the opening degree. As a result, the environment in the preliminary decompression chamber (load lock chamber) which is the moving space of the robot arm can be set as a good environment, and a rapid decompression environment can be achieved.

Further, in the robot provided by the present invention, the robot arm of the present invention is provided in a part thereof, and the pressure in the processing chamber can be quickly reduced to a set pressure, and the overall production efficiency can be improved.

The present invention comprises a first arm rotatable by being attached to the robot body via a first transmission mechanism, and a working means rotatably attached to a front end of the first arm via a second transmission mechanism, and is provided with the above-mentioned connection means The first transmission mechanism and the second transmission mechanism are robot arms that transmit power to the first connection means, and are characterized in that the first transmission mechanism that constitutes the first arm of the robot arm and the second transmission mechanism are coupled to each other to transmit power. Means for: receiving power from the first transmission mechanism or power transmitted to the first transmission mechanism, and the first power transmission member constituted by the first rigid member, receiving power from the second transmission mechanism or a second power transmission member that transmits power to the second transmission mechanism, and a first connection portion and a second connection portion that are connected to the first power transmission member and the second power transmission member The diameter of the first transmission mechanism is larger than the diameter of the second transmission mechanism, and the length of the second power transmission member is long. The length of the transmission power of the first member is relatively short, it is possible to maintain the size of the machine under conventional arm, while increasing the rigidity of the first connecting means, it is possible to suppress the influence of hysteresis stretching or the like. Therefore, the position control of the robot arm can be ensured with high precision.

Moreover, according to the robot arm of the present invention and the robot having the same, since the first connecting means made of fluororubber is used, it is possible to reduce the occurrence of gas or dust in a reduced pressure environment, and it is possible to reduce the pressure reduction. The adverse effects of the environment. As a result, the pressure in the treatment chamber can be quickly reduced to a set pressure, and the overall production efficiency can be improved.

The constitution of the present invention will be described in detail below based on the best mode shown in the drawings.

(First embodiment) (construction of the robot arm)

Fig. 1 is a longitudinal sectional side view showing a main part of a robot arm. Figure 2 is a plan view showing the main part of the robot arm.

The robot arm 1 shown in FIGS. 1 and 2 is rotatably mounted on the first arm 50 of the base 200 of the robot body via the first transmission mechanism 2, and is rotatably mounted via the second transmission mechanism 4. The working means 500 at the front end of the first arm 50 is constituted. The working means 500 is fixed to the second transmission mechanism 4, and the second arm 100 rotatably movable with respect to the first arm 50 and the third transmission mechanism 52 fixed to the first arm 50 concentrically with the second transmission mechanism 4, And a hand 252 (refer to FIG. 7) that is rotatably attached to the front end of the second arm 100 via the fourth transmission mechanism 54.

Further, the robot arm 1 has a first connecting means 10 that transmits power by connecting the first transmitting mechanism 2 and the second transmitting mechanism 4, and a second connecting power that also connects the third transmitting mechanism 52 and the fourth transmitting mechanism 54 to transmit power. Connection means 60.

(first arm)

On the base side of the first arm 50, the first transmission mechanism 2 is fixed to the base 200 of the robot body. In the present embodiment, the first transmission mechanism 2 is a first flat pulley whose outer peripheral surface is a flat surface. .

Further, the diameter R1 of the first flat pulley 2 is larger than the diameter R2 of the second transmission mechanism 4, and in the state in which the first coupling means 10 is provided, the relationship R1: R2 = 2:1 is obtained.

At the front end portion of the first arm 50, that is, on the second arm 100 side, the second transmission mechanism 4 is fixed to the second arm 100 by screws.

In the present embodiment, the second transmission mechanism 4 is constituted by a second timing pulley having a tooth portion on the outer circumferential surface thereof.

Moreover, the connection cylinder 3 is accommodated in the inside of the 2nd timing pulley 4, and the wiring is accommodated in the inside of the connection cylinder 3. One end of the connecting cylinder 3 is fixed to the first arm 50, and the other end is housed in the second arm 100. Thereby, the first arm 50 and the second arm 100 can be interlocked.

Further, in the present embodiment, a motor 150 serving as a rotation drive source, a speed reducer 151 attached to the motor 150, a drive pulley 152 attached to the speed reducer 151, and a drive pulley 152 provided in the vicinity of the second timing pulley 4 are provided. A drive belt 154 is hung across the drive pulley 152 and the second timing pulley 4.

The first connecting means 10 is a first power transmitting member 11 , a second power transmitting member 12 , and a first power transmitting member 11 and a second power transmitting member 12 which are formed by the first rigid members. The first connecting portion 20 and the second connecting portion 25 formed by the second rigid member are configured.

The first power transmission member 11 is composed of a first rigid member, and is formed of a steel belt in the present embodiment. Further, the first rigid member may be a member having superior ductility and toughness, and may be a belt other than a steel belt. The first steel belt 11 is wound around the plane of the first flat pulley 2, and its intermediate position over the entire length is fixed to the first flat pulley 2 by a plurality of screws 16.

Further, one end side of the first steel belt 11 is fixed to the first joint portion 20, and the other end side is fixed to the second joint portion 25. The second power transmission member 12 is constituted by a timing belt having a tooth surface, and the second timing belt 12 is disposed such that its tooth surface and the tooth portion of the second timing pulley 4 are engaged, and the length thereof is set to The minimum length necessary from the transport distance of the robot arm 1.

Further, in the present embodiment, the widths of the first steel belt 11, the second timing belt 12, the first joint portion 20, and the second joint portion 25 in the axial direction are substantially the same width.

3 is a plan view showing a first connecting means for transmitting power in a first arm for connecting a first transmission mechanism and a second transmission mechanism. Moreover, FIG. 5 is a side view of the 1st connection part (3rd connection part). Fig. 6 is a side view showing a second joint portion (fourth joint portion).

The first joint portion 20 injects one end portion of the first steel belt 11 and one end portion of the second timing belt 12 into an adjustment side joint portion capable of adjusting the interval therebetween. Moreover, the second connecting portion 25 is inserted into the other end portion of the first steel belt 11 and the other end portion of the second timing belt 12, and is fixed to be a fixed-side connecting portion.

The first joint portion 20, as shown in FIG. 5, is mainly configured as a flat plate 30, 31, 32 for fixing one end portion of the first steel belt 11 and the second timing belt 12, and for adjustment The tension of the first steel belt 11 and the second timing belt 12 is adjusted by a screw 145, and the flat plates 30, 31, 32 are constituted by a second rigid member.

Specifically, the flat plate 32 is an aluminum product in the present embodiment, and its thickness is thicker than that of the first steel belt 11 and the second timing belt 12 in order to secure the strength. On the aluminum flat plate 32, a groove portion 32a is formed on one end side, and the second timing belt 12 is disposed such that a tooth surface of one end portion is engaged with the groove portion 32a.

Further, the second timing belt 12 is made of an aluminum flat plate 32 and a stainless steel flat plate 31, and is fixed by a plurality of screws.

The stainless steel flat plate 30 is fixed to the other end side of the aluminum flat plate 32 by a plurality of screws. In the stainless steel flat plate 30, a long hole 30b through which a plurality of screws are inserted and extends in the longitudinal direction is formed. Thereby, the amount of overlap between the stainless steel flat plate 30 and the aluminum flat plate 32 can be adjusted.

In addition, although a plurality of screws are formed in a row in the width direction in FIG. 5, this is to make the relationship between the screw and the long hole 30b more clear, and the plurality of screws are not limited to be arranged in a row in the width direction.

Further, at the other end of the stainless steel flat plate 30, one end portion of the first steel belt 11 is screwed by a spacer 40. The spacer 40 is for adjusting the height of the first steel belt 11 and the second timing belt 12 in the thickness direction, and the distance between the first steel belt 11 and the second timing belt 12 from the center line C is substantially the same. Further, the number of the spacers 40 is not limited.

Further, the stainless steel flat plates 30 and 31 are formed with the standing portions 30a and 31a on the side facing each other, and the adjusting screws 145 are screwed to the standing portions 30a and 31a. The adjustment screw 145 can adjust the distance from the stainless steel flat plates 30 and 31, and can adjust the tension between the first steel belt 11 and the second timing belt 12 along the long holes 30b formed in the stainless steel flat plate 30.

As shown in FIG. 6, the second joint portion 25 is mainly configured such that the other ends of the first steel belt 11 and the second timing belt 12 are inserted into the flat plates 33 and 34 to be fixed, and the flat plates 33 and 34 are Two rigid members are constructed. Further, the second rigid member may be any member having superior ductility and toughness.

In the present embodiment, the flat plate 33 is a stainless steel product, and the first steel belt 11 and the second timing belt 12 are fixed to both ends of the stainless steel flat plate 33 by a plurality of screws. The first steel belt 11 is padded with a gasket 40 between the stainless steel flat plate 33 and screwed. The spacer 40 is for adjusting the height in the thickness direction, and is adjusted by one or a plurality of spacers 40 such that the distance of the second timing belt 12 from the center line C is substantially the same.

The second timing belt 12 is made of an aluminum flat plate 34 and a stainless steel flat plate 33 and is fixed by a plurality of screws. As shown in Fig. 6, the flat side of the second timing belt 12 is disposed on the stainless steel flat plate 33, and the aluminum flat plate 34 on which the groove portion is formed is disposed on the tooth surface side of the second timing belt 12. Further, the tooth surface of the second timing belt 12 is fixed by a plurality of screws while being engaged with the groove portion of the aluminum flat plate 34.

Referring back to FIG. 3, the first arm 50 is rotated in the clockwise direction (CW direction) or the counterclockwise direction (CCW direction) with respect to the fixed first flat pulley 2 by the drive motor 150, and the first connecting means 10 is facing forward. The position when rotating in the clock direction (CW direction) and when rotating in the counterclockwise direction (CCW direction) is indicated by a broken line.

When the first joining means 10 is rotated in the counterclockwise direction (CCW direction), the first steel belt 11 is rotated to the symbol 16A, the first joint portion 20 is moved to the symbol 20A, and the second joint portion 25 is moved to the symbol 25A. . Further, when the first coupling means 10 is rotated in the clockwise direction (CW direction), the first steel belt 11 is rotated to the symbol 16B, the first joint portion 20 is moved to the symbol 20B, and the second joint portion 25 is moved to the symbol 25B.

The first flat pulley 2 and the second timing pulley 4, as described above, have a ratio of the diameter (number of teeth) of R1:R2=2:1, so that the symbol is formed at the fixing portion 16 formed on the first flat pulley 2 At 16A, the first flat pulley 2 is rotated approximately 1/4 turn. During this time, the second timing pulley 4 is rotated approximately 1//2 of a turn. Therefore, the length of the second timing belt 12 is a length that is engaged with the second timing pulley 4 (about 1/2 rotation), and is moved in the clockwise direction (CW direction) and the counterclockwise direction (CCW direction). Length, and get a length of about 3/2 laps. That is, the length is set to the minimum length necessary for the transport distance from the robot arm 1.

In the first arm 50, as shown in FIG. 2, a plurality of ribs 219 are formed at a predetermined interval, and deformation of the cross section can be suppressed, and the rigidity of the first arm 50 in the vertical direction of the drawing can be improved.

Further, by forming the ribs 219, the thickness of the first arm 50 can be made thinner and lighter.

In each of the ribs 219, three holes 220, 220, and 221 are formed in the longitudinal direction, and the hole 221 in the center is a through hole for wiring in which the electric wire or the like can be disposed in the first arm 50. Further, through holes 220 and 220 through which the first steel belt 11, the second timing belt 12, and the first and second connecting portions 20 and 25 can pass are formed on both sides of the wiring through hole.

The first connecting means 10 penetrates the through holes 220 and 220 while cutting one of the first and second connecting portions 20 and 25, and connects the separated connecting portions after the penetration.

Further, the first flat pulley 2 is formed with a plurality of holes 2a penetrating in the axial direction in the circumferential direction, whereby the weight reduction of the first arm 50 can be achieved.

(work means)

The working means 500 provided at the front end of the first arm 50 is fixed to the second arm 100 which is fixed to the second timing pulley 4 and rotatable relative to the first arm 50, and is concentrically fixed to the second timing pulley 4 The third transmission mechanism 52 of the first arm 50, the hand 252 (refer to FIG. 7) rotatably attached to the front end of the second arm 100 via the fourth transmission mechanism 54, and the third transmission mechanism 52 and the fourth connection The transmission mechanism 54 is constituted by a second coupling means 60 that transmits power.

The base side (the first arm 50 side) in the second arm 100 houses the connecting cylinder 3 extending from the first arm 50 concentrically with the second timing pulley 4, and is fixed at the other end of the connecting cylinder 3. There is a third transfer mechanism 52. Further, in the present embodiment, the third transmission mechanism 52 is constituted by a timing pulley having a tooth portion on its outer circumferential surface.

The fourth transmission mechanism 54 is rotatably supported with respect to the second arm 100 via a bearing at the front end portion of the second arm 100. At the front end portion of the fourth transmission mechanism 54, a hand portion 252 (see FIG. 7) for conveying the workpiece is attached so as to be rotatable integrally with the fourth transmission mechanism 54. In the present embodiment, the fourth transmission mechanism 54 is a flat pulley whose outer peripheral surface is a flat surface.

Further, the diameter R4 of the fourth flat pulley 54 is larger than the diameter R3 of the third timing pulley 52, and in the state in which the second coupling means 60 is provided, R3: R4 = 1:2.

The second connecting means 60 is composed of a fourth power transmitting member 62 composed of a third rigid member, a third power transmitting member 61, and a third power transmitting member 61 and a fourth power transmitting member 62 connected thereto. The third connecting portion 70 and the fourth connecting portion 75 are formed of members.

The third power transmission member 61 is constituted by a timing belt having a tooth surface, and the third timing belt 61 is disposed such that its tooth surface is engaged with the tooth portion of the third timing pulley 52, and the total length thereof is set to be from the robot arm 1 The minimum length necessary to calculate the transport distance.

The fourth power transmission member 62 is formed of a rigid member having superior ductility and toughness, and is formed of a steel belt in the present embodiment. The fourth steel belt 62 is wound around the plane of the fourth flat pulley 54, and the intermediate position of the entire length thereof is fixed to the outer peripheral surface of the fourth flat pulley 54 by a plurality of screws 66. Further, one end side of the fourth steel belt 62 is fixed to the third joint portion 70, and the other end side is fixed to the fourth joint portion 75.

4 is a plan view showing a second connecting means for transmitting a power between the third transmission mechanism and the fourth transmission mechanism in the second arm constituting the working means. Moreover, FIG. 5 is a side view of the 1st connection part (3rd connection part). Fig. 6 is a side view showing a second joint portion (fourth joint portion).

Further, since the third connecting portion 70 and the fourth connecting portion 75 have substantially the same configuration as the first connecting portion 20 and the second connecting portion 25 of the first arm 50, they are enclosed in parentheses in FIGS. 5 and 6. symbol. Therefore, the detailed description herein will be omitted.

Further, as shown in FIG. 4, in the second arm 100, the length of the third connecting portion 70 and the fourth connecting portion 75, that is, the length of the connecting portion formed by the flat plate is smaller than the connecting portion of the first arm 50. The length is long. That is, the length that does not come into contact with the third timing pulley 52 and the fourth flat pulley 54 when the second arm 100 rotates is shortened, and the length of the third timing belt 61 is shortened, and the second coupling means 60 is improved. strength.

Referring back to FIG. 4, the second arm 100 receives the rotation of the first arm 50 toward the clockwise direction (CW direction) or the counterclockwise direction (CCW direction) with respect to the connecting barrel 3 and the fixed third timing pulley 52. The rotation is indicated by a broken line when the second coupling means 60 rotates in the clockwise direction (CW direction) and when it rotates in the counterclockwise direction (CCW direction).

When the second coupling means 60 is rotated in the clockwise direction (CW direction), the fourth steel belt 62 is rotated to the symbol 66A, the third joint portion 70 is moved to the symbol 70A, and the fourth joint portion 75 is moved to the symbol 75A. . When the second joining means 60 is rotated in the counterclockwise direction (CCW direction), the fourth steel belt 62 is rotated to the symbol 66B, the third joint portion 70 is moved to the symbol 70B, and the fourth joint portion 75 is moved to the symbol 75B.

The third timing pulley 52 and the fourth flat pulley 54, as described above, have a ratio of the diameter (number of teeth) of R3: R4 = 1:2, and therefore, when formed at the fixing portion 66 of the fourth flat pulley 54 When the 1/4 turn is rotated, the third flat pulley 52 is rotated by about 1/2 turn. Therefore, the length of the third timing belt 61 becomes a length (about 1/2 rotation) that is engaged with the third timing pulley 52, and the length that moves in the clockwise direction (CW direction) and the counterclockwise direction (CCW direction) is added. And get a length of about 3/2 turns. That is, the length is set to the minimum length necessary for the transport distance from the robot arm 1.

In the second arm 100, as shown in FIG. 2, a plurality of ribs 210 are formed at a predetermined interval, and deformation of the cross section can be suppressed, and rigidity of the second arm 100 in the vertical direction of the drawing can be improved. Further, by forming the ribs 210, the thickness of the second arm 100 can be reduced and the weight can be reduced.

Three holes 211, 211, and 212 are formed in each of the ribs 210 in the longitudinal direction, and the hole 212 in the center is a through hole for wiring in which an electric wire or the like can be placed in the arm. Further, through holes 211 and 211 through which the third timing belt 61 and the fourth steel belt 62 and the third and fourth connecting portions 70 and 75 can pass are formed on both sides of the wiring through hole.

The second connecting means 60 penetrates the through holes 211 and 211 in a state in which one of the third and fourth connecting portions 70 and 75 is cut away, and connects the separated connecting portions after the penetration.

Further, as shown in FIG. 2, the fourth flat pulley 54 is formed with a plurality of holes 54a penetrating in the axial direction in the circumferential direction, whereby the weight reduction of the second arm 100 can be achieved.

(action of the robot arm)

The operation of the above-described robot arm 1 will be described below. The robot arm 1 is driven by a motor 150 disposed in the vicinity of the second timing pulley 4 in the first arm 50. The rotation of the motor 150 is transmitted to the drive pulley 152 via the speed reducer 151. The rotation of the drive pulley 152 is transmitted to the second timing pulley 4 via the drive belt 154. The rotation of the second timing pulley 4 is transmitted to the first flat pulley 2 via the first joint portion 20 and the second joint portion 25.

Further, the second arm 100 is rotated relative to the first arm 50 by the rotation of the second timing pulley 4, and the third timing pulley 52 is rotated relative to the second arm 100. By rotating the third timing pulley 52 relative to the second arm 100, the fourth flat pulley 54 rotates relative to the second arm 100 to cause the hand 252 to rotate.

Here, the interval between the centers of rotation of the first flat pulley 2 and the second timing pulley 4 is the same as the interval between the centers of rotation of the third timing pulley 52 and the fourth flat pulley 54.

Further, the first flat pulley 2 and the second timing pulley 4 are set such that the ratio of the diameter (number of teeth) is 2:1 in a state in which the first steel belt 11 and the second timing belt 12 are wound.

Similarly, the third timing pulley 52 and the fourth flat pulley 54 are set such that the ratio of the diameter (number of teeth) is 1:2 in the state in which the third timing belt 61 and the fourth steel belt 62 are wound. Therefore, the rotation angle ratio of the first flat pulley 2, the second timing pulley 4, and the fourth flat pulley 54 becomes 1:2:1.

Thereby, the rotation of the first flat pulley 2 and the second timing pulley 4 of the first arm 50 (that is, the third timing pulley 52 of the second arm 100) and the fourth flat pulley 54 of the second arm 100 are thereby rotated. The angle ratio is 1:2:1. Therefore, by rotating the first arm 50, the angles of the first arm 50 and the second arm 100 are changed, so that the hand 252 is maintained in a certain direction, and the first connection is made. The center of the first flat pulley 2 of the arm 50 moves in a straight line with the center of the fourth flat pulley 54 of the second arm 100.

Fig. 7 is a plan view showing a dual-arm type articulated robot to which the robot arm of the present invention is applied.

In the two-arm articulated robot, for example, as shown in FIG. 7, two sets of the above-described robot arms 1 are arranged side by side on the base 200 of the robot body. According to the dual-arm type multi-joint robot, one of the robot arms is in a loading state in which the workpiece is to be taken, and the other robot arm is in an unloading state in which the motion of the other workpieces is to be pulled out, and the same can be performed simultaneously. 2 actions.

Further, as described above, since the rotation angles of the first transmission mechanism and the second transmission mechanism of the first arm 50 and the fourth transmission mechanism of the second arm 100 are 1:2:1, By rotating the first arm 50 to change the angle of the first arm 50 and the second arm 100, the hand 252 is maintained in a certain direction, at the center and the second arm of the first transmission mechanism connecting the first arm 50. The center of the fourth transmission mechanism of 100 moves in a straight line.

Further, in FIG. 7, the dual-arm type articulated robot can also move the multi-joint robot in addition to the robot arm.

(Effect of the first embodiment)

According to the first embodiment, the first connecting means 10 that transmits the first flat pulley 2 and the second timing pulley 4 of the robot arm 1 to transmit power is used to: receive power from the first flat pulley 2 or transmit it to the first The power of a flat pulley 2, and the first steel belt 11 composed of the first rigid member, the second timing for imparting power from the second timing pulley 4 or the power transmitted to the second timing pulley 4 a belt 12 and a first connecting portion 20 and a second connecting portion 25 formed by a second rigid member for connecting the first steel belt 11 and the second timing belt 12, wherein The diameter of the flat pulley 2 is larger than the diameter of the second timing pulley 4, and the length of the second timing belt 12 is shorter than the length of the first steel belt 11, so that the size of the conventional robot arm 103 is maintained. In this case, the rigidity of the first connecting means 10 can be increased, and it is possible to suppress the influence of stretching or hystersis as much as possible. Therefore, the position control of the robot arm 1 can be ensured with high precision.

Further, according to the first embodiment, the second coupling means 60 is constituted by a third rigid member for receiving power from the fourth flat pulley 54 or transmitting power to the fourth flat pulley 54. a steel belt 62, a third timing belt 61 for receiving power from the third timing pulley 52 or transmitting power to the third timing pulley 52, and a third timing belt 61 and a fourth for connecting the third timing belts 61 and The steel belt 62 is composed of a third joint portion 70 composed of a fourth rigid member and a fourth joint portion 75, wherein the diameter of the fourth flat pulley 54 is larger than the diameter of the third timing pulley 52. Further, since the length of the third timing belt 61 is shorter than the length of the fourth steel belt 62, the rigidity of the second coupling means 60 can be improved while maintaining the size of the conventional robot arm 103 similarly to the first arm 50. It is possible to suppress the influence of stretching or hysteresis as much as possible. Therefore, when the robot arm 1 rotates, the hand 252 provided at the front end of the second arm 100 can be maintained in a constant direction on a straight line while performing position control with high precision.

Moreover, since the rotation angle ratio of the first flat pulley 2 to the second timing pulley 4 and the fourth flat pulley 54 is 1:2:1, the first arm 50 and the second arm are caused by rotating the first arm 50. The angle of the arm 100 changes, causing the hand 252 to move in a certain direction on a straight line connecting the center of the first flat pulley 2 of the first arm 50 and the center of the fourth flat pulley 54 of the second arm 100. Thereby, the positional accuracy of the workpiece conveyed by the hand 252 can be improved, and stable conveyance can be performed. Further, since the rigidity of the first coupling means 10 and the second coupling means 60 can be increased, the hand 252 can be accurately moved in a straight line.

Further, in the first embodiment, it is preferable that at least the first connecting portion 20 and the third connecting portion 75 each have an adjusting portion for adjusting the tension of each of the power transmitting members. Thereby, the first and third connecting portions 20 and 75 can be set while adjusting the set tension.

According to the first embodiment, the first flat belt pulley 2 having a large diameter and a small bending stress can straddle the first steel belt 11 having substantially the same width, and the rigidity of the first coupling means 10 of the first arm 50 can be improved. . Further, since the length of the third timing belt 12 straddles the second timing pulley 4 of the small diameter can be shorter than that of the conventional belt, it is possible to suppress the second timing pulley 4 with the small diameter. The dust generated by the bite.

Furthermore, in the first embodiment, the first connecting portion 20 and the second connecting portion 25 are preferably connected such that the first steel belt 11 is at the center line C in the thickness direction and the second timing belt 12 is at the thickness. The center line C of the direction is approximately the same position. Similarly, the third connecting portion 70 and the fourth connecting portion 75 are connected such that the third timing belt 61 is positioned at the center line C in the thickness direction, and the center line C of the fourth steel belt 62 in the thickness direction is substantially The same location.

According to this configuration, when the first steel belt 11 and the second timing belt 12 having different materials and thicknesses are connected by the first connecting portion 20 and the second connecting portion 25, or the third connecting portion 70 and the fourth connecting portion are connected When the third timing belt 61 and the fourth steel belt 62 are coupled to each other, the position of the center line C in the thickness direction is substantially the same, and thus the power transmission members (steel belts 11, 62, timing belts) are applied. The tension of 12, 61) is substantially the same in the direction in which the tension is applied. Therefore, the direction of the tension and the direction in which the power transmission member moves are substantially the same, and a smooth belt conveyance operation can be performed.

According to the first embodiment, the first steel belt 11 having substantially the same length as the rotation range of the first arm 50 is hung on the side of the first flat pulley 2 having a large diameter with a small bending stress, thereby improving the power transmission system. Rigidity. Further, by fixing the first steel belt 11 to the outer peripheral surface of the first flat pulley 2, since the first steel belt 11 rotates without shifting, the force is equally applied to the power transmission member ( Since the steel belts 11 and 62 and the timing belts 12 and 61) are capable of efficiently transmitting power, the durability can be improved.

Further, in the first embodiment, the widths of the first steel belt 11 and the second timing belt 12 can be set to be substantially the same width as the widths of the first flat pulley 2 and the second timing pulley 4, and similarly The widths of the third timing belt 61 and the fourth steel belt 62 can be set to be substantially the same width as the widths of the third timing pulley 52 and the fourth flat pulley 54, and thus can be applied to support the respective transmission mechanisms. The moment on the member is set to be constant.

Further, according to the first embodiment, since the lengths of the second timing belt 12 and the third timing belt 61 are set to the minimum length necessary for the conveyance distance from the robot arm 1, it is possible to suppress the robot 1 At the time of rotation, dust generated when the second timing belt 12 moves while being engaged with the second timing pulley 4 or when the third timing belt 61 is engaged with the third timing pulley 52.

Since the second timing belt 12 and the third timing belt 61 to be used are composed of a composite material mainly composed of rubber, there is a problem that a harmful gas is generated in a vacuum environment, but in the present embodiment, The lengths of the second and third timing belts 12, 61 are set to the minimum necessary length, so that the generation of harmful gases can be suppressed more conventionally.

In the first embodiment, at least the first connecting portion 20 and the third connecting portion 70 are provided so that the tension of each of the power transmitting members (the steel belts 11 and 62 and the timing belts 12 and 61) can be adjusted, which makes it easy. The tension is adjusted so that the power transmission members (steel belts 11, 62, timing belts 12, 61) are not detached from the respective transmission mechanisms (flat pulleys 2, 54, timing pulleys 4, 52) in use.

(Other implementations)

The first embodiment is a preferred embodiment of the present invention, and is not limited thereto, and various modifications may be made without departing from the spirit and scope of the invention.

For example, in the present embodiment, the second power transmission member 12 and the third power transmission member 61 use a timing belt, but the present invention is not limited thereto, and a chain or the like can be used.

Further, in the first embodiment described above, the ribs 219 and 210 are provided in the respective arms 50 and 100. However, the shape of the ribs is not limited, or may not be provided when the load is not too large.

Further, in the first embodiment, the first to fourth connecting portions 20, 25, 70, and 75 are provided, and although the tension between the first connecting means 10 and the second connecting means 60 is adjusted, the connecting portions may not be used. An idle pulley is provided on the side of the steel belts 11, 62 to adjust the tension. When the idle pulley is provided, the angles of the steel belts 11, 62 which are in contact with the first flat pulley 2 and the fourth flat pulley 54 are increased, and the rotation angles of the first flat pulley 2 and the fourth flat pulley 54 are changed. Large, and the arm's transport distance is also large.

Further, in the first embodiment described above, the motor 150 is provided in the vicinity of the second timing pulley 4 of the first arm 50. However, the present invention is not limited thereto, and the motor 150 may be housed in the robot body. At this time, the first arm 50 is driven by the motor 150, and the power is transmitted from the first flat pulley 2 to the second timing pulley 4, the third timing pulley 52, and the fourth flat pulley 54. Or the motor 150 is placed on the second arm 100 to drive the fourth flat pulley 54. At this time, power is transmitted from the fourth flat pulley 54 to the third timing pulley 52, the second timing pulley 4, and the first flat pulley 2.

Further, in the first embodiment, the second connecting portion 25 and the fourth connecting portion 75 are fixed side connecting portions that do not have an adjustment function, but may have the same function as the first connecting portion 20 and the third connecting portion 70. The adjustment side joint of the tension adjustment function.

(Second embodiment)

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a second preferred embodiment for carrying out the invention will be described with reference to the drawings. Further, the robot arm of the present invention is not limited to the following description and drawings within the scope of the technical features.

(machine arm)

8 is a plan view (A) and an AA cross-sectional view (B) showing an example of the robot arm of the present invention, and FIG. 9 is a plan view (A) and a BB cross-sectional view (B) showing the internal structure of the first arm shown in FIG. Fig. 10 is a plan view (A) and a CC cross-sectional view (C) showing the internal structure of the second arm shown in Fig. 1.

The robot arm 1010 is provided with at least a first arm 1020 rotatably mounted on the base 1200 of the robot body via the first transmission mechanism 1021, and rotatably mounted on the front end of the first arm 1020 via the second transmission mechanism 1022. A working arm (working means) 1050 and a first connecting means 1023 that connects the first transmitting mechanism 1021 and the second transmitting mechanism 1022 to transmit power. Further, the robot arm 1010 has a feature that the first coupling means 1023 is made of fluororubber.

The working arm (working means) 1050 includes a second arm 1050 that is fixed to the second transmitting mechanism 1022 and rotatable relative to the first arm 1010, and a third arm that is fixed to the first arm 1020 concentrically with the second transmitting mechanism 1022. The transmission mechanism 1031 and the hand 1040 rotatably attached to the front end of the second arm 1030 via the fourth transmission mechanism 1032. Further, the robot arm 1010 includes a first connection means 1023 that connects the first transmission mechanism 1021 and the second transmission mechanism 1022 to transmit power, and a second connection that connects the third transmission mechanism 1031 and the fourth transmission mechanism 1032 to transmit power. Means 1033.

Further, as is clear from the second embodiment shown in FIGS. 8 to 10, the first transmission mechanism 1021 is referred to as "first pulley 1021", the second transmission mechanism 102 is referred to as "second pulley 1022", and the third embodiment is referred to. The transmission mechanism 1031 is referred to as "third pulley 1031", the fourth transmission mechanism 1032 is referred to as "fourth pulley 1032", the first connection means 1023 is referred to as "first belt 1023", and the second connection means 1033 is referred to as "Second belt 1033".

(first arm)

As shown in FIGS. 8 and 9, a first pulley 1021 is provided on the robot body side of the first arm 1020, and the first pulley 1021 is fixed to a shaft extending from the base 1200 of the robot body. On the other hand, a second pulley 1022 is provided on the working arm side of the first arm 1020. The diameter R1 of the first pulley 1021 is larger than the diameter R2 of the second pulley 1022, and has a relationship of R1: R2 = 2:1. The second pulley 1022 of the first arm 1020 is connected concentrically with the third pulley 1031 of the second arm 1050 by a connecting shaft (connecting cylinder) 1024, and as a result, the two arms are operated in conjunction.

The first belt 1023 is formed of fluororubber. The belt formed of the fluororubber can reduce the generation of gas or dust in a reduced pressure environment, compared to a conventional chloroprene belt, a nitrile rubber belt, or a urethane rubber belt. The decompression environment has less adverse effects. As a result, as shown in the manufacturing process of the semiconductor element, when the robot arm 1010 is used in a reduced pressure environment, the vacuum chamber can be quickly decompressed to a set pressure, and the overall production efficiency can be improved. Further, although the type of the first belt 1023 is not particularly limited, in the present embodiment, it is constituted by a toothed belt (timing belt) as shown in the drawing. Further, when a belt other than the toothed belt, for example, a flat belt is used, the first pulley 1021 is appropriately selected according to the type of the first belt 1023, and the flat pulley is used according to the type of the second pulley 1022.

In order to set the first belt 1023 hung between the first pulley 1021 and the second pulley 1022 to an appropriate tension, as shown in FIG. 9, it is preferable to provide the idle pulley 1026 capable of pressing the first belt 1023 from the back. The idler pulley 1026 is provided as a fine adjustment mechanism by which the tension of the first belt 1023 can be adjusted, and the contact angle between the first pulley 1021 and the first belt 1023 can be set larger.

The interior of the first arm 1020 preferably has a rib 1025 as shown in FIG. The rib 1025 has an effect of increasing the rigidity of the first arm 1020 and suppressing deformation. By providing such a rib 1025, the thickness of the first arm 1020 can be reduced to achieve weight reduction.

A vent hole 1029 is formed in the rib 1025 to be in communication with the base end portion of the first arm 1020. The vent hole 1029 serves as a passage through which the air in the first arm 1020 can be drawn out from the base end portion of the first arm 1020 to the outside. Since the robotic arm 1010 has such a venting opening 1029, when the robotic arm 1010 is exposed to a reduced pressure environment, air in the first arm 1020 can be easily withdrawn from the base end of the first arm 1020 through the venting opening 1029. To the outside. Further, since the first arm 1020 uses the first belt formed of fluororubber, the air inside is less dust or the like, but since the air is easily extracted, it reaches the set pressure in the decompression environment. Time can be shortened more than the average person. Further, the proximal end portion of the first arm 1020 is located on the side of the base 1200 of the robot body, and in this case, a portion on the shaft 1011 that rotates the first pulley 1021.

As shown in Fig. 8(A), an opening 1028 for allowing air in the arm to escape to the outside is provided on the shaft 1011 that is the base end portion of the first arm 1020 and that rotates the first pulley 1021. A filter 1060 is installed at 1028. Fig. 11 is a schematic explanatory view showing an example of a state in which a filter is attached to a first arm, (A) is a plan view, (B) is a cross-sectional view, and (C) is a bottom view. Further, the filter is not limited to the example of FIG.

Although the filter 1060 can be used in various forms, it is selected from a variety of filters depending on the environment in which the robot arm 1010 is used, for example, the degree of decompression required or the degree of dust to be removed. An example is a commercially available filter having a nominal pore size of 0.5 μm made of a material such as PTFE (Teflon). The specific commercial filter may be a Fluorinert membrane filter (manufacturer: MILLIPORE, model: FHLP 047 00), but is not limited to such a filter.

The shape of the filter is usually processed into a disk shape, and the mounting method may be as shown in Fig. 11 : filtering the disk-shaped filter 1060 from the upper and lower sides by the disk-shaped members 1062 and 1063. The device structure 1061 is a method of mounting to the frame of the first arm 1020. In the example of Fig. 11, the upper member 1062 is formed with a small hole 1062a, and the lower member 1063 is formed with a slightly larger hole 1063a, and the two members are integrated by the screw 1064 so that the positions of the holes are substantially uniform. Such a filter structure 1061 is attached to the periphery of the member 1062 having a slightly larger outer diameter and the frame of the first arm 1020 by screwing. Further, the symbol 1065 is a screw.

Further, in another mounting method, for example, a disk-shaped filter may be disposed between the annular groove provided around the opening 1028 formed of a circular shape and the annular member having the same shape, and pushed from above. A method of fitting an annular member to an annular groove and attaching the filter to the opening. In addition, it may be other mounting methods.

By providing such a structure, for example, even if dust or the like is generated by a turning operation of a belt or a pulley in the arm, the generated dust or the like is caught by the filter 1060 attached to the opening. As a result, the environment in the preliminary decompression chamber (load lock chamber) which is the moving space of the robot arm 1010 can be set as a good environment, and a rapid decompression environment can be achieved.

(work arm)

As shown in FIG. 10, the working arm (working means) 1050 is provided to be fixed to the second pulley 1022, and the second arm 1030 rotatable with respect to the first arm 1020 is concentrically fixed to the second pulley 1022. a third pulley 1031 of one arm 1020, a hand (arm) 1040 rotatably attached to a front end of the second arm 1030 via a fourth pulley 1032, and a third connecting pulley 1031 and a fourth pulley 1032 for transmitting power Two belts 1033.

As shown in FIG. 10, the second belt 1033 is taught by a timing belt 1036 which is a fluororubber as a power transmission member for transmitting power from the third pulley 1031 or power transmitted to the third pulley 1031. A steel belt 1037 from a power transmission member of the fourth pulley 1032 or a power transmission member transmitted to the fourth pulley 1032, and a coupling portion 1070 connecting the belts 1036 and 1037.

As shown in FIGS. 8 and 10, a third pulley 1031 is provided on the base side (the first arm 1020 side) of the second arm 1030, and the third pulley 1031 is concentrically coupled to the first arm by the coupling shaft 1024. The second pulleys 1022 of 1020 are coupled, and as a result, the two arms move in conjunction. On the other hand, a fourth pulley 1032 is provided on the distal end side (the side of the hand (arm) 1040) of the second arm 1030, and the fourth pulley 1032 is coupled to the hand (arm) 1040 by the coupling shaft 34, resulting in two The arm moves in conjunction. The diameter R3 of the third pulley 1031 is smaller than the diameter R4 of the fourth pulley 1032, and has a relationship of R3: R4 = 1:2.

The hand (arm) 1040, as shown in Fig. 8, is an arm for transporting the workpiece, and is mounted to be rotatable integrally with the fourth pulley 1032.

The second belt 1033 is a belt that connects the third pulley 1031 and the fourth pulley 1032 to transmit power. In the present embodiment, FIG. 10 uses a hybrid belt in which two types of belts are connected. The hybrid belt is a belt that is selected according to the purpose of use, the conditions of use, and the like. For example, one of the belts may be a toothed belt (a timing belt), and the other side may be a flat belt. Two types of belts are combined, or one of the two types of belts with the other side being the normal strength and the other side being the high-strength belt, or the type and strength of the belt are different. .

The second belt 1033 shown in FIG. 10 is a toothed belt 1036 (timing belt) made of fluororubber for imparting power from the third pulley 1031 or transmitting power to the third pulley 1031. A hybrid belt combined with a steel flat belt 1037 for receiving power from the fourth pulley 1032 or power transmitted to the fourth pulley 1032. Further, a toothed belt 1036 made of fluororubber and a flat belt 1037 made of steel are connected by a joint portion 1070. Further, depending on the type of the second belt 1033, the types of the third pulley 1031 and the fourth pulley 1032 are appropriately selected. When the hybrid belt is shown in the drawing, the third pulley 1031 is used on the outer peripheral surface to have a toothed belt. For the timing pulley of the corresponding tooth portion, the fourth pulley 1032 uses a flat pulley corresponding to the flat belt.

The flat belt 1037 made of steel is a belt having excellent strength and toughness and is wound around the fourth pulley 1032. Further, the intermediate position of the entire length thereof is fixed to the outer peripheral surface of the fourth pulley 1032 by a plurality of screws 1042 as shown in FIG. Both ends of the steel flat belt 1037 are fixed to the joint portion 1070, respectively, and are integrated with the toothed belt 1036 made of fluororubber.

The connecting portion 1070 is a mechanism capable of adjusting the interval in addition to the toothed belt 1036 made of fluororubber and the flat belt 1037 made of steel. Further, in the example of Fig. 10, although both of the pair of connecting portions have an adjustable mechanism, only one of the connecting portions may be adjustable, and the other connecting portion does not have an adjusting function.

FIG. 12 is a schematic configuration diagram showing an example of a connection portion, and FIG. 13 is a schematic configuration diagram showing another example of the connection portion. The joint portion 1070a shown in Fig. 12 has a configuration in which the flat plates 1043, 1044, 1045, and 1049 for fixing the toothed belt 1036 and the flat belt 1037 and the adjusting screw 1046 for adjusting the tension of the belt are mainly used. Further, the flat plates 1043, 1044, 1045, 1049 are preferably metal plates made of steel or aluminum.

The flat plate 1045 has a groove portion 1047 formed on a surface on the side of the toothed belt 1036, and the groove portion 1047 is formed to be engageable with the tooth surface of the toothed belt 1036. The toothed belt 1036 is held by the flat plate 1045 and the flat plate 1043 and fixed by a plurality of screws 1048.

On the other hand, the flat belt 1037 side of the flat plate 1045 is formed with a long hole 1052 through which one or two or more screws 1051 are inserted, and the long hole 1052 is adjusted along the long side, and the flat plate 1044 and the flat plate 1045 are adjusted by the long hole 1052 and the screw 1051. The overlapping portion can adjust the tension of the second belt 1033. Further, a flat belt 1037 made of steel is fixed to the flat plate 1044 by screws 1053 via a spacer 1049. The spacer 1049 is for adjusting the height of the toothed belt 1036 and the flat belt 1037 in the thickness direction so that the distance from the center line C of both is substantially the same. Further, the number of the spacers 1049 is not limited. Since the position of the center line C is substantially the same, the direction in which the tension applied to the hybrid belt (the toothed belt 1036 and the flat belt 1037) acts is substantially the same, and thus the direction of the tension and the belt The moving direction is substantially the same direction, and a smooth belt conveying operation can be performed.

The rising portions 1043a and 1044a are formed on the side faces of the flat plates 1043 and 1044, and the adjusting screws 1046 are screwed to the rising portions 1043a and 1044a. The adjustment screw 1046 can adjust the distance from the flat plates 1043 and 1044, and can finely adjust the tension between the toothed belt 1036 and the flat belt 1037 which are adjusted by the long hole 1052 formed in the flat plate 1044.

Fig. 13 is an example of a joint portion having no tension adjusting mechanism. The joint portion 1070b shown in Fig. 13 has flat plates 1054, 1055 and a gasket 1056 for fixing the toothed belt 1036 and the flat belt 1037. The flat plates 1054, 1055 and the spacers 1056 are preferably metal flat plates made of steel or aluminum as described above.

The flat plate 1055 has a groove portion 1057 on a surface on the side of the toothed belt 1036, and the groove portion 1057 is formed to be engageable with the tooth surface of the toothed belt 1036. The toothed belt 1036 is held by the flat plate 1054 and the flat plate 1055, and is fixed by a plurality of screws 1058.

On the other hand, the flat belt 1037 side of the flat plate 1054 is fixed to the flat plate 1054 by screws 1059 via a spacer 1056. The spacer 1056 is used to adjust the height of the toothed belt 1036 and the flat belt 1037 in the thickness direction in the same manner as described above, and the distance from the center line C of both is substantially the same. Further, the number of spacers 1056 is not limited.

The second arm 1030 having the second belt 1033 composed of such a hybrid belt is rotated in the clockwise direction or the counterclockwise direction by the rotation of the first arm 1020, but the joint portion 1070 is only rotated to the third The position where the pulley 1031 or the fourth pulley 1032 comes into contact.

As shown in FIG. 10, it is preferable to have a rib 1035 located inside the first arm 1020 even inside the second arm 1030. The rib 1035 has a function of increasing the rigidity of the second arm 1030 and suppressing deformation. By providing such a rib 1035, the thickness of the second arm 1030 can be made thinner and lighter.

A vent hole 1039 that communicates with the base end portion (the third pulley 1031 side) of the second arm 1030 is formed in the rib 1035. The exhaust hole 1039 serves as a passage for pumping the air in the second arm 1030 from the base end portion of the second arm 1030 to the outside through the first arm 1020. Since the robotic arm 1010 has such a venting opening 1039, when the robotic arm 1010 is exposed to a reduced pressure environment, air in the second arm 1030 passes through the venting opening 1039 from the base end of the second arm 1030. The inside of the first arm 1020 is easily drawn to the outside through the inside of the first arm 1020. Further, since a part of the second arm 1030 is made of a toothed belt 1036 made of fluororubber, it can be reduced compared to the conventional use of a belt made of a chloroprene, a belt made of a nitrile rubber, a belt made of a urethane rubber, or the like. When air or dust is generated, as a result, it is easy to remove the air in the second arm 1030, so that the time until the set pressure in the reduced pressure environment is reached can be shortened compared with the related art. Further, the base end portion of the second arm 1030 refers to the first arm 1020 side, and in this case, the shaft portion that rotates the third pulley 1031.

The air in the second arm 1030 is guided into the path in the first arm 1020. First, the air near the connecting shaft 1034 of the fourth pulley 1032 passes through the vent hole 1034a near the connecting shaft 1034 to reach the rib 1035. The air in the rib 1035 passes through the vent hole 1039 to reach the vicinity of the third pulley 1031. The air passes through the vent hole 1024a provided in the coupling shaft 1024, and passes through the vent hole 1020a formed in the first arm 1020. It is introduced into the first arm 1020. With such a passage, the air in the second arm 1030 easily enters into the first arm 1020, and then passes through the vent hole 1029 in the first arm 1020, and is attached from the base end portion of the first arm 1020, for example. The opening 1028 of the filter 1060 is discharged to the outside. When the robot arm 1010 is configured in such a manner that dust or the like is generated by, for example, a belt or a pulley in the arm, the generated dust or the like is caught by the filter 1060 attached to the opening. As a result, the environment in the preliminary decompression chamber (load lock chamber) which is the moving space of the robot arm 1010 can be set as a good environment, and a rapid decompression environment can be achieved.

(action of the robot arm)

The operation of the robot arm 1010 will be described below. As shown in FIGS. 8 and 9, the robot arm 1010 is coupled to the first pulley 1021 of the first arm 1020 by the shaft 1011 of the base 1200 of the robot body, and transmits the rotational power to the first pulley 1021 by the rotation of the shaft 1011. The rotation control of the first pulley 1021 is performed by a control mechanism for controlling the rotation of the shaft 1011 to be positioned in the robot body.

The rotation of the first pulley 1021 that is controlled to rotate is transmitted to the second pulley 1022 via the first belt 1023, and is transmitted in the order of the third pulley 1031, the second belt 1033, the fourth pulley 1032, and the hand (arm) 1040. . Further, as described above, the ratio of the diameters of the respective pulleys is the diameter of the third pulley 1031 because the ratio of the diameter R1 of the first pulley 1021 to the diameter R2 of the second pulley 1022 is R1:R2=2:1. The ratio of the diameter R4 of the R3 to the fourth pulley 1032 is R3:R4=1:2, so the rotation angle ratio of the first pulley 1021, the second pulley 1022 (the third pulley 1031) and the fourth pulley 1032 becomes 1: 2:1.

Therefore, since the first pulley 1021 of the first arm 1020, the second pulley 1022 (the third pulley 1031 of the second arm 1030), and the fourth pulley 1032 of the second arm 1030 have a rotation angle ratio of 1:2:1, Therefore, as shown in FIG. 14, the first arm 1020 is rotated according to the rotation of the first pulley 1021, and when changing from the state of FIG. 14(A) to the state of FIG. 14(B) or FIG. 14(C), The angle of one arm 1020 and the second arm 1030 changes, and the hand (arm) 1040 is maintained in a certain direction, and the center of the first pulley 1021 connecting the first arm 1020 and the fourth pulley of the second arm 1030. The center of the 1032 moves in a straight line.

(robot)

Fig. 15 is a schematic plan view showing an example in which a robot including the robot arm of the present invention is applied to a semiconductor manufacturing process. The device shown in Fig. 15 is a process assembling device 1071 in the manufacturing process of a semiconductor. A load lock chamber 1073 capable of decompressing is provided in the center of the apparatus, and a robot 1072 including the robot arm 1010 of the present invention is disposed.

A processing chamber divided into eight portions in the circumferential direction thereof is provided around the load lock chamber 1073. The four chambers of the symbols 1074A, 1074B, 1074C, and 1074D are vacuum processing chambers, the two chambers of the symbols 1075 and 1076 are processing chambers for heating and cooling, and the two chambers of the symbols 1077A and 1077B are for receiving wafers from the collective processing chamber. Containment room. Further, the symbol 1079 is a robot for receiving a wafer from the collective processing chamber, and the symbol 1078 is a wafer. In such a collective processing chamber, a gate valve is provided at the inlet of each chamber, and the processing and opening of the processing chamber are performed by opening and closing the gate valve. Further, the gate valve allows the wafer to be carried in and out, and is formed in a rectangular shape that is low in the height direction and wide.

When the robot 1072 including the robot arm 1010 is disposed in such a collection processing chamber, the robot 1010 and the robot 1072 generate less gas and dust in a reduced pressure environment, and the adverse effects on the decompression environment are caused. Since it is small, the environment in the load lock chamber (pre-decompression chamber) 1073 which is the moving space of the robot arm 1010 can be set as a favorable environment, and a rapid decompression environment can be achieved. Further, by opening the gate valve, even if the pressure in the processing chambers 1074A to 1074D is the same as the pressure in the load lock chamber 1073, the pressure can be quickly reduced to a set pressure in the respective processing chambers by the subsequent pressure reduction, thereby improving the pressure. Overall production efficiency. Further, since the robot arm 1010 whose thickness in the height direction is suppressed can be moved in and out with respect to the rectangular gate valve having a low height.

Further, in the robot arm 1010 of the present invention, since the hand 1040 can be moved in a constant direction on a straight line connecting the centers of the first pulley 1021 and the fourth pulley 1032, it can be stably transported with excellent positional accuracy. The wafer placed on the hand 1040 and transported.

In the above, the robot arm of the present invention and the robot having the robot arm are described. However, the above-described embodiment is only a preferred embodiment of the present invention, and is not limited thereto, and can be carried out without departing from the gist of the present invention. Implemented in various variants.

1, 1010, 2030. . . Robotic arm

2, 1021. . . First transmission mechanism

2a, 211, 212, 220, 221, 1063a. . . hole

3, 2140. . . Connecting cylinder

4, 1022. . . Second transmission mechanism

10, 1023. . . First link means

11. . . First power transmission member (first steel belt)

12. . . Second power transmitting member (second timing belt)

16. . . Fixed part

20. . . First link

25. . . Second joint

30, 31, 32, 33, 34, 1043, 1044, 1045, 1054, 1055. . . flat

30a, 31a. . . Standing part

30b, 1052. . . Long hole

32a, 1047, 1057. . . Ditch

40, 1049, 1056. . . Gasket

50, 500, 1050. . . Work means (job, arm, first arm)

52. . . Third transmission mechanism

54. . . Fourth transmission mechanism

60, 1033. . . Second link means

61, 1031. . . Third power transmission member

62, 1032. . . Fourth power transmission member

66, 145, 1042, 1046, 1048, 1051, 1053, 1058, 1059, 1064. . . Screw

70. . . Third link

75. . . Fourth link

100, 1030, 2060. . . Second arm

106, 1060. . . filter

150. . . motor

151. . . Reducer

152. . . Drive pulley

154. . . Drive belt

200, 1200, 2040. . . Base of the robot body

210, 219, 1025, 1035. . . Rib

252. . . hand

1011. . . Axis of the robot body

1020, 2050. . . First arm

1020a, 1024a, 1029, 1034a, 1039. . . Vent

1024, 1034, 2150. . . Connecting shaft

1026. . . Idling pulley

1028. . . Opening

1036. . . Toothed belt (timing belt)

1037. . . Flat belt

1040. . . Hand arm

1043a, 1044a. . . Stand up

1061. . . Filter structure

1062, 1063. . . Disc-shaped member

1062a. . . Small hole

1070, 1070a, 1070b. . . Linkage

1071. . . Collection processing room

1072. . . robot

1073. . . Load lock room (pre-decompression chamber)

1074A, 1074B, 1074C, 1074D. . . Vacuum processing room

1075, 1076. . . Processing room

1077A, 1077B. . . Containment room

1078. . . Wafer

1079. . . Transport robot (robot)

2020. . . hand

2070. . . First timing pulley

2080. . . Second timing pulley

2090. . . Timing pulley

2100. . . Hand side pulley (timing pulley)

2110, 2120. . . Timing belt

2130. . . Drive shaft

Fig. 1 is a longitudinal sectional side view showing a main part of a robot arm of the present invention.

Fig. 2 is a general view showing the main part of the robot arm of the present invention.

Fig. 3 is a plan view showing the first joining means.

Fig. 4 is a plan view showing the second joining means.

Fig. 5 is a side view showing the first joint portion (third joint portion).

Fig. 6 is a side view showing a second joint portion (fourth joint portion).

Fig. 7 is a plan view showing a double arm type articulated robot to which the robot arm of the present invention is applied.

Fig. 8 is a plan view (A) and an A-A cross-sectional view (B) showing an example of the robot arm of the present invention.

Fig. 9 is a plan view (A) and a cross-sectional view (B) of the internal structure of the first arm shown in Fig. 8;

Fig. 10 is a plan view (A) and a C-C cross-sectional view (B) showing the internal structure of the second arm shown in Fig. 8.

11(A) to 11(C) are schematic explanatory views showing an example of a state in which a filter is attached to a first arm.

Fig. 12 is a schematic configuration diagram showing an example of a connecting portion.

Fig. 13 is a schematic configuration diagram showing another example of the connecting portion.

14(A) to 14(C) are explanatory views showing the movement form of a hand arm.

Fig. 15 is a schematic plan view showing an example in which a robot equipped with a robot arm of the present invention is applied to a semiconductor manufacturing process.

Figure 16 is a longitudinal sectional side view showing a conventional robot arm.

1010. . . Robotic arm

1011. . . Axis of the robot body

1020. . . First arm

1021. . . First transmission mechanism

1022. . . Second transmission mechanism

1023. . . First link means

1024. . . Connecting shaft

1028. . . Opening

1030. . . Second arm

1031. . . Third power transmission member

1032. . . Fourth power transmission member

1033. . . Second link means

1034. . . Connecting shaft

1040. . . Hand arm

1050. . . Work means (job, arm, first arm)

1061. . . Filter structure

1200. . . Base of the robot body

Claims (5)

A robot arm that is used under a reduced pressure environment and that is rotatably mounted on a body of the robot via a first transmission mechanism and is mounted at a front end of the first arm via a second transmission mechanism The rotating working arm is configured to have a first connecting means for connecting the first transmitting mechanism and the second transmitting mechanism to transmit power, and the first connecting means is a robot arm using a timing belt made of fluororubber; The working arm includes: a second arm that is fixed to the second transmission mechanism and rotatable with respect to the first arm, and a third transmission mechanism that is fixed to the first arm concentrically with the second transmission mechanism, a hand arm rotatably attached to an end portion of the second arm via a fourth transmission mechanism, and a second coupling means for transmitting power by connecting the third transmission mechanism and the fourth transmission mechanism; The connection means consists of: receiving the power from the third transmission mechanism or the power transmitted to the third transmission mechanism and consisting of a fluororubber timing belt The force transmission member is configured to receive power from the fourth transmission mechanism or power transmitted to the fourth transmission mechanism, and is composed of a power transmission member composed of a steel belt and a coupling portion that connects the power transmission members. The robot arm of claim 1, wherein a vent hole that communicates with a base end portion of the first arm is provided inside the first arm and inside the second arm, so that the first arm and the first The air in the two arms can be discharged to the outside from the base end portion of the first arm. For example, the robot arm of claim 2, wherein, in the first The base end portion of the arm is provided with an opening for allowing air in the arm to escape to the outside, and a filter is attached to the opening. A robot arm is attached to a robot used in a decompression environment, and is mounted as a rotatable plurality of robot arms via a transmission mechanism, and a connection means for connecting the transmission mechanisms and transmitting power is: made of fluororubber The power transmission member formed by the timing belt, the power transmission member composed of the steel belt, and the connection portion connecting the power transmission members. A robot having a robotic arm as claimed in any one of claims 1 to 4.