JPH10329060A - Robot device for conveyance - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the height on the base part side of a hand member as much as possible by a method wherein a rotary bearing mechanism arranged at the tip part of a second arm comprises a large through-hole vertically extending through the tip part of the second arm; and a disc loosely inserted in the through-hole. SOLUTION: A rotary bearing mechanism 22 comprises a large through-hole 16 vertically extending through the tip part of one second arm 13; a disc 17 loosely inserted in the through-hole 16; a circular groove 18 peripherally formed opposite to the inner peripheral part of the through hole 16 and the outer peripheral part of the disc 17 with the disc 17 loosely inserted in the through-hole 16; a passage 19 formed in the second arm 13 in a manner to be communicated with the circular groove 18; a plurality of ball bodies 20 inserted through the passage 19 in the circular groove 18; and a cutoff tool to cut off the passage 19, formed in the second arm 13, with the ball body 20 inserted in the circular groove 18. The discs 17 and 17 of the respective bearing machanisms 22 and 22 and a hand member are integrally mounted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer robot device used for a semiconductor manufacturing apparatus, a liquid crystal substrate manufacturing apparatus, and the like, and particularly for transferring a workpiece between processing chambers in a vacuum atmosphere.

[0002]

2. Description of the Related Art In general, in a semiconductor manufacturing apparatus, a liquid crystal substrate manufacturing apparatus, or the like, a hand member for mounting a workpiece, for example, a wafer, is moved linearly in a horizontal direction by an arm, and the hand member is moved to the front end. A transfer robot device for turning the mounted arm in the horizontal direction is used, and processing chambers engaged in various manufacturing processes are arranged at a plurality of radial positions around the turning axis of the transfer robot device. The workpiece is carried in and carried out between the appropriate processing chambers by the apparatus.

Conventionally, as a transfer robot device, for example, devices shown in FIGS. 9 to 11 have been proposed.
That is, in FIG. 9 through FIG. 11, 81, a horizontal swivel base to be pivoted about the shaft core O ₁ by an appropriate driving device,
82 is a first fulcrum P ₁ parallel to the axis O ₁ of the horizontal swivel 81.
The first arm 82 is rotatably supported by the first arm 82 and is rotatably driven by an appropriate driving device attached to the swivel table 81. 83 is a second arm supported rotatably about a second fulcrum Q ₁ parallel to the first fulcrum P ₁ with respect to the first arm 82, and 84 is a second fulcrum with respect to the second arm 83. parallel to the Q ₁ third fulcrum R ₁
The hand member 85 rotatably supported around the
The fixed to the swivel base 81 of the first supporting point P ₁ as axial core 1
Rotation transmitting member, 86, the second rotation transmitting member which is fixed a second supporting point Q ₁ as axial to the second arm 83, 87
The third rotation transmitting member fixed to the first arm 82 and the second supporting point Q ₁ as the axial center, 88, a fourth rotation of which is fixed to the hand member 84 of the third supporting point R ₁ as axial The transmission members 89 and 90 are provided between the first rotation transmission member 85 and the second rotation transmission member 85.
And the first and second connectors respectively disposed between the third rotation transmitting member 87 and the fourth rotation transmitting member 88. Note that the interval S between the first and second fulcrums is the same as the interval S between the third and fourth fulcrums,
And a first rotation transmitting member 85 and a second rotation transmitting member 86
And the fourth rotation transmitting member 88 and the third rotation transmitting member 8
7 are formed at a radius ratio of 2: 1. Of course, chain sprockets or pulleys are appropriately used for the first to fourth rotation transmitting members 85 to 88, and accordingly, the first and second connecting members 89 and 90 are appropriately formed of chains or toothed belts. Used for

A transfer robot device is constituted by the above 82 to 90. In this transfer robot apparatus, it is assumed that the swivel table 81 is temporarily maintained in a fixed state. 10, the first, second and third fulcrum P _1, Q _1, the first arm 82 by the drive motor in a state where R ₁ is located on a straight line is counter-clockwise about the first pivot P ₁ It is assumed that it has been rotated by the angle θ.

At this time, the first rotation transmitting member 85 is in a fixed state, and at this time, the second fulcrum Q ₁ is moved to the position of Q _{11 by} an angle θ.
If moved counterclockwise, of the first connecting member 89 disposed between the first and second rotation transmitting member 85, 86, Y ₁ direction as the first rotation transmitting member 85 wraparound, Y ₂ direction as is in a state of being unwound from the first rotation transmitting member 85. That is, in FIG. 10, the first connecting member 89 moves in the directions of a ₁ and a ₂ . Thus the second rotation transmitting member 86 is rotated clockwise about the second axis Q _1. By the way, since the first rotation transmitting member 85 and the second rotation transmitting member 86 have a radius ratio of 2: 1, the first arm 82 is connected to the first fulcrum P as described above.
If the angle θ only rotates in the counterclockwise direction about the _first and second rotation-transmitting member 86 is rotated only clockwise angle 2θ about the second axis Q _11. In this case, since the second rotation transmission member 86 is fixed to the second arm 83, the second rotation transmission member 86 and the second arm 83 by an angle 2θ clockwise about the second axis Q ₁ Pivoted in the direction. That is, the first, second and third fulcrums P ₁ ,
The first arm 8 with Q ₁ and R ₁ positioned on a straight line.
When 2 is only the rotational angle θ in the counterclockwise direction about the first supporting point P _1, while the third pivot point virtually is rotated to the position of R _11, in this case, as described above, the second the rotation transmission member 86 of the rotating only clockwise angle 2θ about the second axis Q _11. For this reason, the third fulcrum R ₁₁ becomes the second fulcrum Q ₁₁
It is rotated by an angle 2θ in the clockwise direction about the, R ₁₂
Is rotated to the position. Therefore, the position of the third pivot R ₁₂ when the first arm 82 as described above is only an angle θ rotated counterclockwise about the first fulcrum P ₁ as described above, the first and second First before rotation of arms 82 and 83
And the third fulcrum P ₁ , R ₁ .

Further, as described above, the second arm 83
, The third fulcrum virtually located at R ₁₁ becomes the second fulcrum Q ₁₁
As the angle 2θ by the center, i.e. when it is rotated in the clockwise direction to the position of R _12, between the third rotation transmitting member 87 which is fixed to the first arm 82 and the fourth rotation transmitting member 88 of the of the second connecting member 90 disposed between a state Y ₂ direction things third wraps the rotation transmitting member 87, Y ₁ direction that is unwound from the third rotation transmitting member 87 Become. That is, in FIG. 10, the second connecting member 90 is b
Move to the ₁ and b ₂ directions. Thus the fourth rotation transmitting member 88 is rotated in the counterclockwise direction about the third pivot point R _12. By the way, as described above, the second arm 8
If 3 the angle 2θ only rotated in the clockwise direction about the second axis Q _11, the fourth rotation transmitting member 88 and the third rotation transmitting member 87 radius ratio 2: 1, 4 the rotation transmission member 88 is rotated in a counterclockwise direction angle θ about the third fulcrum R _12, as a result, the fourth rotation transmitting member 8
The eight specific point C ₀ is located at a point C ₁ on a straight line connecting the first and third fulcrums P ₁ and R ₁₂ .

[0007] As described above, the first arm 82 is rotated in the counterclockwise direction about the first supporting point P _1, the case,
Hand member 84 fixed to fourth rotation transmitting member 88
Are the first and third fulcrum points P before the first arm 82 rotates.
_1, on a straight line connecting the R _1, is moved while maintaining the initial posture.

As described above, a transfer robot device for linearly moving and turning the hand member 84 is provided, and at a plurality of radially radial positions around the rotation axis of the transfer robot device, for example, six positions are provided. Appropriate processing chambers 71 to 71
76 is arranged, and the processing of transporting the workpiece is appropriately performed.

[0009]

However, in the above-described conventional transfer robot apparatus, FIGS.
Since the hand member 84 is moved on a straight line connecting the first and third fulcrums P ₁ and R ₁ while maintaining the initial posture as shown in FIG. Of the rotation shaft transmitting member 88 and the second coupling tool 90 are disposed. Therefore, the height H1 of the third supporting point R ₁ near the apparatus becomes bulky, the tip of the second arm 83, the base side of the hand member 84 when to enter and exit the vacuum chamber in other words, The windows provided in the vacuum processing chamber must be large.

Further, a rotary drive for linearly moving the hand member 84 is mounted on a horizontal swivel base 81 and swivels together with the horizontal swivel base 81. The rotary drive unit is attached to the rotary drive from a fixed frame side. Since the power supply cable is wired, the turning angle, that is, the number of turns is limited in order to prevent the cable from being stepped. Therefore, the initial installation state, the turning angle of the clockwise and counter-clockwise with respect to the turning center P ₁ of the horizontal swivel base 81 tolerance, for example, each 5
An electrical monitoring device was required to limit the angle to 40 degrees or less, and the device was inconvenient to use, although the device was expensive.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a transfer robot apparatus which reduces the height of a base portion of a hand member as much as possible and has good productivity. That is.

[0012]

In order to achieve the above object, a first aspect of the present invention is directed to a horizontal turntable, and a first arm rotatable around a first fulcrum, which is an axis of the turntable. ,
A second arm rotatable about a second fulcrum parallel to the first fulcrum relative to the first arm, and a second arm rotatable about a third fulcrum parallel to the second fulcrum relative to the second arm; The present invention is applied to a transfer robot device having a hand member, which linearly moves the hand member in a horizontal direction and turns the hand member in a horizontal direction. It is characterized by a fixed frame, first and second rotating shafts rotatably supported coaxially on the fixed frame about a vertical line as an axis, and attached to the fixed frame. A first and a second rotary drive connected to the first and second rotary shafts, respectively;
A pair of first arms respectively attached to the first and second rotating shafts, and rotatably attached to respective ends of the first arm so as to be rotatable around a vertical line, and gears attached to respective ends. A pair of a second arm, a hand member for connecting the distal end of the second arm via a rotary bearing mechanism so that the gears mesh with each other, and the first and second rotary driving devices as appropriate. A control device that performs synchronous rotation control in the same direction and in the opposite direction, and a rotary bearing mechanism provided at the tip of the second arm has a large diameter penetrating vertically through the tip of the second arm. Through-hole, a disc inserted into the through-hole, and a circle formed around the inner perimeter of the through-hole and the disc in a state where the disc is inserted into the through-hole. A groove provided at a distal end of the second arm so as to communicate with the circular groove; A plurality of balls inserted in a circular groove than the passage is that the sphere is thin-walled rotary bearing mechanism consisting of a shutoff for blocking the passage in a state of being inserted.

[0013] The second invention is the first invention, wherein
The first and second rotating shafts coaxially supported are rotatably supported via an airtight magnetic fluid seal.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments. 1 to 8, reference numeral 1 denotes a fixed frame, and 2 and 3 denote first and second coaxially rotatably supported by the fixed frame ₁ about a vertical line O ₁ -O ₁ as an axis. It is supported by a rotating shaft via a rotating bearing as appropriate. For example, the fixed frame 1 is a vacuum chamber V.V. C, but air-tight magnetic fluid seals 4 and 5 are provided on the respective rotating shafts in order to maintain a vacuum state.

Reference numerals 6 and 7 denote first and second rotation transmitting members fixed to the first and second rotating shafts 2 and 3, respectively. These first and second rotation transmitting members 6 and 7 are ,
Driven by first and second rotary driving machines 8 and 9 supported on a fixed frame 1 respectively. That is, the first and second
The first and second rotation transmission members 6 and 7 are separately driven to rotate via a reduction gear, a rotation transmission member, and a coupling member appropriately connected to the rotation driving devices 8 and 9. As the rotation transmitting members 6 and 7, a chain sprocket, a pulley, or the like is appropriately used, and a coupling tool such as a chain or a toothed belt is appropriately used.

Reference numerals 11 and 12 denote a pair of first arms 13 and 13 attached to the first and second rotating shafts 2 and 3, respectively.
And 14 are a pair of second arms which are rotatably mounted on the ends of the first arms 11 and 12 about a vertical line, respectively, and have gears mounted on the respective ends. The arm 13 includes a second arm main body 131, an extension arm 132, and a first gear 133. The other second arm 14 is a second arm body 14
1, an extension arm 142, and a second gear 143. 15 is a first and second gear 13
3 and 143 are engaged with each other.
Is a hand member that couples the distal end portion of the robot through a rotary bearing mechanism 22 described later.

The rotary bearing mechanism 22 has a large-diameter through hole 1 vertically penetrating the tip of one second arm 13.
6, a disk 17 inserted into the through hole 16, and the disk 1
In a state in which the groove 7 is loosely inserted into the through hole 16, the circular groove 18 is provided around the inner peripheral portion of the through hole 16 and the outer peripheral portion of the disk 17, and communicates with the circular groove 18 facing each other. So that the second arm 1
3 and a groove 1 having a circular shape from the passage 19.
8 includes a plurality of spheres 20 inserted therein, and a blocking member 21 that blocks a passage 19 provided in the second arm 13 in a state where the spheres 20 are inserted into the circular grooves 18. .

A similar rotary bearing mechanism 22 is provided at the tip of the other second arm 14.

The discs 17, 17 of the respective rotary bearing mechanisms 22, 22 and the hand member 15 are integrally mounted. For example, the hand member 15 is provided with an opening in which the final assembly structure is opened on one side in the horizontal direction.
7 and 17, the hand member 15 and the disk 17,
17 are integrally attached, the hand member 1
5 can be made as thin as possible and the mechanical strength can be increased. The workpiece is placed on the free end of the hand member 15. For example, as shown in the drawing, a wide groove for placing the workpiece on the upper surface of the free end of the hand member 15 is formed. It is preferable to do so.

The above described 1 to 22 constitute the transfer robot device 23. The first and second rotary driving machines 8 and 9 are synchronously controlled by the control device as appropriate in the same direction and in the opposite direction, respectively. Of course, a plurality of processing chambers appropriately radially a plurality of locations around the axis O ₁ of the vertical is provided, is the same as the conventional.

In the above configuration, when the first and second rotary driving machines 8 and 9 are rotated in synchronization with each other in opposite directions,
The first arm 11 and 12 are rotated in opposite directions in the axial O ₁ around. When the first and second rotary driving machines 8 and 9 are synchronously rotated in opposite directions to each other, for example, when one first arm 11 is rotated clockwise around the axis O ₁ , the other first arm 11 is rotated in the clockwise direction. The arm 12 is rotated counterclockwise about the axis O ₁ by the same angle as the first arm 11.

In this case, the second arms 13, 14 rotatably mounted on the respective ends of the first arms 11, 12 are provided.
The gears 133 and 143 attached to the respective ends of the second arms 13 and 14 mesh with each other, and the rotary bearing mechanisms 22 and 2
2 are rotatably connected to the hand member 15 through the second arm 2, so that the first arms 11 and 12 are turned around the axis O _1.
When the free ends of the first arm 1
The second arms 13 and 14 that follow the gears 1 and 12 are provided with gears 133 and 1 attached to the distal ends of the second arms 13 and 14 respectively.
43 while meshing rotates synchronously to the axis O _2, O ₃ around the rotary bearing mechanism 22, 22, resulting in a straight line on the axial O ₁ direction in the horizontal direction the hand member 15 through the axial center O ₁ Attracted to.

[0023] When the hand member 15 is linearly moved by a desired amount in a horizontal direction of the shaft O ₁ direction, the first and second rotary drive device 8, 9 is stopped. That is, the first arm 1
1, 12 and the arrangement of the second arm 13, 14 is refracted to one another, a state in which the hand member 15 has been attracted to the axial O ₁ direction, a horizontal turning of the hand member 15.

[0024] As described above, when the hand members 15 are arranged in the horizontal turning state, such that the free end portion of the first arm 11, 12 toward each other in the axial O ₁ around the first
When the first and second rotary drivers 8 and 9 are synchronously rotated in opposite directions, the first arms 11 and 12 and the second arm 1
3 and 14 are rotated synchronously with each other, and contrary to the above operation, the arrangement of the first arms 11, 12 and the second arms 13, 14 is extended in the horizontal radial direction, so that the hand member 15 is processed. The first and second rotary driving machines 8 and 9 are stopped in a state of carrying in / out the object.

Next, the horizontal turning operation of the hand member 15 will be described. Now, as described above, the hand member 15 has been attracted to the axial O ₁ direction, it assumed to be arranged in a horizontal turning state. In this case, when the first and second rotary drive units 8 and 9 are synchronously rotated in the same direction, the first and second rotary drive units 8 and 9 are rotated in the same direction.
Arms 11 and 12 are rotated synchronously in the same direction of the clockwise or counterclockwise direction in the axial O ₁ around. This allows
In a state where the hand member 15 connected to the first arms 11 and 12 via the second arms 13 and 14 is turned by a predetermined angle around the axis O ₁ , the first and second rotary driving machines 8 and 9 is stopped.

[0026] After this manner the hand member 15 is appropriate angle turns, as the hand member 15 protrudes in the horizontal direction passing through the axial center O _1, first and second rotary drive device 8, 9
Are synchronously rotated in mutually opposite directions, and the hand member 15 is displaced to the carry-in / out position of the workpiece.

[0027] Of course, the hand member 15 after this, the axial center O ₁
As described above, the position is shifted to the position of the horizontal turning state pulled in the direction.

As described above, since the first and second rotary drivers 8 and 9 are mounted on the fixed frame 1, when the hand member 15 is turned in the horizontal direction, it is not limited to an angle. Can be turned. For this reason,
The hand member 15 can be swiveled to a free position regardless of the swivel angle to convey the workpiece, as compared with a conventional device that requires confirmation of the swivel angle, that is, the swivel angle. As a result, the usability of the device, that is, the productivity is better than in the past.

Further, a rotary bearing mechanism 22 provided at the tip of each of the second arms 13, 14 is provided with a second arm 13, 1.
A circular groove 18 is provided around the inner and outer peripheries of the through hole 16 and the disk 17 in a state where the disk 17 is loosely inserted into the large-diameter through hole 16 vertically penetrating the distal end of the disk 4. Sphere 20 is inserted
Since the second arm and the hand member are connected via the rotating bearing mechanism 22, the height H ₂ of the base side of the hand member 15 is extremely reduced as a result. The window of the vacuum processing chamber for entering and exiting the hand member can be made extremely small. For this reason, it is particularly suitable as a transfer robot device for a semiconductor manufacturing apparatus or the like that performs processing in a vacuum atmosphere.

[0030]

As is apparent from the above description, the transfer robot apparatus according to the first aspect of the present invention has a horizontal swivel and a second swivel that is rotatable around a first fulcrum which is the axis of the swivel. 1
Arm, a second arm rotatable about a second fulcrum parallel to the first fulcrum relative to the first arm, and a third fulcrum parallel to the second fulcrum relative to the second arm In a transfer robot apparatus having a rotatable hand member and moving the hand member linearly in the horizontal direction and turning the hand member in the horizontal direction, a fixed frame and a vertical line as an axis First and second rotation shafts rotatably and coaxially supported by a fixed frame, and first and second rotation shafts attached to the fixed frame and connected to the first and second rotation shafts, respectively. A second rotary drive, and a pair of first arms respectively attached to the first and second rotary shafts;
A pair of second arms, each of which is rotatably mounted around a vertical line at each end of the first arm and has a gear attached to each end, and a tip of the second arm such that the gears mesh with each other. A hand member for connecting the parts via a rotary bearing mechanism, and a control device in which the first and second rotary driving machines are appropriately controlled for synchronous rotation in the same direction and the opposite direction, respectively, and A rotary bearing mechanism provided at the distal end of the second arm has a large-diameter through-hole vertically penetrating the distal end of the second arm, a disc inserted into the through-hole, and In the state of being inserted into the hole, a circular groove is provided around the inner and outer peripheral portions of the through hole and the disk, and a distal end of the second arm is communicated with the circular groove. A passage provided,
This is a thin-walled rotary bearing mechanism including a plurality of spheres inserted into a circular groove from the passage and a blocking member that shuts off the passage when the sphere is inserted. it can be made extremely small height H ₂ of the base side.

Further, the first and second rotary driving machines 8 and 9
Is attached to the fixed frame 1, and when the hand member 15 is turned in the horizontal direction, the workpiece can be conveyed by being turned without being limited to an angle. , The productivity is good.

In summary, according to the present invention, the height of the base portion of the hand member can be made as small as possible, and a transfer robot device with good productivity can be realized.

[Brief description of the drawings]

FIG. 1 is a partially sectional plan view showing an embodiment of the present invention.

FIG. 2 is a longitudinal sectional development view of FIG.

FIG. 3 is a perspective view of FIG. 1;

FIG. 4 is a sectional development view taken along line IV-IV in FIG.

FIG. 5 is a sectional view taken along line VV in FIG. 3;

6 is a sectional view taken along line VI-VI in FIG.

FIG. 7 is a perspective view for explaining a rotary bearing mechanism 22 provided at a distal end portion in FIG. 3;

FIG. 8 is an enlarged cross-sectional view of a portion “A” in FIG. 7;

FIG. 9 is a longitudinal sectional front view showing a conventional example.

FIG. 10 is a plan view for explaining the operation state of FIG. 9;

FIG. 11 is a plan view for explaining the use state of FIG. 9;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Fixed frame body 2 1st rotating shaft 3 2nd rotating shaft 4,5 Airtight magnetic fluid seal 6 1st rotation transmission member 7 2nd rotation transmission member 8 1st rotation drive 9 2nd The first arm 13, 14 forming a pair The second arm 15 forming a pair, in which gears 133, 143 are attached to the ends of the first arm 13, 14 The hand member 16 The vertical direction provided at the end of the second arm Large-diameter through hole 17 penetrating 17 Disc inserted into through hole 16 18 Opposing circular grooves provided on the inner periphery of through hole 16 and the outer periphery of disc 17 19 Circular A passage communicating with the groove 18 20 A plurality of spheres inserted into the circular groove 18 21 A blocking member for blocking the passage 19 22 A rotary bearing mechanism composed of 16 to 11 23 A robot device for transportation

Claims (2)

[Claims] 1. A horizontal swivel, a first arm rotatable around a first fulcrum which is an axis of the swivel, and a second fulcrum parallel to the first fulcrum with respect to the first arm. A second arm rotatable about the second arm, and a hand member rotatable about a third fulcrum parallel to the second fulcrum with respect to the second arm, and linearly moving the hand member in the horizontal direction And a first and second rotating shafts rotatably supported coaxially on the fixed frame with a fixed frame and a vertical line as an axis. And a first and a second attached to the fixed frame and connected to the first and second rotating shafts, respectively.
, A pair of first arms respectively attached to the first and second rotation shafts, and each of the first arms is rotatably attached to a tip end of the first arm around a vertical line. A pair of second arms each having a gear attached to a tip thereof, a hand member connecting a tip of the second arm via a rotary bearing mechanism so that the gears mesh with each other, and the first and second rotations. A control device for appropriately controlling synchronous rotation of the driving machine in the same direction and in the opposite direction, and
A rotary bearing mechanism provided at the distal end of the arm has a large-diameter through-hole vertically penetrating the distal end of the second arm, a disc inserted into the through-hole, and the disc inserted into the through-hole. A circular groove is provided at the distal end of the second arm so as to communicate with the through-hole and the inner and outer peripheral portions of the disk in a state in which the through-hole is opposed. Characterized in that it is a thin-walled rotary bearing mechanism including a passage, a plurality of spheres inserted into a circular groove from the passage, and a blocking member that blocks the passage when the sphere is inserted. Transfer robot device. 2. The transfer robot device according to claim 1, wherein the first and second coaxially supported rotating shafts are rotatably supported via a hermetic magnetic fluid seal.