WO2006043455A1 - Système pneumatique pour supprimer les vibrations - Google Patents

Système pneumatique pour supprimer les vibrations Download PDF

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Publication number
WO2006043455A1
WO2006043455A1 PCT/JP2005/018794 JP2005018794W WO2006043455A1 WO 2006043455 A1 WO2006043455 A1 WO 2006043455A1 JP 2005018794 W JP2005018794 W JP 2005018794W WO 2006043455 A1 WO2006043455 A1 WO 2006043455A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
pneumatic
vibration
motor
regulator
Prior art date
Application number
PCT/JP2005/018794
Other languages
English (en)
Japanese (ja)
Inventor
Hiroshi Chinda
Mitsuaki Nakanishi
Tomomasa Fujita
Akihiro Hayashi
Original Assignee
Fujikura Rubber Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Rubber Ltd. filed Critical Fujikura Rubber Ltd.
Publication of WO2006043455A1 publication Critical patent/WO2006043455A1/fr

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements

Definitions

  • the present invention relates to an air pressure isolation system using an air pressure device used in FA (factory automation) and the like.
  • vibration isolation tables have been used to process various industrial products, particularly workpieces such as precision members.
  • a conventional vibration isolation system equipped with a vibration isolation table isolates vibrations from the floor surface on the workpiece on the vibration isolation table, which is the vibration isolation target, and quickly converges the vibration of the workpiece. It consists of passive legs.
  • the conventional vibration isolation system supports the vibration isolation table with three passive legs that basically have three-point support.
  • the vibration isolation system using such a conventional air panel dampens the vibration on the vibration isolation table by keeping the pressure in the air panel constant, and does not transmit the floor vibration to the vibration isolation table! /, It works like that.
  • the applicant of the present invention as a device for adjusting the pressure of gas supplied to the air pressure device, has a response that causes no backlash in the drive transmission system that transmits the driving force for pressure adjustment to the pressure adjustment unit.
  • Patent Document 1 a pressure control device
  • Patent Document 1 Japanese Patent Application Laid-Open No. 95843
  • the conventional air panel is configured to keep the pressure constant via a mechanical valve, it has low characteristics such as low attenuation characteristics and a narrow attenuation frequency range.
  • the center of gravity of the vibration isolation target may move due to the movement of the movable table, but the gravity center of the vibration isolation target moves.
  • the pressure of each air panel is kept constant, there is a problem that the vibration isolation target tilts.
  • the present invention comprises an air pressure isolation device, a displacement sensor for detecting displacement of a vibration isolation table supported by the air pressure isolation device, and a pressure adjustment degree electrically.
  • a motor driven regulator having a rotating means for adjusting and a pressure adjusting device having flexibility in a contact / removing direction rotated by the rotating means, and reducing the primary pressure to the secondary pressure and supplying it to the pneumatic vibration isolator.
  • the present invention is characterized in that it comprises arithmetic means for outputting data to the regulator.
  • the pneumatic vibration isolation device and the auxiliary tank are connected via a throttling means.
  • the throttling means and the auxiliary tank are connected to an intake / exhaust pipe branched from an intake / exhaust pipe which connects the pressure adjustment device and the air pressure anti-vibration device.
  • the pneumatic vibration isolator can be formed of a bellows type air panel.
  • the air pressure of the pneumatic vibration damping device is regulated by the pressure regulation device driven by the drive mechanism without backlash. Also, it is possible to prevent the table from tilting from the desired posture, and to quickly return it even if it is tilted.
  • FIG. 1 is a block diagram showing an embodiment of a pneumatic vibration isolation system to which the present invention is applied.
  • a bellows-type air panel 10 as a pneumatic vibration isolation device is provided between the floor (ground) 70 and the vibration isolation table 71 at three points that are the apexes of a substantially regular triangle. Since all the structures are the same, only one is shown in FIG. 1 and one air panel 10 will be described.
  • a bellows 11 having a generally donut shape having a semicircular longitudinal cross section is internally sealed to the bottom plate 14 and the top plate 15 via the hollow disk-shaped attachment plates 12 and 13. (1) It is closely fixed so as to form a Rose interior space S1. Bottom plate 14 is fixed to floor 70 The top plate 15 is fixed to the bottom of the vibration isolation table 71.
  • the bellows 11 is made of a flexible, flexible material, such as a material obtained by attaching a fiber to a flexible member such as rubber, and has a structure that allows vertical, horizontal expansion and contraction, and movement. Ru.
  • An intake port 14a is formed substantially at the center of the bottom plate 14, and an intake and exhaust pipe P1 is connected to the intake port 14a.
  • the intake and exhaust pipe P1 is connected to the auxiliary tank 22 via a throttle (air orifice) 21.
  • the intake / exhaust pipe P1 of the air panel 10 is in contact with the secondary pressure port of the motor-driven regulator 40 between the intake port 14a and the throttle 21 via the intake / exhaust pipe P2 to be motor-driven.
  • a compressor 100 is connected to the primary pressure port of the regulator 40 via an intake and exhaust pipe P3. That is, the compressed air supplied from the compressor 100 at a primary pressure is decompressed to the secondary pressure set by the motor driven regulator 40 and supplied to the air panel 10.
  • a position (height and vertical position) of vibration isolation table 71 and a displacement sensor (or position sensor) 16 for measuring displacement are provided between floor 70 and vibration isolation table 71. It is provided.
  • the displacement signal of the vibration isolation table 71 measured by the displacement sensor 16 is processed by the arithmetic (drive control) circuit 30, and in this embodiment, the displacement signal corresponds to keep horizontal in this embodiment.
  • the motor driven regulator 40 is driven to adjust the secondary pressure.
  • the displacement signal input to the arithmetic circuit 30 is amplified by the amplification amplifier 31, high frequency components are removed by the low pass filter 32, converted to digital signals by the AZD converter 33, and the PID compensator 34 is used to The noise control input inputted to the conversion circuit 35 is calculated. Then, the pulse conversion circuit 35 generates a pulse signal for driving the motor driven regulator 40.
  • the motor driven regulator 40 is driven via the motor drive driver 36 by the pulse signal generated by the PID control as described above.
  • the amplification amplifier 31, the low pass filter 32, the AZD converter 33, the pulse conversion circuit 35, and the motor drive regulator 40 are provided independently for each of the three air panels 10 and the motor drive regulator 40. .
  • the number of PID compensators 34 is one, and these displacement signals are respectively processed to independently drive and control each motor-driven regulator 40.
  • FIG. 2 shows a partially cutaway front view of the motor driven regulator 40
  • FIG. 3 shows a side view of the motor driven regulator 40.
  • This motor driven regulator 40 is a compressor Pressure regulator for adjusting the secondary pressure on the output side when outputting primary pressure air (arrow IN in FIG. 2) input from the sensor 100 as secondary pressure air (arrow OUT in FIG.
  • Rotary drive for adjusting the pressure adjustment screw 61 by turning the pressure adjustment screw 61 and adjusting the pressure adjustment screw 61 connected to the pressure adjustment device body 60 to set the main body 60 and the secondary pressure on the output side A device 41, and a coupling joint 50 interposed between the pressure adjusting screw 61 and the rotational driving device 41 for transmitting the rotational driving force of the rotational driving device 41 to the pressure adjusting screw 61; .
  • the pressure regulator main body 60 adjusts the secondary pressure on the output side of the pressure regulator main body 60 by rotating the pressure regulator screw 61 and moving the pressure regulator screw 61 up and down in the axial direction.
  • the rotational drive device 41 is provided with a motor as a rotational drive source.
  • a motor as a motor, a stepping motor capable of remote control with extremely high rotational angle control accuracy is provided.
  • connection joint 50 is connected to the motor shaft 42 of the rotational drive device 41 via a connection member 43.
  • the connection joint 50 includes a pair of hemispherical wedge-shaped members 51 and 52 having flexibility in the direction in which the distance between the tops is changed (contact and separation direction), the tops of which are disposed opposite to each other at a predetermined interval. There is.
  • the wedge-shaped members 51, 52 have a circular hole for connection at the center (apex) of the top.
  • the connecting member 43 is inserted into the hole of one of the wedge-shaped members 51 and fixed to the periphery of the hole so as to rotate integrally with the wedge-shaped member 51, and the hole of the other wedge-shaped member 52 is adjusted.
  • a connecting member 62 fixed to the projecting end of the pressure screw 61 is inserted and fixed to the peripheral portion of the hole so as to rotate integrally with the wedge-shaped member 52.
  • the opposing circular peripheral portions of the pair of wedge members 51, 52 are joined to each other and fixed by a ring-shaped fixing member 53, and when the motor shaft 42 rotates, the wedge members 51, 52 rotate in the rotational direction. I hate to rotate in unison.
  • the pair of wedge-shaped members 51 and 52 can be joined without using the fixing member 53. For example, after the peripheral portions of the wedge-shaped members 51 and 52 are brought into contact with one another, these opening peripheral portions may be fused and fixed.
  • An arithmetic circuit 30 is connected to the rotational drive device 41. Then, the step motor of the rotary drive 41 is step-rotated by the pulse signal output from the arithmetic circuit 30, and the pressure adjusting screw 61 is rotationally driven and adjusted by the motor shaft 42 and the connection joint 50.
  • the motor shaft 42 of the driving device 41 rotates, the pressure adjustment screw 61 is rotated through the wedge-shaped members 51 and 52, and the pressure adjustment screw 61 moves upward or downward while rotating according to its lead
  • the secondary pressure on the output side of the pressure control device body 60 can be adjusted.
  • the wedge members 51, 52 are deformed in the axial direction to allow the pressure adjustment screw 61 to move toward and away from the motor shaft 42. Do. At that time, the pair of wedge-shaped members 51, 52 hardly resists the twisting force around the axis, so the rotation of the motor shaft 42 free from knocks etc. is transmitted to the pressure adjusting screw 61 without delay. It can be transmitted at a rotation ratio of 1.
  • the pressure regulator main body 60 may be of any of various known structures, and preferably has high precision and short response time.
  • the flexible connection joint 50 is not limited to the substantially hemispherical wedge-shaped members 51, 52 shown in the drawings, but the outer peripheral shape of the joint portion which is conical or may be polygonal.
  • the arithmetic circuit 30 can be configured by a personal computer or the like, and the control method is not limited to the PID control.
  • FIG. 4 is a graph showing the vibration isolation characteristics in which the degree of opening and closing of the throttle (air orifice) 21 is made different in the pneumatic vibration isolation system of the present embodiment.
  • This graph shows the vibration transmission rate when the opening degree of the throttle 21 (the cross sectional area of the air passage) is changed in three steps. That is, the vibration characteristics of the vibration isolation table 71 when vibration is applied to the floor 70 with the throttle 21 fully narrowed, the diaphragm 21 half-opened, and the diaphragm 21 fully opened are shown.
  • the vertical axis is the transmission ratio of vibration (dB)
  • the horizontal axis is the frequency.
  • the resonance magnification is the ratio of (vibration of the vibration isolation table 71) Z (vibration of the floor 70), and the vibration of the vibration isolation table 71 is lower if the O (dB) force is also lower (one value) at the same frequency. Because it is smaller than floor 70, it means that vibration is being removed. Conversely, since the vibration of the vibration isolation table 71 becomes greater than the vibration of the floor 70 above 0 (dB) (value of +), it means that it is in resonance!
  • the throttle opening degree is medium
  • the air flow rate that can move back and forth between the bellows interior space S1 and the auxiliary tank 22 with the throttle 21 interposed therebetween is suitable, so the resonance level is greatly suppressed.
  • the resonance level is greatly suppressed.
  • a large throttle opening degree there is a large amount of air flow that can move back and forth between the bellows interior space S1 and the auxiliary tank 22 with the throttle 21 in between.
  • the case of the throttle opening is optimal.
  • the vibration isolation target held by the air panel 10 is a movable table or the like provided on the vibration isolation table 71
  • the center of gravity on the vibration isolation table moves.
  • the air panel 10 alone can attenuate normal vibrations but can not prevent the tilt of the vibration isolation table 71. That is, when the secondary pressure is constant, the vibration isolation table 71 tilts when the center of gravity on the vibration isolation table moves. Therefore, in the present embodiment, in order to keep the attitude of the vibration isolation table 71 constant and horizontal, the displacement sensor 16, the arithmetic circuit 30 and the motor drive type regulator 40 are provided.
  • the arithmetic circuit 30 which receives the displacement signal of each displacement sensor 16 calculates a pulse signal for driving the motor driven regulator 40 to drive the motor driven regulator 40, and the secondary pressure is generated. And hold the vibration isolation table 71 at the target position and posture.
  • the arithmetic circuit 30 that receives the position signal of each displacement sensor 16 drives the motor driven regulator 40.
  • a signal can be calculated, and based on this pulse signal, the motor driven regulator 40 can be driven to adjust the secondary pressure to shorten the time until the vibration converges.
  • FIG. 1 is a block diagram showing an embodiment of a pneumatic vibration isolation system to which the present invention is applied.
  • FIG. 2 A partially cutaway front view of a motor drive type regulator which is an embodiment of a pressure regulator used in the same pneumatic vibration isolation system.
  • FIG. 3 A side view of a motor-driven regulator which is an embodiment of a pressure control device used in the same pneumatic vibration isolation system.
  • FIG. 4 is a graph showing operation characteristics measured by changing the degree of opening of the throttle in the embodiment of the pneumatic vibration isolation system to which the present invention is applied.

Abstract

L’invention concerne un système pneumatique pour supprimer les vibrations avec un dispositif de suppression des vibrations utilisant la pression pneumatique, le système ayant des caractéristiques d’amortissement élevées, avec une large fourchette de fréquences d’amortissement et la capacité de changer l’attitude d’un objet duquel on doit supprimer les vibrations. Le système pneumatique pour supprimer les vibrations possède un dispositif pneumatique pour supprimer les vibrations; un capteur de déplacement pour détecter le déplacement d’une table de suppression des vibrations supportée par le dispositif pneumatique pour supprimer les vibrations ; un régulateur motorisé pour réduire une pression primaire à une pression secondaire, le régulateur motorisé ayant un moyen de mise en rotation et un dispositif de régulation de pression mis en rotation par le moyen de mise en rotation, le moyen de mise en rotation ajustant électriquement le degré de régulation de pression, le dispositif de régulation de pression étant flexible dans les directions d’approche et de départ ; un réservoir auxiliaire et un moyen de restriction qui sont connectés au dispositif pneumatique pour supprimer les vibrations ; et un moyen de calcul pour recevoir un signal de déplacement détecté par le capteur de déplacement, effectuant un calcul pour que le signal de déplacement conserve une valeur définie, et générant un signal de correction pour le régulateur motorisé.
PCT/JP2005/018794 2004-10-20 2005-10-12 Système pneumatique pour supprimer les vibrations WO2006043455A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-305758 2004-10-20
JP2004305758A JP2006118564A (ja) 2004-10-20 2004-10-20 空気圧除振システム

Publications (1)

Publication Number Publication Date
WO2006043455A1 true WO2006043455A1 (fr) 2006-04-27

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PCT/JP2005/018794 WO2006043455A1 (fr) 2004-10-20 2005-10-12 Système pneumatique pour supprimer les vibrations

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JP (1) JP2006118564A (fr)
TW (1) TW200626809A (fr)
WO (1) WO2006043455A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772672B2 (en) 2005-09-01 2010-08-10 Micron Technology, Inc. Semiconductor constructions

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5453170B2 (ja) * 2010-05-24 2014-03-26 株式会社Ｉｈｉ 制振装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03129140A (ja) * 1989-07-24 1991-06-03 Tokkyo Kiki Kk 空気ばね式除振台のレベル維持並びに微小振動の除振方法とその回路
JPH06159433A (ja) * 1992-11-30 1994-06-07 Kurashiki Kako Co Ltd アクティブ除振方法及び除振装置
JPH1195843A (ja) * 1997-09-19 1999-04-09 Fujikura Rubber Ltd 調圧装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03129140A (ja) * 1989-07-24 1991-06-03 Tokkyo Kiki Kk 空気ばね式除振台のレベル維持並びに微小振動の除振方法とその回路
JPH06159433A (ja) * 1992-11-30 1994-06-07 Kurashiki Kako Co Ltd アクティブ除振方法及び除振装置
JPH1195843A (ja) * 1997-09-19 1999-04-09 Fujikura Rubber Ltd 調圧装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772672B2 (en) 2005-09-01 2010-08-10 Micron Technology, Inc. Semiconductor constructions

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JP2006118564A (ja) 2006-05-11
TW200626809A (en) 2006-08-01

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