TW200626809A - Pneumatic vibration-isolation system - Google Patents
Pneumatic vibration-isolation systemInfo
- Publication number
- TW200626809A TW200626809A TW094135833A TW94135833A TW200626809A TW 200626809 A TW200626809 A TW 200626809A TW 094135833 A TW094135833 A TW 094135833A TW 94135833 A TW94135833 A TW 94135833A TW 200626809 A TW200626809 A TW 200626809A
- Authority
- TW
- Taiwan
- Prior art keywords
- vibration
- isolation
- pneumatic vibration
- motor
- secondary pressure
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
- G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
- Fluid-Damping Devices (AREA)
Abstract
To provide a pneumatic vibration-isolation system having a vibration isolation apparatus which utilizes pressurized air, having high attenuation characteristics, a wide attenuation frequency, and which can control the attitude of an object being isolated from vibration. A pneumatic vibration-isolation system includes pneumatic vibration-isolation apparatus; a displacement sensor which detects a displacement of a vibration-isolation base supported by the pneumatic vibration-isolation apparatus; a motor-driven regulator having an air-regulating apparatus which reduces a primary pressure to a secondary pressure and provides the secondary pressure to the pneumatic vibration-isolation apparatus, wherein the air-regulating apparatus is connected to a shaft of a motor via a flexible member having flexibility only in the axial direction thereof, and adjusts the secondary pressure by moving in the axial direction thereof while rotating via the flexible member when the motor shaft is rotated; a spare tank which provides the secondary pressure of the motor-driven regulator to the pneumatic vibration-isolation apparatus and is connected to the pneumatic vibration-isolation apparatus via a aperture; and a calculation device which receives a displacement signal detected by the displacement sensor, and calculates a correction signal for driving the motor so that the displacement signal maintains a set valve.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004305758A JP2006118564A (en) | 2004-10-20 | 2004-10-20 | Pneumatic vibration eliminating system |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200626809A true TW200626809A (en) | 2006-08-01 |
Family
ID=36202871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094135833A TW200626809A (en) | 2004-10-20 | 2005-10-14 | Pneumatic vibration-isolation system |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2006118564A (en) |
TW (1) | TW200626809A (en) |
WO (1) | WO2006043455A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7772672B2 (en) | 2005-09-01 | 2010-08-10 | Micron Technology, Inc. | Semiconductor constructions |
JP5453170B2 (en) * | 2010-05-24 | 2014-03-26 | 株式会社Ihi | Vibration control device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2878777B2 (en) * | 1989-07-24 | 1999-04-05 | 特許機器 株式会社 | Level maintenance of air spring type vibration isolation table and vibration isolation method of minute vibration and its circuit |
JP3372975B2 (en) * | 1992-11-30 | 2003-02-04 | 倉敷化工株式会社 | Active vibration isolation method and vibration isolation device |
JPH1195843A (en) * | 1997-09-19 | 1999-04-09 | Fujikura Rubber Ltd | Pressure regulating device |
-
2004
- 2004-10-20 JP JP2004305758A patent/JP2006118564A/en active Pending
-
2005
- 2005-10-12 WO PCT/JP2005/018794 patent/WO2006043455A1/en active Application Filing
- 2005-10-14 TW TW094135833A patent/TW200626809A/en unknown
Also Published As
Publication number | Publication date |
---|---|
JP2006118564A (en) | 2006-05-11 |
WO2006043455A1 (en) | 2006-04-27 |
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