TW200626809A - Pneumatic vibration-isolation system - Google Patents

Pneumatic vibration-isolation system

Info

Publication number
TW200626809A
TW200626809A TW094135833A TW94135833A TW200626809A TW 200626809 A TW200626809 A TW 200626809A TW 094135833 A TW094135833 A TW 094135833A TW 94135833 A TW94135833 A TW 94135833A TW 200626809 A TW200626809 A TW 200626809A
Authority
TW
Taiwan
Prior art keywords
vibration
isolation
pneumatic vibration
motor
secondary pressure
Prior art date
Application number
TW094135833A
Other languages
Chinese (zh)
Inventor
Hiroshi Chinda
Mitsuaki Nakanishi
Tomomasa Fujita
Akihiro Hayashi
Original Assignee
Fujikura Rubber Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Rubber Ltd filed Critical Fujikura Rubber Ltd
Publication of TW200626809A publication Critical patent/TW200626809A/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
    • G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements

Abstract

To provide a pneumatic vibration-isolation system having a vibration isolation apparatus which utilizes pressurized air, having high attenuation characteristics, a wide attenuation frequency, and which can control the attitude of an object being isolated from vibration. A pneumatic vibration-isolation system includes pneumatic vibration-isolation apparatus; a displacement sensor which detects a displacement of a vibration-isolation base supported by the pneumatic vibration-isolation apparatus; a motor-driven regulator having an air-regulating apparatus which reduces a primary pressure to a secondary pressure and provides the secondary pressure to the pneumatic vibration-isolation apparatus, wherein the air-regulating apparatus is connected to a shaft of a motor via a flexible member having flexibility only in the axial direction thereof, and adjusts the secondary pressure by moving in the axial direction thereof while rotating via the flexible member when the motor shaft is rotated; a spare tank which provides the secondary pressure of the motor-driven regulator to the pneumatic vibration-isolation apparatus and is connected to the pneumatic vibration-isolation apparatus via a aperture; and a calculation device which receives a displacement signal detected by the displacement sensor, and calculates a correction signal for driving the motor so that the displacement signal maintains a set valve.
TW094135833A 2004-10-20 2005-10-14 Pneumatic vibration-isolation system TW200626809A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004305758A JP2006118564A (en) 2004-10-20 2004-10-20 Pneumatic vibration eliminating system

Publications (1)

Publication Number Publication Date
TW200626809A true TW200626809A (en) 2006-08-01

Family

ID=36202871

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135833A TW200626809A (en) 2004-10-20 2005-10-14 Pneumatic vibration-isolation system

Country Status (3)

Country Link
JP (1) JP2006118564A (en)
TW (1) TW200626809A (en)
WO (1) WO2006043455A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772672B2 (en) 2005-09-01 2010-08-10 Micron Technology, Inc. Semiconductor constructions
JP5453170B2 (en) * 2010-05-24 2014-03-26 株式会社Ｉｈｉ Vibration control device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2878777B2 (en) * 1989-07-24 1999-04-05 特許機器 株式会社 Level maintenance of air spring type vibration isolation table and vibration isolation method of minute vibration and its circuit
JP3372975B2 (en) * 1992-11-30 2003-02-04 倉敷化工株式会社 Active vibration isolation method and vibration isolation device
JPH1195843A (en) * 1997-09-19 1999-04-09 Fujikura Rubber Ltd Pressure regulating device

Also Published As

Publication number Publication date
WO2006043455A1 (en) 2006-04-27
JP2006118564A (en) 2006-05-11

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