WO2006032773A3 - Dispositif d'electrode pour le traitement par plasma des faces interieures d'un recipient et procede de traitement par celui-ci - Google Patents
Dispositif d'electrode pour le traitement par plasma des faces interieures d'un recipient et procede de traitement par celui-ci Download PDFInfo
- Publication number
- WO2006032773A3 WO2006032773A3 PCT/FR2005/002321 FR2005002321W WO2006032773A3 WO 2006032773 A3 WO2006032773 A3 WO 2006032773A3 FR 2005002321 W FR2005002321 W FR 2005002321W WO 2006032773 A3 WO2006032773 A3 WO 2006032773A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- neck
- container
- plasma treatment
- electrode device
- conductive ring
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Details Of Rigid Or Semi-Rigid Containers (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05805780A EP1803143A2 (fr) | 2004-09-21 | 2005-09-19 | Dispositif d'electrode pour le traitement par plasma des faces interieures d'un recipient et procede de traitement par celui-ci |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0409978A FR2875641B1 (fr) | 2004-09-21 | 2004-09-21 | Dispositif d'electrode pour le traitement par plasma des faces d'un recipient et procede de traitement par celui-ci |
FR0409978 | 2004-09-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006032773A2 WO2006032773A2 (fr) | 2006-03-30 |
WO2006032773A3 true WO2006032773A3 (fr) | 2006-12-07 |
Family
ID=34949420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2005/002321 WO2006032773A2 (fr) | 2004-09-21 | 2005-09-19 | Dispositif d'electrode pour le traitement par plasma des faces interieures d'un recipient et procede de traitement par celui-ci |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1803143A2 (fr) |
FR (1) | FR2875641B1 (fr) |
WO (1) | WO2006032773A2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2534808B2 (es) * | 2013-10-25 | 2016-10-06 | Universidad De Cordoba | Reactor de plasma pulsado y su aplicación para la transformación de hidrocarburos en grafenos |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0665304A1 (fr) * | 1994-01-31 | 1995-08-02 | Nissin Electric Company, Limited | Procédé pour la fabrication d'un tube ayant un film à sa surface intérieure périphérique et appareillage pour la fabrication de ce tube |
US6112695A (en) * | 1996-10-08 | 2000-09-05 | Nano Scale Surface Systems, Inc. | Apparatus for plasma deposition of a thin film onto the interior surface of a container |
-
2004
- 2004-09-21 FR FR0409978A patent/FR2875641B1/fr not_active Expired - Fee Related
-
2005
- 2005-09-19 WO PCT/FR2005/002321 patent/WO2006032773A2/fr active Application Filing
- 2005-09-19 EP EP05805780A patent/EP1803143A2/fr not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0665304A1 (fr) * | 1994-01-31 | 1995-08-02 | Nissin Electric Company, Limited | Procédé pour la fabrication d'un tube ayant un film à sa surface intérieure périphérique et appareillage pour la fabrication de ce tube |
US6112695A (en) * | 1996-10-08 | 2000-09-05 | Nano Scale Surface Systems, Inc. | Apparatus for plasma deposition of a thin film onto the interior surface of a container |
Also Published As
Publication number | Publication date |
---|---|
FR2875641A1 (fr) | 2006-03-24 |
EP1803143A2 (fr) | 2007-07-04 |
WO2006032773A2 (fr) | 2006-03-30 |
FR2875641B1 (fr) | 2006-11-10 |
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