WO2006006552A1 - 電動機制御装置 - Google Patents
電動機制御装置 Download PDFInfo
- Publication number
- WO2006006552A1 WO2006006552A1 PCT/JP2005/012740 JP2005012740W WO2006006552A1 WO 2006006552 A1 WO2006006552 A1 WO 2006006552A1 JP 2005012740 W JP2005012740 W JP 2005012740W WO 2006006552 A1 WO2006006552 A1 WO 2006006552A1
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- WIPO (PCT)
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- control device
- setting
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- motor control
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/18—Controlling the angular speed together with angular position or phase
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/0004—Control strategies in general, e.g. linear type, e.g. P, PI, PID, using robust control
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S388/00—Electricity: motor control systems
- Y10S388/90—Specific system operational feature
- Y10S388/906—Proportional-integral system
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S388/00—Electricity: motor control systems
- Y10S388/907—Specific control circuit element or device
- Y10S388/912—Pulse or frequency counter
Definitions
- the present invention can be easily adjusted by reducing the number of multiple gains and filter settings in an electric motor control device that can be set in accordance with the characteristics of the machine by changing the response characteristics of the motor.
- the present invention relates to an electric motor control device that makes it possible to reduce the number of procedures required for starting operation.
- the conventional motor control device calculates the integral time constant of the speed controller, position proportional gain ⁇ , torque command filter, etc. as the gain and filter setting method, such as the proportional gain Kv of the speed controller. Any digital value is set and stored as an internal parameter. Some powerful indicators such as servo amplifier parameter setting methods (in this case, one parameter gain) also set the parameter setting device force.
- the motor control device of Patent Document 1 includes a proportional-integral calculation unit, and controls either a speed control unit that controls the angular speed of the motor, a proportional gain (Kv), or an integration time constant (Ti) of the speed control unit. Is set, other gain settings can be set so that the relationship shown in the following equations (1) and (2) or (3) and (4) is always maintained. ,
- Cpi is a constant that can be set under the following conditions
- Cip is a constant that can be set under the following conditions
- a first compensation unit that performs a proportional calculation, a second compensation unit that performs an integral calculation, a torque signal (Tref) of the motor that outputs the speed control unit force S, and an output of the first compensation unit
- Tref torque signal
- the output of the second compensation unit is added and input to the equivalent rigid body model, and a difference signal obtained by subtracting the output of the equivalent rigid body model from the speed signal of the speed control unit is added to the first compensation unit.
- the proportional gain of the input unit input to the second compensation unit and the first compensation unit is defined as a product of a first gain ( ⁇ s) and a second gain (co s), and the second gain
- the integral gain of the compensation unit is defined as the square of the second gain
- the proportional gain (Kv) of the proportional calculation unit of the speed control unit is multiplied by a preset band setting coefficient ((X))
- the absolute value of the difference signal between the output of the equivalent rigid body model and the estimated speed signal of the speed control unit is set in advance as the second gain ( ⁇ s) and compared with the detected speed level.
- a phase control device is provided, and a proportional gain (Kp) of the position control device and the speed control unit are provided.
- Kv proportional gain
- Ti integral time constant
- Cp is a constant that can be set under the following conditions:
- a gain setting unit capable of setting other gains is provided so as to always maintain the relationship represented by
- the gain setting method of the motor control device is that when there is a vibration detection output from the vibration detection unit, the gain setting unit automatically reduces the proportional gain (Kv) by about 10%, and the vibration detection output is lost. The proportional gain (Kv) is repeatedly reduced until.
- the servo motor control parameter adjusting device in Patent Document 2 is a device that adjusts a plurality of control parameters used to control the servo motor.
- a first correction unit that corrects at least one control parameter of the plurality of control parameters; a calculation unit that calculates a change in at least one control parameter corrected by the first correction unit;
- a second correction unit that corrects a control parameter other than at least one control parameter corrected by the first correction unit among the plurality of control parameters based on the change (see, for example, Patent Document 2) ).
- the servo amplifier communicates with the computer, and the position proportional gain, speed proportional gain, etc. are set for the gain setting device in the servo amplifier via the key input section, display section, storage section, etc. is there.
- the conventional electric motor control device has a control gain and a filter setting method.
- the configuration is such that the gain and filter time constant in the motor control device are set by the operator inputting values using the dedicated operator as the input device.
- Patent Document 1 Japanese Unexamined Patent Publication No. 2003-189653 (Fig. 2)
- Patent Document 2 Japanese Patent Laid-Open No. 06-319284 (Fig. 1, Fig. 2, Fig. 7)
- the conventional motor control device arbitrarily sets control gain values such as the proportional gain Kv, integral time constant Ti, position proportional gain Kp, and torque command filter Tf of the speed control unit. For this reason, a dedicated external setting device is required to set and change an arbitrary digital value as an internal parameter, and the parameter input change switch such as a switch for setting and the digital value are input to the operator. A parameter operation device equipped with a parameter display for recognition is required. As a result, the number of components of the motor control device increases, and as a result, the manufacturing cost of the motor control device is increased to the extent that man-hours necessary for manufacturing increase.
- the control gain and the like determine the response characteristics and can be determined by the operator, but the mechanical resonance countermeasure filter varies depending on the characteristics of the machine.
- the notch filter frequency Nf is automatically set after frequency response analysis of the mechanical force response. For this reason, once the notch filter frequency Nf is set, The notch filter frequency Nf that is stored in the motor control unit after the mechanical characteristics are changed greatly, the motor control unit is replaced, or a motor with a different rated power capacity is stored. If it does not match the resonance frequency of the mechanical characteristics, a parameter input device is required, and there are problems such as enabling / disabling the notch filter and checking, changing, and resetting the notch filter frequency Nf. It was.
- the present invention has been made in view of such problems, and the object thereof is as follows. (1) The procedure for setting, changing, and resetting the control gain and notch filter frequency Nf without using the parameter input device as well as the procedure for applying the gain adjustment required before normal operation. We will provide a motor controller that can be easily handled even by non-skilled personnel.
- the present invention provides a speed control unit that includes a proportional-integral calculation unit and controls the angular speed of the motor, a position control unit that includes a proportional-integral calculation unit and controls the angle of the motor, and the position Torque command filter that inputs the proportional gain (Kp) of the control unit, the proportional gain (Kv) of the speed control unit, the integral time constant (Ti) of the speed control unit, the torque command output by the speed control unit Low-pass filter time constant (Tf) and the position controller
- the motor control device provided with a setting unit for setting the value of the low-pass filter time constant (Tp) of the position acceleration / deceleration filter for smoothing the steep fluctuation of the standing command.
- the speed control proportional gain ⁇ , the position proportional gain ⁇ , the speed control integral time constant Ti, the torque command low-pass filter Tf, and the position command low-pass filter time constant Tp are constant with respect to the set values. It has a first switching section that is assigned step by step in proportion or arbitrary value.
- a speed control unit that includes a proportional-integral calculation unit to control the angular velocity of the motor, a position control unit that includes a proportional-integral calculation unit to control the angle of the motor, the proportional gain (Kp) of the position control unit, and the speed
- the values of the proportional gain (Kv) of the control unit, the integral time constant (Ti) of the speed control unit, and the lowpass filter time constant (Tf) of the torque command filter for inputting the torque command output from the speed control unit
- an electric motor control device including a setting unit to be set, a notch filter disposed at a subsequent stage of the torque command filter, and the notch filter setting unit, the speed control proportional gain Kv, the position proportional gain ⁇ , Speed control integral time constant Ti, the first switching section where the value of the torque command low-pass filter Tf is assigned step by step at a certain ratio or arbitrary value to the set value, and the first switching section By switching the setting, the notch filter setting is set before the change of the first switching
- a setting storage unit for always storing the setting value of the first switching unit in the nonvolatile memory.
- a sign signal and pulse train, or a forward pulse train and a reverse pulse train command are selected as position train pulse train commands
- a command pulse selection unit for selecting the logic of the pulse signal and selecting a command resolution
- It is equipped with a second switching section to which each setting value of the command pulse selection section is assigned.
- the resetting of the notch filter is performed during the initialization process when the power is turned on when the first switching unit is changed when the electric power of the motor control device is cut off. Compare the setting value of the first switching unit at the previous power-on stored in the constant storage unit with the setting value of the first switching unit at the time of the current power-on, and apply the notch filter only when the value is different. It is something to reset.
- a change detection unit that detects that the second switching unit has been changed during power-on is provided.
- the warning display unit when the second switching unit is changed during power-on and the warning display unit generates a warning and then returns to the position before the change again, the warning display on the warning display unit is stopped.
- the light-emitting unit such as the warning display LED or the liquid crystal is turned on or blinks intermittently.
- a motor energization signal is input, and at least one is displayed as to whether the motor is energized, whether the command pulse train is correctly input to the motor controller, or whether a signal that clears the position deviation to zero is input.
- the motor control device according to claim 1 or 2, further comprising an external display unit.
- an external display display unit is provided that can inform the operator of the contents.
- the notch filter setting unit is interlocked with the change in the value of the first switching unit, and when the first switching unit is changed after the notch filter frequency Nf is set once, and the set value changes. Again, the frequency analysis section force receives the vibration frequency at that time again and sets this value in the notch filter again.
- the first switching portion is a rotary switch, a dip switch, or a piano switch.
- control gain can be changed only by changing the setting with one rotary switch without using a setting device that sets any parameter value for adjusting multiple control gains that determine the responsiveness inside the motor controller.
- a rotary switch By using a rotary switch, the area force occupying the operating unit on the surface of the miniaturized motor control device can reduce the overall size of the device. Similarly, the area occupied by the board on which the electronic components inside the motivation control device are mounted can be reduced.
- the notch filter frequency Nf can be automatically set and re-set with respect to the machine resonance frequency specific to the machine only with an arbitrary control gain set by the operator, it is possible to change only one rotary switch as described above. Even if the characteristics of the machine to which the control device is installed change significantly, it can be dealt with only by changing the switch.
- the present invention has the following effects.
- FIG. 1 is an overall view of an electric motor control device showing a first embodiment of the present invention.
- FIG. 2 is a diagram showing a pulse setting table and gain / filter setting table of the first embodiment of the present invention.
- FIG. 3 is a diagram showing processing of the rotary switch 1 and warning display device (LED) of the motor control device of the present invention.
- FIG. 4 is a diagram showing the processing of the rotary switch 1 and warning display device (7-segment LED) of the motor control device of the present invention.
- FIG. 5 is a diagram showing the processing of the rotary switch 2 and the warning display device of the motor control device of the present invention.
- FIG. 6 is a diagram showing the external display device and the internal state of the motor control device of the present invention.
- FIG. 1 is a schematic block diagram of an electric motor control device according to the present invention.
- 10 is a speed control unit
- 11 is a position control unit
- 12 is a motor
- 13 is an encoder
- 14 is an angular velocity calculation unit
- 15 is a frequency analysis unit
- 16 is a frequency setting unit
- 17 is a notch filter
- 18 is a torque command.
- Filter 19 is a position acceleration / deceleration filter
- 20 is a position command pulse train
- 21 is a pulse input device
- 22 is a display unit.
- the display unit 22 includes 23 external display devices 1, 24 external display devices 2, and 25 warning display devices.
- FIG. 2 is a diagram showing a pulse setting table, a gain / filter setting table of the first embodiment of the present invention.
- the pulse setting table 3 also outputs a command pulse train for operation to the motor control device, such as a high-order command device composed of a sequencer such as a programmable controller, NC, or machine controller that is widely used at present.
- the pulse setting table 3 shows the CW and CCW two-phase pulse output systems that are common in the industry as motor control configurations, the pulse command forms based on the sign and pulse train commands, and the logic-inverted total of each combination thereof.
- pulses composed of 90 ° phase A and B phase pulses.
- the command resolution is determined by the pulse train output frequency that can be output by the host device and the maximum motor speed. In other words, when the command resolution is 1000PZREV, the command pulse frequency Prefx required to turn the maximum speed Vmax (min in 1 ) is
- Each control gain and filter in Table 4 of the gain and filter settings are, for example, Rous'fullbits in the case of a secondary system represented by equations (1) to (6) in Japanese Patent Laid-Open No. 2003-189653 (Patent Document 1). It consists of a relational expression expressed by the following formula and a value obtained by providing a safety factor in a relational expression that can be easily derived.
- the rotary switch set value RSW2 is a value from 0 to 4 in order to suppress vibrations caused mainly by sudden acceleration of the motor by smoothing the steep commands from the host device.
- the acceleration / deceleration time constant was increased equally from Oms to 20ms.
- the operator changes the setting value of the rotary switch 2 from 0 to 4 step by step, It was set in consideration of the effect of slowing down the response by the filter and the increase in positioning settling time.
- the RSW2 setting value is from 5 to 7, even if the setting value from 0 to 4 cannot suppress vibration, the vibration can be suppressed by reducing the response characteristics by reducing the speed proportional gain.
- the setting values 8 to F are set in the order of F to 8 by reversing the gain and filter settings from 0 to 6 above. This is to prevent vibration or the like from occurring in the machine due to the difference in the proportional gain of the set value even if it is set to F by mistake when the operator changes from 0 to 1.
- FIG. 1 which is a control block diagram of the present invention
- the control block inside the motor control device is a position command Pref from the form of the input pulse and the command resolution. It is input to the position acceleration / deceleration filter 19 through the pulse input device 21 for generating
- a low-pass filter is configured by the position acceleration / deceleration time constant Tp.
- Tp position acceleration / deceleration time constant
- S-shaped acceleration / deceleration filter such as a moving average that is not possible with a low-pass filter.
- the capacity increases, it is possible to reduce the shock at the start and stop as much as possible.
- this rotary switch 1 changes its value while the power is turned on, the operator will confirm that the value has been clearly changed, so that the next operation can be safely performed with the correct settings. Even if the warning display device 22 is used to issue a warning when the LED is turned on or off at any given time, and the set value is changed while the rotary switch 1 is powered on, the internal processing will not change to the currently set new pulse setting. Without being set to the value before the change. Other warning methods have the problem of installation area. One or more 7-segment LED alarm characters may be displayed in part or in whole or numerically.
- Reference numeral 23 denotes an external display device 1, which is an internal display when the motor control device is turned on. Indicates the LED that lights up when the voltage is within the preset voltage range by detecting the voltage! Alternatively, one or more 7-segment LEDs can be displayed, allowing the user to confirm that the motor controller is energized.
- Reference numeral 24 denotes an external display device 2.
- the motor control device is turned on, or a motor energization signal is input to the motor control device, the motor is energized, or a command pulse train for driving the motor control device.
- Figure 6 shows the combination of the three states and the lighting and flashing of the LEDs in that case as an example.
- the number of operators is small, but the state inside the motor control device can be almost understood, digital values such as parameters can be set, and the display of the present invention without a display device can be used with the minimum display method.
- the work contents should be checked to determine whether the settings of the external input signal, command pulse train polarity, voltage level, input port, etc. are normal.
- [0037] 25 in FIG. 1 is a warning display device, which is an abnormal condition that occurs inside the motor control device when the motor control device is turned on, for example, when the power supply voltage is abnormally high or low, and the motor speed. Indicates an LED that illuminates as an alarm when stable operation is difficult, such as when the value exceeds the reference value or when the internal temperature of the motor controller is abnormally high.
- the warning display device 25 shown in Fig. 1 has three LEDs, and can be displayed in 8 different ways by turning them on and off. In addition, one or more 7-segment LEDs can be displayed instead of LEDs, so that the user can confirm the initial settings.
- Reference numeral 11 denotes a position control unit, which becomes a speed command Vref by applying a position control proportional gain Kp to the deviation between the position feedback signal from the encoder 13 and the position command.
- the position information of the encoder is differentiated by the angular velocity calculation unit 14 to generate a feedback angular velocity Vfb.
- the speed control unit 10 is the difference between the feedback angular speed Vfb and the speed command Vref Create a difference, reduce the steady-state deviation using the speed control proportional gain Kv and the speed control integral time constant, and obtain the torque command Tref.
- This torque command Tref is input to the torque command filter 18 and the frequency analysis unit 15.
- [0040] 18 is a torque command filter of a low-pass filter for removing a high-frequency component that becomes an unstable component of response in the created torque command Tref, and its setting time constant Tf is internally set.
- [0041] 17 is a notch filter, and the torque command force motor loop open loop response to the machine resonance frequency (natural frequency) of the mechanical device connected to the load side of the motor 12 is the machine resonance frequency section.
- the filter that becomes the response attenuated by the notch filter is set.
- Reference numeral 15 denotes a frequency analysis unit for extracting the vibration frequency at which the feedback angular velocity Vfb force of the motor and machine also oscillates.
- the motor speed from the angular velocity calculation unit 14 and the torque command output from the speed control unit 10 For example, as shown in Fig. 4 and Fig. 5, the equivalent rigid body observer is constructed from Tref, and the bandwidth of the observer is set to ⁇ times the speed control proportional gain Kv.
- the observer speed Vfbx which is the motor speed estimated in (1), is created, and the difference between the observer speed Vfbx and the motor speed Vfb is the vibration component.
- This Vvib signal is analyzed into frequency components such as Fourier transform, gain values for these frequency components are specified, and the notch filter in the distribution is 4 to 5 times the speed control proportional gain Kv. It is set for the maximum value among the frequency Nf with the highest gain and the highest gain Nf or the product of the frequency Nf and the gain. For example, in the case of speed control proportional gain Kv force OHz, a value of about 160 to 200 Hz or more is specified. The analysis result in this range is considered to correspond to the resonance frequency of the structure including the machine connected to the motor, and is for setting the notch filter at this frequency.
- Reference numeral 16 denotes a notch filter frequency setting unit for setting the notch filter frequency Nf obtained by the frequency analysis unit in the actual notch filter unit 17.
- This notch The filter setting section is linked to the change in the value of rotary switch 2. Once the notch filter frequency Nf is set, rotary switch 2 is changed, and when the set value changes, the notch filter frequency analysis is performed again. The vibration frequency at that time is received again from section 15 and this value is reset in notch filter 17.
- FIG. 3 shows a warning display by changing the setting of the rotary switch 1.
- 30B indicates the switch setting before the rotary switch is changed.
- the value is 4, and the setting value (CW + CCW) of the RSW1 value force row in the pulse setting table 3 in FIG. Negative logic, command resolution 1000 pulses (Zref) is set.
- 30A is the set value after the switch is changed. In this case, 0A indicates 0 (CW + CCW positive logic, command resolution 1000 pulses / ref). If the set value force of 32B is changed to the set value of 30A while the power is on, the set value is not validated and the output signal to 4 warning display device is transmitted. In Fig. 4, this display device can be used as a warning by using a 7-segment LED or by combining numbers or LEDs.
- FIG. 5 shows a diagram in which the gain and filter are set by changing the setting of the rotary switch 2, and the notch filter setting frequency is detected and reset by changing the set value.
- 32B is the value before rotary switch 2 is changed and 4 is set.
- 32A shows the set value 0 after the change.
- the set value is immediately stored in the non-volatile memory of the rotary switch 2 setting storage unit 51.
- the rotary switch 2 resetting unit 52 sets the rotary switch 2 setting storage unit when the power is turned on while the setting value is changed to the setting of 0 shown in 32A above.
- this notch filter frequency automatically detects whether or not there is vibration immediately after the motor is energized, and if the vibration exceeds a certain level, the vibration frequency is determined, and the notch filter frequency is automatically determined. Is set to the vibration frequency. Further, according to the present invention, even when the characteristics of the motor control device are greatly changed and the vibration frequency is different, the function of performing the frequency detection to automatic setting again only by switching the rotary switch is provided.
- the present invention relates to a pulse train input type motor control device.
- a transmission / reception communication function with a host device is provided, and position command data from the host device is transmitted to the motor control device.
- the command resolution item in the pulse setting table 3 can be used as it is. Therefore, motor control with communication function It can also be applied to uses such as device gain settings and filter settings.
- the pulse train input device also has the function of transmitting and receiving position data by communication.
- the motor control device capable of setting a plurality of position data in the nonvolatile storage device inside the motor control device is sequentially set in any order or in a predetermined order. It can also be applied to a motor control device of a command form that moves.
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Abstract
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2006529023A JP5056012B2 (ja) | 2004-07-13 | 2005-07-11 | 電動機制御装置 |
US11/632,296 US7589488B2 (en) | 2004-07-13 | 2005-07-11 | Motor control apparatus |
DE112005001683T DE112005001683T5 (de) | 2004-07-13 | 2005-07-11 | Motorsteuereinrichtung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2004-206292 | 2004-07-13 | ||
JP2004206292 | 2004-07-13 |
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WO2006006552A1 true WO2006006552A1 (ja) | 2006-01-19 |
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PCT/JP2005/012740 WO2006006552A1 (ja) | 2004-07-13 | 2005-07-11 | 電動機制御装置 |
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US (1) | US7589488B2 (ja) |
JP (1) | JP5056012B2 (ja) |
KR (1) | KR20070041511A (ja) |
CN (1) | CN1985433A (ja) |
DE (1) | DE112005001683T5 (ja) |
TW (1) | TW200623603A (ja) |
WO (1) | WO2006006552A1 (ja) |
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JPWO2010018629A1 (ja) * | 2008-08-14 | 2012-01-26 | 国立大学法人九州大学 | レーザーイオン化質量分析における試料導入方法および装置 |
JP2013021804A (ja) * | 2011-07-11 | 2013-01-31 | Mitsutoyo Corp | 位置決め制御装置 |
JP2013121287A (ja) * | 2011-12-08 | 2013-06-17 | Sanyo Denki Co Ltd | モータ制御装置 |
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US8384442B2 (en) | 2010-07-22 | 2013-02-26 | Wayne F. Salhany | Integrated circuit signal generation device |
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JP2013184266A (ja) * | 2012-03-09 | 2013-09-19 | Hitachi Koki Co Ltd | 電動工具及び電動工具システム |
EP2826606A4 (en) * | 2012-03-15 | 2015-12-02 | Olympus Corp | HANDLING DEVICE |
CN103248283A (zh) * | 2013-04-25 | 2013-08-14 | 无锡艾森保自动化装备有限公司 | 用可编程控制器来控制多轴伺服电机的控制装置 |
JP7178327B2 (ja) * | 2019-06-14 | 2022-11-25 | 株式会社日立産機システム | ノッチフィルタ調整装置、およびそれを備えたモータ制御装置 |
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- 2005-07-11 CN CNA2005800239191A patent/CN1985433A/zh active Pending
- 2005-07-11 WO PCT/JP2005/012740 patent/WO2006006552A1/ja active Application Filing
- 2005-07-11 DE DE112005001683T patent/DE112005001683T5/de not_active Ceased
- 2005-07-11 JP JP2006529023A patent/JP5056012B2/ja not_active Expired - Fee Related
- 2005-07-13 TW TW094123778A patent/TW200623603A/zh unknown
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2010018629A1 (ja) * | 2008-08-14 | 2012-01-26 | 国立大学法人九州大学 | レーザーイオン化質量分析における試料導入方法および装置 |
JP2010088290A (ja) * | 2008-09-29 | 2010-04-15 | Oriental Motor Co Ltd | 慣性系の制御方法および装置 |
JP2013021804A (ja) * | 2011-07-11 | 2013-01-31 | Mitsutoyo Corp | 位置決め制御装置 |
JP2013121287A (ja) * | 2011-12-08 | 2013-06-17 | Sanyo Denki Co Ltd | モータ制御装置 |
WO2019207859A1 (ja) * | 2018-04-27 | 2019-10-31 | オムロン株式会社 | 設定管理システムおよび設定管理方法 |
Also Published As
Publication number | Publication date |
---|---|
US20070229016A1 (en) | 2007-10-04 |
DE112005001683T5 (de) | 2007-10-31 |
JP5056012B2 (ja) | 2012-10-24 |
JPWO2006006552A1 (ja) | 2008-04-24 |
KR20070041511A (ko) | 2007-04-18 |
US7589488B2 (en) | 2009-09-15 |
CN1985433A (zh) | 2007-06-20 |
TW200623603A (en) | 2006-07-01 |
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