WO2006004254A1 - Controlled airflow stock shelf - Google Patents

Controlled airflow stock shelf Download PDF

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Publication number
WO2006004254A1
WO2006004254A1 PCT/KR2005/000814 KR2005000814W WO2006004254A1 WO 2006004254 A1 WO2006004254 A1 WO 2006004254A1 KR 2005000814 W KR2005000814 W KR 2005000814W WO 2006004254 A1 WO2006004254 A1 WO 2006004254A1
Authority
WO
WIPO (PCT)
Prior art keywords
airflow
stock shelf
guide
shelf
control plate
Prior art date
Application number
PCT/KR2005/000814
Other languages
French (fr)
Inventor
Hae-Ryung Kim
Man-Seung Seo
Ji-Hye Hur
Original Assignee
Avaco Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Avaco Co., Ltd. filed Critical Avaco Co., Ltd.
Publication of WO2006004254A1 publication Critical patent/WO2006004254A1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Definitions

  • FIG. 1 is an exploded perspective view showing an embodiment of stock shelf basic unit, according to the present invention
  • FIG. 2 is a perspective view of a guide spoiler according to the present invention
  • FIG. 3 is perspective views showing the variable assembly of the stock shelf basic unit and the types of guide spoiler according to the present invention
  • FIG. 4 is an exploded perspective view of a controlled airflow stock shelf, according to a preferred embodiment of the present invention.
  • FIG. 5 is a perspective view showing a vertically assembled stock shelf according to the present invention
  • FIG. 6 is a perspective view showing the stock shelf placed in a stocker according to the present invention.
  • FIG. 7 is a sectional view showing airflow in the stocker having the stock shelf according to the present invention.
  • stock shelf 101 stock shelf basic unit
  • shelf beam 121a rear horizontal beam
  • shelf post 122a rear post
  • the present invention relates generally to controlled airflow stock shelves and, more particularly, to a controlled airflow stock shelf in which parts of a product, such as a semiconductor or a flat display panel, are temporarily stored during a process of manufacturing the product, so as to prevent contaminants from settling onto the surfaces of the parts and help maintain the cleanliness of the stocker at a desired level, thereby increasing the recovery rate of products.
  • a product such as a semiconductor or a flat display panel
  • FPDs flat panel displays
  • LCDs liquid crystal displays
  • PDPS plasma display panels
  • ELD electro luminescent displays
  • FEDs field emission displays
  • Such a stocker is classified into a vertical laminar airflow type and a horizontal laminar airflow type according to the direction in which parts are placed in the stocker.
  • an object of the present invention is to provide a controlled airflow stock shelf which has a guide spoiler that serves to control the flow of air to be supplied to each floor of the stock shelf in place of fan filter units or other devices (for example, porosity control plates) , thus simultaneously ensuring stable airflow and speed, thereby preventing contaminants from settling on the surfaces of parts, helping maintain the cleanliness of a stocker at a desired level, and increasing the recovery rate of products.
  • the present invention provides a controlled airflow stock shelf used in a cleanroom to temporarily store parts of a product such as a flat display during a process of manufacturing the product, wherein the controlled airflow stock shelf includes: a guide spoiler to guide air from the top of the cleanroom into the stock shelf.
  • the guide spoiler is rotatably coupled at a lower end thereof to the stock shelf so that the flow and speed air to be supplied into the stock shelf are controlled by adjusting the angle of the spoiler with respect to the stock shelf.
  • the guide spoiler is hinged at a lower end thereof to a rear horizontal beam of a shelf assembly which has a cubic structure and is constructed by assembling a plurality of bars, and the guide spoiler is supported at an upper end thereof by a pair of rear posts of the shelf assembly.
  • a plurality of shelf assemblies each having the guide spoiler is assembled vertically and horizontally.
  • the guide spoiler includes: an airflow control plate having a thin plate shape, with a plurality of hinge coupling holes formed in a lower end of the airflow control plate, so that the airflow control plate is coupled at the lower end thereof to the rear horizontal beam by a hinge; and an angle adjusting plate extending forwards from each of opposite side edges of the airflow control plate and having a sector shape increasing in width from the bottom to the top, with a guide slot, having an arc shape, formed in an upper end of the angle adjusting plate, so that the angle adjusting plate is fastened to each of the rear posts by an angle adjusting bolt.
  • the airflow control plate may have a flat shape, a convex shape which is curved forwards, or a concave shape which is curved backwards.
  • the airflow control plate may include a trimmed guide tip provided on an upper edge of the airflow control plate to control airflow and prevent noise and vibration from occurring due to air resistance.
  • FIG. 1 is an exploded perspective view showing an embodiment of stock shelf basic unit, according to the present invention.
  • a controlled airflow stock shelf of the present invention is constructed by vertically and horizontally assembling a plurality of stock shelf basic units (101) .
  • Each stock shelf basic unit (101) includes a shelf assembly (120) , a guide spoiler (110) , a hinge (131) which serves as a coupling means, a plurality of hinge locking bolts (136, 136') and a pair of angle adjusting bolts (137) .
  • the shelf assembly (120) includes a shelf beam (121) which is formed by assembling a plurality of bars, and a shelf post (122) which is vertically mounted to corners of the shelf beam (121) .
  • the shelf assembly (120) has a cubic structure.
  • FIG. 2 is a perspective view showing the construction of the guide spoiler according to the present invention.
  • the guide spoiler (110) includes an airflow control plate (111) and a pair of angle adjusting plates (112) . Meanwhile, a plurality of first hinge coupling holes
  • a plurality of second hinge coupling holes (126) is formed in a rear horizontal beam (121a) provided at a lower end of a rear portion of the shelf assembly (120) .
  • the hinge (121) is coupled at a first side thereof to the rear horizontal beam (121a) by the hinge locking bolts (136) passing through the second hinge coupling holes (126) of the rear horizontal beam (121a) .
  • the hinge (131) is coupled at a second side thereof to the lower end of the airflow control plate
  • each angle adjusting bolt (137) is tightened into an angle adjusting hole (127) of each of rear posts (122a) after passing through a rectangular guide slot (113) formed on an upper end of each angle adjusting plate 112 of the guide spoiler (110) , so that the angle of the guide spoiler (110) with respect to the shelf assembly (120) is adjustable.
  • a trimmed guide tip is provided on the upper edge of the airflow control plate (111) , thus controlling airflow, and preventing noise and vibration from occurring due to air resistance.
  • Each angle adjusting plate (112) integrally extends forwards from each of opposite side edges of the airflow control plate (111) .
  • the angle adjusting plate (112) has a sector shape that increases in width from the bottom to the top.
  • the rectangular guide slot (113) having an arc shape is formed in the upper end of the angle adjusting plate (112) provided on each of opposite side edges of the airflow control plate (111) , so that the angle of the airflow control plate (111) is adjustable with respect to the shelf assembly (120) .
  • the guide spoiler serves to increase both ascent and circulation efficiency of descending air current.
  • Design variables of the guide spoiler such as the position of the guide tip, a holding position of the angle adjusting plates and the curvature of the airflow control plate, is quantitatively determined through a two dimensional aerodynamic simulation in an early design stage in which the size and structure of a stocker are decided. This quantitative determination of the design variables of the guide spoiler increases the accuracy of the control of flow and speed of air.
  • FIG. 3 is perspective views showing the variable assembly of the stock shelf basic unit and the types of guide spoiler.
  • the guide spoiler (110) is coupled to both the rear horizontal beam (121a) and the shelf post (122) regardless of both the position of the guide tip (115) and the angle of the airflow control plate (111) .
  • the guide spoiler (110) may comprise a flat guide spoiler (401) , or a curved guide spoiler (402) which has a convex or concave shape.
  • the curved guide spoiler (402) has an airfoil shape similar to the wings of an airplane.
  • FIG. 4 is an exploded perspective view of the controlled airflow stock shelf, according to .the preferred embodiment of the present invention.
  • each stock shelf basic unit (101) consists of the guide spoiler (110) , the shelf assembly (120) and the locking means.
  • the controlled airflow stock shelf (100) of the present invention is constructed by vertically and horizontally assembling the stock shelf basic units (101) .
  • FIG. 5 is a perspective view showing the vertically assembled stock shelf. As shown in FIG. 5, the controlled airflow stock shelf (100) is constructed by vertically assembling the stock shelf basic units (101) .
  • FIG. 6 is a perspective view showing the controlled airflow stock shelf of the present invention placed in the stocker. As shown in FIG. 6, the controlled airflow stock shelf constructed by vertically and horizontally assembling the stock shelf basic units (101) is placed in the stocker (200) .
  • FIG. 7 is a sectional view showing airflow in the stocker having the controlled airflow stock shelf of the present invention.
  • most incoming air which is shown by the arrow (501) and drawn from the top of a cleanroom, flows in a horizontal direction toward a sidewall of the stocker, as shown by the arrow (502). Subsequently,' the air flows downwards between the sidewall and the stock shelf, as shown by the arrow (503) . The air which flows downwards is thereafter supplied into the stock shelf by the guide spoiler (110) .
  • the air supplied into the stock shelf flows in a horizontal direction, as shown by the arrow (504) , such that a constant shear stress is applied to the surfaces of parts of products, thus preventing contaminants from settling onto the surfaces .of the parts.
  • the air which passed through the stock shelf vertically flows toward the bottom of the cleanroom, as shown by the arrow (505) , and, thereafter, the air is discharged to the outside through the bottom of the cleanroom (300) .
  • the controlled airflow stock shelf of the present invention can control the flow rate of air using the guide spoiler, so that air is evenly distributed in the stock shelf. Furthermore, the present invention induces laminar flow in each cassette (500) by controlling the direction of airflow. In addition, the present invention can control the speed of air such that a constant shear stress is applied to the surfaces of parts of products, thus preventing contaminants from settling onto the surfaces of the parts. As well, the present invention helps maintain the cleanliness of the stocker at a desired level. Because of these advantages, the recovery rate of products is increased.
  • control airflow stock shelf of the present invention has superior functionality, stability, economical efficiency, practicality and mobility, compared with conventional equipment.
  • the present invention provides a controlled airflow stock shelf which is provided in a stocker of a cleanroom for manufacturing a product such as a semiconductor or an FPD to temporarily store parts of the product in a process of carrying the parts to a subsequent process, and which has a guide spoiler, unlike conventional arts having FFUs or other devices (for example, porosity control plates) , thus reducing the manufacturing costs of the stocker, avoiding economic burden that occurs due to FFUs in conventional arts, preventing an interior temperature of the stocker from increasing, and reducing vibration and noise. Furthermore, the present invention having the guide spoiler in place of having conventional FFUs or porosity control plates is more quantitative.
  • the present invention can evenly distribute air supplied into the stocker and appropriately adjust both the flow and speed of air, thus preventing contaminants from settling on the surfaces of the parts of the products, and helps maintain the cleanliness of the stocker at a desired level, thereby increasing the recovery rate of products.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Ventilation (AREA)

Abstract

The present invention provides a controlled airflow stock shelf which has a guide spoiler (110) serving as a means for distributing air into shelves of the stock shelf, so as to appropriately control the flow and speed of air such that airflow is evenly distributed among the shelves of the stock shelf and constant shear stress is applied to surfaces of parts of products placed on the shelves of the stock shelf, thus preventing contaminants from settling on the surfaces of the parts. The controlled airflow stock shelf of the present invention is constructed from a plurality of stock shelf basic unit (101). Each stock shelf basic unit (101) includes a guide spoiler (110), a shelf assembly (120) and a coupling means.

Description

DESCRIPTION
Title of the Invention
CONTROLLED AIRFLOW STOCK SHELF
Brief Description of the Drawings
FIG. 1 is an exploded perspective view showing an embodiment of stock shelf basic unit, according to the present invention; FIG. 2 is a perspective view of a guide spoiler according to the present invention;
FIG. 3 is perspective views showing the variable assembly of the stock shelf basic unit and the types of guide spoiler according to the present invention; FIG. 4 is an exploded perspective view of a controlled airflow stock shelf, according to a preferred embodiment of the present invention;
FIG. 5 is a perspective view showing a vertically assembled stock shelf according to the present invention; FIG. 6 is a perspective view showing the stock shelf placed in a stocker according to the present invention; and
FIG. 7 is a sectional view showing airflow in the stocker having the stock shelf according to the present invention.
*Description of the elements in the drawings*
100 : stock shelf 101 : stock shelf basic unit
110 : guide spoiler
111 : airflow control plate
112 : angle adjusting plate 113 : guide slot
115 : guide tip
116 : first hinge coupling hole
120 : shelf assembly
121 : shelf beam 121a : rear horizontal beam
122 : shelf post 122a : rear post
126 : second hinge coupling hole
127 : angle adjusting hole 131: hinge
136, 136' : hinge locking bolts
137 : angle adjusting bolt
200 : stocker
300 : cleanroom 401 : flat guide spoiler
402 : curved guide spoiler
500 : cassette
Detailed Description of the Invention Object of the Invention
Field of the Invention and Description of the Related
Art
The present invention relates generally to controlled airflow stock shelves and, more particularly, to a controlled airflow stock shelf in which parts of a product, such as a semiconductor or a flat display panel, are temporarily stored during a process of manufacturing the product, so as to prevent contaminants from settling onto the surfaces of the parts and help maintain the cleanliness of the stocker at a desired level, thereby increasing the recovery rate of products.
Generally, in cleanrooms in which flat panel displays (FPDs) such as liquid crystal displays (LCDs) , plasma display panels (PDPS) , electro luminescent displays (ELD) , or field emission displays (FEDs) are manufactured, stockers are used to temporarily store parts (glass substrates) of products when carrying the parts to subsequent processes. In a manufacturing process in such a cleanroom, contaminants settling on the surface of parts of products largely affect the recovery rate of products. Because the parts of products do not move in a stocker, the possibility of contaminants settling on the surface of the parts of the products is increased. Therefore, the cleanliness of the cleanroom importantly influences the recovery rate of products .
Such a stocker is classified into a vertical laminar airflow type and a horizontal laminar airflow type according to the direction in which parts are placed in the stocker. Most cleanrooms for FPDs, parts of which are relatively large, use a horizontal laminar airflow type stocker.
Meanwhile, the flow and speed of air to be supplied to each floor of the stocker influence the cleanliness of the interior of the stocker. • Judging from aerodynamic simulation experiments and experience at manufacturing sites, in the case of a vertical laminar airflow type stocker, if the stocker has no separate complementary device, turbulence occurs above parts of products. Thus, conventional arts are problematic in that flow and speed of air to be distributed among shelves of the stocker are uneven and instable.
To solve the above problems, several stocker manufacturing companies proposed stock shelves in which a fan filter unit (FFU) is provided on each level of a stock shelf. Recently, a horizontal laminar airflow type stocker having an FFU is used in most cleanrooms for FPDs.
However, due to the requirement to additionally install the FFU, the manufacturing costs of the stocker are increased, the working expenses of the FFU impose a burden on users, an interior temperature of the stocker is increased, and vibration and noise occur. Therefore, recently, studies on alternatives to FFUs have been conducted.
Technical Problem
Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide a controlled airflow stock shelf which has a guide spoiler that serves to control the flow of air to be supplied to each floor of the stock shelf in place of fan filter units or other devices (for example, porosity control plates) , thus simultaneously ensuring stable airflow and speed, thereby preventing contaminants from settling on the surfaces of parts, helping maintain the cleanliness of a stocker at a desired level, and increasing the recovery rate of products.
Construction and Operation of the Invention In order to accomplish the above object, the present invention provides a controlled airflow stock shelf used in a cleanroom to temporarily store parts of a product such as a flat display during a process of manufacturing the product, wherein the controlled airflow stock shelf includes: a guide spoiler to guide air from the top of the cleanroom into the stock shelf. The guide spoiler is rotatably coupled at a lower end thereof to the stock shelf so that the flow and speed air to be supplied into the stock shelf are controlled by adjusting the angle of the spoiler with respect to the stock shelf. Furthermore, the guide spoiler is hinged at a lower end thereof to a rear horizontal beam of a shelf assembly which has a cubic structure and is constructed by assembling a plurality of bars, and the guide spoiler is supported at an upper end thereof by a pair of rear posts of the shelf assembly. A plurality of shelf assemblies each having the guide spoiler is assembled vertically and horizontally.
Moreover, the guide spoiler includes: an airflow control plate having a thin plate shape, with a plurality of hinge coupling holes formed in a lower end of the airflow control plate, so that the airflow control plate is coupled at the lower end thereof to the rear horizontal beam by a hinge; and an angle adjusting plate extending forwards from each of opposite side edges of the airflow control plate and having a sector shape increasing in width from the bottom to the top, with a guide slot, having an arc shape, formed in an upper end of the angle adjusting plate, so that the angle adjusting plate is fastened to each of the rear posts by an angle adjusting bolt.
The airflow control plate may have a flat shape, a convex shape which is curved forwards, or a concave shape which is curved backwards. The airflow control plate may include a trimmed guide tip provided on an upper edge of the airflow control plate to control airflow and prevent noise and vibration from occurring due to air resistance. Herein below, the present invention will be described in detail in conjunction with the accompanying drawings.
FIG. 1 is an exploded perspective view showing an embodiment of stock shelf basic unit, according to the present invention. As shown in FIG. 1, a controlled airflow stock shelf of the present invention is constructed by vertically and horizontally assembling a plurality of stock shelf basic units (101) . Each stock shelf basic unit (101) includes a shelf assembly (120) , a guide spoiler (110) , a hinge (131) which serves as a coupling means, a plurality of hinge locking bolts (136, 136') and a pair of angle adjusting bolts (137) .
The shelf assembly (120) includes a shelf beam (121) which is formed by assembling a plurality of bars, and a shelf post (122) which is vertically mounted to corners of the shelf beam (121) . Thus, the shelf assembly (120) has a cubic structure.
FIG. 2 is a perspective view showing the construction of the guide spoiler according to the present invention. As shown in Fig. 2, the guide spoiler (110) includes an airflow control plate (111) and a pair of angle adjusting plates (112) . Meanwhile, a plurality of first hinge coupling holes
(116) is formed in a lower end of the airflow control plate
(111) of the guide spoiler (110) . A plurality of second hinge coupling holes (126) is formed in a rear horizontal beam (121a) provided at a lower end of a rear portion of the shelf assembly (120) . The hinge (121) is coupled at a first side thereof to the rear horizontal beam (121a) by the hinge locking bolts (136) passing through the second hinge coupling holes (126) of the rear horizontal beam (121a) . Furthermore, the hinge (131) is coupled at a second side thereof to the lower end of the airflow control plate
(111) by the hinge locking bolts (136') passing through the first hinge coupling holes (116) of the airflow control plate (111) . Thus, the guide spoiler (110) is rotatably coupled to the shelf assembly (120) by the hinge (131) . Each angle adjusting bolt (137) is tightened into an angle adjusting hole (127) of each of rear posts (122a) after passing through a rectangular guide slot (113) formed on an upper end of each angle adjusting plate 112 of the guide spoiler (110) , so that the angle of the guide spoiler (110) with respect to the shelf assembly (120) is adjustable.
Furthermore, a trimmed guide tip is provided on the upper edge of the airflow control plate (111) , thus controlling airflow, and preventing noise and vibration from occurring due to air resistance.
Each angle adjusting plate (112) integrally extends forwards from each of opposite side edges of the airflow control plate (111) . As well, the angle adjusting plate (112) has a sector shape that increases in width from the bottom to the top. The rectangular guide slot (113) having an arc shape is formed in the upper end of the angle adjusting plate (112) provided on each of opposite side edges of the airflow control plate (111) , so that the angle of the airflow control plate (111) is adjustable with respect to the shelf assembly (120) .
The guide spoiler serves to increase both ascent and circulation efficiency of descending air current. Design variables of the guide spoiler, such as the position of the guide tip, a holding position of the angle adjusting plates and the curvature of the airflow control plate, is quantitatively determined through a two dimensional aerodynamic simulation in an early design stage in which the size and structure of a stocker are decided. This quantitative determination of the design variables of the guide spoiler increases the accuracy of the control of flow and speed of air.
FIG. 3 is perspective views showing the variable assembly of the stock shelf basic unit and the types of guide spoiler. The guide spoiler (110) is coupled to both the rear horizontal beam (121a) and the shelf post (122) regardless of both the position of the guide tip (115) and the angle of the airflow control plate (111) .
Furthermore, according to the shape of the stocker (200) or airflow, the guide spoiler (110) may comprise a flat guide spoiler (401) , or a curved guide spoiler (402) which has a convex or concave shape. The curved guide spoiler (402) has an airfoil shape similar to the wings of an airplane.
FIG. 4 is an exploded perspective view of the controlled airflow stock shelf, according to .the preferred embodiment of the present invention. In the present invention, each stock shelf basic unit (101) consists of the guide spoiler (110) , the shelf assembly (120) and the locking means. The controlled airflow stock shelf (100) of the present invention is constructed by vertically and horizontally assembling the stock shelf basic units (101) .
FIG. 5 is a perspective view showing the vertically assembled stock shelf. As shown in FIG. 5, the controlled airflow stock shelf (100) is constructed by vertically assembling the stock shelf basic units (101) . FIG. 6 is a perspective view showing the controlled airflow stock shelf of the present invention placed in the stocker. As shown in FIG. 6, the controlled airflow stock shelf constructed by vertically and horizontally assembling the stock shelf basic units (101) is placed in the stocker (200) .
FIG. 7 is a sectional view showing airflow in the stocker having the controlled airflow stock shelf of the present invention. Referring FIG. 7, in the controlled airflow stock shelf, most incoming air, which is shown by the arrow (501) and drawn from the top of a cleanroom, flows in a horizontal direction toward a sidewall of the stocker, as shown by the arrow (502). Subsequently,' the air flows downwards between the sidewall and the stock shelf, as shown by the arrow (503) . The air which flows downwards is thereafter supplied into the stock shelf by the guide spoiler (110) .• The air supplied into the stock shelf flows in a horizontal direction, as shown by the arrow (504) , such that a constant shear stress is applied to the surfaces of parts of products, thus preventing contaminants from settling onto the surfaces .of the parts. The air which passed through the stock shelf vertically flows toward the bottom of the cleanroom, as shown by the arrow (505) , and, thereafter, the air is discharged to the outside through the bottom of the cleanroom (300) .
As such, the controlled airflow stock shelf of the present invention can control the flow rate of air using the guide spoiler, so that air is evenly distributed in the stock shelf. Furthermore, the present invention induces laminar flow in each cassette (500) by controlling the direction of airflow. In addition, the present invention can control the speed of air such that a constant shear stress is applied to the surfaces of parts of products, thus preventing contaminants from settling onto the surfaces of the parts. As well, the present invention helps maintain the cleanliness of the stocker at a desired level. Because of these advantages, the recovery rate of products is increased.
Moreover, in tests, the noise and vibration of the present invention having the guide spoiler are found to be improved over conventional arts having conventional FFUs. Therefore, the control airflow stock shelf of the present invention has superior functionality, stability, economical efficiency, practicality and mobility, compared with conventional equipment.
Effect of the Invention As described above, the present invention provides a controlled airflow stock shelf which is provided in a stocker of a cleanroom for manufacturing a product such as a semiconductor or an FPD to temporarily store parts of the product in a process of carrying the parts to a subsequent process, and which has a guide spoiler, unlike conventional arts having FFUs or other devices (for example, porosity control plates) , thus reducing the manufacturing costs of the stocker, avoiding economic burden that occurs due to FFUs in conventional arts, preventing an interior temperature of the stocker from increasing, and reducing vibration and noise. Furthermore, the present invention having the guide spoiler in place of having conventional FFUs or porosity control plates is more quantitative. As well, the present invention can evenly distribute air supplied into the stocker and appropriately adjust both the flow and speed of air, thus preventing contaminants from settling on the surfaces of the parts of the products, and helps maintain the cleanliness of the stocker at a desired level, thereby increasing the recovery rate of products.

Claims

CIAIMS
1. A controlled airflow stock shelf to temporarily store parts of a product such as a flat display panel in a process of manufacturing the product, wherein the controlled airflow stock shelf comprises: a plurality of shelf assemblies (120) vertically and horizontally assembled together, each of the plurality of shelf assemblies (120) having a three-dimensional structure and being manufactured by assembling a plurality of bars; and guide spoilers (110) , each of which is hinged at a lower end thereof to a rear horizontal beam (121a) , provided at a lower end of a rear portion of each of the shelf assemblies (120), the guide spoiler (110) being supported at an upper end thereof by a pair of rear posts (122a) of each of the shelf assemblies (120), so that both flow of air to be supplied into the stock shelf and a shear stress of air to be applied to the parts the product loaded in a cassette (500) are controlled by both a shape of the guide spoiler (110) and an angle of the guide spoiler (110) with respect to each of the shelf assemblies (120) , wherein the guide spoiler (110) comprises: an airflow control plate (111) having a thin plate shape, with a plurality of hinge coupling holes (116) formed in a lower end of the airflow control plate (111), so that the airflow control plate (111) is coupled at the lower end thereof to the rear horizontal beam (121a) by a hinge (131) ; and angle adjusting plates (112) extending forwards from opposite side edges of the airflow control plate (111) and having a sector shape increasing in width from bottom to top, with a guide slot (113) , having an arc shape, formed in an upper end of the angle adjusting plate (112), so that the angle adjusting plate (112) is fastened to each of the rear posts (122a) by an angle adjusting bolt (137) .
2. The controlled airflow stock shelf according to claim 1, wherein a cross-section of the airflow control plate (111) has a flat shape, a convex shape which is curved forwards, or a concave shape which is curved backwards.
3. The controlled airflow stock shelf according to claim 1, wherein the airflow control plate (111) comprises a trimmed guide tip (115) provided on an upper edge of the airflow control plate (111) to control airflow and prevent noise and vibration from occurring due to air resistance.
PCT/KR2005/000814 2004-03-24 2005-03-22 Controlled airflow stock shelf WO2006004254A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20040020158A KR100491740B1 (en) 2004-03-24 2004-03-24 Flow Control Stocker Shelf
KR10-2004-0020158 2004-03-24

Publications (1)

Publication Number Publication Date
WO2006004254A1 true WO2006004254A1 (en) 2006-01-12

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CN (1) CN100411131C (en)
WO (1) WO2006004254A1 (en)

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JPH08298283A (en) * 1995-04-27 1996-11-12 Matsushita Electron Corp Wafer cassette and wafer cassette station
JP2002338007A (en) * 2001-05-18 2002-11-27 Shinko Electric Co Ltd Stocker
JP2002343846A (en) * 2001-05-18 2002-11-29 Shinko Electric Co Ltd Stocker

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JP3147804B2 (en) * 1997-02-13 2001-03-19 住友電装株式会社 Electronic control unit storage box

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* Cited by examiner, † Cited by third party
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JPS62217056A (en) * 1986-03-18 1987-09-24 Mitsubishi Electric Corp Stocker
JPH08298283A (en) * 1995-04-27 1996-11-12 Matsushita Electron Corp Wafer cassette and wafer cassette station
JP2002338007A (en) * 2001-05-18 2002-11-27 Shinko Electric Co Ltd Stocker
JP2002343846A (en) * 2001-05-18 2002-11-29 Shinko Electric Co Ltd Stocker

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KR20040038929A (en) 2004-05-08
KR100491740B1 (en) 2005-05-30
CN1934694A (en) 2007-03-21

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