CN100411131C - Controlled airflow stock shelf - Google Patents
Controlled airflow stock shelf Download PDFInfo
- Publication number
- CN100411131C CN100411131C CNB2005800089692A CN200580008969A CN100411131C CN 100411131 C CN100411131 C CN 100411131C CN B2005800089692 A CNB2005800089692 A CN B2005800089692A CN 200580008969 A CN200580008969 A CN 200580008969A CN 100411131 C CN100411131 C CN 100411131C
- Authority
- CN
- China
- Prior art keywords
- stock shelf
- control panel
- air
- shelf
- flow control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Ventilation (AREA)
Abstract
The present invention provides a controlled airflow stock shelf which has a guide spoiler (110) serving as a means for distributing air into shelves of the stock shelf, so as to appropriately control the flow and speed of air such that airflow is evenly distributed among the shelves of the stock shelf and constant shear stress is applied to surfaces of parts of products placed on the shelves of the stock shelf, thus preventing contaminants from settling on the surfaces of the parts. The controlled airflow stock shelf of the present invention is constructed from a plurality of stock shelf basic unit (101). Each stock shelf basic unit (101) includes a guide spoiler (110), a shelf assembly (120) and a coupling means.
Description
Technical field
The present invention relates generally to controlled airflow stock shelf, relate in particular to a kind of make as the process of the product of semiconductor or flat-panel monitor in the temporary transient storage of the parts of this product controlled airflow stock shelf wherein, fall on the surface of parts to prevent pollutant, and help the cleanliness factor in warehouse is maintained desirable level, thereby the rate of finished products (recovery rate) of raising product.
Background technology
Usually, flat-panel monitor (FPD) is made in the clean room as LCD (LCD), plasma display (PDP), electro-exciting light-emitting display (ELD) or Field Emission Display (FED), when the parts (glass substrate) with product were transported to subsequently operation, the warehouse was used for storing these parts temporarily.
In the manufacture process in this clean room, the pollutant that drops on the parts surface of product greatly influences the rate of finished products of product.Because the parts of product do not move in the warehouse, so increased the possibility on surface that pollutant drops on the parts of product.Therefore, the cleanliness factor of clean room has great influence to the rate of finished products of product.
Be placed on direction in the warehouse according to parts, this warehouse can be divided into perpendicular layers flow pattern and level course flow pattern.The parts of flat-panel monitor are relatively large, and major part is used for the warehouse of clean room's usage level laminar-type of flat-panel monitor.
Simultaneously, be provided to the warehouse each layer air flow and speed all influences the cleanliness factor of inside, warehouse.Judge from aerodynamic analogue test and experience, under the situation in perpendicular layers flow pattern warehouse,, above the parts of product, air turbulence can occur if the warehouse does not have independent supplementary device at manufacturing site location.Thereby the problem of conventional art is: the mobile and speed that is distributed in the air in the warehouse shelf is inhomogeneous and unsettled.
In order to address the above problem, some warehouse manufacturing companies have proposed stock shelf, wherein, all have blower fan filtering unit (FFU) on each layer of stock shelf.Recently, a kind of have the level course flow pattern warehouse applications of blower fan filtering unit in the clean room of most of flat-panel monitors.
Yet, owing to need to install in addition blower fan filtering unit, thereby improved the manufacturing cost in warehouse, the running expense of blower fan filtering unit has also increased burden to the user, has also promoted the internal temperature in warehouse, and vibration and noise occur.Therefore, carried out research recently to the blower fan filtering unit substitute.
Summary of the invention
Therefore, consider the above-mentioned problems in the prior art and propose the present invention, and an object of the present invention is to provide a kind of controlled airflow stock shelf, described airflow stock shelf comprises the guiding flow spoiler, described guiding flow spoiler is used to control the flowing of air of each layer that is provided to stock shelf, with replacement blower fan filtering unit or miscellaneous equipment (as the porousness control board), thereby guarantee stable air-flow and speed simultaneously.Thereby prevent that pollutant from falling on the surface of parts, help the cleanliness factor in warehouse is maintained desirable level, and improve the rate of finished products of product.
To achieve these goals, the invention provides a kind of in the process that manufactures a product, be used in the controlled airflow stock shelf in the clean room of parts of interim storage products such as flat-panel screens, wherein, described controlled airflow stock shelf comprises and is used to guide the guiding flow spoiler of air in from the top of clean room to stock shelf.Described guiding flow spoiler rotatably is connected in stock shelf in its lower end, thereby can control the mobile and speed of the air that is provided in the stock shelf with respect to the angle of stock shelf by adjusting flow spoiler.
In addition, described guiding flow spoiler is articulated in the rear horizontal beam of shelf assembly in its lower end, and described shelf assembly has cubic structure, and by a plurality of bars are assembled, and described guiding flow spoiler is supported by a pair of back prop of shelf assembly in the top.All have all vertical and assembling flatly of a plurality of shelf assemblies of the flow spoiler that leads.
And described guiding flow spoiler comprises: the air flow control panel of sheet-type and angle adjustment plate.Be formed with a plurality of hinge connecting holes in the lower end of described air flow control panel, so that air flow control panel is hinged through the hinge to the rear horizontal beam in its lower end.Described angle adjustment plate forwards extends from each opposite side edge of air flow control panel, and has the fan shape that from the bottom to the top width, increases, have formation arc guide slot in the top, so that the angle adjustment plate arrives each rear pillar by the angle adjustment bolt.
Described air flow control panel can have flat shape, prone convex shape, perhaps recurvate concave.
Described air flow control panel comprises the stable steering end at edge disposed thereon, to control air-flow and to prevent noise and the generation of vibration that air drag causes.
Description of drawings
Fig. 1 is the decomposition diagram of expression according to a kind of execution mode of stock shelf elementary cell of the present invention;
Fig. 2 is the perspective view of expression according to guiding flow spoiler of the present invention;
Fig. 3 is expression becomes example according to the assembling of stock shelf elementary cell of the present invention and dissimilar guiding flow spoilers a perspective view;
Fig. 4 is the decomposition diagram according to the controlled airflow stock shelf of preferred implementation of the present invention;
Fig. 5 is the perspective view of expression according to the stock shelf of vertical assembling of the present invention;
Fig. 6 is that expression is according to the perspective view that is arranged in the stock shelf in warehouse of the present invention; And
Fig. 7 is the sectional view that expression has the air-flow in the warehouse of stock shelf of the present invention.
Description of reference numerals
100: stock shelf 101: the stock shelf elementary cell
110: guiding flow spoiler 111: air flow control panel
112: angle adjustment plate 113: guide slot
115: 116: the first hinge connecting holes of guide end
120: shelf assembly 121: put beam
121a: rear horizontal beam 122: post setting
122a: 126: the second hinge connecting holes of rear pillar
127: angle adjustment hole 131: hinge
136,136 ': hinge lock(ing) bolt 137: the angle adjustment bolt
200: warehouse 300: clean room
401: planar guide flow spoiler 402: curved surface guiding flow spoiler
500: box
Embodiment
Below, will describe in detail the present invention in conjunction with the accompanying drawings.
Fig. 1 is the decomposition diagram of expression according to a kind of execution mode of stock shelf elementary cell of the present invention.As shown in Figure 1, controlled airflow stock shelf of the present invention is made of a plurality of stock shelf elementary cells 101 vertical and the level assembling.Each stock shelf elementary cell 101 comprises shelf assembly 120, guiding flow spoiler 110, the hinge 131 as jockey, a plurality of hinge lock(ing) bolt 136,136 ' and a pair of angle adjustment bolt 137.
Fig. 2 is the perspective view of expression according to the structure of guiding flow spoiler of the present invention.As shown in Figure 2, guiding flow spoiler 110 comprises air flow control panel 111 and a pair of angle adjustment plate 112.
Simultaneously, a plurality of first hinge connecting holes 116 are formed on the lower end of the air flow control panel 111 of guiding flow spoiler 110.A plurality of second hinge connecting holes 126 are formed on the rear horizontal beam 121a of the lower end, rear portion that is arranged on shelf assembly 120.Hinge 131 is connected to rear horizontal beam 121a in its first side by hinge lock(ing) bolt 136, and described hinge lock(ing) bolt 136 passes the second hinge connecting hole 126 of rear horizontal beam 121a.In addition, hinge 131 is connected to the lower end of air flow control panel 111 by hinge lock(ing) bolt 136 ' in its second side, and described hinge lock(ing) bolt 136 ' passes the first hinge connecting hole 116 of air flow control panel 111.Therefore, guiding flow spoiler 110 is rotatably connected to shelf assembly 120 by hinge 131.Each angle adjustment bolt 137 is after by the rectangle guide slot 113 of each angle adjustment plate 112 upper end that is formed on guiding flow spoiler 110, all be fastened in the angle adjustment hole 127 of each rear pillar 122a, thereby can adjust the angle of guiding flow spoiler 110 with respect to shelf assembly 120.
In addition, stable steering end (trimmed guide tip) is arranged on the top edge of air flow control panel 111, thereby controls air-flow and prevent noise and the generation of vibration that air drag causes.
Each angle adjustment plate 112 integrally extends forward from each opposite side edge of air flow control panel 111.In addition, angle adjustment plate 112 has the fan shape that width increases from the bottom to the top.
The guiding flow spoiler is used to increase the successively decrease rising and the cycle efficieny of air-flow.The design variable of guiding flow spoiler as the position of guide end, the holding position of angle adjustment plate and the curvature of air flow control panel, quantitatively is to determine by the two-dimentional aerodynamic simulations in the early stage design phase of decision warehouse size and structure.This guiding flow spoiler design variable definite control accuracy that has improved air flows and speed quantitatively.
Fig. 3 is the perspective view that the assembling of expression stock shelf elementary cell and dissimilar guiding flow spoilers becomes example.Regardless of the position of guide end 115 and the angle of air flow control panel 111, guiding flow spoiler 110 always is connected to rear horizontal beam 121a and post setting 122.
In addition, shape or air-flow according to warehouse 200, guiding flow spoiler 110 can comprise planar guide flow spoiler 401 or have convex shape or the curved surface of concave guiding flow spoiler 402 that described curved surface guiding flow spoiler 402 has the air foil shape (airfoil shape) that is similar to aircraft wing.
Fig. 4 is the decomposition diagram according to the controlled airflow stock shelf of preferred implementation of the present invention.In the present invention, each stock shelf elementary cell 101 comprises guiding flow spoiler 110, shelf assembly 120 and locking device.Controlled airflow stock shelf 100 of the present invention constitutes by vertically and flatly assembling stock shelf elementary cell 101.
Fig. 5 is the perspective view of the stock shelf of the vertical assembling of expression.As shown in Figure 5, controlled airflow stock shelf 100 constitutes by vertical assembling stock shelf elementary cell 101.
Fig. 6 is the perspective view that expression is arranged in the controlled airflow stock shelf of the present invention in warehouse.As shown in Figure 6, be placed in the warehouse 200 by controlled airflow stock shelf vertical and that level assembling stock shelf elementary cell 101 constitutes.
Fig. 7 is the cross sectional view that expression has the air-flow in the warehouse of controlled airflow stock shelf of the present invention.With reference to Fig. 7, in controlled airflow stock shelf, the air that major part enters shown in arrow 501, flows to the sidewall in warehouse, shown in arrow 502 in the horizontal direction from the top of clean room.Subsequently, air flows downward between sidewall and stock shelf, shown in arrow 503.Afterwards, the air that flows downward supplies in the stock shelf by guiding flow spoiler 110.The air that supplies in the stock shelf flows in the horizontal direction, shown in arrow 504, so that constant shear action is to the surface of the parts of product, thereby prevents that pollutant from falling on the surface of parts.The bottom vertical of air to the clean room by stock shelf flows, and shown in arrow 505, afterwards, air is discharged to the external world by the bottom of clean room.
So, controlled airflow stock shelf of the present invention can utilize the flow rate of guiding flow spoiler control air, is distributed in the stock shelf with making even air.In addition, the present invention produces laminar flow by the direction of control air-flow in each box (cassette) 500.In addition, the present invention can control the speed of air, so that constant shear action is to the surface of the parts of product, thereby prevents that pollutant from falling the surface of parts.And the present invention helps the cleanliness factor in warehouse is maintained desirable level.Because these advantages, the rate of finished products of product is improved.
And, in test, find that the present invention who has the flow spoiler that leads compares with the conventional art that has traditional blower fan filtering unit, is making moderate progress aspect noise and the vibration.Therefore, compare with traditional equipment, controlled airflow stock shelf of the present invention has more excellent functional, stable, economic benefit, practicality and mobility.
Effect of the present invention
As mentioned above, the invention provides controlled airflow stock in a kind of warehouse that is arranged on the toilet Frame, described toilet is for the manufacture of the product such as semiconductor or flat-panel screens, described controlled airflow stock Frame is used for transporting the parts of parts to the interim storage products of process of subsequently operation. And have blower fan The conventional art difference of filter element or miscellaneous equipment (such as the porous control panel), described controlled airflow storehouse The storage frame has the guiding flow spoiler, thereby has reduced the production cost in warehouse, avoids the blower fan in the conventional art The financial burden that filter element produces prevents the raising of the internal temperature in warehouse, and reduce vibration and Noise.
In addition, replacing the having of conventional art with conventional fan filter element or porous control panel leads The present invention to flow spoiler can quantize more. In addition, the present invention can make the air that is provided in the warehouse Distribute equably, and suitably regulate flowing and speed of air, thereby prevent that pollutant from falling product On the surface of parts, and help the cleanliness factor in warehouse is maintained desirable level, therefore improved product Yield rate.
Claims (3)
1. controlled airflow stock shelf that is used at the parts of the interim storage products of the process that manufactures a product, wherein:
Controlled airflow stock shelf comprises a plurality of shelf assemblies (120) and guiding flow spoiler (110), vertical and the level of described a plurality of shelf assemblies (120) is assembled together, each of a plurality of shelf assemblies (120) all has three-dimensional structure, and makes by assembling a plurality of bars; Each guiding flow spoiler (110) is hinged to the rear horizontal beam (121a) of the lower end, rear portion that is arranged on each shelf assembly (120) in its lower end, described guiding flow spoiler (110) is supported by a pair of rear pillar (122a) of each shelf assembly (120) in the top, control with respect to the angle of each shelf assembly (120) by the shape of guiding flow spoiler (110) and the flow-disturbing (110) that leads so be provided to the shearing force that flows and affact the air that is contained in the product component in the box (500) of air in the stock shelf, wherein
Described guiding flow-disturbing (110) comprises air flow control panel (111) and angle adjustment plate (112), described air flow control panel (111) has thin sheet form, described air flow control panel (111) has a plurality of hinge connecting holes (116) that are formed on described air flow control panel lower end, so that air flow control panel (111) is connected in rear horizontal beam (121a) in its lower end by hinge (131); Described angle adjustment plate (112) extends forward from the opposite side edge of air flow control panel (111) and have a fan shape that width increases from the bottom to the top, described angle adjustment plate (112) has formation arc guide slot (113) in the top, so that angle adjustment plate (112) is fixed to each rear pillar (122a) by angle adjustment bolt (137).
2. controlled airflow stock shelf according to claim 1, wherein, air flow control panel (111) has flat shape, prone convex shape or recurvate concave.
3. controlled airflow stock shelf according to claim 1, wherein, air flow control panel (111) comprises stable steering end (115), described stable steering end (115) is arranged on the top edge of air flow control panel (111), to control air-flow and to prevent caused noise of air drag and generation of vibration.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20040020158A KR100491740B1 (en) | 2004-03-24 | 2004-03-24 | Flow Control Stocker Shelf |
| KR1020040020158 | 2004-03-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1934694A CN1934694A (en) | 2007-03-21 |
| CN100411131C true CN100411131C (en) | 2008-08-13 |
Family
ID=35783037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005800089692A Expired - Fee Related CN100411131C (en) | 2004-03-24 | 2005-03-22 | Controlled airflow stock shelf |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100491740B1 (en) |
| CN (1) | CN100411131C (en) |
| WO (1) | WO2006004254A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62217056A (en) * | 1986-03-18 | 1987-09-24 | Mitsubishi Electric Corp | Stocker |
| JPH08298283A (en) * | 1995-04-27 | 1996-11-12 | Matsushita Electron Corp | Wafer cassette and wafer cassette station |
| CN1190815A (en) * | 1997-02-13 | 1998-08-19 | 住友电装株式会社 | Storage box for electronic controller |
| JP2002338007A (en) * | 2001-05-18 | 2002-11-27 | Shinko Electric Co Ltd | Stocker |
| JP2002343846A (en) * | 2001-05-18 | 2002-11-29 | Shinko Electric Co Ltd | Stocker |
-
2004
- 2004-03-24 KR KR20040020158A patent/KR100491740B1/en not_active IP Right Cessation
-
2005
- 2005-03-22 CN CNB2005800089692A patent/CN100411131C/en not_active Expired - Fee Related
- 2005-03-22 WO PCT/KR2005/000814 patent/WO2006004254A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62217056A (en) * | 1986-03-18 | 1987-09-24 | Mitsubishi Electric Corp | Stocker |
| JPH08298283A (en) * | 1995-04-27 | 1996-11-12 | Matsushita Electron Corp | Wafer cassette and wafer cassette station |
| CN1190815A (en) * | 1997-02-13 | 1998-08-19 | 住友电装株式会社 | Storage box for electronic controller |
| JP2002338007A (en) * | 2001-05-18 | 2002-11-27 | Shinko Electric Co Ltd | Stocker |
| JP2002343846A (en) * | 2001-05-18 | 2002-11-29 | Shinko Electric Co Ltd | Stocker |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2006004254A1 (en) | 2006-01-12 |
| KR20040038929A (en) | 2004-05-08 |
| KR100491740B1 (en) | 2005-05-30 |
| CN1934694A (en) | 2007-03-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080813 Termination date: 20140322 |