WO2005112234A1 - Actionneur de moteur linéaire - Google Patents

Actionneur de moteur linéaire Download PDF

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Publication number
WO2005112234A1
WO2005112234A1 PCT/JP2005/008486 JP2005008486W WO2005112234A1 WO 2005112234 A1 WO2005112234 A1 WO 2005112234A1 JP 2005008486 W JP2005008486 W JP 2005008486W WO 2005112234 A1 WO2005112234 A1 WO 2005112234A1
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WO
WIPO (PCT)
Prior art keywords
slide carriage
linear motor
slider
speed
track rail
Prior art date
Application number
PCT/JP2005/008486
Other languages
English (en)
Japanese (ja)
Inventor
Toshiyuki Aso
Taro Miyamoto
Shuhei Yamanaka
Original Assignee
Thk Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thk Co., Ltd. filed Critical Thk Co., Ltd.
Publication of WO2005112234A1 publication Critical patent/WO2005112234A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/28—Electric drives
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K5/00—Casings; Enclosures; Supports
    • H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/173—Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings

Definitions

  • the present invention relates to a linear motor ECU that reciprocates a slide carriage along a track rail fixed on a base plate such as a bed or a column and repeatedly positions a powerful slide carriage at a predetermined position on the base plate. More specifically, the present invention relates to a technique for preventing a change in the moving speed of the slide carriage.
  • Linear actuators that give a linear motion to a movable body such as a table and stop a powerful movable body at a predetermined position include various tables of machine tools, traveling parts of industrial robots, It is frequently used in transport devices and the like.
  • a ball screw is used to convert the rotation of the motor into a linear motion.
  • an endless timing belt wound around a pulley is used to convert the rotation of the motor into a linear motion, but in recent years, linear motors have been used as the driving means.
  • linear motor actuators Various types of actuators using linear motor actuators, that is, linear motor actuators, have appeared.
  • a linear motor actuator of this type is generally provided with a slide carriage on which a movable body such as an article to be conveyed is mounted, a linear guide device for allowing the slide carriage to reciprocate linearly, and the slide carriage. And a linear encoder that detects the position of the slide carriage.By controlling the linear motor in accordance with the detected value of the linear encoder that is strong, a linear motor is provided to the slide carriage.
  • An arbitrary moving amount can be given with high accuracy (Japanese Patent Laid-Open No. 2002-136097, etc.).
  • linear guide device there is known a linear guide device configured of a track rail provided on a base plate and a slider mounted on the track rail via a number of balls.
  • the ball force rolls on the infinite circuit provided in the S slider. This allows the powerful slider to move continuously along the track rail without limiting the stroke.
  • a field magnet as a stator in which N-poles and S-poles are alternately arranged is provided on a base plate. It is known that a coil member as a mover is provided on the lower surface side of a slide carriage that is supported by the armature, and the field magnet and the coil member are opposed to each other with a small gap therebetween.
  • a strong thrust can be exerted because the coil member surrounds the magnet rod, and when an actuator is constructed using a powerful linear motor. Can provide a large thrust to the slide carriage while reducing the size.
  • a linear guide device that supports the reciprocating motion of the slide carriage usually includes a track rail provided on a base plate, and a slider that moves along the track rail.
  • Patent Document 1 Japanese Patent Application Laid-Open No. 2002-136097
  • Patent Document 2 JP-A-11-150973
  • the track of the linear guide device that supports the movement of the slide carriage is required. It is preferable that the number of the rails is only one, and the number of the sliders running on the one track rail is one, and the movement of the slide carriage is supported by only the single slider. With this configuration, the movable distance of the slide carriage can be maximized within the limited length of the track rail. Also, using the limited thrust exerted by the linear motor to increase the mountable weight of the slide carriage and move the powerful slider at high speed, the slider slides against the track rail. It is necessary to reduce the resistance, and from this point, it is more advantageous to support the slide carriage with a single slider than to support the movement of the slide carriage with a plurality of sliders.
  • the linear motor actuator there is an application for moving a load of a slide carriage at a predetermined speed, such as a movement of a mirror carriage or an image sensor in an image scanner.
  • the moving speed of the slide carriage needs to be constant. If a linear motor actuator is used to move the optical system such as the mirror carriage of the image scanner described above, the slide carriage must be moved.
  • the fluctuation of the moving speed of the transferred object mounted on the movable stage (hereinafter referred to as “speed ripple”) is based on a command input to the actuator via the controller when the sampling frequency for speed measurement is 100 Hz. It must be less than ⁇ 1% of speed.
  • the present invention has been made in view of such a problem, and an object of the present invention is to suppress a speed ripple of a conveyed object during a low-speed movement of a slide carriage as much as possible. It is an object of the present invention to provide a linear motor actuator that can be used for applications in which a constant moving speed of a transferred object is strictly required. Means for solving the problem
  • Factors that affect the speed ripple of the transported object mounted on the slide carriage include thrust fluctuation of the linear motor, resolution of the linear encoder that detects the amount of movement of the slide carriage, and on the track rail. It is possible that the sliding resistance of the slider running on the vehicle fluctuates. However, when the speed ripple of the transferred object actually conveyed by the slide carriage was measured and examined, two or more sliders traveled on a single track rail, and these multiple sliders supported the movement of the slide carriage. In the case where a single slider runs on a single track rail and the movement of the slide carriage is supported by this single slider! Was bigger. As a result of repeated studies of this viewpoint, it has been found that pitching that occurs when the slide carriage is moving causes the speed ripple of the transported object mounted on the slide carriage to deteriorate.
  • the transported object fixed on the movable stage of the slide carriage moves while swinging back and forth, so that the transported transported body is strongly moved.
  • the speed will not be constant and speed ripple will occur.
  • the speed ripple that influences the speed ripple of the transferred object is a repetition of the pitching that is not as strong as the pitching of the slide carriage. In other words, if the pitching speed is sufficiently slow relative to the moving speed of the transported object mounted on the slide carriage, the speed ripple of the transported object can be sufficiently suppressed.
  • command speed the target movement speed of the slide carriage commanded by the linear motor actuator
  • ⁇ the target movement speed of the slide carriage commanded by the linear motor actuator
  • the pitching of the slide carriage has an effect on the speed ripple of the transferred object when the commanded speed is approximately 50 mmZs or less, and when the commanded speed is lOmmZs, the angular speed of the pitching of the slide carriage satisfies the above value. If this is the case, it is possible to keep the speed ripple of the transferred object sufficiently small in the practical range of the command speed for the powerful linear motor actuator. [0015] However, as described above, factors that affect the speed ripple of the transported object mounted on the slide carriage are not limited to pitching of the slide carriage, but thrust fluctuations of the linear motor and the amount of movement of the slide carriage are detected. The resolution of the linear encoder, the sliding resistance of the slider running on the orbital rail, and the like are present.
  • the pitching of the slide carriage occupies about half of the speed ripple. Therefore, in order to suppress the speed ripple related to the movement of the transferred object to 1% or less, taking into account multiple factors comprehensively, the speed ripple caused by the pitching of the slide carriage should be 0.5% of the command speed. It is necessary to satisfy the condition of ⁇ 0.463 (mradZs). If this condition is satisfied, the speed ripple can be suppressed to 1% or less of the command speed in the linear reciprocating motion of the transported object by the linear motor actuator.
  • FIG. 1 is a side view schematically showing an embodiment of a linear motor actuator according to the present invention.
  • FIG. 2 is a sectional view taken along the line II-II in FIG. 1.
  • FIG. 3 is a perspective view showing a linear motor according to an embodiment.
  • FIG. 4 is a side view showing the operation principle of the linear motor according to the embodiment.
  • FIG. 5 is a front view showing the operation principle of the linear motor according to the embodiment.
  • FIG. 6 is a perspective view showing a linear guide device according to an embodiment.
  • FIG. 7 is an enlarged side view showing a configuration of a slide carriage of the linear motor actuator according to the embodiment.
  • FIG. 8 is a cross-sectional view showing a structure of a flat cable according to an example.
  • FIG. 9 is a side view showing another example of the cable retainer according to the embodiment.
  • FIG. 10 is a view for explaining troubles that are wound below the signal relay board as the flat cable force slide carriage moves.
  • FIG. 11 is a schematic diagram for analyzing a relationship between pitching of a slide carriage and a speed ripple.
  • FIG. 4 is a schematic diagram showing a relationship with a ring.
  • FIGS. 1 and 2 are a side view and a front view showing an embodiment of a linear motor actuator of the present invention. It is sectional drawing.
  • the linear motor actuator 1 has an elongated base plate 2, a track rail 3 disposed on the base plate 2 along the longitudinal direction thereof, and a linear reciprocating motion along the track rail.
  • the transported object mounted on the movable stage 5 reciprocates along the longitudinal direction of the base plate 2. Exercise and stop at any position.
  • FIG. 3 is a perspective view showing the linear motor 6.
  • the linear motor 6 includes a magnet rod 6a as a stator formed in a long cylindrical shape, and a coil member 6b as a mover loosely fitted around the magnet rod 6a through a small gap. Being done.
  • a plurality of permanent magnets 60 are arranged in the magnet rod 6a along the axial direction, and the outer peripheral surface is smoothly processed. As shown in FIG. 4, each permanent magnet 60 has an N pole and an S pole, and the permanent magnets 60 adjacent to each other are alternately arranged so that the directions are alternately reversed so that the N poles or the S poles face each other. Have been.
  • both ends of the magnet rod 6 a are fixed to a pair of end plates 20, 21, respectively, and the pair of end plates 20, 21 are in the longitudinal direction of the base plate 2. It is fixed to both ends so as to face each other. That is, the magnet rod 6a is fixed on the base plate 2 like a support beam at both ends.
  • the coil member 6b is configured by housing a cylindrical excitation coil 62 in a housing 61 formed entirely in a square column shape.
  • the housing 61 is made of aluminum having excellent thermal conductivity, and a plurality of radiating fins 63 are erected on the surface thereof in parallel with the longitudinal direction of the magnet rod. The heat generated in the excitation coil 62 when the power is supplied is efficiently transmitted to the housing 61, and is radiated to the surrounding atmosphere, so that the excitation coil 62 itself can be effectively cooled.
  • FIG. 4 and FIG. 5 show the operation principle of the linear motor 6.
  • the exciting coil 62 has a coil group in which three coils of the U, V, and W phases constitute one set.
  • the excitation coil 62 of each phase has a ring shape, and faces the outer peripheral surface of the magnet rod 6a via a slight gap.
  • the arrangement pitch of the exciting coils 62 of each phase is set shorter than the arrangement pitch of the permanent magnets 60.
  • a magnetic flux 64 is formed on the magnet rod 6a from the S pole to the N pole, and the coil member 6b has a built-in magnetic pole sensor (not shown) for detecting the magnetic flux density. .
  • the positional relationship between the magnetic poles (N-pole and S-pole) of the magnet rod with respect to the exciting coil can be ascertained from the detection signal force output from the magnetic pole sensor.
  • the controller that controls the energization of the excitation coil receives the detection signal of the magnetic pole sensor, calculates an optimal current corresponding to the positional relationship between the excitation coil and each magnetic pole of the magnet rod, and calculates the optimum current for each excitation coil. Turn on electricity.
  • the track rail 3 and the slider 4 constitute a linear guide device for freely reciprocating the movable stage 5 on the base plate 2.
  • FIG. 6 is a perspective view showing an example of this linear guide device.
  • the track rail 3 has a cross section perpendicular to the longitudinal direction formed in a substantially rectangular shape, and is formed to have substantially the same length as the entire length of the base plate 2. At the same time, it is arranged parallel to the longitudinal direction of the base plate 2 to be pressed.
  • a total of four ball rolling grooves 30a and 30b are formed along the longitudinal direction, two on each side surface of the track rail 3, and the ball rolling groove 30a located on the lower side is formed by the track rail 3.
  • the ball rolling groove 30b located 45 degrees downward and upward 45 degrees with respect to the bottom surface of the slider 4 is formed upward 45 degrees, so that the slider 4 can receive the radial load, the reverse radial load, and the horizontal load evenly. ing.
  • the track rail 3 is provided with mounting holes 31 for allowing fixing bolts to pass therethrough at predetermined intervals along the longitudinal direction.
  • the slider 4 moving along the track rail 3 is formed in a saddle shape with a guide groove in which the upper part of the track rail 3 is loosely fitted through a small gap, and a large number of balls are formed.
  • the ball 45 has an endless ball circulation path in which the ball 45 circulates, and the ball 45 can continuously move along the track rail 3 by rolling in the ball rolling grooves 30a and 30b of the track rail 3. It is possible. Further, the balls 45 are arranged in a ball cage 46 made of a synthetic resin having flexibility, and the balls 45 circulate together with the ball cage 46 in a ball infinite circulation path.
  • the balls 45 circulate in the ball infinite circulation path in a state of being constantly aligned without meandering, preventing the ball 45 from being clogged during the circulation, and reducing the sliding resistance of the slider 4. It is designed to be able to stabilize.
  • the slider 4 applies a load acting in a direction perpendicular to the longitudinal direction of the track rail 3, that is, in a direction perpendicular to the moving direction of the slider 4, and the magnet rod 6 b of the linear motor 6 Loads other than the axial direction of 6a are prevented from acting.
  • a fixed reference groove 22 for accommodating the bottom of the track rail 3 is formed in the base plate 2 along the longitudinal direction, and the track rail 3 abuts its side against the side of the fixed reference groove 22. In this state, it is fixed to the base plate 2 by fixing bolts 21.
  • the fixed reference groove 22 is formed in parallel with the axial direction of the magnet rod 6a supported at both ends by the end plates 20, 21, so that the track rail 3 and the magnet rod 6a are kept parallel. It has become.
  • a side wall 24 is erected along the longitudinal direction at one end in the width direction of the base plate 2, and a magnet scale 40 constituting a linear encoder is provided on the outer surface of the side wall 24 over the entire area in the moving direction of the slider 3. Solid Is defined.
  • a saddle plate 8 for supporting the movable stage 5 is fixed to the slider 4.
  • the saddle plate 8 is fixed to the upper mounting surface of the slider 4 by mounting bolts 80.
  • a flange portion 81 for fixing the read head 41 of the re-encoder is projected from one end in the width direction of the saddle plate 8.
  • the flange portion 81 is formed on the side wall 24 of the base plate 2. It is set up to get over.
  • the read head 41 of the linear encoder is fixed so as to be hung from the flange portion 81, and faces the magnet scale 40 fixed to the side wall 24 of the base plate 2.
  • the read head 41 of the linear encoder moves along the magnet scale 40, and the output signal force of the read head 41 determines the amount of movement of the slider 4 relative to the base plate 2. I can do it!
  • linear encoder it is possible to select and use a linear encoder having a resolution corresponding to the use of the linear motor actuator, and a type that detects a change in magnetism on a magnet scale is used. It is possible to arbitrarily select a pattern formed on the scale surface, such as a type that optically reads a pattern formed on the scale surface.
  • FIG. 7 is a side view showing the structure of the slide carriage 110.
  • a pair of support plates 9a and 9b are provided upright at both front and rear ends in the moving direction of the saddle plate 8, and the movable stage 5 is fixed to the two support plates 9a and 9b.
  • Each support plate 9a, 9b is fixed to the saddle plate 8 and the movable stage 5 by fixing bolts 90, and at the center thereof, as shown in FIG. 2, an open hole 91 through which the magnet rod 6a passes is formed. ing.
  • a force exists between the saddle plate 8 and the movable stage 5 from the front and rear by the support plates 9a and 9b. This space is a housing space 92 for the coil member 6b of the linear motor 6.
  • the saddle plate 8 can be formed integrally with the slider 4. If the support plate 8 can be directly erected before and after the slider 4, it is not necessary to provide the support plate 8.
  • the coil member 6b is directly fixed to the saddle plate 8 and the support plates 9a, 9b. Instead, it is fixed to the lower surface of the movable stage 5 by hanging bolts 50 penetrating the movable stage 5, and in this state, is loosely fitted to the magnet rod 6a. Further, in order to prevent heat generated by energizing the coil member 6b from flowing into the movable stage 5, a heat insulating member 52 is interposed between the movable stage 5 and the coil member 6b, and is further suspended. A heat insulating member 53 is also interposed between the lowering bolt 50 and the movable stage 5.
  • the coil member 6b is positioned in the accommodation space 92 in a state of being suspended from the movable stage 5, and is kept in a non-contact state with the saddle plate 8 and the support plates 9a, 9b. I'm dripping. That is, a space is formed between the coil member 6b and the saddle plate 8, and between the coil member 6b and the support plates 9a and 9b, and heat generated by energizing the coil member 6b directly flows into the slider 4. Has been prevented.
  • the slide carriage 110 is a force formed as a combined body of the slider 4, the movable stage 5, and the coil member 6b. As shown in the front sectional view of FIG. While a pair of side covers 25a and 25b are provided, a top cover 26 is also provided above the movable stage 5 to prevent dust from adhering to the track rail 3 and the macnet rod 6a.
  • the side covers 25a, 25b and the top cover 26 are fixed to a pair of end plates 20, 21 erected on both ends of the base plate 2.
  • a power is supplied from a control box (not shown) to the exciting coil 62 of the coil member 6b, and an output signal of the read head 41 of the linear encoder is transmitted to the control box.
  • the relay board 101 is attached and connected to the control box by the flat cable 100.
  • a board bracket 82 is fixed to the upper surface of the flange portion 81 of the saddle plate 8, and the signal relay board 101 is fixed on a mounting web 83 of the board bracket 82.
  • the flat cable 100 has a signal line for energizing the exciting coil 62 and a signal line for transmitting the output signal of the read head 41 arranged.
  • the flat cable 100 is composed of the signal relay board 101 and the coil member 6b.
  • the input port and the output port of the read head 41 are connected by another signal cable.
  • FIG. 8 is a cross-sectional view showing an example of the flat cable 100.
  • This flat cable Reference numeral 100 includes a plurality of signal lines 103 and two power supply lines 104 and 104 for supplying power to the read head 41.
  • Each power supply line 104 is located at both ends in the width direction of the flat cable 100, and the signal lines 103 are arranged so as to be sandwiched from both sides by a pair of power supply lines 104, 104. Since the signal line 103 transmits the position information of the slide carriage 110 to the control box, when electric noise enters the signal line from the outside, the control box sends an appropriate control signal to the coil member 6b. It cannot be supplied, which causes a malfunction of the slide carriage 110.
  • the periphery of the flat cable 100 is covered with a conductive metal foil or a shield 105 having a mesh force.
  • a grounded earth line 106 is provided between each power line 104 and the signal line 103.
  • a group of signal lines 103 is sandwiched between a pair of ground lines 106 from both sides.
  • These ground lines 106 are electrically connected to the shield 105 described above.
  • the space between the side cover 25 b and the side wall 24 of the base plate 2 is a space 102 for receiving the flat cable 100, and the flat cable 100 is mounted on the lower end of the side wall of the base plate 2.
  • a cable bracket 27 for mounting is attached along the longitudinal direction of the base plate 2.
  • the flat cable 100 is inserted into the accommodation space 102 through a gap between the lower end of the end plate 21 and the cable bracket 27, and is gently bent inside the accommodation space 102 where the force is applied. After the direction has been changed, it is attached to the signal relay board 101.
  • a substantially L-shaped cable press 107 is fixed to the end plate 21, and the cable press 107 presses the flat cable 100 against the cable bracket 27.
  • the flat cable 100 is fixed to the cable bracket 27, and the length of the flat cable 100 in the accommodation space 102 can be determined according to the stroke amount of the slide carriage 110.
  • the flat cable 100 is merely pressed and fixed to the cable bracket 27 with the cable retainer 107, for example, if the flat cable 100 is pulled strongly by mistake, the flat cable 100 is displaced with respect to the cable bracket 27.
  • the flat cable 100 may be damaged or cut off because the length required to follow the slide carriage 110 is insufficient.
  • FIG. 9 shows another example of the cable retainer.
  • the cable retainer 108 is fastened to the end plate 21 by the fixing bolt 109, and a part of the flat cable 100 picked up in a loop shape is sandwiched between the end plate 21 and the end plate 21!
  • the cable retainer 108 has a recess 111 on the surface facing the agent plate 21, and the head of the flat cable 100 picked up in a loop shape is housed in the recess 111, and the crushed head is crushed.
  • the flat cable 100 can be sandwiched between the end plate 21 and the flat cable 100 without the need. As described above, the cable retainer 108 shown in FIG.
  • the flat cable 100 is laid on the cable bracket 27 from the end plate 21 side, and its length is set slightly longer than the entire length of the base plate 2. Therefore, even when the slide carriage 110 reaches the maximum stroke position on the end plate 20 side, the tip of the flat cable 100 is bent and folded near the end plate 20 and is connected to the signal relay board 101.
  • the slide carriage 110 is moved to the home position (the position shown in FIG. 1), which is the stroke end on the end plate 21 side, the flat cable 100 forms a curved loop portion 100a and is folded back, and the signal relay board is bent.
  • a floating span 100b is formed between 101 and the loop portion 100a.
  • the length of the floating span 100b becomes maximum when the slide carriage 110 is set at the home position, and the floating span 100b is largely bent downward by its own weight.
  • the home position force also causes the flat cable loop to move when the slide carriage moves.
  • the cable support plate 84 projects from the mounting web 83 of the board bracket 82 supporting the signal relay board 101 in the direction in which the flat cable 100 extends. This prevents the floating span 100 b of the cable 100 from significantly bending downward at the connection portion with the signal relay board 101.
  • the floating span 100b of the flat cable 100 bulges upward from the signal relay board 101 in a state where the elastic force with respect to the bending of the flat cable 100 is adjusted and the slide carriage 110 is set at the home position. It was set so that it would not fall down radially. Thereby, even if the slide carriage 110 moves at a high speed from the home position, it is possible to avoid a trouble that the strong flat cable 100 is caught under the signal relay board 101.
  • the speed fluctuation that is, the speed ripple
  • the speed ripple is 1% or less of the command speed as one standard.
  • Linear motor actuators for applications are required to have a performance with a speed ripple of 1% or less.
  • the inventors of the present invention discuss the effect of pitching that occurs when the slide carriage 110 moves, that is, the swinging motion that occurs in the moving direction of the slide carriage 110, on the speed ripple. investigated.
  • pitching occurs in the slide carriage 110
  • the force of the transferred object mounted on the movable stage 5 is swayed back and forth in the moving direction regardless of the moving speed of the slide carriage 110. Therefore, the speed of this sway is adjusted to the speed of movement, and is a force that is considered to be creating a speed ripple.
  • FIG. 11 is a schematic diagram for analyzing the relationship between the pitching of the slide carriage 110 and the speed ripple. If the pitching angle generated on the slide carriage 110 is 0 (rad) when the slide carriage 110 is moved at the command speed V (mm / s), the transported object mounted on the movable stage 5 is The swing width of the transferred object at a specific measurement height L (mm) is
  • the measurement height L is based on the pitch
  • the speed ripple of the transported object is caused not only by the pitching of the slide carriage 110 but also by the fluctuation of the sliding resistance of the linear guide device and the detection accuracy of the linear encoder. If the speed ripple caused by pitching is as much as 1% of the commanded speed, the speed ripple of the transferred object will exceed 1% of the commanded speed. Of these speed ripples, about 0.8% were attributed to the linear guide device.Furthermore, according to the inventors of the present invention who have verified based on the production results of the linear guide device, the The speed ripple due to the fluctuation of the sliding resistance was at most 0.35% of the command speed.
  • the number of effective balls of the slider 4 of the linear guide device that is, the number of balls loaded with a load between the slider 4 and the track rail 3 is determined. It is conceivable to increase the length of the load rolling groove of the ball 45 formed on the slider 4 directly facing the ball rolling grooves 30a and 30b of the track rail 3.
  • the increase in the number of effective balls is directly related to the increase in the length of the slider 4 in the moving direction, if the number of effective balls of the slider 4 is increased without changing the overall length of the actuator, There is a problem that the stroke length of the carriage 110 is shortened. Therefore, the minimum length of the load rolling groove of the slider 4 necessary for keeping the pitching angular velocity of the slide carriage 110 within a predetermined range is determined, and the range satisfying this minimum length is determined. It is necessary to determine the size of the slider 4 by the following.
  • FIG. 12 shows the relationship between the ball 45 rolling in the load rolling groove of the slider 4 and the pitching generated in the slider 4. If the total length of the load rolling groove of slider 4 is L,
  • k is the moment equivalence index
  • L is the height of the center of gravity of the slider.
  • each angular velocity of the pitching of the slide carriage 110 is suppressed to the above-described value, and the speed of the slide carriage 110 is reduced. It is possible to reduce the ripple within 1%.
  • L which indicates the total length of the load rolling groove, is the length of the load rolling groove excluding the crawling region. Klaujung sp
  • the effective length of the load rolling groove becomes shorter, which is a counterproductive to the reduction of the angular speed of pitching.
  • the maximum linear motor can operate. From the relationship with thrust, if the maximum loading mass of the slide carriage 110 is smaller than the maximum loading mass S of the slide carriage 110, if the maximum loading mass is small, the depth of the crowning process applied to both ends of the load rolling groove Even if the size is very small, stress concentration on both ends of the load rolling groove can be avoided. Therefore, in the linear motor actuator, crowning of the slider 4 is almost unnecessary, and the total length L of the load rolling groove can be advantageously set even if the overall length of the slider 4 is shortened accordingly. And the low angular velocity of pitching of the slide carriage 110
  • the slider 4 itself can be reduced in size while reducing the size of the slider.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Linear Motors (AREA)

Abstract

Actionneur de moteur linéaire pouvant supprimer l'ondulation de vitesse, tandis qu'un chariot coulissant est déplacé à faible vitesse, d'un objet à transporter le plus petit possible, et être utilisé dans des applications où une vitesse constante est strictement nécessaire pour le mouvement de l'objet. Le chariot coulissant est assemblé à un rail par un grand nombre de corps roulants et comporte un organe coulissant unique pouvant se déplacer en va-et-vient le long du rail. Un organe enroulé et un étage mobile sont construits sur l'organe coulissant. La condition ω ≤ 0,926 (mrad/s) est satisfaite quand le chariot coulissant est déplacé à une vitesse de commande de 10 mm/s, ω étant la vitesse angulaire de tangage du chariot coulissant produite par ce mouvement.
PCT/JP2005/008486 2004-05-19 2005-05-10 Actionneur de moteur linéaire WO2005112234A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004149542A JP2005333725A (ja) 2004-05-19 2004-05-19 リニアモータアクチュエータ
JP2004-149542 2004-05-19

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Cited By (1)

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TWI767954B (zh) * 2016-12-13 2022-06-21 日商迪思科股份有限公司 雷射加工裝置

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* Cited by examiner, † Cited by third party
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KR102259071B1 (ko) * 2014-12-30 2021-06-02 주식회사 엠플러스 선형 진동기

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