WO2005086249A1 - Actionneur polymere de construction du type empile, et son procede de production - Google Patents

Actionneur polymere de construction du type empile, et son procede de production Download PDF

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Publication number
WO2005086249A1
WO2005086249A1 PCT/DE2005/000347 DE2005000347W WO2005086249A1 WO 2005086249 A1 WO2005086249 A1 WO 2005086249A1 DE 2005000347 W DE2005000347 W DE 2005000347W WO 2005086249 A1 WO2005086249 A1 WO 2005086249A1
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WO
WIPO (PCT)
Prior art keywords
polymer
layer
layers
electrode
stack
Prior art date
Application number
PCT/DE2005/000347
Other languages
German (de)
English (en)
Inventor
Frank Arndt
Arno Steckenborn
Matthias STÖSSEL
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Publication of WO2005086249A1 publication Critical patent/WO2005086249A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/098—Forming organic materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/501—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section in stacking direction, e.g. polygonal, trapezoidal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H10N30/505—Annular cross-section

Definitions

  • the invention relates to a polymer actuator in which a stack is formed from alternately layered electrically conductive electrode layers and in particular electroactive polymer layers.
  • a polymer actuator of this design is known, for example, from a conference contribution by M. Jungmann on the 47th international scientific colloquium at the Ilmenau University of Technology from September 23 to 26, 2002.
  • stack actuators can be formed from an alternating layer sequence of spun-on elastomer films, for example made of silicone and sprayed-on graphite powder layers.
  • the graphite layers form electrodes, wherein successive electrodes can be contacted with opposite poles.
  • an electrical field is therefore generated in the elastomer layer between these electrodes, which due to the properties of the elastomer film leads to a reversible deformation of the same, since the electrodes attract each other.
  • a counterpole contacting possibility of the respectively adjacent graphite powder layers can be created by a suitable masking of the associated elastomer film before the graphite powder is sprayed on.
  • an electroactive polymer such as. B. PMMA (polymethyl methacrylate) can be used as a polymer layer.
  • the object of the invention is to provide a polymer actuator with a stack of alternately layered electrically conductive electrode layers and polymers, which can be produced easily and inexpensively.
  • the stack has on its side surface formed by the entirety of the layer edges a first and a second contacting area electrically separated therefrom, the electrode layers alternately forming part of the first contacting area with respect to the layer sequence either with their layer edge , while the layer edge is at an electrically insulating distance from the second contact area or form part of the second contact area with its layer edge, while the layer edge is at an electrically insulating distance from the first contact area.
  • Side surface in the sense of the invention is understood to mean the entire surface of the stack, which results from the totality of the layer edges from the first to the last layer of the stack.
  • This side surface can be formed by a single coherent surface (for example the outer surface of a cylindrical stack) or also by several partial surfaces (for example four sides of a stack with a square base).
  • the shape of the electrode layers according to the invention which is spaced on the one hand from the layer edge of the polymer layer to one contact area and touch the layer edge on the other contact area, advantageously enables simple alternating contacting of the respectively adjacent electrode layers, for example by applying an electrically conductive coating to the two contact areas which the electrode layers of a contacting area connects with each other.
  • the two contacting areas then allow a voltage to be applied to actuate the polymer actuator.
  • the stack is composed of sections of a web-shaped semifinished product, the semifinished product being designed as a polymer strip with an electrode layer applied thereon, in such a way that the layer edge of the electrode layer reaches the one side edge of the polymer strip and at a distance from the other side edge, and that the sections are layered such that side edges alternate with and without an electrode layer.
  • the side edges of the polymer tape are understood to be the two edges of the tape along its longitudinal extent.
  • the use of a polymer tape for the production of a web-shaped semi-finished product has the advantage that the semi-finished product can be mass-produced with high efficiency.
  • the polymer tape can be obtained directly from the tape manufacturer as the starting material and only has to be coated with the electrode layer in order to complete the semi-finished product while maintaining the required distance from one of the side edges of the polymer tape.
  • the coating can be done, for example, by applying graphite powder.
  • the coated polymer layers for the polymer actuators to be produced can be obtained from the semifinished product by cutting it to length.
  • a special design of the polymer actuator provides for the area of the polymer layers to decrease continuously in the stacking direction of the stack and for the electrode layers to be so the area of the adjacent polymer layers is adapted so that the electrically insulating distance from the relevant contacting area is ensured.
  • the stacking direction of the stack extends perpendicular to the surface of the layers.
  • a stair-like structure results in the section of the stack.
  • This structure has the advantage that the step-like side surfaces of the stack provide a larger contact area of the individual electrode layer in the respective contact area. Therefore, the contacting of the electrode layers connected to the respective contacting area can take place particularly reliably.
  • the invention relates to a method for generating stack actuators. Such a method is described in the conference contribution mentioned at the beginning.
  • the stack actuator to be produced is produced by spinning and curing an elastomer film on a rotating base and then compressing this elastomer film with compressed air with graphite powder and repeating this process in accordance with the number of layers of the stack actuator to be produced.
  • the object of the invention is to provide a method for producing polymer actuators in a stacked design, which is inexpensive and is suitable for the series production of the polymer actuators.
  • a polymer actuator with a stack of alternately layered electrically conductive electrode layers and in particular electroactive polymer layers, in which the polymer polymer layers are coated with electrode layers, in such a way that the layer edge of the electrode layers in each case at least largely reach the layer edge of the polymer layer, partly with the formation of a contact section, and partly with the formation of an insulating section of the one
  • the coated polymer layers are stacked on top of one another such that the contact sections and the insulating sections each lie one above the other and that the contact sections alternately contribute to the formation of a first or a second contacting area for the electrode layers during layering.
  • An advantageous variant of the method is characterized in that a web-shaped semifinished product is produced, the semifinished product being obtained by coating a polymer tape with the electrode layer in such a way that the layer edge of the electrode layer at least largely reaches one side of the web-shaped semifinished product and from the other
  • the web-shaped semi-finished product has a side edge, and the web-shaped semi-finished product is broken down into the sections forming the polymer layers.
  • the web-shaped semifinished product can advantageously be produced in a simple manner, in particular with a comparatively high production speed, the sections for forming the polymer layers of the stack actuator being able to be obtained by simply cutting to length. These can then be combined to form the stack actuators.
  • the webs of the semifinished product are trapezoidal, the side edges forming the trapezoid legs. If such a trapezoidal web is rolled up, a number of stack actuators are created after the roll has been disassembled, in which the area of the polymer layers continuously decreases in the stacking direction of the stack.
  • the distance of the layer edge of the electrode layer from the one side edge of the trapezoidal semi-finished product must be dimensioned such that the electrically insulating distance from the relevant contacting area is ensured, so that each electrode layer is only connected to the other contacting area.
  • the webs of the semifinished product are deformed during the winding onto the roller in such a way that the trapezoidal course of the webs is produced.
  • a web made of a polymer tape and an electrode layer with parallel side edges can be used advantageously as a semifinished product, which can be easily produced.
  • the trapezoidal course of the webs is then created by deliberately deforming the semi-finished product.
  • the width of the semi-finished product can be reduced continuously or in steps, and by stretching the semi-finished product at right angles to the web course, the width of the web can be increased.
  • the web is then rolled up in the deformed state, this state being retained in the finished stack actuators.
  • the first and the second contacting areas are subjected to a selective etching treatment in such a way that the area of the electrode layers provided for contacting is enlarged.
  • manufacturing inaccuracies in the coating of the polymer layers with the electrode layer can advantageously be compensated for, since the electrode layer is also exposed for contacting in the contact area if it does not reach the edge of the layer of the polymer layer. enough.
  • the area of the electrode layer available for contacting can advantageously be increased by a selective etching treatment.
  • FIG. 1 and 2 show exemplary embodiments of the polymer actuator according to the invention as schematic sections
  • FIG. 3 schematically shows the side view and the top view of a manufacturing system for carrying out an exemplary embodiment of the method according to the invention
  • FIG. 4 shows detail IV according to FIG. 3a
  • FIG. 5 shows the section V-V according to FIG. 3a and FIG. 6 shows the top view of a polymer layer with an electrode layer of a further exemplary embodiment of the polymer actuator according to the invention.
  • a polymer actuator according to FIG. 1 consists of a stack 11 in which polymer layers 12 and electrode layers 13a, 13b alternately lie one on top of the other.
  • a polymer layer 12 forms a unit with one of the electrode layers 13a, 13b, which was produced as a section of a web-shaped semifinished product before the stack 11 was joined (see FIG. 3a).
  • the sections in the stack 11 have side edges 15a, 15b, the electrode layers 13a reaching as far as the associated side edges 15a and the electrode layers 13b reaching the side edges 15b.
  • the contacting areas 17a, 17b are formed on the side surface 16 of the stack.
  • the contacting area 17a is shown by layers immediately after the stack 11 has been produced.
  • the representation of the contacting area 17b shows the state of the same after a subsequent, selective etching step, as a result of which the material of the polymer layers 12 has been removed and the electrode layers 13b thus provide a larger area for the subsequent application of an electrode layer 18b.
  • the electrode layer can be led under the lowest polymer layer at the same time, where it takes on the function of a missing electrode layer.
  • the stack 11 consists of ring-shaped polymer layers 12, the side surface 16 being composed of the outer jacket and the hole wall that is created in the stack. This results in the possibility of contacting the electrode layers 13a through the electrode layer 18a on the outside on the lateral surface of the stack 11, while the electrode layers 13b are contacted in the through hole by means of the electrode layer 18b. Furthermore, a voltage source 19 is indicated, which can be connected to the electrode layers 18a, 18b in order to activate the polymer actuator.
  • FIG. 3 shows the sequence of the manufacturing process for the polymer actuators according to the invention.
  • a polymer tape 21 is unrolled from each of two supply rolls 20a, 20b.
  • Graphite powder is applied to the via slot nozzles 22a, 22b
  • Polymer webs 21 applied, whereby a web-shaped semi-finished product 23a, 23b, consisting of the polymer tape 21 and an electrode layer (cf. for example 13a in FIG. 3b), is produced.
  • the semifinished product 23a is guided over a deflection roller 24 to the semifinished product 23b after the latter has been provided with an adhesive layer by means of an adhesive distributor 25a.
  • a permanent connection between the semi-finished products 23a, 23b is produced via pressure rollers 26a. After applying a further adhesive layer (27 in FIG.
  • the layer composite of the semi-finished products 23a, 23b is wound up on a roller 28 and pressed on by means of a pressure roller 26b. In this way, a winding 29 of the semi-finished products 23a, 23b is obtained, which is used in the further manufacturing process to produce the stacks (cf. FIG. 4).
  • FIG. 3b shows the process according to FIG. 3a as a supervision. It can be seen that the gap nozzle 22a does not extend over the entire width of the polymer tape 21, so that the electrode layer 13b formed only on one side up to the side edge 15a, but on the other side not up to the side edge 15b of the web of the web-shaped Semi-finished products are enough.
  • the web-shaped semi-finished product 23b cannot be seen in FIG. 3b, in which the electrode layer is produced in the same width but with a distance from the opposite side edge.
  • FIG. 3b shows one possibility of how the web-shaped semi-finished products 23a, 23b can be shaped into a trapezoid by deformation, ie that the side edges 15a, 15b form the trapezoidal legs.
  • this can be accomplished at right angles to the course of the web by means of stretching rollers 30, which due to their liability on the Semi-finished products 23a, 23b can exert the force Fi on the semi-finished products 23a, 23b.
  • the (pressure) rollers 26a, 26b, 28 can be used to stretch the belt by means of the force F2, in which the belt is transported at different tangential speeds over the respective pairs of rollers. If the tape is wound with a trapezoidal shape on the roller 28 to form the winding 29, the step-like profile of the side edges 15a, 15b indicated in FIG. 3b is produced (cf. also FIG. 5).
  • FIG. 4 shows how a plurality of stacks 11 of the polymer actuators can be produced from the winding 29 by the winding being cut along the indicated cutting lines 31 down to the bottom of the roller 28.
  • the winding 29 is divided into sections 14. From Figure 4, the
  • FIG. 5 shows a stack 11, which was produced according to FIG. 4, in section. This section corresponds to the section V-V of the winding 29 according to FIG. 3a. It can be seen that the trapezoidal shape of the semi-finished products 23a, 23b leads to a stair-like course of the stack 11. Otherwise, the polymer actuator according to FIG. 5 has a structure comparable to the polymer actuator according to FIG. 1.
  • FIG. 6 shows the top view of a polymer layer 12 with an electrode layer 13b of a polymer actuator with a round base.
  • electrodes 32a, 32b are cast into grooves in the side surface 16 of the stack 11. sen, wherein the electrode layers (the electrode layer 13b is shown) are alternately connected to the electrode 32a or the electrode 32b.
  • the edge of the electrode layer 13b has a contact section 33 to the electrode 32b and an insulating section 34 to the electrode 32a.
  • the contact section lies on the electrode 32a and the insulating section on the electrode 32b.

Abstract

L'invention a pour objet un actionneur polymère de construction du type empilé. La pile (11) est formée par une succession alternée, de couches de polymère notamment électroactives (12) et de couches d'électrodes (13a, 13b). L'actionneur polymère peut être fabriqué, de manière simple et avantageuse, en déposant les couches d'électrodes (13a, 13b), alternativement, sur un bord de la couche polymère ou sur l'autre bord de chaque couche polymère, ces couches étant à distance du bord opposé. Par revêtement simple (18a, 18b) des faces latérales de la pile, les électrodes peuvent être reliées électriquement, alternativement, à pôles contraires, chaque distance des couches d'électrodes par rapport au bord opposé fournissant une isolation entre la couche d'électrodes (par exemple, 13b) et le revêtement d'électrodes (par exemple, 18a) avec lequel la couche d'électrodes ne doit pas venir en contact. Une mise en contact particulièrement sûre de la couche d'électrodes (13) est obtenue lorsque la pile (11) présente une section en forme générale d'escalier.
PCT/DE2005/000347 2004-03-04 2005-02-25 Actionneur polymere de construction du type empile, et son procede de production WO2005086249A1 (fr)

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Application Number Priority Date Filing Date Title
DE102004011029.8 2004-03-04
DE102004011029A DE102004011029B4 (de) 2004-03-04 2004-03-04 Polymeraktor in Stapelbauweise und Verfahren zu dessen Herstellung

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EP1919071A2 (fr) * 2006-11-03 2008-05-07 Danfoss A/S Composite diélectrique et procédé de fabriation d'un composite diélectrique
EP2083174A1 (fr) 2008-01-25 2009-07-29 Siemens Aktiengesellschaft Aube de guidage d'entrée pour compresseur de gaz
WO2009112988A1 (fr) * 2008-03-10 2009-09-17 Fondazione Istituto Italiano Di Tecnologia Procédé et appareil permettant de fabriquer des actionneurs polymères multicouches adaptés à la mise en place d'un muscle artificiel
EP2110590A1 (fr) * 2008-04-14 2009-10-21 Robert Bosch Gmbh Organe de verrouillage
US20120139393A1 (en) * 2010-12-07 2012-06-07 Industry-Academic Cooperation Foundation, Yonsei University Electroactive polymer actuator and method of manufacturing the same
EP2498312A2 (fr) 2006-11-03 2012-09-12 Danfoss A/S Composite multicouche
EP2498311A2 (fr) 2006-11-03 2012-09-12 Danfoss A/S Transducteur capacitatif à action directe
EP2323188A3 (fr) * 2009-11-16 2013-01-02 Samsung Electronics Co., Ltd. Actionneur polymère électro-actif et son procédé de fabrication
WO2013034549A3 (fr) * 2011-09-06 2013-05-10 Empa Eidgenössische Materialprüfungs- Und Forschungsanstalt Tête de revêtement élastomère présentant une buse de revêtement et emploi de moyens d'évasement
WO2014074554A2 (fr) * 2012-11-06 2014-05-15 Bayer Intellectual Property Gmbh Appareil, système et procédé d'actionneur empilé
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DE202014008799U1 (de) 2013-11-06 2014-12-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Herstellung von elektroaktiven Polymeraktuatoren
US9195058B2 (en) 2011-03-22 2015-11-24 Parker-Hannifin Corporation Electroactive polymer actuator lenticular system
US9231186B2 (en) 2009-04-11 2016-01-05 Parker-Hannifin Corporation Electro-switchable polymer film assembly and use thereof
US9425383B2 (en) 2007-06-29 2016-08-23 Parker-Hannifin Corporation Method of manufacturing electroactive polymer transducers for sensory feedback applications
US9553254B2 (en) 2011-03-01 2017-01-24 Parker-Hannifin Corporation Automated manufacturing processes for producing deformable polymer devices and films
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
CN107924989A (zh) * 2015-09-02 2018-04-17 皇家飞利浦有限公司 基于电活性聚合物或光活性聚合物的致动器设备
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EP3672057A4 (fr) * 2017-09-28 2021-05-26 Toyoda Gosei Co., Ltd. Élément piézoélectrique formé à partir d'un élastomère et procédé de production d'un élément piézoélectrique formé à partir d'un élastomère
CN113140668A (zh) * 2020-01-19 2021-07-20 北京小米移动软件有限公司 压电组件及制作方法、屏幕部件和移动终端
CN113140669A (zh) * 2020-01-19 2021-07-20 北京小米移动软件有限公司 压电组件及制作方法、屏幕部件和移动终端

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DE102013208791B4 (de) 2013-05-14 2022-02-10 Robert Bosch Gmbh Hybridfolie für einen Energietransformer mit Verfahren zur Herstellung
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EP2498312A2 (fr) 2006-11-03 2012-09-12 Danfoss A/S Composite multicouche
WO2008052559A2 (fr) * 2006-11-03 2008-05-08 Danfoss A/S Composite diélectrique et procédé de production
EP1919071A3 (fr) * 2006-11-03 2008-09-03 Danfoss A/S Composite diélectrique et procédé de fabriation d'un composite diélectrique
WO2008052559A3 (fr) * 2006-11-03 2009-03-19 Danfoss As Composite diélectrique et procédé de production
EP1919071A2 (fr) * 2006-11-03 2008-05-07 Danfoss A/S Composite diélectrique et procédé de fabriation d'un composite diélectrique
EP2498311A2 (fr) 2006-11-03 2012-09-12 Danfoss A/S Transducteur capacitatif à action directe
EP2498313A2 (fr) 2006-11-03 2012-09-12 Danfoss A/S Composite auto-cicatrisant
US9425383B2 (en) 2007-06-29 2016-08-23 Parker-Hannifin Corporation Method of manufacturing electroactive polymer transducers for sensory feedback applications
EP2083174A1 (fr) 2008-01-25 2009-07-29 Siemens Aktiengesellschaft Aube de guidage d'entrée pour compresseur de gaz
US8397373B2 (en) 2008-03-10 2013-03-19 Fondazione Istituto Italiano Di Tecnologia Method for manufacturing a multilayer polymeric actuator
WO2009112988A1 (fr) * 2008-03-10 2009-09-17 Fondazione Istituto Italiano Di Tecnologia Procédé et appareil permettant de fabriquer des actionneurs polymères multicouches adaptés à la mise en place d'un muscle artificiel
EP2110590A1 (fr) * 2008-04-14 2009-10-21 Robert Bosch Gmbh Organe de verrouillage
US9231186B2 (en) 2009-04-11 2016-01-05 Parker-Hannifin Corporation Electro-switchable polymer film assembly and use thereof
EP2323188A3 (fr) * 2009-11-16 2013-01-02 Samsung Electronics Co., Ltd. Actionneur polymère électro-actif et son procédé de fabrication
US8384271B2 (en) 2009-11-16 2013-02-26 Samsung Electronics Co., Ltd. Electroactive polymer actuator and method of manufacturing the same
US20120139393A1 (en) * 2010-12-07 2012-06-07 Industry-Academic Cooperation Foundation, Yonsei University Electroactive polymer actuator and method of manufacturing the same
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