WO2005047747A1 - 流動体輸送管、半導体製造ラインシステム及び液晶パネル製造ラインシステム - Google Patents
流動体輸送管、半導体製造ラインシステム及び液晶パネル製造ラインシステム Download PDFInfo
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- WO2005047747A1 WO2005047747A1 PCT/JP2004/016959 JP2004016959W WO2005047747A1 WO 2005047747 A1 WO2005047747 A1 WO 2005047747A1 JP 2004016959 W JP2004016959 W JP 2004016959W WO 2005047747 A1 WO2005047747 A1 WO 2005047747A1
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- fluid transport
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- 239000011241 protective layer Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000007103 stamina Effects 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B1/00—Layered products having a non-planar shape
- B32B1/08—Tubular products
Definitions
- Fluid transport pipe, semiconductor production line system and liquid crystal panel production line system are Fluid transport pipe, semiconductor production line system and liquid crystal panel production line system
- the present invention relates to a fluid transport pipe, a fluid transport pipe for identification, a semiconductor manufacturing and processing apparatus, a semiconductor manufacturing line system, a liquid crystal panel manufacturing and processing apparatus, and a liquid crystal panel manufacturing line system.
- a conductive portion made of a conductive substance such as carbon or iron powder and the PFA is exposed and embedded in the outer peripheral surface in a stripe shape along the longitudinal direction.
- the number of tubes used for PFA is the number of tubes used in the production line.
- the amount of fluid flowing through each tube is determined by the description on the tag attached to the tube. It was common to confirm this. It is difficult to easily read the tag description from a distance such as a monitoring monitor, so there was a major problem in terms of maintainability in the event of a problem in liquid transfer.
- a tube for chemical liquid piping has been proposed in which a polytetrafluoroethylene [PTFE] inner tube having a strong force is impregnated with a PTFE dispersion to form an outer layer and a color mark is discontinuously applied (for example, while Patent Document 4 reference.)
- PTFE polytetrafluoroethylene
- Patent Document 1 JP-A-9-137900
- Patent Document 2 JP-A-2003-4176
- Patent Document 3 JP 2000-26688 A
- Patent Document 4 Japanese Patent Publication No. 3-8861
- An object of the present invention is to make it possible to easily identify a specific fluid transport pipe by visual inspection of another pipe force, to visually recognize the flow state of the internal fluid even with a distance force, and to contaminate the internal fluid.
- the purpose is to provide a fluid transport pipe that does not.
- the present invention is a fluid transport tube comprising a melt-processable fluoropolymer layer (A) and a colored melt-processable polymer layer (B) in a laminated state.
- the fluoropolymer layer (A) is the innermost layer.
- the present invention relates to a fluid transport tube comprising a melt-processable fluoropolymer layer (A) and a colored melt-processable polymer layer (B) in a laminated state, wherein the melt-processable fluoropolymer layer is (A) is the innermost layer, wherein the fluid transport pipe is characterized in that the area of the outer surface where the visible light transmittance is 25% or more is 90% or more of the entire outer surface area. It is a fluid transport pipe.
- the present invention relates to the identification fluid transport pipe used when visually distinguishing the identification fluid transport pipe from other fluid transport pipes other than the identification fluid transport pipe, wherein the identification fluid is provided.
- the transport pipe is the above-described fluid transport pipe
- the other fluid transport pipe is the above-mentioned fluid transport pipe or another pipe for transporting the fluid
- the color, Z, or pattern of the body transport tube is different from the color, Z, or pattern of the other fluid transport tube described above.
- the present invention comprises a manufacturing / processing apparatus for manufacturing a semiconductor or a semiconductor peripheral member, and a fluid transport pipe for transporting a chemical solution used in the manufacturing-processing apparatus.
- An apparatus for manufacturing and processing semiconductors which is the fluid transport pipe of the present invention.
- the present invention comprises a manufacturing / processing apparatus for manufacturing a semiconductor or a semiconductor peripheral member, and a fluid transport pipe for transporting a chemical solution used in the manufacturing-processing apparatus. It is a semiconductor production line system characterized by the fluid transport pipe of the present invention.
- the present invention comprises a production process apparatus for producing a liquid crystal panel, and a fluid transport pipe for transporting a chemical solution used in the production process apparatus.
- the present invention relates to a manufacturing and processing apparatus for manufacturing a liquid crystal panel, and to transport a chemical solution used in the manufacturing and processing apparatus.
- the fluid transport tube is the fluid transport tube of the present invention. is there.
- the fluid transport pipe of the present invention has a visible light transmittance of 25% or more with respect to visible light from all circumferential directions. If the visible light transmittance is less than 25%, it is easy to visually check the flow of the fluid inside the transport pipe from the outside, and the flow of the fluid transport pipe must be checked at a very short distance. Or the fact that it cannot be checked from the outside, it may be inferior in maintainability.
- the flow rate is preferably 50% or more, more preferably 70% or more. % Is particularly preferable.
- the "entire outer peripheral direction” is an arbitrary normal direction on the outer periphery of a cross section perpendicular to the longitudinal direction of the fluid transport pipe.
- the “visible light transmittance” is the ratio of the transmitted light intensity of the fluid transport tube to the blank intensity measured without placing any sample.
- the above “visible light transmittance with respect to visible light from all circumferential directions” is expressed by the ratio of the transmitted light intensity.
- the above-mentioned “transmitted light intensity of the fluid transport tube” refers to the thickness of the fluid transport tube when the fluid transport tube is allowed to stand still on a hot plate at a temperature equal to or higher than its relaxation point.
- a spacer having a thickness corresponding to twice the thickness was arranged on both sides of the fluid transport pipe, and a flat plate was statically formed on the fluid transport pipe by placing a flat plate on the fluid transport pipe.
- the sample is cooled as it is (in this specification, the fluid transport tube having the flat portion and cooled is sometimes referred to as a "sample for measuring transmitted light intensity"), and the obtained sample for measuring transmitted light intensity is directly read.
- a haze meter manufactured by Toyo Seiki Seisaku-sho, Ltd.
- ASTM D 1003 As the flat plate, a plate having a mass that does not destroy the fluid transport tube when placed on the fluid transport tube by the above method is used.
- the above haze meter may be replaced with an apparatus having a measurement principle based on JIS K 6714 or PIO IS K 6717.
- Another fluid transport tube of the present invention is one in which the area of the outer surface having a visible light transmittance of 25% or more is 90% or more of the entire outer surface area. If the area of visible light transmittance of 25% or more of the entire outer surface area of the fluid transport pipe is 90% or more, The portion of the entire outer surface area occupied by the remaining area of less than 10% preferably has a visible light transmittance of 25% or more, but may have a visible light transmittance of 25% or less.
- the part having a visible light transmittance of 25% or more may be alternately present with the part having a visible light transmittance of 25% or more, or the part having a visible light transmittance of less than 25% may not be divided into two or more.
- the portion where the visible light transmittance is 25% or more may be located on the viewer side of the fluid transport tube. If the area of the portion where the visible light transmittance is 25% or more of the entire outer surface area of the fluid transport pipe is less than 90%, the flow state from the outside may be difficult to understand.
- the requirement that the area of the portion having a visible light transmittance of 25% or more of the entire outer surface area of the fluid transport tube is 90% or more is a condition that a 25 cm 2 fluid
- the evaluation can be confirmed by dividing the evaluation of the transport tube sample into 100 parts for each 5 mm square section, and 90 or more of them show visible light transmittance of 25% or more.
- Another fluid transport tube of the present invention is characterized in that it has a melt-processable fluoropolymer layer (A) and a colored melt-processable polymer layer (B) in a layered manner. This is common to the fluid transport tube of the present invention in which the visible light transmittance described above is 25% or more with respect to visible light from the entire outer peripheral direction.
- fluid transport tube of the present invention having a visible light transmittance of 25% or more with respect to the visible light of the total outer circumferential force, and the other fluid flow tube of the present invention described above.
- the body transport pipe is generically referred to as “fluid transport pipe of the present invention”.
- the fluid transport tube of the present invention comprises a laminate of a melt-processable fluoropolymer layer (A) and a colored melt-processable polymer layer (B) (hereinafter, referred to as a "colored layer (B)").
- a colored layer (B) a melt-processable fluoropolymer layer
- the melt-processable fluoropolymer layer (a) are those wherein the innermost layer (hereinafter, referred to as "innermost layer (a)".) fluid of 0 the present invention Since the transport pipe has the laminated structure, it can be easily distinguished from other pipes, the flow state of the internal fluid can be visually recognized, and the internal fluid is not contaminated. Is played.
- the fluid may be either a gas or a liquid.
- the liquid may be a volatile liquid! / And may be a fluid containing solid fine particles such as an abrasive. ,.
- the fluid is not particularly limited, and examples thereof include foods and drinks such as milk, gas, and drug solutions. I can get lost.
- the gas is not particularly limited, and includes, for example, ozone, hydrogen, oxygen, low molecular weight fluorocarbon, and the like. These exemplified gases may be gases used in the semiconductor manufacturing field.
- the chemical is not particularly limited and includes, for example, organic acids such as acetic acid, formic acid, cresol, and phenol; inorganic acids such as hydrofluoric acid, sulfuric acid, nitric acid, phosphoric acid, and hydrochloric acid; and peroxides such as aqueous hydrogen peroxide; A mixed solution of the above inorganic acids such as phosphoric acid peroxide, sulfuric acid peroxide and the like and hydrogen peroxide solution; an alkaline solution such as sodium hydroxide, potassium hydroxide, and ammonia water; alcohols such as methanol and ethanol; Amines such as ethylenediamine, diethylenetriamine and ethanolamine; amides such as dimethylacetamide; esters such as ethyl acetate and butyl acetate; hydrocarbon solvents such as xylene; chlorine solvents such as trichloroethylene; Ketones; ozone water; ultrapure water; functional water; and liquids such as a mixture of two or more
- the innermost layer (A) is made of a melt-processable fluoropolymer.
- the above-mentioned melt-processable fluoropolymer is a polymer having melt processability and having at least one hydrogen atom bonded to a carbon atom replaced by a fluorine atom.
- melt-processable fluoropolymer is, depending on the type of the fluid flowing through the fluid transport tube of the present invention, a tri-fluoroethylene polymer, a butyl fluoride polymer, a bi-lidene fluoride polymer, / ⁇ is preferably a tetrafluoroethylene polymer in terms of corrosion resistance, and is more preferably a tetrafluoroethylene copolymer in terms of corrosion resistance and corrosion resistance. .
- the tetrafluoroethylene copolymer is obtained by copolymerizing tetrafluoroethylene [TFE] with a fluoroolefin other than TFE and a Z- or fluorine-free ethylenic monomer. Chino.
- Fluoroolefins other than the above TFE are not particularly limited, and include, for example, hexafluoro mouth propylene [HFP], perfluoro (alkyl butyl ether) [PAVE], [0020] [Formula 1]
- Perfluoroethylenic monomers such as bilidenefluoride [VdF], trifluoroethylene, butyl fluoride, trifluoropropylene, pentafluoropropylene, tetrafluoropropylene, hexafluoroisobutene, etc. Hydrogen-containing fluoroethylenic monomer; and chlorine-containing fluoroethylenic monomer such as trifluoroethylene [CTFE].
- Fluoroolefins other than the above TFE can be used alone or in combination of two or more.
- the fluorine-free ethylenic monomer is not particularly restricted but includes, for example, ethylene [Et], propylene, butene, pentene and the like having 2 to 10 carbon atoms.
- alkylbutyl ether having an alkyl group of 120 carbon atoms, such as ethynolebininoleatenore, propinolebininoleatenore, cyclohexinole vinyl ether, hydroxybutyl vinyl ether and butyl vinyl ether.
- the fluorine-free ethylenic monomer may be used alone or in combination of two or more.
- the tetrafluoroethylene copolymer is particularly excellent in corrosion resistance and chemical resistance, does not contaminate the internal fluid, and has high visible light transmittance.
- A] a TFEZHFP copolymer [FEP], an EtZTFE copolymer or a TFEZVdF copolymer, and a transport tube for sterilization of a fluid such as milk flowing inside the obtained fluid transport tube.
- FEP TFEZHFP copolymer
- EtZTFE copolymer or a TFEZVdF copolymer a transport tube for sterilization of a fluid such as milk flowing inside the obtained fluid transport tube.
- UV irradiation or the like it is more preferable to use PFA because heat resistance is required and bacteria are difficult to propagate.
- PFA is unstable in terms of chemical resistance, such as COF, -CH OH, and CONH.
- the terminal group of the PFA is preferably CF.
- the melt-processable fluoropolymer may be a polymer obtained by polymerizing a functional group-containing ethylenic monomer as a comonomer.
- the above tetrafluoroethylene copolymer is used to improve the adhesiveness with the colored layer (B) or the gas noria layer (C) described below, and the functional group-containing ethylenic monomer is used as a comonomer. It may be polymerized as above.
- the “functional group-containing ethylenic monomer” refers to a hydroxyl group, a carboxyl group, a carboxyl group forming a salt, an alkoxycarbol group, and a Z or epoxy group as the functional groups. Is an ethylenically unsaturated compound having a fluorine atom directly bonded to a carbon atom.
- Y represents a hydroxyl group, a carboxyl group, a carboxyl group forming a salt, an alkoxycarbyl group or an epoxy group
- X 1 and X 2 are the same or different and are a hydrogen atom or a fluorine atom.
- f represents a fluorine-containing alkylene group or a fluorine-containing alkylene group having an ether bond having 1 to 40 carbon atoms. ) Are preferred.
- the functional group-containing ethylenic monomer is represented by the following formula:
- CF 2 CFCFgOCF2CF 2 CF2COOH
- CF g CFCF 2 OCF2CFCOOCH 3
- CH 2 CHCF 2 CF 2 CH 2 C3 ⁇ 4C ⁇ OH
- CH 2 CH (CF2 4 CH 2 CH 2 CH20H
- the ratio of the functional group-containing ethylenic monomer unit to all monomer units constituting the tetrafluoroethylene copolymer is 0%. . is preferably 002- 30 mol 0/0. 0.002 mol 0/0 not When it is full, the effect of the copolymerization based on the functional group-containing ethylenic monomer is lower than the lower limit that can be detected.
- a more preferred lower limit is 0.01 mol%, and a still more preferred lower limit is 0.05 mol%.
- the “all monomer units” means all portions derived from monomers in the molecular structure of the tetrafluoroethylene copolymer.
- the “functional group-containing ethylenic monomer unit” refers to a portion derived from the functional group-containing ethylenic monomer in the molecular structure of the tetrafluoroethylene copolymer. means.
- the ratio of the “functional group-containing ethylenic monomer unit” is a value obtained by a melt NMR measurement of the tetrafluoroethylene copolymer at 300 ° C.
- the thickness of the innermost layer (A) depends on the type of the pigment used in the fluid transport tube of the present invention, as long as it exhibits visible light transmittance within the above range.
- the colored layer (B) is colored by melt-processable polymer.
- the melt-processable polymer is not particularly limited as long as the obtained fluid transport tube satisfies the visible light transmittance in the above-mentioned range, but, for example, polyethylene, polypropylene, polyolefins such as Shiridani Bull, Polyamides, polyarylates, polyacetals, aramides, polyimides, fusible fluoropolymers, polyurethanes, polysiloxanes, and the like.For applications requiring heat resistance, chemical resistance, etc. It is preferable to use a melt-processable fluoropolymer.
- the “melt-processable fluoropolymer” in the colored layer (B) is different from the melt-processable fluoropolymer described above for the innermost layer (A) in that it is used for the colored layer (B). This is a concept that should not be excluded, but it does not exclude the same type of melt-processable fluoropolymer as the innermost layer (A).
- the colored layer (B) is preferably a layer in which a pigment is dispersed due to the power of a tetrafluoroethylene copolymer.
- a tetrafluoroethylene copolymer is used as the melt-processable polymer in the colored layer (B).
- the tetrafluoroethylene copolymer as the melt-processable polymer in the colored layer (B) is the tetrafluoroethylene copolymer as the molten polymer-containing fluoropolymer in the innermost layer (A).
- the colored layer (B) is also a layer colored by the above-mentioned melt-processable polymer.
- the coloring in the coloring layer (B) is usually performed by using a pigment.
- the type of the pigment is not particularly limited as long as the obtained fluid transport tube satisfies the visible light transmittance in the above-mentioned range, and examples thereof include carbon, titanium oxide, red iron oxide, copper oxide, and bismuth oxide.
- Inorganic acid such as antimony white, antimony white, silicate-coated molybdate orange, silicate-coated iron oxide, cadmium red, cadmium orange, cadmium yellow, ultramarine, conolet, violet, oxychrome, etc.
- Pigment One or a combination of two or more organic pigments such as a phthalocyanine pigment and a perylene pigment can be used.
- pigments mentioned above while the burden on the environment is required by companies under the EU Waste Electrical and Electronic Equipment Recycling Order (WEEE) and the ban on the use of specified substances (RoHS), cadmium, lead, cobalt (chemical substances) It is preferable that pigments containing titanium, -nickel, niobium, etc. be used instead of not including emission and transfer notification system (PRTR designation) and antimony [PRTR designation].
- WEEE EU Waste Electrical and Electronic Equipment Recycling Order
- RoHS specified substances
- cadmium cadmium
- lead cobalt
- PRTR designation emission and transfer notification system
- PRTR designation antimony
- the pigment is used in an amount of 0.1 to 100 parts by mass of the melt-processable polymer so that the obtained fluid transport tube satisfies the visible light transmittance in the above range. Preferably it is 20 parts by mass.
- “having the innermost layer (A) and the colored layer (B) in a laminated shape” means that the innermost layer (A) and the colored layer (B) May be in contact with each other, but it is not always necessary that the innermost layer (A) and the colored layer (B) are in contact with each other, and between the innermost layer (A) and the colored layer (B). Means that it has another layer.
- “having the innermost layer (A) and the colored layer (B) in a laminated state” also means that the colored layer (B) is the innermost layer (A) or the other layer provided as desired. It also means that the entire surface of this layer is covered.
- the colored layer (B) may be a layer that is entirely colored (hereinafter, may be referred to as “entirely colored layer (B)”), or has a partially colored part.
- the part other than the colored part may be transparent (hereinafter, may be referred to as “partially colored layer (B)”).
- the colored portion and the transparent portion have continuity due to a melt-processable polymer. Things.
- the partially colored layer (B) is adhered or formed on the innermost layer (A) or on a surface which is a part, but not all, of the outer surface of the other layer provided as desired in that it has the above continuity. This is different from a coloring material in which the coloring material is discontinuous on the outer surface of the innermost layer (A) or the other layer without the interposition of a transparent member connected by a polymer or the like.
- the colored layer (B) is formed as a whole colored layer (B) having a matrix force of uniformly dispersing the pigment, or a surface layer which is subjected to a surface treatment such as etching to uniformly disperse the pigment.
- a pigment is arranged so that a pattern is formed and the other part is transparent, and a pigment is coated in a groove in the surface layer so that the surface layer forms a pattern.
- a matrix composed of a pigment uniformly dispersed therein, that is, a melt-processable polymer Pigments are preferably dispersed. And more preferably Sig is obtained tetrafluoropropoxy O Roe Chile down copolymer stamina becomes a pigment is dispersed.
- pattern is a concept including patterns such as stripes, polka dots, spirals, etc. in the usual sense, numbers such as Arabic numerals, Roman numerals, etc .; letters including alphabets, kanji, hiragana, katakana, etc. is there.
- any of wet mixing and dry mixing can be employed.
- dry mixing a twin-screw extruder, a Henschel mixer, a tumbler mixer and the like are used.
- the particle size of the pigment after mixing is preferably 0.1 to 12 m so that the obtained fluid transport tube satisfies the visible light transmittance in the above range.
- the particle size of the pigment after mixing is an average particle size obtained by measurement using a laser scattering method.
- the material of the colored layer (B) may be prepared by using color pellets as a master batch and mixing uncolored pellets.
- the colored layer (B) may have a conductive material as described later.
- the thickness of the colored layer (B) is preferably 3.5 mm or less. 3. If it exceeds 5 mm, the visible light transmittance of the obtained fluid transport tube may not be in the above range! /. A more preferred upper limit is 3 mm, and a still more preferred upper limit is 1.6 mm.
- the pigment is not contained in the innermost layer (A) and therefore does not flow out into the fluid transport tube. It is also considered that the coloring layer (B) may be discolored.
- the fluid transport tube of the present invention comprises the innermost layer (A) and the colored layer (A).
- a gas barrier layer (C) may be appropriately provided between B and B).
- the material of the gas barrier layer (C) is not particularly limited, and examples thereof include those having excellent oxygen barrier properties, such as polybutyl alcohol, ethylene Z-butyl alcohol copolymer; Polyfluoro mouth trifluoroethylene [PC
- TFE ethylene Z black mouth trifluoroethylene copolymer
- PAN polyacrylonitrile
- fragrance such as polyethylene terephthalate [PET], polybutylene terephthalate [PBT], polyethylene naphthalate [PEN], polybutylene naphthalate [PBN], etc.
- Ring-containing polyesters polyphenylene sulfide [PPS]; polyglycolic acid [PGA]; polyvinyl chloride [PVC]; polyvinylidene chloride [PVDC]; polyvinyl fluoride [PVF]; polyvinylidene fluoride [PVDF], and the like.
- any thickness can be used. You can choose freely.
- the fluid transport tube of the present invention also includes a colored layer formed by depositing an inorganic coating on the outer surface of the innermost layer (A) or performing a sputtering process on the outer surface of the innermost layer (A). (B) or a gas nolia layer (C) may be provided.
- a colored layer formed by depositing an inorganic coating on the outer surface of the innermost layer (A) or performing a sputtering process on the outer surface of the innermost layer (A).
- B or a gas nolia layer (C) may be provided.
- the above-mentioned coating deposition and sputtering treatment are not preferable in terms of cleanliness and cost performance, they prevent the fluid inside the fluid transport tube from penetrating to the outer surface of the innermost layer (A). May be preferred.
- the fluid transport tube of the present invention may be one in which the colored layer (B) is the outermost layer, but is further provided with a coating layer (D) on the colored layer (B). It may be.
- a coating layer (D) As the above-mentioned coating layer (D), a protective layer for protecting the colored layer (B) is preferable, and in addition to the function of protecting the colored layer (B), or instead of the function of protecting the colored layer (B).
- a conductive layer may be used.
- the material of the coating layer (D) is not particularly limited, and examples thereof include polyurethane resin; polyester resin; aramide resin; polyimide resin; polyamide imide resin; polyamide resin; polyacetal resin; Acrylic resin; Styrene resin; Atari mouth-tolyl / butadiene Z styrene resin; Polyolefin resin such as polyethylene resin, polypropylene resin, chloride vinyl resin; Cellulose resin; Polybutyl resin Alcohol resin: Ethylene Z-Butyl alcohol copolymer. A resin whose strength is close to that of the fluorine resin in the inner layer in terms of processability and to avoid deterioration of the resin. It is preferable to use! / ,.
- the coating layer (D) is a conductive layer, it usually contains a conductive substance as the material, and the conductive substance is not particularly limited.
- the conductive substance is not particularly limited.
- carbon black acetylene black, Carbon fiber and the like.
- the amount of the conductive substance to be added to the conductive layer may be a force at which the visible light transmittance of the obtained fluid transport tube becomes 25% or more with respect to the visible light with a total circumferential azimuthal force, or the obtained fluid. If the area of the outer surface of the transport pipe where the visible light transmittance is 25% or more is within the range of 90% or more of the entire outer surface area,
- the innermost layer (A) and the colored layer (B), and the gas barrier layer (C) and the Z layer or the coating layer (D) to be laminated as required are relatively laminated.
- a method of laminating an outer layer to be disposed on the outside and an inner layer to be disposed relatively on the inside for example, a method of separately preparing each layer and inserting the inner layer into the outer layer, A method of covering the outer layer, which is a heat-shrinkable tube, with the upper layer of the inner layer.
- a method of melt coating a method of immersing the inner layer tube in a paint in which the material of the outer layer is dissolved, using a material that can be made into a solution such as PVdF as the material of the outer layer, and appropriately drying and then firing. It is possible to reduce costs and clean In order to keep the degree high, a simultaneous multilayer molding method is generally used.
- the “outer layer” is used in combination with the term “inner layer”, and is a layer that is relatively outside the inner layer and comes into contact with the inner layer.
- the fluid transport tube of the present invention uses a melt-processable polymer as the material of the colored layer (B), it is subjected to melt molding using a material composed of a polymer having a melting force, or After the application of a powder puryon or a powder coating and firing, even if the shape of the particles made of the melt-processable polymer is maintained before firing, the shape usually disappears.
- the coloring layer (B) is particularly in contact with the innermost layer (A), and when a melt-processable fluorine-containing polymer is used as the melt-processable polymer, it has excellent adhesion to the innermost layer (A). A two-layer tube that is difficult to form can be formed.
- the gas noria layer (C) is laminated between the colored layer (B) and the innermost layer (A)
- the gas nolia layer (C) is made of the same material as the gas noria layer (C).
- the pigment contained in the colored layer (B) is cut into the fluid flowing through the fluid transport pipe. It is preferable not to mix them.
- a force using a joint having a structure in which the fluid does not directly contact the end of the fluid transport tube is used.
- a force using a joint having such a structure that the fluid does not directly contact include, for example, a method disclosed in Japanese Patent Application Laid-Open No. 05-320991.
- the fluid transport pipe of the present invention can be used for visually recognizing the type of fluid passing through the fluid transport pipe from the outside.
- the recognition of the type of the fluid can be performed by using the color or pattern of the fluid transport tube by using the fluid transport tube of the present invention. Therefore, for example, when two or more fluid transport tubes of the present invention are used, or when one or more fluid transport tubes of the present invention and one or more other tubes for transporting a fluid are used, by keeping decide circulating what fluid in the fluid transport pipe of the present invention which were subjected in advance what color or pattern, said flow body transport tube or the other of the tube outside, for example the eye monitor, etc. Relatively far distance Even with the separation force, it is possible to visually check the type of fluid flowing through which fluid transport pipe. If it can be visually recognized from the outside that the other pipe is a pipe different from the fluid transport pipe of the present invention, it is determined in advance what kind of fluid is to be circulated, so that the pipe inside the other pipe is determined. You can know the type of fluid.
- the type of the fluid is determined based on external characteristics such as coloring of the fluid itself. It may be possible to know.
- the above-mentioned fluid transport pipe has high visible light transmittance, it is possible to easily recognize the flow state of the fluid by an external force visually, and the maintenance property can be remarkably improved.
- the fluid transport tube of the present invention can be suitably used for a visual recognition method.
- the visual recognition method is a method for visually recognizing the type, Z, or distribution state of a fluid passing through a fluid transport pipe by an external force. What is a tube.
- the identification fluid transport pipe of the present invention is used for visually identifying the identification fluid transport pipe from other fluid transport pipes other than the identification fluid transport pipe.
- a tube, wherein the fluid transport tube for identification is the fluid transport tube of the present invention, and the other fluid transport tube is the fluid transport tube of the present invention; or
- the color and Z or pattern of the above-mentioned fluid transport tube for identification is different from the color and Z or pattern of the above-mentioned other fluid transport tube.
- the fluid transport tube for identification of the present invention may have the same color or pattern as the other fluid transport tube as long as the above-mentioned other fluid transport tube force can be identified. Since the fluid transport tube for identification of the present invention has a colored layer (B), the above-mentioned other fluid transport tubes are not necessarily colored from the viewpoint of distinguishing from the fluid transport tube for identification of the present invention. It is not necessary to cover the entire outer surface area!
- the fluid transport tube of the present invention can be suitably used for a method for visually identifying a fluid transport tube.
- the method for visually identifying a fluid transport pipe is a method for visually identifying a specific fluid transport pipe from other fluid transport pipes other than the specific fluid transport pipe,
- the moving body transport pipe is the above-described fluid transport pipe of the present invention
- the other fluid transport pipe is the above-described fluid transport pipe of the present invention or another pipe for transporting a fluid.
- the color, Z, or pattern of the specific fluid transport tube is different from the color, Z, or pattern of the other fluid transport tube.
- the semiconductor manufacturing / processing apparatus of the present invention comprises a manufacturing / processing apparatus for manufacturing a semiconductor or a semiconductor peripheral member, and a fluid transport pipe for transporting a chemical solution used in the manufacturing / processing apparatus. That is, the fluid transport pipe is the fluid transport pipe of the present invention.
- the semiconductor manufacturing / processing apparatus of the present invention may be the smallest unit that can be marketed as a manufacturing / processing apparatus, or may be a composite apparatus in which a plurality of the minimum manufacturing / processing apparatuses are combined. Good.
- the semiconductor manufacturing / processing apparatus of the present invention is one of the above-mentioned factory distribution units when the manufacturing / processing apparatus constituting the semiconductor manufacturing line system of the present invention described below can be divided into several market distribution units. It may be one of the following.
- the semiconductor manufacturing / processing apparatus is not particularly limited as long as it uses a chemical solution, and examples thereof include a coater, a CMP apparatus, and a cleaning apparatus.
- the semiconductor production line system of the present invention includes a production process apparatus for producing a semiconductor or a semiconductor peripheral member, and the fluid transport pipe for transporting a chemical solution used in the production process apparatus. It is a production line system.
- a semiconductor manufacturing line system of the present invention for example, a semiconductor manufacturing / processing apparatus belonging to the above-described semiconductor manufacturing / processing apparatus, or a semiconductor manufacturing / processing apparatus, or a chemical solution tank, a pump, etc.
- a chemical solution supply system composed of The semiconductor manufacturing line system of the present invention includes one obtained by connecting the above-mentioned chemical liquid supply system by the above-mentioned fluid transport pipe of the present invention between a plurality of manufacturing and processing apparatuses in the manufacturing process, if desired.
- the liquid crystal panel manufacturing / processing apparatus of the present invention includes a manufacturing / processing apparatus for manufacturing a liquid crystal panel, and a fluid transport pipe for transporting a chemical solution used in the manufacturing / processing apparatus.
- the fluid transport pipe is the fluid transport pipe of the present invention.
- the liquid crystal panel manufacturing / processing apparatus of the present invention may be the smallest unit that can be marketed as a manufacturing / processing apparatus, or may be a composite apparatus in which a plurality of the manufacturing / processing apparatuses of the minimum unit are combined. Good.
- the liquid crystal panel manufacturing / processing apparatus of the present invention is a liquid crystal panel In the case where the manufacturing / processing apparatus constituting the tunnel production line system can be divided into several distribution units, it may be one of the distribution units.
- the liquid crystal panel manufacturing line system of the present invention includes a manufacturing 'processing apparatus for manufacturing a liquid crystal panel, the fluid transport pipe for transporting a chemical solution used in the manufacturing' processing apparatus, and a capillar. Production line system.
- the liquid crystal panel manufacturing line system of the present invention includes, for example, a liquid crystal panel manufacturing / processing apparatus consisting of two or more of the above-described liquid crystal panel manufacturing / processing apparatuses, or a liquid crystal panel manufacturing / processing apparatus described above, a chemical tank, a pump, etc. And a powerful chemical liquid supply system.
- the liquid crystal panel manufacturing line system of the present invention includes one obtained by connecting the above-mentioned chemical liquid supply system with the above-mentioned fluid transport pipe of the present invention between a plurality of manufacturing and processing apparatuses in a manufacturing process, if desired.
- the fluid transport pipe of the present invention may be used for applications in which prevention of contamination of the fluid flowing inside the fluid transport pipe is desired, such as a pharmaceutical production line, in addition to the semiconductor production line system and the liquid crystal panel production system. It can also be used suitably for applications such as systems and food and beverage production line systems.
- the fluid transport pipe of the present invention can easily identify a specific fluid transport pipe by visual inspection of another pipe force, and can visually recognize the flow state of the internal fluid even with a distant distance force, thereby enabling the internal fluid flow. It does not pollute the body.
- PFA pellets (trade name: NEOFLON PFA AP-231SH, manufactured by Daikin Industries) are used as the innermost layer material, and PFA color pellets (trade name: NEOFRON PFA AP-210RD, manufactured by Daikin Industries) are used as the material of the colored layer.
- the inner diameter is 22 mm
- the innermost layer thickness is 1.45 mm
- the outer layer (colored layer) thickness is 15 mm.
- 80 m average A two-layer tube having a thickness of 50 / zm was prepared. The average thickness was evaluated by an image analyzer on 10 cross sections arbitrarily taken out of an lm tube, and the average value was used to evaluate the average thickness.
- a 10% by mass aqueous solution of hydrochloric acid was sealed in the obtained tube so that the liquid level was 3 mm, 7 mm, and 12 mm, respectively, when left horizontally, and then left horizontally at a height of 1.5 m from the ground.
- the liquid level was 3 mm, 7 mm, and 12 mm, respectively, when left horizontally, and then left horizontally at a height of 1.5 m from the ground.
- the correct answer rate was 100%.
- the obtained tube is preheated to 200 ° C, hot plate (length 200mm x width 200mm), spacer (length 200mm x width 20mm x thickness 3mm) and flat plate (length 200mm x width 200mm x thickness 5mm) Then, place a flat plate on a tube by the method described above, cool it by leaving it at room temperature for 3 hours to prepare a sample for measuring transmitted light intensity with a thickness of 3 mm, and directly read a chair and meter (Toyo Seiki Seisakusho) The intensity of the transmitted light was measured according to ASTM D 1003 using the following method. The above transmitted light intensity power The calculated visible light transmittance was 25% or more.o
- the fluid transport pipe of the present invention is a fluid that flows through each transport pipe when two or more transport pipes including the above-described fluid transport pipe of the present invention are used in a production processing apparatus, a production line system, or the like. Can be applied to applications that require identification of the type.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Rigid Pipes And Flexible Pipes (AREA)
- Weting (AREA)
- Laminated Bodies (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
Description
Claims
Priority Applications (1)
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JP2005515478A JP4678303B2 (ja) | 2003-11-14 | 2004-11-15 | 流動体輸送管、半導体製造ラインシステム及び液晶パネル製造ラインシステム |
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JP2003385458 | 2003-11-14 | ||
JP2003-385458 | 2003-11-14 |
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WO2005047747A1 true WO2005047747A1 (ja) | 2005-05-26 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007142337A1 (ja) * | 2006-06-09 | 2007-12-13 | Daikin Industries, Ltd. | 積層体、流動体輸送管及びチューブ |
CN106608076A (zh) * | 2015-10-26 | 2017-05-03 | 弗鲁尔管道有限公司 | 特别地用于流体的多层管 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5625251B2 (ja) * | 2009-03-30 | 2014-11-19 | 栗田工業株式会社 | 多層管 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06337083A (ja) * | 1993-05-27 | 1994-12-06 | Nitto Denko Corp | チューブ束 |
WO2001065161A1 (fr) * | 2000-03-03 | 2001-09-07 | Toyoda Gosei Co., Ltd. | Tuyau en resine pour carburants |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09137900A (ja) * | 1995-11-13 | 1997-05-27 | Nichias Corp | 高純度薬品用配管 |
US7538170B2 (en) * | 2002-03-14 | 2009-05-26 | Daikin Industries, Ltd. | Fluorocopolymer, process for producing fluorocopolymer, fluorocopolymer curable composition, and cured object |
-
2004
- 2004-11-15 WO PCT/JP2004/016959 patent/WO2005047747A1/ja active Application Filing
- 2004-11-15 JP JP2005515478A patent/JP4678303B2/ja active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06337083A (ja) * | 1993-05-27 | 1994-12-06 | Nitto Denko Corp | チューブ束 |
WO2001065161A1 (fr) * | 2000-03-03 | 2001-09-07 | Toyoda Gosei Co., Ltd. | Tuyau en resine pour carburants |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007142337A1 (ja) * | 2006-06-09 | 2007-12-13 | Daikin Industries, Ltd. | 積層体、流動体輸送管及びチューブ |
JPWO2007142337A1 (ja) * | 2006-06-09 | 2009-10-29 | ダイキン工業株式会社 | 積層体、流動体輸送管及びチューブ |
KR101047259B1 (ko) | 2006-06-09 | 2011-07-06 | 다이킨 고교 가부시키가이샤 | 적층체, 유동체 수송관, 튜브, 반도체 제조 장치 및 약액 공급 시스템 |
CN106608076A (zh) * | 2015-10-26 | 2017-05-03 | 弗鲁尔管道有限公司 | 特别地用于流体的多层管 |
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JP4678303B2 (ja) | 2011-04-27 |
JPWO2005047747A1 (ja) | 2007-11-29 |
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