WO2005033621A1 - Corps de guidage pourvu d'une echelle de mesure materialisee - Google Patents

Corps de guidage pourvu d'une echelle de mesure materialisee Download PDF

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Publication number
WO2005033621A1
WO2005033621A1 PCT/CH2004/000612 CH2004000612W WO2005033621A1 WO 2005033621 A1 WO2005033621 A1 WO 2005033621A1 CH 2004000612 W CH2004000612 W CH 2004000612W WO 2005033621 A1 WO2005033621 A1 WO 2005033621A1
Authority
WO
WIPO (PCT)
Prior art keywords
guide body
thermal energy
guide
material measure
partial areas
Prior art date
Application number
PCT/CH2004/000612
Other languages
German (de)
English (en)
Inventor
Hans-Martin Schneeberger
Lutz Ramonat
Hans Egger
Beat Neuenschwander
Original Assignee
Schneeberger Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schneeberger Holding Ag filed Critical Schneeberger Holding Ag
Priority to DE212004000011U priority Critical patent/DE212004000011U1/de
Publication of WO2005033621A1 publication Critical patent/WO2005033621A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/0006—Working by laser beam, e.g. welding, cutting or boring taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/354—Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/005—Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/64—Special methods of manufacture
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C41/00—Other accessories, e.g. devices integrated in the bearing not relating to the bearing function as such
    • F16C41/007—Encoders, e.g. parts with a plurality of alternating magnetic poles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G01B3/004—Scales; Graduations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/26—Railway- or like rails
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Definitions

  • the invention relates to a guide body of a linear motion guide which has two guide bodies which are movable relative to one another along a guide axis and are guided to one another by means of rolling bodies and is provided with a measuring system with which measurements of the size of the body are made using a measuring standard attached to one of the guide bodies Relative movements can be determined, the material measure being generated directly on the guide body by thermal energy. Furthermore, the invention relates to such a material measure.
  • Rolling bearing linear guides are used in many areas of technology in which one component is to be moved in a straight line relative to another component and as far as possible without any friction losses.
  • Machine tools are an example of this.
  • Such guides have as a guide body a carriage or carriage which is guided on a rail via rolling bodies such as balls, rollers or needles.
  • the rolling elements circulate in self-contained rolling element revolutions of the carriage.
  • the guide bodies usually have a support area in which the rolling bodies rest on a support surface of the carriage and on the rail and thereby carry the load to be moved.
  • the rolling elements reach a first deflection channel from the supporting zone, in which the rolling elements are transferred from the supporting zone to the return channel.
  • the rolling elements After passing through the return channel, the rolling elements reach NEN second deflection channel again the supporting zone.
  • the rolling elements are not arranged in circulation but exclusively in one or more rows that run parallel to the longitudinal motion axis.
  • this description is only intended to be illustrative.
  • the use of the invention described below is of course not only possible for rotating roller bearing linear guides, but for all types of linear guides and also for other applications without having to change the invention.
  • linear motion guides are used for the highly precise linear movement of, for example, workpieces and / or tools, for example in machine tools or in any handling systems.
  • measuring systems are generally used.
  • a large number of measurement methods have already become known for this.
  • a first example of this are magnetic measuring methods with alternately applied to a carrier
  • the material measure in particular in the case of optical measuring methods, it is customary to provide the material measure as a separate component next to the rail of the linear motion guide or as an insert in the rail. In addition to high manufacturing and assembly costs, this also has the disadvantage of an increased risk of measurement inaccuracies. These can occur, for example, when the material measure shifts relative to the rail or due to different heat coefficients. cients and / or thermal loads of different degrees of thermal expansion take place.
  • DE 196 08 937 A1 proposes a method for producing a marking carrier for a length measuring device in which a laser partially melts the surface of the marking carrier with high-energy radiation and pulses of approximately 20 ns or less.
  • a disadvantage of this method is the requirement for a highly reflective surface to be generated before laser processing, which the laser melts and against which it creates less highly reflective surface structures. In order to create such highly reflective surfaces, it is necessary to polish the entire top of the rail with great technical effort before creating the material measure.
  • High-gloss polishing processes, as are proposed in DE 196 08 937 AI, are multi-stage and therefore time-consuming and expensive.
  • the invention is therefore based on the object of providing a measuring system which can be produced directly on one of the guide bodies with as little manufacturing effort as possible and nevertheless offers the possibility of highly precise measurements.
  • the material measure should be able to be produced on a surface, in particular on a surface that still has milling and / or grinding traces, with pre-polishing quite conceivable, but high polishing is not necessary.
  • the object is achieved according to the invention in the case of a linear motion control of the type mentioned at the outset in that the material measure is applied to a non-end-polished surface of the guide body by means of thermal energy.
  • the material measure is thus applied to a surface of the guide body provided with grinding and / or milling machining grooves.
  • lasers can be used for the processing, which have a pulse duration longer than 1 ns, in particular pulse durations of greater than or equal to 10 ns.
  • a lower limit of the pulse duration is given by the amount of energy required. Examples of this are, in particular, diode-pumped Nd: YAG lasers with a wavelength of 1064 nm, at most frequency-doubled or otherwise frequency-shifted.
  • diode-pumped Ti sapphire lasers with a wavelength of approx. 800 nm, possibly again frequency-doubled or otherwise frequency-shifted, or other, equivalent lasers can be used.
  • material of the guide body can be removed superficially with a laser in order to thereby produce partial or surface areas of the material measure of the optical measuring system.
  • these treated areas serve as low or non-reflective areas of an incremental material measure and appear in the measurement as dark areas. When exposed to light, they therefore have a measurable contrast to non-laser-treated surface areas of the material measure.
  • ns lasers can be used for this processing, which generate laser pulses in a range from approximately 5 ns to approximately 30 ns.
  • the main advantages of this type of laser are its high pulse energy and its low complexity, which is reflected in a higher operational reliability.
  • the risk of plasma formation of the heated material is less with nanosecond lasers than with lasers with even shorter pulse durations. Plasma formation could impair material removal.
  • each type can be used to create a sub-area of the dimensional standard that is deeper than non-laser-machined surface sections.
  • so-called ps or fs lasers can also be used to generate recessed partial areas, fs standing for femtoseconds and ps standing for picoseconds.
  • ps or fs lasers can also be used to generate recessed partial areas, fs standing for femtoseconds and ps standing for picoseconds.
  • post-treatment is preferably carried out only on the non-laser-processed sub-areas in order to increase their reflection properties and thus to increase the contrast to the laser-treated sub-areas.
  • This aftertreatment can be incomplete polishing or mechanical smoothing, for example smooth rolling, these partial areas or another method for reducing the surface roughness. In any case, however, this is significantly less complex than high-gloss polishing according to the prior art according to DE 196 08 937 AI.
  • the surface provided for the material measure is not polished or at most only slightly polished before the laser processing that the milling and / or grinding grooves in the surface structure are at least partially preserved can stay.
  • This allows process steps to increase the reflectivity to those in the Dimensional embodiment can also be restricted to highly reflective sections.
  • evaporation precipitation and / or melt spatter and, on the other hand, grinding grooves can be removed or reduced together - and not as required in DE 196 08 937 AI with separate process steps.
  • one or more lasers to produce both directed-reflective (reflecting) and diffuse-reflecting partial areas of an incremental measuring standard in the guide body, in particular t directly in a rail of a linear movement guide , If only one laser is used for this purpose, the most exact possible control of a variable laser intensity is expedient, with diode-pumped solid-state lasers being particularly suitable.
  • the laser radiation can be frequency multiplied or otherwise frequency converted.
  • the method is not limited to the use of lasers. Rather, other radiation sources can also be used for the heat treatment. Further details, features and advantages of the subject matter of the invention result from the following description of the associated drawings, in which - as an example - an apparatus and an associated process sequence for the present invention are explained.
  • FIG. 1 shows a schematic illustration of the laser treatment for applying a material measure according to the present invention
  • FIG. 2 shows a typical arrangement of a laser treatment device for applying a material measure according to the present invention
  • FIG. 3 shows an intensity profile for simultaneous production of depressions and melted, smoothed partial areas according to an alternative embodiment of the invention.
  • Linear motion guides on which a material measure is attached, are provided, for example, in machine tools for the linear movement of machine components and typically have a profiled guide rail 2 (FIG. 1) and a carriage which is longitudinally movable along the guide axis and is approximately U-shaped in cross section on.
  • the guide rail 2 is provided on each of its two side surfaces with a support surface 3, on which the carriage is supported via rolling elements and is longitudinally displaceable.
  • the carriage is longitudinally displaceable via balls.
  • one or several incremental measuring tracks 6 are provided on an upper side 4 of the rail.
  • one measurement track is assumed below that runs parallel to the guide axis. This has alternatingly uniformly reflecting first partial areas and diffusely reflecting and thus dark partial areas.
  • the reading head which has a light source for the targeted illumination of the material measure and a sensor for detecting the reflected light.
  • Such optical measuring systems are known per se.
  • a system such as that shown in FIGS. 1 and 2 can be used to generate such a measurement.
  • This is provided with a laser 8, the radiation of which is directed via several deflecting mirrors 9, 11 and a cylindrical lens 12 onto an upper side of a guide rail 2.
  • the focal line of the lens 12 is located on the top of the rail 2.
  • the rail 2 is fastened on a driven linear table 13, so that the rail 2 can be passed under the cylindrical lens 12 along its entire length. This makes it possible to provide the incremental measuring track 6 over the entire length of the rail 2.
  • short-pulse lasers can be provided.
  • energy intensities can be generated which clearly exceed a threshold intensity of the respective rail material for material removal. Due to the high intensity of the radiation, rapid melting of the material and a discharge of the molten material due to the high amount of energy result in deepened second surface areas be created. At even higher intensities, the material can be superficially converted into a vapor phase and discharged in this way. This also creates depressions in the second surface areas, which allow incident light to be reflected only diffusely. The laser-processed surface areas appear in the sensor's measurement signal as dark areas with a greatly reduced signal amplitude.
  • post-processing of partial areas will also be provided.
  • the surface roughness of partial areas is reduced in order to increase the reflection properties by using simple polishing processes - in the simplest case, the abrasion of only superficial deposits, etc. - or by mechanical smoothing, such as rolling.
  • Less preferred, but also conceivable, is to use one of the processing methods prior to laser processing instead of post-processing, but without the complex process of producing a highly polished surface.
  • both the directional-reflective (reflective) and the diffuse-reflective partial areas of the material measure are produced by laser processing.
  • these can each have a length of approximately 20-40 ⁇ m in the direction of the guide axis.
  • This is done particularly advantageously by an adapted distribution of the intensity of the laser radiation over the surface of at least two partial regions 6 ′ and 6 ′′.
  • the intensity of the pulsed laser 8 over the surface of a dark partial region is particularly high, namely clearly above the threshold intensity 20 for material removal.
  • adjacent area which is intended as a highly reflective (light) sub-area, the intensity drops.
  • this subrange lies at values which lie above a threshold intensity 21 for the melting of the material and below the threshold intensity 20 for material removal.
  • a light partial area is thus generated, which lies between an already existing dark partial area and a dark partial area created with this laser machining process.
  • the rail After the laser 8 has acted in this way over a predetermined time in a range, for example from 1 to 10 ns, the rail is displaced along the guide axis by a full division (consisting of two partial ranges). 3 it is shifted to the right. To generate the further sub-areas of the measuring track 6, this laser machining cycle is repeated with a frequency that corresponds to the number of divisions.
  • a method for producing a rail 2 for a linear motion guide is described again, which is provided with a material embodiment of a length measuring system, the rail being profiled in cross section, the cross sectional shape of the rail using a grinding method and / or milling processing method is generated, the rail is provided with an incremental or absolute material measure on one of its surfaces and a processing step is provided with which a material measure is produced by laser processing on the rail, which is characterized by a laser machining process which is carried out on a grinding wheel - or milling machining grooves provided surface of the rail.
  • This method can be characterized by laser processing, with which partial areas of the material measure 6 are formed by local surface melting of the rail 2. be fathered.
  • one of the methods described above can be characterized by the use of ps, fs or ns lasers 8 and / or by a distribution of the intensity of an instantaneous laser radiation which has an intensity over a length of a first surface area which is above a threshold intensity 20 of the rail material for material removal and, at the same time or in a timely manner over a length that follows in the direction of the guide axis, has an intensity that lies between the threshold intensity 20 for material removal and a threshold intensity 21 of the rail material for melting the material and / or due to a surface smoothing Processing method on the surfaces of the rail 2 provided as reflecting partial areas.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un dispositif de guidage de mouvement linéaire qui présente deux corps de guidage (2) pouvant se déplacer l'un par rapport à l'autre le long d'un axe de guidage et guidés l'un contre l'autre par des corps de roulement et est pourvu d'un système de mesure avec lequel, au moyen d'une échelle de mesure matérialisée (6), formée sur un des corps de guidage, des mesures concernant l'amplitude des déplacements relatifs peuvent être effectuées. L'objectif de l'invention est que l'on n'ait pas à effectuer, pour la réalisation d'une telle échelle de mesure matérialisée, un polissage, au moins une finition extra-brillante. A cet effet, il est proposé que des zones partielles de la surface du corps de guidage présentant des rainures résultant d'un rectifiage et/ou d'un fraisage soient soumises à de l'énergie thermique au moyen d'un laser, les zones partielles du corps de guidage (2) soumises à l'énergie thermique présentant, au niveau de la surface, des propriétés de réflexion diffuse, et les zones partielles non soumises à l'énergie thermique présentant, si l'on compare avec des zones partielles précédentes, des propriétés de réflexion spéculaire.
PCT/CH2004/000612 2003-10-06 2004-10-05 Corps de guidage pourvu d'une echelle de mesure materialisee WO2005033621A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE212004000011U DE212004000011U1 (de) 2003-10-06 2004-10-05 Führungskörper mit einer Massverkörperung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20315507.6 2003-10-06
DE20315507U DE20315507U1 (de) 2003-10-06 2003-10-06 Führungskörper mit einer Massverkörperung und Massverkörperung eines Führungskörpers

Publications (1)

Publication Number Publication Date
WO2005033621A1 true WO2005033621A1 (fr) 2005-04-14

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PCT/CH2004/000612 WO2005033621A1 (fr) 2003-10-06 2004-10-05 Corps de guidage pourvu d'une echelle de mesure materialisee

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DE (2) DE20315507U1 (fr)
WO (1) WO2005033621A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1742023A1 (fr) * 2005-07-06 2007-01-10 Schneeberger Holding AG Guidage linéaire avec appareil pour mesurer la position
EP2381222A1 (fr) 2010-04-22 2011-10-26 Schneeberger Holding AG Système de guidage doté de corpsen déplacement relatif et dispositif de détermination d'une position à l'aide du balayage optique d'une échelle de mesure.

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008046740A1 (de) * 2008-09-11 2010-03-18 Schaeffler Kg Maßverkörperung in Profilschienenführung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016594A1 (fr) * 1990-04-25 1991-10-31 W. Schneeberger Ag Maschinenfabrik Roggwil Dispositif de guidage avec installation de mesure
JPH06269964A (ja) * 1993-03-24 1994-09-27 Shinwa Sokutei Kk 金属部材の凹部形成方法及び定規板の目盛形成方法
WO1996035098A1 (fr) * 1995-05-02 1996-11-07 Wolfgang Stubenvoll Dispositif permettant de mesurer la position de systemes d'entrainement de verins
JP2003166855A (ja) * 2001-11-29 2003-06-13 Fuji Electric Co Ltd 光学式エンコーダ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991016594A1 (fr) * 1990-04-25 1991-10-31 W. Schneeberger Ag Maschinenfabrik Roggwil Dispositif de guidage avec installation de mesure
JPH06269964A (ja) * 1993-03-24 1994-09-27 Shinwa Sokutei Kk 金属部材の凹部形成方法及び定規板の目盛形成方法
WO1996035098A1 (fr) * 1995-05-02 1996-11-07 Wolfgang Stubenvoll Dispositif permettant de mesurer la position de systemes d'entrainement de verins
JP2003166855A (ja) * 2001-11-29 2003-06-13 Fuji Electric Co Ltd 光学式エンコーダ

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 679 (M - 1728) 21 December 1994 (1994-12-21) *
PATENT ABSTRACTS OF JAPAN vol. 2003, no. 10 8 October 2003 (2003-10-08) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1742023A1 (fr) * 2005-07-06 2007-01-10 Schneeberger Holding AG Guidage linéaire avec appareil pour mesurer la position
EP2381222A1 (fr) 2010-04-22 2011-10-26 Schneeberger Holding AG Système de guidage doté de corpsen déplacement relatif et dispositif de détermination d'une position à l'aide du balayage optique d'une échelle de mesure.

Also Published As

Publication number Publication date
DE212004000011U1 (de) 2005-07-28
DE20315507U1 (de) 2005-02-17

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