WO2005024239A1

WO2005024239A1 - Air-cooled dry vacuum pump

Info

Publication number: WO2005024239A1
Application number: PCT/JP2003/014498
Authority: WO
Inventors: Masashi Yoshimura
Original assignee: Taiko Kikai Industries Co., Ltd.
Priority date: 2003-08-27
Filing date: 2003-11-14
Publication date: 2005-03-17
Also published as: TW200508506A; JP2005069163A; US20060018773A1; TWI258537B; CN1714245A; DE10393602T5; KR20060037232A

Abstract

An air-cooled dry vacuum pump having an excellent heat exchangeability, capable of discharging clean exhaust gases, allowing an installation space to be reduced due to a small and compact size, and reduced in weight, noise, manufacturing cost, and equipment cost, wherein a rotor (2) rotated by receiving the drive force of a motor (M) used as a rotating drive source is stored in a casing (1) having a suction port (1a) and a discharge port (1b) for fluid, an air supply means is installed at the longitudinal (I) one side (1c) of the casing, the casing is formed in a double tube structure formed of an inner tube part (4) in which the rotor (2) is rotatably stored and an outer tube (5) installed around the inner tube part, and a ventilating passage (7) allowing cool air (W) by the air supply means to pass therethrough is provided between the inner tube part and the outer tube part along the longitudinal direction (I).

Description

Description Air-cooled dry vacuum pump '' Technical field

The present invention relates to an air-cooled dry vacuum pump used for, for example, medical equipment, food machinery, electrical equipment, electronic equipment, optical machinery, packaging machinery, equipment using semiconductor elements, etc., and has excellent heat exchange properties and clean exhaust. It is compact, compact, has a small installation area, is lightweight, and has low noise. Background art

Normally, a vacuum pump is operated in a state where the suction side of the fluid is closed and the degree of sealing is increased. Therefore, the rotational driving force from the motor is almost completely exchanged with heat. At this time, the generated heat has a large calorific value, and if no countermeasures are taken, the vacuum pump itself will be burned out by the generated heat and the operation cannot be continued. -The vacuum pump is operated in a vacuum state, and when the compression ratio of the compressed fluid increases, the driving force of the motor that drives the vacuum pump is converted to heat and generates a large amount of heat. There is a vacuum pump with a built-in type that cools by injecting oil and enclosed ice, but water and oil for cooling are not on the discharge side of the vacuum pump but on the suction side of the vacuum pump. There was an inconvenience that the backflow flowed to one side of the connected champer to be evacuated and the vacuum condition was lost. In recent years, dry type vacuum pumps have attracted attention instead of wet type vacuum pumps from the viewpoints of protecting and preserving the global environment, preventing pollution of toxic chemical substances, aiming at ultra-precision processing and improving accuracy, etc. It is starting to be done.

By the way, as a measure against burning of the vacuum pump due to heat generation, a dry vacuum pump is provided with a jacket portion in the casing of the vacuum pump, and is cooled by sending a coolant liquid to the jacket portion. It was a liquid-cooled vacuum pump that removed heat with a refrigerant liquid and balanced the heat. It is disclosed in Japanese Patent Application Laid-Open No. 7-167071. However, since this liquid-cooled vacuum pump uses a cooling liquid such as pure water or industrial water as a refrigerant liquid, equipment and materials such as pipes and pumps for supplying the cooling liquid are used. And a treatment facility for wastewater treatment of the coolant was required. In addition, if the coolant is to be used in a circulating manner, a cooling device and, if necessary, a water-proof treatment facility are required, and a large number of facilities are required for production. , There were many difficulties. .

However, since the conventional liquid-cooled vacuum pumps described above use a cooling liquid such as pure water or industrial water as a refrigerant liquid, pipes and pumps and other instruments for supplying the cooling liquid are used. Equipment was needed, and treatment facilities for draining the coolant were required. In addition, if the coolant is to be circulated, a cooling device and, if necessary, a basin treatment facility, etc. are required, and a large number of facilities are required for the production. Above, there were many difficulties.

Therefore, as a result of many years of research and development, the present inventor has focused on an air-cooled vacuum pump to cool the heat generated by the heat-generating portion of the vacuum pump instead of the water-cooled vacuum pump. It was made. .

The present invention differs from a simple air-cooled dry vacuum pump in which a fin is provided outside the heat generating portion of a vacuum pump to increase the heat radiation area to thereby radiate heat and perform cooling. Air-cooled dry with excellent exchangeability, clean exhaust, small size, compact size, small installation area, light weight, low noise, low production cost and low equipment cost. It is intended to provide a vacuum pump. Disclosure of the invention

The present invention has been made in view of the above problems, and the invention described in claim 1 is characterized in that a rotor which is passively rotated by a driving force of a motor as a rotation drive source is provided with a fluid inlet and a fluid outlet. In a vacuum pump housed in a casing having: a gas supply means provided on one side in the axial direction of the casing, wherein the casing comprises: an inner pipe part in which the rotor is rotatably housed; and a periphery of the inner pipe part. Formed into a double-pipe structure with the outer pipe section provided at In addition, a ventilation path through which the cool air supplied by the air supply means passes is provided along the axial direction between the pipe section and the outer pipe section. Used. '

The invention described in claim 2 of the present invention is the invention according to claim 1, wherein the ventilation path transmits a motor as a rotary drive source, and a driving force from the motor to the rotor. A rotating transmission component such as a high-speed gear, a timing gear, etc .; a rolling bearing means for rotatably supporting the shaft of the rotor; and a heat-generating member formed of the rotor and the like interlocking with each other in the axial direction. The heat generating member is provided along, and the heat generated by the heat generating member and the cool air by the air supply means passing through the ventilation passage are convected and flow to exchange heat.

The invention described in claim S of the present invention is characterized in that, in claim 1 or 2, the air supply means is an air supply fan or a suction fan. That means was adopted.

The invention according to claim 4 of the present invention is the invention according to claims 1, 2, and 3, wherein the casing for accommodating a rotor and the speed increase as the rotation transmitting component are provided. The high-speed gear chamber for accommodating the gears and the timing gear 'chamber for accommodating the timing gear are connected to each other through a communication section between the inner pipe section and the outer pipe section through a communication section, thereby forming a joint. Then, a means is adopted in which the ventilation path is formed.

The invention described in claim 5 of the present invention is characterized in that, in claim 1, claim 2, claim 3 or claim 4, the low-speed gear chamber and the timing gear chamber are separated by a partition wall. Means are formed by being divided into two upper and lower chambers through which the lubricating oil is provided so as to be able to convect by the interior being provided through a passage. It was adopted.

In the invention described in claim 6 of the present invention, in claim 1, 2, 3, 4, or 5, the rotor is provided on the − side of the casing. One end is mounted on a rotor shaft rotatably supported at one end by first rolling bearing means disposed in the fixed timing gear chamber. In the invention described in claim 7 of the present invention, in claim 1, 2, 3, 4, 5, or 6, A second rolling bearing means provided with a suction port and attached to a rotor shaft in close proximity to the other side of the sealed casing, the rotor shaft being disposed in a small-diameter holding cylinder fixed to the one side of the casing. The other feature is that the other end is rotatably supported.

Further, the invention described in claim 8 of the present invention is characterized in that, in claim 1, claim 2, claim 3, claim 4, claim 5, claim 6, claim 7, At least one outer periphery of the casing, the motor, and the air supply means is covered with a sound absorbing member as necessary.

INDUSTRIAL APPLICABILITY The present invention has excellent heat exchange properties, can perform clean exhaustion, is compact and compact, has a small installation area, is lightweight, has low noise, and is inexpensive in manufacturing costs and equipment costs. become. Brief Description of Drawings

FIG. 1 is a cross-sectional view showing Embodiment 1 of the air-cooled dry vacuum pump of the present invention, FIG. 2 is also a perspective view, FIG. 3 is a front view, and FIG. FIG. 5 is a plan view of the same. BEST MODE FOR CARRYING OUT THE INVENTION

• The details of the present invention will be described below with reference to the drawings with reference to specific examples of the embodiments.

[Embodiment 1]

FIG. 1 is a longitudinal sectional view showing Embodiment 1 of an air-cooled dry vacuum pump of the present invention, FIG. 2 is a perspective view, FIG. 3 is a front view, FIG. 4 is a plan view, and FIG. Figure is a bottom view.

In the first embodiment, a vacuum pump in which a rotor 2 that is passively rotated by the driving force of a motor M as a rotary drive source is housed in a casing 1 having an inlet la and an outlet lb of a fluid G is used. One point is, for example, the above-described conventional vacuum pump described in Patent Document 1. The configuration and operation are the same.

However, in the first embodiment, an air supply fan 3 as an air supply means is provided on one side of the casing 1 in the axial length direction I, and the casing 1 has an inner pipe portion in which the rotor 2 is rotatably housed. 4 and an outer tube portion 5 provided around the inner tube portion 4. Further, in the illustrated embodiment, the rotor 2 is housed in two inner pipe portions 4, 4 provided symmetrically in the diameter direction Q on the casing 1 in the present embodiment as shown in FIG. Thus, a biaxial axial flow type vacuum pump having two rotors 2A and 2B is configured.

The two rotors 2A and 2B have screws having different twisting directions, for example, if one rotor 2A is a right-handed screw, the other rotor 2B is formed with a left-handed screw on the outer periphery. The screws having different twisting directions are arranged such that, from the suction side to the discharge side of the vacuum pump, the rotors 2A and 2B have a large pitch length 6a and a smaller pitch length 6a than the pitch length 6a. The pitch is composed of a pitch length of 6 b. The pitch lengths of 6 a and 6 adiabatically compress the suction gas.

Reference numeral 7 denotes a ventilation path provided between the inner pipe sections 4 and 4 and the outer pipe sections 5 and 5 .The ventilation paths 7 and 7 allow the cool air W from the air supply fan 3 to pass therethrough. It is provided along the axial direction I of the casing 1.

In addition, the ventilation path 7 includes a motor M as a rotation drive source, a rotation transmission component such as a speed increasing gear 8 for transmitting the driving power from the motor M to the rotor 2A, and timing gears 9A and 9B. 10 and rolling bearing means 12 A, 12 B; 12 A, 12 B for rotatably supporting the rotor shafts 11, 11 of the rotors 28, 28. It is provided so as to be vertically penetrated along the axial direction I with respect to the heat generating member composed of the rotors 2A, 2B and the like. In Fig. 4, two rotors 2A and 2B are provided in a substantially flat elliptical shape in accordance with a two-axial axial flow type vacuum pump. This is a typical example, and the present invention is not limited to this, and may have an appropriate shape, and the number of installations may be freely increased or decreased.

That is, the casing 1 that houses the rotors 2 A and 2 B, the high-speed gear chamber 13 that houses the high-speed gear 8 as the rotation transmitting component 10, and the timing gears 9 A, The timing gear chamber 14 for accommodating 9B is communicated through a communicating portion between a double pipe structure of the inner pipe portion 4 and the outer pipe portion 5 so as to cooperate with the ventilation path 7, 7 are integrally formed.

Then, the heat generated from the heat-generating member and the cool air W from the air blower fan 3 passing through the ventilation passages 7 and 7 flow in opposition to exchange heat.

The speed-increasing gear chamber 13 and the timing gear chamber 14 are divided into upper and lower chambers through a partition wall. The inside is communicated with each other via a passage 15B disposed on the side, so that the lubricating oil O is provided so as to be convective. Of these, the passage 15 A arranged at the center of the inner circumference is formed in a short cylindrical shape to promote the convection of the lubricating oil O.

Further, the rotors 2 A, 2 B are connected to first rolling bearing means 12 A, 12 A disposed in a high speed gear chamber 13 fixed to one side 1 c of the casing 1 at one end. 16a is rotatably supported on the rotor shafts 11A and 11B as the countershafts and the countershafts, and is attached using mechanical opening members m and m.

Moreover, the rotors 2A and 2B are attached to the rotor shafts 11A and 11B as described above in proximity to the other side 1d of the casing 1 which forms a closed wall except for providing the suction port 1a. The airtightness on the suction side is ensured by this.

Further, the rotor shaft. 11 A, 11 B is provided with a second rolling bearing means 12 B, 1 B disposed in a small-diameter holding cylinder 17 fixed to the one side 1 c of the casing 1. The other end 16b is rotatably supported on 2B. As these rolling bearing means 12A, 12A; 12B, 12B, for example, ball bearings are used as shown in Fig. 1, and roller bearings are used.

Reference numeral 18 denotes a sound absorbing member provided as required when low noise is required. The sound absorbing member 18 is not necessarily provided, but the sound absorbing member 18 is provided with the casing 1, the motor M, At least one outer circumference of the air supply fan 3 is covered, as shown in the first embodiment.

Examples of the sound absorbing member 18 include polyurethane foam, sponge-rubber, felt, non-woven fabric, synthetic resin fiber or natural fiber laminated fabric, and the like. A porous material having a high sound absorbing property such as No. is optimally used.

Reference numeral 19 denotes fins formed on the outer periphery of the outer tube portion 5 of the casing 1 for releasing heat.

Reference numeral 20 denotes a plurality of suspension fittings mounted on the upper surface of the casing 1, which is used for moving easily by a suspension machine such as a crane or the like during transportation and storage by using a wire.

2 1 is a level gauge and 2 2 is an air breather.

The first embodiment of the present invention has the above configuration. When the motor M is driven, the rotors 2 A and 2 B transmit the rotational driving force from the motor M to the high-speed gear 8, and the timing gears 9 A, Since the rotor shaft 1 1.A and 1 1B rotate passively via the rotation transmission component 10 such as 9B, the screws attached to this rotor shaft Ι Ι Α, Ι Ι The rotors 2 2 and 2Β provided on the outer circumference rotate differently while the pitch length 6a of the large pitch and the pitch length 6 of the small pitch are combined in the inner pipe portions 4 and 4 provided in the casing 1. Rotated in the direction. At this time, the fan motor is driven at the same time as the motor M is driven, and the air supply fan 3 as the air supply means is rotated. Then, gas as a fluid is introduced into the inner pipe portion 4 of the casing 1 by being sucked from a suction port la provided on the other side I d (the upper surface in FIG. 1) of the casing 1, The pitch length 6a of the large pitch and the pitch length 6b of the small pitch are coupled to each other, and are introduced downstream from the primary rotor 2A rotating to the secondary rotor 2B while rotating downstream. It is adiabatically compressed and discharged from the outlet 1 b provided on the side of the casing 1.

At this time, a motor M as a rotary drive source, a high-speed gear 8 for transmitting the driving force from the motor M to the rotor 2A, and rotation transmitting parts 10 such as timing gears 9A and 9B, Rolling bearing means for rotatably supporting the rotor shafts 11, 11: 8 of the rotors 2, 28, 12 A, 12 B; 12 A, 12 B, and for compressing the fluid G Heat is generated from the heat generating member including the rotors 2A, 2B, etc., which rotate while being combined with each other, with the operation of the vacuum pump.

As described above, when the air supply fan 3 starts rotating, the cool air W is generated by the rotor 2 A, 2 In the case 1 of a double pipe structure consisting of the inner pipe part 4 and the outer pipe part 5 that rotatably house B, The air is discharged through the ventilation passages 7, 7, which are provided so as to penetrate vertically.

Then, as the cool air W from the air supply fan 3 rises up the ventilation paths 7, 7 forming a double-walled structure, the heat generated from the above-mentioned heat-generating member is cooled through the ventilation paths 7, 7. Heat exchange takes place.

At the same time, the convection function (chimney effect) that accompanies the rise in the temperature of the ventilation passages 7, 7 itself allows the cooling function using the cool air W supplied from the air supply fan 3 to be performed efficiently. .

In addition, as shown in FIG. 1, for example, as shown in FIG. 1, the vacuum pump rotors 2 A, 2 It is also possible to directly cool the motor M as the rotation drive source for B. The inside of the high-speed gear chamber 13 and the timing gear chamber 14 communicate with each other via a short cylindrical passage 15A arranged in the center of the inner periphery and a passage 15B arranged on the outer periphery. Since the lubricating oil O accommodated in the speed-increasing gear chamber 13 and the timing gear chamber 14 is subjected to convection, the lubricating oil O is heated as the vacuum pump operates. As a result, the lubrication of the high-speed gear 8, the combined timing gears 9A and 9B, and the rotor shafts 11A and 11B is reduced. Can be secured and abrasion can be prevented. Further, the lubricating oil O is pumped up by pressurization when the high-speed gear 8 rotates, so that convection between the high-speed gear chamber 13 and the timing gear chamber 14 is promoted.

At least one outer circumference of the casing 1, the motor M, and the air supply fan 3, and in the first embodiment, as shown in the figure, all are covered with a sound absorbing member 18 as necessary, so that The noise generated by the motor M, the air supply fan 3, etc., which is the generation source, is absorbed by the sound absorbing member 8, and is prevented from leaking to the outside, and the noise is reduced.

At this time, even if the entire outer circumference of the casing 1, the motor M, and the air supply fan 3 is covered with the sound absorbing member 18, as described above, the heat generated from the heat-generating member does not dissipate heat from the inner pipe 4 and the outer pipe. 5 so that it penetrates vertically along the axial direction I of casing 1. The heat exchange is performed by sending the cool air W from the air supply fan 3 into the ventilation passages 7, 7, and the heat exchange is smooth and quick without the sound absorbing member 18 being in the way. It is performed in.

In the first embodiment shown in the drawing, the cooling air W is supplied to the ventilation passages 7 provided between the inner pipe 4 and the outer pipe 5 by using the air supply fan 3 as the air supply means. Although the heat exchange with the heat generated from the heat generating member is performed, the present invention is not limited to this.For example, although not shown in the drawing, a suction fan is provided on the other side 1 d of the casing 1. By installing it in communication with the ventilation paths 7 and 7, fresh air is introduced into the ventilation paths 7 and 7 from outside by sucking the air in the ventilation paths 7 and 7 with this suction fan. The scope of the present invention is to perform heat exchange with heat generated from the heat generating member without the cool air W.

Further, in the above-described first embodiment, a biaxial axial flow type vacuum pump in which two rotors 2A and 2B are rotatably housed and combined in two inner pipe portions 4 and 4, respectively. This is exemplarily shown, but this is merely an example, and the present invention is also applied to a vacuum pump of a single axial flow type having a single rotor and an inner tube portion 4 for housing the rotor. Further, in the above embodiment, the case where the gas is compressed as the fluid G is described as a representative, but this is merely an example, and the case where the liquid is compressed as the fluid G is also within the scope of the present invention. is there. Industrial applicability

According to the present invention, the cool air is supplied into the communication passage having the double pipe structure provided in the casing in close proximity to the heat generating member, so that the heat exchanging property is excellent and the cool air is supplied. Equipment and equipment such as pumps for supplying water and cooling liquid, as well as a treatment facility for draining the cooling liquid, and a cooling device to reuse the refrigerant. Clean exhaust can be performed without the need for equipment. It is compact, compact, has a small footprint, is lightweight, and has low noise. For example, medical equipment, food machinery, electrical equipment, electronic equipment, optical machinery, packaging machinery, equipment using semiconductor devices Best used for etc.

Claims

The scope of the claims

1. In a vacuum pump in which a rotor, which is driven by the driving force of a motor as a rotary drive source and is passively rotated, is housed in a casing having a suction port and a discharge port for a fluid, the axial direction of the self-casing is used. The casing is formed in a double-pipe structure including an inner pipe section in which the rotor is rotatably housed and an outer pipe section provided around the inner pipe section. An air-cooled dry vacuum pump, characterized in that a ventilation path through which the cool air supplied by the air supply means passes is provided between the inner pipe section and the outer pipe section along the axial direction.

2. The ventilation path includes a motor as a rotational drive source, a rotation transmitting component such as a speed increasing gear and a timing gear for transmitting a driving force from the motor to a motor, and a rotatable shaft of the rotor. And a heat-generating member comprising the rotor and the like, which are coupled to each other, and are provided along the axial direction with respect to the heat-generating member, and the heat generated from the heat-generating member and the supply passing through the ventilation passage. 2. The air-cooled dry vacuum pump according to claim 1, wherein heat is exchanged by flowing convectively with the cool air generated by the air means.

3. The air-cooled dry vacuum pump according to claim 1, wherein the air supply means is an air supply fan or a suction fan.

4. The casing for accommodating the rotor, the high-speed gear chamber for accommodating the high-speed gear as the rotation transmitting component, and the timing gear chamber for accommodating the timing gear are formed between the inner pipe portion and the outer pipe portion. The said ventilation path is formed jointly by communicating through the communicating part between the double pipe structures, The Claim 1, Claim 2, Claim 3 characterized by the above-mentioned. Air-cooled dry vacuum pump.

5. The high-speed gear chamber and the timing gear chamber are formed so as to be divided into upper and lower chambers through a partition wall, and the two chambers are provided so as to communicate with each other through a passage, so that lubricating oil is provided. The air-cooled dry vacuum pump according to claim 1, wherein the air-cooled dry vacuum pump is provided so as to be capable of convection. .

6. The rotor is mounted on a rotor shaft one end of which is rotatably supported by first rolling bearing means disposed in a timing gear chamber fixed to the casing side. The air-cooled dry vacuum pump according to any one of claims 1, 2, 3, 4, and 5, wherein

7. The rotor is mounted on a rotor shaft adjacent to the other side of the sealed casing provided with the suction port, and the rotor shaft is mounted on a small-diameter holding cylinder 筒 fixed to the one side of the casing. Claim 1, Claim 2, Claim 3, Claim 4, Claim 5, Claim 6, wherein the other end side is rotatably supported by the arranged second rolling bearing means. 2. An air-cooled dry vacuum pump according to 1.

8. At least one outer periphery of the casing, the motor, and the air supply means is covered with a sound absorbing member as necessary, wherein the sound absorbing member is used. An air-cooled dry vacuum pump according to paragraphs 3, 4, 5, 6, and 7.