JP4999157B2 - Fluid machine coupled to drive source via magnetic coupling - Google Patents

Description

  The present invention relates to a fluid machine coupled to a drive source via a magnetic coupling, and particularly to handle fluids that may cause problems if leaked to the outside, such as toxic gases and nuclear-related gases and liquids, etc. A non-lubricated non-contact type bearing and a non-contact type driving force transmission mechanism that uses a magnetic coupling that is a non-contact type driving force transmission mechanism. The present invention relates to a fluid machine coupled to a drive source through a magnetic coupling, including a machine and a pump device.

  Fluid machinery such as compressors used in nuclear power and vacuum pumps for vacuum vessels, taking into account the deterioration of components caused by radiation and prevention of environmental pollution during operation, etc., radiation resistance, wear resistance, etc. In addition, it is required to have high durability and reliability. During operation, it is possible to eliminate the formation of radioactive environment pollution atmosphere by related nuclear equipment, and to form a boundary area isolated from the external environment that does not affect the other equipment from the external atmosphere. Needed. For this reason, it is necessary to select an external shut-off isolation structure and cooling means that take these matters into consideration, and to ensure a high degree of vacuum, preventive measures against various troubles caused by oil, A sealing structure and a bearing structure for operation are required.

  This also applies to fluid machines such as compressors and pump devices that handle fluids that may cause problems if leaked to the outside, such as toxic gases. As disclosed in Japanese Patent Application Laid-Open No. 2004-228620, a non-contact type bearing such as an air bearing is used as a bearing to make it non-lubricated, and a driving force transmission is a non-contact type such as a magnetic coupling. A driving force transmission mechanism is used to make a sealed type other than the fluid introduction path and the discharge path.

  The fluid machine shown in Patent Document 1 is provided with orbiting scrolls having spiral scroll wraps on both sides in the axial direction of a flat plate, and the fixed scroll wraps having spiral scroll wraps are also provided on the spiral scroll wraps of the orbiting scrolls. These are double wrap dry type scroll vacuum pumps fitted to each other.

  The configuration of the fluid machine disclosed in Patent Document 1 will be described with reference to FIGS. 4 and 5. FIG. 5 is a diagram for explaining the principle of a vacuum pump using a spiral scroll wrap. The fixed scroll 11 having spiral blades (laps) on the upper side and the orbiting scroll 13 that is basically the same shape and driven by the eccentric crank are fitted with a 180 ° phase shift so that the spiral of the fixed scroll 11 A crescent-shaped sealed space (compression chamber) 60 formed between the inner scroll wrap inner peripheral portion 11b and the spiral scroll wrap outer peripheral portion 13b of the orbiting scroll 13 is a relative motion of the fixed and orbiting scrolls 13 and 11. The suction side is brought into a vacuum state by utilizing the volume change caused by the above.

  That is, in FIG. 5 (a), when the space between the outer peripheral portion 13b of the orbiting scroll wrap and the inner peripheral portion 11b of the fixed scroll 11 is closed and the suction process is completed, the gas taken in from the suction port 14 is shown in a dotted manner. It is trapped in the compression chamber 60. Next, in FIG. 5B in which the phase of the eccentric crank (not shown) is advanced by 90 degrees, the outer peripheral portion 13b of the wrap in the orbiting scroll 13 and the inner side of the end portion of the inner peripheral portion 11b of the starting lap in the fixed scroll 11 are shown. The gas suction process is started in the gap 61 formed between the two, and the compression chamber 62 in the middle part enters the compression process, and the compression chamber 63 in the center of the flat plate enters the discharge process at the discharge port 64.

  In FIG. 5 (c), the phase of which is further advanced by 90 degrees due to the clockwise rotation of the eccentric crankshaft, the compression chamber 60 shown in the dotted shape moves to the center portion of the scroll as the revolving motion of the orbiting scroll 13 turns. Then, the volume of the compression chamber is reduced successively, and the gas is compressed and discharged from the discharge port 64 provided at the fixed center through FIGS. 5 (d) and 5 (a).

  FIG. 4 shows a double wrap dry type in which the orbiting scroll 13 having the spiral scroll wrap having such a structure is provided on both sides in the axial direction of the flat plate, and the fixed scrolls 11 and 12 are fitted to the respective orbiting scrolls 13. It is a section lineblock diagram showing the schematic structure of a scroll vacuum pump. In FIG. 4, the vacuum pump includes a pump main body 10 including a scroll compressor 10 a, a partition wall 20, and a partition wall 25, and a drive unit 30. The pump main body 10 includes a pair of partition walls 20 and 25 that are attached to the fixed scrolls 11 and 12 in an airtight state at both ends of the drive shaft 16 that drives the orbiting scroll 13, and is wrapped by the partition walls 20 and 25. Compressed gas introduction ports 17 and 18 for supplying a compressed gas having a positive pressure from the compressed gas, and a magnetic coupling 50 for transmitting the rotational force from the drive unit 30 to the drive shaft 16 in a non-contact manner are provided. Therefore, the vacuum pump is separated from the drive unit 30 by the magnetic coupling 50 serving as a driving force transmission means and is configured in an airtight state, and contaminants from the suction side do not leak to the outside.

  The magnetic coupling 50 includes a cylindrical coupling member (outer rotor) 51 having a bottom portion coupled to the drive shaft 30a on the drive unit 30 side, a drive magnet 52 disposed inside the magnetic coupling 50, and the coupling member 51. In order to cool the air, the rotating member 53 is provided on the outer periphery of the coupling member 51 and introduces outside air from the ventilation hole 34. The vacuum pump side surrounds and seals the pump side coupling member (inner rotor) 58 attached to the drive shaft 16 of the pump body, the magnet 21 attached to the outer periphery thereof, and the pump side coupling member 58. It is comprised with the partition part 20 for forming the space 22. FIG.

  Among them, the partition wall portion 20 is provided inside the coupling member 51 having a cylindrical shape so as to be close to the driving magnet 52 in a cylindrical shape, and the pump-side coupling member 58 includes the magnet 21 attached to the outer periphery. It is arranged to be close to the partition wall 20 so as to effectively receive the attractive force or repulsive force of the driving magnet 52 provided inside the coupling member 51, whereby the outer rotor 51 rotates. The inner rotor 58 is also rotated.

  The fixed scroll 11 of the scroll compression body 10a includes a sliding surface that is set vertically in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 11a that is axially implanted on the sliding surface. The fixed scroll 12 includes a sliding surface vertically set in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 12a that is planted in the axial direction on the sliding surface. ing. The orbiting scroll 13 is composed of a sliding surface set in the axial direction that is eccentrically supported by the drive shaft 16 via a bearing, and a spiral scroll wrap 13a implanted on the sliding surface. Yes.

  The spiral scroll wrap 13a planted on the left and right in the axial direction of the orbiting scroll 13 is fitted into the spiral scroll wrap 11a of the fixed scroll 11 and the spiral scroll wrap 12a of the fixed scroll 12, respectively, and the tip of the wrap is attached. The sliding surface is in contact with the sliding surface. The tip ends of the spiral scroll wraps 11 a and 12 a of the fixed scrolls 11 and 12 are abutted and slid on the sliding surface of the orbiting scroll 13, and are rotated by the rotation prevention mechanism 57 under the eccentric support by the drive shaft 16. Without revolving, a plurality of crescent-shaped compression chambers are formed between the orbiting scroll 13 and the fixed scrolls 11 and 12, and gas is sucked from the suction port 14 at the outer peripheral portion, and as described above, the processes of suction, compression and discharge Are continuously performed at the same time, enabling suction from the discharge passage 15a to the discharge port 15 to function as a vacuum pump.

  The fixed scroll 12 that also serves as a circular lid-shaped housing has a sealing member and a fixed scroll 11 that also serves as a circular lid-shaped housing so that the orbiting scroll 13 fitted with the fixed scrolls 11 and 12 is incorporated in an airtight manner. It is made to contact | abut via 55,56, it forms the sealed space inside, and it is set as the sealing airtight structure so that it may function as a casing.

  A compressed gas of inert nitrogen gas is introduced from the outside air introduction ports 17 and 18, and the compressed gas is compressed by a sealed space formed by the orbiting scroll 13 and the fixed scrolls 11 and 12, and is discharged from the discharge port. Since the pressure is higher than the pressure of the lap compressed gas in the final sealed space discharged to 15, the wrap compressed gas does not flow back to the outside air introduction ports 17 and 18.

  On the other hand, although not shown in the figure, the drive shaft 16 of the pump body is an oil-free bearing made of an oilless metal made of a lubricating member, or a gas that operates by compressed gas introduced from the compressed gas introduction ports 17 and 18. As a bearing, non-stop operation over a long period of time is possible by eliminating surrounding oil leakage due to the use of lubricating oil, mixing oil into the exhaust gas, durability of the bearing, and management waste.

  Further, the fixed scroll 12 is provided with cooling fins 59 in the circular lid-shaped frame portion to allow natural cooling by atmospheric air. The fixed scrolls 11 and 12 that also serve as the circular lid-shaped housing are provided with cooling water circulation. Jackets 54a, 54b, 54c, 54d are provided, and forced cooling is performed from the back of the fixed scrolls 11, 12 by a cooling water circulation cooling means (not shown) having a separately provided radiator and a water circulation pump. is there.

  As described above, compressed gas having a pressure higher than that of the lap compressed gas is supplied to the end of the drive shaft 16 from the compressed gas introduction ports 17 and 18, and the compressed gas is discharged from the discharge port 15. Does not flow back to the compressed gas inlets 17 and 18. Further, the non-contact type driving force transmission mechanism using the magnetic coupling 50 is configured so as to be airtight except for the suction port 14, the discharge port 15, and the compressed gas introduction ports 17 and 18. Therefore, radiation environment pollution from the nuclear power side connected to the suction side can be more completely blocked.

  Thus, in the vacuum pump as the fluid machine disclosed in Patent Document 1, the magnetic coupling 50 serving as the driving force transmission means is a non-contact type driving force transmission mechanism, and thus the vacuum pump side is configured in an airtight state. And contaminants from the suction side do not leak to the outside. Further, non-stop operation over a long period of time is possible by using a non-lubricated bearing or gas bearing, and for forced cooling, cooling fins 59 and cooling water circulation jackets 54a, 54b are provided on the circular lid-like frame portion. , 54c, 54d, etc., and measures against heat generated from the gas compressed by the fixed scrolls 11, 12 and the orbiting scroll 13 are also taken.

JP 11-44297 A

  However, due to the fixed scrolls 11 and 12 and the orbiting scroll 13 in the fitted state, a considerable amount of heat is generated from the gas sucked and compressed from the suction port 14 and transmitted to the magnetic coupling 50, and to some extent. When the operation is performed for the time, the heat from the drive unit 30 is also transmitted to the magnetic coupling 50. However, the heat countermeasure for the magnetic coupling 50 is only the rotary blade 53 provided on the outer periphery of the coupling member (outer rotor) 51. The driving magnet 52 and the isolation wall 20 provided in the coupling member 51 are provided. No heat countermeasures have been taken.

  However, the clearance between the drive magnet 52 provided on the inner periphery of the coupling member 51 and the isolation wall 20 and the clearance between the magnet 21 provided on the outer periphery of the coupling member 58 and the isolation wall 20 are the drive unit 30. In order to transmit the driving force from the coupling member 58 to the coupling member 58, it is important to always have a certain range, but when the temperature of the isolation wall 20 and the drive magnet 52 rises, the isolation wall 20 and the drive magnet If the distance between the drive magnet 52 and the isolation wall 20 is contacted, the magnetic coupling 50 is damaged, or the distance between the drive magnet 52 and the isolation wall 20 is increased. In some cases, the magnetic force applied to the magnet 21 provided around the coupling member (inner rotor) 58 becomes weak, and the drive force cannot be normally transmitted.

  Further, the rotary blade 53 provided on the outer periphery of the coupling member (outer rotor) 51 needs to be provided with a space so that it can rotate, so that the magnetic coupling becomes larger, and consequently the fluid machine itself becomes larger. Resulting in.

  Therefore, in the present invention, through a sealed magnetic coupling including a compressor and a pump device that handle a fluid that may cause a problem if leaked to the outside, such as a toxic gas or a nuclear-related gas or liquid. Provided is a fluid machine coupled to a drive source through a magnetic coupling capable of effectively cooling a magnetic coupling in the fluid machine coupled to the drive source without increasing a space for providing the magnetic coupling. This is a problem.

In order to solve the above problems, a fluid machine coupled to a drive source via a magnetic coupling according to the present invention is provided as follows:
A driving source;
A fluid machine comprising a pump device including a compressor coupled to the drive source via a magnetic coupling;
The magnetic coupling is
An outer rotor in which the drive shaft of the drive source is directly connected to a bottom formed in a cylindrical shape;
An outer rotor-side magnet disposed on the inner periphery of the outer rotor;
An inner rotor disposed in the outer rotor and attached to the fluid machine side drive shaft;
An inner rotor side magnet provided around the inner rotor and transmitting the driving force of the drive source to the fluid machine by attracting and repelling the outer rotor side magnet;
The fluid machine covers each of both end portions of the drive shaft, and the magnetic coupling side is disposed between the inner rotor and the outer rotor, and is attached so as to make an airtight state other than the fluid suction port and the discharge port. A pair of enclosures,
In a fluid machine coupled to a drive source via a magnetic coupling,
The outer rotor constituting the magnetic coupling is provided with a wind guide structure for introducing or discharging outside air into the outer rotor by rotation, and the magnetic coupling side enclosure and the outer rotor side magnet are cooled ,
The wind guide structure is a blade formed to be inclined with respect to the rotation direction of the outer rotor, and the blade is formed by forming a wind guide slit on the wall surface of the outer rotor. In the outer rotor, the drive source side bottom, the outer rotor peripheral surface, the outer rotor side magnet disposed between the outer rotor inner peripheral surface and the magnet, and the outer rotor on the fluid machine side end surface, respectively. It is characterized by.

  In this way, by providing a wind guide structure for introducing or discharging outside air into the outer rotor and cooling the enclosure and the outer rotor side magnet, heat is generated from a fluid machine or a drive source that generates heat by compressing the gas. However, the enclosure and the outer rotor side magnet in the magnetic coupling are cooled by the introduced outside air, and the interval between the enclosure and the outer rotor side magnet changes as described above, and the enclosure and the outer rotor side Contact with the magnet breaks the magnetic coupling, or conversely, the space between the enclosure and the outer rotor side magnet increases, the magnetic force acting on the inner rotor side magnet becomes weaker, and the drive force can be transmitted normally. The situation of disappearing can be prevented.

  In addition, since the air guide structure is provided on the outer rotor itself, the magnetic coupling can be made compact without the need for a large magnetic coupling or useless space by providing the air guide structure. Can be made compact.

  The wind guide structure is a blade formed to be inclined with respect to the rotation direction of the outer rotor, and the blade is formed by forming a wind guide slit on the outer rotor wall surface. A wind guide structure can be formed with a simple configuration.

Further, the air guide structure includes a fluid machine of the outer rotor, the outer rotor side magnet disposed between the bottom of the driving source, the outer peripheral surface of the outer rotor, and the inner peripheral surface of the outer rotor. Provided on each side end face .

  Further, the wind guide structure is provided on the drive source side and the fluid machine side with the outer rotor side magnet interposed therebetween, and the wind pressure or suction force of the wind guide structure on the downstream side of the air flow is larger than that on the upstream side. By doing so, the introduced outside air flows without accumulating, and the enclosure and the outer rotor side magnet can be effectively cooled.

  As described above, the fluid machine coupled to the drive source via the magnetic coupling according to the present invention has a simple configuration in which an air guide structure for introducing outside air is provided to the outer rotor that constitutes the magnetic coupling. Even if heat generated by compressing the fluid) or heat generated from the drive source is transmitted to the magnetic coupling, it is effectively cooled by the introduced outside air, and the distance between the enclosure and the outer rotor side magnet changes. This effectively prevents damage to the magnetic coupling due to contact between the enclosure and the outer rotor-side magnet, and increases in the distance between the enclosure and the outer rotor-side magnet, which prevents normal transmission of the driving force. can do.

  In addition, since the air guide structure is provided on the outer rotor itself, the magnetic coupling can be made compact without the need for a large magnetic coupling or useless space by providing the air guide structure. Can be made compact.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention unless otherwise specified, but are merely illustrative examples. Not too much.

  FIG. 1 is a sectional view showing a schematic structure of a double wrap dry scroll vacuum pump as a fluid machine coupled to a drive source via a magnetic coupling according to the present invention, and FIG. 2 is a magnetic coupling in FIG. FIG. 3 is an enlarged cross-sectional view of a portion 31, and FIG. 3 is a cross-sectional view showing a slit as a wind guide structure provided in a coupling member 32 constituting a magnetic coupling device in a fluid machine according to the present invention. In the following description, the fluid machine of the present invention will be described with reference to the double wrap dry type scroll vacuum pump shown in Patent Document 1 and described with reference to FIG. 4, but the present invention is limited to this type of vacuum pump. It is obvious that any fluid machine coupled to a drive source via a magnetic coupling can be applied to other compressors and pump devices. In the following description, the same components as those in FIG. 4 are denoted by the same reference numerals, and in the description, there are portions that overlap with the description of FIG. 4, but in order to facilitate understanding of the present invention. I will explain these overlapping parts.

  First, the outline of the present invention will be briefly described. In the present invention, in the fluid machine represented by the vacuum pump as shown in FIG. 4, the isolation wall (enclosure) 20 on the vacuum pump side and the magnetic coupling are used. As shown in FIG. 2 and FIG. 3, a coupling member (outer rotor) 51 (32 in FIG. 1) is used to cool the drive magnet (outer rotor side magnet) 52 (33 in FIG. 1). In addition, a blade is formed so as to be inclined with respect to the rotation direction of the outer rotor 32 so that the outside air is introduced into or discharged from the outer rotor 32 by rotation, and a wind guide slit is provided on the wall surface of the coupling member 32 by the blade. It is configured.

  In this wind guide structure, the blade described above is inclined with respect to the rotation direction of the coupling member (outer rotor) 32, so that the outside air flows into the coupling member 32 or the air in the coupling member 32 is coupled to the coupling member 32. It is configured so that it can be discharged to the outside, and the drive disposed on the bottom of the coupling member 32 formed in a cylindrical shape on the drive unit 30 side, the peripheral surface of the coupling member 32, and the inner peripheral surface of the coupling member 32 Between the magnets 33 for magnets and between the magnets, the coupling member 32 is provided at one or a plurality of positions such as a vacuum pump side end face.

  Preferably, this wind guide structure is provided on both the drive unit 30 and the vacuum pump (fluid machine) side across the drive magnet (outer rotor side magnet) 33, and the wind pressure in the wind guide structure on the downstream side of the air flow. Alternatively, if the suction force is increased from the upstream side, the introduced outside air flows without accumulating, and the isolation wall (enclosure) 20 and the drive magnet (outer rotor side magnet) 33 can be effectively cooled.

  The above is the outline of the fluid machine coupled to the drive source via the magnetic coupling according to the present invention. Next, referring to FIG. 1, as the fluid machine coupled to the drive source via the magnetic coupling according to the present invention, The double wrap dry scroll vacuum pump will be described. The vacuum pump shown in FIG. 1 is provided with orbiting scrolls 13 having spiral scroll wraps on both sides in the axial direction of the flat plate, as described with reference to FIGS. It is a vacuum pump in which fixed scrolls 11 and 12 are fitted.

  In FIG. 1, the vacuum pump includes a pump main body 10 including a scroll compressor 10 a, a partition wall portion 20, and a partition wall portion 25, a drive unit 30, the pump main body 10, and a support member 35 that supports the drive unit 30. Has been. The pump body 10 has a pair of partition walls (enclosures) 20 in which both end portions of the drive shaft 16 that drives the orbiting scroll 13 are attached to the fixed scrolls 11 and 12 that also serve as a circular lid-like housing in an airtight state. , 25, and compressed gas introduction ports 17 and 18 for supplying a compressed gas having a positive pressure from the lap compressed gas to the partition walls 20 and 25, and a magnetism for transmitting the rotational force from the drive unit 30 to the drive shaft 16 in a non-contact manner. And a coupling 31. Therefore, the vacuum pump is isolated from the drive unit 30 by the magnetic coupling 31 serving as a driving force transmission means, and is configured in an airtight state so that contaminants from the suction side do not leak to the outside.

  The magnetic coupling 31 includes a cylindrical coupling member (outer rotor) 32 having a bottom portion coupled to the drive shaft 30a on the drive unit 30 side, and a drive magnet 33 disposed therein. On the vacuum pump side, a pump side coupling member (inner rotor) 23 attached to the drive shaft 16 of the pump body, a magnet 21 attached to the outer periphery thereof, and the pump side coupling member 23 are surrounded and hermetically sealed. It is comprised with the above-mentioned partition part (enclosure) 20 for forming the space 22.

  Of these, the partition wall portion 20 is provided inside the coupling member 32 having a cylindrical shape so as to be close to the driving magnet 33 in the shape of a cylinder, and the pump-side coupling member 23 includes a magnet 21 attached to the outer periphery. It is arranged so as to be close to the partition wall portion 20 and effectively receive the attractive force or repulsive force of the drive magnet 33 provided inside the coupling member 32, thereby coupling by the rotation of the coupling member 32. The member 23 is also rotated.

  The fixed scroll 11 of the scroll compression body 10a includes a sliding surface that is set vertically in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 11a that is axially implanted on the sliding surface. The fixed scroll 12 includes a sliding surface vertically set in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 12a that is planted in the axial direction on the sliding surface. ing. The orbiting scroll 13 is composed of a sliding surface set in the axial direction that is eccentrically supported by the drive shaft 16 via a bearing, and a spiral scroll wrap 13a implanted on the sliding surface. Yes.

  The spiral scroll wrap 13a planted on the left and right in the axial direction of the orbiting scroll 13 is fitted into the spiral scroll wrap 11a of the fixed scroll 11 and the spiral scroll wrap 12a of the fixed scroll 12, respectively, and the tip of the wrap Is in contact with and sliding on the sliding surface. The distal ends of the spiral scroll wraps 11a and 12a of the fixed scrolls 11 and 12 are abutted and slid on the sliding surface of the orbiting scroll 13, revolved under the eccentric support by the drive shaft 16, and the orbiting scroll 13 and A plurality of crescent-shaped compression chambers are formed between the fixed scrolls 11 and 12, and gas is sucked from the suction port 14 at the outer peripheral portion, and as described above, the suction, compression, and discharge processes are performed simultaneously and discharged. It is possible to discharge to the discharge port 15 through the passage 15a so as to function as a vacuum pump.

  A compressed gas of inert nitrogen gas is introduced from the outside air introduction ports 17 and 18, and the compressed gas is compressed by a sealed space formed by the orbiting scroll 13 and the fixed scrolls 11 and 12 and discharged. The pressure is higher than the pressure of the lap compressed gas in the final sealed space discharged to the outlet 15, and the wrap compressed gas does not flow back to the outside air inlets 17 and 18.

  On the other hand, although not shown in the figure, the drive shaft 16 of the pump body is an oil-free bearing made of an oilless metal made of a lubricating member, or a gas that operates by compressed gas introduced from the compressed gas introduction ports 17 and 18. It is a bearing, and it allows non-stop operation over a long period of time by eliminating surrounding oil leakage due to the use of lubricating oil, mixing oil into the exhaust gas, durability of the bearing, and management waste. Balance weights 42 and 43 are provided to balance the weight due to the eccentric scroll 13 being supported eccentrically.

  Although not shown in the figure, the fixed scroll 12 is provided with cooling fins in the circular lid-shaped frame portion so that it can be naturally cooled by atmospheric air, and also serves as a circular lid-shaped housing. The fixed scrolls 11 and 12 are forcibly cooled from the back of the fixed scrolls 11 and 12 by a cooling water circulation cooling means having a separately provided radiator and a water circulation pump provided with a cooling water circulation jacket (not shown). To do.

  As described above, compressed gas having a pressure higher than that of the lap compressed gas is supplied to the end of the drive shaft 16 from the compressed gas introduction ports 17 and 18, and the compressed gas is discharged from the discharge port 15. Does not flow back to the compressed gas inlets 17 and 18. Further, a non-contact type driving force transmission mechanism using a magnetic coupling 31 is configured so that the suction port 14, the discharge port 15, and the compressed gas introduction ports 17 and 18 are configured in an airtight state and the driving force transmission from the driving unit 30 is performed. Therefore, radiation environment pollution from the nuclear power side connected to the suction side can be more completely blocked. The details of the double wrap dry scroll vacuum pump as the fluid machine are described in detail in Patent Document 1.

  FIG. 2 is an enlarged cross-sectional view of a portion of the magnetic coupling 31 in FIG. 1, and the magnetic coupling device in the fluid machine coupled to the drive source through the magnetic coupling according to the present invention has the magnetic coupling as described above. For example, a portion of the coupling member 32 constituting the member 31 indicated by a bottom portion 36 on the driving portion 30 side of the coupling member 32 formed in a cylindrical shape, and a portion 39 of the end face of the coupling member 32 on the vacuum pump side are shown. The above-described air guide structure is provided at a part or the like, and an air flow as indicated by arrows 26 and 27 is formed inside the coupling member 32. In FIG. 2, 20 is an isolation wall (enclosure), 21 is an inner rotor side magnet, 23 is a coupling member (inner rotor), 30a is a drive shaft of the drive unit 30, and 33 is a drive magnet (outer rotor side). (Magnet) 34 is a ventilation hole.

  Further, the air guide structure provided on the coupling member 32 of the magnetic coupling 31 is not limited to the above-described portions 36 and 39, but also the cylindrical peripheral surface of the coupling member 32 and the inner periphery of the coupling member 32 as described above. It can be provided at various positions such as between the drive magnet 33 and the magnet arranged on the surface. As described above, this wind guide structure is provided on both the drive unit 30 and the vacuum pump side with the drive magnet 33 interposed therebetween. It is preferable that the wind pressure or suction force in the wind guide structure on the downstream side of the air flow is larger than that on the upstream side.

  FIG. 3 shows the installation position and structure of this wind guide structure. First, FIG. 3F is a cross-sectional view showing a position where a wind guide structure of the coupling member 32 having a cylindrical shape is provided, in which 30a is a drive shaft of the drive unit 30, and 33 is a drive magnet. . 36 is a cross-sectional view taken along the line AA ′, and as shown in FIG. 3A, an air guide structure provided at the bottom of the coupling member 32 formed in a cylindrical shape on the drive unit 30 side, and 37 As shown in FIG. 3B, which is a cross-sectional view at the position BB ′, the air guide structure 38 provided on the cylindrical peripheral surface of the coupling member 32 is a cross-sectional view at the position CC ′. As shown in FIG. 3C, the air guide structure 39 provided between the driving magnet 33 and the magnet disposed on the inner peripheral surface of the coupling member 32, 39 is a cross-sectional view at the DD ′ position. As shown in FIG. 3D, the air guide structure is provided on the end face of the coupling member 32 on the vacuum pump side.

  As shown in FIG. 3E, the air guide structure provided at each position is a blade that is inclined with respect to the rotation direction at each position, for example, as shown by 40 forming a slit 41. The slit 41 formed by the blade 40 allows the outside air to be discharged into the coupling member 32 or the air in the coupling member 32 to be discharged out of the coupling member 32.

  And the air guide structure 36 provided in the bottom part by the side of the drive part 30 of the coupling member 32 shown to FIG. 3 (A) is provided circularly centering on the drive shaft 30a of the drive part 30 as shown in figure, If the strength is a concern, a portion where this slit is not provided may be arranged at every fixed angle. FIG. 3B shows the air guide structure 37 provided on the cylindrical peripheral surface of the coupling member 32. For example, the air guide structure 37 is provided in a portion corresponding to the driving magnet 33 or a portion where the driving magnet 33 is not provided. It may be provided on the entire circumferential surface.

  The air guide structure 38 shown in FIG. 3C is provided between the driving magnet 33 and the magnet disposed on the inner peripheral surface of the coupling member 32. The air guide structure 38 shown in FIG. Although it is on the outer peripheral side from the center side of the drive magnet 33 protruding in the center direction from the coupling member 32, it may be provided so as to protrude at the same position as the center side of the drive magnet 33. 3 (D) is provided on the end face of the coupling member 32 on the side of the vacuum pump. In this case, when a slit is formed in the direction in which outside air is introduced into the coupling member 32, Outside air directly hits the isolation wall 20 and the cooling effect on the isolation wall 20 is increased.

  Further, as described above, these wind guide structures 36, 37, 38, 39 are provided on both the drive unit 30 and the vacuum pump side with the drive magnet 33 interposed therebetween, and the wind pressure in the wind guide structure on the downstream side of the air flow. Alternatively, when the suction force is increased from the upstream side, air is not accumulated in the coupling member 32, and a greater cooling effect can be obtained. Therefore, for example, the slit that forms the upstream air guide structure is made narrower than the slit that forms the downstream air guide structure, or outside air is introduced into the coupling member 32 from 36 air guide structures. The air can be discharged outside the coupling member 32 with the air guide structure shown in Fig. 3, or the outside air can be introduced with the air guide structure 39 and exhausted with the air guide structures 36 and 37. This can be achieved by increasing the number of wind guide structures on the discharge side rather than the wind structure.

  As described above, the fluid machine coupled to the drive source via the magnetic coupling according to the present invention as described above has a wind guide structure 36 for introducing outside air to the coupling member (outer rotor) 32 in the magnetic coupling 31. ˜39 are provided to cool the isolation wall (enclosure) 20 and the drive magnet (outer rotor side magnet) 33, a fluid machine that generates heat by compressing the gas (fluid) is used, or the drive unit Even if heat is transmitted from 30, the isolation wall 20 and the drive magnet 33 in the magnetic coupling 31 are cooled by the introduced outside air, and the interval between the isolation wall 20 and the drive magnet 33 changes as described above. The isolation wall 20 and the drive magnet 33 come into contact with each other and the magnetic coupling 31 is damaged, or conversely, the interval between the isolation wall 20 and the drive magnet 33 is increased, and the coupling member (inner Magnetic force is weakened acting on motor) side magnet 21, transmission of the driving force can be prevented a situation that can not be successfully.

  Further, since the wind guide structure is provided in the coupling member (outer rotor) 32 itself, the magnetic coupling 31 is reduced in size by not providing a large magnetic coupling 31 or unnecessary space by providing the wind guide structure. Thus, the fluid machine itself can be made compact.

  According to the present invention, even if heat is transmitted from a fluid machine or a drive unit (motor), it can be effectively cooled and coupled to a drive source through a magnetic coupling having high durability and reliability. Fluid machine.

It is a section lineblock diagram showing the schematic structure of a double wrap dry scroll vacuum pump as a fluid machine connected to a drive source via a magnetic coupling according to the present invention. It is an expanded sectional view of the magnetic coupling part in FIG. It is sectional drawing which showed the structure of the slit as a wind guide structure provided in the coupling member which comprises the magnetic coupling apparatus which becomes this invention, and an installation position. It is a cross-sectional block diagram which shows the general | schematic structure of the conventional double wrap dry scroll vacuum pump. It is a figure which shows the condition which transfers to a compression process after completion | finish of the suction | inhalation of a compression body, and the condition which transfers to a discharge process in a scroll vacuum pump.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Pump main body 10a Scroll compression body 11 Fixed scroll 11a also serving as a circular lid-shaped housing Fixed scroll wrap 11b Fixed scroll wrap inner peripheral portion 12 Fixed scroll 12a serving also as a circular lid-shaped housing Fixed scroll wrap 13 Orbiting scroll 13a Orbiting scroll Wrap 13b Orbiting scroll wrap outer peripheral portion 14 Suction port 15 Discharge port 15a Discharge passage 16 Drive shaft 17 of pump body Compressed gas introduction port 18 Compressed gas introduction port 20 Isolation wall 21 Magnet 22 Sealed space 23 Coupling member 25 Isolation walls 26 and 27 Arrow 30 Drive unit 30a Drive shaft 31 Magnetic coupling 32 Coupling member 33 Driving magnet 34 Ventilation hole 35 Support members 36, 37, 38, 39 Slit 40 Blade 41 Slit 42, 43 Balance weight

Claims (2)

A driving source;
A fluid machine comprising a pump device including a compressor coupled to the drive source via a magnetic coupling;
The magnetic coupling is
An outer rotor in which the drive shaft of the drive source is directly connected to a bottom formed in a cylindrical shape;
An outer rotor-side magnet disposed on the inner periphery of the outer rotor;
An inner rotor disposed in the outer rotor and attached to the fluid machine side drive shaft;
An inner rotor side magnet provided around the inner rotor and transmitting the driving force of the drive source to the fluid machine by attracting and repelling the outer rotor side magnet;
The fluid machine covers each of both end portions of the drive shaft, and the magnetic coupling side is disposed between the inner rotor and the outer rotor, and is attached so as to make an airtight state other than the fluid suction port and the discharge port. A pair of enclosures,
In a fluid machine coupled to a drive source via a magnetic coupling,
The outer rotor constituting the magnetic coupling is provided with a wind guide structure for introducing or discharging outside air into the outer rotor by rotation, and the magnetic coupling side enclosure and the outer rotor side magnet are cooled ,
The wind guide structure is a blade formed to be inclined with respect to the rotation direction of the outer rotor, and the blade is formed by forming a wind guide slit on the wall surface of the outer rotor. In the outer rotor, the drive source side bottom, the outer rotor peripheral surface, the outer rotor side magnet disposed between the outer rotor inner peripheral surface and the magnet, and the outer rotor on the fluid machine side end surface, respectively. fluid machine coupled to a drive source via a magnetic coupling, characterized in that is. The wind guide structure is provided on the drive source side and the fluid machine side with the outer rotor side magnet interposed therebetween, and the wind pressure or suction force of the wind guide structure on the downstream side of the air flow is made larger than that on the upstream side. A fluid machine coupled to a drive source via a magnetic coupling according to claim 1 .

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