JP2008164095A - Magnetic coupling device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To effectively cool a magnetic coupling for transmitting driving force to a rotating machine without enlarging the magnetic coupling itself. <P>SOLUTION: This magnetic coupling device is composed of: an outer rotor 32 formed in cylindrical shape and allowing a driving shaft of a drive source to be direct-coupled to the bottom part; an outer rotor side magnet 33 disposed at an inner peripheral part; an inner rotor 23 disposed in the outer rotor and mounted to a rotating shaft on the rotating machine side; an inner rotor side magnet 21 provided around the inner rotor to transmit driving force to the rotating machine; and an enveloping body 20 disposed between the inner rotor 23 and the outer rotor 32 and surrounding and sealing the rotating machine side rotating shaft including the inner rotor 23 and the inner rotor side magnet 21. The outer rotor 32 is provided with an air guide structure guiding outside air into the outer rotor 32 by rotation to cool the enveloping body 20 and the outer rotor side magnet 33. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a magnetic coupling device that transmits a driving force of a driving source to a rotating machine in a non-contact manner, and particularly handles a fluid that may cause a problem if it leaks to the outside, such as a toxic gas or a nuclear-related gas or liquid. Therefore, the present invention relates to a magnetic coupling device that transmits a driving force to a rotary machine, including a fluid machine such as a hermetic compressor and pump device.

  Compressors used in nuclear power and vacuum pumps for vacuum vessels include radiation resistance, wear resistance, etc., taking into account the deterioration of components caused by radiation and prevention of environmental pollution during operation. Therefore, it is required to have high durability and reliability. During operation, it is possible to eliminate the formation of radioactive environment pollution atmosphere by related nuclear equipment, and to form a boundary area isolated from the external environment that does not affect the other equipment from the external atmosphere. Needed. For this reason, it is necessary to select an external shut-off isolation structure and cooling means that take these matters into consideration, and to ensure a high degree of vacuum, preventive measures against various troubles caused by oil, A sealing structure and a bearing structure for operation are required.

  The same applies to rotating machines including fluid machines such as compressors and pump devices that handle fluids that may cause problems if they leak to the outside, such as toxic gases, to prevent these fluids from leaking to the outside. For example, as shown in Patent Document 1 filed by the applicant of the present application, a non-contact type bearing such as an air bearing is used as the bearing to make it non-lubricated, and transmission of driving force is magnetic (magnet) coupling, etc. The non-contact type driving force transmission mechanism is used to make a sealed type other than the fluid introduction path and the discharge path.

  The fluid machine shown in Patent Document 1 is provided with orbiting scrolls having spiral scroll wraps on both sides in the axial direction of a flat plate, and the fixed scroll wraps having spiral scroll wraps are also provided on the spiral scroll wraps of the orbiting scrolls. These are double wrap dry type scroll vacuum pumps fitted to each other.

  The configuration of the fluid machine disclosed in Patent Document 1 will be described with reference to FIGS. 4 and 5. FIG. 5 is a diagram for explaining the principle of a vacuum pump using a spiral scroll wrap. The fixed scroll 11 having spiral blades (laps) on the upper side and the orbiting scroll 13 that is basically the same shape and driven by the eccentric crank are fitted with a 180 ° phase shift so that the spiral of the fixed scroll 11 A crescent-shaped sealed space (compression chamber) 60 formed between the inner scroll wrap inner peripheral portion 11b and the spiral scroll wrap outer peripheral portion 13b of the orbiting scroll 13 is a relative motion of the fixed and orbiting scrolls 13 and 11. The suction side is brought into a vacuum state by utilizing the volume change caused by the above.

  That is, in FIG. 5 (a), when the space between the outer peripheral portion 13b of the orbiting scroll wrap and the inner peripheral portion 11b of the fixed scroll 11 is closed and the suction process is completed, the gas taken in from the suction port 14 is shown in a dotted manner. It is trapped in the compression chamber 60. Next, in FIG. 5B in which the phase of the eccentric crank (not shown) is advanced by 90 degrees, the outer peripheral portion 13b of the wrap in the orbiting scroll 13 and the inner side of the end portion of the inner peripheral portion 11b of the fixed wrap 11 at the beginning of the rolling. The gas suction process is started in the gap 61 formed between the two, and the compression chamber 62 in the middle part enters the compression process, and the compression chamber 63 in the center of the flat plate enters the discharge process at the discharge port 64.

  In FIG. 5 (c), the phase of which is further advanced by 90 degrees due to the clockwise rotation of the eccentric crankshaft, the compression chamber 60 shown in the dotted shape moves to the center portion of the scroll as the revolving motion of the orbiting scroll 13 turns. Then, the volume of the compression chamber is reduced successively, and the gas is compressed and discharged from the discharge port 64 provided at the fixed center through FIGS. 5 (d) and 5 (a).

  FIG. 4 shows a double wrap dry type in which the orbiting scroll 13 having the spiral scroll wrap having such a structure is provided on both sides in the axial direction of the flat plate, and the fixed scrolls 11 and 12 are fitted to the respective orbiting scrolls 13. It is a section lineblock diagram showing the schematic structure of a scroll vacuum pump. In FIG. 4, the vacuum pump includes a pump main body 10 including a scroll compressor 10 a, a partition wall 20, and a partition wall 25, and a drive unit 30. The pump main body 10 includes a pair of partition walls 20 and 25 that are attached to the fixed scrolls 11 and 12 in an airtight state at both ends of the drive shaft 16 that drives the orbiting scroll 13, and is wrapped by the partition walls 20 and 25. Compressed gas introduction ports 17 and 18 for supplying a compressed gas having a positive pressure from the compressed gas, and a magnetic coupling 50 for transmitting the rotational force from the drive unit 30 to the drive shaft 16 in a non-contact manner are provided. Therefore, the vacuum pump is separated from the drive unit 30 by the magnetic coupling 50 serving as a driving force transmission means and is configured in an airtight state, and contaminants from the suction side do not leak to the outside.

  The magnetic coupling 50 includes a cylindrical coupling member (outer rotor) 51 having a bottom portion coupled to the drive shaft 30a on the drive unit 30 side, a drive magnet 52 disposed inside the magnetic coupling 50, and the coupling member 51. In order to cool the air, the rotating member 53 is provided on the outer periphery of the coupling member 51 and introduces outside air from the ventilation hole 34. The vacuum pump side surrounds and seals the pump side coupling member (inner rotor) 58 attached to the drive shaft 16 of the pump body, the magnet 21 attached to the outer periphery thereof, and the pump side coupling member 58. It is comprised with the partition part 20 for forming the space 22. FIG.

  Among them, the partition wall portion 20 is provided inside the coupling member 51 having a cylindrical shape so as to be close to the driving magnet 52 in a cylindrical shape, and the pump-side coupling member 58 includes the magnet 21 attached to the outer periphery. Arranged so as to effectively receive the attractive force or repulsive force of the drive magnet 52 provided inside the coupling member 51 in the vicinity of the partition wall portion 20, and thereby the outer rotor 51 rotates to cause the inner rotor to rotate. 58 is also rotated.

  The fixed scroll 11 of the scroll compression body 10a includes a sliding surface that is set vertically in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 11a that is axially implanted on the sliding surface. The fixed scroll 12 includes a sliding surface vertically set in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 12a that is planted in the axial direction on the sliding surface. ing. The orbiting scroll 13 is composed of a sliding surface set in the axial direction that is eccentrically supported by the drive shaft 16 via a bearing, and a spiral scroll wrap 13a implanted on the sliding surface. Yes.

  The spiral scroll wrap 13a planted on the left and right in the axial direction of the orbiting scroll 13 is fitted into the spiral scroll wrap 11a of the fixed scroll 11 and the spiral scroll wrap 12a of the fixed scroll 12, respectively, and the tip of the wrap is attached. The sliding surface is in contact with the sliding surface. The tip ends of the spiral scroll wraps 11 a and 12 a of the fixed scrolls 11 and 12 are abutted and slid on the sliding surface of the orbiting scroll 13, and are rotated by the rotation prevention mechanism 57 under the eccentric support by the drive shaft 16. Without revolving, a plurality of crescent-shaped compression chambers are formed between the orbiting scroll 13 and the fixed scrolls 11 and 12, and gas is sucked from the suction port 14 at the outer peripheral portion, and as described above, the processes of suction, compression and discharge Are continuously performed at the same time, enabling suction from the discharge passage 15a to the discharge port 15 to function as a vacuum pump.

  The fixed scroll 12 that also serves as a circular lid-shaped housing has a sealing member and a fixed scroll 11 that also serves as a circular lid-shaped housing so that the orbiting scroll 13 fitted with the fixed scrolls 11 and 12 is incorporated in an airtight manner. It is made to contact | abut via 55,56, it forms the sealed space inside, and it is set as the sealing airtight structure so that it may function as a casing.

  A compressed gas of inert nitrogen gas is introduced from the outside air introduction ports 17 and 18, and the compressed gas is compressed by a sealed space formed by the orbiting scroll 13 and the fixed scrolls 11 and 12, and is discharged from the discharge port. Since the pressure is higher than the pressure of the lap compressed gas in the final sealed space discharged to 15, the wrap compressed gas does not flow back to the outside air introduction ports 17 and 18.

  On the other hand, although not shown in the figure, the drive shaft 16 of the pump body is an oil-free bearing made of an oilless metal made of a lubricating member, or a gas that operates by compressed gas introduced from the compressed gas introduction ports 17 and 18. As a bearing, non-stop operation over a long period of time is possible by eliminating surrounding oil leakage due to the use of lubricating oil, mixing oil into the exhaust gas, durability of the bearing, and management waste.

  Further, the fixed scroll 12 is provided with cooling fins 59 in the circular lid-shaped frame portion to allow natural cooling by atmospheric air. The fixed scrolls 11 and 12 that also serve as the circular lid-shaped housing are provided with cooling water circulation. Jackets 54a, 54b, 54c, 54d are provided, and forced cooling is performed from the back of the fixed scrolls 11, 12 by a cooling water circulation cooling means (not shown) having a separately provided radiator and a water circulation pump. is there.

  As described above, compressed gas having a pressure higher than that of the lap compressed gas is supplied to the end of the drive shaft 16 from the compressed gas introduction ports 17 and 18, and the compressed gas is discharged from the discharge port 15. Does not flow back to the compressed gas inlets 17 and 18. Further, the non-contact type driving force transmission mechanism using the magnetic coupling 50 is configured so as to be airtight except for the suction port 14, the discharge port 15, and the compressed gas introduction ports 17 and 18. Therefore, radiation environment pollution from the nuclear power side connected to the suction side can be more completely blocked.

  Thus, in the vacuum pump as the fluid machine disclosed in Patent Document 1, the magnetic coupling 50 serving as the driving force transmission means is a non-contact type driving force transmission mechanism, and thus the vacuum pump side is configured in an airtight state. And contaminants from the suction side do not leak to the outside. Further, non-stop operation over a long period of time is possible by using a non-lubricated bearing or gas bearing, and for forced cooling, cooling fins 59 and cooling water circulation jackets 54a, 54b are provided on the circular lid-like frame portion. , 54c, 54d, etc., and measures against heat generated from the gas compressed by the fixed scrolls 11, 12 and the orbiting scroll 13 are also taken.

JP 11-44297 A

  However, due to the fixed scrolls 11 and 12 and the orbiting scroll 13 in the fitted state, a considerable amount of heat is generated from the gas sucked and compressed from the suction port 14 and transmitted to the magnetic coupling 50, and to some extent. When the operation is performed for the time, the heat from the drive unit 30 is also transmitted to the magnetic coupling 50. However, the heat countermeasure for the magnetic coupling 50 is only the rotary blade 53 provided on the outer periphery of the coupling member (outer rotor) 51. The driving magnet 52 and the isolation wall 20 provided in the coupling member 51 are provided. No heat countermeasures have been taken.

  However, the clearance between the drive magnet 52 provided on the inner periphery of the coupling member 51 and the isolation wall 20 and the clearance between the magnet 21 provided on the outer periphery of the coupling member 58 and the isolation wall 20 are the drive unit 30. In order to transmit the driving force from the coupling member 58 to the coupling member 58, it is important to always have a certain range, but when the temperature of the isolation wall 20 and the drive magnet 52 rises, the isolation wall 20 and the drive magnet If the distance between the drive magnet 52 and the isolation wall 20 is contacted, the magnetic coupling 50 is damaged, or the distance between the drive magnet 52 and the isolation wall 20 is increased. In some cases, the magnetic force applied to the magnet 21 provided around the coupling member (inner rotor) 58 becomes weak, and the drive force cannot be normally transmitted.

  Further, the rotary blade 53 provided on the outer periphery of the coupling member (outer rotor) 51 needs to be provided with a space so that it can rotate, so that the magnetic coupling becomes larger, and thus the rotating machine itself becomes larger. Resulting in.

  Therefore, in the present invention, a rotary machine including a hermetically sealed fluid machine such as a compressor or a pump device that handles a fluid that may cause a problem if leaked to the outside, such as a toxic gas, a nuclear-related gas, or a liquid. It is an object to provide a magnetic coupling device having a structure capable of effectively performing cooling in a magnetic coupling for transmitting a driving force without increasing a space for providing the magnetic coupling.

In order to solve the above problems, a magnetic coupling device according to the present invention is
An outer rotor in which a drive shaft of a drive source is directly connected to a bottom formed in a cylindrical shape;
An outer rotor-side magnet disposed on the inner periphery of the outer rotor;
An inner rotor disposed in the outer rotor and attached to the rotating machine side rotating shaft;
An inner rotor side magnet provided around the inner rotor and transmitting the driving force of the drive source to the rotating machine by attracting and repelling the outer rotor side magnet;
In a magnetic coupling device configured with an enclosure disposed between the inner rotor and the outer rotor and surrounding and sealing a rotary machine side rotating shaft including the inner rotor and an inner rotor side magnet,
The outer rotor is provided with a wind guide structure for introducing or discharging outside air into the outer rotor by rotation so as to cool the enclosure and the outer rotor side magnet.

  In this way, by providing a wind guide structure for introducing or discharging outside air into the outer rotor and cooling the enclosure and the outer rotor side magnet, heat is generated from a rotating machine or drive source that generates heat by compressing the gas. However, the enclosure and the outer rotor side magnet in the magnetic coupling are cooled by the introduced outside air, and the interval between the enclosure and the outer rotor side magnet changes as described above, and the enclosure and the outer rotor side Contact with the magnet breaks the magnetic coupling, or conversely, the space between the enclosure and the outer rotor side magnet widens, the magnetic force acting on the inner rotor side magnet becomes weaker, and the drive force can be transmitted normally. The situation of disappearing can be prevented.

  In addition, since the wind guide structure is provided on the outer rotor itself, the magnetic coupling can be made compact without the need for a large magnetic coupling or useless space by providing the wind guide structure. Can be made compact.

  The wind guide structure is a blade formed to be inclined with respect to the rotation direction of the outer rotor, and the blade is formed by forming a wind guide slit on the outer rotor wall surface. A wind guide structure can be formed with a simple configuration.

  Further, the wind guide structure includes, in the outer rotor, the drive source side bottom, the outer rotor peripheral surface, the outer rotor side magnet disposed between the outer rotor inner peripheral surface and the magnet, and the outer rotor rotating machine. It is a preferred embodiment of the present invention that it is provided on one or a plurality of side end surfaces.

  Further, the wind guide structure is provided on the drive source side and the rotary machine side with the outer rotor side magnet interposed therebetween, and the wind pressure or suction force of the wind guide structure on the downstream side of the air flow is larger than that on the upstream side. By doing so, the introduced outside air flows without accumulating, and the enclosure and the outer rotor side magnet can be effectively cooled.

  As described above, the magnetic coupling device according to the present invention has a simple structure in which an air guide structure for introducing outside air is provided in the outer rotor, and is generated from heat generated by compressing gas (fluid) or from a driving source. Even if heat is transmitted to the magnetic coupling, it is effectively cooled by the introduced outside air, and the distance between the enclosure and the outer rotor side magnet changes, so that the magnetic cup due to the contact between the enclosure and the outer rotor side magnet It is possible to effectively prevent situations such as breakage of the ring and an increase in the distance between the enclosure and the outer rotor side magnet, which makes it impossible to transmit the driving force normally.

  In addition, since the wind guide structure is provided on the outer rotor itself, the magnetic coupling can be made compact without the need for a large magnetic coupling or useless space by providing the wind guide structure. Can be made compact.

  Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the drawings. However, the dimensions, materials, shapes, relative arrangements, and the like of the components described in this embodiment are not intended to limit the scope of the present invention unless otherwise specified, but are merely illustrative examples. Not too much.

  FIG. 1 is a sectional view showing a schematic structure of a double wrap dry scroll vacuum pump as a rotary machine including a fluid machine using a magnetic coupling device according to the present invention, and FIG. 2 is a magnetic coupling in FIG. FIG. 3 is a sectional view showing a slit as a wind guide structure provided in the coupling member 32 constituting the magnetic coupling device according to the present invention. In the following description, the rotary machine including the fluid machine of the present invention will be described with reference to the double wrap dry type scroll vacuum pump shown in Patent Document 1 and described with reference to FIG. 4, but the present invention is of this type. It is obvious that not only a vacuum pump but also a rotating machine coupled to a drive source through a magnetic coupling can be applied to other compressors and pump devices. In the following description, the same components as those in FIG. 4 are denoted by the same reference numerals, and in the description, there are portions that overlap with the description of FIG. 4, but in order to facilitate understanding of the present invention. I will explain these overlapping parts.

  First, the outline of the present invention will be briefly described. In the present invention, in the rotary machine including the fluid machine represented by the vacuum pump as shown in FIG. And a driving magnet (outer rotor side magnet) 52 (33 in FIG. 1) constituting the magnetic coupling, as shown in FIGS. 2 and 3, a coupling member (outer rotor) 51 (FIG. 1 is provided with a blade formed so as to be inclined with respect to the rotation direction of the outer rotor 32 so that outside air is introduced into or discharged from the outer rotor 32 by rotation, and is guided to the wall surface of the coupling member 32 by the blade. A wind slit is formed.

  In this wind guide structure, the blade described above is inclined with respect to the rotation direction of the coupling member (outer rotor) 32, so that the outside air flows into the coupling member 32 or the air in the coupling member 32 is coupled to the coupling member 32. It is configured so that it can be discharged to the outside, and the drive disposed on the bottom of the coupling member 32 formed in a cylindrical shape on the drive unit 30 side, the peripheral surface of the coupling member 32, and the inner peripheral surface of the coupling member 32 Between the magnets 33 for magnets and between the magnets, the coupling member 32 is provided at one or a plurality of positions such as a vacuum pump side end face.

  Preferably, the wind guide structure is provided on both the drive unit 30 and the vacuum pump side with the drive magnet (outer rotor side magnet) 33 interposed therebetween, and the wind pressure or suction force in the wind guide structure on the downstream side of the air flow is set. If it is larger than the upstream side, the introduced outside air flows without accumulating, and the isolation wall (enclosure) 20 and the drive magnet (outer rotor side magnet) 33 can be cooled effectively.

  The above is the outline of the magnetic coupling device according to the present invention. Next, with reference to FIG. 1, a double wrap dry scroll vacuum pump as a rotary machine including a fluid machine using the magnetic coupling device according to the present invention will be described. explain. The vacuum pump shown in FIG. 1 is provided with orbiting scrolls 13 having spiral scroll wraps on both sides in the axial direction of the flat plate, as described with reference to FIG. , 12 are fitted into the vacuum pump.

  In FIG. 1, the vacuum pump includes a pump main body 10 including a scroll compression body 10 a, a partition wall portion 20, and a partition wall portion 25, a drive unit 30, the pump main body 10, and a support member 35 that supports the drive unit 30. Has been. The pump body 10 has a pair of partition walls (enclosures) 20 in which both end portions of the drive shaft 16 that drives the orbiting scroll 13 are attached to the fixed scrolls 11 and 12 that also serve as a circular lid-like housing in an airtight state. , 25, and compressed gas introduction ports 17 and 18 for supplying a compressed gas having a positive pressure from the lap compressed gas to the partition walls 20 and 25, and a magnetism for transmitting the rotational force from the drive unit 30 to the drive shaft 16 in a non-contact manner. And a coupling 31. Therefore, the vacuum pump is isolated from the drive unit 30 by the magnetic coupling 31 serving as a driving force transmission means, and is configured in an airtight state so that contaminants from the suction side do not leak to the outside.

  The magnetic coupling 31 includes a cylindrical coupling member (outer rotor) 32 having a bottom portion coupled to the drive shaft 30a on the drive unit 30 side, and a drive magnet 33 disposed therein. On the vacuum pump side, a pump side coupling member (inner rotor) 23 attached to the drive shaft 16 of the pump body, a magnet 21 attached to the outer periphery thereof, and the pump side coupling member 23 are surrounded and hermetically sealed. It is comprised with the above-mentioned partition part (enclosure) 20 for forming the space 22.

  Of these, the partition wall portion 20 is provided inside the coupling member 32 having a cylindrical shape so as to be close to the driving magnet 33 in the shape of a cylinder, and the pump-side coupling member 23 includes a magnet 21 attached to the outer periphery. It is arranged so as to be close to the partition wall portion 20 and effectively receive the attractive force or repulsive force of the drive magnet 33 provided inside the coupling member 32, thereby coupling by the rotation of the coupling member 32. The member 23 is also rotated.

  The fixed scroll 11 of the scroll compression body 10a includes a sliding surface that is set vertically in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 11a that is axially implanted on the sliding surface. The fixed scroll 12 includes a sliding surface vertically set in the axial direction that also serves as a circular lid-shaped housing, and a spiral fixed scroll wrap 12a that is planted in the axial direction on the sliding surface. ing. The orbiting scroll 13 is composed of a sliding surface set in the axial direction that is eccentrically supported by the drive shaft 16 via a bearing, and a spiral scroll wrap 13a implanted on the sliding surface. Yes.

  The spiral scroll wrap 13a planted on the left and right in the axial direction of the orbiting scroll 13 is fitted into the spiral scroll wrap 11a of the fixed scroll 11 and the spiral scroll wrap 12a of the fixed scroll 12, respectively, and the tip of the wrap Is in contact with and sliding on the sliding surface. The distal ends of the spiral scroll wraps 11a and 12a of the fixed scrolls 11 and 12 are abutted and slid on the sliding surface of the orbiting scroll 13, revolved under the eccentric support by the drive shaft 16, and the orbiting scroll 13 and A plurality of crescent-shaped compression chambers are formed between the fixed scrolls 11 and 12, and gas is sucked from the suction port 14 at the outer peripheral portion, and as described above, the suction, compression, and discharge processes are performed simultaneously and discharged. It is possible to discharge to the discharge port 15 through the passage 15a so as to function as a vacuum pump.

  A compressed gas of inert nitrogen gas is introduced from the outside air introduction ports 17 and 18, and the compressed gas is compressed by a sealed space formed by the orbiting scroll 13 and the fixed scrolls 11 and 12 and discharged. The pressure is higher than the pressure of the lap compressed gas in the final sealed space discharged to the outlet 15, and the wrap compressed gas does not flow back to the outside air inlets 17 and 18.

  On the other hand, although not shown in the figure, the drive shaft 16 of the pump body is an oil-free bearing made of an oilless metal made of a lubricating member, or a gas that operates by compressed gas introduced from the compressed gas introduction ports 17 and 18. It is a bearing, and it allows non-stop operation over a long period of time by eliminating surrounding oil leakage due to the use of lubricating oil, mixing oil into the exhaust gas, durability of the bearing, and management waste. Balance weights 42 and 43 are provided to balance the weight due to the eccentric scroll 13 being supported eccentrically.

  Although not shown in the figure, the fixed scroll 12 is provided with cooling fins in the circular lid-shaped frame portion so that it can be naturally cooled by atmospheric air, and also serves as a circular lid-shaped housing. The fixed scrolls 11 and 12 are forcibly cooled from the back of the fixed scrolls 11 and 12 by a cooling water circulation cooling means having a separately provided radiator and a water circulation pump provided with a cooling water circulation jacket (not shown). To do.

  As described above, compressed gas having a pressure higher than that of the lap compressed gas is supplied to the end of the drive shaft 16 from the compressed gas introduction ports 17 and 18, and the compressed gas is discharged from the discharge port 15. Does not flow back to the compressed gas inlets 17 and 18. Further, a non-contact type driving force transmission mechanism using a magnetic coupling 31 is configured so that the suction port 14, the discharge port 15, and the compressed gas introduction ports 17 and 18 are configured in an airtight state and the driving force transmission from the driving unit 30 is performed. Therefore, radiation environment pollution from the nuclear power side connected to the suction side can be more completely blocked. The details of the double wrap dry scroll vacuum pump as the fluid machine are described in detail in Patent Document 1.

  FIG. 2 is an enlarged cross-sectional view of a portion of the magnetic coupling 31 in FIG. 1, and the magnetic coupling device of the present invention has a coupling member 32 constituting the magnetic coupling 31, for example, in a cylindrical shape as described above. The air guide structure described above is provided at a portion indicated by 36 on the bottom portion of the coupling member 32 formed on the driving portion 30 side, a portion indicated by 39 on the end surface on the vacuum pump side of the coupling member 32, and the like. An air flow as shown by arrows 26 and 27 is formed inside the member 32. In FIG. 2, 20 is an isolation wall (enclosure), 21 is an inner rotor side magnet, 23 is a coupling member (inner rotor), 30a is a drive shaft of the drive unit 30, and 33 is a drive magnet (outer rotor side). (Magnet) 34 is a ventilation hole.

  Further, the air guide structure provided on the coupling member 32 of the magnetic coupling 31 is not limited to the above-described portions 36 and 39, but also the cylindrical peripheral surface of the coupling member 32 and the inner periphery of the coupling member 32 as described above. It can be provided at various positions such as between the drive magnet 33 and the magnet arranged on the surface. As described above, this wind guide structure is provided on both the drive unit 30 and the vacuum pump side with the drive magnet 33 interposed therebetween. It is preferable that the wind pressure or suction force in the wind guide structure on the downstream side of the air flow is larger than that on the upstream side.

  FIG. 3 shows the installation position and structure of this wind guide structure. First, FIG. 3F is a cross-sectional view showing a position where a wind guide structure of the coupling member 32 having a cylindrical shape is provided, in which 30a is a drive shaft of the drive unit 30, and 33 is a drive magnet. . 36 is a cross-sectional view taken along the line AA ′, and as shown in FIG. 3A, an air guide structure provided at the bottom of the coupling member 32 formed in a cylindrical shape on the drive unit 30 side, and 37 As shown in FIG. 3B, which is a cross-sectional view at the position BB ′, the air guide structure 38 provided on the cylindrical peripheral surface of the coupling member 32 is a cross-sectional view at the position CC ′. As shown in FIG. 3C, the air guide structure 39 provided between the driving magnet 33 and the magnet disposed on the inner peripheral surface of the coupling member 32, 39 is a cross-sectional view at the DD ′ position. As shown in FIG. 3D, the air guide structure is provided on the end face of the coupling member 32 on the vacuum pump side.

  As shown in FIG. 3E, the air guide structure provided at each position is a blade that is inclined with respect to the rotation direction at each position, for example, as shown by 40 forming a slit 41. The slit 41 formed by the blade 40 allows the outside air to be discharged into the coupling member 32 or the air in the coupling member 32 to be discharged out of the coupling member 32.

  And the air guide structure 36 provided in the bottom part by the side of the drive part 30 of the coupling member 32 shown to FIG. 3 (A) is provided circularly centering on the drive shaft 30a of the drive part 30 as shown in figure, If the strength is a concern, a portion where this slit is not provided may be arranged at every fixed angle. FIG. 3B shows the air guide structure 37 provided on the cylindrical peripheral surface of the coupling member 32. For example, the air guide structure 37 is provided in a portion corresponding to the driving magnet 33 or a portion where the driving magnet 33 is not provided. It may be provided on the entire circumferential surface.

  The air guide structure 38 shown in FIG. 3C is provided between the driving magnet 33 and the magnet disposed on the inner peripheral surface of the coupling member 32. The air guide structure 38 shown in FIG. Although it is on the outer peripheral side from the center side of the drive magnet 33 protruding in the center direction from the coupling member 32, it may be provided so as to protrude at the same position as the center side of the drive magnet 33. 3 (D) is provided on the end face of the coupling member 32 on the side of the vacuum pump. In this case, when a slit is formed in the direction in which outside air is introduced into the coupling member 32, Outside air directly hits the isolation wall 20 and the cooling effect on the isolation wall 20 is increased.

  Further, as described above, these wind guide structures 36, 37, 38, 39 are provided on both the drive unit 30 and the vacuum pump side with the drive magnet 33 interposed therebetween, and the wind pressure in the wind guide structure on the downstream side of the air flow. Alternatively, when the suction force is increased from the upstream side, air is not accumulated in the coupling member 32, and a greater cooling effect can be obtained. Therefore, for example, the slit that forms the upstream air guide structure is made narrower than the slit that forms the downstream air guide structure, or outside air is introduced into the coupling member 32 from 36 air guide structures. The air can be discharged outside the coupling member 32 with the air guide structure shown in Fig. 3, or the outside air can be introduced with the air guide structure 39 and exhausted with the air guide structures 36 and 37. This can be achieved by increasing the number of wind guide structures on the discharge side rather than the wind structure.

  As described above, in the magnetic coupling device according to the present invention, the coupling member (outer rotor) 32 in the magnetic coupling 31 is provided with the air guide structures 36 to 39 for introducing the outside air, so that the isolation wall (enclosure) is provided. Body) 20 and the driving magnet (outer rotor side magnet) 33 are cooled, so even if a rotating machine that generates heat by compressing the gas (fluid) is used or heat is transmitted from the driving unit 30, The isolation wall 20 and the drive magnet 33 in the magnetic coupling 31 are cooled by the introduced outside air, and the interval between the isolation wall 20 and the drive magnet 33 changes as described above. The magnetic coupling 31 is damaged by contact with each other, or the interval between the isolation wall 20 and the drive magnet 33 is increased, and the magnetic force acting on the coupling member (inner rotor) side magnet 21 is increased. And it is weakened, transmission of the driving force can be prevented a situation that can not be successfully.

  Further, since the wind guide structure is provided in the coupling member (outer rotor) 32 itself, the magnetic coupling 31 is reduced in size by not providing a large magnetic coupling 31 or unnecessary space by providing the wind guide structure. Thus, the rotating machine itself can be made compact.

  According to the present invention, even if heat is transmitted from a rotary machine including a fluid machine or a drive unit (motor) to a magnetic coupling, it can be cooled effectively, and the magnet has high durability and reliability. It can be a coupling device.

It is a section lineblock diagram showing the schematic structure of a double lap dry scroll vacuum pump as a rotary machine including a fluid machine using a magnetic coupling device according to the present invention. It is an expanded sectional view of the magnetic coupling part in FIG. It is sectional drawing which showed the structure of the slit as a wind guide structure provided in the coupling member which comprises the magnetic coupling apparatus which becomes this invention, and an installation position. It is a cross-sectional block diagram which shows the general | schematic structure of the conventional double wrap dry scroll vacuum pump. It is a figure which shows the condition which transfers to a compression process after completion | finish of the suction | inhalation of a compression body, and the condition which transfers to a discharge process in a scroll vacuum pump.

Explanation of symbols

10 Pump body 20 Isolation wall (enclosure)
21 Magnet (Inner rotor side magnet)
22 Sealed space 23 Coupling member (inner rotor)
25 Isolation wall (enclosure)
26, 27 Arrow 30 Drive unit 30a Drive shaft 31 Magnetic coupling 32 Coupling member (outer rotor)
33 Driving magnet (outer rotor side magnet)
34 Ventilation hole 35 Support members 36, 37, 38, 39 Slit 40 Blade 41 Slit 42, 43 Balance weight

Claims (4)

An outer rotor in which a drive shaft of a drive source is directly connected to a bottom formed in a cylindrical shape;
An outer rotor-side magnet disposed on the inner periphery of the outer rotor;
An inner rotor disposed in the outer rotor and attached to the rotating machine side rotating shaft;
An inner rotor side magnet provided around the inner rotor and transmitting the driving force of the drive source to the rotating machine by attracting and repelling the outer rotor side magnet;
In a magnetic coupling device configured with an enclosure disposed between the inner rotor and the outer rotor and surrounding and sealing a rotary machine side rotating shaft including the inner rotor and an inner rotor side magnet,
A magnetic coupling device, wherein the outer rotor is provided with a wind guide structure for introducing or discharging outside air into the outer rotor by rotation so as to cool the enclosure and the outer rotor side magnet.   The air guide structure is a blade formed to be inclined with respect to the rotation direction of the outer rotor, and the blade is formed by forming a wind guide slit on the wall surface of the outer rotor. Item 2. A magnetic coupling device according to item 1.   In the outer rotor, the wind guide structure includes the bottom portion on the drive source side, the outer rotor peripheral surface, the outer rotor side magnet disposed on the inner peripheral surface of the outer rotor, and the outer rotor side end surface of the outer rotor. The magnetic coupling device according to claim 1, wherein the magnetic coupling device is provided in any one or a plurality of the magnetic coupling devices.   The wind guide structure is provided on the drive source side and the rotary machine side across the outer rotor side magnet, and the wind pressure or suction force of the wind guide structure on the downstream side of the air flow is made larger than that on the upstream side. A magnetic coupling device according to any one of claims 1 to 3.

Images