KR20060037232A - Air-cooled dry vacuum pump - Google Patents

Abstract

An air-cooled dry vacuum pump having an excellent heat exchangeability, capable of discharging clean exhaust gases, allowing an installation space to be reduced due to a small and compact size, and reduced in weight, noise, manufacturing cost, and equipment cost, wherein a rotor (2) rotated by receiving the drive force of a motor (M) used as a rotating drive source is stored in a casing (1) having a suction port (1a) and a discharge port (1b) for fluid, an air supply means is installed at the longitudinal (I) one side (1c) of the casing, the casing is formed in a double tube structure formed of an inner tube part (4) in which the rotor (2) is rotatably stored and an outer tube (5) installed around the inner tube part, and a ventilating passage (7) allowing cool air (W) by the air supply means to pass therethrough is provided between the inner tube part and the outer tube part along the longitudinal direction (I).

Description

Air-cooled dry vacuum pump {AIR-COOLED DRY VACUUM PUMP}

The present invention relates to an air-cooled dry vacuum pump for use in, for example, medical devices, food machines, electrical devices, electronic devices, optical machines, packaging machines, devices using semiconductor elements, and the like, and has excellent heat exchangeability, and clean exhaust is performed. It is compact, compact, small footprint, light weight, and low noise.

Usually, in a vacuum pump, since the suction side of a fluid is fully closed and it operates in the state which raised the sealing degree, the rotational driving force from a motor mostly exchanges with heat. At this time, since the heat generated is large in calorific value, if no countermeasures are taken, the vacuum pump itself is burned out by the heat generation, and operation cannot be continued.

In the vacuum pump, when the compression ratio of the compressed fluid increases, the driving force of the motor driving the vacuum pump is converted into heat, and a large heat is generated. Thus, by injecting oil or encapsulated water into the passage on the suction side of the vacuum pump, Although there is a wet vacuum pump that allows cooling, there is a problem that the water or oil for cooling flows back to the chamber side to be the vacuum connected to the suction side of the vacuum pump, not to the discharge side of the vacuum pump, thereby damaging the vacuum state. there was. In recent years, dry vacuum pumps have been attracting attention instead of the wet vacuum pumps for the purpose of protecting and preserving the global environment, preventing contamination of toxic chemicals, and improving precision processing and precision. .

By the way, as a countermeasure that the vacuum pump burns out due to heat generation, the dry vacuum pump is provided with a jacket portion in the casing of the vacuum pump, cools by feeding the refrigerant liquid to the jacket portion, and removes heat by the refrigerant liquid. It was a liquid-cooled vacuum pump employing a balance. Japanese Patent Laid-Open No. 7-167091 is disclosed.

By the way, since this liquid-cooled vacuum pump uses cooling liquids, such as pure water and industrial water, as a refrigerant liquid, the apparatus and base materials, such as a pump for conveying piping and a cooling liquid, are needed, and the process for draining a cooling liquid is also required. Facilities are needed. In addition, when the cooling liquid is to be circulated and used, a cooling device and, if necessary, a rust preventive treatment facility and the like are required, and many facilities are required for production, and thus there are many difficulties in practical use, such as enormous cost.

However, since the conventional liquid-cooled vacuum pump uses a coolant such as pure water or industrial water as the coolant liquid, a mechanism such as a pump and a pump for delivering a pipe or a coolant is required, and further, the coolant is drained. Treatment facilities have become necessary. In addition, when the cooling liquid is to be circulated and used, a cooling device or, if necessary, an antirust treatment facility or the like is required, and since many facilities are required for production, there are many difficulties in practical use such as enormous cost.

Thus, the present inventors have made a long time research and development and efforts to achieve the present invention by focusing on the air-cooled vacuum pump in order to cool the heat generated in the vacuum pump heating unit instead of the water-cooled vacuum pump.

In addition, the present invention achieves heat dissipation by increasing the heat dissipation area by installing fins outside the vacuum pump heat generating unit, and unlike the simple air-cooled dry vacuum pump which is to perform cooling, it has excellent heat exchangeability and performs clean exhaust, It is also an object of the present invention to provide an air-cooled dry vacuum pump that is compact, compact, has a small installation area, is light in weight, has low noise, and is low in production cost and equipment cost.

This invention is made | formed in view of the said subject, The invention of Claim 1 is a vacuum pump which accommodated the rotor rotated by the drive force of a motor as a rotation drive source in the casing which has the inlet and outlet of a fluid, Comprising: An air supply means is provided on one side in the axial length direction, and the casing is formed in a double tube structure including an inner tube portion in which the rotor is rotatably received and an outer portion provided around the inner tube portion, and between the inner tube portion and the outer portion. And a ventilation path through which the cold air supplied by the air supply means escapes is provided along the axial longitudinal direction.

In addition, in the invention according to claim 2 of the claims of the present invention, in the ventilation path, the transmission path is a motor as a rotation drive source, and a rotation transmission component such as a speed increase gear and a timing gear for transmitting the driving force from the motor to the rotor. And a rolling bearing means for rotatably supporting the shaft of the rotor, and a heat generating member comprising the rotor and the like engaged with each other along the axial length direction, wherein the heat generated from the heat generating member and the inside of the ventilation path exit the heat path. The cold air by the air supply means flows convection and heat exchange is adopted.

The invention according to claim 3 of the claims of the present invention employs the means according to claim 1 or 2, wherein the air supply means is an air supply fan or a suction fan.

Further, the invention according to claim 4 of the claims of the present invention is the timing according to claim 1, 2, and 3, wherein the casing for accommodating the rotor and the speed increase gear chamber for accommodating the speed increase gear as the rotation transmission component are accommodated. The gear chamber employs a means characterized in that the ventilation path is formed jointly by communicating between the inner tube portion and the double tube structure of the outer portion through a communication portion.

In addition, the invention as set forth in claim 5 of the claims of the present invention is the claim 1, 2, 3 and 4, wherein the speed increasing gear chamber and the timing gear chamber is formed by dividing the upper and lower chambers through partition walls, the two chambers through the passage The means which is characterized in that the lubricating oil is provided so as to be convection is provided by communicating with the inside.

Further, the invention described in claim 6 of the claims of the present invention is the claim 1, 2, 3, 4 and 5, wherein the rotor is once in the first rolling bearing means disposed in the timing gear chamber fixed to one side of the casing It employs means characterized in that the side is attached to the rotor shaft which is rotatably supported.

Further, the invention described in claim 7 of the claims of the present invention is the claim 1, 2, 3, 4, 5 and 6, wherein the rotor is attached to the rotor shaft in close proximity to the other side of the sealed casing by installing the suction port The rotor shaft adopts means characterized in that the other end is rotatably supported by the second rolling bearing means disposed in the holding cylinder having a small diameter fixed to the one side of the casing.

In addition, the invention described in claim 8 of the claims of the present invention requires the outer periphery of at least one of the casing, the motor, and the air supply means in claims 1, 2, 3, 4, 5, 6, and 7. According to the invention, a means for covering by the sound absorbing member is employed.

The present invention is excellent in heat exchangeability, clean exhaust gas is performed, and it is compact and compact, the installation area is small, light weight, low noise, manufacturing cost and equipment cost are low.

1 is a cross-sectional view showing Embodiment 1 of an air-cooled dry vacuum pump of the present invention.

2 is the same perspective view.

3 is the same front view.

4 is the same top view.

5 is the same bottom view.

EMBODIMENT OF THE INVENTION Hereinafter, the specific example of embodiment is described with reference to drawings for detail of this invention.

 Embodiment 1

BRIEF DESCRIPTION OF THE DRAWINGS The longitudinal cross-sectional view which shows Embodiment 1 of the air-cooled dry vacuum pump of this invention, FIG. 2 is the same perspective view, FIG. 3 is the same front view, FIG. 4 is the same top view, and FIG. 5 is the same bottom view.

In the first embodiment, the rotor 2, which is rotated in response to the driving force of the motor M, is a vacuum pump in which a rotor 2, which is rotated under the driving force of the motor M, is accommodated in the casing 1 having the inlet port 1a and the outlet port 1b of the fluid G. Silver has the same structure and effect as the conventional vacuum pump described in Patent Document 1, for example.

However, in this Embodiment 1, the air supply fan 3 as an air supply means is provided in one side of the axial longitudinal direction I of the said casing 1, and the said casing 1 is accommodated so that the said rotor 2 can rotate rotatably. It is formed in a double tube structure consisting of an inner tube portion 4 and an outer tube portion 5 provided around the inner tube portion 4. In addition, in this embodiment shown, the rotor 2 is housed in two inner pipe parts 4 and 4 which are symmetrically installed in the casing 1 in the radial direction Q as shown in FIG. The biaxial axial flow type vacuum pump provided with the rotors 2A and 2B is configured.

The two rotors 2A and 2B are each provided with screws of different torsional directions, for example, when one rotor 2A is a right screw, and the left rotor is formed on the outer rotor 2B on the outer circumference. The screws with different twisting directions are directed from the suction side to the discharge side of the vacuum pump, and the rotors 2A and 2B have a pitch length 6a constituting a large pitch and a pitch length of a pitch smaller than this pitch length 6a ( 6b), the suction gas is adiabatic-compressed by the pitch lengths 6a and 6b.

Reference numeral 7 denotes a ventilation path provided between the inner tube parts 4 and 4 and the exterior parts 5 and 5, and the ventilation paths 7 and 7 represent cold air W from the blower fan 3. It is provided along the axial longitudinal direction I of the casing 1 so that it may escape.

Moreover, this ventilation path 7 rotates the motor M as a rotation drive source, the speed-up gear 8 which transmits the driving force from this motor M to the rotor 2A, timing gears 9A, 9B, etc. The transmission part 10, the rolling bearing means 12A, 12B; 12A, 12B rotatably supporting the rotor shafts 11A, 11B of the rotors 2A, 2B, and the rotors 2A, 2B meshed with each other. It is provided so as to penetrate longitudinally along the longitudinal direction (I) with respect to the heat generating member consisting of In FIG. 4, two rotors 2A and 2B are provided in an elliptical shape in which the planes are almost flat along two biaxial axial vacuum pumps, but the planar shape is a representative example. Without a suitable shape, the number of installations can be changed freely.

That is, the speed increase gear chamber 13 which accommodates the said casing 1 which accommodates the rotors 2A, 2B, and the speed increase gear 8 as the rotation transmission component 10, and the timing gears 9A, 9B which accommodate the The timing gear chamber 14 communicates between the inner tube portion 4 and the double tube structure of the outer portion 5 via a communication portion, whereby the ventilation paths 7 and 7 are integrally formed.

Then, the heat generated from the heat generating member and the cold air W from the air blower fan 3 exiting the ventilation paths 7 and 7 flow convectively to be heat exchanged.

In addition, the speed increasing gear chamber 13 and the timing gear chamber 14 are divided into two upper and lower chambers through partition walls, and these two chambers are provided with a passage 15A disposed at the inner circumferential center and a passage 15B disposed at the outer circumferential side. By communicating with each other through the inside), the lubricating oil O is installed to be convection. Of these, the passage 15A disposed in the inner circumferential center portion has a short cylindrical shape, so that convection of the lubricant O is promoted.

In addition, the rotor 2A, 2B is freely rotatable at one end side 16a of the first rolling bearing means 12A, 12A disposed in the speed increase gear chamber 13 fixed to one side 1c of the casing 1. It is attached to the rotor shafts 11A and 11B as the supported main shaft and the minor shaft using the mechalock members m and m.

In addition, the rotors 2A and 2B are attached to the rotor shafts 11A and 11B as described above in close proximity to the other side 1d of the casing 1 forming a closed wall except for installing the suction port 1a. This achieves airtightness at the suction side.

In addition, the rotor shafts 11A and 11B have the other end side 16b on the second rolling bearing means 12B and 12B disposed in the holding cylinder 17 having a small diameter fixed to the one side 1c of the casing 1. ) Is rotatably supported. For these rolling bearing means 12A, 12A; 12B, 12B, for example, a rolling bearing or the like is used in addition to the ball bearing as shown in FIG.

In addition, 18 is a sound absorption member provided as needed when low noise is requested | required, It is not necessary to necessarily provide this sound absorption member 18, The said sound absorption member 18, the said motor M, and the said air sending apparatus At least one outer periphery of the fan 3, in Embodiment 1, covers all of them as shown.

As the sound absorbing member 18, for example, a porous material having high sound absorbing properties such as polyurethane foam, sponge rubber, felt, nonwoven fabric, synthetic resin fiber, or a cloth in which natural fibers are laminated is optimally used.

Reference numeral 19 is a fin formed on the outer circumference of the outer portion 5 of the casing 1, and is for dissipating heat.

Reference numeral 20 denotes a plurality of hangers mounted on the upper surface of the casing 1, and is for easily moving by a hanger machine such as a crane by hanging wires during transportation and storage.

Reference numeral 21 is a level gauge, and 22 is an air breather.

Embodiment 1 of this invention consists of the above structure, and when the motor M drives, the rotor 2A, 2B will increase the rotation drive force from the motor M, the gear 8, and the timing gear 9A which mesh | engage with each other. The rotor shafts 11A and 11B receive and rotate through the rotation transmission component 10 such as 9B), so that the rotors 11A and 11B are attached to the rotor shafts 11A and 11B and are provided with screws having different torsion directions. 2A and 2B are rotated in different rotational directions while the pitch length 6a of a large pitch and the pitch length 6b of a small pitch engage | engage in the inner pipe parts 4 and 4 provided in the casing 1. . At this time, the motor M is driven and the fan motor is driven, and the air supply fan 3 as the air supply means is rotated.

Then, the gas as a fluid is sucked into the inlet port 1a provided on the other side 1d of the casing 1 (upper surface in FIG. 1), thereby being introduced into the inner tube portion 4 of the casing 1, and subsequently a large pitch. The pitch length 6a of the and the pitch length 6b of the small pitch are adiabaticly compressed downstream while being introduced into the secondary rotor 2B from the rotating primary rotor 2A while being engaged with each other, It is discharged | emitted from the discharge port 1b provided in the side surface.

At this time, the motor M as the rotation drive source, the rotation transmission parts 10 such as the speed increase gear 8 and the timing gears 9A and 9B which transmit the driving force from the motor M to the rotor 2A, and , Rolling bearing means (12A, 12B; 12A, 12B) rotatably supporting the rotor shafts (11A, 11B) of the rotors (2A, 2B), and the rotor (rotating while being engaged with each other to compress the fluid (G)). In the heat generating member consisting of 2A, 2B) and the like, heat is generated in accordance with the operation of the vacuum pump.

In addition, as described above, when the air supply fan 3 starts to rotate, the cold air W has a double pipe structure including an inner tube portion 4 and an outer portion portion 5 rotatably accommodating the rotors 2A, 2B. The in casing 1 is discharged through the inside of the ventilation paths 7 and 7 provided so as to vertically penetrate between the inner tube part 4 and the outer part 5 along the axial longitudinal direction I.

Then, when the cold air W from the air blower fan 3 moves up the ventilation paths 7 and 7 forming the double wall structure, the heat generated from the heat generating member described above is cooled through the ventilation paths 7 and 7. And heat exchange is performed.

At the same time, as the temperature rises in the ventilation paths 7 and 7 itself, the cooling function by the cold wind W supplied from the air supply fan 3 by the convection function (bact effect) is efficiently performed.

In addition, the rotor of the vacuum pump provided by the cold air W supplied from the air supply fan 3 to face the air supply fan 3 in the left and right directions at the lower portion of the casing 1, for example, as shown in FIG. The motor M as the rotation drive source of 2A and 2B can also be directly cooled.

In addition, since the speed increasing gear chamber 13 and the timing gear chamber 14 are installed in communication with each other through the short cylindrical passage 15A disposed in the inner circumferential center portion and the passage 15B disposed on the outer circumferential side, Since the lubricating oil O accommodated in the speed increasing gear chamber 13 and the timing gear chamber 14 is subjected to convection, the temperature rising of the lubricating oil O is suppressed and cooled by the operation of the vacuum pump and the speed increasing gear ( 8), the lubricity of each of the interlocked timing gears 9A and 9B and the rotor shafts 11A and 11B and the like can be ensured and wear can be prevented. In addition, since the lubricating oil O is pumped up by the pressurization when the speed increasing gear 8 rotates, convection between the speed increasing gear chamber 13 and the timing gear chamber 14 is promoted.

The outer periphery of at least one of the casing 1, the motor M, and the blower fan 3, as shown in the first embodiment, are all covered by the sound absorbing member 18 as necessary, so that the main The noise generated from the motor M, the air supply fan 3, and the like, which is a noise generating source, is absorbed by the sound absorbing member 8, and is prevented from leaking to the outside, so that the noise is reduced.

At this time, even if all the outer peripheries of the casing 1, the motor M, and the blower fan 3 are covered with the sound absorbing member 18, as described above, the heat generated from the heat generating member is not affected by the inner tube portion 4 and the appearance. Heat exchange is performed by sending cold air W from the air supply fan 3 into the ventilation paths 7 and 7 provided so as to penetrate longitudinally along the axial longitudinal direction I of the casing 1 between the sections 5. Therefore, the heat-absorbing member 18 is smoothly performed quickly and without disturbing the sound absorbing member 18.

In the above-described Embodiment 1, the cold air W is supplied to the ventilation paths 7 and 7 provided between the inner tube portion 4 and the outer portion 5 by using the air supply fan 3 as the air supply means, thereby generating heat. Although heat exchange with heat generated from the member is to be carried out, the present invention is not limited to this, and although not shown in the drawings, for example, a suction fan is provided on the other side 1d of the casing 1 to the ventilation path 7. And 7), the suction fan draws in the air in the ventilation paths 7 and 7 to introduce fresh air into the ventilation paths 7 and 7 from the outside to form cold air W. It is also the scope of application of the present invention to perform heat exchange with heat generated from the.

In addition, although the above-mentioned Embodiment 1 shows the two-axis axial-type vacuum pump which accommodates and rotatably accommodates the two rotors 2A and 2B in the two inner pipe parts 4 and 4, this is represented. As an example, the present invention is also applied to a uniaxial axial flow type vacuum pump having one rotor and an inner tube portion 4 accommodating the rotor. In addition, although the case where the gas is compressed as the fluid G is demonstrated typically in the said embodiment, this is an illustration and the case where the liquid is compressed as the fluid G is also the application range of this invention.

In the present invention, since the cold air is supplied into the communication path of the double pipe structure provided in the casing in close proximity to the heat generating member, the heat exchangeability is excellent, and since the cold air is supplied, the pump or the like for pumping the piping and the coolant is supplied. The apparatus and the substrate, and further, a treatment facility for draining the coolant, etc. become unnecessary, and further, clean exhaust is performed without the need for a cooling device or an antirust treatment facility for reusing the refrigerant. In addition, since it is small, compact, and has a small installation area, light weight, and low noise, it can be optimally used, for example, in medical devices, food machines, electrical devices, electronic devices, optical machines, packaging machines, and semiconductor device-use devices. .

Claims (8)

A vacuum pump in which a rotor, which is rotated by a driving force of a motor as a rotation driving source, is housed in a casing having a fluid inlet and an outlet. The air supply means is provided on one side of the casing in the axial length direction, and the casing is formed in a double pipe structure including an inner tube portion in which the rotor is rotatably received and an outer portion provided around the inner tube portion, wherein the inner tube portion and the An air-cooled dry vacuum pump, characterized in that a ventilation path through which the cold air supplied by the air supply means escapes between the exterior parts is provided along the axial length direction. 2. The ventilation path according to claim 1, wherein the ventilation path includes a motor serving as a rotational drive source, rotational transmission parts such as a speed increase gear and a timing gear for transmitting the driving force from the motor to the rotor, and rolling bearing means for rotatably supporting the shaft of the rotor. And along the axial length direction with respect to a heat generating member made of the rotor or the like engaged with each other, wherein heat generated from the heat generating member and cold air by the air supply means passing through the ventilation path flow convection to exchange heat. Air-cooled dry vacuum pump. The air-cooled dry vacuum pump according to claim 1 or 2, wherein the air supply means is an air supply fan or a suction fan. The timing gear chamber according to any one of claims 1 to 3, wherein the casing accommodating the rotor, the speed increasing gear chamber accommodating the speed increasing gear as the rotation transmission component, and the timing gear chamber accommodating the timing gear are formed in the inner tube portion and the exterior portion. An air-cooled dry vacuum pump, characterized in that the communication between the double pipe structure through the communication portion, thereby forming the ventilation path in cooperation. The speed increasing gear chamber and the timing gear chamber are divided into two upper and lower chambers through partition walls, and the two chambers are installed in communication with each other through passages, so that lubricant can be convection. Air-cooled dry vacuum pump, characterized in that provided. The rotor according to any one of claims 1 to 5, wherein the rotor is attached to a rotor shaft whose one end is rotatably supported by a first rolling bearing means disposed in a timing gear chamber fixed to one side of the casing. Air-cooled dry vacuum pump. 7. The rotor according to any one of claims 1 to 6, wherein the rotor is attached to the rotor shaft in proximity to the other side of the sealed casing by providing a suction port, and the rotor shaft has a small diameter fixed to the one side of the casing. The other end side is rotatably supported by the 2nd rolling bearing means arrange | positioned in a holding cylinder, The air-cooled dry vacuum pump characterized by the above-mentioned. 8. The air-cooled dry vacuum pump according to any one of claims 1 to 7, wherein an outer circumference of at least one of the casing, the motor, and the air supply means is covered by a sound absorbing member as necessary.

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