CN201874822U - Screw type vacuum pump - Google Patents
Screw type vacuum pump Download PDFInfo
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- CN201874822U CN201874822U CN2010205367211U CN201020536721U CN201874822U CN 201874822 U CN201874822 U CN 201874822U CN 2010205367211 U CN2010205367211 U CN 2010205367211U CN 201020536721 U CN201020536721 U CN 201020536721U CN 201874822 U CN201874822 U CN 201874822U
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Abstract
The utility model relates to a screw type vacuum pump which comprises two screw rotors (12 and 14), wherein the two screw rotors (12 and 14) are arranged in a pressurizing chamber (10). Each of the two screw rotors (12 and 14) is supported in a pump shell through two bearing elements (120), and the ratio of the length (I) to the axial distance (d) of the rotor is greater than 3.0. The screw rotors (12 and 14) have a variable pitch, are provided with at least seven coils, and have the built-in compression ratio not less than 4.5. After the coil is halved, the pitch is less than twice of the pitch at a rotor outlet (124) of the pressure side.
Description
Technical field
The present invention relates to a kind of screw type vacuum pump.
Background technique
The screw type vacuum pump comprises two screw rotors in the pumping chamber that is limited by pump case.The common both sides of described screw rotor are supported and can have different pitch profiles.As described in the tenth edition 270-277 page or leaf in 2010 of " Wutz " vacuum technique handbook for example, described rotor can have symmetry or asymmetric flank profil.This rotor has built-in compression ratio usually, promptly sucks between side room and the pressure side room chamber volume ratio less than 4.When suction pressure was high, higher compression ratio caused very high power input value.This will need to use out-of-proportion large-scale driving motor (contrast " Wutz ", ibid, 276 pages).And compression strengthens the problem that high temperature appears in the zone on the pressure side that will cause screw rotor.In this case, required heat radiation can not realize by pump case again, makes heat radiation to be realized by the inside cooling of screw rotor.But this way is complicated on technological layer, and may increase the cost that can make and safeguard the screw type vacuum pump.
In order to allow high built-in compression ratio, " VDI-Bericht " No.1932, having described clearance height in 2006 should change.In described announcement, the clearance height of having described the suction side promptly especially the distance between screw rotor and the pump case should be configured to clearance height greater than on the pressure side.Since pressure-dependent pattern of flow be viscosity or molecule-type, therefore big gap in the suction side is an acceptable.Reduce by the rotating speed in conjunction with rotor, this gap has such effect: under high suction pressure, internal compression will reduce.Consequently compression performance weakens, and reduces thereby cause heat to produce.But unfriendly, the reducing of this internal compression also will cause weakening of suction performance.
And, only supported or be known with the supported rotor of cantilevered fashion in a side.It has the remarkable advantage that bearing only need be arranged at rotor one side.These bearings are arranged on the pressure side, i.e. back flow side.In this set, the bearing that does not need to be arranged in the area of low pressure is placed in the suction side.But, must have the rotor of short and small design with the screw rotor of cantilevered fashion supporting, otherwise will be created in the danger that is in contact with one another between the operating process rotor.The relatively short structure length of rotor makes that the number of coil is very little.And this cantilever rotor has bigger diameter.Ratio between rotor length and the rotor shaft distance is usually less than 2.5.
Pump element is usually by motor driving.In order to change the rotating speed of vacuum pump in simple mode, it is known that the frequency variator that can change engine speed easily is provided.Frequency variator is responsive electronic component.In order can well to cool off and frequency variator is settled on friction ground, it is known that frequency variator and pump are arranged in the regulator cubicle that is independent of vacuum pump discretely.But, particularly because of required wiring between regulator cubicle and the motor, so this is a kind of method of complexity.Therefore, preferably frequency variator directly is arranged on the vacuum pump usually.
In the frequency variator that directly is arranged on the vacuum pump, it is known providing air cooling to be used for frequency variator is remained on low temperature.In this case, cooling realizes that by ambient air described ambient air is sucked by unit ventilators and blows along the frequency variator direction.Therefore, cooling realizes by forcing conversion.But this air-cooling apparatus has the shortcoming that can not realize or can only realize high protection level at the most by high cost.For low protection rank, need complex casing equally.Particularly in contaminated environment, owing to need frequent cleaning course and filter to change, therefore essential maintenance work will increase.And, be known by natural convection cooling frequency variator, wherein, according to this method, the housing of frequency variator directly is provided with cooling fin.But, have only relatively low and when will be in the performance range that can acutely not heat frequency variator pump being operated, this set could be realized when external temperature.Owing to must guarantee the free air inlet of air, so this set is attended by the excessive risk of pollution.
And it is known that the frequency variator with direct water-cooling is provided.In this case, frequency variator is connected in the cooling surface of vacuum pump.The shortcoming of this method is that frequency variator will be subjected to the influence of the vibration of vacuum pump.And the cooling of vacuum pump requires to require with the cooling of frequency variator consistent with each other.Therefore, employed frequency variator must meet corresponding requirement.And, being known that the independent cooling plate that is provided for frequency variator, described plate is connected in independent cooling circuit.This is quite complicated solution.Generally speaking, have such shortcoming by water cooling plant cooling frequency variator: in case extraneous humidity height, then the inside of frequency variator also will produce condensed fluid.
Consider content mentioned above, the purpose of this invention is to provide a kind of screw type vacuum pump that meets modern high request.Purpose of the present invention comprises preferably providing to have low-power input and/or low temperature level and/or low noise level and/or compact high robust and/or long operation lifetime and/or the low screw type vacuum pump of safeguarding density and/or high built-in compression ratio.Purpose of the present invention especially is to realize simultaneously a plurality of in these purposes.
Summary of the invention
According to an aspect of the present invention, provide a kind of screw type vacuum pump, comprising: the pump case that limits pump chamber; Be arranged at two screw rotors in the described pump chamber, described screw rotor be supported in the described pump case by two bearing elements respectively and rotor length and rotor shaft apart between ratio greater than 3.0; It is characterized in that described screw rotor has variable pitch and at least 7 coils.
According to a further aspect in the invention, provide a kind of screw type vacuum pump, comprising: the pump case that limits pump chamber; Be arranged at least one screw rotor in the described pump chamber; Be used to drive the motor of described at least one screw rotor; And frequency variator, this frequency variator is connected in described motor, is used to change described rotating speed of motor; It is characterized in that, described frequency variator be arranged at the direct-connected frequency variator housing of described pump case in; And air-cooling apparatus and liquid cooling apparatus, described air-cooling apparatus and liquid cooling apparatus are used for the described frequency variator of cooling settings in described frequency variator housing.
Provide a kind of screw type vacuum pump also on the one hand according to of the present invention, comprising: the pump case that limits pump chamber; Be arranged at two screw rotors in the described pump chamber, described screw rotor is supported in the described pump case by two bearing elements respectively; The rotor that it is characterized in that drive motor, the rotor of described drive motor are connected in two rotor shafts one and preferably by this supporting.
Screw type vacuum pump of the present invention comprises the pump case that wherein defines pump chamber.In described pump chamber, be provided with two screw rotors.Because screw rotor of the present invention has very length, so these screw rotors are supported in both sides respectively.Therefore, be provided with two bearing elements and be used for each screw rotor.And screw rotor has less relatively diameter, make the length of screw rotor and rotor shaft apart between ratio greater than 3.0, be preferably more than 3.5 and more preferably greater than 4.0.And screw rotor of the present invention has variable pitch and comprises at least 7 preferably at least 9 and at least 11 coils more preferably.
Preferred condensation more preferably is at least 5 than being at least 4.5.Consider the high compression ratio that the present invention is provided with, overheated for fear of to rotor, rotor comprises a plurality of coils on the pressure side, the pitch of described coil is varied slightly or constant fully only.Therefore, according to the present invention, half pitch afterwards of coil is less than the twice of rotor outlet place pitch.Especially, half pitch afterwards of coil is less than 1.5 times of rotor outlet place pitch.Because the minor variations of the present invention on the clearance height of the pitch on the pressure side of rotor and preferably corresponding selection, compression will take place along the longer zone of rotor.According to the present invention,, be quite favourable therefore because this set will increase heat radiation.Its reason is condensation work and therefore and the heat radiation that produces will occur in the high-pressure area substantially, and according to the present invention, obviously increases owing to produce the zone of this high pressure, and the surface of shell zone that therefore absorbs heat also becomes big.Preferred implementation according to screw type vacuum pump of the present invention is provided with screw rotor, and each described screw rotor only comprises a screw thread.
Therefore, the pitch of the screw rotor by setting of the present invention only has the long zone on the pressure side of minor variations, realizes that at least 4.5 compression ratio and the heat that dissipation produced are possible, thereby prevents that rotor from overheating.In this, must consider that in the zone with low pressure and corresponding high vacuum, because the feasible enough heats that can not obtain to be passed to housing of low gas density, therefore heat radiation occurs over just zone on the pressure side.
The screw rotor with high built-in Capacity Ratio of the present invention's design also has another advantage: under the situation of low pressure, the power input will be very little.Thereby, aspect inlet capacity, when delivery pressure during at 10mbar, can realize less than
Power input.
According to particularly preferred mode of execution, heat radiation only takes place by pump case.Therefore, except the heat radiation that takes place by medium itself, heat radiation preferably only takes place with water-cooled and/or air cooled mode by pump case.This has eliminated and very complicated technically rotor has been carried out inner colded needs.
And, the advantage that the pitch on the pressure side of the rotor of setting of the present invention only has a plurality of coils of minor alteration to have significantly to reduce noise to produce.This is that therefore, the pressure gap between a last Room and the gaseous emission zone will diminish because compression will take place along long zone.Thereby reduced to rear venting, otherwise thisly will make pressure wave cause noise to produce to rear venting.Owing to reduce to rear venting, the noise that freely blows out produces and also will reduce 3-6dB (A).Consequent remarkable advantage is the silencer element that can provide less.Owing to can reduce the structural volume of described baffler, therefore can partly compensate at least because the increase of the structure length of the vacuum pump that long screw rotor causes.
And the profile of screw rotor is preferably symmetrical substantially.That preferable shape comprises is trapezoidal, cycloid or involute contour.Preferably, clearance height promptly especially the distance between screw rotor and the inner walls be chosen as the long zone that generation is compressed in the outlet side of rotor and go up the effect of extending.Adopt particularly preferred mode, under the cold state of screw type vacuum pump, the ratio between the height of cold clearance and the wheelbase
And, preferably, under serviceability, promptly when reaching operating temperature, the ratio between the height of cold clearance and the wheelbase
According to the present invention, clearance height is preferably selected by this way: in the operation under final pressure, pump chamber pressure will be only drops to the average pump chamber pressure that is lower than 100mbar after about 20% the rotor length of measuring from outlet side.
According to preferred embodiment, screw type vacuum pump of the present invention has the nominal rotating speed greater than 5000 rev/mins.And, for fear of overpressurization, can excess pressure valve be set in the zone on the pressure side of screw rotor.Except excess pressure valve is set, can be replacedly or rotational speed governor additionally is set.Can also avoid overvoltage by suitably reducing rotating speed.By these two kinds of measures, can reduce the power input effectively and therefore reduce the motor performance effectively.
In vacuum pump of the present invention,, can make described at least one screw rotor that is arranged in the pumping chamber by motor driving according to independent mode of execution.In order to change rotating speed of motor, motor is connected in frequency variator.Described frequency variator is connected in the frequency variator housing---and be called the FC housing hereinafter, this FC housing is attached directly to pump case.According to the present invention, described FC housing comprises air-cooling apparatus and liquid cooling apparatus, and the two all is used to cool off frequency variator air-cooling apparatus and liquid cooling apparatus.By combining of air refrigeration device of the present invention and liquid cooling apparatus,, also avoided the generation condensation simultaneously even act on the reliable cooling that also can guarantee frequency variator under the situation of frequency variator at high thermal stress.
Preferably, FC housing and pump case are set to a body unit, but on the other hand, described two housings can also comprise a plurality of individual components certainly.The FC housing preferably is directly connected in pump case, thereby allows the compact structure design.
Described air-cooling apparatus preferably includes blower unit, to be used for producing cooling blast at the FC housing.According to the present invention, the cooling of air-flow is carried out by liquid cooling apparatus.This has that frequency variator is not directly connected in cooling plate etc. but the advantage of cooling by being realized by the liquid cooling unit cooled gas flow of frequency variator.This measure has reduced especially to form the risk of condensation significantly in frequency variator.
The FC housing can be closed, makes to form air circulation.Do not need to suck the ambient air that may be polluted.
Preferably, liquid cooling apparatus comprises and is arranged in the FC housing or the cooling element on the FC housing.Air will flow along described cooling element, and this cooling element preferably includes cooling fin to be used for increasing the surface.The surface of the described cooling element on the moving institute of described cooling fin and air-flow edge is respectively preferably along the direction orientation of frequency variator.According to preferred embodiment, liquid cooling apparatus comprises cooling plate, is provided with at least one cooling coil in this cooling plate.Corresponding cooling plate can form the part of FC housing.
The particularly preferred mode of execution according to the present invention, described liquid cooling apparatus is incorporated in the coolant circuit of vacuum pump.Therefore, only be provided with a coolant circuit.Thereby, therefore be convenient to vacuum pump is connected in coolant circuit owing to needn't connect other coolant circuit that is used to cool off frequency variator.
According to another preferred embodiment, described motor is arranged in the FC housing equally.In this mode of execution, liquid cooling apparatus is preferably at least in part around motor.Therefore, liquid cooling apparatus is used for cooling motor on the one hand, and is used on the other hand the air-flow of cooling frequency variator is cooled off.
Especially, in this mode of execution, liquid cooling apparatus centers on motor fully in the mode of cooling coil.
Preferably, FC housing thermally couple connection in the liquid cooling apparatus of motor or thermally couple connection in the corresponding liquid cooling housing of motor.This thermally couple connection will guarantee good heat radiation.
According to the present invention,, therefore do not need frequency variator is directly connected in cooling plate because frequency variator cools off by air-flow.Thereby realized that frequency variator can be by the invention advantage of damping element supporting.
By using vibrationproof electronic equipment and use casting mold to connect or surrounding parts, can further avoid taking place because the damage that vibration causes to frequency variator.And it is possible that frequency variator is attached to vibration damping structure.
Because frequency variator is not directly connected in water loop, therefore remarkable advantage of the present invention has been to avoid the corrosion and damage of the electronic equipment of frequency variator.Thereby the condensation that appears on the coldest parts will occur on air-cooling apparatus or the liquid cooling apparatus, and on the other hand because frequency variator will dispel the heat in operating process, so condensation can not appear at frequency variator originally on one's body.Under the dissengaged positions of pump,, therefore avoided condensation equally because frequency variator does not cool off.And the blower unit of air-cooling apparatus preferably is associated with the operation of frequency variator.Preferably, the condensed water outlet pipeline can be arranged in the FC housing.
Because frequency variator is the parts the most responsive to temperature, therefore in common cooling circuit, freezing mixture will preferably at first be used to cool off frequency variator, be then used in cooling motor and be then used in coolant pump.In addition, can provide suitable control to water-cooling apparatus.
The device of frequency variator in the contrast regulator cubicle is incorporated into frequency variator pump case in the present invention and has the advantage that only has the little air amount to transmit in the FC housing accordingly.Especially, in the FC housing, can realize the air guiding that target is very clear and definite.
Because the device of frequency variator of the present invention comprises the cooling settings of invention design, therefore can realize the high protection level of IP54 for example etc.
According to another mode of execution of screw type vacuum pump, the pump case that forms pump chamber is held two screw rotors again, and this mode of execution has been represented independent invention.Herein, in two rotor shafts is directly connected in for example rotor of drive motor such as motor.Preferably, rotor shaft drives the rotor of drive motor.In order to realize simple structural design, the stator of drive motor preferably is incorporated in the pump case.This also has motor cooling device in addition can be incorporated into advantage in the pump case.This can be by the cooling fin realization that is arranged at the cooling coil in the pump case and is directly connected in hull outside.
Two rotor shafts synchronously preferably realize that by the gear that is arranged in two rotor shafts on each described two gears are engaged with each other.Thereby, can realize high precision synchronous in very simple mode.
According to preferred implementation of the present invention, screw rotor is provided with the X-shaped structure by roller bearing.In this mode of execution, preferably in pump case, be provided with supporting member by means of support lug.According to preferred embodiment, described roller bearing is lubricated by oil.And preferably, setover by means of the tension adjustment element of spring or another kind of type especially for one in the roller bearing.
Preferably, screw rotor belongs to same design and is engaged with each other.
Especially in the bearing of oil lubrication, pumping chamber and the sealing that is provided with between the zone of bearing are very important.In this, optimal way is to use combination seal.Be preferably piston ring packing and labyrinth sealing.In addition, can provide meander line with oil separator.
Screw rotor is preferably made by steel or cast iron (GGG).Housing is preferably made by cast iron (GG or GGG), and motor and gear mechanism housing are preferably made by cast aluminium.
The particularly preferred mode of execution according to the present invention, independent invention and above-mentioned more mode of executions thereof are bonded to each other.This makes it possible to provide a kind of screw type vacuum pump, can realize a plurality of purpose proposed above especially by this screw type vacuum pump.
Description of drawings
With reference to the accompanying drawings more detailed description is carried out in complete and feasible disclosing of the present invention in the explanation hereinafter, disclosing that described the present invention is complete and feasible comprise its preferred forms and make the those of ordinary skill in the field can implement the present invention, wherein:
Fig. 1 is the schematic side elevation of the present invention's first preferred implementation;
Fig. 2 is the schematic side elevation of the present invention's second preferred implementation;
Fig. 3 is the schematic plan view of two screw rotors of design according to the present invention;
Fig. 4 is contrast according to screw rotor of the present invention and explanatory view according to the screw rotor of prior art, and the schematic chart of Pressure Development state.
Embodiment
In Fig. 1 and Fig. 2, the example of screw type vacuum pump illustrates in highly schematic mode.In these pumps, housing 10 defines pumping chamber 12 in the portion within it, is provided with two screw rotors 14 as pump element in the described pumping chamber 12 in order to rotate along opposite directions.Rotation realizes in a usual manner by the transmission device (not being shown among the figure) that is arranged between described two screw rotors 14.Rotation by two pump elements 14 will suck medium by inlet opening 18 along the direction that arrow 16 marks, and then described medium be discharged by exit opening 20 along the direction that arrow 22 marks.
According to first preferred implementation of the present invention shown in Figure 1, motor 24 is arranged in the part 26 of housing.Described motor 24 is connected in described two pump screw rods 14 one by its output shaft 28.
In order to control the rotating speed of motor 24, be provided with the frequency variator 30 that is electrically connected on motor 24.Described frequency variator 30 is arranged in the frequency variator housing 32 (FC housing).Described FC housing 32 is directly connected in pump case 10 or forms one with pump case 10.In order to cool off frequency variator 30, be provided with air-cooling apparatus 34 and liquid cooling apparatus 36.In illustrated embodiment, described air-cooling apparatus 34 comprises blower unit 38.Blower unit 38 is arranged in the FC housing 32 and is used for producing air circulation in the FC housing.So that the air-flow that the mode that air-flow flows along described liquid cooling apparatus 36 guides blower unit 38 to be produced.In illustrated embodiment, air is directed to along the cooling fin 40 of liquid cooling apparatus 36 and flows.Described cooling fin 40 points to the inside of FC housings 32 and respectively towards frequency variator 30.
Described liquid cooling apparatus 36 comprises for example cooling plate 42 cooling elements such as grade, and described cooling plate 42 has formed the sidewall of FC housing 32 simultaneously in illustrated embodiment.Above-mentioned cooling fin 40 is connected in the inboard of described cooling plate 42.The inside of cooling plate 42 is provided with the cooling coil 44 that preferably has meander-shaped.Described cooling coil 44 is connected in ooling channel 46.Check for easier, only show the initial part of this ooling channel 46 among Fig. 1.According to preferred embodiment, ooling channel 46 is connected in the liquid cooling system of motor 24 and is connected in the liquid cooling system of vacuum pump itself equally.In this set, ooling channel 46 preferably extends in housing or direct inwall extension along housing.
By vibration damper 48, frequency variator 30 maintains attached even in a shell body wall of FC housing 32.
In the context of second preferred implementation (Fig. 2) that will be described below, the parts similar or identical with parts in first mode of execution will be marked by identical reference number.Be arranged in the FC housing 32 with the essential different motors 24 that are of first mode of execution (Fig. 1).Therefore, no longer need independent cooling element to be used to constitute the liquid cooling apparatus of frequency variator 30.Motor 24 is centered on by liquid cooling apparatus 50.Described liquid cooling apparatus 50 preferably fully around motor 24 and comprise outwards towards cooling fin 52.Being configured to spiral cooling coil 54 around motor 24 is arranged in the liquid cooling apparatus 50.Described cooling coil 54 itself is connected in ooling channel 46.
(Fig. 1) is similar with first mode of execution, and blower unit 38 is arranged in the FC housing 32.Described blower unit 38 is operating as in FC housing 32 and produces air circulation, simultaneously so that air guides air to cool off along the mode that described fin 52 flows.
Motor 24 preferably is provided with as illustrated in fig. 3.In this set, the rotor 60 of motor 24 is fixedly connected on axle 118.If suppose under the context situation of mode of execution illustrated in figures 1 and 2, then axle 118 will be corresponding to axle 28.The stator 62 of motor 24 is arranged at the inside of housing parts 64 and is incorporated in the housing thus.Preferably, described stator 62 is cast in the described housing parts 64.Housing parts 64 itself directly is arranged in the external casing 66.In illustrated embodiment, cooling channel 68 is arranged in the housing 66, thus the heat that can in housing, dissipate and particularly produce by motor 24 in simple mode.Except described cooling channel 68 or as the substituting of described cooling channel 68, cooling fin can be arranged at the outside 70 of housing 66.
Two screw rotors shown in Figure 3 are arranged in the pump case (not shown).Described pump case defines 110, two screw rotors 112 in pumping chamber and 114 and is arranged in the described pumping chamber 110.The both sides of described two screw rotors comprise spindle nose 116 and 118, and described spindle nose 116 and 118 is arranged in the pump case rotationally by bearing element 120.In order to drive described two screw rotors 112 and 114, spindle nose 118 or interchangeable spindle nose 116 are directly connected in common mode or are connected in drive motor by transmission device.Second screw rotor is driven by corresponding band tooth device 140 by identical drive motor, makes that two screw rotors 112 and 114 are synchronized with each other and will rotate in opposite direction.For this purpose, described band tooth device 140 comprises two gears 142, and described two gears 142 closely are connected in described spindle nose 118 respectively or replacedly are connected in described spindle nose 116 and are engaged with each other.Screw rotor 112 and 114 is efficiently, thus realize medium waiting for transmission at the suction (arrow 122) of suction side and medium on the pressure side discharge (arrow 124).
Make the pitch visualization of screw rotor by oblique line 126.In Fig. 3, can see that pitch changes along the length I of rotor.On the pressure side the zone 128 in, pitch is significantly less than the pitch in the zone, suction side 130.According to the present invention, on the pressure side the pitch of zone in 128 is arranged so that the pitch that is positioned at the coil center in the zone 131 is the twice of the pitch at rotor outlet 124 places to the maximum herein.Therefore, formed relatively long zone 128 on the pressure side, pitch is wherein only made minor alteration.In zone 128 on the pressure side, will occur pass the main pressure gap compression partly between inlet and the outlet.Therefore, in zone 128, also carry out most of compression work.Consequently, heat to be dissipated will produce in this zone substantially.According to the present invention, heat radiation is by on the pressure side finishing around the housing of screw rotor 112 and 114 in the zone.
According to the present invention, screw rotor 112 and 114 has very big structure length.Therefore, set as the present invention, screw rotor 112 and 114 length I and rotor shaft apart from the ratio between the d greater than 3.0.
On the top of Fig. 4, shown screw rotor 112 according to the present invention is corresponding to the screw rotor among Fig. 1 112 and 114.The below of described screw rotor 112 shows the screw rotor 132 of prior art.Screw rotor 132 on the pressure side comprises the coil that number is less in the zone than weak point and its, and the pitch of described coil is only done minor alteration.In the rotor 132 of prior art, the Pressure Development state will adopt the process by line 134 representatives.By line 134, the zone 136 on the pressure side of apparent screw rotor 132 tangible pressure will occur and increase.
Because according to the structure of rotor 112 of the present invention, on the pressure side zone 128 is obviously elongated.And, correspondingly select the clearance height (height/wheelbase of cold clearance
And the height/wheelbase in warm gap
).Consequently comparatively mild process is adopted in the increase of pressure, shown in the line in the chart 138.
Although invention has been described and diagram with reference to specific description mode of execution of the present invention, expectation the invention is not restricted to those illustrated mode of executions.The one of ordinary skilled in the art will recognize, under the situation that does not break away from the true scope of the present invention that is defined by the claims, can carry out modification and remodeling.Therefore, expectation all these modification and the remodeling that will fall in the scope of claims and equivalent thereof all comprises in the present invention.
Claims (37)
1. screw type vacuum pump comprises:
Limit the pump case of pump chamber (110);
Be arranged at two screw rotors (112,114) in the described pump chamber (110), described screw rotor (112,114) be supported in the described pump case by two bearing elements (120) respectively and rotor length (I) and rotor shaft apart from the ratio between (d) greater than 3.0;
It is characterized in that described screw rotor (112,114) has variable pitch and at least 7 coils.
2. screw type vacuum pump as claimed in claim 1, wherein, described screw rotor (112,114) has and is at least 4.5 built-in compression ratio.
3. screw type vacuum pump as claimed in claim 1, wherein, after half of described coil, described pitch is located 2 times of pitch less than rotor outlet (124) on the pressure side.
4. screw type vacuum pump as claimed in claim 1, wherein, each screw rotor (112,114) all only has a screw thread.
5. screw type vacuum pump as claimed in claim 1, wherein, the basic symmetry of the profile of described screw rotor (112,114) or asymmetric.
6. screw type vacuum pump as claimed in claim 1, wherein, the ratio between described rotor length (I) and the described rotor shaft distance (d) is greater than 3.5.
7. screw type vacuum pump as claimed in claim 6, wherein, the ratio between described rotor length (I) and the described rotor shaft distance (d) is greater than 4.
8. screw type vacuum pump as claimed in claim 1, wherein, each screw rotor (112,114) all is provided with at least 9 coils.
9. screw type vacuum pump as claimed in claim 8, wherein, each screw rotor (112,114) all is provided with at least 11 coils.
10. screw type vacuum pump as claimed in claim 1, wherein, described compression ratio is at least 5.
11. screw type vacuum pump as claimed in claim 10, wherein, described compression ratio is at least 6.
12. screw type vacuum pump as claimed in claim 1, wherein, maximum (top) speed is greater than 5000 rev/mins.
13. screw type vacuum pump as claimed in claim 1, wherein, for fear of overpressurization, one or more excess pressure valves be arranged at described on the pressure side the zone (28) in and/or rotating speed can control by rotary speed controling unit.
14. a screw type vacuum pump comprises:
Limit the pump case (10) of pump chamber (12);
Be arranged at least one screw rotor (14) in the described pump chamber (12);
Be used to drive the motor (24) of described at least one screw rotor (14); And
Frequency variator (30), this frequency variator (30) is connected in described motor (24), is used to change described rotating speed of motor;
It is characterized in that, described frequency variator (30) be arranged at the direct-connected frequency variator housing of described pump case (10) (32) in; And
Air-cooling apparatus (34) and liquid cooling apparatus (36,50), described air-cooling apparatus (34) and liquid cooling apparatus (36,50) are used for the described frequency variator (30) of cooling settings in described frequency variator housing (32).
15. screw type vacuum pump as claimed in claim 14, wherein, described frequency variator housing (32) forms as one with described pump case (10).
16. screw type vacuum pump as claimed in claim 14, wherein, described cooling unit (34) comprises blower unit (38), and this blower unit (38) produces air-flow to be used to cool off described frequency variator (30).
17. screw type vacuum pump as claimed in claim 16, wherein, described liquid cooling apparatus (36,50) comprises the cooling element (40,42,44 that is arranged in the described frequency variator housing (32); 52,54), air-flow is provided as along described cooling element (40,42,44; 52,54) flow to be used for cooling.
18. screw type vacuum pump as claimed in claim 17, wherein, in order to increase described cooling element (40,42,44; 52,54) surface, described cooling element (40,42,44; 52,54) comprise along the cooling fin (40,52) of the direction orientation of described frequency variator (30).
19. screw type vacuum pump as claimed in claim 18, wherein, described liquid cooling apparatus (36) comprises the cooling plate (42) that is connected in cooling coil (44), and described cooling coil flows through freezing mixture in (44).
20. screw type vacuum pump as claimed in claim 19, wherein, described cooling fin (40) is directly connected in described cooling plate (42).
21. screw type vacuum pump as claimed in claim 19, wherein, described cooling plate (42) forms the part of the sidewall of described frequency variator housing (32) at least.
22. screw type vacuum pump as claimed in claim 14, wherein, described motor (24) is arranged in the described frequency variator housing (32), and described motor (24) is provided with liquid cooling apparatus (50) to be used for cooling.
23. screw type vacuum pump as claimed in claim 22, wherein, described liquid cooling apparatus (50) is at least in part around described motor (24).
24. screw type vacuum pump as claimed in claim 23, wherein, described liquid cooling apparatus (50) surrounds described motor (24) fully.
25. screw type vacuum pump as claimed in claim 23, wherein, the inside of described liquid cooling apparatus (50) is provided with cooling coil (54), and described cooling coil (54) is around described motor (24) and have spiral structure.
26. screw type vacuum pump as claimed in claim 22, wherein, described liquid cooling apparatus (50) comprises the cooling fin (52) that extends radially outwardly.
27. screw type vacuum pump as claimed in claim 1, wherein, described liquid cooling apparatus (36) is incorporated in the coolant circuit of described screw type vacuum pump.
28. screw type vacuum pump as claimed in claim 1, wherein, described frequency variator (30) and/or described frequency variator housing (32) keep by damping element (48).
29. screw type vacuum pump as claimed in claim 1, wherein, described liquid cooling apparatus (50) is at least in part around described motor (24).
30. screw type vacuum pump as claimed in claim 1, wherein, described motor (24) is arranged in the described frequency variator housing (32).
31. screw type vacuum pump as claimed in claim 1, wherein, described frequency variator housing (32) is connected in the liquid cooling housing of described motor (24) by thermally couple connection.
32. a screw type vacuum pump comprises:
Limit the pump case of pump chamber (110);
Be arranged at two screw rotors (112,114) in the described pump chamber (110), described screw rotor (112,114) is supported in the described pump case by two bearing elements (120) respectively;
The rotor (60) that it is characterized in that drive motor (24), the rotor (60) of described drive motor (24) are connected in two rotor shafts (116,118) and are preferably supported by this axle.
33. screw type vacuum pump as claimed in claim 32, wherein, the stator (62) of described drive motor (24) is incorporated in the described pump case (66).
34. screw type vacuum pump as claimed in claim 32, wherein, in order to keep synchronous, described two rotor shafts (116,118) are connected in engaging gear (142).
35. as each described screw type vacuum pump in the claim 1,14 or 32, wherein, described screw rotor (14; 112; 114) be arranged in the described pump case with the X-shaped structure by roller bearing (120).
36. screw type vacuum pump as claimed in claim 35, wherein, in the described roller bearing (120) one setovers by spring.
37. screw type vacuum pump as claimed in claim 35, wherein, described roller bearing (120) be oil lubrication and/or be supported in the support lug.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205367211U CN201874822U (en) | 2010-09-17 | 2010-09-17 | Screw type vacuum pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010205367211U CN201874822U (en) | 2010-09-17 | 2010-09-17 | Screw type vacuum pump |
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| Publication Number | Publication Date |
|---|---|
| CN201874822U true CN201874822U (en) | 2011-06-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010205367211U Expired - Fee Related CN201874822U (en) | 2010-09-17 | 2010-09-17 | Screw type vacuum pump |
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| CN (1) | CN201874822U (en) |
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| WO2017042653A1 (en) * | 2015-09-10 | 2017-03-16 | ジョンソンコントロールズ ヒタチ エア コンディショニング テクノロジー（ホンコン）リミテッド | Screw compressor |
| CN108291546A (en) * | 2015-12-17 | 2018-07-17 | 株式会社神户制钢所 | Screw compressor |
| CN108302040A (en) * | 2018-03-14 | 2018-07-20 | 深圳市志橙半导体材料有限公司 | A kind of Anti-blocking device of dry vacuum pump and anti-jamming method |
| CN109139471A (en) * | 2018-09-03 | 2019-01-04 | 东北大学 | A kind of horizontal rotors for dry double-screw vacuum pump having over-voltage degassing function |
| CN110397588A (en) * | 2019-07-29 | 2019-11-01 | 山东劳伦斯流体科技有限公司 | A kind of high-pressure heavy-load Quimby pump |
| WO2020133561A1 (en) * | 2018-12-26 | 2020-07-02 | 东莞赫升机电有限公司 | Screw compressor having stacked rotors |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2017042653A1 (en) * | 2015-09-10 | 2017-03-16 | ジョンソンコントロールズ ヒタチ エア コンディショニング テクノロジー（ホンコン）リミテッド | Screw compressor |
| CN108291546A (en) * | 2015-12-17 | 2018-07-17 | 株式会社神户制钢所 | Screw compressor |
| CN108291546B (en) * | 2015-12-17 | 2020-04-24 | 株式会社神户制钢所 | Screw compressor |
| US10947976B2 (en) | 2015-12-17 | 2021-03-16 | Kobe Steel, Ltd. | Screw compressor |
| CN108302040A (en) * | 2018-03-14 | 2018-07-20 | 深圳市志橙半导体材料有限公司 | A kind of Anti-blocking device of dry vacuum pump and anti-jamming method |
| CN108302040B (en) * | 2018-03-14 | 2023-05-09 | 深圳市志橙半导体材料有限公司 | Anti-seizing device and anti-seizing method for dry vacuum pump |
| CN109139471A (en) * | 2018-09-03 | 2019-01-04 | 东北大学 | A kind of horizontal rotors for dry double-screw vacuum pump having over-voltage degassing function |
| CN109139471B (en) * | 2018-09-03 | 2019-07-02 | 东北大学 | A kind of horizontal rotors for dry double-screw vacuum pump having over-voltage degassing function |
| WO2020133561A1 (en) * | 2018-12-26 | 2020-07-02 | 东莞赫升机电有限公司 | Screw compressor having stacked rotors |
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