TWI258537B - Air-cooled vacuum pump - Google Patents

Abstract

The present invention discloses a kind of air-cooled vacuum pump. The housing (1) with a suction inlet (1a) and a discharge outlet (1b) for fluid contains a rotation unit (2) that can get the driving force provided by a motor (M), the rotation-driving source. The air supply measure is installed at one side of the housing (1) axially. The housing (1) is formed as a dual-layer-tube structure composed of a rotatable internal tube (4) of the rotation unit (2) and an external tube (5) arranged on the periphery of the internal tube (4). An air passage (7) allowing cool air generated by the said air supply means to pass through is formed axially between the internal tube (4) and the external tube (5). Accordingly, the effects such as excellent heat exchange efficiency, capability to cleanly exhaust, small and compact size, light weight, narrow and small installment area, low noise, reduced manufacturing cost and low equipment expense can be achieved.

Description

1258537 day! [Comparative explanation] [Technical field of the invention] The present invention relates to air-cooling used in, for example, medical equipment, food machinery, electrical equipment, electronic equipment, optical machinery, packaging machinery, and semiconductor component machines. Dry vacuum pump, which can achieve excellent heat exchange, clean exhaust, compact size, light weight, narrow installation area, low noise, and low manufacturing cost and equipment cost. [Prior Art] Generally, the vacuum pump is operated in a state in which the suction side of the fluid is closed to raise the degree of hermeticity, so that the rotational driving force of the motor is converted into heat. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 7-167091. At this time, the heat generated by the heat is quite large, so that no appropriate countermeasures are applied, and the vacuum pump is burned by its own heat and cannot be continuously operated. The vacuum pump is operated in a vacuum state. When the compression ratio of the compressed fluid becomes high, since the motor driving force for driving the vacuum pump is converted into heat energy, a large amount of heat energy is generated. Therefore, in the past, the oil is injected through the passage on the suction side of the vacuum pump or A wet vacuum pump that seals water for cooling, but has water or oil for cooling that does not flow to the discharge side of the vacuum pump, and flows back to the side of the chamber that is connected to the suction side of the vacuum pump to be vacuumed, so as to impair the vacuum state. In addition, due to the maintenance and preservation of the global environment, pollution prevention of toxic chemical substances, and the aim of improving ultra-precision machining and precision, dry vacuum pumps have begun to attract attention as a substitute for the wet vacuum pumps. 1258537 (four) hard

In addition, the dry vacuum pump used as a measure for burning the vacuum pump due to heat generation is provided with a water jacket portion in the casing of the vacuum pump, and the refrigerant liquid is supplied to the water jacket portion, and heat is removed from the refrigerant liquid to be cooled. A liquid-cooled vacuum pump that seeks heat balance. However, since the liquid-cooled vacuum pump uses a cooling liquid such as pure water or industrial water as the refrigerant liquid, it is necessary to supply piping and a pump for transporting the coolant, and the like, and also requires a treatment facility for the drainage treatment of the cooling liquid. When it is desired to recycle the coolant, it is also necessary to use a cooling device or a device that requires rust-proof treatment in a fashionable manner. Since it requires a lot of equipment for production, it requires a large cost, and there are many practical difficulties. In view of the above-mentioned liquid-cooled vacuum pump, since a coolant such as pure water or industrial water is used as the refrigerant liquid, it is necessary to use piping and a pump and the like for pumping the coolant, and also for the drainage treatment of the coolant. Processing facilities. If you want to recycle the coolant, you need a cooling device or a necessary anti-rust treatment equipment. Because there are a lot of equipments required for production, there are many difficulties in practical use, so the inventors have As a result of years of research and development and repeated efforts, in order to replace the above-described water-cooled vacuum pump for cooling the heat generated in the heat generating portion of the vacuum pump, the present invention has been completed with an eye on an air-cooled vacuum pump. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide a simple air-cooled dry vacuum pump that is different from cooling only, by disposing a heat sink outside the heat generating portion of the vacuum pump to increase heat dissipation area for heat dissipation, and heat exchange property. Excellent air-cooled dry vacuum pump with excellent 1258537 V.J8 correction and no exhaust, small compact, light weight, narrow installation area, low noise, low manufacturing cost and low equipment cost. The present invention has been made in view of the above-mentioned problems, and an air-cooled dry vacuum pump according to the first aspect of the invention is applicable to a housing having a suction port and a discharge port of a fluid as a rotary drive source. a driving force of the motor, the vacuum pump that rotates the rotating portion, the air supply means is disposed on one side of the housing axial direction, and the housing is formed to be provided by the inner tube portion that rotatably accommodates the rotating portion A double pipe structure composed of a pipe portion outside the pipe portion, and a means for arranging a ventilation path through which the cold air generated by the air supply means can pass is disposed in the axial direction between the inner pipe portion and the outer pipe portion. According to the invention of claim 2, in the ventilation path according to the first aspect of the invention, the ventilation path is used for the motor as the rotation drive source and the driving force of the motor is transmitted to the rotation unit. a rolling bearing device such as a speed increasing gear or a timing gear, and a rolling bearing means that rotatably supports the rotating shaft of the rotating portion, and a heat generating member formed by the rotating portion or the like that is in contact with each other is axially mounted, and the heat is generated. The heat generated by the member is characterized by heat exchange with the cold air generated by the above-described air supply means in the above-described ventilation path by the opposite flow. Further, the invention described in claim 3 of the present invention is characterized in that the gas supply means described in the first or second aspect of the patent application is characterized by a blower or a suction blower. Further, the invention described in claim 4 of the present invention is the first, second, and third items of the patent application scope to accommodate the housing of the rotating portion.

1258537, a speed increasing gear chamber that accommodates the speed increasing gear as the rotation transmitting component, and a timing gear chamber that accommodates the timing gear are connected to each other by a communication portion between the inner tube portion and the outer tube portion And together form the means characterized by the above ventilation path. Moreover, the invention described in claim 5 of the present invention is based on the speed increasing gear chamber and the timing gear chamber described in the first, second, third, and fourth claims of the patent application: The wall is divided into upper and lower chambers, and the two chambers are designed to be connected to each other to make the lubricating oil convective. Further, in the invention described in claim 6 of the present invention, the rotating portion described in the first, second, third, fourth, and fifth aspects of the patent application is: installed in The rotating shaft of the first rolling bearing means disposed at the one end of the fixed timing gear fixed to the fixed side of the housing is characterized by a rotating shaft. Further, the invention described in claim 7 of the present invention is the rotating portion according to the first, second, third, fourth, fifth, and sixth claims of the patent application: The housing is disposed on the rotating shaft near the other side of the housing having the suction port, and the other end of the rotating shaft is rotatably supported on the one side of the housing and is fixed in the small diameter holding cylinder. Rolling bearing means are a feature of the means. Further, the invention described in claim 8 of the present invention is the shell described in the first, second, third, fourth, fifth, sixth, and seventh claims of the patent application. The body, the motor and the gas supply means are: means that at least one of the outer circumferences is characterized by the sound absorbing member.

It can be cleaned, cleaned, low-small, and manufactured at a cost of 12,585,37, which provides excellent heat exchange, compactness, light weight, and low installation cost. [Embodiment] In order to make the members of the present invention understand the purpose, features and effects of the present invention, the present invention will be described in detail by the following specific embodiments and the accompanying drawings, The first figure is a longitudinal sectional view of the air-cooled dry vacuum pump of the present invention, and further refers to the second to fifth figures, which are respectively a perspective view, a front view, a plan view and a bottom view of the air-cooled dry vacuum pump of the present invention, such as The air-cooled dry vacuum pump shown in the drawing is a vacuum pump that accommodates a housing 1 having a driving force of a motor Μ as a rotational driving source and rotating the rotating portion 2 to a housing 1 having a suction port 1a and a discharge port 1b of a fluid G. This is the same as that of the above-described conventional vacuum pump described in Patent Document 1, for example. However, in the present invention, the air blower 3 is provided on the axial direction I side of the casing 1 by means of air supply means, and the casing 1 is formed to rotatably accommodate the inner tubular portion 4 of the rotating portion 2 and is provided therein. A double tube structure formed by the tube portion 5 around the inner tube portion 4. Further, the rotating portion 2 is configured as a biaxial axial flow type vacuum pump having two inner tube portions 4 symmetrically mounted in the radial direction Q and two rotating portions 2A, 2B accommodated therein. The two rotating portions 2A, 2B are formed with a 1258537 screw having a twisting direction in the outer circumference. For example, when the square rotating portion 2A is a right twisting screw, the other rotating portion 2 is a left twisting screw. And the twisting direction of the above rotation and 2β is mutually: the filament is formed by the pitch of the larger pitch from the suction side of the vacuum pump, and the length of the pitch is 6b, which is longer than the pitch length of 6a, and the length of the pitch is 6b. For the long 6a, the financial institutions will reduce the gas (4). The distance 7 is a ventilation path provided between the inner portion 4 and the outer tube portion 5, and the air passage is provided along the casing (4) to allow the cold air W generated from 3 to pass. The fan-hai ventilating shuttle 7 is also provided with a gear 9 Α and a rotation transmitting member 1G along a speed increasing gear that is transmitted as a rotational driving source and a driving force that transmits the shank to the rotating portion 28 . The heat-generating member constituted by the rolling bearing means m, the rolling bearing hand I 12A, 12B, and the rotating portions 2a, 2B, etc., which are rotatably supported by the rotating portions 2?, 2? It is vertical and vertical. Moreover, as shown in the four figures, the rotating parts 2A, 2B are not corresponding to the two biaxial axial flow type vacuum pumps, and the two planes are slightly flattened and elliptical, but the graphic shape of the plane is an example of the life, not the mosquito. Here, it can be formed into an appropriate shape = the same day, and it is still free to increase or decrease the number of settings. In other words, the casing 1 accommodating the rotating portions 2A, 2B and the timing gear chamber 13 accommodating the speed increasing gear 8 as the rotation transmitting member 10 and the timing gear chamber 14 accommodating the timing gears 9A, 9B are connected by a communication portion. The ventilation path 7 is formed in a common manner between the inner tube portion 4 and the double tube structure of the outer tube portion 5. And the heat generated by the 'heat-generating member and the cold passage generated by the above-mentioned ventilation path> I258537 & fan 3 is the opposite flow to the shell = the rotating part 2, the reutilization - the end 16_ is freely supported, _ The first tooth disposed in the speed increasing gear chamber 13 fixed by the liquid =: (10), the main wheel, and the lost shaft: the rotating shaft 11Α, 11Β are installed. As the brake shaft condition, the above-mentioned rotating portions 2Α, 2Β are close to the other side ld of the casing i which is the above-described suction and which is the closed wall surface, and the shafts 11A and 11B are reinforced as described above, and the airtightness of the suction side can be achieved. . clothes…

The other end 16b of the above-mentioned rotating shafts HA, 11B is rotatably supported by the second rolling bearing means 12B, 12B disposed in the small pure holding cylinder 17 fixed to the side l of the casing 1. These rolling bearing means i2A 12B, as shown in the figure, may be a roller bearing or the like, in addition to a ball bearing. Further, '18 is a sound absorbing member to be provided when low noise is required, and although it is not necessary to provide it, the sound absorbing member 18 is covered on the outer periphery of at least one of the casing 1, the motor cymbal and the blower 3, and The present invention is covered as shown in the drawings. Further, as the sound absorbing member 18, a highly sound absorbing porous material such as a polyurethane foam, a sponge rubber, a wool, a non-woven fabric, or a fabric obtained by laminating synthetic resin fibers or natural fibers is most suitable. 19 is a fin formed on the outer circumference of the tube portion 5 outside the casing 1, and is required to dissipate heat. 20 is a plurality of hooks mounted on the top surface of the casing 1, and is hooked to a wire rope by a hoisting machine such as a crane during transporting and holding, and is easily moved. 12 1258537 W8 21 is a level and 22 is a venting device. The present invention is formed by the above configuration, and when the motor 驱动 is driven, the rotating portions 2Α, 2Β are rotated by the rotational driving force of the motor 借 by the step-up gear 8, the intermeshing timing gears 9Α, 9Β, etc., and the transmission member 10 is rotated by the shaft 11Α. When the 11 Β is received and rotated, the rotating portions 2 Α and 2 被 which are mounted on the rotating shafts 11 Α and 11 Β and the outer circumferences are formed with screws having mutually different twisting directions are larger in the inner tube portion 4 in which the casing 1 is mounted. The pitch length 6a of the pitch meshes with the pitch length 6b of the smaller pitch, and rotates in different rotational directions. At this time, since the drive motor 驱动 also drives the blower motor, the blower 3 as the air supply means is rotated. Then, the gas as the fluid is sucked into the inner tube portion 4 of the casing 1 from the suction port la provided on the other side Id of the casing 1, and the pitch of the pitch from the larger pitch is 6a and the pitch of the smaller pitch. The primary side rotating portion 2A, which is in contact with each other to rotate, is introduced into the secondary side rotating portion 2B, and is also adiabatically compressed downstream of the guide, and is discharged from the discharge port 1b provided on the side surface of the casing 1. At this time, the rotation unit 10 such as the motor Μ as the rotation drive source, the speed increasing gear 8 that transmits the driving force of the motor 至 to the rotating unit 2, and the timing gears 9Α and 9Β, and the rotation unit 2 are rotatably supported. The rolling bearing means 12Α, 12Β of the rotating shafts 11Α and 11Β of the two shafts and the rotating parts 2Α, 2Β, etc. which are meshed with each other and rotated by the compressed fluid G, generate heat, that is, heat is generated as the vacuum pump operates. Further, when the blower 3 starts to rotate, the cold air W is a double-layered tube structure in which the inner tube portion 4 and the outer tube portion 5 are accommodated in the rotatable rotating portions 2, 2, 1258537.

V>/V cultivating the casing 1 is discharged by passing through the ventilating path 7 provided between the inner tube portion 4 and the outer tube 以 5 in the longitudinal direction in the axial direction I. Further, when the cold air W from the blower 3 rises along the ventilation path 7 of the double wall structure, the heat generated by the heat generating member is cooled by the ventilation path 7, and heat exchange is performed. Further, at the same time, the convection function (the effect of the smoke IU) accompanying the temperature rise of the ventilation path 7 itself can effectively perform the cooling function achieved by the cold air W supplied from the blower 3. In addition, by the cold air W supplied from the blower 3, the motor μ that rotates the drive source of the rotary portions 2A and 2B which are installed in the lower portion of the casing 1 in the main left and right directions of the blower 3 can be directly cooled. Further, the speed increasing gear chamber 13 and the timing gear chamber 14 are provided with a short cylindrical passage 15 disposed at the center portion of the inner circumference, and a passage 15B disposed on the outer peripheral side is internally communicated with each other to make the speed increasing gear chamber 13 and timing The lubricating oil 0 accommodated in the gear chamber 14 is convected, and (4) the temperature of the lubricating oil 0 accompanying the operation of the vacuum pump is increased, and the speed increasing gear 8, the fixed wheel 9 Α 9 Β and the turning 11 Α are also ensured. , 11 Β and other parts of the lubricity to prevent wear. Further, since the pressurization of the gear 8 is performed, the lubricating oil Q is sent, so that the convection of the gear chamber 13 and the material gear chamber 14 can be promoted. The outer circumference of at least one of the motor Μ and the blower 3 is required to be covered by the fan member 18, so that the motor of the main operation sound source is generated, and the noise generated by the external temple is absorbed by the sound absorbing member (4). It can prevent leakage and reduce noise. 〃 〃 1 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The heat generated by the self-heating member can also be transported by the cold air of the private wind branch 3 to heat exchange in the air passage 7 which is disposed in the longitudinal direction of the inner tube portion 4 and the outer tube portion 5 along the axial direction I of the casing 1. Therefore, the sound absorbing member 18 does not constitute an obstacle, and heat exchange can be performed smoothly and quickly.供 The air supply means of the present invention uses the blower 3 to supply the cold air w

At the end of the 5th beast (four) object _ raw heat ^ D,,,, == change The present invention is not limited thereto, for example, although not shown in the figure can also be connected by the suction fan 3 and the ventilation path 7 The housing is on the other side Id, and the air is sucked by the 0 and the fan, and the fresh air guiding the ventilation path 7 (4) is cold, and heat exchange with the heat generated by the heat generating member W is also applicable to the present invention. . Further, in the present invention, a biaxial axial flow type true-gymy pump in which two rotating portions 2Α and 2β are arbitrarily accommodated in the two inner tube portions 4 is shown, but this is an example 6' The present invention is also applicable to a single-axis axial flow type vacuum pump in which the rotating portion and the inner tube portion 4 of the rotating portion are one. Further, although & nanming uses the representative lang as the fluid G to pressurize the gas material in the sense of ambiguity, it is also an embodiment, and the liquid G is compressed as the fluid G. ～Invention, the present invention is advantageous in that the cold air supply is disposed close to the heat generating member in the conical layer structure communication path of the casing, so that it is superior to the heat exchange property, and the pump is not required for the use of the A and the supply of the coolant. If the appliance is cold, and there is no need for the treatment facilities used for the drainage treatment of the coolant, the machine should be cleaned and cleaned, such as the cooling device or anti-rust treatment required for the refrigerant. Tight, light weight and narrow installation area 15

1258537 , can also get low noise a less ~ - " 曰 放 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a longitudinal sectional view of the air-cooled dry vacuum pump of the present invention. The second drawing is a perspective view of the air-cooled dry vacuum pump of the present invention. The third figure is the air-cooled type of the present invention. The front view of the dry vacuum pump is the plan view of the air-cooled dry vacuum pump of the present invention. The fifth figure is the bottom view of the air-cooled dry vacuum pump of the present invention. [Main component symbol description] 1 housing la suction port lb Discharge port lc side Id side 2 rotation part 2A rotation part 2B rotation part 3 blower 4 inner tube part 5 outer tube part 6a pitch length 1258537 6b pitch length 7 ventilation path 8 speed increasing gear 9A timing gear 9B timing gear 11A shaft 11B Rotating shaft 12A Rolling bearing means 12B Rolling bearing means 13 Speed increasing gear chamber 14 Timing gear chamber 15A Passage 15B Passage 16a One end 16b The other end 17 Small diameter retaining cylinder Body 18 Sound absorbing member 19 Heat sink 20 Hook 21 Level 22 Ventilation device G Fluid I Axial M Motor 1258537

0 Lubricating oil Q Axial W Cold air

18

Claims (1)

1258537 X. Patent application scope: 1. An air-cooled dry vacuum pump is a housing that receives a driving force of a motor as a rotary driving source for rotation, and is housed in a housing having a suction port and a discharge port of a fluid. a vacuum pump, characterized in that: the air supply means is disposed on an axial side of the casing, and the casing is formed to be an inner pipe portion rotatably accommodating the rotating portion and a pipe portion disposed around the inner pipe portion In the formed double pipe structure, a ventilation path through which the cold air supplied from the air supply means can pass is disposed in the axial direction between the inner pipe portion and the outer pipe portion. 2. The air-cooled dry vacuum pump according to claim 1, wherein the ventilation path is along a speed increasing gear that is driven by a motor as a rotational driving source and a driving force of the motor to a rotating portion. A heat transfer member formed by rotating a gear or the like to transmit a component, a rolling bearing means for rotatably supporting the rotating shaft of the rotating portion, and the rotating portion that is coupled to each other is provided in the axial direction, and the heat generating member is generated. The heat is convectively flowed by the above-described air supply means in the above-described ventilation path to perform heat exchange. 3. The air-cooled dry vacuum pump according to claim 1 or 2, wherein the gas supply means is a blower or a suction blower. 4. The air-cooled dry vacuum pump according to claim 2, wherein the housing accommodating the rotating portion and the speed increasing gear chamber accommodating the speed increasing gear as the rotation transmitting member and the timing gear accommodating the timing gear The communication system is formed by the communication portion being connected to the double tube structure between the inner tube portion and the outer tube portion. 19 I258537 —------- r Year Month Day? Wide: · The air-cooled dry-speed tooth described in item 3 of the profit range, such as the gearbox and the receiving timing of the 掸 wheel of the 转 ^ 与 钱 传达 传达 零件 零件 零件 零件 零件 零件 零件 零件The inner tube portion gear chamber is formed by the structure between the double-tubes 6 of the ventilation path and the outer portion. The gas-speed increasing gear chamber and the timing gear chamber are as described in the fourth paragraph of the application. Two chests, wherein the upper and lower chambers are convected by setting the two chambers to form a lubricating oil.邛 邛 俾 润 7 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如Formed as a lubricating oil for convection. Internal connection 俾 润 8. As described in the scope of the patent application, item 4 or item 6, where the above-mentioned rotating part is set on the side of the -4 type dry vacuum pump, the timing gear is fixed in the chamber - freely cut into the casing - axis. The rotation of the rolling bearing means • The air-cooling rotating part described in item 5 of the patent application is provided at one end to rotate freely, and the first-rolling of the upper timing gear is arranged. ^ Body - side fixed 10 · As in the scope of the patent application, the gas = paragraph of the transfer. The rotating part is provided at one end of the rotating self-rolling pump, wherein the 0th branch of the fixed timing gear chamber is marked on the casing-side U. As claimed in the patent scope, item 1, item 2, Chu, The shaft of the moving bearing means. 4 or 6 items of gas 20 1258537 正补无 '灌---------_ __丨_ »»丨抓--------- A __________ Cold dry vacuum pump The rotating portion is attached to the rotating shaft near the other side of the casing that is provided with the suction port, and the other end of the rotating shaft is rotatably supported by the one side of the casing. A second rolling bearing means for retaining the barrel is disposed. 12. The air-cooled dry vacuum pump according to claim 3, wherein the rotating portion is mounted on the rotating shaft near the other side of the casing provided with the suction port, and the rotating shaft rotates at the other end. The second rolling bearing means disposed in the small diameter holding cylinder fixed to the one side of the casing is freely supported. The air-cooled dry vacuum pump according to claim 5, wherein the rotating portion is attached to the rotating shaft near the other side of the casing provided with the suction port, and the other end of the rotating shaft A second rolling bearing means that is rotatably supported by the small diameter holding cylinder fixed to the one side of the casing. The air-cooled dry vacuum pump according to claim 7, wherein the rotating portion is mounted on the rotating shaft near the other side of the casing provided with the suction port, and the rotating shaft rotates at the other end The second rolling bearing means disposed in the small diameter holding cylinder fixed to the one side of the casing is freely supported. The air-cooled dry vacuum pump according to claim 8, wherein the rotating portion is attached to the rotating shaft near the other side of the casing provided with the suction port, and the rotating shaft is further The second rolling bearing means in which the end is rotatably supported by the small diameter holding cylinder fixed to the one side of the casing. An air-cooled dry vacuum pump according to claim 9, wherein the rotating portion is close to the other side of the casing which is provided with the suction port and is hermetically sealed. A second rolling bearing means is disposed on the rotating shaft, and the other end of the rotating shaft is rotatably supported by the small-diameter holding cylinder fixed to the one side of the casing. The air-cooled dry vacuum pump according to claim 10, wherein the rotating portion is attached to the rotating shaft near the other side of the casing provided with the suction port, and the rotating shaft is further The second rolling bearing means in which the end is rotatably supported by the small diameter holding cylinder fixed to the one side of the casing. 18. The air-cooled dry vacuum pump according to claim 1, wherein the outer casing of the casing, the motor and the gas supply means are required to be The sound absorbing member is covered. The air-cooled dry vacuum pump according to claim 3, wherein at least one of the outer casing of the casing, the motor, and the air supply means is covered by the sound absorbing member. The air-cooled dry vacuum pump according to claim 5, wherein at least one of the outer casing of the casing, the motor and the air supply means is covered by the sound absorbing member. The air-cooled dry vacuum pump according to claim 7, wherein at least one of the outer casing of the casing, the motor, and the air supply means is to be covered by the sound absorbing member. The air-cooled dry vacuum pump according to claim 8, wherein at least one of the outer casing of the casing, the motor and the air supply means is corrected by V8 for 95 years, and 258537 is to be covered by the sound absorbing member. . The air-cooled dry vacuum pump according to claim 9, wherein at least the casing, the motor, and the air supply means are covered by the sound absorbing member. The outer peripheral system of the present invention is the air-cooled dry vacuum pump described in the fourth aspect of the invention, wherein the casing, the motor, and the air supply means are covered by at least one of the air supply means.卜周系. For example, the patented dry-walled air-cooled dry vacuum fruit, η, the motor and the above-mentioned air supply means are at least one, and the 舄 is covered by the sound absorbing member. In the case of the air-cooled dry vacuum fruit described in claim 12, the casing, the motor, and at least the above-mentioned air supply means are covered by the sound absorbing member. The circumferential system π, as described in the thirteenth item of the application paste range, is to be covered by the sound absorbing member, at least outside the casing, the motor, and the gas supply means. The air-cooled dry vacuum fruit as described in claim 14, wherein at least one of the casing, the motor, and the air supply means is covered by the sound absorbing member. The air-cooled dry vacuum pump according to claim 15, wherein at least one of the casing, the motor, and the air supply means is covered by the sound absorbing member. . The air-cooled dry vacuum pump according to claim 16, wherein at least one of the outer casing and the outer portion of the casing, the motor, and the gas supply means is adjusted to a temperature of 23,25,537,37%. The sound absorbing member is covered. The air-cooled dry vacuum pump according to claim 17, wherein at least one of the outer casing of the casing, the motor, and the air supply means is covered by the sound absorbing member. twenty four