WO2004100629A1 - Flux transferring device and method of transferring flux - Google Patents

Flux transferring device and method of transferring flux Download PDF

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Publication number
WO2004100629A1
WO2004100629A1 PCT/JP2004/006356 JP2004006356W WO2004100629A1 WO 2004100629 A1 WO2004100629 A1 WO 2004100629A1 JP 2004006356 W JP2004006356 W JP 2004006356W WO 2004100629 A1 WO2004100629 A1 WO 2004100629A1
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WO
WIPO (PCT)
Prior art keywords
flux
film
squeegee
concave portion
forming
Prior art date
Application number
PCT/JP2004/006356
Other languages
French (fr)
Japanese (ja)
Inventor
Takeyoshi Isogai
Noriaki Iwaki
Tsuyoshi Hamane
Original Assignee
Fuji Machine Mfg. Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Machine Mfg. Co., Ltd. filed Critical Fuji Machine Mfg. Co., Ltd.
Publication of WO2004100629A1 publication Critical patent/WO2004100629A1/en

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3489Composition of fluxes; Methods of application thereof; Other methods of activating the contact surfaces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10734Ball grid array [BGA]; Bump grid array

Definitions

  • a flux film is formed by uniformly spreading a flux, a conductive paste, a conductive adhesive, etc. (hereinafter, these are referred to as “flux”) with a squeegee on a transfer table, and transferring the flux film to the flux film.
  • the present invention relates to a flux transfer device and a flux transfer method for transferring a flux to a transfer target by immersing (dipping) the target.
  • this type of flux transfer device is mounted on the upper surface of a transfer table. Flux is supplied to the formed film-forming concave portion, and the squeegee or the transfer table is moved while maintaining a constant gap between the bottom surface of the film-forming concave portion and the squeegee.
  • a flux film is formed by performing smoothing by uniformly pushing and spreading the flux in the concave portion for film formation with a squeegee. Since the transfer of the flux to the transfer target is performed by dipping the transfer target such as a bump on the flux film, the flux reduced by the transfer is replenished after the transfer and smoothing is performed. Is repeated. In the above-mentioned conventional flux transfer device, it is possible to replenish the flux reduced by the transfer, but the flux remaining on the transfer table will not be replaced even if the scanning operation is repeatedly performed.
  • the flux remaining on the transfer table does not change even if the squeezing operation is performed repeatedly, so that the flux remaining on the transfer table gradually hardens, and as a result, the ski Fluxing film
  • the surface is not flat and irregularities are formed, resulting in an excessive or insufficient flux transfer state to a transfer target such as a bump.
  • an object of the present invention is to replace the flux in the film-forming concave portion of the transfer table, and to form a flat high-quality flux film without unevenness by a squeezing operation. It is an object of the present invention to provide a flux transfer device and a flux transfer method capable of improving the quality of flux transfer to a transfer target.
  • the present invention provides a method for forming a flux, a conductor base, a conductive adhesive or the like (hereinafter referred to as “flux”) on a concave portion for film formation formed on the upper surface of a transfer table.
  • a flux a conductor base, a conductive adhesive or the like
  • the transfer target is lowered from above the transfer table by an elevating device, and the transfer target is immersed in the flux film, so that the flux transfer device transfers the flux to the transfer target.
  • the flux While being in contact with the bottom surface of the concave portion for film formation, the flux is moved relatively from one side to the other side of the concave portion for film formation to extract the used flux in the concave portion for film formation.
  • a squeegee for ejection, and a squeegee for film formation that uniformly spreads the flux supplied into the concave portion for film formation from one side to the other side of the concave portion for film formation to form a flux film.
  • a squeegee switching device for retracting the ejection squeegee upward when forming the flux film and retracting the film formation squeegee upward when ejecting the flux is provided.
  • a step of supplying a flux into the concave portion for film formation and uniformly spreading the flux with a film forming squeegee to form a flux film By immersing in the flux film, A step of transferring the flux to the transfer target; and a step of using the projecting squeegee with the projecting squeegee in contact with the bottom surface of the film forming concave section to use the used flux in the film forming concave section.
  • the used flux remaining in the film-forming concave portion of the transfer table is removed from the film-forming concave portion by the extraction squeegee every time the transfer process is completed. And then replace it with a new flux, and then perform the squeezing operation of the film-forming squeegee to always use a new flux to form a flat, high-quality flux film with no irregularities.
  • the flux can be uniformly transferred to a transfer target such as a bump. This not only solves the problems of conventional flux hardening, but also the problems of flux oxidation, deterioration, and flux quality degradation due to the mixing of micro air. Transfer quality can be improved.
  • the width of the film-forming squeegee is set to be larger than the width of the film-forming concave portion, and the depth of the film-forming concave portion is set to be the same as the thickness of the flux film.
  • the gap between the squeegee for film formation and the bottom surface of the concave portion for film formation is fixed by the depth of the concave portion for film formation during squeezing for forming the flux film.
  • the dimensions can be accurately regulated, and a flux film having a uniform thickness and excellent flatness can be efficiently formed with a simple configuration.
  • the squeegee switching device attaches the ejection squeegee and the film-forming squeegee to a rotating member in a C-shape, and rotates the rotating member to lower the squeegee located on the rotating direction side. Then, it is preferable to raise the squeegee on the opposite side. With this configuration, it is possible to easily switch between the descending squeegee and the film-forming squeegee Z elevation simply by switching the rotating direction of the rotating member, thereby simplifying the configuration of the squeegee switching device. it can.
  • the width of the squeegee should be Set the width of the concave portion for film formation larger than the width of the concave portion for film formation, and set the depth of the concave portion for film formation to be the same as the thickness of the flux film.
  • a flux which tends to flow out from both ends of the squeegee during the squeegee is applied to the wall.
  • a notch portion for discharging the flux swept out by a squeegee is provided at a portion of the wall portion located on the squeezing direction side of the film-forming concave portion, It is preferable that a flux collecting unit for collecting the flux discharged from the notch be provided below the notch.
  • FIGS. 1A to 1C are diagrams illustrating a process of forming a flux film in Example 1.
  • FIG. 1A to 1C are diagrams illustrating a process of forming a flux film in Example 1.
  • FIGS. 2A to 2C are process diagrams for explaining the flux transfer process in the first embodiment.
  • FIG. 3A to FIG. 3C are diagrams illustrating a flux extracting step in the first embodiment.
  • FIG. 4 is a process flowchart showing the flow of each process.
  • FIG. 5 is a plan view of the transfer table according to the second embodiment.
  • FIG. 6 is a longitudinal sectional view of the flux transfer device of the second embodiment.
  • FIG. 7 is a perspective view of a transfer table according to the second embodiment. BEST MODE FOR CARRYING OUT THE INVENTION
  • a rectangular concave portion 12 for film formation is formed on the upper surface of the transfer table 11.
  • the concave portion 12 for film formation has a flat bottom surface, and the depth dimension of the concave portion 12 for film formation is the same as that of the flux film 13 formed in the concave portion 12 for film formation. It is set the same as the thickness dimension.
  • a film forming squeegee 14 and an output squeegee 15 are arranged.
  • the film forming squeegee 14 and the output squeegee 15 are mounted in a U-shape on a rotating member 16 which is a squeegee switching device, and a motor capable of rotating the rotating member 16 forward and backward.
  • a rotating member 16 which is a squeegee switching device, and a motor capable of rotating the rotating member 16 forward and backward.
  • the width of the film-forming squeegee 14 is set to be larger than the width of the film-forming concave portion 12.
  • both ends of the film formation squeegee 14 are projected and transferred to both sides of the film formation concave portion 12.
  • the width of the ejection squeegee 15 is set smaller than the width of the film-forming concave portion 12 by a predetermined clearance.
  • the squeegee 15 for extraction is brought into contact with the bottom surface of the concave portion 12 for film formation.
  • the used flux in the film-forming concave surface portion 12 is extracted by relatively moving the film-forming concave surface portion 12 from one side to the other side. ing.
  • a flux discharge nozzle 17 for discharging the flux into the concave portion 12 for film formation is attached to the squeegee side of the squeegee 14 for film formation.
  • a driving device (not shown) for moving the transfer table 11 forward and backward is provided. By moving the transfer table 11 forward and backward, the film forming squeegee 14 and the ejection squeegee are provided. It is configured to squeeze without moving 15.
  • the transfer table 11 may be fixed, and the film-forming squeegee 14 and the ejection squeegee 15 may be moved in parallel along the upper surface of the transfer table 11 for squeegeeing. Needless to say.
  • the flux transfer to the transfer target is repeated as follows by repeating the four operations shown in FIG.
  • the used flux in the concave portion 12 for film formation of the transfer table 11 is ejected by the extracting squeegee 15 described later, and the inside of the concave portion 12 for film formation is almost empty. It is assumed that
  • the rotating member 16 is rotated in a counterclockwise direction to retract the ejection squeegee 15 above the transfer table 11 and to form a film-forming squeegee.
  • 14 is lowered so that the lower edge of the film-forming squeegee 14 is brought into contact with the position on the upper surface of the transfer table 11 opposite to the squeezing direction with respect to the film-forming concave portion 12.
  • the flux is discharged from the flux discharge nozzle 17 into the concave portion 12 for film formation.
  • the transfer table 11 is moved in the forward direction so that both ends of the film forming squeegee 14 protrude from both sides of the film forming concave portion 12 as shown in FIGS. 1B and 1C.
  • squeezing for uniformly pushing and spreading the flux in the concave portion 12 for film formation is performed to form the flux film 13.
  • This squeezing operation is performed until the lower edge of the film-forming squeegee 14 reaches a position on the side in the scanning direction from the film-forming concave portion 12.
  • the thickness dimension of the flux film 13 formed in this manner is the same as the depth dimension of the concave portion 12 for film formation.
  • the electronic component 19 is sucked by the suction nozzle 18 of the lifting device, and the electronic component 19 is lowered from above the transfer table 11.
  • the bumps 20 (transfer target) on the lower surface of the electronic component 19 are immersed (dipped) in the flux film 13 to transfer the flux to the bumps 20, and then the electronic component 19 is transferred to the transfer surface. Move the bull 1 1 up.
  • the rotating member 16 is rotated clockwise to retreat the film-forming squeegee 14 above the transfer table 11, and the ejecting squeegee 1 5 is lowered to bring the lower edge of the ejection squeegee 15 into contact with the end of the bottom surface of the film-forming concave portion 12 of the transfer table 11.
  • the ejection squeegee 15 is moved along the bottom surface of the film forming concave portion 12. Slide to expose the used flux in the concave part 12 for film formation. As a result, the inside of the film-forming concave portion 12 becomes almost empty.
  • the flux is discharged into the concave portion 12 for film formation, the flux film 13 is formed by the squeegee 14 for film formation, and the bump 2 is formed. Transfer of the flux to 0 (see Fig. 2) and extraction of the flux with the squeegee for extraction 15 (see Fig. 3) are repeated many times in this order.
  • the film-forming concave portion 12 in a state where the transfer table 11 is in contact with the bottom surface of the film-forming concave portion 12, the film-forming concave portion 12 is positioned from one side to the other side.
  • the extraction squeegee 15 which is relatively moved to extract the used flux in the film-forming concave portion 12, and the flux supplied into the film-forming concave portion 12 are A film-forming squeegee 14 for forming a flux film 13 by uniformly spreading from one side to the other side of the film-forming concave portion 12 is provided. 1
  • the squeezing operation is performed by the film forming squeegee 14 with the film squeegee 14 retracted upward while the film squeegee 14 is retracted upward.
  • the width of the film-forming squeegee 14 is set to be larger than the width of the film-forming concave portion 12, and the depth of the film-forming concave portion 12 is set to the flux.
  • the thickness of the film 13 is set to be the same as that of the film 13.
  • the flux film 13 is formed by performing a squeezing operation. Therefore, the gap between the squeegee 14 for film formation and the bottom surface of the concave portion 12 for film formation (thickness of the flux film 13) ) Can be precisely regulated to a certain size by the depth of the concave portion 12 for film formation, and the flux film 13 with uniform thickness and excellent flatness can be efficiently formed with a simple configuration. There is also an advantage that can be.
  • the gap between the film-forming squeegee 14 and the film-forming concave surface 12 is kept constant.
  • a squeezing operation may be performed in a state where the gap is held constant by the gap holding mechanism.
  • the extraction squeegee 15 and the film formation squeegee 14 are attached to the rotating member 16 in an eight-letter shape, and the rotating member 16 is rotated. Since the squeegee located on the side of the rotating direction is lowered and the squeegee on the opposite side is lifted, the switching direction of the rotating member 16 can be changed by simply changing the rotating direction of the rotating member 16. It is possible to easily switch between lowering and raising of the film forming squeegee 14 and to simplify the configuration of the squeegee switching device.
  • the present invention may be configured such that the film-forming squeegee 14 and the output squeegee 15 are moved up and down separately by a vertical actuator such as a cylinder.
  • the transfer table 11 is formed linearly long, and a plurality of transfer surfaces having different depth dimensions are formed.
  • the thickness dimension of the flux film may be switched by forming the film-forming concave portion and switching the film-forming concave portion to be used.
  • the transfer table is not limited to a linear type that reciprocates linearly, and one or a plurality of concave portions for film formation are formed on a cylindrical transfer table that can be rotated forward and reverse. You may do it.
  • the used flux remaining in the concave portion 12 for film formation is extracted by the extraction squeegee 15 and replaced with a new flux every time after the completion of the transfer process.
  • the flux squeegee 15 may be used to perform the flux extraction once. Even in this case, the used flux in the concave portion 12 for film formation can be replaced with a new flux before hardening, oxidation, deterioration, etc. occur, and the intended object of the present invention can be achieved. it can.
  • the second embodiment has a configuration in which no squeegee for projection is provided and only one squeegee 21 for film formation is provided. Then, the width of the squeegee 21 is set to be larger than the width of the concave portion 23 for film formation of the transfer table 22, and the depth of the concave portion 23 for film formation is set to the width of the flux film 24. It is set the same as the thickness dimension.
  • both ends of the squeegee 21 are projected on both sides of the film-forming concave portion 23 so as to make contact with the upper surface of the transfer table 22 for squeezing. Further, near the center of the squeegee 21, a flux discharge nozzle 25 for discharging a flux is mounted near the center of the concave portion 23 for film formation.
  • a notch portion 27 for discharging the flux swept out by the squeegee 21 is provided in a portion of the wall portion 26 located on the squeezing direction side with respect to the film-forming concave portion 23, and the transfer table 2 is provided.
  • a flux collecting part 28 for collecting the flux discharged from the notch 27 is provided in a gutter shape below the notch 2.
  • the film forming concave portion 2 3 when a new flux is discharged from the flux discharge nozzle 25 near the center of the film forming concave portion 23 during the squeezing operation, the film forming concave portion 2 3 The used flux inside will be pushed outward by the new flux. As a result, the used flux remaining in the concave portion 23 for film formation after the transfer process can be replaced with a new flux, and a flat high-quality flux film 24 without unevenness is formed by the scanning operation. Thus, the flux can be uniformly transferred to a transfer target such as a bump.
  • the flux that flows out from both ends of the squeegee 21 during squeegeeing can be blocked by the wall 26, preventing the newly supplied flux from flowing out from both ends of the squeegee 21 during scanning.
  • the flux in the concave portion 23 for film formation can be replaced with a new flux with a minimum necessary amount of supplied flux.
  • the used flux that has been swept out by the squeegee 21 can be discharged from the notch 27 at the end of squeezing and recovered by the flux recovery unit 28, so that the used flux can be recycled. There is also an advantage that it can be reused.
  • the transfer table 22 is formed to be linearly long, and a plurality of transfer surfaces having different depth dimensions are formed.
  • the thickness dimension of the flux film may be switched by forming a plurality of concave portions for film formation and switching the concave portions for film formation to be used.
  • the transfer table is not limited to a linear motion type that reciprocates linearly.
  • One or more concave portions for film formation may be formed on a rotatable cylindrical transfer table.
  • the scope of use of the present invention is not limited to a flux transfer device, but can be used as a transfer device for conductive paste, antibody paste, conductive adhesive, and the like.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

A flux transferring device for forming a high-quality flat flux film without irregularities by squeegeeing. The device comprises a scrape squeegee (15) for scraping the used flux in a film-forming recessed portion (12) of a transfer table (11) when the squeegee is relatively moved from one end to the other end of the film-forming recessed portion (12) and a film-forming squeegee (14) for forming a flux film by uniformly spreading a flux supplied to the film-forming recessed portion (12) from one end to the other end of the film-forming recessed portion (12). Both squeegees are moved in contact with the bottom of the film-forming recessed portion (12). When the flux film is formed, the film-forming squeegee (14) is operated with the scrape squeegee (15) raised upward. When the flux is scraped, the scrape squeegee (15) is operated with the film forming squeegee (14) raised upward.

Description

明 細 書 フラックス転写装置及びフラックス転写方法 技術分野  Description Flux transfer device and flux transfer method
本発明は、 転写テーブル上でフラックス、 導体ペースト、 導電性接着剤等 (以 下これらを 「フラックス」 と総称する) をスキージで均一に押し広げてフラック ス膜を形成し、 このフラックス膜に転写対象物を浸漬 (ディップ) させることで、 この転写対象物にフラックスを転写するフラックス転写装置及びフラックス転写 方法に関するものである。 背景技術  According to the present invention, a flux film is formed by uniformly spreading a flux, a conductive paste, a conductive adhesive, etc. (hereinafter, these are referred to as “flux”) with a squeegee on a transfer table, and transferring the flux film to the flux film. The present invention relates to a flux transfer device and a flux transfer method for transferring a flux to a transfer target by immersing (dipping) the target. Background art
この種のフラックス転写装置は、 日本特許公開公報 H 0 8— 2 3 6 9 1 5号、 日本特許公開公報 2 0 0 0 - 2 2 8 5 7 5号に示すように、 転写テーブルの上面 に形成された成膜用凹面部にフラックスを供給し、 該成膜用凹面部の底面とスキ ージとのギャップを一定に保持した状態で、 該スキージ又は該転写テーブルを移 動させることで、 成膜用凹面部内のフラックスをスキージで均一に押し広げるス キージングを行ってフラックス膜を形成するようにしている。 転写対象物へのフ ラックスの転写は、 このフラックス膜にバンプ等の転写対象物をディップするこ とにより行われるため、 転写によって減少したフラックスを転写後に補充してス キージングを行った後、 次の転写を行うという手順を繰り返すようにしている。 上記従来のフラックス転写装置では、 転写によつて減少したフラックスを補充 することは可能であるが、 転写テーブル上に残ったフラックスは、 繰り返しスキ 一ジング動作を行つても入れ替わることはない。  As shown in Japanese Patent Publication No. H08-2396915 and Japanese Patent Publication No. 2000-228585, this type of flux transfer device is mounted on the upper surface of a transfer table. Flux is supplied to the formed film-forming concave portion, and the squeegee or the transfer table is moved while maintaining a constant gap between the bottom surface of the film-forming concave portion and the squeegee. A flux film is formed by performing smoothing by uniformly pushing and spreading the flux in the concave portion for film formation with a squeegee. Since the transfer of the flux to the transfer target is performed by dipping the transfer target such as a bump on the flux film, the flux reduced by the transfer is replenished after the transfer and smoothing is performed. Is repeated. In the above-mentioned conventional flux transfer device, it is possible to replenish the flux reduced by the transfer, but the flux remaining on the transfer table will not be replaced even if the scanning operation is repeatedly performed.
一般に、 フラックスは、 その性質上、 大気に触れた状態で放置されると、 その 時間が長くなるに従って硬化する等の性質変化が生じる。 上記従来のフラックス 転写装置では、 転写テーブル上に残ったフラックスは、 繰り返しスキージング動 作を行つても入れ替わることはないため、 転写テーブル上に残つたフラックスが 次第に硬化してしまい、 その結果、 スキージング動作を行ってもフラックス膜の 表面が平坦にならず凹凸が出来てしまい、 バンプ等の転写対象物へのフラックス の転写状態に過不足を生じるという欠点がある。 しかも、 スキ一ジング動作時に フラックス膜の上層のみを搔くことになるため、 フラックスの硬化の問題の他に、 フラックスの酸化、 劣化、 マイクロエアの混入によるフラックスの品質低下の問 題もある。 発明の開示 Generally, due to the nature of the flux, if it is left in contact with the atmosphere, the property changes such as hardening as the time becomes longer. In the conventional flux transfer device described above, the flux remaining on the transfer table does not change even if the squeezing operation is performed repeatedly, so that the flux remaining on the transfer table gradually hardens, and as a result, the ski Fluxing film There is a drawback that the surface is not flat and irregularities are formed, resulting in an excessive or insufficient flux transfer state to a transfer target such as a bump. In addition, since only the upper layer of the flux film is exposed during the scanning operation, in addition to the problem of flux hardening, there is also a problem of flux oxidization, deterioration, and deterioration of flux quality due to mixing of micro air. Disclosure of the invention
そこで、 本発明の目的は、 転写テーブルの成膜用凹面部内のフラックスを入れ 替えることができて、 スキージング動作によって凹凸のない平坦な高品質のフラ ックス膜を形成することができ、 バンプ等の転写対象物へのフラックスの転写品 質を向上できるフラックス転写装置及びフラックス転写方法を提供することにあ る。  Therefore, an object of the present invention is to replace the flux in the film-forming concave portion of the transfer table, and to form a flat high-quality flux film without unevenness by a squeezing operation. It is an object of the present invention to provide a flux transfer device and a flux transfer method capable of improving the quality of flux transfer to a transfer target.
上記目的を達成するために、 本発明は、 転写テ一ブルの上面に形成された成膜 用凹面部に、 フラックス、 導体べ一スト、 導電性接着剤等 (以下これらを 「フラ ックス」 と総称する) を供給し、 前記転写テーブル上に配置されたスキ一ジ又は 該転写テーブルを移動させることで、 前記成膜用凹面部内のフラックスを前記ス キージで均一に押し広げてフラックス膜を形成し、 昇降装置により転写対象物を 前記転写テーブルの上方から下降させて該転写対象物を前記フラックス膜に浸漬 させることで、 該転写対象物にフラックスを転写するフラックス転写装置におい て、 前記成膜用凹面部の底面に当接した状態で該成膜用凹面部のいずれか一方側 から他方側に相対的に移動されて該成膜用凹面部内の使用済みのフラックスを搔 き出す搔出用スキージと、 前記成膜用凹面部内に供給されたフラックスを該成膜 用凹面部のいずれか一方側から他方側に均一に押し広げてフラックス膜を形成す る成膜用スキージと、 フラックス膜形成時には前記搔出用スキージを上方に退避 させ、 フラックス搔出時には前記成膜用スキージを上方に退避させるスキージ切 換装置とを備えた構成としたものである。  In order to achieve the above object, the present invention provides a method for forming a flux, a conductor base, a conductive adhesive or the like (hereinafter referred to as “flux”) on a concave portion for film formation formed on the upper surface of a transfer table. Is supplied, and the squeegee arranged on the transfer table or the transfer table is moved, so that the flux in the concave portion for film formation is uniformly spread by the squeegee to form a flux film. Then, the transfer target is lowered from above the transfer table by an elevating device, and the transfer target is immersed in the flux film, so that the flux transfer device transfers the flux to the transfer target. While being in contact with the bottom surface of the concave portion for film formation, the flux is moved relatively from one side to the other side of the concave portion for film formation to extract the used flux in the concave portion for film formation. A squeegee for ejection, and a squeegee for film formation that uniformly spreads the flux supplied into the concave portion for film formation from one side to the other side of the concave portion for film formation to form a flux film. A squeegee switching device for retracting the ejection squeegee upward when forming the flux film and retracting the film formation squeegee upward when ejecting the flux is provided.
このフラックス転写装置を使用する場合は、 成膜用凹面部内にフラックスを供 給して成膜用スキージによって該フラックスを均一に押し広げてフラックス膜を 形成する工程と、 バンプ等の転写対象物を前記フラックス膜に浸漬させることで、 この転写対象物にフラックスを転写する工程と、 前記搔出用スキージを前記成膜 用凹面部の底面に当接させた状態で該搔出用スキージによって該成膜用凹面部内 の使用済みのフラックスを搔き出す工程とを繰り返すようにすると良い。 When this flux transfer device is used, a step of supplying a flux into the concave portion for film formation and uniformly spreading the flux with a film forming squeegee to form a flux film; By immersing in the flux film, A step of transferring the flux to the transfer target; and a step of using the projecting squeegee with the projecting squeegee in contact with the bottom surface of the film forming concave section to use the used flux in the film forming concave section. And the step of extracting
このようにすれば、 転写工程を何回繰り返しても、 転写工程終了毎に転写テー ブルの成膜用凹面部内に残った使用済みのフラックスを搔出用スキージによって 成膜用凹面部から搔き出して、 新たなフラックスと入れ替えてから、 成膜用スキ 一ジのスキージング動作を行うことで、 常に、 新たなフラックスを使用して凹凸 のない平坦な高品質のフラックス膜を形成することができ、 バンプ等の転写対象 物に均一にフラックスを転写できる。 これにより、 従来のフラックスの硬化の問 題は勿論、 フラックスの酸化、 劣化、 マイクロエアの混入によるフラックスの品 質低下の問題も一挙に解消することができ、 バンプ等の転写対象物へのフラック スの転写品質を向上できる。  In this way, no matter how many times the transfer process is repeated, the used flux remaining in the film-forming concave portion of the transfer table is removed from the film-forming concave portion by the extraction squeegee every time the transfer process is completed. And then replace it with a new flux, and then perform the squeezing operation of the film-forming squeegee to always use a new flux to form a flat, high-quality flux film with no irregularities. The flux can be uniformly transferred to a transfer target such as a bump. This not only solves the problems of conventional flux hardening, but also the problems of flux oxidation, deterioration, and flux quality degradation due to the mixing of micro air. Transfer quality can be improved.
この場合、 成膜用スキ一ジの幅寸法を成膜用凹面部の幅寸法よりも大きく設定 すると共に、 成膜用凹面部の深さ寸法をフラックス膜の厚さ寸法と同一に設定し、 成膜用スキージの両端部を成膜用凹面部の両側に突出させて転写テーブルの上面 に当接させた状態で該成膜用スキージ又は該転写テーブルを移動させることで、 該成膜用凹面部内のフラックスを均一に押し広げてフラックス膜を形成するよう にすると良い。 このようにすれば、 フラックス膜を形成するスキージング時に、 成膜用スキージと成膜用凹面部の底面とのギャップ (フラックス膜の厚さ寸法) を成膜用凹面部の深さ寸法によって一定寸法に正確に規制することができ、 厚み が均一でかつ平坦性に優れたフラックス膜を簡単な構成で能率良く形成すること ができる。  In this case, the width of the film-forming squeegee is set to be larger than the width of the film-forming concave portion, and the depth of the film-forming concave portion is set to be the same as the thickness of the flux film. By moving the film forming squeegee or the transfer table in a state where both end portions of the film forming squeegee are projected on both sides of the film forming concave surface portion and abut on the upper surface of the transfer table, the film forming concave surface is formed. It is advisable to uniformly spread out the flux in the part to form a flux film. In this way, the gap between the squeegee for film formation and the bottom surface of the concave portion for film formation (thickness of the flux film) is fixed by the depth of the concave portion for film formation during squeezing for forming the flux film. The dimensions can be accurately regulated, and a flux film having a uniform thickness and excellent flatness can be efficiently formed with a simple configuration.
更に、 スキージ切換装置は、 搔出用スキージと成膜用スキージとを回動部材に ハ字状に取り付け、 該回動部材を回動させることで、 その回動方向側に位置する スキージを下降させてその反対側のスキ一ジを上昇させるように構成すると良い。 このようにすれば、 回動部材の回動方向を切り換えるだけで、 搔出用スキージと 成膜用スキージの下降 Z上昇を簡単に切り換えることができ、 スキージ切換装置 の構成を簡単化することができる。  Further, the squeegee switching device attaches the ejection squeegee and the film-forming squeegee to a rotating member in a C-shape, and rotates the rotating member to lower the squeegee located on the rotating direction side. Then, it is preferable to raise the squeegee on the opposite side. With this configuration, it is possible to easily switch between the descending squeegee and the film-forming squeegee Z elevation simply by switching the rotating direction of the rotating member, thereby simplifying the configuration of the squeegee switching device. it can.
一方、 搔出用スキージを設けない場合は、 スキージの幅寸法を転写テーブルの 成膜用凹面部の幅寸法よりも大きく設定すると共に、 成膜用凹面部の深さ寸法を フラックス膜の厚さ寸法と同一に設定し、 スキ一ジの両端部を成膜用凹面部の両 側に突出させて転写テーブルの上面に当接させた状態でスキージングするように 構成し、 前記スキージの中央部付近に、 前記成膜用凹面部の中央部付近にフラッ クスを吐出するフラックス吐出ノズルを取り付けた構成とすると良い。 このよう にすれば、 スキージング時に、 フラックス吐出ノズルから成膜用凹面部の中央部 付近に新しいフラックスを吐出することで、 成膜用凹面部内の使用済みのフラッ クスを新しいフラックスによって外側に押しやることができる。 これにより、 転 写工程後に成膜用凹面部内に残つた使用済みのフラックスを新たなフラックスと 入れ替えることができ、 スキージング動作によって凹凸のない平坦なフラックス 膜を形成することができて、 バンプ等の転写対象物に均一にフラックスを転写で さる。 On the other hand, if no squeegee for ejection is provided, the width of the squeegee should be Set the width of the concave portion for film formation larger than the width of the concave portion for film formation, and set the depth of the concave portion for film formation to be the same as the thickness of the flux film. Flux that is configured to protrude to both sides and perform squeegeeing while being in contact with the upper surface of the transfer table, and to discharge flux near the center of the squeegee and near the center of the concave surface for film formation. It is preferable to adopt a configuration in which a discharge nozzle is attached. In this way, at the time of squeegeeing, a new flux is discharged from the flux discharge nozzle to the vicinity of the center of the film forming concave portion, so that the used flux in the film forming concave portion is pushed outward by the new flux. be able to. As a result, the used flux remaining in the concave portion for film formation after the transfer process can be replaced with a new flux, and a flat flux film without unevenness can be formed by the squeezing operation, and bumps and the like can be formed. Flux can be uniformly transferred to the transfer target.
この場合、 転写テーブルの両側部に、 スキージの両端に近接してスキージング 方向に沿って平行に延びる壁部を設け、 スキージング時にスキージの両端から流 れ出ようとするフラックスを前記壁部で堰き止めるように構成し、 前記壁部のう ちの成膜用凹面部よりもスキージング方向側に位置する部分に、 スキ一ジで掃き 出されたフラックスを排出する切欠部を設け、 前記転写テーブルの下方に、 前記 切欠部から排出されるフラックスを回収するフラックス回収部を設けた構成とす ると良い。 この構成では、 スキージング時にスキ一ジの両端から流れ出ようとす るフラックスを壁部で堰き止めることができるため、 新たに供給したフラックス がスキージング時にスキージの両端から流れ出ることを防止することができ、 必 要最小限のフラックスの供給量で成膜用凹面部内のフラックスを新たなフラック スと入れ替えることができる。 しかも、 スキージによって掃き出された使用済み のフラックスをスキージング終了時に切欠部から排出してフラックス回収部で回 収することができるため、 使用済みのフラックスをリサイクルして再使用できる 利点もある。 図面の簡単な説明  In this case, on both sides of the transfer table, walls are provided which extend in parallel with the squeegee in the vicinity of both ends of the squeegee, and a flux which tends to flow out from both ends of the squeegee during the squeegee is applied to the wall. A notch portion for discharging the flux swept out by a squeegee is provided at a portion of the wall portion located on the squeezing direction side of the film-forming concave portion, It is preferable that a flux collecting unit for collecting the flux discharged from the notch be provided below the notch. With this configuration, the flux that tends to flow out from both ends of the squeegee during squeegeeing can be blocked by the wall, so that newly supplied flux can be prevented from flowing out from both ends of the squeegee during squeegeeing. The flux in the concave part for film formation can be replaced with a new flux with the minimum necessary amount of supplied flux. Moreover, since the used flux swept out by the squeegee can be discharged from the cutout portion at the end of the squeegee and recovered by the flux collection section, there is an advantage that the used flux can be recycled and reused. BRIEF DESCRIPTION OF THE FIGURES
図 1 A乃至図 1 Cは、 実施例 1におけるフラックス膜の形成工程を説明するェ 程図である。 FIGS. 1A to 1C are diagrams illustrating a process of forming a flux film in Example 1. FIG.
図 2 A乃至図 2 Cは、 実施例 1におけるフラックス転写工程を説明する工程図 である。  2A to 2C are process diagrams for explaining the flux transfer process in the first embodiment.
図 3 A乃至図 3 Cは、 実施例 1におけるフラックス搔き出し工程を説明するェ 程図である。  FIG. 3A to FIG. 3C are diagrams illustrating a flux extracting step in the first embodiment.
図 4は、 各工程の流れを示す工程フローチャートである。  FIG. 4 is a process flowchart showing the flow of each process.
図 5は、 実施例 2の転写テーブルの平面図である。  FIG. 5 is a plan view of the transfer table according to the second embodiment.
図 6は、 実施例 2のフラックス転写装置の縦断面図である。  FIG. 6 is a longitudinal sectional view of the flux transfer device of the second embodiment.
図 7は、 実施例 2の転写テーブルの斜視図である。 発明を実施するための最良の形態  FIG. 7 is a perspective view of a transfer table according to the second embodiment. BEST MODE FOR CARRYING OUT THE INVENTION
[実施例 1 ]  [Example 1]
以下、 本発明の実施例 1を図 1乃至図 4に基づいて説明する。  Hereinafter, a first embodiment of the present invention will be described with reference to FIGS.
まず、 図 1乃至図 3に基づいてフラックス転写装置の構成を説明する。 転写テ 一ブル 1 1の上面には、 四角形状の成膜用凹面部 1 2が形成されている。 この成 膜用凹面部 1 2は、 底面が平坦面に形成され、 かつ、 該成膜用凹面部 1 2の深さ 寸法が該成膜用凹面部 1 2内で形成するフラックス膜 1 3の厚さ寸法と同一に設 定されている。  First, the configuration of the flux transfer device will be described with reference to FIGS. On the upper surface of the transfer table 11, a rectangular concave portion 12 for film formation is formed. The concave portion 12 for film formation has a flat bottom surface, and the depth dimension of the concave portion 12 for film formation is the same as that of the flux film 13 formed in the concave portion 12 for film formation. It is set the same as the thickness dimension.
この転写テーブル 1 1の上方には、 成膜用スキージ 1 4と搔出用スキージ 1 5 とが配置されている。 この成膜用スキージ 1 4と搔出用スキージ 1 5とは、 スキ —ジ切換装置である回動部材 1 6にハ字状に取り付けられ、 該回動部材 1 6を正 逆回転可能なモータ等のァクチユエ一夕 (図示せず) によって回動させることで、 その回動方向側に位置するスキージを下降させてその反対側のスキ一ジを上昇さ せるように構成されている。 回動部材 1 6は、 スキージング方向に対して直角に 支持され、 両スキージ 1 4 , 1 5の下縁がスキージング方向に対して直角となつ ている。  Above the transfer table 11, a film forming squeegee 14 and an output squeegee 15 are arranged. The film forming squeegee 14 and the output squeegee 15 are mounted in a U-shape on a rotating member 16 which is a squeegee switching device, and a motor capable of rotating the rotating member 16 forward and backward. By rotating the squeegee located on the side of the rotating direction, the squeegee on the opposite side is raised by rotating the squeegee on the opposite side (not shown). The rotating member 16 is supported at right angles to the squeegee direction, and the lower edges of both squeegees 14 and 15 are at right angles to the squeegee direction.
成膜用スキ一ジ 1 4の幅寸法は、 成膜用凹面部 1 2の幅寸法よりも大きく設定 されている。 これにより、 図 1 Cに示すように、 フラックス膜 1 3を形成するェ 程で、 成膜用スキージ 1 4の両端部を成膜用凹面部 1 2の両側に突出させて転写 テーブル 1 1の上面に当接させた状態で転写テーブル 1 1 (又は成膜用スキージ 1 4 ) を移動させることで、 該成膜用凹面部 1 2内のフラックスを均一に押し広 げるスキージングを行ってフラックス膜 1 3を形成するようにしている。 The width of the film-forming squeegee 14 is set to be larger than the width of the film-forming concave portion 12. As a result, as shown in FIG. 1C, in the process of forming the flux film 13, both ends of the film formation squeegee 14 are projected and transferred to both sides of the film formation concave portion 12. By moving the transfer table 11 (or the film forming squeegee 14) in a state of being in contact with the upper surface of the table 11, a ski that uniformly pushes and spreads the flux in the film forming concave portion 12. The flux film 13 is formed by performing zing.
一方、 搔出用スキージ 1 5の幅寸法は、 成膜用凹面部 1 2の幅寸法よりも所定 のクリアランス分だけ小さく設定されている。 これにより、 図 3に示すように、 成膜用凹面部 1 2内の使用済みのフラックスを搔き出す工程で、 搔出用スキージ 1 5を成膜用凹面部 1 2の底面に当接させた状態で該成膜用凹面部 1 2のいずれ か一方側から他方側に相対的に移動させることで、 該成膜用凹面部 1 2内の使用 済みのフラックスを搔き出すように構成されている。  On the other hand, the width of the ejection squeegee 15 is set smaller than the width of the film-forming concave portion 12 by a predetermined clearance. As a result, as shown in FIG. 3, in the process of extracting the used flux in the concave portion 12 for film formation, the squeegee 15 for extraction is brought into contact with the bottom surface of the concave portion 12 for film formation. In this state, the used flux in the film-forming concave surface portion 12 is extracted by relatively moving the film-forming concave surface portion 12 from one side to the other side. ing.
また、 回動部材 1 6の中央部付近には、 成膜用凹面部 1 2内にフラックスを吐 出するフラックス吐出ノズル 1 7が成膜用スキージ 1 4のスキージング方向側に 取り付けられている。 本実施例 1では、 転写テーブル 1 1を前進 '後退させる駆 動装置 (図示せず) が設けられ、 転写テーブル 1 1を前進 '後退させることで、 成膜用スキージ 1 4や搔出用スキージ 1 5を動かさずにスキージングする構成と なっている。 但し、 転写テーブル 1 1を固定して、 成膜用スキージ 1 4や搔出用 スキ一ジ 1 5を転写テーブル 1 1の上面に沿って平行移動させてスキージングす る構成としても良いことはいうまでもない。  In addition, near the center of the rotating member 16, a flux discharge nozzle 17 for discharging the flux into the concave portion 12 for film formation is attached to the squeegee side of the squeegee 14 for film formation. . In the first embodiment, a driving device (not shown) for moving the transfer table 11 forward and backward is provided. By moving the transfer table 11 forward and backward, the film forming squeegee 14 and the ejection squeegee are provided. It is configured to squeeze without moving 15. However, the transfer table 11 may be fixed, and the film-forming squeegee 14 and the ejection squeegee 15 may be moved in parallel along the upper surface of the transfer table 11 for squeegeeing. Needless to say.
次に、 上記構成のフラックス転写装置を用いて、 バンプ 2 0等の転写対象物に フラックスを転写する手順を説明する。 本実施例 1では、 図 4に示す 4つの動作 を繰り返すことで、 転写対象物へのフラックス転写を次のようにして繰り返す。 今、 後述する搔出用スキージ 1 5によって転写テーブル 1 1の成膜用凹面部 1 2内の使用済みのフラックスが搔き出されて、 成膜用凹面部 1 2内がほぼ空の状 態になっているものとする。  Next, a procedure for transferring the flux to a transfer target such as the bump 20 using the flux transfer device having the above configuration will be described. In the first embodiment, the flux transfer to the transfer target is repeated as follows by repeating the four operations shown in FIG. Now, the used flux in the concave portion 12 for film formation of the transfer table 11 is ejected by the extracting squeegee 15 described later, and the inside of the concave portion 12 for film formation is almost empty. It is assumed that
この後、 図 1 Aに示すように、 回動部材 1 6を反時計回り方向に回動させて搔 出用スキージ 1 5を転写テーブル 1 1の上方へ退避させると共に、 成膜用スキ一 ジ 1 4を下降させて成膜用スキージ 1 4の下縁を転写テーブル 1 1上面のうちの 成膜用凹面部 1 2よりも反スキージング方向側の位置に当接させた状態にする。 この状態で、 フラックス吐出ノズル 1 7から成膜用凹面部 1 2内にフラックスを 吐出する。 この後、 転写テーブル 1 1を前進方向に移動させることで、 図 1 B、 図 1 Cに 示すように、 成膜用スキージ 1 4の両端部を成膜用凹面部 1 2の両側に突出させ て転写テーブル 1 1の上面に当接させた状態で、 該成膜用凹面部 1 2内のフラッ クスを均一に押し広げるスキージングを行つてフラックス膜 1 3を形成する。 こ のスキージング動作は、 成膜用スキージ 1 4の下縁が成膜用凹面部 1 2よりもス キージング方向側の位置に到達するまで行われる。 このようにして形成されるフ ラックス膜 1 3の厚み寸法は成膜用凹面部 1 2の深さ寸法と同一になる。 Thereafter, as shown in FIG. 1A, the rotating member 16 is rotated in a counterclockwise direction to retract the ejection squeegee 15 above the transfer table 11 and to form a film-forming squeegee. 14 is lowered so that the lower edge of the film-forming squeegee 14 is brought into contact with the position on the upper surface of the transfer table 11 opposite to the squeezing direction with respect to the film-forming concave portion 12. In this state, the flux is discharged from the flux discharge nozzle 17 into the concave portion 12 for film formation. Thereafter, the transfer table 11 is moved in the forward direction so that both ends of the film forming squeegee 14 protrude from both sides of the film forming concave portion 12 as shown in FIGS. 1B and 1C. In a state in which the flux is in contact with the upper surface of the transfer table 11, squeezing for uniformly pushing and spreading the flux in the concave portion 12 for film formation is performed to form the flux film 13. This squeezing operation is performed until the lower edge of the film-forming squeegee 14 reaches a position on the side in the scanning direction from the film-forming concave portion 12. The thickness dimension of the flux film 13 formed in this manner is the same as the depth dimension of the concave portion 12 for film formation.
フラックス膜 1 3の形成後、 図 2に示すように、 昇降装置の吸着ノズル 1 8に 電子部品 1 9を吸着して、 該電子部品 1 9を転写テーブル 1 1の上方から下降さ せて、 該電子部品 1 9下面のバンプ 2 0 (転写対象物) をフラックス膜 1 3に浸 漬 (ディップ) させることで、 バンプ 2 0にフラックスを転写した後、 該電子部 品 1 9を転写テ一ブル 1 1の上方へ移動させる。  After the formation of the flux film 13, as shown in FIG. 2, the electronic component 19 is sucked by the suction nozzle 18 of the lifting device, and the electronic component 19 is lowered from above the transfer table 11. The bumps 20 (transfer target) on the lower surface of the electronic component 19 are immersed (dipped) in the flux film 13 to transfer the flux to the bumps 20, and then the electronic component 19 is transferred to the transfer surface. Move the bull 1 1 up.
この後、 図 3 Aに示すように、 回動部材 1 6を時計回り方向に回動させて成膜 用スキ一ジ 1 4を転写テーブル 1 1の上方へ退避させると共に、 搔出用スキージ 1 5を下降させて搔出用スキージ 1 5の下縁を転写テーブル 1 1の成膜用凹面部 1 2の底面の端部に当接させた状態にする。 この後、 転写テーブル 1 1を後退方 向に移動させることで、 図 3 B、 図 3 Cに示すように、 搔出用スキ一ジ 1 5を成 膜用凹面部 1 2の底面に沿って摺動させて、 成膜用凹面部 1 2内の使用済みのフ ラックスを接き出す。 これにより、 成膜用凹面部 1 2内がほぼ空の状態になる。 この後、 図 1 Aの状態に戻り、 前述したように、 成膜用凹面部 1 2内へのフラ ックスの吐出、 成膜用スキ一ジ 1 4によるフラックス膜 1 3の成膜、 バンプ 2 0 へのフラックスの転写 (図 2参照) 、 搔出用スキージ 1 5によるフラックスの搔 き出し (図 3参照) をこの順番で何回も繰り返す。  Thereafter, as shown in FIG. 3A, the rotating member 16 is rotated clockwise to retreat the film-forming squeegee 14 above the transfer table 11, and the ejecting squeegee 1 5 is lowered to bring the lower edge of the ejection squeegee 15 into contact with the end of the bottom surface of the film-forming concave portion 12 of the transfer table 11. Thereafter, by moving the transfer table 11 in the backward direction, as shown in FIGS. 3B and 3C, the ejection squeegee 15 is moved along the bottom surface of the film forming concave portion 12. Slide to expose the used flux in the concave part 12 for film formation. As a result, the inside of the film-forming concave portion 12 becomes almost empty. After that, returning to the state of FIG. 1A, as described above, the flux is discharged into the concave portion 12 for film formation, the flux film 13 is formed by the squeegee 14 for film formation, and the bump 2 is formed. Transfer of the flux to 0 (see Fig. 2) and extraction of the flux with the squeegee for extraction 15 (see Fig. 3) are repeated many times in this order.
以上説明した本実施例 1によれば、 転写テ一ブル 1 1の成膜用凹面部 1 2の底 面に当接した状態で該成膜用凹面部 1 2のいずれか一方側から他方側に相対的に 移動されて該成膜用凹面部 1 2内の使用済みのフラックスを搔き出す搔出用スキ ージ 1 5と、 成膜用凹面部 1 2内に供給されたフラックスを該成膜用凹面部 1 2 のいずれか一方側から他方側に均一に押し広げてフラックス膜 1 3を形成する成 膜用スキージ 1 4とを設け、 フラックス膜 1 3の形成時には、 搔出用スキージ 1 5を上方に退避させた状態で成膜用スキージ 1 4によるスキージング動作を行い、 フラックス搔出時には成膜用スキ一ジ 1 4を上方に退避させた状態で搔出用スキ ージ 1 5によるスキージング動作を行うようにしたので、 転写工程を何回繰り返 しても、 転写工程終了毎に成膜用凹面部 1 2内に残った使用済みのフラックスを 搔出用スキ一ジ 1 5によって成膜用凹面部 1 2から搔き出して、 新たなフラック スと入れ替えてから、 成膜用スキージ 1 4のスキージング動作を行うことで、 常 に、 新たなフラックスを使用して凹凸のない平坦な高品質のフラックス膜 1 3を 形成することができ、 バンプ 2 0等の転写対象物に均一にフラックスを転写でき る。 これにより、 従来のフラックスの硬化の問題は勿論、 フラックスの酸化、 劣 化、 マイクロエアの混入によるフラックスの品質低下の問題も一挙に解決するこ とができ、 バンプ 2 0等の転写対象物へのフラックスの転写品質を向上させるこ とができる。 According to the first embodiment described above, in a state where the transfer table 11 is in contact with the bottom surface of the film-forming concave portion 12, the film-forming concave portion 12 is positioned from one side to the other side. The extraction squeegee 15 which is relatively moved to extract the used flux in the film-forming concave portion 12, and the flux supplied into the film-forming concave portion 12 are A film-forming squeegee 14 for forming a flux film 13 by uniformly spreading from one side to the other side of the film-forming concave portion 12 is provided. 1 The squeezing operation is performed by the film forming squeegee 14 with the film squeegee 14 retracted upward while the film squeegee 14 is retracted upward. Squeezing operation is performed, so that, regardless of how many times the transfer process is repeated, the used flux remaining in the concave portion 12 for film formation is removed every time the transfer process is completed. After extruding from the concave portion 12 for film formation by 5 and replacing it with a new flux, the squeegee operation of the squeegee 14 for film formation is performed, so that irregularities are always used using a new flux. It is possible to form a flat, high-quality flux film 13 with no flux, and to uniformly transfer the flux to a transfer target such as a bump 20. As a result, not only the conventional problem of flux hardening but also the problem of flux oxidization, deterioration, and flux quality degradation due to the mixing of micro air can be solved at once. The transfer quality of the flux can be improved.
しかも、 本実施例 1では、 成膜用スキ一ジ 1 4の幅寸法を成膜用凹面部 1 2の 幅寸法よりも大きく設定すると共に、 成膜用凹面部 1 2の深さ寸法をフラックス 膜 1 3の厚さ寸法と同一に設定し、 成膜用スキージ 1 4の両端部を成膜用凹面部 1 2の両側に突出させて転写テーブル 1 1の上面に当接させた状態でスキージン グ動作を行ってフラックス膜 1 3を形成するようにしたので、 スキージング動作 時に、 成膜用スキージ 1 4と成膜用凹面部 1 2の底面とのギャップ (フラックス 膜 1 3の厚さ寸法) を成膜用凹面部 1 2の深さ寸法によって一定寸法に正確に規 制することができ、 厚みが均一でかつ平坦性に優れたフラックス膜 1 3を簡単な 構成で能率良く形成することができるという利点もある。  Moreover, in the first embodiment, the width of the film-forming squeegee 14 is set to be larger than the width of the film-forming concave portion 12, and the depth of the film-forming concave portion 12 is set to the flux. The thickness of the film 13 is set to be the same as that of the film 13. The flux film 13 is formed by performing a squeezing operation. Therefore, the gap between the squeegee 14 for film formation and the bottom surface of the concave portion 12 for film formation (thickness of the flux film 13) ) Can be precisely regulated to a certain size by the depth of the concave portion 12 for film formation, and the flux film 13 with uniform thickness and excellent flatness can be efficiently formed with a simple configuration. There is also an advantage that can be.
尚、 成膜用スキージ 1 4の幅寸法が成膜用凹面部 1 2の幅寸法よりも小さい場 合は、 成膜用スキージ 1 4と成膜用凹面部 1 2の底面とのギャップを一定に保持 するギヤップ保持機構を設け、 このギヤップ保持機構でギヤップを一定に保持し た状態でスキージング動作を行うようにすれば良い。  If the width of the film-forming squeegee 14 is smaller than the width of the film-forming concave surface 12, the gap between the film-forming squeegee 14 and the film-forming concave surface 12 is kept constant. A squeezing operation may be performed in a state where the gap is held constant by the gap holding mechanism.
また、 本実施例 1では、 搔出用スキ一ジ 1 5と成膜用スキージ 1 4とを回動部 材 1 6に八字状に取り付け、 該回動部材 1 6を回動させることで、 その回動方向 側に位置するスキージを下降させてその反対側のスキージを上昇させるように構 成したので、 回動部材 1 6の回動方向を切り換えるだけで、 搔出用スキージ 1 5 と成膜用スキージ 1 4の下降/上昇を簡単に切り換えることができ、 スキージ切 換装置の構成を簡単化することができる利点がある。 In the first embodiment, the extraction squeegee 15 and the film formation squeegee 14 are attached to the rotating member 16 in an eight-letter shape, and the rotating member 16 is rotated. Since the squeegee located on the side of the rotating direction is lowered and the squeegee on the opposite side is lifted, the switching direction of the rotating member 16 can be changed by simply changing the rotating direction of the rotating member 16. It is possible to easily switch between lowering and raising of the film forming squeegee 14 and to simplify the configuration of the squeegee switching device.
しかしながら、 本発明は、 成膜用スキージ 1 4と搔出用スキージ 1 5とを別々 にシリンダ等の昇降用ァクチユエ一夕で昇降させる構成としても良い。  However, the present invention may be configured such that the film-forming squeegee 14 and the output squeegee 15 are moved up and down separately by a vertical actuator such as a cylinder.
また、 図 1乃至図 3の例では、 転写テーブル 1 1に成膜用凹面部 1 2を 1個の み形成したが、 転写テーブルを直線的に長く形成して、 深さ寸法の異なる複数個 の成膜用凹面部を形成し、 使用する成膜用凹面部を切り換えることで、 フラック ス膜の厚み寸法を切り換えることができるようにしても良い。  Also, in the examples of FIGS. 1 to 3, only one concave portion 12 for film formation is formed on the transfer table 11, but the transfer table is formed linearly long, and a plurality of transfer surfaces having different depth dimensions are formed. The thickness dimension of the flux film may be switched by forming the film-forming concave portion and switching the film-forming concave portion to be used.
また、 転写テ一ブルは直線的に往復動させる直動型のものに限定されず、 正逆 回転可能な円筒型の転写テ一ブルに 1個又は複数個の成膜用凹面部を形成するよ うにしても良い。  Also, the transfer table is not limited to a linear type that reciprocates linearly, and one or a plurality of concave portions for film formation are formed on a cylindrical transfer table that can be rotated forward and reverse. You may do it.
尚、 本実施例 1では、 転写工程終了後に、 毎回、 成膜用凹面部 1 2内に残った 使用済みのフラックスを搔出用スキージ 1 5によって搔き出して新たなフラック スと入れ替えるようにしたが、 転写工程を複数回実行する毎に、 搔出用スキージ 1 5によるフラックスの搔き出しを 1回実行するようにしても良い。 この場合で も、 成膜用凹面部 1 2内の使用済みのフラックスが硬化、 酸化、 劣化等を生じる 前に新たなフラックスと入れ替えることができ、 本発明の所期の目的を達成する ことができる。  In the first embodiment, after the transfer process, the used flux remaining in the concave portion 12 for film formation is extracted by the extraction squeegee 15 and replaced with a new flux every time after the completion of the transfer process. However, every time the transfer step is performed a plurality of times, the flux squeegee 15 may be used to perform the flux extraction once. Even in this case, the used flux in the concave portion 12 for film formation can be replaced with a new flux before hardening, oxidation, deterioration, etc. occur, and the intended object of the present invention can be achieved. it can.
[実施例 2 ]  [Example 2]
次に、 本発明の実施例 2を図 5乃至図 7に基づいて説明する。 本実施例 2では、 搔出用スキージを設けず、 成膜用の 1個のスキージ 2 1のみを設けた構成として いる。 そして、 このスキージ 2 1の幅寸法を転写テーブル 2 2の成膜用凹面部 2 3の幅寸法よりも大きく設定すると共に、 成膜用凹面部 2 3の深さ寸法をフラッ クス膜 2 4の厚さ寸法と同一に設定している。 スキージング動作時には、 スキ一 ジ 2 1の両端部を成膜用凹面部 2 3の両側に突出させて転写テ一ブル 2 2の上面 に当接させた状態でスキージングするようにしている。 更に、 スキージ 2 1の中 央部付近には、 成膜用凹面部 2 3の中央部付近にフラックスを吐出するフラック ス吐出ノズル 2 5を取り付けている。  Next, a second embodiment of the present invention will be described with reference to FIGS. The second embodiment has a configuration in which no squeegee for projection is provided and only one squeegee 21 for film formation is provided. Then, the width of the squeegee 21 is set to be larger than the width of the concave portion 23 for film formation of the transfer table 22, and the depth of the concave portion 23 for film formation is set to the width of the flux film 24. It is set the same as the thickness dimension. At the time of the squeegeeing operation, both ends of the squeegee 21 are projected on both sides of the film-forming concave portion 23 so as to make contact with the upper surface of the transfer table 22 for squeezing. Further, near the center of the squeegee 21, a flux discharge nozzle 25 for discharging a flux is mounted near the center of the concave portion 23 for film formation.
また、 転写テーブル 2 2の両側部には、 スキージ 2 1の両端に近接してスキー ジング方向に沿って平行に延びる壁部 2 6を設け、 この壁部 2 6とスキージ 2 1 の端部との隙間を摺動クリアランス分の必要最小限の隙間に設定することで、 ス キージング時にスキージ 2 1の両端から流れ出ようとするフラックスを壁部 2 6 で堰き止めるようにしている。 スキージング時には、 転写テーブル 2 2又はスキ ージ 2 1のいずれか一方を移動させれば良い。 Also, on both sides of the transfer table 22, close the skis at both ends of the squeegee 21. By providing a wall 26 extending parallel to the jigging direction and setting the gap between the wall 26 and the end of the squeegee 21 to the minimum necessary for the sliding clearance, Flux that is about to flow out from both ends of the squeegee 21 is blocked by the wall 26. At the time of squeegee, one of the transfer table 22 and the squeegee 21 may be moved.
上記壁部 2 6のうちの成膜用凹面部 2 3よりもスキージング方向側に位置する 部分には、 スキージ 2 1で掃き出されたフラックスを排出する切欠部 2 7を設け、 転写テーブル 2 2の下方には、 切欠部 2 7から排出されるフラックスを回収する フラックス回収部 2 8を樋状に設けた構成としている。 A notch portion 27 for discharging the flux swept out by the squeegee 21 is provided in a portion of the wall portion 26 located on the squeezing direction side with respect to the film-forming concave portion 23, and the transfer table 2 is provided. A flux collecting part 28 for collecting the flux discharged from the notch 27 is provided in a gutter shape below the notch 2.
以上のように構成した本実施例 2では、 スキージング動作時に、 フラックス吐 出ノズル 2 5から成膜用凹面部 2 3の中央部付近に新しいフラックスを吐出する と、 成膜用凹面部 2 3内の使用済みのフラックスが新しいフラックスによって外 側に押しやられるようになる。 これにより、 転写工程後に成膜用凹面部 2 3内に 残つた使用済みのフラックスを新たなフラックスと入れ替えることができ、 スキ —ジング動作によって凹凸のない平坦な高品質のフラックス膜 2 4を形成するこ とができて、 バンプ等の転写対象物に均一にフラックスを転写できる。  In the second embodiment configured as described above, when a new flux is discharged from the flux discharge nozzle 25 near the center of the film forming concave portion 23 during the squeezing operation, the film forming concave portion 2 3 The used flux inside will be pushed outward by the new flux. As a result, the used flux remaining in the concave portion 23 for film formation after the transfer process can be replaced with a new flux, and a flat high-quality flux film 24 without unevenness is formed by the scanning operation. Thus, the flux can be uniformly transferred to a transfer target such as a bump.
しかも、 スキージング時にスキージ 2 1の両端から流れ出ようとするフラック スを壁部 2 6で堰き止めることができるため、 新たに供給したフラックスがスキ 一ジング時にスキージ 2 1の両端から流れ出ることを防止することができ、 必要 最小限のフラックスの供給量で成膜用凹面部 2 3内のフラックスを新たなフラッ クスと入れ替えることができる。 しかも、 スキ一ジ 2 1によって掃き出された使 用済みのフラックスをスキージング終了時に切欠部 2 7から排出してフラックス 回収部 2 8で回収することができるため、 使用済みのフラックスをリサイクルし て再使用できる利点もある。  In addition, the flux that flows out from both ends of the squeegee 21 during squeegeeing can be blocked by the wall 26, preventing the newly supplied flux from flowing out from both ends of the squeegee 21 during scanning. The flux in the concave portion 23 for film formation can be replaced with a new flux with a minimum necessary amount of supplied flux. In addition, the used flux that has been swept out by the squeegee 21 can be discharged from the notch 27 at the end of squeezing and recovered by the flux recovery unit 28, so that the used flux can be recycled. There is also an advantage that it can be reused.
尚、 図 5乃至図 7の例では、 転写テーブル 1 1に成膜用凹面部 1 2を 1個のみ 形成したが、 転写テーブル 2 2を直線的に長く形成して、 深さ寸法の異なる複数 個の成膜用凹面部を形成し、 使用する成膜用凹面部を切り換えることで、 フラッ クス膜の厚み寸法を切り換えることができるようにしても良い。  In the examples of FIGS. 5 to 7, only one concave portion 12 for film formation is formed on the transfer table 11. However, the transfer table 22 is formed to be linearly long, and a plurality of transfer surfaces having different depth dimensions are formed. The thickness dimension of the flux film may be switched by forming a plurality of concave portions for film formation and switching the concave portions for film formation to be used.
また、 転写テーブルは直線的に往復動させる直動型のものに限定されず、 正逆 回転可能な円筒型の転写テーブルに 1個又は複数個の成膜用凹面部を形成するよ うにしても良い。 産業上の利用可能性 Also, the transfer table is not limited to a linear motion type that reciprocates linearly. One or more concave portions for film formation may be formed on a rotatable cylindrical transfer table. Industrial applicability
本発明の利用範囲は、 フラックスの転写装置に限定されず、 導体ペースト、 抵 抗体ペースト、 導電性接着剤等の転写装置としても使用可能である。  The scope of use of the present invention is not limited to a flux transfer device, but can be used as a transfer device for conductive paste, antibody paste, conductive adhesive, and the like.

Claims

請求の範囲 The scope of the claims
1 . 転写対象物にフラックス、 導体べ一スト、 導電性接着剤等 (以下これらを 「フラックス」 と総称する) を転写するフラックス転写装置において、 上面に、 フラックスが供給される成膜用凹面部が形成された転写テーブルと、 前記成膜用凹面部の底面に当接した状態で該成膜用凹面部のいずれか一方側か ら他方側に相対的に移動されて該成膜用凹面部内の使用済みのフラックスを搔き 出す搔出用スキージと、 1. In a flux transfer device that transfers flux, conductor paste, conductive adhesive, etc. (hereinafter, these are collectively referred to as “flux”) to a transfer target, a concave portion for film formation to which flux is supplied is provided on the upper surface. And a transfer table on which the film-forming concave portion is relatively moved from one side to the other while being in contact with the bottom surface of the film-forming concave portion, and An output squeegee that pumps out the used flux,
前記成膜用凹面部内に供給されたフラックスを該成膜用凹面部のいずれか一方 側から他方側に均一に押し広げてフラックス膜を形成する成膜用スキージと、 前記転写対象物を前記転写テーブルの上方から下降させて該転写対象物を前記 フラックス膜に浸潰させることで、 該転写対象物にフラックスを転写する昇降装 置と、  A film-forming squeegee for uniformly spreading a flux supplied into the film-forming concave portion from one side of the film-forming concave portion to the other side to form a flux film; An elevating device for transferring the flux to the transfer target by lowering the transfer target from above the table and immersing the transfer target in the flux film;
フラックス膜形成時には前記搔出用スキージを上方に退避させ、 フラックス搔 出時には前記成膜用スキージを上方に退避させるスキージ切換装置と  A squeegee switching device that retracts the ejection squeegee upward when forming a flux film, and retracts the deposition squeegee upward during flux ejection.
を備えていることを特徵とするフラックス転写装置。  A flux transfer device characterized by comprising:
2 . 前記搔出用スキージの幅寸法を前記成膜用凹面部の幅寸法よりも小さく設 定し、 2. The width of the extraction squeegee is set smaller than the width of the film-forming concave portion;
前記成膜用スキージの幅寸法を前記成膜用凹面部の幅寸法よりも大きく設定す ると共に、 前記成膜用凹面部の深さ寸法を前記フラックス膜の厚さ寸法と同一に 設定し、  The width of the film forming squeegee is set to be larger than the width of the film forming concave portion, and the depth of the film forming concave portion is set to be the same as the thickness of the flux film.
前記成膜用スキージの両端部を前記成膜用凹面部の両側に突出させて前記転写 テーブルの上面に当接させた状態で該成膜用スキージ又は該転写テーブルを移動 させることで、 該成膜用凹面部内のフラックスを均一に押し広げてフラックス膜 を形成することを特徴とする請求の範囲第 1項に記載のフラックス転写装置。 By moving the film forming squeegee or the transfer table in a state in which both end portions of the film forming squeegee are projected on both sides of the film forming concave surface portion and are in contact with the upper surface of the transfer table, 2. The flux transfer device according to claim 1, wherein the flux in the concave portion for film is uniformly spread to form a flux film.
3 . 前記スキージ切換装置は、 前記搔出用スキージと前記成膜用スキージとを 回動部材にハ字状に取り付け、 該回動部材を回動させることで、 その回動方向側 に位置するスキージを下降させてその反対側のスキージを上昇させるように構成 されていることを特徴とする請求の範囲第 1項に記載のフラックス転写装置。 3. The squeegee switching device is located on the rotation direction side by attaching the ejection squeegee and the film forming squeegee to a rotating member in a C-shape, and rotating the rotating member. 2. The flux transfer device according to claim 1, wherein the flux transfer device is configured to lower the squeegee and raise the squeegee on the opposite side.
4 . フラックス転写装置を用いて転写対象物にフラックス、 導体ペースト、 導 電性接着剤等 (以下これらを 「フラックス」 と総称する) を転写するフラックス 転写方法であって、 4. A flux transfer method for transferring a flux, a conductive paste, a conductive adhesive, etc. (hereinafter, collectively referred to as “flux”) to a transfer target using a flux transfer device,
前記フラックス転写装置は、  The flux transfer device,
上面に、 フラックスが供給される成膜用凹面部が形成された転写テーブルと、 前記成膜用凹面部の底面に当接した状態で該成膜用凹面部のいずれか一方側か ら他方側に相対的に移動されて該成膜用凹面部内の使用済みのフラックスを搔き 出す搔出用スキージと、  A transfer table on which a film-forming concave portion to which a flux is supplied is formed on an upper surface, and a film-forming concave portion in contact with the bottom surface of the film-forming concave portion from one side to the other side of the film-forming concave portion An ejection squeegee that is relatively moved to eject the used flux in the film-forming concave portion;
前記成膜用凹面部内に供給されたフラックスを該成膜用凹面部のいずれか一方 側から他方側に均一に押し広げてフラックス膜を形成する成膜用スキージと、 前記転写対象物を前記転写テーブルの上方から下降させて該転写対象物を前記 フラックス膜に浸漬させることで、 該転写対象物にフラックスを転写する昇降装 置と、  A film-forming squeegee for uniformly spreading a flux supplied into the film-forming concave portion from one side of the film-forming concave portion to the other side to form a flux film; An elevating device that transfers flux to the transfer target by lowering the transfer target from the top of the table and immersing the transfer target in the flux film;
フラックス膜形成時には前記搔出用スキ一ジを上方に退避させ、 フラックス搔 出時には前記成膜用スキージを上方に退避させるスキージ切換装置とを備えた構 成であり、  A squeegee switching device for retracting the ejection squeegee upward during flux film formation and retracting the film formation squeegee upward during flux ejection.
前記成膜用凹面部内にフラックスを供給して前記成膜用スキージによって該フ ラックスを均一に押し広げてフラックス膜を形成する工程と、  Supplying a flux into the film-forming concave portion and uniformly spreading the flux by the film-forming squeegee to form a flux film;
転写対象物を前記フラックス膜に浸潰させることで、 この転写対象物にフラッ クスを転写する工程と、  Immersing the transfer target in the flux film to transfer the flux to the transfer target;
前記搔出用スキ一ジを前記成膜用凹面部の底面に当接させた状態で該搔出用ス キージによって該成膜用凹面部内の使用済みのフラックスを搔き出す工程と を繰り返すことを特徴とするフラックス転写方法。  Repeating the step of using the ejection squeegee to bring out the used flux in the film-forming concave portion with the ejection squeegee in contact with the bottom surface of the film-forming concave portion. A flux transfer method characterized by the following.
5 . 転写テーブルの上面に形成された成膜用凹面部に、 フラックス、 導体べ一 スト、 導電性接着剤等 (以下これらを 「フラックス」 と総称する) を供給し、 前 記転写テーブル上に配置されたスキージ又は該転写テ一ブルを移動させることで、 前記成膜用凹面部内のフラックスを前記スキージで均一に押し広げてフラックス 膜を形成し (以下この動作を 「スキージング」 という) 、 転写対象物を前記転写 テーブルの上方から下降させて該転写対象物を前記フラックス膜に浸漬させるこ とで、 該転写対象物にフラックスを転写するフラックス転写装置において、 前記スキージの幅寸法を前記成膜用凹面部の幅寸法よりも大きく設定すると共 に、 前記成膜用凹面部の深さ寸法を前記フラックス膜の厚さ寸法と同一に設定し、 前記スキージの両端部を前記成膜用凹面部の両側に突出させて前記転写テーブル の上面に当接させた状態でスキージングするように構成し、 5. Flux, conductor base, conductive adhesive, etc. (hereinafter collectively referred to as “flux”) are supplied to the concave surface for film formation formed on the upper surface of the transfer table. By moving the arranged squeegee or the transfer table, the flux in the film-forming concave portion is uniformly spread by the squeegee to form a flux film (hereinafter, this operation is referred to as “squeezing”). The transfer target is lowered from above the transfer table so that the transfer target is immersed in the flux film. In the flux transfer device for transferring the flux to the transfer target, the width of the squeegee is set to be larger than the width of the concave portion for film formation, and the depth of the concave portion for film formation is set. The thickness of the flux film is set to be the same as the thickness of the flux film, and both ends of the squeegee are protruded on both sides of the concave portion for film formation, and squeezing is performed in a state of contacting the upper surface of the transfer table. And
前記スキージの中央部付近に、 前記成膜用凹面部の中央部付近にフラックスを 吐出するフラックス吐出ノズルを取り付けたことを特徴とするフラックス転写装 置。  A flux transfer device, wherein a flux discharge nozzle for discharging a flux is mounted near a central portion of the film forming concave portion near the central portion of the squeegee.
6 . 前記転写テーブルの両側部に、 前記スキージの両端に近接してスキージン グ方向に沿って平行に延びる壁部を設け、 スキージング時に前記スキージの両端 から流れ出ようとするフラックスを前記壁部で堰き止めるように構成し、 前記壁 部のうちの前記成膜用凹面部よりもスキージング方向側に位置する部分に、 前記 スキージで掃き出されたフラックスを排出する切欠部を設け、 前記転写テーブル の下方に、 前記切欠部から排出されるフラックスを回収するフラックス回収部を 設けたことを特徴とする請求の範囲第 5項に記載のフラックス転写装置。  6. On both sides of the transfer table, walls are provided which extend in parallel with the squeegee in the vicinity of both ends of the squeegee, and a flux which tends to flow out from both ends of the squeegee at the time of squeegee is formed on the wall. A notch portion for discharging the flux swept out by the squeegee is provided in a portion of the wall portion located on the squeezing direction side of the film-forming concave portion in the wall portion; 6. The flux transfer device according to claim 5, wherein a flux collecting unit is provided below the notch to collect the flux discharged from the notch.
PCT/JP2004/006356 2003-05-09 2004-04-30 Flux transferring device and method of transferring flux WO2004100629A1 (en)

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