WO2004097220A1 - Pompe a vide a piston - Google Patents

Pompe a vide a piston Download PDF

Info

Publication number
WO2004097220A1
WO2004097220A1 PCT/EP2004/003833 EP2004003833W WO2004097220A1 WO 2004097220 A1 WO2004097220 A1 WO 2004097220A1 EP 2004003833 W EP2004003833 W EP 2004003833W WO 2004097220 A1 WO2004097220 A1 WO 2004097220A1
Authority
WO
WIPO (PCT)
Prior art keywords
piston
cylinder
valve
side wall
gas inlet
Prior art date
Application number
PCT/EP2004/003833
Other languages
German (de)
English (en)
Inventor
Rudolf Bahnen
Peter Langer
Hans-Josef Burghard
Helge Asarow-Semke
Original Assignee
Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vacuum Gmbh filed Critical Leybold Vacuum Gmbh
Priority to EP04726853A priority Critical patent/EP1618304A1/fr
Priority to US10/553,764 priority patent/US20060280634A1/en
Priority to JP2006505088A priority patent/JP2006524773A/ja
Publication of WO2004097220A1 publication Critical patent/WO2004097220A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/0005—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons
    • F04B39/0016—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00 adaptations of pistons with valve arranged in the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/04—Piston machines or pumps characterised by having positively-driven valving in which the valving is performed by pistons and cylinders coacting to open and close intake or outlet ports

Definitions

  • the invention relates to a piston vacuum pump with a gas inlet in a cylinder side wall.
  • the design of the gas inlet and the associated dead volumes play a major role in the size and the efficiency of the pump. Since, particularly in the case of small piston vacuum pumps, the gas inlet cannot be arranged in the region of the cylinder base due to a lack of installation space, the gas inlet is arranged in a side wall.
  • Such one Piston vacuum pump is described in DE 196 34 517.
  • a compensating line is provided between the exhaust and the compression space, the mouth of the compensating bore being arranged in the compression space near the cylinder bottom.
  • a non-return valve is arranged in the course of the equalization line, which requires installation space. The check valve is not arranged in the cylinder wall plane, so that a dead volume which deteriorates the efficiency is formed in the compensating line.
  • the object of the invention is to provide an improved piston vacuum pump with a gas inlet in the cylinder side wall.
  • the piston essentially forms the compensation line and the valve.
  • the piston forms the compensating line and the valve in any case partially, but not necessarily alone.
  • the compensating line is formed by the piston, no space is required for the compensating line in the area of the cylinder bottom or the cylinder side. This enables a compact construction of the cylinder.
  • the valve is also essentially formed by the piston, so that the valve action occurs on the piston end wall or in the immediate vicinity of the piston end wall. In this way, a dead volume outside the cylinder space is avoided, so that the efficiency of the pump is not impaired.
  • the Compensating line and the valve can be formed by the piston in different ways.
  • the valve can be designed as a mechanical check valve, but also as a gas throttle.
  • the compensating line can be formed by the piston alone, but also by the piston and cylinder together.
  • the compensating line is formed in the piston between a piston end wall opening and a piston bottom wall opening, the piston side wall opening and the gas inlet being connected to one another at the beginning of the suction stroke.
  • the piston is still at the level of the gas inlet and does not allow gas to exit the gas inlet directly into the compression space.
  • the valve is preferably a non-return valve which blocks in the direction of the gas inlet and opens in the direction of the compression space. As a result, a return flow of compressed gas is blocked via the compensating line during the compression stroke.
  • the check valve can be arranged in the plane of the piston end wall, so that the dead volume is practically zero.
  • annular groove in the cylinder side wall and / or in the piston side wall is assigned to the gas inlet. This results in an enlargement of the gas inlet or, in the case of unguided pistons, enables gas to pass between the cylinder and the piston in any rotational position of the piston.
  • the annular groove can also face the gas inlet in axial extension to be widened to extend the gas inlet during the suction stroke.
  • the compensating line and the valve are preferably formed by a gap between the piston side wall and the cylinder side wall, the gap width being between 10 and 100 ⁇ v.
  • the compensating line and the valve are therefore limited by the piston side wall and the cylinder side wall.
  • the gap width is selected so that there is sufficient gas flow between the gas inlet and the compression space during the suction stroke, but the gas flow from the compression space to the gas inlet during the compression stroke is so low that it does not significantly impair the efficiency of the pump.
  • the gap between the piston side wall and the cylinder side wall is at the same time a compensating line and a valve. This is guaranteed for gap widths of 10 to 100 ⁇ , whereby the gap width must be less than 50 ⁇ m for differential pressures of more than 100 mbar.
  • a storage space is preferably provided in the piston in the course of the compensation line.
  • the storage space is filled at a piston position around the dead center between the suction stroke and the compression stroke, so that a pressure equalization between the storage space and the compression space can take place immediately at the beginning of the suction stroke through the piston end wall, while at the same time the gas inlet is closed.
  • the compensating line and the valve are preferably formed by a substantially axial groove in the piston side wall or in the cylinder side wall.
  • the groove can run axially, but can also be inclined in the form of a Helix be formed in the piston side wall or the cylinder side wall. In this way, too, a compensation line is formed which does not require mechanical elements and is easy to manufacture.
  • the valve effect results from a corresponding choice of the cross section of the groove, which is selected so that sufficient pressure compensation is ensured during the suction stroke, but no excessive backflow losses occur during the compression stroke.
  • the valve is designed as a throttle.
  • the valve is therefore realized without moving parts, which achieves high reliability and low manufacturing costs.
  • FIG. 1 shows a first exemplary embodiment of a piston vacuum pump with a compensating line and valve arranged in the piston and at the point of death of the piston between the compression stroke and the suction stroke,
  • 3 shows a second exemplary embodiment of the piston vacuum pump with a circumferential gas inlet groove
  • 4 shows a third embodiment of the piston vacuum pump with a circumferential gas inlet groove in the piston side wall
  • Fig. 5 shows a fourth embodiment of the piston vacuum pump with a gap forming the compensating line and the valve between the piston side wall and the cylinder side wall, and
  • Fig. 6 shows a fifth embodiment of a piston vacuum pump, in which the compensating line and the valve is formed by an axial groove in the piston side wall.
  • FIGS. 1-6 each show a piston-cylinder arrangement 10, 50, 60, 70, 80 of a piston vacuum pump, essentially only the region of the piston and the cylinder being shown here, but not the piston drive.
  • the piston vacuum pumps shown can be designed in one stage, ie with a single piston and a single cylinder, but the piston vacuum pump can also be formed with two pistons formed by a piston body, which form two compression spaces.
  • the compression spaces can be connected in series to form a two-stage piston vacuum pump, but can also be connected in parallel to one another.
  • They are piston vacuum pumps with a small pump volume, ie with a pump volume of less than 4.0 m 3 / h and a piston or cylinder diameter of less than 50 mm.
  • the piston-cylinder arrangement 10 of FIGS. 1 and 2 is essentially formed by a piston 12 which is circular in cross section and which is arranged to be movable in the axial direction in a circular cylinder 14.
  • the piston-cylinder arrangement 10 is constructed symmetrically to a transverse plane, so that a single piston body forms two pistons 12, 12 '. Both pistons 12, 12 'and the two associated cylinders 14 are mirror images of the central transverse plane.
  • the cylinder 14 is essentially formed by a cylinder side wall 16 and a cylinder exhaust valve 18, which forms the cylinder bottom.
  • the cylinder exhaust valve 18 is formed by a flat valve plate 20 and a compression spring 22 which biases the valve plate 20 into its closed position.
  • the piston 12 is a hollow body and has a cylindrical piston side wall 24 and a flat piston end wall 26.
  • the piston 12 oscillates in the cylinder 14 between two dead centers between a suction stroke and a compression stroke or a compression stroke and a suction stroke.
  • the dead center between a compression stroke and a suction stroke is shown in FIG. 1.
  • two gas inlets 30 are provided, which are arranged to a certain extent axially away from the cylinder bottom, ie from the valve plate 20.
  • the two opposing gas inlets 30 are arranged so far away from the cylinder base that they are closed by the piston during the suction stroke and compression stroke, as shown in FIG. 2, as long as the piston is at its dead center between the suction stroke and the compression stroke has not reached. Only at this dead center has the piston 12 with its piston end wall 26 completely passed the gas inlets 30, so that the gas from the gas inlets 30 can flow directly into the compression space 28 formed by the piston 12 and the cylinder 14. As soon as the piston 12 begins the compression stroke, it closes the gas inlets 30 again with its piston side wall 24.
  • the piston 12 has two piston side wall openings in its side wall 24. 32, which open into a piston cavity, which forms a storage space 34.
  • an end wall opening 36 is provided which, together with a spring tongue 38 fastened on the outside on the end wall 26, forms a check valve 40.
  • the check valve 40 opens as soon as the gas pressure in the piston storage space 34 is above the gas pressure in the compression space 28. This is the case during the suction stroke of the piston 12 shown in FIG. 2, so that a pressure equalization takes place between the storage space 34 and the compression space 28 during the suction stroke.
  • the check valve 40 remains closed.
  • the check valve 40 is closed and the gas in the compression space 28 is compressed.
  • the cylinder exhaust valve 18 opens and flows out of the compression space 28 out.
  • the piston reaches the dead center shown in FIG. In this piston position, the two gas inlets 30 are aligned with the piston side wall openings 32, so that pressure equalization takes place and gas flows into the storage space 34.
  • the suction stroke which is shown in FIG. 2, then begins. The gas inlets 30 and the side wall openings 32 are no longer in alignment with one another, so that no more gas can flow into the storage space 34.
  • the check valve 40 opens, so that gas flows from the storage space 34 into the compression space 28. This avoids a strong negative pressure in the compression space 28 during the suction stroke, so that the drive power required for this is relatively small.
  • the piston 12 no longer closes the gas inlet 30, so that gas flows from the gas inlet 30 directly into the compression space 28.
  • the piston 12 closes the gas inlets 30 with respect to the compression space 28 again. The check valve 40 is closed again during the subsequent compression stroke.
  • FIG. 3 shows a similar piston-cylinder arrangement 60, in which, in contrast to the embodiment in FIG. 3, an annular groove 62 is embedded in the cylinder side wall 24.
  • the ring groove 52.62 extend axially over a multiple of the width of the gas inlet 30.
  • the piston side wall openings 32 and the piston storage space of the piston-cylinder arrangements of FIGS. 1-4 form an equalization line for equalizing the (negative) pressure in the compression space 28 during the suction stroke of the piston 12.
  • the compensating line is designed differently than in the piston-cylinder arrangements 10, 50, 60 of FIGS. 1-4.
  • the compensating line is designed as a gap 72 between the side wall 73 of the piston 74 and the side wall 75 of the cylinder.
  • the gap 72 has a gap width of approximately 50 ⁇ m. However, the gap width can also be larger or smaller and depends on how large the pressure differences between the gas inlet 30 and the compression space 28 are. Due to its throttling effect, the gap 72 also forms a valve, so that the gap 72 forms both the compensating line and the valve.
  • the gap width is chosen to be so small that the backflow losses during the compression stroke of the piston 74 are as small as possible. However, the gap width is chosen so large that a certain pressure equalization takes place between the gas inlet 30 and the compression space 28 during the suction stroke.
  • the compensating line and the valve are designed as an axial groove 82 in the piston side wall 84.
  • the compensating line and the valve can also be designed as an axial groove in the cylinder side wall.
  • the cross section of the axial groove 82 is selected such that there is sufficient pressure compensation between the gas inlet 30 and the compression space 28 during the suction stroke of the piston 86, but the backflow losses between the compression space 28 via the groove 82 into the gas inlet 30 occur during the compression stroke of the piston 86 be small.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Abstract

L'invention concerne une pompe à vide à piston pourvue d'un cylindre (14) et d'un piston (12) formant avec ce cylindre (14) une chambre de compression (28). Le piston (12) oscille dans le cylindre (14) selon une course de compression et une course d'admission. Un orifice d'admission de gaz (30) est formé dans une paroi latérale (16) du cylindre (14), ledit orifice (30) étant obturé par le piston (12) au début de la course d'admission et ouvert à la fin de cette course. Ladite invention concerne également une conduite de compensation et une soupape, par l'intermédiaire desquelles du gaz passe de l'orifice d'admission de gaz (30) à la chambre de compression (28) au début de la course d'admission. L'objectif de cette invention était de fournir un ensemble conduite de compensation/soupape simple. Selon ladite invention, le piston constitue sensiblement cet ensemble conduite de compensation/soupape. Ainsi, la soupape peut agir au niveau de la paroi latérale du piston, de sorte que le volume perdu est minimisé.
PCT/EP2004/003833 2003-04-25 2004-04-10 Pompe a vide a piston WO2004097220A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04726853A EP1618304A1 (fr) 2003-04-25 2004-04-10 Pompe a vide a piston
US10/553,764 US20060280634A1 (en) 2003-04-25 2004-04-10 Piston vacuum pump
JP2006505088A JP2006524773A (ja) 2003-04-25 2004-04-10 ピストン真空ポンプ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10318735A DE10318735A1 (de) 2003-04-25 2003-04-25 Kolbenvakuumpumpe
DE10318735.9 2003-04-25

Publications (1)

Publication Number Publication Date
WO2004097220A1 true WO2004097220A1 (fr) 2004-11-11

Family

ID=33154410

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/003833 WO2004097220A1 (fr) 2003-04-25 2004-04-10 Pompe a vide a piston

Country Status (5)

Country Link
US (1) US20060280634A1 (fr)
EP (1) EP1618304A1 (fr)
JP (1) JP2006524773A (fr)
DE (1) DE10318735A1 (fr)
WO (1) WO2004097220A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2514453C1 (ru) * 2012-10-25 2014-04-27 Открытое акционерное общество "Центральный научно-исследовательский институт автоматики и гидравлики" (ОАО "ЦНИИАГ") Поршневой насос с газосепаратором
RU2561961C1 (ru) * 2014-05-07 2015-09-10 АКЦИОНЕРНОЕ ОБЩЕСТВО "Центральный научно-исследовательский институт автоматики и гидравлики" (АО "ЦНИИАГ") Поршневой насос с газовыпускным всасывающим клапаном
DE102017102324A1 (de) * 2017-02-07 2018-08-09 Nidec Gpm Gmbh Ölfreie Vakuumpumpe mit prismatischem Kolben und dementsprechender Kompressor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2040361A (en) * 1978-12-22 1980-08-28 Pierburg Gmbh & Co Kg Double-acting vacuum pump
DE19634518A1 (de) * 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenpumpe mit Entlastungsventil
DE19634517A1 (de) * 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslaßventil

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH36446A (de) * 1906-03-10 1907-01-15 A Freundlich Eisenmaschinenkompressor
DE2006824A1 (de) * 1970-02-14 1971-08-26 Stelzer, Frank 6450 Hanau Kolbenkompressor
DE3116534A1 (de) * 1981-04-25 1982-11-18 Pierburg Gmbh & Co Kg, 4040 Neuss Kolbenvakuumpumpe

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2040361A (en) * 1978-12-22 1980-08-28 Pierburg Gmbh & Co Kg Double-acting vacuum pump
DE19634518A1 (de) * 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenpumpe mit Entlastungsventil
DE19634517A1 (de) * 1996-08-27 1998-03-05 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslaßventil

Also Published As

Publication number Publication date
EP1618304A1 (fr) 2006-01-25
US20060280634A1 (en) 2006-12-14
JP2006524773A (ja) 2006-11-02
DE10318735A1 (de) 2004-11-11

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