WO2004086126A1 - Modulateur optique de guide d'ondes - Google Patents

Modulateur optique de guide d'ondes Download PDF

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Publication number
WO2004086126A1
WO2004086126A1 PCT/JP2003/003540 JP0303540W WO2004086126A1 WO 2004086126 A1 WO2004086126 A1 WO 2004086126A1 JP 0303540 W JP0303540 W JP 0303540W WO 2004086126 A1 WO2004086126 A1 WO 2004086126A1
Authority
WO
WIPO (PCT)
Prior art keywords
waveguide
optical
electrode
waveguides
signal
Prior art date
Application number
PCT/JP2003/003540
Other languages
English (en)
Japanese (ja)
Inventor
Masaki Sugiyama
Original Assignee
Fujitsu Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2003/003540 priority Critical patent/WO2004086126A1/fr
Priority to JP2004569917A priority patent/JP4376795B2/ja
Publication of WO2004086126A1 publication Critical patent/WO2004086126A1/fr
Priority to US11/057,141 priority patent/US6980706B2/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure
    • G02F1/2255—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference in an optical waveguide structure controlled by a high-frequency electromagnetic component in an electric waveguide structure

Definitions

  • the present invention relates to a waveguide-type optical modulator that modulates the intensity (power) of light output from a light source. Old days! : Technology
  • optical transmitters are being put to practical use in which an external modulator, which in principle is unlikely to cause chabing, acts on CW (continuous wave) light from a light source.
  • This type of external modulator forms a Mach-Zehnder interferometer by forming an optical waveguide with a predetermined pattern on a waveguide substrate, and a waveguide in which an electrode for applying an electric field is provided.
  • Type optical modulators are known.
  • the waveguide type optical modulator includes a first Y-branch optical waveguide for providing an input port, a second Y-branch optical waveguide for providing an output port, and first and second Y-branch optical waveguides. Between the first and second optical waveguides, the first and second signal electrodes provided on the first and second optical waveguides, respectively, and the first and second signal electrodes. And a ground electrode for applying an electric field to the first and second optical waveguides together with the first and second signal electrodes.
  • the light whose power is bisected by the first Y-branch optical waveguide propagates through the first and second optical waveguides, and is in-phase by the second Y-branch optical waveguide (the phase difference is 2 ⁇ ⁇ (where ⁇ is an integer)) )),
  • the optical output is turned on, and when the optical output is merged in the opposite phase (phase difference of (2 ⁇ + 1) ⁇ ), the optical output is turned off.
  • FIGS. 1A and 1B there are shown a plan view and a b-b cross-sectional view of a conventional waveguide type optical modulator constituted by using a Z-cut LiNb ⁇ 3 substrate.
  • This optical modulator comprises a Y-branch optical waveguide 4 that provides an input port 2, a Y-branch optical waveguide 8 that provides an output port 6, and optical waveguides 10 and 1 that connect the Y-branch optical waveguides 4 and 8. 2 and are formed on a waveguide substrate 14.
  • the detailed structure and operating principle are explained based on the manufacturing process.
  • L i N b O 3 waveguide substrate 1 4 waveguide on 4 consisting of 8, 1 0 ⁇ Pi 1 2 in the same shape as in a state of putter Jung the T i 1 0 5 0 ° C
  • the waveguides 4, 8, 10, 10 and 12 having a high refractive index are formed by heating and diffusing by heating for 10 hours.
  • a transparent layer is formed on each of the waveguides 4, 8, 10 and 12.
  • S i 0 2 is formed as a buffer layer 20 with a thickness of 0.2 to 1.. ⁇ , and electrodes 16 and 18 of Au having a thickness of 3 to 20 / im are formed thereon. Is formed.
  • the ends of the signal electrode 10 and the ground electrode 12 are connected by a resistor R to form a traveling wave electrode, and several GHz to
  • a microwave input signal V such as 100 GHz is applied to generate an electric field 22 between the electrodes 16 and 18, the refractive index of the optical waveguides 16 and 18 becomes + ⁇ Therefore, the input light having the wavelength ⁇ is output from the output port 6 in a state where the input light V is modulated on and off by the input signal V.
  • the waveguide substrate sometimes acts as a resonance box for the microwave aperture, and the microwave in a specific frequency band resonates, and the frequency response characteristic is reduced. May deteriorate. That is, as shown in FIG. 2, for example, a dip occurs in the frequency response characteristic in a graph representing the relationship between the transmission loss from the input to the output of the optical modulator and the frequency.
  • Patent Document 2
  • an object of the present invention is to provide a waveguide type optical modulator having a structure capable of effectively suppressing a dip in the frequency response characteristic in a dual drive type optical modulator having two pairs of signal electrodes.
  • the first Y-branch optical waveguide that provides an input port, the second Y-branch optical waveguide that provides an output port, and the first and second Y-branch optical waveguides are connected.
  • a waveguide type optical modulator comprising: a first and a second signal electrode; and a ground electrode for applying an electric field to the first and the second optical waveguides.
  • the ground electrode includes a central ground electrode provided between the first and second optical waveguides, and the central ground electrode has an opening.
  • the central ground electrode provided between the first and second optical waveguides has an opening, the characteristics of the waveguide substrate as a microphone open-wave resonance box are improved, The dip in the frequency response characteristics can be effectively suppressed.
  • the first and second signal electrodes are provided independently, dual drive becomes possible by using these as traveling-wave electrodes, respectively.
  • 1A and 1B are a plan view and a sectional view, respectively, of a conventional single-drive type optical modulator
  • Figure 2 is a graph showing the relationship between transmission loss and frequency of the optical modulator shown in Figures 1A and 1B;
  • Figure 3 is a plan view of a conventional dual-drive optical modulator
  • FIG. 4 is a plan view showing a first embodiment of the optical modulator according to the present invention.
  • FIG. 5 is a plan view showing a second embodiment of the optical modulator according to the present invention.
  • FIG. 6 is a plan view showing a third embodiment of the optical modulator according to the present invention.
  • FIG. 7 is a graph showing the relationship between the transmission loss and the frequency of the optical modulator according to the embodiment of the present invention.
  • FIG. 3 there is shown a plan view of a conventional dual-drive type optical modulator.
  • the Y-branch optical waveguides 4 and 8 and the optical waveguides 10 and 12 formed on the waveguide substrate 14 are the same as those shown in FIGS. 1A and 1B.
  • Signal electrodes 16 1 and 16 2 are provided on the optical waveguides 10 and 12 in a traveling wave form, respectively.
  • Ground electrodes 18 1 and 18 2 are formed on both sides of the signal electrodes 16 1 and 16 2, and a central ground electrode 18 between the signal electrodes 16 1 and 16 2. 3 is formed.
  • FIG. 4 is a plan view showing a first embodiment of the waveguide type optical modulator according to the present invention.
  • Y-branch optical waveguides 4 and 8 and optical waveguides 10 and 12 are formed on waveguide substrate 14, and signal electrodes 16 1 and 16 2 are formed on optical waveguides 10 and 12, respectively.
  • signal electrodes 16 1 and 16 2 are formed on optical waveguides 10 and 12, respectively. This is the same as that shown in Fig. 3 in that it is provided in a traveling wave type.
  • each electrode is arranged as follows in order to obtain the configuration of the center ground electrode which is a feature of the present invention. That is, the ground electrodes 1884 and 1885 are provided so as to sandwich the signal electrode 161, and the ground electrodes 1886 and 1887 are provided so as to sandwich the signal electrode 162. ing. There is a gap 24 between the signal electrodes 16 1 and 16 2 between the ground electrodes 18 5 and 18 7 where no electrode is formed. Therefore, the ground electrodes 185 and 187 correspond to the center ground electrode, and the gap 24 corresponds to the opening of the center electrode.
  • the central ground electrode located between the signal electrodes 16 1 and 16 2 is composed of the two ground electrodes 18 5 and 18 6, and a gap 2 4 (opening) is formed between them.
  • the characteristics of the waveguide substrate 14, which also functions as a microphone mouth-wave resonance box, differ from those of the prior art shown in FIG. 3, and the dip in the frequency response characteristics is effectively reduced. Can be suppressed.
  • Waveguide substrate 1 For example, the thickness at the 4 0 mm X 2 mm size is provided a L i N b 0 3 of the surface of 1 mm by the child mirror polishing.
  • Ti is vacuum-deposited on the waveguide substrate 14 to a thickness of about 100 nm, and is processed by a normal photoetching method so that a portion corresponding to the waveguide remains. in a 1 0-hour heating to T i that is thermally diffused into L i N b 0 3, Y branching optical waveguide 4 ⁇ Pi 8 and the optical waveguide 1 0 ⁇ Pi 1 2 is formed.
  • a buffer layer composed of S i ⁇ 2 is vacuum-deposited with a thickness of, for example, 500 nm, Then, for example, Au having a thickness of 15 O nm is deposited as a metal underlayer. Thereafter, the metal underlayer other than the electrode formation region is removed by photoetching.
  • a resist having the same thickness as the electrode to be formed is spin-coated on the waveguide substrate 14 processed in this manner, and the resist is formed in a region other than the electrode forming region by a usual photolithographic method. Form a pattern. Then, an Au plating is applied on the metal base layer on which the resist pattern is not formed, for example, to a thickness corresponding to the upper surface of the resist pattern, and the signal electrodes 16 1 and 16 2 and the ground electrode 1 are formed. 8 4 to 1 8 7 are formed.
  • FIG. 5 is a plan view showing a second embodiment of the waveguide type optical modulator according to the present invention.
  • the distance between the optical waveguides 10 and 12 is relatively large, and accordingly, the optical waveguides 10 and 12 are parallel to each other and are curved portions connecting these to the Y-branch optical waveguides 4 and 6. Consists of
  • the signal electrodes 16 3 and 16 4 formed on the optical waveguides 10 and 12 are not only parallel portions of the optical waveguides 10 and 12 but also curved portions. It is also formed on the substrate, whereby the length of the waveguide substrate 14 can be shortened.
  • Ground electrodes 188 and 189 are formed on both sides of the signal electrodes 163 and 164, respectively, and a central ground electrode 190 between the signal electrodes 163 and 164 is formed. It is formed.
  • the center ground electrode 190 has an opening 26 characteristic of the present invention.
  • the characteristics of the waveguide substrate 14 acting as a microwave resonance box are different from those of the prior art shown in FIG. 3, and the dip in the frequency response characteristics is effectively reduced. Can be suppressed.
  • FIG. 6 is a plan view showing a third embodiment of the waveguide type optical modulator according to the present invention.
  • the Y-branch optical waveguides 4 and 8 and the optical waveguides 10 and 12 are formed on the waveguide substrate 14 .
  • the signal electrodes 16 5 and 16 6 and the contact The ground electrodes 19 1 and 19 2 and the center ground electrode 19 3 are formed.
  • An opening 26 is provided in the center ground electrode 1993.
  • both ends 1 65 A and 1 65 B of signal electrode 1 65 are connected to facilitate electrical wiring of the microwave circuit associated with signal electrodes 1 65 and 1 66. It is exposed on both sides of the waveguide substrate 14, and both ends 1666A and 1666B of the signal electrode 166 are exposed on the side where one end 165B of the signal electrode 165 is exposed.
  • the shape of the signal electrodes 165 and 166 becomes asymmetric, and there is a concern about delay of the microphone mouth wave.
  • one of the signal electrodes 166 A delay section 166C is formed near one end 166B of the first section.
  • Microphone mouth waves for modulation are supplied to signal electrodes 165 and 166 formed in the form of traveling waves from ends 165B and 166B, respectively.
  • ground electrodes 19 1 to 19 3 are provided so as to sandwich the optical waveguide 12 with the first and second portions W 1 and W 2 provided so as to sandwich the optical waveguide 10. And third and fourth portions W 3 and W 4, and their widths are set substantially equal. This stabilizes the mode of the microphone mouth wave propagating through the signal electrodes 165 and 166, and can effectively suppress the dip in the frequency response characteristic.
  • the first and second signal electrodes and the ground electrode are provided substantially symmetrically with respect to the center line of the waveguide substrate in the light propagation direction as in the first and second embodiments. Thereby, the dip in the frequency response characteristic can be suppressed more effectively.
  • the dip in the frequency response characteristic is further improved. Can be suppressed. >
  • FIG. 7 is a graph showing the relationship between the transmission loss and the frequency of the waveguide optical modulator according to the embodiment of the present invention. In comparison with the characteristics shown in Fig. 2, it is clear that dips in the frequency response characteristics are effectively suppressed. Industrial applicability

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

L'invention concerne un modulateur optique de guide d'ondes comprenant un premier guide d'ondes optique à ramification en Y fournissant un port d'entrée, un second guide d'ondes optique de ramification en Y fournissant un port de sortie, les premier et second guides d'ondes croisant les premier et second guides d'ondes optiques en ramification en Y, des première et seconde électrodes de signal fournies sur les premier et second guides d'ondes optiques, et une électrode de mise à la terre destinée à créer une différence potentielle entre l'électrode de mise à la terre et la première électrode de signal et une différence potentielle entre l'électrode de mise à la terre et la seconde électrode et à appliquer, avec les première et seconde électrodes, un champ électrique aux premier et second guides d'ondes. L'électrode de mise à la terre comporte une électrode de mise à la terre centrale venant entre les premier et second guides d'ondes et l'électrode de mise à la terre centrale présente une ouverture. Grâce à cet agencement, tant que l'électrode de mise à la terre centrale venant entre les premier et second guides d'ondes présente une ouverture, les caractéristiques du substrat de forme d'onde tenant lieu de boîtier de résonance micro-ondes sont améliorées et la crevasse de la caractéristique de réponse de fréquence peut être efficacement supprimée.
PCT/JP2003/003540 2003-03-24 2003-03-24 Modulateur optique de guide d'ondes WO2004086126A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2003/003540 WO2004086126A1 (fr) 2003-03-24 2003-03-24 Modulateur optique de guide d'ondes
JP2004569917A JP4376795B2 (ja) 2003-03-24 2003-03-24 導波路型光変調器
US11/057,141 US6980706B2 (en) 2003-03-24 2005-02-15 Waveguide optical modulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/003540 WO2004086126A1 (fr) 2003-03-24 2003-03-24 Modulateur optique de guide d'ondes

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/057,141 Continuation US6980706B2 (en) 2003-03-24 2005-02-15 Waveguide optical modulator

Publications (1)

Publication Number Publication Date
WO2004086126A1 true WO2004086126A1 (fr) 2004-10-07

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JP (1) JP4376795B2 (fr)
WO (1) WO2004086126A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041469A1 (fr) * 2007-09-28 2009-04-02 Sumitomo Osaka Cement Co., Ltd. Modulateur du type guide d'onde
JP2010134115A (ja) * 2008-12-03 2010-06-17 Anritsu Corp 光変調器
JP2012212028A (ja) * 2011-03-31 2012-11-01 Sumitomo Osaka Cement Co Ltd 進行波型光変調素子
JP2012215678A (ja) * 2011-03-31 2012-11-08 Sumitomo Osaka Cement Co Ltd 進行波型光変調素子
JPWO2017208526A1 (ja) * 2016-06-03 2018-09-13 三菱電機株式会社 光変調器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7263901B2 (ja) * 2019-04-25 2023-04-25 住友大阪セメント株式会社 光変調器及びそれを用いた光送信装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03184014A (ja) * 1989-12-14 1991-08-12 Fujitsu Ltd 光変調器
US6192167B1 (en) * 1998-07-24 2001-02-20 Uniphase Telecommunications Products Differential drive optical modulator
US6393166B1 (en) * 2000-03-27 2002-05-21 Codeon Corporation Variable chirp modulator having three arm interferometer

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03184014A (ja) * 1989-12-14 1991-08-12 Fujitsu Ltd 光変調器
US6192167B1 (en) * 1998-07-24 2001-02-20 Uniphase Telecommunications Products Differential drive optical modulator
US6393166B1 (en) * 2000-03-27 2002-05-21 Codeon Corporation Variable chirp modulator having three arm interferometer

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041469A1 (fr) * 2007-09-28 2009-04-02 Sumitomo Osaka Cement Co., Ltd. Modulateur du type guide d'onde
JP2009086065A (ja) * 2007-09-28 2009-04-23 Sumitomo Osaka Cement Co Ltd 光導波路型変調器
JP4544479B2 (ja) * 2007-09-28 2010-09-15 住友大阪セメント株式会社 光導波路型変調器
JP2010134115A (ja) * 2008-12-03 2010-06-17 Anritsu Corp 光変調器
JP2012212028A (ja) * 2011-03-31 2012-11-01 Sumitomo Osaka Cement Co Ltd 進行波型光変調素子
JP2012215678A (ja) * 2011-03-31 2012-11-08 Sumitomo Osaka Cement Co Ltd 進行波型光変調素子
JPWO2017208526A1 (ja) * 2016-06-03 2018-09-13 三菱電機株式会社 光変調器
US10534239B2 (en) 2016-06-03 2020-01-14 Mitsubishi Electric Corporation Optical modulator

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Publication number Publication date
JP4376795B2 (ja) 2009-12-02
JPWO2004086126A1 (ja) 2006-06-29

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