WO2004061940A1 - Cassette pour substrats - Google Patents

Cassette pour substrats Download PDF

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Publication number
WO2004061940A1
WO2004061940A1 PCT/CN2003/000004 CN0300004W WO2004061940A1 WO 2004061940 A1 WO2004061940 A1 WO 2004061940A1 CN 0300004 W CN0300004 W CN 0300004W WO 2004061940 A1 WO2004061940 A1 WO 2004061940A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
support
cassette
frame
bottom frame
Prior art date
Application number
PCT/CN2003/000004
Other languages
English (en)
Chinese (zh)
Inventor
Wen-Long Shu
Original Assignee
Quanta Display Inc.
Quanta Display Japan Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quanta Display Inc., Quanta Display Japan Inc. filed Critical Quanta Display Inc.
Priority to PCT/CN2003/000004 priority Critical patent/WO2004061940A1/fr
Priority to AU2003211799A priority patent/AU2003211799A1/en
Publication of WO2004061940A1 publication Critical patent/WO2004061940A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Definitions

  • the present invention relates to a cassette for a substrate, and more particularly, to a cassette for a substrate that minimizes the degree of deformation of the substrate.
  • the cassette carrying the substrate S of the liquid crystal display and the plasma display is the cassette 1 shown in FIG. 1A.
  • the design of the conventional cassette 1 will make the substrate S appear concave in the cassette 1, as shown in FIG. 1B. As shown.
  • the robot arm R extends into the cassette 1 and lifts the substrate S, the substrate S will be convex, as shown in FIG. 1C.
  • the substrate S will be subjected to the effect of alternating stress, and the effect of the alternating stress over a long period of time will increase the possibility of structural fatigue damage to the substrate S.
  • Taiwan Patent Publication No. 357426 in addition to providing support on both sides.
  • the design of the support plate 2a is added at the rear to reduce the deformation of the substrate S, as shown in FIG. 2.
  • the conventional cassette 1 only supports the substrate through the support points on both sides. This is like placing the substrate on two parallel lines, so the substrate is prone to vibration and is unstable.
  • the use of the conventional cassette 2 is to avoid bending and deformation of the substrate, but it will cause excessive load and deformation of the support plate 2a. Because the support plate 2a is a narrow cantilever structure, the characteristics of this structure will make the support The plate 2a may be deformed. Furthermore, to avoid deformation of the support plate 2a, it is necessary to strengthen its material and change its shape. This will cause the weight and volume of the cassette 2 to increase, which will affect the handling and storage of the cassette 2 .
  • the deformation and stress of the substrate on the robot arm must also be considered. Because the robot arm must process the substrate into the machine, the design of the robot arm cannot be too complicated. Therefore, the design of the cassette must meet the minimum deformation of the substrate in the cassette, and at the same time, the substrate must also maintain the lowest deformation on the robot arm.
  • an object of the present invention is to provide a cassette for a substrate.
  • the present invention basically adopts the features detailed below to solve the above problems. That is, the present invention is applicable to a carrier substrate and includes a top frame; a bottom frame; a frame is disposed between the top frame and the bottom frame; and a stop member is disposed between the top frame and the bottom Between the frames, to prevent the substrate from detaching from the substrate cassette; and a plurality of support frames, which are oppositely disposed between the top frame and the bottom frame, and are located inside the top frame and the bottom frame, each A support frame has a plurality of support bases arranged side by side, wherein each support base has The two supporting rods protruding upward are used to carry the substrate and reduce the deformation of the substrate.
  • the support rods of each support base have different heights.
  • the support bases and the support rods are integrally formed on each support frame.
  • the support frames are locked to the top frame and the bottom frame by screws, respectively.
  • the support frames are made of a plastic material to reduce the weight of the support frames.
  • the plastic material is polyaryletherketone.
  • FIG. 1A shows a conventional substrate cassette
  • FIG. 1B is a schematic diagram showing a deformation in which a substrate is placed in a conventional substrate cassette
  • FIG. 1C is a schematic diagram showing the deformation when the substrate is lifted from a conventional substrate cassette by a robot arm.
  • FIG. 2 shows another conventional substrate cassette.
  • Fig. 3 is a perspective view showing a substrate cassette according to the present invention.
  • Fig. 4 is a front view showing a substrate cassette according to the present invention.
  • Fig. 5 is a plan view showing a support base and a support rod according to the present invention.
  • Fig. 6 is a schematic view showing that a substrate is placed on a support rod of the present invention.
  • Fig. 7 is a schematic view showing a substrate lifted from a substrate cassette by a robot arm according to the present invention.
  • the substrate cassette 100 includes a top frame 110, a bottom frame 120, a frame 130, three stopping members 140 and fourteen support frames 150.
  • the bezel 130 is disposed between the top frame 1 10 and the bottom frame 120.
  • the three stopping members 140 are disposed between the top frame 110 and the bottom frame 120 to prevent the substrate S from being separated from the substrate cassette 100.
  • the fourteen support frames 150 are oppositely disposed between the top frame 110 and the bottom frame 120 and are located inside the top frame 110 and the bottom frame 120, that is, on the opposite sides of the substrate cassette 100, respectively. Seven support frames 150 are provided, as shown in FIG. 3. These support frames 150 have a plurality of support seats 152 arranged side by side, as shown in FIG. 4.
  • These support bases 152 further have two supporting rods 154a and 154b protruding upward, for supporting the substrate S and reducing the deformation of the substrate S.
  • the support base 152 and the two support rods 154a and 154b are integrally formed on the support frame 150, and the support frame 150 is locked to the top frame 110 and the bottom frame 120 by screws (not shown), respectively.
  • the support frame 150 is made of a high-hardness plastic material, such as polyaryletherketone (PEEK).
  • PEEK polyaryletherketone
  • the support base 152 uses two support rods 154 a and 154 b having different heights.
  • the substrate S naturally exhibits a small deformation and the stress distribution is even, and becomes a static state, and then the substrate S is not prevented when it is transferred by the robot arm R Slipping occurs.
  • the substrate S is first subjected to surface coating treatment, if the surface area of the substrate S is larger, the control of the surface coating becomes more difficult, which is more obvious due to the deformation of the substrate S during storage and transportation.
  • the conventional cassette 1 would cause serious deformation of the substrate S, so the uniformity of the surface coating film would be deteriorated.
  • the substrate cassette 100 has fourteen support frames 150, the weight of the substrate S is evenly distributed among the fourteen support rods. 154a and fourteen support rods 154b, thereby reducing the problem of stress concentration of the substrate S.
  • the substrate cassette 100 of the present invention can definitely improve the shortcomings of the conventional cassette 1 through the improved support frame 150 structure.
  • the characteristics of the substrate cassette 100 of the present invention are to reduce the occurrence of serious damage of the substrate S during the transfer process.
  • the possibility of deformation may go hand in hand to minimize the frequency and extent of deformation.
  • the support base 152 of the present invention adopts a design of two support rods 154a and 154b, when the substrate S is transferred, the robot arm can be moved R is placed between the two supporting rods 154a and 154b. Because the stress distribution in the substrate S is even and the deformation is not large, the shape of the substrate S after the robot arm R lifts the substrate S is almost similar to that before the lift. As shown in FIG. 7, repeated deformation of the substrate S during the transfer process can be avoided.
  • carrying the substrate S with the two supporting rods 154a and 154b of the present invention has another advantage, that is, it can avoid the robot arm R from touching the substrate S located below when it is extended and raised.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne une cassette pour substrats. Cette cassette, qui peut soutenir des substrats, comprend un élément de bâti supérieur, un élément de bâti inférieur, un élément de bâti latéral, un élément d'arrêt et une pluralité d'éléments de support. L'élément de bâti latéral est monté entre l'élément de bâti supérieur et l'élément de bâti inférieur. L'élément d'arrêt est monté entre l'élément de bâti supérieur et l'élément de bâti inférieur pour empêcher les substrats de quitter la cassette. Les éléments de support sont placés entre l'élément de bâti supérieur et l'élément de bâti inférieur et sont opposés l'un à l'autre. Lesdits éléments de support sont placés dans l'espace compris entre l'élément de bâti supérieur et l'élément de bâti inférieur. Chacun de ces éléments de support comporte une pluralité de supports qui sont parallèles les uns aux autres, vers le haut et vers le bas, chacun de ces supports comportant deux barres de support servant à soutenir le substrat et à réduire la déformation de celui-ci.
PCT/CN2003/000004 2003-01-03 2003-01-03 Cassette pour substrats WO2004061940A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/CN2003/000004 WO2004061940A1 (fr) 2003-01-03 2003-01-03 Cassette pour substrats
AU2003211799A AU2003211799A1 (en) 2003-01-03 2003-01-03 Cassette for substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2003/000004 WO2004061940A1 (fr) 2003-01-03 2003-01-03 Cassette pour substrats

Publications (1)

Publication Number Publication Date
WO2004061940A1 true WO2004061940A1 (fr) 2004-07-22

Family

ID=32686801

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2003/000004 WO2004061940A1 (fr) 2003-01-03 2003-01-03 Cassette pour substrats

Country Status (2)

Country Link
AU (1) AU2003211799A1 (fr)
WO (1) WO2004061940A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08217183A (ja) * 1995-02-10 1996-08-27 Sharp Corp 板状体収容カセット
JPH11121580A (ja) * 1997-10-13 1999-04-30 Hitachi Ltd 板状物体の支持方法及び処理装置
JP2001110868A (ja) * 1999-10-08 2001-04-20 Ricoh Co Ltd 保管装置
US6273275B1 (en) * 1997-11-20 2001-08-14 Lg Electronics Inc. Cassette for loading glass substrates
US20020197139A1 (en) * 2001-06-26 2002-12-26 Hiroshi Chinbe Transfer device for substrate and storing device therein

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08217183A (ja) * 1995-02-10 1996-08-27 Sharp Corp 板状体収容カセット
JPH11121580A (ja) * 1997-10-13 1999-04-30 Hitachi Ltd 板状物体の支持方法及び処理装置
US6273275B1 (en) * 1997-11-20 2001-08-14 Lg Electronics Inc. Cassette for loading glass substrates
JP2001110868A (ja) * 1999-10-08 2001-04-20 Ricoh Co Ltd 保管装置
US20020197139A1 (en) * 2001-06-26 2002-12-26 Hiroshi Chinbe Transfer device for substrate and storing device therein

Also Published As

Publication number Publication date
AU2003211799A1 (en) 2004-07-29
AU2003211799A8 (en) 2004-07-29

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